JP2011194341A - Thin film coating device and double-sided thin film coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an epoch-making thin film coating device which can coat/form a thin film precisely and uniformly, using a nozzle part, albeit a non-contact type, and also, can make a precise and uniform formation of a continuous thin film on both sides of the film, before drying, specially can make a precise and uniform coating on both surfaces of a metallic film serving as a base material for a lithium ionic cell forming material, as well as a likewise epoch-making double-sided thin film coating device.SOLUTION: This thin film coating device can bring a coating liquid 2 to be discharged from an apex discharge hole 3 of the nozzle part 4 without bringing the nozzle part 4 into contact with a conveyed film-like material 5 to be coated. In addition, the thin film coating device is equipped with the nozzle part 4 arranged at a position where the film-like material 5 is pressed through the coating liquid 2.

Description

  The present invention, for example, a thin film coating configured to convey a film-like object to be coated and to form a thin film on the surface thereof with respect to a nozzle portion that discharges a coating liquid from a slit-like tip discharge hole After coating on one side of the device and the object to be coated, coat it on the opposite side before drying it, coat both sides, then dry and apply a thin film on both sides of the object to be coated The present invention relates to a double-sided thin film coating apparatus to be formed.

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-like tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing this nozzle part In the thin film coating apparatus configured to apply the coating liquid in a thin film shape to the film-shaped coated body by transporting the coated body to the nozzle section, the nozzle section is Provided near the downstream side of the workpiece to be transported with respect to the tip contact portion in the state where the tip contact portion of the nozzle portion is in contact with the subject to be coated rather than being applied close to the coated body by discharge coating. In some cases, it is possible to form a uniform film thickness with high accuracy by using a contact type nozzle portion that performs discharge coating from the tip discharge hole.

  In particular, when the object to be coated is in the form of a film, if the surface opposite to the coating surface of the film-like object to be coated can be supported, the opposite surface is supported by a coating support roll, etc. Coating can be performed with the nozzle part close to each other with no film vibration, but if the opposite surface cannot be supported, even if the coating surface on the upstream side is supported by a support roll, The generated vibration is transmitted, and for example, since air is blown in a drying process such as hot air drying or IR drying (for floating conveyance), the film is vibrated and cannot be uniformly applied, and the film thickness cannot be controlled accurately.

  However, if the tip contact portion of the nozzle portion is pressed and brought into contact with the film-like object as described above, the film vibration is suppressed, and a thin film having a uniform thickness can be applied and formed with high accuracy.

  In particular, when a thin film of the order of 100 to 200 μm is applied and formed in the wet state, when the opposite surface opposite to the coating surface cannot be supported, the contact type is more effective than the method of applying the nozzle portion close to the coating surface. The nozzle part is preferred.

  In addition, after coating on one side of the object to be transported by the first coating mechanism, the opposite surface is also coated by the second coating mechanism before drying such as hot air drying or IR drying. In the second coating mechanism that coats the opposite surface of the double-sided thin film coating device that can improve the downsizing and mass productivity of the device by drying with a drying mechanism after the work, the one side opposite to the coated surface is Since it has already been applied by the first application mechanism and has not yet been dried, it cannot be supported from this one side, causing the above-mentioned problems, and it is desirable to use a contact type nozzle.

  However, when the contact type nozzle part is used, the uniformity accuracy of the film thickness can be improved and the film vibration as described above can be suppressed. On the other hand, the film-like object to be coated and the tip contact part of the nozzle part If the material of the tip contact part of the nozzle part is selected to have a low hardness in order to suppress damage to the object, this damage can be suppressed. However, the tip contact part is likely to wear, and the wear powder from the worn tip contact part may be mixed into the coating film more than permissible. In addition, there is a possibility that a uniform thin film cannot be formed even if the tip discharge hole is slightly deformed due to the deformation of the tip contact portion.

  In addition, a metal film such as aluminum or copper is used as an object to be coated, and a binder or the like is mixed with a positive electrode active material such as lithium cobaltate or a negative electrode active material such as graphite on the surface thereof as a coating liquid. When a lithium ion battery forming material for coating and forming a thin film of the order of 100 μm is produced, there is a risk that the coated body is easily scratched and may become defective. If too much is mixed, this also becomes defective, and the contact type nozzle part has a problem that it is difficult to put it into practical use.

  Therefore, when preparing such a lithium ion battery forming material, particularly a lithium ion battery forming material which is applied on both sides to reduce the size and increase the output, the opposite surface is applied before drying after coating on one side. We want to realize the above-mentioned double-sided coating, which increases the size and mass productivity of the apparatus, but is difficult due to the above problems.

  In other words, if you try to apply double-sided coating before drying, this one side cannot be supported when coating the opposite side after coating one side, and the opposite side coated side is the upstream side of this uncoated transport Because of film vibration in the floating drying process such as warm air (hot air) drying on the downstream side of the conveyance, depending on the nozzle part of the non-contact type (applying close proximity), a uniform film thickness can be obtained. The coating cannot be formed.

  More specifically, the drying mechanism after coating in the coating section is provided with a heater section such as an IR heater for drying the coating film from the inside, or a temperature for drying the surface with warm air (hot air). Although it is configured to have an air blowing part, if this film-like object cannot be supported and conveyed by a roller, for example, if both sides are dried after double-sided coating as described above, it cannot be supported and conveyed by a roller. The drying is performed while supporting (floating conveyance) in a non-contact manner.

  That is, a plurality of air ejection support parts (floating nozzles) are arranged in parallel in the film conveying direction on the upper side and the lower side across the film-like object to be conveyed after coating, The air supplied from the supply source is ejected from a slit-like ejection hole (floating nozzle hole) provided on the opposite surface, and the film-like coated object is conveyed while being supported by this air pressure, The air is warm air (hot air), and a heater unit such as an IR heater is provided in the drying unit.

  Therefore, when a film-like object to be coated such as a double-sided coating apparatus cannot be contacted and supported in this way, the film is vibrated remarkably and the non-contact type nozzle is caused by the floating drying by the floating nozzle as described above. The coating cannot be applied uniformly and accurately.

  In addition, even if the film vibration due to this drying process is suppressed using a non-contact film vibration suppression mechanism, coating with a nozzle part that simply brings the nozzle part close to each other and makes it non-contact with the film part is also accurate with this film vibration. In addition, when the contact type is used, it is difficult to completely solve the problem of damage when the film-like object to be coated is a metal film.

  In addition, when applying the opposite side after drying once after single-sided coating as in the past, there is a risk of changes in film thickness due to temperature changes on the coated side, so after single-sided coating and drying Therefore, when performing continuous coating that does not take up once, it is necessary to arrange a device for performing the cooling process after two times of drying and single-sided drying. Larger and inferior in mass productivity.

  Therefore, there is a demand for a double-sided coating apparatus that can coat both sides before drying as described above. In particular, in the lithium ion battery forming material for which double-sided coating is desired, the size of the apparatus can be reduced. In order to achieve mass production by speeding up the production of a lithium ion battery forming material, a double-sided thin film coating apparatus capable of performing such double-sided coating is desired.

  The present invention solves such problems, and can apply and form a thin film with high precision and uniformity while using a non-contact type nozzle part to the last. Double-sided coating that forms a thin film uniformly can also be realized, and in particular, it can be applied to both sides of a metal film as a base material of a lithium ion battery forming material accurately and uniformly, and the above-mentioned problems can be solved, that is, the object to be coated. (Metallic film is used in the production of lithium ion battery forming materials) or due to wear of the tip contact part of the nozzle part, dimensional accuracy, necessity of replacement or readjustment, frequency, and generation / mixing of wear powder Accordingly, there is provided an epoch-making thin film coating apparatus and double-sided thin film coating apparatus that can reduce the size of the production apparatus of the lithium-ion battery forming material that has been coated on both sides and can be mass-produced. It is an object of the door.

  The gist of the present invention will be described with reference to the accompanying drawings.

  While having a nozzle part 4 for discharging the coating liquid 2 supplied from the liquid supply part 1 from the slit-like tip discharge hole 3, while discharging the coating liquid 2 from the tip discharge hole 3 of this nozzle part 4, The film-shaped coated body 5 facing the nozzle section 4 is conveyed to the nozzle section 4 so that the coating liquid 2 is applied to the film-shaped coated body 5 in a thin film. In the thin film coating apparatus, the coating liquid 2 discharged from the tip discharge hole 3 of the nozzle part 4 is brought into contact with the film-like coated object 5 to be conveyed without contacting the nozzle part 4, and The present invention relates to a thin film coating apparatus characterized in that the nozzle portion 4 is disposed at a position where the film-like coated body 5 is pressed through the coating liquid 2.

  Further, the nozzle part 4 is movable or a support roll 7 that supports the film-like object 5 is provided so that the nozzle part 4 does not contact the tip discharge hole 3 of the nozzle part 4. 2. The thin film coating according to claim 1, wherein the film pressure of the coated body 5 is suppressed by adjusting a contact pressure at which the coating liquid 2 discharged from the film is brought into contact with the film-shaped coated body 5. It relates to the construction equipment.

  Further, the coating liquid 2 to be discharged from the tip discharge hole 3 of the nozzle portion 4 is brought into press contact with the film-like coated object 5 to be conveyed without bringing the nozzle portion 4 into contact therewith. The angle in the range of 0.05 degree-1.00 degree was provided to the said film-like to-be-coated body 5 from the work liquid contact part as the starting point, The any one of Claims 1 and 2 characterized by the above-mentioned. This relates to a thin film coating apparatus.

  Further, the nozzle part 4 is provided so as to be movable in the contact and separation direction with respect to the film-like coated body 5, and the relative position of the nozzle part 4 with the coated body 5 is provided so as to be adjustable. The tip of the nozzle part 4 before discharging the coating liquid 2 is applied to the drawn-out coated object 5 before the drawn object 5 is supported and supported by the support roll 7. At the time of coating in which the coating liquid 2 is discharged and the film-like coated body 5 is drawn out and transported with the position where the tip portion of the nozzle portion 4 is brought into contact as a reference position, the nozzle portion 4 is moved. The nozzle portion 4 is adjusted to a position where the film-like object to be pressed 5 is pressed through the coating liquid 2 without contacting the nozzle portion 4 by adjusting a small amount of movement in the approaching direction from the reference position. The thin film according to claim 1, wherein the thin film is disposed. It is those related to engineering equipment.

  Further, the coating liquid 2 discharged from the tip discharge hole 3 of the nozzle portion 4 is in contact with the film-like coated body 5 to be transported, and the coated body 5 and the nozzle portion 4 5. The thin film coating apparatus according to claim 1, further comprising a contact monitoring mechanism 9 that constantly monitors that no contact is made.

  The contact monitoring mechanism 9 includes a contact continuity monitoring circuit 10 that detects whether a current increase or a voltage drop occurs when the tip of the nozzle portion 4 and the film-like object 5 are in contact with each other. The present invention relates to a thin film coating apparatus according to claim 5.

  Further, the contact continuity monitoring circuit 10 of the contact monitoring mechanism 9 applies a voltage to the nozzle portion 4 and the support roll 7 that supports the film-like object to be coated 5, and the current increase or voltage drop occurs. The thin film coating apparatus according to claim 6, wherein a detection unit 12 that constantly monitors whether or not it occurs is provided.

  Further, the air blowing mechanism 11 for levitation holding that prevents the non-coating end portion of the film-like coated body 5 not coated with the coating liquid 2 from coming into contact with the nozzle portion 4 by blowing air. The thin film coating apparatus according to claim 1, wherein the thin film coating apparatus is provided.

  Further, a drying mechanism C for drying the coated film-like body 5 after the coating is provided on the downstream side of the film-like coated body 5 with respect to the nozzle portion 4, and this drying mechanism C is an upper side of the coating body 5 with an air ejection support portion 18 that jets air onto the film-shaped coating body 5 to be conveyed and floats and supports the coating body 5 in a non-contact manner. And a heater that heats and dries the coating film of the object 5 to be coated, or a warm air supply section that uses the air ejected from the air ejection support section 18 as warm air. The air jetting support portions 18 disposed above and below the drying mechanism C are configured so as to have air supplied from an air supply portion on an opposing surface facing the film-like object 5 to be coated. It is set as the structure which ejects toward this to-be-coated body 5 from the provided ejection hole 19, This ejection hole 19 is said to be the said (A) A large number of coatings are provided on the opposing surface of the ejection support portion 18, and air is blown to and supported on both surfaces of the film-shaped coated body 5 from the numerous ejection holes 19, so that the coating to be generated by the drying mechanism C It is set as the structure which suppressed the film vibration of the construction body 5, It concerns on the thin film coating apparatus of any one of Claims 1-8 characterized by the above-mentioned.

  Further, the facing surface of the air ejection support portion 18 of the drying mechanism C is formed to be equal to or longer than the width of the film-like object to be coated 5, and the small holes are uniformly formed on the facing surface. The spray holes 19 are uniformly scattered at least in the range equivalent to the width of the film-like object 5 to be coated, and the air ejection support portion 18 for ejecting air from the many holes 19 is coated. 10. The thin film coating apparatus according to claim 9, wherein the drying mechanism C is configured by arranging a plurality of films in parallel in the film transport direction on the upper side and the lower side with respect to 5.

  The nozzle unit 4 further includes a drying mechanism C that dries the coated film-shaped body 5 after the coating on the downstream side of the film-shaped coated body 5 with respect to the nozzle section 4. 4, the air ejection portion 17 that blows air to the film-like coated body 5 and suppresses film vibration on the downstream side of the coated body 5 on the upstream side of the drying mechanism C. The thin film coating apparatus according to any one of claims 1 to 10, wherein a non-contact vibration suppressing mechanism D is provided so as to be opposed to each other with the film-shaped coated body 5 interposed therebetween. It is concerned.

  Further, the non-contact type vibration suppressing mechanism D is provided in parallel with both surfaces of the film-like coated body 5 so that the air ejection portions 17 are placed close to each other, and the air ejection portions 17 are opposed to each other. 12. The thin film coating apparatus according to claim 11, wherein a number of air ejection holes 16 for ejecting air are formed.

  Moreover, it is a double-sided thin film coating apparatus that performs coating on both surfaces of the film-shaped coated body 5, and the first coating mechanism A that coats on one side, and further coating on the opposite side, and this A second coating mechanism B having a drying mechanism C that dries the coated body 5 that has been subjected to double-sided coating, and the second coating mechanism B having the drying mechanism C is the above-described second coating mechanism B. The present invention relates to a double-sided thin film coating apparatus using the thin film coating apparatus according to any one of the items.

  In addition, a metal film is used as the object to be coated 5, and a positive electrode active material or a negative electrode active material of a lithium ion battery is used as the coating liquid 2 to be coated on both surfaces, and this thin film is coated on both surfaces. 14. The double-sided thin film coating apparatus according to claim 13, wherein the lithium-ion battery forming material is manufactured.

  Since the present invention is configured as described above, it is possible to coat and form a thin film accurately and uniformly while using a non-contact type nozzle part. Double-sided coating to form a thin film can also be realized, and in particular, it can be applied to both sides of a metal film as a base material of a lithium ion battery forming material accurately and uniformly, and the above-mentioned problems can be solved. In the production of ion battery forming material, metal film) is damaged, the dimensional accuracy is inconsistent due to wear of the tip contact portion of the nozzle part, the necessity and frequency of replacement and readjustment, and defects due to generation and mixing of wear powder Therefore, for example, a revolutionary thin-film coating apparatus and double-sided thin-film coating apparatus that can reduce the size of the production apparatus for the lithium-ion battery forming material that has been coated on both sides and mass-produce this production.

  To explain further, in the present invention, a non-contact type nozzle portion is used, but the nozzle portion is not simply applied by discharging the coating liquid by bringing the nozzle portion close to the film-like object to be coated. Although it is not contacted, the nozzle part is arranged and set at a position to suppress film vibration by contacting the coating liquid and pressing the film-like workpiece through the coating liquid, and is a non-contact type. However, it is an epoch-making thin film coating apparatus that can suppress film vibration, can form a thin film accurately and uniformly without problems such as damage to the object to be coated, and can realize double-sided coating.

  Further, in the inventions of claims 2, 3 and 4, it becomes a further excellent and innovative thin film coating apparatus which can easily realize the present invention with a simpler configuration.

  In particular, in the invention described in claim 4, it is possible to easily dispose the nozzle portion at a relative position with respect to an appropriate film-shaped object that exhibits the effect of the present invention, and an image that is more practical. It becomes a periodical thin film coating device.

  Further, in the invention according to claim 5, the nozzle part is not in contact with the coating liquid, and the nozzle is placed at an appropriate position where the film-like object is pressed by the contact pressure of the coating liquid. Can be constantly monitored as to whether the film-like object is in contact with the nozzle part, for example, if contact is detected, the film-like object is damaged. This is an epoch-making thin film coating apparatus capable of preventing the occurrence of defects by notifying or displaying this, or stopping the film conveyance and stopping the coating.

  In particular, in the inventions of claims 6 and 7, this contact monitoring mechanism can be realized with a simple configuration, and the presence or absence of contact can always be monitored by this easily realizable contact conduction monitoring circuit. It becomes a thin film coating device.

  Further, in the invention described in claim 8, it is possible to prevent the non-coated portions of both end portions of the film-like coated body from coming into contact with the nozzle portion, and if the contact monitoring mechanism is provided, this is also monitored. Therefore, it becomes a more excellent thin film coating apparatus that can reduce the problem caused by the damage of the film-like coated body.

  Further, in the invention described in claim 9, the film vibration in the coating part can be reduced by suppressing the film vibration in the floating type drying mechanism, whereby the film-like coating of the coating liquid in the nozzle part is achieved. The contact pressure on the body is small, and the arrangement management of the nozzle part that makes the coating liquid contact without contacting the nozzle part becomes easier, and the film is sufficiently vibrated by pressing through the coating liquid. It is an epoch-making thin film coating apparatus that can suppress, can coat and form a thin film with higher accuracy and can easily realize double-sided coating.

  To explain further, the film-like object to be coated is supported in a floating state by blowing air blown from the opposed surfaces of the air blowing support portions provided on the upper and lower sides thereof. Although it is dried by a floating drying mechanism that dries by warm air or further provided with a heater portion, film vibration has been noticeably generated by this floating drying mechanism in the past. By providing a large number of ejection holes on the opposing surface of the air ejection support part, for example, even if the air flow is the same, it is possible to reduce the air ejection speed by forming many small hole-shaped ejection holes on the opposing surface. The film vibration is less than that of the conventional air jet support part (floating nozzle) provided with a simple slit-like jet hole. Kudeki, whereby it is possible to suppress originally small film vibration at the coated portion.

  As a result, the film vibration can be reduced, so that the contact pressure by the coating liquid discharged from the nozzle part without contacting the nozzle part, that is, the coating liquid by pressing on the film-like object to be coated through the coating liquid. The film vibration at can be suppressed.

  Therefore, since the film vibration in the drying mechanism that is the film vibration generating part is suppressed in the first place when suppressing the film vibration according to the present invention, the film vibration can be sufficiently suppressed even with the contact pressure by the coating liquid at the nozzle part, Moreover, the arrangement setting of the nozzle part which suppresses the film vibration by pressing through the coating liquid without contacting the nozzle part can be easily realized.

  Further, in the invention described in claim 10, it is an extremely excellent thin film coating apparatus that exhibits the above-mentioned functions and effects more satisfactorily with a simpler configuration.

  Also, in the inventions according to claims 11 and 12, film vibration can be suppressed as in the inventions according to claims 9 and 10, and an extremely excellent thin film coating apparatus is obtained.

  The invention according to claim 13 includes a first coating mechanism for coating on one side and a drying mechanism for further coating the opposite side and drying the coated body after the double-sided coating. Equipped with a two-coating mechanism that allows continuous double-sided coating without the need for a second drying process and a cooling process after drying, improving the mass productivity by reducing the size of the equipment and increasing the speed of double-sided coating Double-sided coating can be realized by using the thin film coating apparatus as the second coating mechanism having the drying mechanism, and the problem of wear of the contact-type nozzle part and damage to the coated body is less likely to occur. This is an epoch-making double-sided thin film coating device that can be put to practical use.

  In particular, the invention according to claim 14 is an epoch-making double-sided thin film coating apparatus capable of realizing the production of a lithium-ion battery forming material of double-sided coating that can achieve downsizing and mass production of such an apparatus.

It is schematic structure explanatory drawing of a present Example. It is an expansion explanatory perspective view of the nozzle part of a present Example. It is expansion explanatory sectional drawing of the coating part of a present Example. It is explanatory drawing of the coating part which shows the arrangement | positioning procedure to the appropriate position of the nozzle part of a present Example. FIG. 5 is an enlarged explanatory sectional view of FIG. 4A of the present embodiment. FIG. 5 is an enlarged explanatory cross-sectional view of FIG. FIG. 5 is an enlarged explanatory sectional view of FIG. FIG. 5 is an enlarged explanatory sectional view of FIG. 4D of the present embodiment. It is a description side view of the nozzle part which shows the air blowing mechanism for a floating holding | maintenance of a present Example. It is expansion explanatory drawing of the drying mechanism (floating drying mechanism) of a present Example. It is expansion explanatory drawing which shows another example of arrangement | positioning of the drying mechanism (floating drying mechanism) of a present Example. It is an expansion explanatory perspective view of the air ejection support part (floating nozzle) of the drying mechanism (floating drying mechanism) of a present Example. It is expansion explanatory drawing of the non-contact-type vibration suppression mechanism of a present Example. It is an expansion explanatory perspective view of the air ejection part of the non-contact-type vibration suppression mechanism of a present Example.

  An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

  While the coating liquid 2 is being discharged from the tip discharge hole 3 of the nozzle portion 4, the film-like coated body 5 is conveyed to the nozzle portion 4, so that the surface of the coated body 5 is uniform. Although a thin film is formed by coating, the nozzle portion 4 is not brought into contact, but the coating liquid 2 discharged from the tip discharge hole 3 of the nozzle portion 4 is brought into contact with the object to be coated 5 and is passed through the coating liquid 2. By pressing the film, the film vibration of the film-like coated body 5 can be suppressed and coated, so that a thin film having a uniform film thickness can be applied and formed with higher accuracy.

  That is, when the surface of the object to be coated 5 is easily scratched or when there is a possibility that the contamination of flaws or wear powders may be poor, the tip of the nozzle part 4 is attached to the object to be coated 5. It cannot slide on the surface.

  In particular, in the production of a lithium ion battery forming material, a metal film such as aluminum or copper serving as a base material is used as the object 5 to be coated, so that it is easily scratched, and in the positive electrode, a positive electrode such as lithium cobalt oxide. Since the active material and the negative electrode are coated with a negative active material such as carbon graphite and a thin film of the order of 100 μm is uniformly applied, slight damage to the metal film may be inferior. Damage can be suppressed by simply making the part soft with a small hardness, but in this case as well, the tip contact part decreases due to wear, and the protruding dimensional accuracy is distorted, so it must be replaced or readjusted. Since there is a possibility that a large amount of wear powder is mixed into the thin film and this may also be defective, the contact type nozzle unit 4 with which the nozzle unit 4 contacts is used. It could not be.

  In this respect, according to the present invention, the coating liquid 2 discharged from the tip discharge hole 3 of the nozzle portion 4 without contacting the nozzle portion 4 by setting the relative position of the nozzle portion 4 to the coated body 5 is a film. In this way, an epoch-making thin film coating apparatus that does not cause damage to the coated body 5 or wear problems while suppressing film vibration is realized.

  Therefore, the problem of the film vibration of the film-like coated body 5 and the problem of the film vibration at the time of coating the opposite surface after the single-sided coating in the double-sided coating are reduced, and the film-shaped coated body 5 is reduced. The film can be coated accurately and uniformly while suppressing film vibration caused by the floating drying process such as hot air drying, so that the equipment can be downsized and the speed of double-sided coating can be increased. Thus, it is possible to provide an epoch-making thin film coating apparatus that can realize the above-described double-side coating that also improves mass productivity, and a double-sided thin film coating apparatus that can realize the above double-side coating.

  In particular, mass productivity due to such an improvement in production speed is eagerly desired, and lithium ion for double-sided coating that must prevent damage and wear to the object to be coated 5 (metal film) by the contact type nozzle portion 4. In the production of the battery forming material, it is possible to provide a double-sided thin film coating apparatus that is extremely practical.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, a thin film coating apparatus that is extremely useful for applying a thin film to the film-like object 5 in a state in which the opposite surface cannot be supported is used. The double-sided thin film coating apparatus is constituted by using the thin film coating apparatus according to the present invention when the opposite surface is continuously coated, and particularly the problem of film vibration and the contact type nozzle for solving the problem Both the problems of the part 4 are solved, and the coating liquid 2 discharged from the nozzle part 4 instead of the nozzle part 4 is brought into contact and pressed through the coating liquid 2 although it is a non-contact type, in other words, coating This is a double-sided thin film coating apparatus configured by using, in the second coating, an innovative thin film coating apparatus in which both problems are solved by suppressing film vibration by the contact pressure of the liquid 2.

  That is, this example is a double-sided thin film coating apparatus for coating on both sides of the film-like object 5 to be coated on the opposite side of the first coating mechanism A for coating on one side. And a second coating mechanism B having a drying mechanism C that dries the coated body 5 that has been subjected to the double-side coating, and the following thin film coating apparatus according to the present invention as the second coating mechanism B A double-sided thin film coating apparatus using

  In addition, as described above, this example uses the nozzle portion 4 that solves both the problem of film vibration and the problem of film damage during double-sided coating, and double-sided coating that has not been easily put into practical use until now. The present invention realizes a double-sided thin film coating apparatus that can reduce the size of the apparatus in manufacturing a lithium ion battery and can be manufactured speedily.

  That is, a metal film such as aluminum or copper is used as the object 5 to be coated, and the positive electrode active material of a lithium ion battery such as lithium cobaltate or carbon graphite is used as the coating liquid 2 to be coated on both surfaces. The negative electrode active material is used as a double-sided thin film coating apparatus configured to produce a lithium-ion battery forming material in which this thin film is coated on both sides.

  Specifically, for example, the coated body 5 is a metal film having a thickness of 10 to 20 μm and a width of 650 mm, and a binder is attached to a positive electrode active material such as lithium cobaltate or a negative electrode active material such as carbon graphite on both surfaces of the film. A thin film of the order of 100 μm is formed uniformly with an error of plus or minus 2 μm using the mixed coating liquid 2, and the coating liquid 2 supplied from the liquid supply part 1 through the liquid reservoir part 13 A nozzle portion 4 that discharges from a slit-like tip discharge hole 3 is disposed opposite to the film-like object to be coated 5, and this nozzle is discharged while discharging the coating liquid 2 from the tip discharge hole 3 of this nozzle portion 4. The film-like coated body 5 facing the part 4 is conveyed to the nozzle part 4 so that the coating liquid 2 is coated on the coated body 5 in a thin film.

  In the present embodiment, the first coating mechanism A that first coats one side of such a film-shaped coated body 5 with the coating liquid 2 is a film-shaped coated roll wound around a supply roll 14. A conventional non-contact type in which a thin film is applied and formed on one side by pulling out the body 5 and supporting the surface opposite to the coating surface with a coating support roll 15 while bringing the tip discharge hole 3 of the nozzle portion 4 close to one side. The film-like coated body 5 that has not been subjected to the drying process without passing through the drying process and the cooling process without finishing the one-side coating by the first coating mechanism A Floating type which coats the opposite surface with the nozzle part 4 according to the present invention by the second coating mechanism B without supporting the coated one side, and dries with IR or hot air after finishing this double-sided coating. The drying mechanism C is provided.

  This eliminates the need for two drying steps and cooling steps, and allows continuous double-sided coating, enabling mass production by reducing the size of the device and increasing the production speed when producing lithium ion batteries.

  In this embodiment, the thin film coating apparatus according to the present invention is applied to the second coating mechanism B having the drying mechanism C of such a double-sided thin film coating apparatus.

  Specifically, the thin film coating apparatus used as the second coating mechanism B of the present embodiment is configured such that the nozzle portion 4 is not brought into contact with the film-like coated body 5 to be conveyed, and the slit of the nozzle portion 4 The nozzle part 4 is arranged at a position where the coating liquid 2 discharged from the tip discharge hole 3 contacts and presses the film-shaped coated body 5 through the coating liquid 2. .

  In order to dispose the tip discharge hole 3 of the nozzle portion 4 at this proper position, a support roll 7 that supports the upstream side of the film-like object 5 to be transported is movably provided, and this is moved and adjusted. Although the relative position of the part 4 to the coated body 5 may be adjusted, in this embodiment, the nozzle part 4 is moved in a direction perpendicular to the drawing and conveying direction of the coated body 5, that is, the coated body 5 is In the case of horizontally pulling out and transporting horizontally, the coating is provided so as to be movable in the vertical direction, and discharges from the tip discharge hole 3 of the nozzle part 4 without contacting the tip part (tip discharge hole 3) of the nozzle part 4. The contact pressure at which the liquid 2 is brought into contact with the film-like coated body 5 is adjusted to suppress the film vibration of the coated body 5.

  That is, the nozzle portion is configured to suppress the film vibration of the film-like coated body 5 with the contact pressure generated by pressing the coating liquid 2 including the viscosity, discharge pressure, surface tension and the like of the coating liquid 2. The position is set by moving and adjusting 4 in the vertical direction. Specifically, the tip discharge hole 3 of the nozzle part 4 is protruded from the lower side to the upper side by a small amount with respect to the film-like coated body 5 which is horizontally stretched and conveyed, and the nozzle part 4 is not brought into contact with the film-like object 5. Is configured such that only the coating liquid 2 discharged by the pressure comes into pressure contact.

  More specifically, in the present embodiment, specifically, the coating material discharged from the tip discharge hole 3 of the nozzle portion 4 without contacting the nozzle portion 4 to the film-like object to be conveyed 5 to be conveyed. The construction liquid 2 is brought into contact, and the film-like coated body 5 is provided with an angle in the range of 0.05 ° to 1.00 ° starting from the coating liquid contact portion. That is, a very delicate position setting is performed, and the coating liquid 2 being pressed is pressed against the horizontal drawing surface on the downstream side of the conveyance of the coating liquid contact portion with which the coating liquid 2 comes into contact. The tip of the nozzle unit 4 is not in contact with the nozzle unit 4 so that the supply feed surface to the side support roll 7 has a slight angle so that the coating liquid 2 is in press contact. It is configured.

  In this embodiment, at least when the transport downstream side is horizontal from the coating liquid contact portion, it is necessary to press through the coating liquid 2 to such an extent that the transport upstream side is inclined at an angle of 0.05 ° or more. The nozzle part 4 will contact if it presses so that it may incline largely. In particular, the non-coated end portions at both ends of the film-shaped coated body 5 are touched when the angle is large, so that 0.05 ° to 0.30 ° is desirable.

  In addition, in the present embodiment, the angle can be increased to about 0.40 ° if a floating holding air blowing mechanism 11 to be described later is provided so that air is gently blown to prevent the non-coated end from contacting the nozzle portion 4. Attaching and pressing can suppress film vibration. If the coating liquid 2 is sufficiently pressed and contacted in this way, and the film vibration at the coating portion is reduced by using a floating drying mechanism C or a non-contact vibration suppressing mechanism D described later, the film vibration is sufficiently reduced. The problem can be solved and a uniform coating film can be applied on both sides.

  Further, the arrangement of the nozzle portion 4 is set as follows in the present invention.

  The nozzle unit 4 is provided so as to be movable in the contact / separation direction with respect to the film-like coated body 5, and the relative position of the nozzle unit 4 with the coated body 5 is freely adjustable, Before the coated body 5 is supported by the support roll 7 and pulled out and conveyed, the tip of the nozzle part 4 before discharging the coating liquid 2 is once brought into contact with the pulled-out coated body 5. When the coating liquid 2 is ejected and the film-like coated body 5 is drawn out and transported with the position where the tip of the nozzle part 4 is in contact as the reference position, the nozzle part 4 is moved to the reference part. The nozzle portion 4 is arranged at a position where the coating liquid 2 is pressed against the film-like object 5 without making contact with the nozzle portion 4 by adjusting the movement in the approaching direction from the position.

  That is, since the arrangement of the nozzle portion 4 is a delicate position setting, in this embodiment, the nozzle portion 4 is moved to the nozzle moving mechanism (with respect to the film-like coated body 5 once drawn horizontally from the support roll 7. It is raised from the state where it is lowered and retracted by the nozzle height adjusting elevating mechanism) and once brought into contact with the film-like object 5 to be used as a reference position (for example, the movement amount counter at this contact position is set to 0). set.).

  Specifically, since the film-like coated body 5 is a metal film and the nozzle portion 4 is also made of a metal such as stainless steel, is it contacted by a contact conduction monitoring circuit 10 provided as a contact monitoring mechanism 9 described later? If the nozzle part 4 is raised while detecting whether or not the contact is detected, the movement amount is set to 0 so as to make this a reference position.

  Then, it is once again lowered to start discharging the coating liquid 2, and the nozzle portion 4 is raised and brought into contact. This contact pressure is a pressure sufficient to suppress film vibration but not the nozzle portion 4. An adjustment setting is made such that the object to be coated 5 is raised and protruded from the reference position by a predetermined minute movement amount so as to be raised at a position where the object 5 can be pressed.

  Therefore, it is possible to coat and form a thin film accurately and uniformly while using the non-contact type nozzle unit 4 as a whole, and by using this, it is possible to realize double-sided coating that forms a thin film continuously and accurately before drying. In particular, it can be applied to both surfaces of a metal film as a base material of a lithium ion battery forming material with high precision and uniformity, and the above-mentioned problems can be solved. Dimensional accuracy error due to abrasion of the tip contact portion of the nozzle portion 4 and the necessity and frequency of replacement and readjustment, and defects due to generation and mixing of abrasion powders can be reduced. An innovative thin film coating apparatus capable of downsizing the production apparatus of a coated lithium ion battery forming material and mass production of the production, and a double-sided thin film coating apparatus using the same.

  In other words, the non-contact type nozzle unit 4 is used, but the nozzle unit 4 is not in contact with the film-like object to be coated 5 instead of being brought close to the nozzle unit 4 to discharge the coating liquid 2 and coating. Although not letting the coating liquid 2 be pressed and contacted, the nozzle portion 4 is arranged and set at a position where the film vibration is suppressed, the film vibration can be suppressed while being non-contact type, and a thin film can be formed accurately and uniformly. This is an epoch-making thin film coating apparatus that can realize coating.

  In addition, the nozzle portion 4 can be easily arranged at the relative position with the appropriate film-like object 5 as described above.

  Further, in this embodiment, the coating liquid 2 discharged from the tip discharge hole 3 of the nozzle portion 4 is in contact with the film-like coated body 5 to be conveyed, and the coated body 5 and the nozzle portion 4 is provided with a contact monitoring mechanism 9 for constantly monitoring that no contact is made with 4.

  The contact monitoring mechanism 9 includes a contact continuity monitoring circuit 10 that detects whether a current increase or a voltage drop occurs when the tip of the nozzle portion 4 and the film-like object 5 are in contact with each other. The contact continuity monitoring circuit 10 applies a voltage to the nozzle unit 4 and the support roll 7 that supports the film-like object 5 and constantly detects whether the current increases or decreases. The portion 12 is provided.

  Specifically, a voltage is applied to the circuit by connecting the metal nozzle portion 4 and the shaft of the support roll 7 which is in contact with the object 5 to be coated, which is a metal film, to the power source, and applying this voltage to the circuit. An ammeter is provided as the detection unit 12, and if the nozzle unit 4 and the object to be coated 5 are not in contact, the current does not flow and the coating solution 2 is in contact with the nozzle unit 4 even if the nozzle unit 4 is not in contact. In this case, since the coating liquid 2 has conductivity, a predetermined current flows, and this is detected as a normal state by the detection unit 12. If the nozzle unit 4 comes into contact with the coating solution 2, a short circuit occurs. Is rapidly increased and is detected by the detection unit 12. Further, even when the coating liquid 2 is not in contact, the current does not flow as described above, so that this abnormality can be detected.

  Therefore, it is possible to constantly monitor whether the nozzle part 4 is arranged at an appropriate position, that is, that the film-like workpiece 5 and the nozzle part 4 are not in contact, for example, when contact is detected or vice versa. When it is detected that the coating liquid 2 is not in contact, a problem such as scratching the film-like coated body 5 occurs, or this is reported because the coating is not performed normally. It is possible to prevent the occurrence of defects by displaying the image or by stopping the conveyance and the coating.

  Further, in this embodiment, the levitation holding is performed by blowing air to prevent the non-coating end portion that does not apply the coating liquid 2 at both ends of the film-like object 5 from contacting the nozzle portion 4. An air blowing mechanism 11 is provided.

  Accordingly, it is possible to prevent the non-coated portions of both ends of the film-shaped coated body 5 from coming into contact with the nozzle portion 4 and to monitor this by the contact monitoring mechanism 9, so that a further film-shaped coated body is obtained. The problem due to damage 5 can be reduced.

  In this embodiment, the levitation-holding air blowing mechanism 11 is configured such that air is gently blown from below the non-coated end portions at both ends of the film-like object 5 so that the non-coated end portions serve as nozzle portions. In particular, the air blowing outlet 23 is provided at both end portions of the nozzle portion 4 to blow up toward the non-coating end portion.

  Further, in this embodiment, the film-like coated body 5 that has been coated is dried on the downstream side of the film-like coated body 5 with respect to the tip discharge hole 3 of the nozzle portion 4. The drying mechanism C includes an air ejection support portion 18 that blasts and supports the coated body 5 in a non-contact manner by ejecting air to the film-shaped coated body 5 to be conveyed. Floating nozzle) is provided.

  The air ejection support portion 18 is provided in a state of being arranged side by side in a plurality of film conveying directions on the upper side and the lower side with the object 5 to be coated, and warm air that uses the air ejected from the air ejection support portion 18 as warm air In addition to providing a supply unit, in the present embodiment, a heater unit 21 using an IR heater is disposed in the floating drying unit to form a floating drying mechanism C that heats and dries from the surface and inside of the coating film.

  In the present embodiment, the air ejection support portions 18 disposed above and below the air supply from the air supply portion through the ejection holes 19 provided on the opposing surface facing the film-like coated body 5. The spray body 19 is configured to be ejected toward the coating body 5, and a large number of the ejection holes 19 are provided on the opposing surface of the air ejection support portion 18, and air is supplied from the numerous ejection holes 19 to the film-shaped coated body 5. It is set as the structure which suppressed the film vibration of the to-be-coated body 5 which arises with this drying mechanism C by spraying and supporting on both surfaces.

  More specifically, in the present embodiment, the facing surface of the air ejection support portion 18 is formed to be equal to or longer than the width of the film-like object 5 and is uniformly small on the facing surface. The hole-like ejection holes 19 are uniformly scattered at least in a range equivalent to the width of the film-like object 5 and an air ejection support portion 18 for ejecting air from the numerous ejection holes 19 is provided. The drying mechanism C is configured such that a plurality of films are arranged in parallel on the upper side and the lower side of the body to be coated 5.

  Therefore, in the prior art, the film vibration is remarkably generated by the floating drying mechanism C. However, in the present embodiment, by providing a large number of ejection holes 19 on the opposing surface of the air ejection support portion 18, for example, the same air volume is obtained. Even if there are many small holes 19 on the opposing surface, the air ejection speed can be reduced, and this low speed is supported by levitation with the air ejected from the numerous ejection holes 19, so that the conventional simple slit shape etc. The film vibration can be reduced as compared with the air ejection support portion 18 (floating nozzle) provided with the ejection holes 19 and the film vibration at the coating portion can be suppressed to a small extent in the first place.

  Accordingly, since the film vibration can be reduced, when the film vibration is suppressed by the nozzle portion 4 according to the present invention described above, the contact pressure of the coating liquid 2 of the nozzle portion 4 to the coated body 5 can be reduced. .

  Further, in the present embodiment, it is repeated, but has a predetermined length in the transport direction with a width substantially matching the width of the film-like object 5 to which air (warm air) is supplied. A large number of ejection holes 19 are provided on the opposing surface of the air ejection support portion 18 that blows air over a predetermined length range over the full width of the object to be coated 5.

  For example, air is blown in a range that takes about 1 second for the object to be coated 5 to pass through, and a large number of small injection holes 19 of, for example, 0.5φ are provided on the facing surface, and the inside of the air injection support portion 18 is provided. Is equipped with a perforated plate and mesh plate (baffle plate 22) that rectifies and homogenizes the air (warm air) supplied from the air (warm air) supply source, and finally the air supplied to the inside (surface It is configured so as to be uniformly ejected from the ejection holes 19 on the opposing surface).

  The larger the air ejection amount and the slower (lower) air ejection speed, the better the film holding effect that suppresses (attenuates) film vibration, so that small holes are uniformly scattered across the film width of the opposite surface. Forming.

  Further, in this embodiment, the air ejection support portions 18 are arranged in parallel in the conveying direction on both the upper side and the lower side with the film-shaped coated body 5 interposed therebetween, and the air ejection support portions 18 on the upper side face each other. The lower air ejection support portions 18 are provided at the positions, and the air ejection support portions 18 are arranged so as to alternately face each other in the vertical direction so that distortion such as torsion of the film-like coated body 5 does not occur. Floating and transporting, and with a structure that floats and dries by blowing a large amount of low-speed air (warm air) with a large number of small-hole jet holes 19, the film vibration is transmitted to the coating section on the upstream side of the transport Suppressed.

  In addition, the air ejection support portions 18 may be arranged in parallel so as to be opposed to each other so that the air jet support portions 18 are not vertically staggered but directly opposed vertically.

  In this way, the drying mechanism C, which has caused the film vibration, floats by blowing air from a large number of ejection holes 19 formed on the opposing surface of the air ejection support portion 18 onto the film-like object 5 from both sides. By adopting the supporting structure, the film vibration in the floating drying mechanism C can be reduced, so that the film vibration in the coating portion can be suppressed to a small extent.

  Thus, since the film vibration can be reduced, the contact pressure by the coating liquid 2 discharged from the nozzle part 4 without contacting the nozzle part 4, that is, the film-like object 5 through the coating liquid 2 is applied. Film vibration in the coating liquid 2 can be suppressed by pressing.

  Accordingly, when the film vibration is suppressed by the nozzle portion 4 according to the present invention, since the film vibration in the drying mechanism C that is the film vibration generating portion is suppressed in the first place, the coating liquid is discharged without contacting the nozzle portion 4. The film vibration can be sufficiently suppressed even with the contact pressure of 2, and the arrangement setting of the nozzle part 4 that suppresses the film vibration by pressing the coating part 2 without contacting the nozzle part 4 in this way is also easily realized. It becomes possible.

  Further, a similar air nip non-contact vibration suppressing mechanism D is further provided in front of the drying mechanism C to suppress film vibration in the coating portion in a state where film vibration is suppressed as much as possible.

  That is, in this embodiment, as described above, the nozzle portion 4 is disposed between the coating portion of the second coating mechanism B and the floating drying mechanism C, that is, between the support roll 7 and the drying mechanism C. A non-contact vibration suppressing mechanism D is provided between the nozzle unit 4 and the drying mechanism C.

  This non-contact type vibration suppressing mechanism D, like the drying mechanism C, is provided with plate-like air ejection portions 17 arranged vertically opposite to each other so as to sandwich the film-like workpiece 5 in a non-contact state. Air is ejected from a large number of air ejection holes provided in the ejection section 17 to press the object 5 to be coated with air pressure, and thereby the film vibration caused by the drying mechanism C that performs hot air drying in a floating manner is further reduced. Further non-contact support is performed so as to suppress and attenuate.

  Specifically, in the same manner as the drying mechanism C, if a predetermined range of the film-like coated body 5, for example, the width of the coated body 5 is 650 mm, a slightly larger width, for example, 800 mm The length is set to 600 mm, for example, and at least a range that takes about 1 second for the coated body 5 to pass between the air ejection portions 17 is pressed with air.

  Specifically, a large number of 0.5 φ air ejection holes are provided on the surface of the air ejection portion 17, and a perforated plate for rectifying and homogenizing the air supplied from the air supply source is provided in the air ejection portion 17. A net plate (baffle plate 22) is provided so that the air finally supplied to the inside is uniformly ejected from the air ejection holes 16 on the surface.

  A film holding effect that suppresses and attenuates the film vibration of the coated body 5 becomes better when the amount of air ejection is larger and the air ejection speed is slower.

  In the present embodiment, the non-contact vibration suppression mechanism D is interposed in this way, and the film vibration by the drying mechanism C is suppressed as much as possible, and further the film vibration is suppressed as much as possible. The second coating mechanism B by the thin film coating apparatus used allows the thin film to be formed with high accuracy and uniformity even in double-sided coating in which the opposite surface is coated in a state where one surface cannot be supported.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

DESCRIPTION OF SYMBOLS 1 Liquid supply part 2 Coating liquid 3 Front-end discharge hole 4 Nozzle part 5 To-be-coated body 7 Support roll 9 Contact monitoring mechanism
10 Contact continuity monitoring circuit
11 Air blowing mechanism for levitation retention
12 Detector
16 Air outlet
17 Air outlet
18 Air ejection support
19 Outlet
21 Heater A A First coating mechanism B Second coating mechanism C Drying mechanism D Non-contact vibration suppression mechanism

Claims (14)

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-like tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing this nozzle part In the thin film coating apparatus configured to apply the coating liquid to the film-like coated body in a thin film shape by transporting the coated body to the nozzle portion, the film to be transported The coating liquid discharged from the tip discharge hole of the nozzle portion is brought into contact with the nozzle-shaped coated body without contacting the nozzle portion, and the film-shaped coated body is pressed through the coating liquid. A thin film coating apparatus, wherein the nozzle portion is arranged at a position to be applied.   The nozzle part is movable or a support roll for supporting the film-like object to be coated is movably provided, and the coating liquid discharged from the tip discharge hole of the nozzle part without contacting the nozzle part. 2. The thin film coating apparatus according to claim 1, wherein the film pressure of the coated body is suppressed by adjusting a contact pressure to be brought into contact with the film-shaped coated body.   The coating liquid discharged from the tip discharge hole of the nozzle part is brought into press contact with the film-like coated object to be conveyed without contacting the nozzle part, and the coating liquid contact part is used as a starting point. The thin film coating apparatus according to any one of claims 1 and 2, wherein an angle in a range of 0.05 ° to 1.00 ° is given to the film-shaped coated body.   The nozzle part is provided so as to be movable toward and away from the film-like object, and the relative position of the nozzle part with respect to the object is adjustable, and the film-like object is provided. Before the tip of the nozzle part before discharging the coating liquid is temporarily brought into contact with the object to be stretched, and the tip part of the nozzle part is Using the contacted position as a reference position, the coating liquid is ejected and the film-like coated body is drawn out and conveyed, and the nozzle part is further moved and adjusted in the approach direction from the reference position, The said nozzle part has been arrange | positioned in the position which presses the said film-form to-be-coated body through the said coating liquid, without contacting a nozzle part, The any one of Claims 1-3 characterized by the above-mentioned. Thin film coating equipment.   The coating liquid discharged from the tip discharge hole of the nozzle part is in contact with the film-like coated object to be transported, and the coated object and the nozzle part are not always in contact with each other. The thin film coating apparatus according to any one of claims 1 to 4, further comprising a contact monitoring mechanism for monitoring.   The contact monitoring mechanism includes a contact continuity monitoring circuit that detects whether a current increase or a voltage drop occurs when the tip of a nozzle portion and the film-like object to be contacted contact each other. Item 6. The thin film coating apparatus according to Item 5.   The contact continuity monitoring circuit of the contact monitoring mechanism applies a voltage to the nozzle portion and a support roll that supports the film-like object to be coated, and constantly monitors whether the current increase or voltage drop occurs. The thin film coating apparatus according to claim 6, wherein a detecting unit is provided.   A non-coating end portion of the film-like object to which the coating liquid is not applied is provided with a levitation-holding air blowing mechanism that blows air to prevent contact with the nozzle portion. The thin film coating apparatus according to any one of claims 1 to 7.   Provided on the downstream side of transport of the film-shaped coated body with respect to the nozzle portion, is provided with a drying mechanism for drying the coated film-shaped coated body, which is transported by the drying mechanism Air ejecting support parts for jetting air to the film-like coated body and supporting the coated body in a non-contact manner are arranged in parallel in the direction of transporting multiple films on the upper and lower sides of the coated body. Provided with a warm air supply section that uses the air ejected from the air ejection support section as warm air or a heater section that heats and drys the coating film of the object to be coated, and the upper and lower sides of the drying mechanism The air ejection support portion disposed on the air supply portion is configured such that the air supplied from the air supply portion is ejected from an ejection hole provided in a facing surface facing the film-shaped object to be coated. A large number of the ejection holes are provided on the opposing surface of the air ejection support portion. Claims characterized in that the film vibration of the coated body generated by the drying mechanism is suppressed by blowing and supporting the air from a large number of ejection holes on both surfaces of the film-shaped coated body. Item 10. The thin film coating apparatus according to any one of Items 1 to 8.   The facing surface of the air ejection support portion of the drying mechanism is formed to be equal to or longer than the width of the film-like object to be coated, and the small-hole-shaped ejection holes are uniformly formed on the facing surface. Formed uniformly in the same range as the width of the film-like object to be coated, and the air ejection support parts for ejecting air from the numerous ejection holes are respectively located above and below the object to be coated. The thin film coating apparatus according to claim 9, wherein the drying mechanism is configured in parallel in a plurality of film conveying directions.   A drying mechanism for drying the coated film-like object that has been coated is provided on the downstream side of the film-like object to be conveyed with respect to the nozzle part, and the coated part is applied to the nozzle part. On the downstream side of the transport of the work body, on the upstream side of the transport of the drying mechanism, an air blowing portion that blows air onto the film-like object to suppress film vibration is sandwiched between the film-like object. The thin film coating apparatus according to any one of claims 1 to 10, wherein a non-contact vibration suppressing mechanism is provided.   The non-contact type vibration suppression mechanism is provided in parallel with both surfaces of the film-like object to be coated, and the air ejection portions are arranged close to each other, and a large number of air is ejected to the opposing surfaces of the air ejection portions. The thin film coating apparatus according to claim 11, wherein an air ejection hole is formed.   A double-sided thin film coating apparatus for coating on both sides of the film-like object to be coated, the first coating mechanism for coating on one side, and further coating on the opposite side, and this double-sided coating And a second coating mechanism having a drying mechanism for drying the finished coated body, and the second coating mechanism having the drying mechanism is the thin film coating according to any one of claims 1 to 12. A double-sided thin film coating apparatus characterized by using a processing apparatus.   A lithium ion battery in which a metal film is used as the object to be coated, and a positive electrode active material or a negative electrode active material of a lithium ion battery is used as the coating liquid to be applied on both surfaces, and the thin film is applied on both surfaces. The double-sided thin film coating apparatus according to claim 13, wherein the forming material is produced.

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