TWI687557B - Electrode polishing electrode frame, electrolytic polishing variable electrode frame, and electrolytic polishing device including the same - Google Patents

Abstract

The invention provides an electrode frame for electrolytic polishing, a variable electrode frame and an electrolytic polishing device including the same. In order to achieve the purpose, the electrode frame of an embodiment is used as an electrode frame in an electrolytic cell in which an accommodating space for accommodating an electrolytic abrasive article and an electrolyte is formed, and may include: a negative electrode frame that is spaced apart from the electrolytic abrasive article, including A first negative electrode plate in the first direction, a second negative electrode plate in the second direction, a third negative electrode plate in a third direction different from the first direction and the second direction; and an electrode coupling member, which is disposed on the electrolytic abrasive article The corners connect the first negative electrode plate to the third negative electrode plate. The electrode coupling member may include a first bracket combined with the first negative plate, a second bracket combined with the second negative plate, and a third bracket combined with the third negative plate. On one side of the negative electrode frame, a partition member that separates the negative electrode frame from the side surface or bottom surface of the electrolytic abrasive article may be included.

Description

Electrode polishing electrode frame, electrolytic polishing variable electrode frame, and electrolytic polishing device including the same

The invention relates to an electrode frame for electrolytic polishing, a variable electrode frame for electrolytic polishing, and an electrolytic polishing device including the same, and relates to an electrolytic polishing device for improving the polishing quality of electrolytic polishing objects.

Generally speaking, Electropolishing is the use of a metal product dissolved in an electrolyte as an anode and a metal insoluble in an electrolyte as a cathode. A method of applying a voltage to the surface of a metal product as an electrolytic polishing object to cause electrolysis to polish the surface of the metal product.

In order to grind the metal by electrolytic grinding, the electrolytic cell is filled with an electrolyte, the metal to be grinded is installed as a positive electrode, and the metal insoluble in the electrolyte is installed as a negative electrode, and then DC is applied to the positive electrode and the negative electrode.

After electrolytic polishing, a high-viscosity liquid layer (viscous layer) containing a large amount of metal ions dissolved from the positive electrode surrounds the positive electrode. In the liquid layer saturated with metal ions, the metal no longer dissolves, forming a high positive electrode potential, and thus actively combines with oxygen to form an oxide film. At this time, the dissolved metal ions mainly accumulate in the concave portion of the metal surface. In the concave portion, the movement and diffusion of the metal ions are small, and the electrical conduction is not smooth, so the metal is not dissolved. On the contrary, in the protruding part of the metal surface, the metal ion layer is formed thin, so the current is concentrated, it is easy to dissolve the metal surface, and overall, the metal surface becomes smooth.

The electrolytic polishing is carried out by an electrolytic polishing device. The electrode plates of the conventional electrolytic polishing device are formed in a plate shape, and each negative electrode plate is assembled into a predetermined form, and is installed at a distance from the polishing surface of the electrolytic polishing object.

The negative plate assembled as described above should be installed in the electrolytic cell in such a way that it does not come into contact with electrolytic abrasive objects. However, only when the negative electrode plate is kept at a predetermined distance and arranged close to the electrolytic polishing object can uniform polishing be achieved and the quality of electrolytic polishing can be improved.

However, in the conventional technology, it is practically impossible to firmly arrange the negative electrode plate so as to maintain a predetermined distance close to the electrolytic polishing object.

On the other hand, the inventor of the present application developed an invention that uses a negative electrode bracket formed on the discharge port formed on the electrolytically polished object to uniformly fix the negative electrode plate while approaching the side of the electrolytically polished object, and obtained a patent authorization (see Korea Authorized patent No. 10-1183218).

However, since the negative electrode plate needs to be installed relatively close to the electrolytically polished object, the space between the negative electrode plate and the electrolytically polished object is very narrow, especially the corner of the electrolytically polished object has a narrower space.

On the other hand, as a technology in the prior art, various jigs need to be used in order to connect the negative electrode plates to each other at the corners. In the narrow space at the corners of the electrolytically polished object, the assembly of the negative electrode plates is quite difficult, so the assembly time increases And rising costs.

In addition, when the negative electrode plate is assembled in the corner space of the electrolytic polishing article, a plurality of jigs connecting and fixing the negative electrode plate interfere with each other, so that a plurality of jigs cannot be used, and therefore there is a problem that the negative electrode plate cannot be firmly fixed.

In addition, a plurality of jigs are used to fix the negative electrode plate. Therefore, at the narrow corners of the electrolytically polished object, a problem that the jig contacts the electrolytically polished object and causes a short circuit occurs.

In addition, in the past, the original multiple negative plates were independently fixed by means of jigs. At this time, the negative plates will be in a state where the surface conductivity decreases due to oxidation or the like during the electrolytic polishing process. Therefore, they are combined whenever necessary In the case of each negative electrode plate, the conductivity is lowered, and as a result, there is a problem that the efficiency or quality of electrolytic polishing is lowered.

On the other hand, with the diversification of the size of the electrolytic polishing object and the area of the polishing surface, the pre-assembled negative electrode plate is discarded after being used once or completely separated and then reassembled and installed. Therefore, a problem arises in that the time and cost required to newly manufacture or reassemble the negative electrode plate increase.

Especially when the shape of the electrolytic polishing object is complicated, for example, in the case where the upper and lower widths of the electrolytic polishing object are wider and the width of the middle region is relatively narrow, it is difficult to assemble or move the negative electrode plate. The form of electrolytic polishing.

For example, when the shape of an electrolytic polishing object is complicated, as a prior art technique, a negative electrode rod is hung on an electrolytic cell or a large mesh is formed in the form of a negative electrode mesh, and then it is hung on an electrolytic cell to roughly perform electrolytic polishing , But it is a state of very low electrolytic polishing quality or process efficiency.

On the other hand, the negative electrode plate of the prior art is supported by means of a jig that is another supporting member, but the distance between the negative electrode plate and the electrolytic polishing object is arranged very close, making it difficult to narrow the negative electrode plate and the electrolytic polishing object Space installation fixture. That is, since the jig is formed of a conductive material, if the jig comes into contact with the electrolytic abrasive article of the positive electrode, an electrical short-circuit occurs with the negative electrode plate having the negative electrode.

(Technical problems to be solved)

According to an embodiment, an object is to provide an electrolytic polishing device for firmly fixing a plurality of negative plates disposed at corners of an electrolytic polishing object.

In addition, according to an embodiment, an object is to provide an electrolytic polishing device for preventing a short circuit between a plurality of jigs arranged at corners of an electrolytic polishing object and an electrolytic polishing object.

In addition, according to an embodiment, an object is to provide an electrolytic polishing device capable of shortening the assembly time of a negative electrode frame disposed at a corner of an electrolytic polishing object.

In addition, through an embodiment, the purpose is to make the conductivity excellent, the efficiency of electrolytic polishing and the quality of polishing excellent.

In addition, according to an embodiment, an object is to provide an electrolytic polishing device for preventing an electrical short circuit between a negative electrode plate and an electrolytic polishing object due to a jig.

In addition, according to an embodiment, an object is to provide a variable electrode frame capable of expanding or contracting according to the size of an electrolytic polishing object, a fixing member of an electrode frame for electrolytic polishing, and an electrolytic polishing device including the same.

In addition, according to an embodiment, an object is to provide a variable electrode frame capable of effectively electrolytic polishing even when the shape of an electrolytic polishing object is complicated, a fixing member of an electrode frame for electrolytic polishing, and an electrolytic polishing device including the same.

In addition, according to another embodiment, another object is to provide an electrolytic polishing device for preventing an electrical short circuit between a negative electrode plate and an electrolytic polishing object due to a jig.

(Means for solving problems)

In order to achieve the above object, in one embodiment, the electrode frame is used as an electrode frame in an electrolytic cell in which an accommodating space for accommodating an electrolytic abrasive article and an electrolyte is formed, and may include a negative electrode frame that is in contact with the electrolytic abrasive article Spaced apart configuration, including a first negative electrode plate in a first direction, a second negative electrode plate in a second direction, a third negative electrode plate in a third direction different from the first direction and the second direction; and an electrode coupling member, It is arranged at the corner of the electrolytic polishing object, and connects the first negative electrode plate to the third negative electrode plate.

The electrode coupling member may include a first bracket combined with the first negative plate, a second bracket combined with the second negative plate, and a third bracket combined with the third negative plate.

On one side of the negative electrode frame, a partition member that separates the negative electrode frame from the side or bottom surface of the electrolytic abrasive article may be included.

In addition, the electrode frame of the embodiment may include: a first negative electrode plate arranged in a first direction and composed of a plurality of brackets; a second negative electrode plate arranged in a second direction that forms a predetermined angle with the first direction, Consists of multiple brackets.

The first negative plate may include a first bracket and a second bracket. The first bracket may move in a direction away from or close to the second bracket when a part of the second bracket overlaps the second bracket. The overlapping area of the first bracket and the second bracket may be a variable type that becomes longer or shorter.

The electrolytic abrasive article may include a first area and a second area having different widths from each other, and the variable first negative electrode plate may be changed so as to be able to pass through the second area of the electrolytic abrasive article and pass through the first The first negative plates of the two regions are of a variable type so as to be variable corresponding to the area of the first region of the electrolytic abrasive article.

In an embodiment, the electrolytic polishing device may include the electrode frame.

(Effect of invention)

According to an embodiment, an electrode coupling member is provided at the corner of the electrolytically polished object, which has the effect of shortening the assembly time of a plurality of negative plates.

In addition, according to an embodiment, the electrode coupling member has an effect that the negative electrode plate can be more firmly fixed without a plurality of fixing members.

In addition, in an embodiment, there is an effect that the electrode coupling member can be easily installed at the corner of a narrow electrolytic abrasive article, and a short circuit with the electrolytic abrasive article can be prevented.

In addition, in one embodiment, the electrode coupling member can be easily installed at the corner of the electrolytically polished object having a degree of 90 degrees or more, and has an effect that the electrolytic polishing can be effectively performed on the corner of the electrolytically polished object.

In addition, in one embodiment, the electrode coupling member can be effectively mounted even if the corner of the electrolytically polished object does not have a vertex, and thus has the effect that electrolytic polishing can be effectively performed on the corner of the electrolytically polished object.

In addition, in one embodiment, in a state where the conductivity is excellent, the negative electrode plate is firmly fixed in advance, and a negative electrode frame and a bracket are prepared, which has the technical effects of excellent conductivity, excellent electrolytic polishing efficiency, and excellent polishing quality.

In addition, in one embodiment, the jig also forms an insulating portion, thereby having the effect that the narrow space between the negative electrode frame and the electrolytic abrasive article can be easily installed.

In addition, in one embodiment, the variable electrode frame is assembled with a size corresponding to the polishing surface of the electrolytic polishing object, and is disposed on the polishing surface of the electrolytic polishing object, thereby saving time and time required for newly manufacturing or reassembling the negative electrode plate. Cost effect.

In addition, according to an embodiment, it is possible to provide a variable electrode frame that can be effectively electrolytically polished even when the shape of the electrolytically polished object is complicated, and an electrolytic polishing device including the same.

In addition, in one embodiment, the variable electrode frame is configured such that the first bracket is slidingly coupled to the second bracket, which has the effect that the size of the variable electrode frame can be more effectively controlled.

In addition, according to an embodiment, a plurality of variable electrode frames and auxiliary negative plates that are electrically connected to each other with different areas are arranged on the polishing surface, so that the polishing surface can be effectively performed on electrolytic polishing objects with different areas The effect of electrolytic polishing.

The embodiments will be described in detail below with reference to the drawings.

1 is a perspective view showing the electrolytic polishing apparatus of the first embodiment, FIG. 2 is a perspective view showing the electrode coupling member of the electrolytic polishing apparatus of the first embodiment, and FIG. 3 is an electrode coupling member of the electrolytic polishing apparatus of the first embodiment. 4a and 4b are perspective views showing the jig of the electrolytic polishing device of the first embodiment, and FIG. 5 is a perspective view showing a modification of the negative electrode frame of the electrolytic polishing device of the first embodiment.

Referring to FIG. 1, the electrode frame of the embodiment is used as an electrode frame in an electrolytic cell 100 in which an accommodating space for accommodating an electrolytic abrasive article 200 and an electrolyte is formed, and may include: a negative electrode frame 500 that is in contact with the electrolytic abrasive article 200 The spaced apart configuration includes a first negative electrode plate 510 in a first direction, a second negative electrode plate 520 in a second direction, and a third negative electrode plate 530 in a third direction different from the first direction and the second direction; and electrodes The coupling member 400 is disposed at the corner of the electrolytic polishing object, and connects the first negative electrode plate to the third plate.

In addition, the electrolytic polishing apparatus of the first embodiment may include: an electrolytic cell 100 containing an electrolytic polishing object 200 and an electrolyte; a negative electrode frame 500 disposed apart from the electrolytic polishing object 200; The electrode coupling member 400 that connects the negative electrode frame 500 to the corner. In an embodiment, the electrode frame may include a negative electrode frame.

The electrolytic cell 100 may be formed in a box shape equipped with an accommodating space inside. The electrolytic cell 100 may include a cylindrical shape, a polygonal box, or a ring shape, but the shape is not limited.

The electrolytic cell 100 may be filled with electrolyte. As the electrolyte, it can be made from distilled water (H ₂ O), sulfuric acid (H ₂ SO 4 ), phosphoric acid (H ₃ PO ₄ ), chromic acid, sodium nitrate (NaNO ₃ ), sodium chloride (NaCl), glycerin At least one substance selected from the group consisting of a class is mixed and constituted, but it is not limited to this.

The electrolytic solution can be replaced after the electrolytic polishing of the electrolytic polishing article 200 is completed while the electrolytic cell 100 is filled. Unlike this, the electrolyte can flow in and out by means of a pump formed independently on one side of the electrolytic cell 100. Between the electrolytic cell 100 and the pump, an electrolyte inflow tube and an electrolyte outflow tube may be formed, and may further include an electrolyte flow adjustment part and a screening program. The screening program can filter the dregs and foreign substances contained in the electrolyte.

The electrolytic abrasive article 200 can be accommodated inside the electrolytic cell 100. The size of the electrolytic cell 100 may be larger than that of the electrolytic abrasive article 200. The electrolytic abrasive article 200 may be a polygonal chamber or a cylindrical box. The electrolytic abrasive article 200 may be a chamber for OLED manufacturing. On the other hand, when the electrolytic polishing article 200 is a chamber for OLEDs or a MOCVD chamber for LEDs, etc., there are also cases where the weight is hundreds to thousands of kilos (several tons).

In addition, the electrolytic abrasive article 200 may be a part of a component of the OLED chamber. The electrolytic polishing article 200 may have a box shape or a ring shape formed through vertically. The electrolytic polishing article 200 is not limited to this, and all metal materials can be designated as electrolytic polishing articles. The electrolytic abrasive article 200 is immersed in the electrolyte.

Since the electrolytic abrasive article 200 has a considerable weight, for example, it can be accommodated in the accommodating space of the electrolytic cell 100 in a state of being lifted by a crane or the like. The electrolytic polishing article 200 can be arranged in the electrolytic cell 100 at a distance from the polishing surface of the electrolytic polishing article 200 by means of another support member. The polishing surface of the electrolytic polishing object 200 may include the outer side, the inner side, the bottom surface, and the like of the electrolytic polishing object.

A rectifier may also be arranged outside the electrolytic cell 200. The rectifier can connect the voltage of the positive electrode (+) to the electrolytic grinding object, and can connect the voltage of the negative electrode (-) to the negative electrode frame 500. The rectifier may be electrically connected to the electrolytic abrasive article 200 by means of wires or the like.

The negative electrode frame 500 may be disposed inside and outside the electrolytic polishing article 200. The negative electrode frame 500 may be arranged at a predetermined interval from the polishing surface of the electrolytic polishing article 200. For example, the negative electrode frame 500 and the electrolytic polishing object 200 are uniformly spaced apart by a distance of 50 mm±20 mm, so the electrolytic polishing efficiency is improved and the electrolytic polishing quality is very excellent.

The negative electrode frame 500 may selectively grind the inner side, the outer side, or the bottom surface as the polishing surface of the electrolytic polishing object 200, or polish all surfaces. In this embodiment, for convenience of explanation, the structure in which the negative electrode frame 500 is disposed inside the electrolytic polishing article 200 will be described.

The negative electrode frame 500 may include a lattice structure. The negative electrode frame 500 may be a stainless steel material having excellent conductivity, but it is not limited thereto. The negative electrode frame 500 may be a bar-shaped, L-shaped, angular, bar-shaped, wire mesh, orifice metal, or round-shaped plate, but it is not limited thereto.

The negative electrode frame 500 may include a first negative electrode plate 510 arranged along the first direction, a second negative electrode plate 520 arranged vertically different from the first direction, for example, and a different first direction arranged differently from the first direction and the second direction, for example. Three negative plates 530. The first negative electrode plate 510, the second negative electrode plate 520, and the third negative electrode plate 530 may be bar-shaped, L-shaped, angular, bar-shaped, wire mesh, orifice metal, or round-shaped plates, respectively. Not limited to this.

The first negative electrode plate 510 may be composed of a plurality of plates, which are arranged so as to be spaced up and down. The second negative electrode plate 520 may be composed of a plurality of plates, which are configured to be spaced up and down. The first negative plate 510 and the second negative plate 520 may grind the inner side surface of the abrasive article 200.

Between the first negative electrode plate 510 and the second negative electrode plate 520 arranged at the bottom, a plurality of negative electrode plates may be further arranged in a lattice structure. Multiple brackets can be combined with each other through assembly devices such as rivets, bolts or welding. The negative electrode frame 500 assembled as described above can effectively perform electrolytic polishing on the inner bottom surface of the electrolytic polishing article 200. If the bottom surface of the electrolytic polishing article 200 does not exist, a plurality of negative electrode plates between the first negative electrode plate 510 and the second negative electrode plate 520 arranged at the bottom can be removed.

The third negative electrode plate 530 may be formed in a region where the first negative electrode plate 510 and the second negative electrode plate 520 intersect. The plurality of third negative plates 530 may be configured to cross the plurality of first negative plates 510. The plurality of third negative plates 530 may be cross-configured with the plurality of second negative plates 520. The third negative plate 530 may be arranged along the longitudinal direction of the electrolytic abrasive article 200.

The first negative plate 510 and the second negative plate 520 may be arranged vertically, but it is not limited thereto. In addition, the third negative electrode plate 530 and the first negative electrode plate 510 may be arranged vertically, but it is not limited thereto.

The negative electrode frame 500 having the above-mentioned structure should be disposed apart from the polishing surface so as not to contact the electrolytic polishing article 200 of the positive electrode. For this, a partition member 700 may be provided on one side of the negative electrode frame 500. The partition member 700 may be installed to partition the negative electrode frame 500 from the side wall or bottom of the electrolytic abrasive article 200. The structure in which the partition member 700 is partitioned from the bottom of the negative electrode frame 500 and the electrolytic abrasive article 200 will be described below.

The partition member 700 may be formed in plurality on the first negative plate 510. The partition member 700 may be formed in plurality on the second negative electrode plate 520. The partition member 700 may be formed of an insulating material. The partition member 700 can bear the weight of the negative electrode frame 500, and can be formed of a material with strong acid resistance. The partition member 700 may include any one of PVC, rubber, urethane rubber, and bakelite. The partition member 700 may be combined with the first negative plate 510 by means of the C-shaped clamp 600. The partition member 700 may be formed of a plate having angular portions on one side, but its shape is not limited.

The above describes the case where the partition member 700 is formed on the first negative electrode plate 510 and the second negative electrode plate 520, but it is not limited to this, and may be attached to one side of the third negative electrode plate 530.

The structure in which the negative electrode frame 500 has a fixed length has been described above, but it is possible to use a variable structure negative electrode frame 300 that makes the size of the negative electrode frame 500 variable as the electrolytic polishing article 200 increases. Among them, the negative electrode frame 300 is described centering on the structures of the first negative electrode plate 510 and the second negative electrode plate 520.

As shown in FIG. 5, the first negative electrode plate 510 of the negative electrode frame 500 may be composed of a plurality of brackets, and its length may be increased or decreased. The structure of the second negative plate 520 may be the same as the structure of the first negative plate 510. Hereinafter, the structure of the first negative electrode plate 510 will be mainly described.

The first negative plate 510 may be configured to connect a plurality of brackets. The first negative plates 510 may be partially overlapped and moved toward or away from each other. The first negative plate 510 may be composed of a plurality of brackets. For convenience of description, the structure in which the first negative plate 510 is composed of the first bracket 512 and the second bracket 514 connected to the first bracket 512 will be mainly described . In the first negative electrode plate 510, the first support 512 may be referred to as a first negative support, and the second support 514 may be referred to as a second negative support.

A portion of the first bracket 512 may overlap with a portion of the second bracket 514. The overlapping area of the first bracket 512 and the second bracket 514 may be supported by the C-clamp 600. The C-shaped clamp 600 supporting the first bracket 512 and the second bracket 514 may be referred to as a fourth clamp.

The first bracket 512 and the second bracket 514 can move in directions away from or close to each other. The C-shaped clamp 600 can support the first bracket 512 and the second bracket 514 with a force such that the first bracket 512 and the second bracket 514 can move relative to each other. Unlike this, the C-shaped clamp 600 may further apply a fixing force after moving the first bracket 512 and the second bracket 514 to support the first bracket 512 and the second bracket 514.

The second negative plate 520 may include the first bracket 522 and the second bracket 524 in the same manner as the first negative plate 510. The first bracket 522 of the second negative plate 520 may move in a direction away from or close to the second bracket 524.

The first bracket 532 and the second bracket 524 of the second negative electrode plate 520 may be partially overlapped. The overlapping area of the first bracket 522 and the second bracket 524 of the second negative electrode plate 520 can be supported by the C-shaped clamp 600. Therefore, the length of the second negative plate 530 is variable.

The above describes the case where the first negative electrode plate 510 and the second negative electrode plate 520 have a variable structure, but it is not limited to this, and the third negative electrode plate 530 may be formed of a plurality of brackets and formed in a structure whose length is variable.

Returning to FIG. 1, the negative electrode frame 500 and the electrolytic polishing object 200 are arranged at an interval of 50 mm±20 mm, and therefore the space at the corner of the electrolytic polishing object 200 is very narrow. Therefore, it is not easy to join the plurality of negative electrode frames 500 at the corners of the electrolytic polishing article 200. In this embodiment, in order to couple the plurality of negative electrode frames 500 to the corners of the electrolytic abrasive article 200, an electrode coupling member 400 may be provided.

The electrode coupling member 400 may be disposed in a region where the first negative plate 510, the second negative plate 520, and the third negative plate 530 intersect. The electrode coupling member 400 may electrically connect the first negative electrode plate 510, the second negative electrode plate 520, and the third negative electrode plate 530. The electrode coupling member 400 may fix the first negative electrode plate 510, the second negative electrode plate 520, and the third negative electrode plate 530.

The electrode coupling member 400 may include a first bracket 410 combined with the first negative plate 510, a second bracket 420 combined with the second negative plate 520, and a third bracket 430 combined with the third negative plate 530.

The first bracket 410 may be formed in a shape corresponding to the first negative plate 510. For example, the first to third brackets 410, 420, and 430 may include an L shape, a bar shape, an angular shape, a bar shape, or a round shape, but it is not limited thereto. The first negative electrode plate 510 may be fixed in a state of overlapping with the first bracket 410 by means of the C-shaped clamp 600.

The second bracket 420 may be combined with the second negative electrode plate 520 by means of the C-shaped clamp 600, and the third bracket 430 may be combined with the third negative plate 530 by means of the C-shaped clamp 600. The C-type jig 600 fixing the first negative plate 510 may be called a first jig, and the C-type jig 600 fixing the second negative plate 520 may be called a second jig, fixing the C of the third negative plate 530 The type jig 600 may be referred to as a third jig.

On the other hand, the C-type jig 600 is formed of a conductive material, so the C-type jig 600 installed in the narrow space between the negative electrode frame 500 and the electrolytic polishing object 200 comes into contact with the electrolytic polishing object 200. An electrical short circuit occurs between the objects 200.

In order to prevent this, as shown in FIG. 4, an insulating portion 620 may be further formed on the side of the fixing portion 610 that fixes the negative electrode frame 500 and the electrode coupling member 400. Wherein, the fixing portion 610 may be disposed on one side of the first body 640 and the second body 650 respectively. The second body 650 may be formed in a C-shape and combined with the first body 640. The first body 640 may be combined with the second body 650 and move up and down. Therefore, the fixing portions 510 disposed opposite to the first body 640 and the second body 650 can move in a direction closer to or away from each other.

The insulating portion 620 may be formed on one side of the fixing portion 610 and contact the negative electrode frame 500 and the electrode coupling member 400. Therefore, even if the C-shaped jig 600 is in contact with one side of the electrolytic polishing article 200, an electrical short circuit between the electrolytic polishing article 200 and the negative electrode frame 500 can be prevented. The insulating portion 620 may include an elastic material. The insulating portion 620 may include PVC, rubber, polyurethane rubber, bakelite, etc., but is not limited thereto.

In addition, a part of the C-shaped second body 650 may be in contact with one side of the electrolytic abrasive article 200 or the negative electrode plate. To prevent this, an insulating film 650b may be further included on the surface of the second body 650. In order to maintain rigidity, the inside of the second body 650 may be composed of a conductive substance 650a, and an insulating film 650b may be coated on the outer surface of the second body 650.

In addition, in the C-shaped jig 600, in order to maximize the fixing force of the mutually joined frames, a convex portion 630 may be formed. The convex portion 630 has an effect of preventing the C-type jig 600 from slipping from the negative electrode frame 500, for example, and preventing the C-type jig 600 from being detached from the electrode coupling member 400.

In the above, the insulating portion 620 is formed on the side of the fixing portion 610 of the C-shaped jig 600. However, the fixing portion 610 may be formed of an insulating material, and the insulating portion 620 may be removed.

As shown in FIGS. 2 and 3, the angle θ23 formed by the first bracket 410 and the second bracket 420 may be 90 degrees, but it is not limited thereto. The third bracket 430 may be configured to form a 90-degree angle with the first bracket 410 and the second bracket 420, but it is not limited thereto.

The first bracket 410 may include a first face 412 and a second face 414. The second surface 414 of the first bracket 410 may be formed by bending a predetermined angle from the first surface 412 of the first bracket 410. In this embodiment, the angle θ1 formed by the first surface 412 of the first bracket 410 and the second surface 414 of the first bracket 410 may include 90 degrees.

The second bracket 420 may include a first face 422 and a second face 424. The second surface 424 of the second bracket 420 may be formed by bending a predetermined angle from the second surface 424 of the second bracket 420. In this embodiment, the angle θ2 formed by the first surface 422 of the second bracket 420 and the second surface 424 of the second bracket 420 may include 90 degrees.

The third bracket 430 may include a first face 432 and a second face 434. The second face 434 of the third bracket 430 may be formed by bending a predetermined angle from the first face 432 of the third bracket 434. In this embodiment, the angle θ3 formed by the first surface 432 of the third bracket 430 and the second surface 434 of the third bracket 430 may include 90 degrees.

The first surface 412 of the first bracket 410 can be combined behind the second surface 434 of the third bracket 430 by an assembly method including rivets, bolts, or welding. For this reason, holes H of the same size may be formed on the first surface 412 of the first bracket 410 and the second surface 434 of the third bracket 430.

The second surface 414 of the first bracket 410 may be combined behind the second surface 424 of the second bracket 420 by an assembly method including rivets, bolts, welding, or the like. For this reason, holes H of the same size may be formed on the second surface 414 of the first bracket 410 and the second surface 424 of the second bracket 420.

The first surface 422 of the second bracket 420 may be combined in front of the first surface 432 of the third bracket 430 by an assembly method including rivets, bolts, or welding. For this reason, holes H of the same size may be formed on the first surface 422 of the second bracket 420 and the first surface 432 of the third bracket 430.

The electrode coupling member 400 combines the first bracket 410 behind the third bracket 430 and the second bracket 420 in front of the third bracket 430, so that it can be assembled more firmly. In addition, the electrode coupling member 400 is coupled by the coupling member, so that it has an effect that the electrical conductivity can be improved.

The electrode coupling member 400 of the first embodiment has an effect that the time required for assembly of a plurality of negative plates can be shortened. In addition, the electrode coupling member 400 of the first embodiment has an effect that the negative electrode plate can be more firmly fixed. In addition, the electrode coupling member 400 of the first embodiment is easily attached to the corner of the narrow electrolytic polishing article 200, and has the effect of preventing a short circuit with the electrolytic polishing article 200.

In addition, in the past, the original multiple negative plates were independently fixed by means of jigs. At this time, the negative plates will be in a state where the surface conductivity decreases due to oxidation or the like during the electrolytic polishing process. Therefore, they are combined whenever necessary In the case of each negative electrode plate, the conductivity is lowered, and as a result, there is a problem that the efficiency or quality of electrolytic polishing is lowered.

According to the embodiment, in a state where the conductivity is excellent, the negative electrode plate is firmly fixed in advance, and the negative electrode frame and the bracket are prepared, thereby having a composite technical effect of excellent conductivity, electrolytic polishing efficiency, and very excellent polishing quality.

The first embodiment can be limited to the case where the electrolytic abrasive article 200 has a four-sided box shape. When the electrolytic abrasive article 200 has a four-sided box shape, the corner of the electrolytic abrasive article 200 may be formed to have 90 degrees. Of course, the embodiments are not limited to this, and even if the electrolytic polishing article 200 is not in the shape of a four-sided box, it can be applied when the corners of the electrolytic polishing article 200 constitute 90 degrees.

Next, another embodiment of the electrode coupling member 400 determined by the shape of the corner of the electrolytic polishing article 200 will be described.

FIG. 6 is a schematic perspective view showing the electrolytic polishing apparatus of the second embodiment, and FIG. 7 is a perspective view showing the electrode coupling member of the electrolytic polishing apparatus of the second embodiment. In the second embodiment, the case where the corner of the electrolytic polishing object is 90 degrees or more will be described. At this time, the electrolytic polishing object may be a chamber in the shape of a polygonal box or a polygonal ring.

As shown in FIG. 6, the electrolytic polishing apparatus of the second embodiment may include: an electrolytic cell 100 equipped with an accommodating space for accommodating an electrolytic polishing object 200 and an electrolyte; a negative electrode frame 500 that is connected to the electrolytic polishing object 200 The spaced apart configuration includes a first negative electrode plate 510 in a first direction, a second negative electrode plate 520 in a second direction, and a third negative electrode plate 530 in a third direction that is different from the first direction and the second direction, for example, perpendicular to the third direction; The electrode coupling member 400 is disposed at the corner of the electrolytic abrasive article 200, and connects the first negative electrode plate to the third negative electrode plates 510, 520, and 530.

The electrolytic cell 100 may be formed in a box shape equipped with an accommodating space inside. The electrolytic cell 100 may include a cylindrical shape or a polygonal box shape, but the shape is not limited. The electrolytic cell 100 may be filled with electrolyte. A rectifier may also be arranged outside the electrolytic cell 100. The rectifier can apply a positive (+) voltage to the electrolytic abrasive article, and can apply a negative (-) voltage to the negative frame.

The negative electrode frame 500 may include a first negative electrode plate 510 arranged along the first direction, a second negative electrode plate 520 arranged perpendicular to the first direction, and a third negative electrode plate 530 perpendicular to the first direction and the second direction. The first negative electrode plate 510, the second negative electrode plate 520, and the third negative electrode plate 530 may be bar-shaped, L-shaped, angular, bar-shaped, wire mesh, orifice metal, or round-shaped plates, respectively. Not limited to this.

The first negative electrode plate 510 may be composed of a plurality of plates, which are arranged so as to be spaced up and down. The second negative electrode plate may be composed of a plurality of plates, which are configured to be spaced up and down. The first negative plate 510 and the second negative plate 520 may grind the inner side of the electrolytic abrasive article 200. Between the first negative electrode plate 510 and the second negative electrode plate 520 arranged at the bottom, a plurality of negative electrode plates may be further arranged, but they may also be omitted.

The third negative electrode plate 530 may be formed in a region where the first negative electrode plate 510 and the second negative electrode plate 520 intersect. The third negative plate 530 may be arranged along the longitudinal direction of the electrolytic abrasive article 200.

The first negative plate 510 and the second negative plate 520 may be arranged vertically, but it is not limited thereto. In addition, the third negative electrode plate 530 and the first negative electrode plate 510 may be arranged vertically, but it is not limited thereto.

In the second embodiment, in order to couple the plurality of negative electrode frames 500 arranged at the corners of the electrolytic polishing article 200, an electrode coupling member 400 may be provided. The electrolytic abrasive article 200 may be formed in the shape of a polygonal box or a polygonal ring.

The electrode coupling member 400 may be disposed in a region where the first negative plate 510, the second negative plate 520, and the third negative plate 530 intersect. The electrode coupling member 400 may include a first bracket 410, a second bracket 420, and a third bracket 430. The first bracket 410 may be combined with the first negative plate 510. The second bracket 420 may be combined with the second negative plate 520. The third bracket 430 may be combined with the third negative plate 530.

The first bracket 410 may be formed in a shape corresponding to the first negative plate 510. The first negative electrode plate 510 may be fixed in a state of overlapping with the first bracket 410 by means of the C-shaped clamp 600. The second bracket 420 may be combined with the second negative electrode plate 520 by means of the C-shaped clamp 600, and the third bracket 430 may be combined with the third negative plate 530 by means of the C-shaped clamp 600.

As shown in FIG. 7, the angle θ23 formed by the first bracket 410 and the second bracket 420 may be formed to exceed 90 degrees. The angle θ23 between the first bracket 410 and the second bracket 420 may correspond to the angle formed by the angle of the electrolytic abrasive article 200. The third bracket 430 may be disposed at 90 degrees to the first bracket 410 and the second bracket 420.

The first bracket 410 may include a first face 412 and a second face 414. The second surface 414 of the first bracket 410 may be formed by bending a predetermined angle from the first surface 412 of the first bracket 410. In this embodiment, the angle θ1 formed by the first surface 412 of the first bracket 410 and the second surface 414 of the first bracket 410 may include 90 degrees.

The second bracket 420 may include a first face 422 and a second face 424. The second surface 424 of the second bracket 420 may be formed by bending a predetermined angle from the first surface 422 of the second bracket 420. In this embodiment, the angle θ2 formed by the first surface 422 of the second bracket 420 and the second surface 424 of the second bracket 420 may include 90 degrees.

The third bracket 430 may include a first face 432 and a second face 434. The second surface 434 of the third bracket 430 may be formed by bending a predetermined angle from the first surface 432 of the third bracket 430. In this embodiment, the angle θ3 formed by the first surface 432 of the third bracket 430 and the second surface 434 of the third bracket 430 may be formed at 90 degrees or more. The first bracket 410 is coupled to the second surface 434 of the third bracket 430, and the second bracket 420 is coupled to the first surface 432 of the third bracket 430. Therefore, the angle θ23 between the first bracket 410 and the second bracket 420 can be The angle θ3 formed by the first surface 432 of the three brackets 430 corresponds to the second surface 434.

The first surface 412 of the first bracket 410 can be combined behind the second surface 434 of the third bracket 430 by an assembly method including rivets, bolts, or welding. The second surface 414 of the first bracket 410 may be combined behind the second surface 424 of the second bracket 420 by an assembly method including rivets, bolts, welding, or the like. The first surface 422 of the second bracket 420 may be combined in front of the first surface 432 of the third bracket 430 by an assembly method including rivets, bolts, or welding.

The electrode coupling member 400 of the second embodiment can be easily installed at the corners of the electrolytic polishing article 200 having a degree of 90 degrees or more, and has an effect that electrolytic polishing can be effectively performed on the corners of the electrolytic polishing article.

8 is a schematic perspective view showing an electrolytic polishing device of a third embodiment. In the third embodiment, the structure in the case where there is no vertex at the corner of the electrolytic polishing object will be described. At this time, the electrolytic polishing object may be a four-sided or other polygonal chamber.

As shown in FIG. 8, the electrolytic polishing apparatus of the third embodiment may include: an electrolytic cell 100 equipped with an accommodating space for accommodating an electrolytic polishing object 200 and an electrolyte; a negative electrode frame that is separated from the electrolytic polishing object 200 Open configuration, including a first negative electrode plate 510 in a first direction, a second negative electrode plate 520 in a second direction, and a third negative electrode plate 530 in a third direction perpendicular to the first and second directions; electrode coupling member 400 , Which is arranged at the corner of the electrolytic abrasive article 200 and connects the first negative electrode plate to the third negative electrode plate 510, 520, 530.

The negative electrode frame 500 may include a first negative electrode plate 510 arranged along the first direction, a second negative electrode plate 520 arranged perpendicular to the first direction, and a third negative electrode plate 530 perpendicular to the first direction and the second direction. The first negative electrode plate 510, the second negative electrode plate 520, and the third negative electrode plate 530 may be bar-shaped, L-shaped, angular, bar-shaped, wire mesh, orifice metal, or round-shaped plates, respectively. Not limited to this.

The first negative electrode plate 510 may be composed of a plurality of plates, which are arranged so as to be spaced up and down. The second negative electrode plate 520 may be composed of a plurality of plates, which are configured to be spaced up and down. The first negative plate 510 and the second negative plate 520 may grind the inner side of the electrolytic abrasive article 200. Between the first negative electrode plate 510 and the second negative electrode plate 520 arranged at the bottom, a plurality of negative electrode plates may be further arranged, but they may also be omitted.

The third negative electrode plate 530 may be formed in a region where the first negative electrode plate 510 and the second negative electrode plate 520 intersect. The third negative plate 530 may be arranged along the longitudinal direction of the electrolytic abrasive article 200. The third negative electrode plate 530 may include a right third negative electrode plate 530a and a left third negative electrode plate 530b spaced apart from each other.

The electrode coupling member 400 may be disposed in a region where the first negative electrode plate 510, the second negative electrode plate 520, and the third negative electrode plates 530a and 530b on the left and right intersect. The electrode coupling member 400 may include a first bracket 410, a second bracket 420, a third bracket 430a on the left side, and a third bracket 430b on the right side. The first bracket 410 may be combined with the first negative plate 510. The second bracket 420 may be combined with the second negative plate 520. The left third bracket 430a may be combined with the third negative plate 530a on the left. The right third bracket 430b may be combined with the third negative plate 530b on the right. Between the third bracket 430a on the left and the third bracket 430b on the right, a connection member 440 may be further arranged. The connection member 440 may be formed of a stainless steel material made of metal. The connection member 440 is formed in a rod shape, but the shape is not limited.

The first bracket 410 may be formed in a shape corresponding to the first negative plate 510. The first negative electrode plate 510 may be fixed in a state of overlapping with the first bracket 410 by means of a C-shaped clamp. The second bracket 420 may be combined with the second negative plate 520 by means of a C-shaped jig. The left third bracket 430a may be combined with the third negative plate 530a on the left by means of a C-clamp. The right third bracket 430b may be combined with the right third negative plate 530b by means of a C-shaped clamp.

The angle formed by the first bracket 410 and the second bracket 420 may be 90. Unlike this, the angle formed by the first bracket 410 and the second bracket 420 may be formed over 90 degrees. When the electrolytic polishing object 200 is a four-sided box or ring-shaped structure, the angle formed by the first bracket 410 and the second bracket 420 may be 90 degrees. When the electrolytic polishing object 200 is a polygonal box or ring-shaped structure, the first The angle formed by one bracket 410 and the second bracket 420 may exceed 90 degrees.

The electrode coupling member 400 of the third embodiment can be effectively mounted even if the corners of the electrolytic polishing article 200 do not have vertices, and has the effect of efficiently performing electrolytic polishing on the corners of the electrolytic polishing article 200.

According to an embodiment, the electrode coupling member 400 is provided at the corner of the electrolytic abrasive article 200, so that the assembly time of a plurality of negative electrode plates can be shortened.

In addition, the electrode coupling member 400 according to an embodiment has an effect that the negative electrode frame can be more firmly fixed without a plurality of fixing members.

In addition, in an embodiment, there is an effect that the electrode coupling member 400 can be easily installed at the corner of the narrow electrolytic polishing article 200, and a short circuit with the electrolytic polishing article 200 can be prevented.

In addition, the electrode coupling member 400 of the embodiment can be easily installed at the corners of the electrolytic polishing article having a degree of 90 degrees or more, and has an effect that the electrolytic polishing can be effectively performed on the corners of the electrolytic polishing article 200.

In addition, the electrode coupling member 400 of the embodiment can be effectively mounted even if the corners of the electrolytically polished article do not have vertices, and thus have the effect that electrolytic polishing can be effectively performed on the corners of the electrolytically polished article 200.

In addition, in the embodiment, in a state where the conductivity is excellent, the negative electrode plate is firmly fixed in advance, and the negative electrode frame and the bracket are prepared, which has the technical effects of excellent conductivity, electrolytic polishing efficiency, and very excellent polishing quality.

Then, FIG. 9 is a perspective view showing an electrolytic polishing apparatus provided with a variable electrode frame of a fourth embodiment, FIG. 10 is a partial perspective view showing a support structure of the variable negative frame of FIG. 9, and FIG. 11 is a variable type of FIG. A schematic perspective view showing the negative electrode frame as the center.

In one embodiment, the variable electrode frame may include a variable negative electrode frame, but it is not limited thereto.

Referring to FIG. 9, the electrolytic polishing apparatus of the fourth embodiment may include: an electrolytic cell 100 equipped with an accommodating space for accommodating the electrolytic polishing object 200 and the electrolyte; and a variable negative electrode frame 300 configured in the electrolytic polishing One side of the abrasive surface of the object 200.

The electrolytic cell 100 may be formed in a box shape equipped with an accommodating space inside. The electrolytic cell 100 may include a cylindrical shape, a polygonal box, or a ring shape, but the shape is not limited.

The electrolytic cell 100 may be filled with electrolyte. As the electrolyte, you can choose from distilled water (H ₂ O), sulfuric acid (H ₂ SO ₄ ), phosphoric acid (H ₃ PO ₄ ), chromic acid, sodium nitrate (NaNO ₃ ), sodium chloride (NaCl), At least one substance selected from the group consisting of glycerin is mixed and constituted, but it is not limited thereto.

The electrolytic solution can be replaced after the electrolytic polishing of the electrolytic polishing article 200 is completed while the electrolytic cell 100 is filled. Unlike this, the electrolyte can flow in and out by means of a pump formed independently on one side of the electrolytic cell 100. Between the electrolytic cell 100 and the pump, an electrolyte inflow tube and an electrolyte outflow tube may be formed, and may further include an electrolyte flow adjustment part and a screening program. The screening program can filter the dregs and foreign substances contained in the electrolyte.

The electrolytic abrasive article 200 can be accommodated inside the electrolytic cell 100. The size of the electrolytic cell 100 may be larger than that of the electrolytic abrasive article 200. The electrolytic abrasive article may be a polygonal or cylindrical chamber or box. The electrolytic abrasive article 200 may be a chamber for OLED manufacturing.

On the other hand, when the electrolytic polishing article is a chamber for OLED, a MOCVD chamber for LED, etc., there is also a huge case where the weight is hundreds to thousands of kilograms (several tons).

In addition, the electrolytic abrasive article 200 may be a part of a component of the OLED chamber.

The electrolytic abrasive article 200 in this embodiment may have a structure with a smaller central region width. The electrolytic abrasive article 200 may include a first area 210 having a first area, a second area 230 having an area smaller than the area of the first area 210 on the first area 210, and having a second area 230 on the second area 230 The third region 250 is larger than the area of the second region 230. The areas of the first region 210 and the third region 230 may be the same or different from each other.

The shape of the electrolytic polishing article 200 is not limited to this, and may be a plate, a box shape, or a ring shape formed through vertically. In addition, the electrolytic polishing article 200 can designate all metal materials as electrolytic polishing articles.

The electrolytic abrasive article 200 may be immersed in the electrolyte. Since the electrolytic abrasive article 200 has a considerable weight, for example, it can be accommodated in the accommodating space of the electrolytic cell 100 in a state of being lifted by a crane or the like. The polishing surface of the electrolytic polishing object 200 may include the outer side, the inner side, the bottom surface, and the like of the electrolytic polishing object 200.

A rectifier may be further arranged on one side of the electrolytic cell 200. The rectifier may apply a positive (+) voltage to the electrolytic abrasive article, and may apply a negative (-) voltage to the variable negative frame 300. The rectifier may be electrically connected to the electrolytic abrasive article 200 by means of wires or the like.

The variable negative electrode frame 300 may be arranged inside and outside the electrolytic polishing article 200. The variable negative electrode frame 300 may be arranged at a predetermined interval from the polishing surface of the electrolytic polishing article 200. For example, the variable negative electrode frame 300 may be arranged at a distance of 50 mm±20 mm from the electrolytic abrasive article 200. The variable negative electrode frame 300 can selectively grind the inner side, the outer side, or the bottom surface as the grinding surface of the electrolytic polishing object 200, or grind all surfaces at the same time. In this embodiment, for convenience of explanation, a structure in which the variable negative electrode frame 300 is disposed inside the electrolytic polishing object 200 will be described.

The variable negative electrode frame 300 should be disposed on the first region 210 of the electrolytic polishing object 200 and on the polishing surface of the first region 210. If the second region 230 of the electrolytic abrasive article 200 is not separated from the first region 210, the variable negative electrode frame 300 should be disposed in the first region 210 through the second region 230 of the electrolytic abrasive article 200.

In the past, since the area of the negative electrode plate has been determined, it is not easy to pass through the second region 230 of the electrolytic abrasive article 200. If the size of the second region 230 passing through the electrolytic polishing article 200 is sufficiently large in the past to form a negative electrode plate, the first region 210 of the electrolytic polishing article 200 cannot be effectively electrolytically polished.

In this embodiment, in order to arrange the negative electrode plate in the first region 210 of the electrolytic abrasive article 200, a variable negative electrode frame 300 may be provided. In the present embodiment, the description will be centered on the variable negative electrode frame 300 disposed in the first region 210 of the electrolytic polishing article 200. The negative electrode plates disposed in the second region 230 and the third region 250 of the electrolytic polishing article 200 may be fixed negative electrode plates, and differently, or may be a variable electrode frame 300.

The variable negative electrode frame 300 may include a plate shape in a lattice structure. The variable negative electrode frame 300 may be made of copper, aluminum, or stainless steel with excellent conductivity and acid resistance, but it is not limited thereto. The variable negative electrode frame 300 may be a bar-shaped, L-shaped, corner-shaped, bar-shaped, round-shaped, wire mesh-shaped, or orifice-shaped plate, which may be configured by combining them.

The variable negative electrode frame 300 may include a first negative electrode plate 310 and a second negative electrode plate 320.

The first negative plate 310 and the second negative plate 320 may be configured to form a lattice structure. The first negative plate 310 may be formed in a long rod shape. The first negative plate 310 may be composed of a plurality of plates, which are configured to be spaced apart from each other. The second negative electrode plate 320 may be formed in a long rod shape. The second negative electrode plate 320 may be composed of a plurality of plates, arranged to be separated from each other. The first negative electrode plate 310 and the second negative electrode plate 320 may be arranged to constitute 90 degrees, but it is not limited thereto.

The first negative electrode plate 310 may be composed of a plurality of brackets, and may be constituted in such a manner that its length can be lengthened or reduced. The structure of the second negative plate 320 may be the same as the structure of the first negative plate 310. Hereinafter, the structure of the first negative electrode plate 310 will be mainly described.

The first negative plate 310 may be configured to connect a plurality of brackets. The first negative plates 310 may be partially overlapped and moved in a direction away from or close to each other. The first negative plate 310 may be composed of a plurality of brackets. For convenience of description, the structure in which the first negative plate 310 is composed of the first bracket 312 and the second bracket 314 connected to the first bracket 312 will be mainly described .

The first bracket 312 may be L-shaped, but it is not limited thereto. A portion of the first bracket 312 may overlap with a portion of the second bracket 314. The overlapping area of the first bracket 312 and the second bracket 314 may be supported by the C-shaped clamp 600.

As shown in FIG. 10, the first bracket 312 may include a first face 312a and a second face 312b. The second face 312b may include a shape bent at a predetermined angle from the first face 312a. The second bracket 314 may be formed in the same shape as the first bracket 312.

The first surface 312a of the first bracket 312 may be disposed overlapping the first surface 314a of the second bracket 314. The first surface 312a of the first bracket 312 may be disposed on the first surface 314a of the second bracket 314, but it is not limited thereto. The second surface 312b of the first bracket 312 may overlap the second surface 314b of the second bracket 314. The second surface 312b of the first bracket 312 may be disposed on the second surface 314b of the second bracket 314, but it is not limited thereto.

The overlapping area of the first surface 312a of the first holder 312 and the first surface 314a of the second holder 314 can be fixed by the fixing member of the electrode frame for electrolytic polishing. In an embodiment, the fixing member of the electrode frame for electrolytic polishing may be a jig.

For example, the overlapping area of the first surface 312a of the first bracket 312 and the first surface 314a of the second bracket 314 may be supported by the C-shaped clamp 600, but it is not limited thereto.

The C-shaped jig 600 may be configured as shown in FIGS. 4a and 4b, and the details described above are adopted.

For example, the C-shaped jig 600 may include a first body 640, a second body 650, and fixing portions 610 respectively disposed on one side of the first body 640 and the second body 650 facing each other. The fixing portion 610 may be disposed on one side of the first body 640 and the second body 650, respectively. The second body 650 may be formed in a C-shape and combined with the first body 640. The first body 640 may be combined with the second body 650 and move up and down. Therefore, the fixing portion 610 disposed opposite to the first body 640 and the second body 650 can move in a direction closer to or away from each other.

The fixing portion 610 may be arranged on one side of the first surface 312a of the first bracket 312 and the other side of the first surface 314a of the second bracket 314, and stably support the first bracket 312 and the second bracket 314. The C-shaped clamp 600 can be formed of a stainless steel material excellent in acid resistance.

In the embodiment, the fixing member of the electrode frame for electrolytic polishing has been described focusing on the function of fixing the negative electrode plate, but the function of the fixing member of the electrode frame is not limited to this.

For example, in the embodiment, the fixing member of the electrode frame for electrolytic polishing may fix the bracket of the predetermined electrode frame and the polishing object member. For example, the fixing member of the electrode frame for electrolytic polishing of the embodiment can be used to fix a predetermined protrusion of the polishing article member and the electrode frame bracket.

In addition, the fixing member of the electrode frame for electrolytic polishing in one embodiment can firmly fix the bracket of the predetermined electrode frame and the electrode frame.

The invention of the bracket of a predetermined electrode frame mentioned in an embodiment is another inherent invention concept of the applicant and the inventor.

9 and FIG. 10 again, the first surface 312a of the first bracket 312 and the first surface 314a of the second bracket 314 can move in directions away from or close to each other. The C-shaped jig 600 can support the first surface 312a of the first bracket 312 and the first of the second bracket 314 with a force such that the first surface 312a of the first bracket 312 and the first surface 314a of the second bracket 314 can move面314a. Unlike this, the C-shaped clamp 600 may further apply a fixing force to support the first bracket 312 and the second bracket 314 after moving the first surface 312a of the first bracket 312 and the first surface 314a of the second bracket 314.

The second negative plate 320 may include the first bracket and the second bracket in the same manner as the first negative plate 310. The second negative electrode plate 320 may be formed as a rod-shaped plate, but it is not limited thereto. The first bracket 322 of the second negative electrode plate 320 may move in a direction away from or close to the second bracket 324.

The first bracket 322 and the second bracket 324 of the second negative electrode plate 320 may be partially overlapped. The overlapping area of the first bracket 322 and the second bracket 324 of the second negative electrode plate 320 can be supported by the C-shaped clamp 600. Therefore, the length of the second negative electrode plate 320 is variable.

As shown in FIG. 11, when the overlapping area of the plurality of supports is minimized, the variable negative electrode frame 300 may have the largest area. Among them, it can be assumed that a plurality of brackets have the same length.

The entire length L11 of the first negative plate 310 may correspond to the sum of the lengths L1 of the brackets constituting the first negative plate 310. The entire length L21 of the second negative electrode plate 320 may be formed corresponding to the sum of the lengths L2 of the brackets constituting the second negative electrode plate 320 or slightly smaller. Among them, the area of the variable negative electrode frame 300 may be determined according to the overall length L11 of the first negative electrode plate 310 and the overall length L21 of the second negative electrode plate 320, in addition to the length of the region where a plurality of brackets overlap.

In contrast, when the repeating area of the plurality of supports is maximized, the variable negative electrode frame 300 may have the smallest area. The entire length L11 of the first negative electrode plate 310 may be twice the length L1 of one bracket constituting the first negative electrode plate 310. It can be assumed that the lengths of multiple brackets are the same, and multiple brackets may include three. The overall length L11 of the first negative plate 310 will vary depending on the number of multiple brackets. Similarly, the length of the second negative electrode plate 320 can be controlled in the same way as the first negative electrode plate 310.

Referring again to FIG. 9, the variable negative electrode frame 300 as described above is variable when passing through the second region 230 of the electrolytic abrasive article 200 so as to have an area that can pass through the second region 230. Next, the variable negative electrode frame 300 passing through the second region 230 may be changed correspondingly to the polishing surface area of the first region 210 of the electrolytic polishing object 200.

The above describes the case where the lengths of the first negative plate 310 and the second negative plate 320 are controlled at the same time, but the length of the first negative plate 310 or the second negative plate 320 can be changed appropriately according to the length and width of the polishing surface. For example, according to the size of the polishing surface of the electrolytic polishing object 200, the variable negative electrode frame 300 is assembled. If the assembled variable negative electrode frame 300 is disposed on the polishing surface of the electrolytic polishing object 200, it is possible to prevent the conventionally fixed negative electrode plate from being discarded or reassembled .

The variable-type negative electrode frame 300 having the structure described above should be disposed apart from the polishing surface so as not to contact the positive electrode electrolytic polishing article 200. For this, a partition member 700 may be provided on one side of the variable negative electrode frame 300. The partition member 700 may be installed spaced apart from the side wall or bottom of the variable negative electrode frame 300 and the electrolytic abrasive article 200. Next, the structure in which the partition member 700 is partitioned from the bottom of the variable negative electrode frame 300 and the electrolytic abrasive article 200 will be described.

The partition member 700 may be formed in plurality on the first negative electrode plate 310. The partition member 700 may be formed in plurality on the second negative electrode plate 320. The partition member 700 may be formed of an insulating material. The partition member 700 can bear the weight of the variable negative electrode frame 300, and can be formed of a material with strong acid resistance. The partition member 700 may include any one of PVC, rubber, urethane rubber, and bakelite. The partition member 700 may be combined with the first negative plate 310 by means of the C-shaped clamp 600. The partition member 700 may be formed of a plate having angular portions on one side, but its shape is not limited.

The variable negative electrode frame 300 of the fourth embodiment is assembled to a size corresponding to the polishing surface of the electrolytic polishing object 200, and is arranged on the polishing surface of the electrolytic polishing object, thereby having the ability to prevent discarding or reassembly of the used negative electrode plate, which may cause time and The effect of increased costs.

12 is a schematic perspective view showing a modification of the variable electrode frame of the fourth embodiment, and FIGS. 13 and 14 are cross-sectional views showing the operation of the variable electrode frame.

If referring to FIG. 12, the variable negative electrode frame 300 may include a first negative electrode plate 310 and a second negative electrode plate 320.

The first negative plate 310 and the second negative plate 320 may be configured to form a lattice structure. The first negative plate 310 may be composed of a plurality of plates, which are configured to be spaced apart from each other. The second negative electrode plate 320 may be composed of a plurality of plates, arranged to be separated from each other. The first negative electrode plate 310 and the second negative electrode plate 320 may be arranged to constitute 90 degrees, but it is not limited thereto.

The first negative electrode plate 310 and the second negative electrode plate 320 are respectively composed of a plurality of brackets, and may be configured so that the length thereof can be increased or decreased. Since the first negative plate 310 and the second negative plate 320 have the same operation structure, the first negative plate 310 will be mainly described.

The first negative plate 310 may be configured to connect a plurality of brackets. The first negative plate 310 may include a first bracket 312, a second bracket 314 coupled to one side of the first bracket 312, and a third bracket 316 coupled to one side of the second bracket 314. Among them, the number of brackets is not limited to three. For convenience of description, the case where there are three brackets will be described.

The first bracket 312 may be formed in a structure having a bottom and a side wall portion. For example, the first bracket 312 may be a structure with an open upper portion and a U-shaped cross section. The second bracket 314 may be formed with a structure composed of a bottom, a side wall portion, and a ceiling portion. For example, the second bracket 314 may include a polygonal ring shape formed through one side and the other side. The third bracket 316 may be formed in the same shape as the first bracket 312.

The first bracket 312 may be inserted into the second bracket 314 and slide. The first bracket 312 and the second bracket 314 may be partially or entirely overlapped. Similarly to this, the third bracket 316 may be arranged to overlap a part or the whole of the second bracket 314. If the overlapping area of the first bracket 312, the second bracket 314, and the third bracket 316 is minimized, the length of the first negative plate 310 may be maximized. On the contrary, if the overlapping area of the first bracket 312, the second bracket 314, and the third bracket 316 reaches the maximum, the length of the first negative plate 310 may reach the minimum.

The first bracket 312, the second bracket 314, and the third bracket 316 may be equipped with a coupling structure for fixing, so that the first bracket 312, the second bracket 314, and the third bracket 316 may be kept in a fixed state.

As shown in FIGS. 13 and 14, a protrusion 312 a may be formed on one side of the first bracket 312. The protrusion 312a may have a spherical shape. The protrusion 312a may have a circular shape with a small surface friction. The protrusion 312a can be accommodated inside the first bracket 312 by the force applied to the protrusion 312a. For this reason, inside the first bracket 312, a groove capable of accommodating the protrusion 312a may be formed. In addition, an elastic member such as a spring member may be connected to the protruding portion 312a. The elastic member maintains the protruding portion 312a in a protruding state, and if a force is applied to the protruding portion 312a, the protruding portion 312a can be induced into the first bracket 312. The structure of the third bracket 316 may be the same as the first bracket.

On one side of the second bracket 314, a receiving groove 314a may be formed corresponding to the projection 312a of the first bracket 312 and the projection 316a of the third bracket 316. The receiving groove 314a may be formed in a shape corresponding to the shape of the protrusion 316a of the third bracket 316. A plurality of accommodation grooves 314a may be arranged on one side of the second bracket 314. The receiving grooves 314a may be formed with the same interval.

If a force is applied to the first bracket 312 in the first direction, the protrusion 312a of the first bracket 312 may be coupled to the receiving groove 314a disposed in the outermost profile of the second bracket 314. Similarly, if a force is applied to the third bracket 316 in a second direction opposite to the first direction, the protrusion 316a of the third bracket 316 can be combined with the outermost configuration of the second bracket 314 The accommodation groove 314a. The area where the first bracket 312 and the second bracket 314 overlap can be minimized. The area where the third bracket 316 overlaps the second bracket 314 can be minimized. Therefore, the length of the first negative plate 310 can be maximized.

If a force is applied to the first bracket 312 again in the first direction, the protrusion 312a of the first bracket 312 can move toward the inside of the second bracket 314 and be coupled to the receiving groove 314a disposed inside the second bracket 314. The protrusion 312a of the first bracket 312 may be formed in a spherical shape, so if a force is applied to the first bracket 312 in the first direction, the protrusion 312a of the first bracket 312 is accommodated inside the first bracket 312 , The first bracket 312 slides inward of the second bracket 314. Next, the protruding portion 312a of the first bracket 312 may protrude and be combined with another receiving groove 314a of the second bracket 314, and the first bracket 312 may be stably fixed to the second bracket 314.

Similarly, if a force is applied to the third bracket 316 in the second direction, the third bracket 316 may move toward the second bracket 314 in a state where the protrusion 316a of the third bracket 316 is accommodated inside the third bracket 316 Slide inside. Next, the protruding portion 316a of the third bracket 316 may protrude and be coupled to another receiving groove 314a of the second bracket 314, and the third bracket 316 may be stably fixed to the second bracket 314.

If the area where the first support 312 overlaps the second support 314 and the area where the third support 316 overlaps the second support 314 reach the maximum, the length of the first negative plate 310 may reach the minimum.

The length of the second negative electrode plate 320 may be adjusted in the same manner as the bracket structure of the first negative electrode plate 310 described above. Therefore, the area of the variable negative electrode frame 300 can be effectively changed.

Although the above structure is configured to move the protruding portion 312a of the first bracket 312 toward the inside of the first bracket 312, if the protruding portion 312a is formed of an elastic material, there is an effect that it can be combined with the second bracket 314 without a receiving groove.

The above illustrates the case where the protruding portion 312a of the first bracket 312 is formed on the lower portion of the first bracket 312, but it is not limited thereto, and may be formed on the side wall of the first bracket 312. Corresponding to this, the receiving groove 314a of the second bracket 314 may also be formed on the side wall of the second bracket 314.

The variable negative electrode plate 300 as described above is configured such that the first holder 312 is slidably coupled to the second holder 314, which has an effect that the size of the variable electrode frame can be controlled more effectively.

15 is a perspective view showing an electrolytic polishing apparatus provided with a variable electrode frame in a fifth embodiment.

Referring to FIG. 15, the electrolytic polishing device of the fifth embodiment may include: an electrolytic cell 100 equipped with an accommodating space for accommodating electrolytic polishing objects 200 and an electrolyte; a variable negative electrode frame 300 disposed in the electrolytic polishing One side of the abrasive surface of the object 200.

The electrolytic cell 100 may be formed in a box shape equipped with an accommodation space inside. The electrolytic cell 100 may include a cylindrical shape, a polygonal box, or a ring shape, but the shape is not limited. The electrolytic cell 100 may be filled with electrolyte. As the electrolyte, you can choose from distilled water (H ₂ O), sulfuric acid (H ₂ SO ₄ ), phosphoric acid (H ₃ PO ₄ ), chromic acid, sodium nitrate (NaNO ₃ ), sodium chloride (NaCl), At least one substance selected from the group consisting of glycerin is mixed and constituted, but it is not limited thereto.

The electrolytic abrasive article 200 can be accommodated inside the electrolytic cell 100. The size of the electrolytic cell 100 may be larger than that of the electrolytic abrasive article 200. The electrolytic abrasive article may be a polygonal or cylindrical chamber or box. The electrolytic abrasive article 200 may be a chamber for OLED manufacturing. In addition, the electrolytic abrasive article 200 may be a part of a component of the OLED chamber.

A rectifier may be further arranged on one side of the electrolytic cell 100. The rectifier may apply a positive (+) voltage to the electrolytic abrasive article, and may apply a negative (-) voltage to the negative plate 300. The rectifier may be electrically connected to the electrolytic abrasive article 200 by means of wires or the like.

The variable negative electrode frame 300 may include a plate shape in a lattice structure. The variable negative electrode frame 300 may be made of copper, aluminum, or stainless steel with excellent conductivity and acid resistance, but it is not limited thereto. The variable negative electrode frame 300 may be a bar-shaped, L-shaped, corner-shaped, bar-shaped, round-shaped, wire mesh-shaped, or orifice-shaped plate, which may be configured by combining them.

Referring to FIG. 9, the variable negative electrode frame 300 may include a first negative electrode plate 310 and a second negative electrode plate 320. The first negative plate 310 and the second negative plate 320 may be configured to form a lattice structure. The first negative electrode plate 310 and the second negative electrode plate 320 may be arranged to constitute 90 degrees, but it is not limited thereto. The first negative electrode plate 310 and the second negative electrode plate 320 are respectively composed of a plurality of brackets, and may be configured so that the length thereof can be increased or decreased. The structure of the variable negative electrode frame 300 may adopt the structure of the fourth embodiment or the modification described above.

The electrolytic abrasive article 200 in the fifth embodiment may include a plurality of areas having mutually different areas. The electrolytic abrasive article 200 may include a first area 210 having a first area, a second area 230 having an area smaller than the first area 210, a third area 250 having an area smaller than the second area 230, having a area smaller than the The fourth area 270 is the area of the third area 250.

In the first region 210 of the electrolytic abrasive article 200, a first variable electrode frame 300a may be installed. The first variable electrode frame 300 a can be adjusted to the length of the first negative electrode plate and the second negative electrode plate, and is arranged in the first region 210. The first variable electrode frame 300a may be disposed apart from the polishing surface of the electrolytic polishing article 200. The first variable electrode frame 300a may be supported by a discharge port formed in the electrolytic polishing article 200 or another bracket, and is disposed apart from the polishing surface of the electrolytic polishing article 200.

In the second region 230 of the electrolytic polishing article 200, a second variable electrode frame 300b may be installed. The second variable electrode frame 300b can adjust the length of the first negative electrode plate and the second negative electrode plate, and is disposed in the second region 230 of the electrolytic polishing article 200.

In the third region 250 of the electrolytic abrasive article 200, a third variable electrode frame 300c may be installed. The third variable electrode frame 300c can adjust the length of the first negative electrode plate and the second negative electrode plate, and is arranged in the third region 250 of the electrolytic abrasive article 200.

Between the first variable electrode frame 300a and the second variable electrode frame 300b, a conductive connection plate 500 may be disposed. The connection plate 500 may transfer the negative electrode potential applied to the first variable electrode frame 300a to the second variable electrode frame 300b. The material of the connection plate 500 may be formed in the same material as the variable negative electrode frame 300. The shape of the connection plate 500 may be formed in any one of a bar shape, an L shape, an angular shape, a bar shape, a round shape, a wire mesh shape, and an orifice plate shape.

Similarly to this, the connection plate 500 may be arranged between the second variable electrode frame 300b and the third variable electrode frame 300c. In addition, a connecting plate 500 may be further formed between the first variable electrode frame 300a and the third variable electrode frame 300c. A plurality of connection plates 500 may be arranged between the variable negative electrode frames 300.

In the fourth region 270 of the electrolytic abrasive article 200, an auxiliary negative plate 600 may be further arranged. The fourth region 270 of the electrolytic abrasive article 200 may be a region protruding from the second region 230 of the electrolytic abrasive article 200. The fourth region 270 of the electrolytic abrasive article 200 may include a narrow-width region formed on the electrolytic abrasive article 200 or a hole formed therethrough. The fourth region 270 of the electrolytic polishing article 200 may be formed in a small size to the extent that the variable negative electrode frame 300 cannot be arranged.

Therefore, the auxiliary negative electrode plate 600 may not be formed in a quadrangular plate shape, but formed in a rod-shaped plate. The auxiliary negative plate 600 may be arranged at a distance from the polishing surface of the fourth region 270 of the electrolytic polishing article 200. The auxiliary negative plate 600 may be partially formed with a curve, but it is not limited thereto. The auxiliary negative electrode plate 600 transmits the negative electrode potential, and has an effect that the fourth region 270 of the electrolytic polishing object 200 can be effectively electrolytically polished.

In the above, one auxiliary negative plate 600 is arranged in the fourth region 270 of the electrolytic polishing article 200, but two or more auxiliary negative plates 600 may be arranged.

The electrolytic polishing apparatus of the fifth embodiment is provided with a plurality of variable electrode frames and auxiliary negative plates that have mutually different areas and are electrically connected, so as to have a polishing surface that can effectively grind electrolytic polishing articles having different areas The effect of electrolytic polishing.

(Industrial applicability)

In one embodiment, an electrode coupling member is provided at the corner of the electrolytically polished article, which has the effect of shortening the assembly time of a plurality of negative plates.

In addition, in one embodiment, the electrode coupling member has an effect that the negative electrode plate can be more firmly fixed without a plurality of fixing members.

In addition, in an embodiment, there is an effect that the electrode coupling member can be easily installed at the corner of a narrow electrolytic abrasive article, and a short circuit with the electrolytic abrasive article can be prevented.

In addition, in one embodiment, the electrode coupling member can be easily installed at the corner of the electrolytically polished object having a degree of 90 degrees or more, and has an effect that the electrolytic polishing can be effectively performed on the corner of the electrolytically polished object.

In addition, in one embodiment, the electrode coupling member can be effectively mounted even if the corner of the electrolytically polished object does not have a vertex, and thus has the effect that electrolytic polishing can be effectively performed on the corner of the electrolytically polished object.

In addition, in one embodiment, in a state where the conductivity is excellent, the negative electrode plate is firmly fixed in advance, and a negative electrode frame and a bracket are prepared, which has the technical effects of excellent conductivity, excellent electrolytic polishing efficiency, and excellent polishing quality.

In addition, in one embodiment, the jig also forms an insulating portion, thereby having the effect that the narrow space between the negative electrode frame and the electrolytic abrasive article can be easily installed.

In one embodiment, the variable electrode frame is assembled to a size corresponding to the polishing surface of the electrolytic polishing object, and is disposed on the polishing surface of the electrolytic polishing object, thereby saving time and expense required for newly assembled negative electrode plates or reassembly effect.

In addition, in one embodiment, it is possible to provide a variable electrode frame that can be effectively electrolytically polished even when the shape of the electrolytically polished object is complicated, and an electrolytic polishing device including the same.

In addition, in one embodiment, the variable electrode frame is configured such that the first bracket is slidingly coupled to the second bracket, which has the effect that the size of the variable electrode frame can be more effectively controlled.

In addition, in one embodiment, a plurality of variable electrode frames having different areas and electrically connected to each other are arranged on the polishing surface, so as to have a polishing surface for electrolytic polishing objects having different areas The effect of electrolytic polishing effectively.

The above has been described with reference to the drawings and the embodiments. However, it is understood by those with ordinary knowledge in the field that the embodiments can be variously modified and changed within the scope of the technical idea of the embodiments described in the following patent applications.

100‧‧‧Electrolyzer 200‧‧‧Electrolytic abrasive object 210‧‧‧First area 230‧‧‧Second area 250‧‧‧ Third area 270‧‧‧ Fourth area 300‧‧‧Negative frame 300a‧‧ ‧First variable electrode frame 300b‧‧‧Second variable electrode frame 300c‧‧‧third variable electrode frame 310‧‧‧First negative plate 312‧‧‧First bracket 312a‧‧‧First side/ Protruding portion 312b‧‧‧Second surface 314‧‧‧Second bracket 314a‧‧‧Accommodating groove 316‧‧‧ Third bracket 316a‧‧‧. Protruding portion 320‧‧‧Second negative plate 322‧‧‧ First bracket 324‧‧‧Second bracket 400‧‧‧Electrode bonding member 410‧‧‧First bracket 412‧‧‧First face 414‧‧‧Second face 420‧‧‧Second bracket 422‧‧‧ One side 424‧‧‧ Second side 430‧‧‧ Third bracket 430a‧‧‧Right third bracket 430b‧‧‧Left third bracket 432‧‧‧ First side 434‧‧‧Second side 440‧‧‧ Connecting member 500‧‧‧Negative frame/connecting plate 510‧‧‧First negative plate 512‧‧‧First bracket 514‧‧‧Second bracket 520‧‧‧Second negative plate 522‧‧‧First bracket 524‧ ‧‧Second bracket 530‧‧‧ Third negative electrode plate 530a‧‧‧Right third negative electrode plate 530b‧‧‧‧Left third negative electrode plate 600‧‧‧C-type clamp/auxiliary negative electrode plate 610‧‧‧Fixed part 620‧ ‧‧Insulation part 630‧‧‧Convex part 640‧‧‧First body 650‧‧‧Second body 650a‧‧‧Conducting substance 650b‧‧‧Insulation film 700‧‧‧Partition member H‧‧‧Hole L1 ‧‧‧L11‧‧‧L2‧‧‧L21‧‧‧L

[Fig. 1] A perspective view showing the electrolytic polishing device of the first embodiment. [Fig. 2] A perspective view showing the electrode coupling member of the electrolytic polishing device of the first embodiment. [Fig. 3] An exploded perspective view showing the electrode coupling member of the electrolytic polishing device of the first embodiment. [FIG. 4a]-[FIG. 4b] are perspective views showing jigs of the electrolytic polishing apparatus of the first embodiment, respectively. 5 is a perspective view showing a modification of the negative electrode frame of the electrolytic polishing device of the first embodiment. 6 is a schematic perspective view showing an electrolytic polishing device of a second embodiment. 7 is a perspective view showing the electrode coupling member of the electrolytic polishing device of the second embodiment. 8 is a schematic perspective view showing an electrolytic polishing device of a third embodiment. 9 is a perspective view showing an electrolytic polishing apparatus provided with a variable electrode frame according to a fourth embodiment. FIG. 10 is a partial perspective view showing the support structure of the variable negative electrode frame of FIG. 9. [FIG. 11] A schematic perspective view centered on the variable negative electrode frame of FIG. 9. 12 is a schematic perspective view showing a modification of the variable negative electrode frame of the fourth embodiment. [FIG. 13]-[FIG. 14] are cross-sectional views showing the operation of the variable negative electrode frame, respectively. [Fig. 15] Fig. 15 is a perspective view showing an electrolytic polishing device provided with a variable electrode frame according to a fifth embodiment.

100‧‧‧Electrolyzer

200‧‧‧Electrolytic abrasive

400‧‧‧electrode bonding member

410‧‧‧First bracket

420‧‧‧Second bracket

430‧‧‧third bracket

500‧‧‧Negative frame

510‧‧‧The first negative plate

520‧‧‧Second negative plate

530‧‧‧The third negative plate

600‧‧‧C type fixture

700‧‧‧Partition

Claims (10)

An electrode frame, which is used in an electrolytic cell equipped with an accommodating space for accommodating an electrolytic abrasive article and an electrolyte, includes: a negative electrode frame, which is spaced apart from the electrolytic abrasive article, and includes a first A first negative plate in one direction, a second negative plate in a second direction, a third negative plate in a third direction different from the first direction and the second direction, a The side includes a partition member that separates the negative electrode frame from the side or bottom surface of the electrolytic abrasive article; and an electrode coupling member, which is disposed at a corner of the electrolytic abrasive article to make the first negative electrode plate to the third The negative electrode plate connecting the electrode combining member includes a first bracket combined with the first negative plate, a second bracket combined with the second negative plate, and a third bracket combined with the third negative plate. The electrode frame according to claim 1, wherein the first bracket to the third bracket respectively include a first face and a second face forming a predetermined angle with the first face, the first negative plate and the first At least one or more of the first surface or the second surface of a bracket are overlapped and fixed by means of a first jig; the first surface of the first bracket is behind the second surface of the third bracket In combination, the second surface of the first bracket is combined behind the second surface of the second bracket, and the first surface of the second bracket is combined in front of the first surface of the third bracket. The electrode frame according to claim 1, wherein an angle between the first support and the second support corresponds to an angle formed by the corner portion of the electrolytic abrasive object, the first support and the second support The angle between is determined according to the angle between the first surface of the third bracket and the second surface of the third bracket. The electrode frame according to claim 1, wherein the third bracket comprises a plurality of brackets spaced apart from each other, the first bracket is combined on one side of the third bracket, and the other side of the third bracket A second bracket is combined, and a connecting member is connected between one side of the third bracket and the other side of the third bracket. The electrode frame according to claim 1, wherein the first negative electrode plate includes a first negative electrode support and a second negative electrode support, and the first negative electrode support is partially overlapped with the second negative electrode support, The second negative electrode holder moves away or closer, and the overlapping area of the first negative electrode holder and the second negative electrode holder is supported by a fourth jig. A variable electrode frame includes: a first negative plate, which is arranged along a first direction, and is composed of a plurality of brackets, the first negative plate includes a first bracket and a second bracket, the first bracket is in part In the state of being superimposed on the second bracket, move in a direction away from or close to the second bracket; and a second negative plate, which is arranged along a second direction that forms a predetermined angle with the first direction, by another A plurality of brackets; wherein, the overlapping area of the first bracket and the second bracket is a variable type that becomes longer or shorter, and an electrolytic abrasive article includes a first area and a second area having different widths from each other, The variable first negative plate is variable so as to be able to pass through the second area of the electrolytic abrasive article, and the first negative plate passing through the second area corresponds to the area of the first area of the abrasive article Earthly variable. The variable electrode frame according to claim 6, wherein the overlapping area of the first bracket and the second bracket is supported by means of a clamp, the clamp further includes an insulating portion arranged oppositely, and a side of the insulating portion A convex portion is formed. The variable electrode frame according to claim 6, wherein the first region of the first bracket slides along the second region of the second bracket, and on the side of the first bracket, a A protruding portion protruding or accommodated by the bracket is provided with a plurality of accommodating grooves corresponding to the protruding portion on one side of the second bracket. The variable electrode frame according to claim 6, wherein the electrolytic abrasive article includes a plurality of accommodating spaces having mutually different areas, and the variable electrode frame is provided with a plurality of such mutually arranged dispositions on the electrolytic abrasive article In a manner of accommodating space with the same area, the plurality of variable electrode frames are connected to each other by a conductive connecting plate, and on one side of the variable electrode frame, an auxiliary negative plate is also included. An electrolytic polishing device includes the electrode frame of any one of claims 1 to 5 or the variable electrode frame of any one of claims 6 to 9.

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