TWI691011B - Substrate case, compartment, and substrate transfer container - Google Patents

Abstract

Provided to prevent scratches on the substrate, It can also reduce the size of the novel substrate box for the storage part of the type used to carry the substrate.

Substrate with a plurality of storage parts for accommodating the substrate The box (30) has a plurality of trays (10), inside the locking portions (11a to 11d) in the surface portion of one tray (10), supports the substrate (20) by being located above the tray (10) The locking projections (13b, 13d, 13f) and (13h) in the back of the other tray (10) lock the ends of the substrate (20) to hold the substrate (20).

Description

Substrate box, storage part and substrate carrier

The present invention relates to a substrate box, a storage portion constituting the substrate box, and a substrate carrier provided with the substrate box.

As mobile phones, digital AV equipment, IC cards, etc. become more functional, the mounted semiconductor silicon chips (hereinafter referred to as chips) have become smaller and thinner. Therefore, there is an increasing demand for the chip to be higher in the package Integration. For example, in an integrated circuit in which a plurality of chips are packaged at one time, represented by CSP (chip size package) or MCP (multi-chip package), thinning is required. In order to achieve high integration of the chip in the package, the thickness of the chip must be as thin as 25 to 150 μm. In this way, when conveying a highly thinned wafer substrate or the like, a box housing the substrate is used.

For example, Patent Document 1 describes that in a trench-shaped storage chamber capable of accommodating a substrate, at a position shallower than the bottom surface, an elastic film slightly covering the opening cross section is straddled, and the elastic film supports the substrate cassette of the substrate .

Patent Document 2 describes a semiconductor wafer storage box that holds a holder formed in a “ㄑ” shape with a cross section opened at the front end and sandwiches the peripheral portion of a semiconductor wafer.

Patent Document 3 describes that a holding portion that holds a peripheral portion of a disc body is provided in a storage box inside a disc storage space that stores a disc.

Patent Document 4 describes a monolithic wafer cassette, which holds a wafer peripheral edge by a lower wafer clamp and an upper wafer clamp to hold and hold the wafer when storing the wafer Wafer box in the wafer box.

Patent Document 5 describes that a frame is used to hold a tape for adhering wafers, and at the same time, when a packing member having the frame is stacked in a packing box, stacking is carried out through a buffer material to prevent damage due to transportation. The method of packing wafers when the tape is peeled off from the frame, such as impact.

[Advanced technical literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 8-17903 (published on January 19, 1996)

Patent Document 2: Japanese Patent Laid-Open No. 8-236605 (published on September 13, 1996)

Patent Document 3: Japanese Patent Laid-Open No. 2001-148417 (published on May 29, 2001)

Patent Document 4: Japanese Patent Laid-Open No. 2009-43862 (published on February 26, 2009)

Patent Document 5: Japanese Patent Laid-Open No. 2002-145380 (published on May 22, 2002)

However, in the substrate cassettes described in Patent Documents 1 to 4, the substrate is fixed by being sandwiched or held by the peripheral portions of the top and bottom surfaces of the substrate. In addition, in the technique described in Patent Document 5, the bottom surface of the substrate is fixed by dicing tape.

In the technologies described in Patent Documents 1 to 4, a part of the upper surface and the bottom surface of the substrate is in contact with the member for fixing the substrate. Therefore, when the substrate is stored in the substrate cassette and transported, there is a problem of scratches on the upper surface of the substrate. In addition, a novel substrate cassette that can store a substrate more easily than the substrate cassette described in Patent Document 5 and can prevent scratches on the substrate is more effective.

In addition, in the substrate cassettes and the like described in Patent Documents 1 to 5, since a plurality of substrates are accommodated in individual spaces, there is a problem in that when a large number of substrates are conveyed, their conveyance type becomes large.

The invention of the present invention was created in view of the above-mentioned problems, and its main object is to provide a novel substrate cassette provided with a storage portion that can prevent scratches on the upper surface of the substrate and reduce the shape of conveying the substrate.

In order to solve the above-mentioned problem, provide a A substrate box for storing a storage portion of a substrate, wherein the storage portion includes: a surface portion having a locking portion having a step that locks an end of the substrate; and The back portion is provided with a locking convex portion that locks the end portion of the substrate, supports the substrate inside the locking portion of the surface portion of one storage portion, and is provided by another The locking protrusion on the back of the storage portion locks the end of the substrate, thereby holding the substrate.

According to the present invention, the following effect can be achieved: a novel substrate box having a storage portion that can prevent scratches on the top of the substrate and can be reduced in size for conveying the substrate can be provided.

10, 10’, 10” ‧‧‧ tray (storage section)

11a, 11b, 11c, 11d

11’a, 11’c ‧‧‧ locking part

11”a, 11”b, 11”c, 11”d ‧‧‧ locking part

12, 12a, 12b, 12c, 12d, 12e‧‧‧support

12’d, 12’e‧‧‧support

12f‧‧‧Support

13a, 13c, 13e, 13g

13’a, 13’e‧‧‧ locking recess

13”a, 13”c, 13”e, 13”g ‧‧‧ locking recess

13b, 13d, 13f, 13h

13’b, 13’f ‧‧‧ locking protrusion

13”b, 13”d, 13”f, 13”h ‧‧‧ locking protrusion

14a, 14b, 14c, 14d, 14e, 14e, 14f, 14g, 14h, 14J, 14k, 14l, 14m, 14n

15a, 15b, 15c, 15d, 15e, 15e, 15f, 15g, 15h, 15i, 15J, 15k, 15l, 16a, 16b, 16c, 16d, 16e, 16f

17a, 17c, 17e, 17g

17’a, 17’e‧‧‧First contact part

17b, 17d, 17f, 17h

18a, 18b, 18c, 18d, 18e, 18f, 18g, 18h

20‧‧‧ substrate

20a‧‧‧End (substrate)

20b‧‧‧Bottom (substrate)

a1‧‧‧Chamfered part (end)

a2‧‧‧Chamfered part (end)

30, 30’‧‧‧ substrate box

40‧‧‧ Tablet (Board)

40a‧‧‧Notch (plate part)

41‧‧‧Bundle strap (belt section)

50‧‧‧ substrate carrier

FIG. 1 is a schematic diagram illustrating a storage portion related to an embodiment (first embodiment) of the present invention.

FIG. 2 is a schematic cross-sectional view illustrating a storage portion and a substrate box related to an embodiment (first embodiment) of the present invention.

FIG. 3 is a schematic cross-sectional view illustrating a storage portion and a substrate box related to an embodiment (first embodiment) of the present invention.

FIG. 4 is a schematic cross-sectional view illustrating a storage portion and a substrate box related to an embodiment (first embodiment) of the present invention.

FIG. 5 is a schematic side view illustrating a storage portion and a substrate box related to an embodiment of the present invention.

FIG. 6 is another side view illustrating the outline of the storage portion and the substrate cassette related to one embodiment of the present invention.

7 is a schematic diagram illustrating a substrate carrier related to an embodiment of the present invention.

FIG. 8 is a schematic cross-sectional view illustrating a storage portion and a substrate box related to an embodiment (second embodiment) of the present invention.

9 is a schematic diagram illustrating a storage portion related to an embodiment (third embodiment) of the present invention.

FIG. 10 is a schematic cross-sectional view illustrating a storage portion and a substrate box related to an embodiment (third embodiment) of the present invention.

[Substrate box related to the first embodiment]

Hereinafter, the substrate cassette 30 related to an embodiment (first embodiment) will be described in detail.

The substrate cassette 30 related to the present embodiment has a plurality of trays (storage parts) 10 for storing substrates shown in FIG. 1.

The substrate cassette 30 is held between the front portion of one tray 10 and the back portion of another tray 10 and holds the substrate 20 (FIGS. 2 and 3 ). The substrate cassette 30 is on the surface portion of one tray 10, while supporting a part of the bottom surface 20c of the substrate 20, and locking the substrate at the step difference of the locking portion 11c The end 20a of 20 (FIG. 2(c)). Furthermore, as shown in FIG. 2(c), in the state where the substrate 20 is supported, as shown in FIG. 3(c), by the back of the other tray 10 located above the one tray 10, the card The end 20a of the substrate 20 is stopped.

Accordingly, the substrate cassette 30 can store the substrate 20 without contacting the back portion of the tray 10 above the substrate 20 with the inner surface of the upper surface 20b of the substrate 20 (FIG. 2(c) and FIG. 3(c)). According to this, it is possible to prevent scratches on the upper surface 20b of the substrate 20 when the substrate 20 is transported.

Furthermore, the substrate cassette 30 stacks the trays 10 and the substrates 20 alternately, and thus the substrates 20 are stored one by one between the trays 10. Therefore, the substrate cassette 30 is provided in the space inside the individual substrate cassettes to store the substrates one by one, and compared to the type of stacking and transporting the substrate cassettes, the cassette body itself can be prevented from becoming bulky. Therefore, the board cassette 30 can greatly reduce the space for storing the board 20, and can reduce the type for transporting the board 20 (FIG. 2(b) and FIG. 3(b)).

In addition, when stacking another tray 10 on one tray 10, the substrate cassette 30 changes the direction of 180° parallel to the tray 10 located below each time, and stacks the trays 10 located above. Since the shape of the outer peripheral portion of the tray 10 in a plan view is slightly square, it is easy to fit the shape of the outer peripheral portion, and the trays 10 are stacked each time the direction of 180° is changed in parallel. In addition, the tray 10 may be provided with a mark (not shown) indicating a specific direction.

[Substrate]

The substrate 20 is, for example, a glass substrate having a circular shape in plan view. Furthermore, the substrate 20 is chamfered. More specifically, as shown in FIG. 2(d), the substrate 20 is chamfered from both the upper surface 20b side and the bottom surface 20c side of the entire circumference of the end portion 20a. Accordingly, the end portion 20a of the substrate 20 is provided with a chamfered portion a1 and a chamfered portion a2.

In addition, the angle of inclination of the chamfered part of the substrate stored in the substrate case is not limited to the angle shown in FIG. 2(d). Furthermore, although the substrate 20 accommodated in the substrate case 30 uses a chamfered substrate, the substrate accommodated in the substrate case related to one embodiment of the present invention is not limited to the substrate with a chamfered corner. . The substrate cassette may store, for example, substrates whose edges are chamfered.

The substrate 20 that is accommodated in the substrate case 30 and is conveyed is then taken out from the substrate case 30 to form a circuit on the upper surface 20b. Furthermore, although the substrate 20 housed in the substrate cassette 30 related to this embodiment is a glass substrate, the substrate is not limited to the glass substrate. The material of the substrate accommodated in the substrate case is not limited, and in addition to the glass substrate, a silicon substrate, a ceramic substrate, a resin substrate, etc. can be accommodated.

[tray]

FIG. 1 is a schematic diagram illustrating a tray 10 constituting a substrate cassette 30 related to this embodiment. FIG. 1(a) is a four-side view composed of a top view of a tray 10 and a side view in three directions. FIG. 1(b) is a cross-sectional view of the tray 10 taken along line AA′, and FIG. 1(c) is The cross-sectional view of the tray 10 along the arrow line BB'.

As shown in FIG. 1(a), the tray 10 has a slightly square shape in plan view. In addition, in this specification, the surface portion of the tray (storage portion) refers to the surface on the side where the locking portion, the support portion, and the locking recess are provided, and the back portion of the storage portion refers to the side on which the locking convex portion is provided Face.

As shown in FIG. 1(a), the tray 10 has locking portions 11a to 11d, support portions 12a to 12e, locking recesses 13a, 13c, 13e and 13g and first abutting portions 17a and 17c on its surface. 17e and 17g.

As shown in FIG. 1( b ), the support portions 12 a to 12 e are formed inside the step difference of the locking portion 11 a and the locking portion 11 c formed on the surface portion of the tray 10. The support parts 12a-12e are also located inside the step difference of the locking parts 11b and 11d. The tray 10 is attached to the surface of the tray 10, and locks the end 20a of the substrate 20, and supports a portion of the bottom surface 20c of the substrate 20.

As shown in FIG. 1(c), the tray 10 has locking protrusions 13b and 13f formed on the rear surface thereof. Similar to the locking protrusions 13b and 13f, the locking protrusions 13d and 13h shown in FIG. 1(a) are formed on the back surface of the tray 10. The tray 10 locks the end portion 20a of the substrate 20 by the locking convex portion formed on the rear portion thereof.

Furthermore, on the back of the tray 10, on the back side of the first contact portions 17a, 17c, 17e, and 17g in the surface portion of the tray 10, second contact portions 17b, 17d, 17f, and 17h ( Figure 1(a)).

Furthermore, the tray 10 has fitting portions 14 a to 14 n (FIG. 1, 5 and 6) for fitting when the plurality of trays 10 are aligned only in the same direction on the side portion.

The tray 10 can be formed by, for example, vacuum forming or compression molding And so on, the flat plate is formed and manufactured. The flat plate for forming the storage portion is not limited, but a flat plate made of resin is preferable, and examples include foamed polystyrene. Furthermore, the storage portion may be protected by the coating layer.

[Locking part]

The locking portions 11 a to 11 d provided in the tray 10 related to the present embodiment will be described in detail using FIGS. 1 and 2. FIGS. 2(a) to (c) are diagrams illustrating a state in which the substrate 20 is accommodated by the plurality of trays 10 according to the cross-section taken along line A-A' in FIG. 1(a).

As shown in FIG. 2(a), the step difference of the locking portions 11a and 11c is inclined so that the distance from the support portion 12e becomes wider. Similar to the locking portions 11a and 11c, the locking portions 11b and 11d are also inclined to be wider as they are further away from the support portion 12e. Furthermore, the locking portions 11a-11d are curved along the shape of the outer peripheral portion of the substrate 20 locked inside the locking portions 11a-11d (FIG. 1(a)). That is, the locking portions 11 a to 11 d of the tray 10 have a step having the same shape, and the substrate 20 is housed in the area formed inside the step.

Furthermore, from another point of view, the locking portions 11a to 11d are formed by forming the locking recesses 13a, 13c, 13e, and 13g, and the first contact portions 17a, 17c, 17e, and 17g, and will be placed on the tray The surface portion of 10 forms a step difference surrounding the substrate 20 to be supported, and is formed by notching toward the outer side of the position where the outer peripheral portion of the substrate 20 is arranged. At the surface of the tray 10, a total of four notches at the locking portions 11a to 11d are formed, and the notches facing each other become a region sandwiching the support substrate 20 on the surface of the tray 10 The domain becomes a symmetrical shape.

The step difference of the locking portions 11a to 11d formed as described above is a position separated from the center of gravity of the substrate 20 at equal intervals when the substrate 20 is held, and is provided at the position of the end portion 20a of the locking substrate 20 . Furthermore, the distance between one of the locking portions adjacent to each other and the other locking portion are equal (FIG. 1(a)). Therefore, as shown in FIG. 2(a), when a plurality of trays 10 are stacked, each time the trays 10 are stacked in parallel by changing the direction by 180°, the locking portions 11a and the locking having the same shape are exchanged. Since the arrangement of the portion 11c is only exchanged for the arrangement of the locking portion 11b and the locking portion 11d having the same shape, the locking portion 11a to 11d does not change the end portion 20a of the locking substrate 20. Therefore, as shown in FIG. 2( b ), the substrate cassette 30 composed of a plurality of trays 10 can lock the substrates 20 one by one in the same state on the surface of each tray 10.

[Support]

In the tray 10 related to the present embodiment, the supporting portion 12 is composed of the supporting portions 12a to 12e. The shapes of the trays 10 in plan view are such that the center of gravity of the substrate 20 when the substrate 20 is held is A round complex convex part in the center (Fig. 1(a) and (b)). Accordingly, the support portions 12 a to 12 e are formed on the surface portion of the tray 10 and support a part of the bottom surface 20 c of the substrate 20 (FIGS. 2 and 3 ). Therefore, in the surface portion of the tray 10, the area of the bottom surface 20c of the support substrate 20 can be reduced, and the bottom surface 20c of the substrate 20 is less likely to be scratched. In addition, the support portions 12a to 12e are formed by round convex portions, and they are round complex convex portions centered on the center of gravity of the substrate 20 Part, the substrate 20 can be equally supported from the bottom surface 20c.

[Locking recess]

1 and 3, the locking recesses 13a, 13c, 13e, and 13g provided in the tray 10 related to this embodiment and the first contact portions 17a, 17c, 17e, and 17g will be described in more detail. .

FIG. 3(a) is a diagram illustrating a state in which the substrate 20 is accommodated by the plurality of trays 10 according to the cross-section taken along the line B-B' in FIG. 1(a).

As shown in FIG. 3(a), the mutually facing locking recesses 13a and 13e are inside the gaps at the four places where the locking portions 11a to 11d are formed, sandwiching the area of the tray 10 that supports the substrate 20 They are arranged symmetrically (Figure 1 (a) and (c)). Furthermore, the locking recesses 13a and 13e are respectively sandwiched by diagonal lines passing above the locking recess 13a and the locking recess 13e in the slightly square tray 10 (that is, B-B shown in FIG. 1(a) 'Line) and become an asymmetric shape.

Furthermore, as shown in FIG. 3(a), the mutually facing locking concave portions 13a and 13e are the stepped portions of the locking portions 11a to 11d, so as to be located on the side farther from the held substrate 20 than The step difference is formed in such a manner that the step difference on the side close to the substrate 20 is relatively low. Here, the concave portions of the locking concave portions 13a and 13e are formed at positions lower than the support portions 12a to 12e when the tray 10 is horizontally arranged. Therefore, by holding the end portion 20a of the substrate 20 and placing the hand in any one of the locking recesses 13a and 13e, the substrate 20 can be well arranged at the inside of the locking portions 11a to 11d for support Department 12a~12e. Furthermore, if you put your hand When one of the locking recesses 13a and 13e is inserted to hold the end 20a of the substrate 20, the substrate 20 surrounded by the locking portions 11a to 11d can be taken out end to end.

In addition, the locking recesses 13c and 13g are the same as the locking recesses 13a and 13e, and are arranged to face each other, and are arranged symmetrically with the area of the support substrate 20 sandwiched on the surface of the tray 10 (FIG. 1(a) and ( c)). Further, the locking recesses 13a and 13e are asymmetrical across the diagonal line (not shown) passing through the center of gravity of the substrate 20 supported by the locking recess 13a, the locking recess 13e, and the surface of the tray 10, respectively. Sexual shape. Furthermore, the locking recesses 13c and 13g are the steps of the locking portions 11a to 11d, and are located closer to the substrate 20 than the steps located on the side away from the substrate 20 to be held. The recess is formed in a way that the level difference is relatively low. Therefore, even in the locking recesses 13c and 13g, it is of course the same as the locking recesses 13a and 13e, and can be used for the placement or removal of the substrate 20 on the surface portion of the tray 10.

[First contact part]

The first contact portions 17a, 17c, 17e, and 17g are formed adjacent to the locking recesses 13a, 13c, 13e, and 13g along the shape of the outer periphery of the substrate 20 held in the plan view of the tray 10, respectively. .

The first contact portions 17a and 17e facing each other inside the gaps at the four places where the locking portions 11a to 11d are formed are arranged symmetrically with the area supporting the substrate 20 sandwiched between the surface portions of the tray 10 (FIG. 1(a)).

In addition, as shown in FIG. 3(a), it is cut along the arrow line B-B’ In the surface, the first abutting portions 17a and 17e facing each other are provided on the deeper side of the paper than the locking recesses 13a and 13e, and when the tray 10 is horizontally arranged, they are provided in the recesses of the locking recesses 13a and 13e High, lower than the support parts 12a~12e.

In addition, the first abutting portions 17c and 17g facing each other are the same as the first abutting portions 17a and 17e, and are arranged symmetrically with the area supporting the substrate 20 sandwiching the surface portion of the tray 10, when the tray 10 is horizontally arranged It is arranged at a position higher than the recesses of the locking recesses 13c and 13g and lower than the support portions 12a to 12e.

[Locking protrusion]

As shown in FIG. 3(a), the locking convex portions 13b and 13f are convex portions formed by protruding the back surfaces of the locking concave portions 13a and 13e, as the convex portions fitted into the locking concave portions 13a and 13e unit.

Further, the locking convex portion 13b and the locking convex portion 13f are respectively sandwiched in a slightly square tray 10, passing through the diagonal line above the locking convex portion 13b and the locking convex portion 13f (that is, FIG. 1(a ) Shown in the BB' line) into an asymmetric shape.

In addition, the two opposing surfaces of the locking protrusions 13b and 13f are curved along the shape of the outer peripheral portion of the substrate 20 disposed on the front surface portion of the tray 10, and have a width as far away from the back surface portion of the tray 10 as possible Tilt (Figure 1(c)). Here, when the substrate cassette 30 holds the substrate 20, the locking protrusions 13b and 13f are in contact with each other so as to contact the chamfered portion a1 of the end 20a of the substrate 20 shown in FIG. 2(d). Set on the opposite sides With tilt.

In addition, the two opposing surfaces of the locking protrusions 13b and 13f are separated from each other at regular intervals from the center of gravity of the substrate 20 disposed on the surface of the tray 10. Therefore, even if the trays 10 are stacked each time the direction is changed 180° in parallel, the chamfering of the end portion 20a of the substrate 20 can be locked only by swapping the mutually opposing surfaces of the locking protrusions 13b and 13f Part a1 (Figure 3).

In addition, as shown in FIG. 1(a), the locking convex portions 13d and 13h are formed by protruding the back surfaces of the locking concave portions 13c and 13g to serve as the convex portions fitted into the locking concave portions 13c and 13g. In addition, the two opposing surfaces of the locking protrusions 13d and 13h are curved along the shape of the outer peripheral portion of the substrate 20 disposed on the front surface portion of the tray 10, and have a width as far as possible from the back surface portion of the tray 10 Tilt. Here, when the substrate 20 is stored in the substrate cassette 30, the two opposing surfaces of the locking protrusions 13d and 13h are provided with inclination so as to contact the chamfered portion a1 of the end portion 20a of the substrate 20. In addition, similar to the locking protrusions 13b and 13f, the locking protrusions 13d and 13h have an asymmetrical shape with a diagonal line (not shown) passing above the locking protrusions 13d and 13h. In addition, the mutually facing surfaces of the locking projections 13d and 13h are separated at equal intervals from the center of gravity of the substrate 20 arranged on the surface of the tray 10.

(Arrangement of locking concave portion, locking convex portion and first contact portion)

3 and 4, the arrangement of the locking concave portion, the locking convex portion, and the first contact portion when stacking the plurality of trays 10 will be described. Fig 4(a) to (d) are diagrams illustrating a state in which a plurality of trays 10 are stacked according to the cross-section taken along line C-C' shown in FIG. 1(a). In addition, in FIG. 4, the trays 10 are stacked in parallel by changing the direction of 180° each time. Therefore, in the three pallets 10 shown in FIGS. 4(a) and (b), the pallet 10 positioned in the middle is arranged with a cross-section according to the cross-section along the arrow line D-D'.

The locking projections 13b and 13f are in a slightly square tray 10, and a diagonal line passing through the locking projections 13b and the locking projections 13f is sandwiched (that is, BB' shown in FIG. 1(a) Line) into an asymmetric shape. Therefore, as shown in FIG. 4(a), each time the trays 10 are stacked in parallel by changing the direction of 180°, the tray 10 is positioned under the locking protrusion 13b in the uppermost tray 10, and is positioned in the center. The first contact portion 17e in the tray 10. In addition, below the locking convex portion 13f of the tray 10 located at the center, the first contact portion 17a of the tray 10 located below is arranged. Therefore, when stacking each tray 10, as shown in FIG. 4(b), a part of the locking convex portion 13b of the tray 10 located at the uppermost portion abuts on the first abutting portion in the tray 10 located at the center 17e, and the locking convex portion 13b and the locking concave portion 13a are not fitted. Similarly, the locking convex portion 13f in the tray 10 located at the center abuts on the first contact portion 17a in the tray 10 located below it, and the locking convex portion 13f and the locking concave portion 13e are not fitted.

Similarly, as shown in FIG. 4(c), each time the trays 10 are stacked parallel to each other by changing the direction of 180°, the locking projection 13h in the uppermost tray 10 is arranged below the locking protrusion 13h. The first contact portion 17c in the tray 10. In addition, under the locking convex portion 13d in the tray 10 located in the center, the first One contact portion 17g. Therefore, when stacking each tray 10, as shown in FIG. 4(d), a part of the locking convex portion 13h of the tray 10 located at the uppermost portion abuts on the first contact portion in the tray 10 located at the center 17c, and the locking convex portion 13h and the locking concave portion 13c are not fitted. Similarly, the locking convex portion 13d in the tray 10 located at the center is in contact with the first contact portion 17g in the tray 10 located below it, and the locking convex portion 13d and the locking concave portion 13g are not fitted.

In this way, at the back of the tray 10, the locking protrusions 13b, 13d, 13f, and 13h formed along the shape of the outer periphery of the substrate 20 abut the first contact on the surface of the tray 10 The contact portions 17a, 17c, 17e, and 17g can obtain a sufficient space in the region where the substrate 20 is held between the front and back portions of each tray 10 (FIG. 3(b)). In addition, as shown in FIGS. 4( a) to (d ), the second contact portions 17 b, 17 d, 17 f, and 17 h in each tray 10 abut on a part of the surface portion of the tray 10 located below these.

(Configuration of substrate 20 in substrate cassette 30)

As shown in FIGS. 4(a) to (d), between the stacked trays 10, the substrate 20 is placed between the surface of one tray 10 and the back of the other tray 10, and the substrate 20 is stored (FIG. 2( b) and Figure 3(b)).

In this state, as shown in FIG. 3(c), the locking convex portion 13b provided on the back portion of the tray 10 located above is lower than the support portion 12e of the other tray 10 located below it To contact the first contact portion 17e. Even for other locking protrusions, they are also provided At a position lower than the support portion 12e of the other tray 10 located below it, it contacts the first contact portion. Therefore, when stacking the trays, the end portions 20a of the substrate 20 are locked from the upper surface 20b side by the inclined surfaces of the locking convex portions 13b, 13d, 13f, and 13h provided on the back surface of one tray 10 In a state where the locking projections 13b, 13d, 13f, and 13h are in contact with the first abutting portion, the application of the one tray 10 (or the plurality of trays 10 and the plurality of substrates 20 stacked) can be prevented. Therefore, the end portion 20a of the substrate 20 housed in the substrate cassette 30 can be prevented from being damaged.

Furthermore, since the locking projections 13b, 13d, 13f, and 13h formed on the back surface of one tray 10, the substrates supported by the support portions 12a to 12e are locked on the surface portion of the other tray 10 located below it. The chamfered portion a1 of the end portion 20a of 20 prevents the tray 10 from contacting the upper surface 20b of the substrate 20, the substrate 20 can be held, and the upper surface 20b of the substrate 20 can be prevented from being scratched (FIG. 3(c)).

[Fitting part]

The fitting parts 14 a to 14 n provided in the tray 10 related to the present embodiment will be described in detail using FIGS. 5 and 6. 5 (a) and (b) are side views of a state where another tray 10 is stacked on one tray 10 by changing the direction of 180°. 6(a) and (b) are different side views illustrating a state in which another tray 10 is stacked on one tray 10 by changing the direction of another 180° from a side different from that of FIGS. 5(a) and (b).

The fitting portions 14a to 14n provided on the side portions of the tray 10 shown in FIGS. 5(a) and 5(a) protrude toward the front of the paper in each drawing The convex portion is formed by a concave portion formed on the back surface of the tray 10 and fitted with the convex portion. In addition, the fitting portions 14a to 14n have a convex shape having at least one two-step difference in side view.

In the side portion shown in FIG. 5(a), since the other trays 10 located on one tray 10 are arranged by changing the direction of 180°, the fitting portions 14a to 14e of the tray 10 located above and below The fitting portions 14h, 14i, and 14l to 14n of the tray 10 are arranged in the same direction. In addition, on the side portion located opposite to one of the side surfaces shown in FIG. 5(a), the fitting portions 14h, 14i, 14l to 14n are arranged on the tray 10 located above, and the fitting is arranged on the tray 10 located below Department 14a~14e. Therefore, even if any of the side portions located on the front side and the deep side of the paper in FIG. 5(a), the shape of the fitting portion does not match.

In this way, when the tray 10 is arranged in parallel by changing the 180° direction, on the other side portions shown in FIG. 6(a), the fitting portions 14e to 14h of the tray 10 located above and the tray 10 located below The fitting portions 14i to 14k and 14a are arranged in the same direction. In addition, on the side portion located opposite to the side portion shown in FIG. 6(a), the fitting portions 14i to 14k and 14a are arranged on the tray 10 located above, and the fitting portion 14e is arranged on the tray 10 located below. ~14h. Therefore, even if any of the side portions located on the front side and the deep side of the paper in FIG. 6(a), the shape of the fitting portion does not match.

That is, when the trays 10 are stacked in parallel by changing the 180° direction, the fitting portions 14a to 14n formed on the four sides of the tray 10 having a slightly square shape on the outer peripheral portion are arranged so as not to be fitted to each other.

[Third contact part]

On one of the side surfaces shown in FIG. 5(a), the fitting portions 14a to 14e, 14h, 14i, and 14l to 14n are respectively convex with two steps, and the fitting portions 14h, 14i, 14l to 14n Between the step difference of the first layer and the step difference of the second layer from the top, third contact portions 15b, 15d, 15f, and 15h are provided.

In addition, on the other side shown in FIG. 6(a), the fitting portions 14e to 14h, 14i, 14k, and 14a are respectively formed with a convex shape having at least one step difference of two layers, and the fitting portions 14i, 14k And 14a, between the step difference of the first layer and the step difference of the second layer from the top, third contact portions 16b, 16d, and 16f are provided.

As shown in FIG. 5(a), when two trays are arranged in parallel by changing the 180° direction in this way, the third contact portions 15a, 15c, 15e, and 15g provided on the tray 10 located above are arranged The third contact portions 15b, 15d, 15f, and 15h of the fitting portions 14h, 141l to 14n of the tray 10 located above are arranged in pairs.

Similarly, as shown in FIG. 6(a), the third contact portions 16a, 16c, and 16e provided on the tray 10 located above, and the fitting portions 14h, 14l~14n provided on the tray 10 located below The third contact portions 16b, 16d, and 16f are provided in pairs. In addition, even in the side portions not shown in FIGS. 5( a) and 6 (a ), the contact portions provided in the fitting portions 14 a to 14 n are arranged in pairs.

When the two upper and lower trays 10 are stacked from the state shown in FIG. 5(a), as shown in FIG. 6(b), the third contact portions 15a and 15b, the third contact The contact portions 15c and 15d, the third contact portions 15e and 15f, and the third contact portions 15g and 15h are contacted in pairs.

Similarly, from the state shown in FIG. 6(a), when the upper and lower trays 10 are overlapped, as shown in FIG. 6(b), the third contact portions 16a and 16b, the third contact portions 16c and 16d, The third contact portions 16e and 16f are contacted in pairs. Furthermore, even the side portions not shown in FIG. 5(b) and FIG. 6(b) are provided at the abutting portions of the fitting portions 14a to 14n and at the bottom surface of the side portion of the tray 10 The abutment part abuts. In this way, by contacting the third contact portions with the four side portions of the tray 10 having a slightly square shape on the outer peripheral portion, and making the step difference of the two layers of the fitting portions 14a to 14n, The step on the upper side is engaged with a part of the inner side of the fitting portions 14a to 14n of the tray 10 on the upper side, and the tray 10 on the upper side and the tray 10 on the lower side are engaged.

Further, as shown in FIG. 5(b), in a state where the third contact portions 15c and 15d are in contact with each other, as shown in FIG. 4(b), the locking convex portion 13f abuts on the first contact The contact portion 17a and the locking convex portion 13b contact the first contact portion 17e. Similarly, the third contact portions 15i and 15j are contacted in pairs. That is, in a state where the third abutting portions abut against each other, the first abutting portion and the locking convex portion abut against each other. In this way, in the substrate case 30 related to the present embodiment, the first abutting portion and the locking convex portion abut against each other. By making the paired third abutting portions abut against each other, it is possible to prevent the The weight of the upper tray 10 (or the plurality of stacked trays 10 and the plurality of substrates 20) causes the force to be excessively applied to the substrate 20 supported by the support portions 12a-12e of the tray 10 located below via the end portion 20a.

(By fitting the tray of the fitting part)

As shown in FIG. 4(c), when the two trays 10 arranged vertically are arranged in the same direction, the fitting portions 14a to 14e on the side portions of the tray 10 (on the opposite side portions are the fitting portions 14h, 14i, 14l~14n) have the same configuration. Therefore, as shown in FIG. 5(d), the two trays 10 located above and below can be fitted to each other.

Similarly, as shown in FIG. 6(c), when the two trays 10 arranged vertically are arranged in the same direction, the fitting portions 14e to 14h on the side portions of the tray 10 (on the opposite side portions are embedded The configuration of the joints 14i to 14k and 14a) are the same. Therefore, as shown in FIG. 6(d), the two trays 10 located above and below can be fitted to each other.

Furthermore, as shown in FIGS. 5(c) and 6(c), when the plurality of trays 10 are stacked in the same direction, the locking concave portion 13a and the locking convex portion 13b are engaged. Similarly, the engagement concave portion 13c and the engagement convex portion 13d, the engagement concave portion 13e and the engagement convex portion 13f, the engagement concave portion 13g, and the engagement convex portion 13h may be fitted to each other. Moreover, the concave portion formed by the step difference formed by the locking portions 11a to 11d formed on the front surface portion of the tray 10 can be fitted with the convex portion formed by the step difference on the back surface portion of the tray 10 Together.

Therefore, the plurality of trays 10 can be stored so as to overlap the plurality of trays 10 in the same direction without becoming bulky (FIG. 5(d) and FIG. 6(d)).

[Substrate Carrier]

Using FIG. 7, the substrate carrier 50 related to this embodiment will be described in more detail. FIG. 7(a) is a top view of the substrate carrier 50 related to this embodiment, and FIG. 7(b) is a side view of the substrate carrier 50 related to this embodiment.

As shown in FIGS. 7( a) and (b ), the substrate carrier 50 includes a substrate cassette 30, a pair of flat plates (plate portions) 40 and a binding belt (belt portion) 41.

In this way, the substrate cassette 30 composed of the plurality of trays 10 is held by the pair of flat plates 40, and bundled by the binding band 41. According to this, the substrate cassette 30 can be suitably transported without collapsing.

[flat]

As shown in FIG. 7( a ), the flat plate 40 has a slightly square shape in plan view, and a notch 40 a is provided in the central portion of the four sides constituting the outer circumference of the flat plate 40. The flat plate 40 is made of metal such as aluminum. The flat plate 40 is disposed above and below the substrate cassette 30 in order to prevent the substrate cassette 30 from being collapsed and to be transported while preventing damage to the substrate cassette 30 during transportation. The shape of the notch 40a is not particularly limited, and it may be a shape suitable for bundling by the bundling band 41.

By passing the binding tape 41 through the notch portion 40 a provided in the flat plate 40, it is possible to prevent the binding tape 41 from shifting in position on the flat plate 40 when the flat plate 40 grips the substrate cassette 30 up and down. Accordingly, when the substrate carrier 50 is transported, the bundle of the substrate cassette 30 can be prevented from slackening.

[Bundle]

The binding belt 41 bundles the substrate cassette 30 via the flat plate 40. The binding band 41 is not limited as long as it can bind the substrate box 30 and the pair of flat plates 40. For example, a buckle type binding band used for general packaging, or a polypropylene band welded by heating, Rubber, etc.

In the substrate carrier 50 related to the present embodiment, two binding straps are used to bundle a pair of flat plates 40 and the substrate cassette 30. In the substrate carrier 50, a flat plate 40 is arranged on the uppermost and lowermost surfaces of the substrate cassette 30 so that the binding tape passes through the notch 40a facing each other of the uppermost plate 40, and the notch 40a facing the opposite, The notch 40a facing each other in the lowermost flat plate 40 bundles the substrate cassette 30.

As shown in FIG. 7( b ), the substrate carrier 50 uses a pair of flat plates 40 to hold the substrate cassette 30 composed of the resin-made tray 10 via the uppermost and lowermost surfaces of the substrate cassette 30. According to this, it is possible to prevent the substrate box 30 from being bent due to its own weight when the substrate box 30 is lifted for carrying. Accordingly, the substrate cassette 30 can appropriately transport the substrate 20. In addition, since the substrate cassette 30 is bound by the pair of flat plates 40 by the strap 41, in order to bind the substrate cassette 30, the force applied by the strap 41 is evenly applied to the most of the substrate cassette 30 Top and bottom. Therefore, it is possible to appropriately prevent the tray 10 constituting the substrate cassette 30 from being damaged due to the force applied by the binding band 41 being concentrated on a part of the substrate cassette 30.

[Substrate box related to the second embodiment type]

The substrate cassette related to the present invention is not limited to the above-mentioned embodiment (first embodiment). For example, in a substrate box related to one embodiment (second embodiment), one tray (storage portion) supports the substrate from the bottom surface side of the substrate by the step difference of the locking portion provided on the surface portion thereof The end portion of the substrate, and the end portion of the substrate is locked from the upper side of the substrate by the locking protrusion on the back portion of the other storage portion located above the storage portion, thereby holding the substrate.

The point where the substrate cassette 30' related to the present embodiment locks the end 20a of the substrate 20 on the way of the step difference of the locking portion of the surface portion of one tray 10' is different from that of the tray 10 (FIG. 8(a) and (c)). In addition, the tray 10' is adjusted in such a manner that the end 20a of the substrate 20 that is locked in the middle of the step difference of the locking portion of one tray 10' is locked from the upper side of the substrate 20. The arrangement of the locking projections on the back of the other tray 10' located above the tray 10' is adjusted to the position of the locking recesses integrally formed by the locking projections and the front and back. Different (Figure 8(b) and (d)). Except for these two points, the tray 10' has the same arrangement as the tray 10 shown in FIG. 1 with respect to the first contact portion, the third contact portion, and the support portion.

Therefore, the tray 10' is the same as the tray 10, and can be stacked in parallel by changing the 180° direction each time. In addition, the description of the fitting portion, the first contact portion, the third contact portion, and the locking recess in the tray 10' having the same function as the tray 10 will be omitted.

As shown in FIG. 8(a), the tray 10' in the substrate cassette 30' is locked at the end of the substrate 20 from the bottom surface side in the middle of the step provided on the surface of each tray 10'. Furthermore, in the state shown in FIG. 8(a), In the surface portion of one tray 10', the end portion of the substrate 20 is locked from the upper side by the locking convex portion of another tray 10' located on the tray 10 supported at the end of the substrate 20 End (Figure 8(b)). Accordingly, the substrate 20 is accommodated between the front surface portion of one tray 10' and the back surface portion of another tray 10' located above the one tray 10' (FIG. 8(a) and (b)).

The step difference of the locking portion 11'c in one tray 10' is curved along the shape of the outer peripheral portion of the base plate 20, and has a slope which is wider as it goes away from the supporting portion 12'e. Here, the step difference of the locking portion 11'c is that when the substrate 20 is stored in the surface portion of the tray 10', it is inclined to the chamfered portion a2 of the end portion 20a in the substrate 20 shown in FIG. 2(d) It is configured in parallel. In addition, the other locking portions are the same as the locking portions 11'c shown in FIG. 8(c), and are curved along the shape of the outer peripheral portion of the substrate 20, and have a wider and wider inclination from the support portion 12'e . In addition, the steps of the other locking portions are also inclined so that they are arranged in parallel at the chamfered portion a2 of the end portion 20a of the substrate 20 shown in FIG. 2(d). In accordance with this, the end portion 20a of the substrate 20 is locked from the bottom surface 20c side of the substrate 20 via the chamfered portion a2 on the surface portion of the tray 10' (FIG. 8(c)).

Furthermore, as shown in FIG. 8(d), the locking convex portion 13'b is in a state of contacting the first contact portion 17'e, and has an inclined surface to lock the end of the substrate 20 The chamfered portion a1 of the portion 20a. In addition, like the locking convex portion 13'b, the other locking convex portion also has its inclined surface and locks the chamfered portion a1 of the end portion 20a of the substrate 20. In this state, the substrate cassette 30' is between the support portions 12'd and 12'e of the tray 10' located below and the bottom surface 20c of the substrate 20, and the upper surface 20b of the substrate 20 and the base Spaces are provided on both sides of the back portion of the tray 10' above the board 20. Therefore, the substrate cassette 30' can be contacted with the inner side of the chamfered portions a1 and a2 of the end portion 20a of the substrate 20 by the tray 10' to prevent scratches on the upper surface 20b and the bottom surface 20c of the substrate 20. Furthermore, since the first contact portion is provided even in the tray 10', it is possible to prevent the end portion 20a of the substrate 20 from being caused by the tray 10' (or the plurality of stacked trays 10' and the plurality of substrates 20) The weight causes the force to be excessively applied to the substrate 20 that is locked to the step of the locking portion of the tray 10' located below via the end portion 20a.

In addition, in the substrate cassette 30' according to this embodiment, the support portion provided in the tray 10' is not a member that is always in contact with the bottom surface 20c of the accommodated substrate 20 to support it. The support portion is preferably provided to support the substrate 20 from the back when the substrate 20 is flexed due to an impact when the substrate cassette 30' is transported, or the substrate 20 is flexed due to its own weight, or the like.

[Substrate box related to the third embodiment type]

The substrate box related to the present invention is not limited to the above-mentioned embodiments (first embodiment and second embodiment). For example, in a substrate case related to an embodiment (third embodiment), the back portion is configured to include second contact portions 18a to 18h. The second contact portions 18a to 18h are connected to the locking protrusions 13"b, 13"d, 13"f and 13"h are adjacent, and when the tray 10" is arranged horizontally, it can be higher than the lowest surface of the rear surface and lower than the highest surface of the rear surface The position is in contact with a part a~h of the highest surface in the surface part of another tray 10".

According to this, each time the direction of 180° is changed in parallel and stacked When counting the trays 10", a sufficient space can be obtained between the front and back portions of each tray 10" in the area where the substrate 20 is held.

As shown in FIG. 9(a), the tray 10" includes locking portions 11"a to 11"d with a step difference on the surface, a supporting portion 12f including a plurality of recesses r, and locking recesses 13"a, 13" c, 13"e and 13"h. The tray 10" is provided with locking protrusions 13"b, 13"d, 13"f and 13"h and second abutting portions 18a to 18g on the back portion thereof. Furthermore, the tray 10" has fitting portions 14a to 14n at the side portions similar to the tray 10 according to the first embodiment, and each fitting portion includes a third abutting portion.

In addition, since the shape and function of the fitting portion and the third abutting portion included in the tray 10" are the same as those of the tray 10 according to the first embodiment, their description is omitted. .

Fig. 9(b) is a cross-sectional view of the pallet 10" in FIG. 9(a) along the arrow line of EE'. As shown in Fig. 9(b), the pallet 10" is along the EE' arrow In the line cross section, the step difference of the locking portion 11"a and the step difference of the locking portion 11"c face each other, and have a slope that is wider as farther away from the support portion 12f. Furthermore, the step difference of the locking portion 11"b and the step difference of the locking portion 11"d in FIG. 9(a) are opposed to each other. That is, the locking portions 11"a to 11d" are not the same as the tray except that the recesses 13"a, 13"c, 13"e, and 13"g are used to form gaps in the steps of the surface portion. The locking portions 11a to 11d of 10 are the same.

Fig. 9(c) is a cross-sectional view taken along line F-F' in Fig. 9(a). As shown in FIG. 9(c), locking recesses 13"a and 13"e are formed on the surface of the tray 10". Furthermore, on the back of the tray 10", the locking recesses 13"a and 13"e's back surface protrudes to form a locking protrusion 13"b and 13"f. Furthermore, by making the locking concave portions 13"c and 13"g provided on the surface portion of the tray 10" shown in FIG. 9(a) project on the back portion, the locking convex portion 13 is formed "D and 13"h.

The locking recesses 13"a, 13"c, 13"e, and 13"g have a slightly square shape in plan view, and the locking recesses 13"a and the locking recesses 13"e sandwich the center point of the tray 10" It has a symmetrical shape, and the locking concave portion 13"c and the locking concave portion 13"g sandwich the center point of the tray 10" to become a symmetrical shape, and the other has the locking concave portion 13a in the tray 10, 13c, 13e and 13g have the same function.

Similarly, the locking protrusions 13"b, 13"d, 13"f, 13"h are not only slightly square, and the locking protrusion 13"b and the locking protrusion 13"f sandwich the tray 10" The center point becomes a symmetrical shape, the locking convex portion 13"d and the locking portion convex portion 13"h sandwich the center point of the tray 10" to become a symmetrical shape, and the other has a card with the tray 10 The protrusions 13b, 13d, 13f, and 13h have the same function.

[Support (third embodiment)]

As shown in FIGS. 9(a) to (c), in the tray 10" related to the present embodiment, the bottom surface 20c of the substrate 20 is supported by the support portion 12f provided with a plurality of recesses r. Even by this According to the configuration, the area of the bottom surface 20c of the support substrate 20 can be reduced on the surface of the tray 10". As shown in FIGS. 9(b) and (c), the concave portion r provided in the support portion 12f is formed with a protruding convex portion on the back surface of the tray 10", but the convex portion is not The upper surface 20b of the substrate 20 of the surface portion of the other tray 10" contact.

In addition, when the support portion is provided with a recessed portion, the size and number of the recessed portions may be appropriately adjusted according to the shape of the substrate to be housed and the like.

[Second contact part]

Using FIG. 10, the second abutting portion provided in the tray 10" related to this embodiment will be described in more detail. As shown in FIG. 10(a), the second abutting portions are slightly The square locking concave portions 13"a, 13"c, 13"e, and 13"h are each provided adjacent to two sides facing each other. That is, the second abutting portions respectively form locking convex portions that become slightly square 13"b, 13"d, 13"f and 13"g are each arranged adjacent to the two sides facing each other. Here, when each time the tray 10" is rotated in parallel by 180° for stacking, it is located above The second abutting portions in the tray 10" do not overlap with the second abutting portions in the other tray 10" located below, but abut on a part of the surface portion of the other tray 10".

FIG. 10(a) is a cross-sectional view along the GG arrow line according to the pallet 10" in FIG. 9(a), and a cross-sectional view along the HV' arrow line illustrating that the plurality of trays 10" per side A schematic diagram of the arrangement of the second abutting portion and a part of the surface portion of the tray 10" when the stack is rotated parallel to one side by 180°. In addition, in the three trays 10" shown in FIG. 10(a), from the top The first and third pallets 10" from the top indicate the cross section along the GG arrow line, and the second pallet 10" from the top indicates the cross section along the GG arrow line.

As shown in Fig. 10(a), when three trays 10" are rotated in parallel by 180° and arranged each time, they are placed on the upper tray 10". The second abutting portion 18g on the back side is arranged so as to be located at the highest surface of the surface portion of the tray 10" at the center, and can abut on a part d of the outer peripheral portion of the opening of the locking recess 13"g. Here, the second abutting portion 18e provided on one side of the locking recess 13"e of the tray 10" located above may be in contact with the locking recess 13"a of another tray 10" disposed in the center A part h of the outer peripheral portion of the opening abuts. Furthermore, the second contact portion 18f provided on one side of the locking recess 13"e of the tray 10" located above is configured to be able to engage with the locking recess 13"a of another tray 10" located in the center A part g of the outer peripheral portion of the opening abuts.

In this state, the second abutment portion 18a provided on the back surface of the tray 10" located in the center is arranged so as to be located on the highest surface of the surface portion of the tray 10" below, and can engage with the locking recess 13 A part a of the outer peripheral portion of the opening of "g" abuts. Here, the second abutting portion 18c provided on one side of the locking recess 13"c of the tray 10" located in the center is configured to be located below The other part of the outer peripheral part of the opening of the locking recess 13"g of the other tray 10" abuts. Furthermore, the second contact provided on one side of the locking recess 13"c of the tray 10" located in the center The contact portion 18d is configured to be able to contact with a part f of the outer peripheral portion of the opening of the locking recess 13"a of another tray 10" located in the center.

10(b) is a cross-sectional view taken along the line II-I of the tray 10" in FIG. 9(a), and a cross-sectional view taken along the line J-J' indicating that a plurality of trays 10" A schematic diagram of the arrangement of the second abutting portion and a part of the surface portion of the tray 10" when the stack is rotated parallel to one side by 180°. In addition, in the three trays 10" shown in FIG. 10(a), from the top 1st and first The three trays 10" indicate the cross section along the arrow line I-I', and the second tray 10" from the top indicates the cross section along the arrow line J-J'. That is, as shown in FIG. 10(a), when three trays 10" are stacked, as shown in FIG. 10(b), according to the section along the arrow line I-I' and the arrow along J-J' The cross section of the number line, the plural trays 10" are overlapped.

As shown in FIG. 10(b), when three trays 10" are rotated in parallel by 180° and arranged each time, the second contact provided on the back of the locking recess 13"a of the tray 10" located above The contact portion 18a is configured to be located at the highest surface of the surface portion of the tray 10" at the center, and can contact with a part a of the outer peripheral portion of the opening of the locking recess 13"e, and is configured to be the second contact The portion 18b may be in contact with a portion b of the surface portion. Similarly, the second abutment portion 18h provided on the back of the locking recess 13"g of the tray 10" located above is configured to be located on the tray at the center The highest surface of the 10" surface portion, and can abut a part c of the outer peripheral portion of the opening of the locking recess 13"g, and is configured such that the second abutment portion 18g can abut a part d of the surface portion.

In this state, the second contact portion 18e provided on the back of the locking recess 13"e of the tray 10" located in the center is arranged to be located on the highest surface of the surface portion of the tray 10" below, And it can contact with a part h of the outer peripheral part of the opening of the locking recess 13"a. Furthermore, similarly, the second contact portion 18d provided on the back of the locking recess 13"c of the tray 10" located in the center is arranged to be located on the highest surface of the surface portion of the tray 10" below, And it can contact with a part f of the outer peripheral part of the opening of the locking recess 13"g.

As described above, by arranging the second contact portions 18a to 18h, each time the trays 10" are rotated in parallel and overlapped, the second contact portions 18a to 18h are located in the locking recesses 13"a, 13"c , 13"e, 13"g opening the outer peripheral part, and can be in contact with a part of the highest surface a ~ g in the surface part of the tray 10".

In addition, even in the tray 10", as in the case of the tray 10 and the tray 10", by adjusting the arrangement of the locking portions 11"a to 11"d according to the size of the substrate 20, the end 20a of the substrate 20 is stuck It is of course possible to stop at the locking portions 11"a to 11"d.

[Substrate box related to other embodiments]

The substrate box related to the present invention is not limited to the above-mentioned embodiments (first embodiment and second embodiment). For example, the locking convex portion provided in the storage portion is not limited to two pairs of convex portions facing each other.

If the locking convex portion of the storage portion is appropriately designed to lock the end of the substrate in accordance with the shape of the outer periphery of the substrate, the arrangement and the number thereof are not limited. Similarly, the arrangement and number of locking portions of the storage portion are not limited. If the storage portion constituting the substrate cassette supports the substrate on its surface, the substrate may be held by the locking convex portion provided on the back portion of the other storage portion to lock the end of the substrate, and The arrangement and number of locking convex portions and locking portions are not limited.

Therefore, the shape of the outer peripheral portion of the substrate housed in the substrate cassette is not limited to a circle, and may be a cube or a rectangular parallelepiped. If the storage part is in accordance with the shape of the substrate, the support part, the locking part and the card are appropriately designed The reason for the shape and arrangement of the convex stop is sufficient.

In addition, in the same manner as the above-described embodiment, in the case where the storage portions located below are stacked by changing the direction of the storage portions located above, it is the center of gravity of the substrate supported by the surface portion of each storage portion The positions separated at equal intervals may be provided as long as the inclined surface of the locking projection is provided at the position of the outer peripheral end of the arrangement substrate 20. For example, in a configuration in which the substrate is locked by the locking protrusions provided at a total of 3 locations, if the surface of the substrate is locked by the locking protrusions at these 3 locations, the center of gravity of the substrate is the center The point can be placed on the circumference of the outer peripheral end of the placement substrate by changing the angle of 120° each time. In this way, in the embodiment in which the storage portions are stacked on one side in a parallel change of direction, if an inclined surface with each locking convex portion is formed, the center of gravity of the substrate to be held is taken as the center point and separated at equal intervals When the shape of the outer periphery of the substrate is followed, the number of locking protrusions formed in the storage portion is not limited.

In addition, in the substrate cassette related to another embodiment, the shape of the support portion of the storage portion is not limited to a circular shape centered on the center of gravity of the substrate 20 when the substrate 20 is held. If the shape of the supporting portion matches the shape of the supporting substrate, it may be appropriately designed, even if it is formed in an arc shape centered on the center of gravity of the supported substrate.

Furthermore, in a substrate case related to yet another embodiment, the locking convex portion has an inclination in line contact with the outer peripheral end portion on the upper surface of the substrate. Even with this configuration, it is possible to prevent the back surface portion of the storage portion from contacting the inner side of the outer peripheral end portion of the upper surface of the substrate. Therefore, it is possible to prevent scratches from being generated on the inner side of the outer peripheral end of the upper surface of the substrate.

In addition, in the substrate box according to still another embodiment, even if the locking convex portion is formed on the front surface portion of the storage portion, a configuration may be formed in which the locking portion has a step difference on the back surface portion of the storage portion. In the storage portion, it is obvious that the surface portion and the back portion will not be too relativistic. Even in the above configuration, by only locking the end portion of the substrate, the substrate can be properly held.

The present invention is not limited to the above-mentioned embodiments, and various changes can be made within the scope indicated in the claims, even for the embodiments obtained by appropriately combining the disclosed technical means with different embodiments. It is included in the technical scope of the present invention.

[Industry use feasibility]

The present invention can appropriately utilize the transportation of semiconductor wafer substrates or glass substrates.

10‧‧‧Tray (Storage Department)

11a, 11b, 11c, 11d

12, 12a, 12b, 12c, 12d, 12e‧‧‧support

13a, 13c, 13e, 13g

13b, 13d, 13f, 13h

14a, 14b, 14c, 14d, 14e, 14e, 14f, 14g, 14h, 14i, 14J, 14k

17a, 17c, 17e, 17g

17b, 17d, 17f, 17h

Claims (12)

A substrate box having a plurality of storage portions for storing substrates, the substrate box is characterized in that the storage portion includes: a surface portion having a locking portion having a step difference for locking an end of the substrate; and a back portion , Which is provided with a locking convex portion that locks the end of the substrate, and the step is provided with a surface that locks the substrate, the surface having a wider distance from a surface that is more inside than the step in the surface portion Inclined, one storage portion supports the end of the substrate from the bottom surface side of the substrate by the inclined surface having the locking portion provided in the surface portion, and by The locking protrusion on the back of the storage portion locks the end of the substrate, thereby holding the substrate. The substrate cassette according to claim 1, wherein the surface portion includes a support portion that supports a portion of the bottom surface of the substrate, and the portion of the bottom surface of the substrate is supported by the support portion on the surface portion of a storage portion, and The end of the substrate is locked by the locking protrusion on the back portion of another storage portion located above the storage portion, thereby holding the substrate. The substrate cassette according to claim 2, wherein the support portion is formed in a circular or arc shape centered on the center of gravity of the substrate when the substrate is held in a plan view of the surface portion Composed of a plurality of convex parts. The substrate cassette according to claim 1, wherein the locking convex portion is composed of a plurality of convex portions, and has a slope so as to be locked on the surface of the end of the substrate of each convex portion, and when holding the substrate The chamfered portion of the end of the substrate is in contact. The substrate case according to claim 1, wherein the locking convex portion is composed of two pairs of convex portions facing each other. The substrate cassette according to claim 1, wherein the surface portion is located at a position where the end portion of the substrate is disposed, and includes a locking concave portion that can fit the locking convex portion provided on the back surface portion of the other storage portion The locking convex portion and the locking concave portion only fit into each other when one storage portion and another storage portion overlap in a specific arrangement. The substrate cassette according to claim 6, wherein the surface portion is adjacent to the locking concave portion, and when the storage portion is arranged horizontally, it is lower than the highest surface of the surface portion and is locked than the locking portion A position where the bottom surface of the concave portion is high is in contact with an end portion of the locking convex portion provided on the back surface portion of the other storage portion, an end portion of the locking convex portion and the first contact portion The contact portion is such that when one storage portion and another storage portion overlap with a configuration different from the specific configuration described above, they come into contact with each other. The substrate case according to claim 6 or 7, wherein the back surface portion is provided adjacent to the locking convex portion and is horizontal When arranging the storage portion, it may be in contact with a part of the highest surface of the surface portion of the other storage portion at a position higher than the lowest surface of the back surface portion and lower than the highest surface of the back surface portion The second abutting portion, a part of the surface portion of the second abutting portion and the other housing portion, when one housing portion and the other housing portion overlap with each other in a configuration different from the specific configuration, become abutting each other . The substrate cassette according to claim 6, wherein the storage section includes a plurality of fitting sections fitted on the surface of one storage section and the back section of another storage section, and only one storage section and another storage section When a specific arrangement overlaps, the plurality of fitting portions are fitted, and the locking convex portion and the locking concave portion are fitted. The substrate cassette according to claim 9, wherein the plurality of fitting portions each include a third contact portion that abuts the fitting portion of another storage portion, and when one storage portion and another storage are superimposed on the other arrangement At the time of contacting, the third abutting portion of the plurality of fitting portions and the third abutting portion of the other housing portion are brought into contact, so that one housing portion and the other housing portion are engaged. A storage portion constitutes the substrate cassette as described in claim 1. A substrate carrier, characterized by comprising: a substrate box as described in claim 1; a pair of plate portions which hold the uppermost and lowermost parts of the substrate box; and The belt portion is bundled in a state where the substrate cassette is gripped by the pair of plate portions, and the pair of plate portions are provided on the inner side at positions opposed to each other at the ends of the plate portions The notch portion of the belt portion.

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