TWI525407B - 用於自主學習和自主改進半導體製造工具之方法和系統 - Google Patents

用於自主學習和自主改進半導體製造工具之方法和系統 Download PDF

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TWI525407B
TWI525407B TW100103593A TW100103593A TWI525407B TW I525407 B TWI525407 B TW I525407B TW 100103593 A TW100103593 A TW 100103593A TW 100103593 A TW100103593 A TW 100103593A TW I525407 B TWI525407 B TW I525407B
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沙尹夫 卡奇爾
蘇克奇 珍巴哈尹 巴特爾
杉島健治
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東京威力科創股份有限公司
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TW100103593A 2010-01-29 2011-01-31 用於自主學習和自主改進半導體製造工具之方法和系統 TWI525407B (zh)

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US12/697,121 US8396582B2 (en) 2008-03-08 2010-01-29 Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool

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JP (1) JP5841071B2 (ja)
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TWI771835B (zh) * 2020-07-13 2022-07-21 旺宏電子股份有限公司 用於神經網路之推理引擎及其操作方法
TWI811629B (zh) * 2020-08-27 2023-08-11 日商鎧俠股份有限公司 半導體裝置之缺陷解析系統、半導體裝置之缺陷解析方法及半導體裝置之缺陷解析用程式
TWI825713B (zh) * 2022-05-10 2023-12-11 中華電信股份有限公司 用於感測裝置之分析設備、分析方法及電腦程式產品

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