TWI648518B - 靜電容量感測器、檢測系統及機器人系統 - Google Patents

靜電容量感測器、檢測系統及機器人系統 Download PDF

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Publication number
TWI648518B
TWI648518B TW103129485A TW103129485A TWI648518B TW I648518 B TWI648518 B TW I648518B TW 103129485 A TW103129485 A TW 103129485A TW 103129485 A TW103129485 A TW 103129485A TW I648518 B TWI648518 B TW I648518B
Authority
TW
Taiwan
Prior art keywords
workpiece
electrode
initial position
electrostatic capacitance
electrodes
Prior art date
Application number
TW103129485A
Other languages
English (en)
Chinese (zh)
Other versions
TW201516377A (zh
Inventor
太
小山武志
金銀善
菅原利文
Original Assignee
日商創意科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商創意科技股份有限公司 filed Critical 日商創意科技股份有限公司
Publication of TW201516377A publication Critical patent/TW201516377A/zh
Application granted granted Critical
Publication of TWI648518B publication Critical patent/TWI648518B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0085—Gripping heads and other end effectors with means for applying an electrostatic force on the object to be gripped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
TW103129485A 2013-08-28 2014-08-27 靜電容量感測器、檢測系統及機器人系統 TWI648518B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-177409 2013-08-28
JP2013177409 2013-08-28

Publications (2)

Publication Number Publication Date
TW201516377A TW201516377A (zh) 2015-05-01
TWI648518B true TWI648518B (zh) 2019-01-21

Family

ID=52586391

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103129485A TWI648518B (zh) 2013-08-28 2014-08-27 靜電容量感測器、檢測系統及機器人系統

Country Status (3)

Country Link
JP (1) JP6425185B2 (ja)
TW (1) TWI648518B (ja)
WO (1) WO2015029827A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019096757A (ja) * 2017-11-24 2019-06-20 東京エレクトロン株式会社 測定器のずれ量を求める方法、及び、処理システムにおける搬送位置データを較正する方法
CN109129533B (zh) * 2018-10-12 2021-09-21 重庆大学 一种面向在轨捕获的自适应静电吸附式末端执行器
JP2021020286A (ja) * 2019-07-30 2021-02-18 セイコーエプソン株式会社 検出方法およびロボット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6160338A (en) * 1996-06-11 2000-12-12 Nikon Corporation Transport apparatus
TW438971B (en) * 1999-03-01 2001-06-07 Wako Kk Electrostatic capacitance type sensor
JP3579908B2 (ja) * 1993-07-09 2004-10-20 オムロン株式会社 静電容量形近接センサ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11309409A (ja) * 1998-04-30 1999-11-09 Dainippon Screen Mfg Co Ltd 基板処理システム
JP2001091205A (ja) * 1999-07-22 2001-04-06 Sumitomo Metal Ind Ltd 物体搭載装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3579908B2 (ja) * 1993-07-09 2004-10-20 オムロン株式会社 静電容量形近接センサ
US6160338A (en) * 1996-06-11 2000-12-12 Nikon Corporation Transport apparatus
TW438971B (en) * 1999-03-01 2001-06-07 Wako Kk Electrostatic capacitance type sensor

Also Published As

Publication number Publication date
WO2015029827A1 (ja) 2015-03-05
JPWO2015029827A1 (ja) 2017-03-02
TW201516377A (zh) 2015-05-01
JP6425185B2 (ja) 2018-11-21

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