JP4427143B2 - Cutting equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a cutting device that performs processing using processed water, and more particularly, to a cutting device that prevents a failure of the device due to intrusion into the processing water device.
[0002]
[Prior art]
As an apparatus for performing processing using the processing water, for example, there is a cutting apparatus 70 shown in FIG. In this cutting apparatus 70, for example, the semiconductor wafer W integrated with the frame F via the tape T is held by the holding unit 21, and the holding unit 21 moves in the X-axis direction to be cut by the alignment unit 11. Then, the holding means 21 reciprocates in the X-axis direction and the cutting means 22 sequentially moves in the Y-axis direction, so that the action of the cutting blade 48 that constitutes the cutting means 22 is rotated. In response, cutting is performed. Moreover, in the case of cutting, in order to cool the contact part of the cutting blade 48 and the semiconductor wafer W, cutting water is supplied as processing water.
[0003]
Thus, it is necessary to move the holding means 21 in the X-axis direction during cutting, but in order to prevent cutting water from entering the inside of the apparatus, the bellows portions are provided at both ends of the holding means 21 in the X-axis direction. 71 is connected. During cutting, the holding means 21 reciprocates in the X-axis direction with the expansion and contraction of the bellows portion 71, thereby preventing cutting water from entering the inside of the apparatus by the bellows portion 71.
[0004]
[Problems to be solved by the invention]
However, a hole is opened in the bellows portion 71 due to the operator dropping the tool to the bellows portion 71 during work or fatigue of the bellows portion 71 due to repeated expansion and contraction, and water leaks from the hole. However, the processed water may enter the inside of the apparatus and cause the apparatus to fail. Therefore, when there is water leakage, it is necessary to detect it as soon as possible to prevent a failure of the apparatus.
[0005]
Thus, in the processing apparatus which processes using processed water, it has a subject in preventing failure of the processing apparatus by water leakage beforehand.
[0006]
[Means for Solving the Problems]
As specific means for solving the above problems, the present invention includes a holding means for holding a workpiece, a processing means for performing processing while supplying processing water to the workpiece held by the holding means, and a supply A cutting device comprising at least a bellows portion for guiding the processed water to the drainage channel,
In the tent portion constituting the bellows portion, a water leakage detection layer having a structure in which an insulating member, and a first conductive member and a second conductive member sandwiching the insulating member in a sandwich shape are formed, A power supply unit and a current detection unit are connected to the first conductive member and the second conductive member to form a detection circuit . The bellows unit includes a plurality of tent units. A water leakage detection layer is individually formed, and when a current is detected by the current detection means, a cutting device for notifying the operator that water has leaked is provided.
[0007]
In the cutting apparatus configured as described above, when the hole is opened in the bellows part, the leakage of the processing water can be quickly recognized by the leakage detection layer.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
As an embodiment of the present invention, a cutting apparatus 10 shown in FIG. 1 will be described as an example. In addition, the same code | symbol is attached | subjected to the site | part which is common in the conventional cutting device 70 shown in FIG. 4, and the description shall be abbreviate | omitted.
[0009]
FIG. 2 shows a configuration of the cutting region 20 in FIG. 1, and the cutting is performed while supplying cutting water to the holding means 21 that holds the workpiece and the workpiece held by the holding means 21. A cutting means 22 and bellows 23a, 23b connected to both ends of the holding means 21 to prevent cutting water from entering the apparatus are provided. The holding means 21 is moved in the X-axis direction by an X-axis slider 24. The cutting means 22 can be moved in the Y-axis direction by the Y-axis slider 25 and can be moved in the Z-axis direction by the Z-axis slider 26.
[0010]
The holding means 21 is coupled to the slide portion 29 and a slide portion 29 that is screwed into a first ball screw 27 disposed in the X-axis direction and slidably engages with the pair of first guide rails 28. The table part 30 includes a suction part 31 for sucking a workpiece and a clamp part 32 formed around the suction part 31.
[0011]
The first ball screw 27 is connected to the first motor 33, and when the workpiece held by the holding means 21 is cut, the first ball screw 27 is driven by the first motor 33 to rotate. Accordingly, the slide portion 29 screwed into the first ball screw 27 and the table portion 30 connected to the slide portion 29 are cut and fed in the X-axis direction. The motor 33 and the first guide rail 28 constitute the X-axis slider 24.
[0012]
Extendable bellows portions 23a and 23b are connected to both ends in the X-axis direction of the table portion 30 constituting the holding means 21. The bellows portions 23a and 23b are for dropping the cutting water to guide the cutting water to the drainage passage 36 surrounded by the inner peripheral wall 34 and the outer peripheral wall 35, and to discharge the cutting water to the outside through the drainage drain 37. The screw holes 39 formed in the fixing frames 38a and 38d and the screw holes 40 formed in the inner peripheral wall 34 are screwed together, and the screw holes 41 and the fixing frames 38b and 38c formed in the table portion 30 of the holding means 21 are fixed. The X-axis slider 24 is covered from above by the bellows portions 23a and 23b, thereby preventing the cutting water from entering the X-axis slider 24.
[0013]
Further, the bellows portions 23a and 23b are provided with two guide frames 44a and 44b for attaching rollers 43a and 43b to guide expansion and contraction at the lower portion. The two regions defined by the guide frame 44a are divided into a tent portion 45a and a tent. Two areas defined by the guide frame 44b are a tent part 45c and a tent part 45d.
[0014]
Here, as shown in FIG. 3, each tent part 45a, 45b, 45c, 45d has a structure in which a protective material 60a, a conductor 61a, an insulator 62, a conductor 61b, and a protective material 60b are laminated in this order. The conductor 61a, the insulator 62, and the conductor 61b form a water leakage detection layer 63.
[0015]
In the water leakage detection layer 63 of each tent portion, the conductor 61a is connected to the power supply 64, the conductor 61b is connected to the current detection means 65, and the conductor 61a, the conductor 61b, the power supply 64, and the current detection means 65 detect the detection circuit. Form. However, since the conductor 61a and the conductor 61b are insulated by the insulator 62, normally no current flows through the detection circuit. The current detection means 65 is connected to lamps 66a (66b, 66c, 66d), a buzzer 67, and a monitor 68, which are notification means for notifying that a current has been detected. Note that it is not necessary for all the notification means to be connected, and it is sufficient that at least one of them is connected.
[0016]
2, the cutting means 22 has a configuration in which a cutting blade 48 is mounted on a spindle 47 rotatably supported by a spindle housing 46, and a pair of cutting means 22 is sandwiched between the cutting blades 48. A cutting water supply nozzle 49 is provided.
[0017]
The cutting means 22 is supported by a support portion 50, and the support portion 50 is screwed into a second ball screw (not shown) disposed in the Z-axis direction along a wall portion 52 erected from the base 51. At the same time, the pair of second guide rails 53 are slidably engaged. Then, when the second ball screw is driven by the second motor 54 connected to the second ball screw to rotate, the support portion 50 and the cutting means 22 supported thereby move up and down in the Z-axis direction. The second ball screw, the second motor 54, and the second guide rail 53 constitute the Z-axis slider 26.
[0018]
Further, the base 51 is screwed into a third ball screw 55 disposed in the Y-axis direction, and is slidably engaged with the pair of third guide rails 56. The base 51 and the cutting means 22 integrated therewith are driven in the Y-axis direction as the third ball screw 55 rotates by being driven by the third motor 57 connected to the third ball screw 55. The third ball screw 55, the third motor 57, and the third guide rail 56 constitute the Y-axis slider 26.
[0019]
In the holding means 21, when trying to cut a workpiece, for example, a semiconductor wafer W integrated with the frame F via the tape T shown in FIG. 1, the semiconductor wafer W is attached to the suction portion 31 via the tape T. Suction is performed and the frame F is held in a state of being fixed by the clamp portion 32.
[0020]
Then, after the holding means 21 is moved in the X-axis direction and the position to be cut is detected by the alignment means 11 shown in FIG. 1 as in the prior art, the holding means 21 is further moved in the same direction and the cutting region 20 is moved. The cutting water is supplied from the cutting water supply nozzle 49, and the cutting blade 48 that rotates at a high speed cuts into the semiconductor wafer W to perform cutting. Further, cutting is performed sequentially by reciprocating the holding means 21 while indexing and feeding the cutting means 22 in the Y-axis direction.
[0021]
When the holding means 21 reciprocates in this way, the bellows portions 23a and 23b are expanded and contracted. Therefore, the repetition of this operation causes fatigue in the tent portions 45a, 45b, 45c and 4, or the operator operates the tool during work. A hole penetrating each tent portion may be opened due to dropping or the like. In this case, cutting water flows into the hole, and the conductor 61a and the conductor 61b are conducted through the flowing cutting water, so that the current detection means 65 can detect the current at that time.
[0022]
When the continuity between the conductor 61a and the conductor 61b is detected in this way, for example, the lamps 66a, 66b, 66c, 66d provided on the front side in the cutting apparatus 10 of FIG. 1 are turned on or blinked. Alternatively, it is possible to notify the operator that water has leaked by sounding the buzzer 67 or displaying the fact that water has leaked on the monitor 68.
[0023]
At this time, since the detection circuit is provided for each tent portion, it is possible to recognize which tent portion has a water leak. Therefore, for example, the lamp 66a is turned on when water leakage is detected in the tent part 45a, the lamp 66b is turned on when water leakage is detected in the tent part 45b, and the lamp is turned on when water leakage is detected in the tent part 45c. When the water leak is detected in the tent portion 45d, the tent portion where water has leaked can be specified by turning on the lamp 66d.
[0024]
In the case of notification by the buzzer 67, the buzzer sound can be changed depending on which tent portion has leaked water, and in the case of notification by display on the monitor 68, which tent portion has leaked water. Can be displayed.
[0025]
In this way, the operator can immediately recognize which tent portion has water leakage. Therefore, when repairing, it is possible to take appropriate measures such as replacing only the tent portion where water leakage has been detected, so that repair does not take time and is economical.
[0026]
In the present embodiment, the cutting apparatus has been described as an example of the processing apparatus. However, the present invention can also be applied to an apparatus that performs processing while supplying processing water, such as a polishing apparatus.
[0027]
【The invention's effect】
As described above, in the processing apparatus according to the present invention, when a hole is opened in the bellows portion, the leakage of the processing water can be quickly recognized by the water leakage detection layer. It is possible to prevent failure of the processing apparatus.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a cutting apparatus which is an example of a processing apparatus according to the present invention.
FIG. 2 is a perspective view showing a cutting region of the cutting apparatus.
FIG. 3 is an explanatory view showing an internal structure of a bellows portion of the cutting apparatus.
FIG. 4 is a perspective view showing a conventional cutting apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Cutting device 11 ... Alignment means 20 ... Cutting area 21 ... Holding means 22 ... Cutting means 23a, 23b ... Bellows part 24 ... X-axis slider 25 ... Y-axis slider 26 ... Z-axis slider 27 ... First ball screw 28 ... First One guide rail 29 ... slide part 30 ... table part 31 ... suction part 32 ... clamp part 33 ... first motor 34 ... inner peripheral wall 35 ... outer peripheral wall 36 ... drainage channel 37 ... drainage drains 38a, 38b, 38c, 38d ... Fixed frame 39 ... Screw hole 40, 41, 42 ... Screw hole 43a, 43b ... Roller 44a, 44b ... Guide frame 45a, 45b, 45c, 45d ... Tent part 46 ... Spindle housing 47 ... Spindle 48 ... Cutting blade 49 ... Cutting water Supply nozzle 50 ... support portion 51 ... base 52 ... wall portion 53 ... second guide rail 54 Second motor 55 ... Third ball screw 56 ... Third guide rail 57 ... Third motor 60a, 60b ... Protective material 61a, 61b ... Conductor 62 ... Insulator 63 ... Water leakage detection layer 64 ... Power supply 65 ... Current detection Means 66a, 66b, 66c, 66d ... Lamp 67 ... Buzzer 68 ... Monitor 70 ... Cutting device 71 ... Bellows

Claims (1)

A holding means for holding a workpiece, a processing means for performing processing while supplying processing water to the workpiece held by the holding means, and a bellows portion for guiding the supplied processing water to a drainage channel A cutting device ,
In the tent portion constituting the bellows portion, a water leakage detection layer having a structure in which an insulating member, and a first conductive member and a second conductive member sandwiching the insulating member in a sandwich shape are formed, A power supply unit and a current detection unit are connected to the first conductive member and the second conductive member to form a detection circuit, and the bellows unit includes a plurality of tent units, and each tent unit A cutting device for individually forming a water leakage detection layer and informing the operator that water leakage has occurred when the current detection means detects a current .

Images