JP2011143388A - Thin film coating apparatus and double-sided thin film coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an epochal thin film coating apparatus which can attain a double-sided coating which can form a thin film continuously with high accuracy and speedily before drying, can reduce, particularly, damage to a metal film (an object 5 to be coated) which turns to a substrate in manufacturing a lithium ion battery formation material, a deviation of a dimensional accuracy due to wears of an end contact part of a nozzle part, a need and the frequency of an exchange or realignment, and defects due to generation-mixing-in of abrasion powders, and accordingly, can achieve manufacture of the lithium ion battery forming material by the double-sided coating which can be carried out speedily, and a double-sided thin film coating apparatus. <P>SOLUTION: In the thin film coating apparatus, the end contact part 6 of the nozzle part 4 in slide-contact with the object 5 to be coated is formed with ceramics, superhard metal, or molybdenum. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention is configured such that, for example, a thin film is coated on a surface of a coating body such as a film or a plate by transporting a coating body such as a film or a plate to a nozzle portion that discharges a coating liquid from a slit-shaped tip discharge hole After coating on one side of the coated thin film coating device and the object to be coated, coat it on the opposite side before drying it, coat both sides and then dry it on both sides of the object to be coated. The present invention relates to a double-sided thin film coating apparatus for coating and forming a thin film.

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-shaped tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing the coating part facing this nozzle part. A thin film coater configured to apply the coating liquid to the coated body in a thin film form by transporting the work body relative to the nozzle portion (which means that either can be transported). In the processing device, the tip contact portion of the nozzle portion is applied to the tip contact portion in a state where the nozzle portion is in contact with the subject to be coated rather than the nozzle portion being brought close to the subject coating. It may be possible to form a contact-type nozzle portion that discharges and coats from the tip discharge hole provided in the vicinity of the transport downstream side of the body with a more accurate and uniform film thickness. In some cases, it is possible to support the opposite side of the coated surface of this film-like workpiece. In this case, the opposite surface can be supported by a coating support roll, etc., and coating can be performed with the nozzle portion in close proximity while the film is not vibrating, but if the opposite surface cannot be supported, Even if the coating surface on the upstream side of the transport is supported by a support roll, the vibration generated on the downstream side of the transport is transmitted. For example, the film is vibrated in order to blow air in a drying process such as hot air drying or IR drying (for floating transport). Transmission is not uniform and the film thickness cannot be controlled accurately.

  However, if the tip contact portion of the nozzle portion is pressed and brought into contact with the film-like object as described above, the film vibration is attenuated, and a thin film having a uniform thickness can be applied and formed with high accuracy.

  In particular, when a thin film of the order of 100 to 200 μm is applied and formed in the wet state, when the opposite surface opposite to the coating surface cannot be supported, the contact type is more effective than the method of applying the nozzle portion close to the coating surface. The nozzle part is preferred.

  In addition, after coating on one side of the object to be transported by the first coating mechanism, the opposite surface is also coated by the second coating mechanism before drying such as hot air drying or IR drying. In the second coating mechanism that coats the opposite surface of the double-sided thin film coating device that can improve the downsizing and mass productivity of the device by drying with a drying mechanism after the work, the one side opposite to the coated surface is Since it has already been applied by the first application mechanism and has not yet been dried, it cannot be supported from this one side, causing the above-mentioned problems, and it is desirable to use a contact type nozzle.

  However, when the contact type nozzle is used, the uniformity accuracy of the film thickness is improved, and in the case of the above-described film or double-sided coating, the film vibration can be suppressed, but on the other hand, The object to be coated may be damaged by contact with the tip contact part of the nozzle part, and the material of the tip contact part of the nozzle part is simply selected to have low hardness in order to suppress damage to the object to be coated. Then, even if this damage is suppressed, the tip contact portion is likely to be worn, and the abrasion powder of the worn tip contact portion may be mixed in the coating thin film more than allowable, and the tip contact portion may decrease due to wear and protrude. Since the dimensional accuracy is incorrect, replacement or readjustment is required, and even if the tip discharge hole is slightly deformed due to deformation of the tip contact portion, there is a possibility that a uniform thin film cannot be formed.

  In particular, a metal film such as aluminum or copper is used as the object to be coated, and a positive electrode active material such as lithium cobaltate or a negative electrode active material such as graphite is mixed on this surface, and this is used as a coating liquid, and 100 μm. When producing a lithium ion battery forming material that forms and forms a thin film of the order, the coated body is likely to be damaged and may become defective. If a large amount is mixed, this also becomes defective, and the contact type nozzle portion has a problem that it is difficult to put it into practical use.

  Therefore, when preparing such a lithium ion battery forming material, particularly a lithium ion battery forming material which is applied on both sides to reduce the size and increase the output, the opposite surface is applied before drying after coating on one side. It is difficult to realize the above-mentioned double-sided coating to improve the downsizing and mass productivity of the apparatus, but it is difficult due to the above problems.

  In other words, if you try to apply double-sided coating before drying, this one side cannot be supported when coating the opposite side after coating one side, and the opposite side coated side is the upstream side of this uncoated transport Because of film vibration in the floating drying process such as warm air (hot air) drying on the downstream side of the conveyance, depending on the nozzle part of the non-contact type (applying close proximity), a uniform film thickness can be obtained. The coating cannot be formed.

  More specifically, the drying mechanism after coating in the coating section is provided with a heater section such as an IR heater for drying the coating film from the inside, or a temperature for drying the surface with warm air (hot air). Although it is configured to have an air blowing part, if this film-like object cannot be supported and conveyed by a roller, for example, if both sides are dried after double-sided coating as described above, it cannot be supported and conveyed by a roller. , And drying in a non-contact support (floating conveyance).

  That is, a plurality of air ejection support parts (floating nozzles) are arranged in parallel in the film conveying direction on the upper side and the lower side across the film-like object to be conveyed after coating, The air supplied from the supply source is ejected from a slit-like ejection hole (floating nozzle hole) provided on the opposite surface, and the film-like coated object is conveyed while being supported by this air pressure, The air is warm air (hot air), and a heater unit such as an IR heater is provided in the drying unit.

  Therefore, when a film-like object to be coated such as a double-sided coating apparatus cannot be contacted and supported in this way, the film is vibrated remarkably and the non-contact type nozzle is caused by the floating drying by the floating nozzle as described above. The coating cannot be applied uniformly and accurately.

  In addition, when applying the opposite side after drying once after single-sided coating as in the past, there is a risk of changes in film thickness due to temperature changes on the coated side, so after single-sided coating and drying Therefore, when performing continuous coating that does not take up once, it is necessary to arrange a device for performing the cooling process after two times of drying and single-sided drying. Larger and inferior in mass productivity.

  Therefore, there is a demand for a double-sided coating apparatus that can coat both sides before drying as described above. In particular, in the lithium ion battery forming material for which double-sided coating is desired, the size of the apparatus can be reduced. In order to achieve mass production by speeding up the production of a lithium ion battery forming material, a double-sided thin film coating apparatus capable of performing such double-sided coating is desired.

  The present invention solves such problems and can apply and form a thin film accurately and uniformly, and by using this, it can also realize double-sided coating that forms a thin film continuously and accurately before drying. In particular, it can be applied to both surfaces of a metal film as a base material of a lithium ion battery forming material with high precision and uniformity, and the above-mentioned problems can be solved, that is, an object to be coated (a metal film for producing a lithium ion battery forming material). ) Or damage due to wear at the tip contact part of the nozzle, the need for replacement or readjustment, and its frequency, as well as defects due to the generation and mixing of wear powder. An object of the present invention is to provide a revolutionary thin film coating apparatus and a double-sided thin film coating apparatus that can reduce the size of a production apparatus for a lithium ion battery forming material and achieve mass production of the production.

  The gist of the present invention will be described with reference to the accompanying drawings.

  While having a nozzle part 4 for discharging the coating liquid 2 supplied from the liquid supply part 1 from the slit-like tip discharge hole 3, while discharging the coating liquid 2 from the tip discharge hole 3 of this nozzle part 4, A thin film coating apparatus configured to apply the coating liquid 2 to the coated body 5 in the form of a thin film by transporting the coated body 5 facing the nozzle section 4 relative to the nozzle section 4. The tip contact portion 6 of the nozzle portion 4 that is in sliding contact with the object to be coated 5 is formed of ceramics, super hard metal, or molybdenum, and is related to a thin film coating apparatus.

  Also, the ceramic, the hard metal or the molybdenum is formed on the surface of the tip portion of the nozzle portion 4 which is in sliding contact with the object to be coated 5, and the tip contact portion 6 is made of ceramic, hard metal. Alternatively, the thin film coating apparatus according to claim 1, wherein the thin film coating apparatus is made of molybdenum.

  Further, a coating film of the ceramic, super hard metal or molybdenum is formed by spraying on the surface of the tip portion of the nozzle portion 4 which is in sliding contact with the object to be coated 5, and the tip contact portion 6 is made of ceramic, super 3. The thin film coating apparatus according to claim 2, wherein the thin film coating apparatus is made of hard metal or molybdenum.

  In addition, the tip discharge hole 3 of the nozzle portion 4 is formed of a metal material M that is opposed to a gap, and is fixed to the metal material M and is positioned close to the tip discharge hole 3 and the coated body 5. A coating of the ceramic, the cemented carbide, or the molybdenum is formed on the surface of the tip portion of the contact portion forming member 8 that is in sliding contact by the thermal spraying, and the tip contact portion 6 is used as the contact portion forming member 8. 4. The thin film coating apparatus according to claim 3, wherein the surface of the tip is made of ceramics, cemented carbide or molybdenum.

  5. The thin film coating apparatus according to claim 3, wherein the tip contact portion 6 is configured by impregnating a lubricant on a surface coating of the ceramic formed by the thermal spraying. It is concerned.

  Further, while discharging the coating liquid 2 from the tip discharge hole 3 of the nozzle portion 4, the film-like coated body 5 facing the nozzle portion 4 is conveyed to the nozzle portion 4 to thereby transport the coating liquid 2. In the thin film coating apparatus configured to apply the coating liquid 2 to the film-shaped coated body 5 in a thin film shape, the coating body 5 of the nozzle portion 4 is formed with respect to the tip discharge hole 3. The tip contact portion 6 is provided on the transport upstream side, and the coating liquid 2 discharged from the tip discharge hole 3 on the transport downstream side of the tip contact portion 6 is transported to the tip discharge hole 3 in the form of a film. It is configured to apply and form a thin film on the object to be coated 5, and the tip contact portion 6 is configured to suppress film vibration by being in contact with the film-shaped object to be coated 5. The thin film coating apparatus according to any one of claims 1 to 5 A.

  Moreover, the support roll 7 which supports a conveyance upstream side from the said front end discharge hole 3 of the said film-form to-be-coated body 5 was provided, and the contact pressure of the said front end contact part 6 was adjusted and set by the position setting of this support roll 7 It is set as the structure, It concerns on the thin film coating apparatus of Claim 6 characterized by the above-mentioned.

  Further, a drying mechanism C for drying the film-shaped coated body 5 after the coating on the downstream side of the film-shaped coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4. The drying mechanism C includes an air ejection support portion 18 that ejects air onto the film-like coated body 5 to be conveyed and floats and supports the coated body 5 in a non-contact manner. A hot air supply unit or a coating of the object 5 to be coated is provided on the upper side and the lower side of the body 5 so as to be arranged in parallel in the film transport direction, and the air jetted from the air jetting support unit 18 is warm air. A heater unit 21 for heating and drying the film is provided, and an air ejection support unit 18 disposed above and below the drying mechanism C is used to supply air supplied from an air supply unit to the film-like coated body 5. And a structure for jetting from the jet hole 19 provided on the facing surface facing toward the object 5 to be coated, A large number of the ejection holes 19 are provided on the opposing surface of the air ejection support portion 18, and air is blown to the both surfaces of the film-like coated body 5 from the numerous ejection holes 19 to support the levitation. The thin film coating apparatus according to claim 1, wherein the film vibration of the coated body 5 generated by the mechanism C is suppressed.

  Further, the facing surface of the air ejection support portion 18 of the drying mechanism C is formed to be equal to or longer than the width of the film-like object to be coated 5, and the small holes are uniformly formed on the facing surface. The spray holes 19 are uniformly scattered at least in the range equivalent to the width of the film-like object 5 to be coated, and the air ejection support portion 18 for ejecting air from the many holes 19 is coated. 9. The thin film coating apparatus according to claim 8, wherein the drying mechanism C is configured by arranging a plurality of films 5 in parallel in the film transport direction on the upper side and the lower side, respectively.

  Further, air is blown to the film-like coated body 5 on the upstream side of the drying mechanism C on the downstream side of the coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4 to cause film vibration. Any one of Claims 1-9 characterized by setting it as the structure which provided the non-contact-type vibration suppression mechanism D which provided the air ejection part 17 which suppresses this on both sides of the said film-like to-be-coated body 5. This relates to the thin film coating apparatus described in the item.

  Further, the non-contact type vibration suppressing mechanism D is provided in parallel with both surfaces of the film-like coated body 5 so that the air ejection portions 17 are placed close to each other, and the air ejection portions 17 are opposed to each other. The thin film coating apparatus according to claim 10, wherein a plurality of air ejection holes 16 for ejecting air are formed.

  Moreover, it is a double-sided thin film coating apparatus that performs coating on both surfaces of the film-shaped coated body 5, and the first coating mechanism A that coats on one side, and further coating on the opposite side, and this And a second coating mechanism B having a drying mechanism C for drying the coated body 5 after the double-sided coating, and the second coating mechanism B having the drying mechanism C is as defined in claims 1 to 11. The present invention relates to a double-sided thin film coating apparatus using the thin film coating apparatus according to any one of the items.

  In addition, a metal film is used as the object to be coated 5, and a positive electrode active material or a negative electrode active material of a lithium ion battery is used as the coating liquid 2 to be coated on both surfaces, and this thin film is coated on both surfaces. 13. The double-sided thin film coating apparatus according to claim 12, wherein the lithium-ion battery forming material is manufactured.

  Since the present invention is configured as described above, it is possible to coat and form a thin film accurately and uniformly, and by using this, it is possible to realize double-sided coating that forms a thin film continuously and accurately before drying. Can be applied to both surfaces of a metal film as a base material of a lithium ion battery forming material with high accuracy and in addition to solving the above problems, that is, an object to be coated (a metal film for producing a lithium ion battery forming material) It is possible to reduce dimensional accuracy error due to scratches and wear at the tip contact portion of the nozzle, the necessity and frequency of replacement and readjustment, and defects due to generation and contamination of wear powder. It becomes an epoch-making thin film coating apparatus and double-sided thin film coating apparatus capable of downsizing the battery forming material manufacturing apparatus and mass-producing this manufacturing.

  More specifically, in the first aspect of the present invention, the tip contact portion (at least the tip surface) is made of ceramics, cemented carbide or molybdenum, so that it is difficult to damage the object to be coated and wear resistance is high. Therefore, it is possible to reduce the frequency of replacement and readjustment, and it is possible to reduce the frequency of replacement and readjustment, and it is an epoch-making thin film coating apparatus that hardly generates wear powder and does not hinder the performance of the coating film.

  In the inventions of claims 2, 3 and 4, since the tip contact portion is formed of ceramics, cemented carbide or molybdenum by surface treatment of the tip portion of the sliding contact portion, the present invention can be realized with a simpler configuration. The epoch-making thin film coating apparatus comprising a contact-type nozzle unit that can easily realize the invention, is less likely to damage the object to be coated, has excellent wear resistance, and can further reduce wear problems.

  In particular, in the invention according to claim 5, the tip contact portion is formed of ceramics by thermal spraying, and the surface coating of the ceramics is further impregnated with a lubricant such as silicon or PTFE (polytetrafluoroethylene). It is an epoch-making thin film coating apparatus that is excellent in preventing damage to the coated body, excellent in wear resistance, and further reducing wear problems.

  Therefore, in the present invention, particularly in the invention described in claim 6, even if it is a film-like object to be coated, film vibration can be suppressed, and in particular, the tip discharge hole is formed of a metal material, and is also located at a position close to this. The tip of the contact portion forming member made of metal is surface-treated to form ceramics, cemented carbide or molybdenum, and this is used as the tip contact portion, so that the shape of the tip discharge hole is also the position of the tip contact portion. Since the film thickness does not change, it can be applied uniformly while suppressing film vibration, and film vibration due to the drying process is suppressed even if the opposite surface cannot be supported by the support roll. It can be applied in a state, can be applied uniformly all the time, and as described above, it is an epoch-making thin film coating apparatus that does not damage the film and is not easily worn.

  In particular, in the invention described in claim 7, although the contact pressure to the tip contact portion of the nozzle portion can also be adjusted by adjusting the position of the support roll, the contact is made so as not to be affected by the film vibration, but the film is damaged as much as possible. The support roll can be moved so that it comes in contact with a small contact pressure and can be adjusted so that it comes into sliding contact with the tip contact part at a gentle angle, so that the opposite side of the coated surface cannot be supported. In this coating, a further excellent thin film coating apparatus capable of coating while making contact with an appropriate contact pressure while further suppressing film vibration.

  Further, in the invention described in claim 8, the film vibration in the coating part can be reduced by suppressing the film vibration in the floating drying mechanism, whereby the film-like coating is originally applied in the contact type nozzle part. The contact pressure on the body can be reduced, and this contact pressure can be reduced to damage the film-like object to be coated (a metal film in the production of lithium ion battery forming materials) or the dimensions due to wear of the tip contact part of the nozzle part. Defects due to inaccuracy, necessity of replacement and readjustment, frequency, and generation and contamination of wear powder can be further reduced.Therefore, when selecting the material for the nozzle tip contact area, for example, ceramics by spraying However, the required level of lubricity and wear resistance will be reduced and the allowable range for material selection will be expanded. It becomes this downsizing and mass production of the preparation of apparatus for producing a lithium ion battery formed material in which both sides coated also attained breakthrough film coating apparatus and the double-sided film coating apparatus.

  To explain further, the film-like object to be coated is supported in a floating state by blowing air blown from the opposed surfaces of the air blowing support portions provided on the upper and lower sides thereof. Although it is dried by a floating drying mechanism that dries with warm air or further provided with a heater portion, film vibration has been noticeably caused by this floating drying mechanism in the past, but in the present invention according to claim 8, By providing a large number of ejection holes on the facing surface of the air ejection support portion, for example, even if the air flow is the same, it is possible to reduce the air ejection speed by forming a large number of small hole-shaped ejection holes on the facing surface. In order to support the levitation with the air ejected from a large number of ejection holes, film vibrations can be achieved compared to conventional air ejection support parts (floating nozzles) provided with simple slit-shaped ejection holes. Can fence, whereby it is possible to suppress originally small film vibration at the coated portion.

  Accordingly, since the film vibration can be reduced, even if the film vibration is suppressed by the contact type nozzle portion, the contact pressure to the nozzle portion can be reduced.

  For example, in double-sided coating, the nozzle part generates film vibration due to floating drying as described above, but since the film vibration in this floating drying can be suppressed in the first place, the film shape that has finished single-sided coating on the upstream side of conveyance of the nozzle part When the opposite surface of the object to be coated is supported by a support roll, the angle between the nozzle portion and the support roll can be reduced to reduce the contact pressure at the tip contact portion of the nozzle portion.

  Therefore, when the film vibration is suppressed as a contact type nozzle, the film vibration in the drying mechanism, which is the film vibration generating part, is suppressed in the first place, so that the contact pressure of the nozzle part can be reduced. Since the tip contact portion is made of ceramics or the like, the material selection range is expanded even when the damage to the coated body and the problem of wear are further reduced.

  In the invention described in claim 9, it is an extremely excellent thin film coating apparatus that exhibits the above-mentioned functions and effects more satisfactorily with a simpler configuration.

  Further, in the inventions according to claims 10 and 11, the film vibration can be further suppressed as described above, and the problems of wear and damage to the object to be coated due to the contact type nozzle portion are also included. It is an extremely excellent thin film coating apparatus that can be further reduced.

  Moreover, in invention of Claim 12, it has the 1st coating mechanism coated on one side, and the drying mechanism which dries further on the opposite surface and dries the to-be-coated body which finished this double-sided coating. Equipped with a two-coating mechanism that allows continuous double-sided coating without the need for a second drying process and a cooling process after drying, improving the mass productivity by reducing the size of the equipment and increasing the speed of double-sided coating Double-sided coating can be realized by using the thin film coating apparatus as the second coating mechanism having the drying mechanism, and the problem of wear of the contact-type nozzle part and damage to the coated body is less likely to occur. This is an epoch-making double-sided thin film coating device that can be put to practical use.

  In particular, the invention according to claim 13 is an epoch-making double-sided thin film coating apparatus capable of realizing the production of a lithium-ion battery forming material of double-sided coating that can achieve downsizing and mass production of such an apparatus.

It is schematic structure explanatory drawing of a present Example. It is expansion explanatory drawing of the coating part of a present Example. It is the expansion explanatory view which expanded further the coating part of a present Example. It is a description perspective view of the nozzle part of a present Example. It is expansion explanatory drawing of the drying mechanism (floating drying mechanism) of a present Example. It is expansion explanatory drawing which shows another example of arrangement | positioning of the drying mechanism (floating drying mechanism) of a present Example. It is an expansion explanatory perspective view of the air ejection support part (floating nozzle) of the drying mechanism (floating drying mechanism) of a present Example. It is expansion explanatory drawing of the non-contact-type vibration suppression mechanism of a present Example. It is an expansion explanatory perspective view of the air ejection part of the non-contact-type vibration suppression mechanism of a present Example.

  An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

  While discharging the coating liquid 2 from the tip discharge hole 3 of the nozzle part 4, the coated body 5 is relatively conveyed to the nozzle part 4, so that a uniform thin film is formed on the surface of the coated body 5. Although the coating is formed, the tip contact portion 6 of the nozzle portion 4 comes into contact with the coated body 5 so that a thin film having a uniform film thickness can be applied and formed with higher accuracy.

  In particular, when the object to be coated 5 is in the form of a film, the film vibration of the film-like object to be coated 5 can be suppressed. Can be formed.

  However, in the case where the surface of the coated body 5 is easily scratched or there is a possibility that the scratch or wear powder may be mixed, the tip contact portion 6 of the nozzle portion 4 is coated. It cannot be slid in contact with the surface of the work body 5.

  In particular, in the production of a lithium ion battery forming material, a metal film such as aluminum or copper serving as a base material is used as the object 5 to be coated, so that it is easily scratched, and the positive electrode has a positive electrode activity such as lithium cobalt oxide. Since the material and the negative electrode are coated with a negative active material such as carbon graphite and a thin film of the order of 100 μm is uniformly applied, even slight damage to the metal film may be inferior. The damage can be suppressed by simply making it soft with a small hardness, but in this case as well, the tip contact portion 6 is reduced due to wear and the protruding dimensional accuracy is distorted, so it must be replaced or readjusted. Since there is a possibility that a large amount of wear powder is mixed into the thin film, which may also be defective, the contact nozzle unit 4 cannot be used. It was.

  In this respect, the present invention is such that the tip contact portion 6 that is in sliding contact with the object to be coated 5 is formed of ceramics, carbide metal or molybdenum, that is, ceramics with excellent lubricity and wear resistance. By doing so, damage to the coated body 5 and wear problem can be reduced while suppressing film vibration.

  Further, specifically, a coating of ceramic, super hard metal or molybdenum is formed by surface treatment, for example, thermal spraying, on the surface of the tip portion of the nozzle portion 4 which is in sliding contact with the film-like object 5 to be coated. By using the tip contact portion 6, damage to the coated body 5 is further prevented and wear is less likely to occur, and the tip contact portion 6 is less likely to be reduced, and the frequency of replacement and position adjustment is reduced, resulting in excellent practicality. It becomes.

In the present invention, the tip contact portion 6 is made of ceramics, cemented carbide, or molybdenum as described above. However, the tip contact portion 6 is formed on the tip portion of the contact portion forming member 8 such as a metal material M (SUS material) as a base material by thermal spraying. For example, in the case of ceramics, it is formed by spraying Al ₂ O ₃ , TiO ₂ , Cr ₂ O ₃ or the like. In the case of this ceramic, for example, silicon or PTFE (polytetrafluorocarbon) is used to further improve lubricity. When it is impregnated with a lubricant such as ethylene, the lubricity and wear resistance are further improved.

  Further, WC-Co is used as the superhard metal, and molybdenum, which is a metal having excellent lubricity and excellent wear resistance, may be sprayed. In any of these cases, the lubricity is excellent, the damage is difficult to be caused, the abrasion is difficult, the frequency of replacement and readjustment can be reduced, and the practicality is excellent.

  Further, for example, as shown in the examples described later, the shape of the tip of the metal material M (contact portion forming member 8) serving as the base material becomes a smooth tip contact surface that is excellent in smoothness and hardly damages. The film of the material is formed on the surface of the tip portion by thermal spraying.For example, the material is heated and melted and sprayed as a thermal spray material, or sprayed at a high speed as non-molten particles. A film made of a material is formed. The film formed by such a surface treatment is further polished, or further impregnated as described above, and further polished to form the surface film of the ceramic, carbide metal or molybdenum, The tip contact portion 6 is brought into sliding contact with the workpiece 5.

  In particular, the closer the tip contact portion 6 is to the tip discharge hole 3, the less the influence of film vibration. For example, when a uniform coating film is formed with a film thickness of 100 μm and ± 2 μm, the tip contact portion 6 is within 5 mm. It is necessary to provide the tip discharge hole 3 at the top.

  As described above, the closer the distance between the tip contact portion 6 and the tip discharge hole 3 is, the better. However, if the tip discharge hole 3 itself (slit forming member) is formed of a soft material, the tip discharge hole 3 is caused by this subtle deformation. Since the shape of the film itself is small but fluctuates, there is a possibility that uniform coating cannot be performed. Therefore, the tip discharge hole 3 is formed of a metal material M, and film vibration at the tip discharge hole 3 can be suppressed at this close position. A surface treatment is applied to the protruding portion of the contact portion forming member 8 which is also formed of the metal material M at a sufficiently close position as described above to form a film of ceramic, super hard metal or molybdenum.

  Further, in this case, a metal contact portion forming member 8 provided on the tip surface with a tip contact portion 6 formed of ceramics, cemented carbide or molybdenum by forming a coating on the tip surface is used as the tip of the nozzle portion 4. It is desirable to fix to the metal material M forming the discharge hole 3, and to be replaceable so that it can be replaced when worn for a long time or when there is a possibility that the lubricity will deteriorate. desirable.

  Further, as described above, in order to prevent minute deformation of the tip discharge hole 3, the tip discharge hole 3 is formed of a metal material M such as SUS, and the contact portion made of the same metal close to this, that is, within 1 to 5 mm. The tip 8 of the forming member 8 is formed of the ceramic, super hard metal or molybdenum by thermal spraying, and is disposed along the tip contact portion 6. Specifically, for example, a metal material for forming the tip discharge hole 3 is used. If the metal contact portion forming member 8 is detachably fixed along the M, it is easy to manufacture and replaceable, and the contact portion forming member 8 is fixed in contact with the positioning surface. By doing so, the protruding dimensional accuracy of the tip contact portion 6 is also improved.

  Further, as in the inventions of the eighth and ninth aspects, the drying mechanism C, which has caused the vibration of the film, is supplied to the air from a large number of ejection holes 19 formed on the opposing surface of the air ejection support portion 18. Since the film vibration in the floating drying mechanism C can be reduced by adopting a structure in which the object to be coated 5 is sprayed from both sides and supported to float, the tip contact between the film-like object to be coated 5 and the nozzle portion 4 can be reduced. The contact pressure with the part 6 can be reduced. That is, since the film vibration is small, even if the contact pressure is small, the film can be applied accurately and uniformly with the film vibration suppressed. In addition, since the contact pressure can be reduced, the contact type nozzle portion 4 can reduce film vibrations and reduce damage to the workpiece 5 and wear.

  In other words, since the film vibration which is a problem can be reduced, the contact pressure of the tip contact portion 6 can be reduced. Therefore, the damage to the coated body 5 and the problem of wear can be further reduced. In selecting the material, since it is difficult to damage, the selection range of the material that does not easily wear is expanded. For example, it is difficult to damage, but even materials that are inherently easily worn are less likely to be worn and can be selected.

  As described above, in the present invention, the problem of the contact type nozzle portion 4 can be reduced. In other words, the coating film is produced in a small amount even if it is mixed even if it does not damage the metal film 5 while suppressing the film vibration and the contact part itself is less likely to wear and can reduce the generation / mixing of wear powder and the frequency of replacement. The contact-type nozzle portion 4 that does not hinder the function of the contact-type nozzle portion 4 is obtained, and the contact-type nozzle portion 4 can be used to uniformly form a thin film while suppressing film vibration.

  Therefore, even in the case of the film-like coated body 5, the above-mentioned problem is hardly caused even when the opposite surface is coated after the single-sided coating in the double-sided coating, and the film vibration generated by the floating drying process such as hot air drying is not generated. Innovative thin-film coating device and double-sided thin-film coating device that can realize the above-mentioned double-sided coating that can reduce the size of the device and improve mass productivity by increasing the speed of double-sided coating because it can be applied while suppressing well It becomes.

  In particular, mass productivity due to such an improvement in production speed is eagerly desired, and lithium ion for double-sided coating that must prevent damage and wear to the object to be coated 5 (metal film) by the contact type nozzle portion 4. In the production of the battery forming material, the double-sided thin film coating apparatus is extremely practical.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, a thin film coating apparatus that is extremely useful for applying a thin film to the film-like object 5 in a state in which the opposite surface cannot be supported is used. The double-sided thin film coating apparatus is constituted by using the thin film coating apparatus according to the present invention when the opposite surface is continuously coated, and particularly the problem of film vibration and the contact type nozzle for solving the problem This is a double-sided thin film coating apparatus that can solve both problems of the section 4 and use the contact-type nozzle section 4 in the second coating.

  That is, this example is a double-sided thin film coating apparatus for coating on both sides of the film-like object 5 to be coated on the opposite side of the first coating mechanism A for coating on one side. A second coating mechanism B having a second coating mechanism B having a drying mechanism C for drying the coated body 5 after the double-sided coating, and the second coating mechanism B of the present invention. A double-sided thin film coating apparatus using the following thin film coating apparatus.

  Further, in this embodiment, as described above, the contact-type nozzle portion 4 that solves the problem of film vibration during double-sided coating is used, and the tip contact portion 6 of the nozzle portion 4 with the object to be coated 5 is Lithium-ion battery with double-sided coating, which has been considered impossible to put into practical use so far, by solving the problems of this contact type nozzle part 4 by forming with ceramics, super hard metal or molybdenum by surface treatment by thermal spraying The double-sided thin film coating apparatus can be realized in which the apparatus can be miniaturized and can be quickly produced.

  That is, a metal film such as aluminum or copper is used as the object to be coated 5, and the positive electrode active material of a lithium ion battery such as lithium cobaltate or carbon graphite is used as the coating liquid 2 to be coated on both surfaces. The double-sided thin film coating apparatus is configured to produce a lithium ion battery forming material in which this thin film is coated on both sides using a negative electrode active material.

  Specifically, for example, the coated body 5 is a metal film having a thickness of 10 to 20 μm and a width of 650 mm, and a binder is mixed with a positive electrode active material such as lithium cobalt oxide or a negative electrode active material such as carbon graphite on both surfaces of the film. The coating solution 2 is used to uniformly form a thin film of the order of 100 μm with an error of plus or minus 2 μm. The coating solution 2 supplied from the liquid supply unit 1 through the liquid reservoir 13 is slit. A nozzle portion 4 that discharges from the front end discharge hole 3 is disposed opposite to the film-like object 5 and the nozzle portion 4 is discharged while discharging the coating liquid 2 from the front end discharge hole 3 of the nozzle portion 4. The coating liquid 2 is applied to the coating body 5 in the form of a thin film by transporting the film-shaped coating body 5 opposed to 4 to the nozzle portion 4.

  In the present embodiment, the first coating mechanism A that first coats one side of such a film-shaped coated body 5 with the coating liquid 2 is a film-shaped coated roll wound around a supply roll 14. A conventional non-contact type in which a thin film is applied and formed on one side by pulling out the body 5 and supporting the surface opposite to the coating surface with a coating support roll 15 while bringing the tip discharge hole 3 of the nozzle portion 4 close to one side. The film-like coated body 5 that has not been subjected to the drying process without passing through the drying process and the cooling process without finishing the one-side coating by the first coating mechanism A The opposite surface is coated by the contact type nozzle unit 4 by the second coating mechanism B without supporting the coated one side, and after this double-sided coating is finished, for example, a floating type that is dried by IR or hot air A drying mechanism C is provided.

  This eliminates the need for two drying steps and cooling steps, and allows continuous double-sided coating, enabling mass production by reducing the size of the device and increasing the production speed when producing lithium ion batteries.

  In this embodiment, the thin film coating apparatus according to the present invention is applied to the second coating mechanism B having the drying mechanism C of such a double-sided thin film coating apparatus.

  Specifically, in the thin film coating apparatus used as the second coating mechanism B of the present embodiment, the tip contact portion 6 of the nozzle portion 4 that is in sliding contact with the film-shaped coated body 5 is made of ceramic, It is made of super hard metal or molybdenum.

  That is, the tip contact portion 6 is not made of metal, but the surface of the tip portion that is in sliding contact with the object to be coated 5 is excellent in lubricity and is not eroded by the coating liquid 2 and is excellent in wear resistance. It is made of metal or molybdenum. That is, by using ceramics having excellent lubricity and excellent wear resistance, the tip contact portion 6 can reduce damage to the coated body 5 and wear problems while suppressing film vibration.

  More specifically, the tip discharge hole 3 is formed of a metal material M facing through a gap, and has a shape that slightly protrudes at a position close to the tip discharge hole 3, and to be coated with a predetermined contact pressure. The tip portion of the contact portion forming member 8 having a tip shape that smoothly contacts without damaging the tip 5 is formed as a tip contact portion 6. The tip contact portion 6 is not made of metal and is formed on the surface of the tip portion. A coating of ceramics, super hard metal or molybdenum is formed by thermal spraying, and this is used as the tip contact portion 6.

  That is, the tip contact portion 6 is formed in a shape that does not have a sharp shape but is in surface contact, and as described above, is formed of ceramics, cemented carbide, or molybdenum, thereby further damaging the object to be coated 5. The tip contact portion 6 is hard to be reduced and the frequency of replacement and position adjustment is reduced, and the practicality is further improved.

Specifically, a coating of ceramics, cemented carbide or molybdenum is formed by surface treatment, for example, thermal spraying, on the surface of the tip portion of the nozzle portion 4 which is in sliding contact with the film-like workpiece 5. Then, as described above, it is formed by thermal spraying on the tip of the contact portion forming member 8 such as a metal material M (SUS material) as a base material. In the case of ceramics, for example, Al ₂ O ₃ , TiO ₂ , Cr _2. In the case of this ceramic, which is formed by thermal spraying of O ₃ or the like, for example, in order to further improve the lubricity, if it is impregnated with a lubricant such as silicon or PTFE (polytetrafluoroethylene), the lubricity and wear resistance are further improved. Excellent.

  Further, WC-Co is used as the superhard metal, and molybdenum, which is a metal having excellent lubricity and excellent wear resistance, may be sprayed. In any of these cases, the lubricity is excellent, the damage is difficult to be caused, the abrasion is difficult, the frequency of replacement and readjustment can be reduced, and the practicality is excellent.

  Further, in this embodiment, as described above, for example, the tip of the metal material M (contact member forming member 8) serving as a base material is formed into a shape that forms a smooth tip contact surface that is excellent in smoothness and is not easily damaged. The coating of the material is formed on the surface of the tip by spraying. For example, the material is heated and melted and sprayed as a sprayed material, or sprayed at a high speed as non-molten particles. Form a film. The film formed by such a surface treatment is further polished, or further impregnated as described above, and further polished to form the surface film of the ceramic, carbide metal or molybdenum, The tip contact portion 6 is brought into sliding contact with the workpiece 5.

In particular, ceramics such as Al ₂ O ₃ , TiO ₂ , and Cr ₂ O ₃ are sprayed to form a coating of this ceramic on the surface of the tip, and this is used as the tip contact portion 6 to increase hardness and wear resistance. Excellent in lubricity, good lubricity, hardly damages the film-like coated object 5 (metal film) such as streaks, and is non-conductive, so even if abrasion powder is generated, Even if this is mixed in the coating film, it does not have conductivity, so the function of the coating film is not hindered.

  In addition, in the case of cemented carbide or molybdenum, it has electrical conductivity, but it has excellent wear resistance, and in particular, molybdenum has excellent lubricity, so there is almost no problem of wear, and the amount of wear powder is still insignificant. Does not occur.

  In particular, the closer the tip contact portion 6 is to the tip discharge hole 3, the less the influence of film vibration. For example, when forming a uniform coating film with a film thickness of 100 μm and ± 2 μm, within 5 mm from the tip contact portion 6 It is necessary to provide the tip discharge hole 3, and the closer this distance is, the better. However, when the tip discharge hole 3 itself (slit forming member) is formed of a soft material, the shape of the tip discharge hole 3 itself is caused by this subtle deformation. However, the tip discharge hole 3 is made of a metal material M and is close enough to suppress film vibration at the tip discharge hole 3 at this close position. A surface treatment is applied to the tip protruding portion of the contact portion forming member 8 which is also formed of the metal material M at the position as described above to form a film of ceramic, super hard metal or molybdenum.

  In this embodiment, the metal contact portion forming member 8 provided with the tip contact portion 6 formed of a ceramic, cemented carbide or molybdenum by forming a coating on the tip surface is used as the tip discharge hole of the nozzle portion 4. 3 is configured to be detachably fixed to the metal material M forming 3.

  Further, as described above, in order to prevent minute deformation of the tip discharge hole 3, the tip discharge hole 3 is formed of a metal material M such as SUS, and the contact portion made of the same metal close to this, that is, within 1 to 5 mm. The tip 8 of the forming member 8 is formed of the ceramic, super hard metal or molybdenum by thermal spraying, and is disposed along the tip contact portion 6. Specifically, for example, a metal material for forming the tip discharge hole 3 is used. The metal contact portion forming member 8 is detachably mounted along M.

  Therefore, it is easy to manufacture and replaceable, and the contact portion forming member 8 is fixed in contact with the positioning surface so that the protruding dimensional accuracy of the tip contact portion 6 is improved. Yes.

  That is, in this embodiment, as shown in FIGS. 1 to 4, the conveyance of the nozzle unit 4 formed by superposing the metal material M through a slit gap communicating with the coating liquid supply path (liquid supply unit 1). A metal member M (nozzle forming half) on the upstream side is formed in a shape in which a shoulder portion is cut out, and a metal contact portion forming member 8 is positioned and brought into contact therewith, and further a metal pressing portion is brought into contact therewith. However, the contact portion forming member 8 is configured to be detachably fixed with a fastening bolt in a state of being laid along the metal material M forming the tip discharge hole 3.

  The tip portion (tip contact portion 6) of the contact portion forming member 8 is also formed to be larger than the film width in the same manner as the tip discharge hole 3, and slightly protrudes from the tip discharge hole 3 in the vicinity of the tip discharge hole 3. A front end portion is formed so as to be juxtaposed with the slit-shaped front end discharge hole 3 in the film width direction to form a front end contact portion 6, and a predetermined range so as to be in sliding contact with the transported object 5 to be conveyed at a predetermined pressure. It is formed in a curved protruding shape that is in contact with and excellent in smoothness. That is, the tip contact portion 6 has a length in the width direction and a shape protruding from a curved ridge that slides in a surface contact state within a predetermined range instead of being in line contact with the film 5 in the film length direction. It is said.

  The tip portion of the contact portion forming member 8 is a tip contact portion 6. In this embodiment, as described above, a ceramic, cemented carbide, or molybdenum film is formed on the tip portion surface by the thermal spraying. A coating of 1 mm or less, for example, about 0.5 mm, on the tip surface is used as the tip contact portion 6, and the contact portion forming member 8 having the coating as the tip contact portion 6 formed on the tip surface is configured to be replaceable. . In addition, the protruding position of the tip contact portion 6 can be finely adjusted by inserting a shim into the bottom of the contact portion forming member 8.

  Further, in this embodiment, a support roll 7 is provided to support the upstream side of the film-like object 5 to be conveyed from the tip discharge hole 3, and the tip contact portion 6 is formed by setting the position of the support roll 7. It is set as the structure which adjusted and set the contact pressure of this front-end | tip contact part 6 as mentioned above by making it press-contact.

  Further, in this embodiment, the film-like coated body 5 that has been coated is dried on the downstream side of the film-like coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4. The drying mechanism C includes an air ejection support portion 18 that blasts and supports the coated body 5 in a non-contact manner by ejecting air to the film-shaped coated body 5 to be conveyed. Floating nozzle) is provided.

  The air ejection support portion 18 is provided in a state of being arranged side by side in a plurality of film conveying directions on the upper side and the lower side with the object 5 to be coated, and warm air that uses the air ejected from the air ejection support portion 18 as warm air In addition to providing a supply unit, in the present embodiment, a heater unit 21 using an IR heater is disposed in the floating drying unit to form a floating drying mechanism C that heats and dries from the surface and inside of the coating film.

  In the present embodiment, the air ejection support portions 18 disposed above and below the air supply from the air supply portion through the ejection holes 19 provided on the opposing surface facing the film-like coated body 5. The spray body 19 is configured to be ejected toward the coating body 5, and a large number of the ejection holes 19 are provided on the opposing surface of the air ejection support portion 18, and air is supplied from the numerous ejection holes 19 to the film-shaped coated body 5. It is set as the structure which suppressed the film vibration of the to-be-coated body 5 which arises with this drying mechanism C by spraying and supporting on both surfaces.

  More specifically, in the present embodiment, the facing surface of the air ejection support portion 18 is formed to be equal to or longer than the width of the film-like object 5 and is uniformly small on the facing surface. The hole-like ejection holes 19 are uniformly scattered at least in a range equivalent to the width of the film-like object 5 and an air ejection support portion 18 for ejecting air from the numerous ejection holes 19 is provided. The drying mechanism C is configured such that a plurality of films are arranged in parallel on the upper side and the lower side of the body to be coated 5.

  Therefore, in the prior art, the film vibration is remarkably generated by the floating drying mechanism C. However, in the present embodiment, by providing a large number of ejection holes 19 on the opposing surface of the air ejection support portion 18, for example, the same air volume is obtained. Even if there are many small holes 19 on the opposing surface, the air ejection speed can be reduced, and this low speed is supported by levitation with the air ejected from the numerous ejection holes 19, so that the conventional simple slit shape etc. The film vibration can be reduced as compared with the air ejection support portion 18 (floating nozzle) provided with the ejection holes 19 and the film vibration at the coating portion can be suppressed to a small extent in the first place.

  Accordingly, since the film vibration can be reduced, even if the film vibration is suppressed by the contact type nozzle portion 4, the contact pressure to the nozzle portion 4 can be reduced.

  Further, in the present embodiment, it is repeated, but has a predetermined length in the transport direction with a width substantially matching the width of the film-like object 5 to which air (warm air) is supplied. A large number of ejection holes 19 are provided on the opposing surface of the air ejection support portion 18 that blows air over a predetermined length range over the full width of the object to be coated 5.

  For example, air is blown in a range that takes about 1 second for the object to be coated 5 to pass through, and a large number of small injection holes 19 of, for example, 0.5φ are provided on the facing surface, and the inside of the air injection support portion 18 is provided. Is equipped with a perforated plate and mesh plate (baffle plate 22) that rectifies and homogenizes the air (warm air) supplied from the air (warm air) supply source, and finally the air supplied to the inside (surface It is configured so as to be uniformly ejected from the ejection holes 19 on the opposing surface).

  The larger the air ejection amount and the slower (lower) air ejection speed, the better the film holding effect that suppresses (attenuates) film vibration, so that small holes are uniformly scattered across the film width of the opposite surface. Forming.

  Further, in this embodiment, the air ejection support portions 18 are arranged in parallel in the conveying direction on both the upper side and the lower side with the film-shaped coated body 5 interposed therebetween, and the air ejection support portions 18 on the upper side face each other. The lower air ejection support portions 18 are provided at the positions, and the air ejection support portions 18 are arranged so as to alternately face each other in the vertical direction so that distortion such as torsion of the film-like coated body 5 does not occur. Floating and transporting, and with a structure that floats and dries by blowing a large amount of low-speed air (warm air) with a large number of small-hole jet holes 19, the film vibration is transmitted to the coating section on the upstream side of the transport Suppressed.

  In addition, the air ejection support portions 18 may be arranged in parallel so as to be opposed to each other so that the air jet support portions 18 are not vertically staggered but directly opposed vertically.

  As a result, coating is performed in the vicinity of the tip contact portion 6 of the nozzle portion 4 with the nozzle portion 4 brought into contact with the film-like object 5 to suppress film vibration. The drying mechanism C that has been formed is configured to be supported by floating by blowing air from both sides to the film-like coated body 5 through a large number of ejection holes 19 formed on the opposing surface of the air ejection support portion 18. Since the film vibration in the floating drying mechanism C can be reduced, the contact pressure between the film-like coated body 5 and the tip contact portion 6 of the nozzle portion 4 can be reduced. That is, since the film vibration is small, even if the contact pressure is small, the film can be applied accurately and uniformly with the film vibration suppressed. In addition, since the contact pressure can be reduced, the contact type nozzle portion 4 can reduce film vibrations and reduce damage to the workpiece 5 and wear.

  In other words, since the film vibration which is a problem can be reduced, the contact pressure of the tip contact portion 6 can be reduced. Therefore, the damage to the coated body 5 and the problem of wear can be reduced, and the material of the tip contact portion 6 can be reduced. Also in the selection, since it is difficult to damage, the selection range of materials that are difficult to wear is expanded. For example, it can be selected because it is difficult to damage, but even a material that is inherently easily worn is less likely to be worn.

  Further, a similar air nip non-contact type vibration suppressing mechanism D is further provided in front of the drying mechanism C to suppress film vibration by the contact type nozzle unit 4 while suppressing film vibration as much as possible.

  That is, in this embodiment, as described above, the nozzle portion 4 is disposed between the coating portion of the second coating mechanism B and the floating drying mechanism C, that is, between the support roll 7 and the drying mechanism C. A non-contact vibration suppressing mechanism D is provided between the nozzle unit 4 and the drying mechanism C.

  This non-contact type vibration suppressing mechanism D, like the drying mechanism C, is provided with plate-like air ejection portions 17 arranged vertically opposite to each other so as to sandwich the film-like workpiece 5 in a non-contact state. Air is ejected from a large number of air ejection holes provided in the ejection section 17 to press the object 5 to be coated with air pressure, and thereby the film vibration caused by the drying mechanism C that performs hot air drying in a floating manner is further reduced. Further non-contact support is performed so as to suppress and attenuate.

  Specifically, in the same manner as the drying mechanism C, if a predetermined range of the film-like coated body 5, for example, the width of the coated body 5 is 650 mm, a slightly larger width, for example, 800 mm The length is set to 600 mm, for example, and at least a range that takes about 1 second for the coated body 5 to pass between the air ejection portions 17 is pressed with air.

  Specifically, a large number of 0.5 φ air ejection holes are provided on the surface of the air ejection portion 17, and a perforated plate for rectifying and homogenizing the air supplied from the air supply source is provided in the air ejection portion 17. A net plate (baffle plate 22) is provided so that the air finally supplied to the inside is uniformly ejected from the air ejection holes 16 on the surface.

  A film holding effect that suppresses and attenuates the film vibration of the coated body 5 becomes better when the amount of air ejection is larger and the air ejection speed is slower.

  In this embodiment, the non-contact vibration suppression mechanism D is interposed as described above, and the film vibration caused by the drying mechanism C is suppressed as much as possible. With the second coating mechanism B by the thin film coating apparatus according to the invention, a thin film can be coated and formed with high accuracy even in double-side coating in which the opposite surface is coated in a state where one surface cannot be supported.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

DESCRIPTION OF SYMBOLS 1 Liquid supply part 2 Coating liquid 3 Tip discharge hole 4 Nozzle part 5 Coated body 6 Tip contact part 7 Support roll 8 Contact part formation member
16 Air outlet
17 Air outlet
18 Air ejection support
19 Outlet
21 Heater part A First coating mechanism B Second coating mechanism C Drying mechanism D Non-contact vibration suppression mechanism M Metal material

Claims (13)

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-shaped tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing the coating part facing this nozzle part. In a thin film coating apparatus configured to apply a coating liquid to the coated body in a thin film by transporting the working body relative to the nozzle portion, the sliding body is in sliding contact with the coated body. A thin film coating apparatus, wherein the tip contact portion of the nozzle portion is formed of ceramics, super hard metal or molybdenum.   The ceramic, the hard metal, or the molybdenum is formed on the surface of the tip of the nozzle portion that is in sliding contact with the object to be coated, and the front contact is formed of ceramic, a hard metal, or molybdenum. The thin film coating apparatus according to claim 1.   A coating of the ceramic, cemented carbide or molybdenum is formed by thermal spraying on the surface of the tip of the nozzle that is in sliding contact with the object to be coated, and the tip contact is made of ceramic, cemented carbide or molybdenum. The thin film coating apparatus according to claim 2, which is formed.   The tip discharge hole of the nozzle part is formed of a metal material facing through a gap, and is fixed to the metal material, and is used for forming a contact part that is in sliding contact with the object to be coated at a position close to the tip discharge hole. The ceramic, the cemented carbide or the molybdenum coating is formed on the surface of the tip of the member by the thermal spraying, and the tip contact part is used as the tip of the contact part forming member. The thin film coating apparatus according to claim 3, wherein the thin film coating apparatus is made of molybdenum.   5. The thin film coating apparatus according to claim 3, wherein the tip contact portion is configured by impregnating a lubricant on a surface film of the ceramic formed by the thermal spraying.   While discharging the coating liquid from the tip discharge hole of the nozzle part, the film-like coated object facing the nozzle part is conveyed to the nozzle part to the film-like coated object. In the thin film coating apparatus configured to coat the coating liquid in a thin film shape, the tip contact portion is provided on the upstream side of the coated body with respect to the tip discharge hole of the nozzle portion. The coating liquid discharged from the tip discharge hole on the transport downstream side of the contact portion is configured to coat and form a thin film on the film-like object to be transported to the tip discharge hole. The thin film coating apparatus according to any one of claims 1 to 5, wherein the tip contact portion is configured to suppress film vibration by contacting the film-like object to be coated.   A support roll that supports the upstream side of conveyance from the tip discharge hole of the film-like coated body is provided, and the contact pressure of the tip contact portion is adjusted and set by setting the position of the support roll. The thin film coating apparatus according to claim 6.   A drying mechanism for drying the film-like coated body after the coating is provided on the downstream side of the film-shaped coated body with respect to the tip discharge hole of the nozzle portion, and the drying mechanism is A plurality of films on the upper side and the lower side of the air jet support part for supporting the levitating support of the coated body in a non-contact manner by ejecting air onto the film-like coated body to be conveyed Provided side by side in the conveying direction, and having a configuration comprising a warm air supply section that uses the air ejected from the air ejection support section as warm air or a heater section that heats and drys the coating film of the object to be coated, The air ejection support portions disposed above and below the drying mechanism are arranged so that air supplied from an air supply portion is directed to the coating body through ejection holes provided on a surface facing the film-shaped coating body. The ejection hole is formed on the opposite surface of the air ejection support portion. By providing a large number and blowing and supporting the air from both sides of the film-like coated body by the air from the numerous ejection holes, the film vibration of the coated body generated by this drying mechanism is suppressed. The thin film coating apparatus of any one of Claims 1-7 characterized by these.   The facing surface of the air ejection support portion of the drying mechanism is formed to be equal to or longer than the width of the film-like object to be coated, and the small-hole-shaped ejection holes are uniformly formed on the facing surface. Formed uniformly in the same range as the width of the film-like object to be coated, and the air ejection support parts for ejecting air from the numerous ejection holes are respectively located above and below the object to be coated. The thin film coating apparatus according to claim 8, wherein the drying mechanism is configured in parallel in a plurality of film conveying directions.   An air ejection portion that suppresses film vibration by blowing air to the film-shaped coated body on the upstream side of the transport of the drying mechanism on the downstream side of transport of the coated body with respect to the tip discharge hole of the nozzle portion. The thin film coating apparatus according to any one of claims 1 to 9, wherein a non-contact type vibration suppressing mechanism is provided so as to be opposed to the film-shaped object to be coated.   The non-contact type vibration suppression mechanism is provided in parallel with both surfaces of the film-like object to be coated, and the air ejection portions are arranged close to each other, and a large number of air is ejected to the opposing surfaces of the air ejection portions. The thin film coating apparatus according to claim 10, wherein an air ejection hole is formed.   A double-sided thin film coating apparatus for coating on both sides of the film-like object to be coated, the first coating mechanism for coating on one side, and further coating on the opposite side, and this double-sided coating And a second coating mechanism having a drying mechanism for drying the finished coated body, and the second coating mechanism having the drying mechanism is a thin film coating according to any one of claims 1 to 11. A double-sided thin film coating apparatus characterized by using a processing apparatus.   A lithium ion battery in which a metal film is used as the object to be coated, and a positive electrode active material or a negative electrode active material of a lithium ion battery is used as the coating liquid to be applied on both surfaces, and the thin film is applied on both surfaces. 13. The double-sided thin film coating apparatus according to claim 12, wherein the forming material is produced.

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