TWI576299B - To attract the disk and have its transfer device - Google Patents

Description

Attracting the tray and the transfer device with it

The present invention relates to a suction tray for ejecting compressed gas and sucking and holding a workpiece by a Bernoulli effect.

In order to transfer a solar cell wafer and a fuel cell unit, or a thin flat workpiece (thin sheet workpiece) such as an electrode or a separator of a secondary battery, the non-contact conveying device that holds the workpiece in a non-contact manner is Be exploited.

Such a non-contact conveying device is configured such that the air is ejected at a high speed to cause a negative pressure of the Bernoulli effect, and the workpiece is attracted by the negative pressure. In the non-contact conveying device of the patent document 1, the air is ejected inside the hollow cylindrical swirling flow forming body (suction element), and a swirling flow is formed inside the swirling flow forming body. Since the swirling flow flows out from the swirling flow forming body to the high-speed flow, the end surface of the swirling flow forming body and the object to be conveyed (wafer) become a negative pressure. Therefore, the object to be transported is sucked by the swirling flow forming body, but since the swirling flow forming body and the object to be transported are layers in which air is formed, the object to be transported and the swirling flow forming body are held in a non-contact state. . So you can be carried The object is held by a non-contact attraction.

In another example of such a non-contact conveyance device, the applicant of the present invention proposed the attraction tray 80 shown in Fig. 13 (Japanese Patent Application No. 2011-94215). As shown in Fig. 13, the suction tray 80 is a main body 81 having a flat plate shape, and the lower surface of the main body 81 is an opposite surface 31 that faces the workpiece directly. In the opposing surface 31, the circular orifice-shaped discharge ports 41 are formed in parallel. Further, in the body 81, a plurality of vent holes 42 penetrating the body 81 in the thickness direction are formed.

One of the discharge ports 41 is enlarged as shown in Fig. 14. A nozzle 44 for discharging compressed air is formed inside each of the discharge ports 41. The nozzle 44 is formed by an elongated slit-shaped flow path. In this example, the nozzle 44 is formed in two for one discharge port 41. The two nozzles 44 are formed so as to be different from each other in phase 180°, and are formed in the wiring direction of the inner wall of the discharge port 41. One end of the nozzle 44 is open at the inner peripheral wall of the discharge port 41, and the other end is in communication with the connection hole 34.

In the body 81 of the suction tray 80, a supply path 83 communicating with the connection hole 34 is formed. This supply path 83 is provided corresponding to each nozzle 44. For example, in the suction tray 80 of Fig. 14, since two nozzles 44 are provided for one discharge port 41, two supply passages 83 are also provided.

The suction disk 80 having the above configuration is supplied with compressed air to the supply path 83, and the compressed air is made to flow into the nozzle 44 through the connection hole 34, and the compressed air is ejected from the nozzle 44 toward the inside of the discharge port 41. The air ejected from the nozzle 44 flows along the inner wall surface of the discharge port 41. After the movement, the discharge port 41 flows out at a high speed. Thereby, a negative pressure is generated between the opposing surface 31 of the suction tray 80 and the workpiece, and the workpiece can be sucked and held. Further, since the air that has flowed out of the discharge port 41 is quickly discharged through the exhaust hole 42, it is possible to prevent a decrease in the suction force caused by the accumulation of the air flow.

As shown in Fig. 15 and Fig. 16, the suction tray 80 is constructed by laminating a plurality of metal pallets 84 to 87. In the surface tray 84, a discharge port 41 is formed. In the nozzle holder 85, a nozzle 44 is formed. In the connection tray 86, a connection hole 34 is formed. In the distribution pallet 87, a supply path 83 is formed.

The discharge port 41, the nozzle 44, the connection hole 34, the supply path 83, the exhaust hole 42 and the like can be formed by etching or the like of the metal plates 84 to 87, and can be easily miniaturized. Intensive. In the suction tray 80 of Fig. 13, for example, the diameter of the discharge port 41 is 3 mm. In this way, since the discharge port 41 can be formed to be extremely small, as shown in Fig. 13, the discharge ports 41 can be formed in an array in a large number. Thereby, since the negative pressure can be uniformly dispersed between the opposing surface 31 and the workpiece, it is possible to prevent the vibration and deformation of the workpiece when the workpiece is sucked and held.

[Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent No. 3981241

Since the suction tray 80 of the conventional example shown in Fig. 13 and the like is formed by laminating metal pallets, it is necessary to join the metal pallets to each other. In order to join the laminated metal pallets to each other, diffusion bonding can be utilized.

However, in the suction tray 80 shown in Fig. 13 or the like, in order to sufficiently ensure the flow rate of the compressed air, the width of the supply path 83 is formed to have a sufficient width. When the metal pallets are diffusion-bonded to each other, it is necessary to apply pressure in the thickness direction thereof, but if the groove (or slit) having a wide width of the supply path 83 is formed on the metal pallet, the trench is interposed (or The slit is such that the pressure is not easily transmitted in the thickness direction. Therefore, even if the pallets 84 to 87 are to be integrally diffused and joined by all of the stacks, it is difficult to apply pressure in the portion of the supply path 83. Therefore, the joining of the metal pallets is insufficient in the portion of the supply passage 83, and there is a possibility that air leakage or the like occurs.

Here, when the suction tray 80 of the conventional example shown in Fig. 13 or the like is formed, the pallets 84 to 86 are overlapped and diffusion-bonded, and thereafter, the distribution tray on which the supply path 83 is formed is adhered by adhesion. 87 integration. As described above, in the suction tray 80 shown in FIG. 13 and the like, since all of the pallets 84 to 87 cannot be diffused and joined in a batch, labor and time are required to be consumed, and the manufacturing cost is increased.

According to the study by the inventors of the present invention, it has been found that by forming three or more nozzles 44 for one discharge port 41, the suction can be improved. The suction performance of the boring plate 80 (increased attraction force and reduced deformation of the workpiece during suction). However, in the configuration of Fig. 14, since the supply passages 83 are provided for the respective nozzles 44, the number of the nozzles 44 is increased, and the arrangement path of the supply passages 83 is complicated. Therefore, it is difficult or even impossible to increase the number of nozzles 44. Further, if the arrangement path of the supply path 83 is complicated, it is difficult to arrange the exhaust hole 42 at the most suitable position.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a suction tray in which a supply passage for compressed air for each nozzle is simply configured in a suction tray in which a plurality of metal pallets are stacked, and by one time The whole diffusion bonding can be integrated.

The problem to be solved by the present invention is as described above, and the means for solving the problem and the effects thereof will be described next.

According to the viewpoint of the present invention, a suction tray configured as follows can be provided. The suction tray is a flat body having a facing surface facing the workpiece. In the main body, a plurality of suction elements that eject gas from the opposite surface, a supply path that supplies the gas to each of the suction elements, and a plurality of vent holes that penetrate the body in the thickness direction are formed. Each of the suction elements includes a cylindrical space having a circular discharge opening that opens toward the opposite surface, and a plurality of nozzles that are open to the inner circumferential wall of the cylindrical space. The supply path includes a distribution path for distributing the gas toward each of the plurality of nozzles, and a supply path to the distribution path A common supply path to the aforementioned gases. Further, the suction element, the distribution path, and the common supply path are formed at positions different in the thickness direction of the main body.

That is, the gas is supplied to the distribution path from the common supply path, and the gas is distributed from the distribution path to each nozzle. Since the distribution of the gas in each nozzle is performed by the distribution path, the common supply path is only required to supply the gas to the distribution path. Therefore, the attraction element is that the arrangement path of the common supply path does not become complicated even if a plurality of nozzles are provided. Thereby, since the arrangement path of the common supply path can be simplistic, the degree of freedom in the overall layout arrangement can be improved.

The above-mentioned suction tray is preferably constructed as follows. That is, the supply passage includes a supply port and a first gas chamber. In the supply port, the gas is supplied. The first gas chamber is in communication with the distribution passage. The common supply path is provided across a plurality of the first gas chambers and is connected to the supply port. Further, the suction tray includes a first metal plate on which the supply port is formed, a second metal plate on which the common supply path is formed, and a third metal plate on which the first gas chamber is formed. .

Thereby, by supplying gas to one suction port, it is possible to supply the gas to the plurality of first gas chambers through the common supply path.

The above-mentioned suction tray is preferably constructed as follows. In other words, the common supply path is formed by an elongated slit formed by penetrating the second metal plate in the thickness direction. Further, the second metal pallet is formed by laminating a plurality of metal pallets.

From the viewpoint of sufficiently securing the flow path area of the common supply path, it is preferable to increase the size in the thickness direction of the common supply path. However, since it is difficult to form an elongated slit in a metal plate having a thickness, slits are formed in each of the plurality of metal plates as described above, and these are laminated to form a second metal plate. By forming the second metal supporting plate by laminating the metal supporting plates, the second metal supporting plate can be thickened, so that the thickness direction of the slit (common supply path) formed in the second metal supporting plate can be ensured. size of.

The above-mentioned suction tray is preferably constructed as follows. In other words, the common supply path is formed in the second metal plate by a plurality of elongated slits that are partitioned from each other. A part of the plurality of elongated slits is in direct communication with the supply port. On the other hand, the remaining portion of the plurality of elongated slits is indirectly communicated with the supply port through the first gas chamber.

By dividing the common supply path into a plurality of slits, the opening area of each slit can be reduced. Thereby, pressure is easily applied at the time of diffusion bonding, and the second metal plate is not easily deformed. The divided slits can communicate with each other through the first gas chamber. Thereby, gas can be supplied to each slit.

The above-mentioned suction tray is preferably constructed as follows. In other words, the suction tray includes a fourth metal pallet and a fifth metal pallet. In the fourth metal pallet, the aforementioned distribution path is formed. In the fifth metal plate, a second gas chamber is formed. The second gas chamber is provided corresponding to the plurality of nozzles provided in each of the suction elements, and the corresponding nozzle and the distribution path are communicated with each other.

According to this configuration, the gas supplied to the distribution path can be supplied to the respective nozzles through the second gas chamber.

The above-mentioned suction tray is preferably constructed as follows. In other words, the suction tray includes a sixth metal pallet and a seventh metal pallet. In the sixth metal pallet, a part of the cylindrical space is formed, and a plurality of nozzles that communicate with the cylindrical space are formed. In the seventh metal pallet, the discharge port is formed.

Gas can be ejected from the nozzle thus formed toward the inside of the cylindrical space.

In the suction tray described above, the first to seventh metal pallets are laminated in this order and then diffused and joined.

Thus, by one diffusion bonding, a plurality of metal pallets can be integrated to form a suction tray.

The above-mentioned suction tray is preferably constructed as follows. That is, the first gas chamber is a columnar space. The cylindrical gas spaces corresponding to the first gas chamber and the suction elements corresponding to the first gas chamber are disposed on the same axis. The distribution path includes an input unit and an individual supply path. The input unit is in communication with the first gas chamber. Each of the individual supply passages is provided separately for each of the plurality of nozzles provided in the suction element corresponding to the distribution path, and the corresponding nozzle and the input unit are communicated with each other. Further, the respective supply paths are radially arranged from the axial center.

In the above-described suction tray, the respective supply paths are equal in length and have an equivalent flow path sectional area.

In the above-mentioned attraction tray, each supply route is It is preferable that the aforementioned axis centers are arranged at equal intervals.

By configuring the distribution path in such a manner, the gas can be uniformly distributed to the plurality of nozzles.

In the suction tray described above, the cross-sectional area of the flow path of the individual supply passages is equivalent to the cross-sectional area of the flow passage of the nozzle, or is preferably larger.

Thereby, the flow rate of the gas supplied to each nozzle can be sufficiently ensured.

In the above-described suction tray, the discharge port, the nozzle, the distribution path, and the common supply path are preferably formed by etching on a corresponding metal plate.

By forming the discharge port, the nozzle, and the like by the processing by the etching as described above, it is easy to reduce the attraction element and it can be formed with high precision.

However, the discharge port, the nozzle, the distribution path, and the common supply path may be formed by machining the corresponding metal plate.

According to another aspect of the present invention, there is provided a transfer device comprising: the above-described suction tray, and a parallel mechanism capable of moving the suction tray in a predetermined range within three dimensions.

That is, by the parallel mechanism, the workpiece sucked and held by the suction chuck can be freely moved three-dimensionally (three-dimensionally).

C‧‧‧Axis

P1‧‧‧Installed surface

10‧‧‧Attraction

11‧‧‧Ontology

31‧‧‧ opposite

32‧‧‧Electric motor

33‧‧‧Rolling shaft

34‧‧‧Connection hole

35‧‧‧Supply Department

41‧‧‧Spray outlet

42‧‧‧ venting holes

44‧‧‧Nozzles

45‧‧‧Cylindrical space

46‧‧‧2nd gas chamber

47‧‧‧Common supply road

47a, 47b, 47c, 47d‧‧‧ slit

48‧‧‧1st gas chamber

51~57‧‧‧Metal pallet

60‧‧‧ Length direction divider

61‧‧‧Width direction divider

62‧‧‧Distribution road

63‧‧‧ Input Department

64‧‧‧individual supply routes

65‧‧‧Output Department

71‧‧‧Connectors

72‧‧‧Pipe

73‧‧‧Supply port

80‧‧‧Attraction

81‧‧‧Ontology

83‧‧‧Supply road

84‧‧‧Surface pallet

85‧‧‧Nozzle plate

86‧‧‧Connecting pallet

87‧‧‧Distribution pallet

90‧‧‧Workpiece

91‧‧‧Guide members

101‧‧‧Base section

104‧‧‧Electric motor

106‧‧‧arm

110‧‧‧ joints

114‧‧‧End pallet

Fig. 1 is a perspective view of a transfer robot according to an embodiment of the present invention.

[Fig. 2] A perspective view of a suction tray.

[Fig. 3] A perspective view showing the opposite surface side of the suction tray body.

[Fig. 4] A perspective view showing the attraction elements is enlarged.

[Fig. 5] An exploded perspective view of the main body of the suction tray.

[Fig. 6] A longitudinal sectional view of the main body of the suction tray.

[Fig. 7] A longitudinal sectional view showing the flow of compressed air.

[Fig. 8] An enlarged perspective view showing the vicinity of the attraction element is enlarged.

[Fig. 9] An exploded perspective view showing the vicinity of the attraction element from another angle.

[Fig. 10] An exploded perspective view showing the configuration of the common supply path.

[Fig. 11] (a) A plan view of the second metal pallet. (b) A plan view of the second metal plate of the comparative example.

[Fig. 12] A plan view showing an enlarged distribution path.

[Fig. 13] A perspective view of a suction tray of a conventional example.

[Fig. 14] A perspective view showing an attraction element of a suction tray of a conventional example is enlarged.

[Fig. 15] An exploded perspective view of a suction tray of a conventional example.

[Fig. 16] An exploded perspective view of a conventional example of attracting a disk from another angle.

Next, an embodiment of the present invention will be described with reference to the drawings. 1st The figure is a perspective view showing a transfer robot (transfer device) 1 including a suction tray 10 according to an embodiment of the present invention.

The transfer robot arm 1 is composed of a parallel mechanism robot arm. Specifically, the transfer robot 1 includes a base portion 101 and three arms 106, three electric motors 104, and one end plate 114.

In the upper portion of the base portion 101, a downwardly mounted surface P1 is formed. On the other hand, the upper surface of the frame for mounting the transfer robot arm 1 is a horizontally upward mounting surface. According to this configuration, by attaching the mounted surface P1 of the base portion 101 to the mounting surface of the frame, the transfer robot 1 can be suspended.

In the lower surface side of the base portion 101, the electric motor 104 is fixed in parallel in such a manner that the central portion of the base portion 101 in the plan view is centered at equal intervals in the circumferential direction. Each of the electric motors 104 is a reduction gear, and the base end portion of the arm 106 is fixed to each of the output shafts of the reduction gear.

A joint portion 110 composed of a ball joint is provided in a midway portion of each arm 106, and the arm 106 is bendable in the joint portion 110. The distal ends of the three arms 106 are connected to the one end plate 114 so as to be bendable and freely through the joint portion formed by the ball joint. Further, in the base portion 101, an electric motor 32 that is provided with the motor shaft facing downward is fixed. The end of the motor shaft of the electric motor 32 is connected to the end of the revolving shaft 33.

The other end of the revolving shaft 33 is a through end plate 114 protrudes downward from the lower surface of the end plate 114 and is rotatably supported by the end plate 114. Thereby, the rotation of the motor shaft can be transmitted to the lower side of the end plate 114. In the lower end portion of the revolving shaft 33, a suction tray (Bernoulli disk) 10 of the present embodiment is mounted.

By moving the robot arm 1 by the parallel mechanism configured as described above, by appropriately controlling the three electric motors 104, the end plate 114 (and the attraction) can be moved within the range of the stroke of the arm 106 and the revolving shaft 33. The disk 10) moves freely in three dimensions (three-dimensional space). Further, by appropriately controlling the electric motor 32, the suction tray 10 can be rotated around the vertical axis.

As shown in Fig. 2, the suction tray 10 is a main body 11 having a flat plate shape. In the body 11, there is a downward facing opposite face 31 opposite the workpiece 90. Further, a joint 71 and a pipe 72 are connected to a surface (the upper surface of the body 11) on the opposite side of the opposing surface 31. This pipe 72 is connected to a suitable source of compressed air (for example, a compressor) through a solenoid valve. The chuck 10 is sucked by the compressed air supplied from the compressed air source from the opposite surface 31 by a high speed, and a negative pressure is generated between the workpiece 90 and the opposite surface 31 by the Bernoulli effect, thereby the workpiece 90 is constructed by a non-contact attraction.

Further, at the edge of the body 11, a plurality of guide members 91 arranged at intervals with each other are fixed to surround the body 11. The guide member 91 has a lower end that is disposed to protrude downward from the lower surface (opposing surface 31) of the body 11. These guiding members 91 are kept in the suction When the workpiece 90 of the reticle 10 is transported, the workpiece 90 is restricted from moving in a direction parallel to the lower surface (opposing surface 31) of the body 11.

In the transfer robot 1 of the present embodiment, the compressed air is supplied to the suction tray 10 to suck and hold the workpiece 90. In this state, the electric motor 104 is appropriately controlled to hold the end plate 114 (and the workpiece 90 is attracted). The attraction tray 10) moves to the desired position. Further, the transfer robot 1 can rotate the suction tray 10 by appropriately driving the electric motor 32, and rotate the workpiece 90 sucked and held by the suction tray 10 in a substantially horizontal plane. Then, the robot arm 1 is transferred, and the workpiece 90 is placed at the desired position by blocking the supply of the compressed air to the suction tray 10 and releasing the suction and holding of the workpiece 90. As described above, in the transfer robot 1 of the present embodiment, the workpiece 90 can be sucked and held by the suction tray 10, and moved to the desired position.

The workpiece 90 used in the transfer robot 1 of the present embodiment is formed into a thin flat plate shape, and is particularly assumed to be a rectangular shape. Examples of the workpiece 90 may be, for example, a solar cell wafer, a unit of a fuel cell, an electrode of a secondary battery, a spacer, a germanium wafer, or the like, but are not limited thereto.

Next, the configuration of the attraction tray 10 of the present embodiment will be described in detail.

As described above, the suction tray 10 is a body 11 having a flat plate shape, and the lower surface thereof is a surface 31 facing the workpiece 90. As shown in Fig. 3, in the opposite surface 31 of the body 11, a plurality of circular discharge ports 41 are opened. Further, in the body 11 of the suction tray 10, a plurality of exhaust holes 42 penetrating the body 11 in the thickness direction are formed.

The plurality of discharge ports 41 correspond to one attraction element. The attraction elements provided in the suction tray 10 of the present embodiment are shown enlarged in FIG. As shown in FIG. 4, each of the attraction elements includes a cylindrical space 45 and a plurality of nozzles 44.

The cylindrical space 45 is a cylindrical space formed by the axis perpendicular to the opposing surface 31. The cylindrical space 45 is open on the opposite surface, and the opening portion is the aforementioned discharge port 41.

The plurality of nozzles 44 are each formed of an elongated flow path, and one end in the longitudinal direction is opened in the inner peripheral wall of the cylindrical space 45. Further, the other end of the nozzle 44 is a supply portion 35 to which compressed air is supplied.

In the suction tray 10 of the present embodiment, three nozzles 44 are provided for one attraction element. The three nozzles 44 have the same length and have an equivalent flow path sectional area. Further, the three nozzles 44 are formed so as to be 120° out of phase with each other centering on the axis of the cylindrical space 45. Therefore, the three nozzles 44 are opened at equal intervals in the circumferential direction with respect to the inner peripheral wall of the cylindrical space 45. Further, each nozzle 44 has a longitudinal direction that coincides with a wiring direction of the cylindrical space 45.

In the main body 11 of the suction tray 10, a supply path for supplying compressed air to the supplied portion 35 of each nozzle 44 is formed. By supplying compressed air from the supply path to the supplied portion 35, the compressed air flows into the cylindrical space 45 through the nozzle 44, flows along the inner peripheral wall of the cylindrical space 45, and then becomes high speed from the discharge port 41. Squirting out.

The state in which air is ejected from the discharge port 41 is indicated by a thick line arrow in Fig. 7. Since the air is ejected from the discharge port 41 formed on the opposite surface 31 at a high speed, the Bernoulli effect becomes a negative pressure between the opposing surface 31 and the workpiece 90. Therefore, although the workpiece 90 is attracted by the opposing surface 31, since the opposing surface 31 and the workpiece 90 are layers in which air is formed, the opposing surface 31 and the workpiece 90 are kept in a non-contact state. With the above configuration, the workpiece 90 can be held by non-contact suction.

Further, as shown in FIG. 7, the air that has flowed out from the discharge port 41 flows a predetermined distance between the opposing surface 31 and the workpiece 90, and is then quickly discharged toward the upper surface of the body 11 through the exhaust hole 42. Thereby, air stagnation between the opposing surface 31 and the workpiece 90 is prevented, and the fall of the attraction force and the deformation of the workpiece 90 and the vibration can be prevented.

In the suction tray 10 of the present embodiment, since each of the suction elements includes three nozzles 44, the air from the discharge port 41 can be made equaler than the suction tray 80 of Fig. 14 including only two nozzles 44. Spew out. As a result, the suction performance (increased attraction force and reduction in workpiece deformation during suction) can be improved as compared with the suction tray of FIG. 14 .

Next, the configuration of the attraction tray will be described in detail.

As shown in FIGS. 5 to 9, the main body 11 of the suction tray 10 is constructed by stacking a plurality of metal pallets in the thickness direction. Specifically, the main body 11 sequentially follows the seventh metal plate 57, the sixth metal plate 56, the fifth metal plate 55, and the fourth metal plate from the side closer to the workpiece 90 (lower side). 54. The third metal pallet 53, the second metal pallet 52, and the first metal pallet 51 are stacked.

In each of the metal plates 51, 52, 53, 54, 55, 56, and 57, a slit or a hole that serves as a flow path of the compressed air is formed. In the present embodiment, the slit or the hole is formed by etching the metal plate. As described above, since the flow path for forming the compressed air can be etched, the flow path can be formed thin (small), and the respective attracting elements can be made small and the array can be easily formed.

In the present embodiment, for example, the discharge port 41 has a diameter of 3 mm. Further, in the present embodiment, as shown in Fig. 3, a plurality of discharge ports 41 are formed in parallel in an array. As described above, since the suction tray 10 of the present embodiment is formed by a plurality of metal pallets, the flow of air can be formed by etching, so that the small suction elements can be formed in a plurality of arrays in parallel. . Thereby, since the generation of the negative pressure can be uniformly distributed between the opposing surface 31 and the workpiece 90, deformation and vibration of the workpiece 90 can be prevented when the workpiece 90 is sucked and held.

Specific examples of the material of the seven metal plates 51 to 57 can be selected from stainless steel, aluminum alloy, or titanium alloy. In the present embodiment, the main body 11 of the suction tray 10 is formed by diffusion bonding in a state in which all of the seven pallets 51 to 57 are overlapped. In order to provide the suction tray 10 having small deformation and good dimensional accuracy, it is preferable that all of the seven metal pallets 51 to 57 are made of the same material. This is because it is assumed that the dissimilar metal is diffusion-bonded, and deformation such as bending may occur due to residual deformation after bonding. In the present embodiment, the materials of the seven pallets 51 to 57 are each made of stainless steel.

The attraction element is formed on the seventh metal plate 57 and The sixth metal pallet 56. First, the configuration of the seventh metal pallet 57 and the sixth metal pallet 56 will be described.

The cylindrical space 45 is formed in the seventh metal plate 57 and the sixth metal plate 56. The cylindrical space 45 is formed by a circular hole penetrating the seventh metal plate 57 and the sixth metal 56 in the thickness direction. Further, the cylindrical space 45 is not formed in the fifth metal plate 55. That is, the end portion (the upper end portion) of one side of the cylindrical space 45 is sealed by the fifth metal plate 55 in the thickness direction of the suction tray 10. On the other hand, the other end portion (the lower end portion) of the cylindrical space 45 is opened on the lower surface (opposing surface 31) of the seventh metal plate 57 to form the discharge port 41.

In the sixth metal plate 56, a part of the aforementioned cylindrical space 45 is formed. Further, in the sixth metal plate 56, as shown in Fig. 9, a nozzle 44 connected to the cylindrical space 45 is formed. As shown in Fig. 9, each of the nozzles 44 is formed in a sixth metal plate 56 by an elongated slit. Further, each of the nozzles 44 is formed by penetrating the sixth metal plate 56 in the thickness direction. A supply portion 35 is formed at an end of each nozzle 44. As shown in Fig. 9, the supplied portion 35 is formed by a circular hole penetrating the sixth metal plate 56 in the thickness direction. The end of each nozzle 44 is connected to the corresponding supplied portion 35.

Further, in the cross-sectional view of Fig. 6, the two suction nozzles are formed so as to face each of the suction elements in the same cross section. However, this is merely convenient for display. As described above, since the nozzles 44 are formed to be 120 degrees out of phase with each other, the nozzle 44 is not actually The cross-sectional views as shown in Fig. 6 are formed in the same plane.

Next, a configuration for supplying compressed air to each of the suction elements will be described.

In the main body 11 of the suction tray 10 of the present embodiment, a supply path for supplying compressed air to each of the suction elements is formed. This supply path is formed on the first to fifth metal pallets 51, 52, 53, 54, and 55.

As shown in FIGS. 5 and 10, a plurality of supply ports 73 are formed in the first metal plate 51. As shown in Fig. 10, each of the supply ports 73 is formed by a circular hole penetrating the first metal plate 51 in the thickness direction. Further, as shown in Fig. 6, in the supply port 73, the joint 71 for supplying compressed air can be connected. Specifically, the male screw is machined at the joint portion of the joint 71, the female thread is machined in the round hole of the supply port 73, and the joint 71 is appropriately connected to the supply port 73. Thereby, the compressed air from the compressed air source (compressor or the like) described above is supplied to the supply port 73.

In the third metal plate 53, a first gas chamber 48 is formed. As shown in Fig. 8, the first gas chamber 48 is formed by a circular hole penetrating the third metal plate 53 in the thickness direction. The first gas chamber 48 is provided one for each attraction element. Further, each of the first gas chambers 48 is disposed such that the cylindrical space 45 and the axial center of the corresponding attraction elements are aligned (on the same axis).

In the second metal pallet 52, a plurality of common supply passages 47 are formed. As shown in Fig. 10, each of the common supply passages 47 is formed in the second metal bracket 52 by an elongated slit. And, the common supply path 47 is The second metal plate 52 is formed to penetrate the thickness direction. Each of the common supply passages 47 is provided corresponding to each of the supply ports 73, and communicates with the corresponding supply port 73. Further, as shown in FIG. 10, the common supply path 47 is disposed across the plurality of (four in the case of the present embodiment) first gas chambers 48, and communicates with the plurality of first gas chambers 48. With the above configuration, the compressed air supplied to the supply port 73 is supplied to the plurality of first gas chambers 48 through the common supply path 47.

Further, in the present embodiment, since the plurality of first gas chambers 48 are formed across the common supply path 47, the common supply path 47 has a certain length. When the common supply path 47 is formed of one slit as shown in FIG. 11(b), the length of the slit (common supply path) formed in the second metal plate 52 is lengthened, so that the length is long. The rigidity of the second metal plate 52 is lowered, and the second metal plate 52 is easily deformed during the diffusion bonding.

In the present embodiment, as shown in Fig. 11(a), a longitudinal direction partition portion 60 that partitions the common supply path 47 by a plurality of longitudinal directions is provided. Thereby, the common supply path 47 is constituted by a plurality of slits which are arranged in the longitudinal direction. As shown in Fig. 6 and Fig. 11(a), the common supply path 47 of the present embodiment is constituted by four slits 47a, 47b, 47c, and 47d which are juxtaposed in the longitudinal direction. Thus, by dividing the common supply path 47 into a plurality of slits in the longitudinal direction, the length of each slit can be shortened. Thereby, since the rigidity of the second metal plate 52 can be prevented from being lowered, the second metal plate 52 is less likely to be deformed during the diffusion bonding, so that the diffusion bonding can be performed with high precision.

Further, since the common supply path 47 is formed by dividing into a plurality of slits, the slits do not directly communicate with each other. Therefore, in order to expand the compressed air to the entire length of the common supply path 47, it is necessary to further connect the slits constituting the common supply path 47 to each other.

In the present embodiment, as shown in Fig. 6, the longitudinal direction partition portion 60 is provided corresponding to the supply port 73 or the first body chamber 48. Specifically, the longitudinal direction partition portion 60 is disposed such that the supply port 73 or the first gas chamber 48 overlaps in the thickness direction, and the width of the longitudinal direction partition portion 60 (in the longitudinal direction of the common supply path 47) The dimension of the longitudinal direction partition 60 is smaller than the diameter of the corresponding supply port 73 or the first gas chamber 48. According to the above configuration, the slits adjacent to each other in the longitudinal direction can be indirectly communicated with each other through the supply port 73 or the first gas chamber 48. Specifically, in the case of the sixth drawing, the slit 47b and the slit 47c are communicated through the supply port 73. The slit 47a and the slit 47b are indirectly communicated through the first gas chamber 48. Further, the slit 47c and the slit 47d are indirectly communicated through the first gas chamber 48.

According to the above configuration, the compressed air supplied from the supply port 73 can be expanded to the entire length of the common supply path 47. Specifically, it will be described with reference to Fig. 7. In the example of Fig. 7, among the four slits 47a, 47b, 47c, and 47d constituting the common supply path 47, the slit 47b and the slit 47c are in direct communication with the supply port 73. Therefore, the remaining slits 47a, 47d do not directly communicate with the supply port 73. The compressed air from the supply port 73 is first supplied to the slit 47b and the slit 47c. As shown in Fig. 7, the compressed air supplied to the slit 47b flows through the first gas chamber 48 and flows down into the longitudinal direction partition 60, and is supplied to the slit 47a. In the same manner, as shown in Fig. 7, the compressed air supplied to the slit 47c flows through the first gas chamber 48 and flows down into the longitudinal direction partition 60, and is supplied to the slit 47d.

As described above, since the compressed air supplied from the supply port 73 can be extended to the entire length of the common supply path 47, it can be provided in a plurality (four in the case of the present embodiment) provided in correspondence with the common supply path 47. The first gas chamber 48 supplies the compressed air.

In addition, as described above, the compressed air is supplied to the plurality of first gas chambers 48 by the one common supply passage 47. Therefore, in order to sufficiently ensure the supply flow rate of the compressed air, it is necessary to cut the flow path of the common supply passage 47. The area is greatly enlarged. In this case, it is considered that the common supply path 47 is formed to be wide in the width direction. However, when the width of the common supply path 47 is widened, when the metal plates 51 to 57 are overlapped and joined, the pressure is hard to be applied to the portion of the common supply path 47, and the bonding may be incomplete.

In the present embodiment, as shown in Fig. 11(a), a width direction partitioning portion 61 that partitions the common supply path 47 by a plurality of width directions is provided. Thereby, the common supply path 47 is constituted by a plurality of slits arranged in the width direction. As shown in Fig. 11(a), the common supply path 47 of the present embodiment is composed of two elongated slits which are parallel in parallel in the width direction. Thus, by dividing the common supply path 47 in the width direction By cutting into a plurality of slits, the flow rate of the entire common supply path 47 can be sufficiently ensured, and the width of each slit can be narrowed. Thereby, when the metal pallets 51 to 57 are overlap-welded and joined, it is easy to apply pressure to the portion of the common supply passage 47, and it is possible to prevent the joint from being incomplete.

However, in order to sufficiently ensure the flow rate of the compressed air, the size of the common supply passage 47 in the thickness direction is also preferably increased. In the present embodiment, as shown in FIG. 10, a plurality of metal sheets (two in the case of the present embodiment) are laminated to form a second metal holder 52. In each of the metal pallets, a common supply passage 47 having the same shape is formed. In this manner, since the thickness of the second metal supporting plate 52 can be increased by laminating a plurality of metal supporting plates to form the second metal supporting plate 52, the size of the common supply path 47 in the thickness direction can be increased. Thereby, since the cross-sectional area of the flow path of the common supply path 47 can be sufficiently increased, the flow rate of the compressed air can be sufficiently ensured.

Each of the metal pallets constituting the second metal pallet 52 is integrated by diffusion bonding, and a single second metal pallet 52 may be used. However, in this case, it is necessary to overlap the metal pallets to form the diffusion bonding for the second metal pallet 52, and to overlap the first to seventh metal pallets 51, 52, 53, 54, 55, 56, and 57. On the other hand, diffusion bonding for attracting the disk 10 was formed, and diffusion bonding was performed twice. Here, when it is not necessary to use one of the second metal pallets 52, the plurality of metal pallets constituting the second metal pallet 52 and the first metal pallet 51 and the third to seventh metal pallets are not required. It is preferred that the 53, 56, 55, 56, 57 overlap diffusion bonding together. Thereby, the suction tray can be formed by one diffusion bonding. 10.

Further, in the present embodiment, the thickness of the second metal supporting plate 52 is increased by overlapping a plurality of metal supporting plates, but it is also considered that the second metal supporting plate 52 is enlarged by a single metal supporting plate. The method of the thickness of the single metal pallet itself. However, in the case where the metal plate has a thickness, it is difficult to form the elongated slit-shaped common supply path 47 penetrating the metal plate by the etching precision.

In the present embodiment, since the plurality of metal pallets are stacked to form the second metal pallet 52, the thickness is not required in each of the metal pallets. Therefore, the thickness of each metal plate may be a thickness that can be formed by the common supply path 47 by etching precision. Thereby, the common supply path 47 can be formed with high precision, and the size of the common supply path 47 in the thickness direction can be sufficiently increased by stacking a plurality of metal plates.

As shown in Fig. 9, a distribution path 62 is formed in the fourth metal plate 54. The distribution path 62 is provided corresponding to each of the first gas chambers 48. As shown in FIGS. 9 and 12, the distribution path 62 includes an input unit 63, an individual supply path 64, and an output unit 65.

The input portion 63 is constituted by a circular hole that penetrates the fourth metal plate 54 in the thickness direction. Further, the input unit 63 is disposed such that the corresponding first gas chamber 48 and the axis are aligned, and communicates with the first gas chamber 48. Further, the diameter of the input portion 63 having a circular hole shape and the diameter of the first gas chamber 48 are made uniform. Thereby, the input unit 63 and the first gas chamber 48 communicate with each other to form a columnar space.

As shown in FIG. 9, the individual supply path 64 is formed in the fourth metal plate 54 by an elongated slit-shaped flow path. Further, the individual supply path 64 is formed to penetrate the fourth metal plate in the thickness direction. The individual supply path 64 is for distributing compressed air to the plurality of nozzles 44 provided in each of the suction elements, and is provided corresponding to each of the nozzles 44. In the present embodiment, since one suction element includes three nozzles 44, each of the distribution paths 62 also includes three individual supply paths 64.

As shown in Fig. 12, the plurality of individual supply paths 64 included in the distribution path 62 are radially arranged from the axis of the input unit 63 (shown by symbol C in Fig. 12). Each of the individual supply paths 64 is of equal length and has an equivalent flow path sectional area. Further, as shown in Fig. 12, the plurality of individual supply paths 64 are arranged at equal intervals (equal angles) in the circumferential direction around the axis C of the input unit 63. For example, since each of the distribution paths 62 in the present embodiment includes three individual supply paths 64, the respective supply paths 64 are arranged at intervals of 120 degrees.

As described above, the plurality of individual supply paths 64 included in the distribution path 62 are formed under the same conditions. Thereby, the compressed air supplied to the input unit 63 can be equally distributed to the individual supply paths 64 of the plurality (three in the case of the present embodiment).

As shown in FIGS. 9 and 12, the one end side of each of the supply passages 64 is connected to the input unit 63, and the other end side is connected to the output unit 65. The output portion 65 is configured to penetrate a circular hole of the fourth metal plate 54 in the thickness direction. The output unit 65 is provided in each of the supply paths 64. Therefore, the distribution path 62 of the present embodiment includes three output units 65. each The output portions 65 are formed by the same diameter. Thereby, each of the output portions 65 has an equivalent space volume with each other.

In the fifth metal plate 55, a second gas chamber 46 is formed. As shown in Fig. 8, the second gas chamber 46 is formed by a circular hole penetrating the fifth metal plate 55 in the thickness direction. The second gas chamber 46 is disposed such that the end portion (the supplied portion 35) of the nozzle 44 of each attraction element and the output portion 65 of the distribution path 62 corresponding thereto are communicated with each other. The second gas chamber 46 is disposed such that the corresponding output portion 65 and the axis are aligned. Further, each of the second gas chambers 46 is formed by the same diameter. Thereby, each of the second gas chambers 46 has an equivalent space volume. Further, the second gas chamber 46 and the output portion 65 are formed by the same diameter. Thereby, the space on the column is formed by the communication portion 65 and the second gas chamber 46 communicating with each other.

As described above, the supplied portion 35 formed at the end of each nozzle 44 is constituted by a circular hole. Each of the supplied portions 35 is disposed such that the corresponding second gas chamber 46 and the output portion 65 are aligned with each other. Further, each of the supplied portions 35 is formed by the same diameter. Thereby, each of the supplied portions 35 has the same space volume with each other. Further, the diameter of the supplied portion 35 is formed to be smaller than the diameter of the second gas chamber 46 and the output portion 65.

As described above, the flow paths of the air from the respective supply paths 64 to the nozzles 44 are formed by the output unit 65, the second gas chamber 46, and the supplied portion 35. The three output portions 65, the three second gas chambers 46, and the three supplied portions 35 which are formed corresponding to the three nozzles 44 are formed by the same conditions (same space volume). That is, the flow paths of the air from the distribution path 62 to the respective nozzles 44 are in the same conditional form. to make. Thereby, the compressed air can be supplied equally to the three nozzles 44 provided in the attraction element. Thereby, since the compressed air can be uniformly discharged from the plurality of nozzles 44, the negative pressure can be uniformly generated in the vicinity of the center of the discharge port 41, and the compressed air can be uniformly discharged from the discharge port 41 toward the periphery thereof.

Further, the cross-sectional area of the flow path of each of the supply passages 64 is formed to be larger than the cross-sectional area of the flow path of each of the nozzles 44. Thereby, a compressed air of a sufficient flow rate can be supplied to each of the nozzles 44.

The flow of the compressed air in the suction tray 10 configured as described above will be briefly described below with reference to Fig. 7.

The compressed air generated by the compressed air source (compressor or the like) shown in the drawing is supplied to the supply port 73 of the main body 11 through the pipe 72 and the joint 71.

The compressed air supplied to the supply port 73 is supplied to a plurality of (four in the case of the present embodiment) first air chamber 48 through the common supply path 47.

The compressed air supplied to the first gas chamber 48 is supplied to the input portion 63 of the distribution path 62. This compressed air is an individual supply path 64 that is assigned to a plurality of (three in the case of the present embodiment). The compressed air distributed to the respective supply passages 64 is supplied to the corresponding second gas chamber 46 through the output portion 65 formed at the end of each of the supply passages 64.

The compressed air supplied to each of the second gas chambers 46 is supplied to the end of the nozzle 44 corresponding to each of the second gas chambers 46 (the supplied portion) 35). The compressed air supplied to the nozzle 44 is ejected toward the inside of the cylindrical space 45.

As described above, by compressing the compressed air supplied to the first gas chamber 48 by the distribution path 62 into a plurality (three in the case of the present embodiment), the compressed air can be supplied to the corresponding plurality of nozzles 44. Since the distribution of the compressed air to the respective nozzles 44 is performed by the distribution path 62, the distribution structure of the nozzles 44 is not required in the common supply path 47. Thereby, the arrangement path of the common supply path 47 can be simplified.

In this way, since the arrangement path of the common supply path 47 can be easily configured, the degree of freedom in arrangement of the exhaust holes 42 can be improved. In other words, since the exhaust hole 42 is formed by penetrating the body 11 in the thickness direction, it is necessary to form the flow path of the air formed in each of the metal plates. Therefore, assuming that the common supply path 47 is densely packed, the position at which the exhaust hole 42 can be formed is limited, and the degree of freedom in arrangement of the exhaust hole 42 is lowered. In this regard, according to the configuration of the present embodiment, since the common supply path 47 can be simply configured, the degree of freedom in the layout of the exhaust holes 42 can be improved. Thereby, since the exhaust hole 42 can be disposed at the most suitable position, the air between the opposing surface 31 and the workpiece 90 can be efficiently discharged. Thereby, it is possible to prevent a decrease in the attractive force and to improve the suction efficiency of the suction tray 10.

As described above, the suction tray 10 of the present embodiment is provided with a flat body 11 having a facing surface 31 facing the workpiece 90. In the main body 11, a plurality of suction elements that eject air from the opposite surface 31 and a supply of compressed air to each of the suction elements are formed. The path and the plurality of vent holes 42 of the body 11 are penetrated in the thickness direction. Each of the suction elements includes a cylindrical space 45 having a circular discharge port 41 that opens toward the opposing surface 31, and a plurality of nozzles 44 that are open to the inner peripheral wall of the cylindrical space 45. The supply path includes a distribution path 62 that distributes compressed air to each of the plurality of nozzles 44, and a common supply path 47 that supplies compressed air to the distribution path 62. Further, the attraction element, the distribution path 62, and the common supply path 47 are formed of metal plates different from each other.

That is, compressed air is supplied to the distribution path 62 from the common supply path 47, and compressed air is distributed to the respective nozzles 44 from the distribution path 62. Since the distribution of the compressed air for each nozzle is performed by the distribution path 62, the common supply path 47 only needs to supply compressed air to the distribution path 62. Therefore, even if the suction element has a plurality of nozzles 44, the arrangement path of the common supply path 47 does not become complicated. Thereby, since the arrangement path of the common supply path 47 can be simplified, the degree of freedom in the overall layout arrangement can be improved.

Further, in the suction tray 10 of the present embodiment, the supply path includes the supply port 73 and the first gas chamber 48. In the supply port 73, compressed air is supplied. The first gas chamber 48 is in communication with the distribution path 62. The common supply path 47 is provided across the plurality of first gas chambers 48 and is connected to the supply port 73. Further, the suction tray 10 includes a first metal plate 51 on which the supply port 73 is formed, a second metal plate 52 on which the common supply path 47 is formed, and a third gas chamber 48 in which the first gas chamber 48 is formed. Metal pallet 53.

Thereby, the pressure can be supplied to one supply port 73. The air is compressed, and the compressed air is supplied to the plurality of first gas chambers 48 through the common supply path 47.

Further, in the suction tray 10 of the present embodiment, the common supply path 47 is constituted by an elongated slit formed by penetrating the second metal plate 52 in the thickness direction. Further, the second metal pallet 52 is formed by laminating a plurality of metal pallets.

From the viewpoint of sufficiently securing the flow path area of the common supply path 47, it is preferable to increase the size in the thickness direction of the common supply path 47. However, since it is difficult to form an elongated slit in the metal plate having a thickness, slits are formed in each of the plurality of metal plates as described above, and these are laminated to form the second metal plate 52. Since the second metal pallet 52 can be thickened by laminating the metal pallets to form the second metal pallet 52, it is possible to ensure the thickness direction of the slit (common supply passage) formed in the second metal pallet. size of.

Further, the suction tray 10 of the present embodiment is configured as follows. In other words, the common supply path 47 is formed by forming a plurality of elongated slits that are partitioned from each other in the second metal plate 52. A part of the plurality of elongated slits is in direct communication with the supply port 73. On the other hand, the remaining portion of the plurality of elongated slits communicates with the indirect supply port 73 through the first gas chamber 48.

By dividing the common supply path 47 into a plurality of slits, the opening area of each slit can be reduced. Thereby, pressure is easily applied at the time of diffusion bonding, and the second metal plate 52 is not easily deformed. The divided slits can communicate with each other through the first gas chamber 48. Thus, for Each slit supplies compressed air.

Further, the suction tray 10 of the present embodiment includes a fourth metal holder 54 and a fifth metal holder 55. In the fourth metal plate 54, a distribution path 62 is formed. In the fifth metal plate 55, a second gas chamber 46 is formed. The second gas chamber 46 is provided corresponding to the plurality of nozzles 44 provided in the respective suction elements, and communicates the corresponding nozzles 44 and the distribution passages 62.

With this configuration, the compressed air supplied to the distribution path 62 can be supplied to the respective nozzles 44 through the second gas chamber 46.

Further, the suction tray of the present embodiment includes a sixth metal plate 56 and a seventh metal plate 57. In the sixth metal pallet 56, a part of the cylindrical space 45 is formed, and a plurality of the nozzles 44 communicating with the cylindrical space 45 are formed. In the seventh metal plate 57, a discharge port 41 is formed.

The compressed air can be ejected from the nozzle 44 thus formed toward the inside of the cylindrical space 45.

Further, in the suction tray 10 of the present embodiment, the first to seventh metal pallets 51, 52, 53, 54, 55, 56, and 57 are laminated in this order, and then diffused and joined.

By such a diffusion bonding, the plurality of metal pallets can be integrated to form the suction tray 10.

Further, in the suction tray 10 of the present embodiment, the first gas chamber 48 is a cylindrical space. The first gas chamber 48 and the columnar space 45 corresponding to the suction elements of the first gas chamber 48 are disposed on the same axis on. The distribution path 62 includes an input unit 63 and an individual supply path 64. The input unit 63 is in communication with the first gas chamber 48. The individual supply path 64 is provided for each of the plurality of nozzles 44 provided in the suction element corresponding to the distribution path 62, and the corresponding nozzle 44 and the input unit 63 are connected to each other. The input unit 63 is disposed on the same axis C as the first gas chamber 48. Further, the individual supply paths 64 are radially arranged from the axis C. Each of the individual supply paths 64 is of equal length and has an equivalent flow path sectional area. Further, the individual supply paths 64 are arranged at equal intervals around the axis C.

By thus configuring the distribution path 62, it is possible to uniformly distribute the compressed air to the plurality of nozzles 44.

Further, in the suction tray 10 of the present embodiment, the flow path sectional area of the individual supply path 64 is larger than the flow path sectional area of the nozzle 44.

Thereby, the flow rate of the gas supplied to each nozzle 44 can be sufficiently ensured.

Further, in the suction tray 10 of the present embodiment, the discharge port 41, the nozzle 44, the distribution path 62, and the common supply path 47 are formed by etching on the corresponding metal plate.

By forming the discharge port, the nozzle, and the like by the processing by the etching as described above, it is easy to reduce the attraction element and it can be formed with high precision.

Although the preferred embodiment of the present invention has been described above, the above configuration may be changed as follows, for example.

The suction tray 10 may be mounted on the transfer robot 1 of the parallel mechanism type as described above, but is not limited thereto, and is applied to an example. For example, a Selective Compliance Assembly Robot Arm type transfer robot can also be used.

In the above-described embodiment, the shape of the opposing surface 31 of the suction tray 10 is a rectangular shape, but the shape is not limited to this. However, the shape of the opposing surface 31 that attracts the disk 10 is configured to be substantially equal to the shape of the workpiece 90, and is configured to be somewhat larger than the workpiece, because the surface of the workpiece 90 can be attracted to the surface without waste. It is optimal for uniform action.

The number and arrangement of the discharge ports 41 formed on the opposing surface 31 may be appropriately changed in accordance with the weight, size, and the like of the workpiece 90.

In the above embodiment, the gas supplied to the attraction element is compressed air, but may be supplied with other gases such as nitrogen.

The number of the nozzles 44 provided in each of the attraction elements is not limited to three, and four or more nozzles may be used. However, each attraction element is a suction disk having a configuration of two nozzles 44 (for example, FIG. 14), and the configuration of the present invention can also be applied.

In the above embodiment, the slits and holes formed in the metal plate are formed through the metal plate. However, the nozzle 44, the common supply path 47, the distribution path 62, and the like may be partially formed, and the supply path 83 shown in Fig. 15 may be constituted by a groove-shaped flow path that does not penetrate the metal plate.

31‧‧‧ opposite

35‧‧‧Supply Department

41‧‧‧Spray outlet

44‧‧‧Nozzles

45‧‧‧Cylindrical space

46‧‧‧2nd gas chamber

47‧‧‧Common supply road

48‧‧‧1st gas chamber

51~57‧‧‧Metal pallet

60‧‧‧ Length direction divider

61‧‧‧Width direction divider

62‧‧‧Distribution road

63‧‧‧ Input Department

64‧‧‧individual supply routes

65‧‧‧Output Department

Claims (14)

A suction tray having a flat body having a facing surface facing the workpiece, wherein the main body is formed with a plurality of suction elements that eject gas from the opposite surface, and a supply of the gas to each of the suction elements And a plurality of vent holes that penetrate the body in a thickness direction, wherein each of the suction elements includes a cylindrical space having a circular discharge port that opens toward the opposite surface, and a discharge port at the discharge port a plurality of nozzles having an inner peripheral wall opening, wherein the supply path includes a distribution path that distributes the gas toward each of the plurality of nozzles, and a common supply path that supplies the gas to the distribution path, the suction element, the distribution path, and The common supply path is formed at a position in which the thickness direction of the main body is different. The suction supply tray according to the first aspect of the invention, wherein the supply passage includes a supply port through which the gas is supplied, and a first gas chamber that communicates with the distribution passage, wherein the common supply passage is Provided across a plurality of the first gas chambers, and connected to the supply port, the suction disk includes a first metal plate on which the supply port is formed, and A second metal plate in which the common supply path is formed and a third metal plate in which the first gas chamber is formed are formed. The suction tray according to the second aspect of the invention, wherein the common supply path is formed by an elongated slit formed by penetrating the second metal plate in a thickness direction, and the second metal plate is It is formed by laminating a plurality of metal pallets. The suction tray according to the second aspect of the invention, wherein the common supply path is formed by the plurality of elongated slits which are partitioned from each other on the second metal plate, among the plurality of elongated slits A part of the slit is directly in communication with the supply port, and the remaining portion of the plurality of elongated slits is indirectly communicated with the supply port through the first gas chamber. The suction tray according to the second aspect of the invention, further comprising: a fourth metal plate on which the distribution path is formed; and a plurality of nozzles provided in the respective suction elements, and the corresponding ones are formed The nozzle and the fifth metal plate of the second gas chamber that communicates with the distribution path. The suction tray according to claim 5, further comprising: a sixth metal plate on which a part of the cylindrical space is formed and a plurality of nozzles communicating with the cylindrical space are formed, and A seventh metal plate having the aforementioned discharge port is formed. The suction tray according to the sixth aspect of the invention, wherein the first metal pallet, the second metal pallet, the third metal pallet, the fourth metal pallet, and the fifth metal pallet The plate, the sixth metal plate, and the seventh metal plate are laminated in this order and then diffused and joined. The suction tray according to the second aspect of the invention, wherein the first gas chamber is a columnar space, and the first gas chamber and the cylindrical space corresponding to the suction element of the first gas chamber are It is disposed on the same axis, and the distribution path includes an input unit that communicates with the first gas chamber, and a plurality of nozzles that are provided in the suction element corresponding to the distribution path, and each of which is provided The individual supply passages through which the nozzle and the input unit communicate are disposed radially from the axial center. The attraction tray according to item 8 of the patent application scope, wherein the respective supply paths are equal in length and have an equivalent flow path sectional area. The suction tray according to item 8 of the patent application scope, wherein the respective supply paths are arranged at equal intervals around the axial center. The suction tray according to the eighth aspect of the invention, wherein the cross-sectional area of the flow path of the individual supply passage is a flow path with the nozzle The cross-sectional area is equivalent or larger. The suction tray according to claim 1, wherein the discharge port, the nozzle, the distribution path, and the common supply path are formed by etching on a corresponding metal plate. The suction tray according to the first aspect of the invention, wherein the discharge port, the nozzle, the distribution path, and the common supply path are formed by machining in a corresponding metal plate. A transfer device comprising: a suction tray according to claim 1; and a parallel mechanism capable of moving the suction tray in a predetermined range within 3 dimensions.