TWI680028B - Snake belly manufacturing method - Google Patents

Abstract

Provided is a method for manufacturing a bellows which can produce a bellows-shaped cover which is highly resistant to chemicals.

A forming die having a bellows-like crease is laminated with a plate-like base material to form a laminated sheet body, and the laminated sheet body is bent into a bellows shape, compressed and heated. After heating, the forming die is removed from the laminated sheet body. The base material is formed of, for example, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), and the like, and is formed in a bellows shape without using a rubber-based material.

Description

Snake belly manufacturing method

The present invention relates to a method for manufacturing a belly.

In order to protect the telescopic displacement part or the bending displacement part from the external disturbance factors such as liquid or dust, light, moisture, etc., a bellows-shaped cover is mostly used as a telescoping cover to shield such. For example, in a processing device using a liquid like a cutting device, the bellows-shaped cover system protects each shaft portion from the influence of liquid scattering (see Patent Document 1).

Rubber-like materials (chlorosulfonated polyethylene, chlorinated rubber, nitrile rubber, urethane rubber, etc.) are used in the bellows-shaped cover that prevents leakage and seeks durability. For example, a sheet coated with rubber on both sides of a core made of nylon will be a rubber-based (chloropine Rubber, nitrile rubber, urethane rubber, etc.) adhesives are fully adhered to form a lamellar body (see Patent Document 2).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2001-135593

[Patent Document 2] Japanese Patent Publication No. 4-55855

However, the chemicals used in the processing equipment, such as ethylene oxide, deteriorate rubber-based materials (such as chlorosulfonated polyethylene rubber, chloroprene rubber, and nitrile rubber). If the liquid containing ethylene oxide adheres to the bellows-shaped cover made of rubber-based material for a long period of time, the rubber will deteriorate and the liquid will absorb water. The problem of making the belly of the snake leak water.

Accordingly, the present invention has been made in view of the circumstances described above, and an object thereof is to provide a method for manufacturing a bellows that can produce a bellows-shaped cover that is highly resistant to drugs.

In order to solve the above-mentioned problems and achieve the objective, the method for producing a bellows according to the present invention includes a preparation step of stacking a base material made of a synthetic resin sheet and a sheet-shaped forming mold formed with a crease. To form a laminated sheet body; a temporary stop step, which temporarily stops and fixes the base material and the forming die of the laminated sheet body; a bending step, which is performed after the temporary stop step , The laminated sheet body is bent along the crease, and is bent into a bellows shape with a mountain portion and a valley portion; the heating step is to compress the mountain portion and the valley portion in a state of close contact with each other. The laminated sheet body is heated; and a forming die removing step is to remove the forming die from the laminated sheet body after the heating step is performed, to maintain the bellows-like shape with the base material monomer, and manufacture of the bellows The method is characterized in that: The crease is formed as a linear hole or a linear recess, and in the preparation step, the forming die is superposed on the base material.

Moreover, in the manufacturing method of the said bellows, it is preferable that the said base material consists of a single-layered synthetic resin sheet.

Moreover, in the manufacturing method of the said bellows, it is preferable that after this mold removal step, the base material is coated with an acrylic resin-based adhesive agent on the surface, and a resin-based buffer cloth is laminated on the surface to laminate.

Moreover, in the manufacturing method of the said bellows, it is preferable that the base material is any one of polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), and polyurethane (PU). .

字狀蛇腹，該

字狀蛇腹由：水平片材部、及由該水平片材部的兩端被折曲成大致垂直的下方而成的一對垂直部所成。 Moreover, in the manufacturing method of the said bellows, it is preferable that it is bend | folded in this bending process.

Zigzag belly

The zigzag bellows is formed of a horizontal sheet portion and a pair of vertical portions formed by bending both ends of the horizontal sheet portion to a substantially vertical downward direction.

In the method for manufacturing the belly of the present invention, a sheet-shaped forming die formed with a crease is used to form a bellows shape on a base material formed of a synthetic resin sheet and maintain the bellows shape as a single base material. This makes it possible to form a bellows shape without using a rubber-based material, so that a bellows-shaped cover having high resistance to medicine can be manufactured.

1‧‧‧Processing Equipment

2‧‧‧device body

10‧‧‧ chuck

11‧‧‧ keep face

20‧‧‧Processing means

21‧‧‧Cutter

22‧‧‧ mandrel

23‧‧‧Shell

24‧‧‧ Processing water supply nozzle

30‧‧‧ Cut out feeding means

31‧‧‧ball screw

32‧‧‧Pulse motor

33‧‧‧Y-axis moving abutment

40‧‧‧cut-in feeding means

41‧‧‧Pulse motor

42‧‧‧Z-axis moving member

50‧‧‧ processing feed means

51‧‧‧rail

52‧‧‧ball screw

53‧‧‧X-axis moving abutment

54‧‧‧Pulse motor

60‧‧‧ Cover member

61‧‧‧upper face

62‧‧‧Bending Section

70‧‧‧Snake belly mechanism

71A‧‧‧The first snake belly

71B‧‧‧ 2nd snake belly

80‧‧‧ drainage

81‧‧‧Drain

82‧‧‧ discharge pipe

90‧‧‧ mother material

91‧‧‧ Mountain

92‧‧‧Tanibe

100‧‧‧forming mold

101‧‧‧ Crease

101a‧‧‧ Crease for mountain

101b ‧ ‧ crease

102‧‧‧Triangle hole

102a‧‧‧bottom

102b‧‧‧Vertex

102c‧‧‧ equilateral

102d‧‧‧Vertical bisector

110‧‧‧ laminated sheet body

111‧‧‧ heat-resistant belt

112‧‧‧ Peripheral Department

113‧‧‧ tip

114‧‧‧ Buckle

710 (710A ~ 710D) ‧‧‧Snake belly member

710a‧‧‧Horizontal Sheet Department

710b‧‧‧Vertical

710c‧‧‧Mountain

710d‧‧‧Tanibe

710e‧‧‧Mountain

710f‧‧‧Tanibe

711‧‧‧Guide

711a‧‧‧roller

712‧‧‧Frame

713‧‧‧Frame

714‧‧‧Frame

810‧‧‧ bottom panel

811‧‧‧Inner peripheral wall

812‧‧‧outer wall

813‧‧‧Fixed metal fittings

FIG. 1 is an exploded perspective view showing a configuration example of a processing device.

FIG. 2 is a flowchart showing a method for manufacturing a belly.

FIG. 3 is a top view showing a configuration example of a base material.

FIG. 4 is a top view showing a configuration example of a sheet-shaped forming die.

FIG. 5 is a top view showing a temporary stop example (part 1) of a sheet-shaped forming die and a base material.

FIG. 6 is a top view showing a temporary stop example (No. 2) of a sheet-shaped forming die and a base material.

Fig. 7 is a perspective view showing a first bending example of a sheet-shaped forming die and a base material.

Fig. 8 is a perspective view showing a second bending example of a sheet-shaped forming die and a base material.

FIG. 9 is a perspective view showing a heating example of a sheet-shaped forming die and a base material.

FIG. 10 is a perspective view showing a configuration example of a heated sheet-shaped forming die and a base material.

Fig. 11 is a perspective view showing a separated base material.

Fig. 12 is a perspective view showing a separated sheet-shaped forming die.

The form (embodiment) for implementing the present invention will be described in detail with reference to the drawings. It is not intended to limit the present inventors by the content described in the following embodiments. In addition, the constituent elements described below include those that can be easily conceived by those skilled in the art and are substantially the same. The structures described below can be appropriately combined. In addition, various omissions, substitutions, or changes can be made in the scope without departing from the gist of the present invention.

[Embodiment]

A processing device according to an embodiment will be described. FIG. 1 is an exploded perspective view showing a configuration example of a processing device. The processing device 1 cuts a wafer (not shown). The processing device 1 includes a chuck base 10, a processing means 20, a cut-out feeding means 30, a cut-in feeding means 40, a processing feeding means 50, and a control means (not shown).

A wafer is a semiconductor wafer or optical element wafer having a semiconductor element formed on a substrate such as silicon or gallium arsenide, or an optical element formed on a substrate such as sapphire or SiC, an inorganic material substrate, a ductile resin material substrate, a ceramic substrate, or Various processing materials such as glass plates.

Here, the X-axis direction is a direction in which the wafer held in the chuck base 10 is processed and fed. The Y-axis direction is a direction orthogonal to the X-axis direction on the same horizontal plane, and the wafer 20 held in the chuck base 10 is a direction in which the processing means 20 is cut out and fed. The Z-axis direction is a direction orthogonal to the X-axis direction and the Y-axis direction, and is a vertical direction in this embodiment.

The chuck base 10 is disposed on the upper surface of the apparatus body 2 so as to be movable in the X-axis direction. The chuck base 10 is formed in a disc shape and includes a holding surface 11. The chuck base 10 is rotated by a rotation means (not shown) on a rotation axis orthogonal to the center of the holding surface 11. The holding surface 11 is an upper end surface of the chuck base 10 in the vertical direction, and is formed flat with respect to a horizontal plane. The holding surface 11 is made of, for example, porous ceramics, and sucks and holds the wafer by the negative pressure of a vacuum suction source (not shown).

Processing means 20 are wafers to be held in the chuck base 10 Performer. The processing means 20 is disposed in the apparatus body 2 through a cut-out feeding means 30 and a cut-in feeding means 40. The processing means 20 includes a cutting blade 21, a spindle 22, a housing 23, and a pair of processing water supply nozzles 24. The cutter 21 is formed as an extremely thin disc-shaped and annular cutting vermiculite. The mandrel 22 is provided with a cutter 21 detachably attached to a front end thereof. The housing 23 is provided with a drive source such as a motor (not shown) and supports the spindle 22 rotatably around a rotation axis in the Y-axis direction. The processing water supply nozzle 24 is disposed so as to sandwich the cutting blade 21 and supplies the processing water to the cutting blade 21. The processing means 20 rotates the mandrel 22 at a high speed, cuts the wafer with the cutting blade 21, and supplies the processing water to the cutting blade 21 through the processing water supply nozzle 24.

The cutting-out feeding means 30 is a person that moves the chuck base 10 and the processing means 20 relative to each other in the Y-axis direction. For example, the cut-out feed means 30 has a drive source such as a ball screw 31 or a pulse motor 32 extending in the Y-axis direction, and moves the Y-axis moving base 33 supporting the cut-in feed means 40 in the Y-axis direction.

The cutting-in feed means 40 is a person who moves the processing means 20 in the Z-axis direction orthogonal to the holding surface 11 of the chuck base 10. For example, the plunge feeding means 40 has a driving source such as a ball screw or a pulse motor 41 (not shown) extending in the Z-axis direction, and moves the Z-axis moving member 42 supporting the processing means 20 in the Z-axis direction.

The processing feed means 50 is a person that moves the chuck base 10 and the processing means 20 relative to each other in the X-axis direction. For example, the processing feed means 50 includes a pair of guide rails 51 extending in the X-axis direction and a pair of guide rails 51. A ball screw 52 arranged in parallel; a nut (not shown) screwed to the ball screw 52 and fixed to the X-axis moving base 53 provided on the guide rail 51; and a ball screw 52rotating pulse motor 54. The processing feed means 50 rotates the ball screw 52 by the pulse motor 54, thereby moving the X-axis moving base 53 supporting the chuck base 10 in the X-axis direction.

Here, in order to prevent the processing water supplied when the wafer is processed by the cutter 21 from adhering to the ball screws 52 and the like of the processing feed means 50, a cover member 60 and a bellows are provided in the processing feed means 50. Agency 70.

字狀，具備有：上面部61、及Y軸方向中的兩端部以Z軸方向向下折曲所形成的折曲部62。蓋罩構件60係被配設在支持夾頭座10的X軸移動基台53與夾頭座10之間。蓋罩構件60係形成寬幅方向(Y軸方向)的長度比加工進給手段50的寬幅方向(Y軸方向)的長度為稍長。 The cover member 60 is a plate-like member and is formed into a substantially square shape when viewed in the Z-axis direction. When the cover member 60 is viewed from the X-axis direction, it is formed as

The character shape includes an upper surface portion 61 and a bent portion 62 formed by bending both end portions in the Y-axis direction downward in the Z-axis direction. The cover member 60 is disposed between the X-axis moving base 53 supporting the chuck base 10 and the chuck base 10. The length of the cover member 60 in the width direction (Y-axis direction) is slightly longer than the length in the width direction (Y-axis direction) of the processing feed means 50.

The bellows mechanism 70 is disposed so as to extend in the X-axis direction through the cover member 60. The bellows mechanism 70 is composed of a first bellows 71A and a second bellows 71B. A first bellows 71A is arranged on one side of the cover member 60, and a second bellows is arranged on the other side of the cover member 60. 71B.

字狀，具備有：水平片材部710a、及一對垂直部710b。水平片材部710a係沿著水平面，以伸縮方向(X軸方向)交替形成有山部710c及谷部710d。水平片材部710a的寬幅方向(Y軸方向)的長度係與蓋罩構件60的寬幅方向(Y軸方向)的長度為大致相同長度。亦即，水平片材部710a的寬幅方向(Y軸方向)的長度係形成地比加工進給手段50的寬幅方向(Y軸方向)的長度稍長。蛇腹構件710A、710B的垂直部710b係由水平片材部710a的寬幅方向(Y軸方向)中的兩端，以大致垂直地朝下方折曲而形成。一對垂直部710b係形成為蛇腹狀，以伸縮方向交替形成有山部710e及谷部710f。蛇腹構件710A與蛇腹構件710B係透過導架711而相連結。導架711若由X軸方向觀看，形成為與蛇腹構件710A、710B相同的

字狀，在導架711的下端的各個安裝有用以改善平滑的滾輪711a。在與蓋罩構件60相連結的蛇腹構件710B的X軸方向中的端面係安裝有未圖示之框架，藉由未圖示之螺絲，固定框架與蓋罩構件60的端面。 The first snake belly 71A is composed of two snake belly members 710A and 710B. The bellows members 710A and 710B are formed of a synthetic resin such as polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), and the like. The bellows members 710A and 710B are formed as viewed from the X-axis direction.

It is formed in a letter shape and includes a horizontal sheet portion 710a and a pair of vertical portions 710b. The horizontal sheet portion 710a has the mountain portions 710c and the valley portions 710d alternately formed along the horizontal plane in the telescopic direction (X-axis direction). The length in the width direction (Y-axis direction) of the horizontal sheet portion 710 a is approximately the same as the length in the width direction (Y-axis direction) of the cover member 60. That is, the length in the width direction (Y-axis direction) of the horizontal sheet portion 710 a is formed to be slightly longer than the length in the width direction (Y-axis direction) of the processing feed means 50. The vertical portions 710b of the bellows members 710A and 710B are formed by bending both sides of the horizontal sheet portion 710a in the width direction (the Y-axis direction) so as to be bent substantially vertically downward. The pair of vertical portions 710b are formed in a bellows shape, and mountain portions 710e and valley portions 710f are alternately formed in the telescopic direction. The bellows member 710A and the bellows member 710B are connected through a guide frame 711. The guide frame 711 is formed in the same manner as the bellows members 710A and 710B when viewed from the X-axis direction.

Each of the lower ends of the guide frame 711 is mounted in a zigzag shape to improve smoothness of the roller 711a. A frame (not shown) is attached to an end surface in the X-axis direction of the bellows member 710B connected to the cover member 60, and the frame and the end surface of the cover member 60 are fixed by screws (not shown).

The second snake belly 71B is configured in the same manner as the first snake belly 71A. That is, the second bellows 71B is composed of two bellows members 710C and 710D. The bellows members 710C and 710D are equipped with: The material portion 710a and the pair of vertical portions 710b. The horizontal sheet portion 710a has the mountain portions 710c and the valley portions 710d alternately formed along the horizontal plane in the telescopic direction (X-axis direction). The length in the width direction (Y-axis direction) of the horizontal sheet portion 710 a is substantially the same as the length in the width direction (Y-axis direction) of the cover member 60. The vertical portions 710b of the bellows members 710C and 710D are formed by bending both sides of the horizontal sheet portion 710a in the width direction (the Y-axis direction) so as to be bent substantially vertically downward. The pair of vertical portions 710b are formed in a bellows shape, and mountain portions 710e and valley portions 710f are alternately formed in the telescopic direction. The bellows member 710C and the bellows member 710D are connected through a guide frame 711. Rollers 711a for improving the smoothness are installed at each lower end of the guide frame 711. A frame 713 is attached to an end surface in the X-axis direction of the bellows member 710C connected to the cover member 60, and the end faces of the frame 713 and the cover member 60 are fixed by screws (not shown).

As described above, the first bellows 71A and the second bellows 71B connected to the cover member 60 cover the processing feed means 30 in the X-axis direction. When the cover member 60 moves in the X-axis direction along with the movement of the chuck base 10, the first snake abdomen 71A expands and the second snake abdomen 71B contracts, or the first snake abdomen 71A contracts and the second snake abdomen 71B expands. Among them, in the moving range of the cover member 60, the first snake belly 71A or the second snake belly 71B is not extended too much to not return to its original state, and the first snake belly 71A or the first snake belly 2 The case where the bellows 71B is completely contracted and the cover member 60 is prevented from moving.

A drainage means is arranged on the lower side of the bellows mechanism 70 to block the processing water flowing down from the bellows mechanism 70 together with the machining chips. 80. The drainage means 80 includes a drainage path 81 and a discharge pipe 82. The drain path 81 is formed in a substantially rectangular frame shape so as to surround the first and second bellows 71A and 71B connected to the cover member 60, and a portion where the processing water flows is formed in a groove shape.

The drainage path 81 includes a bottom panel 810 that positions the vertical portion 710b of the bellows member 710 (710A to 710D) of the bellows mechanism 70, an inner peripheral wall 811 that is erected on the inner peripheral side of the bottom panel 810, and is erected An outer peripheral wall 812 on the outer peripheral side of the bottom surface portion 810. The inner peripheral wall 811 is located inside the vertical portion 710b of the bellows member 710, and the outer peripheral wall 812 is located outside the vertical portion 710b of the bellows member 710. Thereby, the bottom panel 810 can block the processing water flowing down from the vertical portion 710 b of the bellows member 710, and the processing water blocked by the bottom panel 810 can flow toward the discharge pipe 82.

Fixing metal fittings 813 are attached to both ends in the X-axis direction of the inner peripheral wall 811 of the drainage channel 81. One of the fixing metal fittings 813 is a frame 712 fixed to the end face of the bellows member 710A attached to the first snake belly 71A, and the other fixing metal fitting 813 is fixed to the second snake abdomen 71B. The end frame 714 of the bellows member 710D. Thereby, both ends in the X-axis direction of the bellows mechanism 70 are fixed.

The discharge pipe 82 is connected to an opening portion (not shown) in which a part of the bottom plate 810 of the drainage channel 81 is formed, and discharges the processed water accumulated in the drainage channel 81 to the outside. For example, the drainage path 81 is arranged slightly inclined, and a drain pipe 82 is disposed at the lowest position. With this, the drainage path 81 The processed water flows out toward the discharge pipe 82 at the lowest position, and is discharged to the outside through the discharge pipe 82.

The control means 80 controls each component of the processing apparatus 1. For example, the control means 80 is a drive circuit (not shown) connected to a pulse motor that drives the cutting-out feed means 30, the cut-in feed means 40, and the processing feed means 50, and controls the drive circuit to determine X of the chuck base 10. A position in the axial direction, or a position in the Y-axis direction and the Z-axis direction of the processing means 20.

Next, the manufacturing method of the bellows of embodiment is demonstrated. FIG. 2 is a flowchart showing a method for manufacturing a belly. FIG. 3 is a top view showing a configuration example of a base material. FIG. 4 is a top view showing a configuration example of a sheet-shaped forming die. FIG. 5 is a top view showing a temporary stop example (No. 1) of a sheet-shaped forming die and a base material, and the forming die is arranged on the upper side. FIG. 6 is a top view showing a temporary stop example (No. 2) of a sheet-shaped forming die and a base material, and the base material is arranged on the upper surface side. Fig. 7 is a perspective view showing a first bending example of a sheet-shaped forming die and a base material. Fig. 8 is a perspective view showing a second bending example of a sheet-shaped forming die and a base material. FIG. 9 is a perspective view showing a heating example of a sheet-shaped forming die and a base material. FIG. 10 is a perspective view showing a configuration example of a heated sheet-shaped forming die and a base material. Fig. 11 is a perspective view showing a separated base material. Fig. 12 is a perspective view showing a separated sheet-shaped forming die.

First, the operator superimposes the base material 90 and the sheet-shaped forming die 100 formed with a crease to form a laminated sheet body 110 (step S1 shown in FIG. 2; preparation step). Here, the base material 90 and the forming die 100 is a synthetic resin sheet made of polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), and polyurethane (PU). The thickness of the base material 90 is about 20 μm to 300 μm, and the hardness (Rockwell) of the base material 90 is about R60 to 120.

The base material 90 and the molding die 100 are substantially the same size as shown in FIGS. 3 and 4, and are formed in a rectangular shape. The forming die 100 is formed with a plurality of substantially straight folds 101 and triangular holes 102 extending in a wide direction. The crease 101 is used to form the mountain portion 710c and the valley portion 710d of the bellows member 710A. For example, the crease 101 is formed by alternately forming a crease 101 a for a mountain portion and a crease 101 b for a valley portion at a constant interval in the stretching direction of the forming die 100. The crease 101a for the mountain part and the crease 101b for the valley part are formed into a substantially straight line like a hole-like wiring, and are thereby formed to be bendable. However, it is not limited to the hole-shaped wiring, and a linear concave portion may be formed on the surface or the back surface of the forming die 100 so as to be formed to be bendable.

The triangular hole 102 is used to form the vertical portion 710b, and the forming die 100 is provided with an opening. The triangular hole 102 is formed as an equilateral triangle, and the bottom edge 102a is formed on a line that bends both ends of the base material 90 in the width direction to a substantially vertical line, and is formed as a fold for a mountain portion adjacent to the expansion direction. The intervals of the marks 101a are the same length. In addition, a vertex 102b of the triangular hole 102 is formed on a crease 101b for a valley portion in the vertical portion 710b side.

The forming die 100 configured as described above is superposed on the base material 90 to form a laminated sheet body 110. At this time, the forming die 100 and the base material 90 are superposed so that the base material 90 does not protrude from the forming die 100. Pick up Then, the worker temporarily stops and fixes the base material 90 and the forming die 100 of the laminated sheet body 110 (step S2; temporary stopping step). For example, as shown in FIG. 5, first, in a state where the laminated sheet body 110 is placed with the forming die 100 on the upper side, the heat-resistant tape 111 is adhered so as to cover the triangular holes 102 along the arrangement direction of the triangular holes 102. Thereby, the base material 90 exposed through the triangular hole 102 and the molding die 100 can be partially bonded together through the heat-resistant tape 111. Next, as shown in FIG. 6, the heat-resistant tape 111 is adhered to the four sides of the outer peripheral portion 112 of the laminated sheet body 110, and the outer peripheral portion of the base material 90 and the outer peripheral portion of the molding die 100 are bonded together. 6 is a laminated sheet body 110 in which the base material 90 is arranged on the upper surface side.

Next, the operator bends the laminated sheet body 110 into a bellows shape (step S3; bending step). For example, as shown in FIG. 7, the operator forms the laminated sheet body 110 as a mountain fold along the crease 101 a for the mountain portion of the forming die 100, and forms the laminated sheet body 110 along the crease 101 b for the valley portion. For the valley fold, the laminated sheet body 110 is folded into a bellows shape having a mountain portion 91 and a valley portion 92.

In addition, as shown in FIG. 8, the operator formed the triangular hole 102 as a valley fold along the vertical bisector 102 d of the triangular hole 102, and formed two equilateral sides 102 c as a mountain fold. As a result, the end portion 113 of the laminated sheet body 110 is bent substantially vertically into a bellows shape, and a pair of vertical portions 710b are formed at both ends of the horizontal sheet portion 710a.

Next, the operator heats the laminated sheet body 110 having a pair of vertical portions 710b and horizontal sheet portions 710a formed by a heating device (not shown) (step S4; heating step). For example, the operator department As shown in FIG. 9, the laminated sheet body 110 is folded and contracted in a telescopic direction, and compressed until the mountain portion 91 and the valley portion 92 of the laminated sheet body 110 are in close contact with each other, and each of the vertical portions 710 b is fixed by the fastener 114. With horizontal sheet portion 710a. Next, the worker heats the laminated sheet body 110 with a heating device in a state where the laminated sheet body 110 is compressed. The heating device heats the laminated sheet body 110 by, for example, hot water, hot air, steam, or the like. The temperature at which the laminated sheet body 110 is heated is about 50 ° to 300 °, and the heating time is about 1 minute to 10 minutes. Preferably, the heating temperature is about 80 ° to 200 °, and the heating time is about 2 minutes to 5 minutes. For example, the heating temperature is set to about 130 °, and the heating time is set to about 3 minutes.

Next, the operator removes the forming die 100 from the laminated sheet body 110 (step S5; forming die removal step). For example, the operator radiates heat of the laminated sheet body 110 by natural cooling or the like. Next, the operator removes the fastener 114 from the cooled laminated sheet body 110 and, as shown in FIG. 10, stretches the compressed laminated sheet body 110. The worker peels off the heat-resistant tape 111 from the laminated sheet body 110 and, as shown in FIGS. 11 and 12, removes the forming die 100 from the base material 90. The base material 90 from which the forming die 100 is removed is subjected to heat treatment in a compressed state. Therefore, the base material 90 alone maintains a bellows-like shape and forms a bellows member 710.

The used forming mold 100 can be restored to a planar shape and reused. For example, by using a flat plate (not shown), the used molding die 100 is pressed from both sides, and then heated to restore the flat shape. In addition, the forming mold 100 formed in a bellows shape may be bent in the opposite direction and restored to Flat shape.

As described above, according to the method for manufacturing the belly of the embodiment, the base material 90 is formed into a belly shape using the forming die 100 having the crease 101 and the triangular hole 102, and the base material 90 is used to maintain the belly shape. The base material 90 is formed of, for example, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), etc., without using a rubber-based material, the belly can be easily formed. shape. Thereby, the bellows member 710 which does not deteriorate by the chemical | medical agent used in the processing apparatus 1, for example, ethylene oxide, and has strong resistance to a chemical | medical agent can be manufactured. In addition, since no rubber-based material is used, the weight can be reduced, and the burden on the bent portion of the bellows member 710 can be reduced. In addition, it is not necessary to fully apply adhesive to the sheet in the bonding process as is customary, or to prevent the air bubbles from being mixed during the bonding process, and to reduce the work consumed by the operation time, thereby simplifying the process and enabling the operation. Improved energy efficiency.

字狀蛇腹，該

字狀蛇腹由：水平片材部710a；及由水平片材部710a的兩端被折曲成大致垂直的下方而成的一對垂直部所成。即使為如上所示之複雜的蛇腹狀，亦可使用成形模100而容易形成。 In addition, the bellows member 710 formed by the base material 90 is bent into

Zigzag belly

The zigzag bellows is made up of: a horizontal sheet portion 710a; and a pair of vertical portions formed by bending both ends of the horizontal sheet portion 710a to be substantially vertical downward. Even if it has a complex bellows shape as described above, it can be easily formed using the forming die 100.

[Modification]

Next, a modification of the embodiment will be described. The bellows member 710 may cover the surface with a resin-based cushion cloth. For example, after removing the molding die 100 from the base material 90 (after step S5), the worker The adhesive is applied to the surface of the base material 90 having a bellows shape, and a resin-based buffer cloth is laminated on the surface of the base material 90 having a bellows shape to be laminated. This can reduce damage to the bellows member 710 caused by the scattered pieces scattered during processing by the processing means 20.

Further, a serpentine-shaped return film (not shown) is provided on the vertical portion 710 b of the bellows member 710 so that the droplets of the processed water do not scatter upward from the drainage path 81. For example, after removing the forming die 100 from the base material 90 (after step S5), the operator covers the drainage path 81 from one end side to the other end side in the telescopic direction of the bellows member 710, and then A bellows-shaped return film protruding from the inner side of the vertical portion 710b is fixed.

In addition, the above is to fix the compressed laminated sheet body 110 by the fastener 114, but it is not limited to this. For example, the compressed laminated sheet body 110 may be sandwiched and fixed by a pair of plate-like members and heated.

In addition, as described above, the example in which the fastener 114 is removed from the laminated sheet body 110 after cooling, but if the bellows shape can be attached to the base material 90, the timing of removing the fastener 114 is not limited to after cooling.

In addition, the above-mentioned workers use the forming die 100 to manufacture the bellows member 710 from the base material 90. However, the bellows manufacturing device (not shown) may be used for automatic manufacture. For example, the bellows manufacturing apparatus is provided with a lamination means for laminating the base material 90 and the forming die 100 to form a laminated sheet body 110, and a heat-resistant belt for laminating the base material 90 of the laminated sheet body 110 and the forming die 100. 111 temporary stopping means fixed by temporarily stopping each other; laminating sheets Means for bending the body 110 into a bellows shape; heating means for heating the laminated sheet body 110 with hot water, hot air, steam, etc .; and removal means for removing the forming die 100 from the laminated sheet body 110.

In addition, the above description of the bellows member 710 manufactured by the bellows manufacturing method described above protects the processing feed means 50 from the influence of processing water or machining chips generated during wafer cutting, but is not limited thereto. For example, the bellows member 710 may be used to protect a movable portion or a shaft portion of a processing device such as a lathe or a milling machine from being affected by oil-containing cutting fluid or chips.

Claims (5)

A method for manufacturing a bellows is provided with a preparation step of laminating a base material made of a synthetic resin sheet and a sheet-shaped forming mold formed with a crease to form a laminated sheet body; temporarily The stopping step is to temporarily stop and fix the base material and the forming die of the laminated sheet body to each other; the bending step is to implement the temporary stopping step to move the laminated sheet body along The crease is bent and bent into a bellows shape having a mountain portion and a valley portion; a heating step of heating the laminated sheet body in a state of being compressed until the mountain portion and the valley portion are in close contact with each other; and forming The mold removing step is to remove the forming mold from the laminated sheet body after the heating step is performed, and maintain the bellows-like shape with the base material alone. The manufacturing method of the bellows is characterized by: The crease is formed as a linear hole or a linear recess, and in the preparation step, the forming die is superposed on the base material. For example, the method for manufacturing a bellows according to item 1 of the application, wherein the base material is composed of a single layer of the synthetic resin sheet. For example, the method for manufacturing a bellows according to item 1 of the application, wherein after the step of removing the forming die, the base material is coated with an acrylic resin-based adhesive on the surface, and a resin-based buffer cloth is laminated on the surface to perform lamination. . For example, the method for manufacturing a bellows according to any one of claims 1 to 3, wherein the base material is polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP ), Any of polyurethane (PU). For example, the manufacturing method of the belly of the application scope of the patent, wherein, in the bending step, it is bent into Zigzag belly The zigzag bellows is formed of a horizontal sheet portion and a pair of vertical portions formed by bending both ends of the horizontal sheet portion to a substantially vertical downward direction.