TWI520785B - Intermittent coating apparatus and coating film forming system - Google Patents

Description

Batch coating device and coating film forming system

The present invention relates to a batch coating apparatus for intermittently coating a coating liquid from a nozzle toward a substrate, and a coating film forming system including the batch coating apparatus.

Conventionally, in the production of a chemical battery such as a lithium ion battery, a coating device that forms a coating film by ejecting a coating liquid of a relatively high-viscosity electrode material from a nozzle onto a metal foil as a substrate is used. Such a coating device has a batch coater that alternately forms an electrode material and alternately forms a coated region and a non-coated region (for example, Patent Document 1).

In the apparatus for intermittent coating disclosed in Patent Document 1, the coating liquid is intermittently ejected from a slit die having a minute slit-like discharge port. In this apparatus, a bleed path is provided from the liquid supply path branching of the self-coating liquid storage device to the slit mold, and intermittent coating is performed by repeating the switching path by the three-way valve. The coating liquid that flows into the bleed path during non-coating is returned to the coating liquid storage device.

Further, Patent Document 2 is disclosed as a technique related to the present invention.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-30193

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2011-83719

In the case of intermittent coating, it is important to accurately maintain the interval between the discharge port of the slit die and the substrate. The reason is that if the discharge port is changed with respect to the substrate, the coated region cannot be formed with high precision in a desired shape.

In addition, for example, when intermittent coating is performed by repeating the switching path by the three-way valve, since the switching of the path is accompanied by mechanical operation (opening and closing of the piping), the three-way valve generates vibration according to the switching. Further, if the vibration is transmitted to the discharge port, the interval between the discharge port and the substrate may vary. This is not the case as described above.

The present invention has been made in view of the above problems, and an object thereof is to provide a batch coating apparatus capable of reducing vibration transmitted from a switching device to a nozzle.

In order to solve the above problems, the invention of claim 1 is characterized in that it coats the coating liquid intermittently from the nozzle toward the substrate, and includes: a nozzle; a supply pipe connected to the nozzle, and the coating liquid is oriented The nozzle flows; the switching device intermittently ejects the coating liquid from the nozzle toward the substrate by repeatedly switching the opening and closing of the supply pipe; the nozzle base is mounted with the nozzle; and the switching device The susceptor is independent of the nozzle base and the switching device is placed.

Further, the invention of claim 2 further includes the nozzle moving device of the invention of claim 1, wherein the nozzle base moves to adjust a position of the nozzle relative to the substrate; and The moving device moves the switching device in the same direction as the direction in which the nozzle base moves by the nozzle moving device.

According to a third aspect of the invention, in the intermittent coating apparatus of the second aspect, the nozzle moving device moves the nozzle base in a horizontal direction, and the switching moving device can move the switching device to an arbitrary level. The direction is free to move, and the switching device is moved to the above by transmitting the movement of the nozzle through the supply pipe. Move in the same direction.

Further, the invention of claim 4 is characterized in that the intermittent coating apparatus according to any one of the first to third aspects further includes a vibration suppression device which is provided on the switching device base and suppresses The switching device transmits vibration to the nozzle.

Further, the invention of claim 5 includes: the batch coating device according to any one of claims 1 to 4; the drying device which is coated with the coating liquid by the above-described batch coating device The substrate is subjected to heat treatment to dry the coating liquid, and a transfer device that sequentially transports the substrate to the batch coating device and the drying device.

In the batch coating apparatus, the supply pipe between the nozzle and the switching device is set short. The purpose is to promptly switch the opening and closing of the supply pipe by the switching device to intermittent discharge (ie, discharge/stop) at the nozzle. Moreover, members that are disposed at close distances are typically placed on the base of the same individual.

On the other hand, according to the inventions of claims 1 and 5, the nozzles and the switching devices arranged at such a close distance are respectively placed on the nozzle base and the switching device base of the individual individuals. Since the switching of the opening and closing of the supply pipe by the switching device is accompanied by a mechanical change, vibration is generated, and in the present invention, the vibration is not easily transmitted to the nozzle via the susceptor. The vibration of the nozzle deteriorates the accuracy of the intermittent coating, and the present invention can suppress the deterioration of the accuracy of such intermittent coating.

According to the invention of claim 2, since the positional relationship between the nozzle and the switching device does not easily change, the stress generated in the supply pipe can be reduced. Especially in batch coating devices, the distance between the nozzle and the switching device is short. Thus, assuming that the position of the switching device is fixed, a relatively large stress is generated in the supply pipe accompanying the movement of the nozzle. Therefore, the invention of claim 2 which can reduce stress is particularly suitable for a batch coating device.

On the other hand, in the invention of claim 2, the switching device moves. Thereby, the relative position between the member on the upstream side (opposite side of the nozzle) of the switching device, for example, the storage device storing the coating liquid, and the switching device can be varied. However, from the viewpoint of improving the accuracy of the batch coating, the necessity of setting the length of the piping on the upstream side of the switching device to be short is low. Thereby, the length of the pipe can be set long. If the length of the pipe is set so long, the stress caused by the movement of the switching device is small, which is less likely to be a problem.

According to the invention of claim 3, switching the moving device allows the switching device to freely move in any horizontal direction, so that it is not necessary to perform the positional alignment of the switching moving device with respect to the nozzle moving device.

Further, when the position of the nozzle is fixed and intermittently applied, the switching device can be moved in the horizontal direction by its own switching operation, so that the vibration is not easily transmitted to the nozzle via the switching device base.

According to the invention of claim 4, the transmission of vibration can be further suppressed.

1‧‧·film formation system

5‧‧‧Substrate

10‧‧‧Intermittent coating device

11‧‧‧ Coating nozzle

11a‧‧‧Spray outlet

12‧‧‧Support roller

20‧‧‧ storage tank

30‧‧‧Supply piping

31‧‧‧ pump

32‧‧‧Switching device (supply valve)

33‧‧‧Filter

35‧‧‧ pressure gauge

36‧‧‧Syringe

37‧‧‧Supply piping

40‧‧‧Recycling piping

41‧‧‧Circulation valve

43‧‧‧Filter

50‧‧‧Nozzle base

51‧‧‧Nozzle moving device (moving mechanism for nozzle)

60‧‧‧Switching device base (valve base)

61‧‧‧Switching mobile device (moving mechanism for valve)

63‧‧‧Abutment

64‧‧‧Vibration suppression components

70‧‧‧Drying Department

80‧‧‧Transportation agency

81‧‧‧Rolling roll

82‧‧‧Winding roller

83‧‧‧Auxiliary roller

90‧‧‧Control Department

Fig. 1 is a view showing the overall configuration of a coating film forming system incorporating the batch coating apparatus of the present invention.

Fig. 2 is a view showing a schematic configuration of a batch coating apparatus of the present invention.

Fig. 3 is a perspective view showing a schematic configuration of a part of the batch coating apparatus of the present invention.

Fig. 4 is a perspective view showing a schematic configuration of a part of the batch coating apparatus of the present invention.

Fig. 5 is a view showing a schematic configuration of a part of the batch coating apparatus of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<Overall composition of coating film forming system>

Figure 1 is a view showing a coating film forming system 1 incorporating the batch coating apparatus of the present invention. The overall composition of the map. Furthermore, in FIG. 1 and the following drawings, the size or number of each part may be exaggerated or simplified as needed for easy understanding.

This coating film forming system 1 is a device which applies a coating liquid as an active material of an electrode material to a metal foil as a substrate, and performs drying treatment of the coating liquid to perform electrode production of a lithium ion secondary battery. The coating film forming system 1 includes a batch coating device 10, a drying unit 70, and a conveying mechanism 80. Further, the coating film forming system 1 includes a control unit 90 that manages the entire system.

The substrate 5 is a metal foil that functions as a current collector of a lithium ion secondary battery. In the case where the positive electrode of the lithium ion secondary battery is manufactured by the coating film forming system 1, for example, an aluminum foil (Al) can be used as the substrate 5. Further, in the case where the negative electrode is produced by the coating film forming system 1, for example, a copper foil (Cu) can be used as the substrate 5. The base material 5 is a long sheet metal foil, and the width and thickness thereof are not particularly limited, and may be, for example, a width of 600 mm to 700 mm and a thickness of 10 μm to 20 μm.

The long substrate 5 is fed from the take-up roll 81 and taken up by the take-up roll 82, and sequentially conveyed to the batch coating device 10 and the drying unit 70. The transport mechanism 80 includes the take-up rolls 81, the take-up rolls 82, and a plurality of auxiliary rolls 83. In addition, the number of the auxiliary rolls 83 and the arrangement position are not limited to the example of FIG. 1, and may be appropriately increased or decreased as needed.

The drying unit 70 performs a drying process of the coating film of the coating liquid formed on the substrate 5 by the batch coating device 10. The drying unit 70 heats the substrate 5 conveyed by the conveying mechanism 80, thereby evaporating the solvent from the coating liquid to perform drying treatment. The drying unit 70 may include, for example, a preheating portion that gradually raises the coating film of the coating liquid, a main drying portion that heats the coating film to a specific temperature to perform main heating, and heats the coating film to a higher temperature to remove the film. An annealing portion for strain or residual stress, a cooling portion for cooling the coating film after heating, and the like.

<Coating device>

Fig. 2 is a view showing a schematic configuration of a batch coating apparatus 10 of the present invention. The batch coating device 10 includes a coating nozzle 11, a storage tank 20, supply pipes 30, 37, and a circulation pipe 40 as main components. The storage tank 20 stores a solution of an active material as an electrode material of a lithium ion secondary battery as a coating liquid. In the case where the positive electrode is produced by the coating film forming system 1, the coating liquid as the positive electrode material stores, for example, lithium cobaltate (LiCoO ₂ ) as a positive electrode active material, carbon (C) as a conductive auxiliary agent, and a binder. A mixture of polyvinylidene fluoride (PVDF) and N-methyl-2-pyrrolidone (NMP) as a solvent. Lithium nickelate (LiNiO ₂ ), lithium manganate (LiMn ₂ O ₄ ), lithium iron phosphate (LiFePO ₄ ), or the like may be used as the positive electrode active material instead of lithium cobaltate.

On the other hand, in the case where the negative electrode is produced by the coating film forming system 1, the coating liquid as the negative electrode material is, for example, a graphite as a negative electrode active material, a PVDF as a binder, and a NMP as a solvent. The liquid is stored in the storage tank 20. Instead of graphite, hard carbon, lithium titanate (Li ₄ Ti ₅ O ₁₂ ), a ruthenium alloy, a tin alloy or the like may be used as the negative electrode active material. Further, in the positive electrode material and the negative electrode material, styrene-butadiene rubber (SBR) or the like may be used as the binder instead of PVDF, and water (H ₂ O) or the like may be used as the solvent instead of NMP. Further, when SBR is used as a binder and water is used as a solvent, carboxymethylcellulose (CMC) may be used in combination as a tackifier. The coating liquid of the positive electrode material and the negative electrode material is a slurry in which solid (fine particles) are dispersed, and the viscosity thereof is 1 Pa. Above s (Pascal seconds), usually with shaking.

A mixer, an air pressurizing unit, and the like may be attached to the storage tank 20. The mixer agitates the coating liquid stored in the storage tank 20 to homogenize the concentration distribution. The air pressurizing unit feeds the high pressure air into the gas phase portion in the storage tank 20 to pressurize the liquid level of the stored coating liquid.

The storage tank 20 and the coating nozzle 11 are connected in communication by the supply pipes 30 and 37. The supply pipe 37 supplies the coating liquid stored in the storage tank 20 toward the supply valve 32. The supply pipe 30 supplies the coating liquid from the supply valve 32 toward the coating nozzle 11. As the supply pipes 30 and 37, a stainless steel pipe or a resin pipe (including a soft pipe, the same applies hereinafter) can be used. A pump 31 is inserted in the middle of the path of the supply pipe 37, and a filter 33 and a syringe 36 are inserted in the middle of the path of the supply pipe 30. Moreover, the circulation piping 40 is provided in the middle of the path of the supply piping 37. Cycle matching The proximal end side of the tube 40 is connected to the supply pipe 37 at a position on the downstream side of the pump 31 (the side close to the coating nozzle 11), and the front end side is connected to the storage tank 20.

The pump 31 is disposed on the upstream side of the connection portion of the circulation pipe 40 (on the side closer to the storage tank 20), and is controlled by the control unit 90 to supply the coating hydraulic pressure of the electrode material stored in the storage tank 20 to the supply pipe. 37. The supply valve 32 is controlled by the control unit 90 to repeatedly open and close the flow path of the supply pipe 30. Thereby, the supply/stop of the coating liquid to the coating nozzle 11 is repeatedly switched. The filter 33 is interposed between the supply valve 32 and the supply pipe 30 at a connection point with the circulation pipe 40, and removes foreign matter from the coating liquid flowing toward the coating nozzle 11 in the supply pipe 30. The syringe 36 is disposed between the supply valve 32 and the coating nozzle 11. The syringe 36 is controlled by the control unit 90, and the coating liquid is drawn from the supply pipe 30 when the supply valve 32 is closed. Thereby, the coating liquid can be quickly stopped from being sprayed from the coating nozzle 11.

The coating nozzle 11 is a slit nozzle in which a slit-shaped discharge port 11a is provided along the width direction of the substrate 5. The coating nozzle 11 applies the transferred coating liquid from the discharge port 11a to the surface of the substrate 5 which is moved in a state of being supported by the backup roll 12 via the supply pipes 37 and 30. The coating nozzle 11 is provided with a nozzle moving mechanism 51 that adjusts the distance between the backup roller 12 and the discharge port 11a, and a posture adjusting mechanism (not shown) that defines a posture.

The front end side of the circulation pipe 40 which is provided in the middle of the path from the supply pipe 37 is connected to the storage tank 20. Similarly to the supply pipes 30 and 37, a stainless steel pipe or a resin pipe can be used as the circulation pipe 40. The circulation pipe 40 returns the coating liquid sent from the storage tank 20 and flowing in from the supply pipe 30 to the storage tank 20. A circulation valve 41 and a filter 43 are inserted into the circulation pipe 40. The circulation valve 41 is controlled by the control unit 90 to open and close the flow path of the circulation pipe 40. The filter 43 is disposed between the circulation valve 41 and the storage tank 20, and removes foreign matter from the coating liquid flowing from the circulation pipe 40 toward the storage tank 20.

When the circulation valve 41 is closed and the supply valve 32 is opened, the coating liquid sent from the storage tank 20 flows over the entire supply pipes 37 and 30 and is supplied to the coating nozzle 11.

On the other hand, if the supply valve 32 is closed and the circulation valve 41 is opened, the self-storage tank 20 is The supplied coating liquid flows into the supply pipe 37 and flows into the circulation pipe 40, and is again returned to the storage tank 20. In other words, the supply valve 32 is a switching device that intermittently switches the coating liquid fed from the storage device to the coating nozzle 11 via the supply pipe 30 as a switching device for intermittently ejecting the coating liquid from the coating nozzle 11. Play the function.

Further, the syringe 36 sucks the coating liquid from the supply pipe 30 in association with the closing of the supply valve 32. Thereby, the coating liquid of the discharge port 11a is sucked to the supply valve 32 side, and the dripping of the coating liquid is suppressed.

The timing of opening and closing of the supply valve 32 and the circulation valve 41 is appropriately controlled by the control unit 90, and the coating liquid is intermittently applied at a specific width of the substrate 5 at a specific position of the substrate 5 by repeatedly switching the opening and closing.

Further, in the example of Fig. 2, a pressure gauge 35 is attached. The pressure gauge 35 is provided in the supply pipe 37 at a position between the connection portion with the circulation pipe 40 and the pump 31, for example. The measured value measured by the pressure gauge 35 is output to the control unit 90. The control unit 90 can control the driving speed (rotation speed) of the pump 31 such that the pressure becomes a desired value.

In the batch coating apparatus, as described above, the intermittent control of the coating nozzle 11 provided at the front end of the supply pipe 30 is controlled by switching the supply valve 32 provided at the base end of the supply pipe 30. Coating. Further, when the supply valve 32 is closed, the syringe 36 draws in the coating liquid from the supply pipe 30, thereby rapidly stopping the discharge from the coating nozzle 11.

Thereby, the length of the piping of the supply piping 30 affects the responsiveness of the intermittent coating. The responsiveness herein refers to the responsiveness of the opening/closing of the supply valve 32 to the time when the coating liquid is ejected/stopped from the coating nozzle 11. The longer the length of the pipe, the lower the responsiveness. The reason for this is that the coating liquid flowing in the supply pipe 30 contains fine bubbles which act as a buffer, and it is difficult to draw in the coating liquid which dripped from the coating nozzle 11. Further, the longer the length of the pipe, the more fine bubbles are contained, so that it is less likely to draw in the coating liquid. Therefore, when the supply valve 32 is closed, even if the syringe 36 has drawn in the coating liquid, the coating liquid may drip from the coating nozzle 11 when the length of the piping is long. because Therefore, the responsiveness deteriorates.

Further, it takes time to transmit the pressure change of the coating liquid generated by the opening and closing of the supply valve 32 provided at the proximal end of the supply pipe 30 to the coating nozzle 11 provided at the front end of the supply pipe 30. As a factor of responsive deterioration. From this point of view, the longer the supply piping 30 is, the more the responsiveness deteriorates.

Further, in the batch coating apparatus, the timing at which the coating liquid is ejected/stopped from the coating nozzle 11 affects the position and shape of the coating film, and therefore it is preferable to have high responsiveness. Therefore, in the batch coating apparatus, the distance between the supply valve 32 and the coating nozzle 11 is set to be short.

As described above, in the batch coating apparatus, the distance between the supply valve 32 and the coating nozzle 11 is set to be short, so that the supply valve 32 and the coating nozzle 11 are normally placed on the same susceptor.

Fig. 3 is a schematic perspective view showing an example of a part of a batch coating device. In Fig. 3, the storage tank 20, the pump 31, the filters 33, 43, the pressure gauge 35, the syringe 36, and the moving mechanisms 51, 61 are omitted for convenience of viewing.

In the above embodiment, as shown in FIG. 3, the supply valve 32 and the coating nozzle 11 are placed on the valve base 60 and the nozzle base 50 of the individual bodies, respectively. The nozzle base 50 and the valve base 60 are spaced apart from each other.

Further, since the opening and closing of the supply valve 32 is accompanied by a mechanical operation, the supply valve 32 is vibrated by repeated opening and closing operations. The switching between the opening and closing is performed several times or more, for example, in one second, so that vibrations of several Hz or more are generated.

However, in the present embodiment, the valve base 60 on which the supply valve 32 is placed and the nozzle base 50 on which the coating nozzle 11 is placed are independent members. Therefore, vibration transmitted from the supply valve 32 to the coating nozzle 11 via the susceptor can be suppressed as compared with a configuration in which the supply valve 32 and the coating nozzle 11 are placed on the same susceptor.

Assuming that the coating nozzle 11 vibrates, the accuracy with respect to the shape of the coating film (also referred to as a coating film) is lowered, and in the present embodiment, the vibration of the coating nozzle 11 can be suppressed, thereby suppressing This precision is reduced. In other words, it is possible to reduce the accuracy of the shape of the coating film and to use a valve that is not easily vibrated as the supply valve 32, and a cheaper valve can be employed.

Further, as described above, the circulation valve 41 is closed when the supply valve 32 is opened, and is opened when the supply valve 32 is closed. Therefore, the circulation valve 41 also generates vibration similar to that of the supply valve 32. Therefore, it is preferable that the circulation valve 41 is also placed on the base of the individual body separate from the nozzle base 50 as shown in FIG. Thereby, the vibration from the supply valve 32 and the circulation valve 41 can be suppressed from being transmitted to the coating nozzle 11. In the example of FIG. 3, the supply valve 32 and the circulation valve 41 are placed on the same valve base 60.

Further, the nozzle base 50 and the valve base 60 may be attached to a common base or may be attached to a separate base. Even in the former case, since the nozzle base 50 and the base are independent individuals, and the valve base 60 and the base are independent individuals, the self-supply valve 32 or the self-circulation can be suppressed as compared with the case where it is integrated. The vibration transmitted by the valve 41 to the coating nozzle 11 is transmitted.

Further, the syringe 36 may be provided in any one of the nozzle base 50 and the valve base 60. From the viewpoint of responsiveness, the syringe 36 is preferably disposed in the vicinity of the coating nozzle 11, and is preferably disposed on the nozzle base 50. On the other hand, since the drawing of the coating liquid by the syringe 36 is accompanied by mechanical action, the syringe 36 may be provided in the valve base 60 from the viewpoint of suppressing vibration.

<moving mechanism>

As described above, the coating nozzle 11 is provided with a nozzle moving mechanism 51 (see FIG. 2) for performing position adjustment with respect to the backup roller 12. As the nozzle moving mechanism 51, for example, a known moving mechanism that can be biaxially moved and actively controlled can be employed. The nozzle moving mechanism 51 is attached to the nozzle base 50 to move the nozzle base 50. Thereby, the coating nozzle 11 fixed in position with respect to the nozzle base 50 also moves. Maintenance of the coating nozzle 11 is performed, for example, by expanding the space between the coating nozzles 11 away from the backup roller 12 and the like.

In the batch coating apparatus, in order to improve the responsiveness, the distance between the supply valve 32 and the coating nozzle must be set short. That is, the length of the piping of the supply pipe 30 is set short. However, in order to allow the coating nozzle 11 to be flexibly moved while the position of the supply valve 32 is fixed, it is conceivable to use the flexible piping as the supply piping 30, but the flexible piping having a short piping length is generally low in flexibility. Therefore, the kind of piping that can be used as the supply pipe 30 is reduced, resulting in an increase in cost.

Fig. 4 is a perspective view showing an example of a part of a batch coating apparatus. In FIG. 4, similarly to FIG. 3, each structure is abbreviate|omitted suitably, and is easy to see. In the present embodiment, it is preferable to provide a valve moving mechanism 61 for moving the supply valve 32 as exemplified in Figs. The valve moving mechanism 61 is attached to the valve base 60, for example, and can move the valve base 60. Thereby, the supply valve 32 fixed in position with respect to the valve base 60 can also be moved.

Further, the valve moving mechanism 61 moves the supply valve 32 in the same direction as the moving direction of the nozzle moving mechanism 51. In other words, the valve moving mechanism 61 moves the supply valve 32 following the movement of the coating nozzle 11. Thereby, the coating nozzle 11 can be moved while suppressing the fluctuation of the relative position between the coating nozzle 11 and the supply valve 32. Therefore, the bending stress of the supply pipe 30 caused by the movement of the coating nozzle 11 can be suppressed.

Thus, for example, a pipe having a fixed shape (for example, a pipe of stainless steel) can be employed as the supply pipe 30. Moreover, even if it is a soft piping, the length of piping may be short and it is relatively difficult to bend. That is, it is possible to increase the type of piping that can be used.

Further, for example, in the example of Fig. 4, the supply pipe 30 is bent at a substantially right angle. In the intermittent coating apparatus, since the distance between the coating nozzle 11 and the supply valve 32 is short, the supply pipe 30 must be bent with a very small radius of curvature. In this way, it is difficult to bend the flexible pipe with a small radius of curvature, which is difficult for a soft pipe that is normally circulated. Therefore, in this case, it is preferable to use a pipe fixed in a shape such as stainless steel, and a pipe which is previously formed into a curved shape. In other words, by using the valve moving mechanism 61, a pipe having a fixed shape can be used as the supply pipe 30, whereby the degree of freedom in providing the supply valve 32 and the coating nozzle 11 can be improved as compared with the case of using a flexible pipe.

Further, in the present embodiment, the supply valve 32 moves, so that the supply pipe 30 is upstream. The positional relationship between the components on the side (e.g., storage tank 20 or pump 31, etc.) and supply valve 32 may vary. Therefore, it is preferable that the piping between the element and the supply valve 32 is a flexible piping. However, on the upstream side of the supply valve 32, the necessity of limiting the length of the piping is small from the viewpoint of improving the responsiveness of the intermittent coating. Therefore, the length of the flexible piping to be used on the upstream side of the supply valve 32 can be set to be sufficiently long. Since the length of the piping in the initial state can be set so long, even if the supply valve 32 moves, the bending stress generated in the flexible piping is small. Therefore, there is no problem even if the position of the component is fixed.

<Specific example of valve moving mechanism>

The valve moving mechanism 61 may be any moving mechanism that functions to follow the movement of the nozzle moving mechanism 51. For example, when the nozzle moving mechanism 51 and the valve moving mechanism 61 are known moving mechanisms controlled by the control unit 90, the following function of the valve moving mechanism 61 can be realized by the control unit 90. Alternatively, the valve moving mechanism 61 may be realized by mechanically interlocking the nozzle moving mechanism 51 and the valve moving mechanism 61.

However, it is preferable that the nozzle moving mechanism 51 moves the nozzle base 50 in the horizontal direction, and the valve moving mechanism 61 can freely move the supply valve 32 in an arbitrary horizontal direction. According to the valve moving mechanism 51, the movement of the coating nozzle 11 is transmitted to the supply valve 32 via the supply pipe 30, whereby the supply valve 32 moves in the same direction as the moving direction of the coating nozzle 11.

As the valve moving mechanism 61, a roller structure can be employed. The roller structure has a specific rotating body (for example, a ball or the like), and the rotating body is disposed between the valve base 60 and the base 63. Further, the rotating body is rotatably fixed to the valve base 60, and by rotating the rotating body, the valve base 60 is freely movable in any horizontal direction with respect to the base 63. Furthermore, the rotor can also be rotatably fixed to the base 63.

When such a valve moving mechanism 61 is used, when the intermittent coating is performed, the supply valve 32 is freely moved in the horizontal direction with its own opening and closing operation. Thereby, the vibration energy accompanying the opening and closing of the supply valve 32 is eliminated as the horizontal movement of the supply valve 32. Since it is consumed, the vibration transmitted to the side of the supply pipe 30 is also suppressed. In addition, it is also possible to use a flexible pipe from the viewpoint of suppressing transmission of vibration through the supply pipe 30. However, since the vibration transmitted to the supply pipe 30 as described above is suppressed, it is also possible to use a stainless steel such as stainless steel. The piping formed.

Further, since the supply valve 32 is freely movable in the horizontal direction, vibration transmitted from the supply valve 32 to the valve base 60 side (and the base 63 side) can be suppressed as compared with the case where the supply valve 32 is fixed. Therefore, vibration can be further reduced to be transmitted to the coating nozzle 11 via the base 63. Further, a configuration may be adopted in which the nozzle base 50 and the valve base 60 are connected and connected by a flexible supporting member.

Further, it is not necessary to align the position of the nozzle moving mechanism 51 and the valve moving mechanism 61. For a more detailed description, for example, a moving mechanism that can move in one direction is used as the nozzle moving mechanism 51 and the valve moving mechanism 61. At this time, in order to move the coating nozzle 11 without changing the relative positions of the coating nozzle 11 and the supply valve 32, it is necessary to arrange the nozzle moving mechanism 51 and the valve moving mechanism 61 in parallel with high precision. However, in the illustration of Fig. 4, the valve moving mechanism 61 is freely movable in any horizontal direction. Thereby, even if the coating nozzle 11 is not moved, the moving force is transmitted to the supply valve 32 via the supply pipe 30, and the supply valve 32 is moved in the same direction as the coating nozzle 11. Thereby, the workability when the valve moving mechanism 61 is attached can be improved.

Further, in the example of FIG. 4, three valve moving mechanisms 61 are provided, and the three valve moving mechanisms 61 support the valve base 60 at three locations. If the valve base 60 is supported at four or more locations, the valve base 60 is shaken by the deviation of the height of the valve moving mechanism 61, and is supported at three locations here, so that the sway can be avoided.

Further, the valve moving mechanism 61 is not limited to the roller structure, and may have a pair of plate members that can slide laterally in the horizontal direction. The pair of plate members are slidable relative to each other, for example, by bringing the joint faces of the pair of plate members into contact with a lower coefficient of friction. One of the plate members is fixed to the lower surface of the valve base 60, and the other is fixed to the upper surface of the base 63. Thereby, the valve base The seat 60 is free to move in any horizontal direction with respect to the base 63.

However, if the roller structure is employed, the contact area between the rotor and the valve base 60 or the base 63 is small, so that it is less likely to be worn. Thus, the life is relatively long.

<Vibration suppression member>

A vibration suppressing member that suppresses transmission of vibration from the supply valve 32 to the coating nozzle 11 may be provided. For example, as the vibration suppression member 64, a member formed of rubber, a gel-like material, or foamed styrene or the like and absorbing vibration can be used. Fig. 5 is a view schematically showing a schematic configuration of a portion supporting the supply valve 32. In the example of FIG. 5, the vibration suppression member 64 has a plate shape and is interposed between the supply valve 32 and the valve base 60. Thereby, vibration can be suppressed from being transmitted from the supply valve 32 to the valve base 60, and vibration can be further suppressed from being transmitted from the supply valve 32 to the coating nozzle 11. Alternatively, the vibration suppressing member may be provided between the valve base 60 and the base 63 (between the valve base 60 and the valve moving mechanism 61 or between the valve moving mechanism 61 and the base 63). Thereby, vibration can also be suppressed.

Further, the valve moving mechanism 61 that can be freely moved in any horizontal direction as shown in FIGS. 4 and 5 can be understood as one type of vibration suppressing member because vibration transmission is suppressed.

Moreover, in the example of FIG. 4, the supply piping 30 is comprised by the plural piping. A vibration suppressing member formed of, for example, rubber, a gel-like material, or foamed styrene, and absorbing vibration may be interposed in the joint of the pipes. Thereby, the vibration of the supply valve 32 can be suppressed from being transmitted to the coating nozzle 11 via the supply pipe 30.

Moreover, the installation position of the filter in the piping is not limited to the example of the above embodiment, and may be between the connection portion of the circulation pipe 40 on the path of the supply pipe 30 and the pump 31, or the supply valve 32 and the coating nozzle. 11 between. Further, the filter is not an essential component and may not be provided.

Further, the coating nozzle 11 is not limited to the slit nozzle having the one slit-shaped discharge port 11a, and may be a nozzle having a plurality of slits or a nozzle for discharging the coating liquid from the substantially circular discharge port. .

Further, the coating liquid to be subjected to the coating treatment using the technique of the present invention is not limited to the electrode material of the lithium ion secondary battery, and may be, for example, a coating liquid of a solar cell material (electrode material, sealing material) or A coating liquid for an insulating film or a protective film of an electronic material, and a coating liquid containing a catalyst for a fuel cell. The technique of the present invention can be preferably applied when a coating liquid having a relatively high viscosity is applied to a substrate. Thus, the technique of the present invention can also be used when applying a coating liquid of a pigment or an adhesive.

11‧‧‧ Coating nozzle

12‧‧‧Support roller

30‧‧‧Supply piping

32‧‧‧Switching device (supply valve)

37‧‧‧Supply piping

40‧‧‧Recycling piping

41‧‧‧Circulation valve

50‧‧‧Nozzle base

60‧‧‧Switching device base (valve base)

Claims (4)

A batch coating apparatus characterized in that it coats a coating liquid intermittently from a nozzle toward a substrate, and includes: a nozzle; a supply pipe connected to the nozzle, and a coating liquid flowing toward the nozzle a switching device that intermittently ejects the coating liquid from the nozzle toward the substrate by repeatedly switching the opening and closing of the supply pipe; a nozzle base on which the nozzle is placed; and a switching device base; And the switching device is disposed separately from the nozzle base; and the intermittent coating device further includes: a nozzle moving device that moves the nozzle base to adjust a position of the nozzle relative to the substrate; And switching the moving device to move the switching device in a direction that is the same as a direction in which the nozzle base moves by the nozzle moving device. A batch coating apparatus characterized in that it coats a coating liquid intermittently from a nozzle toward a substrate, and includes: a nozzle; a supply pipe connected to the nozzle, and a coating liquid flowing toward the nozzle a switching device that intermittently ejects the coating liquid from the nozzle toward the substrate by repeatedly switching the opening and closing of the supply pipe; a nozzle base on which the nozzle is placed; and a switching device base; It is independent of the above-mentioned nozzle base, and the above-mentioned switching device is placed; and the intermittent coating device further comprises: The vibration suppression device is provided on the switching device base to suppress vibration transmitted from the switching device to the nozzle. The intermittent coating apparatus of claim 1 or 2, wherein the nozzle moving means moves the nozzle base in a horizontal direction, and the switching moving means can freely move the switching means in an arbitrary horizontal direction by The piping is supplied to transmit the movement of the nozzle, and the switching device is moved in the same direction as the moving direction. A coating film forming system comprising: the batch coating device of claim 1 or 2; and a drying device for performing the substrate coated with the coating liquid by the batch coating device The coating liquid is dried by heat treatment, and the transfer device sequentially transports the substrate to the batch coating device and the drying device.