TWI680791B - 氦氣之純化方法及純化系統 - Google Patents

氦氣之純化方法及純化系統 Download PDF

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Publication number
TWI680791B
TWI680791B TW105106553A TW105106553A TWI680791B TW I680791 B TWI680791 B TW I680791B TW 105106553 A TW105106553 A TW 105106553A TW 105106553 A TW105106553 A TW 105106553A TW I680791 B TWI680791 B TW I680791B
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Taiwan
Prior art keywords
gas
helium
adsorption
adsorption tower
raw material
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TW105106553A
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English (en)
Chinese (zh)
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TW201637706A (zh
Inventor
岸井充
尤瓏
志摩康一
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日商住友精化股份有限公司
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Publication of TW201637706A publication Critical patent/TW201637706A/zh
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047Pressure swing adsorption
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/04Purification or separation of nitrogen
    • C01B21/0405Purification or separation processes
    • C01B21/0433Physical processing only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40007Controlling pressure or temperature swing adsorption

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
TW105106553A 2015-03-23 2016-03-03 氦氣之純化方法及純化系統 TWI680791B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015059204A JP6384960B2 (ja) 2015-03-23 2015-03-23 ヘリウムガスの精製方法および精製システム
JP2015-059204 2015-03-23

Publications (2)

Publication Number Publication Date
TW201637706A TW201637706A (zh) 2016-11-01
TWI680791B true TWI680791B (zh) 2020-01-01

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Family Applications (1)

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TW105106553A TWI680791B (zh) 2015-03-23 2016-03-03 氦氣之純化方法及純化系統

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JP (1) JP6384960B2 (ko)
KR (1) KR102446032B1 (ko)
CN (1) CN105983296A (ko)
TW (1) TWI680791B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108217616A (zh) * 2018-01-16 2018-06-29 中科睿凌江苏低温设备有限公司 一种用于低温超导磁体氦气液化的杂质气体分离筒
CN108355416A (zh) * 2018-04-19 2018-08-03 合肥硕朗自动化科技有限公司 一种用于真空箱检漏系统的氦气回收净化装置
CN109883623B (zh) * 2019-03-04 2021-06-22 浙江工业职业技术学院 一种基于真空箱检漏用的氦气回收净化装置
CN110748788A (zh) * 2019-10-18 2020-02-04 Tcl空调器(中山)有限公司 气体回收系统及气体回收方法
KR102667907B1 (ko) * 2023-11-29 2024-05-22 주식회사 케이와이테크 고순도 가스 정제 시스템, 이를 위한 제어 장치 및 제어 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5707425A (en) * 1994-10-21 1998-01-13 Nitrotec Corporation Helium recovery from higher helium content streams

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3564816A (en) 1968-12-30 1971-02-23 Union Carbide Corp Selective adsorption process
US3986849A (en) 1975-11-07 1976-10-19 Union Carbide Corporation Selective adsorption process
DE3716898A1 (de) * 1987-05-20 1988-12-15 Bergwerksverband Gmbh Verfahren und vorrichtung zur heliumanreicherung
US5542966A (en) * 1994-10-21 1996-08-06 Nitrotec Corporation Helium recovery
US6699307B1 (en) * 2002-10-11 2004-03-02 H2Gen Innovations, Inc. High recovery PSA cycles and apparatus with reduced complexity
JP5372607B2 (ja) * 2009-05-29 2013-12-18 住友精化株式会社 ヘリウム精製方法およびヘリウム精製装置
JP5846641B2 (ja) * 2012-07-02 2016-01-20 住友精化株式会社 ヘリウムガスの精製方法および精製装置
WO2014104196A1 (ja) * 2012-12-28 2014-07-03 大阪瓦斯株式会社 ガス精製装置
JP2014189480A (ja) * 2013-03-28 2014-10-06 Sumitomo Seika Chem Co Ltd 水素ガスの精製方法および精製装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5707425A (en) * 1994-10-21 1998-01-13 Nitrotec Corporation Helium recovery from higher helium content streams

Also Published As

Publication number Publication date
TW201637706A (zh) 2016-11-01
CN105983296A (zh) 2016-10-05
KR102446032B1 (ko) 2022-09-21
JP2016175815A (ja) 2016-10-06
JP6384960B2 (ja) 2018-09-05
KR20160113969A (ko) 2016-10-04

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