TW202117824A - Sheet-expanding device preventing the sheet from being stretched locally in a configuration in which the sheet is clamped and expanded by rollers - Google Patents

Abstract

The present invention provides a novel technique capable of suppressing the sheet from being stretched locally in a configuration in which the sheet is clamped and expanded by rollers. A sheet expansion device 2 that expands the sheet 1 on which a workpiece 10 is affixed and includes: a first clamping means 4A and a second clamping means 4B, which are oppositely arranged in the first direction with the workpiece 10 in between, and configured to clamp the sheet 1 respectively; a third clamping means 4C and a fourth clamping means 4D, which are oppositely arranged in a second direction orthogonal to the first direction with the workpiece 10 in between, and configured to clamp the sheet 1 respectively; and moving means (5A ~ 5D), which make the first clamping means 4A and the second clamping means 4B move in the first direction to be away from each other, and to make the third clamping means 4C and the fourth clamping means 4D move in the second direction to be away from each other. Also, the first clamping means 4A, the second clamping means 4B, the third clamping means 4C, and the fourth clamping means 4D respectively have: inner clamping parts 42A, 43A, which are up-down oppositely arranged on the inner side of the workpiece 10; and outer clamping parts 42B, 43B, which are adjacent to the inner clamping parts 42A, 43A, and are up-down oppositely arranged on the outer side of the inner clamping parts 42A, 43A. On the upper part of the lower inner clamping part 42A and the lower outer clamping part 42B, plural rollers 42a and 42b that rotate with respect to the rotating shafts 42m, 42n as the center are arranged, and the rotating shafts are parallel to the first direction. On the lower part of the upper inner clamping part 43A and the upper outer clamping part 43B, plural rollers 43a, 43b that rotate with respect to the rotating shafts 42m, 42n as the center are arranged, and the rotating shafts are parallel to the first direction. At least in the first clamping means 4A and the second clamping means 4B, on the upper side and the lower side respectively, and in the way of being positioned between the rotating shafts 42m, 42n of the rollers 42a, 43a adjacent to the inner clamping parts 42A, 43A, the rotation shafts 42n and 43n of the rollers 42b and 43b of the outer side clamping parts 42B and 43B are arranged.

Description

Sheet expansion device

The present invention relates to a sheet expansion device that expands a sheet pasted to a workpiece.

In the past, a method is known in which after a modified layer is formed on a workpiece by irradiation with a laser beam, a thin sheet expansion device is used to expand (expand) the sheet pasted to the workpiece, thereby dividing the workpiece. The specific configuration of the sheet expansion device is disclosed in Patent Document 1, for example.

Patent Document 1 discloses an expansion device that uses a clamping mechanism to clamp the four sides of a sheet pasted to a workpiece and expand it, thereby enabling the gap between the wafers to be adjusted even in workpieces with different wafer lengths and widths. Expand the sheet in a way that becomes an appropriate distance. [Literature Technical Literature] [Patent Literature]

[Patent Document 1] JP 2014-143297 A

[The problem to be solved by the invention] In the structure disclosed in Patent Document 1, the nipping mechanism is a pair of upper and lower rollers in which a plurality of rollers are arranged in a row, and the sheet is nipped between the upper and lower rollers.

Here, the sheet to which the workpiece is pasted is generally manufactured in a strip shape. However, in the manufacturing step, tension is applied in the second direction of the longitudinal direction of the strip shape, so that it tends to shrink. Moreover, due to this tension, the sheet becomes difficult to stretch in the second direction.

In contrast, the first direction orthogonal to the second direction does not act on the aforementioned tension, so that the sheet becomes relatively easy to stretch.

In this way, the ease of elongation of the sheet is different in the first direction and the second direction, and it is considered that there is a difference in the elongation of the sheet between the part clamped by the roller and the part not clamped.

That is, in the case where the sheet S is expanded in the direction of the arrow N as shown in the enlarged view on the right side of FIG. 10 from the prepared state where the four sides of the sheet S have been clamped as shown on the left side of FIG. 10, In the part M1 sandwiched by the rollers R1 and R2, the amount of elongation increases. On the other hand, the part M2 not sandwiched between the rollers R1 and R2 has a smaller amount of elongation. In this way, the amount of elongation will also vary depending on whether it is nipped by the rollers R1 and R2. In particular, in the first direction where the direction of the arrow N is easy to extend, the difference in the amount of elongation becomes significant.

Furthermore, in the case of further expansion so that even the part of the part M2 that is not sandwiched between the rollers R1 and R2 is also stretched, the part M1 that is partially stretched while being sandwiched by the rollers R1 and R2 is further stretched. Extends, and there is a risk of breakage in this part M1.

In view of the above problems, the present invention provides a novel technique capable of suppressing local stretching of the sheet in a configuration in which the sheet is nipped and expanded by rollers.

[Technical means to solve the problem] According to one aspect of the present invention, there is a sheet expansion device, which expands a sheet pasted to a workpiece, and includes: The first clamping means and the second clamping means are arranged opposite to each other across the workpiece in the first direction, and respectively clamp the sheet; The third clamping means and the fourth clamping means are arranged facing each other across the workpiece in a second direction orthogonal to the first direction, and clamp the sheets respectively; and A moving means, which allows the first clamping means and the second clamping means to move in the first direction in directions that are separated from each other, and allows the third clamping means and the fourth clamping means to move in the first direction The two directions move in separate directions, The first clamping means, the second clamping means, the third clamping means, and the fourth clamping means respectively have: inner clamping portions, which are arranged up and down on the inner side of the workpiece side; And an outer clamping portion, which is adjacent to the inner clamping portion and arranged vertically opposite to the outer side of the inner clamping portion, A plurality of rollers that rotate around a rotation axis parallel to the direction of separation are arranged on the upper portion of the inner clamping portion on the lower side and the outer clamping portion on the lower side, and A plurality of rollers that rotate around a rotation axis parallel to the direction of separation are arranged at the lower part of the inner clamping portion on the upper side and the outer clamping portion on the upper side, and At least in the first clamping means and the second clamping means, the outer clamping portion is arranged on the upper side and the lower side, respectively, so as to be positioned between the rotation shafts of the rollers adjacent to the inner clamping portion The axis of rotation of the roller.

Furthermore, according to an aspect of the present invention, the third clamping means and the fourth clamping means are also located on the upper side and the lower side, respectively, so as to be positioned between the rotation shafts of the rollers adjacent to the inner clamping portion In an intermediate method, the rotation axis of the roller of the outer nip portion is arranged.

[Efficacy of invention] According to the configuration of the present invention, in the case where the sheet is easily stretched in the first direction and the possibility of breakage increases, the interval between the sandwiching sheets is narrowed, so that the sheet can be prevented from being locally elongated, and the sheet can be prevented from being broken. fracture.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. ＜Workpiece and sheet＞ FIG. 1 is a diagram showing a workpiece 10 as a workpiece and a sheet 1 to which the workpiece 10 has been pasted. The workpiece 10 is, for example, a disc-shaped wafer such as a semiconductor wafer or an optical element wafer. On the surface of the workpiece 10, a plurality of planned dividing lines 101 intersecting each other at right angles are set in a grid shape.

For example, before or after being stuck to the sheet 1, the workpiece 10 forms a dividing starting point along the planned dividing line 101. Then, in a state where the workpiece 10 having the starting point of division is attached to the sheet 1, the sheet 1 is expanded to be divided into wafers along the starting point of division.

The starting point of division formed along the planned dividing line 101, in addition to the modified layer formed in the workpiece 10 irradiated with laser light, it is also possible to form a groove along the planned dividing line 101 on the surface of the workpiece 10, which is used as the division starting point. The grooves can be formed by performing, for example, ablation processing by laser irradiation, cutting processing in which a cutting blade is cut, or groove processing such as scribing.

The sheet 1 is, for example, one having an adhesive layer 12 for adhering a workpiece 10 formed on one side of a substrate 11 composed of a synthetic resin sheet with expandability such as polyvinyl chloride or polyolefin. For example, it can be used larger than the workpiece 10. The rectangular ones.

In addition, in addition to semiconductor wafers and other wafers, the workpiece 10 that becomes the workpiece can also be cut by DBG (Dicing Before Grinding): the use of a blade to form a semi-cut on the surface of the workpiece along the planned dividing line. After slotting, use the backside grinding to divide the workpiece program), SDBG (Stealth Dicing Before Grinding (Stealth Dicing Before Grinding): Grind and divide the backside of the workpiece after SD processing (STEALTH DICING: registered trademark) DAF (Die Attach Film (die attach film)) for chip packaging and bonding of wafers, glass, ceramics, and resins, etc., for chip packaging to which the wafers are divided into chips are used as objects.

＜Sheet expansion device＞ Next, as shown in FIG. 2, an embodiment of a sheet expansion device for expanding a sheet to which a workpiece has been pasted will be described. This sheet expansion device 2 includes: a square-shaped fixed base 20 whose four corners are formed at right angles; and a disc-shaped holding base 3 that is arranged on the fixed base 20 and placed on the fixed base 20 horizontally. A sheet of a workpiece; a first clamping means 4A, a second clamping means 4B, a third clamping means 4C, a fourth clamping means 4D, etc., which clamp a sheet not shown on the holding table 3; And the first moving means 5A, the second moving means 5B, the third moving means 5C, and the fourth moving means 5D are each provided in these holding means 4A to 4D, among which the first moving means 5A, the second moving means 5A, and the second moving means 5A The moving means 5B respectively move the first and second clamping means 4A to 4B in the first direction, and the third moving means 5C and the fourth moving means 5D respectively move the third and fourth clamping means 4C to 4D in the second direction. mobile. These first to fourth moving means 5A to 5D constitute a moving means, and the moving means allows the first clamping means 4A and the second clamping means 4B to move in directions that are separated from each other in the first direction, In addition, the third clamping means 4C and the fourth clamping means 4D can be moved in directions separated from each other in the second direction.

The holding table 3 is supported on the upper surface of the central portion of the fixed base 20 through the cylindrical table 30. The holding table 3 is rotatably supported on the cylindrical table 30 by a rotating mechanism not shown, and is supported on the cylindrical table 30 to be movable up and down by a vertical movement mechanism not shown. The upper surface of the holding table 3 has a diameter in which the workpiece can be placed, and the sheet to which the workpiece is pasted is placed on the upper surface of the holding table 3 in a state where the workpiece is arranged on the upper side and arranged in a concentric shape.

A rectangular convex portion 201 protruding to the outside is formed in the central portion of each of the four end edges 200a, 200b, 200c, and 200d of the fixed base 20, respectively. In the fixed base 20, a rectangular first guide groove extending along the extending direction of the corresponding convex portion 201 is formed in the portion from each convex portion 201 to the inner side of the convex portion 201 (holding base 3 side). 201a, the second guide groove 201b, the third guide groove 201c, and the fourth guide groove 201d.

As shown in FIG. 2, in this case, the extension direction of a pair of end edges 200c, 200d that are parallel to each other of the fixed base 20 is set as the first direction, and the extension of the end edges 200a, 200b orthogonal to the first direction is set The direction is set as the second direction, the first clamping means 4A and the second clamping means 4B are respectively arranged at both ends of the fixed base 20 in the first direction, and the two ends of the fixed base 20 on the second direction side are respectively arranged The third clamping means 4C and the fourth clamping means 4D.

The first moving means 5A and the second moving means 5B respectively make the first clamping means 4A and the second clamping means 4B reciprocate in the first direction, and the third moving means 5C and the fourth moving means 5D respectively make the first The three clamping means 4C and the fourth clamping means 4D move back and forth in the second direction.

The first clamping means 4A and the second clamping means 4B are opposed to each other across the holding table 3 in the first direction, and are respectively arranged so as to be opposed to the first guide groove 201a and the second guide groove in the first direction. 201b moves. In addition, the third clamping means 4C and the fourth clamping means 4D are opposed to each other across the holding table 3 in the second direction, and are respectively arranged so as to be opposed to the third guide groove 201c and the fourth guide groove 201c in the second direction. The guide groove 201d moves.

The first to fourth clamping means 4A to 4D have the same structure, and include: an L-shaped movable base 41, which is movably mounted along the guide grooves 201a to 201d, respectively; a lower clamping mechanism 420 and an upper clamp The holding mechanism 430 is mounted on the inside of the movable base 41 so as to be movable up and down; and the lower moving mechanism 44 and the upper moving mechanism 45 move the holding mechanisms 420 and 430 in the up and down directions, respectively.

The movable base 41 is composed of a sliding portion 411 and a supporting portion 412. The sliding portion 411 is slidably fitted into the guide grooves 201a to 201d, respectively, and the supporting portion 412 is erected on the outside of the sliding portion 411 The end.

A guide rail 412a extending in the vertical direction is formed on the inner surface of the support portion 412. In addition, a guide groove 412b extending in the vertical direction is formed on the outer surface of the support portion 412. Furthermore, a guide hole 412c is formed in the support portion 412, and the guide hole 412c penetrates from the inner surface of the guide rail 412a to the guide groove 412b and extends in the vertical direction.

The first to fourth moving means 5A to 5D that move the first to fourth clamping means 4A to 4D along the guide grooves 201a to 201d, respectively, have the same structure, and have a screw body 51 that is screwed to the sliding portion 411, It extends along the guide grooves 201a to 201d, respectively, and a pulse motor 52, which is arranged on the convex portion 201 and drives the screw body 51 to rotate forward and backward. The front end of the screw body 51 is rotatably supported by bearings 53, and the bearings 53 are fixed to the inner sides of the guide grooves 201 a to 201 d on the fixed base 20, respectively.

The sliding part 411 of the movable base 41 to which the screw body 51 is screwed is fed from the outside to the inside or from the inside to the inside along the guide grooves 201a to 201d in accordance with the rotation direction of the screw body 51 driven by the pulse motor 52. On the outside, the first and second clamping means 4A, 4B are moved back and forth in the first direction, and the third and fourth clamping means 4C, 4D are moved back and forth in the second direction. Therefore, the first moving means 5A and the second moving means 5B respectively enable the first clamping means 4A and the second clamping means 4B to move in directions that are separated from each other in the first direction, and the third moving means 5C and the second The four moving means 5D respectively enable the third clamping means 4C and the fourth clamping means 4D to move in directions separated from each other in the second direction.

The lower clamping mechanism 420 has an arm portion 421 that is supported so as to move up and down along the guide rail 412a and extends toward the inside; and a lower clamping portion 42 that is fixed to the arm perpendicular to the arm portion 421 The front end of the portion 421, the lower clamping mechanism 420 is formed in a slightly T-shape. The base end part 421c of the arm part 421 penetrates the guide hole 412c, and is arrange|positioned in the outer guide groove 412b.

The lower clamping portions 42 of the first and second clamping means 4A, 4B extend parallel to the second direction, and the lower clamping portions 42 of the third and fourth clamping means 4C, 4D are aligned with the first direction. Extend in parallel. Each lower nip portion 42 is formed in a rectangular parallelepiped shape, and on its upper surface, a plurality of rollers (inner roller 42a, outer roller 42b (only Symbols are assigned to the first clamping means 4A, and the symbols are omitted because the other clamping means are the same.)) are arranged close to each other. The rollers (42a, 42b) of the first and second clamping means 4A, 4B are rotatably supported by the lower clamping portion 42 about a rotation axis parallel to the first direction, and the third and fourth clamping The roller system of the means 4C and 4D is supported by the lower nip portion 42 so as to be rotatably centered on a rotation axis parallel to the second direction. The lower rollers (42a, 42b (refer to the first clamping means 4A)) are attached so as to protrude from the upper surface of the lower clamping portion 42 by half of the outer peripheral surface.

The upper clamping mechanism 430, which is arranged above the lower clamping mechanism 420, has a substantially vertical symmetrical structure with the lower clamping mechanism 420, and has an arm portion 431 that is supported so as to move up and down along the guide rail 412a, and Extending toward the inside; and an upper clamping portion 43, which is fixed to the front end of the arm 431 orthogonally to the arm portion 431, and is arranged opposite to the lower clamping portion 42, the upper clamping mechanism 430 Is formed into a slightly T-shaped. The base end part 431c of the arm part 431 penetrates the guide hole 412c, and is arrange|positioned in the outer guide groove 412b.

The upper clamping portion 43 of the first and second clamping means 4A, 4B extends parallel to the second direction, and the upper clamping portion 43 of the third and fourth clamping means 4C, 4D extends parallel to the first direction extend. Each upper nip portion 43 is formed in a rectangular parallelepiped shape, and on its lower surface, a plurality of upper rollers (not shown) arranged in two rows are arranged close to each other as described later. These upper rollers are arranged in pairs with the rollers (42a, 42b (refer to the first holding means 4A)) of the lower holding portion 42. The first and second holding means 4A, 4B are arranged in pairs. The upper roller system is rotatably supported by the upper clamping portion 43 with a rotation axis parallel to the first direction as the center, and the upper roller system of the third and fourth clamping means 4C, 4D can be rotatably parallel to the second direction The rotating shaft is rotatably supported by the upper clamping portion 43 as a center. The upper roller system is attached so as to protrude from the lower surface of the upper nip portion 43 by half of the outer peripheral surface.

The lower clamping mechanism 420 and the upper clamping mechanism 430 described above are moved back and forth relative to the support portion 412 in the vertical direction along the guide rail 412a by the lower moving mechanism 44 and the upper moving mechanism 45, respectively.

The lower moving mechanism 44 has a screw body 441 which is screwed to the base end 421c of the arm 421 and extends in the vertical direction along the guide groove 412b, and a pulse motor 442 which is arranged at the lower end of the guide groove 412b Part, and the screw body 441 is rotated forward and backward. The upper end of the screw body 441 is rotatably supported by a bearing 443, and the bearing 443 is fixed in the guide groove 412b. The base end portion 421c of the screw body 441 screwed is sent up and down along the guide groove 412b in accordance with the rotation direction of the screw body 441 driven by the pulse motor 442, whereby the lower clamping mechanism 420 is moved up and down.

The upper moving mechanism 45, which is arranged above the lower moving mechanism 44, has a configuration that is roughly symmetrical to the lower moving mechanism 44 and has a screw body 451 that is screwed to the base end 431c of the arm 431 and extends along the The guide groove 412b extends in the vertical direction; and the pulse motor 452, which is disposed at the upper end of the support portion 412, and drives the screw body 451 to rotate forward and backward. The lower end of the screw body 451 is rotatably supported by a bearing 453, and the bearing 453 is fixed in the guide groove 412b. The base end portion 431c of the screw body 451 screwed is sent up and down along the guide groove 412b in accordance with the rotation direction of the screw body 451 driven by the pulse motor 452, whereby the upper clamping mechanism 430 is moved up and down.

The control means 7 sends operation control signals to the pulse motors 52 of the first to fourth moving means 5A to 5D. The control means 7 controls the action of each pulse motor 52 by a predetermined program, thereby controlling the movement of the first and second clamping means 4A, 4B in the first direction, and the third and fourth clamping means 4C, 4D movement in the second direction.

Next, as shown in FIGS. 3(A) to (C), a configuration in which the sheet 1 to which the workpiece 10 has been pasted is expanded (expanded) in the first direction and the second direction will be described.

The sheet 1 shown in FIG. 3(A) has different extension easiness in the first direction and the second direction, and the first direction is easier to extend than the second direction. In this embodiment, the first clamping means 4A and the second clamping means 4B facing each other in the first direction are configured as shown in FIGS. 4 to 6, and the third clamping means facing each other in the second direction 4C. The fourth clamping means 4D adopts the configuration shown in Figs. 7 and 8.

First, a configuration example of the first clamping means 4A will be described. 4 and 5 are diagrams showing the configuration of the first clamping means 4A having the upper clamping portion 43 and the lower clamping portion 42. In addition, the second clamping means 4B (FIG. 2(A)) facing the first clamping means 4A in the first direction has the same configuration as the first clamping means 4A, and the description is omitted.

As shown in FIGS. 4 and 5, the upper clamping portion 43 has an inner clamping portion 43A and an outer clamping portion 43B arranged in parallel. The inner clamping portion 43A and the outer clamping portion 43B are connected to the arm portion 431 and move up and down integrally.

The inner nip portion 43A has: inner rollers 43a arranged in a plurality of equal intervals in the second direction; a rotating shaft 43m that rotatably supports each inner roller 43a; and a support frame 43u that supports the rotating shaft 43m and enables The peripheral surface of the inner roller 43a is exposed.

The outer nip portion 43B has: outer rollers 43b arranged in a plurality of equal intervals in the second direction; a rotating shaft 43n that rotatably supports each outer roller 43b; and a support frame 43v that supports the rotating shaft 43n and enables The peripheral surface of the outer roller 43b is exposed.

The diameters of the inner roller 43a and the outer roller 43b and the diameters of the rotating shafts 43m and 43n are configured to be the same. In addition, the rotating shaft 43m of the inner holding portion 43A and the rotating shaft 43n of the outer holding portion 43B are arranged to be shifted in the direction orthogonal to the rotating shaft, that is, in the second direction.

With this configuration, as shown in FIG. 5, the shaft centers of the rotation shafts 43n, 43n of the outer clamping portion 43B are arranged at the intermediate positions of the adjacent inner rollers 43a, 43a, and the adjacent outer rollers 43b, 43b The shaft centers of the rotating shafts 43m and 43m of the inner clamping portion 43A are arranged in the middle position.

Similarly, as shown in FIGS. 4 and 5, the lower clamping portion 42 has an inner clamping portion 42A and an outer clamping portion 42B arranged in parallel. The inner clamping portion 42A and the outer clamping portion 42B are connected to the arm portion 421 and move up and down integrally.

The inner clamping portion 42A has: inner rollers 42a arranged in a plurality of equal intervals in the second direction; a rotating shaft 42m that rotatably supports each inner roller 42a; and a support frame 42u that supports the rotating shaft 42m and enables The peripheral surface of the inner roller 42a is exposed.

The outer nip portion 42B has: outer rollers 42b arranged in a plurality of equal intervals in the second direction; a rotating shaft 42n that rotatably supports each outer roller 42b; and a support frame 42v that supports the rotating shaft 42n and enables The peripheral surface of the outer roller 42b is exposed.

The diameters of the inner roller 42a and the outer roller 42b and the diameters of the rotating shafts 42m and 42n are configured to be the same. Moreover, 42 m of rotation shafts of 42 A of inner side clamping parts and 42 n of rotation shafts of outer side clamping part 42B are arrange|positioned shifted in the 2nd direction which is the direction orthogonal to the rotation shaft.

With this configuration, as shown in FIG. 5, the shaft centers of the rotation shafts 42n, 42n of the outer clamping portion 42B are arranged at the intermediate positions of the adjacent inner rollers 42a, 42a, and the adjacent outer rollers 42b, 42b The shaft centers of the rotating shafts 42m and 42m of the inner clamping portion 42A are arranged in the middle position.

In this way, as shown in FIGS. 5 and 6, the shafts of the rollers of the inner clamping portions 42A, 43A and the outer clamping portions 42B, 43B are shifted in the second direction, thereby being caused by the inner clamping portions 42A, 43A. The middle position of the clamping point C1 of the sheet 1 is arranged with the clamping point C2 of the sheet 1 caused by the outer clamping portions 42B and 43B.

Moreover, by alternately arranging the clamping points C1 and C2 in this way, compared to the case where the inner clamping portions 42A, 43A and the outer clamping portions 42B, 43B are not shifted in the second direction, the sheet is clamped in the second direction. The interval W2 of 1 (FIGS. 5 and 6) becomes narrower (in this embodiment, the interval becomes 1/2).

Next, a configuration example of the third clamping means 4C will be described. FIGS. 7 and 8 are diagrams showing the configuration of the third clamping means 4C having the upper clamping portion 143 and the lower clamping portion 142. In addition, the fourth clamping means 4D facing the third clamping means 4C in the second direction has the same configuration as the third clamping means 4C, and the description is omitted.

As shown in FIGS. 7 and 8, the upper clamping portion 143 has an inner clamping portion 143A and an outer clamping portion 143B arranged in parallel. The inner clamping portion 143A and the outer clamping portion 143B are connected to the arm portion 431 and move up and down integrally.

The inner nip portion 143A has: inner rollers 143a, which are arranged in a plurality of equal intervals in the first direction; a rotating shaft 143m, which rotatably supports each inner roller 143a; and a support frame 143u, which supports the rotating shaft 143m and enables The peripheral surface of the inner roller 143a is exposed.

The outer nip portion 143B has: outer rollers 143b which are arranged in a plurality of equal intervals in the first direction; a rotation shaft 143n which rotatably supports each outer roller 143b; and a support frame 143v which supports the rotation shaft 143n and enables The peripheral surface of the outer roller 143b is exposed.

The diameter of the inner roller 143a of the inner nip portion 143A is the same as the diameter of the outer roller 143b of the outer nip portion 143B, and the rollers 143a and 143b are provided so as to be exposed downward from the support frames 143u and 143v. In addition, the two rotating shafts 143m and 143n are arranged on a coaxial line, whereby the positions of the two rollers 143a and 143b in the first direction become the same.

Similarly, as shown in FIGS. 7 and 8, the lower clamping portion 142 has an inner clamping portion 142A and an outer clamping portion 142B arranged in parallel. The inner clamping portion 142A and the outer clamping portion 142B are connected to the arm portion 421 and move up and down integrally.

The inner nip portion 142A has: inner rollers 142a, which are arranged in a plurality of equal intervals in the first direction; a rotation shaft 142m, which rotatably supports each inner roller 142a; and a support frame 142u, which supports the rotation shaft 142m and enables The peripheral surface of the inner roller 142a is exposed.

The outer nip portion 142B has: outer rollers 142b, which are arranged in a plurality of equal intervals in the first direction; a rotation shaft 142n, which rotatably supports each outer roller 142b; and a support frame 142v, which supports the rotation shaft 142n and enables The peripheral surface of the outer roller 142b is exposed.

The diameter of the inner roller 142a of the inner nip portion 142A is the same as the diameter of the outer roller 142b of the outer nip portion 142B, and the rollers 142a and 142b are provided so as to be exposed upward from the support frames 142u and 142u. In addition, the two rotating shafts 142m and 142n are arranged on a coaxial line, whereby the positions of the two rollers 142a and 142b in the first direction become the same.

Also, as shown in FIG. 7, the positions of the upper rotating shafts 143m, 143n and the lower rotating shafts 142m, 142n in the first direction are the same, and the upper rollers 143a, 143b and the lower rollers 142a, 142b are in the first direction. The position becomes the same.

With the above configuration, as shown in FIGS. 7 and 8, a clamping point C3 is formed between the inner clamping portions 142A and 143A, and a clamping point C4 is formed between the outer clamping portions 142B and 143B. The sheet 1 is clamped at points C3 and C4. Moreover, as shown in FIG. 8, the first direction positions of the clamping points C3, C4 of the clamping sheet 1 are the same, and the first direction interval W1 of the respective clamping points C3, C4 and the rotation shafts 142m, 142n, The intervals in the first direction of 143m and 143n are the same. This interval W1 becomes twice the interval W2 (FIG. 5, FIG. 6) described above.

With the above configuration, as shown in Figs. 3(A) to (C), the four sides of the quadrangular sheet 1 to which the workpiece 10 has been pasted are clamped by the first clamping means 4A to the fourth clamping means 4D, and proceed to Expansion in the first and second directions (expansion). By this expansion, the workpiece 10 is broken along the planned dividing line to be singulated into a wafer.

Moreover, in this case, the sheet 1 is easily stretched in the first direction, and the possibility of breakage increases. However, as shown in FIGS. 5 and 6, the first clamping means 4A (4B) facing each other in the first direction As a result, the interval W2 for sandwiching the sheet 1 is narrowed, so that the sheet 1 can be prevented from being stretched locally, and the breakage of the sheet can be prevented.

In addition, as shown in FIG. 3(A)(B), when the sheet 1 is expanded, the ends in the first direction where the sheet 1 is easily stretched are clamped by the first clamping means 4A and the second clamping means 4B, respectively. In a conventional manner, before the orientation of the sheet 1 has been set in advance, it is lifted and supplied to the expansion device 2, or the orientation of the sheet 1 is adjusted in the expansion device 2.

In addition, in the above configuration, as shown in FIGS. 9(A) to (C), the third clamping means 4C and the fourth clamping means 4D facing each other in the second direction are set to be the same as those in the first The first clamping means 4A and the second clamping means 4B facing each other in the direction have the same configuration. The third clamping means 4C and the fourth clamping means 4D can also be configured to more reliably suppress the sheet 1 Sliding composition.

According to this configuration, not only in the first direction, but also in the second direction, the breakage of the sheet 1 at the location where the sheet 1 is sandwiched can be effectively prevented.

In addition, in the above configuration, as shown in FIG. 7, the third clamping means 4C and the fourth clamping means 4D facing each other in the second direction are provided with inner clamping portions 142A, 143A and outer clamping portions. The configuration of two rows of rollers of 142B and 143B, but the third nipping means 4C and the fourth nipping means 4D may have only one row of rollers (for example, only the inner nip portions 142A, 143A) The composition.

The present invention can be realized in the above-mentioned manner. That is, as shown in Figures 1 to 6, it is a sheet expansion device 2. It expands the sheet 1 to which the workpiece 10 has been pasted, and has: The first clamping means 4A and the second clamping means 4B are arranged facing each other across the workpiece 10 in the first direction, and clamp the sheet 1 respectively; The third clamping means 4C and the fourth clamping means 4D are arranged facing each other across the workpiece 10 in a second direction orthogonal to the first direction, and clamp the sheet 1 respectively; and Moving means (5A to 5D), which allow the first clamping means 4A and the second clamping means 4B to move in a direction that is separated from each other in the first direction, and the third clamping means 4C and the fourth clamping means 4D can move in separate directions in the second direction, The first clamping means 4A, the second clamping means 4B, the third clamping means 4C, and the fourth clamping means 4D respectively have inner clamping portions 42A, 43A, which are arranged vertically opposite to each other on the side as the workpiece 10 And the outer clamping portions 42B, 43B, which are adjacent to the inner clamping portions 42A, 43A and are arranged vertically opposite to the inner clamping portions 42A, 43A, A plurality of rollers 42a, 42b that rotate around rotating shafts 42m, 42n parallel to the direction of separation are arranged on the upper part of the lower inner holding portion 42A and the lower outer holding portion 42B. A plurality of rollers 43a, 43b that rotate around rotating shafts 43m, 43n that are parallel to the direction of separation are arranged below the inner clamping portion 43A on the upper side and the outer clamping portion 43B on the upper side. At least in the first clamping means 4A and the second clamping means 4B, on the upper side and the lower side, respectively, to be positioned between the rotating shafts 42m, 43m of the rollers 42a, 43a adjacent to the inner clamping portions 42A, 43A In this manner, the rotation shafts 42n and 43n of the rollers 42b and 43b of the outer nip portions 42B and 43B are arranged.

With this configuration, in the case where the sheet is easily stretched in the first direction and the possibility of breakage is increased, the interval between the sandwiching sheets is narrowed, so that the sheet is prevented from being locally elongated, and the breakage of the sheet can be prevented. .

In addition, as shown in FIG. 9, in the third clamping means 4C and the fourth clamping means 4D, the rollers 42a, 43a adjacent to the inner clamping portions 42A, 43A are also positioned on the upper side and the lower side, respectively. Between the rotating shafts 42m and 43m, the rotating shafts 42n and 43n of the rollers 42b and 43b of the outer nip parts 42B and 43B are arranged.

With this configuration, in the second direction orthogonal to the first direction, the interval between the sandwiched sheets is also narrowed, so that the sheets can be suppressed from being stretched locally, and breakage of the sheets can be prevented.

1: thin slices 2: Thin film expansion device 3: hold the stage 4A: The first clamping means 4B: Second clamping means 4C: Third clamping means 4D: Fourth clamping means 10: Workpiece 42: Lower clamping part 42A: Inside clamping part 42B: Outer clamping part 42a: Inside roller 42b: Outer roller 42m: rotation axis 42n: Rotation axis 42u: support frame 42v: support frame 43: Upper clamping part 43A: Inside clamping part 43B: Outer clamping part 43a: Inside roller 43b: Outer roller 43m: rotation axis 43n: Rotation axis 43u: support frame 43v: support frame 44: Lower side moving mechanism 45: upper moving mechanism 101: Split planned line C1: clamping point C2: clamping point C3: clamping point C4: clamping point W1: interval W2: interval

Fig. 1 is a diagram showing a workpiece as a workpiece and a sheet on which the workpiece is pasted. Fig. 2 is a diagram showing a configuration example of the expansion device. Fig. 3(A) is a view of the state where the four sides of the sheet are held by clamping means viewed from the upper side; Fig. 3(B) is a view illustrating the expansion in the first direction; Fig. 3(C) is a view illustrating the second direction Diagram of the situation of expansion. Fig. 4 is a diagram illustrating the configuration of the first clamping means. Fig. 5 is also a diagram illustrating the configuration of the first clamping means. Fig. 6 is a diagram illustrating the interval between the clamping points of the first clamping means. Fig. 7 is a diagram illustrating the configuration of the third clamping means. Fig. 8 is also a diagram illustrating the configuration of the third clamping means. Fig. 9(A) is a view from the upper side when the four sides of the sheet are held by the clamping means of the same configuration; Fig. 9(B) is a view illustrating the expansion in the first direction; Fig. 9(C) is a view illustrating the direction Diagram of the expansion in the second direction. Fig. 10 is a diagram illustrating the problem, that is, the sliding of the sheet.

1: thin slices

10: Workpiece

4A: The first clamping means

4B: Second clamping means

4C: Third clamping means

4D: Fourth clamping means

Claims (2)

A sheet expansion device, which expands a sheet pasted to a workpiece, and is provided with: The first clamping means and the second clamping means are arranged opposite to each other across the workpiece in the first direction, and respectively clamp the sheet; The third clamping means and the fourth clamping means are arranged facing each other across the workpiece in a second direction orthogonal to the first direction, and clamp the sheets respectively; and A moving means, which allows the first clamping means and the second clamping means to move in the first direction in directions that are separated from each other, and allows the third clamping means and the fourth clamping means to move in the first direction The two directions move in separate directions, The first clamping means, the second clamping means, the third clamping means, and the fourth clamping means respectively have: inner clamping portions which are arranged vertically opposite to each other on the inner side of the workpiece; and An outer clamping portion, which is adjacent to the inner clamping portion and arranged vertically opposite to the outer side of the inner clamping portion, A plurality of rollers that rotate around a rotation axis parallel to the direction of separation are arranged on the upper portion of the inner clamping portion on the lower side and the outer clamping portion on the lower side, and A plurality of rollers that rotate around a rotation axis parallel to the direction of separation are arranged at the lower part of the inner clamping portion on the upper side and the outer clamping portion on the upper side, and At least in the first clamping means and the second clamping means, the outer clamping portion is arranged on the upper side and the lower side, respectively, so as to be positioned between the rotation shafts of the rollers adjacent to the inner clamping portion The axis of rotation of the roller. The sheet expansion device of claim 1, wherein the third clamping means and the fourth clamping means are positioned on the upper side and the lower side, respectively, so as to be positioned between the rotation shafts of the rollers adjacent to the inner clamping portion In an intermediate method, the rotation axis of the roller of the outer nip portion is arranged.

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