JP2002002695A - Substrate storage tray and substrate packaging body using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent substrates from being injured or contaminated when loads or impacts are applied to the substrates, under conditions that a plurality of substrates storage trays are stacked or transported. SOLUTION: In the substrate storage tray 1 having a nearly square shape, a substrate storage part 2 is provided on the top side of the tray 1 to store a substrate 3, while on the bottom side of the tray, projecting parts 5 are provided on the outer periphery of the storage part 2, skirt parts 7 being provided along the outer periphery of the tray 1 so as to extend obliquely downward. The storage part 2 has steps 4, in contact with the underside outer periphery of the substrate, on the inner wall surface of the part 2. Recesses 8, each of which is recessed inwardly from the top end of the part 7 to the midpoint thereof, are provided on each of the skirt parts 7 in such a manner that when the skirt parts 7 are turned through an angle of 90 deg. or 180 deg. with respect to the center of the tray 1, the recesses 8 are located at asymmetrical points.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for a thin-film magnetic head used in a magnetic recording apparatus, a substrate storage tray for storing a semiconductor substrate or a sapphire substrate used in a semiconductor device, and a substrate package using the same. It is.

[0002]

2. Description of the Related Art Conventionally, thin film magnetic heads have been used in magnetic recording devices such as computers. This thin-film magnetic head is obtained by forming a magnetic head element on a thin-film magnetic head substrate by a thin-film means and then cutting it into a large number.

As a substrate for the thin film magnetic head, Al is used.
_An amorphous alumina insulating film (hereinafter referred to as an alumina base film) is formed on a ceramic substrate containing ₂ O ₃ as a main component and containing TiC by a sputtering method, and the surface thereof is mirror-polished by a single-side polishing machine. Since the magnetic head element is formed on this alumina base film, the surface roughness, scratch, and the presence or absence of dirt are very important. Therefore, when storing, packing, and transporting the thin-film magnetic head substrate, Requires that the surface of the thin-film magnetic head substrate be protected from scratches, dirt, and the like.

Conventionally, as a substrate storage tray for storing such a substrate for a thin film magnetic head, etc.
A substrate storage tray 11 as shown in FIGS.

The substrate storage tray 11 is manufactured by subjecting a plate material made of a thermoplastic resin such as a polystyrene resin or a polyvinyl chloride resin and having a thickness of about 0.5 to 2 mm to an uneven process, and has an upper surface for a thin film magnetic head. Substrate 13 such as a substrate
A skirt portion 17 which obliquely hangs down on the outer peripheral portion of the substrate accommodating portion 12, and a step portion 14 is provided on an inner wall surface of the substrate accommodating portion 12; Individual projections 15 are formed.

[0006] The storage of the substrate 13 by the substrate storage tray 11 is performed first by the substrate storage unit 1 provided on the substrate storage tray 11.
The lower surface of the substrate 13 is abutted against the second step portion 14 and stored, and then another substrate storage tray 11 is stacked on the substrate storage tray 11, and the protrusion of the substrate storage tray 11 located on the upper portion is stacked. This is performed by pressing the upper surface of the substrate 13 at 15 (see JP-A-11-105970).

[0007]

However, when the substrate 13 is stored using the conventional substrate storage tray 11,
The substrate 13 stored in the lower substrate storage tray 11 is fixed by being pressed by the projection 15 of the upper substrate storage tray 11 in the upper surface central region. Since the protruding portion 15 is in contact with the substrate, the central area of the substrate 13 where the magnetic head element and the like are formed is easily scratched or stained, and a thin-film magnetic head or the like having a stable quality cannot be reliably manufactured. Had.

When the substrate storage tray 11 has a plurality of substrates 13 stored in the substrate storage portion 12 stacked one on top of another to form a substrate package, the substrate storage tray 11 positioned above and the substrate storage tray 11 are stored therein. The load of the substrate 13 acting on the substrate 13 stored in the lowermost substrate storage tray 11 acts on the central area of the upper surface of the substrate 13 stored in the lowermost substrate storage tray 11, and the substrate 13 stored in the lowermost substrate storage tray 11 is damaged or stained. And the substrate 13 has a defect that the substrate 13 is cracked or chipped in severe cases.

SUMMARY OF THE INVENTION The present invention has been devised in view of the above-mentioned drawbacks, and has as its object to provide a substrate storage tray capable of storing and transporting a substrate without being scratched or stained, and a substrate package using the same. Is to provide.

[0010]

A substrate storage tray according to the present invention has a substrate storage portion for storing a substrate on an upper surface, a projection for pressing on an outer peripheral position of the substrate storage portion on a lower surface, and a diagonal protrusion on an outer peripheral portion. A substantially rectangular substrate storage tray having a hanging skirt portion, wherein the substrate storage portion has a step on its inner wall surface at which an outer peripheral portion of the lower surface of the substrate abuts, and the skirt portion is provided on each side thereof from the upper end. The concave part which is depressed inward in the middle is provided at a position where the concave part is asymmetric when rotated by 90 ° or 180 ° with respect to the center point of the upper surface, or the depth in which each side of the skirt part is depressed inward from the upper end to the middle part A first concave portion having a large depth and a second concave portion having a small depth are provided. When the first concave portion is rotated by 90 ° or 180 ° with respect to the center point of the upper surface, the first concave portions and the second concave portions are asymmetrically arranged. A position where the first concave portion and the second concave portion are symmetrical. It is characterized in that arranged on.

Further, in the substrate package using the substrate storage tray according to the present invention, at least two substrate storage trays are provided.
The stack is rotated by 0 ° or 180 °, and the outer periphery of the lower surface of the substrate is stored in the substrate storage portion of the lower substrate storage tray in contact with the stepped portion. The upper surface of the substrate is pressed, and the lower surface of the concave portion provided in the skirt portion of the upper substrate storage tray abuts on the upper surface of the lower substrate storage tray,
Alternatively, the lower surface of the first concave portion provided on the skirt portion of the substrate storage tray located at the upper portion is in contact with the bottom surface of the second concave portion of the substrate storage tray located at the lower portion.

According to the substrate storage tray of the present invention, a substrate storage portion for storing a substrate is provided on an upper surface, and a protrusion for pressing is provided on an outer peripheral position of the substrate storage portion on a lower surface, and is provided on an inner wall surface of the substrate storage portion. When the substrate is stored in the substrate storage tray, the substrate is stored in the lower portion of the substrate storage tray, and the substrate is stored in the upper portion of the substrate storage tray. The substrate is firmly fixed between the projections of the tray and firmly fixed to prevent the substrate from being scratched or stained.At the same time, the substrate storage tray is moved to the center of the upper surface where the magnetic head elements of the substrate are formed. There is no contact, and it is possible to effectively prevent the substrate storage tray from being scratched or stained by contact with the substrate storage tray in the center area of the upper surface of the substrate, thereby reliably manufacturing a thin-film magnetic head or the like having a stable quality on the substrate. Become possible

According to the substrate storage tray of the present invention,
A concave portion inwardly depressed inward from the upper end to each side of the skirt portion provided on the outer peripheral portion is provided at a position that is asymmetric when rotated by 90 ° or 180 ° with respect to the center point of the upper surface,
Or the first with a deeper depth that is recessed inward from the upper end to the middle
The concave portion and the second concave portion having a small depth are set at 9
When rotated by 0 ° or 180 °, the first recesses and the second recesses were provided asymmetrically at positions where the first recesses and the second recesses were symmetrical, so that the substrate was stored in the substrate storage portion. When the substrate storage tray is rotated by 90 ° or 180 ° and stacked in a large number in the vertical direction to form a substrate package, the lower surface of the concave portion of the upper substrate storage tray or the lower surface of the first concave portion is used to store the lower portion of the substrate storage tray. The load of the substrate storage tray positioned above and in contact with the upper surface of the tray or the bottom surface of the second concave portion and the load of the substrate stored therein act on the upper surface of the lower substrate storage tray or the second concave portion. As a result, with respect to the substrate stored in the lowermost substrate storage tray, the entire load of the substrate storage tray positioned above and the substrate stored therein acts via the protrusions. Not able to, or scratched and dirt on the substrate, which is housed in the bottom of the substrate storage tray,
It is possible to effectively prevent the occurrence of cracks and chips.

[0014]

Embodiments of the present invention will be specifically described below with reference to the drawings.

FIG. 1 is a top view showing an embodiment of the substrate storage tray of the present invention, and FIGS. 2 (a), 2 (b) and 2 (c).
2 is a cross-sectional view taken along line AA, line BB, and line CC of FIG. 1, respectively. The substrate storage tray 1 of the present invention includes a substrate storage portion 2 for storing a substrate, a step portion 4 provided on an inner wall surface of the substrate storage portion 2, and a projection provided on a lower surface at an outer peripheral position of the substrate storage portion 2. 5, a skirt portion 7 hanging obliquely on the outer peripheral portion and a concave portion 8 provided in the skirt portion 7.

The substrate storage tray 1 of the present invention is formed on a plate (not shown) having a thickness of about 0.5 to 2 mm made of a thermoplastic resin such as a polystyrene resin or a polyvinyl chloride resin or a polyester resin by a vacuum press molding method. It is manufactured by processing concavities and convexities by, for example, forming a square shape having a length of about 200 mm, a width of about 200 mm, and a height of about 20 mm.

The substrate storage tray 1 is provided with a substrate storage section 2 for storing a substrate 3 on its upper surface. For example, when storing a substrate for a thin film magnetic head, the substrate storage tray 1 has a diameter of about 50 to 200 mm. It is formed in a circular shape.

The substrate storage section 2 is not limited to one provided on the upper surface of the substrate storage tray 1 but may be provided in plural numbers. The shape may be a rectangle, a square, or the like, depending on the shape of (3).

Further, a part of the periphery of the substrate housing portion 2 has, for example, a width of 5 to 20 mm, a length of 1 to 20 mm,
A square-shaped depression 6 having a depth of 1 to 20 mm is formed, and the depression 6 is inserted by the tip of the holder when the substrate 3 is inserted into or removed from the substrate storage unit 2 using a holder such as tweezers. Thus, the function of facilitating the transfer of the substrate 3 into and out of the substrate storage section 2 is achieved.

Further, the substrate accommodating section 2 has a step 4 formed on the inner wall surface thereof.
As shown in (b) and (c), the outer peripheral portion of the lower surface of the substrate 3 comes into contact with the substrate 3 so as to store and support the central region of the lower surface of the substrate 3 in a non-contact manner with the substrate storing tray 1. In this case, since the central area of the lower surface of the substrate 3 is not in contact with the substrate storage tray 1, the adhesion of scratches, dirt, and the like due to the contact with the substrate storage tray 1 is effectively prevented.

The step portion 4 formed on the inner wall surface of the substrate storage portion 2 is slightly larger than the thickness of the substrate 3 so that a part of the substrate 3 supported by the step portion 4 does not protrude from the substrate storage portion 2. It is formed at a deep position.

The step 4 has a width L of 0.1 m.
If it is less than m, the support of the substrate 3 may become unstable. Therefore, the step 4 has a width L of 0.1
mm or more, and preferably in the range of 0.1 mm to 2.0 mm in consideration of the adhesion of scratches and dirt on the region of the substrate 3 where the magnetic head element and the like are formed.

Further, the substrate storage tray 1 is provided with a projection 5 on the lower surface thereof at an outer peripheral position of the substrate storage section 2, and the projection 5 does not press the outer peripheral portion of the upper surface of the substrate 3. When the substrate storage trays 1 storing the substrates 3 are stacked up and down, the substrates 3 stored in the substrate storage part 2 of the substrate storage tray 1 located at the lower part become the substrate storage tray 1 whose outer peripheral part is positioned at the lower part. Are firmly fixed by being sandwiched between the stepped portion 4 of the
As a result, it is possible to effectively prevent the substrate 3 from being scratched or stained, and at the same time, there is no contact of the substrate storage tray 1 with the central area of the upper surface of the substrate 3 where the magnetic head elements and the like are formed. It is possible to effectively prevent the substrate storage tray 1 from being scratched or stained by the contact of the substrate storage tray 1 in the upper surface center region, whereby a thin-film magnetic head or the like having a stable quality on the substrate 3 can be reliably manufactured.

If the protrusion 5 is provided with a tapered portion 5a at a position in contact with the substrate 3, the tapered portion 5a is provided on the substrate storage tray 1 located at the lower portion.
The substrate 3 can be firmly pressed and fixed while making the contact area with the substrate 3 small by contacting the corner of the outer peripheral portion of the upper surface of the substrate 3.
Therefore, it is preferable that the protrusion 5 is formed with a tapered portion 5 a having an angle θ of 10 ° to 45 ° at a portion in contact with the substrate 3.

Further, a skirt portion 7 is provided on the outer peripheral portion of the substrate storage tray 1 so as to hang obliquely. The skirt portion 7 increases the strength of the substrate storage tray 1 and provides a plurality of substrate storage trays. Acting as a guide when stacking 1 up and down, for example, 1 ° outward from the outer periphery of the upper surface
The substrate storage part 2 is designed to spread at an angle of about
Hangs obliquely to a position lower by about 0.5 mm to 5 mm than the lower surface of.

The skirt portion 7 further includes a plurality of rectangular recesses 8 which are depressed inward on each side from the upper end to the middle.
The concave portion 8 increases the rigidity of the skirt portion 7 to increase the strength of the substrate storage tray 1 itself,
As a result, even if an external force, impact or load is applied to the substrate storage tray 1, the substrate storage tray 1 is not easily deformed.
The substrate 3 stored in the substrate storage tray 1 can be reliably protected from external force.

The recess 8 has, for example, a rectangular recess having a length of 10 mm, a width of 5 mm, and a depth of 10 mm on each side.
The substrate 3 is provided at an interval of 0 to 100 mm and at an asymmetric position when rotated by 180 ° with respect to the center point of the substrate storage tray 1 as shown in FIG. When the stored substrate storage trays 1 are rotated 180 ° and stacked up and down to form a substrate package, the lower surface of the concave portion 8 of the substrate storage tray 1 located on the upper side is placed on the upper surface of the substrate storage tray 1 positioned on the lower side. The load of the upper substrate storage tray 1 and the substrate 3 stored therein acts on the upper surface of the lower substrate storage tray 1, and as a result, the lowermost substrate storage tray 1 is loaded. With respect to the substrate 3 stored in the tray 1, the entire load of the substrate storage tray 1 located above and the substrate 3 stored in the tray 3 does not act via the protrusion 5, and the lowermost substrate Storage tray 1 It is possible to effectively prevent the substrate 3 housed in the device 3 from being scratched or stained, cracked, chipped, or the like.

The shape of the recess 8 is not limited to a rectangular shape, but may be a substantially semicircular shape or a substantially triangular shape. Well, it is provided according to the type of substrate stored,
It is not limited to a plurality provided on each side,
It may be an individual.

Next, the substrate 3 using the substrate storage tray 1
Will be described.

When storing the substrate 3 by the substrate storage tray 1, first, the outer periphery of the lower surface of the substrate 3 is stored in contact with the step portion 4 of the substrate storage tray 1. The other substrate storage tray 1 is moved 18
The stacking is performed by rotating by 0 °, and pressing the outer peripheral portion of the upper surface of the substrate 3 with the protrusion 5 of the substrate storage tray 1 located above. In this case, the substrate 3 is firmly fixed by being sandwiched between the step portion 4 of the substrate storage tray 1 whose outer peripheral portion is located below and the protrusion 5 of the substrate storage tray 1 located above. It is possible to effectively prevent the substrate 3 from being scratched or stained due to the swing of the substrate 3, and at the same time, the contact of the substrate storage tray 1 with the central area of the upper surface of the substrate 3 where the magnetic head elements and the like are formed. Therefore, it is possible to effectively prevent the substrate storage tray 1 from being scratched or stained in the central area of the upper surface of the substrate 3, thereby reliably manufacturing a thin-film magnetic head or the like having a stable quality on the substrate 3. Becomes possible.

Further, a concave portion 8 which is depressed inward from the upper end to the middle of each side of the skirt portion 7 provided on the outer peripheral portion is provided at a position which is asymmetric when rotated by 180 ° with respect to the center point of the upper surface. When the substrate storage tray 1 in which the substrate 3 is stored in the substrate storage unit 2 is rotated by 180 ° and stacked up and down to form a substrate package, the lower surface of the concave portion 8 of the substrate storage tray 1 located on the upper Board storage tray 1 located at
The load of the substrate storage tray 1 located above and in contact with the upper surface of the substrate and the load of the substrate 3 stored therein act on the upper surface of the substrate storage tray 1 positioned below, and as a result, the lowermost position is located. The substrate storage tray 1 located above the substrate 3 stored in the substrate storage tray 1
In addition, the entire load of the substrate 3 accommodated therein does not act via the protruding portion 5, and the lowermost substrate accommodating tray 1
It is possible to effectively prevent the substrate 3 housed in the device 3 from being scratched or stained, cracked, chipped, or the like.

The concave portion 8 is not limited to a position that is asymmetric when rotated by 180 degrees with respect to the center point of the upper surface, but is formed at a position that is asymmetric when rotated by 90 degrees. You may keep it. In this case, when a plurality of substrate storage trays 1 are vertically stacked to form a substrate package, each substrate storage tray 1 is rotated by 90 ° and stacked.

Next, another embodiment of the present invention will be described with reference to the drawings.

FIG. 4 is a top view showing another embodiment of the substrate storage tray of the present invention, and FIGS. 5A and 5B are cross sections taken along lines DD and EE in FIG. 4, respectively. FIG.

In the drawings, the same parts as those in the above-described embodiment are denoted by the same reference numerals.

The substrate storage tray 1 includes a substrate storage portion 2 for storing a substrate, a step portion 4 provided on the inner wall surface of the substrate storage portion 2, and a substrate provided on the lower surface at an outer peripheral position of the substrate storage portion 2. 3, a skirt portion 7 that obliquely hangs on the outer periphery, a first concave portion 8a having a large depth provided in the skirt portion 7, and a second concave portion 8b having a small depth. When the first concave portion 8a and the second concave portion 8b are rotated by 180 ° with respect to the center point of the upper surface, the first concave portion 8a
The first concave portion 8a and the second concave portion 8b are provided asymmetrically with respect to each other and the second concave portions 8b.

The first concave portion 8a and the second concave portion 8b are, for example, 15 mm in length, 8 mm in width and 18 mm in depth, and 10 mm in length and 5 mm in width. And a rectangular shape having a depth of 10 mm, and is formed at intervals of about 10 to 100 mm on each side according to the size of the substrate storage tray 1.

The first concave portion 8a and the second concave portion 8b
Is not limited to a rectangular shape, and may be a substantially semicircular shape or a substantially triangular shape.
The number of the second concave portions 8b is provided according to the size of the substrate storage tray 1 and the type of the substrate 3 to be stored, and is not limited to a plurality provided on each side, but is one. You may.

As shown in FIG. 5, the substrate 3 is stored in the substrate storage tray 1 by first bringing the lower surface of the substrate 3 into contact with the step portion 4 of the substrate storage tray 1 and then storing the substrate. Another substrate storage tray 1 is stacked on top of the storage tray 1 by rotating the substrate storage tray 1 by 180 ° with respect to its center point, and the upper surface outer peripheral portion of the substrate 3 is pressed by the protrusion 5 of the substrate storage tray 1 located above. Done by In this case, the substrate 3 is firmly fixed between the step portion 4 of the substrate storage tray 1 whose outer peripheral portion is located below and the projection 5 of the substrate storage tray 1 located at the upper portion. Scratches and dirt due to the swing of the substrate 3 can be effectively prevented, and at the same time, there is no contact of the substrate storage tray 1 with the central area of the upper surface of the substrate 3 where the magnetic head elements and the like are formed. In this way, it is possible to effectively prevent the substrate storage tray 1 from being scratched or stained by contact with the substrate storage tray 1 in the upper central region of the substrate 3, thereby reliably manufacturing a thin-film magnetic head or the like having a stable quality on the substrate 3. It becomes possible.

When the first recesses 8a and the second recesses 8b, which are recessed inward from the upper end to the middle of each side of the skirt portion 7 provided on the outer peripheral portion, are rotated by 180 ° with respect to the center point of the upper surface. Since the first recesses 8a and the second recesses 8b are provided asymmetrically at positions where the first recesses 8a and the second recesses 8b are symmetrical, the substrate storage tray 1 storing the substrate 3 in the substrate storage unit 2 can be used. When rotated 180 ° and stacked up and down to form a board package, the board storage tray 1 located at the top
The lower surface of the first concave portion 8a is in contact with the bottom surface of the second concave portion 8b of the lower substrate storage tray 1, and the load of the substrate storage tray 1 positioned above and the substrate 3 stored in the upper portion is lower. It acts on the second concave portion 8b of the substrate storage tray 1 located therein, and as a result, the substrate storage tray 1 located above the substrate storage tray 1 and the substrate storage tray 1 positioned above the substrate 3 stored in the lowermost substrate storage tray 1 The entire load of the substrate 3 housed in the
It is possible to effectively prevent the substrate 3 stored in the lowermost substrate storage tray 1 from being scratched or stained, cracked, chipped, or the like.

The first concave portion 8a and the second concave portion 8b
Is the first when rotated 180 ° with respect to the center point of the upper surface.
The first concave portion 8a and the second concave portion 8b are not limited to those formed at target positions, and the first concave portion 8a and the second concave portion 8b are not limited to those formed at target positions.
The concave portions 8a and the second concave portions 8b may be formed at asymmetric positions, and the first concave portion 8a and the second concave portion 8b may be formed at target positions.

Thus, according to the substrate storage tray 1 of the present invention and the substrate package using the same, it is possible to effectively prevent the substrate 3 stored in the substrate storage section 2 of the substrate storage tray 1 from being scratched or stained. In particular, it can be suitably used for storing and packing a substrate for a thin film magnetic head made of an Al ₂ O ₃ —TiC-based sintered body.

The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. It can also be used for storing and packing semiconductor substrates such as silicon for manufacturing semiconductors, sapphire substrates for manufacturing SOS substrates, etc. When the substrate having the above is stored, the substrate can be satisfactorily stored by adjusting the height and the like of the concave portion 8 according to the thickness.

[0044]

According to the substrate storage tray of the present invention, a substrate storage portion for storing a substrate is provided on the upper surface, and a projection for pressing is provided on the lower surface at an outer peripheral position of the substrate storage portion. Since the lower surface of the substrate abuts on the wall, a step is formed so that the substrate can be stored in the substrate storage tray.
The substrate is firmly fixed by being sandwiched between the step portion of the substrate storage tray whose lower portion is located at the lower portion and the protrusion of the substrate storage tray located at the upper portion, thereby effectively preventing the substrate from being damaged or stained. At the same time, there is no contact of the substrate storage tray with the central area of the upper surface where the magnetic head elements etc. of the substrate are formed,
It is possible to effectively prevent the substrate storage tray from being damaged or stained due to contact with the substrate storage tray in the central area of the upper surface of the substrate, thereby making it possible to reliably manufacture a thin-film magnetic head or the like having a stable quality on the substrate.

According to the substrate storage tray of the present invention,
A concave portion inwardly depressed inward from the upper end to each side of the skirt portion provided on the outer peripheral portion is provided at a position that is asymmetric when rotated by 90 ° or 180 ° with respect to the center point of the upper surface,
Or the first with a deeper depth that is recessed inward from the upper end to the middle
The concave portion and the second concave portion having a small depth are set at 9
When rotated by 0 ° or 180 °, the first recesses and the second recesses were provided asymmetrically at positions where the first recesses and the second recesses were symmetrical, so that the substrate was stored in the substrate storage portion. When the substrate storage tray is rotated by 90 ° or 180 ° and stacked in a large number in the vertical direction to form a substrate package, the lower surface of the concave portion of the upper substrate storage tray or the lower surface of the first concave portion is used to store the lower portion of the substrate storage tray. The load of the substrate storage tray positioned above and in contact with the upper surface of the tray or the bottom surface of the second concave portion and the load of the substrate stored therein act on the upper surface of the lower substrate storage tray or the second concave portion. As a result, with respect to the substrate stored in the lowermost substrate storage tray, the entire load of the substrate storage tray positioned above and the substrate stored therein acts via the protrusions. Not able to, or scratched and dirt on the substrate, which is housed in the bottom of the substrate storage tray,
It is possible to effectively prevent the occurrence of cracks and chips.

[Brief description of the drawings]

FIG. 1 is a top view illustrating an embodiment of a substrate storage tray according to the present invention.

FIGS. 2A, 2B, and 2C are cross-sectional views taken along lines AA, BB, and CC of FIG. 1, respectively.

3 (a) and 3 (b) are cross-sectional views when the substrate storage trays shown in FIG. 2 are stacked.

FIG. 4 is a top view showing another embodiment of the substrate storage tray of the present invention.

5 (a) and 5 (b) are cut lines D- in FIG. 4 respectively.
It is sectional drawing in the D and EE line | wire, (c) is sectional drawing at the time of stacking the board | substrate storage tray of the same figure (a), (b).

6A is a top view of a conventional substrate storage tray, and FIG. 6B is a cross-sectional view taken along line XX of FIG.

[Explanation of symbols]

 1: Substrate storage tray 2, 12: Substrate storage part 3, 13: Substrate 4, 14: Stepped part 5, 15: Projection part 6: Depression 7, 17: Skirt part 8: Concave part 8a: First concave part 8b: Second part Recess

Claims (4)

[Claims] 1. A substantially square substrate storage tray having a substrate storage portion for storing a substrate on an upper surface, a projection for pressing on a lower surface at an outer peripheral position of the substrate storage portion, and a skirt portion obliquely hanging down on the outer peripheral portion. Wherein the substrate accommodating portion has a stepped portion on the inner wall surface of which the outer peripheral portion of the lower surface of the substrate abuts, and the skirt portion has a concave portion depressed inward from the upper end to the middle on each side thereof at the center of the upper surface. A substrate storage tray provided at a position that is asymmetric when rotated 90 ° or 180 ° with respect to the substrate storage tray. 2. A substantially square substrate storage tray having a substrate storage portion for storing a substrate on the upper surface, a projection for pressing on the lower surface at an outer peripheral position of the substrate storage portion, and a skirt portion obliquely hanging down on the outer peripheral portion. Wherein the substrate accommodating portion has a step on the inner wall surface of which the outer peripheral portion of the lower surface of the substrate abuts, and the skirt portion has a deep first indentation on each side from the upper end to the middle. When the concave portion and the shallow second concave portion are rotated by 90 ° or 180 ° with respect to the center point of the upper surface, the first concave portion and the second concave portion are asymmetric, and the first concave portion and the second concave portion are symmetric. A substrate storage tray provided at a position where: 3. The substrate storage tray according to claim 1, wherein said substrate storage tray is rotated by 90 ° or 180 ° and stacked, and an outer peripheral portion of the lower surface of the substrate is applied to a step portion in a substrate storage portion of the substrate storage tray located at a lower portion. The upper surface of the substrate is pressed by the protrusion of the upper substrate storage tray, and the lower surface of the concave portion provided in the skirt portion of the upper substrate storage tray is stored in the lower substrate storage tray. A board package characterized by being in contact with an upper surface of a tray. 4. At least two of the substrate storage trays according to claim 2 are stacked while being rotated by 90 ° or 180 ° with respect to each other, and the outer periphery of the lower surface of the substrate is applied to the step in the substrate storage portion of the substrate storage tray located below. The upper surface of the substrate is pressed by the projection of the upper substrate storage tray, and the lower surface of the first concave portion provided in the skirt portion of the upper substrate storage tray is positioned at the lower portion. A substrate package, which is in contact with a bottom surface of a second concave portion of a substrate storage tray.