TWI663385B - 光學式溫度感測器及光學式溫度感測器之製造方法 - Google Patents
光學式溫度感測器及光學式溫度感測器之製造方法 Download PDFInfo
- Publication number
- TWI663385B TWI663385B TW104106435A TW104106435A TWI663385B TW I663385 B TWI663385 B TW I663385B TW 104106435 A TW104106435 A TW 104106435A TW 104106435 A TW104106435 A TW 104106435A TW I663385 B TWI663385 B TW I663385B
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- Prior art keywords
- temperature
- light
- temperature sensor
- optical
- measurement
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000005259 measurement Methods 0.000 claims abstract description 101
- 239000013307 optical fiber Substances 0.000 claims abstract description 66
- 230000005540 biological transmission Effects 0.000 claims abstract description 7
- 230000006903 response to temperature Effects 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 20
- 230000008859 change Effects 0.000 claims description 15
- 238000010521 absorption reaction Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 238000005457 optimization Methods 0.000 claims description 2
- 230000004043 responsiveness Effects 0.000 abstract description 10
- 238000009529 body temperature measurement Methods 0.000 description 38
- 229910052782 aluminium Inorganic materials 0.000 description 30
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
- G01K11/125—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance using changes in reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014042137A JP6233707B2 (ja) | 2014-03-04 | 2014-03-04 | 光学式温度センサ及び光学式温度センサの製造方法 |
| JP2014-042137 | 2014-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201546426A TW201546426A (zh) | 2015-12-16 |
| TWI663385B true TWI663385B (zh) | 2019-06-21 |
Family
ID=54055233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104106435A TWI663385B (zh) | 2014-03-04 | 2015-03-02 | 光學式溫度感測器及光學式溫度感測器之製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10139290B2 (enExample) |
| JP (1) | JP6233707B2 (enExample) |
| TW (1) | TWI663385B (enExample) |
| WO (1) | WO2015133427A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016076650A1 (ko) * | 2014-11-12 | 2016-05-19 | (주)디엑스엠 | 펠티어소자에 의해 치과용 매트리얼을 가열하는 치과용 매트리얼 가열주입기 |
| JP6736042B2 (ja) * | 2016-09-09 | 2020-08-05 | 株式会社シミウス | Ｆｂｇ温度センサ |
| CA2997985C (en) * | 2016-09-20 | 2022-06-21 | Lumasense Technologies Holdings, Inc. | Temperature probe |
| CN110400772B (zh) * | 2018-04-24 | 2021-10-15 | 北京北方华创微电子装备有限公司 | 静电卡盘和半导体加工设备 |
| US12051607B2 (en) * | 2018-07-24 | 2024-07-30 | Asml Netherlands B.V. | Substrate positioning device with remote temperature sensor |
| JP7329338B2 (ja) * | 2019-03-05 | 2023-08-18 | セイコーグループ株式会社 | 口腔内生体モニタリング装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5446279A (en) * | 1993-08-27 | 1995-08-29 | Hughes Aircraft Company | Fiber optic sensor sensing curvature of a diaphragm |
| US20040258130A1 (en) * | 2001-04-20 | 2004-12-23 | Luxtron Corporation | In situ optical surface temperature measuring techniques and devices |
| TWI246589B (en) * | 2004-06-29 | 2006-01-01 | Univ Feng Chia | Lateral superstructure fiber grating pressure and temperature sensor |
| JP2007184564A (ja) * | 2005-12-06 | 2007-07-19 | Tokyo Electron Ltd | 基板処理装置における被測定物の物理量測定方法及び記憶媒体 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4703174A (en) * | 1984-03-02 | 1987-10-27 | Fiberdynamics, Inc. | Fiberoptic temperature/pressure sensor system |
| JPS61213738A (ja) | 1985-03-20 | 1986-09-22 | Nagoyashi | 光フアイバ温度計測センサ |
| JPS61232684A (ja) | 1985-04-08 | 1986-10-16 | Mitsubishi Cable Ind Ltd | 光半導体素子の温度安定化装置 |
| JPS61233331A (ja) | 1985-04-08 | 1986-10-17 | Mitsubishi Cable Ind Ltd | 光学式温度計 |
| JPS6285832A (ja) | 1985-10-11 | 1987-04-20 | Mitsubishi Cable Ind Ltd | 光学式温度計 |
| JPH01242931A (ja) | 1988-03-23 | 1989-09-27 | Mitsubishi Electric Corp | 温度センサ |
| US6572265B1 (en) * | 2001-04-20 | 2003-06-03 | Luxtron Corporation | In situ optical surface temperature measuring techniques and devices |
| US7056035B2 (en) * | 2001-12-21 | 2006-06-06 | The Furukawa Electric Co., Ltd. | Optical module, optical apparatus including optical module, and method for using optical module |
| DE102008038875B3 (de) * | 2008-08-13 | 2010-01-28 | Abb Technology Ag | Temperaturfühler für eine prozesstechnische industrielle Anlage |
| DE102009010289A1 (de) * | 2009-02-24 | 2010-09-02 | Siemens Aktiengesellschaft | Vorrichtung zur Temperaturmessung in elektromagnetischen Feldern, Verwendung dieser Vorrichtung sowie zugehörige Messanordnung |
| US20110267598A1 (en) * | 2010-04-30 | 2011-11-03 | Vestas Wind Systems A/S | Optical sensor system and detecting method for an enclosed semiconductor device module |
| DE202011003569U1 (de) * | 2011-03-04 | 2012-06-05 | Horst Sonnendorfer | Messgerät |
| JP5730638B2 (ja) * | 2011-03-28 | 2015-06-10 | 東京エレクトロン株式会社 | 基板処理装置の処理室内構成部材及びその温度測定方法 |
| JP6263019B2 (ja) * | 2013-12-16 | 2018-01-17 | 東京エレクトロン株式会社 | 温度測定方法、基板処理システム及び温度測定用部材 |
-
2014
- 2014-03-04 JP JP2014042137A patent/JP6233707B2/ja active Active
-
2015
- 2015-03-02 WO PCT/JP2015/056058 patent/WO2015133427A1/ja not_active Ceased
- 2015-03-02 TW TW104106435A patent/TWI663385B/zh active
- 2015-03-02 US US15/116,569 patent/US10139290B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5446279A (en) * | 1993-08-27 | 1995-08-29 | Hughes Aircraft Company | Fiber optic sensor sensing curvature of a diaphragm |
| US20040258130A1 (en) * | 2001-04-20 | 2004-12-23 | Luxtron Corporation | In situ optical surface temperature measuring techniques and devices |
| TWI246589B (en) * | 2004-06-29 | 2006-01-01 | Univ Feng Chia | Lateral superstructure fiber grating pressure and temperature sensor |
| JP2007184564A (ja) * | 2005-12-06 | 2007-07-19 | Tokyo Electron Ltd | 基板処理装置における被測定物の物理量測定方法及び記憶媒体 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2015133427A1 (ja) | 2015-09-11 |
| JP6233707B2 (ja) | 2017-11-22 |
| TW201546426A (zh) | 2015-12-16 |
| US10139290B2 (en) | 2018-11-27 |
| US20160363486A1 (en) | 2016-12-15 |
| JP2015169444A (ja) | 2015-09-28 |
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