TWI648518B - Static capacitance sensor, detection system and robot system - Google Patents
Static capacitance sensor, detection system and robot system Download PDFInfo
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- TWI648518B TWI648518B TW103129485A TW103129485A TWI648518B TW I648518 B TWI648518 B TW I648518B TW 103129485 A TW103129485 A TW 103129485A TW 103129485 A TW103129485 A TW 103129485A TW I648518 B TWI648518 B TW I648518B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0085—Gripping heads and other end effectors with means for applying an electrostatic force on the object to be gripped
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
本發明係提供簡單的構造且能達成小型化之靜電容量感測器、檢測系統、及機器人系統。 The present invention provides an electrostatic capacity sensor, a detection system, and a robot system that are simple in construction and can be miniaturized.
檢測系統1-1係具備靜電容量感測器2、旋轉角度演算部3、以及偏移量演算部4。靜電容量感測器2係具有基材20、保護電極21、吸附電極22、4個第1電極23、以及2對第2電極對24、25。旋轉角度演算部3係根據第1電極23和工件W的重疊部分的靜電容量之和,而演算工件W自初期位置起之旋轉角度θ。偏移量演算部4係根據第2電極對24、25和工件W的重疊部分的靜電容量之變化、以及來自旋轉角度演算部3之旋轉角度θ,以求得工件W自初期位置起往x軸方向、y軸方向的偏移量δ x、δ y。 The detection system 1-1 includes a capacitance sensor 2, a rotation angle calculation unit 3, and an offset calculation unit 4. The capacitance sensor 2 includes a substrate 20, a guard electrode 21, an adsorption electrode 22, four first electrodes 23, and two pairs of second electrode pairs 24 and 25. The rotation angle calculation unit 3 calculates the rotation angle θ of the workpiece W from the initial position based on the sum of the electrostatic capacitances of the overlapping portions of the first electrode 23 and the workpiece W. The offset calculation unit 4 determines the workpiece W from the initial position based on the change in the electrostatic capacitance between the overlapping portions of the second electrode pairs 24 and 25 and the workpiece W and the rotation angle θ from the rotation angle calculating unit 3. The offsets δ x and δ y in the axial direction and the y-axis direction.
Description
本發明係有關於用以檢測自初期位置起的工件之傾斜角度或位置偏移之靜電容量感測器、檢測系統、及機器人系統之相關技術。 The present invention relates to an electrostatic capacitance sensor, a detection system, and a related art of a robot system for detecting an inclination angle or a positional deviation of a workpiece from an initial position.
習知技術中,其作為該靜電容量感測器係專利文獻1所記載之位置感測器。 In the conventional technique, it is a position sensor described in Patent Document 1 of the electrostatic capacitance sensor.
該感測器係對固定部而量測將平面內作相對性的移動之移動座台的位置之位置感測器。具體而言,具有以特定的間隔而相互對向之第1至第3固定對向電極對之固定電極部係連接於固定部。此外,具有分別部分的插入於第1至第3固定對向電極對之間的第1至第3可動電極的可動電極部係連接於移動座台。此外,第1固定對向電極對係具有延伸於第1方向之第1對向電極,第2固定對向電極對係具有平行而延伸於第1方向之第2對向電極,第3固定對向電極對係具有延伸於和第1方向相交叉的第2方向之第3對向電極。此外,第1至第3對向電極係分別具有因應於第1至第3之可動電極的各插入狀態而產生變化之 第1至第3之靜電容量。此外,第1、第3對向電極係分別配置於相對於第2、第1對向電極而移位於第1、第2方向的位置。 The sensor measures a position sensor that moves the position of the movable table in a plane relative to the fixed portion. Specifically, the fixed electrode portions of the first to third fixed counter electrode pairs that face each other at a specific interval are connected to the fixing portion. Further, the movable electrode portions having the first to third movable electrodes inserted between the first to third fixed counter electrode pairs are connected to the movable base. Further, the first fixed counter electrode pair has a first counter electrode extending in the first direction, and the second fixed counter electrode pair has a second counter electrode extending in parallel in the first direction, and the third fixed pair The electrode pair has a third counter electrode extending in a second direction intersecting the first direction. Further, each of the first to third counter electrode systems has a change depending on the respective insertion states of the first to third movable electrodes. The electrostatic capacitance of the first to third. Further, the first and third counter electrode systems are respectively disposed at positions shifted in the first and second directions with respect to the second and first counter electrodes.
據此,由於相互反方向之靜電容量的變化係根據移動座台的旋轉而產生,故利用該反方向之靜電容量的變化,即能檢測移動座台的旋轉角度而作為第1對向電極和第2對向電極之靜電容量的差。另一方面,往移動座台的第2方向之並進移動係能藉由抵消旋轉移動的影響而檢測出第1對向電極和第2對向電極的和。此外,能藉由對第3對向電極之靜電容量的變化予以修正旋轉移動的影響而檢測出往移動座台的第1方向之並進移動。 According to this, since the change in the electrostatic capacitance in the opposite direction is generated by the rotation of the moving platform, the change in the electrostatic capacitance in the opposite direction can detect the rotation angle of the moving platform as the first counter electrode and The difference in electrostatic capacitance of the second counter electrode. On the other hand, the parallel movement to the second direction of the moving platform can detect the sum of the first counter electrode and the second counter electrode by canceling the influence of the rotational movement. Further, it is possible to detect the parallel movement in the first direction of the moving platform by correcting the influence of the rotational movement on the change in the electrostatic capacitance of the third counter electrode.
專利文獻1:日本特開2013-024701號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2013-024701
但是,上述之習知的感測器,其用以檢測靜電容量的變化之電極數量為多數,且電極間的組裝構造較為複雜。因此,感測器本身形成複雜且大型化,其結果,存在有導致製造工程數和製造成本的增加之問題。 However, the conventional sensor described above has a large number of electrodes for detecting changes in electrostatic capacitance, and the assembly structure between the electrodes is complicated. Therefore, the sensor itself is complicated and large-sized, and as a result, there is a problem that the number of manufacturing engineering and the manufacturing cost increase.
本發明係為了解決上述課題而創作完成者,其目的在於提供簡單之構造且能達成小型化的靜電容量感測器、檢測系統、及機器人系統。 The present invention has been made in order to solve the above problems, and an object thereof is to provide a capacitance sensor, a detection system, and a robot system which are simple in structure and can be downsized.
為了解決上述課題,申請專利範圍第1項之發明係靜電容量感測器,其係具備:保護電極,其係中介第1電介質層而積層於基材上且予以接地;複數個第1電極,其係中介第2電介質層而配設於該保護電極上;以及吸附部,其係用以吸附多角形的工件,且將第1電極和工件的對向距離保持固定,該靜電容量感測器係用以檢測工件自初期位置起之旋轉角度,且該靜電容量感測器係作成將複數個第1電極配設於吸附部之周圍,並且將複數的第1電極配置成:於由該吸附部所吸附的工件位於初期位置時,各第1電極的中心位於自工件的中心通過各頂點的直線上,且工件的各頂點位於各第1電極的形狀內。 In order to solve the above problem, the invention of claim 1 is an electrostatic capacitance sensor comprising: a protective electrode which is laminated on a substrate and grounded by a first dielectric layer; and a plurality of first electrodes; The second dielectric layer is disposed on the protective electrode; and the adsorption portion is configured to adsorb the polygonal workpiece and maintain the opposing distance between the first electrode and the workpiece. The electrostatic capacitance sensor The method is configured to detect a rotation angle of the workpiece from an initial position, and the capacitance sensor is configured to arrange a plurality of first electrodes around the adsorption portion, and configure the plurality of first electrodes to be: When the workpiece sucked by the portion is at the initial position, the center of each of the first electrodes is located on a straight line passing through the apexes from the center of the workpiece, and the apexes of the workpiece are located in the shape of each of the first electrodes.
根據如此之構成,則藉由吸附部而吸附工件時,工件和第1電極的對向距離即能保持固定。此時,當被吸附的工件自初期位置旋轉時,則工件的各頂點即自初期位置偏移。因此,複數個第1電極和工件的重疊部分產生的靜電容量之和係依工件位於初期位置時和自初期位置旋轉時而不同。因此,藉由考量各狀態之複數個第1電極和工件的重疊部分所產生的靜電容量之和,即能檢測出工件自初期位置起之旋轉角度。 According to this configuration, when the workpiece is sucked by the adsorption portion, the opposing distance between the workpiece and the first electrode can be kept constant. At this time, when the workpiece to be adsorbed is rotated from the initial position, the vertices of the workpiece are shifted from the initial position. Therefore, the sum of the electrostatic capacitances generated by the overlapping portions of the plurality of first electrodes and the workpiece differs depending on when the workpiece is at the initial position and when it is rotated from the initial position. Therefore, by considering the sum of the electrostatic capacitances generated by the overlapping portions of the plurality of first electrodes and the workpieces in the respective states, the rotation angle of the workpiece from the initial position can be detected.
申請專利範圍第2項之發明,其係在申請專利範圍第1項之靜電容量感測器中,作成第1電極之數量為4,且各第1電極為圓形、正四角形或菱形之中之任意一項,工件係形成正方形或長方形之中之任意一項的形狀之構成。 The invention of claim 2, wherein in the electrostatic capacitance sensor of claim 1, the number of the first electrodes is 4, and each of the first electrodes is a circular shape, a regular square shape or a diamond shape. In either case, the workpiece is formed into a shape of any one of a square or a rectangle.
申請專利範圍第3項之發明係靜電容量感測器,其係具備:保護電極,係中介第1電介質層而積層於基材上且予以接地;2對第2電極對,係中介第2電介質層而配設於該保護電極上;以及吸附部,其係用以吸附工件,且將第2電極和工件的對向距離保持固定,該靜電容量感測器係用以檢測工件自初期位置起之偏移量,且該靜電容量感測器係作成將2對第2電極對分別配設於初期位置內互相正交的x軸和y軸之上,且將構成2對第2電極對之中之一方的第2電極對之2個第2電極分別並設於x軸之兩側,並且配置於在吸附部所吸附的工件位於初期位置時由工件的一邊所重疊的位置,且將構成另一方的第2電極對之2個第2電極分別並設於y軸之兩側,並且配置於在工件位於初期位置時由工件的另一邊所重疊的位置之構成。 The invention of claim 3 is an electrostatic capacitance sensor comprising: a protective electrode which is laminated on a substrate and grounded by a first dielectric layer; and 2 pairs of second electrode pairs, which are intermediate dielectrics a layer disposed on the protective electrode; and an adsorption portion for adsorbing the workpiece and maintaining a fixed distance between the second electrode and the workpiece, the electrostatic capacitance sensor for detecting the workpiece from the initial position The capacitance sensor is configured such that two pairs of second electrode pairs are disposed on the x-axis and the y-axis orthogonal to each other in the initial position, and two pairs of second electrode pairs are formed. The two second electrodes of the second electrode pair are disposed on both sides of the x-axis, and are disposed at positions where one side of the workpiece overlaps when the workpiece sucked by the adsorption portion is at the initial position, and is configured The two second electrodes of the other second electrode pair are disposed on both sides of the y-axis, and are disposed at positions where the other side of the workpiece overlaps when the workpiece is at the initial position.
根據如此之構成,則藉由吸附部而吸附工件時,工件 和第2電極的對向距離即能保持固定。此時,當被吸附的工件自初期位置而偏移於x軸方向時,則一方的第2電極對和工件的重疊部分所產生的靜電容量和工件位於初期位置時不同。因此,藉由考量各狀態之一方的第2電極對和工件的重疊部分所產生的靜電容量,即能檢測出自工件的初期位置往x軸方向的偏移量。此外,工件自初期位置而偏移於y軸方向時,則另一方的第2電極對和工件的重疊部分所產生的靜電容量和工件位於初期位置時不同。因此,藉由考量各狀態之另一方的第2電極對和工件的重疊部分所產生的靜電容量,即能檢測出自工件的初期位置往y軸方向的偏移量。 According to such a configuration, when the workpiece is sucked by the adsorption portion, the workpiece The opposing distance from the second electrode can be kept constant. At this time, when the workpiece to be adsorbed is shifted from the initial position to the x-axis direction, the electrostatic capacitance generated by the overlapping portion of one of the second electrode pairs and the workpiece is different from that when the workpiece is at the initial position. Therefore, the amount of displacement from the initial position of the workpiece to the x-axis direction can be detected by considering the electrostatic capacitance generated by the overlapping of the second electrode pair and the workpiece in one of the states. Further, when the workpiece is shifted from the initial position to the y-axis direction, the electrostatic capacitance generated by the overlapping portion of the other second electrode pair and the workpiece is different from when the workpiece is at the initial position. Therefore, the amount of displacement from the initial position of the workpiece to the y-axis direction can be detected by considering the electrostatic capacitance generated by the overlapping portion of the second electrode pair and the workpiece in the other state.
申請專利範圍第4項之發明,其係在申請專利範圍第3項之靜電容量感測器中,作成各第2電極為長方形或正四角形之中之任意一項,工件係形成正方形或長方形之中之任意一項的形狀之構成。 The invention of claim 4, wherein in the electrostatic capacitance sensor of claim 3, each of the second electrodes is formed into a rectangular shape or a regular square shape, and the workpiece is formed into a square or a rectangular shape. The composition of the shape of any one of them.
申請專利範圍第5項之發明,其係在申請專利範圍第1項或第2項之靜電容量感測器中,作成使用申請專利範圍第3項或第4項之靜電容量感測器所具備之2對第2電極對之構成。 The invention of claim 5, which is in the electrostatic capacitance sensor of claim 1 or 2, is provided with an electrostatic capacitance sensor using the third or fourth aspect of the patent application scope. The pair of 2 pairs of second electrode pairs.
根據如此之構成,即能藉由1個之靜電容量感測器而檢測工件自初期位置起之旋轉角度、x軸上的偏移量、以及y軸上的偏移量。 According to this configuration, the rotation angle of the workpiece from the initial position, the amount of shift on the x-axis, and the amount of shift on the y-axis can be detected by one electrostatic capacitance sensor.
申請專利範圍第6項之發明,其係在如申請專利範圍第1項乃至第5項之中之任意一項的靜電容量感 測器中,吸附部係作成由下述形成之構成:吸附電極,其係連接於電源且藉由靜電力而吸附工件;以及表面平坦之第3電介質層,其係覆蓋該吸附電極、第1及第2電極。 The invention of claim 6 of the patent application is based on the electrostatic capacitance of any one of items 1 to 5 of the patent application scope. In the measuring device, the adsorption portion is formed by forming an adsorption electrode that is connected to a power source and adsorbs the workpiece by electrostatic force, and a third dielectric layer having a flat surface covering the adsorption electrode, the first And the second electrode.
申請專利範圍第7項之發明之檢測系統,其係作成具備下列之構成:靜電容量感測器,其係申請專利範圍第1項、第2項或第6項之中之任意一項;以及旋轉角度演算部,其係根據靜電容量感測器之複數的第1電極和工件的重疊部分所產生的靜電容量之和,演算工件自初期位置起之旋轉角度,且該旋轉角度演算部,係根據預先求得之靜電容量之和與旋轉角度的關係式,由現時點的靜電容量之和而求得現時點之旋轉角度。 The detection system of the invention of claim 7 is configured to have the following composition: an electrostatic capacitance sensor, which is any one of items 1, 2, or 6 of the patent application scope; The rotation angle calculation unit calculates the rotation angle of the workpiece from the initial position based on the sum of the electrostatic capacitances generated by the overlapping portions of the first electrode and the workpiece of the plurality of capacitance sensors, and the rotation angle calculation unit is The rotation angle of the current point is obtained from the sum of the electrostatic capacities of the current points based on the relationship between the sum of the electrostatic capacitances obtained in advance and the rotation angle.
根據如此之構成,藉由靜電容量感測器的吸附部而吸附之工件自初期位置而旋轉時,則旋轉角度演算部即根據預先求得之靜電容量之和與旋轉角度的關係式,由現時點的靜電容量之和而求得現時點之旋轉角度。 According to this configuration, when the workpiece sucked by the adsorption portion of the capacitance sensor rotates from the initial position, the rotation angle calculation unit calculates the relationship between the sum of the electrostatic capacitances obtained in advance and the rotation angle. The sum of the electrostatic capacities of the points is used to obtain the rotation angle of the current point.
申請專利範圍第8項之發明之檢測系統,其係作成具備下列之構成:靜電容量感測器,其係申請專利範圍第3項、第4項或第6項之中之任意一項;以及偏移量演算部,其係根據靜電容量感測器之一方的第2電極對和工件的重疊部分所產生的靜電容量之變化,演 算工件自初期位置起往x軸方向的偏移量,並且根據另一方的第2電極對和工件的重疊部分所產生的靜電容量之變化,演算工件自初期位置起往y軸方向的偏移量,且該偏移量演算部係根據第2電極對和位於初期位置之工件的重疊部分所產生的靜電容量、與第2電極對和現時點位置之工件的重疊部分所產生的靜電容量之差,求得工件的偏移量。 The detection system of the invention of claim 8 is configured to have the following composition: an electrostatic capacitance sensor, which is any one of items 3, 4 or 6 of the patent application scope; The offset calculation unit is based on a change in electrostatic capacitance generated by the second electrode pair on one side of the capacitance sensor and the overlapping portion of the workpiece Calculate the offset of the workpiece from the initial position to the x-axis direction, and calculate the offset of the workpiece from the initial position to the y-axis direction according to the change in the electrostatic capacitance generated by the other second electrode pair and the overlapping portion of the workpiece. And the offset amount calculation unit is based on the electrostatic capacitance generated by the overlapping portion of the second electrode pair and the workpiece located at the initial position, and the electrostatic capacitance generated by the overlapping portion of the workpiece between the second electrode pair and the current point position. Poor, find the offset of the workpiece.
根據如此之構成,藉由靜電容量感測器的吸附部而吸附之工件自初期位置而偏移於x軸方向時,則偏移量演算部即根據一方的第2電極對和位於初期位置之工件的重疊部分所產生的靜電容量、與第2電極對和現時點位置之工件的重疊部分所產生的靜電容量之差,求得工件之x軸方向的偏移量。此外,工件自初期位置而偏移於y軸方向時,則偏移量演算部即根據另一方的第2電極對和位於初期位置之工件的重疊部分所產生的靜電容量、與第2電極對和現時點位置之工件的重疊部分所產生的靜電容量之差,求得工件之y軸方向的偏移量。 According to this configuration, when the workpiece sucked by the adsorption portion of the capacitance sensor is shifted from the initial position to the x-axis direction, the offset calculation unit is based on one of the second electrode pairs and at the initial position. The amount of shift in the x-axis direction of the workpiece is obtained by the difference between the electrostatic capacitance generated by the overlapping portion of the workpiece and the electrostatic capacitance generated by the overlap between the second electrode pair and the workpiece at the current position. Further, when the workpiece is shifted from the initial position to the y-axis direction, the offset amount calculating unit is the electrostatic capacitance generated by the overlapping portion of the other second electrode pair and the workpiece located at the initial position, and the second electrode pair. The amount of shift in the y-axis direction of the workpiece is obtained by the difference in electrostatic capacitance generated by the overlap of the workpiece at the current point position.
申請專利範圍第9項之發明係在申請專利範圍第7項的檢測系統中,使用申請專利範圍第8項的檢測系統所具備之2個第2電極對和偏移量演算部,且偏移量演算部係為作成具有如下功能之構成:演算將工件僅反旋轉旋轉角度演算部所求得之旋轉角度部分之狀態,並根據第2電極對和位於初期位置之工件的重疊部分所產生的靜電容量、與第2電極對和反旋轉的狀態下之工件的重疊 部分所產生的靜電容量之差,而求得工件的偏移量。 The invention of claim 9 is in the detection system of claim 7 of the patent application, wherein the second second electrode pair and the offset calculation unit included in the detection system of claim 8 are used, and the offset is The quantity calculation unit is configured to have a function of calculating a state of a rotation angle portion obtained by the workpiece only by the reverse rotation angle calculation unit, and generating the result based on the overlapping portion of the second electrode pair and the workpiece located at the initial position. Electrostatic capacitance, overlap with the second electrode pair and the workpiece in the reverse rotation state The difference in electrostatic capacitance generated in part is obtained, and the offset of the workpiece is obtained.
根據如此之構成,藉由旋轉角度演算部而演算吸附於靜電容量感測器的吸附部之工件的旋轉角度,且藉由偏移量演算部而演算往工件之x軸方向、以及往y軸方向的偏移量。在檢測該偏移量時,偏移量演算部係僅就旋轉角度演算部所求得之旋轉角度部分,求取工件之反旋轉之狀態,並根據第2電極對和位於初期位置之工件的重疊部分所產生的靜電容量、與第2電極對和反旋轉的狀態下之工件的重疊部分所產生的靜電容量之差,求得工件的偏移量。 According to this configuration, the rotation angle of the workpiece adsorbed to the adsorption portion of the capacitance sensor is calculated by the rotation angle calculation unit, and is calculated by the offset amount calculation unit in the x-axis direction of the workpiece and toward the y-axis. The offset of the direction. When detecting the offset amount, the offset calculation unit obtains the state of the reverse rotation of the workpiece only by the rotation angle portion obtained by the rotation angle calculation unit, and based on the second electrode pair and the workpiece at the initial position. The amount of shift of the workpiece is determined by the difference between the electrostatic capacitance generated by the overlap portion and the electrostatic capacitance generated by the overlap between the second electrode pair and the workpiece in the reverse rotation state.
申請專利範圍第10項之發明,其係具備申請專利範圍第7項乃至第9項之中之任意一項之檢測系統之機器人系統,且係作成具備下列之構成:機器人手臂:係前端部連接有靜電容量感測器;以及控制器:係根據旋轉角度演算部和偏移量演算部所求得之旋轉角度和偏移量而控制機器人手臂的動作。 The invention of claim 10, which is a robot system having a detection system according to any one of the seventh or the ninth aspect of the patent application, and is configured to have the following structure: a robot arm: a front end connection The electrostatic capacity sensor and the controller control the movement of the robot arm based on the rotation angle and the offset amount obtained by the rotation angle calculation unit and the offset calculation unit.
根據如此之構成,機器人手臂係根據連接於前端部的靜電容量感測器,當吸附工件時,則檢測系統的旋轉角度演算部即演算工件自初期位置起之旋轉角度,並且偏移量演算部演算工件之x軸上的偏移量、以及y軸上的偏移量。如此,控制器即根據此等旋轉角度演算部和偏移量演算部所求得之旋轉角度和偏移量而控制機器人手臂的動作,且將工件修正於所希望的角度和位置,並配置於特定的處所。 According to this configuration, the robot arm is based on the capacitance sensor connected to the distal end portion, and when the workpiece is sucked, the rotation angle calculation unit of the detection system calculates the rotation angle of the workpiece from the initial position, and the offset calculation unit Calculate the offset on the x-axis of the workpiece and the offset on the y-axis. In this manner, the controller controls the operation of the robot arm based on the rotation angle and the offset amount obtained by the rotation angle calculation unit and the offset calculation unit, and corrects the workpiece to a desired angle and position, and arranges the workpiece. Specific premises.
如上述之詳細說明,根據本發明之靜電容 量感測器,由於能由基材、中介第1電介質層而積層於基材上之保護電極、中介第2電介質層而積層於保護電極上之複數個第1電極、以及吸附部如此的少量的構件所構成,故能製造構造簡單且小型化之靜電容量感測器。其結果,不僅能抑制而降低該靜電容量感測器的製造工程數或製造成本,亦可抑制降低具備靜電容量感測器之檢測系統和機器人系統的製造工程數或製造成本,具有優良的功效。 As described in detail above, the electrostatic capacitor according to the present invention The quantity sensor is a small number of first electrodes that can be laminated on the protective electrode by the substrate, the protective electrode that is laminated on the substrate by interposing the first dielectric layer, the second dielectric layer, and the adsorption portion. Since the components are constituted, it is possible to manufacture an electrostatic capacitance sensor which is simple in structure and small in size. As a result, not only can the number of manufacturing processes or the manufacturing cost of the capacitance sensor be reduced, but also the number of manufacturing processes or manufacturing costs of the detection system and the robot system including the capacitance sensor can be suppressed, and the system can have excellent effects. .
1-1至1-3‧‧‧檢測系統 1-1 to 1-3‧‧‧Detection system
2‧‧‧靜電容量感測器 2‧‧‧Electrostatic capacity sensor
3‧‧‧旋轉角度演算部 3‧‧‧Rotation Angle Calculation Department
3a、3b、4a‧‧‧輸出端 3a, 3b, 4a‧‧‧ output
4‧‧‧偏移量演算部 4‧‧‧Offset Calculation Department
20‧‧‧基材 20‧‧‧Substrate
21‧‧‧保護電極 21‧‧‧Protective electrode
21a、23a、24c、24d、25c、25d‧‧‧端子 21a, 23a, 24c, 24d, 25c, 25d‧‧‧ terminals
22‧‧‧吸附電極 22‧‧‧Adsorption electrode
22a、22b‧‧‧電極 22a, 22b‧‧‧ electrodes
23‧‧‧第1電極 23‧‧‧1st electrode
24、25‧‧‧第2電極對 24, 25‧‧‧2nd electrode pair
24a、24b、25a、25b‧‧‧第2電極 24a, 24b, 25a, 25b‧‧‧ second electrode
26至28‧‧‧樹脂薄膜 26 to 28‧‧‧ resin film
26a至28a‧‧‧接著材 26a to 28a‧‧‧
29‧‧‧電源 29‧‧‧Power supply
31、32、41至44‧‧‧配線 31, 32, 41 to 44‧‧‧ wiring
100‧‧‧機器人手臂 100‧‧‧Robot arm
110‧‧‧控制器 110‧‧‧ Controller
120‧‧‧台座 120‧‧‧ pedestal
130‧‧‧機器 130‧‧‧ Machine
δ x、δ y‧‧‧偏移量 δ x, δ y‧‧‧ offset
θ‧‧‧旋轉角度 θ‧‧‧Rotation angle
第1圖係表示本發明之第1實施例的檢測系統的立體圖。 Fig. 1 is a perspective view showing a detection system according to a first embodiment of the present invention.
第2圖係檢測系統的平面圖。 Figure 2 is a plan view of the inspection system.
第3圖係靜電容量感測器的分解立體圖。 Fig. 3 is an exploded perspective view of the electrostatic capacity sensor.
第4圖係第2圖之矢視A-A截面圖。 Figure 4 is a cross-sectional view of the vector view A-A of Figure 2.
第5圖係表示圓形的第1電極和工件的重疊部分之狀態的概略平面圖。 Fig. 5 is a schematic plan view showing a state in which a circular first electrode and a workpiece are overlapped.
第6圖係表示圓形的第1電極和工件的重疊部分的面積和工件的旋轉角度之關係的線圖。 Fig. 6 is a line diagram showing the relationship between the area of the overlapping portion of the circular first electrode and the workpiece and the rotation angle of the workpiece.
第7圖係表示正方形的第1電極和工件的重疊部分之狀態的概略平面圖。 Fig. 7 is a schematic plan view showing the state of the overlapping portion of the square first electrode and the workpiece.
第8圖係表示正方形的第1電極和工件的重疊部分的面積和工件的旋轉角度之關係的線圖。 Fig. 8 is a line diagram showing the relationship between the area of the overlapping portion of the square first electrode and the workpiece and the rotation angle of the workpiece.
第9圖係表示菱形的第1電極和工件的重疊部分之狀態的概略平面圖。 Fig. 9 is a schematic plan view showing the state of the overlapping portion of the rhombic first electrode and the workpiece.
第10圖係表示菱形的第1電極和工件的重疊部分的面積和工件的旋轉角度之關係的線圖。 Fig. 10 is a line diagram showing the relationship between the area of the overlapping portion of the rhombic electrode and the workpiece and the rotation angle of the workpiece.
第11圖係用以說明往工件的x軸方向之偏移量δ x的概略平面圖。 Fig. 11 is a schematic plan view for explaining the amount of shift δ x in the x-axis direction of the workpiece.
第12圖(a)至(c)係用以說明偏移量δ x的演算方法之部分放大平面圖。 Fig. 12 (a) to (c) are partially enlarged plan views for explaining a calculation method of the offset amount δ x .
第13圖係表示使用第1實施例的檢測系統之機器人系統的概略圖。 Fig. 13 is a schematic view showing a robot system using the detecting system of the first embodiment.
第14圖係表示機器人系統整體的概略圖。 Fig. 14 is a schematic view showing the entire robot system.
第15圖係表示將工件舉起之狀態的概略圖。 Fig. 15 is a schematic view showing a state in which the workpiece is lifted.
第16圖係表示將工件吸附之狀態的截面圖。 Fig. 16 is a cross-sectional view showing a state in which a workpiece is adsorbed.
第17圖係表示將工件的偏移予以修正之狀態的概略圖。 Fig. 17 is a schematic view showing a state in which the offset of the workpiece is corrected.
第18圖係表示將工件配置於所希望位置之狀態的概略圖。 Fig. 18 is a schematic view showing a state in which a workpiece is placed at a desired position.
第19圖係本發明之第2實施例的檢測系統的平面圖。 Figure 19 is a plan view showing a detecting system of a second embodiment of the present invention.
第20圖係本發明之第3實施例的檢測系統的平面圖。 Figure 20 is a plan view showing a detecting system of a third embodiment of the present invention.
第21圖係表示第1電極之配置的變形例的概略圖。 Fig. 21 is a schematic view showing a modification of the arrangement of the first electrodes.
以下,參閱圖式而說明有關於本發明之最佳的實施形態。 Hereinafter, the best mode for carrying out the invention will be described with reference to the drawings.
(實施例1) (Example 1)
第1圖係表示本發明之第1實施例的檢測系統的立體圖,第2圖係檢測系統的平面圖。又,有關於靜電容量感 測器係透過各種電極而顯示。 Fig. 1 is a perspective view showing a detection system according to a first embodiment of the present invention, and Fig. 2 is a plan view showing a detection system. Also, there is a sense of electrostatic capacitance The detector is displayed through various electrodes.
如第1圖和第2圖所示,本實施例的檢測系統1-1係具備靜電容量感測器2、旋轉角度演算部3、以及偏移量演算部4。 As shown in FIGS. 1 and 2, the detection system 1-1 of the present embodiment includes a capacitance sensor 2, a rotation angle calculation unit 3, and an offset calculation unit 4.
靜電容量感測器2係用以演算工件(work)自初期位置起之旋轉角度、以及偏移量的感測器。 The electrostatic capacitance sensor 2 is a sensor for calculating a rotation angle of a work from an initial position and an offset amount.
第3圖係靜電容量感測器2的分解立體圖。第4圖係第2圖之矢視A-A截面圖。 FIG. 3 is an exploded perspective view of the electrostatic capacity sensor 2. Figure 4 is a cross-sectional view of the vector view A-A of Figure 2.
如第3圖和第4圖所示,靜電容量感測器2係具有基材20上的保護電極21、保護電極21上的吸附電極22、4個第1電極23、以及2對第2電極對24、25。 As shown in FIGS. 3 and 4, the capacitance sensor 2 has a protective electrode 21 on a substrate 20, an adsorption electrode 22 on the guard electrode 21, four first electrodes 23, and two pairs of second electrodes. For 24, 25.
具體而言,捲曲狀的保護電極21係形成於屬於第1電介質層之極薄的樹脂薄膜26上,該樹脂薄膜26係藉由接著材26a而貼附於基材20上。此外,吸附電極22、4個第1電極23、以及2對第2電極對24、25係形成於屬於第2電介質層之極薄的樹脂薄膜27上,該樹脂薄膜27係以能覆蓋保護電極21之方式,藉由接著材27a而貼附於樹脂薄膜26上。此外,屬於第3電介質層之表面平坦的樹脂薄膜28係以能覆蓋吸附電極22、4個第1電極23、以及2對第2電極對24、25之方式,藉由接著材28a而貼附於樹脂薄膜27上。 Specifically, the curled protective electrode 21 is formed on the extremely thin resin film 26 belonging to the first dielectric layer, and the resin film 26 is attached to the substrate 20 by the bonding material 26a. Further, the adsorption electrode 22, the four first electrodes 23, and the pair of second electrode pairs 24 and 25 are formed on the extremely thin resin film 27 belonging to the second dielectric layer, and the resin film 27 is capable of covering the protective electrode. The method of 21 is attached to the resin film 26 by the bonding material 27a. Further, the resin film 28 which is flat on the surface of the third dielectric layer is attached to the adsorption electrode 22, the four first electrodes 23, and the pair of second electrode pairs 24 and 25 by means of the bonding material 28a. On the resin film 27.
保護電極21係用以解除基材20側的電容變化之電極,具有能阻止自基材20側往第1電極23或第2電極對24、25之干涉的功能。 The protective electrode 21 is an electrode for canceling the change in capacitance of the substrate 20 side, and has a function of preventing interference from the substrate 20 side to the first electrode 23 or the second electrode pair 24, 25.
如第2圖所示,吸附電極22係用以吸附二點虛線所示之正方形的工件W之電極。 As shown in Fig. 2, the adsorption electrode 22 is for adsorbing the electrode of the square workpiece W shown by the two-dot chain line.
具體而言,吸附電極22係為由2個電極22a、22b所形成之雙極型的吸附電極,由該吸附電極22和樹脂薄膜28而構成吸附部。 Specifically, the adsorption electrode 22 is a bipolar adsorption electrode formed of two electrodes 22a and 22b, and the adsorption electrode 22 and the resin film 28 constitute an adsorption portion.
詳細說明,電源29係連接於電極22a、22b之間,當由電源29將電源電壓供應於電極22a、22b時,則電極22a、22b即藉由靜電力而將載置於樹脂薄膜28(參考第3圖和第4圖)上的工件W吸附於樹脂薄膜28表面。亦即,吸附電極22係具有將工件W整體吸附於樹脂薄膜28表面,且能將工件W和第1電極23的對向距離或工件W和第2電極對24、25的對向距離保持固定之功能。 In detail, the power source 29 is connected between the electrodes 22a and 22b. When the power source voltage is supplied to the electrodes 22a and 22b by the power source 29, the electrodes 22a and 22b are placed on the resin film 28 by electrostatic force (refer to The workpiece W on the third and fourth drawings is adsorbed on the surface of the resin film 28. That is, the adsorption electrode 22 has the entire workpiece W adsorbed on the surface of the resin film 28, and can maintain the opposing distance between the workpiece W and the first electrode 23 or the opposing distance between the workpiece W and the second electrode pair 24, 25. The function.
4個第1電極23係用以檢測工件W自初期位置起之旋轉角度的電極,且配設於吸附電極22的周圍。 The four first electrodes 23 are electrodes for detecting the rotation angle of the workpiece W from the initial position, and are disposed around the adsorption electrode 22.
具體而言,4個第1電極23係分別配置於保護電極21的四個角落之正上方。各第1電極23係設定為圓形,端子23a係自各第1電極23朝向外側而延伸。 Specifically, the four first electrodes 23 are disposed directly above the four corners of the guard electrode 21 . Each of the first electrodes 23 is set in a circular shape, and the terminals 23a extend outward from the respective first electrodes 23.
此外,本實施例中,當工件W位於初期位置時,則以能使各第1電極23的中心一致於工件W的各頂點P之方式,設定配置4個第1電極23。 Further, in the present embodiment, when the workpiece W is located at the initial position, the four first electrodes 23 are arranged such that the centers of the respective first electrodes 23 are aligned with the apexes P of the workpiece W.
第2電極對24係用以檢測工件W自初期位置起朝x軸方向之偏移量的電極,由橫列狀態的長方形之電極24a、24b所構成。 The second electrode pair 24 is an electrode for detecting the amount of shift of the workpiece W from the initial position in the x-axis direction, and is composed of rectangular electrodes 24a and 24b in the horizontal state.
具體而言,電極24a、24b係配設於x軸上,且各電極 24a、24b係分別位於x軸的兩側。此外,當工件W位於初期位置時,則工件W的一邊(右邊)係以能於電極24a、24b的中央部重疊之方式而配置電極24a、24b。 Specifically, the electrodes 24a, 24b are disposed on the x-axis, and the electrodes are 24a, 24b are located on both sides of the x-axis. Further, when the workpiece W is located at the initial position, the electrodes 24a and 24b are disposed on one side (right side) of the workpiece W such that the central portions of the electrodes 24a and 24b overlap each other.
另一方面,第2電極對25係用以檢測工件W自初期位置起朝y軸方向之偏移量的電極,由橫列狀態的長方形之電極25a、25b所構成。 On the other hand, the second electrode pair 25 is an electrode for detecting the amount of deviation of the workpiece W from the initial position in the y-axis direction, and is constituted by rectangular electrodes 25a and 25b in the horizontal state.
具體而言,電極25a、25b係配設於初期位置內和x軸正交之y軸上,各電極25a、25b係分別位於y軸的兩側。此外,當工件W位於初期位置時,則工件W的一邊(下邊)係以能於電極25a、25b的中央部重疊之方式而配置電極25a、25b。 Specifically, the electrodes 25a and 25b are disposed on the y-axis orthogonal to the x-axis in the initial position, and the electrodes 25a and 25b are located on both sides of the y-axis. Further, when the workpiece W is located at the initial position, the one side (lower side) of the workpiece W is such that the electrodes 25a and 25b are disposed so that the central portions of the electrodes 25a and 25b overlap each other.
旋轉角度演算部3係根據4個第1電極23和工件W的重疊部分所產生的靜電容量之和,演算工件W自初期位置起之旋轉角度θ的部分。 The rotation angle calculation unit 3 calculates a portion of the rotation angle θ of the workpiece W from the initial position based on the sum of the electrostatic capacitances generated by the overlapping portions of the four first electrodes 23 and the workpiece W.
具體而言,如第1圖所示,各第1電極23的端子23a、連接於保護電極21的端子21a之配線31、32係被拉進於旋轉角度演算部3,且在旋轉角度演算部3內檢測端子23a、21a間之電壓。 Specifically, as shown in Fig. 1, the terminals 23a of the first electrodes 23 and the wirings 31 and 32 connected to the terminals 21a of the guard electrode 21 are pulled into the rotation angle calculating unit 3, and the rotation angle calculating unit 3 detects the voltage between the terminals 23a, 21a.
各端子23a、21a間之電壓係對應於工件W和各第1電極23的重疊部分所產生的靜電容量。因此,當工件W自初期位置(參考第2圖)旋轉時,則工件W和各第1電極23的重疊部分產生變化,且該部分之靜電容量係對應於工件W的旋轉角度而改變。 The voltage between the terminals 23a and 21a corresponds to the electrostatic capacitance generated by the overlap between the workpiece W and each of the first electrodes 23. Therefore, when the workpiece W is rotated from the initial position (refer to FIG. 2), the overlapping portion of the workpiece W and each of the first electrodes 23 changes, and the electrostatic capacitance of the portion changes in accordance with the rotation angle of the workpiece W.
本實施例係預先求得工件W自初期位置而僅旋轉該 旋轉角度θ時之4個之第1電極23和工件W的重疊部分所產生的靜電容量之和(亦即4組端子23a、21a間之電壓之和V)和旋轉角度θ之關係式(1)。 In this embodiment, the workpiece W is preliminarily determined to rotate from the initial position. The relationship between the sum of the electrostatic capacitances generated by the overlapping portions of the first electrode 23 and the workpiece W at the rotation angle θ (that is, the sum V of the voltages between the four sets of terminals 23a and 21a) and the rotation angle θ (1) ).
θ=f(V)…(1) θ=f(V)...(1)
旋轉角度演算部3係根據上述式(1)而演算自端子23a、21a輸入之電壓和V至現時點的旋轉角度θ,具有分別將求得之旋轉角度θ自輸出端3a輸出至特定的裝置,自輸出端3b輸出至偏移量演算部4的功能。 The rotation angle calculation unit 3 calculates the rotation voltage θ input from the terminals 23a and 21a and the rotation angle θ from the current point to the current point based on the above formula (1), and outputs the obtained rotation angle θ from the output end 3a to the specific device. The function output from the output terminal 3b to the offset calculation unit 4.
第5圖係表示圓形的第1電極23和工件W的重疊部分之狀態的概略平面圖,第6圖係表示圓形的第1電極23和工件W的重疊部分的面積和工件W的旋轉角度之關係的線圖。 Fig. 5 is a schematic plan view showing a state in which a circular first electrode 23 and a workpiece W overlap, and Fig. 6 is a view showing an area of a circular overlapping portion of the first electrode 23 and the workpiece W and a rotation angle of the workpiece W. A line drawing of the relationship.
發明者們係如上述,在本實施例中使用圓形的第1電極23。此係根據第5圖和第6圖所示之模擬的結果。 As described above, the inventors used the circular first electrode 23 in the present embodiment. This is based on the results of the simulations shown in Figures 5 and 6.
亦即,如第5圖所示,首先,將直徑20mm之圓形的第1電極23配置成正方形,且如圖之實線所示,將150mm見方之正方形的工件W配置於第1電極23上。此外,模擬如圖之二點虛線所示,將工件W自當初的位置僅旋轉角度θ時,旋轉角度θ和4個第1電極23和工件W的重疊部分的面積S(=S1+S2+S3+S4)的關係。如此,即取得第6圖所示的結果。 In other words, as shown in Fig. 5, first, a circular first electrode 23 having a diameter of 20 mm is arranged in a square shape, and as shown by a solid line, a workpiece W having a square shape of 150 mm square is disposed on the first electrode 23. on. Further, the simulation shows the rotation angle θ and the area S of the overlapping portion of the four first electrodes 23 and the workpiece W when the workpiece W is rotated by the angle θ from the original position as shown by the dotted line of the two dots (=S1+S2+). The relationship of S3+S4). In this way, the result shown in Fig. 6 is obtained.
第6圖之實線所示的曲線M1係表示工件W的各頂點自位於各第1電極23的中心之初期狀態而旋轉時,面積S和旋轉角度θ的關係。此外,虛線所示的曲線M2係表示 工件W的各頂點自處於各第1電極23的中心偏移了第5圖的上方2mm的位置之狀態而旋轉時,面積S和旋轉角度θ的關係。此外,二點虛線所示的曲線M3係表示工件W的各頂點自處於各第1電極23的中心在第5圖的上方2mm僅偏移右方5mm的位置之狀態而旋轉時,面積S和旋轉角度θ的關係。 The curve M1 shown by the solid line in Fig. 6 indicates the relationship between the area S and the rotation angle θ when the respective vertices of the workpiece W are rotated from the initial state of the center of each of the first electrodes 23. In addition, the curve M2 shown by the broken line indicates The relationship between the area S and the rotation angle θ when the respective vertices of the workpiece W are rotated in a state where the center of each of the first electrodes 23 is shifted by 2 mm above the fifth figure. In addition, the curve M3 indicated by the two-dotted line indicates that the respective vertices of the workpiece W are rotated in a state where the center of each of the first electrodes 23 is rotated by 2 mm from the upper side of the fifth figure by 2 mm. The relationship of the rotation angle θ.
如第6圖所示,此等之曲線M1、M2、M3之各面積S,在旋轉角度θ為±5°之廣大範圍內為一致,超過該範圍時,則曲線M1的面積S、曲線M2的面積S、以及曲線M3的面積S係根據旋轉角度θ而不同。 As shown in Fig. 6, the areas S of the curves M1, M2, and M3 are uniform over a wide range of the rotation angle θ of ±5°. When the range is exceeded, the area S of the curve M1 and the curve M2 are obtained. The area S and the area S of the curve M3 differ depending on the rotation angle θ.
第7圖係表示正方形的第1電極23和工件W的重疊部分之狀態的概略平面圖,第8圖係表示正方形的第1電極23和工件W的重疊部分的面積和工件W的旋轉角度之關係的線圖,第9圖係表示菱形的第1電極23和工件W的重疊部分之狀態的概略平面圖,第10圖係表示菱形的第1電極23和工件W的重疊部分的面積和工件W的旋轉角度之關係的線圖。 Fig. 7 is a schematic plan view showing the state of the overlapping portion of the square first electrode 23 and the workpiece W, and Fig. 8 is a view showing the relationship between the area of the overlapping portion of the square first electrode 23 and the workpiece W and the rotation angle of the workpiece W. FIG. 9 is a schematic plan view showing a state in which a diamond-shaped overlapping portion of the first electrode 23 and the workpiece W is overlapped, and FIG. 10 is a view showing an area of a overlapping portion of the rhombic first electrode 23 and the workpiece W and the workpiece W. A line graph of the relationship of the angle of rotation.
此外,發明者們亦對於20mm見方之正方形或菱形的第1電極23進行和上述相同之模擬。 Further, the inventors also performed the same simulation as described above for the 20 mm square or the diamond-shaped first electrode 23.
如此,如第7圖或第9圖所示,使用正方形或菱形的第1電極23時,則如第8圖或第10圖所示,曲線M1、M2、M3所示之各面積S,僅在旋轉角度θ±2°之狹窄範圍內一致,超過該範圍時,則曲線M1的面積S、曲線M2的面積S、以及曲線M3的面積S係根據旋轉角度θ而不同。 As described above, when the square or rhombic first electrode 23 is used as shown in Fig. 7 or Fig. 9, as shown in Fig. 8 or Fig. 10, the respective areas S shown by the curves M1, M2, and M3 are only In the narrow range of the rotation angle θ±2°, when the range is exceeded, the area S of the curve M1, the area S of the curve M2, and the area S of the curve M3 differ depending on the rotation angle θ.
根據以上之模擬結果可瞭解,使用圓形的第1電極23時,則如第5圖和第6圖所示,在初期位置中,即使工件W的各頂點和第1電極23的中心點多少有偏移之情形時,在旋轉角度θ為±5°之廣大範圍內,重疊面積S和旋轉角度θ之間亦能取得正確的關係式。亦即,藉由使用圓形的第1電極23,在廣大的旋轉角度範圍內,使用上述(1)式,即能根據檢測電壓V而正確演算旋轉角度θ。 As can be understood from the above simulation results, when the circular first electrode 23 is used, as shown in FIGS. 5 and 6, in the initial position, even if the apex of the workpiece W and the center point of the first electrode 23 are In the case of an offset, a correct relationship can be obtained between the overlap area S and the rotation angle θ in a wide range of the rotation angle θ of ±5°. In other words, by using the circular first electrode 23, the above-described formula (1) can be used to accurately calculate the rotation angle θ based on the detection voltage V over a wide range of rotation angles.
相對於此,使用正方形或菱形的第1電極23時,則如第7圖至第10圖所示,在初期位置中,工件W的各頂點和第1電極23的中心點多少有偏移之情形時,則僅能在旋轉角度θ為±2°之狹窄範圍內,於重疊面積S和旋轉角度θ之間取得正確的關係式。 On the other hand, when the square or rhombic first electrode 23 is used, as shown in FIGS. 7 to 10, in the initial position, the apexes of the workpiece W and the center point of the first electrode 23 are somewhat offset. In this case, the correct relational expression can be obtained only between the overlap area S and the rotation angle θ within a narrow range in which the rotation angle θ is ±2°.
根據如此觀點,本實施例為使用圓形的第1電極23,根據電壓V而正確求得偏移狀態之工件W的旋轉角度θ。此外,有關於偏移量即可根據後述之第2電極對24、25、以及偏移量演算部4而求得。 From this point of view, in the present embodiment, the circular first electrode 23 is used, and the rotation angle θ of the workpiece W in the offset state is accurately determined based on the voltage V. Further, the offset amount can be obtained from the second electrode pairs 24 and 25 and the offset amount calculating unit 4 which will be described later.
此外,本實施例中,靜電容量感測器雖為使用圓形的第1電極23,但,使用正方形或菱形的第1電極23之靜電容量感測器,並非自本發明範圍除外者,當然亦可使用。 Further, in the present embodiment, the capacitance sensor is a circular first electrode 23, but a capacitance sensor using a square or rhombic first electrode 23 is not excluded from the scope of the present invention. Can also be used.
在第1圖當中,偏移量演算部4係根據第2電極對24和工件W的重疊部分所產生之靜電容量的變化、以及由上述旋轉角度演算部3所輸入之旋轉角度θ,求得工件自初期位置起朝x軸方向之偏移量δ x,並且根據第2電極對25和工件W的重疊部分所產生之靜電容量的 變化,演算工件自初期位置起朝y軸方向之偏移量δ y的部分。 In the first diagram, the offset calculation unit 4 obtains the change in the electrostatic capacitance generated by the overlapping portion of the second electrode pair 24 and the workpiece W, and the rotation angle θ input by the rotation angle calculation unit 3. The offset δ x of the workpiece from the initial position toward the x-axis direction, and the electrostatic capacitance generated according to the overlapping portion of the second electrode pair 25 and the workpiece W The change is performed to calculate the portion of the workpiece that is shifted by the amount δ y from the initial position toward the y-axis.
第2電極對24中,如第2圖所示,連接於第2電極24a、24b的端子24c、24d之配線41、42係拉進於偏移量演算部4,且在偏移量演算部4內檢測端子24c、24d間之電壓。端子24c、24d間之電壓係對應於工件W和第2電極24a、24b的重疊部分所產生的靜電容量。 In the second electrode pair 24, as shown in FIG. 2, the wirings 41 and 42 connected to the terminals 24c and 24d of the second electrodes 24a and 24b are pulled into the offset calculation unit 4, and the offset calculation unit is used. 4 detects the voltage between the terminals 24c, 24d. The voltage between the terminals 24c and 24d corresponds to the electrostatic capacitance generated by the overlapping portion of the workpiece W and the second electrodes 24a and 24b.
亦即,當工件W自初期位置往x軸方向偏移且旋轉時,則工件W和第2電極24a、24b的重疊部分產生變化,且該部分之靜電容量亦對應於工件W的偏移或旋轉角度而變化。因此,偏移量演算部4即能根據上述旋轉角度演算部3所求得之旋轉角度θ、或工件W和第2電極24a、24b的重疊部分的靜電容量(亦即第2電極24a、24b間之電壓)而求得偏移量δ x。詳細說明如下。 That is, when the workpiece W is displaced from the initial position to the x-axis direction and rotated, the overlapping portion of the workpiece W and the second electrodes 24a, 24b changes, and the electrostatic capacity of the portion also corresponds to the offset of the workpiece W or The angle of rotation changes. Therefore, the offset calculation unit 4 can calculate the rotation angle θ obtained by the rotation angle calculation unit 3 or the capacitance of the overlapping portion between the workpiece W and the second electrodes 24a and 24b (that is, the second electrodes 24a and 24b). The offset δ x is obtained by the voltage between them. The details are as follows.
第11圖係用以說明工件W之朝x軸方向之偏移量δ x的概略平面圖,第12圖係用以說明偏移量δ x的演算方法之部分放大平面圖。 Fig. 11 is a schematic plan view for explaining the shift amount δ x of the workpiece W in the x-axis direction, and Fig. 12 is a partially enlarged plan view for explaining the calculation method of the offset amount δ x .
如第11圖所示,假定工件W係自虛線所示之初期位置僅偏移偏移量δ x至二點虛線所示之位置之後,將自初期位置的中心O僅偏移偏移量δ x後的中心O’作為中心僅旋轉角度θ,且達到實線所示之位置之情形。 As shown in Fig. 11, it is assumed that the workpiece W is offset from the center O of the initial position by only the offset δ from the initial position indicated by the broken line only after shifting the offset δ x to the position indicated by the two-dotted line. The center O' after x is rotated as the center only by the angle θ and reaches the position indicated by the solid line.
此處為了易於理解,則如第12圖所示,僅以寬幅為L的第2電極24a為重點而予以說明。 Here, for the sake of easy understanding, as shown in FIG. 12, only the second electrode 24a having a wide width L will be mainly described.
如第12圖(a)所示,工件W係位於初期位置,當時之 檢測電壓為V0時,則工件W和第2電極24a的重疊部分的靜電容量亦即面積即能以「V0/β」表示。其中,β為係數(V/m2)。 As shown in Fig. 12(a), the workpiece W is located at the initial position. When the detection voltage is V0, the capacitance of the overlap between the workpiece W and the second electrode 24a, that is, the area, can be "V0/β". Said. Where β is a coefficient (V/m 2 ).
此後,如第12圖(b)所示,工件W係僅朝x軸方向偏移偏移量δ x,且當時之檢測電壓為V1時,則工件W和第2電極24a的重疊部分的面積即能以「V1/β」予以表示。 Thereafter, as shown in Fig. 12(b), the workpiece W is shifted only by the offset amount δ x in the x-axis direction, and when the detection voltage at that time is V1, the area of the overlapping portion of the workpiece W and the second electrode 24a is That is, it can be expressed as "V1/β".
因此,成立下式(2)。 Therefore, the following formula (2) is established.
V1/β-V0/β=(V1-V0)/β=L‧δ x V1/β-V0/β=(V1-V0)/β=L‧δ x
故,△V/β=L‧δ x…(2) Therefore, ΔV/β=L‧δ x...(2)
其中,△V=V1-V0 Where △V=V1-V0
亦即,工件W為偏移於x軸方向,且不旋轉時,則偏移量演算部4即根據該式(2)而演算工件W的偏移量δ x,並由輸出端4a(參考第2圖)輸出偏移量δ x。 In other words, when the workpiece W is shifted in the x-axis direction and does not rotate, the offset calculating unit 4 calculates the offset amount δ x of the workpiece W based on the equation (2), and is output from the output terminal 4a (refer to Fig. 2) Output offset δ x.
此外,如第12圖(c)所示,工件W為根據第12圖(b)之狀態而僅旋轉微小旋轉角度θ,且當時之檢測電壓為V2時,則工件W的重疊部分的面積為僅減少旋轉的部分。具體而言,由於旋轉角度θ為微小角度,故僅減少第12圖(c)之三角形ABC的「L2‧θ/2」。 Further, as shown in Fig. 12(c), when the workpiece W is rotated by only a small rotation angle θ according to the state of Fig. 12(b), and the detection voltage at that time is V2, the area of the overlapping portion of the workpiece W is Only reduce the part of the rotation. Specifically, since the rotation angle θ is a minute angle, only "L 2 ‧ θ/2" of the triangle ABC of Fig. 12(c) is reduced.
因此,根據上式(2)而成立下式(3)。 Therefore, the following formula (3) is established according to the above formula (2).
V2/β+L2‧θ/2=V1/β=L‧δ x+V0/β V2/β+L 2 ‧θ/2=V1/β=L‧δ x+V0/β
整理之後,(V2-V0)/β+(L2‧θ)/2=L‧δ x After finishing, (V2-V0)/β+(L 2 ‧θ)/2=L‧δ x
故,△V/β+(L2‧θ)/2=L‧δ x…(3) Therefore, ΔV/β+(L 2 ‧θ)/2=L‧δ x...(3)
其中,△V=V2-V0 Where △V=V2-V0
亦即,工件W為偏移於x軸方向,而且旋轉時,則偏 移量演算部4即根據該式(3)而演算工件W的偏移量δ x,並由輸出端4a輸出偏移量δ x。 That is, the workpiece W is offset from the x-axis direction, and when rotated, it is biased. The shift amount calculation unit 4 calculates the offset amount δ x of the workpiece W based on the equation (3), and outputs the offset amount δ x from the output terminal 4a.
又,該式(3)所指之意義如下。 Further, the meaning of the formula (3) is as follows.
將工件W根據第12圖(c)之狀態而僅反旋轉該旋轉角度θ,則工件W即回到第12圖(b)所示之狀態,即可如上式(2)所示,根據初期位置的靜電容量(V0/β)和反旋轉狀態之的靜電容量(V1/β)的差而求得偏移量δ x。 When the workpiece W is only reversely rotated by the rotation angle θ according to the state of Fig. 12(c), the workpiece W returns to the state shown in Fig. 12(b), which is as shown in the above formula (2), according to the initial stage. The offset δ x is obtained by the difference between the electrostatic capacitance (V0/β) at the position and the electrostatic capacitance (V1/β) in the reverse rotation state.
第2電極對25中,如第2圖所示,連接於第2電極25a、25b的端子25c、25d之配線43、44係拉進於旋轉角度演算部3,且在偏移量演算部4內檢測端子25c、25d間之電壓。 In the second electrode pair 25, as shown in FIG. 2, the wirings 43 and 44 connected to the terminals 25c and 25d of the second electrodes 25a and 25b are pulled into the rotation angle calculating unit 3, and the offset calculating unit 4 is used. The voltage between the terminals 25c and 25d is detected.
第2電極對25中,亦和第2電極對24同樣地,偏移量演算部4係根據上述旋轉角度演算部3所求得之旋轉角度θ、或工件W和第2電極25的重疊部分的靜電容量(亦即第2電極25a、25b間之電壓)而求得工件W之朝y軸方向之偏移量δ y。由於此時之偏移量δ y的演算方法,亦和偏移量δ x之情形相同,故省略其重覆記載。 Similarly to the second electrode pair 24, the offset amount calculation unit 4 is based on the rotation angle θ obtained by the rotation angle calculation unit 3 or the overlapping portion of the workpiece W and the second electrode 25, similarly to the second electrode pair 24. The electrostatic capacitance (that is, the voltage between the second electrodes 25a and 25b) determines the amount of shift δ y of the workpiece W in the y-axis direction. Since the calculation method of the offset amount δ y at this time is also the same as the case of the offset amount δ x , the repeated description is omitted.
繼而說明本實施例之檢測系統的使用例。 Next, an example of use of the detection system of the present embodiment will be described.
第13圖係表示使用第1實施例的檢測系統1-1之機器人系統的概略圖。 Fig. 13 is a schematic view showing a robot system using the detecting system 1-1 of the first embodiment.
如第13圖所示,機器人系統係具備機器人手臂100、以及控制器110,本實施例的檢測系統1-1係組裝於該機器人系統。 As shown in Fig. 13, the robot system includes a robot arm 100 and a controller 110, and the detection system 1-1 of the present embodiment is incorporated in the robot system.
具體而言,靜電容量感測器2之基材20的 內側係連接於機器人手臂100的前端。吸附電極22、自第1電極23和第2電極對24、25延伸之配線31、32、41至44等係通過機器人手臂100的內部,且分別連接於配設於控制器110側之電源29、旋轉角度演算部3、以及偏移量演算部4。 Specifically, the substrate 20 of the electrostatic capacitance sensor 2 The inner side is connected to the front end of the robot arm 100. The adsorption electrode 22, the wirings 31, 32, 41 to 44 extending from the first electrode 23 and the second electrode pair 24, 25 pass through the inside of the robot arm 100, and are respectively connected to the power supply 29 disposed on the controller 110 side. The rotation angle calculation unit 3 and the offset calculation unit 4.
控制器110係用以控制機器人手臂100的動作之機器。該控制器110不僅能控制機器人手臂100整體之旋轉和移動,亦能根據靜電容量感測器2之電源29的導通/關斷狀態、旋轉角度演算部3所求得之旋轉角度θ、以及偏移量演算部4所求得之偏移量δ x、δ y,使機器人手臂100的前端之靜電容量感測器2旋轉移動。 The controller 110 is a machine for controlling the motion of the robot arm 100. The controller 110 can control not only the rotation and movement of the robot arm 100 as a whole, but also the rotation/rotation state of the power source 29 of the electrostatic capacitance sensor 2, the rotation angle θ obtained by the rotation angle calculating unit 3, and the bias. The offset amounts δ x and δ y obtained by the shift amount calculation unit 4 cause the capacitance sensor 2 at the tip end of the robot arm 100 to rotate.
第14圖係表示機器人系統整體的概略圖,第15圖係表示將工件W舉起之狀態的概略圖,第16圖係表示將工件W吸附之狀態的截面圖。 Fig. 14 is a schematic view showing the entire robot system, Fig. 15 is a schematic view showing a state in which the workpiece W is lifted, and Fig. 16 is a cross-sectional view showing a state in which the workpiece W is adsorbed.
藉由使用該機器人系統,即能例如第14圖所示,以所希望角度將載置於如工件匣盒等的台座120之上的工件W配置於如對準儀等的機器130上之所希望位置。 By using the robot system, for example, as shown in Fig. 14, the workpiece W placed on the pedestal 120 such as a workpiece cassette or the like can be placed on the machine 130 such as an aligner or the like at a desired angle. Hope location.
亦即,在藉由控制器110將靜電容量感測器2之吸附電極22之電源29(參考第13圖)作成導通之狀態下,使機器人手臂100下降,且將靜電容量感測器2之樹脂薄膜28表面(參考第13圖)接觸工件W。如此,由於工件W係藉由吸附電極22而被吸附於樹脂薄膜28表面,故如第15圖所示,藉由使機器人手臂100上升,即可將工件W和靜電容量感測器2共同舉起。 That is, in a state where the power source 29 (refer to FIG. 13) of the adsorption electrode 22 of the electrostatic capacitance sensor 2 is turned on by the controller 110, the robot arm 100 is lowered, and the electrostatic capacitance sensor 2 is placed. The surface of the resin film 28 (refer to Fig. 13) is in contact with the workpiece W. As described above, since the workpiece W is adsorbed on the surface of the resin film 28 by the adsorption electrode 22, as shown in FIG. 15, the workpiece W and the capacitance sensor 2 can be collectively raised by raising the robot arm 100. Start.
此時,由於工件W係藉由吸附電極22而被吸附,故如第16圖所示,工件W係如虛線所示而不被翻轉,且工件W整體係如實線所示而被吸附於樹脂薄膜28表面。其結果,工件W和第1電極23的對向距離或工件W和第2電極對24(25)的對向距離係保持於固定距離d。 At this time, since the workpiece W is adsorbed by the adsorption electrode 22, as shown in Fig. 16, the workpiece W is not inverted as shown by a broken line, and the entire workpiece W is adsorbed to the resin as indicated by a solid line. The surface of the film 28 is. As a result, the opposing distance between the workpiece W and the first electrode 23 or the opposing distance between the workpiece W and the second electrode pair 24 (25) is maintained at a fixed distance d.
此外,吸附於靜電容量感測器2的工件W係如第5圖所示,較初期位置僅旋轉該旋轉角度θ,且如第11圖所示,於x軸方向、y軸方向僅偏移偏移量δ x、δ y時,首先,藉由旋轉角度演算部3並根據上述式(1)而演算所旋轉角度θ,該旋轉角度θ係分別自輸出端3a、3b而輸出至偏移量演算部4、控制器110。此外,在偏移量演算部4中,偏移量δ x、δ y係根據來自旋轉角度演算部3的旋轉角度θ、以及上述式(3)而演算,且自輸出端4a輸出至控制器110。 Further, as shown in FIG. 5, the workpiece W adsorbed to the electrostatic capacitance sensor 2 rotates only the rotation angle θ from the initial position, and as shown in FIG. 11, is shifted only in the x-axis direction and the y-axis direction. When the offsets δ x and δ y are first, the rotation angle θ is calculated by the rotation angle calculating unit 3 based on the above formula (1), and the rotation angle θ is output to the offset from the output ends 3a and 3b, respectively. The quantity calculation unit 4 and the controller 110. Further, in the offset calculation unit 4, the offset amounts δ x and δ y are calculated based on the rotation angle θ from the rotation angle calculation unit 3 and the above equation (3), and are output from the output terminal 4a to the controller. 110.
第17圖係表示將工件W的偏移予以修正之狀態的概略圖,第18圖係表示將工件W配置於所希望位置之狀態的概略圖。 Fig. 17 is a schematic view showing a state in which the offset of the workpiece W is corrected, and Fig. 18 is a schematic view showing a state in which the workpiece W is placed at a desired position.
如上述,當工件W的旋轉角度θ或偏移量δ x、δ y自旋轉角度演算部3、偏移量演算部4而輸出於控制器110時,則如第17圖所示,控制器110係將機器人手臂100整體旋轉至機器130側。此外,控制器110係通過機器人手臂100而將靜電容量感測器2整體予以旋轉和移動,而將工件W僅反旋轉旋轉角度θ,並且僅反移動偏移量δ x、δ y於x軸方向、y軸方向,並將工件W修正為初期位置 的狀態。 As described above, when the rotation angle θ or the deviation amounts δ x and δ y of the workpiece W are output from the rotation angle calculating unit 3 and the offset amount calculating unit 4 to the controller 110, as shown in Fig. 17, the controller The 110 series rotates the robot arm 100 as a whole to the machine 130 side. Further, the controller 110 rotates and moves the electrostatic capacitance sensor 2 as a whole by the robot arm 100, and rotates the workpiece W only by the rotation angle θ, and only moves the offset amounts δ x and δ y on the x-axis. Direction, y-axis direction, and correct workpiece W to initial position status.
如此之狀態下,則如第18圖所示,控制器110係將機器人手臂100下降至機器130,而將工件W載置於機器130上,並且將靜電容量感測器2的電源29作成關斷之狀態,且將機器人手臂100上升。如此,工件W即藉由吸附電極22的吸附力而被解放,並以所希望角度配置於機器130上的所希望位置,而結束工件W的搬運作業。 In this state, as shown in Fig. 18, the controller 110 lowers the robot arm 100 to the machine 130, and the workpiece W is placed on the machine 130, and the power source 29 of the electrostatic capacity sensor 2 is turned off. The state is broken and the robot arm 100 is raised. In this manner, the workpiece W is released by the adsorption force of the adsorption electrode 22, and is disposed at a desired position on the machine 130 at a desired angle, thereby ending the conveyance of the workpiece W.
如上述之詳細說明,根據本實施例之檢測系統1-1所使用之靜電容量感測器2,則如第3圖和第4圖所示,由於其係將樹脂薄膜26~28積層於基材20上,並且將保護電極21、吸附電極22、第1電極23、以及第2電極對24、25形成於各樹脂薄膜26、27上之簡單的構造,故能達成靜電容量感測器2的小型化和薄型化,其結果,即能抑制而降低該靜電容量感測器2、檢測系統1-1、以及機器人系統的製造工程數或製造成本。特別是使用預對準儀和主對準儀,且於進行工件的高精度的定位所必需之半導體製造系統使用上述機器人系統,則不需要預對準儀等之機器,因此能達成該系統的降低成本。 As described in detail above, the electrostatic capacitance sensor 2 used in the detecting system 1-1 according to the present embodiment is as shown in FIGS. 3 and 4, because the resin film 26 to 28 is laminated on the base. In the material 20, the protective electrode 21, the adsorption electrode 22, the first electrode 23, and the second electrode pair 24, 25 are formed on the respective resin films 26 and 27, so that the capacitance sensor 2 can be realized. As a result of miniaturization and thinning, it is possible to suppress the number of manufacturing processes or manufacturing costs of the electrostatic capacitance sensor 2, the detection system 1-1, and the robot system. In particular, when a semiconductor manufacturing system necessary for performing high-precision positioning of a workpiece using a pre-alignment meter and a master aligner uses the above-described robot system, a machine such as a pre-aligner is not required, and thus the system can be achieved. cut costs.
(實施例2) (Example 2)
繼而說明有關於本發明之第2實施例。 Next, a second embodiment of the present invention will be described.
第19圖係本發明之第2實施例的檢測系統的平面圖。 Figure 19 is a plan view showing a detecting system of a second embodiment of the present invention.
如第19圖所示,本實施例的檢測系統1-2係旋轉角度檢測專用的系統。 As shown in Fig. 19, the detection system 1-2 of the present embodiment is a system dedicated to the detection of the rotation angle.
具體而言,該檢測系統1-2具備靜電容量感測器2、 以及旋轉角度演算部3,而該靜電容量感測器2沒有第2電極對24、25。 Specifically, the detection system 1-2 is provided with an electrostatic capacitance sensor 2 And the rotation angle calculation unit 3, and the capacitance sensor 2 does not have the second electrode pair 24, 25.
根據如此之構成,當由靜電容量感測器2所吸附的工件W(圖示省略),自初期位置僅旋轉旋轉角度θ時,則旋轉角度演算部3係根據上述式(1)而演算旋轉角度θ,且自輸出端3a輸出該旋轉角度θ。 According to this configuration, when the workpiece W (not shown) sucked by the capacitance sensor 2 rotates only the rotation angle θ from the initial position, the rotation angle calculating unit 3 calculates the rotation based on the above formula (1). The angle θ is outputted from the output end 3a.
由於其他的構成、作用、以及功效和上述第1實施例相同,故省略此等之記載。 Since the other configurations, operations, and effects are the same as those of the first embodiment described above, the description thereof will be omitted.
(實施例3) (Example 3)
繼而說明有關於本發明之第3實施例。 Next, a third embodiment of the present invention will be described.
第20圖係本發明之第3實施例的檢測系統的平面圖。 Figure 20 is a plan view showing a detecting system of a third embodiment of the present invention.
如第20圖所示,本實施例的檢測系統1-3係偏移量檢測專用的系統。 As shown in Fig. 20, the detection system 1-3 of the present embodiment is a system dedicated to offset detection.
具體而言,該檢測系統1-3具備靜電容量感測器2、以及偏移量演算部4,而該靜電容量感測器2沒有第1電極23。 Specifically, the detection system 1-3 includes the capacitance sensor 2 and the offset calculation unit 4, and the capacitance sensor 2 does not have the first electrode 23.
根據如此之構成,當由靜電容量感測器2所吸附的工件W(圖示省略),自初期位置僅偏移偏移量δ x、δ y於x軸方向、y軸方向時,則偏移量演算部4係根據上述式(2)而演算偏移量δ x、δ y,且自輸出端4a輸出。 According to such a configuration, when the workpiece W (not shown) adsorbed by the electrostatic capacitance sensor 2 is offset from the initial position by only the offset amounts δ x and δ y in the x-axis direction and the y-axis direction, The shift amount calculation unit 4 calculates the offset amounts δ x and δ y based on the above formula (2), and outputs them from the output end 4a.
由於其他的構成、作用、以及功效和上述第1實施例相同,故省略此等之記載。 Since the other configurations, operations, and effects are the same as those of the first embodiment described above, the description thereof will be omitted.
此外,本發明並不限定於上述實施例,在發明之要旨的範圍內可作各種的變形或變更。 The present invention is not limited to the above embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.
例如,上述實施例中,吸附部雖為使用吸附電極22,但,當然亦可使用黏著墊片等以取代吸附電極22。黏著墊片的表面係設定為能自樹脂薄膜28的表面露出之狀態,藉此而使黏著墊片能發揮和吸附電極22相同的功能。 For example, in the above embodiment, the adsorption electrode 22 is used as the adsorption portion, but it is of course possible to use an adhesive gasket or the like instead of the adsorption electrode 22. The surface of the adhesive pad is set to be exposed from the surface of the resin film 28, whereby the adhesive pad can perform the same function as the adsorption electrode 22.
此外,上述實施例中,雖係例示有關於使用4個第1電極23的靜電容量感測器2,但,第1電極23的數量並不限定於4個,亦可任意為複數。此外,雖說明有關於將工件W的形狀設定為正方形之例,但,工件W的形狀可為多角形,亦可為長方形。 In the above-described embodiment, the capacitance sensor 2 using the four first electrodes 23 is exemplified. However, the number of the first electrodes 23 is not limited to four, and may be arbitrarily plural. Further, although an example in which the shape of the workpiece W is set to a square is described, the shape of the workpiece W may be polygonal or rectangular.
再者,第2電極對24、25的形狀亦為任意,不僅長方形,亦可使用正四角形等之第2電極對。 Further, the shape of the second electrode pairs 24 and 25 is also arbitrary, and it is not limited to a rectangular shape, and a second electrode pair such as a regular square may be used.
上述實施例中,如第21圖之實線所示,在初期位置中,係以第1電極23的中心一致於工件W的頂點P之方式配置4個第1電極23。 In the above-described embodiment, as shown by the solid line in FIG. 21, in the initial position, the four first electrodes 23 are arranged such that the center of the first electrode 23 coincides with the vertex P of the workpiece W.
但,第1電極23之配置並不限定於此。如第21圖之一點虛線或二點虛線所示,也可在初期位置中,以第1電極23的中心為自工件W的中心O通過頂點P的直線m上,且工件W的頂點P位於第1電極23的圓形內之方式配置第1電極23。 However, the arrangement of the first electrodes 23 is not limited to this. As shown by a dotted line or a two-dotted line in Fig. 21, in the initial position, the center of the first electrode 23 is a straight line m passing through the vertex P from the center O of the workpiece W, and the vertex P of the workpiece W is located. The first electrode 23 is disposed so as to be inside the circular shape of the first electrode 23.
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