TWI561293B - - Google Patents

Info

Publication number
TWI561293B
TWI561293B TW101138609A TW101138609A TWI561293B TW I561293 B TWI561293 B TW I561293B TW 101138609 A TW101138609 A TW 101138609A TW 101138609 A TW101138609 A TW 101138609A TW I561293 B TWI561293 B TW I561293B
Authority
TW
Taiwan
Application number
TW101138609A
Other languages
Chinese (zh)
Other versions
TW201321072A (zh
Inventor
Kazuhiro Miyazawa
Kazunobu Shibuya
Makoto Sakane
Tetsuya Tomita
Original Assignee
Taiyo Nippon Sanso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Nippon Sanso Corp filed Critical Taiyo Nippon Sanso Corp
Publication of TW201321072A publication Critical patent/TW201321072A/zh
Application granted granted Critical
Publication of TWI561293B publication Critical patent/TWI561293B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/81—Solid phase processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B01D2253/1126—Metal hydrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Particles Using Liquids (AREA)
TW101138609A 2011-10-24 2012-10-19 含有鹵化物粒子的氣體之除害方法 TW201321072A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011232506A JP2013086088A (ja) 2011-10-24 2011-10-24 ハロゲン化物粒子を含むガスの除害方法

Publications (2)

Publication Number Publication Date
TW201321072A TW201321072A (zh) 2013-06-01
TWI561293B true TWI561293B (ja) 2016-12-11

Family

ID=48098764

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101138609A TW201321072A (zh) 2011-10-24 2012-10-19 含有鹵化物粒子的氣體之除害方法

Country Status (4)

Country Link
JP (1) JP2013086088A (ja)
KR (1) KR20130045196A (ja)
CN (1) CN103055692A (ja)
TW (1) TW201321072A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102035021B1 (ko) * 2013-09-24 2019-10-22 다이요 닛산 가부시키가이샤 유해 가스의 제해 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004073974A (ja) * 2002-08-14 2004-03-11 Sud-Chemie Catalysts Inc ハロゲンガス除去剤及びその製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
JPH03202128A (ja) * 1989-12-28 1991-09-03 Ebara Res Co Ltd Ｎｆ↓３の除害方法
JPH0716583B2 (ja) * 1990-08-10 1995-03-01 セントラル硝子株式会社 フッ化塩素を含む排ガスの乾式処理方法
JP3563758B2 (ja) * 1994-02-09 2004-09-08 住友精化株式会社 塩素含有ガスの処理方法
JP4210395B2 (ja) * 1999-08-10 2009-01-14 住友精化株式会社 ドライエッチング排ガス処理装置
JP3840877B2 (ja) * 2000-05-26 2006-11-01 昭和電工株式会社 ハロゲン系ガスの除害剤、除害方法及びその用途
JP2003326128A (ja) * 2002-05-09 2003-11-18 Ebara Corp ヒ素又はヒ素化合物を含む排ガスの処理方法及び装置
JP4498183B2 (ja) * 2005-03-23 2010-07-07 株式会社東芝 塩化水素ガス吸収材および塩化水素ガスの除去方法
JP2011143329A (ja) * 2010-01-12 2011-07-28 Central Glass Co Ltd 三フッ化塩素含有ガスの除害処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004073974A (ja) * 2002-08-14 2004-03-11 Sud-Chemie Catalysts Inc ハロゲンガス除去剤及びその製造方法

Also Published As

Publication number Publication date
JP2013086088A (ja) 2013-05-13
CN103055692A (zh) 2013-04-24
TW201321072A (zh) 2013-06-01
KR20130045196A (ko) 2013-05-03

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