JP2011139998A - Thin film coating device and double-sided thin film coating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an epoch-making thin film coating device and a double-sided thin film coating device using the same, capable of applying double-sided coating so as to form the thin film continuously, precisely, and speedily before dried, especially capable of reducing the damage of the metal-made film (body 5 to be coated) to be the substrate when producing a lithium ion battery-forming material, and reducing the failure due to generation or inclusion of abrasion powder at an end contact part of a nozzle, enabling the production of the lithium ion battery-forming material speedily by the both-sided coating. <P>SOLUTION: The thin film coating device is so configured to prevent the film vibration that a great number of ejection holes 19 are formed in the opposing surface opposite to the film-like shaped body 5 to be coated of an air ejection support 18 in a floating type drying mechanism C so as to float and support the same by blowing air to both surfaces of the film-like shaped body 5 to be coated. A tip end contact part 6 of the nozzle 4 is formed of a synthetic resin material P or ceramics, etc. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention is configured such that, for example, a thin film is coated on a surface of a coating body such as a film or a plate by transporting a coating body such as a film or a plate to a nozzle portion that discharges a coating liquid from a slit-shaped tip discharge hole After coating on one side of the coated thin film coating device and the object to be coated, coat it on the opposite side before drying it, coat both sides and then dry it on both sides of the object to be coated. The present invention relates to a double-sided thin film coating apparatus for coating and forming a thin film.

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-shaped tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing the coating part facing this nozzle part. In the thin film coating apparatus configured to apply the coating liquid to the coated body in a thin film by transporting the body to the nozzle section, the nozzle section is close to the coated body. In this state, the tip contact part of the nozzle part is in contact with the object to be coated rather than the discharge coating. In some cases, a contact type nozzle portion to be coated can be formed with a uniform film thickness with high accuracy. For example, when the object to be coated is in the form of a film, if the surface opposite to the coating surface of this film-shaped object to be coated can be supported, the opposite surface is supported by a coating support roll, etc. Coating can be performed with the nozzle part close to each other with no vibration, but if the opposite surface cannot be supported, even if the coating surface on the upstream side is supported by a support roll, it occurs on the downstream side of the conveyance. Vibration is transmitted, for example, because air is blown in a drying process such as warm air (hot air) drying or IR drying (for floating conveyance), the vibration is transmitted to the film and uniform coating cannot be performed, and the film thickness cannot be controlled accurately.

  However, as described above, if the tip contact portion of the nozzle portion is pressed into contact with the film-like object to be coated and applied in the vicinity of the tip contact portion, the film vibration is attenuated, and a thin film having a uniform thickness Can be formed with high accuracy.

  In particular, when a thin film of the order of 100 to 200 μm is applied and formed in the wet state, when the opposite surface opposite to the coating surface cannot be supported, the contact type is more effective than the method of applying the nozzle portion close to the coating surface. The nozzle part is preferred.

  In addition, after coating on one side of the object to be transported by the first coating mechanism, the opposite surface is also coated by the second coating mechanism before drying such as hot air drying or IR drying. In the coating part of the second coating mechanism that coats the opposite surface of the double-sided thin film coating device that can improve the downsizing and mass productivity of the device by drying with the drying mechanism after coating, it is opposite to the coating surface Since the one side of the side has already been coated by the first coating mechanism and has not yet been dried, it cannot be supported from this one side and the above-mentioned problems occur, and it is desirable to use a contact type nozzle part. .

  However, when the contact type nozzle part is used, the uniformity accuracy of the film thickness can be improved and the film vibration as described above can be suppressed. On the other hand, due to the contact between the object to be coated and the tip contact part of the nozzle part, If the material of the tip contact part of the nozzle part is selected to have a low hardness in order to prevent damage to the object to be coated, the tip contact will occur even if this damage is suppressed. The wear of the tip contact part may be mixed into the coating film more than permissible, and the tip contact part may be reduced due to wear, resulting in incorrect protrusion dimension accuracy, requiring replacement or readjustment. In addition, even if the tip discharge hole is slightly deformed by the deformation of the tip contact portion, there is a possibility that a uniform thin film cannot be formed.

  In particular, a metal film such as aluminum or copper is used as the object to be coated, and a positive electrode active material such as lithium cobaltate or a negative electrode active material such as graphite is mixed on this surface, and this is used as a coating liquid, and 100 μm. When producing a lithium ion battery forming material that forms and forms a thin film of the order, the coated body is likely to be damaged and may become defective. If mixed, this also becomes defective, so there is a problem that the contact type nozzle part is difficult to put into practical use.

  Therefore, when preparing such a lithium ion battery forming material, particularly a lithium ion battery forming material which is applied on both sides to reduce the size and increase the output, the opposite surface is applied before drying after coating on one side. It is difficult to realize the above-mentioned double-sided coating to improve the downsizing and mass productivity of the apparatus, but it is difficult due to the above problems.

  In other words, if you try to apply double-sided coating before drying, this one side cannot be supported when coating the opposite side after coating one side, and the opposite side coated side is the upstream side of this uncoated transport Because of film vibration in the floating drying process such as warm air (hot air) drying on the downstream side of the conveyance, depending on the nozzle part of the non-contact type (applying close proximity), a uniform film thickness can be obtained. The coating cannot be formed.

  More specifically, the drying mechanism after coating in the coating section is provided with a heater section such as an IR heater for drying the coating film from the inside, or a temperature for drying the surface with warm air (hot air). Although it is configured to have an air blowing part, if this film-like object cannot be supported and conveyed by a roller, for example, if both sides are dried after double-sided coating as described above, it cannot be supported and conveyed by a roller. , And drying in a non-contact support (floating conveyance).

  That is, as shown in FIGS. 9 and 10, a plurality of air ejection supports are arranged side by side in the film conveying direction on the upper side and the lower side across the film-like object 5 to be conveyed after coating. The part 28 (floating nozzle) is arranged, and the air supplied from the air supply source is ejected from a slit-like ejection hole 29 (floating nozzle hole) provided on the opposite surface, and this film pressure is applied by this air pressure. The body 5 is conveyed while being supported in a floating state. This air is used as warm air (hot air), and a heater unit such as an IR heater is provided in the drying unit.

  Therefore, when a film-like object to be coated such as a double-sided coating apparatus cannot be contacted and supported in this way, the film is vibrated remarkably and the non-contact type nozzle is caused by the floating drying by the floating nozzle as described above. The coating cannot be applied uniformly and accurately.

  In addition, when the opposite surface is applied after drying once after single-sided coating as in the past, there is a risk that the film thickness may change due to the temperature change of the coated surface. Therefore, when performing continuous double-sided coating that does not take up once, a device for performing the cooling process after the two times of drying and single-sided drying must be arranged. Larger and inferior in mass productivity.

  Therefore, there is a demand for a double-sided coating apparatus that can coat both sides before drying as described above. In particular, in the lithium ion battery forming material for which double-sided coating is desired, the size of the apparatus can be reduced. In order to achieve mass production by speeding up the production of a lithium ion battery forming material, a double-sided thin film coating apparatus capable of performing such double-sided coating is desired.

  The present invention solves such problems and can apply and form a thin film accurately and uniformly, and by using this, it can also realize double-sided coating that forms a thin film continuously and accurately before drying. In particular, it can be applied to both surfaces of a metal film as a base material of a lithium ion battery forming material with high precision and uniformity, and the present invention suppresses film vibration in a floating type drying mechanism, thereby reducing the film at the coating part. The vibration can be reduced, thereby reducing the contact pressure to the film-like workpiece even as a contact type nozzle, and this contact pressure can be reduced to solve the above problem, that is, the film-like coating. Damage to the body (a metal film in the production of lithium-ion battery forming materials), dimensional accuracy deviation or replacement or readjustment due to wear at the tip contact portion of the nozzle, and generation of wear powder Therefore, when selecting the material for the tip contact part of the nozzle part, for example, when the tip contact part is made of synthetic resin or ceramics by thermal spraying, for example, the lubricity and wear resistance can be reduced. The demand will be reduced and the allowable range in material selection will be expanded. For example, an innovative thin film coating apparatus that can reduce the size of the production apparatus for the lithium ion battery forming material coated on both sides, and mass production of the production, and It aims at providing a double-sided thin film coating apparatus.

  The gist of the present invention will be described with reference to the accompanying drawings.

  While having a nozzle part 4 for discharging the coating liquid 2 supplied from the liquid supply part 1 from the slit-like tip discharge hole 3, while discharging the coating liquid 2 from the tip discharge hole 3 of this nozzle part 4, The film-shaped coated body 5 facing the nozzle section 4 is conveyed to the nozzle section 4 so that the coating liquid 2 is applied to the film-shaped coated body 5 in a thin film. A drying mechanism C for drying the film-like coated body 5 after the coating is provided on the downstream side of the film-shaped coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4. The drying mechanism C includes an air ejection support portion 18 that ejects air to the film-like coated body 5 to be conveyed and floats and supports the coated body 5 in a non-contact manner. 5 are arranged in parallel in the film transport direction on the upper side and the lower side across 5 and ejected from this air ejection support 18 In a thin film coating apparatus having a configuration that includes a warm air supply section that uses hot air as the air to be heated or a heater section that heats and dry the coating film of the object 5 to be coated, the drying mechanism C is disposed above and below the drying mechanism C. The air jet support part 18 is configured to jet the air supplied from the air supply part from the jet hole 19 provided on the opposing surface facing the film-like object to be coated 5 toward the object to be coated 5. By providing a large number of the ejection holes 19 on the opposing surface of the air ejection support portion 18, and blowing and supporting air from the numerous ejection holes 19 on both surfaces of the film-like object to be coated 5, The present invention relates to a thin film coating apparatus characterized in that the film vibration of the coated body 5 generated by the drying mechanism C is suppressed.

  Further, the facing surface of the air ejection support portion 18 of the drying mechanism C is formed to be equal to or longer than the width of the film-like object to be coated 5, and the small holes are uniformly formed on the facing surface. The spray holes 19 are uniformly scattered at least in the range equivalent to the width of the film-like object 5 to be coated, and the air ejection support portion 18 for ejecting air from the many holes 19 is coated. 5. The thin film coating apparatus according to claim 1, wherein the drying mechanism C is configured such that a plurality of films are arranged in parallel in the film transport direction on the upper side and the lower side with respect to 5.

  The tip contact portion 6 of the nozzle portion 4 that is in sliding contact with the film-like object to be coated 5 is formed of synthetic resin material P, ceramics, cemented carbide, or molybdenum. , 2 relates to the thin film coating apparatus according to any one of the above.

  Further, the tip discharge hole 3 of the nozzle part 4 is formed of a metal material M facing through a gap, and the nozzle part 4 that is in sliding contact with the coated body 5 at a position close to the tip discharge hole 3. 4. The thin film coating apparatus according to claim 3, wherein the tip contact portion 6 is made of a synthetic resin material P, ceramics, cemented carbide, or molybdenum.

  The tip contact portion 6 is made of the synthetic resin material P that does not melt in the coating liquid 2 and has no electrical conductivity, or the ceramic, the hard metal, or the molybdenum by thermal spraying. 3. The thin film coating apparatus according to any one of items 3 and 4.

  The synthetic resin material P forming the tip contact portion 6 is a non-conductive synthetic resin material P that is excellent in lubricity and wear resistance, and has a shape that makes a surface contact without being sharp. 6. The tip contact portion 6 is formed so that the coated body 5 is not easily damaged and worn, and the wear powder does not have conductivity even when worn. This relates to a thin film coating apparatus.

  Further, the tip contact portion 6 is provided on the upstream side of the coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4, and the tip discharge hole 3 on the downstream side of the tip contact portion 6 is transported. The coating liquid 2 to be discharged is configured to coat and form a thin film on the film-like coated body 5 conveyed to the tip discharge hole 3, and the tip contact portion 6 has the film-like shape. The thin film coating apparatus according to any one of claims 1 to 6, wherein the film vibration is suppressed by contacting with the object to be coated 5.

  Moreover, the support roll 7 which supports a conveyance upstream side from the said front end discharge hole 3 of the said film-form to-be-coated body 5 was provided, and the contact pressure of the said front end contact part 6 was adjusted and set by the position setting of this support roll 7 8. The thin film coating apparatus according to claim 7, wherein the thin film coating apparatus is configured.

  Further, the tip discharge hole 3 is not formed by the tip contact portion 6 formed of the synthetic resin material P, and the tip discharge hole 3 is formed of a metal material M facing through a gap. The tip contact portion 6 formed of the synthetic resin material P is provided at a position in sliding contact with the object to be coated 5 in a proximity position within 5 mm from the distance from the tip. This relates to the thin film coating apparatus described in the item.

  10. The thin film coating apparatus according to claim 3, wherein a tip portion of the contact portion forming member 8 formed of the synthetic resin material P is the tip contact portion 6. It is concerned.

  11. The thin film coating apparatus according to claim 10, wherein the contact portion forming member 8 is sandwiched between or locked to the metal material M and supported and fixed to the metal material M. .

  Further, air is blown to the film-like coated body 5 on the upstream side of the drying mechanism C on the downstream side of the coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4 to cause film vibration. Any one of Claims 1-11 provided with the structure which provided the non-contact-type vibration suppression mechanism D which provided the air ejection part 17 which suppresses this on both sides of the said film-like to-be-coated body 5. This relates to the thin film coating apparatus described in the item.

  Further, the non-contact type vibration suppressing mechanism D is provided in parallel with both surfaces of the film-like coated body 5 so that the air ejection portions 17 are placed close to each other, and the air ejection portions 17 are opposed to each other. 13. The thin film coating apparatus according to claim 12, wherein a large number of air ejection holes 16 for ejecting air are formed.

  Moreover, it is a double-sided thin film coating apparatus that performs coating on both surfaces of the film-shaped coated body 5, and the first coating mechanism A that coats on one side, and further coating on the opposite side, and this And a second coating mechanism B having a drying mechanism C for drying the coated body 5 after the double-sided coating, and the second coating mechanism B having the drying mechanism C is as defined in claim 1. The present invention relates to a double-sided thin film coating apparatus using the thin film coating apparatus according to any one of the items.

  In addition, a metal film is used as the object to be coated 5, and a positive electrode active material or a negative electrode active material of a lithium ion battery is used as the coating liquid 2 to be coated on both surfaces, and this thin film is coated on both surfaces. 15. The double-sided thin film coating apparatus according to claim 14, wherein the lithium-ion battery forming material is manufactured.

  Since the present invention is configured as described above, it is possible to coat and form a thin film accurately and uniformly, and by using this, it is possible to realize double-sided coating that forms a thin film continuously and accurately before drying. It can be applied to both sides of the metal film that is the base material of the lithium-ion battery forming material with high accuracy and, in addition, the present invention suppresses film vibration in the floating drying mechanism, thereby suppressing film vibration in the coating part. This makes it possible to reduce the contact pressure on the film-like coated body even if it is a contact-type nozzle portion. By reducing this contact pressure, the above-mentioned problems can be solved, that is, the film-shaped coated body. (Metallic film is used in the production of lithium-ion battery forming materials) or dimensional accuracy is lost or replaced or readjusted due to wear on the nozzle tip contact area, and wear powder is generated or mixed. Therefore, when selecting the material for the tip contact part of the nozzle part, for example, when the tip contact part is made of synthetic resin or ceramics, for example, by spraying, there is a need for lubricity and wear resistance. The range of tolerances in material selection will be reduced, and for example, the innovative thin film coating device and double-sided coating device that can reduce the size and mass production of the lithium ion battery forming material coated on both sides. It becomes a thin film coating device.

  To explain further, the film-like object to be coated is supported in a floating state by blowing air blown from the opposed surfaces of the air blowing support portions provided on the upper and lower sides thereof. Although it is dried by a floating drying mechanism that dries with warm air or further provided with a heater portion, film vibration has been noticeably generated by this floating drying mechanism in the past, but in the present invention, this air ejection support portion By providing a large number of ejection holes on the opposite surface, for example, even if the air volume is the same, the air ejection speed can be reduced by forming a number of small hole-shaped ejection holes on the opposite surface. Since the air is supported by buoyant air, the film vibration can be reduced compared to the conventional air jet support (floating nozzle) provided with a simple slit-like jet hole. It can be suppressed originally small film vibration at the coated portion by.

  Accordingly, since the film vibration can be reduced, even if the film vibration is suppressed by the contact type nozzle portion, the contact pressure to the nozzle portion can be reduced.

  For example, in double-sided coating, the nozzle part generates film vibration due to floating drying as described above, but since the film vibration in this floating drying can be suppressed in the first place, the film shape that has finished single-sided coating on the upstream side of conveyance of the nozzle part When the opposite surface of the object to be coated is supported by a support roll, the angle between the nozzle portion and the support roll can be reduced to reduce the contact pressure at the tip contact portion of the nozzle portion.

  Therefore, when the film vibration is suppressed as a contact type nozzle, the film vibration in the drying mechanism, which is the film vibration generating part, is suppressed in the first place, so that the contact pressure of the nozzle part can be reduced. Since the tip contact portion is made of a synthetic resin or the like, the material selection range is expanded even when the problem of damage or wear of the object to be coated is further reduced.

  Further, in the invention described in claim 2, the present invention can be easily realized with a simpler configuration, and the thin film coating apparatus is further excellent in practicality.

  Further, in the invention described in claim 3, as described above, the problem of damage and wear of the coated body can be further reduced, and in the invention described in claim 5, the tip contact portion is dissolved in the coating liquid. In addition, it is made of synthetic resin material with excellent lubricity and ceramics by thermal spraying, etc., so it is an innovative thin film coating device that is difficult to damage the object to be coated, has excellent wear resistance, and can further reduce wear problems. It becomes.

  Further, in the invention according to claim 4, the coated body is slidably contacted with a synthetic resin material or ceramics which is hard to damage or wear, and the tip discharge hole is as usual. Since the tip contact portion made of a synthetic resin material is slidably contacted at a position close enough to suppress film vibration, the tip discharge hole changes due to the deformation of the synthetic resin material. Since there is no fear, the film thickness does not change, and it is an epoch-making thin film coating apparatus that can uniformly coat while suppressing film vibration.

  Further, in the invention described in claim 6, it is possible to further improve wear resistance by improving the lubricity by selecting the material of the synthetic resin material and by improving the smoothness by the shape of the contact surface. By making the resin material a non-conductive material, even if wear powder is generated and mixed in the coating liquid, it has no conductivity, so it does not hinder the function of the coating film and Become.

  In addition, for example, the coating liquid is PVDF (polyvinylidene fluoride) added with NMP (N methylpyrrolidone) that dissolves a difluoride compound but not a trifluoride compound or a tetrafluoride compound as a binder. When coating lithium acid or carbon graphite, the tip contact portion is formed of a tetrafluoride compound such as PTFE (polytetrafluoroethylene) or a trifluoride compound, so that the coating solution is non-conductive. It does not melt and has excellent lubricity and wear resistance. For example, metal film (aluminum or copper film) is softer than this, so it is harder to scratch and wear, reducing wear powder. In addition, even if it wears out and wear powder mixes with the coating liquid, it has no electrical conductivity, so it is difficult to cause trouble and can form a uniform coating film. The Makunuri Engineering unit.

  Further, in the present invention, since the contact pressure can be reduced by suppressing the film vibration in the floating drying as described above, it is further difficult to damage the object to be coated, and it is difficult to wear. In addition to PTFE, PE ( Polyethylene), PP (polypropylene), ceramics, etc. can be selected, and if such a material is used, it will be harder to wear and the need for replacement will be reduced. It becomes a typical thin film coating apparatus.

  Therefore, in the present invention, particularly in the inventions of claims 7 and 8, film vibration can be suppressed even in the case of a film-like object to be coated. In particular, the tip discharge hole is formed of a metal material, and the position close to this. By providing a tip contact part made of synthetic resin material, the shape of the tip discharge hole is hardly changed even if it is minute, and film vibration due to the drying process is suppressed even if the opposite surface cannot be supported by the support roll. Innovative thin film coating equipment that can be applied in a uniform state, can be applied uniformly, and does not damage the film as described above. Become.

  In particular, in the invention described in claim 8, the contact pressure to the tip contact portion of the nozzle portion can also be adjusted by adjusting the position of the support roll, and coating on a film-like coated body on which the opposite surface of the coating surface cannot be supported At this time, the film can be applied while making contact with an appropriate contact pressure while further suppressing film vibration, and the contact can be made so as not to be affected by the sufficiently suppressed film vibration, but it is a small contact that does not damage the film as much as possible. It is an excellent thin film coating apparatus that can be adjusted so as to slide and contact the tip contact portion at a gentle angle by moving the support roll so as to contact with pressure.

  In the inventions according to claims 9, 10, and 11, an extremely excellent thin-film coating apparatus that exhibits the above-mentioned functions and effects more satisfactorily with a simpler configuration.

  Further, in the inventions according to claims 12 and 13, the film vibration can be further suppressed as described above, and the problems of wear and damage to the object to be coated due to the use of the contact type nozzle part are also included. It is an extremely excellent thin film coating apparatus that can be further reduced.

  Further, in the invention described in claim 14, there is provided a first coating mechanism for coating on one side and a drying mechanism for further coating the opposite side and drying the coated body after the double-sided coating. Equipped with a two-coating mechanism that allows continuous double-sided coating without the need for a second drying process and a cooling process after drying, improving the mass productivity by reducing the size of the equipment and increasing the speed of double-sided coating Double-sided coating can be realized by using the thin film coating apparatus as the second coating mechanism having the drying mechanism, and the problem of wear of the contact-type nozzle part and damage to the coated body is less likely to occur. This is an epoch-making double-sided thin film coating device that can be put to practical use.

  In particular, the invention according to claim 15 is an epoch-making double-sided thin film coating apparatus capable of realizing the production of a lithium-ion battery forming material of double-sided coating that can achieve downsizing and mass production of such an apparatus.

It is schematic structure explanatory drawing of a present Example. It is expansion explanatory drawing of the coating part of a present Example. It is the expansion explanatory view which expanded further the coating part of a present Example. It is expansion explanatory drawing of the drying mechanism (floating drying mechanism) of a present Example. It is expansion explanatory drawing which shows another example of arrangement | positioning of the drying mechanism (floating drying mechanism) of a present Example. It is an expansion explanatory perspective view of the air ejection support part (floating nozzle) of the drying mechanism (floating drying mechanism) of a present Example. It is expansion explanatory drawing of the non-contact-type vibration suppression mechanism of a present Example. It is an expansion explanatory perspective view of the air ejection part of the non-contact-type vibration suppression mechanism of a present Example. It is expansion explanatory drawing of the drying mechanism (floating drying mechanism) of a prior art example. It is an expansion explanatory perspective view of the drying mechanism (floating drying mechanism) of a prior art example.

  An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

  While the coating liquid 2 is being discharged from the tip discharge hole 3 of the nozzle portion 4, the film-like coated body 5 is conveyed to the nozzle portion 4, so that the surface of the coated body 5 is uniform. Although a thin film is applied and formed, when the tip contact portion 6 of the nozzle portion 4 comes into contact with the object to be coated 5, a thin film having a uniform film thickness can be applied and formed with higher accuracy.

  In particular, since the object to be coated 5 is in the form of a film, film vibration can be suppressed by using the contact-type nozzle portion 4, so that the above functions and effects can be more satisfactorily exhibited and a uniform thin film can be formed by coating. .

  However, in the case where the surface of the coated body 5 is easily scratched or there is a possibility that the scratch or wear powder may be mixed, the tip contact portion 6 of the nozzle portion 4 is coated. It cannot be slid in contact with the surface of the work body 5.

  Particularly in the production of a lithium ion battery forming material, since a metal film such as aluminum or copper serving as a base material is used as the coated body 5, it is easily damaged, and in the positive electrode, a positive active material such as lithium cobaltate, In the negative electrode, a negative electrode active material such as carbon graphite is applied to uniformly apply a thin film of the order of 100 μm, so that slight damage to the metal film may be defective. Damage can be suppressed by using a soft material with a small hardness, but in this case as well, the tip contact portion 6 is reduced due to wear, and the protruding dimensional accuracy is distorted. For this reason, replacement and readjustment are required. The contact type nozzle part 4 cannot be used because there is a possibility that powder may be mixed into the thin film and this may also be defective. .

  In this respect, the present invention is applied in the vicinity of the tip contact portion 6 of the nozzle portion 4 with the nozzle portion 4 brought into contact with the film-like object 5 to suppress film vibration. The drying mechanism C, which has caused the above-described problem, is configured to support the surface by blowing air from a large number of ejection holes 19 formed on the opposing surface of the air ejection support portion 18 from both sides to the film-like object 5 to be coated. Thus, since the film vibration in the floating drying mechanism C can be reduced, the contact pressure between the film-like workpiece 5 and the tip contact portion 6 of the nozzle portion 4 can be reduced. That is, since the film vibration is small, even if the contact pressure is small, the film can be applied accurately and uniformly with the film vibration suppressed. In addition, since the contact pressure can be reduced, the contact type nozzle portion 4 can reduce film vibrations and reduce damage to the workpiece 5 and wear.

  In other words, since the film vibration which is a problem can be reduced, the contact pressure of the tip contact portion 6 can be reduced. Therefore, the damage to the coated body 5 and the problem of wear can be reduced, and the material of the tip contact portion 6 can be reduced. Also in the selection, since it is difficult to damage, the selection range of materials that are difficult to wear is expanded. For example, it can be selected because it is difficult to damage, but even a material that is easily worn becomes difficult to wear.

  Further, if the tip contact portion 6 of the nozzle portion 4 to be brought into contact with the coated body 5 is formed of, for example, a synthetic resin material P having excellent lubricity by surface contact, or ceramic, cemented carbide, or molybdenum by thermal spraying, a film Damage to the coated body 5 and wear problems can be reduced while suppressing vibrations, and the wear resistance can be reduced by using synthetic resin material P or ceramics with excellent lubricity. It becomes.

  In addition, if this synthetic resin material P is made of a material that does not dissolve in the coating liquid 2, it has excellent durability and is made of a non-conductive material. Does not interfere with the function of the coating film.

  As described above, it is desirable to form the tip contact portion 6 with a synthetic resin material P or ceramics. However, since the present invention reduces the film vibration in the floating drying mechanism C as described above, the contact pressure is reduced. Therefore, since it becomes a structure which can reduce the problem and damage to the to-be-coated body 5, even if it selects a material which is hard to give a damage but has low abrasion resistance, since the contact pressure is small, the to-be-coated body 5 The tip contact portion 6 is less likely to be damaged, and the frequency of replacement and position adjustment is reduced, resulting in excellent practicality.

  In particular, the closer the tip contact portion 6 is to the tip discharge hole 3, the less the influence of film vibration. For example, when forming a uniform coating film with a film thickness of 100 μm and ± 2 μm, within 5 mm from the tip contact portion 6 It is necessary to provide the tip discharge hole 3.

  Thus, the closer the distance between the tip contact portion 6 and the tip discharge hole 3 is, the better. However, when the tip discharge hole 3 itself (slit forming member) is formed of the synthetic resin material P, the tip discharge hole is caused by this subtle deformation. Since the shape of 3 itself is small but fluctuates, there is a possibility that uniform coating cannot be performed. Therefore, the tip discharge hole 3 is made of a metal material M, and film vibration at the tip discharge hole 3 can be suppressed at this close position. It is desirable to project the tip contact portion 6 formed of the synthetic resin material P at a sufficiently close position.

  When the synthetic resin material P is used, the tip contact portion 6 may be formed of the synthetic resin material P by coating or impregnating the protruding portion that is in sliding contact with the object to be coated 5.

  That is, for example, the tip contact portion 6 may be formed of the synthetic resin material 8 by impregnating the tip porous portion formed by coating or oxidizing the tip portion of the metal material M. In this case, there is deformation strength. Therefore, the tip contact portion 6 can be provided in this way at one tip portion forming the tip discharge hole 3.

  Further, in the case of coating, for example, PTFE becomes brittle when coated with a thickness of 40 μm or more. Therefore, it is necessary to manage the thickness of the coating. Therefore, the tip of the contact portion forming member 8 formed of the synthetic resin material P is connected to the tip contact portion 6. It is desirable to do.

  In this case, the contact portion forming member 8 formed of the synthetic resin material P is sandwiched and fixed by the metal material M, embedded in the metal material M, or the contact portion forming member 8 such as insert molding is used as the metal material. It is desirable to support and fix to M, and it is desirable to be able to replace or replace the tip contact portion 6 when it is worn out or when the lubricity is likely to deteriorate.

  Further, as described above, the tip discharge hole 3 is formed of a metal material M such as SUS in order to prevent minute deformation of the tip discharge hole 3, and the contact portion forming member 8 is brought close to this, that is, within 1 to 5 mm. The tip portion is disposed as the tip contact portion 6. Specifically, for example, a contact portion forming member 8 formed of a synthetic resin material P is provided along the metal material M forming the tip discharge hole 3, and further, If it is configured to hold down with the metal material M, it is easy to manufacture and can be replaced, and the deformation strength of the contact portion forming member 8 and the tip contact portion 6 at the tip thereof is good, so that it is more practical.

Further, when the tip contact portion 6 is made of ceramics, super hard metal, or molybdenum, it is formed by thermal spraying on the tip portion of a SUS material as a base material. For example, in the case of ceramics, Al ₂ O ₃ , TiO ₃ , Cr _2. For example, in order to further improve lubricity, it is preferable to impregnate a lubricant such as silicon by spraying O ₃ or the like.

  Further, WC-Co may be used as the hard metal, and molybdenum having excellent lubricity and high wear resistance may be sprayed. In these cases as well, the lubricity is excellent, the damage is difficult, the wear is difficult, the frequency of replacement and readjustment can be reduced, and the practicality is excellent.

  In addition, in the present invention, since the contact pressure may be small, the tip contact portion 6 is made of synthetic resin and the like, so that the coated body 5 is not further damaged and is not easily worn. Excellent in properties. In other words, since it is harder to wear and less decreases, the durability that can be used without replacement is improved, or even if replacement is required, this frequency can be reduced.

  Further, in selecting a material such as this synthetic resin, it is necessary to use a material having abrasion resistance, but this requirement for abrasion resistance is lowered accordingly. For this reason, the range of materials that can be selected is expanded, and even the materials with low wear resistance as described above sufficiently satisfy this requirement.

  Further, for example, when producing a lithium ion battery forming material as described above, an aluminum or copper metal film is used as the object 5 to be coated, and lithium cobaltate is applied to the positive electrode and carbon graphite is applied to the negative electrode. At this time, for example, a binder obtained by dissolving PVDF in NMP as described above is used as the coating liquid 2. However, the coating liquid 2 is excellent in durability without being dissolved in the binder of the coating liquid 2. As a synthetic resin material P that is not scratched and has excellent wear resistance and good lubricity, a tetrafluoride compound or a trifluoride compound such as PTFE is used, but PE or PP that does not easily cause damage is used instead. In any case, the contact pressure can be reduced, so that the problem of damage and wear can be further reduced.

  Further, for example, the tip contact portion 6 is provided by disposing the tip portion of the PE or PP contact portion forming member 8 at a position close to the tip discharge hole 3 so as to slightly protrude from the tip discharge hole 3.

  That is, by providing the tip contact portion 6 of the contact portion forming member 8 in the vicinity of the tip discharge hole 3, the above-mentioned action and effect are reliably and satisfactorily exhibited, and the metal film 5 is scratched while suppressing film vibration. The contact part itself does not wear easily, and the generation and contamination of wear powder can be reduced, the frequency of replacement is small, and even if it is mixed in, the amount of the coating is small and has no electrical conductivity, which hinders the function of the prepared coating film. An extremely excellent contact-type nozzle unit 4 that is not present can be realized.

  This makes it extremely useful as a coating apparatus used for the second coating mechanism in double-sided coating. For example, a lithium ion battery forming material can be produced by a double-sided coating apparatus that can achieve downsizing and mass productivity.

  As described above, in the present invention, since the problems of the contact type nozzle unit 4 can be reduced, a thin film can be uniformly formed using the contact type nozzle unit 4 while suppressing film vibration. .

  Therefore, even in the case of the film-like coated body 5, the above-mentioned problem is hardly caused even when the opposite surface is coated after the single-sided coating in the double-sided coating, and is caused by a drying process such as warm air (hot air) drying. Innovative thin film coating equipment and double-sided thin film that can realize the above-mentioned double-sided coating that can reduce the size of the equipment and improve the mass productivity by increasing the speed of double-sided coating because the film vibration can be controlled well. It becomes a coating device.

  In particular, double-sided coating is required for mass productivity due to such an improvement in production speed, and it is necessary to suppress damage to the object to be coated 5 (metal film) by the contact-type nozzle portion 4 and mixing of wear powder. In the production of the lithium ion battery forming material, a double-sided thin film coating apparatus having extremely excellent practicality is obtained.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, a thin film coating apparatus that is extremely useful for applying a thin film to the film-like object 5 in a state in which the opposite surface cannot be supported is used. The double-sided thin film coating apparatus is constituted by using the thin film coating apparatus according to the present invention when the opposite surface is continuously coated, and particularly the problem of film vibration and the contact type nozzle for solving the problem This is a double-sided thin film coating apparatus that solves both of the problems of the unit 4.

  That is, this example is a double-sided thin film coating apparatus for coating on both sides of the film-like object 5 to be coated on the opposite side of the first coating mechanism A for coating on one side. And a second coating mechanism B having a drying mechanism C that dries the coated body 5 that has been subjected to the double-side coating, and the following thin film coating apparatus according to the present invention as the second coating mechanism B A double-sided thin film coating apparatus using

  Further, in this embodiment, as described above, the contact type nozzle portion 4 that solves the problem of film vibration during double-sided coating is used, and the tip contact portion 6 of the nozzle portion 4 with the object to be coated 5 is synthesized. By using resin, ceramics, etc., the problems of the contact type nozzle unit 4 can be solved, and the downsizing of the apparatus in the production of the double-coated lithium ion battery, which has not been easily put into practical use, can be achieved. In addition, a double-sided thin film coating apparatus that can be manufactured speedily is realized.

  That is, a metal film such as aluminum or copper is used as the object to be coated 5, and the positive electrode active material of a lithium ion battery such as lithium cobaltate or carbon graphite is used as the coating liquid 2 to be coated on both surfaces. The double-sided thin film coating apparatus is configured to produce a lithium ion battery forming material in which this thin film is coated on both sides using a negative electrode active material.

  Specifically, for example, the coated body 5 is a metal film having a thickness of 10 to 20 μm and a width of 650 mm, and a binder is mixed with a positive electrode active material such as lithium cobalt oxide or a negative electrode active material such as carbon graphite on both surfaces of the film. The coating solution 2 is used to uniformly form a thin film of the order of 100 μm with an error of plus or minus 2 μm. The coating solution 2 supplied from the liquid supply unit 1 through the liquid reservoir 13 is slit. A nozzle portion 4 that discharges from the front end discharge hole 3 is disposed opposite to the film-like object 5 and the nozzle portion 4 is discharged while discharging the coating liquid 2 from the front end discharge hole 3 of the nozzle portion 4. The coating liquid 2 is applied to the coating body 5 in the form of a thin film by transporting the film-shaped coating body 5 opposed to 4 to the nozzle portion 4.

  In the present embodiment, the first coating mechanism A that first coats one side of such a film-shaped coated body 5 with the coating liquid 2 is a film-shaped coated roll wound around a supply roll 14. A conventional non-contact type in which a thin film is applied and formed on one side by pulling out the body 5 and supporting the surface opposite to the coating surface with a coating support roll 15 while bringing the tip discharge hole 3 of the nozzle portion 4 close to one side. The film-like coated body 5 that has not been subjected to the drying process without passing through the drying process and the cooling process without finishing the one-side coating by the first coating mechanism A The opposite surface is coated by the contact type nozzle unit 4 by the second coating mechanism B without supporting the coated one side, and after this double-sided coating is finished, for example, a floating type that is dried by IR or hot air A drying mechanism C is provided.

  This eliminates the need for two drying steps and cooling steps, and allows continuous double-sided coating, enabling mass production by reducing the size of the device and increasing the production speed when producing lithium ion batteries.

  In this embodiment, the thin film coating apparatus according to the present invention is applied to the second coating mechanism B having the drying mechanism C of such a double-sided thin film coating apparatus.

  Specifically, in the present embodiment, the film-like coated body that has finished this coating on the downstream side of conveyance of the film-shaped coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4. The drying mechanism C includes a drying mechanism C that dries the air, and the drying mechanism C ejects air to the film-like coated object 5 to be transported and floats and supports the coated object 5 in a non-contact manner. A portion 18 (floating nozzle) is provided.

  The air ejection support portion 18 is provided in a state of being arranged side by side in a plurality of film conveying directions on the upper side and the lower side with the object 5 to be coated, and warm air that uses the air ejected from the air ejection support portion 18 as warm air In addition to providing a supply unit, in the present embodiment, a heater unit 21 using an IR heater is disposed in the floating drying unit to form a floating drying mechanism C that heats and dries from the surface and inside of the coating film.

  In the present embodiment, the air ejection support portions 18 disposed above and below the air supply from the air supply portion through the ejection holes 19 provided on the opposing surface facing the film-like coated body 5. The spray body 19 is configured to be ejected toward the coating body 5, and a large number of the ejection holes 19 are provided on the opposing surface of the air ejection support portion 18, and air is supplied from the numerous ejection holes 19 to the film-shaped coated body 5. It is set as the structure which suppressed the film vibration of the to-be-coated body 5 which arises with this drying mechanism C by spraying and supporting on both surfaces.

  More specifically, in the present embodiment, the facing surface of the air ejection support portion 18 is formed to be equal to or longer than the width of the film-like object 5 and is uniformly small on the facing surface. The hole-like ejection holes 19 are uniformly scattered at least in a range equivalent to the width of the film-like object 5 and an air ejection support portion 18 for ejecting air from the numerous ejection holes 19 is provided. The drying mechanism C is configured such that a plurality of films are arranged in parallel on the upper side and the lower side of the body to be coated 5.

  Therefore, in the prior art, the film vibration was remarkably generated by the floating drying mechanism C. However, in the present invention, by providing a large number of ejection holes 19 on the opposing surface of the air ejection support portion 18, for example, the same air volume can be obtained. However, by forming a large number of small hole-shaped ejection holes 19 on the opposing surface, the air ejection speed can be reduced, and the air ejected from a large number of the ejection holes 19 at this low speed is supported by levitation. Film vibration can be reduced as compared with the air ejection support portion 18 (floating nozzle) provided with the ejection holes 19, and thus film vibration at the coating portion can be suppressed to a small extent in the first place.

  Accordingly, since the film vibration can be reduced, even if the film vibration is suppressed by the contact type nozzle portion 4, the contact pressure to the nozzle portion 4 can be reduced.

  Further, in the present embodiment, it is repeated, but has a predetermined length in the transport direction with a width substantially matching the width of the film-like object 5 to which air (warm air) is supplied. A large number of ejection holes 19 are provided on the opposing surface of the air ejection support portion 18 that blows air over a predetermined length range over the full width of the object to be coated 5.

  For example, air is blown in a range that takes about 1 second for the object to be coated 5 to pass through, and a large number of small injection holes 19 of, for example, 0.5φ are provided on the facing surface, and the inside of the air injection support portion 18 is provided. Is equipped with a perforated plate and mesh plate (baffle plate 22) that rectifies and homogenizes the air (warm air) supplied from the air (warm air) supply source, and finally the air supplied to the inside (surface It is configured so as to be uniformly ejected from the ejection holes 19 on the opposing surface).

  The larger the air ejection amount and the slower (lower) air ejection speed, the better the film holding effect that suppresses (attenuates) film vibration, so that small holes are uniformly scattered across the film width of the opposite surface. Forming.

  Further, in this embodiment, the air ejection support portions 18 are arranged in parallel in the conveying direction on both the upper side and the lower side with the film-shaped coated body 5 interposed therebetween, and the air ejection support portions 18 on the upper side face each other. The lower air ejection support portions 18 are provided at the positions, and the air ejection support portions 18 are arranged so as to alternately face each other in the vertical direction so that distortion such as torsion of the film-like coated body 5 does not occur. Floating and transporting, and with a structure that floats and dries by blowing a large amount of low-speed air (warm air) with a large number of small-hole jet holes 19, the film vibration is transmitted to the coating section on the upstream side of the transport Suppressed.

  In addition, the air ejection support portions 18 may be arranged in parallel so as to be opposed to each other so that the air jet support portions 18 are not vertically staggered but directly opposed vertically.

  Further, a similar air nip non-contact type vibration suppressing mechanism D is further provided in front of the drying mechanism C to suppress film vibration by the contact type nozzle unit 4 while suppressing film vibration as much as possible.

  That is, in this embodiment, as described above, the nozzle portion 4 is disposed between the coating portion of the second coating mechanism B and the floating drying mechanism C, that is, between the support roll 7 and the drying mechanism C. A non-contact vibration suppressing mechanism D is provided between the nozzle unit 4 and the drying mechanism C.

  This non-contact type vibration suppressing mechanism D, like the drying mechanism C, is provided with plate-like air ejection portions 17 arranged vertically opposite to each other so as to sandwich the film-like workpiece 5 in a non-contact state. Air is ejected from a large number of air ejection holes provided in the ejection section 17 to press the object 5 to be coated with air pressure, and thereby the film vibration caused by the drying mechanism C that performs hot air drying in a floating manner is further reduced. Further non-contact support is performed so as to suppress and attenuate.

  Specifically, in the same manner as the drying mechanism C, if a predetermined range of the film-like coated body 5, for example, the width of the coated body 5 is 650 mm, a slightly larger width, for example, 800 mm The length is set to 600 mm, for example, and at least a range that takes about 1 second for the coated body 5 to pass between the air ejection portions 17 is pressed with air.

  Specifically, a large number of 0.5 φ air ejection holes are provided on the surface of the air ejection portion 17, and a perforated plate for rectifying and homogenizing the air supplied from the air supply source is provided in the air ejection portion 17. A net plate (baffle plate 22) is provided so that the air finally supplied to the inside is uniformly ejected from the air ejection holes 16 on the surface.

  A film holding effect that suppresses and attenuates the film vibration of the coated body 5 becomes better when the amount of air ejection is larger and the air ejection speed is slower.

  In this embodiment, the non-contact vibration suppression mechanism D is interposed as described above, and the film vibration caused by the drying mechanism C is suppressed as much as possible. With the second coating mechanism B by the thin film coating apparatus according to the invention, a thin film can be coated and formed with high accuracy even in double-side coating in which the opposite surface is coated in a state where one surface cannot be supported.

  Further, specifically, the thin film coating apparatus used as the coating portion of the second coating mechanism B of the present embodiment is a tip contact portion of the nozzle portion 4 that is in sliding contact with the film-shaped workpiece 5. 6 is not made of the metal material M forming the nozzle portion 4 (tip discharge hole 3), but is made of a synthetic resin material P that is not dissolved in the coating liquid 2 and has no conductivity.

  That is, the tip contact portion 6 is not made of metal, but is formed of a synthetic resin material P that is excellent in lubricity and non-conductive and is not eroded by the coating liquid 2.

  More specifically, the tip discharge hole 3 is formed of a metal material M facing through a gap, and has a shape that slightly protrudes at a position close to the tip discharge hole 3, and to be coated with a predetermined contact pressure. In this embodiment, the tip contact portion 6 is not made of metal but is made of a synthetic resin.

  The synthetic resin material P forming the tip contact portion 6 is made of a synthetic resin material P that is non-conductive, excellent in lubricity and excellent in wear resistance, and is formed in a shape that makes a surface contact without a sharp shape. Thus, the tip contact portion 6 is configured such that the coated body 5 is not easily damaged and worn, and even when worn, the wear powder does not have conductivity.

  Specifically, as such a synthetic resin material P, it is a synthetic resin material P made of a trifluoride compound or a tetrafluoride compound, which is relatively inexpensive and easy to obtain and process, and has the above-described performance. In particular, as described above, in the production of a lithium ion battery forming material, PTFE which does not dissolve in the coating liquid 2 used at this time and exhibits the above performance (action / effect) well is optimal. It can also be said.

  However, it is desirable to further improve the wear resistance so that the hardness is further lowered so as not to cause further damage, or the tip contact portion 6 is reduced due to wear and the need for replacement does not occur.

  In this regard, in the present invention, since the film vibration in the floating drying mechanism C is reduced as described above, the contact pressure can be reduced, so that the problem of damage to the coated body 5 and wear can be reduced. Therefore, even if a material with low wear resistance is selected, since the contact pressure is small, it is more difficult to damage the workpiece 5 and wear, and the tip contact portion 6 is difficult to reduce and can be replaced or adjusted. The frequency of this will decrease and it will become more practical.

  That is, in the present invention, since the contact pressure may be small, the tip contact portion 6 is made of synthetic resin having a low hardness so as not to damage the object 5 to be coated, but the wear resistance is so low. Even if it becomes difficult to wear, there is little reduction, so the durability that can be used without replacement is improved, and even if replacement is necessary, this frequency can be reduced, so the practicality improves further, The range of practical material selection will be expanded.

  Further, for example, when producing a lithium ion battery forming material as described above, an aluminum or copper metal film is used as the object 5 to be coated, and lithium cobaltate is applied to the positive electrode and carbon graphite is applied to the negative electrode. At this time, for example, a binder obtained by dissolving PVDF in NMP as described above is used as the coating liquid 2. However, the coating liquid 2 is excellent in durability without being dissolved in the binder of the coating liquid 2. As a synthetic resin material P that is not scratched and has excellent wear resistance and good lubricity, a tetrafluoride compound or a trifluoride compound such as PTFE is used, but PE or PP that does not easily cause damage is used instead. In any case, the contact pressure can be reduced, so that the problem of damage and wear can be further reduced.

  More specifically, in this embodiment, the tip of the contact portion forming member 8 formed of PE or PP is used as the tip contact portion 6 and the contact portion forming member 8 is fixed. The distal end contact portion 6 of the distal end portion is positioned in the vicinity of the distal end discharge hole 3 and is fixed in a slightly protruding state from the distal end discharge hole 3.

  That is, the tip discharge hole 3 itself is not formed by the tip contact portion 6 formed of the synthetic resin material P, and the tip discharge hole 3 is formed of a metal material M facing through a gap. A tip portion of a contact portion forming member 8 formed of PE or PP is disposed as a tip contact portion 6 at a position in sliding contact with the coated body 5 within a proximity position within 3 to 5 mm.

  The one side of the tip discharge hole 3 is formed of a synthetic resin simply by polymerization through the slit gap at the tip, and the tip of the tip discharge hole 3 made of one synthetic resin is used as the tip contact portion 6 to be coated. 5, when the tip contact portion 6 is slightly deformed, there is a possibility that the shape of the tip discharge hole 3 fluctuates slightly and a uniform coating film cannot be formed.

  In the present embodiment, the tip discharge hole 3 is formed by polymerizing a metal material M such as SUS as usual. That is, the metal material M is abutted with a shim or the like to form a slit gap, and a coating liquid supply path (liquid supply unit 1) for supplying the coating liquid 2 is communicated with the slit gap, so that the slit gap is formed. The tip discharge hole 3 is formed as described above, and the tip discharge hole 3 is only formed of the metal material M. The contact portion forming member is formed of the synthetic resin material P in the vicinity of the upstream side of the conveyance and slightly protruded from the tip discharge hole 3. 8 is provided, and the tip contact portion 6 is provided in the vicinity of the tip discharge hole 3 of the nozzle portion 4 separately from the tip discharge hole 3.

  In addition, the resin contact portion forming member 8 is supported and fixed to the metal material M so that the deformation strength of the contact portion forming member 8 and the tip contact portion 6 of the tip portion is improved and the positional fluctuation is less likely to occur. ing.

  For example, a contact portion forming member 8 made of PE is provided along the metal material M forming the tip discharge hole 3, and a metal material M is further provided as a pressing portion for forming a contact portion between the metal materials M. The member 8 is clamped and fixed. Alternatively, the metal material M may be embedded and locked.

  In this embodiment, the metal material M (nozzle forming half) on the upstream side of the nozzle portion 4 formed by polymerizing the metal material M through a slit gap communicating with the coating liquid supply path (liquid supply portion 1). Body) is formed in a shape in which a shoulder portion is cut out, and a contact portion forming member 8 made of PE is brought into contact therewith, and a metal pressing portion is further brought into contact with the contact portion forming member 8 between the metal materials M. It is set as the structure fixed with a fastening bolt in the state clamped between.

  The front end portion of the contact portion forming member 8 is also formed to be larger than the film width in the same manner as the front end discharge hole 3, and slightly protrudes from the front end discharge hole 3 in the vicinity of the front end discharge hole 3. The tip is formed so as to be juxtaposed with the tip discharge hole 3 as a tip contact portion 6, and the curved protruding shape is in a predetermined range so as to be in sliding contact with the workpiece 5 being conveyed at a predetermined pressure. Is formed. That is, the tip contact portion 6 has a length in the width direction and a shape protruding from a curved ridge that slides in a surface contact state within a predetermined range instead of being in line contact with the film 5 in the film length direction. It is said.

  Therefore, for example, the contact portion forming member 8 can be configured to be replaceable, and the protruding position of the tip contact portion 6 can be finely adjusted by inserting a shim into the bottom portion of the contact portion forming member 8, and according to the degree of wear. The shim can be adjusted to the proper position.

  Further, in this embodiment, a support roll 7 is provided to support the upstream side of the film-like object 5 to be conveyed from the tip discharge hole 3, and the tip contact portion 6 is formed by setting the position of the support roll 7. It is set as the structure which adjusted and set the contact pressure of this front-end | tip contact part 6 as mentioned above by making it press-contact.

  Therefore, the contact pressure to the tip contact portion 6 of the nozzle portion 4 can also be adjusted by adjusting the position of the support roll 7, and the film vibration is further increased during coating on the film-like coated body 5 where the opposite surface of the coating surface cannot be supported. Although it can be applied while being kept in contact with an appropriate contact pressure while keeping it well, it can be touched so as not to be affected by sufficiently suppressed film vibration, but it should be touched with a small contact pressure that does not damage the film as much as possible The support roll 7 can be moved to adjust the sliding contact with the tip contact portion 6 at a gentle angle, and the contact pressure can be reduced by suppressing the film vibration during the floating drying as described above. Even if a material with low hardness and low wear resistance is selected for the part 6, it is difficult to wear and the need for replacement can be reduced. An-term thin film coating apparatus.

  Therefore, even the film-like coated body 5 can suppress film vibration. In particular, the tip discharge portion 3 is formed of the metal material M, and the tip contact portion formed of the synthetic resin material P or the like at a position close to this. 6 is provided so that the shape of the tip discharge hole 3 is hardly changed even if it is minute, and film vibration due to the drying process can be applied in a state where the opposite surface can be supported by the support roll 7 even if it is not supported, and can be applied uniformly. Thus, as described above, it is an epoch-making thin film coating apparatus that does not damage the film, is not easily worn, and does not cause trouble even if wear powder is mixed.

  Further, the contact portion forming member 8 may be provided along the outside of the metal material M forming the tip discharge hole 3 using the contact portion forming member 8 as a plate material, and the tip contact portion 6 may be provided, or one half of the tip discharge hole 3 may be formed. The body is formed by the contact portion forming member 8, and the metal material M as a pressing portion is fastened and fixed to the outside of the contact portion forming member 8, and the contact portion forming member 8 has a sufficient width to be You may comprise so that the problem by the deformation | transformation of the discharge hole 3 may not arise easily.

  Further, the synthetic resin material P is embedded and fixed in a locked state with the metal material M, the portion protruding from the metal material M is cut off by processing, a protrusion is formed at a predetermined position, and the tip contact portion 6 is formed. It is good also as a structure.

  Further, as described above, the tip contact portion 6 may be formed of ceramics or the like by spraying the tip portion of the contact portion forming member 8 serving as a base material such as SUS.

  Further, the coating liquid 2 from the tip discharge hole 3 is discharged to the coated body 5 on the upstream side of conveyance of the coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4 of the contact type. A pre-coating portion for pre-coating before coating is provided, and coating is further applied to the coated body 5 previously coated by the pre-coating portion with the coating liquid 2 from the tip discharge hole 3. By doing so, the tip contact portion 6 of the nozzle portion 4 with the coated body 5 does not slide directly on the surface of the coated body 5 but slides on the precoated surface. You may comprise so that it may contact.

  In this embodiment, as described above, a thin film of the order of 100 μm is uniformly formed with an error of plus or minus 2 μm, and pre-coating is performed before the main coating by discharging from the tip discharge hole 3 of this nozzle portion 4. The pre-coating liquid used for the pre-coating of this pre-coating part is pre-coated with a 1/10 or 1 / 100th thin film depending on the part. What is necessary is just to make it the same liquid as the said coating liquid 2 of this coating applied by discharging from, or the binder mixed with the said coating liquid 2.

  Therefore, it is possible to coat the both sides of the metal film as a base material of the lithium ion battery forming material accurately and uniformly, and to solve the above-mentioned problems and damage the coated body 5 (metal film) or the tip contact portion of the nozzle portion. Defects due to the generation and mixing of wear powder can be further reduced, and the pre-coating by the pre-coating part can coat and form a thin film uniformly and accurately without affecting the main coating. Since the binder used in this coating is often a smooth liquid that is difficult to wear, damage and wear due to contact of the nozzle tip contact portion can be further suppressed, and the tip contact portion can be further prevented. It is possible to further suppress the mixing of wear powder, and it is further excellent in that there is little influence on the coating.

  More specifically, for example, the pre-coating portion may be provided in parallel with the tip discharge hole 3 by using the nozzle portion 4, and specifically, with respect to the tip discharge hole 3 and the tip contact portion 6. A pre-coating slit-shaped pre-coating front-end discharge hole for discharging the pre-coating liquid is provided in parallel with the front-end discharge hole 3 on the upstream side of conveyance of the object 5 to form a contact portion. The pre-coating portion may be configured by providing the outer surface of the member for use or in the outer surface.

  Also, when the coating liquid 2 and the pre-coating liquid of the main coating are the same liquid, the pre-coating liquid supply path is provided by branching from the liquid supply unit 1 to apply from the pre-coating tip discharge hole. What is necessary is just to comprise so that the process liquid 2 may be discharged as a pre-coating liquid.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

DESCRIPTION OF SYMBOLS 1 Liquid supply part 2 Coating liquid 3 Tip discharge hole 4 Nozzle part 5 Coated body 6 Tip contact part 7 Support roll 8 Contact part formation member
16 Air outlet
17 Air outlet
18 Air ejection support
19 Blow hole A First coating mechanism B Second coating mechanism C Drying mechanism D Non-contact vibration suppression mechanism M Metal material P Synthetic resin material

Claims (15)

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-like tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing this nozzle part The coating body is transported to the nozzle portion so that the coating liquid is applied in a thin film to the film-like coating body, and the tip discharge hole of the nozzle portion is configured. Provided on the downstream side of conveyance of the film-shaped coated body is a drying mechanism that dries the film-shaped coated body that has been coated, and the drying mechanism is transported to the film-shaped coated body An air ejection support part for ejecting air to the body and supporting the object to be levitated in a non-contact manner is provided side by side in a plurality of film conveying directions on the upper and lower sides of the object to be coated. A hot air supply unit that uses the air ejected from the ejection support unit as warm air In the thin film coating apparatus having a heater unit for heating and drying the coating film of the work body, the air ejection support unit disposed above and below the drying mechanism is configured to supply air supplied from an air supply unit. It is configured to eject from the ejection holes provided on the facing surface facing the film-shaped object to be coated, toward the object to be coated, and a large number of these ejection holes are provided on the facing surface of the air ejection support portion. The thin film coating is characterized in that the film vibration of the coated body generated by this drying mechanism is suppressed by blowing and supporting air from both sides of the film-shaped coated body by blowing air from the spray holes. Engineering equipment.   The facing surface of the air ejection support portion of the drying mechanism is formed to be equal to or longer than the width of the film-like object to be coated, and the small-hole-shaped ejection holes are uniformly formed on the facing surface. Formed uniformly in the same range as the width of the film-like object to be coated, and the air ejection support parts for ejecting air from the numerous ejection holes are respectively located above and below the object to be coated. The thin film coating apparatus according to claim 1, wherein the drying mechanism is configured in parallel in a plurality of film conveying directions.   The tip contact portion of the nozzle portion that is in sliding contact with the film-like object to be coated is formed of a synthetic resin material, ceramics, cemented carbide, or molybdenum. The thin film coating apparatus according to item.   The tip discharge hole of the nozzle part is formed of a metal material facing through a gap, and the tip contact part of the nozzle part that is in sliding contact with the coated body at a position close to the tip discharge hole is a synthetic resin material. 4. The thin film coating apparatus according to claim 3, wherein the thin film coating apparatus is made of ceramic, cemented carbide or molybdenum.   5. The tip contact portion is formed of a synthetic resin material that does not melt in the coating solution and has no electrical conductivity, or the ceramic, the cemented carbide metal, or the molybdenum by thermal spraying. The thin film coating apparatus of Claim 1.   The synthetic resin material forming the tip contact portion is made of a synthetic resin material that is non-conductive, excellent in lubricity and excellent in wear resistance, and formed into a shape that is in surface contact without a sharp shape, 6. The thin film coating apparatus according to claim 5, wherein the tip contact portion is configured so that the coated body is not easily damaged and worn, and the worn powder does not have conductivity even when worn.   The tip contact part is provided on the transport upstream side of the coated body with respect to the tip discharge hole of the nozzle part, and the coating liquid discharged from the tip discharge hole on the transport downstream side of the tip contact part is, A thin film is formed on the film-like object to be conveyed with respect to the tip discharge hole, and film vibration is caused by the tip contact portion coming into contact with the film-like object. It was comprised so that it might suppress, The thin film coating apparatus of any one of Claims 1-6 characterized by the above-mentioned.   A support roll that supports the upstream side of conveyance from the tip discharge hole of the film-like coated body is provided, and the contact pressure of the tip contact portion is adjusted and set by setting the position of the support roll. The thin film coating apparatus according to claim 7.   The tip discharge hole is not formed by the tip contact portion formed of the synthetic resin material, and the tip discharge hole is formed of a metal material facing through a gap, and the tip discharge hole is located at a position within 5 mm from the tip discharge hole. The thin film coating apparatus according to any one of claims 3 to 8, wherein the tip contact portion made of the synthetic resin material is provided at a position in sliding contact with an object to be coated.   The thin film coating apparatus according to any one of claims 3 to 9, wherein a tip portion of the contact portion forming member formed of the synthetic resin material is used as the tip contact portion.   11. The thin film coating apparatus according to claim 10, wherein the contact portion forming member is sandwiched between metal members or locked to a metal material and supported and fixed to the metal material.   An air ejection portion that suppresses film vibration by blowing air to the film-shaped coated body on the upstream side of the transport of the drying mechanism on the downstream side of transport of the coated body with respect to the tip discharge hole of the nozzle portion. The thin film coating apparatus according to any one of claims 1 to 11, wherein a non-contact vibration suppressing mechanism is provided so as to face the film-like object to be coated.   The non-contact type vibration suppression mechanism is provided in parallel with both surfaces of the film-like object to be coated, and the air ejection portions are arranged close to each other, and a large number of air is ejected to the opposing surfaces of the air ejection portions. The thin film coating apparatus according to claim 12, wherein an air ejection hole is formed.   A double-sided thin film coating apparatus for coating on both sides of the film-like object to be coated, the first coating mechanism for coating on one side, and further coating on the opposite side, and this double-sided coating And a second coating mechanism having a drying mechanism for drying the finished coated body, and the second coating mechanism having the drying mechanism is the thin film coating according to any one of claims 1 to 13. A double-sided thin film coating apparatus characterized by using a processing apparatus.   A lithium ion battery in which a metal film is used as the object to be coated, and a positive electrode active material or a negative electrode active material of a lithium ion battery is used as the coating liquid to be applied on both surfaces, and the thin film is applied on both surfaces. The double-sided thin film coating apparatus according to claim 14, wherein the forming material is produced.

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