TW201711817A - Plate-glass processing apparatus and glass substrate - Google Patents

Abstract

This plate-glass processing apparatus (1) is provided with: an arm member (3) that rotatably supports a processing tool (B) for processing the end surface of a plate glass (A); and a servo mechanism (5) that causes the arm member (3) to generate force with which the processing tool (B) presses the end surface of the plate glass(A).

Description

Plate glass processing device and glass substrate

The present invention relates to a sheet glass processing apparatus for processing an end surface of a sheet glass by a tool, and a glass substrate formed by processing the sheet glass processing apparatus.

In recent years, in order to increase the manufacturing efficiency of liquid crystal displays and the like, and to increase the size of the sheet glass, the size of the sheet glass used therefor tends to increase. When the size of the plate glass is increased, the number of glass substrates that can be obtained from one plate glass is increased, so that a glass substrate corresponding to a large liquid crystal display can be efficiently produced. In addition, in order to increase the number of processes per unit time, the manufacturing cost is lowered, and the speed of transporting the sheet glass (processing speed) is increased.

If the end surface of the plate glass is scratched, it will be damaged from the flaw. Therefore, in order to prevent this, the end surface of the plate glass is subjected to grinding and polishing. In the end face processing device for the plate glass, there is a fixed type which is called a constant pressure type in which the pressing force of the tool is maintained constant, and is fixed with a fixed tool. For the shape of the plate glass cut in the upstream process, the fixed end face processing device is used to make the end faces of the plate glass uniform. In the processing, it is necessary to set the grinding amount and the amount of polishing of the sheet glass to be large, so that the processing time becomes long, and it is difficult to further increase the conveying speed (processing speed) of the sheet glass.

On the other hand, as a technique for processing the end surface of the plate glass by the constant pressure type, Patent Document 1 discloses a mechanical arm member having a rotatable (rotating) support tool, and a tool is generated by the mechanical arm member. A pressing force generating element that exerts a pressing force on the end surface of the plate glass, and a plate glass processing device that cushions the cushioning element from the end face of the plate glass to the impact force applied to the tool. In the plate glass processing apparatus, the impact force applied to the tool from the end surface of the plate glass is buffered by the buffer element, and the plate glass can be conveyed at a high speed to follow the end surface of the plate glass.

[Previous Technical Literature] [Patent Document]

[Patent Document 1] International Publication WO2013/187400

The constant pressure type of tooling may bounce significantly at the beginning of the grinding. Hereinafter, the bounce phenomenon of the tool to be added at the start of the machining will be described.

Figure 12 is a diagram showing the action of the tool at the beginning of the process. As shown in FIG. 12, the sheet glass A to be processed is extended in the feed direction C. Transfer. In addition, the plate glass A is in the range of the end portion (hereinafter referred to as "starting end portion") A1 from the start of processing to the end portion (hereinafter referred to as "end end portion") A2 at the end of processing, and the end surface thereof is Add tool B processor. In this case, it can be confirmed that the tool B bounces after the start end portion A1 of the contact plate glass A cannot maintain the state of the end face of the contact plate glass A, and the bounce phenomenon is repeated.

The bounce of the tool at the beginning of the above processing is particularly large compared to the influence of the slight undulation of the end face of the plate glass. Therefore, in the cushioning elements of the prior sheet glass processing apparatus, it is impossible to prevent the bounce of the tool generated at the start of the machining. Therefore, there is a problem that an unprocessed portion remains in the end surface near the starting end portion of the plate glass.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a sheet glass which can maintain a target processing amount with high precision while preventing the bouncing of a tool at the start of processing while the end surface of the sheet glass is being processed. Processing device.

Further, an object of the present invention is to provide a glass substrate which can eliminate the unprocessed portion of the end face and improve the quality.

The present invention is directed to a sheet glass processing apparatus for processing an end surface of a sheet glass by a tool, comprising: a robot arm member rotatably supporting the adding tool; and a servo mechanism for causing the aforementioned The mechanical arm member generates a force by which the aforementioned tool presses the end surface of the plate glass.

According to the related structure, the force (pressing force) of the end face of the tool pressing plate glass can be imparted to the robot arm member by the servo mechanism. The servo mechanism monitors and adjusts the pressing force generated by the arm member by its feedback control. At the beginning of the processing, when the tool is attached to the end of the plate glass, it is intended to be separated from the plate glass due to the impact. The arm member rotatably supports the tool, so that when the tool is to be separated from the plate glass, the arm member also moves with the tool. The servo mechanism can detect the movement of the arm member at this time, suppress the movement of the arm member, and adjust the pressing force so that the tool does not separate from the plate glass. Thereby, the sheet glass processing apparatus can maintain the target processing amount with high precision during processing while preventing the bounce of the tool at the start of the processing. Therefore, it is possible to prevent the unprocessed portion of the sheet glass from remaining at the start of the processing, and to process the sheet glass at a high speed and with high precision.

Further, the plate glass processing apparatus further includes: a support shaft member that rotatably supports the mechanical arm member; and the servo mechanism includes a servo motor having a rotary shaft and is rotatable around the support shaft member Dynamically driving the mechanical arm member; the link mechanism connecting the rotating shaft of the servo motor and the mechanical arm member; and a control unit for performing the servo motor when the tool contacts the plate glass at the start of machining The feedback control of the speed and torque of the aforementioned rotating shaft.

According to the related configuration, the mechanical arm member is rotatably supported by the supporting shaft member, and the servo mechanism adjusts the pressing force of the adding tool to the plate glass by rotating the mechanical arm member around the supporting shaft member. That is, when the tool is to be separated from the sheet glass at the start of the processing, the arm member is rotated around the support shaft member in response to the condition. Mechanical arm member The rotation system is transmitted to the rotation shaft of the servo motor through the link mechanism. When the rotation axis of the servo motor is rotated in response to the rotation of the arm member, the control unit of the servo mechanism detects the change in the speed and torque of the rotary shaft, and performs feedback on the speed or torque in response to the change. control. Thereby, the pressing force of the adding tool to the sheet glass is adjusted by the mechanical arm member, and the bouncing at the start of processing of the adding tool is prevented, and the target processing amount can be maintained with high precision during processing.

Further, the servo mechanism may further include a control unit that performs feedback control of the position of the rotary shaft of the servo motor when the machining by the tool is completed.

In particular, at the end of the machining, the tool is separated from the end of the plate glass, but the control unit controls the position of the arm member so that the tool does not overmachine the end portion. That is, the control unit controls the position of the swing arm by the position of the swing shaft of the servo motor, and the position of the arm member can be controlled by the link mechanism. Therefore, the control unit can control the position of the tool by controlling the position of the arm member so that the tool does not overprocess the end end of the plate glass.

The above-mentioned tool used in the sheet glass processing apparatus of the present invention may be a vermiculite which grinds the aforementioned end surface of the sheet glass.

Moreover, the present invention is a glass substrate comprising a glass substrate having a length of more than 200 mm from one end portion to the other end portion, wherein the one side is included in a range from the one end portion to 100 mm. a corner portion and a processing start mark which is continuous with the chamfered portion; and the one side of the region of 100 mm which is arbitrarily selected in a range of more than 100 mm from the one end portion of the one side The waviness curve maximum height value Wz of the end face exceeds 60 μm and is less than 1000 μm.

By using the sheet glass processing apparatus of the present invention, the end faces of the respective sides of the sheet glass are processed, and the glass substrate on which the processed end faces are left and the processing start marks remain is produced. Further, before or after the processing by the sheet glass processing apparatus, chamfering of the glass sheet is performed in other processes. As a result, the glass substrate is formed at one end portion of one side, and the chamfered portion is formed to be connected to the processing start mark. Further, in the present specification, a plate glass which is processed by a sheet glass processing apparatus and which is chamfered is referred to as a "glass substrate".

By the processing of the sheet glass processing apparatus, the processing start mark is formed in a range in which one end of one side of the glass substrate is 100 mm. Moreover, the glass substrate of the present invention is in the range of one side exceeding 100 mm from the one end portion of the one side, that is, the end surface of the one side of the region of 100 mm which is arbitrarily selected in the range not including the processing start mark. The waviness curve maximum height value Wz exceeds 60 μm and is less than 1000 μm. Here, the waviness curve maximum height value Wz of the end surface of the glass substrate is obtained by using JIS B0601 2013.

As described above, the glass substrate processed by the sheet glass processing apparatus is processed by the sheet glass processing apparatus, and the unprocessed portion is not contained, and the end surface strength is high, which is higher than the previous quality.

Further, the present invention provides a glass substrate comprising a glass substrate having a length of more than 200 mm from one end portion to the other end portion, wherein the one end portion of the one side includes a chamfered portion and is continuous with the chamfered portion And having a start mark of the start end and the end end, And a mountain portion which is continuous with the end point of the processing start mark and is represented by a waviness curve; the mountain portion includes a top portion which is continuous with the processing start mark, and a base portion which becomes the end end of the mountain portion, and is from the foregoing Only one of the one side of the one end portion of the one side to be 100 mm is formed, and the thickness between the base portion of the mountain portion and the start end of the processing start mark is 1000 μm or less.

When the one side of the sheet glass is processed by the sheet glass processing apparatus of the present invention, it can be manufactured on the end surface to be processed, and the processing start mark and the mountain portion connected to the processing start mark remain, and chamfers are formed by other processes. Part of the glass substrate. The mountain portion can be specified as a mountain portion when the end surface of one end portion of the glass substrate is a waviness curve. The glass substrate of the present invention has a range in which one end portion of one side is 100 mm, and the mountain portion is formed only by one, and the thickness between the base portion of the mountain portion and the start end of the processing start mark is set to 1000 μm. The following. Thereby, even if the offset between the plate glass and the tool is large, the waviness of the portion can be reduced as much as possible. Therefore, the glass substrate of the present invention is free from unprocessed portions, and its end face strength is high, which is higher than the previous quality.

Moreover, the present invention is a glass substrate comprising a glass substrate having a length of more than 200 mm from one end portion to the other end portion, wherein the one side is included in a range from the one end portion to 100 mm. The corner portion is continuous with the chamfered portion, and is formed into a grain-shaped processing start mark in the waviness curve; and the valley depth of the processing start mark is 100 μm or less.

The board is made by using the sheet glass processing apparatus of the present invention The processing of the end faces of the respective sides of the glass is performed on the end surface to be processed, and the glass substrate on which the starting marks are formed remains. Further, before or after the processing by the sheet glass processing apparatus, chamfering of the glass sheet is performed in other processes. As a result, the glass substrate is formed at one end portion of one side, and the chamfered portion is formed to be connected to the processing start mark.

When the sheet glass processing apparatus of the present invention is used, the processing start mark can be formed into a valley shape of a waviness curve. By setting the valley depth of the processing start mark to 100 μm or less, the glass substrate is free from the unprocessed portion, and the end surface strength is high, which is higher than the previous quality.

According to the present invention, in the case of processing the end surface of the sheet glass, it is possible to prevent the bouncing of the tool at the start of the processing while maintaining the target processing amount with high precision during processing. Further, the glass substrate can be an unprocessed portion where the end surface does not remain, and the end face strength is high and the quality is improved.

1‧‧‧Slab glass processing equipment

2‧‧‧ drive

3‧‧‧ mechanical arm components

4‧‧‧Support shaft members

5‧‧‧Servo

6‧‧‧stops

7‧‧‧Control device

8‧‧‧Servo motor

9‧‧‧ linkage mechanism

10‧‧‧Control Department

11‧‧‧Rotary axis

12‧‧‧Detector

13‧‧‧Speed Torque ‧ Position Control

14‧‧‧Power Conversion Department

15‧‧‧First link member

16‧‧‧Second link member

17‧‧‧First joint

18‧‧‧Second joint parts

19‧‧‧Operation Processing Department

20‧‧‧Memory Department

21‧‧‧Drive Control Unit

22‧‧‧Servo Control Department

23‧‧‧Block control unit

24‧‧‧ first side

25‧‧‧ second side

26‧‧‧Chamfering

26a‧‧‧First end

26b‧‧‧second end

27‧‧‧Processing marks

27a‧‧‧Starting point of processing start marks

27b‧‧‧End of the beginning of the processing mark

28‧‧‧Mountain

28a‧‧‧ top

28b‧‧‧ base

A‧‧‧ plate glass

A1‧‧‧ starting end

End of A2‧‧‧

AL‧‧‧ average line

B‧‧‧Adding tools

C‧‧‧Feed direction

E‧‧‧plate glass

G‧‧‧glass substrate

K1‧‧‧Top direction

K2‧‧‧Leave direction

T1‧‧‧ distance (thickness)

T2‧‧‧ Valley depth (thickness)

W‧‧‧Wave curve

Wz‧‧‧ waviness curve maximum height value

Fig. 1 is a top schematic view showing an embodiment of a sheet glass processing apparatus.

[Fig. 2a] A top schematic view of a portion of a sheet glass processing apparatus.

[Fig. 2b] The upper schematic view of a portion of the sheet glass processing apparatus.

[Fig. 3] Block diagram of the servo motor.

[Fig. 4] A block diagram of the control device.

Fig. 5 is a plan view showing a method of cutting a sheet glass.

Fig. 6 is a view for explaining a method of processing a sheet glass.

Fig. 7 is a top schematic view showing the behavior of the tool at the start of the machining.

Fig. 8 is a plan view showing an example of a glass substrate.

Fig. 9 is a view showing the waviness curve of the end surface of the glass substrate shown in Fig. 8.

Fig. 10 is a plan view showing another example of the glass substrate.

Fig. 11 is a view showing the waviness curve of the end surface of the glass substrate shown in Fig. 10.

Fig. 12 is a top schematic view showing the behavior of the previous processing of the tool.

Hereinafter, the form for carrying out the present invention will be described with reference to the drawings. Fig. 1 through Fig. 11 show an embodiment of a sheet glass processing apparatus, a glass substrate and a method of manufacturing the same according to the present invention.

The sheet glass A to be processed by the sheet glass processing apparatus 1 has a rectangular plate shape. The plate thickness of the plate glass A is, for example, 0.05 mm to 10 mm. However, the present invention is not limited to this. The present invention is also applicable to the processing of the sheet glass A having a shape other than a rectangle (for example, a polygonal shape and a circular shape), and the processing of the sheet glass A having a thickness of 0.05 mm to 10 mm.

The end face of the plate glass A is processed by the addition tool B. Plate glass The end face processing of the glass A can be a chamfering process (grinding process) of the end face of the plate glass A. Further, the end surface processing of the sheet glass A by the addition of the tool B can be used as a polishing treatment for making the unevenness of the end surface after the chamfering processing uniform. The tool B is, for example, a vermiculite that is rotationally driven, and the vermiculite is subjected to grinding or polishing of the end surface of the sheet glass A while rotating. As the tool B for the grinding process, for example, a so-called plated vermiculite which is obtained by electroplating a diamond abrasive grain of high rigidity vermiculite, and a so-called metal vermiculite which fixes the abrasive grain with a metal bond can be suitably used. The tool B for grinding is more advanced than the tool B for polishing, so it can be used for the plate glass A by the pressing force of about one third of the pressing force of the tool B for polishing. The end face is ground.

The plate glass A is relatively moved with respect to the tool B. For example, for the sheet glass A moving in the feeding direction C, processing is performed in a state where the tool B is fixed. Further, with respect to the fixed sheet glass A, the adding tool B can be processed while moving in the feeding direction C.

As shown in Fig. 1, the sheet glass processing apparatus 1 mainly includes a driving device 2 for rotationally driving the tool B, a robot arm member 3 that rotatably supports the tool B, and a support shaft member 4 that supports the robot arm member 3. The servo mechanism 5 that generates the pressing force acting on the end face of the plate glass A by the tool B, the stopper 6 that locks the arm member 3, and the control device 7 that controls the driving device 2, the servo mechanism 5, and the stopper 6 .

The drive device 2 is an electric motor (electric motor) that rotates the vermiculite as the tool B. This electric motor is supported by the robot arm member 3. Electric motors can use synchronous motors, induction motors, or servo motors Motivation, etc., but is not limited to this. The drive unit 2 is connected to the control unit 7, and can be controlled to start, stop, rotate, and the like.

The mechanical arm member 3 is rotatably supported by the support shaft member 4. The mechanical arm member 3 supports the driving device 2 at one of its ends, and the tool B is supported by the driving device 2. The other end of the mechanical arm member 3 is connected to the servo mechanism 5. By the rotation of the mechanical arm member 3, the tool B is moved in the direction in which the end face of the sheet glass A is pushed (the K1 direction shown in FIG. 2(a): the pushing direction), or is moved away from the sheet glass A. The direction of the end face (K2 direction shown in Fig. 2(b): the direction of departure) moves.

The support shaft member 4 is a midway portion in which one end portion of the support arm member 3 is supported. When the mechanical arm member 3 is driven by the servo mechanism 5, the momentum around the support shaft member 4 is generated.

The servo mechanism 5 generates a pressing force acting on the end surface of the plate glass A from the tool B by applying a force to one end portion of the arm member 3. As shown in FIG. 3, the servo mechanism 5 includes a servo motor 8, a link mechanism 9 that connects the servo motor 8 and the arm member 3, and a control unit 10 (servo amplifier and driver) that performs control of the servo motor 8. The servo mechanism 5 performs feedback control of the servo motor 8 by the control unit 10.

As shown in FIGS. 1 and 3, the servo motor 8 includes a rotary shaft 11 and a detector 12 that can detect the speed and position of the rotary shaft 11. The detector 12 is constituted by a rotary encoder or the like. The detector 12 can detect the speed and position of the rotating shaft 11 (rotary) (rotation angle) degree). The detector 12 is connected to the control unit 10, and transmits the detected value to the control unit 10.

The control unit 10 is connected to the detector 12 and the control device 7, and can transmit a signal from the detector 12 to the control device 7. The control unit 10 receives signals from the detector 12 and the power conversion unit 14, and monitors the speed, torque, and position of the rotary shaft 11 of the servo motor 8. As shown in FIG. 3, the control unit 10 includes a speed torque ‧ a position control unit 13 and a power conversion unit 14.

The speed torque ‧ position control unit 13 performs control for maintaining the speed and torque of the swing shaft 11 of the servo motor 8 constant. In other words, the speed torque ‧ position control unit 13 sets a target for maintaining the speed and torque associated with the rotary shaft 11 of the servo motor 8 detected by the detector 12 and the power converter 14 at a constant target. The value (reference value) is executed by feedback control (hereinafter referred to as "speed torque control mode") for maintaining the target value. Furthermore, the target value of the speed of this embodiment is set to zero.

This speed torque control mode is performed in combination while changing the ratio of the speed control of the rotary shaft 11 to the torque control. Further, in the speed torque control mode, the speed control of the swing shaft 11 (hereinafter referred to as "speed control mode") is executed at the start of the control, and then the torque control of the rotary shaft 11 (hereinafter referred to as "torque" is executed. In the speed mode ‧ position control unit 13, only the speed control mode in which the speed of the rotary shaft 11 is maintained constant may be performed, or only the rotary shaft 11 may be executed. The torque is maintained in a certain torque control mode.

Further, in the speed torque ‧ position control unit 13, control for maintaining the position (swivel angle) of the swing shaft 11 of the servo motor 8 constant can be performed. In other words, the speed torque ‧ position control unit 13 sets a target value (reference value) for maintaining the value of the position (swivel angle) of the rotary shaft 11 detected by the detector 12 at a constant value. The feedback control (hereinafter referred to as "position control mode") is executed so as to maintain the target value.

The power conversion unit 14 converts the speed, torque, and position-related values input from the speed torque ‧ position control unit 13 into signals for driving the servo motor 8.

The link mechanism 9 includes a first link member 15 and a second link member 16. The first link member 15 has a one end portion fixed to the swing shaft 11 of the servo motor 8, and the other end portion of which is rotatably connected to the second link member 16 through the first joint member 17. The second link member 16 has one end portion coupled to the first link member 15 and the other end portion of which is rotatably coupled to the end portion of the robot arm member 3 through the second joint member 18. In the plate glass processing apparatus 1, the rotational force of the rotary shaft 11 of the servo motor 8 acts on the mechanical arm member 3 as a momentum by the link mechanism 9, whereby the tool B is generated for the plate glass A. Press the pressure.

The stopper 6 is configured to be variable in a locked position at which the locking arm member 3 is locked, and is in a standby position that is standby at a position that is not separated from the mechanical arm member 3. The stopper 6 is configured to be movable toward the arm member 3 by the drive of an actuator (not shown). The actuator that drives the stopper 6 may use a cylinder device such as an air cylinder, but is not limited Here, other various devices such as an electric motor or a solenoid valve may be used.

The control device 7 includes a computer (for example, a PC) that mounts various hardware such as a CPU, a ROM, a RAM, an HDD, a monitor, an input/output interface, and the like. As shown in FIG. 4, the control device 7 includes a calculation processing unit 19 that performs various calculations, data necessary for processing the memory glass A, a memory unit 20 for various programs, and a drive device control unit 21 that performs control of the drive device 2. The servo mechanism control unit 22 and the stopper control unit 23 that execute the control of the servo mechanism 5 are provided. The elements are connected to one another by bus bars.

The arithmetic processing unit 19 executes programs necessary for controlling the drive device 2, the servo mechanism 5, and the stopper 6 by various data stored in the storage unit 20 and arithmetic processing of various programs. Further, the arithmetic processing unit 19 obtains the mechanical arm member 3 by calculation based on the type and rotation speed of the tool B, the feed speed of the sheet glass A, the processing amount D of the tool B for the sheet glass A, and the like. The pressing force of the tool B is sent to the control unit 10 of the servo mechanism 5 with a signal for generating a target value of the pressing force.

The memory unit 20 is a data relating to the size and feed rate of the memory board glass A, information on the type and rotation speed of the tool B, information obtained from the servo mechanism 5, and the like. Further, the storage unit 20 stores various programs for controlling the drive device 2, the servo mechanism 5, and the stopper 6.

The drive device control unit 21 operates in conjunction with the arithmetic processing unit 19 to transmit a control signal to the drive device 2. Thereby, the drive control The unit 21 performs control such as activation/deactivation of the electric motor of the drive device 2, change of the rotation speed, and the like. The servo control unit 22 operates in conjunction with the arithmetic processing unit 19, and transmits a signal necessary for feedback control to the control unit 10 of the servo unit 5. Further, the servo mechanism control unit 22 inputs the data received from the control unit 10 to the arithmetic processing unit 19. The stopper control unit 23 operates in conjunction with the arithmetic processing unit 19, and transmits a control signal to the stopper 6 to control the advance and retreat.

Hereinafter, a method of manufacturing a glass substrate, in particular, a method of processing the sheet glass A using the sheet glass processing apparatus 1 having the above-described structure will be described.

First, a large-sized board is formed by a known forming method such as a Float process, a Roll out method, a Slot Down Draw Process, or a Redraw method. Glass E. After that, the sheet glass E is cut into a predetermined size, and the sheet glass A to be processed by the sheet glass processing apparatus 1 is obtained. The cutting of the sheet glass E is performed, for example, by scribing.

Hereinafter, the scribing cut will be described with reference to FIG. 5. As shown in FIG. 5, the cutter wheel H travels along the line to cut CL of the large sheet glass E. Thereby, a cut line having a predetermined depth is cut along the line to cut CL on the sheet glass E. Thereafter, a bending momentum is applied to the periphery of the cutting line, and the sheet glass E is broken along the cutting line. By this breaking, the plurality of plate glasses A are obtained. Thereafter, the plate glass A is subjected to grinding and polishing by the sheet glass processing apparatus 1. Board according to the invention The glass processing apparatus 1 can perform processing according to the end surface shape of the sheet glass A, and does not require high cutting precision. For the cutting accuracy, for example, the maximum height value Wz of the waviness curve described later can be more than 60 μm and less than 1000 μm. The way to set.

Next, the sheet glass processing apparatus 1 performs grinding processing (angeling processing) on the end faces of the respective sides of the sheet glass A. 6(a) to 6(e) show the grinding process of the sheet glass A by the sheet glass processing apparatus 1. Fig. 6(a) shows the state of the sheet glass processing apparatus 1 before the start of processing. As shown in Fig. 6(a), in the state before the start of the machining, by the control of the control device 7, the stopper 6 is in the locked position, contacts a part of the arm member 3, and is locked, and the speed torque ‧ position The control mode of the control unit 13 is switched to the speed torque control mode.

Further, the control device 7 drives the servo motor 8 of the servo mechanism 5 to impart a momentum in the counterclockwise direction to the arm member 3. That is, the servo mechanism 5 rotates the rotary shaft 11 in the counterclockwise direction as shown in FIG. 2(a), and the force is transmitted to the arm member 3 through the link mechanism 9. Thereby, the momentum around the support shaft member 4 in the arm member 3 is generated in the direction around the counterclockwise direction (the top direction K1). The robot arm member 3 transmits the momentum to cause the tool B to generate a pressing force against the sheet glass A. Further, the control device 7 drives the drive device 2 to rotate the tool B.

Fig. 6(b) shows the state of the sheet glass processing apparatus 1 when the tool B contacts the sheet glass A. Moreover, FIG. 7 discloses a relative distance after the tool B contacts the plate glass A (hereinafter referred to as "initial processing". The move between the distances "L". Further, in Fig. 7, in order to clearly show the behavior of the tool B, the end surface of the sheet glass A is revealed as a flat surface (straight in plan view). In the present embodiment, the initial machining distance L can be set to 100 mm or less. Further, the processing amount D (see FIG. 7) of the tool B can be set to 0.03 mm or more and 0.05 mm or less.

As shown in FIG. 6(b), the stopper 6 is located at the retracted position separated from the arm member 3, and the arm member 3 is not locked. Further, as shown in Fig. 6 (b) and Fig. 7, the tool B is separated from the plate glass A by the collision with the start end portion A1 of the sheet glass A. Thus, the force acting on the tool B causes the robot arm member 3 to generate momentum in the clockwise direction (refer to FIG. 2(b)). This momentum is transmitted to the swing shaft 11 of the servo motor 8 through the link mechanism 9. Thereby, when the rotary shaft 11 is rotated in the clockwise direction (see FIG. 2(b)), the speed, position, and torque-related signals are input by the detector 12 of the servo motor 8 and the power converter 14. The speed torque ‧ position control unit 13 executes the speed torque control mode based on the signal.

In the speed torque control mode, the ratio of speed control to torque control is changed in response to a change in speed (position). The switching condition of the ratio can be changed by the gain setting. In the speed torque control mode, the speed control ratio is increased in the case where the speed (position) changes rapidly, and the speed control ratio is increased, and the arm member 3 is made to approach the direction of the sheet glass A (the top direction K1). The momentum around the support shaft member 4 is generated (refer to Fig. 2(a)). The mechanical arm member 3 generates a force (pressing force) that suppresses the separation of the tool B from the sheet glass A by the momentum. Thereby, the tool B can be added The grinding is continued while maintaining contact with the sheet glass A. That is, it is possible to prevent the bounce of the tool B from being added at the start of the machining.

In the speed torque control mode, since the change in the speed (position) becomes small, the torque control ratio becomes large, and the torque following the set torque occurs. Of course, it is also possible to switch to the torque control mode for grinding.

As shown in FIG. 6(d), the control unit 10 of the servo mechanism 5 switches the control mode to the position control mode when the tool B approaches the end portion A2 of the sheet glass A. The control device 7 transmits the trigger signal required for the switching to the control unit 10. Thereby, as shown in FIG. 6(d), the sheet glass processing apparatus 1 is a range from the middle of one side of the sheet glass A to the end portion A2 of the sheet glass A as shown in FIG. 6(e). Perform the grinding process caused by the position control mode.

In the position control mode, the setting is performed to maintain the position (angle) associated with the rotation axis 11 of the servo motor 8 detected by the detector 12 at a constant target value (reference value), and is executed to maintain the target value. Feedback control. The position control mode is continued until the tool B passes through the end portion A2 of the sheet glass A. Therefore, even if the tool B is to reach the end portion A2 of the sheet glass A and is to be separated from the end portion A2, the end portion A2 is not excessively ground.

After the grinding process of the end faces of the sheet glass A as described above, a rubbing treatment is applied to the end faces of the respective sides of the sheet glass A. This polishing treatment is performed by a sheet glass processing apparatus 1 including a tool B (meteorite) for polishing. At the end of the polishing process, a chamfering process is applied to the corner portion of the sheet glass A. The chamfering treatment is caused by the plate glass processing apparatus 1 Perform before cutting.

The glass substrate G having a predetermined size is produced by applying the above-described processing to the sheet glass A. According to the sheet glass processing apparatus 1 of the present invention, the amount of grinding and the amount of polishing of the end surface of the sheet glass A can be kept constant, so that the burden on the sheet glass A is small. Further, since it is processed in accordance with the end surface of the sheet glass, the shape of the end surface of the sheet glass A after cutting is left as it is. In other words, the cutting accuracy of the above-mentioned plate glass A remains as it is.

8 and 9 show an example of a glass substrate G formed by processing the sheet glass processing apparatus 1 of the present embodiment. In Fig. 8, among the four sides of the rectangular glass substrate G, the first side 24 and the second side 25 of any two sides are disclosed. The first side 24 is subjected to grinding and polishing from one end portion to the other end portion (not shown), and FIG. 8 discloses one end portion of the first side portion 24. Further, one end portion of the first side 24 corresponds to the starting end portion A1 of the sheet glass A processed by the sheet glass processing apparatus 1.

In this example, the entire length (the length from the one end portion to the other end portion) of the first side 24 of the glass substrate G is about 1500 mm, but the invention is not limited thereto. One end portion of the first side 24 includes a chamfered portion 26 formed by chamfering, a machining start mark 27 connected to the chamfered portion 26, and a mountain portion 28 connected to the machining start mark 27.

The chamfered portion 26 is formed in a straight line shape in plan view by cutting (grinding, grinding) a portion between the first side 24 and the second side 25 of the glass substrate G. The chamfered portion 26 has a first end portion 26a connected to the second side 25 and a second end portion 26b connected to the processing start mark 27. Chamfer 28 The length (distance from the first end portion 26a to the second end portion 26b) is set to be about 2 mm, but is not limited thereto.

The processing start mark 27 is formed when the tool B contacts the start end portion A1 of the plate glass A at the start of the grinding process of the sheet glass processing apparatus 1, and the outline of the glass substrate G remains after the polishing process. As shown in FIG. 8, the processing start mark 27 has a start end 27a and an end end 27b, and is formed in a curved shape in plan view. The start end 27a of the machining start mark 27 coincides with the second end portion 26b of the chamfered portion 26. The end end 27b of the processing start mark 27 is connected to the mountain portion 28. The processing start mark 27 and the mountain portion 28 are formed on the end surface of one end portion of the first side 24 in a range from the one end portion of the first side 24 to 100 mm.

The mountain portion 28 suppresses the bounce at the start of the machining. Therefore, only one of them is formed after the machining start mark 27 is formed during the grinding process by the sheet glass processing apparatus 1, and the outline of the glass substrate G remains after the polishing process. The mountain portion 28 has a top portion 28a that is connected to the processing start mark 27, and a base portion 28b that serves as the end end of the mountain portion 28. The top portion 28a of the mountain portion 28 coincides with the end end 27b of the processing start mark 27. The base portion 28b of the mountain portion 28 coincides with the average line AL for the waviness curve W when the first side 24 is indicated by the waviness curve W. The mountain portion 28 is formed in a range from one end portion of the first side 24 (the first end portion 26a of the chamfered portion 26) to one side of 100 mm, and only one is formed. Further, the height of the mountain portion 28 other than the processing start mark 27, that is, the height h from the base portion 28b of the mountain portion 28 to the top portion 28a is preferably more than 50 μm and not more than 1000 μm.

The waviness curve W and the thickness curve of the end surface of the glass substrate G are obtained by using the surface roughness ‧ contour shape integration measuring machine "SURFCOM" (registered trademark) manufactured by Tokyo Precision Co., Ltd., for example, using JIS B0601 2013. FIG. 9 is an example of a waviness curve W of the end surface of one end portion of the first side 24.

In this example, in the range from the one end portion of the first side 24 (the first end portion 26a of the chamfered portion 26) to the side exceeding 100 mm, the first side 24 of the region (reference length) of arbitrarily selected 100 mm is selected. The waviness curve of the end face has a maximum height value Wz of more than 60 μm and less than 1000 μm. When the maximum height value Wz of the waviness curve is 60 μm or less, the cost of the glass substrate G increases, and when it is 1000 μm or more, it is difficult to align the glass substrate G in the post-engineering. Further, as shown in FIG. 9, when the mountain portion 28 and the processing start mark 27 are indicated by the waviness curve W, the distance between the base portion 28b of the mountain portion 28 and the start end 27a of the processing start mark 27 is referred to as a distance (hereinafter referred to as "Thickness") T1 is preferably 100 μm or more and 1000 μm or less.

10 and 11 show other examples of the glass substrate G. In the glass substrate G related to this example, the shape of the processing start mark 27 is different from the examples of FIGS. 8 and 9. In the present example, the machining start mark 27 connected to the chamfered portion 26 is formed in a valley shape when indicated by the waviness curve W, and the mountain portion 28 is not formed, and the bounce of the tool B is not caused. That is, as shown in Fig. 11, the start end 27a of the processing start mark 27 is shown at a position lower than the average line AL for the waviness curve W, and the end end 27b of the process start mark 27 is associated with the average line AL. Consistent. From the beginning of processing 27 The valley depth (or thickness) T2 from the start end 27a to the end end 27b is preferably 100 μm or less.

According to the sheet glass processing apparatus 1 of the present embodiment described above, the force (pressing force) of the end surface of the plate glass A by the tool B can be applied to the arm member 3 by the servo mechanism 5. The servo mechanism 5 can monitor and adjust the pressing force of the tool B by the robot arm member 3 by its feedback control. At the start of the processing, when the tool B is brought into contact with the starting end portion A1 of the sheet glass A, it is intended to be separated from the sheet glass A by the impact. The robot arm member 3 rotatably supports the tool B, so that when the tool B is to be separated from the plate glass A, the arm member 3 also moves together with the tool B. The servo mechanism 5 detects the movement of the arm member 3 at this time as a change in the speed and torque of the swing shaft 11 of the servo motor 8 via the link mechanism 9. The servo mechanism 5 suppresses the movement (swivel) of the arm member 3 by the feedback control of the swing shaft 11, and adjusts the pressing force so that the tool B does not separate from the plate glass A. Thereby, the sheet glass processing apparatus 1 can prevent the bounce of the tool B from being added at the start of the processing. Therefore, it is possible to prevent the unprocessed portion of the sheet glass A from remaining at the start of the processing, and to process the sheet glass A at a high speed and with high precision.

Further, when the processing is completed, the tool B is separated from the end portion A2 of the sheet glass A. However, the control unit 10 of the servo motor 8 controls the robot arm so that the tool B does not overprocess the end portion A2. The position of the member 3. That is, the control unit 10 controls the position of the swing arm 11 of the servo motor 8 by feedback control, and the position of the arm member 3 can be controlled by the link mechanism 9. Therefore, the control unit 10 can The position of the robot arm member 3 is controlled, and the position of the tool B is controlled such that the tool B does not excessively process the end portion A2 of the sheet glass A.

In addition, the end surface of each side of the sheet glass A is processed by the sheet glass processing apparatus 1, and it is manufactured in the end surface to be processed, and the glass substrate G of the processing start mark 27 remains. Further, before or after the processing by the sheet glass processing apparatus 1, the glass sheet is chamfered in another process, and as a result, the glass substrate G is formed at one end of one side (for example, the first side 24) to form a chamfered portion. 26, and a processing start mark 27 connected to the chamfered portion 26. The glass substrate G of the present invention is in the range of one side exceeding 100 mm from one end portion thereof, that is, in the range not including the processing start mark 27, the end surface of the arbitrarily selected region of 100 mm is corrugated. The degree curve maximum height value Wz is set to exceed 60 μm and is less than 1000 μm.

In this way, the glass substrate G formed by the processing of the sheet glass processing apparatus is processed by the sheet glass processing apparatus 1, and the unprocessed portion is not contained, and the end surface strength is high, which is higher than the previous quality. By.

Further, the glass substrate G is in a range in which one end portion of one side thereof is 100 mm, and the mountain portion 28 is formed only by one, and the thickness between the base portion 28b of the mountain portion 28 and the start end 27a of the processing start mark 27 is formed. T1 is set to 1000 μm or less. In this manner, the glass substrate G can reduce the waviness of one end portion of the machining start mark 27 as much as possible, and improve the quality of the end portion.

Further, the processing of the sheet glass A is performed by using the sheet glass processing apparatus 1, and in the other example of the glass substrate G, the first side 24 can be used. At one end, the processing start mark 27 is formed into a valley shape. The valley depth T2 of the processing start mark 27 is set to 100 μm or less. In this manner, the glass substrate G can quickly reduce the waviness of one end portion of the machining start mark 27 remaining. Therefore, the glass substrate G formed by the processing of the sheet glass processing apparatus is such that the unprocessed portion is not contained, and the end surface strength is high, which is higher than the previous quality.

By processing the sheet glass A by the plate-type processing apparatus 1 of the constant pressure type according to the present embodiment, it is possible to prevent the damage of the sheet glass A and improve the processing speed as compared with the case where the processing is performed by the fixed type. Therefore, by increasing the yield, the manufacturing cost of the glass substrate G can be reduced as much as possible.

Furthermore, the present invention is not limited to the structure of the above embodiment, and is not limited to the above-described effects. The present invention can be variously modified without departing from the spirit and scope of the invention.

In the above-described embodiment, the vermiculite is exemplified as the adding tool B, and the tool B is subjected to grinding and polishing of the end surface of the sheet glass A. However, the present invention is not limited thereto. As long as the end face of the sheet glass A can be processed, the tool B other than the vermiculite can be applied.

In the above-described embodiment, the servo mechanism 5 includes the servo motor 8 that rotationally drives the rotary shaft 11, but the present invention is not limited thereto, and may be constituted by a linear servo motor or a ball screw mechanism.

1‧‧‧Slab glass processing equipment

2‧‧‧ drive

3‧‧‧ mechanical arm components

4‧‧‧Support shaft members

5‧‧‧Servo

6‧‧‧stops

7‧‧‧Control device

8‧‧‧Servo motor

9‧‧‧ linkage mechanism

11‧‧‧Rotary axis

15‧‧‧First link member

16‧‧‧Second link member

17‧‧‧First joint

18‧‧‧Second joint parts

A‧‧‧ plate glass

A1‧‧‧ starting end

End of A2‧‧‧

B‧‧‧Adding tools

C‧‧‧Feed direction

Claims (7)

A plate glass processing device is a plate glass processing device for adding an end surface of a plate glass by adding a tool, comprising: a mechanical arm member rotatably supporting the adding tool; and a servo mechanism for the mechanical arm member, A force is generated in which the aforementioned tool presses the end face of the plate glass. The plate glass processing apparatus according to the first aspect of the invention, further comprising: a support shaft member that rotatably supports the mechanical arm member; and the servo mechanism includes a servo motor and a rotary shaft And driving the mechanical arm member about the support shaft member; the link mechanism connecting the rotating shaft of the servo motor and the mechanical arm member; and a control portion for contacting the tool when the machining starts In the case of the plate glass, feedback control of the speed and torque of the aforementioned rotary shaft of the servo motor is performed. The plate glass processing apparatus according to the second aspect of the invention, wherein the servo mechanism further includes a feedback control of a position of the rotary shaft of the servo motor when the machining by the tool is completed. Control department. As described in any of items 1 to 3 of the patent application scope The glass processing apparatus of the present invention, wherein the adding tool is a vermiculite that polishes the end surface of the plate glass. A glass substrate comprising a glass substrate having a length of more than 200 mm from one end portion to the other end portion, wherein the one side is included in a range from the one end portion to 100 mm, and includes a chamfered portion and continuous The processing start mark of the chamfered portion; in the range of the one side exceeding 100 mm from the one end portion of the one side, the waviness curve maximum height value Wz of the one end surface of the arbitrarily selected 100 mm region exceeds 60 μm and Less than 1000μm. A glass substrate comprising a glass substrate having a length of more than 200 mm from one end portion to the other end portion, wherein the one end portion of the one side includes a chamfered portion, is continuous with the chamfered portion, and has a starting end And a processing start mark at the end, and a mountain portion which is continuous with the end point of the processing start mark and is represented by a waviness curve; the mountain portion includes a top portion which is continuous with the processing start mark, and is a mountain portion The base portion at the end is formed only in one of the ranges from the one end portion of the one side to 100 mm, and the thickness between the base portion of the mountain portion and the start end of the processing start mark is 1000 μm or less. A glass substrate comprising a glass substrate having a length of more than 200 mm from one end portion to the other end portion, wherein the one side is a range of 100 mm from the one end portion The circumference includes a chamfered portion and a processing start mark which is continuous in the chamfered portion and is formed in a valley shape in the waviness curve; and the valley depth of the processing start mark is 100 μm or less.