TWI652140B - 雙碟式表面磨床中靜壓墊的熱變形預防設備以及雙碟式表面磨床 - Google Patents
雙碟式表面磨床中靜壓墊的熱變形預防設備以及雙碟式表面磨床 Download PDFInfo
- Publication number
- TWI652140B TWI652140B TW102141722A TW102141722A TWI652140B TW I652140 B TWI652140 B TW I652140B TW 102141722 A TW102141722 A TW 102141722A TW 102141722 A TW102141722 A TW 102141722A TW I652140 B TWI652140 B TW I652140B
- Authority
- TW
- Taiwan
- Prior art keywords
- static pressure
- grinding
- thermal deformation
- workpiece
- pressure pad
- Prior art date
Links
- 230000003068 static effect Effects 0.000 title claims abstract description 169
- 230000003449 preventive effect Effects 0.000 title 1
- 230000002265 prevention Effects 0.000 claims abstract description 30
- 239000012530 fluid Substances 0.000 claims abstract description 17
- 230000002706 hydrostatic effect Effects 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 53
- 238000003780 insertion Methods 0.000 claims description 17
- 230000037431 insertion Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000000462 isostatic pressing Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 abstract description 6
- 238000012360 testing method Methods 0.000 description 40
- 230000000694 effects Effects 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 13
- 235000012431 wafers Nutrition 0.000 description 13
- 238000005498 polishing Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 8
- 239000000470 constituent Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 3
- 239000011151 fibre-reinforced plastic Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012256952A JP6033652B2 (ja) | 2012-11-23 | 2012-11-23 | 両面研削装置における静圧パッドの熱変形防止装置および両面研削装置 |
| JP2012-256952 | 2012-11-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201433409A TW201433409A (zh) | 2014-09-01 |
| TWI652140B true TWI652140B (zh) | 2019-03-01 |
Family
ID=51026444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102141722A TWI652140B (zh) | 2012-11-23 | 2013-11-15 | 雙碟式表面磨床中靜壓墊的熱變形預防設備以及雙碟式表面磨床 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6033652B2 (https=) |
| TW (1) | TWI652140B (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6401082B2 (ja) * | 2015-03-10 | 2018-10-03 | 日本碍子株式会社 | セラミック構造体の製法 |
| JP6383700B2 (ja) * | 2015-04-07 | 2018-08-29 | 光洋機械工業株式会社 | 薄板状ワークの製造方法及び両頭平面研削装置 |
| CN109352445B (zh) * | 2018-12-05 | 2019-11-12 | 江苏博克斯科技股份有限公司 | 一种用于电子产品内部板件的打磨装置及其工作方法 |
| CN111716204B (zh) * | 2020-07-01 | 2021-08-13 | 中山市国景家具有限公司 | 一种木材表面精细化处理加工系统 |
| CN115070604B (zh) * | 2022-06-09 | 2023-09-29 | 西安奕斯伟材料科技股份有限公司 | 双面研磨装置和双面研磨方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201016393A (en) | 2008-08-08 | 2010-05-01 | Kuraray Co | Polishing pad and the method for manufacturing the polishing pad |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4613665Y1 (https=) * | 1967-09-28 | 1971-05-14 | ||
| US4262452A (en) * | 1978-11-24 | 1981-04-21 | Lopez Francisco R | Disc brake grinding apparatus and method |
| JPS5755000Y2 (https=) * | 1979-09-29 | 1982-11-27 | ||
| JP2010064214A (ja) * | 2008-09-12 | 2010-03-25 | Koyo Mach Ind Co Ltd | 両頭平面研削盤及びワークの両面研削方法 |
-
2012
- 2012-11-23 JP JP2012256952A patent/JP6033652B2/ja active Active
-
2013
- 2013-11-15 TW TW102141722A patent/TWI652140B/zh active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201016393A (en) | 2008-08-08 | 2010-05-01 | Kuraray Co | Polishing pad and the method for manufacturing the polishing pad |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201433409A (zh) | 2014-09-01 |
| JP6033652B2 (ja) | 2016-11-30 |
| JP2014104515A (ja) | 2014-06-09 |
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