TWI560517B - Device including light blocking layer and method of patterning the light blocking layer - Google Patents

Device including light blocking layer and method of patterning the light blocking layer

Info

Publication number
TWI560517B
TWI560517B TW104136566A TW104136566A TWI560517B TW I560517 B TWI560517 B TW I560517B TW 104136566 A TW104136566 A TW 104136566A TW 104136566 A TW104136566 A TW 104136566A TW I560517 B TWI560517 B TW I560517B
Authority
TW
Taiwan
Prior art keywords
blocking layer
light blocking
patterning
device including
including light
Prior art date
Application number
TW104136566A
Other languages
English (en)
Other versions
TW201632989A (zh
Inventor
Sang-Soo Kim
Jin-Hee Kang
Chan-Woo Kim
Ho-Jeong Paek
Bum-Jin Lee
Sung-Seo Cho
Original Assignee
Samsung Sdi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Sdi Co Ltd filed Critical Samsung Sdi Co Ltd
Publication of TW201632989A publication Critical patent/TW201632989A/zh
Application granted granted Critical
Publication of TWI560517B publication Critical patent/TWI560517B/zh

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/04Carbon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/04Oxygen-containing compounds
    • C08K5/10Esters; Ether-esters
    • C08K5/12Esters; Ether-esters of cyclic polycarboxylic acids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3412Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
    • C08K5/3432Six-membered rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3442Heterocyclic compounds having nitrogen in the ring having two nitrogen atoms in the ring
    • C08K5/3462Six-membered rings
    • C08K5/3465Six-membered rings condensed with carbocyclic rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L33/00Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L61/00Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
    • C08L61/04Condensation polymers of aldehydes or ketones with phenols only
    • C08L61/06Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2201/00Properties
    • C08L2201/08Stabilised against heat, light or radiation or oxydation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Materials For Photolithography (AREA)
  • Engineering & Computer Science (AREA)
  • Optical Filters (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
TW104136566A 2015-03-06 2015-11-06 Device including light blocking layer and method of patterning the light blocking layer TWI560517B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20150031650 2015-03-06
KR1020150128444A KR101916782B1 (ko) 2015-03-06 2015-09-10 차광막을 포함하는 디바이스 및 상기 차광막 패터닝 방법

Publications (2)

Publication Number Publication Date
TW201632989A TW201632989A (zh) 2016-09-16
TWI560517B true TWI560517B (en) 2016-12-01

Family

ID=57103003

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104136566A TWI560517B (en) 2015-03-06 2015-11-06 Device including light blocking layer and method of patterning the light blocking layer

Country Status (3)

Country Link
KR (1) KR101916782B1 (zh)
CN (1) CN105938208B (zh)
TW (1) TWI560517B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113816963B (zh) * 2021-09-15 2023-06-30 东莞澳中新材料科技股份有限公司 一种改性光产碱剂及其制备方法和应用其的光湿双固化聚氨酯热熔胶
KR20240073667A (ko) 2022-11-18 2024-05-27 덕산네오룩스 주식회사 벤조옥사졸계 공중합체 및 이를 포함하는 포지티브형 감광성 조성물
KR20240128262A (ko) 2023-02-17 2024-08-26 덕산네오룩스 주식회사 벤조옥사졸아미드계 하이브리드 공중합체 및 이를 포함하는 포지티브형 감광성 조성물

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784122A (ja) * 1993-07-23 1995-03-31 Toray Ind Inc カラーフィルタの製造方法
JP2015007766A (ja) * 2013-05-27 2015-01-15 富士フイルム株式会社 カラーフィルタの製造方法、下地層形成用組成物、有機el表示装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5907008A (en) * 1996-03-18 1999-05-25 Kabushiki Kaisha Toshiba Black coloring composition, high heat resistance light-shielding component, array substrate, liquid crystal and method of manufacturing array substrate
KR100481590B1 (ko) * 2000-04-21 2005-04-08 세이코 엡슨 가부시키가이샤 전기 광학 장치, 투사형 표시 장치 및 전기 광학 장치의제조 방법
JP2002244294A (ja) * 2001-02-20 2002-08-30 Nippon Zeon Co Ltd レジスト組成物及びレジストパターン形成方法
JP2007316366A (ja) * 2006-05-26 2007-12-06 Nippon Shokubai Co Ltd 偏光子保護フィルム、偏光板、および画像表示装置
JP5114348B2 (ja) * 2008-09-08 2013-01-09 日東電工株式会社 光拡散フィルムの製造方法
JP2010080687A (ja) * 2008-09-26 2010-04-08 Fujifilm Corp 遮光膜の形成方法及び固体撮像素子の製造方法
KR101113394B1 (ko) * 2009-12-17 2012-02-29 삼성모바일디스플레이주식회사 액정표시장치의 어레이 기판
JP5825895B2 (ja) * 2010-08-06 2015-12-02 株式会社半導体エネルギー研究所 液晶表示装置
JP5940259B2 (ja) * 2010-08-06 2016-06-29 三洋化成工業株式会社 感光性組成物
EP2660257B1 (en) * 2010-12-28 2018-09-19 Mitsubishi Gas Chemical Company, Inc. Aromatic hydrocarbon resin, composition for forming lithographic underlayer film, and method for forming multilayer resist pattern
JP6064360B2 (ja) * 2011-05-11 2017-01-25 Jsr株式会社 パターン形成方法及びレジスト下層膜形成用組成物
KR20140087645A (ko) * 2012-12-31 2014-07-09 제일모직주식회사 포지티브형 감광성 수지 조성물
KR20140087693A (ko) * 2012-12-31 2014-07-09 삼성디스플레이 주식회사 박막 트랜지스터, 이를 포함하는 박막 트랜지스터 표시판 및 그 제조 방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784122A (ja) * 1993-07-23 1995-03-31 Toray Ind Inc カラーフィルタの製造方法
JP2015007766A (ja) * 2013-05-27 2015-01-15 富士フイルム株式会社 カラーフィルタの製造方法、下地層形成用組成物、有機el表示装置

Also Published As

Publication number Publication date
KR20160108108A (ko) 2016-09-19
TW201632989A (zh) 2016-09-16
CN105938208A (zh) 2016-09-14
CN105938208B (zh) 2019-11-19
KR101916782B1 (ko) 2018-11-08

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