TWI536622B - 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 - Google Patents

具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 Download PDF

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Publication number
TWI536622B
TWI536622B TW101137740A TW101137740A TWI536622B TW I536622 B TWI536622 B TW I536622B TW 101137740 A TW101137740 A TW 101137740A TW 101137740 A TW101137740 A TW 101137740A TW I536622 B TWI536622 B TW I536622B
Authority
TW
Taiwan
Prior art keywords
vibrator
resonator
relative position
converter
position converter
Prior art date
Application number
TW101137740A
Other languages
English (en)
Chinese (zh)
Other versions
TW201330339A (zh
Inventor
理查 華特斯
保羅 史文森
Original Assignee
路梅戴尼科技公司
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Publication date
Application filed by 路梅戴尼科技公司 filed Critical 路梅戴尼科技公司
Publication of TW201330339A publication Critical patent/TW201330339A/zh
Application granted granted Critical
Publication of TWI536622B publication Critical patent/TWI536622B/zh

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H2009/02267—Driving or detection means having dimensions of atomic scale, e.g. involving electron transfer across vibration gap

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
TW101137740A 2011-10-19 2012-10-12 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 TWI536622B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/276,948 US8427249B1 (en) 2011-10-19 2011-10-19 Resonator with reduced acceleration sensitivity and phase noise using time domain switch

Publications (2)

Publication Number Publication Date
TW201330339A TW201330339A (zh) 2013-07-16
TWI536622B true TWI536622B (zh) 2016-06-01

Family

ID=48094842

Family Applications (2)

Application Number Title Priority Date Filing Date
TW105106318A TW201637251A (zh) 2011-10-19 2012-10-12 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器
TW101137740A TWI536622B (zh) 2011-10-19 2012-10-12 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW105106318A TW201637251A (zh) 2011-10-19 2012-10-12 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器

Country Status (5)

Country Link
US (1) US8427249B1 (OSRAM)
EP (1) EP2769467B8 (OSRAM)
JP (2) JP2014533009A (OSRAM)
TW (2) TW201637251A (OSRAM)
WO (1) WO2013058993A1 (OSRAM)

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US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
US20180031603A1 (en) * 2016-07-27 2018-02-01 Lumedyne Technologies Incorporated Systems and methods for detecting inertial parameters using a vibratory accelerometer with multiple degrees of freedom
US9977046B2 (en) 2016-08-08 2018-05-22 The United States Of America As Represented By The Secretary Of The Navy Pinch contact switch for determining bending surface states
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CN113111527A (zh) * 2021-04-20 2021-07-13 华北电力大学 一种单机水电系统切换型频率振荡的近似解析方法

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Also Published As

Publication number Publication date
EP2769467B8 (en) 2016-12-21
US8427249B1 (en) 2013-04-23
TW201637251A (zh) 2016-10-16
EP2769467A4 (en) 2015-04-22
JP2016154333A (ja) 2016-08-25
TW201330339A (zh) 2013-07-16
EP2769467A1 (en) 2014-08-27
JP2014533009A (ja) 2014-12-08
EP2769467B1 (en) 2016-09-28
WO2013058993A1 (en) 2013-04-25

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