TWI577649B - Scribing apparatus and method of maintaining pressing pressure of the same - Google Patents

Description

Cutting device and method for maintaining the same

The present invention relates to a cutting device and a method for maintaining the pressing pressure of the cutting device, and more particularly to a cutting device capable of maintaining a glass substrate even when the surface of the glass substrate has curvature when the glass substrate is cut. In accordance with a uniform pressurization pressure, the present invention is also particularly directed to a method of maintaining the pressurization pressure of the cutting device.

In general, a liquid crystal display (LCD), a light-emitting diode (LED), an organic EL panel, an inorganic electroluminescent panel (inorganic EL panels), Transparent projector panels, reflective projector panels, and the like are widely used as flat panel displays. The process of these flat panel displays includes cutting a fragile mother glass substrate (hereinafter simply referred to as a "glass substrate") to a fixed size.

The process of cutting the glass substrate comprises moving a cutting wheel, the material of which is a diamond, and the cutting wheel is cut under a pressure along a predetermined cutting line on the glass substrate. Forming a scribing line on the glass substrate; and a crushing process by applying pressure to the glass substrate and providing a bending moment to the glass substrate, or by supplying vapor to the glass substrate and cutting the line The crack is widened.

Figure 1 is a representative example of a cutting device for guiding a cutting process. Hereinafter, the description of the cutting process will be explained.

As shown in FIG. 1, the cutting device 1000 includes a base 100, a Z-axis motor 200, a moving unit 300, and a pressurizing unit 400. The Z-axis motor 200 is disposed on the base 100. The moving unit 300 is longitudinally moved by the Z-axis motor 200. A columnar body 310 is coupled to the mobile unit 300. The pressurizing unit 400 includes a cutting head 410 and a cutting cutter wheel 422. The cutting head 410 is coupled to one of the cylindrical rods 311 of the columnar body 310. The cutter wheel bracket 421 is disposed below the cutting head 410. The pressurizing unit 400 is capable of moving longitudinally corresponding to the moving unit 300.

The Z-axis motor 200 is fixed to the susceptor 100. A transfer screw 210 is coupled to the Z-axis motor 200, and the moving unit 300 is coupled to the transfer screw 210 to enable the mobile unit 300 to move longitudinally by actuation of the Z-axis motor 200.

A guiding member, such as a linear guiding member 110, includes a guide rail (not shown) disposed on the base 100 to guide the moving unit 300.

The mobile unit 300 includes a moving block 320 and a mobile bracket 330. The moving block 320 is coupled to the transfer screw 210, and the moving bracket 330 is fixed to the moving block 320. The moving bracket 330 is coupled to the linear guiding member 110 such that the moving bracket 330 can be longitudinally moved along the guide rail of the base 100.

The columnar body 310 is fixed to the moving block 320, and the columnar rod 311 of the columnar body 310 is connected to the pressurizing unit 400.

The pressurizing unit 400 includes a cutting head 410 and a cutter wheel unit 420. The cutting head 410 is coupled to the cylindrical rod 311, and the cutter wheel unit 420 is coupled to the lower side of the cutting head 410.

The cutter wheel unit 420 includes a wheel holder 421 and a cutter wheel 422. The cutter wheel bracket 421 is disposed below the cutting head 410 and is horizontally rotatable, and the cutter wheel 422 is coupled to the cutter wheel bracket 421.

Preferably, the cutting head 410 is coupled to the linear guide element 110 of the base 100 or a cross roller guide assembly 120 such that the cutting head 410 can move longitudinally.

A pressure control unit 500, such as a regulator or the like, is coupled to the columnar body 310. The pressure control unit 500 is for maintaining a constant pressure of the pressing force applied to the glass substrate (element symbol P as shown in FIG. 2).

For example, as shown in FIG. 2, if the glass substrate P has a curved portion, the cylindrical rod 311 moves instantaneously upward during the cutting process. In this case, the pressure control unit 500 manipulates the pressure of the columnar body 310 so that the pressure applied to the glass substrate P by the cutter wheel 422 can be maintained constant.

However, the cutting device moves relatively fast during the cutting process, so that it is quite difficult for the regulator to quickly react to the change in the curvature of the glass substrate P and change the internal pressure of the column 310. The pressure applied to the surface of the glass substrate P cannot be maintained constant, and eventually the product is defective.

In view of the problems caused by the prior art described above, one of the objects of the present invention is Provided is a cutting device capable of maintaining a constant pressure against a glass substrate even when the surface of the glass substrate is bent when the glass substrate is cut, and a method of maintaining the pressing pressure of the cutting device.

To achieve the above object, a cutting device according to an embodiment of the present invention includes a Z-axis motor, a moving unit, a pressurizing unit, a pressure control unit, a relative displacement sensing unit, and a control unit. The mobile unit is moved up and down by a Z-axis motor, and a columnar system is connected to the mobile unit. The pressurizing unit moves up and down corresponding to the moving unit. The pressurizing unit includes a cutting head and a cutting wheel. One of the first ends of the cutting head is coupled to one of the columnar rods, and the cutting wheel system is disposed at one of the second ends of the cutting head. The pressure control unit controls the internal pressure of one of the columns to cause the pressurizing unit to generate a pressurizing pressure. The relative displacement sensing unit measures a relative displacement between the pressing unit and the moving unit. A control unit receives a relative displacement signal from one of the relative displacement sensing units and transmits a drive signal to the Z-axis motor.

In an embodiment of the invention, the relative displacement sensing unit is disposed in one of the mobile unit and the pressurizing unit or the mobile unit and the pressurizing unit.

In another embodiment of the present invention, the present invention provides a cutting apparatus including a Z-axis motor, a moving unit, a pressurizing unit, a pressure control unit, a relative displacement sensing unit, and a control unit. The mobile unit is moved up and down by a Z-axis motor, and a columnar system is connected to the mobile unit. The pressurizing unit moves up and down corresponding to the moving unit. The pressurizing unit includes a cutting head and a cutting wheel. One of the first ends of the cutting head is coupled to one of the columnar rods of the columnar body. The cutter wheel train is disposed at one of the second ends of the cutting head. The pressure control unit controls one of the internal pressures of the column body to cause the pressurizing unit to generate a Pressurized pressure. A relative displacement sensing unit measures a relative displacement between the moving unit and a surface of one of the glass substrates. The control unit receives a relative displacement signal from one of the relative displacement sensing units and transmits a driving signal to the Z-axis motor.

In an embodiment of the invention, the relative displacement sensing unit includes a gap sensor disposed on the mobile unit.

In an embodiment of the invention, the gap sensor is adjacent to the front side in one of the directions in which the cutting device is moved.

The present invention further provides a method for maintaining a pressing pressure of a cutting device, the method comprising: controlling a pressure of one of the columns by a pressure control unit, and cutting a glass substrate; and measuring a movement when cutting the glass substrate a relative displacement between the unit and a pressurizing unit; and when the measured relative displacement changes, transmitting a signal to the Z-axis motor and compensating for one of the displacements of the mobile unit in one of the relative displacement changes.

The invention further provides a method for maintaining a pressing pressure of a cutting device, the method step comprising: controlling a pressure of one of the columnar bodies by using a pressure control unit, and cutting a glass substrate; when cutting the glass substrate, Measuring, by a sensor, a gap between a mobile unit and a glass substrate, wherein the sensor is fixed to the mobile unit; and when the measured gap changes, transmitting a signal to a Z-axis motor, and in the gap One of the directions changes to compensate for the displacement of one of the mobile units.

In an embodiment of the invention, the step of measuring the gap is directed to the front side of the direction in which the cutting device moves.

In an embodiment of the invention, one of the compensation steps compensates for the displacement by It is determined by multiplying the number of revolutions of one of the Z-axis motors by the pitch of one of the transfer screws, wherein the transfer screw is connected to the Z-axis motor.

In an embodiment of the invention, the rate of change of one of the relative displacements corresponds to a rate at which a cylindrical rod extends or contracts.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a cutting apparatus and a method of maintaining the pressing pressure of the cutting apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein the same elements will be described with the same reference numerals.

Hereinafter, the present invention will be described with reference to Figs. 3 to 7 for a preferred embodiment of the present invention. Wherein, the same component symbols will be denoted by the same or similar components.

As shown in FIG. 3 and FIG. 4, a cutting device 1000 of the present invention includes a base 100, a Z-axis motor 200, a moving unit 300, a pressurizing unit 400, and a pressure control unit 500. The Z-axis motor 200 is disposed on the base 100. The moving unit 300 is longitudinally moved by the Z-axis motor 200. A columnar body 310 is coupled to the mobile unit 300. The pressurizing unit 400 includes a cutting head 410 and a cutting cutter wheel 422. One of the first ends of the cutting head 410 is coupled to one of the cylindrical rods 311 of the columnar body 310, and the cutting wheel 422 is disposed at one of the second ends of the cutting head 410. The pressurizing unit 400 is disposed in such a manner as to be movable longitudinally corresponding to the moving unit 300. The pressure control unit 500 controls one of the internal pressures of the columnar body 310.

In detail, the Z-axis motor 200 is fixed to the susceptor 100. The transfer screw 210 is coupled to the Z-axis motor 200, and the moving unit 300 is coupled to the transfer screw 210 such that the mobile unit 300 can be moved longitudinally by the action of the Z-axis motor 200.

A guiding member, such as a linear guiding member 110, includes a rail (not shown) disposed on the base 100 to guide the moving unit 300.

The mobile unit 300 includes a moving block 320 and a mobile bracket 330. The moving block 320 is coupled to the transfer screw 210, and the moving bracket 330 is fixed to the moving block 320. The moving bracket 330 is coupled to the linear guiding member 110 such that the moving bracket 330 can be longitudinally moved along the guide rail of the base 100.

The columnar body 310 is fixed to the moving block 320, and the columnar rod 311 of the columnar body 310 is connected to the pressurizing unit 400.

The pressurizing unit 400 includes a cutting head 410 and a cutter wheel unit 420. The cutting head 410 is coupled to the cylindrical rod 311, and the cutter wheel unit 420 is coupled to the lower side of the cutting head 410.

The cutter wheel unit 420 includes a cutter wheel bracket 421 and a cutter wheel 422. The cutter wheel holder 421 is disposed below the cutting head 410 and is horizontally rotatable. The cutter wheel 422 is coupled to the cutter wheel holder 421.

Preferably, the cutting head 410 is coupled to the linear guiding element 110 of the base 100 or a cross roller guiding assembly 120 to enable the cutting head 410 to move longitudinally.

Finally, the mobile unit 300 can be moved longitudinally by the rotation of the Z-axis motor 200, and the pressurizing unit 400 can be moved longitudinally corresponding to the mobile unit 300 by the columnar body 310 disposed on the moving unit 300.

The pressure control unit 500 can be one of the conventional regulators or the like.

As shown in FIG. 3 and FIG. 4, a displacement sensor 610 is disposed on the mobile Unit 300 and/or pressurizing unit 400. The displacement sensor 610 is configured to measure a relative displacement between the mobile unit 300 and the pressurizing unit 400.

The displacement sensor 610 can be a contact displacement sensor or a non-contact displacement sensor.

A representative example of the contact displacement sensor can be a differential transformer such as a Linear Variable Differential Transformer (LVDT). The differential transformer includes three coils (a primary coil and two secondary coils) and a moving core. The principle of operation is that the alternating current magnetizes the primary coil. When the movable iron core contacts a target, each secondary coil generates a voltage, and after combining the two different voltages, a voltage difference can be calculated and the displacement is output.

In one embodiment of the present invention, the displacement sensor is a contact displacement sensor, wherein three coils and a movable iron core are respectively disposed on the moving unit 300 and the pressing unit 400, or are respectively set to be pressurized. Unit 400 and mobile unit 300.

The non-contact displacement sensor can be mainly an eddy current sensor, an optical sensor, an ultrasonic sensor, and the like.

The eddy current sensor operates with a high-frequency magnetic field. In detail, after a coil of the sensor head is connected to a high-frequency current, a high-frequency magnetic field is generated. If there is a target in this magnetic field, due to electromagnetic induction, the magnetic flux will The eddy current flowing through the surface of the target and vertical flows also flows through the target, thus changing the impedance of the induction coil. This phenomenon can cause changes in vibration. The eddy current sensor uses the change in vibration to detect the distance from the target.

In particular, when the distance between the target and the head of the sensor becomes smaller, if the difference between the measured waveform and a reference waveform increases, the intensity of the vibration becomes small. Therefore, a value proportional to the distance between the target and the sensor head can be obtained by detecting the vibration intensity and the phase difference.

In an embodiment of the invention, the displacement sensor is an eddy current sensor, and the sensor head is disposed in one of the moving unit 300 or the pressing unit 400 to enable the magnetic flux to pass through the surface of the other .

The optical sensor includes a light-emitting unit and an optical element that are respectively sleeved onto the two components that move relatively. Furthermore, an index plate and a moving scale are disposed between the light-emitting unit and the optical element, and are respectively disposed on the two relatively moving components. The optical sensor is actuated by the fact that when the active scale is moved relative to the indexing disk, the optical component can read the luminance signals of the light between the indexing disk and the moving scale, thereby measuring the difference between the two. A displacement. The optical sensor can be a representative linear scale.

In an embodiment of the invention, the displacement sensor is an optical sensor. As shown in FIG. 3 and FIG. 4, an illumination unit and an active scale 611 are disposed on the pressing unit 400, and a scale reading is performed. A scale reader 612 is disposed on the mobile unit 300, wherein the scale reader 612 includes an optical component and an indexing disk.

For example, FIGS. 3, 4, and 5 illustrate that the active scale 611 is fixed to the cutting head 410, and the scale reader 612 is coupled to the moving bracket 330.

The principle of the ultrasonic sensor is that a sensor head can generate an ultrasonic wave and receive an echo reflected back from the target, and then the sensor calculates the time difference between sending the signal and receiving the echo. To determine the distance to the target.

In an embodiment of the invention, the displacement sensor is an ultrasonic sensor, and the head of the ultrasonic sensor is disposed in one of the moving unit 300 or the pressing unit 400, and a reflective plate ) can be set to the other to improve the reliability of echo reception. Due to the characteristics of the ultrasonic sensor, the range of measurement can be wide. Therefore, the ultrasonic sensor can be easily applied to the cutting device of the present invention without considering the distance between the moving unit 300 and the pressurizing unit 400.

In addition, as shown in FIG. 6, a gap sensor 620 can be disposed on the mobile unit 300 of the present invention to measure the gap between the mobile unit 300 and the glass substrate P.

It should be particularly noted that when the gap sensor 620 is disposed on the front side of the cutting device 1000 in the direction in which the glass substrate P moves forward, the gap sensor 620 can detect one before the cutting device contacts the curvature. The curvature thus enables a control unit 700 to more accurately and easily control the cutting device, thereby improving the effectiveness of the Z-axis motor 200 in reacting to changes in the curvature of the glass substrate P. A description of the control unit 700 will be described later.

In this regard, the gap sensor 620 of the present invention can be based on the cutting wheel 422 The gap sensor 620 can be selectively disposed according to the moving direction of the glass substrate P with respect to the cutting device 1000 in accordance with the transport direction of the glass substrate P on the front side, the left side, and the right side of the moving unit 300.

If the displacement sensor 610 shown in FIG. 3, FIG. 4 and FIG. 5 or the gap sensor 620 shown in FIG. 6 detects a relative displacement and generates a correlation signal, the control unit 700 can detect the relative displacement signal according to the relative displacement signal. A drive signal is transmitted to the Z-axis motor 200.

In other words, the Z-axis motor 200 is actuated under the control of the control unit 700, thereby moving the moving unit 300 upward in the direction in which the pressurizing unit 400 is displaced relative to the moving unit 300, or in the moving unit 300 and the glass substrate. The one in which the gap between the P surfaces changes is moved upward to lower the internal pressure of the columnar body 310, thereby maintaining the constant pressing pressure.

One of the relative displacement sensing units 600 of the present invention, as shown in FIG. 3, may be a displacement sensor 610 or a gap sensor 620.

Hereinafter, a method of maintaining the pressing pressure of the cutting device according to an embodiment of the present invention will be described with reference to FIGS. 5 and 7.

FIG. 7 illustrates a method of maintaining the pressing pressure of the cutting device, and the moving unit 300 and/or the pressurizing unit 400 of the cutting device is provided with a displacement sensor 610.

First, when the pressure control unit 500 adjusts the internal pressure of the column body 310 to a value according to a preset pressure at which the glass substrate P is pressed, the cutting operation is completed.

After the cutting operation is completed, the displacement sensor 610 detects a relative displacement between the moving unit 300 and the pressing unit 400.

If the relative displacement is maintained at the original value without change, indicating that the glass substrate P has no curvature, the cutting operation can be continued normally.

Meanwhile, if the measured relative displacement changes due to the curvature of the glass substrate P during the cutting process, the rate of change of the relative displacement is transmitted to the control unit 700. For example, the measured relative displacement rate of change is related to a rate at which the columnar rod 311 extends or contracts.

The control unit 700 transmits a signal to the Z-axis motor 200 according to the rate of change of the relative displacement, and drives the transfer screw 210 to move the moving unit 300 in the direction in which the relative displacement changes, thereby compensating for the change in the relative displacement.

In the step of compensating for the change in the relative displacement, a compensation displacement can be determined by multiplying the number of revolutions of the Z-axis motor 200 by the pitch of the transfer screw 210 connected to the Z-axis motor 200.

In this way, when the change in the relative displacement is compensated, the extension or contraction rate of the columnar rod 311 is substantially unchanged, the preset pressure of the pressure control unit 500 can be maintained.

That is, the moving unit 300 moves up and down corresponding to the curvature of the glass substrate P during the cutting process, so that the pressing pressure applied to the glass substrate P is maintained at a preset value.

Although the curvature of the glass substrate P shown in the drawing is an upward convex surface, the same technical means of the present invention can be applied to the glass substrate P having a curvature of a downward convex surface.

As described above, in the present invention, even when the surface of the glass substrate is curved, when the glass substrate is cut, the pressing pressure applied to the glass substrate can be maintained. At the preset value, it is thus possible to avoid the failure of the cutting operation.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

100‧‧‧Base

1000‧‧‧ cutting device

110‧‧‧Linear guiding element

120‧‧‧cross roller guide assembly

200‧‧‧Z-axis motor

210‧‧‧Transfer screw

300‧‧‧Mobile unit

310‧‧‧ columnar body

311‧‧‧column rod

320‧‧‧moving block

330‧‧‧Mobile bracket

400‧‧‧ Pressurizing unit

410‧‧‧ cutting head

420‧‧‧Cutter wheel unit

421‧‧‧Cutter wheel bracket

422‧‧‧Cutting cutter wheel

500‧‧‧pressure control unit

600‧‧‧relative displacement sensing unit

610‧‧‧ Displacement Sensor

611‧‧‧ activity scale

612‧‧‧Grade reader

620‧‧‧Gap sensor

700‧‧‧Control unit

P‧‧‧glass substrate

1 is a schematic view of a cutting device of one of the prior art; FIG. 2 is a side view of a cutting device passing through a curved surface of a glass substrate; FIG. 3 is a schematic view of a cutting device of the present invention; 3 is a partially enlarged schematic view showing the structure of a displacement sensor; FIG. 5 is a schematic view of a cutting device according to an embodiment of the present invention, wherein the pressing pressure of the cutting device can be maintained constant; A schematic structural view of a cutting device according to another embodiment, wherein the pressing pressure of the cutting device can be maintained constant; and FIG. 7 is a flow chart of a method for maintaining the pressing pressure of the structure of FIG.

200‧‧‧Z-axis motor

210‧‧‧Transfer screw

300‧‧‧Mobile unit

310‧‧‧ columnar body

311‧‧‧column rod

400‧‧‧ Pressurizing unit

410‧‧‧ cutting head

500‧‧‧pressure control unit

610‧‧‧ Displacement Sensor

611‧‧‧ activity scale

612‧‧‧Grade reader

700‧‧‧Control unit

P‧‧‧glass substrate

Claims (10)

A cutting device comprising: a Z-axis motor; a moving unit that is moved up and down by the Z-axis motor, and a columnar system is coupled to the moving unit; and a pressurizing unit that is corresponding to the moving unit Moving up and down, the pressurizing unit comprises: a cutting head, a first end is connected to one of the columnar rods of the columnar body, and a cutting wheel is disposed at one of the second ends of the cutting head a pressure control unit for controlling an internal pressure of the column body to generate a pressurizing pressure; and a relative displacement sensing unit for measuring a relative displacement between the pressurizing unit and the moving unit And a control unit that receives a relative displacement signal from the one of the relative displacement sensing units and transmits a driving signal to the Z-axis motor. The cutting device of claim 1, wherein the relative displacement sensing unit is disposed in the mobile unit and the pressurizing unit or one of the moving unit and the pressurizing unit. A cutting device comprising: a Z-axis motor; a moving unit that is moved up and down by the Z-axis motor, and a columnar system is coupled to the moving unit; and a pressurizing unit that is corresponding to the moving unit Move up and down, the plus The pressing unit comprises: a cutting head, a first end of which is connected to one of the cylindrical rods, and a cutting wheel disposed at a second end of the cutting head; a pressure control unit Controlling an internal pressure of the column to cause a pressure of the pressurizing unit; and a relative displacement sensing unit for measuring a relative displacement between the surface of the moving unit and a glass substrate; and The control unit receives a relative displacement signal from the one of the relative displacement sensing units and transmits a driving signal to the Z-axis motor. The cutting device of claim 3, wherein the relative displacement sensing unit comprises a gap sensor disposed on the mobile unit. The cutting device of claim 4, wherein the gap sensor is adjacent to a front side in a direction in which the cutting device moves. A method for maintaining a pressing pressure of a cutting device, wherein the cutting device is the cutting device according to claim 1, the method comprising the steps of: controlling one of the columns by using a pressure control unit Pressing and cutting a glass substrate; measuring a relative displacement between a moving unit and a pressing unit when cutting the glass substrate; and transmitting a signal to a Z-axis motor when the measured relative displacement is changed, And compensating the mobile list in one of the relative displacement changes One of the displacements. A method of maintaining a pressing pressure of a cutting device, wherein the cutting device is a cutting device according to claim 3, the method comprising the steps of: controlling a column in one of the columns by using a pressure control unit Pressing and cutting a glass substrate; when cutting the glass substrate, measuring a gap between a moving unit and the glass substrate by using a sensor, wherein the sensor is fixed to the mobile unit; and when measured When the gap is changed, a signal is transmitted to a Z-axis motor, and one of the displacements of the mobile unit is compensated in one of the gap changes. The method of claim 7, wherein the step of measuring the gap is measured on a front side of the direction in which the cutting device moves. The method of claim 6 or 7, wherein the compensating step is determined by multiplying a number of revolutions of one of the Z-axis motors by a pitch of a transfer screw, wherein A transfer screw is coupled to the Z-axis motor. The method of claim 9, wherein the rate of change of one of the relative displacements corresponds to a rate at which a cylindrical rod extends or contracts.