TWI619232B - Non-volatile semiconductor memory device - Google Patents
Non-volatile semiconductor memory device Download PDFInfo
- Publication number
- TWI619232B TWI619232B TW103106017A TW103106017A TWI619232B TW I619232 B TWI619232 B TW I619232B TW 103106017 A TW103106017 A TW 103106017A TW 103106017 A TW103106017 A TW 103106017A TW I619232 B TWI619232 B TW I619232B
- Authority
- TW
- Taiwan
- Prior art keywords
- region
- voltage
- memory
- source
- volatile semiconductor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 49
- 230000002093 peripheral effect Effects 0.000 claims abstract description 40
- 238000003860 storage Methods 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 25
- 239000012535 impurity Substances 0.000 claims description 21
- 230000005684 electric field Effects 0.000 claims description 20
- 239000000969 carrier Substances 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 8
- 239000002356 single layer Substances 0.000 claims description 5
- 239000007943 implant Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 15
- 238000002513 implantation Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 238000009413 insulation Methods 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/711—Insulated-gate field-effect transistors [IGFET] having floating bodies
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0466—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/0221—Manufacture or treatment of FETs having insulated gates [IGFET] having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended-drain MOSFETs [EDMOS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/68—Floating-gate IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/69—IGFETs having charge trapping gate insulators, e.g. MNOS transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/69—IGFETs having charge trapping gate insulators, e.g. MNOS transistors
- H10D30/694—IGFETs having charge trapping gate insulators, e.g. MNOS transistors characterised by the shapes, relative sizes or dispositions of the gate electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Read Only Memory (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013057328A JP6069054B2 (ja) | 2013-03-19 | 2013-03-19 | 不揮発性半導体記憶装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201501271A TW201501271A (zh) | 2015-01-01 |
| TWI619232B true TWI619232B (zh) | 2018-03-21 |
Family
ID=51568512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103106017A TWI619232B (zh) | 2013-03-19 | 2014-02-24 | Non-volatile semiconductor memory device |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9437736B2 (enExample) |
| JP (1) | JP6069054B2 (enExample) |
| TW (1) | TWI619232B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9953719B2 (en) * | 2016-05-18 | 2018-04-24 | Silicon Storage Technology, Inc. | Flash memory cell and associated decoders |
| US10885753B2 (en) | 2018-03-21 | 2021-01-05 | Fasteners For Retail, Inc. | Anti-theft device with remote alarm feature |
| US10993550B2 (en) | 2018-03-21 | 2021-05-04 | Fasteners For Retail, Inc. | Anti-theft retail merchandise pusher with remote alarm feature |
| MX2021011479A (es) | 2019-04-05 | 2021-11-12 | Fasteners For Retail Inc | Empujador antirrobo con deteccion de distancia por incrementos. |
| US11154143B2 (en) | 2019-09-30 | 2021-10-26 | Fasteners For Retail, Inc. | Anti-theft hook with integrated loss prevention functionality |
| US12437262B2 (en) | 2021-08-23 | 2025-10-07 | Fasteners For Retail, Inc. | Anti-sweeping hook with integrated inventory monitoring and/or loss prevention functionality |
| US12433428B2 (en) | 2021-08-23 | 2025-10-07 | Fasteners For Retail, Inc. | Anti-sweeping hook with integrated inventory monitoring and/or loss prevention functionality |
| CN118412014B (zh) * | 2024-05-15 | 2025-05-13 | 北京大学 | 存储单元、存储阵列、电子设备及数据处理方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004104009A (ja) * | 2002-09-12 | 2004-04-02 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| US20040232475A1 (en) * | 2003-05-20 | 2004-11-25 | Kotaro Kataoka | Semiconductor memory |
| JP2007288060A (ja) * | 2006-04-19 | 2007-11-01 | Sharp Corp | 半導体記憶装置及びその製造方法、並びに携帯電子機器 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0997849A (ja) * | 1995-10-02 | 1997-04-08 | Toshiba Corp | 半導体装置 |
| US6384457B2 (en) * | 1999-05-03 | 2002-05-07 | Intel Corporation | Asymmetric MOSFET devices |
| JP2001057394A (ja) * | 1999-06-09 | 2001-02-27 | Matsushita Electric Ind Co Ltd | 不揮発性半導体記憶装置及びその製造方法 |
| JP2005252034A (ja) * | 2004-03-04 | 2005-09-15 | Sony Corp | 不揮発性半導体メモリ装置とその電荷注入方法、および、電子装置 |
| JP2007103424A (ja) * | 2005-09-30 | 2007-04-19 | Oki Electric Ind Co Ltd | メモリセル及びそのメモリセルを有する半導体不揮発性メモリの構造。 |
| TWI311796B (en) | 2005-11-17 | 2009-07-01 | Ememory Technology Inc | Semiconductor device and manufacturing method thereof |
| JP5205011B2 (ja) * | 2007-08-24 | 2013-06-05 | ルネサスエレクトロニクス株式会社 | 不揮発性半導体装置およびその製造方法 |
| JP2012059777A (ja) * | 2010-09-06 | 2012-03-22 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
| US20130015516A1 (en) * | 2011-07-11 | 2013-01-17 | Kim Sang Y | Asymmetrical non-volatile memory cell and method for fabricating the same |
| US9231097B2 (en) * | 2012-02-07 | 2016-01-05 | Mediatek Inc. | HVMOS transistor structure having offset distance and method for fabricating the same |
-
2013
- 2013-03-19 JP JP2013057328A patent/JP6069054B2/ja active Active
-
2014
- 2014-02-24 TW TW103106017A patent/TWI619232B/zh active
- 2014-03-17 US US14/215,536 patent/US9437736B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004104009A (ja) * | 2002-09-12 | 2004-04-02 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| US20040232475A1 (en) * | 2003-05-20 | 2004-11-25 | Kotaro Kataoka | Semiconductor memory |
| JP2007288060A (ja) * | 2006-04-19 | 2007-11-01 | Sharp Corp | 半導体記憶装置及びその製造方法、並びに携帯電子機器 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201501271A (zh) | 2015-01-01 |
| US9437736B2 (en) | 2016-09-06 |
| US20140284677A1 (en) | 2014-09-25 |
| JP6069054B2 (ja) | 2017-01-25 |
| JP2014183233A (ja) | 2014-09-29 |
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