201124351 六、發明說明： 【相關申凊案之交互參照】 本申請案主張2〇1〇年1 3 4 α 士 ^ ^ 2010-0000104號之僖春^廿 申請之榦國專利申請案 〜優先柘，其揭露整體結合於此作為參考。 【發明所屬之技術領域】 =發明^關於包含碎屑預處理單元之湘裝置以及劃 關於包含碎屑預處理單元而避免碎屑在劃割 术乍中卡在麵面板表面，並避免碎層無法自玻璃面板移除 而造成缺陷產品之劃割裝置以及劃割方法。 【先前技術】 一般而言，用於平面板顯示器中作為面板的液晶顯示器 (LCD)或發光二極體(LED)、有機電激發光面板、無機電激 發光面板、穿透式投影器基板、反射式投影器基板等，是藉 由切割脆性母玻璃面板(亦稱「母板」，並於下稱為「坡壤面 板」）成預定尺寸而得。 利用具有比玻璃面板硬度還大之切割器(例如由鑽石切 割器），形成劃割線於玻璃面板表面，以及沿劃割拓展裂痕， 而將玻璃面板切割成一塊一塊。 -一般而言’劃割線猎由可旋轉切割器(於後稱「劃割輪」) 形成於玻璃面板表面，而在劃割線形成期間會散落細小碎 屑。 201124351 由於例如碎屑與玻璃面板間的靜電或玻璃面板絕佳的 表面粗糙度’一些散落的碎屑附著到玻璃面板表面的劃割線 附近，且即使在之後的程序(例如清潔程序)後通常無法自玻 璃面板移除而卡在玻璃面板上。玻璃面板的清潔方法包含利 用水的水刀清潔方法、鋁刷清潔方法、帶件清潔方法、以及 高壓噴氣清潔方法，而即使在此類清潔程序後，卡在玻璃面 板的碎屑很少被移除。 若在清潔程序後碎屑仍附著並留在玻璃面板表面上，在 後續程序即附接偏光膜(p0lar0id fllm)的程序中利用肉眼或 視覺相機確認玻璃面板為缺陷產品。 一 圖1A至圖1D顯示確認附著有散落碎屑之玻璃面板為 缺陷產品的一系列程序。 首先，圖1A顯示在細操作前的賴面板卜 接著，圖1B示意軸示當_輪執㈣賴作時 產生碎屑C。 、、 此外，® 1C顯示散落的 c瞬到_面板i的表 面。 璃面板卜其中 結果’捕騎作細產生的韻c龍上附著到玻璃 201124351 面板1的表面，浪費了材料又增加製造成本。 【發明内容】 本發明致力於解決上述先前技術相關的_，而本發明 =在二提供—種包含碎屬預處理單元之劃割裝置及劃 劃琳。你由此在後續清潔程序中從玻璃面板表面完全地移除 s °呆巾所產生㈣著舰璃面板表面的碎屑。 置，S成ίίΓ觀Γ供—種劃割裝 劃割輪可旋轉二接^ = 裝__、以及 玻璃面板之表面，此部^^形成劃割線於 在劃割輪之相對純ϋ 包3，屑預處理單元，用於 理劑到玻璃面板之表㈣分於_輪之向前侧供應碎屬預處 理單元可包含嘴嘴以及壓力調節單元，盆用於 调即碎屑預處理劑之壓力，崎财嘴喷射羽預處理用劑於 壓力調節單元可為調節器或壓力控制哭， 碎屑預處理劑供應源之間。 °。11 又置於噴嘴與 麼力卿單元可為調節如及勤 喷嘴與碎_處_供應源⑽叹㈣嘴與供^^^於 器 之轉的點，虛擬線係藉由延伸輪支托 6 201124351 育嘴可設置成目运準劃割輪之外圓周的上端部分。 嘴嘴可安裝錢得噴嘴可繞著綱頭轉動。 個噴;可環繞劃割頭設置，以及其中至少四 的前r丨im饋送方向可分㈣裝在玻璃面板 側及仙収錢直饋送方向之方向的相及左側。 碎屬預處理财為液體界面活性劑。 向。劃割頭射対同時義㈣直_面板之表面的方 嘴嘴可與劃割頭分開，而與劃割頭分開移動。 方法為t:據本發明之另-觀點提供-種劃割 劃割頭、、以、輪支托器可旋轉地安裝於 割之表面，其中當利用劃割裝置形成劃 板之碎= 並插置於玻璃面板與定位在玻璃面 預處2_中預處理劑的塗佈寬度可藉由調節碎屑 貝义理劑之噴射壓力來調節。 +眉 線係藉由延 碎屑預處理劑可喷射到虛擬線上的點，虛擬 7 201124351 伸輪支托器之轉軸碰到玻璃面板而得。 ㈣在咖齡躺產㈣觸可在後續清潔 預處理單元㈣碎屑爾_於玻璃面板 顯著地降：：:率自破璃面板表面完全地移除’藉此 【實施方式】 於後將參考圖2至圖9詳細說明本發明例示實施例。 可移mm 2β所示’根據本發明之咖裝置s包含 而可繞著z軸方向旋轉 割頭6 而可繞著水#*裝於輪支托器29 !。，:在二==割輪2、以及碎屑預處理單元 理劑到在#彳警2 &^ 祕供缝伽碎屑預處 片Η牡里輪2之向前側之玻璃面板i的部分。 割輪對移動方?之向前側不表示在劃 面板1在劃割輪丄相對:二而表不疋劃割輪2相對於玻璃 停止而咖輪前側。亦即，當玻璃面板1 向前側，但是係表示_輪2之移動方向的 玻璃面Μ " σ輪停止而玻璃面板1移動時，传表干 破璃面板1之移動方向的向後侧。 係表不 再者’垂直方向表示與玻璃面板1 而水平方向表示與麵面板1之表面平行^的方向， 201124351 右在劃割操作之前，碎屑預處理劑cpT塗佈在玻璃面 反1要瓜成t彳雜的表面部分，由於觸操作時產生的碎屑 ，在玻璃面板丨上，而碎糊處理劑cpT係插置在玻璃面 板1與碎屑之間，則可避免剌卡在玻璃面板！。 ―八體而言，若界面活性劑或利用混合界面活性劑與如 的溶液用作碎屑預處理劑cpt，則避免形成液 碱賴cpt縣祕力而使碎屬預處201124351 VI. Description of the invention: [Reciprocal reference to relevant application cases] This application claims that the patent application for the dry country of the application for the year of 1〇 4 3 α 士 ^ ^ 2010-0000104 The disclosure of the entire disclosure is incorporated herein by reference. [Technical field to which the invention pertains] = Inventions relating to a Hunan device including a chip pretreatment unit and the inclusion of a chip pretreatment unit to prevent debris from being caught on the surface of the face panel in the slashing process, and avoiding the failure of the layer The cutting device and the cutting method of the defective product are removed from the glass panel. [Prior Art] In general, a liquid crystal display (LCD) or a light emitting diode (LED) as a panel in a flat panel display, an organic electroluminescent panel, an inorganic electroluminescent panel, a transmissive projector substrate, The reflective projector substrate or the like is obtained by cutting a brittle mother glass panel (also referred to as a "motherboard" and hereinafter referred to as a "slope soil panel") into a predetermined size. The glass panel is cut into pieces by using a cutter having a hardness greater than that of the glass panel (for example, by a diamond cutter), forming a scribe line on the surface of the glass panel, and expanding the crack along the scribe. - Generally speaking, the scribe line is formed on the surface of the glass panel by a rotatable cutter (hereinafter referred to as "scratch wheel", and fine debris is scattered during the formation of the scribe line. 201124351 Due to, for example, static electricity between the chip and the glass panel or excellent surface roughness of the glass panel 'some scattered debris adheres to the scribe line on the surface of the glass panel, and usually cannot be after a subsequent program (eg cleaning procedure) Remove from the glass panel and get stuck on the glass panel. The glass panel cleaning method includes a water knife cleaning method using water, an aluminum brush cleaning method, a belt cleaning method, and a high pressure jet cleaning method, and even after such a cleaning procedure, debris stuck on the glass panel is rarely moved. except. If debris remains on the surface of the glass panel after the cleaning procedure, use the naked eye or visual camera to confirm that the glass panel is defective in the subsequent procedure of attaching the polarizing film (p0lar0id fllm). 1A to 1D show a series of procedures for confirming that a glass panel to which scattered debris is attached is a defective product. First, Fig. 1A shows the panel before the fine operation. Next, Fig. 1B shows that the chip C is generated when the _ wheel (4) is used. In addition, the ® 1C shows the scattered c instantaneous to the surface of the panel i. The result of the glass panel is that the rhyme c dragon is attached to the surface of the glass. 201124351 The surface of the panel 1 wastes the material and increases the manufacturing cost. SUMMARY OF THE INVENTION The present invention has been made in an effort to solve the above-mentioned prior art relating to the prior art, and the present invention provides a scribing device and a planing unit including a shredded preprocessing unit. You thus completely remove the debris from the surface of the glass panel from the surface of the glass panel in the subsequent cleaning process. Set, S into ίίΓ Γ Γ — 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 种 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = , chip pretreatment unit, for the agent to the glass panel table (four) is divided into the front side of the _ wheel supply fragmentation pretreatment unit can include a mouth and a pressure adjustment unit, the basin is used to adjust the debris pretreatment agent The pressure, the Sakai mouth spray plum pretreatment agent in the pressure regulating unit can be used for regulator or pressure control crying, debris pretreatment agent supply. °. 11 placed in the nozzle and the Mo Liqing unit can be adjusted for such as the nozzle and the broken _ _ supply _ supply (10) sigh (four) mouth and the point of the turn of the ^ ^ ^ ^, the virtual line by the extension wheel support 6 201124351 The mouthpiece can be set to the upper end of the outer circumference of the scribe wheel. The nozzle can be installed with a money nozzle to rotate around the head. A spray can be arranged around the cutting head, and at least four of the front r丨im feeding directions can be divided into four (4) on the side of the glass panel and the direction and the left side in the direction of the direct feeding direction of the fairy. The genus pretreatment is a liquid surfactant. to. The cutting head is shot at the same time (4) Straight _ The surface of the panel The mouth can be separated from the cutting head and moved separately from the cutting head. The method is: according to another aspect of the present invention, a type of scratching head is provided, and the wheel support is rotatably mounted on the cut surface, wherein when the cutting device is used to form the slashing The coating width of the pretreatment agent placed in the glass panel and positioned in the glass surface pre-position 2_ can be adjusted by adjusting the ejection pressure of the destructive agent. + The eyebrow line is sprayed onto the virtual line by the chip pretreatment agent. The shaft of the virtual 7 201124351 wheel support device touches the glass panel. (d) lying at the age of the aging (four) touch can be cleaned in the subsequent pretreatment unit (four) crumb _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ 2 through 9 illustrate in detail an exemplary embodiment of the present invention. The movable coffee device s according to the present invention can be rotated around the z-axis to rotate the cutting head 6 so as to be attached to the wheel support 29! ,: in the second == cutting wheel 2, and the debris pretreatment unit to the part of the glass panel i on the front side of the 彳 2 2 碎 碎 预 碎 碎 碎 碎. The forward side of the cutting wheel pair moving side is not indicated on the scribing panel 1 at the scribing rim: second, the scribing wheel 2 is stopped relative to the glass and the front side of the coffee wheel. That is, when the glass panel 1 is on the front side, but the glass surface 表示 indicating the moving direction of the wheel 2 is &#; the σ wheel is stopped and the glass panel 1 is moved, the rear side of the moving direction of the glass panel 1 is transmitted. The chronograph is no longer the 'vertical direction with the glass panel 1 and the horizontal direction indicates the direction parallel to the surface of the face panel 1, 201124351 right before the slashing operation, the chip pretreatment agent cpT is coated on the glass surface Melting into the noisy surface part, due to the debris generated during the operation, on the glass panel, and the crumb treatment agent cpT is interposed between the glass panel 1 and the debris, the Leica can be avoided in the glass panel! . In the case of octahedron, if the surfactant or the solution using the mixed surfactant and the solution is used as the chip pretreatment agent cpt, the formation of the liquid alkali is avoided.
避务吉in㈣地㈣在朗面板1上，祕確保碎屑C μ w在麵面板1的絲。適合的界赌性劑包含皂 水及&成清潔劑。 ’還可使用任何能藉由降低表面張力而 的= 而，必須避免會損壞玻璃面板1之表面Avoid the gyr in (four) ground (four) on the lang panel 1, secret to ensure the debris C μ w in the face panel 1 wire. Suitable gambling agents include soap and detergents. Anything that can be reduced by reducing the surface tension must be avoided, and the surface of the glass panel 1 must be avoided.
於下抽桃*裝有碎屑預處理單S 10之冑㈣穿置s ==細說*明劃割裝置8之前，應注意劃：2置輪S 彼此的接合但是他們 導*:=4;=安據二 固定於第-可移動塊9而可沿基座3之導二z 二:)二移:：之二動構件4、以及固定於可移動構件4 輪伽：輪 201124351 基座3麵接XY桌(未顯 、 動以執行劃割操作。 〃、，而沿玻璃面板表面水平移 導 動 導執8及第一可移動塊9 引垂直移動，即可移動構件 構成第一線性運動導引件，以 4相對於基座3的Z軸方向移 第一可移動塊9連接z紅必a Z軸移動機制包含移動於2轴方向， 咬13及滾珠螺桿機制(未顯示）。 可與可移動構件一起於7 ^ + 1 6，係可滑祕安裝於基座3 _ °上/下移動的劃割頭 〇 . *ι|έ|_5 弟一可移動塊7可滑動地設 Ϊ於導執1上。_頭6裝邮第二可移動塊7。導軌8及 弟一可移動塊7構成第二線性運動導引件，並導引劃割頭6 相對於基座3的Ζ軸方向移動。 推缸41安裝於可移動構件4，且推缸Μ的桿件延伸於 轴方向。劃割頭ό連接到推缸41的桿件尖端。 在上述裝置的劃割操作期間，饋送螺桿軸14首先藉由 Ζ軸馬達13的驅動力而轉動，而當饋送螺桿軸14轉動時第 一可移動塊9向下移動，帶動劃割輪2與玻璃面板接觸。當 劃割輪2接觸玻璃面板1時，偵測到流過ζ軸馬達13的電 流大小變化，而停止Ζ軸馬達13的驅動。 之後’在劃割輪2與玻璃面板1接觸的情況下，操作推 紅41而施加壓力到玻璃面板1。 201124351 果sj。]操作期間壓力造成的外力係維持盘玻璃面板 的斥力平衡。 η 6 同時，碎屑預處理單元10安裝於劃割頭 預ί理單元1G包含喷嘴11以及壓力調節單元12, 产、理劑透過喷嘴11喷射之前，用於調節碎屑預 处—、。噴嘴11及壓力調節單元12，咬僅噴嘴12， 可安裝於劃割頭6。 乂惶D 12 制器12可包含調節器或壓力控 此為密封啥倾荆喷^ 〇碎屑預處理劑供應源21之間。 .....、鳴類空'，其中碎屑預處理劑因壓差 處理劑供應源21供應到喷嘴u。心域差直接從碎肩預 力控=12可包含調節器⑶及塵 幻之間，以及噴嘴'Γ金供ί嘴11與碎屑預處理劑供應源 型，其中碎屑預處理雜由之間。此树灑嗔嘴類 屬預處理劑供應源應由Γ般喷搶嘴氣形成的健而從碎 各種已知的3或贺/麗方法不限於所示的實施例，而可使用 係藉=二==準虛擬線上的點，虛擬線 此結構利用劃割輪2及 a碰到玻璃面板1而得。 托器29的結構特徵，而容許喷 201124351 201124351 劑 嘴丨1通常在劃割輪12的操作前噴射碎屑預處理 於選替實施例中’如圖8可知，四個喷嘴η環繞劃割 ，12的Z軸設置，且可在相對於玻璃面板1之饋送方向是 刀別安裝在玻璃面板1的前側及後側以及在垂直饋送方向 =方向的右側及左侧。由於在劃割操作時，劃割頭6沿著玻 =板1的饋送方向向前或向後移動，或在垂直於饋送方向 書㈣裝在彼此垂直方向的至少四個噴嘴可在 2移動方Γ精碱轉卜此乃#由從面對劃割輪 動方向的任—噴嘴噴射碎射貞處糊而達成。 於本發明又另一實施例中，喰凡 輪2之外圓周的^^爲又置成晦準劃割 之外圓周上㈣八。由於此類結構，喷射到劃割輪2 —if 碎屑預處理劑，因為割割輪2 、士 朝饋运方向散射，而容許 2的離心力 劑。 一 °]輪2私動刖贺射碎屑預處理 於本發明另—實施例中 成可繞著_頭6轉動 f 9可知’喷嘴丨1可安裝 向可瞎準劃割輪2在饋送方向之^構’喷嘴11的噴射方 的劃割方向何時改變。 =、位置，科管割割輪2 轉子幼可藉由輛承知安裝:，由馬達(未顯示)驅動的 ，子6b。馬達從分離 ^碩6,而喷嘴u可安農於 疑轉角度的訊號，，整轉^未广不)接收關於輪支托器29 晦準劃贿2 __贿2使嘴嘴u 同時，喷嘴II較佳連接 項6或可移動構件4,而 201124351 使1嘴1]與劃割頭6可同時移動於z轴方 賀嘴1】維持在適當高度，而可 。。此結構確保 便。 免刀開刼控嘴嘴11造成不 雖然如上所述，但是喷嘴u可 件4分開安裝。於此案例中 似3 =可移動構 顯示)的碎屬預處理劑支撑件(未顯示支撑件(未 ，頭6之後移動嘴嘴u。然而，===二而在 費用又相當複雜。 韦灼兩要較向的安裝 於後，說明執行儒销預處_之_操作之方法。 首先’當利用劃割裝置形成劃 輪支托器29可供劃割輪2水平旋=包=丨 :=:供輪支把器垂直(z軸方向)旋轉地耦接在= 里Jd線之刖，碎屑預處理劑先 乂成 與定位在玻之碎=^射純置於玻璃面板！ 單开种’碎辆處理劑的塗佈寬度可壓力調節 猎由调節碎屬預處理劑之喷射壓力來調節。 碎屑預處理劑的塗佈寬度較佳為1至3mm ,但在不、止 ==偏離此範圍。然而，此寬度較峨為包‘ 若碎屑預處理雜置於刺玻璃面板〗的表面之 間’則避免制C卡在㈣面板卜*可在·清潔程序中 13 201124351 完全地自玻璃面板i移除。 熟此技術領域者應明瞭在不恃離本發明之精 下’本發明上述例示實施例可有各種修改。因此，本發: 欲涵蓋所附申請專利範圍之料及其鱗⑽有此類的^ 改0 〆 【圖式簡單說明】 本發明上述及其他㈣、特徵、與優點可 與詳細說明，而使熟此技藝者更易了解，其中： θ二 圖1Α至圖1D為習知劃割程序期間因碎屑卡在玻璃面 板而產生缺陷產品之一系列示意圖； 户理ϊ 2Α ί圖2Β為根據本發明在產生碎屑前喷射碎屬預 處理劑之示意圖； 了 裝置根據本發㈣施例包含料爾理單元之劃割 圖4為圖3之側視圖； 圖；圖5為顯示圖3包含喷嘴之壓力調節單元範例之示意 意圖圖6為顯示圖3包含喷嘴之另—壓力調節單滅例之示 圖7為圖3之噴嘴設置結構範例之側視囷. 元之= 晶片預處理單 單元據本發明又另—實施例顯示包含“預處理 早兀之劃割裝置之透視圖。 201124351 【主要元件符號說明】 1玻璃面板 2劃割輪 3基座 4可移動構件 6劃割頭 6a軸承 6b轉子 7第二可移動塊 8導執 9第一可移動塊 10碎屑預處理單元 11喷嘴 12壓力調節單元 12a壓力控制器 12b調節器 12c壓力控制器 13 Z軸馬達 14饋送螺桿軸 21碎屑預處理劑供應源 22供氣源 29輪支托器 29a轉軸 15 201124351 41推缸 C碎屑 CPT碎屑預處理劑 S劃割裝置 pol偏光膜Under the pumping peach * equipped with debris pretreatment single S 10 (four) wear s = = fine * before the cutting device 8 should pay attention to: 2 set wheel S joint with each other but they guide *: = 4 ;=A second is fixed to the first movable block 9 and can be guided along the base 3 two z:) two shifting: two moving members 4, and fixed to the movable member 4 wheel gamma: wheel 201124351 base 3 faces XY table (not shown, move to perform the cutting operation. 〃,, and horizontally move the guide 8 and the first movable block 9 along the surface of the glass panel to move vertically, then the moving member constitutes the first line Sliding movement guide 4, with respect to the Z-axis direction of the base 3, the first movable block 9 is connected with z red. The Z-axis movement mechanism includes movement in the 2-axis direction, bite 13 and ball screw mechanism (not shown). It can be moved with the movable member at 7 ^ + 1 6 and can be slidably mounted on the base 3 _ ° up/down. *. *ι|έ|_5 弟一 movable block 7 slidably Set on the guide 1. The head 6 is loaded with the second movable block 7. The guide rail 8 and the movable block 7 constitute a second linear motion guide, and guide the cutting head 6 relative to the base 3. Axial axis shift The push cylinder 41 is mounted to the movable member 4, and the rod of the push cylinder extends in the axial direction. The wiper head is connected to the rod tip of the push cylinder 41. During the scribing operation of the above apparatus, the feed screw shaft 14 is fed. First, it is rotated by the driving force of the boring motor 13, and when the feeding screw shaft 14 is rotated, the first movable block 9 is moved downward to bring the dicing wheel 2 into contact with the glass panel. When the dicing wheel 2 contacts the glass panel 1 At the same time, the change in the magnitude of the current flowing through the reel motor 13 is detected, and the driving of the reel motor 13 is stopped. Then, in the case where the scribing wheel 2 is in contact with the glass panel 1, the red 41 is operated to apply pressure to the glass. Panel 1. 201124351 sj.] The external force caused by the pressure during operation maintains the repulsion balance of the disc glass panel. η 6 At the same time, the debris pre-processing unit 10 is mounted on the cutting head pre-processing unit 1G including the nozzle 11 and the pressure adjusting unit 12, before the production and the agent are sprayed through the nozzle 11, for adjusting the debris pre--, the nozzle 11 and the pressure adjusting unit 12, biting only the nozzle 12, can be installed on the cutting head 6. 乂惶D 12 12 Can include regulator or pressure control啥 啥 喷 喷 〇 〇 〇 预处理 预处理 预处理 预处理 ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... The difference directly from the broken shoulder pre-force control = 12 can be included between the regulator (3) and the dust illusion, as well as the nozzle 'sheet metal for the ί mouth 11 and the debris pretreatment agent supply type, where the debris pretreatment miscellaneous. The tree sprinkler type pretreatment agent supply source should be formed by the squirting of the mouth gas. The various known 3 or holly methods are not limited to the illustrated embodiment, but can be used. Two == points on the pseudo virtual line, the virtual line is obtained by the scratching wheel 2 and a hitting the glass panel 1. The structural features of the holder 29, while allowing the spray 201124351 201124351 to the mouth of the nozzle 1 is usually pre-processed in the alternative embodiment before the operation of the cutting wheel 12. As shown in Fig. 8, the four nozzles n are rounded, The Z-axis of 12 is disposed, and can be mounted on the front side and the rear side of the glass panel 1 in the feeding direction with respect to the glass panel 1, and on the right and left sides in the vertical feeding direction=direction. Since the scribing head 6 moves forward or backward along the feeding direction of the glass=plate 1 during the scribing operation, or at least four nozzles mounted in the vertical direction of each other perpendicular to the feeding direction book (4), the movement can be performed at 2 The caustic soda transfer is achieved by spraying the crushed crucible from any nozzle facing the direction of the cutting wheel. In still another embodiment of the present invention, the outer circumference of the wheel 2 is again placed on the outer circumference (four) eight. Due to such a structure, it is sprayed to the scoring wheel 2 - if the debris pretreatment agent, because the cutting wheel 2, the scattering direction in the feed direction, allows 2 centrifugal force. 1°] wheel 2 private movement 刖 射 碎 碎 于 于 于 于 于 于 于 本 本 本 本 本 本 预处理 预处理 预处理 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' When the direction of the cutting of the nozzle 11 is changed. =, position, section cutting wheel 2 The rotor can be installed by the vehicle: driven by a motor (not shown), sub 6b. The motor is separated from the ^6, and the nozzle u can be used to signal the angle of the suspect, and the whole turn is not wide.) Received about the wheel supporter 29 晦 划 划 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 The nozzle II is preferably connected to the item 6 or the movable member 4, and the 201124351 allows one nozzle 1] and the cutting head 6 to be simultaneously moved to the z-axis square mouthpiece 1 to be maintained at an appropriate height. . This structure is guaranteed. The knife-free opening nozzle 11 is not caused, although as described above, the nozzles u can be mounted separately. In this case, the 3 pre-treatment agent support of the movable structure is shown (the support is not shown (no, the mouth is moved after the head 6 is. However, === two and the cost is quite complicated. Burning two to be installed in the opposite direction, indicating the implementation of the Confucianism pre-processing _ operation method. First of all, when using the scribing device to form the rowing support 29 for the scribing wheel 2 horizontal rotation = package = 丨: =: For the rotation of the wheel supporter (z-axis direction) is coupled to the J 里 Jd line, the debris pretreatment agent is first smashed and positioned in the glass of the broken = ^ shot purely placed on the glass panel! The coating width of the shredded treatment agent can be adjusted by the injection pressure of the pretreatment agent. The coating width of the pretreatment agent is preferably 1 to 3 mm, but not = Deviation from this range. However, this width is more than the package 'If the debris pretreatment is placed between the surface of the thorn glass panel', then avoid the C card in the (four) panel ** can be in the cleaning program 13 201124351 completely The ground is removed from the glass panel i. It should be apparent to those skilled in the art that the above exemplary embodiments of the present invention may be omitted. There are various modifications. Therefore, the present invention is intended to cover the scope of the appended claims and its scales (10) have such a change. 〆 [Simplified description of the drawings] The above and other (four), features, and advantages of the present invention may be described in detail. For those skilled in the art, it is easier to understand, wherein: θ2Fig. 1D to FIG. 1D is a series of schematic diagrams of defective products caused by debris stuck in the glass panel during the conventional dicing procedure; 户理ϊ 2Α 图Fig. 2Β BRIEF DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE INVENTION According to the present invention, a schematic diagram of a shredded pretreatment agent is produced before the generation of debris; the device according to the fourth embodiment of the present invention includes a cross section of the raw material unit, FIG. 3 is a side view of FIG. 3; FIG. BRIEF DESCRIPTION OF THE EMBODIMENT OF THE PRESSURE ADJUSTING UNIT COMPRISING A NOZZLE FIG. 6 is a side view showing the other example of the pressure regulating single nozzle of FIG. 3. FIG. 7 is a side view of the nozzle setting structure of FIG. According to still another embodiment of the present invention, a perspective view of a scribing device including "pre-treatment" is shown. 201124351 [Description of main components] 1 glass panel 2 scribing wheel 3 base 4 movable member 6 scribing head 6a Bearing 6b rotor 7 Second movable block 8 guide 9 first movable block 10 debris pretreatment unit 11 nozzle 12 pressure adjustment unit 12a pressure controller 12b regulator 12c pressure controller 13 Z-axis motor 14 feed screw shaft 21 debris pretreatment Agent supply source 22 supply source 29 wheel supporter 29a shaft 15 201124351 41 push cylinder C debris CPT debris pretreatment agent S scribing device pol polarizing film