JP2016198969A - Method for manufacturing bellows - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing bellows capable of manufacturing a bellows-shaped cover having a high resistance to a chemical agent.SOLUTION: A method for manufacturing bellows includes: performing fold-processing by, for example, locally pressing a synthetic resin sheet along a folding line thereof; bending the synthetic resin sheet into a bellows shape along the folding line and compressing the synthetic resin sheet; and keeping the bellows shape by a heating treatment. The synthetic resin sheet is formed of, for example, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU) and the like, and the bellows shape is formed without using a rubber-based material.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a method for manufacturing a bellows.

  In order to protect an expansion / contraction displacement part or bending displacement part of a machine or the like from disturbance factors such as liquid, dust, light rays, and moisture, a bellows-like cover is often used as an extendable cover for shielding them. For example, in a processing apparatus using a liquid such as a cutting apparatus, a bellows-like cover protects each shaft portion from scattering of liquid (see Patent Document 1).

  Rubber bellows (chlorosulfonated polyethylene, chloroprene rubber, nitrile butadiene rubber, urethane rubber, etc.) are used for bellows-like covers that prevent liquid leakage and require durability. For example, a rubber sheet (chloroprene rubber, nitrile butadiene rubber) is used so that air bubbles are not sandwiched between film sheets with creases (perforations) and cut holes formed on a sheet of nylon coated with rubber on both sides. , Urethane rubber, or the like) to form a laminated body that becomes a bellows (see Patent Document 2).

JP 2001-135593 A Japanese Patent Publication No. 4-55855

  By the way, the chemical | medical agent used with a processing apparatus, for example, oxirane, changes the quality of rubber materials (chlorosulfonated polyethylene rubber, chloroprene rubber, nitrile butadiene rubber, etc.). When the liquid containing oxirane adheres to the bellows-shaped cover formed from a rubber-based material for a long time, the rubber changes in quality and absorbs the liquid, and the absorbed liquid is squeezed out when the bellows expands and contracts. There was a problem of causing water leakage in the bellows.

  Then, this invention is made | formed in view of the above, Comprising: It aims at providing the manufacturing method of the bellows which can manufacture the bellows-like cover with strong tolerance with respect to a chemical | medical agent.

  In order to solve the above-described problems and achieve the object, a method of manufacturing an accordion according to the present invention includes a crease processing step of performing crease processing on a synthetic resin sheet, and folding the synthetic resin sheet along the folds. A step of bending into a bellows shape having a portion and a valley portion, and heating the synthetic resin sheet in a compressed state until the peak portion and the valley portion are in close contact with each other, so that the bellows shape is maintained. A heating step for brazing, and in the crease processing step, heating or pressing is locally performed along the crease.

  In the bellows manufacturing method, the synthetic resin sheet is preferably any of polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), and polyurethane (PU).

  In the bellows manufacturing method, the folding step includes folding a U-shaped bellows comprising a horizontal sheet portion and a pair of vertical portions bent substantially vertically downward from both ends of the horizontal sheet portion. It is preferable to be bent.

  According to the bellows manufacturing method of the present invention, the bellows is formed by locally heating or pressing along the crease of the synthetic resin sheet to perform crease processing, bending the bellows along the fold, and performing heat treatment. It is brazed so that the shape is maintained. Thereby, since a bellows shape can be realized using a synthetic resin sheet, a rubber-based material can be dispensed with, and a bellows-like cover having high resistance to a drug can be manufactured.

FIG. 1 is an exploded perspective view illustrating a configuration example of a processing apparatus according to the first embodiment. FIG. 2 is a flowchart showing a method of manufacturing the bellows according to the first embodiment. FIG. 3 is a side view showing a processing example of a fold by the mold according to the first embodiment. FIG. 4 is a top view illustrating a configuration example of the synthetic resin sheet in which the crease according to Embodiment 1 is processed. FIG. 5 is a perspective view illustrating a bent example of the synthetic resin sheet according to the first embodiment. FIG. 6 is a perspective view illustrating an example of heating the synthetic resin sheet according to the first embodiment. FIG. 7 is a perspective view illustrating an example of extension of the synthetic resin sheet according to the first embodiment. FIG. 8 is a flowchart showing a method of manufacturing the bellows according to the second embodiment. FIG. 9 is a perspective view illustrating an example of processing of a fold by the laser beam irradiation unit according to the second embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment 1
A processing apparatus according to the first embodiment will be described. FIG. 1 is an exploded perspective view illustrating a configuration example of a processing apparatus according to the first embodiment. The processing apparatus 1 cuts a wafer (not shown). The processing apparatus 1 includes a chuck table 10, a processing unit 20, an index feeding unit 30, a cutting feed unit 40, a processing feeding unit 50, and a control unit (not shown).

  The wafer is a semiconductor wafer or an optical device wafer in which a semiconductor device is formed on a substrate such as silicon or gallium arsenide, or an optical device is formed on a substrate such as sapphire or SiC, an inorganic material substrate, a ductile resin material substrate, a ceramic substrate, Various processing materials such as glass plates.

  Here, the X-axis direction is a direction in which the wafer held on the chuck table 10 is processed and fed. The Y-axis direction is a direction in which the processing means 20 is indexed and fed to the wafer held on the chuck table 10 and orthogonal to the X-axis direction on the same horizontal plane. The Z-axis direction is a direction orthogonal to the X-axis direction and the Y-axis direction, which is the vertical direction in the first embodiment.

  The chuck table 10 is disposed on the upper surface of the apparatus main body 2 so as to be movable in the X-axis direction. The chuck table 10 is formed in a disk shape and includes a holding surface 11. The chuck table 10 is rotated around a rotation axis orthogonal to the center of the holding surface 11 by a rotating means (not shown). The holding surface 11 is an upper end surface in the vertical direction of the chuck table 10 and is formed flat with respect to a horizontal plane. The holding surface 11 is made of, for example, porous ceramic and sucks and holds the wafer by a negative pressure of a vacuum suction source (not shown).

  The processing means 20 processes the wafer held on the chuck table 10. The processing means 20 is disposed in the apparatus main body 2 via the index feed means 30 and the cut feed means 40. The processing means 20 includes a cutting blade 21, a spindle 22, a housing 23, and a pair of processing water supply nozzles 24. The cutting blade 21 is a cutting grindstone formed in an extremely thin disk shape and in an annular shape. The spindle 22 is detachably mounted with a cutting blade 21 at its tip. The housing 23 has a drive source such as a motor (not shown), and supports the spindle 22 so as to be rotatable around a rotation axis in the Y-axis direction. The machining water supply nozzle 24 is disposed so as to sandwich the cutting blade 21 and supplies the machining water to the cutting blade 21. The processing means 20 rotates the spindle 22 at a high speed to cut the wafer with the cutting blade 21 and supplies processing water to the cutting blade 21 with the processing water supply nozzle 24.

  The index feeding means 30 is for moving the chuck table 10 and the processing means 20 relative to each other in the Y-axis direction. For example, the index feeding means 30 has a drive source such as a ball screw 31 and a pulse motor 32 extending in the Y-axis direction, and a Y-axis moving base 33 that supports the cutting feed means 40 is arranged in the Y-axis direction. Move.

  The cutting feed means 40 is for moving the machining means 20 in the Z-axis direction orthogonal to the holding surface 11 of the chuck table 10. For example, the cutting feed means 40 has a drive source such as a ball screw (not shown) or a pulse motor 41 that extends in the Z-axis direction, and moves a Z-axis moving member 42 that supports the machining means 20 in the Z-axis direction. Let

  The processing feed means 50 is for moving the chuck table 10 and the processing means 20 relative to each other in the X-axis direction. For example, the processing feed means 50 is fixed to a pair of guide rails 51 extending in the X-axis direction, a ball screw 52 disposed in parallel to the guide rail 51, and a nut (not shown) screwed to the ball screw 52. The X-axis moving base 53 slidably disposed on the guide rail 51 and a pulse motor 54 for rotating the ball screw 52 are provided. The processing feed means 50 moves the X-axis movement base 53 that supports the chuck table 10 in the X-axis direction by rotating the ball screw 52 by the pulse motor 54.

  Here, in order to prevent the processing water supplied when processing the wafer by the cutting blade 21 from adhering to the ball screw 52 or the like of the processing feeding means 50, the processing feeding means 50 includes a cover member 60 and a bellows mechanism. 70.

  The cover member 60 is a plate-like member, and is formed in a substantially square shape when viewed from the Z-axis direction. The cover member 60 is formed in a U shape when viewed from the X-axis direction, and is formed by bending the upper surface portion 61 and both end portions in the Y-axis direction downward in the Z-axis direction. 62. The cover member 60 is disposed between the X-axis moving base 53 that supports the chuck table 10 and the chuck table 10. The cover member 60 is formed so that the length in the width direction (Y-axis direction) is slightly longer than the length in the width direction (Y-axis direction) of the processing feed means 50.

  The bellows mechanism 70 is disposed so as to extend in the X-axis direction with the cover member 60 interposed. The bellows mechanism 70 includes a first bellows portion 71A and a second bellows portion 71B. The first bellows portion 71A is disposed on one side of the cover member 60, and the second bellows portion 71B is disposed on the other side of the cover member 60. Is arranged.

  The first bellows portion 71A includes two bellows members 710A and 710B. The bellows members 710A and 710B are made of a synthetic resin such as polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), or the like. The bellows members 710A and 710B are formed in a U shape when viewed from the X-axis direction, and include a horizontal sheet portion 710a and a pair of vertical portions 710b. As for the horizontal sheet | seat part 710a, the peak part 710c and the trough part 710d are alternately formed in the expansion-contraction direction (X-axis direction) along the horizontal surface. The length of the horizontal sheet portion 710a in the width direction (Y axis direction) is substantially the same as the length of the cover member 60 in the width direction (Y axis direction). That is, the length in the width direction (Y-axis direction) of the horizontal sheet portion 710 a is formed slightly longer than the length in the width direction (Y-axis direction) of the processing feed means 50. The vertical portions 710b of the bellows members 710A and 710B are formed to be bent substantially vertically downward from both ends in the width direction (Y-axis direction) of the horizontal sheet portion 710a. The pair of vertical portions 710b are formed in a bellows shape, and crest portions 710e and trough portions 710f are alternately formed in the expansion / contraction direction. The bellows member 710A and the bellows member 710B are connected via a guide frame 711. The guide frame 711 is formed in the same U-shape as the bellows members 710A and 710B when viewed from the X-axis direction, and a roller 711a for improving slippage is provided at each lower end of the guide frame 711. It is attached. A frame (not shown) is attached to the end face in the X-axis direction of the bellows member 710B connected to the cover member 60, and the frame and the end face of the cover member 60 are fixed by screws (not shown).

  The second bellows portion 71B is configured similarly to the first bellows portion 71A. That is, the second bellows portion 71B is composed of two bellows members 710C and 710D. The bellows members 710C and 710D include a horizontal sheet portion 710a and a pair of vertical portions 710b. As for the horizontal sheet | seat part 710a, the peak part 710c and the trough part 710d are alternately formed in the expansion-contraction direction (X-axis direction) along the horizontal surface. The length of the horizontal sheet portion 710a in the width direction (Y axis direction) is substantially the same as the length of the cover member 60 in the width direction (Y axis direction). The vertical portions 710b of the bellows members 710C and 710D are formed to be bent substantially vertically downward from both ends in the width direction (Y-axis direction) of the horizontal sheet portion 710a. The pair of vertical portions 710b are formed in a bellows shape, and crest portions 710e and trough portions 710f are alternately formed in the expansion / contraction direction. The bellows member 710 </ b> C and the bellows member 710 </ b> D are connected via a guide frame 711. Each of the lower ends of the guide frame 711 is attached with a roller 711a for improving slipping. A frame 713 is attached to an end surface in the X-axis direction of the bellows member 710C connected to the cover member 60, and the frame 713 and the end surface of the cover member 60 are fixed by screws (not shown).

  As described above, the first bellows portion 71A and the second bellows portion 71B connected to the cover member 60 cover the processing feed means 30 in the X-axis direction. When the cover member 60 moves in the X-axis direction as the chuck table 10 moves, the first bellows portion 71A expands and the second bellows portion 71B contracts, or the first bellows portion 71A contracts. Thus, the second bellows portion 71B extends. In the moving range of the cover member 60, the first bellows portion 71A or the second bellows portion 71B does not extend completely, and the first bellows portion 71A or the second bellows portion 71B is completely contracted to cover the cover member. The movement of 60 is not hindered.

  On the lower side of the bellows mechanism 70, a drainage means 80 is provided for receiving and discharging the processing water flowing from the bellows mechanism 70 together with the processing waste. The drainage means 80 includes a drainage channel 81 and a drain pipe 82. The drainage channel 81 is formed in a substantially rectangular frame shape so as to surround the first bellows portion 71A and the second bellows portion 71B connected to the cover member 60, and a portion where the processing water flows is formed in a groove shape. .

  The drainage channel 81 includes a bottom plate 810 on which the vertical portion 710 b of the bellows member 710 (710 </ b> A to 710 </ b> D) of the bellows mechanism 70 is positioned, an inner peripheral wall 811 erected on the inner peripheral side of the bottom plate 810, and the bottom portion 810. And an outer peripheral wall 812 erected on the outer peripheral side. The inner peripheral wall 811 is located inside the vertical portion 710 b of the bellows member 710, and the outer peripheral wall 812 is located outside the vertical portion 710 b of the bellows member 710. Thereby, the processing water flowing down from the vertical portion 710 b of the bellows member 710 can be received by the bottom plate 810, and the processing water received by the bottom plate 810 can flow toward the drain pipe 82.

  Fixing brackets 813 are attached to both ends of the inner peripheral wall 811 of the drainage channel 81 in the X-axis direction. The frame 712 attached to the end surface of the bellows member 710A of the first bellows portion 71A is fixed to one fixing bracket 813, and the end surface of the bellows member 710D of the second bellows portion 71B is fixed to the other fixing bracket 813. The frame 714 attached to is fixed. Thereby, the both ends in the X-axis direction of the bellows mechanism 70 are fixed.

  The drain pipe 82 is coupled to an opening (not shown) in which the bottom plate 810 of the drainage channel 81 is partially opened, and discharges the processing water accumulated in the drainage channel 81 to the outside. For example, the drainage channel 81 is disposed with a slight inclination, and a drain pipe 82 is disposed at the lowest position. Thereby, the processing water of the drainage channel 81 flows out toward the lowest drain pipe 82 and is discharged from the drain pipe 82 to the outside.

  The control means 80 controls each component of the processing apparatus 1. For example, the control unit 80 is connected to a driving circuit (not shown) that drives the pulse motors of the indexing feeding unit 30, the cutting feeding unit 40, and the machining feeding unit 50, and controls the driving circuit to position the chuck table 10 in the X-axis direction. Or the position of the processing means 20 in the Y-axis direction and the Z-axis direction is determined.

  Next, a method for manufacturing the bellows according to the first embodiment will be described. FIG. 2 is a flowchart showing a method of manufacturing the bellows according to the first embodiment. FIG. 3 is a side view showing a processing example of a fold by the mold according to the first embodiment. FIG. 4 is a top view illustrating a configuration example of the synthetic resin sheet in which the crease according to Embodiment 1 is processed. FIG. 5 is a perspective view illustrating a bent example of the synthetic resin sheet according to the first embodiment. FIG. 6 is a perspective view illustrating an example of heating the synthetic resin sheet according to the first embodiment.

  First, the operator performs crease processing on the synthetic resin sheet 90 using the mold 100 (step S1 shown in FIG. 2; crease processing step). The synthetic resin sheet 90 is made of, for example, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), or the like. The thickness of the synthetic resin sheet 90 is about 20 μm to 300 μm, and the hardness (Rockwell) of the synthetic resin sheet 90 is about R60 to 120. The mold 100 is, for example, a Thomson mold or the like, and includes a base 101 and a blade 102 provided on the base 101. The blade 102 of the mold 100 is formed in the shape of a fold formed in the synthetic resin sheet 90. As shown in FIG. 3, the operator places the synthetic resin sheet 90 on the mounting table 103 and presses the blade 102 of the mold 100 against the synthetic resin sheet 90 on the mounting table 103. When the blade 102 of the mold 100 is pressed against the synthetic resin sheet 90, the synthetic resin sheet 90 is formed with a recess that can be bent in accordance with the shape of the blade 102 of the mold 100, that is, a crease 91A as shown in FIG. Is done. The crease 91A is formed in a concave shape and is easy to bend, but does not penetrate.

  The fold line 91 </ b> A includes a fold line 910, a ridge line 911, and a triangular fold line 912 for forming the vertical part 710 b. The valley folds 910 and the mountain folds 911 are substantially linear folds extending in the width direction of the synthetic resin sheet 90, and are alternately formed at regular intervals in the expansion and contraction direction.

  The triangular fold line 912 is formed in an isosceles triangle, and the bottom side 912a is formed on a line that bends both ends in the width direction of the synthetic resin sheet 90 substantially vertically, and the interval between the adjacent creases 911 for the mountain part in the expansion and contraction direction. It is formed to the same length. Further, the vertex 912b of the triangular fold line 912 is formed on the fold line 910 for the valley portion on the vertical portion 710b side.

  The operator bends the synthetic resin sheet 90 in a bellows shape along the formed fold line 91A (step S2; bending step). For example, as shown in FIG. 5, the operator folds the synthetic resin sheet 90 along the folds 911 for the peaks of the synthetic resin sheet 90, and the synthetic resin sheet 90 along the folds 910 for the valleys. The synthetic resin sheet 90 is folded into a bellows shape having a peak portion 92 and a valley portion 93 in a valley fold.

  Further, the operator performs a valley fold along the vertical bisector 912d of the triangular fold 912 and also folds the two equal sides 912c into a mountain. As a result, the end portion 94 of the synthetic resin sheet 90 is bent substantially vertically in a bellows shape, and a pair of vertical portions 710b are formed at both ends of the horizontal sheet portion 710a.

  Next, the worker heats the synthetic resin sheet 90 on which the pair of vertical portions 710b and the horizontal sheet portion 710a are formed by a heating device (not shown) (step S3; heating step). For example, as shown in FIG. 6, the operator folds and contracts the synthetic resin sheet 90 in the expansion / contraction direction, and compresses the fasteners 110 until the peak portions 92 and the valley portions 93 of the synthetic resin sheet 90 come into close contact with each other. Thus, each of the vertical portions 710b and the horizontal sheet portion 710a are fixed. Then, the worker heats the synthetic resin sheet 90 with a heating device in a state where the synthetic resin sheet 90 is compressed, and brazes it so that the bellows shape is maintained. The heating device heats the synthetic resin sheet 90 with, for example, hot water, hot air, steam, or the like. The temperature for heating the synthetic resin sheet 90 is about 50 ° to 300 °, and the heating time is about 1 minute to 10 minutes. Preferably, the heating temperature is about 80 ° to 200 °, and the heating time is about 2 minutes to 5 minutes. For example, the heating temperature is set to about 130 °, and the heating time is set to about 3 minutes.

  Next, the worker releases the compression of the synthetic resin sheet 90 (step S4). For example, the worker dissipates heat of the synthetic resin sheet 90 by natural cooling or the like. Then, the operator removes the fastener 110 from the cooled synthetic resin sheet 90, and extends the compressed synthetic resin sheet 90 as shown in FIG. Since the stretched synthetic resin sheet 90 is heated in a compressed state, the bellows-like shape is maintained by the synthetic resin sheet 90 alone, and the bellows member 710 is formed.

  As described above, according to the manufacturing method of the bellows according to the first embodiment, the pressing process is locally performed along the fold 91A of the synthetic resin sheet 90 to perform the fold processing, and the bellows is formed along the fold 91A. Bending and brazing so that the bellows shape is maintained by heat treatment. The synthetic resin sheet 90 is formed of, for example, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), polyurethane (PU), and the like, and can easily form a bellows shape without using a rubber-based material. Can be formed. Thereby, the bellows member 710 which is not deteriorated by the chemical | medical agent used with the processing apparatus 1, for example, oxirane, and has strong tolerance with respect to a chemical | medical agent can be manufactured. Further, since no rubber-based material is used, the weight can be reduced, and the burden on the bent portion of the bellows member 710 can be reduced. In addition, as in the past, there was no need for advanced skills such as applying adhesive to the entire surface of the sheet in the bonding process and preventing air bubbles from being mixed during bonding, reducing the time-consuming process. The process can be simplified and work efficiency can be improved.

  The bellows member 710 formed from the synthetic resin sheet 90 has a U-shape including a horizontal sheet portion 710a and a pair of vertical portions 710b that are bent substantially vertically downward from both ends of the horizontal sheet portion 710a. It is folded into a bellows. Even such a complicated bellows shape can be easily formed by pressing using the mold 100.

[Embodiment 2]
Next, a method for manufacturing the bellows according to the second embodiment will be described. The second embodiment is different from the first embodiment in that the crease 91 </ b> B is formed by a laser beam instead of the mold 100. In the second embodiment, laser beam irradiation means 120 for irradiating a laser beam is provided.

  First, the laser beam irradiation means 120 performs crease processing on the synthetic resin sheet 90 with a laser beam (step S11 shown in FIG. 8). For example, the laser beam irradiation means 120 includes a storage unit (not shown). The storage unit stores a pattern of the crease 91 </ b> B formed in the synthetic resin sheet 90. When the synthetic resin sheet 90 is placed at a predetermined position on the mounting table (not shown), the laser beam irradiation means 120 is placed on the mounting table as shown in FIG. 9 based on the pattern of the folds 91B stored in the storage unit. The synthetic resin sheet 90 placed is locally irradiated with a laser beam. When the synthetic resin sheet 90 is irradiated with a laser beam, the synthetic resin sheet 90 is locally heated and denatured to form a fold 91B. The crease 91B is easier to bend than the portion where the synthetic resin sheet 90 is not altered. The fold line 91B includes a fold line 910, a mountain fold line 911, and a triangular fold line 912 for forming the vertical part 710b. Note that the crease 91B is altered and easily bent, but does not penetrate.

  The operator bends the synthetic resin sheet 90 in a bellows shape along the formed fold line 91B (step S12) to form a pair of vertical portions 710b and a horizontal sheet portion 710a. Next, the operator compresses the synthetic resin sheet 90 formed with the pair of vertical portions 710b and the horizontal sheet portion 710a and heats the synthetic resin sheet 90 with a heating device (not shown) (step S13), and cools the synthetic resin sheet 90 after the heating. Then, the compression of the synthetic resin sheet 90 is released (step S14). Since the compressed synthetic resin sheet 90 is heat-treated in the compressed state, the bellows-like shape is maintained by the synthetic resin sheet 90 alone, and the bellows member 710 is formed.

  As described above, according to the bellows manufacturing method according to the second embodiment, the laser beam is locally irradiated along the fold 91B of the synthetic resin sheet 90 to perform crease processing, and the bellows is formed along the fold 91B. Bending and brazing so that the bellows shape is maintained by heat treatment. Thereby, while having the same effect as Embodiment 1, it is possible to form the crease 91B without using the mold 100.

[Modification]
Next, modifications of the first and second embodiments will be described. The surface of the bellows member 710 may be covered with a resin-based cushioning cloth. For example, after releasing the compression of the synthetic resin sheet 90 (after steps S4 and S14), the operator applies an acrylic resin-based adhesive to the surface of the bellows-like synthetic resin sheet 90, thereby forming a bellows-like synthetic material. A resin cushion cloth is bonded to the surface of the resin sheet 90 and laminated. Thereby, the damage which the bellows member 710 receives by the end material scattered when processed by the processing means 20 can be reduced.

  In addition, a bellows-shaped water return film (not shown) that prevents splashing of processing water from the drainage channel 81 may be provided on the vertical portion 710 b of the bellows member 710. For example, after releasing the compression of the synthetic resin sheet 90 (after steps S4 and S14), the worker covers the drainage channel 81 from one end side to the other end side in the expansion / contraction direction of the bellows member 710. An accordion-shaped water return film protruding from the inside of the vertical portion 710b is adhered and fixed.

  Moreover, although the compressed synthetic resin sheet 90 was fixed with the fastener 110, it is not limited to this. For example, the compressed synthetic resin sheet 90 may be sandwiched and fixed by a pair of plate-like members and heated.

  Moreover, although the example which removes the fastener 110 from the synthetic resin sheet 90 was demonstrated after cooling, if the bellows shape can be brazed to the synthetic resin sheet 90, the timing which removes the fastener 110 will not be limited after cooling.

  Moreover, although the synthetic resin sheet 90 was partially manually formed into a bellows shape, it may be automatically manufactured using a bellows manufacturing apparatus (not shown). For example, the accordion manufacturing apparatus includes a crease processing unit that folds the synthetic resin sheet 90 using a mold or a laser beam irradiation unit, a bending unit that folds the synthetic resin sheet 90 into a bellows shape, hot water, hot air, steam, and the like. A heating means for heating the synthetic resin sheet 90 and a compression releasing means for releasing the compression of the synthetic resin sheet 90 are provided.

  Moreover, although the bellows member 710 manufactured by the above-described bellows manufacturing method has been described with respect to the example in which the processing feeding unit 50 is protected from the processing water and processing waste generated when the wafer is cut, the present invention is not limited thereto. For example, the bellows member 710 may be used to protect a movable part and a shaft part of a processing apparatus such as a lathe or a milling machine from cutting fluid containing oil or cutting waste.

DESCRIPTION OF SYMBOLS 1 Processing apparatus 50 Processing feed means 60 Cover member 70 Bellows mechanism 71A 1st bellows part 71B 2nd bellows part 710 (710A-710D) Bellows member 710a Horizontal sheet part 710b Vertical part 80 Drainage means 81 Drainage path 90 Synthetic resin sheet 91A, 91B crease 910 crease 911 for valley part crease 912 for mountain part triangle crease 100 mold 110 fastener 120 laser beam irradiation means

Claims (3)

A method of manufacturing a bellows,
A crease processing step for performing crease processing on the synthetic resin sheet;
Bending the synthetic resin sheet along the crease and bending it into a bellows shape having crests and troughs;
Heating the synthetic resin sheet in a compressed state until the ridges and the valleys are in close contact with each other, and brazing to maintain the bellows shape,
In the crease processing step, the bellows manufacturing method is characterized in that heating or pressing is locally performed along the crease.   2. The method of manufacturing a bellows according to claim 1, wherein the synthetic resin sheet is any one of polyethylene terephthalate (PET), polyvinyl chloride (PVC), polypropylene (PP), and polyurethane (PU).   In the bending step, the sheet is bent into a U-shaped bellows comprising a horizontal sheet part and a pair of vertical parts bent substantially vertically downward from both ends of the horizontal sheet part. Item 3. A method for producing a bellows according to Item 1 or 2.

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