TWI637924B - Scribing method for brittle material substrate and scribing head unit - Google Patents

Abstract

When the scribe tool is used to scribe a brittle material substrate, the durability of the diamond sharp corners of the scribe tool is improved.

A lubricant is applied to the fragile material substrate along a predetermined scribe line. After applying the lubricant, the scribe is performed with a scribe tool having diamond sharp corners along a predetermined scribe line. In this way, the durability of the scoring tool can be greatly improved by the lubricating effect of the lubricant.

Description

Scribing method for brittle material substrate and scribing head unit

The invention relates to a method for scoring a brittle material substrate such as a glass substrate, a silicon wafer, or a fragile material substrate using diamond sharp corners, and a scribe head unit.

In the past, in order to scribe a glass substrate or a silicon wafer, a scoring tool was used, which used a diamond sharp corner made of a scoring wheel or a single crystal diamond. For glass substrates, although the scoring wheel that mainly rotates with respect to the substrate is mainly used, due to the advantages of the strength of the substrate after the scoring, the use of diamond sharp corners in the form of fixed blades has also begun to be reviewed. In Patent Documents 1 and 2, there are proposals for sharp-edged cutters for scoring high-hardness substrates such as sapphire wafers or alumina wafers. In these patent documents, a tool provided with a cutting corner on a ridge line of a pyramid, or a tool having a tapered tip.

[Prior art] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2003-183040

[Patent Document 2] Japanese Patent Laid-Open No. 2005-079529

When a scribe tool using diamond sharp corners is used as a tool for scoring a glass substrate, the life of diamond sharp corners is very short, and the problem of damage is caused at the stage of tens of meters.

The present invention is to solve the above-mentioned problems, and to provide a scoring head unit that can improve the durability of a scoring tool that uses diamond sharp corners when breaking a brittle material substrate, prolongs the life, and reduces the exchange frequency. And the scribing method using the scribing head unit is for the purpose.

In order to solve the above-mentioned problem, the method for scoring a brittle material substrate according to the present invention is to apply a lubricant to the brittle material substrate along a predetermined scribe line, and press a sharp corner of a scribe tool using a diamond onto the scribe Scribing is performed by moving the brittle material substrate and the scoring tool relatively on the line.

Here, the method may include a step of cleaning and scoring a predetermined line before applying the lubricant to the brittle material substrate.

Here, the method may include a step of removing the lubricant film after the scribe of the brittle material substrate.

Here, the method may include the step of cleaning the sharp corners of the scoring tool after the scoring is completed.

Here, the lubricant may be either a paste or a liquid.

Here, the lubricant may be any one of lubricating oil, alcohol, a surfactant, and water.

In order to solve the above problems, the scoring head unit of the present invention performs scoring by pressing a sharp corner of a scoring tool against a brittle material substrate with a predetermined load and relatively moving the scoring tool. Use one or more sharp corners of a diamond; a tool holder installed on the scoring head unit to fix the scoring tool; a lubricant applying means installed on the scoring head unit to apply lubricant to the scoring schedule Online.

Here, the scoring head unit may include a foreign matter removal means for removing foreign matter on the brittle material substrate along a predetermined scribe line.

Here, the foreign matter removing means includes a foreign matter removing holder and is mounted on the scoring head; the foreign matter removing member may be provided on a lower end of the foreign matter removing holder.

Here, the lubricant applying means includes a lubricant supply holder and is attached to the scoring head, and a lubricant applying member may be provided at a lower end of the lubricant supply holder.

Here, the lubricant applying means may be an inkjet device that periodically supplies a lubricant.

Here, the lubricant applying means may be any one having a lubricant groove.

According to the present invention having the characteristics as described above, first, a predetermined line of the scribe of the brittle material substrate is coated with a lubricant, and the scribe is performed with a scribe tool having diamond sharp corners. Therefore, abrasion is unlikely to occur at the sharp corners of the diamond, and the effect of greatly improving durability can be obtained. In addition, when the scribe line is cleaned before the lubricant is applied, the foreign matter attached to the substrate of the brittle material from the beginning or the foreign material generated during the scribe will not be caught in the substrate of the brittle material and the scoring tool. The effect of further reducing sharp corner damage is obtained.

10‧‧‧ Multi-pointed Diamond Tool

11‧‧‧ base

12‧‧‧through hole

13a ~ 13d‧‧‧Edge

14a ~ 14d‧‧‧First inclined surface

15a ~ 15d‧‧‧Second Inclined Surface

20‧‧‧Tool holder

21‧‧‧tool holder

22a‧‧‧Retainer Holder

22b‧‧‧Tool holding department

23a, 23b, 24a, 24b ‧‧‧ through holes

25‧‧‧ thickness adjustment groove

26a, 26b, 26c, 31a, 31b, 31c

27‧‧‧Screw groove

28‧‧‧Tool holding groove

30‧‧‧ Holder Press

33‧‧‧Thickness adjusting pin

34‧‧‧Screw

40A ~ 40J‧‧‧Scribing head unit

41‧‧‧head plate

42‧‧‧Pneumatic cylinder

43‧‧‧Guiding mechanism

44‧‧‧ sliding section

45‧‧‧ plate

50‧‧‧ block

51‧‧‧ Foreign body removal holder

52‧‧‧ Sponge

53‧‧‧Lubricant supply holder

54‧‧‧ Sponge

55‧‧‧Lubricant supply pipe

56‧‧‧Lubricant tank

60‧‧‧ glass substrate

70, 71‧‧‧ support plate

72‧‧‧ Inkjet Unit

73‧‧‧ Spit Out

74‧‧‧ Sponge

80‧‧‧ holder

81‧‧‧ tube body

82‧‧‧ Sponge

P1 ~ P8‧‧‧ sharp angle

SIL1 ~ SIL6

TL1 ~ TL6‧‧‧ Trench line

AL‧‧‧Auxiliary line

CL1 ~ CL6 ‧‧‧ crack line

FIG. 1 is a plan view and a side view of a scoring tool for a tool holder according to an embodiment of the present invention.

FIG. 2 is a perspective view of a tool holder main body according to this embodiment.

3 is a front view and a side view showing an example of a scoring head unit according to the first embodiment of the present invention.

FIG. 4 is a flowchart showing a method for cutting a glass substrate in an embodiment of the present invention.

FIG. 5 is a plan view showing a glass substrate in the embodiment of the present invention.

FIG. 6 is an enlarged view showing a planned scribe line of a glass substrate in the embodiment of the present invention.

FIG. 7 is a cross-sectional view of a groove line and a crack line formed in the scribe method in the embodiment of the present invention.

FIG. 8 is a diagram showing groove lines and auxiliary lines of the glass substrate according to this embodiment.

Fig. 9 is a front view and a side view showing a scoring head unit according to a second embodiment of the present invention.

Fig. 10 is a front view and a side view showing an example of a scoring head unit according to a third embodiment of the present invention.

11 is a front view and a side view showing an example of a scoring head unit according to a fourth embodiment of the present invention.

Fig. 12 is a front view and a side view showing an example of a scoring head unit according to a fifth embodiment of the present invention.

Fig. 13 is a front view showing an example of a scoring head unit according to a sixth embodiment of the present invention.

Fig. 14 is a front view showing an example of a scoring head unit according to a seventh embodiment of the present invention; Illustration.

15 is a front view and a side view showing an example of a scoring head unit according to an eighth embodiment of the present invention.

16 is a front view and a side view showing an example of a scoring head unit according to a ninth embodiment of the present invention.

Fig. 17 is a front view showing an example of a scoring head unit according to a tenth embodiment of the present invention.

Next, an embodiment of the present invention will be described. First, FIG. 1 is a plan view and a side view showing an example of a scoring tool held by a tool holder of a scoring head unit of this embodiment, that is, a multi-pointed diamond tool (hereinafter, simply referred to as a diamond tool) 10 . The diamond tool 10 has a polygonal corner post made of any number of sides and having a certain thickness and rotational symmetry as a base. In this embodiment, the base 11 of a quadrangular pillar of a certain thickness is made of a single crystal diamond, and has a through hole 12 in the center thereof. On the base 11, ridge lines 13 a to 13 d are formed on the outer peripheral surface of the quadrangle in parallel to the axis passing through the through hole 12 (the axis perpendicular to the paper surface in FIG. 1 (a)).

In this embodiment, as shown in FIG. 1, the pedestal 11 is polished by chamfering a ridge line that intersects from the two bottom surfaces of the quadrangular corner portion of the quadrangular pillar to the outer peripheral surface. That is, as shown in FIG. 1 (b), the four corners of the bottom surface on the right side of the base 11 are ground toward the ridgeline of the base 11 to form the first inclined surfaces 14 a to 14 d. At this time, the angle formed by the edge of the edge line sandwiching the bottom surface of the base 11 and the inclined surface is equal. In this way, that is, polishing is performed so that the inclined surface has an isosceles triangle with one end of the ridge line as an apex. The inclined surface as described above can be easily formed by laser processing or machining. In addition, mechanical polishing can be performed after laser processing to make a more precise polishing surface. In this way, taking the intersection of each ridgeline 13a ~ 13d and the first inclined surface 14a ~ 14d as the apex, as shown in Fig. 1 (b), in the side view of the base 11, four sharp corners P1 ~ can be formed on the right side. P4. At this time, the first inclined surfaces 14a to 14d of the base 11 become top surfaces. Here, the top surface refers to a surface that is connected to two outer peripheral surfaces forming a ridgeline and shares one end of the ridgeline.

Then, the other bottom surface of the base 11 is operated in the same manner, and the outer periphery of the base 11 is ground to form second inclined surfaces 15a to 15d. At this time, so that there is a ridge remaining between the first inclined surfaces 14a to 14d and the second inclined surfaces 15a to 15d, the total of the grinding ranges of the first inclined surfaces 14a to 14d and the second inclined surfaces 15a to 15d is not equal. The grinding is performed in a manner exceeding the thickness of the base 11. In this way, the intersections of the ridgelines 13a-13d and the second inclined surfaces 15a-15d are used as sharp corners, as shown in FIG. 1 (b). In the side view of the base 11, four sharp corners P5 can be formed on the left side. ~ P8. By using the two ends of the ridge lines 13a to 13d as the sharp angles P1 to P8 as described above, it is possible to form sharp angles of eight positions on the outer periphery of the quadrangular diamond tool 10.

The tool holder is described next. FIG. 2 is a perspective view showing the assembly of the tool holder. As shown in FIG. 2, the tool holder main body 21 constituting the main part of the tool holder 20 includes a cuboid-shaped holder holding portion 22 a and a tool holding portion having a shape in which the upper half of the cuboid is cut off at the front end. 22b constitution. As shown in FIG. 2, the holder holding portion 22 a is provided with through holes 23 a and 23 b and through holes 24 a and 24 b for fixing the tool holder 20 to the mounting of the scoring head unit. In addition, the tool holding portion 22b has a thickness adjustment groove 25 cut perpendicular to the length direction and cut away at a position close to the holder holding portion 22a. The front end portion includes inclined surfaces 26 a and 26 b cut away from the left and right as shown in FIG. 2, and inclined surfaces 26 c cut away from below. A screw groove 27 is provided in a substantially central portion of the tool holding portion 22b perpendicular to the central axis. On the surface of the tool holding portion 22b, a tool holding groove 28 having a certain depth along the central axis of the length direction of the tool holder body 21 is formed by a screw groove 27. At the front end portion, the tool holding groove 28 is directed outward. Open at an angle of about 90 degrees. In other words, the tool holding groove 28 becomes wider as it moves toward the front end, and the angle at which the extension lines of the inner wall of the groove cross is set to 90 degrees. The thickness adjustment groove 25 and the tool holding groove 28 are set to have the same depth. Here, the area where the tool holding groove 28 is opened at 90 degrees is a holding area for holding the aforementioned quadrangular diamond tool 10 and projecting the front end portion thereof outward.

A holder pressing member 30 is mounted on the upper part of the tool holding portion 22b. The holder pressing member 30 has a substantially rectangular parallelepiped shape, and is attached to a recess of the tool holding portion 22 b to constitute a rectangular parallelepiped tool holder 20. At the left and right ends of the holder pressing member 30, inclined surfaces 31a and 31b corresponding to the inclined surfaces 26a and 26b of the tool holding portion 22b are provided, and inclined surfaces 31c corresponding to the inclined surface 26c are provided on the upper surface. In addition, a through hole 32 is provided in the central portion.

When the diamond tool 10 is held in the tool holder 20, first, as a thickness adjusting member, a thickness adjusting pin 33 having the same diameter as that of the diamond tool 10 is inserted into the thickness adjusting groove 25, and then, the tool holding groove is The groove 28 is fitted into the diamond tool 10, and the holder pressing member 30 is covered with a part of the groove 28 protruding, and the screw 34 is fastened and fixed. As a result, Since the lower surface of the holder pressing member 30 is always in contact with the surface of the tool holding portion 22b in parallel, the diamond tool 10 can be reliably fixed at the front end.

3 is a front view and a side view showing a state where a tool holder 20 having a diamond tool 10 is mounted on a scoring head unit. The scoring head unit 40A is configured such that the head plate body 41 itself, which is plate-shaped, moves up and down by a sliding mechanism (not shown). A pneumatic cylinder 42 for scoring a load is fixed to the head plate 41. At the lower end of the pneumatic cylinder 42, a lever 42a is telescopically protruded. As shown in FIG. 3 (b), a guide mechanism 43 and a sliding portion 44 are provided below the rod 42a of the head plate body 41, and the sliding portion 44 is pressed downward with a predetermined load. The guide mechanism 43 holds the slide portion 44 so that it can move up and down. An L-shaped plate 45 is provided on the sliding portion 44. Although the plate body 45 moves up and down together with the sliding portion 44, the lower limit is restricted by the stopper portion 46. In this plate body 45, the tool holder 20 allows the screws 47a and 47b to pass through the through holes 23b and 24b and is fixed in an oblique direction. Furthermore, the scoring can be performed by moving the scoring head unit 40A in the direction of the arrow A.

A foreign object removing holder 51 is provided on the right end of the head plate body 41 on the block body 50. As shown in FIG. 3 (b), the cuboid-shaped block 50 is such that the foreign body removing holder and a lubricant supply holder to be described later become the same position as the diamond tool when viewed from the side, and the head plate 41 Protrude to the left. Like the tool holder, the foreign matter removing holder 51 is fixed in a rectangular parallelepiped shape and vertically, and a sponge 52 is attached to the tip. The sponge 52 is a foreign matter removing member that moves the scoring head unit 40A in the direction of the arrow A and contacts the substrate immediately before the scoring to remove the foreign matter adhering to the scribe line. Here, the foreign matter removing holder 51 and the soft foreign matter removing member at the front end, that is, the sponge 52, constitute a foreign matter removing means attached to the scoring head unit 40A.

A lubricant supply holder 53 is attached to the block 50 adjacent to the foreign matter removal holder 51. The lubricant supply holder 53 is vertically fixed in a rectangular parallelepiped shape similar to the foreign matter removal holder 51, and a sponge 54 is attached to the tip. From a lubricant supply unit (not shown), lubricant is supplied to the sponge 54 through a lubricant supply pipe 55. The sponge 54 is a lubricant coating member that applies a lubricant on a predetermined scribe line immediately before scoring. Here, the lubricant supply amount or timing is set to receive a command from a supply unit mounted on the scoring device. Here, the lubricant supply holder 53 and the sponge 54 which is a soft coating member at the tip thereof constitute a lubricant application means attached to the scoring head unit 40A.

Next, a method of dividing the brittle material substrate, that is, the glass substrate using the scoring head unit 40A of this embodiment will be described using the flowchart of FIG. 4 and the top view of the glass substrate of FIG. 5. First, in step S1, a glass substrate 60 having a flat surface SF is prepared. When scoring the glass substrate 60, a sharp corner P1 of the diamond tool 10 of the tool holder 20 installed obliquely is fixed so as to contact the glass substrate 60, and the scoring head unit 40A is directed to one side of the glass substrate 60 Press near 60a and move it in the direction of arrow A shown in the figure, and slide it to the position close to the other side 60b of the planned breaking line. After the scoring head unit 40A is moved as described above, the foreign matter on the scribe line is removed by the sponge 52 attached to the foreign matter removal holder 51. That is, as shown in step S2 of FIG. 4, cleaning is performed along a predetermined scribe line. At this time, as shown in the enlarged view of the scribe line SIL1 in FIG. 6 (a), the scribe line SIL1 is included in the center to clean the line of a predetermined width. By cleaning the scribe line as described above, foreign matter will not be caught between the glass substrate 60 and the leading edge of the blade during the scribe, and the damage of the sharp corners of the diamond tool can be reduced.

Next, as shown in FIG. 6 (b), the portion where the scribe line SIL1 is cleaned is coated again with a thin sponge 54 on the lubricant supply holder 53 (step S3). Thereafter, a scribe is performed with a diamond tool with a scribe head held on the tool holder 20, and as shown in FIG. 5, a groove line TL1 is formed along the scribe line SIL1 (step S4). At this time, since the diamond tool 10 does not rotate, it can be carved at the same sharp angle. Actually, it will be a situation where steps S2 to S4 are performed substantially simultaneously by moving the scoring head unit 40A. In this way, with the lubricating effect of the lubricant, the wear of the sharp corners of the diamond tool can be greatly reduced, and the life can be increased. For example, the sharp corners of a diamond tool will wear out when scoring tens of meters when it is not coated with lubricant, but when it is coated with lubricant, it can maintain durability during scoring thousands of meters.

The so-called groove line, as shown in FIG. 7 (a) showing a cross-section of the circular portion of FIG. 5 (a), is formed on the surface SF of the glass substrate 60 only by plastic deformation by scoring. There are no lines in the thickness direction. Therefore, the scribe can be performed for forming a groove line in a wider range of scribe conditions than in the case of forming a normal scribe line that causes cracks, and the like, so as to form a groove line. In addition, in this embodiment, the side 60a becomes the upstream side of the scribe, and the side 60b becomes the downstream side.

Similarly, the scribe lines SIL2 to SIL6 along the surface SF of the glass substrate 60 are moved to move the scribe head unit 40A from left to right. Thereby, the foreign matter on the scribe line is removed by the sponge 52 of the foreign matter removing holder 51, the lubricant is applied by the sponge 54 of the lubricant supply holder 53, and the diamond tool 10 is further used for scoring. In this way, five trench lines TL2 to TL6 are further formed in parallel with the trench line TL1.

Next, as shown in FIG. 8, an auxiliary line AL1 is formed so as to cross each groove line. The auxiliary line AL1 is preferably formed on the downstream side of each groove line, that is, a position close to the side 60b. As shown in FIG. 1, the auxiliary line AL1 can be formed by using a scoring tool having a leading edge of a diamond blade, or by turning the scoring wheel. In this embodiment, the auxiliary line is a crack line in which a crack is formed.

After the auxiliary line AL1 is formed as described above, the glass substrate is broken along the auxiliary line AL1. From this point, as shown in FIG. 7 (b), the formed trench lines TL1 to TL6 intersect with the auxiliary line AL1, and cracks are generated, and the cracks extend to the upstream side of each of the trench lines TL1 to TL6 (step S5). . Therefore, the trench lines TL1 to TL6 are changed below the trench lines CL1 to CL6 accompanied by cracks.

After that, in step S6 of FIG. 4, the glass substrate 60 is cut along the crack lines CL1 to CL6 to cut the glass substrate 60 into a desired shape.

In addition, in the present embodiment, although it is set to form an auxiliary line, and a crack occurs by separation along the auxiliary line, it may be set to a step that does not accompany the separation of the auxiliary line. In this case, after the auxiliary line is formed, a crack is formed along the groove line. In addition, a step of forming a crack by sliding the diamond tool in the opposite direction at the end of the groove line without forming an auxiliary line, or a step of extending the groove line while the diamond tool passes through the end of the substrate, etc. Cracks are created along the groove lines.

Where the sharp corner P1 of the contact substrate is degraded by abrasion, first hold the tool from the scoring tool The tool can be removed, and the sharp angle P5 can be used by rotating it 180 degrees back and forth. Alternatively, first remove the diamond tool 10 from the tool holder 20, rotate it by 90 degrees, and then fix it to the tool holder 20 again, so that other sharp angles, such as the sharp angle P2, contact the glass substrate 60, and similarly scribe the predetermined line. Cleaning, lubricant application and characterization.

Next, another embodiment of the characterizing head unit having a function of removing foreign matter or applying a lubricant will be described. FIG. 9 to FIG. 17 show the characterizing head units of the second to tenth embodiments, and the same portions as those of the foregoing embodiment are denoted by the same symbols. As shown in FIG. 9, in the scoring head unit 40B of the second embodiment, a sponge 54 provided at the front end of the lubricant supply holder 53 is used as a sponge for applying lubricant and removing foreign matter. This eliminates the need for the foreign matter removing holder 51 or the sponge 52 and simplifies the structure. In this case, the block 50 may be made smaller.

FIG. 10 is a front view showing an example of a scoring head unit 40C according to a third embodiment of the present invention. As shown in this figure, a foreign material removing holder 51 is attached to the flat-shaped support plate body 70. The support plate 70 is the same as the block 50 in that the foreign matter removing holder 51 is projected to the left from the head plate 41 so as to be in the same position as the diamond tool when viewed from the side. The sponge 52 fixed to the tip of the foreign matter removing holder 51 is the same as the first embodiment. Adjacent thereto, an inkjet unit 72 is provided on the support plate body 71. The inkjet unit 72 is a person who applies a pulse to the surface of the glass substrate 60 through the discharge port 73 in a pulsed manner. The supply amount or the timing of the supply is a command received from a supply unit mounted on the scoring device. In this embodiment, similarly to the first embodiment described above, after the foreign object removal holder 51 and the sponge 52 at the front end thereof can remove the foreign object on the scribe line, Apply lubricant and score. Here, the inkjet unit 72 constitutes a lubricant application means for applying a lubricant to a glass substrate.

FIG. 11 is a front view and a side view showing an example of a scoring head unit 40D according to a fourth embodiment of the present invention. In this embodiment, a sponge 74 is installed around the lubricant discharge port 73 at the front end of the inkjet unit 72. In this way, even if the lubricant is supplied in a pulsed manner, as shown in FIG. 6 (b), the lubricant can be applied with a certain width along a predetermined scribe line.

FIG. 12 is a front view and a side view showing an example of a scoring head unit 40E according to a fifth embodiment of the present invention. In this embodiment, the sponge 74 is used as a sponge for applying a lubricant and removing foreign matter. This eliminates the need for the foreign matter removing holder 51 or the sponge 52 and simplifies the structure. In this case, the block 50 may be made smaller.

FIG. 13 is a front view showing an example of a scoring head unit 40F according to a sixth embodiment of the present invention. In this drawing head unit, the lubricant supply holder 53 is not connected to the lubricant supply pipe 55 and only the sponge 54 is held. The lubricant supply holder 53 of the scoring head unit 40F is periodically moved so as to be directly above the lubricant groove 56 holding the lubricant, and is lowered. The sponge 54 is dipped in the lubricant, and then the scoring is performed. The head unit 40F rises. Next, the scoring head unit 40F is moved in the direction of arrow A, and the lubricant is applied in the same manner as in the first embodiment.

FIG. 14 is a front view showing an example of a scoring head unit 40G according to a seventh embodiment of the present invention. In this drawing head unit, the lubricant supply holder 53 is not connected to the lubricant. The supply pipe 55 is omitted, and the foreign matter removing holder 51 and the sponge 52 are omitted. In this embodiment, similarly to the sixth embodiment, the lubricant is applied by periodically immersing the sponge 54 in the lubricant tank 56, and the sponge is also used as a sponge for foreign matter removal. Thereby, the sponge 54 can be erased by scoring a predetermined line and the lubricant can be applied.

FIG. 15 is a front view and a side view showing an example of a scoring head unit 40H according to an eighth embodiment of the present invention. In this embodiment, instead of using a sponge or the like to apply lubricant to the scribe line, the lubricant supply tube 55 is fixed by the holder 80 at a position adjacent to the tool holder 20 to make the tube softer.体 81 is in contact with the tool holder 20. In this embodiment, the lubricant is naturally dropped by the weight of the lubricant, and along the tool holder 20, the lubricant is supplied from the front end of the diamond tool 10 to a predetermined scribe line, and the lubricant is applied.

Next, FIG. 16 is a front view and a side view showing an example of a scoring head unit 40I according to a ninth embodiment of the present invention. In this embodiment, also at a position adjacent to the tool holder 20, the lubricant supply tube 55 is fixed by the holder 80, and the sponge 82 is used to contact the tool holder 20 and apply the lubricant through the tool holder 20. By.

FIG. 17 is a front view showing an example of a scoring head unit 40J according to a tenth embodiment of the present invention. As shown in this figure, in the scoring head unit 40J, although the foreign matter removing holder 51 and the sponge 52 are provided through the block 50, the lubricant supply holder 53 and the sponge 54 are omitted. The diamond tool 10 of the tool holder 20 is periodically and directly immersed in the lubricant groove 56 to apply a lubricant to the scribe line. Here, according to the sixth, seventh, and tenth In the scoring head units 40F, 40G, and 40J of the embodiment, the lubricant groove 56 constitutes a part of the lubricant application means.

In addition, in each of the foregoing embodiments, as shown in FIG. 1, a scoring tool made of diamonds having a plurality of sharp corners is used. However, it is used for polishing the outer periphery of a polygon from the thickness direction or the outer peripheral direction to form a plurality. A sharp-edged scoring tool is also available. Alternatively, a quadrangular pyramid-shaped or conical-shaped scoring tool can be used.

Here, although the auxiliary line is formed after the groove line is formed as shown in FIG. 4, the step of removing the lubricant applied to the scribed line after the groove line is formed by erasing or the like may be included.

In addition, after completing a certain distance of scratching, it is also possible to clean the sharp corners of the diamond tool. During cleaning, air can be blown to the pointed part of the leading edge of the blade, or air can be sucked from the pointed part. In addition, the sharp corners may be ultrasonically cleaned, or the lubricant or foreign matter may be removed by cleaning with a sponge or the like. When the lubricant is removed, a pad portion may be provided at the end of the substrate, and cleaning may be performed by passing a scoring tool through the pad portion.

In each of the foregoing embodiments, although a sponge is used as the foreign material removing member or the lubricant coating member, a soft member such as a blanket or the like can be used to achieve the same function as that of the sponge.

In the third, fourth, and fifth embodiments described above, the lubricant is directly applied to the substrate through the discharge port 73 of the inkjet unit before the scoring or is applied to penetrate into the sponge or blanket, but As the lubricant, a relatively low viscosity liquid such as a lubricant such as lubricating oil, alcohol such as ethanol, a surfactant, and water may be used.

In addition, in the aforementioned eighth to tenth embodiments, in addition to the above-mentioned low-viscosity liquid, it is possible to use a liquid having a high viscosity in the form of an emulsion in which a lubricant component or liquid oil component is dispersed in the liquid. In this case, even if it is viscous, it can spread on the substrate due to its own weight, and can be supplied to the scribe line. In addition, in the first, second, and sixth and seventh embodiments, as a lubricant, in addition to the above-mentioned low-viscosity liquid and high-viscosity liquid, a paste can be used, that is, in a liquid Paste, wax, fresh creamy liquid with lubricant liquid dispersion. Although the paste-like lubricant does not flow on the substrate due to its own weight, it can be applied by sponge or felt, etc., and supplied to the scribe line.

In each of the foregoing embodiments, the scribe substrate is moved by moving the engraving head unit, but the engraving head unit is fixed, and foreign matter is removed or lubricant is applied and scribed by moving the substrate.

Furthermore, in the aforementioned first and sixth embodiments, the foreign matter removal holder and the lubricant supply holder are mounted adjacent to the same block, but the foreign matter removal holder and the lubricant supply are provided as in the fourth embodiment. The holders may be separately mounted on the support plate.

[Industrial availability]

When the present invention is used to scribe a brittle material substrate with a scribe tool having diamond sharp corners, the invention can The wear of diamond sharp corners is suppressed to a minimum, and it can be effectively used in the scoring device using diamond sharp corners.

Claims (10)

A method for scoring a fragile material substrate is to apply a lubricant to the fragile material substrate along a predetermined scribe line, and press a sharp corner of a scribe tool using a diamond on the scribe predetermined line to make the fragile material substrate and The scoring tool moves relative to perform scoring, and has a step of cleaning a line including a predetermined width of the scoring predetermined line before applying the lubricant to the brittle material substrate. For example, the method for scoring a brittle material substrate according to item 1 of the scope of patent application includes the step of removing the lubricant film after scoring the aforementioned brittle material substrate. For example, the method for scoring a brittle material substrate according to item 1 or 2 of the patent application scope includes the step of cleaning the sharp corners of the scoring tool after the foregoing scoring is completed. For example, the method for scoring a brittle material substrate according to item 1 or 2 of the patent application scope, wherein the lubricant is any one of a paste and a liquid. For example, the method for scoring a brittle material substrate according to item 1 or 2 of the application, wherein the lubricant is any one of lubricating oil, alcohol, a surfactant, and water. A scoring head unit is used for scoring by pressing the sharp corners of a scoring tool against a brittle material substrate and moving them relative to each other with a predetermined load. Sharp angle; tool holder installed on the scoring head unit to fix the scoring tool; lubricant application means installed on the scoring head unit to apply lubricant on the scoring predetermined line; foreign matter removal means on Before the lubricant applying means, foreign matter is removed from the brittle material substrate along a predetermined scribe line. For example, the scoring head unit in the sixth scope of the patent application, wherein the foreign matter removing means includes a foreign matter removing holder and is mounted on the scoring head in the scoring head unit; the foreign matter removing member is provided on the foreign matter removal holder. Lower end. For example, the scoring head unit of claim 6 or 7, wherein the lubricant applying means includes a lubricant supply holder and is mounted on the scoring head; a lubricant coating member is provided on the lubricant supply holder. Lower end. For example, the scoring head unit of the 6th or 7th in the scope of patent application, wherein the aforementioned lubricant coating means has an inkjet device that periodically supplies the lubricant. For example, the scoring head unit according to the 6th or 7th of the scope of patent application, wherein the aforementioned lubricant coating means is a lubricant tank.