TWI296612B - - Google Patents

Description

[Technical Field] The present invention relates to a method of forming a scribe line on a surface of a brittle material such as a glass plate, a semiconductor wafer, or a ceramics, and a scribing head and a wire device. > Month~ [Prior Art] Square glass used as an electronic component material, the fine plate is a base material, and the base material is divided (4). In this division, first, the wheel is pressed and pressed in the direction from the traveling start position on the surface of the base material: 'Change the direction of rotation of the cutter wheel piece to the direction of the last rotation direction... and form a scribe line similarly (hereinafter, For the intersection and the line processing, the base material processed by the intersection and the line is sent to the 翏. 'The given η η / applies the bending force to the base material by the splitting machine to apply the bending moment to the base material. The base material is divided along the scribe line to obtain the required square glass. The scribe line device for the ΓΐΓ t , , , , , , , , , , : : : : : : : : : : : : : : : : : : : : : : : : : The direction of the capture is the γ direction, and the description is as follows. 1 - The scribing device of the parent has a table 2 that can be horizontally rotated, and is used to fix the glass plate 9Q Μ vacuum adsorption mechanism; 21, 21, for the work A 9 ten guide 90. 20 support can move in the γ direction; the ball screw 22' can be used to enable the table 2 架 along the guide rail 21 2 in the X direction on the workbench 2〇 above; the scribing head 26, two are arranged to slide in the Χ direction · '. (10), used to make the scribing head, 26 slide 1296612

The blade support member 27, the 劏 瓸 R R R R R R “ “ “ “ “ . . . . . . . . . . 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部 下部25, disposed above the guide bar 23 to identify the alignment mark on the glass plate 9 。. The scribing head of the scribing device formed by this syllabus has a special design to prevent the micro-concave surface which must exist on the surface of the glass plate 9G and other deformations caused by the scribing head to be deformed as shown in FIG. The scribing head body 26A is configured to transmit the blade holder 27 through the rotating shaft 29 orthogonal to the surface of the glass plate 9 () so as to be swingable about the axis of the rotating shaft 29, and The cutter wheel piece 28 is disposed at a position Q2 in the opposite direction to the traveling direction (the direction of the arrow s direction in FIG. 12) from the axial center position Q1 of the rotary shaft 29, whereby the cutter wheel piece 28 is caused during the running of the scribing head. The secant head body 26A is followed to obtain the straight forward stability of the cutter wheel piece 28 to prevent deformation of the scribe line. However, the above-mentioned scribing device does not have any problem when the glass plate 9 has a scribe line formed in only one direction, but if it is crossed and scribed, as shown in FIG. 3, a so-called intersection jump occurs, that is, The cutter wheel piece 28 crosses through the vicinity of the first line D to L3 formed, and does not form the line L4 to Le which should be formed later. If such a crossing point is present in the glass sheet go, when the glass sheet 90 is divided by the splitting machine described above, the glass sheet 90 cannot be divided according to the scribe line, and a large number of defective products are generated, resulting in extremely low production efficiency. The reason for this kind of communication is that the cutter wheel is handed over and the force necessary for the knife blade to be vertically applied to the glass plate 90 is used to lurk inside the sides of the line. The stress is weakened. 1296612 Therefore, the applicant of the present invention proposed a book for the question of the ancient and the earth, and the problem of the problem!} The line method and the scribing head and the "_0.969", the content of which is "4" (Japan) The special wish is green full*. Use the 1-wire head body on the brittle material to set the blade support shaft to swing around the axis of the rotary shaft. The wheel piece is arranged on the opposite side of the axis of the rotating shaft than the axis of the rotating shaft, and is formed by the opposite direction of the wire head, so as to be in the form of a cross on the surface of the brittle material. Form a scribe line, in this case, } * . The scribe line command, control the blade support, so that its swing range is 〇.~2. 夕4々疳 can "green" dry square. Figure 14, shows its implementation The slash head of the shape, (4) is the front view, and (8) is the bottom view. The 忒 头 wire head is provided with: the scribe head body 3 〇, the bearing shell Μ, the blade holder 32, the cutter wheel 33, and the bomb waste mechanism 34. The scribing head body 30, the lower portion of which is formed as a notch 'in the notch portion, the inner casing 31 is received. The bearing shell 3 is transparent at its end The bearing ^ is connected to the horizontal support shaft 36 inserted through the scribing head base 30, and the other end portion abuts on the stopper car 38 which is disposed in parallel with the shaft shaft in the scribing head body 3, 38, outside the bearing " Further, within the range limited by the stop shaft 38, the blade support member 32 is pivoted about the axis of the support shaft 36, and is disposed in the bearing housing 31 through the yoke shaft 39 of the brittle material 设置 to be disposed around the rotary shaft. The shaft of the 39 is free to swing between the suspect shaft 39 and the bearing housing 31. Further, a biasing mechanism 34 is disposed above the rotating shaft 39, and the elastic pressure generated by the biasing mechanism 34 is transmitted through the rotating shaft. 39 and the blade holder 32 are applied to the blade wheel 33. The blade wheel 33 is disposed on the blade holder 32 and is located opposite to the direction of the axis s of the axis 12 of the rotation 1296612. The position of the direction (the left direction of the figure '14'. Here, the blade holder 32 controls the swing range to (Γ~2.), but the control mechanism uses the groove formed under the bearing housing 31. 41艮p mounts the blade holder 32 such that its upper end is received in the groove 41 of the bearing housing 31 when the blade holder 3 2 When swinging to the maximum value of the swing range, any one of the corners of the four corners on the upper end portion of the blade support * 32 is abutted against the two inner wall faces 46, 47 of the (four). Therefore, by adjusting the gap between the two inner wall surfaces 46, 47 of the groove 41 and the two side faces 48, 49 of the upper end portion of the blade holder 32, the swinging range (4) of the blade holder 32 can be adjusted within the above-mentioned predetermined range. If the gap is made larger, the swing range can be enlarged. ' Conversely, if the gap is small, the swing range can be reduced by 0. [Invention] The antagonistic problem to be solved by the applicant is as proposed by the applicant of the present invention. The wire end, by forming the structure as explained above, can ensure the swinging motion of the blade support member which can maintain the straightness of the cutter wheel piece, and minimize the influence of the internal stress which is latent in the vicinity of the intersection point, thereby performing cross-cutting Even if the pressing force applied to the cutter wheel piece is kept at the second line, the parent point jump will not occur, and it will not occur at the beginning of the scribing line. However, in the above-described scribing head, the blade holder is disposed at a position opposite to the traveling direction of the axis position of the rotating shaft in the blade supporting device, and the side of the supporting shaft is located at the front when the line is 10296296612 Walking, so when it is crossed with the existing line, or through the undulations, bending or unevenness of the glass surface, the blade wheel is pushed up, so that the blade holder floats around the fulcrum and floats from the glass surface. Figure 5' is a schematic diagram illustrating this phenomenon. That is, when the fulcrum head is moved in the state in which the squeegee blade 33 is pressed against the surface of the glass plate 90 by the biasing mechanism 34 with the fulcrum 36 as the front surface, the blade wheel 33 is The blade edge line 33A contacts the point P of the surface of the glass plate 9〇, and the horizontal component force M (the horizontal component force of the line force) and the scribing process are necessary for the sj line necessary for the scribing of the glass plate 90 by the cutter wheel piece 33.

The reaction force R of the resultant force of the vertical tool force N (the vertical component force of the scribing force) is generated toward the center side of the tool rim 33. However, the reaction force R becomes a rotation moment centered on the fulcrum 36 acting on the cutter wheel piece 33, and as a result, the cutter wheel piece 33 is pushed up to float the outer blade support member around the support shaft 36 (four) from the surface of the glass plate 90. . If the floating phenomenon of the blade holder as described above occurs, the pressing force of the blade piece 33 against the glass plate 90 is weakened by the reaction force, and as a result, it is difficult to obtain a deep vertical crack. ^ However, the mechanism of the vertical crack of the glass in the glass is known as: first of all, when the blade is subjected to the load, the surface of the glass abuts the blade and produces 5 early deformations, which should be +, Τ7 ^ ^ ^ ^ , , The increase of a slave blade and the weight of it creates a plastic k shape there. When the blade is further increased, it exceeds the limit of plastic deformation, and the fruit is brittle. The vertical crack begins to grow in the direction of the glass thickness. The front end of the crack reaches the corresponding blade load and the material of the glass. Or stop when the depth of the thickness (the distance from the surface of the brittle material is 1296612). For a certain material and a certain thickness of glass, the depth at which the front end of the vertical crack is reached (hereinafter, referred to as the vertical crack arrival depth) is only the blade load. That is, if the blade load is increased, the depth at which the blade of the blade wheel bites into the glass surface becomes deeper, and the energy for the occurrence of the vertical crack becomes larger, so that the depth of arrival of the vertical crack becomes deeper. However, if the blade load exceeds a certain size, although a so-called deep vertical crack can be obtained, the internal strain accumulated near the surface of the glass will become saturated, and horizontal cracks will occur, that is, completely different from the growth direction of the vertical crack. The crack in the direction. Such horizontal cracks are responsible for the large amount of swarf that is to be avoided. The inventors of the present invention have intensively investigated the above mechanism to know that the depth of arrival of the blade load and the vertical crack is as shown in Fig. 6. That is, from the graph of Fig. 6, it is known that the depth of arrival of the vertical crack is first in the field (A field) which increases slowly with the increase of the blade load, and then there is a field in which the increase in the blade load increases sharply (B field). There is further a field (C field) that hardly increases even as the blade load increases. Moreover, in this c field, there is a significant increase in horizontal cracks that have not appeared in the A field or the B field. From the above facts, it is found that a deep vertical crack can be obtained without a horizontal crack by scribing the blade load equivalent to the B field (the area where the arrival depth p increases sharply with the increase of the blade load). However, the blade load range of the B field is very small. As described above, the conventional technique cannot avoid the occurrence of the blade support floating phenomenon, and the pressing force of the cutter wheel piece is weakened by the reaction force r, so the range is very small. It is extremely difficult to adjust the blade load in the above B field. 12 1296612 Also, in the intersection and the line, as described above, in order to prevent the formation of the second scribe line of the intersection point jump, the blade load must be increased compared with the ith line: the blade load often enters the above:: The shoulder cut occurs . To avoid a large number of people who have another problem, so that the glass of the above-mentioned conventional cutter wheel: undulation or bending, the unevenness of the glass surface, and the knife holder holding the blade wheel or maintaining the blade support External factors such as the shaking of the thread often lead to the inability to obtain a stable line. r to the present invention, etc., according to the aforementioned phenomena and problems, earnestly studied and found that the walking direction of the m-line head is changed to be opposite to that of the known person: that is, the conventional method is to walk the scribing head in such a manner that the fulcrum is located in front. If the scribe head is moved in such a manner that the fulcrum is located behind, the blade support member can be prevented from being lifted. As a result, the blade load can be applied to the cutter wheel piece, and the blade load can be controlled to be suitable for the aforementioned B field. range. That is, the direction in which the fulcrum 9 is located behind the scribe head in the direction of the arrow T/the blade edge 5A of the blade wheel 5 contacting the surface of the glass plate 9G is generated toward the center side of the blade wheel 5 The horizontal force of the scribing process is 'V and the reaction force of the resultant force of the vertical component force W of the scribe line of the thickness direction of the glass plate 90, and the reaction force X is the force of the branching force 9, so that the cutter wheel piece will be The surface of the glass (four) 90 floats. As a result, without any tight force W, it is possible to apply the blade load to the blade wheel 5 to control the blade load. ☆ The field of the blade is therefore reversed, and the conventional technique is used. It is easier to control the blade to the extent of the field. 13 1296612 The object of the present invention is to provide a scribing method, a scribing head and a stroke, so that when the father and the scribing are performed, no intersection jump occurs, and the blade support is prevented from rising, so that the blade is added. The pressure acts effectively on the brittle material to achieve deeper vertical cracks than conventional techniques. In order to achieve the above object, the method for scribing a brittle material according to the present invention is characterized in that, in a scribing head body that travels on a brittle material, the blade holder is transmitted through a fulcrum parallel to the surface of the brittle material. It is arranged to be swingable about the axis of the support shaft, and the scribing head is formed on the blade support with a scribing blade to make the (four) wire head travel on the brittle material with its support shaft located behind the scribing blade. To form a scribe line on the surface of the brittle material. In this configuration, the scribing blade can be maintained in the direction of the reaction force of the brittle material in the scribing state, and is maintained at a connection line between the starting point of the reaction force and the axis of the fulcrum or more brittle material than the connecting line. Dash. Alternatively, the scribing blade may be a cutter wheel piece, and the cutter wheel piece may be disposed to be rotatable about an axis of the rotating shaft by a rotating shaft parallel to the surface of the brittle material. In this case, the blade holder can also be arranged to be able to swing freely around the axis of the rotary shaft through a rotary shaft that is orthogonal to the brittle material. Further, preferably, the rotating shaft is disposed at a position closer to the fulcrum side than the axial center of the rotating shaft. The scoring blade can also be a diamond knife and the diamond knife can be attached to the support. Moreover, the scribing head of the present invention is characterized in that, in the scribing head body that travels on the material of the brittle material 1296612, the blade support member is disposed through the axis of the flat material t of the brittle material to be disposed around the axis of the support shaft. Swing "and in the blade support: with a scribing knife." In this configuration, the axis of the fulcrum can also be located on the line of the reaction force of the scribing knife from the brittle material or Further, the scribing blade may be a cutter wheel piece, and the cutter wheel piece may be arranged to be rotatable about the axis of the rotation axis through a rotating shaft parallel to the surface of the fish brittle material. In this case 'The blade holder can also be arranged to be swingable about the axis of the rotation axis through a rotation axis orthogonal to the brittle material. Further, preferably, the rotation axis is located on the axis of the rotation axis. The heart is further on the side of the fulcrum: 〇 The scriber can also be a diamond knives, and the diamond knives are fixed to the blade holder. The scribe device of the present invention is characterized in that: the above-mentioned scribing head is provided The vine head is made with its fulcrum on the back side of the scriber Walking on the sturdy material to form a scribe line on the surface of the brittle material. In the scribe device 'the scribe blade can be a cutter wheel piece' or a diamond knife' by the above-described scribe method and stroke of the present invention The wire head and the scribing device can perform the following functions.

For example, in the configuration in which the cutter wheel piece is used as the scribing blade, as shown in FIG. 5, the scribing head is operated with the carriage 9 being located on the rear side (the direction of the arrow T 15 1296612 in the figure), thereby The blade edge line 5A of the wheel 5 contacts the point E of the surface of the glass plate 9〇, although the horizontal direction component v of the running direction and the line component of the thickness direction of the glass plate 90 are generated. The reaction force X of the force, but the reaction force X is the force to the support shaft 9, and does not become the rotational moment acting on the cutter wheel 5. Thereby, the floating phenomenon of the blade holder as described above does not occur, so that the pressing force to the blade piece 5 is not reduced by the reaction force X. Further, the same description can be made for the constitution using a diamond knife as a scribing knife. Specifically, as shown in FIG. 10, the scribing head is moved such that the fulcrum 9 is located on the rear side (in the direction of the arrow T in the figure), whereby the blade edge ridge 74A of the diamond blade 74 contacts the surface of the glass plate 90. Point P, although the traveling direction is generated by the horizontal component V and the thickness direction of the glass plate 9: the line processing vertical component force W is the reaction force of the resultant force χ, but the reaction force X is the branch The force of the shaft 9 does not become the rotational moment acting on the diamond knife. Thereby, the floating phenomenon of the blade holder as described above does not occur, so that the pressing force of the diamond blade 74 is not reduced by the reaction force. According to the above configuration, the pressing force to the cutter wheel 5 or the diamond 3 74 is efficiently applied to the glass plate 9G (brittle material), and a deeper crack than the prior art can be obtained. Here, if the blade holder is provided to be swingable about the axis of the rotation axis by the rotation axis orthogonal to the surface of the brittle material, the followability of the blade holder to the running direction of the scribing head can be improved. The position of the person, 'If the rotating shaft is set to be more than the rotating vehicle, the blade support can be further improved by the 1296612 follow-up direction of the axis of the support side of the support shaft. And a scribing head and a scribing device, wherein the direction of the reaction force received by the brittle material in the scribing is maintained at a line connecting the starting point of the reaction force and the axis of the fulcrum or from the connecting line In the state of the material, the generation of the rotational moment can be more reliably eliminated. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Further, the scribing method of the present invention is implemented by a scribing head, and therefore The embodiment of the scribing head will also be described in the description of the scribing method. Fig. 1 shows an embodiment of the scribing head of the present invention, (a) is a front view, and (b) is a bottom view. Dash head 1, system The scribing head body 2, the bearing housing 3, the blade holder 4, the cutter wheel piece 5, and the biasing mechanism 6. The scribing head body 2 is notched at its lower portion, and the bearing housing 3 is housed in the notch portion 8. The bearing housing 3 has one end portion connected to the horizontal support shaft g of the scribing head body 2 through the bearing 1Q, and the other end portion abuts to be stopped in the scribing head body 2 in parallel with the support shaft. The shaft is rotated about the axis of the support shaft 9 within a range limited by the stop shaft 11. The blade holder 4 is disposed around the bearing housing 3 through a condensing shaft 7 orthogonal to the surface of the brittle material. The axis of the rotary shaft 7 swings freely. The bearing 12 is interposed between the rotary shaft 7 and the bearing housing 3. The elastic mechanism 6 is also changed above the movable shaft 7, and the elastic pressure of the biasing mechanism 6 is transmitted through the rotary shaft. And the blade holder 4 is applied to the cutter wheel 5. The 17 1296612 and the file cutter 4 are not necessarily arranged as described above to be able to rotate around the axis 7 = the axis ^ b can be fixed to the body of the scribing head 2. In this case, the member required for the outer bearing to break 3 and the bearing 12 to swing can be used. The cutter wheel 5, in the blade support 4 The rotation axis parallel to the surface of the brittle material is disposed so as to be rotatable about the axis of the rotation axis, and the rotation shaft 13 is disposed at a position closer to the support shaft 9 than the axial position of the rotation shaft 7. / The positional relationship between the W wheel 5 and the rotary shaft 7 is not limited to the above relationship, and the rotary red of the cutter wheel 5] the q + spindle shaft 13 may also be located at the positive axis ητ of the rotary shaft 7 When the scribing head 1 is scribing, the scribing head i travels on the brittle material so that the support shaft 9 is located behind the cutter wheel 5. That is, the scribing head 1 is diced along the chrome of FIG. _ 士士4 The direction of the front 唬T is walking. The scribe head is located on the side of the cutter wheel 5 with the support shaft 9 as shown in Fig. 5, and the knives of the knives of the two knives are in contact with the glass plate 9〇. The surface of the surface, although it will produce the direction of the book, the green _,, the friend's horizontal component V and the thickness of the glass plate 90 in the direction of the ridge U line processing arbor eight a _ knife knife w Tao has produced a synergy The reaction force x piece one or two: the force of the glass/force x to the support shaft 9 does not become the rotational moment that causes the surface of the cutter wheel f^plate 90 to float. Thereby, the blade support as described above does not decrease with the use of force X. "...The force of the knife wheel 5 is not affected by the reaction to the brittle material ^; the pressure of the wheel 5 is more effective than the vertical crack of the white technology. Here's the figure 5 Check + ', J line in the direction of the reaction force X of the cutter wheel 5 from the glass plate 90, right here to maintain the reaction force X and the support shaft 9 I296612

At, , ",,, H, or closer to the glass plate 90 ^ than the connection line H (in the figure, see the dotted arrows X!, W!, V〇, which can be more ^ Throughout: the generation of the rotation moment. The adjustment of the scribe speed, the pressure to the cutter wheel, and the relative positional relationship between the cutter wheel 5 and the fulcrum 9 can maintain such a state. Fig. 3 illustrates an embodiment of the scribing apparatus of the present invention. Fig. 2 is a side view of a scribing apparatus having a scribing head 50, and Fig. 3 is a front view of a main part of the scribing head 50. _ 仞 刹 brake line The head 5 〇 is held in an inverted state between the pair of side walls 51, and is positioned below the J-soil 51, and is slidably viewed from the support shaft 54 by the support shaft 54 in the side view. The holder holder has a blade holder 4 for rotating the blade 5 of the holder 5 in front of the holder (the right side of Fig. 3). The blade holder 4 is passed through a rotary shaft provided at the upper end thereof. 7 and the bearing 12 through which the suspect shaft 7 is inserted is attached to the support holder 4534 and can be rotated by the axis of the rotary shaft 7. The sheet _ is the same as in the first embodiment. The blade support 8 is disposed to be rotatable about the axis of the rotary shaft 13 through the rotary shaft 13 parallel to the surface of the brittle material, and the rotary shaft 13 is located closer to the support shaft 54 than the axial center of the rotary shaft 7. The helical gears 55 are mounted to each other in the rotation axis of the servo horse it 52 and the branch #55. Thereby, the support holder 53 is supported by the support shaft 53 by the forward and reverse rotation of the ship horse 52. Rotating the center to move the cutter wheel 5 up and down 19 1296612. The guide head 50 itself moves in the horizontal direction #58::: along the gear 55 of the scribing device (10). The power transmission mechanism is not limited to this. As shown in Fig. 5, the reaction ΛΥαα + ι 7 in the scribe line 5 receives the axis from the glass plate 90, and if it can maintain the reaction force χ and the fulcrum 9 1 can be: The connecting line η is closer to the glass... : In the second, refer to the dotted arrow to make it more: except for the generation of torque. By appropriately adjusting the speed of the scribing, adding pressure to the knife W, the blade wheel 5 Red can maintain such a state. - The relative positional relationship of the support shafts 54 is again. In the present embodiment, the helical gear 55 is used. The power transmission mechanism transmits the power of the support holder 53. However, as shown in FIG. 4, the rotation shaft 56 of the servo motor 52 may be directly coupled to the holder holder 53. In the above embodiment, A scribing head using a cutter wheel piece as a scribing blade and a scribing apparatus using the scribing head have been described, but the scribing blade is not limited to the cutter wheel piece, and a diamond knife may be used as another example. Fig. 7 shows another embodiment of the scribing head used in the scribing apparatus shown in Fig. 1, (a) is a front view, and (b) is a bottom view. Since only the configuration of the scribing blade is different from that of the above-described embodiment, the other configurations are the same, and the description of the same configuration will be omitted. In the scribing head 70, the biasing mechanism 6 is provided above the rotary shaft 7 in the same manner as in the above embodiment, but the elastic pressure generated by the biasing mechanism 6 is transmitted through 丄296612.

The rotary shaft 7 and the diamond cutter 74 of the blade support I. , a 72 is applied to the diamond holding member 73

Further, the blade support has a 79 X 7 axis swing freely, and is also provided as described above so that the wheel housing 3 and the bearing body 2 are omitted. In this case, the member 73 is held at the end of the member 73. In the concave part of the stone, the inlaid diamond knife 7/f is rivet-wrapped and then welded (SGldering) e and the stone knife 74' jl. jj. _ into the blade support 7 2, you make the diamond The member 73 ^ u 7q ^ mountain ^ σ into the hole, the diamond retaining stone knives 74 are joined by the soft tan in the state of the hole. In this manner, the iron retaining member 73 to which the iron = 4 is joined is provided at a position closer to the support shaft 54 than the axial center of the swing sleeve 7. The diamond knife 74 can be specifically configured as shown in Fig. 8 or Fig. 9. Fig. 8' is a view showing an example of a diamond knife which is applied to the embodiment of the scribing head shown in Fig. 7, (a) is a front view, (8) is a side view, and (c) is an explanatory view of a scribing state. The boring tool/4, as shown in Fig. 8(a), is formed by four split faces 74A, 74B 74C, 74D and square end faces surrounded by the four split faces 74A, 74B, 74C, 74D. The cutting points 741, 742, 743, and 744 of the diamond blade 74 are the corner portions of the end surface 74a. Further, as shown in (b) of Fig. 8, for example, the cleavage plane has sides 551, 552 which converge to an angle of 0 & When scribing, for example, as shown in FIG. 8(c), each of the cleavage faces has a diamond knive that converges to the side of the angle of 110 degrees, and the angle 0b of the center line CC of the angle 0a and the glass plate 90 is set. At 57 to 58 degrees, 21 1296612, point 742 can be cut to scribe. In addition to the above configuration, the diamond blade can also be configured as shown in Fig. 9. Fig. 9 is another example of a diamond knife applied to the embodiment of the scribing head shown in Fig. 7, which is a front view, and (b) A side view viewed from the direction of the arrow 图 of the figure (a), and (c) is a side view viewed from the direction of the arrow γ of the figure (a). The diamond blade 84, as shown in Fig. 9(a), is a shell-shaped so-called shell-shaped diamond knife, and the blade edge ridges 84s are formed by the two inclined faces 84a and 84b. The diamond blade 84, as shown in Fig. 9(c), has a split surface 84A having an edge that converges to an angle of 0 c of 9 degrees, and the blade edge 84s is viewed from the arrow γ direction of the image (g) Arc shape. When scribing is performed by the above-described scribing head 7 ,, the scribing head 7 is moved on the brittle material so that the fulcrum 9 is positioned on the rear side with respect to the diamond blade 74. That is, the scribing head 7G is made to be oriented in the direction indicated by the arrow τ in Fig. 7 . The scribing head 7 is moved in such a manner that the fulcrum 9 is located on the rear side with respect to the diamond blade 74, whereby the cutting point 741, 742, 743, 744 or the blade ridge line 84s of the diamond blade 74 contacts the glass plate 9 as shown in FIG. The point ρ of the surface of the crucible causes a reaction force χ of the resultant force of the horizontal component V of the running direction and the vertical component V of the thickness direction of the glass sheet 90, but the reaction force X The force to the fulcrum 9 does not become a rotational moment that causes the diamond blade 74 to float from the surface of the glass plate 90. Thereby, the phenomenon that the blade holder floats as described above does not occur, and the blade load of the diamond blade 74 is not reduced by the reaction force X. As a result, the blade load of the diamond blade 74 can be efficiently applied to the brittle material to obtain a deeper vertical crack than the conventional technique. 22 1296612 ^ Here 'as shown in Figure 10 'the diamond knife 74 from the glass plate 90 & t W force X direction ' can be maintained at the starting point of the reaction force Ρ and the axis of the fulcrum 9 Connect the wire Η, or in a state of glass: 90 than the connecting wire ( (in Figure 1 ,, see the dotted arrows L, W2, Μ. This makes it possible to eliminate the rotation moment. This state can be maintained by adjusting the pressing force of the scribing speed to the diamond blade 74 and the relative positional relationship between the diamond blade 74 and the fulcrum 9.

Further, although a scribing device having a scribing head 1 and a scribing head 5 已 has been described here, a scribing device having a scribing head 7 使用 using a diamond knife instead of the scribing head i is also included in the present embodiment. in. The composition is the same as the actual slogan except for the scribe head, and the scribe head 7 has been explained, so the detailed description is omitted. Further, the mechanical action generated by the configuration of the device having the scribing head 7 适用 is applied based on the description of Fig. 1 . Next, the scribing method and the conventional scribing method of the present invention are separately carried out, and the depth of the vertical crack formed in the glass is measured. Use the scribing head 60 shown in Figure 4 to

2. 5mm 0·65mm 125. 300 mm/sec 1·lkgf glass (soda-glass) The scribing method of the present invention is subjected to scribing under the conditions listed. The wheel diameter of the cutter wheel is the thickness of the cutter wheel. The angle of the blade is the angle of the blade. The material of the blade is loaded with the weight of the glass. 23 I296612 The thickness of the glass plate is 7.7mm The direction of the scribe head is the direction of the arrow τ. For comparison, the direction of travel of the scribing head is in accordance with the prior art, i.e., the direction of the arrow S of Fig. 4, and the others are carried out under the same conditions as the above-described embodiment of the present invention. However, the direction of the blade holder 4 is opposite to that of the above embodiment, so that the rotary shaft 13 of the blade piece 5 is located on the rear side of the rotary shaft 7 while walking. Measurement results After the respective methods were scribed, the depth of the vertical crack was measured by each method, and the following results were obtained. Example 450 " m~500 from m Comparative Example 11 〇β m~12 0 /zm From the above results, it is known that the scribing method and the scribing head according to the present embodiment can obtain up to about the same blade load. Vertical cracks of more than 4 times the depth of the comparative example. Further, in the above description, the case where the scribe line is formed of a glass plate which is one of the brittle materials is mainly described, but the present invention is not limited thereto, and is, for example, a liquid crystal display panel, a plasma display panel (pDp), an organic EL display, or the like. A flat panel display (FPD) in which a brittle material is bonded, or a mother-bonded substrate such as a substrate of a transmissive projector or a substrate of a reflective projector, and a step of forming a scribe line can apply the scribing method of the present invention And scribing head. INDUSTRIAL APPLICABILITY The scribing method and the scribing head and the scribing device of the present invention can obtain vertical cracks for scribing formation deeper than the conventional technique of 1296612, and are particularly suitable for forming cross streaks in brittle materials. In the case of a substrate, in the step of dividing after the cross-hatching, the brittle material substrate can be easily divided along the scribe line. Moreover, the occurrence of defective products can be eliminated, and the production efficiency is higher than that of the prior art. Further, the technique for forming the scribe line of the present invention can be applied not only to a glass plate but also to a mother-bonded substrate such as a liquid crystal display panel, a PDP, an FPD, a transmissive projector substrate, or a reflective projector substrate. BRIEF DESCRIPTION OF THE DRAWINGS (1) Drawings Fig. 1 is a view showing an embodiment of a scribing head according to the present invention, and (a) is a front view (b) showing a bottom view. Fig. 2 is a side elevational view showing another embodiment of the scribing head of the present invention. Figure 3 is a front elevational view of the main portion of the scribing head shown in Figure 2. Fig. 4' is a front view showing another embodiment of the scribing head. Figure 5' is a schematic view for explaining the rotational moment generated by the cutter wheel. Fig. 6' is a graph showing the relationship between the blade load and the vertical crack depth of the conventional scribing method. Fig. 7' is a view showing another embodiment of the scribing head, wherein (a) is a front view and (b) is a bottom view. Fig. 8 is a view showing an example of a knife applied to the embodiment of the scribing head shown in Fig. 7, (a) is a front view, (b) is a side view, and (c) is an explanatory view of a scribing state. 1296612 Fig. 9' is another example of a diamond knife applied to the embodiment of the scribing head shown in Fig. 7, (a) is a front view, and (b) is a side perspective from the arrow χ direction of the figure (a). The view, (c) is a side view from the direction of the arrow γ of the figure (a). Figure 10 is a schematic view for explaining the rotational moment generated by the diamond knife when the diamond knife is used as the scribing knife. Figure 11 is a schematic front view showing a conventional scribing device. Figure 12 is a front elevational view showing a conventional scribing head. Figure 13 is an explanatory diagram of the phenomenon of intersection point jump. Fig. 14 is a view showing a conventional scribing head, (a) is a front view, and (b) is a bottom view. (2) Component symbol 1,26, 50, 70 Dash head 2, 26A, 30 Dash head body 3, 31 Bearing housing 4, 6, 27, 32 Blade support 5, 28, 33 Knife wheel 5A, 33A, 84s blade ridge 6, 36 urging mechanism 7, 29 rotary shaft 8, 35 notch 9, 36, 54, 56 fulcrum 10, 12, 37, 40 bearing 11, 38 stop shaft 26 1296612 13, 39 rotation Shaft 20 table 21, 58 rail 22 screw 23 guide 24, 52 motor 41 slot 46, 47 inner wall 51 side wall 53 support holder 55 helical gear 73 diamond retaining mechanism 74, 84 diamond knife 74A, 74B, 74C, 74D, 84A Split surface 84a, 84b Inclined surface 90 Glass plate hr\ r\ 1 uu Marking device 741, 742, 743, 744 Cutting point Μ, N, V, W Component force R, X Reaction force S, T Walking direction

27

Claims (1)

1296612 Patent Application No. 92119507, Patent Application Specification, February 1996 Replacement) Picking up, patent application scope: Yongzheng 1 · A method of marking a brittle material, & features: walking on brittle material a wire head body, wherein the blade support member is disposed to be swingable about an axis of the support shaft through a support shaft parallel to the surface of the brittle material; and the scribing head is formed by providing a scribing blade on the blade support member; The fulcrum is placed on the trailing side of the scribing knife to walk on the brittle material = 'to form a scribe line on the surface of the brittle material. 2. If you apply for a patent range! The method of scribing the brittle material of the item is to maintain the direction of the reaction force of the scribing knife from the brittle material in the line: maintaining the connection line between the starting point of the reaction force and the axis of the fulcrum or more brittle than the connecting line Scribing is performed in the state of the material. 3. For the scribing material of the brittle material according to item i or item 2 of the patent scope, wherein the scribing blade is a cutter wheel piece, and the cutter wheel piece is arranged to be able to be wound through a rotating shaft parallel to the crotch material The axis of the rotary shaft rotates freely. 4. For the scribing method of the brittle material in the third paragraph of the patent application, the basin=blade support is set to be freely swingable by the rotation axis orthogonal to the brittle material. 5. If the towel is used, please refer to the method of marking the brittle material in item 4 of the fourth (4). 'The rotating shaft is set at a position closer to the side of the shaft than the axis of the rotating shaft. 6. The scribe line of the brittle material of the first party, 1 ^, and the second of the patent application is fixed by the diamond knife. In the blade ''〆, the scribing knife is a diamond knife, and the support tool. The bearing housing is a slash head of a brittle material. It is equipped with · 28 1296612 Μ 2. |g The scribing head body that is walking on the brittle material. The parallel shaft of the material surface is set to be able to rotate around the axis of the fulcrum. The heart is freely swingable; the blade support member is attached to the bearing housing, and is disposed through a rotation axis orthogonal to the surface of the brittle material to swing freely around the axis of the rotation axis; and is disposed on the blade support and the I-line cutter The portion where the blade edge of the scribing blade abuts the brittle material is closer to the side of the support shaft than the axis position of the rotating shaft. / 8. The scribe head of the brittle material of claim 7 wherein the axis of the fulcrum is located on the line of the reaction force of the slashing knife from the brittle material or in the line The position above the line. _ 9. The scribe head of the brittle material according to Item 7 or Item 8 of the patent scope, wherein the scriber blade is a cutter wheel piece, and the blade support piece transmits the rotation of the cutter wheel piece parallel to the surface of the brittle material. The shaft is set to be rotatable about the axis of the rotating shaft. 1. A secant head of a brittle material as claimed in claim 7 or 8, wherein the scoring blade is a diamond knife and the diamond knife is fixed to the blade holder. 11 The first type of brittle material scribing device 'has a scribing head with a patented == 8 brittle material, so that the scribing head walks on the recording material with its support axis behind the W-line knife to form a scribing line. .隹 f 生 生 12······························································································· The fulcrum is located on the secant line. To form a surface on the surface of a brittle material 29 1296612 1 3. A scribing device for a brittle material, which is a scribing head having a brittle material in the patent application category 10, such that the scribing head travels on the brittle material with its fulcrum located behind the scribing knife To form a plaque on the surface of the brittle material, the pattern: as in the next page 30