TWI577250B - Printed circuit board and method of manufacturing the same, and module - Google Patents

Printed circuit board and method of manufacturing the same, and module Download PDF

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Publication number
TWI577250B
TWI577250B TW104134708A TW104134708A TWI577250B TW I577250 B TWI577250 B TW I577250B TW 104134708 A TW104134708 A TW 104134708A TW 104134708 A TW104134708 A TW 104134708A TW I577250 B TWI577250 B TW I577250B
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Taiwan
Prior art keywords
heat transfer
layer
transfer structure
printed circuit
circuit board
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TW104134708A
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Chinese (zh)
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TW201625085A (en
Inventor
金多禧
鄭丞洹
韓基鎬
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三星電機股份有限公司
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Publication of TW201625085A publication Critical patent/TW201625085A/en
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Publication of TWI577250B publication Critical patent/TWI577250B/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/14Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)

Description

印刷電路板及其製造方法與模組 Printed circuit board and manufacturing method and module thereof

以下描述係關於印刷電路板、製造印刷電路板的方法、及模組。 The following description relates to printed circuit boards, methods of making printed circuit boards, and modules.

近來,電子元件變得越來越小和更實用。因此,對於高度整合的薄型產品有成長的需求,在該等薄型產品中藉由在印刷電路板中施加更精細的圖案並實施積層通孔結構來最大化散熱性。例如,美國專利公開第2011/0069448號描述用於整合電子元件的技術之實例。 Recently, electronic components have become smaller and more practical. Therefore, there is a growing demand for highly integrated thin products in which heat dissipation is maximized by applying finer patterns in the printed circuit board and implementing a laminated via structure. For example, U.S. Patent Publication No. 2011/0069448 describes an example of a technique for integrating electronic components.

提供本摘要以介紹形式簡化的選擇概念,並將在以下實施方式中進一步描述之。本摘要並無意圖標識所要求保護的標的物之關鍵特徵或必要特徵,也無意圖被用於輔助決定所要求保護的標的物之範圍。 This summary is provided to introduce a simplified selection of concepts and is further described in the following embodiments. The Abstract is not intended to identify key features or essential features of the claimed subject matter, and is not intended to be used to assist in determining the scope of the claimed subject matter.

在一個一般的態樣中,一種印刷電路板包括複數個絕緣層、分別被形成在該複數個絕緣層上的金屬層、被形成用於該等金屬層之層間電連接的通孔、穿透該等絕緣層的溝槽、以及被形成在該溝槽中的熱傳結構。 In a general aspect, a printed circuit board includes a plurality of insulating layers, metal layers respectively formed on the plurality of insulating layers, via holes formed for interlayer electrical connection of the metal layers, and penetration The trenches of the insulating layers and the heat transfer structures formed in the trenches.

在另一個一般的態樣中,一種模組包括:印刷電路板,包含複數個絕緣層、分別被形成在該複數個絕緣層上的金屬層、被形成用於該等金屬層之層間電連接的通孔、穿透該等絕緣層的溝槽、及被形成在該溝槽中的熱傳結構;以及被安裝在該印刷電路板上的元件。 In another general aspect, a module includes: a printed circuit board including a plurality of insulating layers, metal layers respectively formed on the plurality of insulating layers, and interlayer electrical connections formed for the metal layers Through holes, trenches penetrating the insulating layers, and heat transfer structures formed in the trenches; and components mounted on the printed circuit board.

在另一個一般的態樣中,一種模組包括:印刷電路板,包括複數個絕緣層、分別被形成在該複數個絕緣層上的金屬層、被形成用於該等金屬層之層間電連接的通孔、穿透該等絕緣層的溝槽、及被形成在該溝槽中的熱傳結構;被安裝在該印刷電路板上的元件;以及主機板,上面安裝有該元件的該印刷電路板被安裝在該主機板上。 In another general aspect, a module includes: a printed circuit board including a plurality of insulating layers, metal layers respectively formed on the plurality of insulating layers, and interlayer electrical connections formed for the metal layers a through hole, a groove penetrating the insulating layers, and a heat transfer structure formed in the groove; an element mounted on the printed circuit board; and a motherboard on which the printing is mounted The board is mounted on the motherboard.

在另一個一般的態樣中,一種製造印刷電路板的方法涉及獲得絕緣層;在該絕緣層中形成通孔和溝槽;在該溝槽中形成熱傳結構;以及在該絕緣層上形成金屬層。 In another general aspect, a method of fabricating a printed circuit board involves obtaining an insulating layer; forming vias and trenches in the insulating layer; forming a heat transfer structure in the trench; and forming on the insulating layer Metal layer.

從以下的實施方式、圖式、及申請專利範圍,其他的特徵和態樣將是顯而易見的。 Other features and aspects will be apparent from the following description, drawings, and claims.

100‧‧‧印刷電路板 100‧‧‧Printed circuit board

100A‧‧‧載體構件 100A‧‧‧ Carrier components

101‧‧‧芯層 101‧‧‧ core layer

102‧‧‧第一金屬層 102‧‧‧First metal layer

111‧‧‧絕緣層 111‧‧‧Insulation

112‧‧‧第二金屬層 112‧‧‧Second metal layer

113‧‧‧通孔 113‧‧‧through hole

114‧‧‧溝槽 114‧‧‧ trench

115‧‧‧種晶層 115‧‧‧ seed layer

116‧‧‧抗電鍍圖案 116‧‧‧Anti-plating pattern

117‧‧‧電鍍層 117‧‧‧Electroplating

121‧‧‧第一金屬層 121‧‧‧First metal layer

122‧‧‧第二金屬層 122‧‧‧Second metal layer

125‧‧‧熱傳結構 125‧‧‧heat transfer structure

127‧‧‧通孔 127‧‧‧through hole

200‧‧‧印刷電路板 200‧‧‧Printed circuit board

200A‧‧‧載體構件 200A‧‧‧ Carrier components

201‧‧‧芯層 201‧‧‧ core layer

202‧‧‧第一金屬層 202‧‧‧First metal layer

203‧‧‧分離層 203‧‧‧Separation layer

211‧‧‧絕緣層 211‧‧‧Insulation

212‧‧‧第二金屬層 212‧‧‧Second metal layer

213‧‧‧通孔 213‧‧‧through hole

214‧‧‧開口 214‧‧‧ openings

216a‧‧‧第一抗電鍍圖案 216a‧‧‧first anti-plating pattern

216b‧‧‧第二抗電鍍圖案 216b‧‧‧second anti-plating pattern

217‧‧‧通孔-金屬層 217‧‧‧through hole-metal layer

218‧‧‧溝槽 218‧‧‧ trench

219‧‧‧外金屬層 219‧‧‧ outer metal layer

220‧‧‧芯 220‧‧ ‧ core

220a‧‧‧芯 220a‧‧ core

221‧‧‧第一金屬層 221‧‧‧First metal layer

222‧‧‧第二金屬層 222‧‧‧Second metal layer

223‧‧‧外層 223‧‧‧ outer layer

225‧‧‧熱傳結構 225‧‧‧heat transfer structure

227‧‧‧通孔 227‧‧‧through hole

300‧‧‧印刷電路板 300‧‧‧Printed circuit board

300A‧‧‧載體構件 300A‧‧‧ Carrier components

301‧‧‧芯層 301‧‧ ‧ core layer

302‧‧‧第一金屬層 302‧‧‧First metal layer

303‧‧‧分離層 303‧‧‧Separation layer

311‧‧‧絕緣層 311‧‧‧Insulation

312‧‧‧第二金屬層 312‧‧‧Second metal layer

313‧‧‧通孔 313‧‧‧through hole

316a‧‧‧第一抗電鍍圖案 316a‧‧‧First anti-plating pattern

316b‧‧‧第二抗電鍍圖案 316b‧‧‧second anti-plating pattern

317‧‧‧通孔-金屬層 317‧‧‧through hole-metal layer

318‧‧‧溝槽 318‧‧‧ trench

319‧‧‧外金屬層 319‧‧‧ outer metal layer

320‧‧‧芯 320‧‧ ‧ core

320a‧‧‧芯 320a‧‧ core

321‧‧‧第一金屬層 321‧‧‧First metal layer

322‧‧‧第二金屬層 322‧‧‧Second metal layer

323‧‧‧外層 323‧‧‧ outer layer

325‧‧‧熱傳結構 325‧‧‧heat transfer structure

327‧‧‧通孔 327‧‧‧through hole

400‧‧‧印刷電路板 400‧‧‧Printed circuit board

411‧‧‧絕緣層 411‧‧‧Insulation

418‧‧‧溝槽 418‧‧‧ trench

420‧‧‧芯 420‧‧ core

421‧‧‧金屬層 421‧‧‧metal layer

422‧‧‧金屬層 422‧‧‧metal layer

423‧‧‧外層 423‧‧‧ outer layer

425‧‧‧熱傳結構 425‧‧‧heat transfer structure

427‧‧‧通孔 427‧‧‧through hole

500‧‧‧模組 500‧‧‧ modules

511‧‧‧絕緣層 511‧‧‧Insulation

518‧‧‧溝槽 518‧‧‧ trench

520‧‧‧芯 520‧‧ core

521‧‧‧第一金屬層 521‧‧‧First metal layer

522‧‧‧第二金屬層 522‧‧‧Second metal layer

523‧‧‧外層 523‧‧‧ outer layer

525‧‧‧熱傳結構 525‧‧‧heat transfer structure

527‧‧‧通孔 527‧‧‧through hole

531‧‧‧焊料凸塊 531‧‧‧ solder bumps

550‧‧‧元件 550‧‧‧ components

600‧‧‧模組 600‧‧‧ modules

611‧‧‧絕緣層 611‧‧‧Insulation

618‧‧‧溝槽 618‧‧‧ trench

620‧‧‧芯 620‧‧ core

621‧‧‧金屬層 621‧‧‧metal layer

622‧‧‧金屬層 622‧‧‧metal layer

623‧‧‧外層 623‧‧‧ outer layer

625‧‧‧熱傳結構 625‧‧‧heat transfer structure

627‧‧‧通孔 627‧‧‧through hole

630‧‧‧阻焊層 630‧‧‧solder layer

650‧‧‧元件 650‧‧‧ components

651‧‧‧導線 651‧‧‧ wire

731‧‧‧焊料凸塊 731‧‧‧ solder bumps

732‧‧‧外部連接端子 732‧‧‧External connection terminal

733‧‧‧外部連接端子 733‧‧‧External connection terminal

750‧‧‧元件 750‧‧‧ components

770‧‧‧主機板 770‧‧‧ motherboard

第1圖為圖示印刷電路板之實例的剖視圖。 Fig. 1 is a cross-sectional view showing an example of a printed circuit board.

第2圖為圖示印刷電路板之另一個實例的剖視圖。 Fig. 2 is a cross-sectional view showing another example of a printed circuit board.

第3圖為圖示印刷電路板之另一個實例的剖視圖。 Fig. 3 is a cross-sectional view showing another example of a printed circuit board.

第4圖為圖示印刷電路板之另一個實例的剖視圖。 Fig. 4 is a cross-sectional view showing another example of a printed circuit board.

第5圖為圖示印刷電路板之另一個實例的俯視圖。 Fig. 5 is a plan view showing another example of a printed circuit board.

第6圖為圖示製造印刷電路板的方法之實例的流程圖。 Fig. 6 is a flow chart illustrating an example of a method of manufacturing a printed circuit board.

第7圖至第15圖藉由圖示印刷電路板在製造製程期間的剖視圖來圖示製造印刷電路板的方法之實例中使用的製程。 7 through 15 illustrate a process used in an example of a method of manufacturing a printed circuit board by illustrating a cross-sectional view of a printed circuit board during a manufacturing process.

第16圖為圖示製造印刷電路板的方法之另一個實例的流程圖。 Figure 16 is a flow chart illustrating another example of a method of manufacturing a printed circuit board.

第17圖至第30圖藉由圖示印刷電路板在製造製程期間的剖視圖來圖示製造印刷電路板的方法之另一個實例中使用的製程。 17 through 30 illustrate a process used in another example of a method of manufacturing a printed circuit board by illustrating a cross-sectional view of the printed circuit board during the manufacturing process.

第31圖為圖示製造印刷電路板的方法之另一個實例的流程圖。 Figure 31 is a flow chart illustrating another example of a method of manufacturing a printed circuit board.

第32圖至第41圖藉由圖示印刷電路板在製造製程期間的剖視圖來圖示製造印刷電路板的方法之另一個實例中使用的製程。 32 through 41 illustrate a process used in another example of a method of manufacturing a printed circuit board by illustrating a cross-sectional view of the printed circuit board during the manufacturing process.

第42圖為圖示模組之實例的剖視圖。 Figure 42 is a cross-sectional view showing an example of a module.

第43圖為圖示模組之另一個實例的剖視圖。 Figure 43 is a cross-sectional view showing another example of the module.

第44圖為圖示模組之另一個實例的剖視圖。 Figure 44 is a cross-sectional view showing another example of the module.

貫穿圖式和實施方式,相同的元件符號是指相同的元件。圖式可能沒有按照比例,而且為了清楚、 說明及方便,可以誇大圖式中元件的相對尺寸、比例、及描繪。 Throughout the drawings and the embodiments, the same component symbols refer to the same components. The schema may not be proportionate, and for clarity, For illustration and convenience, the relative dimensions, proportions, and depictions of the elements in the drawings may be exaggerated.

提供以下實施方式來幫助讀者得到對本文描述的方法、設備、及/或系統的全面理解。然而,本文描述的方法、設備、及/或系統之各種變化、修改、及均等物對於所屬技術領域中具有通常知識者而言將是顯而易見的。本文描述的操作順序只是舉例,並不限於本文闡述的那些,但如所屬技術領域中具有通常知識者而言將顯而易見的也可以變更,除了必須以特定順序發生的操作之外。同樣地,為了更加清楚和簡明,也可以省略所屬技術領域中具有通常知識者眾所周知的功能和建構描述。 The following embodiments are provided to assist the reader in a comprehensive understanding of the methods, devices, and/or systems described herein. Various changes, modifications, and equivalents of the methods, devices, and/or systems described herein will be apparent to those of ordinary skill in the art. The order of the operations described herein is by way of example only, and is not limited to the ones set forth herein, but as will be apparent to those of ordinary skill in the art, in addition to the operations that must occur in a particular order. Also, functions and construction descriptions well known to those of ordinary skill in the art may be omitted for clarity and conciseness.

本文描述的特徵可被以不同的形式體現,而且不應被解讀為限於本文描述的實例。相反地,本文描述的實例已被提供,使得本揭示將是完全和完整的,而且將傳達本揭示的全部範圍給所屬技術領域中具有通常知識者。 Features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein are provided so that this disclosure will be thorough and complete, and the full scope of the disclosure will be disclosed to those of ordinary skill in the art.

除非另有定義,否則本文中使用的所有用語,包括技術用語和科學用語,都具有與本揭示所屬技術領域中具有通常知識者通常理解的相同的含義。任何在一般字典中有定義的用語應在相關領域的上下文中被解讀為具有相同的含義,而且除非另有明確的定義,否則不應被解釋為具有理想主義或過度形式主義的意義。 Unless otherwise defined, all terms used herein, including technical terms and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Any term defined in a general dictionary should be interpreted as having the same meaning in the context of the relevant field and should not be interpreted as having idealistic or over-formalism unless explicitly defined otherwise.

不管圖號為何,相同或相應元件將被賦予相同的元件符號,而且將不再重複相同或相應元件的任何多餘描述。貫穿本揭示的描述,當描述某些相關傳統技術被判斷為規避本揭示的重點時,則相關的詳細描述將被省略。諸如「第一」和「第二」的用語可被用來描述各種元件,但上述元件不應限於上述用語。上述用語只被用來區別一個元件與另一個元件。在附圖中,一些元件可被誇大、省略或簡要地圖示出,而且元件的尺寸未必反映這些元件的實際尺寸。 Regardless of the figure number, the same or corresponding elements will be given the same element symbols, and any redundant description of the same or corresponding elements will not be repeated. Throughout the description of the present disclosure, when it is described that some related conventional techniques are judged to circumvent the focus of the present disclosure, the related detailed description will be omitted. Terms such as "first" and "second" may be used to describe various elements, but the above elements are not limited to the above terms. The above terms are only used to distinguish one element from another. In the figures, some of the elements may be exaggerated, omitted or briefly illustrated, and the dimensions of the elements do not necessarily reflect the actual dimensions of these elements.

在下面的揭示中,用語「十字形」是指三維形狀的各種伸長形式。 In the following disclosure, the term "cross" refers to various elongated forms of a three-dimensional shape.

以下,將參照附圖詳細描述本揭示的某些實施例。 Hereinafter, some embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.

印刷電路板 A printed circuit board

第1圖為圖示印刷電路板100之實例的剖視圖。 FIG. 1 is a cross-sectional view illustrating an example of a printed circuit board 100.

參照第1圖,印刷電路板100包括形成在絕緣層111之任一表面上的第一金屬層121和第二金屬層122、通孔及形成在溝槽114中的熱傳結構125。 Referring to FIG. 1, the printed circuit board 100 includes a first metal layer 121 and a second metal layer 122 formed on either surface of the insulating layer 111, via holes, and a heat transfer structure 125 formed in the trenches 114.

絕緣層111可以由任何用作一般印刷電路板的絕緣材料的樹脂製成,例如熱固性樹脂、熱塑性樹脂、及/或感光樹脂、或具有抗撓件的任何樹脂,該抗撓件例如其中充滿的玻璃纖維或無機填充劑。例如,絕緣層111 可以由預浸材、味之素組成薄膜(ABF)或諸如阻燃劑4(FR-4)的樹脂及雙馬來亞醯胺三嗪(BT)製成。 The insulating layer 111 may be made of any resin used as an insulating material of a general printed circuit board, such as a thermosetting resin, a thermoplastic resin, and/or a photosensitive resin, or any resin having a flexure member, for example, which is filled therein. Glass fiber or inorganic filler. For example, the insulating layer 111 It may be made of a prepreg, a compound of aphrodisiac (ABF) or a resin such as flame retardant 4 (FR-4) and bismaleimide triazine (BT).

金屬層121、122各由用於電路的一般金屬製成,例如鋁或銅。 The metal layers 121, 122 are each made of a common metal for the circuit, such as aluminum or copper.

通孔127和熱傳結構125各由種晶層(例如無電鍍層)以及至少一個電解電鍍層構成,並由金屬(例如銅或鋁)製成。 The via 127 and the heat transfer structure 125 are each composed of a seed layer (for example, an electroless plating layer) and at least one electrolytic plating layer, and are made of a metal such as copper or aluminum.

通孔127是被形成用於電路圖案的層間電連接的一般訊號器。 The via 127 is a general type of signal that is formed for interlayer electrical connection of circuit patterns.

熱傳結構125被形成在十字形溝槽114中,並藉由穿透絕緣層111來形成,以具有比通孔127更大的體積。 The heat transfer structure 125 is formed in the cross-shaped groove 114 and formed by penetrating the insulating layer 111 to have a larger volume than the through hole 127.

十字形的溝槽不限於直線形的平面或多面體。例如,十字形可以指各種類型的三維形狀,包括具有一個或更多個彎曲線的平面形狀。 The cross-shaped groove is not limited to a linear plane or a polyhedron. For example, a cross may refer to various types of three-dimensional shapes, including planar shapes having one or more curved lines.

藉由具有該十字形,熱傳結構125可以被形成為具有大的體積,同時避免集中的電路圖案和通孔靠近熱傳結構125,而且可以被輕易地設計在各個位置。 By having the cross shape, the heat transfer structure 125 can be formed to have a large volume while avoiding concentrated circuit patterns and through holes close to the heat transfer structure 125, and can be easily designed at various positions.

熱傳結構125可以具有多面體的形狀,例如具有矩形基部的柱狀或棱狀、或各種非晶的三維形狀。 The heat transfer structure 125 may have a polyhedral shape, such as a columnar or prismatic shape having a rectangular base, or various amorphous three-dimensional shapes.

十字形熱傳結構125可被用作電源或接地,取決於用途。 The cruciform heat transfer structure 125 can be used as a power source or ground, depending on the application.

元件先被連接到熱傳結構125,然後被安裝或嵌入印刷電路板100中,或被配置在該元件至少部分與熱傳結構125重疊的位置。 The component is first connected to the heat transfer structure 125 and then mounted or embedded in the printed circuit board 100, or is disposed at a location where the component at least partially overlaps the heat transfer structure 125.

結果,從該元件產生的熱可以被有效地通過熱傳結構125移到外部。 As a result, heat generated from the element can be effectively moved to the outside through the heat transfer structure 125.

第2圖為圖示印刷電路板200之另一個實例的剖視圖。 FIG. 2 is a cross-sectional view showing another example of the printed circuit board 200.

參照第2圖,印刷電路板200包括被形成在絕緣層211之任一表面上的第一金屬層221和第二金屬層222、通孔227、溝槽218、及被形成在溝槽218中的熱傳結構225。 Referring to FIG. 2, the printed circuit board 200 includes a first metal layer 221 and a second metal layer 222 formed on either surface of the insulating layer 211, a via 227, a trench 218, and is formed in the trench 218. The heat transfer structure is 225.

通孔227是被形成用於電路圖案的層間電連接的訊號器,而且是由種晶層(例如無電電鍍層)及至少一個電解電鍍層構成。 The via 227 is a signal formed to electrically connect the layers of the circuit pattern, and is composed of a seed layer (for example, an electroless plating layer) and at least one electrolytic plating layer.

熱傳結構225被形成在十字形溝槽218中,並藉由穿透絕緣層211來形成,以具有比通孔227更大的體積。 The heat transfer structure 225 is formed in the cross-shaped groove 218 and formed by penetrating the insulating layer 211 to have a larger volume than the through hole 227.

藉由具有該十字形,熱傳結構225可以被形成為具有大的體積,同時避免集中的電路圖案和通孔靠近熱傳結構225,而且可以被輕易地設計在各個位置。 By having the cross shape, the heat transfer structure 225 can be formed to have a large volume while avoiding concentrated circuit patterns and through holes close to the heat transfer structure 225, and can be easily designed at various positions.

熱傳結構225是由芯220和外層223所構成,外層223圍繞芯220的外表面。 The heat transfer structure 225 is comprised of a core 220 and an outer layer 223 that surrounds the outer surface of the core 220.

在本實例中,外層223設以圍繞芯220的3個表面,除了芯220的底部表面之外。 In the present example, the outer layer 223 is disposed around three surfaces of the core 220 except for the bottom surface of the core 220.

熱傳結構225可以具有多面體的形狀,例如具有矩形基部的柱狀或棱狀、或各種非晶的三維形狀。 The heat transfer structure 225 may have a polyhedral shape, such as a columnar or prismatic shape having a rectangular base, or various amorphous three-dimensional shapes.

在本實例中,芯220和外層223都是由至少一個電鍍層所構成。 In the present example, both core 220 and outer layer 223 are comprised of at least one electroplated layer.

芯220(功能為外層223的電鍍加速器)可以藉由被設置在熱傳結構225的中間部分(可能容易出現凹坑)來防止熱傳結構225在中間部分的厚度減小。 The core 220 (the plating accelerator functioning as the outer layer 223) can prevent the thickness of the heat transfer structure 225 from decreasing in the intermediate portion by being disposed in the intermediate portion of the heat transfer structure 225 (possibly pits are likely to occur).

芯220的側面可以具有錐形。此外,芯220的側面可以具有各種形狀中的一種形狀,各種形狀例如橢圓形、矩形、啞鈴形、或Z字形,但本揭示並不限於此。 The sides of the core 220 may have a tapered shape. Further, the side of the core 220 may have one of various shapes such as an elliptical shape, a rectangular shape, a dumbbell shape, or a zigzag shape, but the present disclosure is not limited thereto.

元件可以先被連接到熱傳結構225,然後再被安裝或嵌入印刷電路板200中,或者可以被配置在該元件至少部分與熱傳結構225重疊的位置。 The component may be first connected to the heat transfer structure 225 and then mounted or embedded in the printed circuit board 200, or may be disposed at a location where the component at least partially overlaps the heat transfer structure 225.

結果,從該元件產生的熱可以被有效地藉由熱傳結構225移到外部。 As a result, heat generated from the element can be effectively moved to the outside by the heat transfer structure 225.

第3圖為圖示印刷電路板300之另一個實例的剖視圖,而且將不再重複相同或相應元件的任何多餘描述。 3 is a cross-sectional view showing another example of the printed circuit board 300, and any redundant description of the same or corresponding elements will not be repeated.

參照第3圖,印刷電路板300包括被形成在絕緣層311之任一表面上的第一金屬層321和第二金屬層322、通孔327、溝槽318、及被形成在溝槽318中的熱傳結構325。 Referring to FIG. 3, the printed circuit board 300 includes a first metal layer 321 and a second metal layer 322 formed on either surface of the insulating layer 311, a via 327, a trench 318, and is formed in the trench 318. The heat transfer structure 325.

通孔327是通常被形成用於電路圖案的層間電連接的訊號器,而且是由種晶層(例如無電電鍍層)及至少一個電解電鍍層構成。 The via 327 is a signal generally formed for interlayer electrical connection of circuit patterns, and is composed of a seed layer (for example, an electroless plating layer) and at least one electrolytic plating layer.

熱傳結構325被形成在十字形溝槽318中,並藉由穿透絕緣層311來形成,以具有比通孔327更大的體積。 The heat transfer structure 325 is formed in the cross-shaped groove 318 and formed by penetrating the insulating layer 311 to have a larger volume than the through hole 327.

藉由具有該十字形,熱傳結構325可以被形成為具有大的體積,同時避免集中的電路圖案和通孔靠近熱傳結構325,而且可以被輕易地設計在各個位置。 By having the cross shape, the heat transfer structure 325 can be formed to have a large volume while avoiding concentrated circuit patterns and through holes close to the heat transfer structure 325, and can be easily designed at various positions.

熱傳結構325是由複數個芯320和外層323所構成,外層323圍繞複數個芯320的外表面。 The heat transfer structure 325 is comprised of a plurality of cores 320 and an outer layer 323 that surrounds the outer surfaces of the plurality of cores 320.

熱傳結構325可以具有多面體的形狀,例如具有矩形基部的柱狀或棱狀、或各種非晶的三維形狀。 The heat transfer structure 325 may have a polyhedral shape, such as a columnar or prismatic shape having a rectangular base, or various amorphous three-dimensional shapes.

在本實例中,芯320和外層323都是由至少一個電鍍層所構成。 In this example, both core 320 and outer layer 323 are comprised of at least one electroplated layer.

複數個芯320(功能為外層323的電鍍加速器)可以藉由被設置在熱傳結構325的中間部分(可能容易出現凹坑)來防止熱傳結構325在中間部分的厚度減小。 A plurality of cores 320 (plating accelerators functioning as the outer layer 323) can be prevented from decreasing in thickness at the intermediate portion by being disposed in the intermediate portion of the heat transfer structure 325 (possibly pits are likely to occur).

複數個芯220中每個芯220的側面都可以具有有矩形基部的棒形柱。 The sides of each of the plurality of cores 220 may have a rod-shaped post having a rectangular base.

第4圖和第5圖分別為圖示印刷電路板400之另一個實例的剖視圖和俯視圖,而且將不再重複相同或相應元件的任何多餘描述。 4 and 5 are cross-sectional and top views, respectively, showing another example of printed circuit board 400, and any redundant description of the same or corresponding elements will not be repeated.

參照第4圖,印刷電路板400包括複數個金屬層421、422、通孔427、溝槽418、及被形成在溝槽418中的熱傳結構425,複數個金屬層421、422分別被複數個絕緣層411電絕緣,複數個絕緣層411被夾置在複數個金屬層421、422之間。 Referring to FIG. 4, the printed circuit board 400 includes a plurality of metal layers 421, 422, vias 427, trenches 418, and a heat transfer structure 425 formed in the trenches 418. The plurality of metal layers 421, 422 are respectively plural The insulating layers 411 are electrically insulated, and a plurality of insulating layers 411 are sandwiched between the plurality of metal layers 421, 422.

通孔427是被形成用於電路圖案的層間電連接的訊號器,而且是由種晶層(例如無電電鍍層)及至少一個電解電鍍層構成。 The via 427 is a signal formed to electrically connect the layers of the circuit pattern, and is composed of a seed layer (for example, an electroless plating layer) and at least one electrolytic plating layer.

熱傳結構425被形成在十字形溝槽418中,並藉由穿透絕緣層411來形成,以具有比通孔427更大的體積。 The heat transfer structure 425 is formed in the cross-shaped groove 418 and formed by penetrating the insulating layer 411 to have a larger volume than the through hole 427.

熱傳結構425具有被以印刷電路板400的垂直方向層疊和連接的積層形式。 The heat transfer structure 425 has a laminated form that is laminated and connected in the vertical direction of the printed circuit board 400.

在這個實例中,熱傳結構425的積層形式不限於此處圖示的,而且可以包括被以Z字形樣式連接的結構。 In this example, the laminated form of the heat transfer structure 425 is not limited to that illustrated herein, and may include structures that are connected in a zigzag pattern.

參照第5圖,藉由具有該十字形,熱傳結構425可以被形成為具有大的體積,同時避免集中的電路圖案和通孔427靠近熱傳結構425,而且可以被輕易地設計在各個位置。 Referring to FIG. 5, by having the cross shape, the heat transfer structure 425 can be formed to have a large volume while avoiding concentrated circuit patterns and vias 427 close to the heat transfer structure 425, and can be easily designed at various positions. .

例如,元件可以被安裝在第5圖標示「B」的區域中。 For example, the component can be installed in the area of the fifth icon "B".

熱傳結構425由芯420與圍繞芯420的外表面的外層423構成。 The heat transfer structure 425 is comprised of a core 420 and an outer layer 423 surrounding the outer surface of the core 420.

熱傳結構425可以具有多面體的形狀,例如具有矩形基部的柱狀或棱狀、或各種非晶的三維形狀。 The heat transfer structure 425 may have a polyhedral shape, such as a columnar or prismatic shape having a rectangular base, or various amorphous three-dimensional shapes.

在本實例中,芯420和外層423都是由至少一個電鍍層所構成。 In this example, both core 420 and outer layer 423 are comprised of at least one electroplated layer.

芯420(功能為外層423的電鍍加速器)可以藉由被設置在熱傳結構425的中間部分(可能容易出現凹坑)來防止熱傳結構425在中間部分的厚度減小。 The core 420 (electroplating accelerator functioning as the outer layer 423) can prevent the thickness of the heat transfer structure 425 from decreasing in the intermediate portion by being disposed in the intermediate portion of the heat transfer structure 425 (possibly pits are likely to occur).

芯420的側面可以具有錐形。此外,芯420的側面可以具有各種形狀中的一種形狀,各種形狀例如橢圓形、矩形、啞鈴形、或Z字形,但本揭示並不限於此。 The sides of the core 420 may have a taper. Further, the side of the core 420 may have one of various shapes such as an elliptical shape, a rectangular shape, a dumbbell shape, or a zigzag shape, but the present disclosure is not limited thereto.

元件可以先被連接到熱傳結構425,然後被安裝在印刷電路板400上,或者可以被配置在該元件至少部分與熱傳結構425重疊的位置。結果,從該元件產生的熱可以被有效地藉由熱傳結構425移到外部。 The component may be first connected to the heat transfer structure 425 and then mounted on the printed circuit board 400, or may be disposed at a location where the component at least partially overlaps the heat transfer structure 425. As a result, heat generated from the element can be effectively moved to the outside by the heat transfer structure 425.

絕緣層411上可以形成有阻焊層,用於暴露連接墊並作為最外面的電路圖案的保護層。 A solder resist layer may be formed on the insulating layer 411 for exposing the connection pads and serving as a protective layer for the outermost circuit pattern.

製造印刷電路板的方法 Method of manufacturing a printed circuit board

第6圖為圖示一種製造印刷電路板的方法之實例的流程圖,並且第7圖至第15圖藉由圖示在製造製程期間的印刷電路板剖視圖來說明用於製造印刷電路板的方法之實例的製程。 6 is a flow chart illustrating an example of a method of manufacturing a printed circuit board, and FIGS. 7 to 15 illustrate a method for manufacturing a printed circuit board by illustrating a cross-sectional view of a printed circuit board during a manufacturing process. The process of the example.

參照第6圖,製造印刷電路板的方法涉及層疊絕緣層(S110)、在該絕緣層中形成通孔和溝槽(S120)、通過主電鍍在該通孔和該溝槽中形成電鍍層(S130)、以及在上面形成有該電鍍層的絕緣層上形成金屬層(S140)。 Referring to FIG. 6, a method of manufacturing a printed circuit board involves laminating an insulating layer (S110), forming via holes and trenches in the insulating layer (S120), and forming a plating layer in the via holes and the trenches by main plating ( S130), and forming a metal layer on the insulating layer on which the plating layer is formed (S140).

以下,將參照第7圖至第15圖中圖示的印刷電路板剖視圖來描述上述製造印刷電路板的方法中使用的製程。 Hereinafter, the process used in the above method of manufacturing a printed circuit board will be described with reference to a cross-sectional view of the printed circuit board illustrated in FIGS. 7 to 15.

首先,參照第7圖,取得載體構件100A,載體構件100A具有被形成在芯層101之兩面上的第一金屬層102。 First, referring to Fig. 7, a carrier member 100A having a first metal layer 102 formed on both faces of the core layer 101 is obtained.

當形成用於電路的薄絕緣層或金屬層時,芯層101是用於支撐用於電路的薄絕緣層或金屬層,而且可以由絕緣材料或金屬材料製成。 When a thin insulating layer or a metal layer for a circuit is formed, the core layer 101 is for supporting a thin insulating layer or a metal layer for a circuit, and may be made of an insulating material or a metal material.

第一金屬層102可以是例如銅箔,但本揭示不限於此。 The first metal layer 102 may be, for example, a copper foil, but the disclosure is not limited thereto.

例如,可將包銅層板用於載體構件100A。 For example, a copper clad laminate can be used for the carrier member 100A.

此外,載體構件100A可以只使用芯層建構或只讓第一金屬層形成在芯層的一個表面上。 Further, the carrier member 100A may be constructed using only the core layer or only the first metal layer may be formed on one surface of the core layer.

載體構件可以由電路板領域中用作支撐基板的任何材料製成,只要載體構件在後面的製程是可拆卸的即可。 The carrier member may be made of any material used as a supporting substrate in the field of circuit boards as long as the carrier member is detachable in a subsequent process.

然後,參照第8圖,將絕緣層111層疊在載體構件100A的兩個表面上。 Then, referring to Fig. 8, the insulating layer 111 is laminated on both surfaces of the carrier member 100A.

選擇性地,絕緣層111可以與第二金屬層112一起被層壓在載體構件100A的兩個表面上。 Alternatively, the insulating layer 111 may be laminated on both surfaces of the carrier member 100A together with the second metal layer 112.

第二金屬層112可以是例如銅箔。 The second metal layer 112 may be, for example, a copper foil.

接著,參照第9圖,藉由圖案化絕緣層111和第二金屬層112來形成通孔113和十字形溝槽114。 Next, referring to FIG. 9, the via hole 113 and the cross-shaped trench 114 are formed by patterning the insulating layer 111 and the second metal layer 112.

十字形的溝槽114不限於直線形的平面或多面體。例如,十字形可以指各種類型的三維形狀,包括具有一個或更多個彎曲線的平面形狀。 The cross-shaped groove 114 is not limited to a linear plane or a polyhedron. For example, a cross may refer to various types of three-dimensional shapes, including planar shapes having one or more curved lines.

絕緣層111和第二金屬層112可以使用一般的雷射鑽孔或光微影進行圖案化。 The insulating layer 111 and the second metal layer 112 may be patterned using general laser drilling or photolithography.

溝槽114是用於形成熱傳結構,並被形成為具有比通孔113更大的體積。 The trench 114 is for forming a heat transfer structure and is formed to have a larger volume than the via 113.

然後,參照第10圖,種晶層115是通過例如無電電鍍形成。 Then, referring to Fig. 10, the seed layer 115 is formed by, for example, electroless plating.

之後,參照第11圖,形成具有開放的預定電鍍區域的抗電鍍圖案116。 Thereafter, referring to Fig. 11, a plating resist pattern 116 having an open predetermined plating region is formed.

在本實例中,乾膜可被用來阻止電鍍。 In this example, a dry film can be used to prevent plating.

接著,參照第12圖,在抗電鍍圖案116開放的預定電鍍區域中通過電解電鍍形成電鍍層117。若需要,可以重複電解電鍍以形成複數個電鍍層。 Next, referring to Fig. 12, a plating layer 117 is formed by electrolytic plating in a predetermined plating region where the plating resist pattern 116 is opened. If necessary, electrolytic plating may be repeated to form a plurality of plating layers.

然後,參照第13圖,去除抗電鍍圖案116,並視需要進行表面平滑化處理。 Then, referring to Fig. 13, the plating resist pattern 116 is removed, and surface smoothing treatment is performed as needed.

在這個實例中,在利用一般的電路形成製程(例如閃蝕)形成金屬層之後,可以視需要重複數次第8 圖至第13圖圖示的製程,以形成具有積層熱傳結構的多層印刷電路板層板。 In this example, after forming a metal layer using a general circuit formation process (eg, flash), it may be repeated several times as needed. The process illustrated in Figures 13 to form a multilayer printed circuit board laminate having a laminated heat transfer structure.

接著,參照第14圖,一對層板被從載體構件的芯層101分離。 Next, referring to Fig. 14, a pair of laminates are separated from the core layer 101 of the carrier member.

分離製程可以使用各式各樣的方法進行,取決於載體構件的結構。 The separation process can be carried out using a wide variety of methods, depending on the structure of the carrier member.

例如,分離製程可以使用脫模劑、使用可拆卸銅箔、或以類似方式進行,但本揭示不限於此。 For example, the separation process may be performed using a release agent, using a detachable copper foil, or the like, but the disclosure is not limited thereto.

之後,參照第15圖,將一般的電路形成製程(例如圖案化或閃蝕)應用於分離層板的兩面,以形成印刷電路板100,其中第一金屬層121和第二金屬層122被形成在絕緣層111的任一表面上。 Thereafter, referring to Fig. 15, a general circuit forming process (e.g., patterning or flashing) is applied to both sides of the separation layer to form a printed circuit board 100 in which the first metal layer 121 and the second metal layer 122 are formed. On either surface of the insulating layer 111.

第一金屬層121和第二金屬層122通過通孔127及/或熱傳結構125彼此相連。 The first metal layer 121 and the second metal layer 122 are connected to each other through the via 127 and/or the heat transfer structure 125.

雖然本實例中圖示並描述金屬層被形成在熱傳結構125的兩個表面上作為終止層,但若需要可以從熱傳結構125的一個表面或兩個表面省去金屬層。 Although the metal layer is illustrated and described in this example as being a termination layer on both surfaces of the heat transfer structure 125, the metal layer may be omitted from one surface or both surfaces of the heat transfer structure 125 if necessary.

熱傳結構125被形成為具有比通孔127更大的體積。 The heat transfer structure 125 is formed to have a larger volume than the through hole 127.

熱傳結構125可以具有多面體的形狀,例如具有矩形基部的柱狀或棱狀、或各種非晶的三維形狀。 The heat transfer structure 125 may have a polyhedral shape, such as a columnar or prismatic shape having a rectangular base, or various amorphous three-dimensional shapes.

依據本實例,藉由在該十字形中形成熱傳結構125,熱傳結構125可以被形成為具有大的體積,同 時避免集中的電路圖案和通孔靠近熱傳結構125,而且可以被輕易地設計在各個位置。 According to the present example, the heat transfer structure 125 can be formed to have a large volume by forming the heat transfer structure 125 in the cross shape. The concentrated circuit patterns and vias are prevented from approaching the heat transfer structure 125 and can be easily designed at various locations.

此外,藉由進行數個電鍍製程,同時應用使用載體構件製造薄板或無芯基板的方法作為製造高積體薄板的方法,可以同時形成一般的通孔和熱傳結構。 Further, by performing a plurality of electroplating processes and simultaneously applying a method of manufacturing a thin plate or a coreless substrate using a carrier member, as a method of manufacturing a high-integral sheet, a general through hole and a heat transfer structure can be simultaneously formed.

第16圖為圖示一種製造印刷電路板的方法之另一個實例的流程圖,並且第17圖至第30圖藉由圖示在製造製程期間的印刷電路板剖視圖來說明用於製造印刷電路板的方法之另一個實例的製程。 16 is a flow chart illustrating another example of a method of manufacturing a printed circuit board, and FIGS. 17 to 30 illustrate a process for manufacturing a printed circuit board by illustrating a cross-sectional view of a printed circuit board during a manufacturing process. Another example of the process of the process.

參照第16圖,製造印刷電路板的方法涉及層疊絕緣層(S210)、在該絕緣層中形成開口和通孔(S220)、通過主電鍍在該開口和該通孔中形成第一電鍍層(S230)、在該絕緣層中形成溝槽使得被填充在該開口中的第一電鍍層之外表面被暴露(S240)、通過輔電鍍在該溝槽中形成第二電鍍層(S250)、以及在該絕緣層上形成金屬層(S260)。 Referring to Fig. 16, a method of manufacturing a printed circuit board involves laminating an insulating layer (S210), forming openings and via holes in the insulating layer (S220), and forming a first plating layer in the opening and the via hole by main plating ( S230) forming a trench in the insulating layer such that an outer surface of the first plating layer filled in the opening is exposed (S240), a second plating layer is formed in the trench by auxiliary plating (S250), and A metal layer is formed on the insulating layer (S260).

以下,將參照第17圖至第30圖中圖示的印刷電路板剖視圖來描述上述製造印刷電路板的方法中使用的製程。 Hereinafter, the process used in the above method of manufacturing a printed circuit board will be described with reference to a cross-sectional view of the printed circuit board illustrated in FIGS. 17 to 30.

首先,參照第17圖,取得載體構件200A,載體構件200A具有被形成在芯層201之兩面上的第一金屬層202。 First, referring to Fig. 17, a carrier member 200A having a first metal layer 202 formed on both faces of the core layer 201 is obtained.

芯層201可以由樹脂或金屬製成,並且第一金屬層202可以是例如銅箔,但本揭示不限於此。 The core layer 201 may be made of a resin or a metal, and the first metal layer 202 may be, for example, a copper foil, but the disclosure is not limited thereto.

此外,分離層203,例如脫離膜或可拆卸銅箔可被夾置在芯層201與第一金屬層202之間。 Further, a separation layer 203 such as a release film or a detachable copper foil may be interposed between the core layer 201 and the first metal layer 202.

然後,參照第18圖,將絕緣層211層疊在載體構件200A的兩個表面上。 Then, referring to Fig. 18, the insulating layer 211 is laminated on both surfaces of the carrier member 200A.

選擇性地,絕緣層211可以與第二金屬層212一起被層壓在載體構件200A的兩個表面上。 Alternatively, the insulating layer 211 may be laminated on both surfaces of the carrier member 200A together with the second metal layer 212.

第二金屬層212可以是例如銅箔。 The second metal layer 212 may be, for example, a copper foil.

接著,參照第19圖,藉由圖案化絕緣層211和第二金屬層212來形成通孔213和十字形開口214。 Next, referring to FIG. 19, the via hole 213 and the cross-shaped opening 214 are formed by patterning the insulating layer 211 and the second metal layer 212.

十字形的開口214不限於直線形的平面或多面體。例如,十字形可以指各種類型的三維形狀,包括具有一個或更多個彎曲線的平面形狀。 The cross-shaped opening 214 is not limited to a linear plane or a polyhedron. For example, a cross may refer to various types of three-dimensional shapes, including planar shapes having one or more curved lines.

絕緣層211和第二金屬層212可以使用一般的雷射鑽孔或光微影進行圖案化。 The insulating layer 211 and the second metal layer 212 may be patterned using general laser drilling or photolithography.

開口214被形成為具有比通孔213更大的體積。 The opening 214 is formed to have a larger volume than the through hole 213.

然後,參照第20圖,通過無電電鍍形成種晶層(未圖示)之後,形成使預定電鍍區域開放的第一抗電鍍圖案216a,而且藉由電鍍由第一抗電鍍圖案216a開放的該預定電鍍區域來形成第一電鍍層,該第一電鍍層包括用於芯220a的電鍍層及用於通孔-金屬層217的電鍍層。 Then, referring to Fig. 20, after forming a seed layer (not shown) by electroless plating, a first plating resist pattern 216a which opens the predetermined plating region is formed, and the predetermined opening by the first plating resist pattern 216a is formed by electroplating. The plating region is formed to form a first plating layer including a plating layer for the core 220a and a plating layer for the via-metal layer 217.

該第一電鍍層可以包括無電電鍍層及電解電鍍層。 The first plating layer may include an electroless plating layer and an electrolytic plating layer.

在本實例中,乾膜可被用來阻止電鍍。 In this example, a dry film can be used to prevent plating.

第21圖為圖示第20圖中標示「A」的部分之放大立體圖,該部分也就是形成芯220a的電鍍層的區域。 Fig. 21 is an enlarged perspective view showing a portion indicated by "A" in Fig. 20, which is a region where the plating layer of the core 220a is formed.

之後,參照第22圖,去除第一抗電鍍圖案216a之後,通過雷射鑽孔在將形成熱傳結構的區域去除第一金屬層212和絕緣層211,然後形成溝槽218,溝槽218暴露出芯220的外表面。 Thereafter, referring to FIG. 22, after the first plating resist pattern 216a is removed, the first metal layer 212 and the insulating layer 211 are removed by laser drilling in a region where the heat transfer structure is to be formed, and then the trench 218 is formed, and the trench 218 is exposed. The outer surface of the core 220 is taken out.

溝槽218具有十字形,而且在本實例中,該十字形不限於直線形的平面或多面體。例如,十字形可以指各種類型的三維形狀,包括具有一個或更多個彎曲線的平面形狀。 The groove 218 has a cross shape, and in the present example, the cross shape is not limited to a linear plane or a polyhedron. For example, a cross may refer to various types of three-dimensional shapes, including planar shapes having one or more curved lines.

選擇性地,可以在形成抗蝕刻圖案後進行雷射鑽孔,該抗蝕刻圖案具有被開放用於在其中形成熱傳結構的區域。 Alternatively, laser drilling may be performed after forming an anti-etching pattern having a region opened for forming a heat transfer structure therein.

在本實例中,在雷射鑽孔期間,可以藉由去除將形成熱傳結構的絕緣層211區域、或藉由與將形成熱傳結構的絕緣層211區域一起另外處理芯220a的電鍍層來形成芯220。 In the present example, during laser drilling, the plating layer of the core 220a may be additionally treated by removing the region of the insulating layer 211 where the heat transfer structure will be formed, or by additionally treating the region of the insulating layer 211 with the heat transfer structure. A core 220 is formed.

在雷射鑽孔期間,藉由使用由芯的電鍍層220a引發的擴散反射,可以使用少量的能量來處理大的面積,從而節省處理能量。 During the laser drilling, by using the diffuse reflection caused by the plating layer 220a of the core, a small amount of energy can be used to process a large area, thereby saving processing energy.

芯220(功能為外層的電鍍加速器)可以藉由被設置在熱傳結構的中間部分(可能容易出現凹坑)來防止熱傳結構在中間部分的厚度減小。 The core 220 (electroplating accelerator functioning as an outer layer) can prevent the thickness of the heat transfer structure from being reduced in the intermediate portion by being disposed in the intermediate portion of the heat transfer structure (possibly pits are likely to occur).

芯220的側面可以具有錐形。此外,芯220的側面可以具有各種形狀中的一種形狀,各種形狀例如橢圓形、矩形、啞鈴形、或Z字形。 The sides of the core 220 may have a tapered shape. Further, the side of the core 220 may have one of various shapes such as an elliptical shape, a rectangular shape, a dumbbell shape, or a zigzag shape.

第23圖為圖示第22圖中標示「A」的部分之放大立體圖,該部分也就是形成十字形芯220的區域。 Fig. 23 is an enlarged perspective view showing a portion indicated by "A" in Fig. 22, which is an area where the cross-shaped core 220 is formed.

接著,參照第24圖,通過無電電鍍形成種晶層(未圖示)之後,形成使預定電鍍區域開放的第二抗電鍍圖案216b,並藉由電鍍由第二抗電鍍圖案216b開放的該預定電鍍區域來形成外金屬層219的第二電鍍層。外金屬層219的第二電鍍區域可以包括無電電鍍層和電解電鍍層,而且可以藉由重覆電鍍製程三次或更多次來設置複數個電鍍層。 Next, referring to Fig. 24, after forming a seed layer (not shown) by electroless plating, a second plating resist pattern 216b which opens the predetermined plating region is formed, and the predetermined opening by the second plating resist pattern 216b is formed by electroplating. The plating region is used to form a second plating layer of the outer metal layer 219. The second plating region of the outer metal layer 219 may include an electroless plating layer and an electrolytic plating layer, and a plurality of plating layers may be provided by repeating the plating process three or more times.

之後,參照第25圖,去除第二抗電鍍圖案216b,並通過一般的電路形成製程(例如閃蝕)形成通孔227、熱傳結構225及金屬層。 Thereafter, referring to Fig. 25, the second plating resist pattern 216b is removed, and the via hole 227, the heat transfer structure 225, and the metal layer are formed by a general circuit formation process (e.g., flash).

第26圖為圖示第25圖中標示「A」的部分之放大立體圖,該部分也就是形成熱傳結構225的區域。 Fig. 26 is an enlarged perspective view showing a portion indicated by "A" in Fig. 25, which is an area where the heat transfer structure 225 is formed.

參照第25圖和第26圖,熱傳結構225是由芯220和外層223所構成,外層223圍繞芯220的外表面。 Referring to Figures 25 and 26, the heat transfer structure 225 is comprised of a core 220 and an outer layer 223 that surrounds the outer surface of the core 220.

然後,參照第27圖,重覆數次第16圖至第26圖的製程,以形成在每一層中層疊有熱傳結構225的多層印刷電路板層板。 Then, referring to Fig. 27, the processes of Figs. 16 to 26 are repeated several times to form a multilayer printed circuit board laminate in which the heat transfer structure 225 is laminated in each layer.

接著,參照第28圖,一對層板被從載體構件200A的芯層201分離。 Next, referring to Fig. 28, a pair of laminates are separated from the core layer 201 of the carrier member 200A.

分離製程可以使用各式各樣的方法進行,取決於載體構件200A的結構與分離層203的材料。 The separation process can be carried out using a variety of methods depending on the structure of the carrier member 200A and the material of the separation layer 203.

例如,分離製程可以使用脫模劑、使用可拆卸銅箔、或以類似方式進行,但本揭示不限於此。 For example, the separation process may be performed using a release agent, using a detachable copper foil, or the like, but the disclosure is not limited thereto.

之後,參照第29圖,將一般的電路形成製程(例如圖案化或閃蝕)應用於分離層板的兩面,以形成印刷電路板,其中第一金屬層221和第二金屬層222被形成在絕緣層211的任一表面上。 Thereafter, referring to Fig. 29, a general circuit forming process (e.g., patterning or flashing) is applied to both sides of the separation layer to form a printed circuit board in which the first metal layer 221 and the second metal layer 222 are formed. On either surface of the insulating layer 211.

第一金屬層221和第二金屬層222通過通孔227及/或熱傳結構225彼此相連。 The first metal layer 221 and the second metal layer 222 are connected to each other through the via 227 and/or the heat transfer structure 225.

第30圖為圖示第25圖中標示「A」的部分之放大立體圖,該部分也就是形成熱傳結構225的區域。 Fig. 30 is an enlarged perspective view showing a portion indicated by "A" in Fig. 25, which is an area where the heat transfer structure 225 is formed.

參照第29圖和第30圖,熱傳結構225是由芯220和外層223所構成,外層223圍繞芯220的外表面。 Referring to Figures 29 and 30, the heat transfer structure 225 is comprised of a core 220 and an outer layer 223 that surrounds the outer surface of the core 220.

此外,熱傳結構225係以被層疊在每一層中的形式設置。 Further, the heat transfer structure 225 is provided in a form of being laminated in each layer.

在本實例中,雖然圖示的是熱傳結構225具有有矩形基部的棒形柱,但本揭示不限於此,而且熱傳 結構225可被以各式各樣非晶形三維形狀中的任一種形狀形成,例如具有矩形基部的棱柱。 In the present example, although the heat transfer structure 225 is illustrated as having a rod-shaped column having a rectangular base, the present disclosure is not limited thereto, and heat transfer The structure 225 can be formed in any of a variety of amorphous three-dimensional shapes, such as prisms having a rectangular base.

熱傳結構225具有比被形成用於電路圖案之層間電連接的通孔227更大的體積。 The heat transfer structure 225 has a larger volume than the through holes 227 that are electrically connected to the layers formed for the circuit patterns.

依據本實例,藉由以十字形形成熱傳結構225,熱傳結構225可以被形成為具有大的體積,同時避免集中的電路圖案和通孔靠近熱傳結構225,而且可以被輕易地設計在各個位置。 According to the present example, by forming the heat transfer structure 225 in a cross shape, the heat transfer structure 225 can be formed to have a large volume while avoiding concentrated circuit patterns and through holes close to the heat transfer structure 225, and can be easily designed in Various locations.

此外,藉由形成具有大體積的熱傳結構,同時應用使用載體構件製造薄板或無芯基板的方法作為製造高積體薄板的方法,提高開口的深寬比是可能的,該開口將被使用用於外層的電鍍填充,從而在形成用於外層的電鍍層和金屬層時加速電鍍,並減少凹坑引起的缺陷。 Further, by forming a heat transfer structure having a large volume while applying a method of manufacturing a thin plate or a coreless substrate using a carrier member as a method of manufacturing a high-profile thin plate, it is possible to increase the aspect ratio of the opening, and the opening will be used. Electroplating filling for the outer layer, thereby accelerating plating when forming the plating layer and the metal layer for the outer layer, and reducing defects caused by pits.

此外,由於可以在沒有一般的平滑化處理(例如蝕刻或拋光)之下獲得平滑性,故簡化製造製程並節省處理成本是可能的。 In addition, since smoothness can be obtained without a general smoothing process such as etching or polishing, it is possible to simplify the manufacturing process and save processing costs.

第31圖為圖示一種製造印刷電路板的方法之另一個實例的流程圖,並且第32圖至第41圖藉由圖示在製造製程期間的印刷電路板剖視圖來說明用於製造印刷電路板的方法之另一個實例的製程。 31 is a flow chart illustrating another example of a method of manufacturing a printed circuit board, and FIGS. 32 to 41 illustrate a process for manufacturing a printed circuit board by illustrating a cross-sectional view of a printed circuit board during a manufacturing process. Another example of the process of the process.

參照第31圖,製造印刷電路板的方法涉及形成芯的圖案(S310)、層疊絕緣層以便讓該芯的圖案被嵌入(S320)、在該絕緣層中形成通孔(S330)、通 過主電鍍在該通孔中形成第一電鍍層(S340)、在該絕緣層中形成十字形的溝槽使得該芯的圖案之外表面被暴露(S350)、通過輔電鍍在該溝槽中形成第二電鍍層(S360)、以及在該絕緣層上形成金屬層(S370)。 Referring to Fig. 31, a method of manufacturing a printed circuit board involves forming a pattern of a core (S310), laminating an insulating layer so that a pattern of the core is embedded (S320), forming a through hole (S330) in the insulating layer, and passing through A first plating layer is formed in the via hole through the main plating (S340), and a cross-shaped groove is formed in the insulating layer such that the outer surface of the pattern of the core is exposed (S350), and the auxiliary plating is performed in the trench A second plating layer is formed (S360), and a metal layer is formed on the insulating layer (S370).

以下,將參照第32圖至第41圖中圖示的印刷電路板剖視圖來描述上述製造印刷電路板的方法中使用的製程。 Hereinafter, the process used in the above method of manufacturing a printed circuit board will be described with reference to a cross-sectional view of the printed circuit board illustrated in FIGS. 32 to 41.

首先,參照第32圖,取得載體構件300A,載體構件300A具有被形成在芯層301之兩面上的第一金屬層302。 First, referring to Fig. 32, a carrier member 300A having a first metal layer 302 formed on both faces of the core layer 301 is obtained.

芯層301可以由樹脂或金屬製成,並且第一金屬層302可以是例如銅箔,但本揭示不限於此。 The core layer 301 may be made of a resin or a metal, and the first metal layer 302 may be, for example, a copper foil, but the disclosure is not limited thereto.

此外,分離層303,例如脫離膜或可拆卸銅箔可被夾置在芯層301與第一金屬層302之間。 Further, a separation layer 303 such as a release film or a detachable copper foil may be interposed between the core layer 301 and the first metal layer 302.

然後,參照第33圖,複數個芯320a的圖案(每個都具有十字形)被形成在載體構件300A的兩個表面上。 Then, referring to Fig. 33, patterns of a plurality of cores 320a (each having a cross shape) are formed on both surfaces of the carrier member 300A.

該複數個芯320a的圖案可以使用光微影方法形成,但本揭示不限於此。 The pattern of the plurality of cores 320a may be formed using a photolithography method, but the present disclosure is not limited thereto.

該複數個芯320a的圖案功能為在形成用於熱傳結構外層的電鍍層時加速電鍍層。 The pattern function of the plurality of cores 320a is to accelerate the plating layer when forming a plating layer for the outer layer of the heat transfer structure.

接著,參照第34圖,將絕緣層311層疊在上面形成有複數個芯320a的圖案的載體構件300A之兩面上。 Next, referring to Fig. 34, the insulating layer 311 is laminated on both faces of the carrier member 300A on which the pattern of the plurality of cores 320a is formed.

選擇性地,絕緣層311可以與第二金屬層312一起被層壓在載體構件300A的兩個表面上。 Alternatively, the insulating layer 311 may be laminated on both surfaces of the carrier member 300A together with the second metal layer 312.

第二金屬層312可以是例如銅箔。 The second metal layer 312 can be, for example, a copper foil.

在本實例中,絕緣層311可以被形成為芯320a的圖案之厚度的兩倍厚。 In the present example, the insulating layer 311 may be formed to be twice as thick as the thickness of the pattern of the core 320a.

接著,參照第35圖,藉由圖案化絕緣層311和第二金屬層312來形成通孔313。 Next, referring to FIG. 35, the via hole 313 is formed by patterning the insulating layer 311 and the second metal layer 312.

絕緣層311和第二金屬層312可以使用一般的雷射鑽孔或光微影進行圖案化。 The insulating layer 311 and the second metal layer 312 can be patterned using general laser drilling or photolithography.

然後,參照第36圖,通過無電電鍍形成種晶層(未圖示)之後,形成使預定電鍍區域開放的第一抗電鍍圖案316a,而且藉由電鍍由第一抗電鍍圖案316a開放的該預定電鍍區域來形成用於通孔-金屬層317的第一電鍍層。 Then, referring to Fig. 36, after forming a seed layer (not shown) by electroless plating, a first plating resist pattern 316a which opens the predetermined plating region is formed, and the predetermined opening by the first plating resist pattern 316a is formed by electroplating. The plating region is formed to form a first plating layer for the via-metal layer 317.

該第一電鍍層可以包括無電電鍍層及電解電鍍層。 The first plating layer may include an electroless plating layer and an electrolytic plating layer.

之後,參照第37圖,去除第一抗電鍍圖案316a之後,通過雷射鑽孔在將形成熱傳結構的區域去除第一金屬層312和絕緣層311,然後形成溝槽318,溝槽318暴露出複數個芯320。 Thereafter, referring to FIG. 37, after the first plating resist pattern 316a is removed, the first metal layer 312 and the insulating layer 311 are removed by laser drilling in a region where the heat transfer structure is to be formed, and then the trench 318 is formed, and the trench 318 is exposed. A plurality of cores 320 are produced.

十字形的溝槽不限於直線形的平面或多面體。例如,十字形可以指各種類型的三維形狀,包括具有一個或更多個彎曲線的平面形狀。 The cross-shaped groove is not limited to a linear plane or a polyhedron. For example, a cross may refer to various types of three-dimensional shapes, including planar shapes having one or more curved lines.

選擇性地,可以在形成抗蝕刻圖案後進行雷射鑽孔,該抗蝕刻圖案具有被開放用於在其中形成熱傳結構的雷射鑽孔區域。 Alternatively, a laser drilling may be performed after forming an anti-etching pattern having a laser drilling region that is opened for forming a heat transfer structure therein.

形成溝槽318以具有比通孔313更大的體積。 The trench 318 is formed to have a larger volume than the via 313.

在本實例中,可以在進行雷射鑽孔的同時,藉由在去除將形成熱傳結構的絕緣層311區域時一起另外處理複數個芯320a的圖案來形成複數個芯320。 In the present example, a plurality of cores 320 may be formed by additionally processing a pattern of a plurality of cores 320a together while removing the region of the insulating layer 311 where the heat transfer structure is to be formed while performing laser drilling.

在雷射鑽孔期間,藉由使用由芯320a的複數個圖案引發的擴散反射,可以使用少量的能量來處理大的面積,從而節省處理能量。 During the laser drilling, by using the diffuse reflection caused by the plurality of patterns of the core 320a, a small amount of energy can be used to process a large area, thereby saving processing energy.

複數個芯320(功能為外層的電鍍加速器)可以藉由被設置在熱傳結構的中間部分(可能容易出現凹坑)來防止熱傳結構在中間部分的厚度減小。 A plurality of cores 320 (electroplating accelerators functioning as outer layers) can prevent the thickness of the heat transfer structure from decreasing in the intermediate portion by being disposed in the intermediate portion of the heat transfer structure (possibly pits are likely to occur).

複數個芯320可以各具有例如具有矩形基部的十字形棱柱。 The plurality of cores 320 may each have, for example, a cross-shaped prism having a rectangular base.

接著,參照第38圖,通過無電電鍍形成種晶層(未圖示)之後,形成使預定電鍍區域開放的第二抗電鍍圖案316b,並藉由電鍍由第二抗電鍍圖案316b開放的該預定電鍍區域來形成外金屬層319的第二電鍍層。熱傳結構的外金屬層319的第二電鍍區域可以包括無電電鍍層和電解電鍍層,而且可以藉由重覆電鍍製程三次或更多次來設置複數個電鍍層。 Next, referring to Fig. 38, after forming a seed layer (not shown) by electroless plating, a second plating resist pattern 316b which opens the predetermined plating region is formed, and the predetermined opening by the second plating resist pattern 316b is formed by electroplating. The plating region is used to form a second plating layer of the outer metal layer 319. The second plating region of the outer metal layer 319 of the heat transfer structure may include an electroless plating layer and an electrolytic plating layer, and a plurality of plating layers may be provided by repeating the plating process three or more times.

之後,參照第39圖,去除第二抗電鍍圖案316b。 Thereafter, referring to Fig. 39, the second plating resist pattern 316b is removed.

在這個實例中,在利用一般的電路形成製程(例如閃蝕)形成金屬層之後,可以視需要重複數次第33圖至第39圖圖示的製程,以形成具有被層疊在每一層中的積層熱傳結構的多層印刷電路板層板。 In this example, after the metal layer is formed by a general circuit formation process (for example, flash), the processes illustrated in FIGS. 33 to 39 may be repeated as needed to form a laminate having layers laminated in each layer. Multilayer printed circuit board laminate with heat transfer structure.

接著,參照第40圖,一對層板被從載體構件的芯層分離。 Next, referring to Fig. 40, a pair of laminates are separated from the core layer of the carrier member.

分離製程可以使用各式各樣的方法進行,取決於載體構件300A的結構及分離層303的材料。 The separation process can be carried out using a variety of methods depending on the structure of the carrier member 300A and the material of the separation layer 303.

例如,分離製程可以使用脫模劑、使用可拆卸銅箔、或以類似方式進行,但本揭示不限於此。 For example, the separation process may be performed using a release agent, using a detachable copper foil, or the like, but the disclosure is not limited thereto.

之後,參照第41圖,將一般的電路形成製程(例如圖案化或閃蝕)應用於分離層板的兩面,以形成印刷電路板300,其中第一金屬層321和第二金屬層322被形成在絕緣層311的任一表面上。 Thereafter, referring to FIG. 41, a general circuit forming process (for example, patterning or flash etching) is applied to both sides of the separation layer to form a printed circuit board 300 in which the first metal layer 321 and the second metal layer 322 are formed. On either surface of the insulating layer 311.

第一金屬層321和第二金屬層322通過通孔327及/或熱傳結構325彼此相連。 The first metal layer 321 and the second metal layer 322 are connected to each other through the via 327 and/or the heat transfer structure 325.

熱傳結構325是由複數個芯320和外層323所構成,外層323圍繞複數個芯320的外表面。 The heat transfer structure 325 is comprised of a plurality of cores 320 and an outer layer 323 that surrounds the outer surfaces of the plurality of cores 320.

熱傳結構325可以具有多面體的形狀,例如具有矩形基部的柱狀或棱狀、或各種非晶的三維形狀。 The heat transfer structure 325 may have a polyhedral shape, such as a columnar or prismatic shape having a rectangular base, or various amorphous three-dimensional shapes.

熱傳結構325具有比被形成用於電路圖案之層間電連接的通孔327更大的體積。 The heat transfer structure 325 has a larger volume than the through holes 327 that are electrically connected to the layers formed for the circuit patterns.

依據本實例,藉由形成具有大體積的熱傳結構,同時應用使用載體構件製造薄板或無芯基板的方法作為製造高積體薄板的方法,提高開口的深寬比是可能的,該開口將被使用用於外層的電鍍填充,從而在形成用於外層的電鍍層和金屬層時加速電鍍,並減少凹坑引起的缺陷。 According to the present example, by forming a heat transfer structure having a large volume while applying a method of manufacturing a thin plate or a coreless substrate using a carrier member, it is possible to increase the aspect ratio of the opening as a method of manufacturing a high-profile thin plate, and the opening will be It is used for electroplating filling of the outer layer, thereby accelerating plating when forming the plating layer and the metal layer for the outer layer, and reducing defects caused by pits.

此外,由於可以在沒有一般的平滑化處理(例如蝕刻或拋光)之下獲得平滑性,故簡化製造製程並節省處理成本是可能的。 In addition, since smoothness can be obtained without a general smoothing process such as etching or polishing, it is possible to simplify the manufacturing process and save processing costs.

雖然上面已經描述了使用載體構件製造無芯基板的方法,但本揭示並不限於此,而且所屬技術領域中具有通常知識者應理解的是,可以使用一般的無芯基板。 Although the method of manufacturing a coreless substrate using a carrier member has been described above, the present disclosure is not limited thereto, and it should be understood by those of ordinary skill in the art that a general coreless substrate can be used.

模組 Module

第42圖為圖示模組500的實例之剖視圖,而且將不再重複相同或相應元件的任何多餘描述。 Figure 42 is a cross-sectional view showing an example of a module 500, and any redundant description of the same or corresponding elements will not be repeated.

參照第42圖,模組500包括被形成在絕緣層511之任一表面上的第一金屬層521和第二金屬層522、通孔527、溝槽518、被形成在溝槽518中的熱傳結構525、及被安裝在焊料凸塊531上的元件550,焊料凸塊531被夾置在元件550與通孔527和熱傳結構525之間。 Referring to FIG. 42, the module 500 includes a first metal layer 521 and a second metal layer 522 formed on either surface of the insulating layer 511, a via 527, a trench 518, and heat formed in the trench 518. Transmission structure 525, and element 550 mounted on solder bump 531, solder bump 531 is sandwiched between element 550 and via 527 and heat transfer structure 525.

通孔527是常被形成用於電路圖案的層間電連接的訊號器。 The via 527 is a signal that is often formed for interlayer electrical connection of circuit patterns.

熱傳結構525被形成為具有比通孔527更大的體積。 The heat transfer structure 525 is formed to have a larger volume than the through hole 527.

熱傳結構525是由複數個芯520和外層523所構成,外層523圍繞芯520的外表面。 The heat transfer structure 525 is comprised of a plurality of cores 520 and an outer layer 523 that surrounds the outer surface of the core 520.

元件550可以是散熱元件,例如一般的積體電路(IC)晶片,或者可以不限於任何電子組件,只要可以被安裝或嵌入印刷電路板即可。 Element 550 can be a heat dissipating component, such as a general integrated circuit (IC) wafer, or can be without limitation to any electronic component, as long as it can be mounted or embedded in a printed circuit board.

絕緣層511上可以形成有阻焊層,用於暴露連接墊並作為最外面的電路圖案的保護層。 A solder resist layer may be formed on the insulating layer 511 for exposing the connection pads and serving as a protective layer for the outermost circuit pattern.

依據本實例,由元件550產生的熱通過熱傳結構525被有效地從模組500排出。 In accordance with the present example, heat generated by element 550 is effectively exhausted from module 500 by heat transfer structure 525.

第43圖為圖示模組600之另一個實例的剖視圖,而且將不再重複相同或相應元件的任何多餘描述。 Figure 43 is a cross-sectional view showing another example of the module 600, and any redundant description of the same or corresponding elements will not be repeated.

參照第43圖,模組600包括被複數個絕緣層611電絕緣的複數個金屬層621、622、通孔627、溝槽618、及被形成在溝槽618中的熱傳結構625,複數個絕緣層611被夾置在複數個金屬層621、622之間。 Referring to FIG. 43, the module 600 includes a plurality of metal layers 621, 622 electrically insulated by a plurality of insulating layers 611, vias 627, trenches 618, and heat transfer structures 625 formed in the trenches 618, a plurality of The insulating layer 611 is sandwiched between the plurality of metal layers 621, 622.

通孔627是常被形成用於電路圖案的層間電連接的訊號器。 The via 627 is a signal that is often formed for interlayer electrical connection of circuit patterns.

熱傳結構625被形成在溝槽618中穿透絕緣層611,並具有比通孔627更大的體積。 The heat transfer structure 625 is formed in the trench 618 to penetrate the insulating layer 611 and has a larger volume than the via 627.

熱傳結構625上安裝有元件650。元件650通過導線651連接到連接墊。 Element 650 is mounted on heat transfer structure 625. Element 650 is connected to the connection pad by wire 651.

熱傳結構625是由芯620和外層623所構成,外層623圍繞芯620的外表面。 The heat transfer structure 625 is comprised of a core 620 and an outer layer 623 that surrounds the outer surface of the core 620.

絕緣層611上形成有阻焊層630,用於暴露連接墊並作為最外面的電路圖案的保護層。 A solder resist layer 630 is formed on the insulating layer 611 for exposing the connection pads and serving as a protective layer for the outermost circuit pattern.

依據本實例,由元件650產生的熱通過熱傳結構650被有效地從模組600排出。 According to the present example, heat generated by element 650 is effectively exhausted from module 600 through heat transfer structure 650.

第44圖為圖示模組之另一個實例的剖視圖,而且將不再重複相同或相應元件的任何多餘描述。 Figure 44 is a cross-sectional view of another example of the illustrated module, and any redundant description of the same or corresponding elements will not be repeated.

參照第44圖,上面安裝有元件750的印刷電路板400藉由外部連接端子732、733被安裝在主機板770上。 Referring to Fig. 44, the printed circuit board 400 on which the component 750 is mounted is mounted on the motherboard 770 by external connection terminals 732, 733.

該元件藉由使用焊料凸塊731作為連接器被安裝在印刷電路板400上。 The component is mounted on the printed circuit board 400 by using solder bumps 731 as connectors.

印刷電路板400被形成有被複數個絕緣層411電絕緣的複數個金屬層421、422、通孔427、溝槽418、及被形成在溝槽418中的熱傳結構425,複數個絕緣層411被夾置在複數個金屬層421、422之間。 The printed circuit board 400 is formed with a plurality of metal layers 421, 422 electrically insulated by a plurality of insulating layers 411, vias 427, trenches 418, and heat transfer structures 425 formed in the trenches 418, a plurality of insulating layers 411 is sandwiched between a plurality of metal layers 421, 422.

通孔427是常被形成用於電路圖案的層間電連接的訊號器。 The vias 427 are signals that are often formed for interlayer electrical connection of circuit patterns.

熱傳結構425被形成在溝槽418中穿透絕緣層411,並具有比通孔427更大的體積。 The heat transfer structure 425 is formed in the trench 418 to penetrate the insulating layer 411 and has a larger volume than the via 427.

熱傳結構425具有被在印刷電路板400的垂直方向上層疊和連接的層疊形式。 The heat transfer structure 425 has a stacked form that is stacked and connected in the vertical direction of the printed circuit board 400.

熱傳結構425是由芯420和外層423所構成,外層423圍繞芯420的外表面。 The heat transfer structure 425 is comprised of a core 420 and an outer layer 423 that surrounds the outer surface of the core 420.

依據本實例,由元件750產生的熱通過嵌入印刷電路板400的積層形式熱傳結構425移到印刷電路板400的下側,並於最終通過主機板770位移到外側。 According to the present example, the heat generated by the component 750 is transferred to the underside of the printed circuit board 400 by the build-up heat transfer structure 425 embedded in the printed circuit board 400, and is eventually displaced to the outside through the motherboard 770.

雖然本揭示包括具體的實例,但所屬技術領域中具有通常知識者將顯而易見的是,可以在不偏離申請專利範圍及其均等物之精神和範圍下在這些實例中進行各種形式和細節上的變化。本文中描述的實例將只被視為描述的意義,並非用於限制的目的。每個實例中的特徵或態樣之描述將被視為可應用於其他實例中的類似特徵或態樣。假使所描述的技術被以不同的順序執行、及/或假使在描述的系統、架構、元件、或電路中的組件被以不同的方式組合、及/或由其他組件或均等物取代或補充,則可以實現適當的結果。因此,本揭示的範圍不是由實施方式、而是由申請專利範圍及其均等物界定,而且申請專利範圍及其均等物之範圍內的所有變化都將被解讀為被包括在揭示內容中。 Although the present disclosure includes specific examples, it will be apparent to those skilled in the art that various changes in form and detail can be made in these examples without departing from the spirit and scope of the invention. . The examples described herein are to be considered as illustrative only and not for the purpose of limitation. Descriptions of features or aspects in each instance are considered to be applicable to similar features or aspects in other examples. In the case that the described techniques are performed in a different order, and/or that the components in the described systems, architecture, components, or circuits are combined in various ways, and/or replaced or supplemented by other components or equivalents, Then you can achieve the appropriate results. Therefore, the scope of the present disclosure is to be construed as being limited by the scope of the invention, and the scope of the claims and the equivalents thereof are to be construed as being included in the disclosure.

400‧‧‧印刷電路板 400‧‧‧Printed circuit board

411‧‧‧絕緣層 411‧‧‧Insulation

418‧‧‧溝槽 418‧‧‧ trench

420‧‧‧芯 420‧‧ core

421‧‧‧金屬層 421‧‧‧metal layer

422‧‧‧金屬層 422‧‧‧metal layer

423‧‧‧外層 423‧‧‧ outer layer

425‧‧‧熱傳結構 425‧‧‧heat transfer structure

427‧‧‧通孔 427‧‧‧through hole

Claims (22)

一種印刷電路板,包含:複數個絕緣層;分別被形成在該複數個絕緣層上的金屬層;一被形成用於該等金屬層之層間電連接的通孔;一穿透該等絕緣層的溝槽;以及一被形成在該溝槽中的熱傳結構。 A printed circuit board comprising: a plurality of insulating layers; metal layers respectively formed on the plurality of insulating layers; a via hole formed for interlayer electrical connection of the metal layers; and a penetrating the insulating layers a trench; and a heat transfer structure formed in the trench. 如請求項1所述之印刷電路板,其中該熱傳結構具有十字形。 The printed circuit board of claim 1, wherein the heat transfer structure has a cross shape. 如請求項1所述之印刷電路板,其中該熱傳結構被設置成被層疊在每一層中的形式。 A printed circuit board according to claim 1, wherein the heat transfer structure is provided in a form of being laminated in each layer. 如請求項1所述之印刷電路板,其中該熱傳結構係由至少一芯及一外層所構成,該外層包圍該至少一芯之外表面。 The printed circuit board of claim 1, wherein the heat transfer structure is formed by at least one core and an outer layer, the outer layer surrounding the outer surface of the at least one core. 如請求項4所述之印刷電路板,其中該至少一芯和該外層各包含至少一電鍍層。 The printed circuit board of claim 4, wherein the at least one core and the outer layer each comprise at least one plating layer. 如請求項1所述之印刷電路板,其中該熱傳結構具有比該通孔更大的體積。 The printed circuit board of claim 1, wherein the heat transfer structure has a larger volume than the through hole. 如請求項1所述之印刷電路板,其中該熱傳結構之一側面具有錐形形狀。 The printed circuit board of claim 1, wherein one side of the heat transfer structure has a tapered shape. 一種模組,包含:一印刷電路板,包含複數個絕緣層、分別被形成在 該複數個絕緣層上的金屬層、一被形成用於該等金屬層之層間電連接的通孔、一穿透該等絕緣層的溝槽、及一被形成在該溝槽中的熱傳結構;以及一被安裝在該印刷電路板上的元件。 A module comprising: a printed circuit board comprising a plurality of insulating layers, respectively formed in a metal layer on the plurality of insulating layers, a via hole formed to electrically connect the layers of the metal layers, a trench penetrating the insulating layers, and a heat transfer formed in the trench a structure; and an element mounted on the printed circuit board. 如請求項8所述之模組,其中該熱傳結構具有十字形。 The module of claim 8, wherein the heat transfer structure has a cross shape. 如請求項8所述之模組,其中該元件藉由與該熱傳結構熱連接而被安裝在該印刷電路板上。 The module of claim 8 wherein the component is mounted on the printed circuit board by thermal connection to the heat transfer structure. 如請求項8所述之模組,其中該熱傳結構被設置成被層疊在每一層中的形式。 The module of claim 8, wherein the heat transfer structure is configured to be stacked in each layer. 如請求項8所述之模組,其中該熱傳結構係由至少一芯及一外層所構成,該外層包圍該至少一芯之外表面。 The module of claim 8, wherein the heat transfer structure is formed by at least one core and an outer layer, the outer layer surrounding the outer surface of the at least one core. 一種模組,包含:一印刷電路板,包含複數個絕緣層、分別被形成在該複數個絕緣層上的金屬層、一被形成用於該等金屬層之層間電連接的通孔、一穿透該等絕緣層的溝槽、及一被形成在該溝槽中的熱傳結構;一被安裝在該印刷電路板上的元件;以及一主機板,上面安裝有該元件的印刷電路板被安裝在該主機板上。 A module comprising: a printed circuit board comprising a plurality of insulating layers, metal layers respectively formed on the plurality of insulating layers, a via hole formed for interlayer electrical connection of the metal layers, and a through a trench penetrating the insulating layers, and a heat transfer structure formed in the trench; an element mounted on the printed circuit board; and a motherboard on which the printed circuit board on which the component is mounted is Installed on this motherboard. 如請求項13所述之模組,其中該熱傳結 構具有十字形。 The module of claim 13, wherein the heat transfer is The structure has a cross shape. 如請求項13所述之模組,其中該元件藉由與該熱傳結構熱連接而被安裝在該印刷電路板上。 The module of claim 13 wherein the component is mounted on the printed circuit board by thermal connection to the heat transfer structure. 如請求項13所述之模組,其中該熱傳結構被設置成被層疊在每一層中的形式。 The module of claim 13, wherein the heat transfer structure is configured to be stacked in each layer. 如請求項13所述之模組,其中該熱傳結構係由至少一芯及一外層所構成,該外層包圍該至少一芯之外表面。 The module of claim 13 wherein the heat transfer structure is comprised of at least one core and an outer layer surrounding the outer surface of the at least one core. 一種製造一印刷電路板的方法,包含以下步驟:獲得一絕緣層;在該絕緣層中形成一通孔和一溝槽;在該溝槽中形成一熱傳結構;以及在該絕緣層上形成一金屬層。 A method of manufacturing a printed circuit board comprising the steps of: obtaining an insulating layer; forming a via hole and a trench in the insulating layer; forming a heat transfer structure in the trench; and forming a heat on the insulating layer Metal layer. 如請求項18所述之方法,其中重複數次請求項18的步驟,以及其中該熱傳結構被設置成被層疊在每一層中的形式。 The method of claim 18, wherein the steps of requesting item 18 are repeated a number of times, and wherein the heat transfer structure is arranged to be stacked in each layer. 如請求項18所述之方法,其中一通孔和一十字形開口被形成在該絕緣層中,而且該通孔係藉由在該通孔和該開口中填充一第一電鍍層所形成,其中該溝槽被形成在該絕緣層中,使得被填充在該 開口中的該第一電鍍層之外表面暴露出,以及其中該熱傳結構係藉由在該溝槽中填充一第二電鍍層所形成。 The method of claim 18, wherein a through hole and a cross-shaped opening are formed in the insulating layer, and the through hole is formed by filling a first plating layer in the through hole and the opening, wherein The trench is formed in the insulating layer such that it is filled in the An outer surface of the first plating layer in the opening is exposed, and wherein the heat transfer structure is formed by filling a second plating layer in the trench. 如請求項18所述之方法,其中形成一十字形的用於芯的圖案,並且該絕緣層的層疊方式使得該用於芯的圖案被嵌入其中,其中一通孔被形成在該絕緣層中,並且該通孔係藉由在該通孔中填充一第一電鍍層所形成,其中該溝槽被以十字形形成在該絕緣層中,使得該用於芯的圖案之一外表面暴露出,以及其中該熱傳結構係藉由在該溝槽中填充一第二電鍍層所形成。 The method of claim 18, wherein a cross-shaped pattern for the core is formed, and the insulating layer is laminated in such a manner that the pattern for the core is embedded therein, wherein a through hole is formed in the insulating layer, And the through hole is formed by filling a first plating layer in the through hole, wherein the groove is formed in the insulating layer in a cross shape, so that an outer surface of the pattern for the core is exposed, And wherein the heat transfer structure is formed by filling a trench with a second plating layer. 如請求項18所述之方法,其中一通孔和一十字形溝槽被形成在該絕緣層中,以及其中該通孔、該熱傳結構及該金屬層分別藉由在該通孔中、在該溝槽內、及在該絕緣層上形成兩層或更多層的圖案化電鍍層而形成。 The method of claim 18, wherein a through hole and a cross-shaped groove are formed in the insulating layer, and wherein the through hole, the heat transfer structure and the metal layer are respectively in the through hole A trench is formed in the trench and on the insulating layer by forming two or more patterned plating layers.
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