JP2023051329A - Method for scribing fragile material substrate - Google Patents

Abstract

To provide a method for scribing a brittle material substrate capable of attaining prolonging the lifetime of a diamond scribing a brittle material substrate.SOLUTION: A method for scribing a fragile material substrate G along a scheduled scribing line L comprises: placing a sheet S containing a polymeric compound on the fragile material substrate G for 48 to 1000 hours; removing the sheet S; pressing a diamond-made point P of a scribing tool 1 onto the scheduled scribing line L; and moving the fragile material substrate G and the scribing tool 1 relatively to each other to scribe the fragile material substrate G.SELECTED DRAWING: Figure 1

Description

The present invention relates to a technology of a brittle material substrate scribing method for scribing a brittle material substrate such as a glass substrate or a silicon wafer with a point of a scribing tool using diamond.

Generally, a scribing wheel or a scribing tool using single-crystal diamond is used to scribe glass substrates and silicon wafers. A scribing tool using single-crystal diamond has a diamond placed at a point that is a contact point with a substrate, and by moving the scribing tool in a straight line, a scribe line is formed by the point (see, for example, Patent Document 1).

JP 2017-65245 A

In the scribing method using a conventional scribing tool, there is a problem that the diamond used for the point wears out with use and cannot sufficiently exhibit the performance of forming a scribe line. In recent years, as mobile terminals have become lighter and more foldable, cover glass has become ultra-thin, and high-strength diamonds have been developed for use in scribing ultra-thin glass with a thickness of 100 μm or less. . Although high-strength diamond can be cut with precision, it also has the drawback of short life.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for scribing a brittle material substrate that can prolong the life of diamond used for scribing a brittle material substrate. do.

The problems to be solved by the present invention are as described above, and the means for solving the problems will now be described.

That is, a brittle material substrate scribing method according to the present invention is a brittle material substrate scribing method for scribing a brittle material substrate along lines to be scribed, wherein a sheet containing a polymer compound is applied to the brittle material substrate for a predetermined time. The substrate is placed and removed, a point of a scribing tool formed of diamond is pressed onto the scribing line, and scribing is performed by relatively moving the brittle material substrate and the scribing tool.
As described above, in the method for scribing a brittle material substrate according to the present invention, the lubricating component contained in the sheet adheres to the laminated brittle material substrate, so that the contact between the brittle material substrate and the point of the scribing tool is reduced. The lubricity between the points can be improved to reduce the wear of the diamond tips used for the points.

Moreover, in the method for scribing a brittle material substrate according to the present invention, the sheet is preferably a polyethylene sheet.
By having such a structure, the PEG contained in the polyethylene sheet oozes out and provides lubricity to the surface of the brittle material substrate, and wear of the diamond tip used for the point can be reduced.

Further, in the method for scribing a brittle material substrate according to the present invention, the sheet is preferably placed in an environment of 20° C. or higher and 70° C. or lower for 48 to 1000 hours.
With such a configuration, the PEG contained in the polyethylene sheet can easily exude, giving lubricity to the surface of the brittle material substrate and reducing wear of the diamond tip used for the point.

In the method for scribing a brittle material substrate according to the present invention, a plurality of the brittle material substrates laminated to each other and a plurality of sheets interposed between the brittle material substrates are packed. Placement is preferred.
With such a configuration, the PEG contained in the polyethylene sheet easily exudes while a plurality of brittle material substrates are packed and stored, and the surface of the brittle material substrates is lubricated and used as a point. It can reduce the wear of the diamond tip.

In the method for scribing brittle material substrates according to the present invention, it is preferable that the plurality of brittle material substrates are placed in a flat state, and the thickness of the brittle material substrates is 300 μm or less.
With such a configuration, while a plurality of brittle material substrates are packed and stored in a flat state, the PEG contained in the polyethylene sheet tends to exude due to gravity, and the surface of the brittle material substrate becomes lubricious. and reduce the wear of the diamond tip used for the point.

As effects of the present invention, the following effects are obtained.
That is, according to the method for scribing a brittle material substrate according to the present invention, a sheet containing a polymer compound is placed on the brittle material substrate for a predetermined period of time before the scribing step is performed, and the brittle material substrate and the scribing tool are separated from each other by removing the sheet. It is possible to improve the lubricity between the points of and reduce the wear of the diamond tip used for the points. As a result, the service life of the diamond tip can be extended, and the cost of exchanging the tip can be reduced.

It is (A) a front view and (B) a plan view showing a scribing tool according to an embodiment of the present invention. FIG. 4 is a flow diagram showing a scribing process according to one embodiment of the present invention; 1 is a front cross-sectional view showing a laminated brittle material substrate according to one embodiment of the present invention; FIG.

Next, an embodiment of the present invention will be described with reference to FIG.

[Configuration of scribing tool]
First, the configuration of a scribing tool used in a brittle material substrate scribing method embodying the present invention will be described with reference to FIG.
The scribing tool 1 is a device that forms a scribe line by bringing a point P into contact with a scribe line L of a brittle material substrate G. As shown in FIG.
As shown in FIGS. 1A and 1B, the scribing tool 1 includes a tool body 2 movable in the scribing direction, and a prismatic base member 3 attached to the tool body 2 .

The tool body 2 is arranged above the brittle material substrate G and is configured to be movable parallel to the surface of the brittle material substrate G. As shown in FIG. The tool body 2 is horizontally movably supported by a work table 11 on which the brittle material substrate G is placed. Horizontal movement of the tool body 2 with respect to the work table 11 is controlled by a control device (not shown). ing.
The brittle material substrate G is a plate-like member having a property of being easily broken along a scratch (crack), and is made of, for example, a glass substrate. As the glass substrate, for example, alkali-free glass, silicate glass, silica glass, borosilicate glass, or the like can be used. When the brittle material substrate G is a glass substrate, the thickness is preferably 300 μm or less.

The base member 3 is made of single crystal diamond. The material of the base member 3 is not limited to that of the present embodiment. It may be a polycrystalline diamond sintered without containing a binder such as an element, or a sintered diamond obtained by binding diamond particles with a binder such as an iron group element.

The base member 3 may be formed of single-crystal diamond at least in the portion forming the scribe line including the point P, and the other portions may be formed of metal or ceramic. The base member 3 is fixed to the side surface of the tool body 2 with a fixing member such as a screw. The base member 3 is formed of a polygonal column having one or more vertices. A point P is formed at one or a plurality of vertices of the polygonal prism of the base member 3 provided on the ridge line that contacts the brittle material substrate G. As shown in FIG. The point P is formed by an angular portion of the single-crystal diamond, and is configured so that a scribe line can be formed on the surface of the brittle material substrate G.

[Scribing method using a scribing tool]
Next, a scribing method using the scribing tool 1 will be described with reference to FIG.
First, the brittle material substrates G are packed and stored in a stacked state (step S05). Next, in order to scribe the brittle material substrate G, it is taken out from the packed and stored state and placed one by one on the work table 11 (step S10). Next, the point P of the base member 3 is brought into contact with the starting point on the planned scribing line L (step S30). Then, the tool body 2 is moved in parallel with the planned scribing line L (step S40). By moving the tool body 2 in parallel with the scribing line L, scribing is performed by the point P.

[Laminated brittle material substrate]
Next, the packing form when storing and transferring the brittle material substrate G in step S05 will be described.
As shown in FIG. 3, the brittle material substrates G are laid flat so that their wide surfaces are horizontal, and are stacked vertically. A sheet S is interposed between the laminated brittle material substrates G to improve cushioning properties and protect the surface. The sheets S are interposed between the brittle material substrates G one by one.
Both surfaces of the brittle material substrate G are protected by the sheet S. By protecting the surface of the brittle material substrate G by the sheet S, it is possible to prevent adhesion of other contaminants such as particles and fine particles generated from the substrate itself.
The sheet S is composed of an expandable polyethylene sheet. Since the sheet S has air bubbles inside the polyethylene sheet, it is excellent in cushioning properties and prevents breakage due to collision between the brittle material substrates G. As shown in FIG.

The sheet S is also arranged on the periphery of the laminated brittle material substrates G. As shown in FIG. By protecting the peripheral surface of the brittle material substrate G, it is possible to prevent the brittle material substrate G from being damaged by an external force during packing. The peripheral surface of the brittle material substrate G may be protected by stacking the sheets S one size larger than the brittle material substrate G.

The laminated brittle material substrate G is wrapped in a sheet S, packed, and stored. It is desirable that the temperature of the storage location is in an environment of 20°C or higher and 70°C or lower. The polyethylene glycol contained in the foamable polyethylene sheet exudes by being stored in an environment of 20° C. or more and 70° C. or less. As a result, polyethylene glycol adheres to the entire laminated surface of the brittle material substrate G. As shown in FIG. Since the plurality of brittle material substrates G are stacked flat, the pressure due to their own weight is evenly applied to the wide surface. As a result, polyethylene glycol adheres to the entire laminated surface of the brittle material substrate G. As shown in FIG.

Moreover, the thickness of the brittle material substrate G to be packed is preferably 300 μm or less. As the thickness of the brittle material substrate G becomes thinner, higher strength is required for the diamond tip that is the material of the base member 3 used in the scribing process. Although high-strength diamond can be cut with precision, it also has the drawback of short life. Therefore, by exuding a sufficient amount of polyethylene glycol from the sheet S, the wear of the diamond can be prevented, and the service life of the base member 3 can be extended.

The laminated brittle material substrates G are placed in an environment of 20° C. to 70° C. for 48 to 1000 hours in a packed state. By placing the laminated brittle material substrate G for 48-1000 hours, sufficient polyethylene glycol can be exuded to obtain lubricity.

By exuding sufficient polyethylene glycol to the surface of the brittle material substrate G in advance to obtain lubricity in this manner, the brittle material substrate G and the point P of the scribing tool 1 can be separated from each other in the scribing process after step S10. The wear of the diamond tip used at point P can be reduced by improving the lubricity between .

[Example]
Next, a verification experiment for judging the effectiveness of the scribing method for the brittle material substrate G embodying the present invention will be described.

A glass substrate is used as the brittle material substrate G in the verification experiment. In addition, while the brittle material substrate G is laminated, it is packed using a sheet S made of an expandable polyethylene sheet. The packed brittle material substrate G is heated in an oven. As a result, polyethylene glycol exudes from the sheet S and adheres to the surface of the brittle material substrate G. As shown in FIG. The brittle material substrate G after heating is placed on the work table 11 with the sheet S removed in step S10. Next, in step S30, the point P of the base member 3 is brought into contact with a point on the planned scribe line L of the brittle material substrate G to which polyethylene glycol has adhered. Next, in step S40, the tool body 2 is moved parallel to the scribing line L, so that the point P is scribed.

Table 1 shows the measurement results of the life of the base member 3 used in such a scribing method.

In Example 1, the heating temperature in the oven for storing the brittle material substrate G was set to 40° C. and stored for one week. In Example 2, the heating temperature in the oven for storing the brittle material substrate G was set to 60° C. and stored for one week. In Example 3, the brittle material substrate G was stored at room temperature for two months.

When scribing a brittle material substrate G stored at room temperature for two weeks without being packed with a sheet S, the life of the base member 3 was as short as 350 m or less. was set to 40° C. and the brittle material substrate G stored for one week was scribed, the life of the base member 3 was extended to 700 m. Moreover, when scribing the brittle material substrate G stored for one week with the heating temperature in the oven set to 60° C. as in Example 2, the life of the base member 3 was extended to 4400 m. Moreover, when scribing the brittle material substrate G stored at room temperature for two months as in Example 3, the life of the base member 3 was extended to 700 m.

From the above results, the lubricity between the brittle material substrate G and the point P of the scribing tool 1 was improved by exuding sufficient polyethylene glycol to obtain lubricity on the surface of the brittle material substrate G in advance. As a result, wear of the diamond tip used at point P can be reduced.

As described above, the present invention provides a brittle material substrate scribing method for scribing a brittle material substrate G along scribing lines L, wherein a sheet S containing a polymer compound is placed on the brittle material substrate G for a predetermined time. Then, the point P of the scribing tool 1 made of diamond is pressed onto the planned scribing line L, and the brittle material substrate G and the scribing tool 1 are moved relative to each other for scribing.
By configuring in this way, the polyethylene glycol contained in the foamable polyethylene sheet exudes to improve the lubricity between the brittle material substrate G and the point P of the scribing tool 1, which is used at the point P. Wear of the diamond tip can be reduced.

REFERENCE SIGNS LIST 1 scribing tool 2 tool body 3 base member 11 work table G brittle material substrate L planned scribing line P point S sheet

Claims (5)

A brittle material substrate scribing method for scribing a brittle material substrate along a line to be scribed, comprising:
placing a sheet containing a polymer compound on the brittle material substrate for a predetermined period of time and removing it;
pressing a point of a scribing tool formed of diamond onto the line to be scribed;
A scribing method for a brittle material substrate, wherein scribing is performed by relatively moving the brittle material substrate and the scribing tool. the sheet is a polyethylene sheet;
The scribing method according to claim 1, characterized in that: The sheet is placed in an environment of 20° C. or higher and 70° C. or lower for 48 to 1000 hours.
3. The scribing method according to claim 1, wherein: a plurality of the brittle material substrates stacked together;
The scribing method according to any one of claims 1 to 3, wherein the plurality of sheets interposed between the plurality of brittle material substrates are packed and placed. The plurality of brittle material substrates are placed in a flat state,
The brittle material substrate has a thickness of 300 μm or less.
5. The scribing method according to claim 4, characterized in that:

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