TWI658889B - 分割槽形成裝置及分割槽形成方法 - Google Patents
分割槽形成裝置及分割槽形成方法 Download PDFInfo
- Publication number
- TWI658889B TWI658889B TW104136677A TW104136677A TWI658889B TW I658889 B TWI658889 B TW I658889B TW 104136677 A TW104136677 A TW 104136677A TW 104136677 A TW104136677 A TW 104136677A TW I658889 B TWI658889 B TW I658889B
- Authority
- TW
- Taiwan
- Prior art keywords
- cutter
- tool
- groove
- motor
- substrate
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims description 67
- 238000001514 detection method Methods 0.000 claims description 15
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000010009 beating Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D45/00—Sawing machines or sawing devices with circular saw blades or with friction saw discs
- B23D45/10—Sawing machines or sawing devices with circular saw blades or with friction saw discs with a plurality of circular saw blades
- B23D45/105—Sawing machines or sawing devices with circular saw blades or with friction saw discs with a plurality of circular saw blades operating within the same plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/04—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs
- B28D1/048—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs with a plurality of saw blades
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0228—Cutting, sawing, milling or shearing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
- H05K3/0052—Depaneling, i.e. dividing a panel into circuit boards; Working of the edges of circuit boards
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Milling Processes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-006401 | 2015-01-16 | ||
| JP2015006401A JP6545468B2 (ja) | 2015-01-16 | 2015-01-16 | 分割溝形成装置および分割溝形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201627092A TW201627092A (zh) | 2016-08-01 |
| TWI658889B true TWI658889B (zh) | 2019-05-11 |
Family
ID=56405570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104136677A TWI658889B (zh) | 2015-01-16 | 2015-11-06 | 分割槽形成裝置及分割槽形成方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10195677B2 (enExample) |
| JP (1) | JP6545468B2 (enExample) |
| CN (1) | CN107000253B (enExample) |
| DE (1) | DE112015005977T5 (enExample) |
| TW (1) | TWI658889B (enExample) |
| WO (1) | WO2016114013A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018181908A (ja) * | 2017-04-04 | 2018-11-15 | 株式会社ディスコ | 加工方法 |
| JP2018181902A (ja) | 2017-04-04 | 2018-11-15 | 株式会社ディスコ | 加工方法 |
| JP7759612B2 (ja) * | 2021-09-24 | 2025-10-24 | ショーダテクトロン株式会社 | 板材切削装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07100790A (ja) * | 1990-11-10 | 1995-04-18 | Loehr & Herrmann Gmbh | プリント回路基板の切断装置と方法 |
| CN1532328A (zh) * | 2003-01-27 | 2004-09-29 | ���ݼѹɷ�����˾ | 旋转切割机及使用该旋转切割机的纤维制品制造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1453332C3 (de) * | 1961-04-05 | 1974-06-06 | Vyzkumny A Vyvojovy Ustav Drevarsky, Prag | Verfahren zum Längsschneiden von Holzklötzen bzw. Prismen |
| DE3737868A1 (de) | 1987-11-07 | 1989-05-18 | Loehr & Herrmann Gmbh | Vorrichtung zum trennen und besaeumen von leiterplatten |
| JPH02109630A (ja) * | 1988-10-20 | 1990-04-23 | Mitsubishi Heavy Ind Ltd | 移相装置 |
| US20080028902A1 (en) * | 2006-08-03 | 2008-02-07 | Kimberly-Clark Worldwide, Inc. | Dual roll, variable sheet-length, perforation system |
| JP5305108B2 (ja) | 2010-10-15 | 2013-10-02 | 修 小林 | 回転工具 |
| CN103180255A (zh) * | 2010-10-20 | 2013-06-26 | 旭硝子株式会社 | 母玻璃基板开孔加工方法及母玻璃基板 |
| US9993932B2 (en) | 2011-09-09 | 2018-06-12 | Vits International, Inc. | Rotary cutter |
-
2015
- 2015-01-16 JP JP2015006401A patent/JP6545468B2/ja active Active
- 2015-11-06 TW TW104136677A patent/TWI658889B/zh active
- 2015-11-26 DE DE112015005977.6T patent/DE112015005977T5/de active Pending
- 2015-11-26 WO PCT/JP2015/083185 patent/WO2016114013A1/ja not_active Ceased
- 2015-11-26 CN CN201580062078.9A patent/CN107000253B/zh active Active
- 2015-11-26 US US15/543,825 patent/US10195677B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07100790A (ja) * | 1990-11-10 | 1995-04-18 | Loehr & Herrmann Gmbh | プリント回路基板の切断装置と方法 |
| CN1532328A (zh) * | 2003-01-27 | 2004-09-29 | ���ݼѹɷ�����˾ | 旋转切割机及使用该旋转切割机的纤维制品制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016132107A (ja) | 2016-07-25 |
| TW201627092A (zh) | 2016-08-01 |
| CN107000253B (zh) | 2019-10-01 |
| DE112015005977T5 (de) | 2018-01-04 |
| JP6545468B2 (ja) | 2019-07-17 |
| CN107000253A (zh) | 2017-08-01 |
| WO2016114013A1 (ja) | 2016-07-21 |
| US20170368619A1 (en) | 2017-12-28 |
| US10195677B2 (en) | 2019-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101505520B1 (ko) | 스크롤 가공방법 및 가공장치 | |
| TWI658889B (zh) | 分割槽形成裝置及分割槽形成方法 | |
| US4896459A (en) | Apparatus for manufacturing thin wafers of hard, non-metallic material such as for use as semiconductor substrates | |
| JP6093650B2 (ja) | ウェーハの加工方法 | |
| JP2009512568A (ja) | ランド形体を作り出すための半ピッチ間隔のダイヤモンド切削チップが含まれる切削工具組立品 | |
| TW201416176A (zh) | 研削加工裝置及其控制方法 | |
| KR20190080739A (ko) | 절삭 블레이드의 드레싱 방법 | |
| JP3969505B2 (ja) | 面取方法および装置 | |
| JP3201941B2 (ja) | 裁断制御方法 | |
| TWI673782B (zh) | 基板切斷裝置及基板切斷方法 | |
| JP2015155130A (ja) | 両頭加工機の同期制御装置 | |
| CN1775471A (zh) | 切削装置中的切削刀片倾斜角度调整方法及切削方法 | |
| JP2017164843A (ja) | ダイシング装置、ブレード診断装置、ブレード診断方法及びプログラム | |
| JP2003191141A (ja) | 加工クランプ装置 | |
| JP2017168763A (ja) | ダイシング装置及びダイシング方法 | |
| CN116897100A (zh) | 用于加工板状的工件的方法以及加工装置 | |
| CN214351258U (zh) | 对位装置 | |
| JP6394156B2 (ja) | 歯車加工方法 | |
| JPS62100440A (ja) | 液晶表示素子固着ガラス板の面取り加工方法及びその装置 | |
| KR101616770B1 (ko) | 절삭가공기구 및 절삭가공방법 | |
| JP7087840B2 (ja) | 研削加工方法 | |
| KR100826274B1 (ko) | 반도체 웨이퍼 쏘잉 장치를 이용한 부채꼴 패턴의 홈 가공방법 | |
| JP6905419B2 (ja) | 切削方法 | |
| JP2020203345A (ja) | 修正方法 | |
| JP2014188628A (ja) | 溝加工方法 |