TWI603419B - Processor - Google Patents

Description

processor

The present invention relates to a processor and an inspection device.

Since the prior art, an inspection apparatus for inspecting electrical characteristics of electronic components such as IC (Integrated Circuit) components has been known.

In such an inspection apparatus, the electronic component is supplied from the supply tray to the inspection unit, and the electrical characteristics of the electronic component supplied to the inspection unit are inspected, and after the inspection is completed, the electronic component is collected from the inspection unit to the recovery tray. Composition. Further, the electronic components housed in the supply tray are temporarily transferred to the shuttle and transported to the vicinity of the inspection unit by the shuttle. On the shuttle, a tray in which a pocket is formed is disposed, and the electronic component is housed in the recess.

The transfer of the electronic components from the supply tray to the tray is performed by supplying the robot. The supply robot has a plurality of adsorption nozzles, and the electronic components in the pockets of the supply tray are sucked and held by the adsorption nozzles, and after the electronic components are transferred to the pockets of the tray, the electronic components are released, thereby self-supplying the trays. Transfer electronic parts to the tray. As such a supply robot, for example, a supply robot described in Patent Document 1 is known.

However, in general, the supply robot is fixed by the arrangement pitch (positional relationship of each other) of a plurality of suction nozzles, and thus the following problems occur. That is, the arrangement pitch of the plurality of pockets provided on the supply tray is not necessarily equal to the arrangement pitch of the plurality of pockets provided on the tray. If the arrangement pitch of the plurality of recesses provided on the supply tray is different from the arrangement pitch of the plurality of recesses provided on the tray, the joint cannot be uniformly maintained. The electronic components on the adsorption nozzles are released into the recesses provided on the tray, so that it is necessary to sequentially align the positions of the recesses with respect to the recesses and the electronic components in the recesses for each nozzle. freed. In this method, it takes a long time to transfer the electronic parts from the supply tray to the tray, and the problem of smooth inspection cannot be performed.

In order to solve such a problem, there is also known a robot which can change the arrangement pitch of the nozzles as in Patent Document 1. However, in such a configuration, there is a problem in that the part gripping portion is rotated, so that it is necessary to correct the parts. The mechanism of the rotation of the gripping portion generally increases the number of parts, which sometimes leads to an increase in the size of the robot.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-17575

SUMMARY OF THE INVENTION An object of the present invention is to provide a processor and an inspection apparatus which have a small number of components in the processor which can change the arrangement pitch of the component holding portion.

The present invention has been made to solve at least a part of the above problems, and can be realized as the following aspects or application examples.

Such an object is achieved by the present invention described below.

The processor of the present invention is characterized in that, when the three directions orthogonal to each other are the first direction, the second direction, and the third direction, the processor includes: a base; and a first support portion fixed to the base And the first component holding portion is supported by the first support portion so as to be movable in the third direction with respect to the first support portion. And keep the parts; The first moving portion is supported by the first support portion and movable in the second direction with respect to the first support portion, and the second component holding portion is supported by the first moving portion to The first component holding portion is located in the second direction and is movable in the third direction with respect to the first moving portion, and holds the component; the second support portion is supported by the base portion and opposed to The first support portion is located in the first direction and is movable in the first direction with respect to the base portion, and the third component holding portion is supported by the second support portion so as to be movable relative to the second The support portion is disposed to move in the third direction and holds the component; the second moving portion is supported by the second support portion and is movable in the second direction with respect to the second support portion; the fourth component a holding portion that is provided in the second moving portion and that is located in the second direction with respect to the third component holding portion and that is movable in the third direction with respect to the second moving portion, and Keep the part; a moving mechanism that integrally moves the first moving portion and the second moving portion in the second direction, and separates the first component holding portion from the second component holding portion in the second direction The third component holding portion changes in a distance from the fourth component holding portion in the second direction, and the second moving mechanism moves the second support portion in the first direction to cause the first The distance between the support portion and the first direction of the second support portion is changed.

By setting this configuration, it is possible to form a processor having a small number of parts.

In the processor of the present invention, preferably at least a part of the first moving mechanism is supported on the base.

Thereby, the configuration of the device becomes simple.

In the processor of the present invention, preferably, the first moving mechanism includes: a first guiding mechanism for the first moving mechanism and a second guiding wheel for the first moving mechanism, which is equal to the second direction a first ring-shaped driving cable for the first moving mechanism, which is disposed between the first guiding mechanism first guiding wheel and the first moving mechanism second guiding wheel; and a first moving mechanism driving source; Rotating at least one of the first movement mechanism first guide wheel and the first movement mechanism second guide wheel to rotate the first movement mechanism by the first ring drive cable; and at least the first movement mechanism The first guide wheel and the first guide wheel for the first moving mechanism are rotatably supported by the base.

Thereby, the configuration of the first moving mechanism is simplified. Moreover, since the number of components of the first moving mechanism can be reduced, it is possible to achieve miniaturization in accordance therewith.

In the processor of the present invention, preferably, the first moving unit and the second moving unit are directly or indirectly connected to the first moving mechanism first first driving cable, and the first moving mechanism The first moving portion moves in the second direction with respect to the first supporting portion by the rotation of the first ring-shaped driving cable, and the second moving portion moves in the second direction with respect to the second supporting portion.

Thereby, the second component holding portion fixed to the first moving portion and the fourth component holding portion fixed to the second moving portion can be moved in the second direction in a simple and reliable manner.

In the processor of the present invention, preferably, the first moving mechanism further includes: a third guiding wheel for the first moving mechanism and a fourth guiding wheel for the first moving mechanism, wherein the first support is rotatably fixed to the first support a second ring-shaped driving cable for the first moving mechanism, which is disposed between the third guiding wheel for the first moving mechanism and the fourth guiding wheel for the first moving mechanism; The first moving mechanism first connecting wheel and the first moving mechanism third guiding wheel are connected to each other, and the first moving mechanism first guiding wheel is transmitted to the first moving mechanism. a third guide wheel; and a connecting portion that connects the first moving mechanism first ring driving cable to the first moving mechanism second ring driving cable; and the first moving portion and the second moving portion respectively connect In the above connecting portion.

Thereby, the first moving portion and the second moving portion can be moved in the second direction with good balance.

In the processor of the present invention, it is preferable that the first moving mechanism drive source is supported by the base.

Thereby, the configuration of the device becomes simple.

In the processor of the present invention, preferably at least a part of the second moving mechanism is supported on the base.

Thereby, the configuration of the device becomes simple.

In the processor of the present invention, preferably, the second moving mechanism includes: a first guiding wheel for the second moving mechanism and a second guiding wheel for the second moving mechanism, which are equal to each other in the first direction; and the second movement The mechanism uses a ring-shaped driving cable that is disposed between the second guiding mechanism first guiding wheel and the second moving mechanism second guiding wheel; and a second moving mechanism driving source for the second moving mechanism At least one of the first guide wheel and the second guide mechanism second guide wheel rotates to rotate the second moving mechanism by the ring drive cable; At least the second moving mechanism first guide wheel and the second moving mechanism second guide wheel are rotatably supported by the base.

Thereby, the configuration of the second moving mechanism is simplified.

In the processor of the present invention, it is preferable that each of the first support portion and the second support portion has a plate shape that is widened in both the second direction and the third direction.

Thereby, the size of the device can be reduced.

In the processor of the present invention, it is preferable that the first component holding portion, the second component holding portion, the third component holding portion, and the fourth component holding portion each have a suction nozzle for holding an object by suction. .

Thereby, the object to be held can be simply configured.

The processor of the present invention is characterized in that, when the two directions orthogonal to each other are set to the first direction and the second direction, the processor includes: a first component holding portion that holds the component, a second component holding portion that is located in the second direction with respect to the first component holding portion, and holds the component, and a third component holding portion that is opposed to the first component The holding portion is located in the first direction and holds the component; the fourth component holding portion is located in the second direction with respect to the third component holding portion, and holds the component; and the third component holding portion and the The fourth component holding portion is integrally moved in the first direction with respect to the first component holding portion and the second component holding portion, and the second component holding portion and the fourth component holding portion are integrally opposed to the first component The holding portion and the third component holding portion move in the second direction.

By setting this configuration, it is possible to form a processor having a small number of parts.

The inspection apparatus of the present invention includes the processor of the present invention and an inspection unit that performs inspection of the object, and the inspection apparatus is configured to convey the object to the inspection unit by the processor.

Thereby, an inspection device with a small number of parts can be obtained.

In the inspection apparatus of the present invention, when the three directions orthogonal to each other are the first direction, the second direction, and the third direction, the inspection apparatus includes: a base portion; and a first support portion fixed to the base portion And the first component holding portion is supported by the first support portion so as to be movable in the third direction with respect to the first support portion. And holding the component; the first moving portion is supported by the first support portion and movable in the second direction with respect to the first support portion; The second component holding portion is supported by the first moving portion so as to be movable in the third direction with respect to the first component holding portion and in the third direction with respect to the first moving portion. Providing and holding the component; the second support portion is supported on the base portion, is located in the first direction with respect to the first support portion, and is movable in the first direction with respect to the base portion; and the third component is held The second support portion is supported by the second support portion so as to be movable in the third direction with respect to the second support portion, and the second movable portion is supported by the second support portion. And the second component holding portion is movable in the second direction, and the fourth component holding portion is supported by the second moving portion, and is located in the second direction with respect to the third component holding portion, and The second moving unit is movable in the third direction and holds the component, and the first moving mechanism integrally moves the first moving unit and the second moving unit in the second direction. Make the above a distance between the component holding portion and the second component holding portion in the second direction and a distance between the third component holding portion and the second component holding portion in the second direction; and a second moving mechanism; The second support portion is moved in the first direction, and the distance between the first support portion and the second support portion in the first direction is changed; and the inspection portion is held by the first component holding portion. Each of the components of the second component holding portion, the third component holding portion, and the fourth component holding portion is inspected.

Thereby, an inspection device with a small number of parts can be obtained.

1‧‧‧Checking device

2‧‧‧Supply tray

3‧‧‧Recycling tray

4‧‧‧1st shuttle

5‧‧‧2nd shuttle

6‧‧‧Check socket

7‧‧‧Supply robot

7a‧‧‧Support box

7b‧‧‧ moving box

7c‧‧‧Hand unit

8‧‧‧Recycling robot

8a‧‧‧Support box

8b‧‧‧ moving box

8c‧‧‧Hand unit

9‧‧‧Check robot

10‧‧‧Control device

11‧‧‧Base

21‧‧‧ recess

23‧‧‧ Track

31‧‧‧ recess

33‧‧‧ Track

41‧‧‧Base member

42‧‧‧Tray

43‧‧‧Tray

44‧‧‧ Track

51‧‧‧Base member

52‧‧‧Tray

53‧‧‧Tray

54‧‧‧ Track

61‧‧‧Inspection with individual sockets

62‧‧‧Probe

71‧‧‧1st Support Department

72‧‧‧2nd Support Department

73‧‧‧3rd Support Department

74‧‧‧4th Support Department

75‧‧‧ base

76‧‧‧X direction moving mechanism

77‧‧‧Y direction moving mechanism

77a‧‧‧Unit 1

77b‧‧‧Unit 2

92‧‧‧Hand unit

93‧‧‧Hand unit

94‧‧‧Support Department

95‧‧‧1st mobile department

96‧‧‧2nd Moving Department

97‧‧‧Rotating Department

98‧‧‧ Keeping Department

100‧‧‧IC components

101‧‧‧Check Control Department

102‧‧‧Drive Control Department

200‧‧‧Loading state detection device

421‧‧‧ recess

431‧‧‧ recesses

500‧‧‧2nd camera

521‧‧‧ recess

531‧‧‧ recess

600‧‧‧1st camera

611‧‧‧ side

613‧‧‧ bottom

711‧‧‧1st part retention mechanism

712‧‧‧Axis

713‧‧‧Adsorption nozzle

714‧‧‧1st drive mechanism

714a‧‧‧ pulley

714b‧‧‧ pulley

714c‧‧‧Leather

714d‧‧‧Motor

714e‧‧‧Fixed Department

715‧‧‧1st Mobile Department

716‧‧‧2nd part retention mechanism

717‧‧‧Axis

718‧‧‧Adsorption nozzle

719‧‧‧ drive mechanism

719a‧‧‧ pulley

719b‧‧‧ pulley

719c‧‧‧Leather

719d‧‧‧Motor

719e‧‧‧Fixed Department

721‧‧‧3rd part retention mechanism

722‧‧‧Axis

723‧‧‧Adsorption nozzle

724‧‧‧ drive mechanism

724a‧‧‧ pulley

724b‧‧‧ pulley

724c‧‧‧Leather

724d‧‧‧Motor

724e‧‧‧Fixed Department

725‧‧‧2nd Moving Department

726‧‧‧4th part retention mechanism

727‧‧‧Axis

728‧‧‧Adsorption nozzle

729‧‧‧ drive mechanism

729a‧‧‧ pulley

729b‧‧‧ pulley

729c‧‧‧Leather

729d‧‧‧Motor

729e‧‧‧Fixed Department

731‧‧‧5th part retention mechanism

732‧‧‧Axis

733‧‧‧Adsorption nozzle

734‧‧‧ drive mechanism

734a‧‧‧ pulley

734b‧‧‧ pulley

734c‧‧‧Leather

734d‧‧‧Motor

734e‧‧‧Fixed Department

735‧‧‧3rd Ministry of Movement

736‧‧‧6th part retention mechanism

737‧‧‧Axis

738‧‧‧Adsorption nozzle

739‧‧‧Drive mechanism

739a‧‧‧ pulley

739b‧‧‧ pulley

739c‧‧‧Leather

739d‧‧‧Motor

739e‧‧‧Fixed Department

741‧‧‧7th part retention mechanism

742‧‧‧Axis

743‧‧‧Adsorption nozzle

744‧‧‧ drive mechanism

744a‧‧‧ pulley

744b‧‧‧ pulley

744c‧‧‧Leather

744d‧‧‧Motor

744e‧‧‧Fixed Department

745‧‧‧4th Mobile Department

746‧‧‧8th part retention mechanism

747‧‧‧Axis

748‧‧‧Adsorption nozzle

749‧‧‧ drive mechanism

749a‧‧‧ pulley

749b‧‧‧ pulley

749c‧‧‧Leather

749d‧‧‧Motor

749e‧‧‧Fixed Department

751‧‧‧1st base

752‧‧‧2nd base

753‧‧‧ Track

754‧‧‧ introducer

755‧‧‧ introducer

756‧‧‧ introducer

761‧‧Two-stage pulley

761a‧‧ ‧ small diameter pulley

761b‧‧‧ large diameter pulley

762‧‧‧Two-stage pulley

762a‧‧‧Small diameter pulley

762b‧‧‧ large diameter pulley

763‧‧‧Land

763a‧‧‧Area

763b‧‧‧Area

764‧‧‧Land

764a‧‧‧Area

764b‧‧‧Area

765‧‧‧Motor

771‧‧‧ pulley

772‧‧‧ pulley

773‧‧‧Land

773a‧‧‧Area

773b‧‧‧Area

774‧‧‧ pulley

775‧‧‧ pulley

776‧‧‧Land

776a‧‧‧Area

776b‧‧‧Area

777‧‧‧Motor

778‧‧‧Transfer axis

779‧‧‧Connected shaft

779b‧‧‧Linear bushing

779c‧‧‧Linear bushing

779d‧‧‧Linear bushing

911‧‧‧ box

911a‧‧ Track

912‧‧‧ box

912a‧‧ Track

912b‧‧‧ Track

913‧‧‧Hand Unit Support

914‧‧‧Hand Unit Support

941‧‧‧Component marking

1100‧‧‧1st support unit

1101‧‧‧ pulley

1102‧‧‧ pulley

1103‧‧‧Belt

1103a‧‧‧Area

1103b‧‧‧Area

1200‧‧‧2nd support unit

1201‧‧‧ pulley

1202‧‧‧ pulley

1203‧‧‧Land

1203a‧‧‧Area

1203b‧‧‧Area

1300‧‧‧3rd support unit

1301‧‧‧ pulley

1302‧‧‧ pulley

1303‧‧‧Leather

1303a‧‧‧Area

1303b‧‧‧Area

1400‧‧‧4th support unit

1401‧‧‧ pulley

1402‧‧‧ pulley

1403‧‧‧Leather

1403a‧‧‧Area

1403b‧‧‧Area

1500‧‧‧ drive mechanism

1501‧‧‧ Splined shaft

1502‧‧‧ spline nut

1503‧‧‧ spline nut

1504‧‧‧ spline nut

1505‧‧‧ spline nut

1507‧‧ ‧ motor

1508‧‧‧ pulley

1509‧‧‧ pulley

1510‧‧‧Leather

S‧‧‧ area

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

Fig. 1 is a schematic plan view showing a first embodiment of an inspection apparatus according to the present invention.

Fig. 2 is a perspective view of the hand unit of the robot supplied to the inspection value shown in Fig. 1.

Figure 3 is a plan view of the hand unit of the robot provided in the inspection value shown in Figure 1. Figure.

Fig. 4 is a plan view showing a first support portion of the hand unit shown in Fig. 2;

Fig. 5 is a plan view showing a second support portion of the hand unit shown in Fig. 2;

Fig. 6 is a plan view showing a third support portion of the hand unit shown in Fig. 2.

Fig. 7 is a plan view showing a fourth support portion of the hand unit shown in Fig. 2.

Fig. 8 is a plan view showing the X-direction moving mechanism of the hand unit shown in Fig. 2.

Fig. 9 is a plan view showing the Y-direction moving mechanism of the hand unit shown in Fig. 2.

10(a) and 10(b) are plan views showing the Y-direction moving mechanism of the hand unit shown in Fig. 2.

Fig. 11 is a perspective view showing the hand unit of the inspection robot included in the inspection apparatus shown in Fig. 1.

Fig. 12 is a plan view showing an electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Fig. 13 is a plan view showing the electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Fig. 14 is a plan view showing an electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Fig. 15 is a plan view showing the electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Fig. 16 is a plan view showing an electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Fig. 17 is a plan view showing the electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Fig. 18 is a plan view for explaining an electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Figure 19 is a diagram for explaining the electronic component inspection sequence of the inspection apparatus shown in Figure 1. Surface map.

Fig. 20 is a plan view for explaining an electronic component inspection sequence of the inspection apparatus shown in Fig. 1.

Fig. 21 is a plan view showing a hand unit for supplying a robot included in the inspection apparatus according to the second embodiment of the present invention.

Figure 22 is a plan view showing a support portion of the hand unit shown in Figure 21.

Hereinafter, an inspection apparatus (inspection apparatus of the present invention) to which the processor of the present invention is applied will be described in detail based on the embodiment shown in the drawings.

<First embodiment>

Fig. 1 is a schematic plan view showing a first embodiment of an inspection apparatus according to the present invention, and Fig. 2 is a perspective view of a hand unit for supplying a robot included in the inspection value shown in Fig. 1, and Fig. 3 is a view for inspection shown in Fig. 1. FIG. 4 is a plan view of the first support portion of the hand unit shown in FIG. 2, and FIG. 5 is a second support portion of the hand unit shown in FIG. FIG. 6 is a plan view showing a third support portion of the hand unit shown in FIG. 2, FIG. 7 is a plan view showing a fourth support portion of the hand unit shown in FIG. 2, and FIG. 8 is a plan view showing FIG. FIG. 9 and FIG. 10 are plan views of the Y-direction moving mechanism of the hand unit shown in FIG. 2, and FIG. 11 is a plan view of the inspection apparatus shown in FIG. A perspective view of the hand unit of the inspection robot is used. Figs. 12 to 20 are plan views for explaining the inspection procedure of the electronic components of the inspection apparatus shown in Fig. 1.

In the following description, for convenience of explanation, as shown in FIG. 1, the three axes orthogonal to each other are defined as an X-axis (first axis), a Y-axis (second axis), and a Z-axis (third axis). Further, the direction parallel to the X-axis is referred to as "X direction (first direction)", the direction parallel to the Y-axis is referred to as "Y direction (second direction)", and the direction parallel to the Z-axis is referred to as " Z direction". Further, in the X direction, the Y direction, and the Z direction, the front end side of the arrow is referred to as "+", and the end side of the arrow is referred to as "-".

The inspection apparatus 1 shown in FIG. 1 is used for test parts (electronic parts) such as an IC component (IC chip), an LCD (Liquid Crystal Disp1ay, liquid crystal display), a CIS (Contact Image Sensor), and the like. 100 electrical characteristics of the device for inspection and testing. In the following, for convenience of explanation, a case where an IC component is used as a test component will be described as a representative.

The inspection device 1 includes a supply tray 2, a recovery tray 3, a first shuttle 4, a second shuttle 5, an inspection socket (inspection unit) 6, a supply robot 7, a collection robot 8, an inspection robot 9, a first camera 600, and a 2 Camera 500, and control device 10 for controlling the various parts.

In the inspection apparatus 1, the inspection socket 6 among the respective units is removed, that is, the supply tray 2, the recovery tray 3, the first shuttle 4, the second shuttle 5, the supply robot 7, and the recovery robot 8 are formed. The inspection robot 9, the first camera 600, the second camera 500, and the control device 10 constitute a processor (processor of the present invention) that performs the transfer of the IC device 100. Further, the configuration of the processor is not limited thereto, and at least one of the units may be omitted as needed, and another configuration (for example, a hot plate or a chamber) may be added.

Further, the inspection apparatus 1 includes a susceptor 11 on which the respective units are mounted, and a safety cover (not shown) that covers the susceptor 11 so as to accommodate the respective portions, and is inside the safety cover (hereinafter referred to as "area S"). The first shuttle 4, the second shuttle 5, the inspection socket 6, the supply robot 7, the collection robot 8, the inspection robot 9, the first camera 600, and the second camera 500 are disposed, and are movable to the inside and outside of the region S. In this manner, the supply tray 2 and the recovery tray 3 are disposed.

Hereinafter, each part will be described in detail in order.

Supply tray

The supply tray 2 is for transporting the inspected IC component 100 from the area S to the tray in the area S. As shown in FIG. 1, the supply tray 2 is formed in a plate shape, and a plurality of recesses for mounting the IC component 100 are formed in a matrix form in the X direction and the Y direction on the upper surface thereof. twenty one.

The supply tray 2 is placed on a platform (not shown) that moves on the rail 23 extending in the Y direction so as to straddle the inside and outside of the region S. Further, the supply tray 2 moves the above-described stage by a driving means (not shown) such as a linear motor as a driving source, thereby being reciprocally movable in the ±Y direction along the track 23. Therefore, the operation of repeatedly loading the supply tray 2 in which the IC component 100 is housed on the platform outside the region S, and moving the supply tray 2 together with the platform into the region S, and unloading from the supply tray 2 can be repeated. In addition to all of the IC components 100, the supply tray 2 is again moved out of the region S together with the platform.

2. Recycling tray

The recovery tray 3 is for accommodating the IC element 100 that has been inspected and transporting it from the area S to the tray outside the area S. As shown in FIG. 1, the collection tray 3 is formed in a plate shape, and a plurality of pockets 31 for mounting the IC element 100 are formed in a matrix form in the X direction and the Y direction on the upper surface thereof.

Such a recovery tray 3 is placed on a platform (not shown) that moves on a rail 33 extending in the Y direction so as to span the inside and outside of the region S. Further, the recovery tray 3 moves the stage by a driving means (not shown) such as a linear motor as a driving source, thereby being reciprocally movable in the ±Y direction along the track 33. Therefore, in the region S, the IC device 100 in which the inspection is completed can be repeatedly stored in the recovery tray 3, the recovery tray 3 can be moved outside the region S, and the recovery tray 3 on the platform can be replaced with an empty tray. The recovery tray 3 is moved again into the area S.

The collection tray 3 is provided in the +X direction with respect to the supply tray 2, and the first shuttle 4, the second shuttle 5, and the inspection socket 6 are disposed between the supply tray 2 and the collection tray 3.

3. The first shuttle

The first shuttle 4 is transported to the IC device 100 in the region S by the supply tray 2 and then transported to the vicinity of the inspection socket 6, so that it is further used for the inspection socket 6 The IC device 100 that has passed the inspection of the inspection is transported to the vicinity of the recovery tray 3.

As shown in FIG. 1, the first shuttle 4 includes a base member 41 and two trays 42, 43 fixed to the base member 41. The two trays 42, 43 are arranged in the X direction. Further, in the trays 42 and 43, eight recesses 421 and 431 for mounting the IC component 100 are formed in a matrix shape in a matrix of four in the X direction and two in the Y direction. .

Among the trays 42 and 43, the tray 42 on the side of the supply tray 2 is a tray for transferring and storing the IC component 100 accommodated in the supply tray 2, and the tray 43 on the side of the recovery tray 3 is used for storing the used inspection. The tray of the IC component 100 in which the electrical characteristics are inspected by the socket 6. That is, the tray 42 is for accommodating the tray of the unchecked IC device 100, and the tray 43 is for accommodating the tray of the IC component 100 that has been inspected.

The first shuttle 4 base member 41 is supported by a rail 44 extending in the X direction, and can be reciprocated in the ±X direction along the rail 44 by a driving device (not shown) using, for example, a linear motor as a drive source. Further, two states can be formed: first, the first shuttle 4 is moved to the -X direction side, the tray 42 is arranged on the +Y direction side with respect to the supply tray 2, and the tray 43 is arranged in the +Y direction with respect to the inspection socket 6. The second state is that the first shuttle 4 is moved to the +X direction side, the tray 43 is arranged on the +Y direction side with respect to the recovery tray 3, and the tray 42 is arranged on the +Y direction side with respect to the inspection socket 6.

4. The second shuttle

The second shuttle 5 has the same function and configuration as the first shuttle 4 described above. In other words, the second shuttle 5 is transported to the vicinity of the inspection socket 6 by the supply tray 2 and transported to the IC device 100 in the region S. Therefore, the second shuttle 5 is further used for inspection by the inspection socket 6. The completed IC device 100 is transported to the vicinity of the recovery tray 3.

As shown in FIG. 1, the second shuttle 5 includes a base member 51 and two trays 52, 53 fixed to the base member 51. The two trays 52 and 53 are arranged in the X direction. Further, on the trays 52 and 53, four are arranged in the X direction and two in the Y direction. Eight recesses 521 and 531 for mounting the IC component 100 are formed in a matrix.

Among the trays 52 and 53, the tray 52 on the supply tray 2 side is a tray in which the IC component 100 accommodated in the supply tray 2 is transferred and stored, and the tray 43 on the side of the collection tray 3 is used to store the used inspection socket. 6 The tray of the IC component 100 that completes the inspection of the electrical characteristics. That is, the tray 52 is for accommodating the tray of the unchecked IC device 100, and the tray 53 is for accommodating the tray of the IC component 100 that has been inspected.

The second shuttle 5 base member 51 is supported by a rail 54 extending in the X direction, and is reciprocally movable in the ±X direction along the rail 54 by a driving device (not shown) using, for example, a linear motor as a drive source. Thereby, two states can be formed: one is that the second shuttle 5 is moved to the -X direction side, the tray 52 is arranged on the +Y direction side with respect to the supply tray 2, and the tray 53 is arranged at -Y with respect to the inspection socket 6. In the state of the direction side, the second shuttle 5 is moved to the +X direction side, the tray 53 is arranged on the +Y direction side with respect to the recovery tray 3, and the tray 52 is arranged on the -Y direction side with respect to the inspection socket 6.

Further, the second shuttle 5 is provided in the -Y direction with respect to the first shuttle 4, and an inspection socket 6 is disposed between the first shuttle 4 and the second shuttle 5.

5. Inspection socket

The inspection socket (inspection portion) 6 is a socket for inspecting the electrical characteristics of the IC component 100.

The inspection socket 6 includes eight inspection individual sockets 61 for arranging the IC device 100, and eight inspection individual sockets 61 are provided so as to be arranged in four in the X direction and two in the Y direction. Further, the arrangement pitch of the eight inspection individual sockets 61 is substantially equal to the arrangement pitch of the eight pockets formed on the respective trays 42, 43, 52, 53. Thereby, the transfer of the IC component 100 between the trays 42, 43, 52, 53 and the individual inspection sockets 61 can be smoothly performed.

Although not shown, a plurality of probes protruding from the bottom thereof are provided in each of the individual inspection sockets 61. The plurality of probes are respectively energized upward by a spring or the like. If the IC component 100 is disposed in the individual socket 61 for inspection, the plurality of probes and the IC component 100 have There are external terminals in contact. Thereby, the state in which the IC device 100 and the control device 10 (the inspection control unit 101 described below) are electrically connected via the probe, that is, the state in which the electrical characteristics of the IC device 100 are inspected (tested) can be formed.

The inspection socket 6 is detachably fixed to the base 11. Therefore, the inspection socket 6 can be simply modified in accordance with the target inspection (test), or the inspection socket 6 conforming thereto can be modified in accordance with the size or shape of the IC component 100.

6. The first camera

The first camera 600 is disposed between the first shuttle 4 and the inspection socket 6. As described below, when the first hand unit 92 holding the unchecked IC device 100 passes over, the first camera 600 captures the component marks 941 of the IC device 100 and the first hand unit 92.

7. 2nd camera

The second camera 500 has the same function as the first camera 600 described above. Such a second camera 500 is disposed between the second shuttle 5 and the inspection socket 6. As will be described later, when the second hand unit 93 holding the unchecked IC device 100 passes over, the second camera 500 photographs the component marks of the IC component 100 and the second hand unit 93.

8. Supply robot

The supply robot 7 is a robot that transports the IC component 100 housed in the supply tray 2 to the trays 42 and 52.

As shown in FIG. 1, the supply robot 7 includes a support frame 7a supported on the base 11 and a moving frame 7b supported on the support frame 7a and movable back and forth in the ±Y direction with respect to the support frame 7a; The hand unit 7c is supported on the moving frame 7b and is reciprocally movable in the ±X-axis direction with respect to the moving frame 7b.

On the support frame 7a, a track extending in the Y direction is formed, and the moving frame 7b reciprocates in the Y direction along the track. Further, on the moving frame 7b, a track extending in the X direction is formed, and the hand unit 7c reciprocates in the X direction along the track. Furthermore, moving frame 7b is relative to The movement of the support frame 7a and the movement of the hand unit 7c with respect to the moving frame 7b are performed by a driving device (not shown) using, for example, a linear motor as a driving source.

Hereinafter, the opponent unit 7c will be described in detail based on FIGS. 2 to 10. In addition, in each of FIGS. 2 to 10, for convenience of explanation, a part of the configuration is omitted.

As shown in FIGS. 2 and 3, the hand unit 7c has a base portion 75, and the base portion 75 is supported to be movable in the X direction with respect to the moving frame 7b. In addition, the "base portion" refers to a portion that supports other members (for example, the first to fourth support portions 71 to 74 described below) and gathers them, and forms a basis of the hand unit 7c.

The base portion 75 includes a first base 751 formed in a plate shape having a width in the XY plane and having a thickness in the Z direction, and a second base 752 from the -X direction side of the first base 751. The end portion extends downward (in the -Z direction), has a widening in the ZY plane, and has a thickness in the X direction. That is, the base portion 75 is formed in an L-shaped outer shape that is curved in the middle. Among the two bases 751 and 752, at least a part of the components constituting the following X-direction moving mechanism 76 is fixed to the first base 751, and the Y-direction moving mechanism 77 is fixed to the second base 752. At least part of the part.

Further, the hand unit 7c includes four support portions supported by the base portion 75, and specifically includes a first support portion 71, a second support portion 72, a third support portion 73, and a fourth support portion 74. The four support portions are arranged in the order of the third support portion 73, the second support portion 72, the first support portion 71, and the fourth support portion 74 from the -X direction side +X direction. In addition, the above-mentioned "support" means that the connection from the base portion 75 is prevented from falling.

Further, the first support portion 71 of the four support portions 71 to 74 is fixed to the first base 751. In addition, the above-mentioned "fixed" means that the relative position of the first support portion 71 with respect to the base portion 75 does not change during the operation.

The other second, third, and fourth support portions 72, 73, and 74 are movable in the X direction with respect to the first base 751, respectively. In the present embodiment, a rail 753 extending in the X direction is formed on the lower surface of the first base 751, and three rails 753 are movable on the rail 753. Introducers 754, 755, 756. Further, the second support portion 72 is fixed to the introducer 754, the third support portion 73 is fixed to the introducer 755, and the fourth support portion 74 is fixed to the introducer 756. With such a configuration, the second, third, and fourth support portions 72, 73, and 74 can move in the X direction with respect to the base portion 75.

Further, each of the first, second, third, and fourth support portions 71, 72, 73, and 74 is formed in a plate shape having a width in the YZ plane and a thickness in the X direction. As described above, by forming the support portions 71 to 74 in a plate shape having a widened width on the YZ plane, the support portions 71 to 74 can be arranged side by side in the X direction at a narrower interval. Therefore, it is possible to reduce the size of the hand unit 7c, and it is possible to arrange the following plurality of suction nozzles in a narrow interval in the X direction.

Hereinafter, the first, second, third, and fourth support portions 71, 72, 73, and 74 will be described in detail, and the support portions 71 to 74 are formed to be identical to each other.

8-1. First Support Department

As shown in FIG. 4, the first component holding mechanism 711 is provided in the first support portion 71. The first component holding mechanism 711 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The first component holding mechanism 711 includes a shaft 712 that is supported by the first support portion 71 and reciprocally movable in the ±Z direction with respect to the first support portion 71. The suction nozzle (first component holding portion) 713, It is provided at the front end (lower end) of the shaft 712, and a drive mechanism 714 that moves the suction nozzle 713 in the ±Z direction with respect to the first support portion 71 via the shaft 712. The first component holding mechanism 711 having such a configuration lowers the suction nozzle 713 via the shaft 712 by the drive mechanism 714, and sucks the IC component 100 by the suction nozzle 713, thereby holding the IC component 100. In this way, the IC element 100 is held by adsorption, whereby the stress applied to the IC element 100 can be suppressed, and the IC element 100 can be prevented from being damaged. Moreover, the IC device 100 can be simply configured and surely held. In addition, the above-mentioned "holding" means that the IC 100 is continuously adsorbed so that the IC element 100 does not fall.

As the configuration of the drive mechanism 714, the shaft 712 can be made relative to the first support portion 71. The present invention is not particularly limited, and includes a pair of pulleys (guide wheels) 714a and 714b, a belt (ring drive cable) 714c spanned between the pair of pulleys 714a and 714b, and A motor (drive source) 714d that rotates the pulley 714a.

The pulleys 714a and 714b are rotatably supported by one main surface of the first support portion 71 via a shaft (not shown). Further, the pulleys 714a and 714b are provided apart from each other in the Z direction. Therefore, the belt 714c has a region extending in the Z-axis direction, and the shaft 712 is fixed in the region via the fixing portion 714e. When the pulley 714a is rotated by the motor 714d, the pulley 714b and the belt 714c rotate accordingly, and the shaft 712 (the suction nozzle 713) fixed to the belt 714c moves in the Z-axis direction with respect to the first support portion 71. By selecting the rotation direction of the motor 714d, the suction nozzle 713 can be raised or lowered with respect to the first support portion 71.

Further, the configuration of the guide wheel, the ring drive cable, and the drive source is not particularly limited as long as the drive as described above can be realized. For example, a sprocket may be used instead of the pulleys 714a, 714b as a pair of guide wheels, and a chain instead of the belt 714c may be used as the endless drive cable. Further, a piezoelectric actuator may be used instead of the motor 714d as a drive source.

Further, the first support portion 71 is provided with a first moving portion 715 that can reciprocate in the Y direction with respect to the first support portion 71. A rail (guide portion) extending in the Y direction is provided in the first support portion 71, and the first moving portion 715 is movable along the rail. Further, as long as the first moving portion 715 can be guided in the Y direction, the track or the elongated hole extending in the Y direction may be substituted for the track.

Further, a second component holding mechanism 716 is provided on the first support portion 71. Similarly to the first component holding mechanism 711, the second component holding mechanism 716 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The second component holding mechanism 716 includes a shaft 717 that is supported by the first moving portion 715 and reciprocally movable in the Z direction with respect to the first moving portion 715, and a suction nozzle (second component holding portion) 718. The end portion is provided at a front end of the shaft 717; and the drive mechanism 719 moves the suction nozzle 718 in the Z direction with respect to the first moving portion 715 via the shaft 717. The second zero of this composition The member holding mechanism 716 lowers the suction nozzle 718 via the shaft 717 by the drive mechanism 719, and sucks the IC element 100 by the suction nozzle 718, thereby holding the IC element 100.

The configuration of the drive mechanism 719 is not particularly limited as long as the shaft 717 can be reciprocated in the ±Z direction. However, in the present embodiment, the configuration is the same as that of the above-described drive mechanism 714. That is, the drive mechanism 719 includes a pair of pulleys 719a and 719b, a belt 719c spanned between the pair of pulleys 719a and 719b, and a motor 719d that rotates the pulley 719a.

The pulleys 719a and 719b are rotatably supported by one of the main surfaces of the first support portion 71 via a shaft (not shown). Further, the pulleys 719a and 719b are provided apart from each other in the Z direction. Therefore, the belt 719c has a region extending in the Z-axis direction, and a shaft 717 is fixed in the region via the fixing portion 719e. When the pulley 719a is rotated by the motor 719d, the pulley 719b and the belt 719c rotate together, so that the shaft 717 (the suction nozzle 718) fixed to the belt 719c moves in the Z-axis direction with respect to the first support portion 71. The suction nozzle 718 can be raised or lowered with respect to the first support portion 71 by selecting the rotation direction of the motor 719d.

Further, the fixing portion 719e is expandable and contractible in the Y direction, and is extended or contracted together with the movement of the first moving portion 715 with respect to the Y direction of the first support portion 71. Therefore, the movement of the first moving portion 715 with respect to the Y direction of the first support portion 71 is not hindered. Further, each of the components (the pair of pulleys 719a and 719b, the belt 719c, and the motor 719d) constituting the drive mechanism 719 may be provided on the first moving portion 715. According to this configuration, it is not necessary to configure the fixing portion 719e to be expandable and contractible.

8-2. 2nd Support Department

As shown in FIG. 5, the third component holding mechanism 721 is provided on the second support portion 72. Similarly to the first component holding mechanism 711, the third component holding mechanism 721 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The configuration of the third component holding mechanism 721 is the same as that of the first component holding mechanism 711 described above. That is, the third part holding mechanism 721 includes a shaft 722 that is supported by the second support portion 72. And moving back and forth in the Z direction with respect to the second support portion 72; a suction nozzle (third component holding portion) 723 provided at a front end portion of the shaft 722; and a drive mechanism 724 for opposing the suction nozzle 723 via the shaft 722 The second support unit 72 moves in the ±Z direction. The third component holding mechanism 721 having such a configuration lowers the suction nozzle 723 via the shaft 722 by the drive mechanism 724, and sucks the IC component 100 by the suction nozzle 723, thereby holding the IC component 100.

Further, the drive mechanism 724 includes a pair of pulleys 724a and 724b, a belt 724c spanned between the pair of pulleys 724a and 724b, and a motor 724d for rotating the pulley 724a. The pulleys 724a and 724b are rotatably supported by one of the main surfaces of the second support portion 72 via a shaft (not shown). Further, the pulleys 724a and 724b are provided apart from each other in the Z direction. Therefore, the belt 724c has a region extending in the Z-axis direction, and the shaft 722 is fixed in the region via the fixing portion 724e. When the pulley 724a is rotated by the motor 724d, the shaft 722 (the suction nozzle 723) fixed to the belt 724c moves in the Z-axis direction with respect to the second support portion 72.

Further, the second support portion 72 is provided with a second moving portion 725 that can reciprocate in the Y direction with respect to the second support portion 72. The second support portion 72 is provided with a rail extending in the Y direction, and the second moving portion 725 is movable along the rail. With such a configuration, the movement of the second moving portion 725 other than the Y direction can be easily and surely restricted.

Further, a fourth component holding mechanism 726 is provided on the second support portion 72. Similarly to the second component holding mechanism 716 described above, the fourth component holding mechanism 726 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The configuration of the fourth component holding mechanism 726 is the same as that of the second component holding mechanism 716 described above. That is, the fourth component holding mechanism 726 includes a shaft 727 that is supported by the second moving portion 725 and reciprocally movable in the ±Z direction with respect to the second moving portion 725; the suction nozzle (fourth component holding portion) 728, It is disposed at a front end of the shaft 727; and a drive mechanism 729 that moves the suction nozzle 728 in the Z direction with respect to the second moving portion 725 via the shaft 727. The fourth component holding mechanism 726 having such a configuration lowers the suction nozzle 728 via the shaft 727 by the drive mechanism 729, and sucks the IC component 100 by the suction nozzle 728, thereby holding the IC component 100.

Further, the drive mechanism 729 includes a pair of pulleys 729a and 729b, a belt 729c spanned between the pair of pulleys 729a and 729b, and a motor 729d for rotating the pulley 729a. The pulleys 729a and 729b are rotatably supported by one main surface of the second support portion 72 via a shaft (not shown). Further, the pulleys 729a and 729b are provided apart from each other in the Z direction. Therefore, the belt 729c has a region extending in the Z-axis direction, and the shaft 727 is fixed in the region via the fixing portion 729e. When the pulley 729a is rotated by the motor 729d, the shaft 727 (the suction nozzle 728) fixed to the belt 729c moves in the Z-axis direction with respect to the second support portion 72.

Further, the fixing portion 729e is expandable and contractible in the Y direction, and is extended or contracted together with the movement of the second moving portion 725 with respect to the Y direction of the second support portion 72. Therefore, the movement of the second moving portion 725 with respect to the Y direction of the second support portion 72 is not hindered.

8-3. Third Support Department

As shown in FIG. 6, the fifth component holding mechanism 731 is provided in the third support portion 73. Similarly to the first component holding mechanism 711, the fifth component holding mechanism 731 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The configuration of the fifth component holding mechanism 731 is the same as that of the first component holding mechanism 711 described above. In other words, the fifth component holding mechanism 731 includes a shaft 732 that is supported by the third support portion 73 and reciprocally movable in the Z direction with respect to the third support portion 73, and a suction nozzle (the fifth component holding portion) 733. The front end portion of the shaft 732 is disposed; and the drive mechanism 734 moves the suction nozzle 733 in the Z direction with respect to the third support portion 73 via the shaft 732. The fifth component holding mechanism 731 having such a configuration lowers the suction nozzle 733 via the shaft 732 by the drive mechanism 734, and sucks the IC component 100 by the suction nozzle 733, thereby holding the IC component 100.

Further, the drive mechanism 734 includes a pair of pulleys 734a and 734b, a belt 734c spanned between the pair of pulleys 734a and 734b, and a motor 734d for rotating the pulley 734a. The pulleys 734a and 734b are rotatably supported by one of the main surfaces of the third support portion 73 via a shaft (not shown). Further, the pulleys 734a and 734b are provided apart from each other in the Z direction. Therefore, the belt 734c has a region extending in the Z-axis direction, and the shaft is fixed in the region via the fixing portion 734e. 732. When the pulley 734a is rotated by the motor 734d, the shaft 732 (the suction nozzle 733) fixed to the belt 734c moves in the Z-axis direction with respect to the third support portion 73.

Further, the third support portion 73 is provided with a third moving portion 735 that is reciprocally movable in the Y direction with respect to the third support portion 73. The third support portion 73 is provided with a rail extending in the Y direction, and the third moving portion 735 is movable along the rail. With such a configuration, the movement of the third moving portion 735 other than the Y direction can be easily and surely restricted.

Further, a sixth component holding mechanism 736 is provided on the third support portion 73. Similarly to the second component holding mechanism 716 described above, the sixth component holding mechanism 736 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The configuration of the sixth component holding mechanism 736 is the same as that of the second component holding mechanism 716 described above. That is, the sixth component holding mechanism 736 includes a shaft 737 that is supported by the third moving portion 735 and reciprocally movable in the Z direction with respect to the third moving portion 735, and a suction nozzle (sixth component holding portion) 738. A front end portion of the shaft 737 is disposed; and a drive mechanism 739 moves the suction nozzle 738 in the Z direction with respect to the third moving portion 735 via the shaft 737. The sixth component holding mechanism 736 having such a configuration lowers the suction nozzle 738 via the shaft 737 by the drive mechanism 739, and sucks the IC component 100 by the suction nozzle 738, thereby holding the IC component 100.

Further, the drive mechanism 739 includes a pair of pulleys 739a and 739b, a belt 739c spanned between the pair of pulleys 739a and 739b, and a motor 739d for rotating the pulley 739a. The pulleys 739a and 739b are rotatably supported by one main surface of the third support portion 73 via a shaft (not shown). Further, the pulleys 739a and 739b are provided apart from each other in the Z direction. Therefore, the belt 739c has a region extending in the Z-axis direction, and the shaft 737 is fixed in the region via the fixing portion 739e. When the pulley 739a is rotated by the motor 739d, the shaft 737 (the suction nozzle 738) fixed to the belt 739c moves in the Z-axis direction with respect to the third support portion 73.

Further, the fixing portion 739e is expandable and contractible in the Y direction, and is extended or contracted together with the movement of the third moving portion 735 with respect to the Y direction of the third support portion 73. Therefore, the movement of the third moving portion 735 with respect to the Y direction of the third support portion 73 is not hindered.

8-4. 4th Support Department

As shown in FIG. 7, the seventh component holding mechanism 741 is provided on the fourth support portion 74. Similarly to the first component holding mechanism 711 described above, the seventh component holding mechanism 741 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The configuration of the seventh component holding mechanism 741 is the same as that of the first component holding mechanism 711 described above. That is, the seventh component holding mechanism 741 includes a shaft 742 that is supported by the fourth support portion 74 and reciprocally movable in the Z direction with respect to the fourth support portion 74, and a suction nozzle (seventh component holding portion) 743. The front end portion of the shaft 742 is disposed; and the driving mechanism 744 moves the suction nozzle 743 in the Z direction with respect to the fourth support portion 74 via the shaft 742. The seventh component holding mechanism 741 having such a configuration lowers the suction nozzle 743 via the shaft 742 by the drive mechanism 744, and sucks the IC component 100 by the suction nozzle 743, thereby holding the IC component 100.

Further, the drive mechanism 744 includes a pair of pulleys 744a and 744b, a belt 744c that is stretched between the pair of pulleys 744a and 744b, and a motor 744d that rotates the pulley 744a. The pulleys 744a and 744b are rotatably supported by one of the main surfaces of the fourth support portion 74 via a shaft (not shown). Further, the pulleys 744a and 744b are provided apart from each other in the Z direction. Therefore, the belt 744c has a region extending in the Z-axis direction, and the shaft 742 is fixed in the region via the fixing portion 744e. When the pulley 744a is rotated by the motor 744d, the shaft 742 (the suction nozzle 743) fixed to the belt 744c moves in the Z-axis direction with respect to the third support portion 73.

Further, the fourth support portion 74 is provided with a fourth moving portion 745 that is reciprocally movable in the Y direction with respect to the fourth support portion 74. The fourth support portion 74 is provided with a rail extending in the Y direction, and the fourth moving portion 745 is movable along the rail. With such a configuration, the movement of the fourth moving portion 745 other than the Y direction can be easily and surely restricted.

Further, an eighth component holding mechanism 746 is provided on the fourth support portion 74. Similarly to the second component holding mechanism 716 described above, the eighth component holding mechanism 746 has a function of holding the IC 100 that is transported from the supply tray 2 to the trays 42 and 52.

The configuration of the eighth component holding mechanism 746 is the same as that of the second component holding mechanism 716 described above. with. That is, the eighth component holding mechanism 746 includes a shaft 747 that is supported by the fourth moving portion 745 and reciprocally movable in the Z direction with respect to the fourth moving portion 745, and a suction nozzle (eighth part holding portion) 748. The front end of the shaft 747 is disposed; and the driving mechanism 749 moves the suction nozzle 748 in the Z direction with respect to the fourth moving portion 745 via the shaft 747. The eighth component holding mechanism 746 having such a configuration lowers the suction nozzle 748 via the shaft 747 by the drive mechanism 749, and sucks the IC component 100 by the suction nozzle 748, thereby holding the IC component 100.

Further, the drive mechanism 739 includes a pair of pulleys 749a and 749b, a belt 749c spanned between the pair of pulleys 749a and 749b, and a motor 749d for rotating the pulley 749a. The pulleys 749a and 749b are rotatably supported by one of the main surfaces of the fourth support portion 74 via a shaft (not shown). Further, the pulleys 749a and 749b are provided apart from each other in the Z direction. Therefore, the belt 749c has a region extending in the Z-axis direction, and the shaft 747 is fixed in the region via the fixing portion 749e. When the pulley 749a is rotated by the motor 749d, the shaft 747 (the suction nozzle 748) fixed to the belt 749c moves in the Z-axis direction with respect to the fourth support portion 74.

Further, the fixing portion 749e is expandable and contractible in the Y direction, and is extended or contracted together with the movement of the fourth moving portion 745 with respect to the Y direction of the fourth support portion 74. Therefore, the movement of the fourth moving portion 745 with respect to the Y direction of the fourth support portion 74 is not hindered.

The configuration of each of the support units 71, 72, 73, and 74 has been described in detail above.

Here, the adsorption nozzles 733, 723, 713, and 743 are sequentially arranged in the X direction, and are disposed at equal intervals. That is, the distance between the adsorption nozzle 733 and the adsorption nozzle 723, the distance between the adsorption nozzle 723 and the adsorption nozzle 713, and the distance between the adsorption nozzle 713 and the adsorption nozzle 743 are substantially equal to each other.

Further, the adsorption nozzles 718 are arranged in the Y direction with respect to the adsorption nozzles 713. Similarly, the adsorption nozzles 728 are arranged in the Y direction with respect to the adsorption nozzles 723, and the adsorption nozzles 738 are arranged in the Y direction with respect to the adsorption nozzles 733. Further, it is provided that the adsorption nozzles 748 are arranged in the Y direction with respect to the adsorption nozzles 743. Moreover, the distance between the adsorption nozzles 718 and 713, the distance between the adsorption nozzles 728 and 723, the distance between the adsorption nozzles 738 and 733, and the adsorption nozzles 748 and 743 The distances are substantially equal to each other. That is, the suction nozzles 738, 728, 718, and 748 are also arranged in the X direction in order, and are disposed at equal intervals.

The hand unit 7c further includes an X-direction moving mechanism (second moving mechanism) 76 that moves the second, third, and fourth support portions 72, 73, and 74 in the X direction with respect to the base portion 75 (first support portion 71). And a Y-direction moving mechanism (first moving mechanism) 77 that moves each of the moving portions 715, 725, 735, and 745 in the Y direction with respect to the base portion 75.

8-5. X direction moving mechanism

The X-direction moving mechanism 76 can move the nozzle 733 (738) and the suction nozzle by moving the second, third, and fourth support portions 72, 73, and 74 in the X direction with respect to the first support portion 71. The distance between 723 (728), the distance between the nozzle 723 (728) and the nozzle 713 (718), and the distance between the nozzle 713 (718) and the nozzle 743 (748) are kept equal to each other. It is composed of equal distances.

As shown in FIG. 8, the X-direction moving mechanism 76 includes a pair of two-stage pulleys (a second guide wheel for a second moving mechanism, a second guide wheel for a second moving mechanism) 761 and 762, and a pair of two-segment pulleys 761. Two belts between 762 (the first ring-shaped driving cable for the second moving mechanism, the second ring-shaped driving cable for the second moving mechanism) 763 and 764, and the motor for rotating the two-stage pulley 761 (for the second moving mechanism) Drive source) 765. Among these, the two-stage pulleys 761 and 762 and the motor 765 are respectively supported by the first base 751.

The two-stage pulleys 761 and 762 are rotatable about an upper surface of the first base 751 about an axis extending in the Y direction. Further, the two-stage pulleys 761 and 762 are provided apart from each other in the X direction.

The two-stage pulley 761 includes a small-diameter pulley 761a having a small outer diameter, and a large-diameter pulley 761b having an outer diameter substantially twice that of the small-diameter pulley 761a; the lines are arranged in the Y direction and are formed concentrically. Similarly, the two-stage pulley 762 includes: a small-diameter pulley 762a having a small outer diameter; and a large-diameter pulley 762b having an outer diameter substantially twice that of the small-diameter pulley 762a; the lines are arranged in the Y direction and formed as concentric. Further, the outer diameters of the small diameter pulleys 761a and 762a are equal to each other, and the outer diameter pulleys 761b and 762b are also equal in shape.

A belt 763 is placed between the small diameter pulleys 761a and 762a. The belt 763 is between the small diameter pulleys 761a and 762a and has two regions 763a and 763b extending in the X direction. Further, in the one region 763a, the second support portion 72 is fixed, and in the other region 763b, the fourth support portion 74 is fixed. When the two-stage pulley 761 rotates, the belt 763 is fed to one side in the X direction in the region 763a, and the belt 763 is fed to the other side in the X direction in the region 763b. Therefore, the second and fourth support portions 72 and 74 are mutually oriented. The X direction is opposite to the side and moves at approximately equal distances.

On the other hand, a belt 764 is placed between the large diameter pulleys 761b and 762b. The belt 764 is between the large diameter pulleys 761b and 762b and has two regions 764a and 764b extending in the X direction. Among the two regions 764a and 764b, the third support portion 73 is fixed to the region 764a that is fed in the same direction as the region 763a of the belt 763 when the two-stage pulley 761 rotates. When the belt 763 rotates, the belt 763 is fed to the same side in the X direction in the regions 763a and 764a, so that the second and third support portions 72 and 73 move toward the same side in the X direction. Further, as described above, the large diameter pulleys 761b and 762b have twice the outer diameter of the small diameter pulleys 761a and 762a. Therefore, the moving distance of the third support portion 73 is approximately twice the moving distance of the second support portion 72.

According to this configuration, when the two-stage pulley 761 is rotated by the motor 765, the second and fourth support portions 72 and 74 move to substantially the same distance in the X direction, and the third support portion 73 is moved to the second position. The support portion 72 moves in the same direction and twice as much as the second support portion 72. Therefore, according to the X-direction moving mechanism 76, as described above, the distance between the suction nozzle 733 (738) and the suction nozzle 723 (728), the distance between the suction nozzle 723 (728) and the suction nozzle 713 (718), And the distance between the adsorption nozzle 713 (718) and the adsorption nozzle 743 (748) is maintained equal to each other, and the distances are changed.

By forming the configuration as described above, the configuration of the X-direction moving mechanism 76 can be simplified, and the miniaturization and weight reduction can be achieved. Therefore, it contributes to downsizing and weight reduction of the hand unit 7c, and improves the operability of the hand unit 7c. Further, by the rotation of the two-stage pulley 761, all the movements of the second, third, and fourth support portions 72, 73, and 74 can be collectively controlled, so that And the above functions can be played more reliably.

Further, the configuration of the guide wheel, the ring drive cable, and the drive source is not particularly limited as long as the drive as described above can be realized. For example, a sprocket may be used instead of a pulley as a pair of guide wheels, and a chain (metal chain, rubber chain, etc.) may be used instead of a belt as a ring drive cable. Further, a piezoelectric actuator may be used instead of the motor as a driving source. Further, the small-diameter pulley 761a (762a) and the large-diameter pulley 761b (762b) may be formed separately, and in this case, a motor for rotating the small-diameter pulley 761a may be separately provided, and The motor in which the diameter pulley 761b rotates.

8-6. Y direction moving mechanism

The Y-direction moving mechanism 77 can move the first, second, third, and fourth moving portions 715, 725, 735, and 745 to the first, second, third, and fourth support portions 71 and 72, respectively. , 73, 74 integrally (specifically, simultaneously and equidistantly) move in the Y direction, and the distance between the adsorption nozzles 713, 718, the distance between the adsorption nozzles 723, 728, the distance between the adsorption nozzles 733, 738 And the distance between the suction nozzles 743 and 748 is maintained to be equal to each other, and the distance between the suction nozzles is changed.

As shown in FIGS. 9 and 10, the Y-direction moving mechanism 77 includes a first unit 77a and a motor (a driving source for the first moving mechanism) 777 which are provided on the base portion 75, and a second unit 77b which is provided in the first unit. The support portion 71 has a transmission shaft (transmission portion) 778 and a connection shaft (connection portion) 779 which are provided to connect the first and second units 77a and 77b.

The first unit 77a includes a pair of pulleys (a first guide wheel for the first movement mechanism, a second guide wheel for the first movement mechanism) 771 and 772, and a belt that is stretched between the pair of pulleys 771 and 772 (the first movement) The mechanism uses a first ring drive cable 773. The pulleys 771 and 772 are rotatably supported on the main surface of one of the second bases 752 (on the right side in the drawing) around an axis extending in the X direction. Further, the pulleys 771 and 772 are provided apart from each other in the Y direction. Further, a belt 773 is placed between the pulleys 771 and 772. The belt 773 has two regions 773a, 773b extending in the Y direction between the pulleys 771, 772.

The motor 777 is a driving source for rotating the pulley 771, and is provided on the other main surface (left side in the drawing) of the second substrate 752.

The second unit 77b includes a pair of pulleys (a third guide wheel for the first moving mechanism, a fourth guide wheel for the first moving mechanism) 774 and 775, and a belt that is placed between the pair of pulleys 774 and 775 (the first movement) The mechanism uses a second ring drive cable 776. The pulleys 774 and 775 are rotatably supported on the main surface of one of the first support portions 71 (the right side in the drawing) around the axis extending in the X direction. Further, the pulleys 774 and 775 are provided apart from each other in the Y direction. Further, a belt 776 is placed between the pulleys 774, 775. The belt 776 has two regions 776a, 776b extending in the Y direction between the pulleys 774, 775.

As described above, by providing the second unit 77b on the first support portion 71 that is constant with respect to the position of the second base 752, the Y-direction moving mechanism 77 can be driven more stably.

The transmission shaft 778 is for transmitting the driving force of the motor 777 to the shaft of the second unit 77b. Such a transmission shaft 778 is provided to extend in the X direction, and connects the shafts of the pulleys 771 and 774 to each other. Therefore, the driving force of the motor 777 is transmitted to the second unit 77b via the transmission shaft 778, so that the pulleys 771, 774 integrally rotate.

Further, the transmission shaft 778 is provided to penetrate the second and third support portions 72 and 73 located between the second base 752 and the first support portion 71 (see FIGS. 5 and 6). Specifically, the transmission shaft 778 connects the pulleys 771 and 774 through the through holes formed in the second and third support portions 72 and 73. By setting the transmission shaft 778 to such an arrangement, it is possible to suppress the exposure of the transmission shaft 778 from the support portions 71 to 74, and it is possible to reduce the size of the hand unit 7c. Further, the transmission shaft 778 also functions as an introducer when the second and third support portions 72 and 73 move in the X direction, so that the movement of the second and third support portions 72 and 73 can be performed more reliably and smoothly. .

The connecting shaft 779 is formed in a straight line and extends in the X direction. Further, the connecting shaft 779 is fixed at two places in the middle thereof, and a region 773a of the belt 773 and a region 776a of the belt 776 are fixed via a fixture. When the belts 773 and 776 are rotated, the belts 773 and 776 are fed in the same direction in the Y direction in the regions 773a and 776a. Therefore, the connecting shaft 779 is directly moved to the Y position. Move in direction.

On the outer circumference of the connecting shaft 779, three linear bushings 779b, 779c, and 779d are disposed along the axial direction thereof. Each of the linear bushings 779b, 779c, and 779d is freely movable in the axial direction with respect to the connecting shaft 779 alone (in a state where the operation is not restricted by other members), and is freely rotatable in the circumferential direction.

Among the linear bushings 779b to 779d, the linear bushing 779b is fixed to the second moving portion 725, the linear bushing 779c is fixed to the third moving portion 735, and the linear bushing 779d is fixed to the fourth moving portion 745. Further, since the first moving portion 715 is supported by the first support portion 71 fixed to the first base 751, it does not move in the Y-axis direction with respect to the connecting shaft 779. Therefore, unlike the other moving parts 725 to 745, the first moving portion 715 directly fixes the connecting shaft 779 without passing through the linear bushing. As described above, by fixing the connecting shaft 779 to the first moving portion 715, the unintentional displacement of the connecting shaft 779 in the axial direction (Y direction) can be prevented.

With such a configuration, when the connecting shaft 779 moves in the Y direction by the rotation of the belts 773 and 776, the moving portions 715, 725, 735, and 745 are in the Y direction with respect to the respective supporting portions 71, 72, 73, and 74. Move integrally and at equal distances. Therefore, according to the Y-direction moving mechanism 77 having such a configuration, the distance between the suction nozzles 713 and 718, the distance between the suction nozzles 723 and 728, the distance between the suction nozzles 733 and 738, and the suction nozzle 743 can be surely separated. The distances between the 748s are maintained equal to each other, and the distances are changed.

Further, as described above, the linear bushings 779b to 779d are movable in the axial direction (X direction) with respect to the connecting shaft 779, so that the Y-direction moving mechanism 77 does not obstruct the second, third, and fourth supporting portions 72. 73 and 74 are moved in the X direction by the X-direction moving mechanism 76.

Further, in the Y-direction moving mechanism 77, the first unit 77a is provided on the second base 752, and the second unit 77b is provided in the first support portion 71, and the connecting shaft 779 is supported at two places spaced apart in the axial direction. The connecting shaft 779 is moved more smoothly and surely in the Y direction by a certain distance. In particular, by positioning the second and third support portions 72 and 73 between the second base 752 and the first support portion 71, the distance between the second base 752 and the first support portion 71 can be sufficiently ensured. The connecting shaft 779 can be supported more stably.

Further, in the Y-direction moving mechanism 77 of the present embodiment, the first, second, third, and fourth moving portions 715, 725, 735, and 745 are coupled to the belts 773, 776 via the connecting shaft 779 (ie, indirectly). However, the present invention is not limited thereto. For example, the connecting shaft 779 may be omitted, and the first, second, third, and fourth moving portions 715, 725, 735, and 745 may be directly coupled to the belts 773 and 776, respectively.

The configuration of the opponent unit 7c has been specifically described above. According to the hand unit 7c, the suction nozzles 713, 718, 723, 728, 733, 738, 743, and 748 can be freely changed by independently controlling the driving (opening/closing and rotating directions) of the motors 765 and 777. With spacing. Therefore, for example, even when the arrangement pitch of the plurality of pockets 21 formed on the supply tray 2 is different from the arrangement pitch of the plurality of pockets 421 (521) formed on the tray 42 (52), The IC component 100 can be smoothly transported from the supply tray 2 to the tray 42 (52) as described below.

Further, the hand unit 7c of the present embodiment has eight suction nozzles, but the number of the suction nozzles is not particularly limited as long as it is four or more. For example, when there are four adsorption nozzles, the third and fourth support portions 73 and 74 are omitted, and the adsorption nozzles 733, 738, 743, and 748 are omitted. In the case where the number of the nozzles is 10, for example, the fifth support portion of the fourth support portion 74 is provided in the same manner as the fourth support portion 74 and has the fifth support of the two nozzles. Further, the fifth support portion may be fixed in the region 764b of the belt 764. In this way, according to the hand unit 7c, the number of the nozzles (and, in addition, the addition and deletion) can be easily changed. The same applies to the hand unit 8c.

Next, the drive of the supply robot 7 will be described.

First, the moving frame 7b is moved in the Y direction with respect to the support frame 7a so that the hand unit 7c is positioned on the supply tray 2, and the base 75 is moved in the X direction with respect to the moving frame 7b. Next, the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 are driven as needed, so that the nozzles 713, 718, 723, 728, 733, 738, 743, and 748 are disposed. The distance from the arrangement of the recesses 21 is the same. Further, the driving of the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 can also be performed while the hand unit 7c is moving.

Next, each of the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748 is lowered, and the IC element 100 is held by the respective suction nozzles 713, 718, 723, 728, 733, 738, 743, and 748. Thereafter, the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748 are raised, and eight IC elements 100 are taken out from the recess 21.

Next, the moving frame 7b is moved in the Y direction with respect to the support frame 7a in such a manner that the hand unit 7c is positioned on the tray 42, and the base portion 75 is moved in the X direction with respect to the moving frame 7b. Since the arrangement pitch of the recesses 21 of the supply tray 2 and the arrangement pitch of the recesses 421 of the tray 42 are different in the X direction and the Y direction, the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 are respectively respectively caused. The driving is such that the arrangement pitch of the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, 748 coincides with the arrangement pitch of the pockets 421. Further, the driving of the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 can also be performed while the hand unit 7c is moving.

Next, each of the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748 is lowered to hold the IC component 100 held on each of the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748. Placed in the pocket 421. Then, after the adsorption state of the IC device 100 is released, the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748 are raised, and the IC elements 100 are left on the pockets 421.

Further, in the above aspect, the arrangement pitch of the recesses 21 of the supply tray 2 and the arrangement pitch of the recesses 421 of the tray 42 are different in the two directions of the X direction and the Y direction, but the present invention is not limited thereto. The spacing can be set only in the X direction. In this case, as long as the Y-direction moving mechanism 77 is used, the arrangement pitch of the suction nozzles 713, 718, 723, 728, 733, 738, 743, and 748 in the Y direction is adjusted, and thereafter, only the X-direction moving mechanism is driven. 76. The arrangement pitch of the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748 in the X direction may be changed.

Conversely, it is also possible to arrange the pitch in only the Y direction. In this case, as long as the X-direction moving mechanism 76 is used, the arrangement pitch of the suction nozzles 713, 718, 723, 728, 733, 738, 743, and 748 in the X direction is adjusted, and thereafter, only the Y-direction moving mechanism is driven. 77. The arrangement pitch of the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748 in the Y direction may be changed.

Further, the arrangement pitch may be equal in both the X direction and the Y direction. In this case, as long as the Y-direction moving mechanism 77 is used, the arrangement pitch of the suction nozzles 713, 718, 723, 728, 733, 738, 743, and 748 in the Y direction is adjusted, and the X-direction moving mechanism 76 is adjusted. The arrangement pitch of the adsorption nozzles 713, 718, 723, 728, 733, 738, 743, and 748 in the X direction may be performed after the IC element 100 is transported without changing the arrangement pitch.

The transfer from the supply tray 2 to the IC component 100 of the tray 52 is also the same.

(checking robot)

The inspection robot 9 transports the IC component 100 stored in the trays 42 and 52 to the inspection socket 6 , and transports the IC component 100 disposed in the inspection socket 6 and has completed the inspection of the electrical characteristics to the trays 43 and 53 . Robot.

Further, when the inspection robot 9 transports the IC component 100 to the inspection socket 6 from the trays 42 and 52, the IC component 100 can be positioned relative to the inspection socket 6 (inspection individual socket 61), and further, the IC component can be placed. When the 100 is placed in the inspection socket 6 and the electrical characteristics are inspected, the IC device 100 can be pressed against the probe, and a specific inspection pressure can be applied to the IC device 100.

As shown in FIG. 1, the inspection robot 9 includes a first frame 911 that is fixedly disposed with respect to the base 11, and a second frame 912 that is supported by the first frame 911 and that is movable relative to the first frame. The 911 moves back and forth in the Y direction; the first hand unit support portion 913 and the second hand unit support portion 914 are supported by the second frame 912 and are movable up and down in the Z direction with respect to the second frame 912; 8 first hands Unit 92, which is supported by the first hand unit support unit 913; and 8 second hand units 93, which is supported by the second hand unit support unit 914.

Since the first and second hand unit supporting portions 913 and 914 are supported by the second frame 912, they are integrally movable in the X direction and the Y direction, and are independently moved in the Z direction. The movement of the second frame 912 with respect to the first frame 911 and the movement of the respective hand unit supporting portions 913 and 914 with respect to the second frame 912 are performed by a driving device (not shown) using, for example, a linear motor as a driving source.

The eight first hand units 92 are arranged in a matrix on the lower side of the first hand unit support portion 913 so as to be arranged in four in the X direction and two in the Y direction. Further, the arrangement pitch of the eight first hand units 92 is substantially the same as the arrangement pitch of the eight pockets 421 and 431 formed on the trays 42 and 43 and the eight individual inspection sockets 61 provided in the inspection socket 6. equal. Therefore, the transfer of the IC device 100 between the trays 42, 43 and the inspection socket 6 can be performed more smoothly.

Similarly, the eight second hand units 93 are devices for transporting the IC device 100 between the trays 52 and 53 of the second shuttle 5 and the inspection sockets 6. Moreover, it is also a device for positioning the IC element 100 with respect to the inspection socket 6 when the unchecked IC device 100 is transported from the tray 52 to the inspection socket 6.

The eight second hand units 93 are arranged in a matrix on the lower side of the second hand unit support portion 914 in such a manner that four of them are arranged in the X direction and two are arranged in the Y direction. Further, the arrangement pitch of the eight second hand units 93 is the same as that of the eight first hand units 92, and the eight pockets 421 and 431 formed on the trays 42 and 43 and the eight sockets 431 provided in the inspection socket 6. The spacing of the individual inspection sockets 61 is substantially equal. Therefore, the transfer of the IC device 100 between the trays 52, 53 and the inspection socket 6 can be performed more smoothly.

Hereinafter, the configuration of the eight first hand units 92 and the eight second hand units 93 will be described. However, the respective hand units 92 and 93 are identical to each other. Therefore, the first hand unit 92 is exemplified below. In the description, the description of the other first hand unit 92 and the second hand unit 93 will be omitted.

As shown in FIG. 11, the first hand unit 92 includes a support portion 94 that is supported and fixed to the first hand unit support portion 913. The first moving portion 95 is supported by the support portion 94 and is relatively movable. The support portion 94 reciprocates in the ±X direction; the second moving portion 96 is supported by the first moving portion 95 and is reciprocally movable in the ±Y direction with respect to the first moving portion 95; the rotating portion 97 is The second moving portion 96 is supported and rotatable about the Z axis with respect to the second moving portion 96. The holding portion 98 is supported by the rotating portion 97. On the support portion 94, an element mark 941 for performing positioning of the held IC element 100 with respect to the inspection individual socket 61 is provided. Further, the holding portion 98 is constituted by, for example, a suction nozzle, and can be held by adsorbing the IC element 100.

Further, the first hand unit 92 includes a first driving device (not shown) that reciprocates the first moving portion 95 in the ±X direction with respect to the support portion 94; the second driving device (not shown) The moving unit 96 reciprocates in the ±Y direction with respect to the first moving unit 95, and the third driving mechanism rotates the rotating unit 97 around the Z axis with respect to the second moving unit 96. The first, second, and third drive mechanisms are formed by, for example, a linear motor as a drive source, and a configuration including a rack, a pinion, and the like for converting a rotational motion of the motor into a linear motion is added as needed.

The first hand unit 92 performs positioning (visual alignment) of the held IC component 100 as follows. The unchecked IC device 100 housed in the tray 42 is held by the holding portion 98, and the first hand unit 92 passes while the first hand unit 92 is moving directly above the tray 42 to directly above the inspection socket 6. Directly above the first camera 600. When the first hand unit 92 passes directly above the first hand unit 600, the first camera 600 captures the IC element 100 and the component mark 941 held by the first hand unit 92. The obtained image data is sent to the control device 10, and subjected to image recognition processing by the control device 10.

Specifically, in the image recognition processing, the image data acquired from the first camera 600 is subjected to a specific process, and the relative position and relative angle between the component mark 941 and the IC component 100 are calculated. Then, the calculated relative position and relative angle are compared with the reference position and the reference angle indicating the appropriate positional relationship between the component mark 941 and the IC component 100, and the "offset position" between the relative position and the reference position is calculated respectively. Quantity" and relative The "offset angle amount" generated between the angle and the reference angle. In addition, the "reference position" and the "reference angle" are preferably when the first hand unit 92 is placed at a predetermined inspection origin position, and the external terminal of the IC component 100 is preferably connected to the inspection individual socket 61. The position of the probe.

Then, the control device 10 drives the first, second, and third driving devices as needed based on the obtained "offset position amount" and "offset angle amount" so that the relative position and the relative angle are compared with the reference position and the reference. The position and posture (angle) of the IC component 100 are corrected in such a manner that the angles are uniform. By such control, the positioning of the IC component 100 held by the holding portion 98 can be performed.

Since the control device 10 is configured to independently control the driving of the eight first hand units 92, the positioning (position correction) of the eight IC elements 100 held by the respective first hand units 92 can be independently performed. .

The positioning of the IC component 100 by the second hand unit 93 is the same as that of the first hand unit 92 except that the second camera 500 is used instead of the first camera 600, and thus the description thereof will be omitted.

(recycling robot)

The collection robot 8 is a robot for transporting the IC elements 100 stored in the trays 43 and 53 to the collection tray 3 .

The recovery robot 8 is formed in the same configuration as the supply robot 7. That is, the recycling robot 8 includes: a support frame 8a supported on the base 11; a moving frame 8b supported on the support frame 8a and reciprocally movable in the Y direction with respect to the support frame 8a; and a hand unit 8c, It is supported on the moving frame 8b and is reciprocally movable in the X direction with respect to the moving frame 8b. The configuration of each of the units is the same as the configuration of each unit corresponding to the supply robot 7, and therefore the description thereof will be omitted. Further, the drive of the recovery robot 8 is also the same as the drive of the supply robot 7, and the description thereof will be omitted.

Here, there is a case where the inspection is completed in the tray 43 (53). Among the elements 100, there are defective products that cannot exhibit specific electrical characteristics. Therefore, for example, two collection trays 3 may be prepared, one of which is used as a tray for storing a good product that satisfies a specific electrical characteristic, and the other is used as a tray for collecting the defective product. Further, when one recovery tray 3 is used, a specific pocket 31 can be used as a recess for accommodating the defective product. In this way, it is possible to clearly distinguish between good and bad products.

(control device)

The control device 10 includes a drive control unit 102 and an inspection control unit 101. For example, the drive control unit 102 moves the supply tray 2, the recovery tray 3, the first shuttle 4, and the second shuttle 5, or the supply robot 7, the collection robot 8, the inspection robot 9, the placement state detecting device 200, and the first camera. The mechanical drive of 600 and the second camera 500 is controlled. The inspection control unit 101 performs inspection of the electrical characteristics of the IC component 100 disposed in the inspection socket 6 based on a program stored in a memory (not shown).

The configuration of the inspection apparatus 1 has been described above.

[Inspection method of inspection device]

Next, a method of inspecting the IC device 100 by the inspection device 1 will be described. In addition, the inspection method described below, in particular, the transfer order of the IC device 100 is merely an example, and is not limited thereto.

(step 1)

First, as shown in FIG. 12, the supply tray 2 in which the IC device 100 is housed in each of the pockets 21 is transported into the region S, and the first and second shuttles 4 and 5 are moved to the -X direction side to form The trays 42 and 52 are arranged on the +Y direction side with respect to the supply tray 2, respectively.

(Step 2)

Next, as shown in FIG. 13, the IC device 100 stored in the supply tray 2 is transferred to the trays 42 and 52 by the supply robot 7, and the IC device 100 is housed in the pockets 421 of the trays 42, 52, 521.

Next, by the placement state detecting device 200, each of the trays 42 and 52 is detected and stored. The mounting state of the IC device 100 in the pockets 421, 521. In other words, when it is convenient to detect only one abnormality of the IC device 100 in the mounted state, the drive control unit 102 temporarily stops the driving of each unit, corrects the abnormal placement state, and confirms that the IC component 100 is normally placed. After the state, the driving of each part is started again.

(Step 3)

Next, as shown in FIG. 14, both the first and second shuttles 4 and 5 are moved to the +X direction side, and the tray 42 is formed on the +Y direction side with respect to the inspection socket 6, and the tray 52 is opposed to the inspection socket. 6 is arranged in the state of the -Y direction side.

Next, as shown in FIG. 15, the first and second hand unit supporting portions 913 and 914 are integrally moved to the +Y direction side, and the first hand unit supporting portion 913 is formed directly above the tray 42 and the second hand unit is formed. The support portion 914 is located directly above the inspection socket 6. Thereafter, the IC elements 100 housed in the tray 42 are held by the respective first hand units 92.

(Step 5)

Then, as shown in FIG. 16, the first and second hand unit supporting portions 913 and 914 are integrally moved to the -Y direction side, and the first hand unit supporting portion 913 is formed directly above the inspection socket 6 (for inspection) The origin position is) and the second hand unit support portion 914 is located directly above the tray 52. During the movement, the positioning (visual alignment) of each IC element 100 is independently performed based on the image data captured by the first camera 600.

Simultaneously with the movement of the first and second hand unit support units 913 and 914 and the positioning of the IC device 100, the following operations are also performed. First, the first shuttle 4 is moved to the -X direction side, and the trays 43 are arranged in the +Y direction with respect to the inspection socket 6, and the trays 42 are arranged in the +Y direction with respect to the supply tray 2. Next, the IC device 100 stored in the supply tray 2 is transferred to the tray 42 by the supply robot 7, and the IC device 100 is housed in each of the pockets 421 of the tray 42. Then, in the same manner as described above, the placed state detecting device 200 detects the placed state of the IC device 100 accommodated in each of the pockets 421.

(Step 6)

Then, the first hand unit support unit 913 is lowered, and the IC element 100 held by each of the first hand units 92 is placed in each of the individual inspection sockets 61 for the inspection socket 6. At this time, each of the first hand units 92 presses the IC element 100 against the inspection individual socket 61 with a specific inspection pressure (pressure). Thereby, the external terminals of the IC device 100 and the probes provided in the individual inspection sockets 61 are electrically connected. In this state, the inspection control unit 101 of the control device 10 controls the individual sockets for each inspection. The IC component 100 in 61 performs inspection of electrical characteristics. When the inspection is completed, the first hand unit support portion 913 is raised, and the IC component 100 held by each of the first hand units 92 is taken out from the individual inspection socket 61.

Simultaneously with this operation (inspection of the IC device 100), each of the second hand units 93 supported by the second hand unit support unit 914 holds the IC component 100 housed in the tray 52, and then takes out the IC component from the tray 52. 100.

(Step 7)

Next, as shown in FIG. 17, the first and second hand unit support portions 913 and 914 are moved to the +Y direction side, and the first hand unit support portion 913 is formed directly above the tray 43 of the first shuttle 4 and The 2-hand unit support unit 914 is in a state of being directly above the inspection socket 6 (inspection origin position). During the movement, the positioning (visual alignment) of each IC element 100 is independently performed based on the image data captured by the second camera 500.

Simultaneously with the movement of the first and second hand unit support units 913 and 914, the following operations are also performed. First, the second shuttle 5 is moved to the -X direction side, and the trays 53 are arranged in the -Y direction with respect to the inspection socket 6, and the trays 52 are arranged in the +Y direction with respect to the supply tray 2. Next, the IC device 100 stored in the supply tray 2 is transferred to the tray 52 by the supply robot 7, and the IC device 100 is housed in each of the pockets 521 of the tray 52. Then, in the same manner as described above, the placed state detecting device 200 detects the placed state of the IC device 100 accommodated in each of the pockets 521.

(Step 8)

Next, as shown in FIG. 18, the second hand unit support unit 914 is lowered, and each second hand is used. The IC device 100 held by the unit 93 is disposed in each of the individual inspection sockets 61 for the inspection socket 6. Then, the inspection control unit 101 performs inspection of the electrical characteristics of the IC component 100 in each of the individual inspection sockets 61. When the inspection is completed, the second hand unit support portion 914 is raised, and the IC component 100 held by the second hand unit 93 is taken out from the individual inspection socket 61.

The following operations are performed simultaneously with such work. First, the IC device 100 in which the inspection of each of the first hand units 92 is completed is stored in each of the pockets 431 of the tray 43. Then, the first shuttle 4 is moved to the +X direction side, and the tray 42 is formed in the +Y direction with respect to the inspection socket 6 and is located immediately below each of the first hand units 92, and the tray 43 is formed with respect to the recovery. The trays 3 are arranged in the +Y direction. Then, each of the first hand units 92 holds the IC device 100 housed in the tray 42, and the recovery robot 8 transfers the IC component 100 stored in the tray 43 to the recovery tray 3.

(Step 9)

Then, as shown in FIG. 19, the first and second hand unit supporting portions 913 and 914 are moved to the -Y direction side, and the first hand unit supporting portion 913 is formed directly above the inspection socket 6 (inspection origin) Position) The second hand unit support portion 914 is located directly above the tray 52. At this time, similarly to the above-described step 5, the positioning of the IC device 100 held by the first hand unit 92 is performed.

Simultaneously with the movement of the first and second hand unit support units 913 and 914, the following operations are also performed. First, the first shuttle 4 is moved to the -X direction side, and the trays 43 are arranged in the +Y direction with respect to the inspection socket 6, and the trays 42 are arranged in the +Y direction with respect to the supply tray 2. Next, the IC device 100 stored in the supply tray 2 is transferred to the tray 42 by the supply robot 7, and the IC device 100 is housed in each of the pockets 421 of the tray 42. Then, in the same manner as described above, the placed state detecting device 200 detects the placed state of the IC device 100 accommodated in each of the pockets 421.

(Step 10)

Next, as shown in FIG. 20, the first hand unit support unit 913 is lowered, and each first hand is used. The IC device 100 held by the unit 92 is disposed in each of the individual inspection sockets 61 for the inspection socket 6. Then, the inspection control unit 101 performs inspection of the electrical characteristics of the IC component 100 in each of the individual inspection sockets 61. When the inspection is completed, the first hand unit support portion 913 is raised, and the IC component 100 held by each of the first hand units 92 is taken out from the individual inspection socket 61.

The following operations are performed simultaneously with such work. First, the IC device 100 that has been inspected by each of the second hand units 93 is stored in each of the pockets 531 of the tray 53. Next, the second shuttle 5 is moved to the +X direction side, and the tray 52 is formed in the -Y direction with respect to the inspection socket 6 and is located immediately below the second hand unit 93, and the tray 53 is formed with respect to the recovery tray. 3 states arranged in the +Y direction. Next, each of the second hand units 93 holds the IC device 100 housed in the tray 52, and the recovery robot 8 transfers the IC component 100 stored in the tray 53 to the recovery tray 3.

(Step 11)

From then on, repeat steps 7 through 10 above. Further, in the middle of the repetition, when all of the IC elements 100 accommodated in the supply tray 2 have moved to the first shuttle 4, the supply tray 2 moves outside the region S. Then, after the new IC device 100 is supplied to the supply tray 2 or exchanged with the other supply tray 2 in which the IC component 100 is stored, the supply tray 2 moves again in the region S. Similarly, in the middle of the repetition, if the IC component 100 is housed in all the pockets 31 of the recovery tray 3, the recovery tray 3 moves outside the region S. Then, the IC component 100 stored in the recovery tray 3 is removed, or the recovery tray 3 is replaced with another empty recovery tray 3, and then the recovery tray 3 is again moved into the region S.

According to this method, the inspection of the IC component 100 can be performed with higher efficiency. Specifically, the inspection robot 9 includes the first hand unit 92 and the second hand unit 93. For example, the IC that is being held by the first hand unit 92 (the same as the second hand unit 93) is being inspected by the inspection socket 6. In the state of the component 100, the second hand unit 93 simultaneously stores the IC component 100 that has been inspected in the tray 53, and waits for the next IC component 100 to be inspected. So, you can By using two hand units and performing different operations at the same time, it is possible to reduce the unnecessary time and efficiently perform inspection of the IC component 100.

<Second embodiment>

Next, a second embodiment of the inspection apparatus of the present invention will be described.

Fig. 21 is a plan view showing a hand unit for supplying a robot included in the inspection apparatus according to the second embodiment of the present invention, and Fig. 22 is a plan view showing a support portion of the hand unit shown in Fig. 21.

In the following, the inspection apparatus according to the second embodiment will be described focusing on differences from the above-described embodiment, and the description of the same matters will be omitted.

The inspection apparatus according to the second embodiment of the present invention is the same as the above-described first embodiment except that the configuration of the Y-direction moving mechanism included in the hand unit of the robot and the collection robot is different. The same components as those in the above-described first embodiment are denoted by the same reference numerals. Further, in the present embodiment, the configuration of the hand unit included in the supply robot and the hand unit included in the collection robot are the same, and therefore, the hand unit included in the supply robot will be described as a representative, and the collection robot has The hand unit is omitted.

As shown in FIG. 21, the Y-direction moving mechanism 77' included in the hand unit 7c of the present embodiment includes a first support portion unit 1100 provided on the first support portion 71, and a second support portion unit 1200. The third support portion unit 1300 is provided on the third support portion 73, the fourth support portion unit 1400 is disposed on the fourth support portion 74, and the drive mechanism 1500. It drives each unit 1100, 1200, 1300, 1400.

The drive mechanism 1500 includes a pair of pulleys (a first guide wheel for the first movement mechanism and a second guide wheel for the first movement mechanism) 1508 and 1509 which are provided on the second base 752 and a belt (for the first movement mechanism) 1 ring drive cable 1510, which is mounted between a pair of pulleys 1508, 1509; a spline shaft (power transmission shaft) 1501 coaxially fixed to the pulley 1509 and extending in the X direction; 4 spline nuts 1502 , 1503, 1504, 1505, which are set on the spline shaft The outer circumference of 1501; and a motor 1507 that rotates the pulley 1508.

The motor 1507 is fixed to the second base 752. When the motor 1507 is driven, its driving force is transmitted to the pulley 1509 via the belt 1510, and the spline shaft 1501 is rotated about its axis. In this manner, by fixing the motor 1507 to the base portion 75, the motor 1507 can be stably driven, and the weight of the first to fourth support portions 71 to 74 can be prevented from increasing.

The four spline nuts 1502, 1503, 1504, 1505 are axially movable relative to the spline shaft 1501, respectively, but the rotation about their axes is restricted. That is, if the spline shaft 1501 is rotated by the motor 1507, the spline nuts 1502, 1503, 1504, and 1505 are also rotated, respectively.

Further, among the spline nuts 1502, 1503, 1504, and 1505, the spline nut 1502 is rotatably supported by the first support portion 71, and the spline nut 1503 is rotatably supported by the second support portion 72. The spline nut 1504 is rotatably supported by the third support portion 73, and the spline nut 1505 is rotatably supported by the fourth support portion 74.

Further, as described above, the spline nuts 1503, 1504, and 1505 are freely movable in the axial direction (X direction) with respect to the spline shaft 1501, so that the Y-direction moving mechanism 77' does not hinder the second, third, and third The support portions 72, 73, and 74 are moved in the X direction by the X-direction moving mechanism 76.

As shown in FIG. 22, the first support unit 1100 includes a pair of pulleys (a third guide wheel for the first movement mechanism, a fourth guide wheel for the first movement mechanism) 1101, 1102, and a pair of pulleys 1101. A belt between 1102 (a second loop drive cable for the first moving mechanism) 1103. The pulley 1101 is coaxially fixed to the spline nut 1502 and rotates together with the spline nut 1502 about the axis of the spline shaft 1501. Further, the pulley 1102 is spaced apart from the pulley 1101 in the Y direction, and is rotatably supported by the first support portion 71. Further, a belt 1103 is placed between the pulleys 1101 and 1102. The belt 1103 has two regions 1103a and 1104b extending in the Y direction between the pulleys 1101 and 1102, and the first moving portion 715 is fixed to the belt 1103 in the region 1103a. Furthermore, the spline nut 1503 can also double as the pulley 1101.

The configuration of the second support unit unit 1200 and the configuration of the first support unit unit 1100 the same. The second support unit 1200 includes a pair of pulleys (a fifth guide wheel for the first movement mechanism, a sixth guide wheel for the first movement mechanism) 1201 and 1202, and a belt that is placed between the pair of pulleys 1201 and 1202 ( The first moving mechanism uses a third ring-shaped driving cable 1203. The pulley 1201 is coaxially fixed to the spline nut 1503 and rotates around the spline shaft 1501 together with the spline nut 1503. Further, the pulley 1202 is spaced apart from the pulley 1201 in the Y direction, and is rotatably supported by the second support portion 72. Further, a belt 1203 is placed between the pulleys 1201 and 1202. The belt 1203 has two regions 1203a and 1204b extending in the Y direction between the pulleys 1201 and 1202, and the second moving portion 725 is fixed to the belt 1203 in the region 1203a.

The configuration of the third support unit unit 1300 is also the same as the configuration of the first support unit unit 1100 described above. The third support unit 1300 includes a pair of pulleys (a seventh guide wheel for the first movement mechanism, an eighth guide wheel for the first movement mechanism) 1301, 1302, and a belt that is placed between the pair of pulleys 1301 and 1302 ( The first moving mechanism uses a fourth ring drive cable 1303. The pulley 1301 is coaxially fixed to the spline nut 1504 and rotates around the spline shaft 1501 together with the spline nut 1504. Further, the pulley 1302 is spaced apart from the pulley 1301 in the Y direction, and is rotatably supported by the third support portion 73. Further, a belt 1303 is placed between the pulleys 1301 and 1302. The belt 1303 has two regions 1303a and 1304b extending in the Y direction between the pulleys 1301 and 1302, and the third moving portion 735 is fixed to the belt 1303 in the region 1303a.

The configuration of the fourth support unit unit 1400 is also the same as the configuration of the first support unit unit 1100 described above. The fourth support unit 1400 includes a pair of pulleys (a first guide wheel for a first movement mechanism, a first guide wheel for a first movement mechanism) 1401, 1402, and a belt that is placed between the pair of pulleys 1401 and 1402 ( The first moving mechanism uses a fifth ring-shaped driving cable 1403. The pulley 1401 is coaxially fixed to the spline nut 1505 and rotates together with the spline nut 1505 around the spline shaft 1501. Further, the pulley 1402 is spaced apart from the pulley 1401 in the Y direction, and is rotatably supported by the fourth support portion 74. Moreover, between the pulleys 1401, 1402 A belt 1403 is provided. The belt 1403 has two regions 1403a and 1404b extending in the Y direction between the pulleys 1401 and 1402, and the fourth moving portion 745 is fixed to the belt 1403 in the region 1403a.

Furthermore, the pulleys 1101, 1102, 1201, 1202, 1301, 1302, 1401, 1402 have equal outer diameters, respectively.

In the Y-direction moving mechanism 77' having such a configuration, when the spline shaft 1501 is rotated by the motor 1507, the rotational force is transmitted to the respective pulleys 1101, 1201, 1301, and 1401, so that the respective belts 1103, 1203, and 1303 are provided. When the rotation of 1403 is performed, in the regions 1103a, 1203a, 1303a, and 1403a, the belts 1103, 1203, 1303, and 1403 are fed at equal speeds on the same side in the Y direction. Therefore, when the belts 1103, 1203, 1303, and 1403 are rotated, the respective moving portions 715, 725, 735, and 745 are integrally and equally moved in the Y direction with respect to the respective support portions 71, 72, 73, and 74.

According to the Y-direction moving mechanism 77 having such a configuration, the distance between the suction nozzles 713 and 718, the distance between the suction nozzles 723 and 728, the distance between the suction nozzles 733 and 738, and the suction nozzles 743 and 748 can be surely separated. The distances are kept equal to each other, and the distances are changed. Further, in the Y-direction moving mechanism 77, each of the support portions 71 to 74 is provided with a dedicated unit, so that the respective moving portions 715 to 745 can be more reliably moved in the Y direction.

In the second embodiment, the same effects as those of the first embodiment described above can be exerted.

Further, in the drive mechanism 1500, the spline shaft 1501 and the spline nut 1502 to 1505 are combined. However, the configuration of the drive mechanism 1500 is not particularly limited as long as the same function as the above is exerted.

Although the processor and the inspection apparatus of the present invention have been described above based on the embodiments shown in the drawings, the present invention is not limited thereto, and the configuration of each unit may be replaced with any configuration having the same function. Further, in the present invention, any other constituents may be added. Further, each embodiment can be combined as appropriate.

1‧‧‧Checking device

2‧‧‧Supply tray

3‧‧‧Recycling tray

4‧‧‧1st shuttle

5‧‧‧2nd shuttle

6‧‧‧Check socket

7‧‧‧Supply robot

7a‧‧‧Support box

7b‧‧‧ moving box

7c‧‧‧Hand unit

8‧‧‧Recycling robot

8a‧‧‧Support box

8b‧‧‧ moving box

8c‧‧‧Hand unit

9‧‧‧Check robot

10‧‧‧Control device

21‧‧‧ recess

23‧‧‧ Track

31‧‧‧ recess

33‧‧‧ Track

41‧‧‧Base member

42‧‧‧Tray

43‧‧‧Tray

44‧‧‧ Track

51‧‧‧Base member

52‧‧‧Tray

53‧‧‧Tray

54‧‧‧ Track

61‧‧‧Inspection with individual sockets

92‧‧‧Hand unit

93‧‧‧Hand unit

100‧‧‧IC components

101‧‧‧Check Control Department

102‧‧‧Drive Control Department

421‧‧‧ recess

431‧‧‧ recesses

500‧‧‧2nd camera

521‧‧‧ recess

531‧‧‧ recess

600‧‧‧1st camera

911‧‧‧ box

912‧‧‧ box

913‧‧‧Hand Unit Support

914‧‧‧Hand Unit Support

S‧‧‧ area

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

Claims (11)

A processor, wherein when the three directions orthogonal to each other are the first direction, the second direction, and the third direction, the processor includes: a base; and a first support portion supported by the base The second support portion is supported to be movable in the first direction with respect to the base portion, and the third support portion is supported to be movable in the first direction with respect to the base portion, and is capable of being movable in the first direction 2 The amount of movement of the support part is more mobile. The processor of claim 1, wherein the amount of movement of the third support portion is twice the amount of movement of the second support portion in the first direction. The processor of claim 1 or 2, further comprising: a second moving mechanism that moves the second support portion in the first direction and allows the third support portion to move by the second support portion The amount of movement twice the amount moves in the first direction described above. The processor of claim 1 or 2, wherein the second moving mechanism includes a second guiding mechanism for the second moving mechanism and a second guiding wheel for the second moving mechanism that are spaced apart from each other in the first direction; and a second moving mechanism a ring-shaped driving cable that is disposed between the first guiding mechanism for the second moving mechanism and the second guiding wheel for the second moving mechanism; and a driving source for the second moving mechanism that uses the second moving mechanism At least one of the guide wheel and the second guide wheel for rotating the second movement mechanism rotates the second movement mechanism by the ring drive cable; and at least the second movement mechanism first guide wheel and the second movement mechanism The second guide wheel is rotatably supported on the base portion, respectively. The processor of claim 4, wherein the second moving mechanism first guiding wheel and the second moving mechanism second guiding wheel comprise a small diameter pulley and a large diameter pulley having a diameter twice the diameter of the small diameter pulley; The small-diameter pulley frame of each of the first guide wheel for the second moving mechanism and the second guide wheel for the second moving mechanism is provided with a first ring-shaped driving cable for the second moving mechanism, and the first guiding device for the second moving mechanism is for the first guiding device. a second ring-shaped driving cable for the second moving mechanism is disposed on the large-diameter pulley frame of each of the second moving mechanism second guiding wheels; and the second supporting portion is coupled to the second ring-shaped driving cable for the second moving mechanism; The third support unit is coupled to the second loop drive cable for the second movement mechanism. The processor of claim 5, further comprising: a first component holding portion movably provided on the first support portion and configured to be movable in the third direction with respect to the base portion; the first moving portion And movably disposed on the first support portion and movable in the second direction with respect to the base portion; the second component holding portion is movably disposed on the first moving portion, and is detachable from the first movable portion The base portion moves in the third direction; the third component holding portion is movably provided on the second support portion and movable in the third direction with respect to the base portion; and the second moving portion is movably Provided on the second support portion and movable in the second direction with respect to the base portion; the fourth component holding portion is movably provided on the second moving portion, and is movable along the base portion Moving in three directions; a fifth component holding portion movably provided on the third support portion and movable in the third direction with respect to the base portion; The third moving portion is movably provided on the third support portion and movable in the second direction with respect to the base portion, and the sixth component holding portion is movably provided on the third moving portion. And moving in the third direction relative to the base. The processor of claim 6, further comprising: a first moving mechanism that moves the first moving portion and the second moving portion in the second direction. The processor of claim 7, wherein at least a portion of said first moving mechanism is supported on said base. The processor of claim 8, wherein the first moving mechanism includes a first guiding mechanism for the first moving mechanism and a second guiding wheel for the first moving mechanism that are spaced apart from each other in the second direction; a ring-shaped driving cable that is disposed between the first moving mechanism first guiding wheel and the first moving mechanism second guiding wheel; and a first moving mechanism driving source that makes the first moving mechanism At least one of the guide wheel and the second guide wheel for rotating the first movement mechanism rotates the first movement mechanism by the first ring drive cable; and at least the first guide wheel for the first movement mechanism and the first The moving mechanism is rotatably supported by the base portion by the second guide wheels. The processor of claim 9, wherein the first moving unit and the second moving unit are directly or indirectly connected to the first moving mechanism first first driving cable, and the first moving mechanism is used When the ring drive cable rotates, the first moving portion moves in the second direction with respect to the first support portion, and the second moving portion moves in the second direction with respect to the second support portion. The processor of claim 10, wherein the first component holding portion, the second component holding portion, the third component holding portion, and the fourth component holding portion each have a suction nozzle that holds an object by suction.