CN203794200U - Conveying device and checking device - Google Patents

Abstract

The utility mode provides a conveying device and a checking device. The conveying device is provided with a base portion, a first bearing portion fixed to the base portion, an adsorption nozzle borne on the first bearing portion, a first moving portion capable of moving relative to the first bearing portion in the Y direction, an adsorption nozzle borne on the first moving portion, a second bearing portion capable of moving on the base portion in the X direction, an adsorption nozzle borne on the second bearing portion, a second moving portion capable of moving relative to the second bearing portion in the Y direction, an adsorption nozzle borne on the second moving portion, a Y-direction moving mechanism enabling the first moving portion and the second moving portion to move in the Y direction in an integrated mode and the separation distance between the adsorption nozzles to change, and an X-direction moving mechanism enabling the separation distance between the first bearing portion and the second bearing portion to change.

Description

Feedway and testing fixture

The application is that Chinese application number is dividing an application (name of original application is called " feedway and testing fixture ", and the applying date of original application is on June 28th, 2013) of 201320381990.9 utility application.

Technical field

The utility model relates to feedway and testing fixture.

Background technology

In the past, be known to such as the testing fixture that checks the electrical specification of the electronic units such as IC device.

Above-mentioned testing fixture is configured to, and from supply tray, to inspection portion, supplies with electronic unit, to being fed into the electrical specification of the electronic unit of inspection portion, checks, after this inspection finishes, electronic unit is recovered to recycling pallet from inspection portion.In addition, the electronic unit that is accommodated in supply tray is temporarily transferred to shuttle, by shuttle, is transported near inspection portion.On shuttle, be provided with pallet, this pallet is formed with groove (pocket), at this groove, takes in electronic unit.

The conveying of the electronic unit from supply tray to pallet is carried out by supply equipment people.Supply equipment people has a plurality of pick-up nozzles, utilize each pick-up nozzle to adsorb the electronic unit in the groove that keeps supply tray, and discharge this electronic unit after the groove of kept electronic unit being transferred to pallet, thus electronic unit is transported to pallet from supply tray.As this supply equipment people, for example, be known to the supply equipment people that patent documentation 1 is recorded.

Yet the spacing (position relationship each other) that sets of a plurality of pick-up nozzles of general supply equipment people is fixed, so can produce following problem.That is the spacing that sets that, is arranged at a plurality of grooves of supply tray not necessarily equates with the spacing that sets that is arranged at a plurality of grooves of pallet.Suppose in the situation that be arranged at supply tray a plurality of grooves set spacing from be arranged at pallet a plurality of grooves to set spacing different, the electronic unit unification that is held in each pick-up nozzle cannot be discharged in the groove that is arranged at pallet, need to carry out in order singly with respect to the contraposition of groove and electronic unit is discharged in this groove for each pick-up nozzle.In said method, can produce following problem: the conveying of the electronic unit from supply tray to pallet is spended time too, the inspection that cannot be well on.

In order to address the above problem; be known to the such robot that sets spacing that can change pick-up nozzle of patent documentation 1; in this structure; due to the rotation of parts handle part; so need to be for the mechanism of the rotation of correcting part handle part; conventionally can cause components number to increase, according to circumstances different, there is the problem that causes robot to maximize.

Patent documentation 1: TOHKEMY 2006-17575 communique

Utility model content

The purpose of this utility model is: in can making the feedway that sets spacing variation of parts maintaining part, provide feedway and testing fixture that components number is few.

The utility model completes in order to solve at least a portion of above-mentioned problem, can realize by following mode or application examples.

Above-mentioned purpose realizes by following the utility model.

Feedway of the present utility model is characterised in that, when three mutually orthogonal directions are made as to first direction, second direction and third direction, above-mentioned feedway has: base portion; The first support, this first support is fixed in above-mentioned base portion, and when action, above-mentioned the first support is constant with respect to above-mentioned base portion relative position; First component maintaining part, this first component maintaining part is supported in above-mentioned the first support, is arranged at above-mentioned third direction, to move with respect to above-mentioned the first support, and holding member; The first moving part, this first moving part is supported in above-mentioned the first support, can in above-mentioned second direction, move with respect to above-mentioned the first support; Second component maintaining part, this second component maintaining part is supported in above-mentioned the first moving part, with respect to above-mentioned first component maintaining part, be positioned at above-mentioned second direction, and be arranged at above-mentioned third direction, to move with respect to above-mentioned the first moving part, and holding member; The second support, this second support is supported in above-mentioned base portion, with respect to above-mentioned the first supporting portion, in above-mentioned first direction, and can at above-mentioned first direction, move with respect to above-mentioned base portion; The 3rd parts maintaining part, the 3rd parts maintaining part is supported in above-mentioned the second support, is arranged at above-mentioned third direction, to move with respect to above-mentioned the second support, and holding member; The second moving part, this second moving part is supported in above-mentioned the second support, can in above-mentioned second direction, move with respect to above-mentioned the second support; The 4th parts maintaining part, the 4th parts maintaining part is supported in above-mentioned the second moving part, with respect to above-mentioned the 3rd parts maintaining part, be positioned at above-mentioned second direction, and be arranged at above-mentioned third direction, to move with respect to above-mentioned the second moving part, and holding member; The first travel mechanism, this first travel mechanism moves above-mentioned the first moving part and above-mentioned the second moving part integratedly in above-mentioned second direction, above-mentioned first component maintaining part and above-mentioned second component maintaining part are changed in the distance one of leaving of above-mentioned second direction in the leave distance and above-mentioned the 3rd parts maintaining part and above-mentioned the 4th parts maintaining part of above-mentioned second direction; And second travel mechanism, this second travel mechanism makes above-mentioned the second support move at above-mentioned first direction, makes above-mentioned the first support and above-mentioned the second support in the change of distance of leaving of above-mentioned first direction.

By forming said structure, form few feedway of components number.

In feedway of the present utility model, be preferably formed for: at least a portion of above-mentioned the first travel mechanism is supported in above-mentioned base portion.

Thus, the structure of device becomes simple.

In feedway of the present utility model, be preferably formed for: above-mentioned the first travel mechanism has: the first guide wheel and the first travel mechanism the second guide wheel for the first travel mechanism, they leave in above-mentioned second direction; The first annular drives rope for the first travel mechanism, this first travel mechanism with the first annular drive restrict hang on above-mentioned the first travel mechanism with the first guide wheel and above-mentioned the first travel mechanism with between the second guide wheel; And the first travel mechanism's drive source, this first travel mechanism makes above-mentioned the first travel mechanism rotate with at least one party of the second guide wheel with the first guide wheel and above-mentioned the first travel mechanism with drive source, thereby make above-mentioned the first travel mechanism drive rope rotation by the first annular, at least above-mentioned the first travel mechanism is supported as rotating by above-mentioned base portion respectively with the second guide wheel with the first guide wheel and above-mentioned the first travel mechanism.

Thus, the structure of the first travel mechanism becomes simple.In addition, can realize the minimizing of first travel mechanism's components number, so can realize the miniaturization of following in this.

In feedway of the present utility model, be preferably formed and by the first annular, drive rope link with above-mentioned the first travel mechanism directly or indirectly respectively for: above-mentioned the first moving part and above-mentioned the second moving part, be accompanied by above-mentioned the first travel mechanism and by the first annular, drive the rotation of rope, above-mentioned the first moving part moves in above-mentioned second direction with respect to above-mentioned the first support, and above-mentioned the second moving part moves in above-mentioned second direction with respect to above-mentioned the second support.

Thus, can be simply and make reliably the 4th parts maintaining part that is fixed in the second component maintaining part of the first moving part and is fixed in the second moving part move in second direction.

In feedway of the present utility model, be preferably formed for: above-mentioned the first travel mechanism also has: the 3rd guide wheel and the 4th guide wheel for the first travel mechanism for the first travel mechanism, they are fixed on above-mentioned the first support in the mode that can rotate, and leave in above-mentioned second direction; The second annular drives rope for the first travel mechanism, this first travel mechanism with the second annular drive restrict hang on above-mentioned the first travel mechanism with the 3rd guide wheel and above-mentioned the first travel mechanism with between the 4th guide wheel; Transfer part, this transfer part links the first guide wheel and the 3rd guide wheel for above-mentioned the first travel mechanism for above-mentioned the first travel mechanism, and above-mentioned the first travel mechanism is delivered to the 3rd guide wheel for above-mentioned the first travel mechanism with the rotation of the first guide wheel; And connecting part, this connecting part links above-mentioned the first travel mechanism and drives rope and above-mentioned the first travel mechanism to drive rope by the second annular by the first annular, and above-mentioned the first moving part and above-mentioned the second moving part link with above-mentioned connecting part respectively.

Thus, can make the first moving part and the second moving part balancedly in second direction, move.

In feedway of the present utility model, be preferably formed for: above-mentioned the first travel mechanism is supported in above-mentioned base portion with drive source.

Thus, the structure of device becomes simple.

In feedway of the present utility model, be preferably formed for: at least a portion of above-mentioned the second travel mechanism is supported in above-mentioned base portion.

Thus, the structure of device becomes simple.

In feedway of the present utility model, be preferably formed for: above-mentioned the second travel mechanism has: the first guide wheel and the second travel mechanism the second guide wheel for the second travel mechanism, they leave at above-mentioned first direction; The second travel mechanism drives rope by annular, this second travel mechanism with annular drive restrict hang on above-mentioned the second travel mechanism with the first guide wheel and above-mentioned the second travel mechanism with between the second guide wheel; And the second travel mechanism's drive source, this second travel mechanism makes above-mentioned the second travel mechanism rotate with at least one party of the second guide wheel with the first guide wheel and above-mentioned the second travel mechanism with drive source, thereby make above-mentioned the second travel mechanism use annular to drive rope rotation, at least above-mentioned the second travel mechanism is supported as rotating by above-mentioned base portion respectively with the second guide wheel with the first guide wheel and above-mentioned the second travel mechanism.

Thus, the structure of the second travel mechanism becomes simple.

In feedway of the present utility model, be preferably formed for: above-mentioned the first support and above-mentioned the second support are respectively extend at above-mentioned second direction and above-mentioned third direction both direction tabular.

Thus, miniaturization that can implement device.

In feedway of the present utility model, be preferably formed for: above-mentioned first component maintaining part, above-mentioned second component maintaining part, above-mentioned the 3rd parts maintaining part and above-mentioned the 4th parts maintaining part have respectively the pick-up nozzle that carrys out holding object by absorption.

Thus, can be with simple structure holding object.

Feedway of the present utility model is characterised in that, when mutually orthogonal both direction is made as to first direction and second direction, above-mentioned feedway has: first component maintaining part, this first component maintaining part holding member; Second component maintaining part, this second component maintaining part is positioned at above-mentioned second direction with respect to above-mentioned first component maintaining part, and holding member; The 3rd parts maintaining part, the 3rd parts maintaining part is positioned at above-mentioned first direction with respect to above-mentioned first component maintaining part, and holding member; And the 4th parts maintaining part, the 4th parts maintaining part is positioned at above-mentioned second direction with respect to above-mentioned the 3rd parts maintaining part, and holding member, above-mentioned the 3rd parts maintaining part and above-mentioned the 4th parts maintaining part move at above-mentioned first direction with respect to above-mentioned first component maintaining part and above-mentioned second component maintaining part integratedly, and above-mentioned second component maintaining part and above-mentioned the 4th parts maintaining part move in above-mentioned second direction with respect to above-mentioned first component maintaining part and above-mentioned the 3rd parts maintaining part integratedly.

By said structure, form the few feedway of components number.

The inspection portion that testing fixture of the present utility model has above-mentioned feedway and carries out the inspection of object, is configured to and utilizes above-mentioned feedway that above-mentioned object is transported to above-mentioned inspection portion.

Thus, obtain the testing fixture that components number is few.

Testing fixture of the present utility model is characterised in that, when three mutually orthogonal directions are made as to first direction, second direction and third direction, above-mentioned testing fixture has: base portion; The first support, this first support is fixed in above-mentioned base portion, and when action, above-mentioned the first support is constant with respect to above-mentioned base portion relative position; First component maintaining part, this first component maintaining part is supported in above-mentioned the first support, is arranged at above-mentioned third direction, to move with respect to above-mentioned the first support, and holding member; The first moving part, this first moving part is supported in above-mentioned the first support, can in above-mentioned second direction, move with respect to above-mentioned the first support; Second component maintaining part, this second component maintaining part is supported in above-mentioned the first moving part, with respect to above-mentioned first component maintaining part, be positioned at above-mentioned second direction, and be arranged at above-mentioned third direction, to move with respect to above-mentioned the first moving part, and holding member; The second support, this second support is supported in above-mentioned base portion, with respect to above-mentioned the first supporting portion, in above-mentioned first direction, and can at above-mentioned first direction, move with respect to above-mentioned base portion; The 3rd parts maintaining part, the 3rd parts maintaining part is supported in above-mentioned the second support, is arranged at above-mentioned third direction, to move with respect to above-mentioned the second support, and holding member; The second moving part, this second moving part is supported in above-mentioned the second support, can in above-mentioned second direction, move with respect to above-mentioned the second support; The 4th parts maintaining part, the 4th parts maintaining part is supported in above-mentioned the second moving part, with respect to above-mentioned the 3rd parts maintaining part, be positioned at above-mentioned second direction, and be arranged at above-mentioned third direction, to move with respect to above-mentioned the second moving part, and holding member; The first travel mechanism, this first travel mechanism moves above-mentioned the first moving part and above-mentioned the second moving part integratedly in above-mentioned second direction, above-mentioned first component maintaining part and above-mentioned second component maintaining part are changed in the distance one of leaving of above-mentioned second direction in the leave distance and above-mentioned the 3rd parts maintaining part and above-mentioned the 4th parts maintaining part of above-mentioned second direction; The second travel mechanism, this second travel mechanism makes above-mentioned the second support move at above-mentioned first direction, makes above-mentioned the first support and above-mentioned the second support in the change of distance of leaving of above-mentioned first direction; And inspection portion, this inspection portion checks each parts that kept by above-mentioned first component maintaining part, above-mentioned second component maintaining part, above-mentioned the 3rd parts maintaining part and above-mentioned the 4th parts maintaining part.

Thus, obtain the testing fixture that components number is few.

Accompanying drawing explanation

Fig. 1 means the concise and to the point birds-eye view of the first embodiment of testing fixture of the present utility model.

Fig. 2 is the block diagram of the supply equipment people's that has of the testing fixture shown in Fig. 1 hand unit.

Fig. 3 is the birds-eye view of the supply equipment people's that has of the testing fixture shown in Fig. 1 hand unit.

Fig. 4 is the birds-eye view of the first support of having of the hand unit shown in Fig. 2.

Fig. 5 is the birds-eye view of the second support of having of the hand unit shown in Fig. 2.

Fig. 6 is the birds-eye view of the 3rd support that has of the hand unit shown in Fig. 2.

Fig. 7 is the birds-eye view of the 4th support that has of the hand unit shown in Fig. 2.

Fig. 8 means the birds-eye view of the directions X travel mechanism that the hand unit shown in Fig. 2 has.

Fig. 9 means the birds-eye view of the Y-direction travel mechanism that the hand unit shown in Fig. 2 has.

Figure 10 means the birds-eye view of the Y-direction travel mechanism that the hand unit shown in Fig. 2 has.

Figure 11 is the block diagram of the hand unit of robot for the inspection that has of the testing fixture shown in Fig. 1.

Figure 12 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 13 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 14 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 15 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 16 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 17 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 18 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 19 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 20 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

Figure 21 means the birds-eye view of the supply equipment people's that the related testing fixture of the second embodiment of the present utility model has hand unit.

Figure 22 is the birds-eye view of the support that has of the hand unit shown in Figure 21.

The specific embodiment

Below, the embodiment shown in reference to the accompanying drawings at length describes having applied the testing fixture (testing fixture of the present utility model) of feedway of the present utility model.

The first embodiment

Fig. 1 means the concise and to the point birds-eye view of the first embodiment of testing fixture of the present utility model, Fig. 2 is the block diagram of the supply equipment people's that has of the testing fixture shown in Fig. 1 hand unit, Fig. 3 is the birds-eye view of the supply equipment people's that has of the testing fixture shown in Fig. 1 hand unit, Fig. 4 is the birds-eye view of the first support of having of the hand unit shown in Fig. 2, Fig. 5 is the birds-eye view of the second support of having of the hand unit shown in Fig. 2, Fig. 6 is the birds-eye view of the 3rd support that has of the hand unit shown in Fig. 2, Fig. 7 is the birds-eye view of the 4th support that has of the hand unit shown in Fig. 2, Fig. 8 means the birds-eye view of the directions X travel mechanism that the hand unit shown in Fig. 2 has, Fig. 9 and Figure 10 mean the birds-eye view of the Y-direction travel mechanism that the hand unit shown in Fig. 2 has, Figure 11 is the block diagram of the hand unit of robot for the inspection that has of the testing fixture shown in Fig. 1, Figure 12～Figure 20 is to utilizing the testing fixture shown in Fig. 1 to check the birds-eye view that the step of electronic unit describes.

In addition, below for convenience of explanation, as shown in Figure 1, three mutually orthogonal axles are made as to X-axis (the first axle), Y-axis (the second axle) and Z axis (the 3rd axle).In addition, the direction parallel with X-axis is called to " directions X (first direction) ", the direction parallel with Y-axis is called " Y-direction (second direction) ", and the direction parallel with Z axis is called " Z direction ".In addition, all directions in directions X, Y-direction and Z direction, are called "+" by arrow front, and arrow base end side is called "-".

Liquid Crystal Display), CIS (Contact Image Sensor: the electrical specification of test component (electronic unit) 100 checks, tests the device of use contact-type image sensor) etc. testing fixture 1 shown in Fig. 1 is such as to IC device (IC chip), LCD (Liquid Crystal Display:.In addition,, take for convenience of explanation and use IC device to describe as representative as the situation of test component.

Testing fixture 1 has: supply tray 2, recycling pallet 3, the first shuttle 4, the second shuttle 5, check with robot 9, the first photographic camera 600, the second photographic camera 500 and control setup 10 that each part mentioned above is controlled for socket (inspection portion) 6, supply equipment people 7, recycling machine people 8, inspection.

In this testing fixture 1, in each part mentioned above except checking by the structure socket 6, be supply tray 2, recycling pallet 3, the first shuttle 4, the second shuttle 5, supply equipment people 7, recycling machine people 8, check the feedway (feedway of the present utility model) that forms the conveying of execution IC device 100 with robot 9, the first photographic camera 600, the second photographic camera 500 and control setup 10.In addition, the structure of feedway is not limited to this, can omit as required at least one in each part mentioned above, also can add other structure (for example hot plate, chamber).

In addition, testing fixture 1 has the pedestal 11 that carries each part mentioned above and the not shown Safety hood that covers pedestal 11 to take in the mode of each part mentioned above, the first shuttle 4, the second shuttle 5, check with socket 6, supply equipment people 7, recycling machine people 8, inspection and with robot 9, the first photographic camera 600 and the second photographic camera 500, be configured in the inner side (hereinafter referred to as " region S ") of this Safety hood, and supply tray 2 and recycling pallet 3 are configuring in the mode of the inside and outside movement of region S.

Below, successively each part mentioned above is at length described.

1. supply tray

Supply tray 2 is for the IC device 100 checking is transported to the pallet in the S of region from the S of region.As shown in Figure 1, supply tray 2 is tabular, and surface is formed with a plurality of for loading the groove 21 of IC device 100 to be the mode of ranks shape in directions X and Y-direction thereon.

Above-mentioned supply tray is placed at not shown bench board mobile on guide rail 23 for 2 years, and above-mentioned guide rail 23 extends in Y-direction to cross over the inside and outside mode of region S.And, for example utilizing and take the not shown driver train that linear motor is drive source and make above-mentioned movable workbench, supply tray 2 can move back and forth in ± Y-direction along guide rail 23 thus.Therefore, can repeatedly move as follows: the supply tray 2 of taking in IC device 100 is loaded to the bench board outside being positioned at region S, supply tray 2 is moved in the S of region together with bench board, from supply tray 2, take off whole IC devices 100, again make supply tray 2 towards region S, move together with bench board outward.

2. recycling pallet

Recycling pallet 3 is check complete IC device 100 and it be transported in the S of region to the pallet the S of region for taking in.As shown in Figure 1, recycling pallet 3 is tabular, and surface is formed with a plurality of for loading the groove 31 of IC device 100 to be the mode of ranks shape in directions X and Y-direction thereon.

Above-mentioned recycling pallet is placed at not shown bench board mobile on guide rail 33 for 3 years, and above-mentioned guide rail 33 extends in Y-direction to cross over the inside and outside mode of region S.And, for example utilize and take the not shown driver train that linear motor is drive source and make above-mentioned movable workbench, recycling pallet 3 can move back and forth in ± Y-direction along guide rail 33 thus.Therefore, in the S of region, can repeatedly move as follows: by checking that the complete IC device 100 of taking in is accommodated in recycling pallet 3, recycling pallet 3 is moved to outside the S of region, change the recycling pallet on bench board 3 into empty pallet, again make recycling pallet 3 move in the S of region.

Above-mentioned recycling pallet 3 arranges in the mode of leaving with respect to above-mentioned supply tray 2 court+directions Xs, and the first shuttle 4, the second shuttle 5 and inspection are configured between supply tray 2 and recycling pallet 3 with socket 6.

3. the first shuttle

The first shuttle 4 is for being further transported to and checking with near socket 6 being transported to IC device 100 in the S of region by supply tray 2, and by by check with the complete IC device 100 of inspection after socket 6 inspections be transported to recycling pallet 3 near.

As shown in Figure 1, the first shuttle 4 has base component 41 and two pallets 42,43 that are fixed in base component 41.Above-mentioned two pallets 42,43 are at directions X spread configuration.In addition, at pallet 42,43 respectively to arrange four and arrange the mode of two in Y-direction and be ranks shape and form eight grooves 421,431 that are useful on mounting IC device 100 at directions X (rectangular).

The pallet 42 that is positioned at supply tray 2 sides in pallet 42,43 is for shifting and take in the pallet of the IC device 100 that is incorporated in supply tray 2, and the pallet 43 that is positioned at recycling pallet 3 sides is the pallets that are through with checking the IC device 100 after the electrical specification of carrying out with socket 6 checks for taking in.That is, pallet 42 is for taking in the pallet of unchecked IC device 100, and pallet 43 is the pallets that check complete IC device 100 for taking in.

The base component 41 of above-mentioned the first shuttle 4 is supported in the guide rail 44 extending at directions X, can utilize for example to take not shown driver train that linear motor is drive source above-mentioned the first shuttle 4 is moved back and forth at ± directions X along guide rail 44.And, can form make the first shuttle 4 court-directions X side shiftings and make pallet 42 with respect to supply tray 2 be arranged in+Y-direction side and pallet 43 with respect to check with the state of be arranged in+Y-direction of socket 6 side and make the first shuttle 4 court+directions X side shiftings and make pallet 43 with respect to recycling pallet 3 be arranged in+Y-direction side and pallet 42 with respect to inspection the state by be arranged in+Y-direction of socket 6 side.

4. the second shuttle

The second shuttle 5 has function and the structure identical with above-mentioned the first shuttle 4.That is, the second shuttle 5 is for being further transported to and checking with near socket 6 being transported to IC device 100 in the S of region by supply tray 2, and by by check with the complete IC device 100 of inspection after socket 6 inspections be transported to recycling pallet 3 near.

As shown in Figure 1, the second shuttle 5 has base component 51 and two pallets 52,53 that are fixed on base component 51.These two pallets 52,53 are arranged and are arranged at directions X.In addition, at pallet 52,53 respectively to arrange four and arrange the mode of two in Y-direction and be ranks shape and form eight grooves 521,531 that are useful on mounting IC device 100 at directions X.

The pallet 52 that is positioned at supply tray 2 sides in pallet 52,53 is for shifting and take in the pallet of the IC device 100 that is incorporated in supply tray 2, and the pallet 43 that is positioned at recycling pallet 3 sides is the pallets that are through with checking the IC device 100 after the electrical specification of carrying out with socket 6 checks for taking in.That is, pallet 52 is for taking in the pallet of unchecked IC device 100, and pallet 53 is the pallets that check complete IC device 100 for taking in.

The base component 51 of above-mentioned the second shuttle 5 is supported in the guide rail 54 extending at directions X, can utilize for example to take not shown driver train that linear motor is drive source above-mentioned the second shuttle 5 is moved back and forth at ± directions X along guide rail 54.Can form thus make the second shuttle 5 court-directions X side shiftings and make pallet 52 with respect to supply tray 2 be arranged in+Y-direction side and pallet 53 with respect to check with the state of be arranged in-Y-direction of socket 6 side and make the second shuttle 5 court+directions X side shiftings and make pallet 53 with respect to recycling pallet 3 be arranged in+Y-direction side and pallet 52 with respect to inspection the state by be arranged in-Y-direction of socket 6 side.

In addition, the second shuttle 5 arranges in the mode of leaving with respect to above-mentioned the first shuttle 4 court-Y-directions, checks and is configured between the first shuttle 4 and the second shuttle 5 with socket 6.

5. inspection socket

Check with socket (inspection portion) the 6th, for checking the socket of the electrical specification of IC device 100.

Above-mentioned inspection with socket 6 have eight inspections for configuring IC device 100 with 61, eight inspections of individual receptacle by individual receptacle 61 to arrange four and arrange in the mode of two of Y-direction arrangements at directions X.In addition, eight inspections are used the arrangement pitches of individual receptacle 61 and the arrangement pitches of eight grooves that form at each pallet 42,43,52,53 about equally.Can successfully carry out thus IC device 100 at pallet 42,43,52,53 and check with the conveying between individual receptacle 61.

Although not shown, in each inspection, by individual receptacle 61, be provided with a plurality of from the outstanding probe in its bottom.Above-mentioned a plurality of probe respectively by spring etc. towards the top application of force.When IC device 100 is configured in inspection by individual receptacle 61, a plurality of probes contact with the outside terminal that this IC device 100 has.Thus, via probe, make IC device 100 become with control setup 10 (inspection control part 101 described later) state being electrically connected to, become the state of the inspection (test) that can carry out the electrical specification of IC device 100.

Above-mentioned inspection is fixed on pedestal 11 freely with socket 6 handling.Therefore, can according to the inspection (test) that will carry out, change the outfit and check with socket 6 simply, or the socket 6 for inspection that changes the outfit and match according to the size of IC device 100, shape.

6. the first photographic camera

The first photographic camera 600 is arranged at the first shuttle 4 and checks with between socket 6.As described later, above-mentioned the first photographic camera 600 the first-hand unit 92 that maintains unchecked IC device 100 from above by time take the device mark 941 that IC device 100 and first-hand unit 92 have.

7. the second photographic camera

The second photographic camera 500 has the function identical with above-mentioned the first photographic camera 600.Above-mentioned the second photographic camera 500 is arranged at the second shuttle 5 and checks with between socket 6.As described later, the second photographic camera 500 the second-hand unit 93 that maintains unchecked IC device 100 from above by time take the device mark that IC device 100 and second-hand unit 93 have.

8. supply equipment people

Supply equipment people 7 is delivered to the IC device 100 that is incorporated in supply tray 2 robot of pallet 42,52.

As shown in Figure 1, supply equipment people 7 have be supported in pedestal 11 bearer frame 7a, be supported in bearer frame 7a and can be with respect to bearer frame 7a at ± movable frame 7b that Y-direction moves back and forth and be supported in movable frame 7b and can be with respect to movable frame 7b at ± hand unit 7c that X axis moves back and forth.

At bearer frame 7a, be formed with the guide rail extending along Y-direction, movable frame 7b moves back and forth in Y-direction along this guide rail.In addition, be formed with the guide rail extending along directions X on movable frame 7b, hand unit 7c moves back and forth at directions X along this guide rail.In addition, for example by take not shown driver train that linear motor is drive source, carry out movable frame 7b movement with respect to movable frame 7b with respect to the movement of bearer frame 7a, hand unit 7c.

Below, in conjunction with Fig. 2～Figure 10 opponent unit 7c, at length describe.In addition,, in each figure of Fig. 2～Figure 10, omit for convenience of explanation the diagram of a part of structure.

As shown in FIG. 2 and 3, hand unit 7c has base portion 75, and this base portion 75 is supported in movable frame 7b in the mode that can move at directions X with respect to movable frame 7b.In addition, " base portion " is supporting other parts (for example the first support 71～four support 74 described later) the position that forms a module, is the basic part as hand unit 7c.

Above-mentioned base portion 75 has: be the first tabular pedestal 751, it extends and have thickness in Z direction in XY plane; With the second pedestal 752, its end by-directions X side from the first pedestal 751 towards below (Z direction) extend outstandingly, in ZY plane, extend and there is thickness at directions X.That is, base portion 75 is formed on the profile of crooked L font midway.In two pedestals 751,752, at the first pedestal 751, be fixed with at least a portion of the parts of formation directions X described later travel mechanism 76, at the second pedestal 752, be fixed with at least a portion of the parts of formation Y-direction described later travel mechanism 77.

In addition, hand unit 7c has four supports that are supported in base portion 75, particularly, has the first support 71, the second support 72, the 3rd support 73 and the 4th support 74.These four supports from-directions X side court+directions X according to the order spread configuration of the 3rd support 73, the second support 72, the first support 71, the 4th support 74.In addition, above-mentioned " supporting " refer to prevent that the state falling from base portion 75 from linking.

In addition, the first support 71 in four supports 71～74 is fixed in the first pedestal 751.In addition, above-mentioned " fixing " refers to that above-mentioned the first support 71 is constant with respect to the relative position of base portion 75 when action.

Other the second support 72, the 3rd support 73, the 4th support 74 can move along directions X with respect to the first pedestal 751 respectively.In the present embodiment, at the lower surface of the first pedestal 751, be formed with the guide rail 753 extending along directions X, at this guide rail 753, dispose three guiding pieces 754,755,756 that can move on guide rail 753.And, the second support 72 is fixed on to guiding piece 754, the 3rd support 73 is fixed on to guiding piece 755, the 4th support 74 is fixed on to guiding piece 756.By said structure, the second support 72, the 3rd support 73, the 4th support 74 can move at directions X with respect to base portion 75.

In addition, the first support 71, the second support 72, the 3rd support 73, the 4th support 74 are respectively in the extension of YZ plane and have the tabular of thickness at directions X.Like this, by each support 71～74 being formed to extend in YZ plane tabular, can be by support 71～74 with narrower spacing at directions X spread configuration.Therefore, can realize the miniaturization of hand unit 7c, and a plurality of pick-up nozzles described later can be configured with narrower spacing along directions X.

Below, the first support 71, the second support 72, the 3rd support 73, the 4th support 74 are at length described, but each support 71～74th, mutually the same structure.

8-1. the first support

As shown in Figure 4, at the first support 71, be provided with first component maintaining body 711.First component maintaining body 711 has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

Above-mentioned first component maintaining body 711 has: axle 712, and it is supported in the first support 71 and can in ± Z direction, moves back and forth with respect to the first support 71; Pick-up nozzle (first component maintaining part) 713, it is arranged at the leading section (bottom) of axle 712; And driver train 714, it makes pick-up nozzle 713 move in ± Z direction with respect to the first support 71 via axle 712.The first component maintaining body 711 of said structure utilizes driver train 714 via axle 712, pick-up nozzle 713 to be declined, and utilizes pick-up nozzle 713 absorption IC devices 100, keeps thus IC device 100.Like this, by absorption, keep IC device 100, can suppress to put on thus the stress of IC device 100, can prevent 100 breakages of IC device.In addition, can keep IC device 100 by simple reliable in structure ground.In addition, above-mentioned " maintenance " refer to so that degree that IC device 100 does not fall continues absorption IC device 100.

Structure as driver train 714, as long as can make axle 712 move back and forth along Z direction with respect to the first support 71, be not particularly limited, in the present embodiment, driver train 714 has a pair of belt wheel (guide wheel) 714a, 714b, hang on band (annular the drives rope) 714c between a pair of belt wheel 714a, 714b and motor (drive source) 714d that makes belt wheel 714a rotation.

Belt wheel 714a, 714b are supported in an interarea of the first support 71 in the mode that can rotate via not shown axle.In addition, belt wheel 714a, 714b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 714c, axle 712 is fixed on this region via fixed part 714e.When utilizing motor 714d to make belt wheel 714a rotation, follow in this, belt wheel 714b and band 714c rotation, the axle 712 (pick-up nozzle 713) being fixed on 714c moves in Z-direction with respect to the first support 71.By selecting the hand of rotation of motor 714d, can make pick-up nozzle 713 rise, decline with respect to the first support 71.

In addition,, as long as can realize above-mentioned driving, guide wheel, annular drive the structure of rope and drive source to be not particularly limited.For example, can use sprocket wheel to replace belt wheel 714a, 714b to be used as a pair of guide wheel, use chain to replace band 714c to be used as annular and drive rope.In addition, also can use piezoelectric actuator to replace motor 714d to be used as drive source.

In addition, at the first support 71, be provided with first moving part 715 that can move back and forth in Y-direction with respect to the first support 71.At the first support 71, be provided with the guide rail (guide portion) extending in Y-direction, the first moving part 715 can move along this guide rail.In addition,, as long as can guide the first moving part 715 in Y-direction, groove, the slotted hole that also can be used in Y-direction extension replace above-mentioned guide rail.

In addition, at the first support 71, be provided with second component maintaining body 716.Second component maintaining body 716 is identical with first component maintaining body 711, has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

Above-mentioned second component maintaining body 716 has: axle 717, and it is supported in the first moving part 715 and can in Z direction, moves back and forth with respect to the first moving part 715; Pick-up nozzle (second component maintaining part) 718, it is arranged at the leading section of axle 717; And driver train 719, it makes pick-up nozzle 718 move in Z direction with respect to the first moving part 715 via axle 717.The second component maintaining body 716 of said structure utilizes driver train 719 via axle 717, pick-up nozzle 718 to be declined, and utilizes pick-up nozzle 718 absorption IC devices 100, keeps thus IC device 100.

As the structure of driver train 719, as long as can make axle 717 move back and forth in ± Z direction, be not particularly limited, be the structure identical with above-mentioned driver train 714 in the present embodiment.That is, driver train 719 there is a pair of belt wheel 719a, 719b, hang between a pair of belt wheel 719a, 719b with 719c and the motor 719d that makes belt wheel 719a rotation.

Belt wheel 719a, 719b are supported in an interarea of the first support 71 in the mode that can rotate via not shown axle.In addition, belt wheel 719a, 719b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 719c, axle 717 is fixed on this region via fixed part 719e.When utilizing motor 719d to make belt wheel 719a rotation, follow in this, belt wheel 719b and band 719c rotation, the axle 717 (pick-up nozzle 718) being fixed on 719c moves in Z-direction with respect to the first support 71.By selecting the hand of rotation of motor 719d, can make pick-up nozzle 718 rise, decline with respect to the first support 71.

In addition, fixed part 719e is capable of expansion and contraction in Y-direction, extends or shrink at the first moving part 715 with respect to the first support 71 when Y-direction moves.Therefore, the first moving part 715 is not obstructed with respect to the movement in the Y direction of the first support 71.In addition, the each several part (a pair of belt wheel 719a, 719b, band 719c, motor 719d) of formation driver train 719 also can be arranged at the first moving part 715.If form this structure, do not need fixed part 719e to form retractile structure.

8-2. the second support

As shown in Figure 5, at the second support 72, be provided with the 3rd parts maintaining body 721.The 3rd parts maintaining body 721 is identical with above-mentioned first component maintaining body 711, has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

The structure of above-mentioned the 3rd parts maintaining body 721 is identical with above-mentioned first component maintaining body 711.That is, the 3rd parts maintaining body 721 has: axle 722, and it is supported in the second support 72 and can in Z direction, moves back and forth with respect to the second support 72; Pick-up nozzle (the 3rd parts maintaining part) 723, it is arranged at the leading section of axle 722; And driver train 724, it makes pick-up nozzle 723 move in ± Z direction with respect to the second support 72 via axle 722.The 3rd parts maintaining body 721 of said structure utilizes driver train 724 via axle 722, pick-up nozzle 723 to be declined, and utilizes pick-up nozzle 723 absorption IC devices 100, keeps thus IC device 100.

In addition, driver train 724 there is a pair of belt wheel 724a, 724b, hang between a pair of belt wheel 724a, 724b with 724c and the motor 724d that makes belt wheel 724a rotation.Belt wheel 724a, 724b are supported in an interarea of the second support 72 in the mode that can rotate via not shown axle.In addition, belt wheel 724a, 724b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 724c, axle 722 is fixed on this region via fixed part 724e.When utilizing motor 724d to make belt wheel 724a rotation, the axle 722 (pick-up nozzle 723) being fixed on 724c moves in Z-direction with respect to the second support 72.

In addition, at the second support 72, be provided with second moving part 725 that can move back and forth in Y-direction with respect to the second support 72.At the second support 72, be provided with the guide rail extending in Y-direction, the second moving part 725 is arranged to move along this guide rail.By forming said structure, can be simply and limit reliably the movement beyond the Y-direction of the second moving part 725.

In addition, at the second support 72, be provided with the 4th parts maintaining body 726.The 4th parts maintaining body 726 is identical with above-mentioned second component maintaining body 716, has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

The structure of above-mentioned the 4th parts maintaining body 726 is identical with above-mentioned second component maintaining body 716.That is, the 4th parts maintaining body 726 has: axle 727, and it is supported in the second moving part 725 and can in ± Z direction, moves back and forth with respect to the second moving part 725; Pick-up nozzle (the 4th parts maintaining part) 728, it is arranged at the leading section of axle 727; And driver train 729, it makes pick-up nozzle 728 move in Z direction with respect to the second moving part 725 via axle 727.The 4th parts maintaining body 726 of said structure declines pick-up nozzle 728 by driver train 729 via axle 727, utilizes pick-up nozzle 728 absorption IC devices 100, keeps thus IC device 100.

In addition, driver train 729 there is a pair of belt wheel 729a, 729b, hang between a pair of belt wheel 729a, 729b with 729c and the motor 729d that makes belt wheel 729a rotation.Belt wheel 729a, 729b are supported on an interarea of the second support 72 in the mode that can rotate via not shown axle.In addition, belt wheel 729a, 729b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 729c, axle 727 is fixed on this region via fixed part 729e.When utilizing motor 729d to make belt wheel 729a rotation, the axle 727 (pick-up nozzle 728) being fixed on 729c moves in Z-direction with respect to the second support 72.

In addition, fixed part 729e is capable of expansion and contraction in Y-direction, extends or shrink at the second moving part 725 with respect to the second support 72 when Y-direction moves.Therefore, the second moving part 725 is not obstructed with respect to the movement in the Y direction of the second support 72.

8-3. the 3rd support

As shown in Figure 6, at the 3rd support 73, be provided with the 5th parts maintaining body 731.The 5th parts maintaining body 731 is identical with above-mentioned first component maintaining body 711, has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

The structure of above-mentioned the 5th parts maintaining body 731 is identical with above-mentioned first component maintaining body 711.That is, the 5th parts maintaining body 731 has: axle 732, and it is supported in the 3rd support 73 and can in Z direction, moves back and forth with respect to the 3rd support 73; Pick-up nozzle (the 5th parts maintaining part) 733, it is arranged at the leading section of axle 732; And moving drive mechanism 734, it makes pick-up nozzle 733 move in Z direction with respect to the 3rd support 73 via axle 732.The 5th parts maintaining body 731 of said structure declines pick-up nozzle 733 by driver train 734 via axle 732, utilizes pick-up nozzle 733 absorption IC devices 100, keeps thus IC device 100.

In addition, driver train 734 there is a pair of belt wheel 734a, 734b, hang between a pair of belt wheel 734a, 734b with 734c and the motor 734d that makes belt wheel 734a rotation.Belt wheel 734a, 734b are supported in an interarea of the 3rd support 73 in the mode that can rotate via not shown axle.In addition, belt wheel 734a, 734b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 734c, axle 732 is fixed on this region via fixed part 734e.When utilizing motor 734d to make belt wheel 734a rotation, the axle 732 (pick-up nozzle 733) being fixed on 734c moves in Z-direction with respect to the 3rd support 73.

In addition, at the 3rd support 73, be provided with the 3rd moving part 735 that can move back and forth in Y-direction with respect to the 3rd support 73.At the 3rd support 73, be provided with the guide rail extending in Y-direction, the 3rd moving part 735 is arranged to move along this guide rail.By forming said structure, can be simply and limit reliably the movement beyond the Y-direction of the 3rd moving part 735.

In addition, at the 3rd support 73, be provided with the 6th parts maintaining body 736.The 6th parts maintaining body 736 is identical with above-mentioned second component maintaining body 716, has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

The structure of above-mentioned the 6th parts maintaining body 736 is identical with above-mentioned second component maintaining body 716.That is, the 6th parts maintaining body 736 has: axle 737, and it is supported in the 3rd moving part 735 and can in Z direction, moves back and forth with respect to the 3rd moving part 735; Pick-up nozzle (the 6th parts maintaining part) 738, it is arranged at the leading section of axle 737; And driver train 739, it makes pick-up nozzle 738 move in Z direction with respect to the 3rd moving part 735 via axle 737.The 6th parts maintaining body 736 of said structure declines pick-up nozzle 738 by driver train 739 via axle 737, utilizes pick-up nozzle 738 absorption IC devices 100, keeps thus IC device 100.

In addition, driver train 739 there is a pair of belt wheel 739a, 739b, hang between a pair of belt wheel 739a, 739b with 739c and the motor 739d that makes belt wheel 739a rotation.Belt wheel 739a, 739b are supported on an interarea of the 3rd support 73 in the mode that can rotate via not shown axle.In addition, belt wheel 739a, 739b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 739c, axle 737 is fixed on this region via fixed part 739e.When utilizing motor 739d to make belt wheel 739a rotation, the axle 737 (pick-up nozzle 738) being fixed on 739c moves in Z-direction with respect to the 3rd support 73.

In addition, fixed part 739e is capable of expansion and contraction in Y-direction, extends or shrink at the 3rd moving part 735 with respect to the 3rd support 73 when Y-direction moves.Therefore, the 3rd moving part 735 is not obstructed with respect to the movement in the Y direction of the 3rd support 73.

8-4. the 4th support

As shown in Figure 7, at the 4th support 74, be provided with the 7th parts maintaining body 741.The 7th parts maintaining body 741 is identical with above-mentioned first component maintaining body 711, has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

The structure of above-mentioned the 7th parts maintaining body 741 is identical with above-mentioned first component maintaining body 711.That is, the 7th parts maintaining body 741 has: axle 742, and it is supported in the 4th support 74 and can in Z direction, moves back and forth with respect to the 4th support 74; Pick-up nozzle (the 7th parts maintaining part) 743, it is arranged at the leading section of axle 742; And driver train 744, it makes pick-up nozzle 743 move in Z direction with respect to the 4th support 74 via axle 742.The 7th parts maintaining body 741 of said structure declines pick-up nozzle 743 by driver train 744 via axle 742, utilizes pick-up nozzle 743 absorption IC devices 100, keeps thus IC device 100.

In addition, driver train 744 there is a pair of belt wheel 744a, 744b, hang between a pair of belt wheel 744a, 744b with 744c and the motor 744d that makes belt wheel 744a rotation.Belt wheel 744a, 744b are supported on an interarea of the 4th support 74 in the mode that can rotate via not shown axle.In addition, belt wheel 744a, 744b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 744c, axle 742 is fixed on this region via fixed part 744e.When utilizing motor 744d to make belt wheel 744a rotation, the axle 742 (pick-up nozzle 743) being fixed on 744c moves in Z-direction with respect to the 3rd support 73.

In addition, at the 4th support 74, be provided with the 4th moving part 745 that can move back and forth in Y-direction with respect to the 4th support 74.At the 4th support 74, be provided with the guide rail extending in Y-direction, the 4th moving part 745 is arranged to move along this guide rail.By forming said structure, can be simply and limit reliably the movement beyond Y-direction of the 4th moving part 745.

In addition, at the 4th support 74, be provided with the 8th parts maintaining body 746.The 8th parts maintaining body 746 is identical with above-mentioned second component maintaining body 716, has the function that keeps the IC device 100 transport to pallet 42,52 from supply tray 2.

The structure of above-mentioned the 8th parts maintaining body 746 is identical with above-mentioned second component maintaining body 716.That is, the 8th parts maintaining body 746 has: axle 747, and it is supported in the 4th moving part 745 and can in Z direction, moves back and forth with respect to the 4th moving part 745; Pick-up nozzle (the 8th parts maintaining part) 748, it is arranged at the leading section of axle 747; And driver train 749, it makes pick-up nozzle 748 move in Z direction with respect to the 4th moving part 745 via axle 747.The 8th parts maintaining body 746 of said structure declines pick-up nozzle 748 by driver train 749 via axle 747, utilizes pick-up nozzle 748 absorption IC devices 100, keeps thus IC device 100.

In addition, driver train 739 there is a pair of belt wheel 749a, 749b, hang between a pair of belt wheel 749a, 749b with 749c and the motor 749d that makes belt wheel 749a rotation.Belt wheel 749a, 749b are supported on an interarea of the 4th support 74 in the mode that can rotate via not shown axle.In addition, belt wheel 749a, 749b arrange in the mode of leaving in Z direction.Therefore, have the region of extending in Z-direction with 749c, axle 747 is fixed on this region via fixed part 749e.When utilizing motor 749d to make belt wheel 749a rotation, the axle 747 (pick-up nozzle 748) being fixed on 749c moves in Z-direction with respect to the 4th support 74.

In addition, fixed part 749e is capable of expansion and contraction in Y-direction, extends or shrink at the 4th moving part 745 with respect to the 4th support 74 when Y-direction moves.Therefore, the 4th moving part 745 is not obstructed with respect to the movement in the Y direction of the 4th support 74.

Above, the structure of each support 71,72,73,74 is illustrated in detail.

Here, pick-up nozzle 733,723,713,743 according to this order along directions X spread configuration, and the spacing configuration to equate.That is, pick-up nozzle 733 and pick-up nozzle 723 leave distance, pick-up nozzle 723 and pick-up nozzle 713 leave distance, pick-up nozzle 713 leaves distance mutually about equally with pick-up nozzle 743.

In addition, pick-up nozzle 718 with respect to pick-up nozzle 713 along Y-direction spread configuration, equally, pick-up nozzle 728 with respect to pick-up nozzle 723 along Y-direction spread configuration, pick-up nozzle 738 with respect to pick-up nozzle 733 along Y-direction spread configuration, pick-up nozzle 748 with respect to pick-up nozzle 743 along Y-direction spread configuration.In addition, pick-up nozzle 718,713 leave distance, pick-up nozzle 728,723 leave distance, pick-up nozzle 738,733 leave distance, pick-up nozzle 748,743 leave distance mutually about equally.That is, pick-up nozzle 738,728,718,748 also according to this order along directions X spread configuration, and the spacing configuration to equate.

Hand unit 7c also has: make the directions X travel mechanism (the second travel mechanism) 76 that the second support 72, the 3rd support 73, the 4th support 74 move at directions X with respect to base portion 75 (the first support 71) and the Y-direction travel mechanism (the first travel mechanism) 77 that each moving part 715,725,735,745 is moved in Y-direction with respect to base portion 75.

8-5.X direction travel mechanism

Directions X travel mechanism 76 is configured to, the second support 72, the 3rd support 73, the 4th support 74 are moved at directions X with respect to the first support 71, can make thus pick-up nozzle 733 (738) and pick-up nozzle 723 (728) leave distance, pick-up nozzle 723 (728) and pick-up nozzle 713 (718) leave distance and pick-up nozzle 713 (718) equates mutually with leaving apart from maintenance of pick-up nozzle 743 (748), and change the above-mentioned distance of leaving.

As shown in Figure 8, directions X travel mechanism 76 has a pair of twin-stage belt wheel (the first guide wheel, the second travel mechanism the second guide wheel for the second travel mechanism) 761,762, hang on 2 bands (the second travel mechanism drives rope, the second travel mechanism to drive rope by the second annular by the first annular) 763,764 between a pair of twin-stage belt wheel 761,762 and the motor (second travel mechanism's drive source) 765 that makes 761 rotations of twin-stage belt wheel.Wherein, twin-stage belt wheel 761,762 and motor 765 are supported in respectively the first pedestal 751.

The axle rotation that twin-stage belt wheel 761,762 can extend along Y-direction around the upper surface of the first pedestal 751.In addition, twin-stage belt wheel 761,762 arranges in the mode of leaving at directions X.

Twin-stage belt wheel 761 has the path belt wheel 761a that external diameter is less and has the large-calibred belt wheel 761b of the roughly twice external diameter of path belt wheel 761a, and these belt wheels are arranged and same being formed centrally in Y-direction.Equally, twin-stage belt wheel 762 has the path belt wheel 762a that external diameter is less and has the large-calibred belt wheel 762b of the roughly twice external diameter of path belt wheel 762a, and these belt wheels are arranged and same being formed centrally in Y-direction.In addition, the external diameter of path belt wheel 761a and 762a is equal to each other, and the external diameter of large-calibred belt wheel 761b and 762b also equates mutually.

Between path belt wheel 761a, 762a, be linked with and be with 763.With 763, between path belt wheel 761a, 762a, there are two region 763a, 763b that extend along directions X.And, at a region 763a, be fixed with the second support 72, at another region 763b, be fixed with the 4th support 74.When 761 rotation of twin-stage belt wheel, at region 763a, be with 763 towards directions X one side, to advance, at region 763b, be with 763 towards directions X opposite side, to advance, the second support 72, the 4th support 74 move distance about equally towards the opposition side of directions X mutually.

On the other hand, between large-calibred belt wheel 761b, 762b, be linked with and be with 764.With 764, between large-calibred belt wheel 761b, 762b, there are two region 764a, 764b that extend along directions X.In these two region 764a, 764b, when when 761 rotation of twin-stage belt wheel, towards the identical progressive region 764a in side of the working direction of the region 763a with 763, be fixed with the 3rd support 73.When being with 763 rotation, at region 763a, 764a, with 763, towards the same side of directions X, advance, so the second support 72, the 3rd support 73 move towards the same side of directions X mutually.In addition, as mentioned above, large-calibred belt wheel 761b, 762b have the external diameter of the twice of path belt wheel 761a, 762a, so the miles of relative movement of the 3rd support 73 is roughly twices of the miles of relative movement of the second support 72.

According to said structure, when utilizing motor 765 to make 761 rotation of twin-stage belt wheel, the second support 72, the 4th support 74 move distance about equally towards the opposition side of directions X mutually, and the 3rd support 73 moves the miles of relative movement of the twice of the second support 72 towards the direction identical with the moving direction of the second support 72.Therefore, as mentioned above, according to directions X travel mechanism 76, can make pick-up nozzle 733 (738) and the distance of leaving of leaving distance and pick-up nozzle 713 (718) and pick-up nozzle 743 (748) of leaving distance, pick-up nozzle 723 (728) and pick-up nozzle 713 (718) of pick-up nozzle 723 (728) keep being equal to each other, and change the above-mentioned distance of leaving.

By forming above-mentioned structure, can simplify the structure of directions X travel mechanism 76, can realize miniaturization, the lightness followed in this.Therefore, contribute to miniaturization, the lightness of hand unit 7c, the operability of hand unit 7c improves.In addition, by the rotation of twin-stage belt wheel 761, can unify to control the second support 72, the 3rd support 73, the whole movement of the 4th support 74, so can bring into play more reliably above-mentioned function.

In addition,, as long as can realize above-mentioned driving, guide wheel, annular drive the structure of rope and drive source to be not particularly limited.For example, can use sprocket wheel to replace belt wheel as a pair of guide wheel, also can use chain (metallic bond, rubber chain etc.) to replace band to drive rope as annular.In addition, can also use piezoelectric actuator to replace motor as drive source.In addition, path belt wheel 761a (762a) and large-calibred belt wheel 761b (762b) can form in split, in this case, can be provided for respectively making motor and the motor for large-calibred belt wheel 761b is rotated of path belt wheel 761a rotation.

8-6.Y direction travel mechanism

Y-direction travel mechanism 77 is configured to, make the first moving part 715, the second moving part 725, the 3rd moving part 735, the 4th moving part 745 with respect to the first support 71, the second support 72, the 3rd support 73, the 4th support 74 one (particularly, while and equidistant) along Y-direction, move, can make thus the distance of leaving of leaving distance and pick-up nozzle 743,748 of leaving distance, pick-up nozzle 733,738 of leaving distance, pick-up nozzle 723,728 of pick-up nozzle 713,718 keep being equal to each other, and change the above-mentioned distance of leaving.

As shown in Fig. 9 and Figure 10, Y-direction travel mechanism 77 has: be arranged at base portion 75 first module 77a and motor (first travel mechanism's drive source) 777, be arranged at the second unit 77b of the first support 71 and transmitter shaft (transfer part) 778 and the connection shaft (connecting part) 779 arranging to link the mode of first module 77a, second unit 77b.

First module 77a has: a pair of belt wheel (the first guide wheel, the first travel mechanism the second guide wheel for the first travel mechanism) 771,772 and hang on band between a pair of belt wheel 771,772 (for the first travel mechanism, the first annular drives rope) 773.Belt wheel 771,772 is supported to the axle rotation of extending around directions X on one of the second pedestal 752 (right side in figure) interarea freely.In addition, belt wheel 771,772 arranges in the mode of leaving in Y-direction.And, between these belt wheels 771,772, be linked with and be with 773.With 773, between belt wheel 771,772, there are two region 773a, 773b that extend along Y-direction.

Motor 777 is for making the drive source of belt wheel 771 rotation, is arranged at another (left side in figure) interarea of the second pedestal 752.

Second unit 77b has: a pair of belt wheel (for the first travel mechanism the 3rd guide wheel, for the first travel mechanism the 4th guide wheel) 774,775 and hang on the band (for the first travel mechanism, the second annular drives rope) 776 between a pair of belt wheel 774,775.Belt wheel 774,775 is supported to the axle rotation of extending around directions X on one of the first support 71 (right side in figure) interarea freely.In addition, belt wheel 774,775 arranges in the mode of leaving in Y-direction.And, between these belt wheels 774,775, be linked with and be with 776.With 776, between belt wheel 774,775, there are two region 776a, 776b that extend along Y-direction.

Like this, by second unit 77b being arranged to the first support 71 with respect to the invariant position of the second pedestal 752, can make Y-direction travel mechanism 77 more stably drive.

Transmitter shaft 778 is for the propulsive effort of motor 777 being delivered to the axle of second unit 77b.Above-mentioned transmitter shaft 778 arranges in the mode of extending at directions X, and the axle of belt wheel 771,774 is connected to each other.Therefore, the propulsive effort of motor 777 is delivered to second unit 77b via transmitter shaft 778, and belt wheel 771,774 rotates integratedly.

In addition, with perforation, the second support 72 between the second pedestal 752 and the first support 71, the mode of the 3rd support 73 arrange (with reference to Fig. 5 and Fig. 6) to transmitter shaft 778.Particularly, transmitter shaft 778 is from being formed in the through hole of the second support 72, the 3rd support 73 by and linking belt wheel 771,774.By such configuration transmitter shaft 778, can suppress transmitter shaft 778 outstanding from support 71～74, can realize the miniaturization of hand unit 7c.In addition, guiding piece performance function when transmitter shaft 778 also moves towards directions X as the second support 72, the 3rd support 73, so can be more reliably and successfully carry out the movement of the second support 72, the 3rd support 73.

Connection shaft 779 is shape linearly, and extends at directions X.In addition, connection shaft 779 is fixed in 773 region 773a with 776 region 776a via connecting element two positions on way therein.When being with 773,776 rotation, at region 773a, 776a, with 773,776, towards the same side of Y-direction, advance, so follow in this, connection shaft 779 keeps attitude and moves towards Y-direction.

In the periphery of above-mentioned connection shaft 779, along it, be axially provided with three straight line sleeve 779b, 779c, 779d.Above-mentioned each straight line sleeve 779b, 779c, 779d are not moving axially freely and at all direction rotations freely with respect to connection shaft 779 separately (action is not subject to the state of other component limitations).

In these straight line sleeves 779b～779d, straight line sleeve 779b is fixed on the second moving part 725, and straight line sleeve 779c is fixed on the 3rd moving part 735, and straight line sleeve 779d is fixed on the 4th moving part 745.In addition, the first moving part 715 is by first support 71 supportings of being fixed on the first pedestal 751, so can not move along Y direction with respect to connection shaft 779.Therefore, different from other moving part 725～745, connection shaft 779 is not directly fixed on the first moving part 715 via straight line sleeve.Like this, by connection shaft 779 being fixed on to the first moving part 715, can prevent the unexpected displacement at axial (directions X) of connection shaft 779.

By forming said structure, when the rotation by with 773,776 and connection shaft 779 when Y-direction moves, each moving part 715,725,735,745 with respect to each support 71,72,73,74 in Y-direction mobile equal distance integratedly.Therefore, according to the Y-direction travel mechanism 77 of said structure, can make reliably the distance of leaving of leaving distance and pick-up nozzle 743,748 of leaving distance, pick-up nozzle 733,738 of leaving distance, pick-up nozzle 723,728 of pick-up nozzle 713,718 keep being equal to each other, and change the above-mentioned distance of leaving.

In addition, as mentioned above, straight line sleeve 779b～779d can with respect to connection shaft 779 its axially (directions X) mobile, so Y-direction travel mechanism 77 can not hinder the movement towards directions X of the second support 72 of being undertaken by directions X travel mechanism 76, the 3rd support 73, the 4th support 74.

In addition, in Y-direction travel mechanism 77, at the second pedestal 752, first module 77a is set, and at the first support 71, second unit 77b is set, at two position supporting connection shafts 779 that axially leave, so can make connection shaft 779 move predetermined distance towards Y-direction more smoothly and reliably.Particularly, by making the second support 72, the 3rd support 73 between the second pedestal 752 and the first support 71, the distance of leaving of the second pedestal 752 and the first support 71 can be fully guaranteed, connection shaft 779 can be more stably supported.

In addition, in the Y-direction travel mechanism 77 of present embodiment, the first moving part 715, the second moving part 725, the 3rd moving part 735, the 4th moving part 745 via connection shaft 779 (indirectly) be with 773,776 to link, but be not limited to this, for example, also can omit connection shaft 779, the first moving parts 715, the second moving part 725, the 3rd moving part 735, the 4th moving part 745 respectively be with 773,776 directly to link.

Above, the structure of opponent unit 7c is illustrated particularly.According to above-mentioned hand unit 7c, by controlling independently the driving (open/close and hand of rotation) of each motor 765,777, can freely change the spacing that sets of pick-up nozzle 713,718,723,728,733,738,743,748.Therefore, even if for example in the situation that be formed at supply tray 2 a plurality of grooves 21 set spacing, from be formed at pallet 42 (52) a plurality of grooves 421 (521) to set spacing different, also can successfully IC device 100 be transported to pallet 42 (52) from supply tray 2 as described later.

In addition, the hand unit 7c of present embodiment has eight pick-up nozzles, but the quantity of pick-up nozzle so long as four above, be not particularly limited.For example, in the situation that pick-up nozzle is four, can comprise the 3rd support 73, the 4th support 74 omission pick-up nozzles 733,738,743,748.In addition, for example, in the situation that pick-up nozzle is ten, for example if the 4th support 74+setting of directions X side is identical with the 4th support 74 structures and have the 5th support of two pick-up nozzles and the 5th support is fixed on to the region 764b with 764.Like this, according to hand unit 7c, can carry out simply the quantity change (and append, eliminate) of pick-up nozzle.Hand unit 8c is also like this.

Next, supply equipment people 7 driving is described.

First, make movable frame 7b move and base portion 75 is moved at directions X with respect to movable frame 7b in Y-direction with respect to bearer frame 7a, so that hand unit 7c is positioned on supply tray 2.Next, drive respectively as required directions X travel mechanism 76 and Y-direction travel mechanism 77, make pick-up nozzle 713,718,723,728,733,738,743,748 set spacing and groove 21 to set spacing consistent.In addition, the driving of directions X travel mechanism 76 and Y-direction travel mechanism 77 can be carried out in the process that hand unit 7c moves.

Next, each pick-up nozzle 713,718,723,728,733,738,743,748 is declined, utilize each pick-up nozzle 713,718,723,728,733,738,743,748 to keep IC device 100.Afterwards, make pick-up nozzle 713,718,723,728,733,738,743,748 increase, from groove 21, take out eight IC devices 100.

Next, make movable frame 7b move and base portion 75 is moved at directions X with respect to movable frame 7b in Y-direction with respect to bearer frame 7a, so that hand unit 7c is positioned on pallet 42.The groove 421 that sets spacing and pallet 42 of the groove 21 of supply tray 2 to set spacing different at directions X and Y-direction both direction, so next drive respectively directions X travel mechanism 76 and Y-direction travel mechanism 77, make pick-up nozzle 713,718,723,728,733,738,743,748 set spacing and groove 421 to set spacing consistent.In addition, the driving of directions X travel mechanism 76 and Y-direction travel mechanism 77 can be carried out in the process that hand unit 7c moves.

Next, each pick-up nozzle 713,718,723,728,733,738,743,748 is declined, the IC device 100 that each pick-up nozzle 713,718,723,728,733,738,743,748 is kept loads in groove 421.Then, after the adsorbed state of IC device 100 is removed, make pick-up nozzle 713,718,723,728,733,738,743,748 increase, each IC device 100 is stayed to groove 421.

In addition, in aforesaid way, the groove 421 that sets spacing and pallet 42 of the groove 21 of supply tray 2 to set spacing different at directions X and Y-direction both direction, but be not limited to this, can be only at directions X, to set spacing difference.Now, temporarily utilize Y-direction travel mechanism 77 to adjust pick-up nozzles 713,718,723,728,733,738,743,748 in the spacing that sets of Y-direction, only drive afterwards directions X travel mechanism 76 and change pick-up nozzle 713,718,723,728,733,738,743,748 in the spacing that sets of directions X.

On the contrary, can be also only in Y-direction, to set spacing difference.Now, temporarily utilize directions X travel mechanism 76 to adjust pick-up nozzle 713,718,723,728,733,738,743,748 in the spacing that sets of directions X, afterwards, only drive Y-direction travel mechanism 77 and change pick-up nozzle 713,718,723,728,733,738,743,748 in the spacing that sets of Y-direction.

In addition, setting spacing also can equate at directions X and Y-direction both direction.Now, temporarily utilize Y-direction travel mechanism 77 to adjust pick-up nozzle 713,718,723,728,733,738,743,748 in the spacing that sets of Y-direction, utilize directions X travel mechanism 76 adjust pick-up nozzles 713,718,723,728,733,738,743,748 directions X set spacing after, do not change these and set spacing and carry out the conveying of above-mentioned IC device 100.

The conveying of the IC device 100 from supply tray 2 to pallet 52 too.

(inspection robot)

Check with robot 9 it is that the IC device 100 that is accommodated in pallet 42,52 is transported to and checks with socket 6 and will be disposed at IC device 100 after the inspection of inspection by socket 6 and electrical specification finishes and be transported to the robot of pallet 43,53.

In addition, check with robot 9 when carrying IC device 100 from pallet 42,52 to inspection with socket 6, can carry out IC device 100 with respect to the location checking with socket 6 (checking by individual receptacle 61), and when IC device 100 being disposed to inspection with socket 6 and carrying out the inspection of electrical specification, IC device 100 can be pressed on to probe, thereby IC device 100 be applied to the inspection pressure of regulation.

As shown in Figure 1, check to have with robot 9: the first framework 911 arranging regularly with respect to pedestal 11, be supported in the first framework 911 and second framework 912 that can move back and forth in Y-direction with respect to the first framework 911, be supported in the second framework 912 and can be with respect to the second framework 912 in the first-hand unit bearing portion 913 of Z direction lifting and second-hand's unit bearing portion 914, eight first-hand unit 92 and eight second-hand unit 93 that are supported in second-hand's unit bearing portion 914 that are supported in first-hand unit bearing portion 913.

First-hand unit bearing portion 913, second-hand's unit bearing portion 914 are all supported in the second framework 912, thus at directions X and Y-direction, move integratedly, but can move independently respectively in Z direction.For example utilize and take the not shown driver train that linear motor is drive source and carry out the second framework 912 with respect to movement, each hand unit bearing portion 913,914 movements with respect to the second framework 912 of the first framework 911.

Eight first-hand unit 92 are at the downside of first-hand unit bearing portion 913, arranging four along directions X, arrange the mode of two along Y-direction and be configured to ranks shape.In addition, 421,431 and eight of the grooves that spacing and eight are formed at pallet 42,43 of setting of eight first-hand unit 92 are arranged at the inspection that checks with socket 6 and set spacing about equally by individual receptacle 61.Therefore, can more successfully carry out IC device 100 at pallet 42,43 and check with the conveying between socket 6.

Equally, eight second-hand unit 93 are at each pallet 52,53 of the second shuttle 5 and between checking with socket 6, carry the device of IC device 100.In addition, eight second-hand unit 93 are when unchecked IC device 100 is carried with socket 6 from pallet 52 to inspection, carry out IC device 100 with respect to the device checking with the location of socket 6.

Eight second-hand unit 93 are at the downside of second-hand's unit bearing portion 914, arranging four along directions X, arrange the mode of two along Y-direction and be configured to ranks shape.In addition, the disposition interval of eight second-hand unit 93 is identical with above-mentioned eight first-hand unit 92, is arranged at the inspection that checks with socket 6 sets spacing about equally by individual receptacle 61 with eight 421,431 and eight of grooves that are formed at pallet 42,43.Therefore, can successfully carry out IC device 100 at pallet 52,53 and check with the conveying between socket 6.

Below, structure to eight first-hand unit 92 and eight second-hand unit 93 describes, but each hand unit the 92, the 93rd, mutually the same structure, describes as representative so take below a first-hand unit 92, and to other first-hand unit 92 and second-hand unit 93, description thereof is omitted.

As shown in figure 11, first-hand unit 92 has: be supported/be fixed on first-hand unit bearing portion 913 support 94, be supported in support 94 and can with respect to support 94 ± the first moving part 95 that directions X moves back and forth, be supported in the first moving part 95 and can be with respect to the first moving part 95 at ± the second moving part 96 that Y-direction moves back and forth, be supported in the second moving part 96 and the rotating part 97 that can rotate around Z axis with respect to the second moving part 96 and the maintaining part 98 that is supported in rotating part 97.At support 94, be provided with for carrying out kept IC device 100 with respect to the device mark 941 checking with the location of individual receptacle 61.In addition, maintaining part 98 for example consists of pick-up nozzle, can keep IC device 100 by absorption.

In addition, first-hand unit 92 has: make the first moving part 95 with respect to support 94 ± the first not shown driver train that directions X moves back and forth, make the second moving part 96 with respect to the first moving part 95 ± the second not shown driver train that Y-direction moves back and forth and the 3rd driver train that rotating part 97 is rotated around Z axis with respect to the second moving part 96.These first, second, third driver trains are configured to, for example, take linear motor as drive source, can add as required in addition for rotatablely moving of motor being converted to the structures such as the straight moving tooth bar moving, miniature gears.

Above-mentioned first-hand unit 92 carries out the location (vision aligning) of kept IC device 100 as follows.Utilize maintaining part 98 to keep being incorporated in the unchecked IC device 100 of pallet 42, make first-hand unit 92 directly over pallet 42 towards process mobile directly over checking with socket 6, first-hand unit 92 is by directly over the first photographic camera 600.The first photographic camera 600 first-hand unit 92 from its directly over by time take to catch IC device 100 and the device mark 941 that is held in first-hand unit 92.Resulting view data is sent to control setup 10, by control setup 10, carries out image recognition processing.

Particularly, in image recognition processing, the view data obtaining is implemented to the processing of regulation, relative position and relative angle between calculating device mark 941 and IC device 100 from the first photographic camera 600.And, the relative position calculating and relative angle are contrasted with the reference position and the benchmark angle that represent the correct position relationship between device mark 941 and IC device 100, calculate respectively at " position offset " that produce between relative position and reference position and " the angular deflection amount " that produce between relative angle and benchmark angle.In addition, above-mentioned " reference position " and above-mentioned " benchmark angle " refers to when first-hand unit 92 being disposed to predefined inspection using origin position, the outside terminal of IC device 100 and check the suitable position being connected of probe by individual receptacle 61.

And, " position offset " and " angular deflection amount " of control setup 10 based on obtaining, drive as required first, second, third driver train to revise position and the posture (angle) of IC device 100, so that relative position and relative angle are consistent with reference position and benchmark angle.By above-mentioned control, can carry out the location of the IC device 100 that kept by maintaining part 98.

Control setup 10 is configured to can control respectively the driving of eight first-hand unit 92 independently, so can carry out independently respectively eight location (position correction) that are held in the IC device 100 of each first-hand unit 92.

For the location of the IC device 100 being undertaken by second-hand unit 93, except using second photographic camera 500 replacement the first photographic cameras 600, other structure is identical with the situation of above-mentioned first-hand unit 92, and description will be omitted.

(recycling machine people)

Recycling machine people 8 is for the complete IC device 100 of the inspection that is incorporated in pallet 43,53 being transported to the robot of recycling pallet 3.

Recycling machine people 8 is identical with supply equipment people 7 structures.That is, recycling machine people 8 has: be supported in the bearer frame 8a of pedestal 11, the hand unit 8c that is supported in bearer frame 8a and the movable frame 8b that can move back and forth in Y-direction with respect to bearer frame 8a and is supported in movable frame 8b and can moves back and forth at directions X with respect to movable frame 8b.The structure of each part mentioned above is identical with the structure of corresponding each several part of the supply equipment people 7, and description will be omitted.In addition, recycling machine people 8 driving is also identical with supply equipment people 7 driving, and description will be omitted.

Here, there is the situation that has the substandard products of the electrical specification that can not bring into play regulation in the complete IC device 100 of the inspection that is incorporated in pallet 43 (53).Therefore, for example, prepare the pallet that 3, one use of two recycling pallets act on the certified products of taking in the electrical specification that meets regulation, another is with acting on the pallet that reclaims above-mentioned substandard products.In addition, in the situation that using a recycling pallet 3, also the groove of regulation 31 use can be acted on to the groove of taking in above-mentioned substandard products.Thus, can clearly distinguish certified products and substandard products.

(control setup)

Control setup 10 has drive control part 102 and checks control part 101.Drive control part 102 drives such as the mechanicalness of controlling movement, supply equipment people 7, recycling machine people 8, inspection robot 9, carrying state testing agency 200, the first photographic camera 600 and second photographic camera 500 etc. of supply tray 2, recycling pallet 3, the first shuttle 4 and the second shuttle 5.One checks that the program of control part 101 based on being stored in not shown memory device checks by the electrical specification of the IC device 100 of socket 6 being disposed at inspection.

Above, the structure of testing fixture 1 is illustrated.

The inspection method of being undertaken by testing fixture

Next, the inspection method of the IC device 100 being undertaken by testing fixture 1 is described.In addition, below the conveying order of inspection method, particularly the IC device 100 of explanation is only an example, is not limited to this.

(step 1)

First, as shown in figure 12, the supply tray 2 of taking in IC device 100 at each groove 21 is transported in the S of region, and makes the first shuttle 4, the second shuttle 5 court-directions X side shiftings, make pallet 42,52 become respectively the state with respect to be arranged in+Y-direction of supply tray 2 side.

(step 2)

Next, as shown in figure 13, utilize supply equipment people 7 that the IC device 100 that is accommodated in supply tray 2 is transferred to pallet 42,52, IC device 100 is accommodated in to each groove 421,521 of pallet 42,52.

Next, utilize carrying state testing agency 200 to detect the carrying state of the IC device 100 of each groove 421,521 that is incorporated in pallet 42,52.Suppose in the situation that detect the IC device 100 of an abnormal carrying state, drive control part 102 temporarily stops the driving of each several part, correct abnormal carrying state, after confirming that whole IC devices 100 becomes normal carrying state, again start the driving of each several part.

(step 3)

Next, as shown in figure 14, make all court+directions X side shiftings of the first shuttle 4, the second shuttle 5, become pallet 42 with respect to checking that, by be arranged in+Y-direction of socket 6 side, pallet 52 is with respect to the state checking by be arranged in-Y-direction of socket 6 side.

(step 4)

Next, as shown in figure 15, make first-hand unit bearing portion 913, second-hand's unit bearing portion 914 court+Y-direction side shifting integratedly, become first-hand unit bearing portion 913 be positioned at pallet 42 directly over and second-hand's unit bearing portion 914 be positioned at the state checking with directly over socket 6.Afterwards, utilize each first-hand unit 92 to keep being incorporated in the IC device 100 of pallet 42.

(step 5)

Next, as shown in figure 16, make first-hand unit bearing portion 913, second-hand's unit bearing portion 914 court-Y-direction side shifting integratedly, become first-hand unit bearing portion 913 be positioned at check with (inspection origin position) directly over socket 6 and second-hand's unit bearing portion 914 be positioned at pallet 52 directly over state.In the process moving at this, according to the view data being photographed by the first photographic camera 600, carry out separately the location (vision aligning) of each IC device 100.

When carrying out above-mentioned first-hand unit bearing portion 913, the movement of second-hand's unit bearing portion 914 and the location of IC device 100, carry out following operation.First, make the first shuttle 4 court-directions X side shiftings, become pallet 43 with respect to the state checking by be arranged in+Y-direction of socket 6, and become pallet 42 with respect to the state of be arranged in+Y-direction of supply tray 2.Next, utilize supply equipment people 7 that the IC device 100 that is accommodated in supply tray 2 is transferred to pallet 42, IC device 100 is accommodated in to each groove 421 of pallet 42.And, identical with above-mentioned situation, utilize carrying state testing agency 200 to detect the carrying state of the IC device 100 that is incorporated in each groove 421.

(step 6)

Next, first-hand unit bearing portion 913 is declined, the IC device 100 being kept by each first-hand unit 92 is disposed at and checks with each of socket 6 and check with in individual receptacle 61.Now, each first-hand unit 92 presses on IC device 100 to check by individual receptacle 61 with the inspection pressure (pressure) of regulation.The outside terminal that makes thus IC device 100 checks and becomes with the probe of individual receptacle 61 state being electrically connected to being arranged at, under this state, utilize 101 pairs of each inspections of inspection control part of control setup 10 to carry out the inspection of electrical specification with the IC device 100 in individual receptacle 61.After this inspection finishes, make first-hand unit bearing portion 913 increase, the IC device 100 being kept by each first-hand unit 92 is taken out from checking by individual receptacle 61.

When carrying out above-mentioned operation (inspection of IC device 100), each second-hand unit 93 that is supported in second-hand's unit bearing portion 914 keeps being incorporated in the IC device 100 of pallet 52, and IC device 100 is taken out from pallet 52.

(step 7)

Next, as shown in figure 17, make first-hand unit bearing portion 913, second-hand's unit bearing portion 914 court+Y-direction side shiftings, become first-hand unit bearing portion 913 be positioned at the first shuttle 4 pallet 43 directly over and second-hand's unit bearing portion 914 be positioned at the state checking with (inspection origin position) directly over socket 6.In the process moving at this, according to the view data being photographed by the second photographic camera 500, carry out separately the location (vision aligning) of each IC device 100.

When carrying out the movement of above-mentioned first-hand unit bearing portion 913, second-hand's unit bearing portion 914, carry out following operation.First, make the second shuttle 5 court-directions X side shiftings, become pallet 53 with respect to the state checking by be arranged in-Y-direction of socket 6, and become pallet 52 with respect to the state of be arranged in+Y-direction of supply tray 2.Next, utilize supply equipment people 7 that the IC device 100 that is accommodated in supply tray 2 is transferred to pallet 52, IC device 100 is accommodated in to each groove 521 of pallet 52.And, identical with above-mentioned situation, utilize carrying state testing agency 200 to detect the carrying state of the IC device 100 that is incorporated in each groove 521.

(step 8)

Next, as shown in figure 18, second-hand's unit bearing portion 914 is declined, the IC device 100 being kept by each second-hand unit 93 is disposed at and checks respectively checking with in individual receptacle 61 with socket 6.And, utilize and check that 101 pairs of control parts respectively check and carry out the inspection of electrical specification with the IC device 100 in individual receptacle 61.After this inspection finishes, make second-hand's unit bearing portion 914 increase, the IC device 100 being kept by second-hand unit 93 is taken out from checking by individual receptacle 61.

When carrying out above-mentioned operation, carry out following operation.First, the complete IC device 100 of inspection each first-hand unit 92 being kept is accommodated in each groove 431 of pallet 43.Next, make the first shuttle 4 court+directions X side shiftings, become pallet 42 with respect to check be arranged in+Y-direction of socket 6 and be positioned at each first-hand unit 92 under state, and become pallet 43 with respect to the state of be arranged in+Y-direction of recycling pallet 3.Next, each first-hand unit 92 keeps being incorporated in the IC device 100 of pallet 42, and utilizes recycling machine people 8 that the complete IC device 100 of the inspection that is incorporated in pallet 43 is transferred to recycling pallet 3.

(step 9)

Next, as shown in figure 19, make first-hand unit bearing portion 913, second-hand's unit bearing portion 914 court-Y-direction side shiftings, become first-hand unit bearing portion 913 be positioned at check with (inspection origin position) directly over socket 6 and second-hand's unit bearing portion 914 be positioned at pallet 52 directly over state.Now, identical with above-mentioned steps 5, be held in the location of the IC device 100 of first-hand unit 92.

When carrying out the movement of above-mentioned first-hand unit bearing portion 913, second-hand's unit bearing portion 914, carry out following operation.First, make the first shuttle 4 court-directions X side shiftings, become pallet 43 with respect to the state checking by be arranged in+Y-direction of socket 6, and become pallet 42 with respect to the state of be arranged in+Y-direction of supply tray 2.Next, utilize supply equipment people 7 that the IC device 100 that is incorporated in supply tray 2 is transferred to pallet 42, IC device 100 is accommodated in to each groove 421 of pallet 42.And, identical with above-mentioned situation, utilize carrying state testing agency 200 to detect the carrying state of the IC device 100 that is incorporated in each groove 421.

(step 10)

Next, as shown in figure 20, first-hand unit bearing portion 913 is declined, the IC device 100 being kept by each first-hand unit 92 is disposed at and checks with each of socket 6 and check with in individual receptacle 61.Then, utilize and check that 101 pairs of control parts respectively check and carry out the inspection of electrical specification with the IC device 100 in individual receptacle 61.After this inspection finishes, make first-hand unit bearing portion 913 increase, the IC device 100 being kept by each first-hand unit 92 is taken out from checking by individual receptacle 61.

When carrying out above-mentioned operation, carry out following operation.First, the complete IC device 100 of inspection each second-hand unit 93 being kept is accommodated in each groove 531 of pallet 53.Next, make the second shuttle 5 court+directions X side shiftings, become pallet 52 with respect to check be arranged in-Y-direction of socket 6 and be positioned at second-hand unit 93 under state, and become pallet 53 with respect to the state of be arranged in+Y-direction of recycling pallet 3.Next, each second-hand unit 93 keeps being incorporated in the IC device 100 of pallet 52, and utilizes recycling machine people 8 that the complete IC device 100 of the inspection that is incorporated in pallet 53 is transferred to recycling pallet 3.

(step 11)

Below, repeatedly carry out above-mentioned steps 7～step 10.In addition, in this process repeatedly, the IC device 100 that is incorporated in supply tray 2 is all being transferred to after the first shuttle 4, supply tray 2 moves to outside the S of region.Then, to supply tray 2, supply with new IC device 100 or be replaced by other the supply tray 2 of taking in IC device 100, then make supply tray 2 again move in the S of region.Equally, in process repeatedly, if all taken in IC device 100 at whole groove 31 of recycling pallet 3, make recycling pallet 3 move to outside the S of region.Then, after taking off and being incorporated in the IC device 100 of recycling pallet 3 or recycling pallet 3 is replaced by other empty recycling pallet 3, recycling pallet 3 is moved in the S of region again.

According to said method, can carry out efficiently the inspection of IC device 100.Particularly, check and there is first-hand unit 92 and second-hand unit 93 with robot 9, for example, the IC device 100 keeping at first-hand unit 92 (second-hand unit 93 is also like this) is examined under the state checking with socket 6, meanwhile, second-hand unit 93 is by the IC device 100 standby that check that the IC device 100 finishing is accommodated in pallet 53 and keeps next checking.Like this, use two hand unit to carry out respectively different operations simultaneously, the time that can cut the waste thus, can carry out efficiently the inspection of IC device 100.

The second embodiment

Next, the second embodiment of testing fixture of the present utility model is described.

Figure 21 means the birds-eye view of the supply equipment people's that the related testing fixture of the second embodiment of the present utility model has hand unit, and Figure 22 is the birds-eye view of the support that has of the hand unit shown in Figure 21.

Below, for the testing fixture of the second embodiment, centered by the difference with above-mentioned embodiment, describe, for identical item, description thereof is omitted.

The structure difference of the Y-direction travel mechanism that the related testing fixture of the second embodiment of the present utility model has except supply equipment people and recycling machine people's hand unit, other structure is identical with above-mentioned the first embodiment.In addition, the structure identical with above-mentioned the first embodiment marked to identical symbol.In addition, in the present embodiment, the structure of the hand unit that the hand unit that supply equipment people has and recycling machine people have is mutually the same, below, the hand unit that the supply robot of take has is as representative describes, and description thereof is omitted in the hand unit having for recycling machine people.

As shown in figure 21, the Y-direction travel mechanism 77 that the hand unit 7c of present embodiment has ' have: be arranged at the first support 71 unit 1100 for the first support, be arranged at the second support 72 unit 1200 for the second support, be arranged at the 3rd unit 1300 for support of the 3rd support 73, unit 1400 and the driver train 1500 that drives each unit 1100,1200,1300,1400 for the 4th support that is arranged at the 4th support 74.

Driver train 1500 has: a pair of belt wheel (the first travel mechanism the first guide wheel that is arranged at the second pedestal 752, the first travel mechanism the second guide wheel) 1508, 1509, hang on a pair of belt wheel 1508, band between 1509 (the first travel mechanism drives rope by the first annular) 1510, the castellated shaft (transmission shaft) 1501 that is coaxially fixed on belt wheel 1509 and extends at directions X, four splined nuts 1502 that are arranged at the periphery of castellated shaft 1501, 1503, 1504, 1505, and the motor 1507 that makes belt wheel 1508 rotations.

Motor 1507 is fixed on the second pedestal 752.When CD-ROM drive motor 1507, its propulsive effort is via being with 1510 to be delivered to belt wheel 1509, and castellated shaft 1501 is around its axle rotation.Like this, by motor 1507 is fixed on to base portion 75, CD-ROM drive motor 1507 and can prevent the increase of the weight of the first support 71～four support 74 stably.

Four splined nuts 1502,1503,1504,1505 move along its axis freely with respect to castellated shaft 1501 respectively, but they are limited around the rotation of axle.That is,, when utilizing motor 1507 to make castellated shaft 1501 rotation, splined nut 1502,1503,1504,1505 is rotation respectively also.

In addition, in splined nut 1502,1503,1504,1505, splined nut 1502 is to rotate freely by the first support 71 supportings, splined nut 1503 is to rotate freely by the second support 72 supportings, splined nut 1504 is to rotate freely by the 3rd support 73 supportings, and splined nut 1505 is to rotate freely by the 4th support 74 supportings.

In addition, as mentioned above, splined nut 1503,1504,1505 with respect to castellated shaft 1501 its axially (directions X) mobile freely, so the second support 72 that Y-direction travel mechanism 77 ' do not hinder is undertaken by directions X travel mechanism 76, the 3rd support 73, the 4th support 74 are in the movement of directions X.

As shown in figure 22, the first support has a pair of belt wheel (for the first travel mechanism the 3rd guide wheel, for the first travel mechanism the 4th guide wheel) 1101,1102 with unit 1100 and hang on the band (for the first travel mechanism, the second annular drives rope) 1103 between a pair of belt wheel 1101,1102.Wherein, belt wheel 1101 is coaxially fixed on splined nut 1502, and the axle around castellated shaft 1501 together with splined nut 1502 rotates.In addition, belt wheel 1102 leaves in Y-direction with respect to belt wheel 1101, and is to rotate freely by the first support 71 supportings.And, be with 1103 to be hung between these belt wheels 1101,1102.With 1103, between belt wheel 1101,1102, have two region 1103a, 1103b that extend in Y-direction, at region 1103a, the first moving part 715 is fixed on is with 1103.In addition, splined nut 1503 also can double as belt wheel 1101.

The second support is identical by the structure of unit 1100 with above-mentioned the first support by the structure of unit 1200.The second support has a pair of belt wheel (for the first travel mechanism the 5th guide wheel, for the first travel mechanism the 6th guide wheel) 1201,1202 with unit 1200 and hang on the band (for the first travel mechanism, the 3rd annular drives rope) 1203 between a pair of belt wheel 1201,1202.Wherein, belt wheel 1201 is coaxially fixed on splined nut 1503, and the axle around castellated shaft 1501 together with splined nut 1503 rotates.In addition, belt wheel 1202 leaves in Y-direction with respect to belt wheel 1201, and is to rotate freely by the second support 72 supportings.And, be with 1203 to be hung between these belt wheels 1201,1202.With 1203, between belt wheel 1201,1202, have two region 1203a, 1203b that extend in Y-direction, at region 1203a, the second moving part 725 is fixed on is with 1203.

The 3rd support is identical by the structure of unit 1100 with above-mentioned the first support by the structure of unit 1300.The 3rd support has a pair of belt wheel (for the first travel mechanism the 7th guide wheel, for the first travel mechanism the 8th guide wheel) 1301,1302 with unit 1300 and hang on the band (for the first travel mechanism, Fourth Ring shape drives rope) 1303 between a pair of belt wheel 1301,1302.Wherein, belt wheel 1301 is coaxially fixed on splined nut 1504, and the axle around castellated shaft 1501 together with splined nut 1504 rotates.In addition, belt wheel 1302 leaves in Y-direction with respect to belt wheel 1301, and is to rotate freely by the 3rd support 73 supportings.And, be with 1303 to be hung between these belt wheels 1301,1302.With 1303, between belt wheel 1301,1302, have two region 1303a, 1303b that extend in Y-direction, at region 1303a, the 3rd moving part 735 is fixed on is with 1303.

The 4th support is identical by the structure of unit 1100 with above-mentioned the first support by the structure of unit 1400.The 4th support has a pair of belt wheel (for the first travel mechanism the 9th guide wheel, for the first travel mechanism the tenth guide wheel) 1401,1402 with unit 1400 and hang on the band (for the first travel mechanism, five rings shape drives rope) 1403 between a pair of belt wheel 1401,1402.Wherein, belt wheel 1401 is coaxially fixed on splined nut 1505, and the axle around castellated shaft 1501 together with splined nut 1505 rotates.In addition, belt wheel 1402 leaves in Y-direction with respect to belt wheel 1401, and is to rotate freely by the 4th support 74 supportings.And, be with 1403 to be hung between these belt wheels 1401,1402.With 1403, between belt wheel 1401,1402, have two region 1403a, 1403b that extend in Y-direction, at region 1403a, the 4th moving part 745 is fixed on is with 1403.

In addition, belt wheel 1101,1102,1201,1202,1301,1302,1401,1402 has respectively equal external diameter.

The Y-direction travel mechanism 77 of said structure ' in, when utilizing motor 1507 to make castellated shaft 1501 rotations, its rotational force is delivered to each belt wheel 1101,1201,1301,1401 and made to be respectively with 1103,1203,1303,1403 whens rotation, at region 1103a, 1203a, 1303a, 1403a, with 1103,1203,1303,1403 same side towards Y-direction, with the speed equating, advance.Therefore,, when being with 1103,1203,1303,1403 rotation, each moving part 715,725,735,745 moves equal distance with respect to each support 71,72,73,74 integratedly in Y-direction.

According to the Y-direction travel mechanism 77 ' of said structure, can make reliably the distance of leaving of leaving distance and pick-up nozzle 743,748 of leaving distance, pick-up nozzle 733,738 of leaving distance, pick-up nozzle 723,728 of pick-up nozzle 713,718 keep being equal to each other, and can change the above-mentioned distance of leaving.In addition, in Y-direction travel mechanism 77 ', for each of each support 71～74, special-purpose unit is set, so can make more reliably each moving part 715～745 move in Y-direction.

In the above-described 2nd embodiment, also can bring into play the effect identical with above-mentioned the first embodiment.

In addition in above-mentioned driver train 1500, be the structure that castellated shaft 1501 and splined nut 1502～1505 are combined, but as long as can bring into play the function identical with them, there is no particular limitation for the structure of driver train 1500.

Above, in conjunction with graphic embodiment, feedway of the present utility model and testing fixture are illustrated, but the utility model is not limited to this, the structure of each several part can be replaced into the arbitrary structures with identical function.In addition, can in the utility model, add other construct arbitrarily.In addition, also each embodiment suitably can be combined.

Nomenclature

1: testing fixture; 11: pedestal; 2: supply tray; 21: groove; 23: guide rail; 3: recycling pallet; 31: groove; 33: guide rail; 4: the first shuttles; 41: base component; 42: pallet; 421: groove; 43: pallet; 431: groove; 44: guide rail; 5: the second shuttles; 51: base component; 52: pallet; 521: groove; 53: pallet; 531: groove; 54: guide rail; 6: inspection socket; 61: inspection individual receptacle; 611: side; 613: bottom; 62: probe; 7: supply equipment people; 7a: bearer frame; 7b: movable frame; 7c: hand unit; 71: the first supports; 711: first component maintaining body; 712: axle; 713: pick-up nozzle; 714: the first driver trains; 714a: belt wheel; 714b: belt wheel; 714c: band; 714d: motor; 714e: fixed part; 715: the first moving parts; 716: second component maintaining body; 717: axle; 718: pick-up nozzle; 719: driver train; 719a: belt wheel; 719b: belt wheel; 719c: band; 719d: motor; 719e: fixed part; 72: the second supports; 721: the three parts maintaining bodies; 722: axle; 723: pick-up nozzle; 724: driver train; 724a: belt wheel; 724b: belt wheel; 724c: band; 724d: motor; 724e: fixed part; 725: the second moving parts; 726: the four parts maintaining bodies; 727: axle; 728: pick-up nozzle; 729: driver train; 729a: belt wheel; 729b: belt wheel; 729c: band; 729d: motor; 729e: fixed part; 73: the three supports; 731: the five parts maintaining bodies; 732: axle; 733: pick-up nozzle; 734: driver train; 734a: belt wheel; 734b: belt wheel; 734c: band; 734d: motor; 734e: fixed part; 735: the three moving parts; 736: the six parts maintaining bodies; 737: axle; 738: pick-up nozzle; 739: driver train; 739a: belt wheel; 739b: belt wheel; 739c: band; 739d: motor; 739e: fixed part; 74: the four supports; 741: the seven parts maintaining bodies; 742: axle; 743: pick-up nozzle; 744: driver train; 744a: belt wheel; 744b: belt wheel; 744c: band; 744d: motor; 744e: fixed part; 745: the four moving parts; 746: the eight parts maintaining bodies; 747: axle; 748: pick-up nozzle; 749: driver train; 749a: belt wheel; 749b: belt wheel; 749c: band; 749d: motor; 749e: fixed part; 75: base portion; 751: the first pedestals; 752: the second pedestals; 753: guide rail; 754: guiding piece; 755: guiding piece; 756: guiding piece; 76:X direction travel mechanism; 761: twin-stage belt wheel; 761a: path belt wheel; 761b: large-calibred belt wheel; 762: twin-stage belt wheel; 762a: path belt wheel; 762b: large-calibred belt wheel; 763: band; 763a: region; 763b: region; 764: band; 764a: region; 764b: region; 765: motor; 77:Y direction travel mechanism; 77a: first module; 77b: second unit; 771: belt wheel; 772: belt wheel; 773: band; 773a: region; 773b: region; 774: belt wheel; 775: belt wheel; 776: band; 776a: region; 776b: region; 777: motor; 778: transmitter shaft; 779: connection shaft; 779b: straight line sleeve; 779c: straight line sleeve; 779d: straight line sleeve; 8: recycling machine people; 8a: bearer frame; 8b: movable frame; 8c: hand unit; 9: inspection robot; 911: framework; 911a: guide rail; 912: framework; 912a: guide rail; 912b: guide rail; 913: hand unit bearing portion; 914: hand unit bearing portion; 92: hand unit; 93: hand unit; 94: support; 941: device mark; 95: the first moving parts; 96: the second moving parts; 97: rotating part; 98: maintaining part; 10: control setup; 101: check control part; 102: drive control part; 100:IC device; 200: carrying state testing agency; 500: the second photographic cameras; 600: the first photographic cameras; 1100: the first support unit; 1101: belt wheel; 1102: belt wheel; 1103: band; 1103a: region; 1103b: region; 1200: the second support unit; 1201: belt wheel; 1202: belt wheel; 1203: band; 1203a: region; 1203b: region; 1300: the three support unit; 1301: belt wheel; 1302: belt wheel; 1303: band; 1303a: region; 1303b: region; 1400: the four support unit; 1401: belt wheel; 1402: belt wheel; 1403: band; 1403a: region; 1403b: region; 1500: driver train; 1501: castellated shaft; 1502: splined nut; 1503: splined nut; 1504: splined nut; 1505: splined nut; 1507: motor; 1508: belt wheel; 1509: belt wheel; 1510: band; S: region.

Claims (9)

1. a feedway, is characterized in that,

When three mutually orthogonal directions are made as to first direction, second direction and third direction,

Described feedway comprises:

Base portion;

The first support, this first support is fixed in described base portion;

The second support, this second support is supported in described base portion, with respect to described the first supporting portion, in described first direction, and moves at described first direction with respect to described base portion; And

Travel mechanism,

Described the first support comprises:

First component maintaining part, this first component maintaining part moves at described third direction with respect to described the first support, and holding member;

The first moving part, this first moving part moves in described second direction with respect to described the first support; And

Second component maintaining part, this second component maintaining part is supported in described the first moving part, with respect to described first component maintaining part, is positioned at described second direction, and moves at described third direction with respect to described the first moving part, and keeps described parts,

Described the second support comprises:

The 3rd parts maintaining part, the 3rd parts maintaining part moves at described third direction with respect to described the second support, and keeps described parts;

The second moving part, this second moving part moves in described second direction with respect to described the second support; And

The 4th parts maintaining part, the 4th parts maintaining part is supported in described the second moving part, and with respect to described the 3rd parts maintaining part, be positioned at described second direction, and move at described third direction with respect to described the second moving part, and keep described parts,

Described travel mechanism makes described the first moving part and described the second moving part move in described second direction, thereby makes described first component maintaining part and described second component maintaining part leave distance and described the 3rd parts maintaining part and described the 4th parts maintaining part in the change of distance of leaving of described second direction in described second direction.

2. feedway according to claim 1, is characterized in that,

At least a portion of described travel mechanism is supported in described base portion.

3. feedway according to claim 1, is characterized in that,

Described travel mechanism has: the first guide wheel and travel mechanism's the second guide wheel for travel mechanism, and they leave in described second direction; The first annular drives rope for travel mechanism, this travel mechanism with the first annular drive restrict hang on described travel mechanism with the first guide wheel and described travel mechanism with between the second guide wheel; And travel mechanism's drive source, this travel mechanism makes the first guide wheel and at least one party's rotation of the second guide wheel for described travel mechanism for described travel mechanism with drive source, thereby make described travel mechanism drive to restrict by the first annular, rotates,

At least described travel mechanism is supported as rotating by described base portion respectively with the second guide wheel with the first guide wheel and described travel mechanism.

4. feedway according to claim 3, is characterized in that,

Described the first moving part and described the second moving part drive rope to link with described travel mechanism by the first annular respectively directly or indirectly,

Be accompanied by described travel mechanism and by the first annular, drive the rotation of rope, described the first moving part moves in described second direction with respect to described the first support, and described the second moving part moves in described second direction with respect to described the second support.

5. feedway according to claim 3, is characterized in that,

Described travel mechanism also has: the 3rd guide wheel and the 4th guide wheel for travel mechanism for travel mechanism, and they are fixed on described the first support in the mode that can rotate, and leave in described second direction; The second annular drives rope for travel mechanism, this travel mechanism with the second annular drive restrict hang on described travel mechanism with the 3rd guide wheel and described travel mechanism with between the 4th guide wheel; Transfer part, this transfer part links the first guide wheel and the 3rd guide wheel for described travel mechanism for described travel mechanism, and described travel mechanism is delivered to the 3rd guide wheel for described travel mechanism with the rotation of the first guide wheel; And connecting part, this connecting part links described travel mechanism and drives rope and described travel mechanism to drive rope by the second annular by the first annular,

Described the first moving part and described the second moving part link with described connecting part respectively.

6. feedway according to claim 5, is characterized in that,

Described travel mechanism is supported in described base portion with drive source.

7. feedway according to claim 1, is characterized in that,

Described the first support and described the second support are respectively extend at described second direction and described third direction both direction tabular.

8. feedway according to claim 1, is characterized in that,

Described first component maintaining part, described second component maintaining part, described the 3rd parts maintaining part and described the 4th parts maintaining part have respectively the pick-up nozzle that carrys out holding object by absorption.

9. a testing fixture, is characterized in that,

Described testing fixture has:

The feedway that in claim 1～8, any one is recorded; And

Carry out the inspection portion of the inspection of object,

Described testing fixture is configured to, and utilizes described feedway that described object is transported to described inspection portion.