TW200403192A - Method of scribing on brittle material, scribe head, and scribing apparatus with the scribe head - Google Patents
Method of scribing on brittle material, scribe head, and scribing apparatus with the scribe head Download PDFInfo
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- TW200403192A TW200403192A TW092119507A TW92119507A TW200403192A TW 200403192 A TW200403192 A TW 200403192A TW 092119507 A TW092119507 A TW 092119507A TW 92119507 A TW92119507 A TW 92119507A TW 200403192 A TW200403192 A TW 200403192A
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- blade
- scribing
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- brittle material
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/027—Scoring tool holders; Driving mechanisms therefor
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
- C03B33/105—Details of cutting or scoring means, e.g. tips
- C03B33/107—Wheel design, e.g. materials, construction, shape
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
200403192 玖、發明說明： 【發明所屬之技術領域】 本發明係關於在玻璃板、半導體晶圓、陶究等脆 料之表面形成劃線之方法及劃線頭以及具備該_ 線裝置。 【先前技術】 當作電子零件材料使用之方形玻璃，係以1 板為母材，將該母材分割而獲得。此分料，首先璃 輪片在母材表面從行走開始位置往一方向壓接轉 ，將刀輪片之轉動方向改變為與上次轉動方向交：二 並同樣地形成劃線（以下，稱為交又劃線加卫）。接著，蔣 二=線Ϊ工：：材送至裂片•’在裂片機對母材施加 、i，肖由沿者形成於母材之劃線施加彎曲力矩來使 母材沿劃線分割，而獲得所需要之方形玻璃。 使用於上述劃線加工之劃線裝置，例如有圖u所示之 裝置。又’在該圖設定左右方向為X方向，與紙面正夺之 方向為Y方向，而說明如下。 S亥劃線裝置，係具備：能水平旋轉之工作台20，用以 將所載置之玻璃板9〇 u真空吸附機構固定；—對平行導200403192 (ii) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a method for forming a scribing line on a surface of a brittle material such as a glass plate, a semiconductor wafer, ceramics, etc., and a scribing head, and the device is provided. [Prior art] The square glass used as the material of electronic parts is obtained by dividing one base plate into the base material. For this material distribution, first, the glass wheel piece is crimped and turned from the starting position on the surface of the base material to change the rotation direction of the cutter wheel piece to intersect with the last rotation direction. Defend for crossing and crossing). Next, Jiang Er = line masonry :: the material is sent to the sliver • 'Apply to the parent material on the slicing machine, i, Xiao You apply bending moments along the scribe line formed by the parent material to divide the parent material along the scribe line, and Get the square glass you need. The scribing device used for the scribing process is, for example, the device shown in Fig. U. In the figure, the left-right direction is set to the X direction, and the direction opposite to the paper surface is set to the Y direction. The description is as follows. The Shai scribing device is provided with: a horizontally rotatable table 20 for fixing the placed glass plate 90 u vacuum suction mechanism;-parallel guide
L:、，用以：工作台20支撐成能沿γ方向移動；滾 '、干，用以能使工作台20沿導軌21、21移動；導桿 23,沿X方向架設於工作台2〇上方；劃線頭26，於I 23設置成能沿X方向滑動；馬達24,用以使劃線頭、26 ^ 200403192 動，刀片支持具27，於書j線 ό , . , 綠頭26下部設置成能升降動且 擺頭自如，刀輪片28，於刀η ± 4士 iA . . 、片支持具27下端安裝成能旋 轉，及一對CCD攝影機25，执罢认、兹a °又置於導桿23上方，用以辨 識知;在玻璃板9 〇上之對準找3己。 如此般構成之書彳線奘 琛凌置之劃線頭有特別的設計，藉以 防止必定存在於玻璃板9。纟面之微小凹凸及其他要因使 劃線頭行走時之劃線產生變形n® 12所示，㈣ 線頭本體26A將刀片支持具27透過與玻璃板⑽表面正交 之奴動軸29 δ又置成能繞旋動軸29之軸心擺動自如，並且 於該刀片支持具27將刀輪片28設置於比旋動軸29之轴 心位置~更往行走方向（圖12箭號s方向）之相反方向的 位置Q2，藉此，在劃線頭行走中，使刀輪片28追隨劃線 頭本體26A，以獲得刀輪片28之直進穩定性而防止劃線產 生變形。 ;、二而上述$彳線裝置’在玻璃板9 0僅有一方向形成劃 線時沒有任何問題，但若進行交叉劃線，如圖丨3所示， 則發生所謂交點跳越之現象，即，在刀輪片28交又通過 最初所形成之劃線LfL3的附近，不會形成後來應形成之 劃線L4〜Le。此種交點跳越若存在於玻璃板9〇，則欲以前 述之裂片機分割玻璃板90時，將不能依照劃線分割玻璃 板9 0，產生大量不良品，導致生產效率極低。 此種問題之原因，係在於：刀輪片交又通過既存之劃 線時，刀輪片垂直加在玻璃板9 0之劃線所必要之力量， 被潛伏於劃線兩侧之内部應力所削弱。 200403192 因此*务明申請人，為解決上述問 — 線方法及劃線頭以及具備該劃線頭 :種劃 2〇〇〇- 142969 ^)^^^t；€^_ 之劃線頭本體將刀片切具透過與脆丁 材料上 軸設置成能繞旋動轴之轴心擺動自如並 刀輪片設置於㈣動！置更往 支持具將 向的位置而構成之劃線頭，-之相反方 式形成劃線，在此情形，在…#料表面以交又之方 使其擺動範…。〜2。之範圍。圖“ 2實： 形態之劃線頭，⑷係前視圖，⑻係仰視圖。，、實- 該劃線頭’係具備：劃線頭本體30、軸承外殼31、刀 片支持具32、刀輪片33、及彈壓機構… 刀 劃線頭本體30 ’其下部作成缺口，於該缺口部35内 收納軸承外殼3卜軸承外殼3卜其一端部透過軸承”連 結於插穿劃線頭本體3〇之水 於血支千之支轴36另-端部抵接 •:、支軸千仃玫置在劃線頭本體3〇内之止動車由38，軸承 汗敍31在止動軸3δ所限制之範圍内繞支軸％之軸心旋 動0 2片支持具32 ’係於軸承外殼31内透過與脆性材料 面正又之％動軸39設置成能繞旋動軸39之軸心擺動自如 。在旋動轴39與軸承外殼31之間介裝軸承4G。又，在旋 動軸39之上方設有彈壓機構34，彈壓機構％所產生之彈 i力透過旋動軸39及刀片支持具32而施加於刀輪片Μ。 刀輪片33，設置於刀片支持具32，且位於比上述旋動 200403192 軸39之軸心位置更往劃線頭之彳千击士 a 〇 尺貝之仃走方向S之相反方向（圖 14之左方向）的位置。 在此’劃線中，刀片支持具32雖將擺動範圍控制在 〇。〜2。，但其控制機構，係利用形成於軸承外殼31下 面之槽4卜即’將刀片支持具32安裝成其上端部收納於 轴承外殼31之槽41内，當刀*姓目π 田刀片支持具32擺動至擺動範 圍之最大值時’使刀片支持# 32上端部上之四角落之角 中任-組對角42、45(43、44)抵接於㈣之兩内壁面46 、47。藉此，藉由調整槽41之兩内壁面46、47與刀片支 持具32上端部之兩側面48、49間㈣隙，能調整使刀片 支持具32之擺動範圍0在上述既定範圍。因此，若將間 隙取大則能擴大擺動範圍0，相反地若將間隙取小則能縮 小擺動範圍0。 、 【發明内容】 曼Jg所欲解決之技術問擷 本發明申請人所提出之劃線頭，藉由形成如上所說明 之構成，而能確保可維持刀輪片直進性之刀片支持具之擺 動動作，並將潛伏於交點附近之内部應力的影響降至最低 ，故進行交叉劃線時即使將施加於刀輪片之加壓力保持一 又，亦不會發生交點跳越，又不會發生在劃線開始端不能 形成劃線等事，而能達成預期目的。 然而，上述劃線頭，於刀片支持具將刀輪片設置於比 疑動軸之軸心位置更往行走方向之相反方向的位置，在割 200403192 線時以支軸側位於前面之方式行走，故與既有之劃線交又 時’或通過玻璃之起伏、彎曲或玻璃表面之凹凸時，刀輪 片被向上推，使刀片支持具繞支軸旋動而從玻璃面浮起f 圖5，係用以說明這種現象之示意圖。 即，當以支軸36為前面，在以彈壓機構34使刀輪片 3 3緊壓玻璃板9 0表面之狀態下使劃線頭行走（圖中箭號$ 方向）時，在刀輪片33之刀鋒稜線33A接觸玻璃板9〇表 面之點P，以刀輪片33對玻璃板90劃線加工時所必要之 劃線加工水平分力Μ(劃線力之水平方向分力）與劃線加工籲 垂直为力Ν(劃線力之垂直方向分力）的合力的反作用力尺 會向刀輪片33之中心側產生。但是反作用力R變成以支 軸36為中心之旋轉矩作用於刀輪片33，結果，刀輪片 被向上推，使圖外刀片支持具繞支軸36旋動而從玻璃板 9 0表面浮起。 若發生如上述刀片支持具之浮起現象，會使刀輪片33 對玻璃板90之加壓力被該反作用力削弱，結果，不易獲 得深垂直裂痕。 X _ 然而，觀察刀輪片在玻璃發生垂直裂痕之機構，得知 首先s刀鋒受到荷重時，玻璃表面之與刀鋒抵接之處 產生彈性變形，其次，隨刀鋒荷重之增加在該處產生塑性 k形。刀鋒荷重進一步增加就超過塑性變形之界限點，結 果發生脆性破壞，垂直裂痕在玻璃厚度方向開始成長。該 垂直裂痕之成長，是當裂痕之前端抵達對應刀鋒荷重之大 小及玻璃之材質或一定厚度等的深度（從脆性材料表面起 11 200403192 :之距離)時停止。就一定之材質、一定之厚度的玻璃而 吕，能控制上述垂直裂痕前端所抵達之深度（以下，稱為 垂直裂痕抵達深度）者僅有刀鋒荷重，，若增加刀鋒荷 重’則刀輪片之刀鋒咬進玻璃表面之深度變深，用以發生 垂直裂痕之能量變大’ *支垂直裂痕之抵達深度變深。然而 若刀鋒荷重超過某一定之大小，雖能獲得所謂深垂直裂 ^，但同時累積於玻璃表面附近之内部應變將成為飽和狀L :, for: the table 20 is supported to be able to move in the γ direction; roll, dry, for the table 20 to be moved along the guide rails 21, 21; the guide rod 23 is erected on the table 2 in the X direction. Above; scribing head 26 is set to slide in the X direction at I 23; motor 24 is used to move the scribing head, 26 ^ 200403192, blade support 27, at the lower part of the green head 26,. It is set to be able to move up and down and swing the head freely. The cutter wheel blade 28 is installed at the lower end of the blade η ± 4 ± iA... And the pair of CCD cameras 25 is rotatable. It is placed on the top of the guide rod 23 for identification; find the 3 on the glass plate 90. The scribe line of this structure is specially designed to prevent it from being necessarily present on the glass plate 9. The minute unevenness on the surface and other factors cause deformation of the scribing line when the scribing head travels. As shown in n® 12, the thread head body 26A passes the blade holder 27 through a slave axis 29 orthogonal to the surface of the glass plate δ. It is set to be able to swing freely around the axis of the rotation axis 29, and the cutter wheel piece 28 is set in the blade holder 27 in a direction more than the axis position of the rotation axis 29 (direction of arrow s in FIG. 12) The position Q2 in the opposite direction allows the cutter wheel piece 28 to follow the scribing head body 26A during the scribing head movement to obtain the straight-forward stability of the cutter wheel piece 28 and prevent the scribing line from being deformed. Second, the above-mentioned $ 彳 线 装置 'has no problem in forming a scribe line on the glass plate 90 in only one direction, but if cross scribe is performed, as shown in Figure 丨 3, the phenomenon of the so-called intersection jump occurs, that is, In the vicinity of the cutter wheel piece 28 passing through the scribe line LfL3 originally formed, the scribe lines L4 to Le that should be formed later will not be formed. If this kind of intersection jump exists in the glass plate 90, the glass plate 90 cannot be divided according to the scribe line when the glass plate 90 is divided by the aforementioned splitter, which results in a large number of defective products, resulting in extremely low production efficiency. The reason for this problem is that the force necessary for the cutter wheel blade to vertically add to the 90 line of the glass plate when the cutter wheel blade crosses and passes the existing scribe line is hidden by the internal stress on both sides of the scribe line. weaken. 200403192 Therefore, to make sure that the applicant, in order to solve the above-mentioned problem, the line method and the scribing head and the scribing head are equipped with: 2000- 142969 ^) ^^^ t; The blade cutting tool is set to be able to swing freely around the axis of the rotating shaft through the upper shaft of the brittle material. Set it to support the scoring head formed by the forward position,-the opposite way to form the scoring, in this case, on the ## surface to make it swing in the other way ... ~2. Range. Figure "2 Reality: Formed scribe head, front view, bottom view. ,,-The scribe head 'is equipped with: scribe head body 30, bearing housing 31, blade support 32, cutter wheel The blade 33 and the spring pressing mechanism ... The knife scribe head body 30 'is formed with a notch at the lower part, and a bearing housing 3, a bearing housing 3, and one end thereof are connected to the penetrating head body 3 through the notch 35. The water in the blood support thousand of the support shaft 36 the other-the end abutment • :, the support shaft thousand 仃 rose placed within the body of the scribe head 30, the stop car is limited by 38, bearing Khan 31 on the stop shaft 3δ Within the range of the axis of rotation around the axis of rotation, 2 pieces of support 32 'are attached to the bearing housing 31 and pass through the brittle material surface. The axis of rotation 39 is set to swing freely around the axis of the axis of rotation 39 . A bearing 4G is interposed between the rotation shaft 39 and the bearing housing 31. Further, an elastic pressing mechanism 34 is provided above the rotating shaft 39, and the elastic force generated by the elastic pressing mechanism% is applied to the cutter wheel piece M through the rotating shaft 39 and the blade holder 32. The cutter wheel blade 33 is arranged on the blade support 32 and is located in a direction opposite to the stroke direction S of the striker a 0 ft. From the axis position of the shaft 39 of the above-mentioned rotation 200403192 shaft 39 (FIG. 14 To the left). In this scribe line, although the blade holder 32 controls the swing range to 0. ~2. However, its control mechanism is to use the groove 4 formed under the bearing housing 31 to install the blade support 32 so that its upper end is received in the groove 41 of the bearing housing 31. When 32 swings to the maximum of the swing range, the blade support # 32 of the four corner corners on the upper end of any-group diagonals 42, 45 (43, 44) abuts the inner wall surfaces 46, 47 of the two. Thereby, by adjusting the gap between the two inner wall surfaces 46 and 47 of the groove 41 and the two side surfaces 48 and 49 of the upper end portion of the blade holder 32, the swing range 0 of the blade holder 32 can be adjusted to the above-mentioned predetermined range. Therefore, if the gap is made larger, the swing range 0 can be enlarged, and if the gap is made smaller, the swing range 0 can be reduced. [Contents of the invention] The technical problem that Man Jg wants to solve is the scoring head proposed by the applicant of the present invention. By forming the structure as described above, the blade holder that can maintain the straightness of the blade wheel can be ensured to swing. Action and minimize the effect of internal stresses lurking near the intersection point, so even if the applied pressure applied to the cutter wheel blade is kept for the same time when crossing the line, the intersection point skip will not occur, and it will not occur in The beginning of the scribe line cannot form a scribe line, etc., and can achieve the intended purpose. However, the above-mentioned scribing head sets the cutter wheel blade in a position opposite to the running direction from the position of the axis of the suspect shaft in the blade support, and walks with the support shaft side in front when cutting the line 200403192, Therefore, when intersecting with the existing scribe line, or when the glass is undulating, curved, or uneven on the surface of the glass, the cutter wheel blade is pushed upward, so that the blade holder rotates around the support shaft to float from the glass surface.f Figure 5 Is a schematic diagram to explain this phenomenon. That is, when the support shaft 36 is used as the front and the cutter wheel piece 33 is pressed against the surface of the glass plate 90 by the elastic mechanism 34, the scribing head is moved (in the direction of the arrow $ in the figure). The blade edge line 33A of 33 contacts the point P on the surface of the glass plate 90, and the horizontal component force M (horizontal component force of the scribe force) and the scribe are necessary for the scribe processing of the glass plate 90 by the blade 33. The wire processing requires that the reaction force scale perpendicular to the resultant force of the force N (the vertical component of the scribing force) is generated toward the center side of the cutter wheel piece 33. However, the reaction force R becomes a rotating moment centered on the support shaft 36 and acts on the cutter wheel piece 33. As a result, the cutter wheel piece is pushed upward, causing the blade support in the figure to rotate around the support shaft 36 and float from the surface of the glass plate 90. Up. If the floating phenomenon of the blade holder occurs as described above, the pressing force of the blade wheel piece 33 on the glass plate 90 is weakened by the reaction force, and as a result, it is difficult to obtain deep vertical cracks. X _ However, observing the mechanism of vertical cracks on the blade of the cutter wheel, it is learned that when the blade edge is subjected to a load, the glass surface is elastically deformed in contact with the blade edge, and secondly, as the blade blade load increases, plasticity occurs there. k shape. When the blade load is further increased, it exceeds the limit of plastic deformation. As a result, brittle failure occurs, and vertical cracks begin to grow in the thickness direction of the glass. The growth of the vertical crack is stopped when the front end of the crack reaches the depth corresponding to the blade load and the glass material or a certain thickness (a distance from the surface of the brittle material 11 200403192 :). For a certain material and a certain thickness of glass, those who can control the depth reached by the front end of the vertical crack (hereinafter referred to as the vertical crack reach depth) have only the blade load. If the blade load is increased, then the blade The depth of the blade biting into the glass surface becomes deeper, and the energy used to generate vertical cracks becomes larger. * The depth of arrival of the vertical cracks becomes deeper. However, if the blade load exceeds a certain size, although the so-called deep vertical crack can be obtained, the internal strain accumulated at the same time near the glass surface will become saturated.
態，而發生水平裂痕，即，與垂直裂痕之成長方向完全不 相同之方向的裂痕。此種水平裂痕係大量產生欲避免之切 屑之原因。 本發明者等，更詳細探究上述機構得知，刀鋒荷重與 垂直裂痕之抵達深度有如圖6所示之關係。即，從圖6之 曲線圖得知，垂直裂痕之抵達深度，係先存在隨刀鋒荷重 之增加緩慢加深之領域（4領域），接著存在隨刀鋒荷重之 增加急劇增加之領域（Β領域），進一步存在即使隨刀鋒荷 重增加亦幾乎不增加之領域（c領域）。並且，在此c領域 ’有A領域或B領域未出現之水平裂痕大幅增加。 _ 從以上事實發現，以相當於B領域（抵達深度p隨刀鋒 荷重之增加而急劇增加之領域）之刀鋒荷重來劃線，能獲 得深垂直裂痕，而不發生水平裂痕。 然而，B領域之刀鋒荷重範圍非常小，如前述，以習 知技術不能避免刀片支持具浮起現象之發生，而使刀輪片 之加壓力被該反作用力R削弱，故在範圍非常小之上述B 領域内調整刀鋒荷重極為困難。 12 200403192 又，在丄、 第2割綠夕線’如前述為要防止交點跳越之發生’ 妗加，⑯形成時須使刀鋒荷重比第1劃線之形成時大幅 曰 刀鋒荷重往往進入上述C領域，而無法避免大旦 切屑發生。 里 再者，古：^ β ，另一問題，使用上述習知刀輪片之劃 玻璃之起伏或蠻沾 、 飞弓曲、玻璃表面之凹凸，又，保持刀輪片之 片支持具或保持該刀片支持具之劃線頭的搖晃等外來要 口 、、工吊導致無法獲得穩定之劃線。 本發明等，根據前述之現象、問題，認真研究之 發現丄若將劃線頭之行走方向改為與習知者相反之方:， Ρ白头係以支軸位於前面之方式使劃線頭行走，若改成 X支軸位於後面之方式使劃線頭行走，則能防止刀片支持 =之斤起現象’結果，能對刀輪片確實施加刀鋒荷重，而 此將刀鋒何重控制在適合前述β領域之範圍。即，如圖5 :斤不右以支車由9位於後面之方式使劃線頭向箭號τ方向 二走’在刀輪片5之刀鋒稜線5Α接觸玻璃板9〇表面的點 Ρ向刀輪片5中心側產生行走方向之劃線加丄水平分力^ 與玻璃板90厚度方向之劃線加工垂直分力w兩者所產生 之合力之反作用力X，反作用力χ係向支轴9之力量，故 不會如前述使刀輪片從玻璃板90表面浮起。結果，不會 削：上述任何緊壓力W，能確實對刀輪片5施加刀鋒荷； ’實質上能將刀鋒荷重控制力β領域之範圍。因此，本發 明，係藉由劃線頭之逆向行走，與習知技術相比更容易^ 刀鋒荷重控制於Β領域之範圍。 、 13 200403192 本發明之目的在於提供一種劃線方法及劃線頭以 線聲Γ置 、1如 ㈣ 、’、"’以在進行交叉劃線時，不發生交點跳越，防止刀 1支持具之浮起現象，使向刀輪片之加壓力有效率地作用 方、脆丨生材料，能獲得比習知技術更深之垂直裂痕。 技術手段 為要達成上述目的，本發明之脆性材料之劃線方法， 其特徵在於··在行走於脆性材料上之劃線頭本體，將刀片 支持具透過與脆性材料面平行之支轴設置成能繞支轴 心並且在刀片支持具設有劃線刀而構 性=㈣：其支轴位於劃線刀之後侧之方式行走於脆 材枓上，以在脆性材料面形成劃線。 在此構成，亦可在劃線中使劃線刀從脆性材料承受之 反作用力之方向，維持在反仙力之起 連結線上或比連結線更靠脆性材料之狀態下^4轴、的 又，亦可使該劃線刀為刀輪片，並且將、 :性材料面平行之旋轉軸設置成能繞旋轉軸之軸心旋^自 並且將鑽石 在此情形，亦可將該刀片 交之旋動軸設置成能繞旋動軸 佳者為將该旋轉轴’設置於比 位置。 亦可使該劃線刀為鑽石刀 支持具。 支持具，透過與脆性材料正 之軸心擺動自如。再者，較 旋動軸之軸心更靠支軸側之 刀固接於刀片 又，本發明之劃線頭，其 特徵在於： 在行走於脆性材 200403192 脆性材料面平行 並且在刀片支持 料上之劃線頭本體，將刀片支持具透過與 之支轴设置成能繞支轴之轴心擺動自如， 具設有劃線刀而構成。 亦可位於劃線中劃線刀從 的線上或位於比該線更上 在此構成，該支軸之軸心， 脆性材料承受之反作用力之向量 方之位置。 又，亦可使該劃線刀為刀輪片，甘 饷月，並且將刀輪片透過盥 脆性材料面平行之旋轉軸設置， ^ 又夏战月b繞方疋轉軸之軸心旋轉自 如0 在此情形，亦可將該刀片支持具，透過與脆性材料正 交之旋動軸設置成能繞旋動軸之軸心擺動自如。再者，較 佳者為使該旋轉軸位於比旋動軸之軸心更靠支軸側之位： 亦可使該劃線刀為鑽石刀，並且將鑽石刀固接於刀片 支持具。 本發明之劃線裝置，其特徵在於：具備上述之割線頭 ’便劃線頭以其支軸位於劃線刀之後側之方式行走於脆性 材料上，以在脆性材料面形成劃線。 在4劃線裝置，該劃線刀可為刀輪片，亦可為鑽石刀 本發明之劃線方法及劃線頭以及劃線裝置， 構成能發揮如下作用。 ’ 一例如，在使用刀輪片作為劃線刀之構成中，如圖5所 不，使劃線頭以支軸9位於後側之方式行走（圖中箭號τHorizontal cracks, that is, cracks in a direction completely different from the growth direction of vertical cracks. Such horizontal cracks are the cause of a large number of chips to be avoided. The present inventors investigated the above-mentioned mechanism in more detail and found that the relationship between the blade load and the depth of the vertical crack has a relationship as shown in FIG. 6. That is, from the graph in FIG. 6, it is known that the depth of the vertical crack reaches the first area (4 area) that gradually deepens as the blade load increases, and then the area (B area) that sharply increases as the blade load increases. There is further an area (field c) that hardly increases even as the blade load increases. And, in this area c, there is a large increase in horizontal cracks that do not appear in area A or B. _ From the above facts, it is found that the scribe line with the blade load equivalent to the area B (the area where the reaching depth p increases sharply with the increase of the blade load) can obtain deep vertical cracks without horizontal cracks. However, the load range of the blade edge in the B area is very small. As mentioned above, the conventional technology cannot avoid the occurrence of floating of the blade support, and the pressure of the blade wheel is weakened by the reaction force R, so the range is very small. It is extremely difficult to adjust the blade load in the B area. 12 200403192 In addition, at the second and second cuts of the green evening line, as described above, to prevent the occurrence of the intersection jump, increase. When the blade is formed, the blade load must be significantly larger than the blade load when the first line is formed. C area, and the occurrence of large denier chips cannot be avoided. Here again, ancient: ^ β, another problem is the use of the above-mentioned conventional knife wheel blades to swell or stain the glass, fly bow, unevenness on the glass surface, and, The blade supporting tool has a swaying head, such as shaking, and other external points, and industrial hanging can not obtain a stable scoring. According to the present invention, according to the foregoing phenomena and problems, a serious study has found that if the walking direction of the scribing head is changed to the opposite of the conventional one, the white head is to make the scribing head walk with the support shaft in front If the X-axis is located at the back to make the scribing head move, the blade support can be prevented. As a result, the blade load can be applied to the cutter wheel blade, and the weight of the blade is controlled to suit the foregoing. The scope of the beta field. That is, as shown in Fig. 5: Jin Bu right, with the carriage from 9 behind, make the scribing head go in the direction of the arrow τ 'at the point P of the blade edge 5A of the blade wheel 5 contacting the surface of the glass plate 90. The center side of the wheel 5 generates a reaction line X in the walking direction plus a horizontal component force ^ and a vertical component w in the thickness processing of the glass plate 90 in the thickness direction. The reaction force X is a reaction force χ to the support axis 9 Strength, it will not cause the cutter wheel piece to float from the surface of the glass plate 90 as described above. As a result, there is no cutting: any of the above-mentioned tight pressures W can surely apply the blade edge load to the blade wheel blade 5; Therefore, in the present invention, it is easier to control the blade load within the range of the B area by using the reverse direction of the scribing head compared with the conventional technique. , 13 200403192 The purpose of the present invention is to provide a scribing method and a scribing head set with a line sound Γ, 1 such as 、, ', "' so as to prevent crossover skipping during cross scribing and prevent the support of knife 1. With the floating phenomenon, the pressing force applied to the cutter wheel blade can effectively apply the square and brittle raw materials to obtain deeper vertical cracks than the conventional technology. Technical means In order to achieve the above-mentioned object, the scribing method of the brittle material of the present invention is characterized in that: on the scribing head body walking on the brittle material, the blade support is arranged through a support shaft parallel to the surface of the brittle material to It can be structured around the axis of the support axis and provided with a scriber blade on the blade support structure: ㈣: The support shaft is located on the brittle material 之 so that the support axis is located behind the scriber blade to form a scribe line on the brittle material surface. In this structure, the scribing blade can also be maintained in the state of the connection line or more brittle material than the connection line from the direction of the reaction force of the brittle material in the scribe line. It is also possible to make the scribing blade a cutter wheel, and set the rotation axis parallel to the material surface so that it can rotate around the axis of the rotation axis and place the diamond in this case. You can also turn the blade The rotation axis is set to be able to rotate around the rotation axis. The rotation axis is set at a specific position. The scribing knife can also be used as a diamond knife holder. The support can swing freely through the positive axis of the brittle material. Furthermore, the blade on the side of the supporting shaft is more firmly connected to the blade than the axis of the rotating shaft. The scribing head of the present invention is characterized in that it walks on the brittle material 200403192 and the brittle material surface is parallel and on the blade support material. The scoring head body is provided with a scoring blade by arranging the blade holder through the supporting shaft so that it can swing freely about the axis of the supporting shaft. It can also be located on the line where the scoring knife is from or above the line. Here, the axis of the fulcrum is the position of the vector of the reaction force of the brittle material. In addition, the scribing blade can also be made into a cutter wheel blade, and the cutter wheel blade can be set through a rotation axis parallel to the surface of the brittle material. ^ Xia Zhanyueb can rotate freely about the axis of the square axis. In this case, the blade holder can also be set to swing freely around the axis of the rotation axis through a rotation axis orthogonal to the brittle material. Furthermore, it is better to position the rotary shaft closer to the supporting shaft side than the axis of the rotary shaft: the scribing knife can also be a diamond knife, and the diamond knife can be fixed to the blade holder. The scribing device of the present invention is characterized in that the scribing head is provided with the above-mentioned scoring head, and the scribing head travels on a brittle material so that its supporting shaft is located behind the scribing blade to form a scribing line on the brittle material surface. In the 4 scribing device, the scribing knife can be a cutter wheel blade or a diamond knife. The scribing method, scribing head, and scribing device of the present invention have the following functions. ’For example, in the configuration using a cutter wheel as a scribing blade, as shown in FIG. 5, the scribing head is moved with the support shaft 9 on the rear side (arrow τ in the figure).
15 200403192 方向）藉此’在刀輪片5之刀鋒稜線5A接觸玻璃板90 表面的點 E，雜奋政， 雖曰發生行走方向之劃線加工水平分力V與 :璃板90厚度方向之劃線加工垂直分力W兩者所產生之 合力之反作用力X，但該反作用力X係向支軸9之力量， 而不殳成作用於刀輪片5之旋轉矩。藉此不發生如前述之 刀片支持具之浮起j見象，使向刀輪# 5之加壓力不因反作 用力X而減少。 曰 f使用鑽石刀作為劃線刀之構成亦能作相同之說15 200403192 direction) By this, the point E at the blade edge 5A of the cutter wheel blade 5 is in contact with the surface of the glass plate 90. However, although the horizontal component force V of the scribe process in the walking direction occurs, The reaction force X resulting from the combined force generated by the two vertical component forces W in the scribing process, but the reaction force X is a force toward the fulcrum 9 and does not create a rotating moment acting on the cutter wheel blade 5. As a result, the floating phenomenon of the blade holder as described above does not occur, so that the pressure applied to the cutter wheel # 5 is not reduced by the reaction force X. The same can be said for f using a diamond knife as a scribing knife
月具體而s ’如圖j 〇所示，使劃線頭以支軸9位於後 側之方式行走（圖中箭號T方向），藉此，在鑽石刀74之 刀鋒稜線74A接觸玻璃板90表面的點p，雖會產生行走方 向之劃線加卫水平分力v與玻璃板9g厚度方向之劃線加 工垂直分力W兩者所產生之合力之反作用力X，但是該反 作用力X係向支轴9之力量，而不變成作用於鐵石刀W 2轉矩。藉此不發生如前述之刀片支持具之浮起現象， 鑽石刀74之加壓力不因反作用力χ而減少。 田m〈稱成，m 5或鑽；5刀74之加壓力將有 :率地作用於玻璃板90(脆性材料），而能獲得比習知技術 更深之垂直裂痕。 在/\若將該刀片支持具透過與黯㈣面正交之旋 置成能繞旋動軸之轴心擺動自如，則能提高刀片支 符具對劃線頭行走方向之追隨性。 :者，若將該旋轉軸設於比旋動轴之轴心更靠支軸側 置，則能進-步提高刀片支持具對劃線頭行走方向之 16 追隨性。 “月之劃線方法及劃線頭以及劃線裝置，劃線 片從脆性材料承受之反作用力之方向，只要維持在 二M ΘS點與支轴之軸心的連結線上或從該連結線 办近跪性材料之狀態下即可更確 【實施方式】 *以下，參閱圖式說明本發明之實施形態。λ，本發明 J'良方法因在劃線頭實施，故在此對劃線頭之實施形 態說明中亦會對劃線方法之實施形態作說明。 圖1，絲示本發明之劃線頭之實施形態’U)係前視 圖，（b)係仰視圖。 hJ線頭1，係具備劃線頭本體2、軸承外殼3、刀片支 持具4、刀輪片5、及彈壓機構6。 sj線頭本體2 ’其下部被做出缺口，於該缺口部8内 收A轴承外殼3。轴承外殼3，其一端部透過軸承丨〇連結 ^ "劃線頭本體2之水平之支軸9，另一端部則抵接 、支轴平行设置在劃線頭本體2内之止動軸丨丨，以在止 動軸11所限制之範圍内繞支軸9之軸心旋動。 77 #支持具4 ’於軸承外殼3透過與脆性材料面正交 之方疋動轴7設置成能繞旋動軸7之軸心擺動自如。在旋動 轴7與轴承外殼3之間介裝軸承12。又在旋動軸7之上方 。又置彈屢機構6 ’彈壓機構6之彈壓力透過旋動軸7及刀 片支持具4施加於刀輪片5。 200403192 之軸二rj持具4，未必如上述般設置成能繞旋動軸7 擺動自如，亦可固定於劃線頭本體2 省略抽承外殼3及抽承12等擺動所需要之構件即可咖， 旋轉置：刀片支持具4透過與脆性材料面平行之 疋轉軸13权置成能繞該旋轉軸13之轴心旋轉自如，並且 ’旋轉軸13設於比該旋動轴7 之位置。 1置更罪支軸9側 係 方 又，刀輪片5與旋動軸7之位置關係不限於上述之關 刀輪片5之旋轉軸！ 3亦可位於旋動軸7之軸心正下Specifically, as shown in FIG. J, the scribing head is driven with the supporting shaft 9 at the rear side (direction T in the figure), thereby touching the edge 74A of the edge of the diamond knife 74 to the glass plate 90. The point p on the surface generates a reaction force X resulting from the combined force generated by the horizontal line force v in the walking direction and the vertical component force W in the line thickness processing of the glass plate 9g. However, the reaction force X is The force toward the fulcrum 9 does not become a torque acting on the stone blade W 2. As a result, the floating phenomenon of the blade holder as described above does not occur, and the applied pressure of the diamond blade 74 is not reduced by the reaction force χ. Tian m <weighing, m 5 or drill; the pressure of 5 knives 74 will have a direct effect on the glass plate 90 (brittle material), and can obtain deeper vertical cracks than the conventional technology. In / \ If the blade support is able to swing freely about the axis of the rotation axis through a rotation orthogonal to the dark surface, the followability of the blade support to the direction of the scribing head can be improved. In other words, if the rotation axis is set closer to the support axis side than the axis of the rotation axis, the followability of the blade support to the scribing head running direction can be further improved. "The scribe method of the moon, the scribe head and the scribe device, the direction of the reaction force of the scribe piece from the brittle material, as long as it is maintained on the connection line between the two M ΘS points and the axis of the fulcrum. It can be confirmed in the state of near-knee material. [Embodiment] * Hereinafter, the embodiment of the present invention will be described with reference to the drawings. Λ, the J 'good method of the present invention is implemented in the scribing head, so the scribing head is here The embodiment of the scribing method will also be described in the description of the embodiment. Fig. 1 shows the embodiment of the scribing head of the present invention 'U) is a front view, and (b) is a bottom view. It is provided with a scribing head body 2, a bearing housing 3, a blade support 4, a cutter wheel blade 5, and an elastic mechanism 6. The sj thread head body 2 is notched at the lower part, and an A bearing housing is received in the notch 8 3. Bearing housing 3, one end of which is connected to the horizontal support shaft 9 of the scribe head body 2 through the bearing, and the other end is abutted, and the support shaft is arranged in parallel with the stop in the scribe head body 2. The shaft 丨 丨 rotates around the axis of the support shaft 9 within the range restricted by the stop shaft 11. 77 # 支A bearing shaft 3 is provided on the bearing housing 3 through a square orthogonal to the plane of the brittle material so that the rotating shaft 7 can swing freely about the axis of the rotating shaft 7. A bearing 12 is interposed between the rotating shaft 7 and the bearing housing 3. It is also above the rotating shaft 7. The elastic pressure of the spring mechanism 6 is placed on the blade wheel 5 through the rotating shaft 7 and the blade holder 4. The shaft 2 rj holder 4 of 200403192 is not necessarily as It can be set to swing around the rotation axis 7 as described above, or it can be fixed to the scribing head body 2. Omit the components required for swinging such as the drawing housing 3 and drawing 12 and so on. Rotate the blade support 4 through and The rotating shaft 13 parallel to the fragile material plane is disposed so as to be able to rotate freely about the axis of the rotating shaft 13, and the 'rotating shaft 13 is provided at a position more than the rotating shaft 7. The side of the supporting shaft 9 is squared. The positional relationship between the cutter wheel blade 5 and the rotation shaft 7 is not limited to the above-mentioned rotation axis of the cutter wheel blade 5! 3 can also be located directly below the axis of the rotation shaft 7
右要以上述之劃線頭1進行劃線，則使劃線頭1以支 轴9位於刀輪片5之後側之方式行走於脆性材料上。即， 使劃線頭1沿目1之箭號T所示之方向行走。使劃線頭以 支軸9位於刀輪片5之後側行走，藉以如_ $所示，在刀 輪片5之刀鋒稜線5A接觸玻璃板之表面的點e，雖會 產生:走方向之劃線加工水平分力v與玻璃板9〇厚度方 向之=·線加工垂直I力w兩者所產生之合力之反作用力X β反作用力χ係向支軸9之力量，不會變成使刀輪 片5從破璃板9〇表面浮起的旋轉矩。藉此，不發生如前 述之刀片支持具浮起現象，向刀輪片5之加壓力不因反作 用力Χ而減少。結果，能使向刀輪片5之加壓力有效率地 作用於脆性材料’獲得比習知技術更深之垂直裂痕。 在此’如圖5所示，劃線中刀輪片5從玻璃板90承受 之反作用力χ的方向，若能維持在該反作用力X與支軸9 18 軸心之連結線H ^ Λ. t ^ ^ , ，或在比該連結線li更靠近玻璃板90 狀恶即可（圖中，灸 確實消除Mm rH)，藉此能更 貫„轉矩之產生。適當調整劃線速度、向刀輪片 1 77輪片5與支軸9之相對位置關係即可維持 這樣的狀態。On the right, the scribing head 1 is used for scribing, so that the scribing head 1 runs on the brittle material so that the support shaft 9 is located behind the cutter wheel blade 5. That is, the scribing head 1 is caused to travel in a direction indicated by an arrow T of the head 1. Make the scribing head travel with the supporting shaft 9 behind the cutter wheel blade 5, so as shown by _ $, the point e where the blade edge line 5A of the cutter wheel blade 5 contacts the surface of the glass plate, although it will produce: The horizontal component force v of the wire processing and the thickness direction of the glass plate 90. The reaction force of the combined force generated by the vertical processing force I and the wire force X β reaction force χ is the force to the fulcrum 9 and will not become the cutter wheel. The rotation moment of the sheet 5 floating from the surface of the broken glass plate 90. This prevents the blade support from floating as described above, and the pressure applied to the cutter wheel blade 5 is not reduced by the counterforce X. As a result, it is possible to efficiently apply the pressing force to the cutter wheel blade 5 to the brittle material 'to obtain a deeper vertical crack than the conventional technique. Here 'as shown in Figure 5, the direction of the reaction force χ that the cutter wheel piece 5 receives from the glass plate 90 in the scribe line, if it can be maintained at the reaction line H ^ Λ of the axis of the reaction center X and the support axis 9 ^ Λ. t ^ ^,, or 90-shaped evils closer to the glass plate than the connecting line li (in the picture, moxibustion does eliminate Mm rH), so that the torque can be more consistently generated. Adjust the line speed and direction appropriately. The relative positional relationship between the blade wheel 1 77, the wheel blade 5 and the support shaft 9 can maintain such a state.
At ’、人參閱圖2及圖3說明本發明劃線裝置之實施形 態0 ^ S 2係具備劃線頭5 0之劃線裝置的側視圖，圖3， 係劃線頭50之主要部的前視圖。 劃線頭50,係在一對側壁51間以倒立狀態保持，在 側壁51之下部，透過支軸54將側視呈L字狀支持具用保 持具53设置成能旋動自如。在該支持具用保持具53之前 方（圖3之右方）安裝有將刀輪片$支擇成能旋轉之刀片支 持具4。 刀片支持具4，係透過設於其上端之旋動軸7及供該 旋動軸7插穿之軸承12安裝於支持具用保持具53，並能 現旋動轴7之軸心旋動。 刀輪片5，係與實施形態1之情形相同，於刀片支持 具4透過與脆性材料面平行之旋轉軸13設置成能繞旋轉 軸13之軸心旋轉自如，並且旋轉軸13係位於比旋動轴7 之軸心位置更靠支軸54側之位置。 在伺服馬達52之旋轉軸與支軸54，將斜齒輪55安裝 成彼此喃合。藉此，藉由祠服馬達5 2之正反旋轉，支持 具用保持具53則以支軸54為中心旋轉，使刀輪片5上下 200403192 水平Γ二本身，係設置成能沿劃線襄£ 100之之 :::向的導軌58移動。又’動力傳達機構不限定於斜 之；i 11如圖5所不，劃線中刀輪片5從玻璃板90承受 乍用力X的方向，若能維持在該反作用力χ與支轴9 H上，或纽該連結線H更#玻璃板90之 I P圖5中，參閱虛線箭號χι、^、Vi)，藉此能更 =貫消除該旋轉矩之產生。藉由適當調整劃線速度、向刀 輪片5之加壓力、刀於η 可維持這樣的狀態。轴4之相對位置關係即 播在本貫施形態，雖使用斜齒輪55作為動力傳達機 構來傳達供給支持制保持具53之動力，但如圖4所示 姓亦可將伺服馬達52之旋轉軸56直接連結於支持具用保 持具5 3。 以上之實施形態中，雖已說明使用刀輪片作為劃線刀 =劃線頭及使用該劃線頭之劃線裝置，但劃線刀不限於該 刀輪片，亦可使用鐵石刀作為其他例。以下，說明使两該 鑽石刀之劃線頭。 圖7,係表示使用於圖i所示之劃線裝置之劃線頭的 其他實施形態，（a)係前視圖，（b)係仰視圖。 -在本貫加A匕、，因僅有劃線刀之構成與上述實施形態 不同，而其他構成相同，故對同樣之構成省略說明。 劃線頭70，雖與上述實施形態同樣地在旋動軸7之上 方設置彈壓制6，但彈壓機構6所產生之彈壓力係透過 20 旋動軸7及刀片支持且 之鑽石刀74。 〃 2施加於與錢石保持構件73接合 又’刀片支持具72，去、 7之軸心擺動自如，亦 ，、上述叙°x置成能繞旋動軸 亦可固定於劃線頭本體 ，省略軸承外殼3及軸承 在此情形 鑽石77 74 ^ 2 4擺動所需要之構件即可。 ，係設於圓柱狀鑽石保 持構件73之-端部形成凹部 4牛2在鑽石保 成使該鑽石保持構件持具72，形 杜73孫以山 鈿0^欠入之孔，鑽石保持構 件係以敗入該孔之狀態軟焊而接合。如此，接合有饈 石刀7 4之鑽石俾柱媒^ 鑽 保持構件73，係設置於比旋動轴 位置更於靠支軸54側之位置。 之轴、 鑽石刀74,具體上能應用圖8或圖9所示之構成。 圖8,係表示適用於圖7所示之劃線頭之實施形態的 鑽石刀之例’（a)係前視圖，（b)係側視圖，（c)係劃線狀 態之說明圖。 一、 钱鑽石刀74,如圖8之（a)所示，由4個劈開面74八、 74B、74C、74D、及被該等 4 個劈開面 74A、74b、74c、 741)包圍之正方形端面74a形成。該鑽石刀74之切割點 741、742、743、744為端面74a之角部。又，如圖8之 (b)所示’例如劈開面具有收斂於9〇度之角度0 a的邊 551、552。劃線時，例如圖8之（c)所示，各劈開面具有 收斂於110度之角度0a之邊的鑽石刀，藉由將角度ea 之中心線CC與玻璃板90所成的角度0b設在57〜58度， 21 200403192 即可以切割點742來劃線。 鑽石刀除如上述之構成外，亦能使用圖9所示之構成 〇 圖9係適用於圖7所不之劃線頭之實施形態的鑽石 刀其他例，⑷係前視圖，⑻係從圖⑷之箭號χ方向所 視的側視圖，（c)係從圖⑷之箭號¥方向所視的側視圖。 *該鑽石刀84,如圖9之（a)所示，係貝殼狀之所謂貝 喊型鑽石刀’由2個傾斜面84a、84b形成刀鋒稜線8标。 :石刀84,如圖9之(c)所示，劈開面84a係具有收斂於 又之角度的邊，刀鋒稜線84s從圖9之（3)之箭號γ 方向所視具有圓弧形狀。 以上述之劃線頭70進行劃線時，使劃線頭7〇以支軸 、寸鑽石刀74位於後側之方式行走於脆性材料上。即， =丨線頭7。沿圖7箭號了所示之方向行走。使劃線頭7〇 轴9相對鑽石刀74位於後側之方式行走，藉以如圖 r ^不^在鑽石刀74之切割點74卜742、743、744或刀 蜂钹線84S接觸玻璃板90表面之點p，雖會產生行走方向 =線加工水平分力V與玻璃板9〇厚度方向之劃線加： 用力刀力w兩者所產生之合力之反作用力χ，但是該反作 板9Π Γ向支轴9之力量，不會變成使鐵石刀74從玻璃 持 ^浮起的旋轉矩。藉此，不發生如前述之刀片支 力，起之現象，而使鑽石刀74之刀鋒荷重不因反作用 X而減少。結果’能使鑽石刀74之刀鋒荷重有效率地 用於脆性材料，獲得比習知技術更深之垂直裂痕。 22 200403192 在此’如圖1 0所示，畲丨丨綠 ^線中鑽石刀74從玻璃板90承 受之反作用力X的方向，若台士各 右犯維持在該反作用力X之起點 P與支車由9轴心之連結線l H上，或在比該連結線Η更靠玻 璃板90之狀態即可（圖i 〇 — 多閱虛線前號X2、W2、V2) ’藉此能更確實消除該旋轉矩 疋得矩之產生。適當調整劃線速度 、向鑽石刀74之加壓力、錘Χτ77< 鑽石刀7 4與支軸9之相對位置 關係即可維持這樣的狀態。At ', the person refers to FIG. 2 and FIG. 3 to explain the embodiment of the scribing device of the present invention. 0 ^ S 2 is a side view of a scribing device having a scribing head 50, and FIG. 3 is a main part of the scribing head 50. front view. The scribing head 50 is held in an inverted state between a pair of side walls 51. Below the side wall 51, a side view L-shaped holder 53 is provided through a support shaft 54 so as to be rotatable. A blade holder 4 for selecting the cutter wheel blade $ to be rotatable is mounted in front of the holder 53 (right side in Fig. 3). The blade support 4 is mounted on a holder 53 for a support through a rotation shaft 7 provided at an upper end thereof and a bearing 12 through which the rotation shaft 7 is inserted, and the axis of the rotation shaft 7 can be rotated. The blade wheel blade 5 is the same as that in the first embodiment. The blade holder 4 is provided through the rotation axis 13 parallel to the brittle material surface so as to be able to rotate freely about the axis of the rotation axis 13 and the rotation axis 13 is located in the specific rotation. The axial center position of the movable shaft 7 is closer to the support shaft 54 side. A helical gear 55 is mounted on the rotating shaft and the supporting shaft 54 of the servo motor 52 so as to be coupled to each other. With this, by the front and back rotation of the temple clothing motor 52, the holder 53 for the support is rotated around the support shaft 54 to make the blade wheel 5 up and down 200403192 horizontally. It is set to be able to move along the line. Between £ 100 ::: moves to guide rail 58. Also, the power transmission mechanism is not limited to oblique; i 11 is shown in Fig. 5. In the scribe line, the cutter wheel blade 5 receives the direction of the first force X from the glass plate 90. If the reaction force χ and the support shaft 9 H can be maintained On the other hand, the connection line H is more #IP of the glass plate 90 in FIG. 5, referring to the dotted arrows χι, ^, Vi), so that the generation of the rotation moment can be eliminated more consistently. Such a state can be maintained by appropriately adjusting the scribing speed and applying pressure to the cutter wheel blade 5 at η. The relative positional relationship of the shaft 4 is broadcast in this embodiment. Although the helical gear 55 is used as the power transmission mechanism to transmit the power to the support holder 53, as shown in FIG. 4, the rotary shaft of the servo motor 52 can also be used. 56 is directly connected to the support holder 5 3. In the above embodiment, although it has been described that the cutter wheel blade is used as a scribing blade = scribing head and a scribing device using the scribing head, the scribing blade is not limited to the cutter wheel blade, and a stone knife can also be used as other example. In the following, the scribing heads of the two diamond knives will be described. Fig. 7 shows another embodiment of the scribing head used in the scribing device shown in Fig. I, (a) is a front view, and (b) is a bottom view. -The structure of the A-knife is different from that of the above-mentioned embodiment, and the other structures are the same. Therefore, the description of the same structure is omitted. Although the scribing head 70 is provided with a spring pressing 6 above the rotary shaft 7 in the same manner as the above-mentioned embodiment, the elastic pressure generated by the spring pressing mechanism 6 is transmitted through the rotary shaft 7 and the diamond knife 74 supported by the blade. 〃 2 is applied to the blade holder 72 which is in contact with the stone holding member 73, and the axis of the blade 7 can swing freely. Also, the above-mentioned x can be fixed to the scribe head body around the rotation axis. Omitting the bearing housing 3 and the bearings in this case, the diamond 77 74 ^ 2 4 is required to swing the components. It is provided at the-end of the cylindrical diamond holding member 73-a recess 4 is formed. The diamond holding member 72 holds the diamond holding member 72 in the shape of a diamond, and the hole is owed by the sun. The diamond holding member is defeated. The state of entering the hole is soldered and joined. In this way, the diamond holding device 73 to which the stone knife 74 is joined is provided at a position closer to the support shaft 54 side than the rotation shaft position. Specifically, the shaft and the diamond knife 74 can be configured as shown in FIG. 8 or FIG. 9. Fig. 8 shows an example of a diamond knife applied to the embodiment of the scribing head shown in Fig. 7 (a) is a front view, (b) is a side view, and (c) is an explanatory view of a scribing state. 1. As shown in Fig. 8 (a), the money diamond knife 74 is a square surrounded by four split surfaces 74, 74B, 74C, 74D, and a square surrounded by these four split surfaces 74A, 74b, 74c, 741). The end surface 74a is formed. The cutting points 741, 742, 743, and 744 of the diamond knife 74 are corners of the end face 74a. As shown in (b) of Fig. 8 ', for example, the cleaved surface has edges 551 and 552 which converge to an angle 0 a of 90 °. When scribing, for example, as shown in FIG. 8 (c), each split surface has a diamond knife which converges to an angle of 0a at 110 degrees. The angle 0b formed by the center line CC of the angle ea and the glass plate 90 is set. At 57 ~ 58 degrees, 21 200403192 can cut the point 742 to scribe. In addition to the structure of the diamond knife, the structure shown in FIG. 9 can also be used. FIG. 9 is another example of the diamond knife suitable for the embodiment of the scribing head shown in FIG. (C) is a side view seen from the direction of arrow ¥ of the figure χ. * As shown in FIG. 9 (a), the diamond knife 84 is a so-called shell-shaped diamond knife which is shell-shaped. The two inclined surfaces 84a and 84b form the edge 8 of the blade. : Stone knife 84. As shown in FIG. 9 (c), the cleaved surface 84a has edges that converge at another angle, and the blade edge line 84s has an arc shape as viewed from the direction of the arrow γ in FIG. 9 (3). When scribing with the scribing head 70 described above, the scribing head 70 is allowed to run on the brittle material with the support shaft and the inch diamond knife 74 on the rear side. That is, = 丨 thread head 7. Walk in the direction indicated by the arrow in Figure 7. Move the scribing head 70 axis 9 to the rear side of the diamond knife 74, so as to make contact with the glass plate 90 at the cutting point 74, 742, 743, 744 or the bee line 84S of the diamond knife 74 as shown in FIG. The point p on the surface will produce a line of horizontal direction of the line processing component force V and the thickness of the glass plate 90, plus a reaction force χ of the combined force generated by the force of the knife force w, but the reaction plate 9Π The force of the Γ-direction support shaft 9 does not become a rotational moment that causes the stone knife 74 to float from the glass holder. Thereby, the phenomenon of the blade supporting force as mentioned above does not occur, and the blade load of the diamond knife 74 is not reduced by the reaction X. As a result, the edge load of the diamond knife 74 can be efficiently applied to brittle materials, and deeper vertical cracks can be obtained than the conventional technique. 22 200403192 Here, as shown in Fig. 10, in the direction of the reaction force X that the diamond knife 74 receives from the glass plate 90 in the green line, if each of the right offenders maintains the starting point P and The trolley can be placed on the connecting line lH of the 9-axis center, or in a state where it is closer to the glass plate 90 than the connecting line Η (Figure i 〇—read the dotted lines before the numbers X2, W2, and V2). It does eliminate the generation of the moment of rotation. Such a state can be maintained by appropriately adjusting the scribing speed, the pressure applied to the diamond knife 74, and the relative positional relationship between the hammer Xτ77 and the diamond knife 74 and the support shaft 9.
又’在此雖已說明具備劃線頭i及劃線頭5〇之劃線裝 置’但具備使用鑽石刀之劃線帛70纟代替劃線帛1之劃 線裝置亦含在本實施形態中。其構成係除劃線頭外均與本 實施形態相同，且已就劃線帛70作說明，故省略詳細說 明。又，依照具備劃線頭70之裝置構成而產生的力學作 用’係適用基於圖1 〇之說明。 其次，分別實施本發明之劃線方法與習知劃線方法， 並測定形成於玻璃之垂直裂痕的深度。 實施例 ’係使用圖4所示之劃線頭6 〇，以Also, "a scribing device having a scribing head i and a scribing head 50 has been described here", but a scribing device including a scribing line using a diamond knife (70) instead of the scribing line (1) is also included in this embodiment. . The structure is the same as that of the present embodiment except for the scribing head, and the scribing line 70 has been described, so detailed explanation is omitted. In addition, the mechanical action according to the configuration of the device having the scribing head 70 is applied based on the description of FIG. 10. Next, the scribing method and the conventional scribing method of the present invention are implemented separately, and the depth of the vertical crack formed in the glass is measured. Example ′ uses a scribe head 60 as shown in FIG. 4 to
本發明之劃線方法 下列之條件進行劃線。 刀輪片之輪徑 刀輪片之輪厚 刀輪片之刀鋒角度 劃線速度 刀鋒荷重 玻璃板之材質 2. 5mm 0.65mm 125。 300mm/sec 1.lkgf 鹼玻璃（soda-glass) 23 u. Ymin 圖 之箭號T方向 破璃板之厚度 劃線頭之行走方向 比較例 為了作比較，劃線頭之行走方向係按照習知技術，即 =之箭號S方向，其他則以與上述本發明實施例相同之 反進订。不過，使刀片支持具4之方向與上述實施例相 ’而使刀輪Μ 5之旋轉軸13在行走時位於旋 之 後側。 測定結果 X上述各方法劃線後，就各方法測定垂直裂痕之深度 後’獲得下列結果。 貫加例 4 5 0 /z m〜5 〇 〇 # m 比較例 11〇 # m〜120 # m k以上結果得知，依據本實施例之劃線方法及劃線頭 ，以相同之刀鋒荷重即可獲得高達約比較例之4倍以上深 度之垂直裂痕。 又，上述說明中，主要是針對在本身為脆性材料之一 種的玻璃板形成劃線之情形作說明，但不限於此，例如在 液晶顯示面板、電漿顯示面板（PDp)、有機EL顯示器等將 脆性材料貼合而成之平面板顯示器（FPD)，或透過型投影 機之基板、反射型投影機之基板等母貼合基板，形成劃線 之步驟’均能應用本發明之劃線方法及劃線頭。 產業上之利用可能忖 本發明之劃線方法及劃線頭以及劃線裝置，能獲得比 24 200403192 習知技術更深之劃線形成用的垂直裂痕，尤其適合於將交 叉之d線形成在脆性材料基板上之場合，在交叉劃線後之 分割步驟，能沿著劃線容易分割脆性材料基板。又，能消 除不良品之發生，使生產效率比習知技術更高。 又，本發明之劃線之形成技術，不僅能應用於玻璃板 ，亦能應用於液晶顯示面板、pDp、FpD、透過型投影機基 板、反射型投影機基板等母貼合基板等。 【圖式簡單說明】 0 (一）圖式部分 圖1，係表示本發明之劃線頭之實施形態，（a)係前視 圖，（b)係仰視圖。 圖2，係表示本發明之劃線頭之其他實施形態的側視 圖3，係圖2所示之劃線頭主要部的前視圖。 圖4，係表示劃線頭之其他實施形態的前視圖。The scribing method of the present invention is performed under the following conditions. Wheel diameter of blade wheel Thickness of blade wheel Blade angle of blade wheel Scribing speed Blade load Material of glass plate 2. 5mm 0.65mm 125. 300mm / sec 1.lkgf soda-glass 23 u. Ymin The thickness of the arrow in the direction of T. The thickness of the broken glass plate. The running direction of the scribing head Comparative example For comparison, the running direction of the scribing head is according to the conventional The technology, that is, the direction of the arrow S of =, and the others are reverse-ordered in the same way as the embodiment of the present invention described above. However, the direction of the blade holder 4 is the same as that of the above-mentioned embodiment, so that the rotation axis 13 of the cutter wheel M5 is located on the rear side of the rotation when traveling. Measurement results X After the above-mentioned methods were scored, the following results were obtained after measuring the depth of the vertical cracks by each method '. Consecutive example 4 50 / zm ~ 5 〇〇 # m Comparative example 11〇 # m ~ 120 # mk The above results show that according to the scribe method and scribe head of this example, the same blade edge load can be obtained Vertical cracks up to about 4 times the depth of the comparative example. The above description mainly describes the case where a scribe line is formed on a glass plate that is a brittle material, but is not limited to this. For example, a liquid crystal display panel, a plasma display panel (PDp), an organic EL display, etc. The step of forming a scribing method, such as a flat panel display (FPD) formed by bonding fragile materials, or a mother lamination substrate such as a substrate of a transmissive projector and a substrate of a reflective projector, can be applied to the scribing method of the present invention. And crossed heads. Industrial use may be based on the scribing method, scribing head, and scribing device of the present invention, which can obtain a vertical crack for deeper scribing than the conventional technique of 24 200403192, and is particularly suitable for forming the crossed d-line in brittleness. In the case of a material substrate, a fragile material substrate can be easily divided along the scribe line in a dividing step after the cross scribe line. In addition, it can eliminate the occurrence of defective products and make the production efficiency higher than the conventional technology. In addition, the scribing formation technology of the present invention can be applied not only to glass plates, but also to mother-bonded substrates such as liquid crystal display panels, pDp, FpD, transmissive projector substrates, and reflective projector substrates. [Brief description of the drawings] 0 (I) Schematic part Fig. 1 shows an embodiment of the scribing head of the present invention, (a) is a front view, and (b) is a bottom view. Fig. 2 is a side view showing another embodiment of the scribing head of the present invention. Fig. 3 is a front view of the main part of the scribing head shown in Fig. 2. Fig. 4 is a front view showing another embodiment of the scribing head.
圖5，係用以說明產生於刀輪片之旋轉矩的示意圖。 圖6，係表示習知劃線方法之刀鋒荷重與垂直裂痕、、果 度之關係的曲線圖。 月1J視圖， 圖7，係表示劃線頭之其他實施形態，（a)係、 (b)係仰視圖。 所示之劃線頭 • (b)係側視圖 之實施形態的 ，（c)係劃線 圖8，係表示適用於圖7 鑽石刀之一例，（a )係前視圖 狀態之說明圖。 25 200403192 圖9，係適用於圖7所 刀之其他例，（a)係前視圖， 向透視的側視圖，（c)係從圖 圖。 示之劃線頭之實施形態的鑽石 (b)係從該圖（a)之箭號X方 (a)之箭號γ方向所視的側視 圖i U，係用以說明使 石刀之旋轉矩的示意圖 圖11，係表示習知劃線襄置的概略前視圖。 圖12，係表示習知劃線頭的前視_。FIG. 5 is a schematic diagram for explaining the rotation moment generated by the cutter wheel blade. Fig. 6 is a graph showing the relationship between the blade load and the vertical crack and the degree of fruit in the conventional scribing method. View 1J, FIG. 7 shows another embodiment of the scribing head, (a) and (b) are bottom views. The scribing head shown (b) is a side view of the embodiment, (c) is a scribing line. FIG. 8 shows an example of a diamond knife applicable to FIG. 7, and (a) is an explanatory view of a front view state. 25 200403192 Fig. 9 is another example of the knife applicable to Fig. 7, (a) is a front view, a side view in perspective, and (c) is a drawing. The diamond (b) of the embodiment of the scribing head shown in the figure is a side view i U viewed from the direction of the arrow X in the figure (a) and the arrow γ in the figure (a), which is used to explain the turning moment of the stone knife. FIG. 11 is a schematic front view showing a conventional scribing arrangement. FIG. 12 is a front view of a conventional scribing head.
圖13’係交點跳越現象的說明圖。 圖14，係表示習知則後 圖。 」線碩，⑷係前視圖，係仰 (二）元件代表符號 1，26, 50, 70 2, 26A，30 3, 31 4, 6, 27, 32 5, 28, 33 5A，33A，84s 6, 34 7, 29 8, 35 9, 36, 54, 56 10, 12, 37, 40 11，38 劃線頭 劃綠頭本體 軸承外殼 77片支持具 刀輪片 刀鋒稜線 彈壓機構 旋動軸 Ad# 支軸 軸承 止動軸Fig. 13 'is an explanatory diagram of the jumping phenomenon of the intersection. FIG. 14 is a diagram showing the conventional rules. "Xuanshuo, the front view of the line, the top (two) elements represent symbols 1,26, 50, 70 2, 26A, 30 3, 31 4, 6, 27, 32 5, 28, 33 5A, 33A, 84s 6 , 34 7, 29 8, 35 9, 36, 54, 56 10, 12, 37, 40 11, 38 38 scribe head, green head body bearing housing, 77 pieces with blade wheel blade edge ridge spring pressing mechanism rotation axis Ad # Pivot bearing stop shaft
26 200403192 13, 39 旋轉軸 20 工作台 21，58 導軌 22 螺桿 23 導桿 24, 52 馬達 41 槽 46, 47 内壁面 51 側壁 53 支持具用保持具 55 斜齒輪 73 鑽石保持機構 74, 84 鑽石刀 74A,74B, 74C,74D,84A 劈開面 84a,84b 傾斜面 90 玻璃板 i 00 lil» vrrv 劃琛装罝 741,742, 743,744 切割點 Μ, N, V, W 分力 R, X 反作用力 S, T 行走方向 2726 200403192 13, 39 Rotary shaft 20 Table 21, 58 Guide 22 Screw 23 Guide 24, 52 Motor 41 Slot 46, 47 Inner wall 51 Side wall 53 Holder for support 55 Helical gear 73 Diamond holding mechanism 74, 84 Diamond knife 74A, 74B, 74C, 74D, 84A Split surface 84a, 84b Inclined surface 90 Glass plate i 00 lil »vrrv Welding device 741,742, 743,744 Cutting point M, N, V, W Component force R, X Reaction force S, T Walking direction 27
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002209823 | 2002-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200403192A true TW200403192A (en) | 2004-03-01 |
| TWI296612B TWI296612B (en) | 2008-05-11 |
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ID=30767701
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092119507A TW200403192A (en) | 2002-07-18 | 2003-07-17 | Method of scribing on brittle material, scribe head, and scribing apparatus with the scribe head |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP4205664B2 (en) |
| KR (1) | KR100647456B1 (en) |
| CN (1) | CN1668431B (en) |
| AU (1) | AU2003281461A1 (en) |
| TW (1) | TW200403192A (en) |
| WO (1) | WO2004009311A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI380959B (en) * | 2005-05-27 | 2013-01-01 | Schott Ag | Method of mechanically breaking a scribed workpiece of brittle fracturing material |
| TWI562264B (en) * | 2012-12-19 | 2016-12-11 | Genesis Photonics Inc | Splitting apparatus and splitting method |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102701580B (en) * | 2005-12-01 | 2014-10-08 | 三星钻石工业股份有限公司 | Method for replacing tip holder of Scribe device |
| US8051681B2 (en) * | 2007-05-09 | 2011-11-08 | Corning Incorporated | Constant force scoring device and method for using same |
| KR101200390B1 (en) * | 2007-06-06 | 2012-11-12 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Tip holder for hand cutter, and hand cutter having the tip holder |
| JP5450964B2 (en) * | 2008-02-29 | 2014-03-26 | 三星ダイヤモンド工業株式会社 | Scribing apparatus and scribing method |
| KR100941080B1 (en) * | 2008-04-30 | 2010-02-10 | 세메스 주식회사 | Scribing apparatus and method, and apparatus for cutting substrate using the same |
| TWI498293B (en) * | 2011-05-31 | 2015-09-01 | Mitsuboshi Diamond Ind Co Ltd | Scribe method, diamond point and scribe apparatus |
| JP6519381B2 (en) * | 2015-07-27 | 2019-05-29 | 三星ダイヤモンド工業株式会社 | Method of forming vertical cracks in brittle material substrate and method of dividing brittle material substrate |
| CN107775825A (en) * | 2016-08-30 | 2018-03-09 | 三星钻石工业股份有限公司 | Diamond cutter and its scribble method |
| JP2018051945A (en) * | 2016-09-29 | 2018-04-05 | 三星ダイヤモンド工業株式会社 | Diamond tool and its scribing method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0857846A (en) * | 1994-08-19 | 1996-03-05 | Hitachi Ltd | Diamond-point scribing device |
| JP4191304B2 (en) * | 1999-03-03 | 2008-12-03 | 三星ダイヤモンド工業株式会社 | Chip holder |
| JP4249373B2 (en) * | 2000-05-16 | 2009-04-02 | 三星ダイヤモンド工業株式会社 | Method for cross-scribing brittle materials |
| JP4118804B2 (en) * | 2001-07-18 | 2008-07-16 | 三星ダイヤモンド工業株式会社 | Scribing head, scribing apparatus using the scribing head, and scribing method for brittle material substrate |
-
2003
- 2003-07-17 KR KR1020047020721A patent/KR100647456B1/en not_active IP Right Cessation
- 2003-07-17 JP JP2004522756A patent/JP4205664B2/en not_active Expired - Fee Related
- 2003-07-17 CN CN038169444A patent/CN1668431B/en not_active Expired - Fee Related
- 2003-07-17 WO PCT/JP2003/009127 patent/WO2004009311A1/en active Application Filing
- 2003-07-17 AU AU2003281461A patent/AU2003281461A1/en not_active Abandoned
- 2003-07-17 TW TW092119507A patent/TW200403192A/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI380959B (en) * | 2005-05-27 | 2013-01-01 | Schott Ag | Method of mechanically breaking a scribed workpiece of brittle fracturing material |
| TWI562264B (en) * | 2012-12-19 | 2016-12-11 | Genesis Photonics Inc | Splitting apparatus and splitting method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI296612B (en) | 2008-05-11 |
| AU2003281461A1 (en) | 2004-02-09 |
| KR20050013220A (en) | 2005-02-03 |
| CN1668431B (en) | 2010-06-09 |
| KR100647456B1 (en) | 2006-11-23 |
| CN1668431A (en) | 2005-09-14 |
| WO2004009311A1 (en) | 2004-01-29 |
| JPWO2004009311A1 (en) | 2005-11-17 |
| JP4205664B2 (en) | 2009-01-07 |
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