TWI585835B - Tape expansion device - Google Patents

Description

Tape expansion device Field of invention

The present invention relates to a tape expanding device for expanding an adhesive tape to which a wafer is pasted to impart an external force to a wafer.

Background of the invention

In the semiconductor device manufacturing step, a predetermined dividing line called a dicing street arranged in a lattice shape on a surface of a semiconductor wafer having a substantially circular plate shape is divided into a plurality of regions, and an IC is formed on the divided region. Equipment such as LSI. Next, each device is fabricated by dividing the semiconductor wafer along the scribe line to divide the region in which the device is formed. In addition, an optical device wafer such as a gallium nitride-based compound semiconductor having a surface area of a sapphire substrate is cut into individual light-emitting diodes, laser diodes, and the like by cutting along a predetermined dividing line. And is widely used in electrical machines.

As a method of dividing a workpiece such as the above-described semiconductor wafer or optical device wafer, the following method is put to practical use: a pulsed laser beam having a wavelength that is transparent to the workpiece is to be divided. The inside of the region is irradiated with the light-converging point, and the altered layer is continuously formed along the scribe line inside the workpiece, and the workpiece is divided by applying an external force along the scribe line whose strength is lowered by forming the altered layer. (for example, refer to the patent Offer 1)

Next, in the technique of imparting an external force along a scribe line whose strength is lowered by forming the altered layer, Patent Document 2 listed below discloses a technique in which an adhesive tape to which a wafer is pasted is expanded, and then adhered. After the tape is expanded, the ring frame is wrapped around the wafers that are divided into individual devices, and adhered to the adhesive tape.

Prior technical literature Patent literature

[Patent Document 1] Japanese Patent No. 3408805

[Patent Document 2] Japanese Patent Laid-Open No. 2006-229021

Summary of invention

Therefore, in the technique of expanding the adhesive tape to which the wafer is adhered as described in Patent Document 2, since the method of stretching the two sides of the adhesive tape is carried out, the two sides of the orthogonal tape are reduced and the damage is adhered. The problem of damage to each of the divided devices of the adhesive tape. Further, when the two opposite sides are stretched while the two sides of the orthogonal sides are sandwiched, there is a problem that the adhesive tape is not sufficiently expanded.

The present invention has been made in view of the above-described facts, and a main technical problem thereof is to provide a tape expanding device which is obtained by sandwiching and stretching two opposite sides of an adhesive tape to expand an adhesive tape. The two sides of the orthogonal shape are not reduced, and the adhesive tape can be fully expanded even in a state in which the two sides of the orthogonal sides are sandwiched.

In order to solve the above-mentioned main technical problems, according to the present invention, there is provided a tape expanding device which is capable of expanding a rectangular tape, characterized by comprising: a first holding means for holding the first side of the tape; and a second folder Holding means for holding the second side of the tape facing the first side; and the third holding means for holding the third side of the tape orthogonal to the first side and the second side; The fourth holding means can hold the fourth side of the tape facing the third side; and the expanding means can make the first holding means, the second holding means, and the third holding means The fourth holding means is moved orthogonal to each of the sides sandwiched by the fourth holding means; the first holding means, the second holding means, the third holding means, and the fourth holding The means respectively have a lower clamping member and an upper clamping member, and the upper surface of the lower clamping member is provided with a plurality of rollers rotating in a direction along the clamped side, and the upper clamp is disposed on the upper clamp The lower surface of the holding member is provided with a plurality of rollers that rotate in the direction of the side to be clamped.

In the tape expansion device according to the present invention, the first holding means, the second holding means, the third holding means, and the fourth holding means each include a lower holding member and an upper holding member. a plurality of rollers are disposed on the upper surface of the lower clamping member, and are rotated in a direction along the side of the clamping; a plurality of rollers are disposed on the lower surface of the upper clamping member. Rotating in the direction of the side to be gripped; therefore, for example, when the third side and the fourth side of the adhesive tape are stretched, the first side that is orthogonal to the third side and the fourth side is used The first holding means of the second side and the lower holding member and the upper holding member of the second holding means are sandwiched by the lower holding member The plurality of rollers disposed with the upper holding member are rotated, and the adhesive tape can be sufficiently expanded. Further, when the first side and the second side of the adhesive tape are stretched, the third holding means and the third side of the third side and the fourth side which are perpendicular to the first side and the second side are sandwiched. 4 The clamping means lowers the side clamping member and the upper clamping member, and the adhesive tape can be fully expanded because the plurality of rollers disposed between the lower clamping member and the upper clamping member rotate .

1‧‧‧Adhesive tape

2‧‧‧ tape expansion device

20‧‧‧Fixed abutments

201a‧‧‧1st guiding groove

201b‧‧‧2nd guiding groove

201c‧‧‧3rd guiding groove

201d‧‧‧4th guiding groove

3‧‧‧ Round shaped holding table

30‧‧‧Support means

4a‧‧‧1st clamping means

4b‧‧‧2nd clamping means

4c‧‧‧3rd clamping means

4d‧‧‧4th clamping method

41‧‧‧ movable base

411‧‧‧Mobile Department

411a‧‧‧ Guided track

411b‧‧‧ female thread

412‧‧‧Support Department

412a‧‧‧Guided track

412b‧‧‧Long ditch

412c‧‧‧Long points

42‧‧‧Bottom clamping mechanism

421‧‧‧Support arm

421a‧‧‧Guided ditch

421b‧‧‧ female thread

421c‧‧‧ Female screw

422‧‧‧Bottom clamping member

423‧‧‧roller

43‧‧‧Upper clamping mechanism

431‧‧‧Support arm

431a‧‧‧guided ditch

431b‧‧‧ female thread

431c‧‧‧ Female screw

432‧‧‧Upper clamping member

433‧‧‧roller

44‧‧‧1st mobile agency

441‧‧‧ male screw

442‧‧‧ bearing

443‧‧‧pulse motor

45‧‧‧2nd mobile agency

451‧‧‧ male screw

452‧‧‧ bearing

453‧‧‧pulse motor

5a‧‧‧1st tape expansion means

5b‧‧‧2nd tape expansion means

5c‧‧‧3rd tape expansion means

5d‧‧‧4th tape expansion means

51‧‧‧ male screw

52‧‧‧ bearing

53‧‧‧ pulse motor

7‧‧‧ ring frame

10‧‧‧ wafer

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a tape expanding device constructed in accordance with the present invention.

Fig. 2 is a front elevational view showing the main part of the lower holding member and the upper holding member constituting the holding means of the tape expanding device shown in Fig. 1 in an enlarged manner.

Fig. 3 is an explanatory view of a tape expanding step performed using the tape expanding device shown in Fig. 1.

Fig. 4 is an explanatory view showing a first tape expanding step which is carried out using the tape expanding device shown in Fig. 1;

Fig. 5 is an explanatory view showing a second tape expansion step which is carried out using the tape expanding device shown in Fig. 1;

Fig. 6 is an explanatory view showing a state in which each of the divided devices adhered to the adhesive tape is subjected to the first tape expansion step and the second tape expansion step.

Fig. 7 is an explanatory view showing a frame mounting step which is carried out using the tape expanding device shown in Fig. 1.

Figure 8 is a diagram showing the frame mounting step shown in Figure 7 and is divided into A cross-sectional view of a state in which a wafer 10 having a spacer (s) is supported by an annular frame through an adhesive tape is formed between the devices.

Figure 9 is a plan view of an adhesive tape expanded by a tape expansion device.

Detailed description of the preferred embodiment

Hereinafter, a preferred embodiment of the tape expanding device constructed in accordance with the present invention will be described in detail with reference to the accompanying drawings.

In Fig. 9, a plan view showing an adhesive tape expanded by a tape expanding device is shown. The adhesive tape 1 shown in the figure is formed in a square shape (rectangular shape), and has a first side 1a, a second side 1b facing the first side 1a, and a first side 1a and the second side 1b. The third side 1c is intersected, and the fourth side 1d is opposed to the third side 1c. An adhesive layer is applied to the surface of the adhesive tape 1 thus formed, and the wafer 10 is adhered to the central portion of the surface. Further, the wafer 10 is composed of a semiconductor wafer which is formed in a lattice shape on the surface 10a in a state in which the plurality of dicing streets 101a are used. Each of the plurality of divided regions 101 is formed with a device 102; and is divided into individual devices 102 along the scribe line 101.

Next, a tape expanding device for expanding the above-described adhesive tape 1 to which the wafer 10 divided into the respective devices 102 is adhered will be described with reference to FIGS. 1 and 2 . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an embodiment of a tape expanding device constructed in accordance with the present invention. The tape expansion device 2 of the embodiment shown in Fig. 1 includes a fixed base 20 and a circular holding table 3 The adhesive tape 1 disposed on the upper surface of the central portion of the fixed base 20; the first holding means 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d, The first adhesive tape 1 is placed on the holding table 3; the first tape expanding means 5a, the second tape expanding means 5b, the third tape expanding means 5c, and the fourth tape expanding means 5d are used to make the first one. The holding means 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d are respectively moved in the radial direction of the circular holding table 3.

The fixed base 20 is formed in a rectangular shape, and the first guide groove 201a and the second guide groove 201b formed at the center of the circular holding table 3 are formed on the upper surface thereof at an angle maintained at 90 degrees to each other. The third guiding groove 201c and the fourth guiding groove 201d. Further, the first guide groove 201a, the second guide groove 201b, the third guide groove 201c, and the fourth guide groove 201d of the fixed base 20 are formed so that the outer peripheral portion protrudes outward.

The round table 3 described above is supported by the support means 30 on the upper surface of the fixed base 20. The support means 30 is fixed to the embodiment shown in the figure, and is configured to move the holding table 3 in the vertical direction.

The first holding means 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d are respectively disposed on the first holding means 4a and the first holding means formed on the fixed base 20. 2 gripping means 4b, third holding means 4c and fourth holding means 4d. In other words, the four holding means 4a, 4b, 4c, and 4d are disposed at equal angles to each other in the circumferential direction. The first holding means 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d which are disposed on the fixed base 20 in this manner have the same configuration in the illustrated embodiment. Each includes: a movable base 41 formed in an L shape; and a lower clamping mechanism 42 That is, the upper side clamping mechanism 43 is attached to the movable base 41 so as to be movable up and down; and the first moving mechanism 44 and the second moving mechanism 45 are provided for the lower side clamping mechanism 42 and the upper side clamp. The holding mechanism 43 is moved in the vertical direction. The movable base 41 is composed of a moving portion 411 and a support portion 412. The support portion 412 is formed by standing from the upper surface of the moving portion 411. On the lower surface of the moving portion 411, guided rails 411a fitted to the first guiding groove 201a, the second guiding groove 201b, the third guiding groove 201c, and the fourth guiding groove 201d are respectively provided; The rail 411a is fitted to the first guide groove 201a, the second guide groove 201b, the third guide groove 201c, and the fourth guide groove 201d, respectively, and the movable base 41 is slidable along the first guide on the fixed base 20 The groove 201a, the second guide groove 201b, the third guide groove 201c, and the fourth guide groove 201d are moved. Further, a female screw 411b is formed in the moving portion 411 so as to penetrate therethrough. A guide rail 412a extending in the vertical direction is formed on a surface (a surface facing each other) of the support portion 412, and a long groove 412b extending in the vertical direction is formed on the outer surface. Further, the guide rail 412a is formed with a long hole 412c which extends from the inner surface to the long groove 412b and extends in the vertical direction.

The lower clamping mechanism 42 is configured by a support arm 421 and a lower clamping member 422; the support arm is disposed to be movable along a guiding rail 412a provided by the supporting portion 412 of the movable base 41; The lower clamping member is attached to the support arm 421. A guided groove 421a fitted to the guide rail 412a is provided at a base end of the support arm 412, and the support arm 421a is fitted to the guide rail 412a, and the support arm 421 is attached to the support portion of the movable base 41. 412, in the upper and lower directions along the guiding track 412a It is constructed by moving up. Further, a female screw 421c having a female screw 421b is provided at a base portion of the support arm 421, and the female female screw 421c is inserted through the long hole 412. In the illustrated embodiment, the lower sandwiching member 422 is formed in a rectangular parallelepiped shape, and its longitudinal direction is disposed in a direction orthogonal to the guided rail 411a. The upper surface of the lower side sandwiching member 422 which is formed on the side of the clamping surface is provided with a plurality of rollers 423 which are rotated in the longitudinal direction of the lower sandwiching member 422.

The upper clamping mechanism 43 is constituted by a support arm 431 and an upper clamping member 432; the support arm is disposed to be movable along a guide rail 412a provided by the support portion 412 of the movable base 41; the upper side The clamping member is attached to the support arm 431. A guided groove 431a fitted to the guide rail 412a is provided at a base end of the support arm 431, and the support groove 431a is fitted to the guide rail 412a, and the support arm 431 is attached to the support portion of the movable base 41. The 412 is configured to be movable in the vertical direction along the guide rail 412a. Further, a female screw 431c having a female screw 431b is provided at a base portion of the support arm 431, and the female screw 431c is inserted through the long hole 412c. The upper holding member 432 is formed in a rectangular parallelepiped shape in the illustrated embodiment, and its longitudinal direction is disposed in a direction orthogonal to the guided rail 411a. The lower surface of the upper side sandwiching member 432 which is formed on the side of the clamping surface is provided with a plurality of rollers 433 (see FIG. 2) that rotate in the longitudinal direction of the upper sandwiching member 432. As shown in FIG. 2, the plurality of rollers 433 are disposed to face a plurality of rollers 423 disposed on the lower sandwiching member 422 of the lower sandwiching mechanism 42.

The first lower side clamping mechanism 42 is moved in the vertical direction The moving mechanism 44 is configured such that the male screw 441 is disposed in parallel with the guide rail 412a in the long groove 412b formed by the support portion 412 of the movable base 41, and is provided at the base of the support arm 421. The female screw 421b of the female screw 421c is screwed; the bearing 442 is disposed on the support portion 412 of the movable base 41, and supports one end of the male screw 441 in such a manner as to be rotatable; and the pulse motor 443 It is attached to the other end of the male screw 441 and is used to rotationally drive the male screw 441. The first moving mechanism 44 configured as described above rotates the male screw 441 in one direction or the other direction by the drive pulse motor 443, thereby moving the lower clamping mechanism 42 in the vertical direction along the guide rail 412a.

The second moving mechanism 45 that moves the upper side clamping mechanism 43 in the vertical direction is disposed on the upper side of the first moving mechanism 44 in the same configuration as the first moving mechanism 44. In other words, the second moving mechanism 45 is configured such that the male screw 451 is disposed in parallel with the guide rail 412a in the long groove 412b formed by the support portion 412 of the movable base 41, and is coupled to the support arm 431. The female screw 431b of the female screw 431c provided at the base is screwed; the bearing 452 is disposed on the support portion 412 of the movable base 41, and supports one end of the male screw 451 so as to be rotatable; The pulse motor 453 is coupled to the other end of the male screw 451 and used to rotationally drive the male screw 451. In the second moving mechanism 45 configured as described above, the male screw 451 is rotated in one direction or the other direction by the drive pulse motor 453, and the upper clamp mechanism 43 is moved in the vertical direction along the guide rail 412a.

The first holding means 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d are respectively held in a circular shape to the diameter of the table 3. The first tape expansion means 5a, the second tape expansion means 5b, the third tape expansion means 5c, and the fourth tape expansion means 5d which are moved are respectively formed along the first guide groove 201a formed on the fixed base 20, and The guide groove 201b, the third guide groove 201c, and the fourth guide groove 201d are disposed. The first tape expansion means 5a, the second tape expansion means 5b, the third tape expansion means 5c, and the fourth tape expansion means 5d are respectively associated with the first guide groove 201a, the second guide groove 201b, and the third guide groove 201c. The fourth guide groove 201d is disposed in parallel; and the male screw 51 is screwed to the female screw 411b formed on the moving portion 411 of the movable base 41; the bearing 52 is configured to be The one end portion of the male screw 51 disposed on the fixed base 20 is supported by a rotational driving method, and the pulse motor 53 is coupled to the other end of the male screw 51 and used to rotationally drive the male screw 51. The first tape expanding means 5a, the second tape expanding means 5b, the third tape expanding means 5c, and the fourth tape expanding means 5d which are configured as described above drive the male screw 41 to one direction or the other by the drive pulse motor 53, respectively. When the direction is rotated, the first holding means 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d are moved in the radial direction of the circular holding table 3, respectively.

The tape expanding device 2 of the embodiment shown in Fig. 1 and Fig. 2 is configured as described above, and its operation will be described below. The adhesive tape 1 to which the wafer 10 (divided into the respective devices 102) is adhered to the center portion of the surface shown in Fig. 9 is placed on the holding table 3 by a transfer device (not shown). At this time, the adhesive tape 1 faces the first side 1a toward the first holding means 4a, the second side 1b toward the second holding means 4b, and the third side 1c toward the third holding means 4c, and the fourth side 1d is placed toward the fourth holding means 4d. Furthermore, at this time, the holding table 3 is The height of the lower side clamping mechanism 42 is sandwiched between the lower clamping member 422 and the upper clamping mechanism 43 at the intermediate position, and the lower clamping mechanism 42 is formed by the upper surface to constitute the first clamping means. 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d.

Then, the first tape expanding means 5a, the second tape expanding means 5b, the third tape expanding means 5c, and the fourth tape expanding means 5d are operated to sandwich the first holding means 4a, the second holding means 4b, and the third holding The means 4c and the lower holding mechanism 42 and the upper holding mechanism 43 of the fourth holding means 4d are positioned at positions where the adhesive tape 1 can be held. Next, the first moving mechanism 44 and the second moving mechanism 45 constituting the first holding means 4a, the second holding means 4b, the third holding means 4c, and the fourth holding means 4d are operated as shown in Figs. 2 and 3. As shown in the drawing, the respective sides of the adhesive tape 1 are sandwiched by the lower holding member 422 of the lower holding mechanism 42 and the upper holding member 432 of the upper holding mechanism 43 (tape holding step).

As shown in FIG. 2 and FIG. 3, the sides of the adhesive tape 1 are sandwiched by the lower side clamping member 422 and the upper side clamping member 432 of the upper side clamping mechanism 43, for example, operation. As shown in FIG. 4, the third tape expanding means 5c and the fourth tape expanding means 5d are configured such that the lower holding means 42 and the upper holding means 43 of the third holding means 4c and the fourth holding means 4d are formed. 4 moves in the direction indicated by the arrows A1 and A2 (the horizontal direction in Fig. 4). As a result, the adhesive tape 1 is stretched and expanded in the direction indicated by the arrows A1 and A2 (the horizontal direction in FIG. 4) (the first tape expansion step). In this case, the lower sandwiching member 422 and the upper sandwiching member 432 are provided with a plurality of rollers 423 and 433 that rotate in the longitudinal direction (the direction along the first side 1a and the second side 1b). The adhesive tape 1 is stretched and expanded in the direction indicated by the arrows A1 and A2 (the horizontal direction in FIG. 4). The plurality of rollers 423 and 433 disposed between the lower clamping member 422 and the upper clamping member 432 rotate; wherein the lower clamping member 422 and the upper clamping member 432 constitute the first clamping means 4a and The second clamping means 4b has a lower clamping mechanism 42 and an upper clamping mechanism 43; wherein the first clamping means 4a and the second clamping means 4b have a lower clamping mechanism 42 and an upper clamping mechanism 43. The third side 1c and the fourth side 1d of the adhesive tape 1 sandwiched between the lower holding mechanism 42 and the upper holding mechanism 43 of the third holding means 4c and the fourth holding means 4d are positively held. The first side 1a and the second side 1b are handed over. Therefore, when the third side 1c and the fourth side 1d of the expanded adhesive tape 1 are sandwiched, the first side 1a and the second side 1b orthogonal to the third side 1c and the fourth side 1d are sandwiched by the first side 1a and the second side 1b. The lower clamping mechanism 42 and the upper clamping mechanism 42 of the second clamping device 4a are sandwiched by the lower clamping mechanism 42 and the lower clamping member 42 and the lower clamping member 422 of the upper clamping mechanism 43 and Since the plurality of rollers 423 and 433 disposed in the upper holding member 432 rotate, the adhesive tape 1 can be sufficiently expanded.

Next, in a state in which the third side 1c and the fourth side 1d of the adhesive tape 1 shown in FIG. 4 are stretched and expanded, as shown in FIG. 5, the first holding means 4a and the second holding are formed. The lower side clamping mechanism 42 and the upper side clamping mechanism 43 of the means 4b are moved in the direction indicated by the arrows B1 and B2 in Fig. 5 (vertical direction in Fig. 5). As a result, the adhesive tape 1 is stretched and expanded in the direction indicated by the arrows B1 and B2 (upper and lower directions in FIG. 5) (second tape expansion step). At this time, the lower sandwiching member 422 and the upper sandwiching member 432 are provided with a plurality of rollers 423 and 433 that rotate in the longitudinal direction (the direction along the third side 1c and the fourth side 1d). The adhesive tape 1 is stretched and expanded in the directions indicated by arrows B1 and B2 (up and down directions in FIG. 5), and the lower sandwiching member 422 and the upper sandwiching member 432 are The plurality of rollers 423 and 433 are rotated, wherein the lower clamping member 422 and the upper clamping member 432 constitute a third clamping means 4c and a lower clamping mechanism 42 of the fourth clamping means 4d. And the upper clamping mechanism 43; wherein the third clamping means 4c and the fourth clamping means 4d sandwich and clamp the lower clamping mechanism 42 of the first clamping means 4a and the second clamping means 4b The first side 1a and the second side 1b of the adhesive tape 1 held by the upper holding mechanism 43 are the third side 1c and the fourth side 1d which are orthogonal to each other. Therefore, when the first side 1a and the second side 1b of the adhesive tape 1 are sandwiched, the third side 1c and the fourth side 1d orthogonal to the first side 1a and the second side 1b are sandwiched. The lower clamping mechanism 42 and the upper clamping mechanism 42 of the fourth clamping device 4d are clamped by the lower clamping mechanism 42 and the lower clamping member 42 and the lower clamping member 422 of the upper clamping mechanism 43 and Since the plurality of rollers 423 and 433 disposed in the upper holding member 432 rotate, the adhesive tape 1 can be sufficiently expanded.

Furthermore, in the above-described embodiment, the first tape expansion is performed in a state in which the first side 1a and the second side 1b and the third side 1c and the fourth side 1d of the adhesive tape 1 are sandwiched. a step of expanding the third side 1c and the fourth side 1d of the adhesive tape 1; and the second tape expanding step is to apply the first side 1a and the second side 1b of the adhesive tape; The first tape expansion step and the second tape expansion step.

By expanding the third side 1c and the fourth side 1d of the adhesive tape 1 and the first side 1a and the second side 1b as described above, the wafer 10 adhered to the adhesive tape 1 as shown in Fig. 6 is divided into A gap S is formed between the respective devices 102.

Furthermore, even if the dimensions of the vertical and horizontal directions of the device are different, the number of columns and courses of the device disposed on the wafer is different, and the corresponding The number of devices to be disposed is adjusted by the amount of expansion of the first side 1a and the second side 1b of the adhesive tape and the amount of expansion of the third side 1c and the fourth side 1d, so that the slit S divided into the respective devices can be fixed. And a gap can be formed in a straight line.

Next, in a state in which the wafer 10 to which the adhesive tape 1 is pasted is divided into the slits S formed between the respective devices 102, as shown in FIG. 7, the ring having the opening size capable of accommodating the wafer 10 is formed. The frame 7 is attached to the surface of the adhesive layer coated with the adhesive tape 1 (frame mounting step). As a result, as shown in FIG. 8, the wafer 10 having the space (s) formed between the respective devices 102 is housed in the opening portion 70 of the annular frame 7, and is passed through the adhesive tape 1 by the ring frame. 7 supported. Therefore, when the annular frame 7 is attached to the surface of the adhesive tape 1, the adhesive tape 1 is cut along the outer circumference of the annular frame 7. Next, the ring frame 7 is passed through the wafer 10 supported by the adhesive tape 1 (the space (s) is formed between the devices 102), and is transported to the pick-up device.

2‧‧‧ tape expansion device

3‧‧‧ Round shaped holding table

4a‧‧‧1st clamping means

4b‧‧‧2nd clamping means

4c‧‧‧3rd clamping means

4d‧‧‧4th clamping method

5a‧‧‧1st tape expansion means

5b‧‧‧2nd tape expansion means

5c‧‧‧3rd tape expansion means

5d‧‧‧4th tape expansion means

20‧‧‧Fixed abutments

30‧‧‧Support means

41‧‧‧ movable base

42‧‧‧Bottom clamping mechanism

43‧‧‧Upper clamping mechanism

44‧‧‧1st mobile agency

45‧‧‧2nd mobile agency

201a‧‧‧1st guiding groove

201b‧‧‧2nd guiding groove

201c‧‧‧3rd guiding groove

201d‧‧‧4th guiding groove

411‧‧‧Mobile Department

411a‧‧‧ Guided track

411b, 421b, 431b‧‧‧ female thread

412‧‧‧Support Department

412a‧‧‧Guided track

412b‧‧‧Long ditch

412c‧‧‧Long points

421, 431‧‧‧ support arm

421a, 431a‧‧‧ Guided ditch

421c, 431c‧‧‧ female screw

422‧‧‧Bottom clamping member

423‧‧‧roller

432‧‧‧Upper clamping member

433‧‧‧roller

441, 451, 51‧‧‧ male screw

442, 452, 52‧ ‧ bearings

443, 453, 53‧ ‧ pulse motor

Claims (1)

A tape expanding device capable of expanding a rectangular tape, comprising: a first holding means for holding a first side of the tape; and a second holding means for holding the first side opposite to the first side a second side of the tape; a third holding means for holding the third side of the tape orthogonal to the first side and the second side; and a fourth holding means for holding the third side The fourth clamping means, the second holding means, the third holding means, and the fourth holding means are sandwiched by the fourth side of the tape; and the expanding means Each of the first clamping means, the second holding means, the third holding means, and the fourth holding means respectively includes a lower holding member and an upper holding member. And the upper surface of the lower clamping member is provided with a plurality of rollers rotating in a direction along the clamped side, and the lower surface of the upper clamping member is disposed along the upper surface A plurality of rollers that rotate in the direction of the sides.