TW201402223A - Web coating device - Google Patents

Web coating device Download PDF

Info

Publication number
TW201402223A
TW201402223A TW102102493A TW102102493A TW201402223A TW 201402223 A TW201402223 A TW 201402223A TW 102102493 A TW102102493 A TW 102102493A TW 102102493 A TW102102493 A TW 102102493A TW 201402223 A TW201402223 A TW 201402223A
Authority
TW
Taiwan
Prior art keywords
stencil
screen
nozzle
coating
adsorption
Prior art date
Application number
TW102102493A
Other languages
Chinese (zh)
Inventor
Akira Fukui
Keisuke Nakahara
Mitsunori Oda
Masaaki Tanabe
Jun Takami
Original Assignee
Tazmo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tazmo Co Ltd filed Critical Tazmo Co Ltd
Publication of TW201402223A publication Critical patent/TW201402223A/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles

Landscapes

  • Coating Apparatus (AREA)

Abstract

A web coating device capable of forming a coating film on a web in good yield by adjusting a coating position before the start of coating is provided. The coating position can be adjusted by driving a first nozzle horizontal movement mechanism (17) and a second nozzle horizontal movement mechanism (18), during an inactive period of a conveyance mechanism (10) that intermittently conveys the web (W), to move a nozzle (14) in a direction of conveying the web (W) and a direction perpendicular thereto, respectively. Then, the web (W) is lowered by a web vertical movement mechanism and suctioned and fixed on a suction plate (13) by a suction force generation mechanism, so that a horizontal coated surface (P) is formed thereon. On the coated surface (P), a coating film is formed: by supplying coating liquid to the nozzle (14) by a feed mechanism (15); making a bead by discharging the coating liquid from a discharge port of the nozzle (14) that maintains a predetermined coating gap with the upper surface of the web (W); and scanning the first nozzle horizontal movement mechanism (17) in the direction of conveying the web (W) to make the bead follow the nozzle (14).

Description

網板塗佈裝置 Stencil coating device

本發明係關於一種將塗佈液塗佈於包括紙、塑膠、布、金屬箔及該等之積層體之片材或薄膜(以下稱為網板)之單面之網板塗佈裝置。 The present invention relates to a screen coating apparatus for applying a coating liquid to a single side of a sheet or film (hereinafter referred to as a stencil) comprising paper, plastic, cloth, metal foil, and the like.

作為習知之網板塗佈裝置,其揭露於間歇性地搬送之休止期間,將網板吸附固定於吸附平台上,於縫模(slit die)之噴出口與網板之上表面之間保持既定之塗佈間隙,藉由一方面利用進給機構將塗佈液供給至縫模,一方面驅動噴嘴水平移動機構,使縫模沿搬送方向移動,而於網板W之上表面形成塗佈膜(例如參照專利文獻1)。縫模係於其下端具有細縫狀之噴出口,且以噴出口之長度方向沿與網板之搬送方向正交之方向(網板之寬度方向)配向之方式來配置。縫模之噴出口之長度係一般設定為較網板之寬度短之長度。 As a conventional stencil coating apparatus, it is disclosed that during the rest period of intermittent conveyance, the stencil is adsorbed and fixed on the adsorption platform, and is kept between the discharge port of the slit die and the upper surface of the stencil. The coating gap is obtained by supplying the coating liquid to the slit die by the feeding mechanism on the one hand, and driving the nozzle horizontal moving mechanism to move the slit die in the conveying direction on the one hand, and forming a coating film on the upper surface of the screen W. (For example, refer to Patent Document 1). The slit die is provided with a slit-shaped discharge port at the lower end thereof, and is disposed such that the longitudinal direction of the discharge port is aligned in a direction orthogonal to the conveying direction of the screen (the width direction of the screen). The length of the discharge port of the slit die is generally set to be shorter than the width of the screen.

於此種網板塗佈裝置中,即便為具有可撓性之網板,亦將網板穩定地吸附固定於具有較硬之水平面之吸附平台上來進行塗佈,因此,容易獲得均勻之塗佈膜厚,適合夾持非塗佈部而間歇性地形成塗佈膜之間歇塗佈。 In such a stencil coating apparatus, even if it is a flexible stencil, the stencil is stably adsorbed and fixed on an adsorption platform having a hard horizontal surface for coating, and therefore, uniform coating is easily obtained. The film thickness is suitable for intermittent coating in which a coating film is intermittently formed by sandwiching a non-coated portion.

於要求厚度之塗佈膜中,於若進行1次塗佈則塗佈膜厚不足之情況下,必須重複進行2次、3次塗佈。又,於進行形成多層不同種類之塗佈膜之多層塗佈時亦相同。 In the coating film having the required thickness, when the coating film thickness is insufficient when the coating is performed once, it is necessary to repeat the coating twice or three times. Further, the same applies to the multilayer coating in which a plurality of different types of coating films are formed.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2009-45565號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-45565

由於將網板之捲筒安裝至搬送機構之作業為手工作業,故而不易獲得網板之寬度方向兩端位置之再現性。又,每一網板之捲筒間亦具有尺寸公差。如此,有於網板之寬度方向,縫模之噴出口相對於網板之塗佈面之相對位置(以下亦稱為塗佈位置)產生偏移之情況。 Since the operation of attaching the reel of the stencil to the conveying mechanism is manual work, the reproducibility of the positions at both ends in the width direction of the stencil is not easily obtained. Moreover, the dimensions of the rolls between each stencil also have dimensional tolerances. Thus, in the width direction of the screen, the relative position of the discharge port of the slit die to the coated surface of the screen (hereinafter also referred to as the coating position) is shifted.

由於縫模之噴出口之長度短於網板之寬度,故而於僅對網板之1根捲筒來塗佈一層之一層塗佈之情況下,只要該塗佈位置之偏移較小,便不會成為太大之問題。然而,於進行重複塗佈或多層塗佈時,因於已形成於網板上之塗佈膜上必須使縫模之噴出口高精度地重合,故而若產生塗佈位置之偏移,則難以良率較佳地獲得均勻之塗佈膜。再者,於進行重複塗佈或多層塗佈之情況下,塗佈位置之偏移亦可產生於網板之搬送方向。 Since the length of the discharge port of the slit die is shorter than the width of the stencil, in the case where only one layer of the stencil is coated with one layer, as long as the offset of the coating position is small, It won't be too big a problem. However, when repeat coating or multi-layer coating is performed, since the discharge port of the slit die must be superposed with high precision due to the coating film formed on the screen, it is difficult to cause a shift in the coating position. The yield is preferably such that a uniform coating film is obtained. Furthermore, in the case of repeated coating or multi-layer coating, the offset of the coating position may also occur in the conveying direction of the screen.

本發明係鑒於上述先前之課題而完成者,其目的在於提供一種可藉由於塗佈開始前調整塗佈位置而將塗佈膜良率較佳地形成於網板上之網板塗佈裝置。 The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a screen coating apparatus capable of forming a coating film yield on a screen by adjusting a coating position before application of coating.

本發明之網板塗佈裝置係包括搬送機構、吸附平台、吸附力產生機構、噴嘴、進給機構、第1噴嘴水平移動機構、第2噴嘴 水平移動機構及網板升降機構。上述搬送機構係以形成水平之搬送面之方式間歇性地搬送長條之網板。上述吸附平台係配置於上述搬送面之下方,且吸附固定上述網板。上述吸附力產生機構係使上述吸附平台之上表面產生吸附力。上述噴嘴係配置於上述搬送面之上方,且包括與上述網板之上表面維持既定之塗佈間隙之噴出口,自該噴出口噴出塗佈液。上述進給機構係將塗佈液送至上述噴嘴。上述第1噴嘴水平移動機構係構成為可使上述噴嘴沿上述網板之搬送方向水平移動。上述第2噴嘴水平移動機構係構成為可使上述噴嘴沿與網板之搬送方向正交之方向水平移動。上述網板升降機構係構成為可使上述網板於上述搬送面與上述吸附平台之間升降。 The screen coating apparatus of the present invention includes a conveying mechanism, an adsorption platform, an adsorption force generating mechanism, a nozzle, a feeding mechanism, a first nozzle horizontal moving mechanism, and a second nozzle Horizontal moving mechanism and stencil lifting mechanism. The transport mechanism intermittently transports the long webs so as to form a horizontal transport surface. The adsorption platform is disposed below the transfer surface, and adsorbs and fixes the mesh plate. The adsorption force generating mechanism generates an adsorption force on the upper surface of the adsorption platform. The nozzle is disposed above the transfer surface, and includes a discharge port that maintains a predetermined coating gap with the upper surface of the screen, and the coating liquid is discharged from the discharge port. The above feeding mechanism sends the coating liquid to the nozzle. The first nozzle horizontal movement mechanism is configured to horizontally move the nozzle in a conveying direction of the screen. The second nozzle horizontal movement mechanism is configured to horizontally move the nozzle in a direction orthogonal to a conveying direction of the screen. The stencil elevating mechanism is configured to allow the stencil to move up and down between the transfer surface and the adsorption stage.

根據該構成,於網板之間歇性地搬送之休止期間,可藉由驅動第1噴嘴水平移動機構及第2噴嘴水平移動機構,使噴嘴沿網板之搬送方向及與其正交之方向產生移動,而進行塗佈位置之調整。其後,藉由驅動網板升降機構,使網板下降,且利用吸附力產生機構將網板吸附固定於吸附平台上,而形成水平之塗佈面。利用進給機構將塗佈液供給至噴嘴,自與網板之上表面維持既定之塗佈間隙之噴嘴之噴出口噴出塗佈液而形成液珠,沿網板之搬送方向使第1噴嘴水平移動機構進行掃描,藉此,液珠跟隨噴嘴而於塗佈面形成塗佈膜。 According to this configuration, the first nozzle horizontal movement mechanism and the second nozzle horizontal movement mechanism can be driven to move the nozzle along the direction in which the screen is conveyed and the direction orthogonal thereto during the pause period in which the screen is intermittently conveyed. And adjust the coating position. Thereafter, the stencil is lowered by driving the stencil lifting mechanism, and the stencil is adsorbed and fixed on the adsorption platform by the adsorption force generating mechanism to form a horizontal coated surface. The coating liquid is supplied to the nozzle by the feeding mechanism, and the coating liquid is ejected from the discharge port of the nozzle which maintains the predetermined coating gap with the upper surface of the screen to form a liquid bead, and the first nozzle level is made along the conveying direction of the screen. The moving mechanism performs scanning, whereby the liquid bead follows the nozzle to form a coating film on the coated surface.

於塗佈位置之調整中利用塗佈位置檢測感測器及塗佈位置控制部。上述塗佈位置檢測感測器係檢測上述網板之邊緣或已形成於上述網板之上表面之塗佈膜之邊緣。上述塗佈位置控制部係根據上述塗佈位置檢測感測器之檢測結果,個別地控制上述搬送機構、上述第1噴嘴水平移動機構及上述第2噴嘴水平移動機構之驅動,以調整上述噴嘴之初始位置。 The coating position detecting sensor and the coating position control unit are used in the adjustment of the coating position. The coating position detecting sensor detects the edge of the screen or the edge of the coating film formed on the upper surface of the screen. The coating position control unit individually controls the driving of the conveying mechanism, the first nozzle horizontal moving mechanism, and the second nozzle horizontal moving mechanism based on the detection result of the coating position detecting sensor to adjust the nozzle. initial position.

於此種網板塗佈裝置中,塗佈間隙之再現性對塗佈膜厚之良率產生極大影響。於本發明中,於形成塗佈面時,由於吸附平台不動,利用網板升降機構使網板下降,而非使吸附平台上升,故而無須擔憂吸附平台之上升量之誤差,便可再現性佳地形成既定之塗佈間隙。 In such a screen coating apparatus, the reproducibility of the coating gap greatly affects the yield of the coating film thickness. In the present invention, when the coated surface is formed, since the adsorption platform is not moved, the stencil lifting mechanism is used to lower the stencil instead of raising the adsorption platform, so that there is no need to worry about the error of the rising amount of the adsorption platform, and the reproducibility is good. The ground forms a predetermined coating gap.

又,為形成平滑且均勻之搬送面,必須於將網板吸附固定於吸附平台時,防止網板中產生皺褶、或於網板與吸附平台之間產生空氣積存。因此,上述網板升降機構包括第1網板支撐構件、第2網板支撐構件、第1網板支撐構件升降機構、第2網板支撐構件升降機構及網板升降控制部。又,上述吸附力產生機構具有網板吸附力控制部。 Moreover, in order to form a smooth and uniform conveying surface, it is necessary to prevent wrinkles in the stencil or to generate air between the stencil and the suction platform when the stencil is adsorbed and fixed to the adsorption platform. Therefore, the stencil raising and lowering mechanism includes a first stencil supporting member, a second stencil supporting member, a first stencil supporting member elevating mechanism, a second stencil supporting member elevating mechanism, and a stencil raising and lowering control unit. Further, the adsorption force generating means has a screen suction force control unit.

上述第1網板支撐構件係於上述網板之上述網板之搬送方向可升降地配置於上述吸附平台之上游側,且支撐網板。上述第2網板支撐構件係於上述網板之搬送方向可升降地配置於上述吸附平台之下游側,且支撐上述網板。上述第1網板支撐構件產生升降機構使上述第1網板支撐構件產生升降。上述第2網板支撐構件升降機構使上述第2網板支撐構件產生升降。網板升降控制部係以使位於上述吸附平台之上方之上述網板自其搬送方向之上游側向下游側逐漸下降之方式,利用時間差來個別地控制上述第1網板支撐構件升降機構及上述第2網板支撐構件升降機構之驅動。上述網板吸附控制部係使數個吸附區域沿上述網板之搬送方向階段性且追加性地動作。所謂數個吸附區域係指於上述吸附平台中沿上述網板之搬送方向所分割成之區域。 The first stencil supporting member is disposed on the upstream side of the adsorption platform in a conveying direction of the stencil of the stencil, and supports the stencil. The second stencil supporting member is disposed on the downstream side of the adsorption platform in a conveying direction of the stencil, and supports the stencil. The first stencil supporting member generates a lifting mechanism to raise and lower the first stencil supporting member. The second stencil supporting member elevating mechanism raises and lowers the second stencil supporting member. The stencil raising and lowering control unit individually controls the first stencil supporting member elevating mechanism and the above by using a time difference so that the stencil located above the absorbing platform gradually descends from the upstream side to the downstream side in the conveying direction The driving of the lifting mechanism of the second stencil support member. The stencil adsorption control unit causes a plurality of adsorption regions to be operated stepwise and additionally in the transport direction of the stencil. The plurality of adsorption regions are regions that are divided along the transport direction of the screen in the adsorption platform.

又,於為若僅利用網板之張力控制則無法進行吸附之有 厚度的厚網板、或容易產生皺褶且具有伸縮性之網板中,使自上方按壓網板之強制力發揮作用即可。因此,本發明之網板塗佈裝置進一步包括沿上述網板之搬送方向使自上述網板之上方附加與同上述網板之搬送方向正交之方向平行之線性壓力之構件進行掃描的機構。 Moreover, if it is only controlled by the tension of the stencil, it cannot be adsorbed. In a thick stencil having a thickness or a stencil which is likely to be wrinkled and stretchable, the forcing force of pressing the stencil from above may function. Therefore, the screen coating apparatus of the present invention further includes means for scanning a member having a linear pressure parallel to a direction orthogonal to the conveying direction of the screen in the conveying direction of the screen.

附加上述線性壓力之構件可使用輥,該輥抵接於上述網板之上表面,且在配向於上述與網板之搬送方向正交之方向之軸旋轉自如地被支撐著。 The member to which the linear pressure is applied may be a roller that abuts against the upper surface of the screen and is rotatably supported by an axis that is aligned in a direction orthogonal to the conveying direction of the screen.

或者,附加上述線性壓力之構件亦可為空氣噴出噴嘴,該空氣噴出噴嘴具有與上述網板之上表面之間保持有間隙之噴出口。於該情況下,為使空氣之噴出方向可變,更佳為進一步包括使上述空氣噴出噴嘴沿上述網板之搬送方向搖動之機構。 Alternatively, the member to which the linear pressure is applied may be an air ejection nozzle having a discharge port that maintains a gap with the upper surface of the screen. In this case, in order to change the direction in which the air is ejected, it is more preferable to further include a mechanism for oscillating the air ejection nozzle in the conveying direction of the screen.

根據本發明,可於塗佈開始前調整噴嘴相對於網板之塗佈面之相對位置。因此,可將塗佈膜良率較佳地形成於網板上。 According to the present invention, the relative position of the nozzle relative to the coated surface of the screen can be adjusted prior to the start of coating. Therefore, the coating film yield can be preferably formed on the screen.

1‧‧‧網板塗佈裝置 1‧‧‧ stencil coating device

10‧‧‧搬送機構 10‧‧‧Transportation agency

11‧‧‧捲出部 11‧‧‧Departure

12‧‧‧捲取部 12‧‧‧Winding Department

13‧‧‧吸附平台 13‧‧‧Adsorption platform

14‧‧‧噴嘴 14‧‧‧Nozzles

15‧‧‧進給機構 15‧‧‧Feed institutions

16‧‧‧噴嘴升降機構 16‧‧‧Nozzle lifting mechanism

17‧‧‧第1噴嘴水平移動機構 17‧‧‧1st nozzle horizontal moving mechanism

18‧‧‧第2噴嘴水平移動機構 18‧‧‧2nd nozzle horizontal moving mechanism

20‧‧‧第1網板支撐輥 20‧‧‧1st stencil support roller

21‧‧‧第2網板支撐輥 21‧‧‧2nd stencil support roller

22‧‧‧第1網板支撐輥升降機構 22‧‧‧1st stencil support roller lifting mechanism

23‧‧‧第2網板支撐輥升降機構 23‧‧‧2nd stencil support roller lifting mechanism

24‧‧‧座架 24‧‧‧Rack

25‧‧‧平台 25‧‧‧ platform

26‧‧‧滑件 26‧‧‧Sliding parts

27‧‧‧塗佈位置控制部 27‧‧‧ Coating Position Control Department

28‧‧‧按壓輥 28‧‧‧Press roller

29‧‧‧空氣噴出噴嘴 29‧‧‧Air ejection nozzle

30‧‧‧預處理裝置 30‧‧‧Pretreatment device

40‧‧‧後處理裝置 40‧‧‧Reprocessing device

50‧‧‧噴嘴管理單元 50‧‧‧Nozzle Management Unit

63‧‧‧跳動機構 63‧‧‧Bounce mechanism

64‧‧‧夾持裝置 64‧‧‧Clamping device

65‧‧‧第1塗佈位置檢測感測器 65‧‧‧1st coating position detection sensor

66‧‧‧第2塗佈位置檢測感測器 66‧‧‧2nd coating position detection sensor

131‧‧‧第1吸附區域 131‧‧‧1st adsorption zone

132‧‧‧第2吸附區域 132‧‧‧2nd adsorption zone

133‧‧‧第3吸附區域 133‧‧‧3rd adsorption zone

291‧‧‧搖動軸 291‧‧‧Shake axis

F‧‧‧地板 F‧‧‧Floor

P‧‧‧塗佈面 P‧‧‧ coated surface

T‧‧‧搬送面 T‧‧‧Transfer surface

W‧‧‧網板 W‧‧‧ stencil

圖1係表示本發明之實施形態之網板塗佈裝置之概略構成圖。 Fig. 1 is a schematic block diagram showing a screen coating apparatus according to an embodiment of the present invention.

圖2係表示該網板塗佈裝置之噴嘴移動機構之概略構成圖。 Fig. 2 is a schematic block diagram showing a nozzle moving mechanism of the screen application device.

圖3係表示該網板塗佈裝置之噴嘴移動機構之另一實施形態之概略構成圖。 Fig. 3 is a schematic block diagram showing another embodiment of the nozzle moving mechanism of the screen application device.

圖4係表示該網板塗佈裝置之噴嘴移動機構之進而另一實施形態之概略構成圖。 Fig. 4 is a schematic block diagram showing still another embodiment of the nozzle moving mechanism of the screen coating apparatus.

圖5係表示該網板塗佈裝置之塗佈位置控制系統之方塊圖。 Fig. 5 is a block diagram showing a coating position control system of the screen coating device.

圖6係表示該網板塗佈裝置之塗佈位置控制例之流程圖。 Fig. 6 is a flow chart showing an example of control of the coating position of the screen coating apparatus.

圖7係表示塗佈位置檢測感測器之檢測位置之一例之網板之平面圖。 Fig. 7 is a plan view showing a screen of an example of a detection position of a coating position detecting sensor.

圖8(A)至(E)係說明利用網板升降控制部及網板吸附控制部的控制例之網板塗佈裝置主要部分之概略側視圖。 8(A) to 8(E) are schematic side views showing main parts of a screen coating apparatus using a control example of a screen lifting control unit and a screen suction control unit.

圖9(A)至(E)係說明按壓輥之動作之網板塗佈裝置主要部分之概略側視圖。 9(A) to 9(E) are schematic side views showing main parts of a screen coating apparatus for operating a pressing roller.

圖10(A)至(E)係說明空氣噴出噴嘴之動作之網板塗佈裝置主要部分之概略側視圖。 Fig. 10 (A) to (E) are schematic side views showing main parts of a screen coating apparatus for explaining the operation of the air ejection nozzle.

圖11係說明使空氣噴出噴嘴搖動之機構之網板塗佈裝置主要部分之概略側視圖。 Fig. 11 is a schematic side view showing a main part of a screen coating device for a mechanism for rocking an air ejection nozzle.

圖1係表示與本發明之實施形態相關之網板塗佈裝置之概略構成圖。 Fig. 1 is a schematic block diagram showing a screen coating apparatus according to an embodiment of the present invention.

本發明之網板塗佈裝置1係可用作如下捲對捲(roll to roll)之以間歇傳送來進行搬送之裝置之塗佈裝置,即,例如圖1所示,將網板W自捲出部301捲出,於預處理步驟中進行網板W之清洗、除塵、表面改質等,其後,於塗佈步驟中,將塗佈液塗佈於網板W上,其後,進行乾燥、冷卻等之後處理步驟後,利用捲取機構之捲取部302將網板W捲取。 The screen coating apparatus 1 of the present invention can be used as a coating apparatus for a roll-to-roll apparatus which performs conveyance by intermittent conveyance, that is, for example, as shown in Fig. 1, the screen W is self-rolled. The outlet portion 301 is taken up, and the cleaning, dusting, surface modification, and the like of the screen W are performed in the pretreatment step. Thereafter, in the coating step, the coating liquid is applied onto the screen W, and thereafter, After the subsequent processing steps of drying, cooling, etc., the web W is taken up by the take-up portion 302 of the take-up mechanism.

因此,本發明之塗佈裝置1係如圖1所示包括搬送機構10、吸附平台13、吸附力產生機構(未圖示)、噴嘴14、進給機構15、噴嘴升降機構16、第1噴嘴水平移動機構17、第2噴嘴水平移動機構18、塗佈位置檢測感測器65、66、第1網板支撐輥20、第2網板支撐輥21、第1網板支撐輥升降機構22及第2網板支撐輥升降機構23來 作為主要構成。 Therefore, the coating apparatus 1 of the present invention includes the conveying mechanism 10, the adsorption stage 13, the adsorption force generating mechanism (not shown), the nozzle 14, the feeding mechanism 15, the nozzle lifting mechanism 16, and the first nozzle as shown in Fig. 1 . Horizontal moving mechanism 17, second nozzle horizontal moving mechanism 18, coating position detecting sensors 65, 66, first stencil supporting roller 20, second stencil supporting roller 21, first stencil supporting roller lifting mechanism 22, and The second stencil support roller lifting mechanism 23 comes As the main component.

又,網板塗佈裝置1包括預處理裝置30、後處理裝置40及噴嘴管理單元50作為次要之構成,但非本發明必需之構成。 Further, the screen coating apparatus 1 includes the pretreatment apparatus 30, the post-processing apparatus 40, and the nozzle management unit 50 as a secondary configuration, but is not essential to the present invention.

預處理裝置30係相對於網板W之搬送方向配置於進行網板塗佈裝置1之塗佈步驟的主要部分之上游側。預處理裝置30係對進行塗佈步驟前之網板W之塗佈面實施預處理。例如進行清洗、除塵、表面改質。 The pretreatment apparatus 30 is disposed on the upstream side of the main portion of the coating step of the screen coating apparatus 1 with respect to the conveyance direction of the screen W. The pretreatment apparatus 30 performs pretreatment on the coated surface of the screen W before the coating step. For example, cleaning, dust removal, and surface modification.

後處理裝置40係相對於網板W之搬送方向配置於進行網板塗佈裝置1之塗佈步驟的主要部分之下游側。後處理裝置40對進行塗佈步驟後之網板W實施後處理。例如進行乾燥、冷卻。 The post-processing apparatus 40 is disposed on the downstream side of the main portion of the coating step of the screen coating apparatus 1 with respect to the conveying direction of the screen W. The post-processing device 40 performs post-treatment on the screen W after the coating step. For example, drying and cooling are carried out.

噴嘴管理單元50係為確保在薄膜.低黏度塗佈、間歇塗佈中之塗佈膜開始部及塗佈膜結束部之膜厚精度而設置。作為一例,噴嘴管理單元50包括啟動輥(priming roller)、噴嘴前端清洗裝置及浸漬槽(均未圖示)。藉由將塗佈液自噴嘴14之噴出口塗佈至旋轉之啟動輥之表面,而來進行噴嘴14之噴出口之液量調整。噴嘴清洗裝置係自動清掃噴嘴14之噴出口之污垢。若於長期裝置停止時、因故障而導致裝置停止時、維護時等,於未對噴嘴14供給塗佈液之狀態下而加以放置,則噴嘴14之噴出口產生乾燥,且塗佈液產生凝固,而會產生塗佈不良或需要進行噴嘴之分解清掃。由此,可藉由向浸漬槽中加入塗佈液或清洗液,將噴嘴14前端部加以浸漬或使噴嘴14靠近液上表面位置,來防止乾燥。 The nozzle management unit 50 is secured in the film. The film thickness of the coating film start portion and the coating film end portion in the low-viscosity coating and the intermittent coating is set to be accurate. As an example, the nozzle management unit 50 includes a priming roller, a nozzle tip cleaning device, and a dipping tank (none of which are shown). The liquid amount of the discharge port of the nozzle 14 is adjusted by applying the coating liquid from the discharge port of the nozzle 14 to the surface of the rotating starter roll. The nozzle cleaning device automatically cleans the dirt of the discharge port of the nozzle 14. When the long-term device is stopped, when the device is stopped due to a failure, or during maintenance, when the coating liquid is not supplied to the nozzle 14, the discharge port of the nozzle 14 is dried, and the coating liquid is solidified. However, poor coating may occur or decomposition cleaning of the nozzle may be required. Thereby, the front end of the nozzle 14 can be immersed or the nozzle 14 can be brought close to the upper surface of the liquid by adding a coating liquid or a washing liquid to the immersion tank to prevent drying.

搬送機構10係包括捲出部11及捲取部12。作為一例,捲出部11係使用輥,將長條之網板W捲繞為捲筒狀。作為一例,捲取部12係使用輥,安裝網板W之末端。捲取部12係自未圖示之驅動 機構來獲得旋轉力而旋轉。藉此,將網板W捲取至捲取部12,按照預處理步驟、塗佈步驟、後處理步驟之順序來搬送網板W。驅動機構係以隔開既定間隔交替地重複進行驅動與休止之方式,來對搬送機構10進行間歇驅動。即,網板W係間歇性地被搬送。塗佈步驟係於搬送機構10之間歇驅動之休止期間來被進行。 The transport mechanism 10 includes a take-up portion 11 and a take-up portion 12. As an example, the winding portion 11 is formed by winding a long web W in a roll shape. As an example, the winding unit 12 uses a roller to mount the end of the screen W. The winding unit 12 is driven from not shown The mechanism rotates to obtain the rotational force. Thereby, the screen W is taken up to the winding unit 12, and the screen W is transported in the order of the pre-processing step, the coating step, and the post-processing step. The drive mechanism intermittently drives the transport mechanism 10 such that the drive and the stop are alternately repeated at predetermined intervals. That is, the screen W is intermittently transported. The coating step is performed during the rest period of the intermittent driving of the conveying mechanism 10.

夾持裝置64係於網板W之搬送方向配置於預處理裝置30之下游側。跳動機構63係於網板W之搬送方向配置於後處理裝置40之下游側。夾持裝置64及跳動機構63係於搬送機構10之間歇驅動期間一直進行動作,而對存在於兩者之間之網板W附加張力,防止在塗佈步驟中於網板W產生鬆弛之現象。又,雖省略參照符號之標註,但於捲出部11與捲取部12之間,於多處配置有於搬送機構10之驅動時用以對網板W附加張力而防止鬆弛之從動輥。網板W係自塗佈步驟至後處理步驟之間,以形成如圖1所示之水平之搬送面T之方式加以搬送。 The holding device 64 is disposed on the downstream side of the pretreatment device 30 in the conveying direction of the screen W. The pulsating mechanism 63 is disposed on the downstream side of the post-processing device 40 in the conveying direction of the stencil W. The gripping device 64 and the pulsating mechanism 63 are always operated during the intermittent driving period of the transport mechanism 10, and tension is applied to the screen W existing between the two to prevent slack in the screen W during the coating step. . In addition, although the reference numerals are omitted, a driven roller for applying tension to the mesh W and preventing slack during the driving of the transport mechanism 10 is disposed between the winding portion 11 and the winding portion 12. . The stencil W is transported between the coating step and the post-processing step to form a horizontal transfer surface T as shown in FIG.

其次,對配置於預處理裝置30與後處理裝置40之間進行網板塗佈裝置1之塗佈步驟之主要部分之構成詳細地加以說明。座架24係藉由腳部水平支撐於地板F上,且固定地設置成既定高度。進行塗佈步驟之部分係設置於該座架24上。 Next, the configuration of the main part of the coating step of the screen coating apparatus 1 disposed between the pretreatment apparatus 30 and the post-processing apparatus 40 will be described in detail. The frame 24 is horizontally supported on the floor F by the feet and is fixedly set to a predetermined height. A portion of the coating step is disposed on the mount 24.

吸附平台13配置於搬送面T之下方。吸附平台13係固定地設置於座架24上,且高度位置不變。如下所述,網板塗佈裝置1為使網板W密接於吸附平台13上,並非使吸附平台13上升,而是具備有使網板W升降之網板升降機構。吸附平台13連接於吸附力產生機構。 The adsorption stage 13 is disposed below the transfer surface T. The adsorption platform 13 is fixedly disposed on the mount 24 and has a constant height position. As described below, the screen coating apparatus 1 is such that the screen W is closely attached to the adsorption stage 13, and the stencil raising and lowering mechanism is provided instead of raising the suction platform 13. The adsorption platform 13 is connected to an adsorption force generating mechanism.

吸附力產生機構(未圖示)使吸附平台13之上表面產生 吸附力,較佳為使用產生抽吸吸附力之真空泵。藉由利用真空泵使吸附平台13之上表面產生抽吸吸附力,而將網板W吸附固定於吸附平台13上。再者,吸附力產生機構亦可使用產生靜電吸附力之手段。 An adsorption force generating mechanism (not shown) generates an upper surface of the adsorption platform 13 The adsorption force is preferably a vacuum pump that generates suction adsorption force. The screen W is adsorbed and fixed to the adsorption stage 13 by generating a suction adsorption force on the upper surface of the adsorption platform 13 by means of a vacuum pump. Further, the adsorption force generating means may also use means for generating electrostatic adsorption force.

吸附平台13具有沿網板W之搬送方向分割成數個(作為一例,本實施形態中為3個)吸附區域131~133(參照圖8(C))。3個吸附區域131~133係藉由吸附力產生機構而動作,其動作係藉由網板吸附控制部(未圖示)來控制。對3個吸附區域131~133以於網板W之搬送方向階段性且追加性地動作之方式進行控制。 The adsorption stage 13 has a plurality of (for example, three in the present embodiment) adsorption regions 131 to 133 divided in the transport direction of the screen W (see FIG. 8(C)). The three adsorption regions 131 to 133 are operated by an adsorption force generating mechanism, and the operation is controlled by a screen adsorption control unit (not shown). The three adsorption regions 131 to 133 are controlled such that the transport direction of the screen W is stepwise and additionally operated.

噴嘴14配置於搬送面T之上方。作為一例,噴嘴14係使用具有細縫狀之噴出口之縫模。噴嘴14係於細縫狀之噴出口與同網板W之搬送方向正交之方向(即,網板W之寬度方向)平行之配向下來設置。 The nozzle 14 is disposed above the transfer surface T. As an example, the nozzle 14 is a slit die having a slit-shaped discharge port. The nozzle 14 is provided in a direction in which the slit-shaped discharge port is parallel to the direction in which the conveying direction of the same screen W is orthogonal (that is, the width direction of the screen W).

如下所述,噴嘴14可沿垂直方向(Z軸方向)及網板W之搬送方向(X軸方向)移動。噴嘴14係藉由網板W之搬送方向(X軸方向)之移動,而於網板W之上方移行,且將自噴出口噴出之塗佈液塗佈至網板W之表面。又,噴嘴14係藉由垂直方向(Z軸方向)之移動而與網板W之間形成既定之塗佈間隙。藉由維持塗佈間隙,且噴嘴14沿網板W之搬送方向移行,而將自噴出口噴出之塗佈液塗佈至網板W上。又,噴嘴14除該等2個方向以外,亦可沿與網板W之搬送方向正交之方向(Y軸方向)移動。 As described below, the nozzle 14 is movable in the vertical direction (Z-axis direction) and the conveying direction (X-axis direction) of the screen W. The nozzle 14 is moved over the screen W by the movement of the screen W in the conveying direction (X-axis direction), and the coating liquid discharged from the discharge port is applied to the surface of the screen W. Further, the nozzle 14 forms a predetermined coating gap with the screen W by the movement in the vertical direction (Z-axis direction). The coating liquid sprayed from the discharge port is applied to the screen W by maintaining the coating gap and moving the nozzle 14 in the conveying direction of the screen W. Further, the nozzles 14 may be moved in a direction (Y-axis direction) orthogonal to the conveying direction of the screen W in addition to the two directions.

進給機構15係為對噴嘴14供給塗佈液者,作為一例,包括塗佈液儲存槽及定量泵。定量泵係由於可機械地進行高精度之塗佈液噴出量控制,故而可控制塗佈膜開始部及塗佈膜結束部之膜厚,進而可藉由組合智慧擬合(Smart fitting)控制,而使膜厚之均勻性進一 步提昇。即便塗佈液種類、塗佈液黏度變更,藉由設置塗佈車(Coat wagon)單元作為塗佈液供給單元,亦可監視塗佈液且自動進行液交換。又,藉由向塗佈液儲存槽中加入清洗液,亦可自動進行配管內清洗等,按照塗佈用途,可進行各種配管系統之組合。 The feeding mechanism 15 is a method of supplying a coating liquid to the nozzle 14, and includes, as an example, a coating liquid storage tank and a metering pump. Since the dosing pump system can mechanically control the discharge amount of the coating liquid with high precision, the film thickness of the coating film start portion and the coating film end portion can be controlled, and the smart fitting control can be combined. And make the uniformity of the film thickness into one Step up. Even if the coating liquid type or the viscosity of the coating liquid is changed, a coating vehicle (Coat wagon) unit is provided as the coating liquid supply unit, and the coating liquid can be monitored and liquid exchange can be automatically performed. Further, by adding a cleaning liquid to the coating liquid storage tank, it is possible to automatically perform in-pipe cleaning or the like, and various types of piping systems can be combined depending on the application.

圖2係以沿與搬送方向正交之方向橫切搬送面之剖面來表示噴嘴移動機構之概略構成之圖。平台25固定地設置於座架24(參照圖1)上,且高度位置不變。噴嘴移動機構係構成於該平台25上。噴嘴移動機構包括噴嘴升降機構16、第1噴嘴水平移動機構17及第2噴嘴水平移動機構18。 2 is a view showing a schematic configuration of a nozzle moving mechanism by a cross section transverse to the conveying surface in a direction orthogonal to the conveying direction. The platform 25 is fixedly disposed on the mount 24 (refer to FIG. 1) and has a constant height position. A nozzle moving mechanism is formed on the platform 25. The nozzle moving mechanism includes a nozzle lifting mechanism 16, a first nozzle horizontal moving mechanism 17, and a second nozzle horizontal moving mechanism 18.

於平台25上,於網板W之搬送路徑之外側,與網板W之搬送方向正交之方向對向地構築支架(gantry)型XZ軸機器人。作為一例,該機器人係使用具有正交軸之2軸之線性致動器。藉由該機器人,而分別實現使保持噴嘴14之滑件26沿垂直方向(Z軸方向)及網板W之搬送方向(X軸方向)移動之噴嘴升降機構16及第1噴嘴水平移動機構17。 On the platform 25, a gantry type XZ-axis robot is constructed opposite to the direction in which the transport direction of the screen W is orthogonal to the transport path of the screen W. As an example, the robot uses a linear actuator having two axes of orthogonal axes. The nozzle lifting mechanism 16 and the first nozzle horizontal moving mechanism 17 that move the slider 26 of the holding nozzle 14 in the vertical direction (Z-axis direction) and the conveying direction (X-axis direction) of the screen W are respectively realized by the robot. .

又,網板塗佈裝置1係除包括使滑件26沿上述2方向移動之機構以外,亦包括可使滑件26沿與網板W之搬送方向正交之方向(Y軸方向)移動之第2噴嘴水平移動機構18。於本實施形態中,第2噴嘴水平移動機構18係設置於滑件26與噴嘴14之間。此外,亦可如圖3所示之第2噴嘴水平移動機構之另一實施形態般,將第2噴嘴水平移動機構18設置於噴嘴升降機構16與第1噴嘴水平移動機構17之間,亦可如圖4所示之第2噴嘴水平移動機構之其他另一實施形態般,將第2噴嘴水平移動機構18設置於座架24與平台25之間。 Further, the screen coating apparatus 1 includes a mechanism for moving the slider 26 in the two directions, and also includes moving the slider 26 in a direction (Y-axis direction) orthogonal to the conveying direction of the screen W. The second nozzle horizontal movement mechanism 18. In the present embodiment, the second nozzle horizontal movement mechanism 18 is provided between the slider 26 and the nozzle 14. Further, as another embodiment of the second nozzle horizontal movement mechanism shown in FIG. 3, the second nozzle horizontal movement mechanism 18 may be provided between the nozzle elevating mechanism 16 and the first nozzle horizontal movement mechanism 17, or As another embodiment of the second nozzle horizontal movement mechanism shown in FIG. 4, the second nozzle horizontal movement mechanism 18 is provided between the mount 24 and the stage 25.

作為一例,第2噴嘴水平移動機構18係存在有線性致 動器、電動致動器、使用空氣軸承之線性馬達、空氣壓.油壓式致動器等自動驅動方式、及利用進給螺桿、推拉螺桿等之手動調整方式。 As an example, the second nozzle horizontal movement mechanism 18 has linearity Actuator, electric actuator, linear motor using air bearing, air pressure. An automatic drive method such as a hydraulic actuator and a manual adjustment method using a feed screw or a push-pull screw.

再次參照圖1,第1塗佈位置檢測感測器65係於網板W之搬送方向配置於預處理裝置30之上游側。第2塗佈位置檢測感測器66係於網板W之搬送方向配置於噴嘴14之上游側。第1塗佈位置檢測感測器65及第2塗佈位置檢測感測器66係藉由檢測網板W之邊緣、或形成於網板W之上表面之塗佈膜之邊緣,而用於噴嘴14之初始位置(塗佈位置)之控制。作為一例,上述塗佈位置檢測感測器係可使用圖像處理感測器、顏色識別感測器、超音波感測器、條碼、雷射感測器、熱影像感測器。 Referring again to FIG. 1 , the first coating position detecting sensor 65 is disposed on the upstream side of the pretreatment apparatus 30 in the conveying direction of the screen W. The second coating position detecting sensor 66 is disposed on the upstream side of the nozzle 14 in the conveying direction of the screen W. The first coating position detecting sensor 65 and the second coating position detecting sensor 66 are used for detecting the edge of the screen W or the edge of the coating film formed on the upper surface of the screen W. Control of the initial position (coating position) of the nozzle 14. As an example, the coating position detecting sensor may use an image processing sensor, a color recognition sensor, an ultrasonic sensor, a barcode, a laser sensor, and a thermal image sensor.

圖5係表示塗佈位置控制系統之方塊圖。塗佈位置控制部27係根據第1塗佈位置檢測感測器65及第2塗佈位置檢測感測器66之檢測信號,個別地控制搬送機構10、第1噴嘴水平移動機構17及第2噴嘴水平移動機構18之驅動。塗佈位置控制部27掌握著噴嘴14之位置。 Figure 5 is a block diagram showing a coating position control system. The coating position control unit 27 individually controls the conveying mechanism 10, the first nozzle horizontal moving mechanism 17, and the second based on the detection signals of the first coating position detecting sensor 65 and the second coating position detecting sensor 66. The nozzle moves horizontally by the mechanism 18. The coating position control unit 27 grasps the position of the nozzle 14.

利用圖6之流程圖對利用塗佈位置控制部27決定塗佈位置之控制例進行說明。首先,利用第1塗佈位置檢測感測器65檢測出網板W之邊緣(步驟S1),驅動搬送機構10,而將網板W搬送至所設定之初始位置,以進行塗佈步驟(步驟S2)。再次利用第2塗佈位置檢測感測器66檢測出網板W之網板W之邊緣(步驟S3),塗佈位置控制部27判斷於網板W之搬送方向(X軸方向),噴嘴14之現在位置是否自適當位置產生出偏移(步驟S4),當判斷出產生偏移時,使第1噴嘴水平移動機構17產生動作,而使噴嘴14沿該方向移動,以進行位置對準(步驟S5)。繼而,塗佈位置控制部27判斷於與網板W之搬送 方向正交之方向(Y軸方向),噴嘴14之現在位置是否自適當位置產生出偏移(步驟S6),當判斷出產生偏移時,使第2噴嘴水平移動機構18產生動作,而使噴嘴14沿該方向移動,以進行位置對準。 An example of control for determining the application position by the coating position control unit 27 will be described with reference to the flowchart of Fig. 6 . First, the first coating position detecting sensor 65 detects the edge of the screen W (step S1), drives the conveying mechanism 10, and transports the screen W to the set initial position to perform the coating step (step S2). The second coating position detecting sensor 66 detects the edge of the screen W of the screen W (step S3), and the coating position control unit 27 determines the conveying direction (X-axis direction) of the screen W, and the nozzle 14 Whether the current position is offset from the appropriate position (step S4), and when it is determined that the offset is generated, the first nozzle horizontal moving mechanism 17 is caused to operate, and the nozzle 14 is moved in the direction to perform the positional alignment ( Step S5). Then, the coating position control unit 27 determines that the transfer to the screen W is performed. In the direction orthogonal to the direction (Y-axis direction), whether the current position of the nozzle 14 is offset from the appropriate position (step S6), and when it is determined that the offset is generated, the second nozzle horizontal movement mechanism 18 is caused to operate. The nozzle 14 is moved in this direction for positional alignment.

如此之塗佈位置調整係亦可用於初次將塗佈膜形成於未塗佈之網板W之情形,但於對已形成有塗佈膜之網板W進行重複塗佈或多層塗佈時較為有用。於重複塗佈或多層塗佈中,藉由將第1塗佈位置檢測感測器65及第2塗佈位置檢測感測器66之檢測位置如圖7之平面圖所示般設定於塗佈膜之邊緣而非網板W之邊緣,可高精度地以使噴嘴14之噴出口重合於塗佈膜之上方之適當位置之方式來調整塗佈位置。 Such a coating position adjustment system can also be used for the case where the coating film is formed on the uncoated screen W for the first time, but when the screen W on which the coating film has been formed is repeatedly coated or multi-layer coated, it works. In the repeated coating or the multilayer coating, the detection positions of the first coating position detecting sensor 65 and the second coating position detecting sensor 66 are set to the coating film as shown in the plan view of FIG. The edge is not the edge of the stencil W, and the coating position can be adjusted with high precision so that the discharge port of the nozzle 14 is placed at an appropriate position above the coating film.

再次參照圖1對網板升降機構之構成進行說明。第1網板支撐輥20係位於搬送面T之下側,於網板W之搬送方向,可升降地配置於吸附平台13之上游側,且於該位置支撐著網板W。第2網板支撐輥21係位於搬送面T之下側,於網板W之搬送方向可升降地配置於吸附平台13之上游側,且於該位置支撐著網板W。第1網板支撐輥20及第2網板支撐輥21係為本發明之網板支撐構件之一例。第1網板支撐輥20及第2網板支撐輥21隨著網板W之搬送而被動地旋轉。 The configuration of the stencil lifting mechanism will be described with reference to Fig. 1 again. The first stencil supporting roller 20 is located below the conveying surface T, and is disposed on the upstream side of the suction platform 13 so as to be movable up and down in the conveying direction of the stencil W, and supports the stencil W at this position. The second stencil supporting roller 21 is located below the conveying surface T, and is disposed on the upstream side of the suction platform 13 so as to be movable up and down in the conveying direction of the stencil W, and supports the stencil W at this position. The first stencil support roller 20 and the second stencil support roller 21 are examples of the stencil supporting member of the present invention. The first stencil support roller 20 and the second stencil support roller 21 are passively rotated in accordance with the conveyance of the stencil W.

第1網板支撐輥升降機構22係配置於第1網板支撐輥20之附近,且以使第1網板支撐輥20升降之方式所構成。第2網板支撐輥升降機構23係配置於第2網板支撐輥21之附近,且以使第2網板支撐輥21升降之方式所構成。作為一例,第1網板支撐輥升降機構22及第2網板支撐輥升降機構23可較佳地使用線性致動器等。 The first stencil supporting roller elevating mechanism 22 is disposed in the vicinity of the first stencil supporting roller 20, and is configured to elevate and lower the first stencil supporting roller 20. The second stencil supporting roller elevating mechanism 23 is disposed in the vicinity of the second stencil supporting roller 21, and is configured to elevate and lower the second stencil supporting roller 21. As an example, the first stencil supporting roller elevating mechanism 22 and the second stencil supporting roller elevating mechanism 23 can preferably use a linear actuator or the like.

第1網板支撐輥升降機構22及第2網板支撐輥升降機構23之驅動係受網板升降控制部(未圖示)所控制。網板升降控制部係 以使位於吸附平台13之上方的部分之網板W自其搬送方向之搬送方向之上游側向下游側逐漸下降之方式,利用時間差來控制第1網板支撐輥升降機構22及第2網板支撐輥升降機構23。 The driving of the first stencil supporting roller lifting mechanism 22 and the second stencil supporting roller lifting mechanism 23 is controlled by a stencil lifting control unit (not shown). Stencil lifting control department The first stencil supporting roller lifting mechanism 22 and the second stencil are controlled by a time difference so that the stencil W of the portion located above the suction platform 13 gradually descends from the upstream side in the conveying direction of the conveying direction to the downstream side. Support roller lifting mechanism 23.

參照圖8(A)至(E)對利用網板升降控制部及網板吸附控制部之控制例進行說明。雖未特別地進行圖示,但以下說明之一系列動作係於驅動夾持裝置64及跳動機構63,對網板W沿搬送方向施加均勻之張力之狀態下來進行。 A control example using the screen lifting control unit and the screen suction control unit will be described with reference to Figs. 8(A) to 8(E). Although not specifically illustrated, one of the series of operations described below is performed by driving the gripping device 64 and the pulsating mechanism 63, and applying a uniform tension to the stencil W in the conveying direction.

於進行上述塗佈位置調整後,首先,於圖8(A)所示之狀態下,第1網板支撐輥20及第2網板支撐輥21均位於同一高度,且於相較吸附平台13為上方來支撐網板W。此時之網板W之高度係與搬送面T之高度為相同。 After the above-described coating position adjustment, first, in the state shown in FIG. 8(A), the first screen supporting roller 20 and the second screen supporting roller 21 are both at the same height, and compared with the adsorption platform 13 Support the stencil W for the top. At this time, the height of the stencil W is the same as the height of the transport surface T.

其次,網板升降控制部係驅動第1網板支撐輥升降機構22,如圖8(B)所示,使第1網板支撐輥20下降。第1網板支撐輥20之下降量係設定為搬送面T與吸附平台13之上表面之高度之差。此時,第2網板支撐輥21未下降,而維持於初始高度。因此,位於吸附平台13之上方之網板W係被支撐著如圖示般具有網板W之搬送方向之上游側較低、下游側較高般之傾斜。 Next, the stencil raising and lowering control unit drives the first stencil supporting roller elevating mechanism 22, and as shown in Fig. 8(B), the first stencil supporting roller 20 is lowered. The amount of drop of the first stencil support roller 20 is set as the difference between the height of the transfer surface T and the upper surface of the adsorption stage 13. At this time, the second stencil support roller 21 is not lowered but is maintained at the initial height. Therefore, the screen W located above the adsorption stage 13 is supported such that the upstream side of the conveying direction of the screen W is lower and the downstream side is inclined as high as shown.

其後,如圖8(C)至(E)所示,網板升降控制部係驅動第2網板支撐輥升降機構23,而使第2網板支撐輥21下降。第2網板支撐輥21之下降量係設定為與第1網板支撐輥20相同。 Thereafter, as shown in FIGS. 8(C) to (E), the stencil raising and lowering control unit drives the second stencil supporting roller elevating mechanism 23 to lower the second stencil supporting roller 21. The amount of lowering of the second stencil support roller 21 is set to be the same as that of the first stencil support roller 20.

網板吸附控制部係使將吸附平台13沿搬送方向分割而形成之3個吸附區域131~133以與第2網板支撐輥21之下降過程中之前段、中段、後段之3個時間段同步之方式階段性且追加性地動作。即,於前段,僅使位於最上游側之第1吸附區域131產生動作(參照圖 8(C)),於中段,使位於中央部之第2吸附區域132追加性地產生動作(參照圖8(D)),於後段,使位於最下游側之第3吸附區域133進一步追加性地產生動作(參照圖8(E))。 The stencil adsorption control unit synchronizes the three adsorption regions 131 to 133 formed by dividing the adsorption platform 13 in the transport direction in synchronization with the three periods of the previous, middle, and rear stages in the descending process of the second screen support roller 21. This method operates in a phased and additional manner. In other words, in the preceding stage, only the first adsorption region 131 located on the most upstream side is operated (see the figure). 8(C)), in the middle stage, the second adsorption region 132 located at the center portion is additionally operated (see FIG. 8(D)), and in the subsequent stage, the third adsorption region 133 located on the most downstream side is further added. The action is generated (see Fig. 8(E)).

藉由如此之網板升降控制部與網板吸附控制部之協同動作,而於對網板W沿搬送方向施加有均勻之張力之狀態下,隨著網板W之傾斜變小,而自網板W之搬送方向之上游側向下游側將網板W逐漸吸附至吸附平台13上。藉此,可防止經吸附之網板W中產生皺褶、或於網板W與吸附平台13之間產生空氣積存。其結果,即便為具有可撓性之網板W,亦可與晶圓等單片狀之工件同樣地形成具有定形性及平滑性之水平之塗佈面P(參照圖8(E))。再者,若將開幅輥(弓形彎曲輥)用於網板支撐輥20、21,則可有效地防止產生於網板W中之皺褶。 With such a cooperation between the stencil lifting control unit and the stencil adsorption control unit, in a state where a uniform tension is applied to the stencil W in the conveying direction, the inclination of the stencil W becomes smaller, and the stencil is smaller. The upstream side of the conveying direction of the sheet W gradually adsorbs the screen W to the adsorption stage 13 toward the downstream side. Thereby, wrinkles are generated in the adsorbed web W or air is accumulated between the web W and the adsorption stage 13. As a result, even in the case of the flexible web W, the coated surface P having a level of shape and smoothness can be formed in the same manner as a single-piece workpiece such as a wafer (see FIG. 8(E)). Further, if the opening roller (bow bending roller) is used for the stencil supporting rollers 20, 21, the wrinkles generated in the stencil W can be effectively prevented.

以如上方式形成塗佈面P後,驅動噴嘴升降機構16,而使噴嘴14之噴出口與塗佈面P之間保持既定之塗佈間隙。而且,驅動進給機構15,而藉由自噴嘴14噴出之微量之塗佈液,於塗佈間隙形成塗佈液積存(液珠)。而且,藉由驅動第1噴嘴水平移動機構17,沿網板W之搬送方向僅以不超過吸附平台13之長度之既定距離連續性地或間歇性地使噴嘴14進行掃描,而使液珠跟隨噴嘴14之移動,將塗佈液整面狀地或間歇性地塗佈至塗佈面P。 After the coated surface P is formed as described above, the nozzle elevating mechanism 16 is driven to maintain a predetermined coating gap between the discharge port of the nozzle 14 and the coated surface P. Further, the feed mechanism 15 is driven, and a coating liquid (a bead) is formed in the coating gap by a trace amount of the coating liquid discharged from the nozzle 14. Further, by driving the first nozzle horizontal moving mechanism 17, the nozzle 14 is continuously or intermittently scanned at a predetermined distance not exceeding the length of the adsorption stage 13 in the conveying direction of the screen W, and the bead is followed. The movement of the nozzle 14 applies the coating liquid to the coated surface P over the entire surface or intermittently.

除上述網板升降機構之時間差之驅動及數個吸附區域之階段性且追加性之動作以外,亦可設置自上方對網板W施加力且按壓至吸附平台13上之構造。例如為沿網板W之搬送方向使構件(對吸附固定於吸附平台13上之網板W附加與同網板W之搬送方向正交之方向平行之線性壓力)進行掃描的機構。作為掃描機構之一例,可使用 線性致動器。 In addition to the driving of the time difference of the above-described stencil raising and lowering mechanism and the stepwise and additional operations of the plurality of absorbing regions, a structure in which a force is applied to the stencil W from above and pressed onto the absorbing platform 13 may be provided. For example, a mechanism for scanning a member (a linear pressure parallel to a direction orthogonal to the conveying direction of the same screen W) to the web W attached to the adsorption stage 13 is scanned in the conveying direction of the screen W. As an example of a scanning mechanism, it can be used Linear actuator.

圖9(A)至(E)係例示附加線性壓力之構件為按壓輥之情形。按壓輥28係為沿與網板W之搬送方向正交之方向配向之軸且可旋轉地支撐著。按壓輥28配置於搬送面T之上方(參照圖9(A)),藉由升降機構(未圖示)而下降至與支撐於吸附平台13上之網板W之上表面產生抵接之位置,而將與網板W之搬送方向正交之方向平行之線性之按壓賦予至網板W(參照圖9(B))。藉由掃描機構(未圖示)而自網板W之搬送方向之下游側向上游側使按壓輥28進行掃描,按壓輥28於網板W上一面旋轉一面移行(參照圖9(C)至(E))。再者,藉由將空氣壓式氣缸等用於按壓輥28之升降機構部,可利用內部空氣壓之變更任意地設定藉由按壓輥28之按壓,因此,不會對網板W賦予過分之壓力。 9(A) to (E) illustrate the case where the member to which the linear pressure is applied is a pressing roller. The pressing roller 28 is rotatably supported by a shaft that is aligned in a direction orthogonal to the conveying direction of the screen W. The pressing roller 28 is disposed above the conveying surface T (see FIG. 9(A)), and is lowered by a lifting mechanism (not shown) to a position where it abuts against the upper surface of the screen W supported on the adsorption stage 13. On the other hand, a linear pressing in which the direction orthogonal to the conveying direction of the stencil W is parallel is applied to the stencil W (see FIG. 9(B)). The pressing roller 28 is scanned from the downstream side in the conveying direction of the screen W to the upstream side by the scanning mechanism (not shown), and the pressing roller 28 moves while rotating on the screen W (see FIG. 9(C) to (E)). Further, by using an air pressure type cylinder or the like for the lifting mechanism portion of the pressing roller 28, the pressing by the pressing roller 28 can be arbitrarily set by the change of the internal air pressure, so that the stencil W is not excessively provided. pressure.

又,圖10(A)至(E)係例示附加線性壓力之構件為空氣噴出噴嘴29之情形。空氣噴出噴嘴29係配置於搬送面T之上方(參照圖10(A))。空氣噴出噴嘴29係於下端具有與網板W之上表面之間保持有間隙之噴出口。作為一例,噴出口為沿與網板W之搬送方向正交之方向延伸之細縫形狀,但並不限定於此,亦可利用沿該方向以等間隔配置之數個小孔所構成噴出口。空氣噴出噴嘴29係連接於壓送空氣之空氣泵等,藉由自噴出口噴出之高壓空氣,而將與網板W之搬送方向正交之方向平行之線性之空氣壓賦予至網板W(參照圖10(B))。藉由移行機構(未圖示)而自網板W之搬送方向之下游側向上游側使噴出空氣之空氣噴出噴嘴29進行掃描(參照圖10(C)至(E))。空氣噴出噴嘴29係未與塗佈面P接觸之狀態下進行掃描,因此不會對網板W造成損傷,且於重複塗佈或多層塗佈時,不會對塗佈膜造成影響。又,亦可期待除去存在於塗佈面P之粉塵之效果。藉由空氣噴出噴嘴29所利用之空氣 壓係可藉由調節器等來加以調整,空氣噴出流量則可藉由流量計或利用填隙片等來變更細縫狀之噴出口之開口寬度而加以調整。 Further, FIGS. 10(A) to (E) illustrate a case where the member to which the linear pressure is applied is the air ejection nozzle 29. The air ejection nozzle 29 is disposed above the transfer surface T (see FIG. 10(A)). The air ejection nozzle 29 is a discharge port having a gap between the lower end and the upper surface of the screen W. As an example, the discharge port has a slit shape extending in a direction orthogonal to the conveying direction of the screen W. However, the present invention is not limited thereto, and a plurality of small holes arranged at equal intervals in the direction may be used as the discharge port. . The air ejection nozzle 29 is connected to an air pump that presses air, and the linear air pressure parallel to the direction orthogonal to the conveying direction of the screen W is applied to the screen W by the high-pressure air ejected from the ejection port (refer to Figure 10 (B)). The air discharge nozzle 29 that ejects air is scanned from the downstream side in the conveyance direction of the screen W to the upstream side by the transfer mechanism (not shown) (see FIGS. 10(C) to (E)). Since the air ejection nozzle 29 is scanned without being in contact with the coated surface P, the mesh W is not damaged, and the coating film is not affected during repeated coating or multilayer coating. Further, the effect of removing dust existing on the coated surface P can also be expected. The air utilized by the air jet nozzle 29 The pressure system can be adjusted by a regulator or the like, and the air discharge flow rate can be adjusted by changing the opening width of the slit-shaped discharge port by a flow meter or a shims.

再者,為變更空氣之噴出方向,亦可設置如下機構,即,如圖11所示,利用與網板W之搬送方向正交之方向之搖動軸291可搖動地支撐空氣噴出噴嘴29,而使該空氣噴出噴嘴29沿網板W之搬送方向產生搖動。 Further, in order to change the direction in which the air is ejected, a mechanism may be provided in which the air ejection nozzle 29 is oscillatably supported by the rocking shaft 291 in a direction orthogonal to the conveying direction of the screen W, as shown in FIG. The air ejection nozzle 29 is caused to move in the conveying direction of the screen W.

如此,藉由使按壓輥28於網板W上移行,或於網板W之上方使空氣噴出噴嘴29進行掃描,則可對僅利用網板W之張力控制而無法進行吸附之有厚度的厚網板、容易產生皺褶且具有伸縮性之網板,於吸附平台13上均勻地進行之吸附。 As described above, by moving the pressing roller 28 on the screen W or scanning the air ejection nozzle 29 above the screen W, it is possible to thicken the thickness which cannot be adsorbed by the tension control of the screen W alone. The stencil, the stencil which is easy to wrinkle and has elasticity, is uniformly adsorbed on the adsorption platform 13.

於上述實施形態中,於塗佈步驟中,利用第1噴嘴水平移動機構17沿網板W之搬送方向使噴嘴14掃描而進行塗佈。因此,利用第1噴嘴水平移動機構17之噴嘴可移動量係以遠大於藉由噴嘴14之初始位置調整用之第2噴嘴水平機構18的噴嘴可移動距離之方式加以設定。與此相對,亦可構成為可將平台25配置為與網板W之搬送方向正交。藉此,塗佈步驟中之噴嘴掃描方向相對於本實施形態之情形以直角反轉。即,可沿與網板W之搬送方向正交之方向進行塗佈。 In the above embodiment, in the coating step, the nozzle 14 is scanned by the first nozzle horizontal moving mechanism 17 in the conveying direction of the screen W to be applied. Therefore, the nozzle movable amount by the first nozzle horizontal moving mechanism 17 is set to be much larger than the nozzle movable distance of the second nozzle horizontal mechanism 18 for initial position adjustment of the nozzle 14. On the other hand, the platform 25 may be arranged to be orthogonal to the conveying direction of the screen W. Thereby, the nozzle scanning direction in the coating step is reversed at a right angle with respect to the case of the present embodiment. That is, the coating can be performed in a direction orthogonal to the conveying direction of the screen W.

應認為上述實施形態之說明於所有方面均為例示,而非進行限制者。本發明之範圍係由申請專利範圍表示,而非上述實施形態。進而,意指本發明之範圍包括與申請專利範圍均等之意思及範圍內之所有變更。 The description of the above embodiments is to be considered in all respects as illustrative The scope of the present invention is expressed by the scope of the patent application, not the above embodiment. Further, it is intended that the scope of the invention includes all modifications within the meaning and scope of the invention.

1‧‧‧網板塗佈裝置 1‧‧‧ stencil coating device

10‧‧‧搬送機構 10‧‧‧Transportation agency

11‧‧‧捲出部 11‧‧‧Departure

12‧‧‧捲取部 12‧‧‧Winding Department

13‧‧‧吸附平台 13‧‧‧Adsorption platform

14‧‧‧噴嘴 14‧‧‧Nozzles

15‧‧‧進給機構 15‧‧‧Feed institutions

16‧‧‧噴嘴升降機構 16‧‧‧Nozzle lifting mechanism

17‧‧‧第1噴嘴水平移動機構 17‧‧‧1st nozzle horizontal moving mechanism

18‧‧‧第2噴嘴水平移動機構 18‧‧‧2nd nozzle horizontal moving mechanism

20‧‧‧第1網板支撐輥 20‧‧‧1st stencil support roller

21‧‧‧第2網板支撐輥 21‧‧‧2nd stencil support roller

22‧‧‧第1網板支撐輥升降機構 22‧‧‧1st stencil support roller lifting mechanism

23‧‧‧第2網板支撐輥升降機構 23‧‧‧2nd stencil support roller lifting mechanism

24‧‧‧座架 24‧‧‧Rack

25‧‧‧平台 25‧‧‧ platform

30‧‧‧預處理裝置 30‧‧‧Pretreatment device

40‧‧‧後處理裝置 40‧‧‧Reprocessing device

50‧‧‧噴嘴管理單元 50‧‧‧Nozzle Management Unit

63‧‧‧跳動機構 63‧‧‧Bounce mechanism

64‧‧‧夾持裝置 64‧‧‧Clamping device

65‧‧‧第1塗佈位置檢測感測器 65‧‧‧1st coating position detection sensor

66‧‧‧第2塗佈位置檢測感測器 66‧‧‧2nd coating position detection sensor

F‧‧‧地板 F‧‧‧Floor

T‧‧‧搬送面 T‧‧‧Transfer surface

W‧‧‧網板 W‧‧‧ stencil

Claims (10)

種網板塗佈裝置,其包括:搬送機構,其以形成水平之搬送面之方式間歇性地搬送長條之網板;吸附平台,其配置於上述搬送面之下方,且吸附固定上述網板;吸附力產生機構,其使上述吸附平台之上表面產生吸附力;噴嘴,其配置於上述搬送面之上方,且具有與上述網板之上表面維持既定之塗佈間隙之噴出口,自該噴出口噴出塗佈液;進給機構,其將塗佈液送至上述噴嘴;第1噴嘴水平移動機構,其構成為可使上述噴嘴沿上述網板之搬送方向水平移動;第2噴嘴水平移動機構,其構成為可使上述噴嘴沿與上述網板之搬送方向正交之方向水平移動;及網板升降機構,其構成為可使上述網板於上述搬送面與上述吸附平台之間升降。 The stencil coating apparatus includes: a conveying mechanism that intermittently conveys a long stencil so as to form a horizontal conveying surface; and an adsorption platform disposed below the conveying surface and adsorbing and fixing the stencil An adsorption force generating mechanism that generates an adsorption force on an upper surface of the adsorption platform; a nozzle disposed above the transfer surface and having a discharge port that maintains a predetermined coating gap with the upper surface of the mesh plate, a discharge port ejecting a coating liquid; a feeding mechanism that sends the coating liquid to the nozzle; and a first nozzle horizontal moving mechanism configured to horizontally move the nozzle in a conveying direction of the screen; and the second nozzle moves horizontally The mechanism is configured to horizontally move the nozzle in a direction orthogonal to a conveying direction of the screen, and the screen lifting mechanism is configured to allow the screen to move up and down between the conveying surface and the suction platform. 如申請專利範圍第1項之網板塗佈裝置,其包括:塗佈位置檢測感測器,其檢測上述網板之邊緣或已形成於上述網板之上表面之塗佈膜之邊緣;及塗佈位置控制部,其根據上述塗佈位置檢測感測器之檢測結果,個別地控制上述搬送機構、上述第1噴嘴水平移動機構及上述第2噴嘴水平移動機構之驅動,以調整上述噴嘴之初始位置。 The screen coating apparatus of claim 1, comprising: a coating position detecting sensor that detects an edge of the screen or an edge of a coating film formed on an upper surface of the screen; and The coating position control unit individually controls the driving of the conveying mechanism, the first nozzle horizontal moving mechanism, and the second nozzle horizontal moving mechanism based on the detection result of the coating position detecting sensor to adjust the nozzle initial position. 如申請專利範圍第1項之網板塗佈裝置,其中,上述網板升降機構包括:第1網板支撐構件,其於上述網板之搬送方向可升降地配置於 上述吸附平台之上游側,且支撐上述網板;第2網板支撐構件,其於上述網板之搬送方向可升降地配置於上述吸附平台之下游側,且支撐上述網板;第1網板支撐構件升降機構,其使上述第1網板支撐構件升降;第2網板支撐構件升降機構,其使上述第2網板支撐構件升降;及網板升降控制部,其以使位於上述吸附平台之上方之上述網板自其搬送方向之上游側向下游側逐漸下降之方式,利用時間差來個別地控制上述第1網板支撐構件升降機構及上述第2網板支撐構件升降機構之驅動。 The screen coating apparatus according to claim 1, wherein the stencil lifting mechanism includes: a first stencil supporting member that is vertically movable in a conveying direction of the stencil The upstream side of the adsorption platform supports the mesh plate; the second mesh support member is disposed on the downstream side of the adsorption platform in a direction in which the mesh plate is transported, and supports the mesh plate; the first mesh plate a support member elevating mechanism that elevates and lowers the first stencil supporting member; a second stencil supporting member elevating mechanism that elevates and lowers the second stencil supporting member; and a stencil elevating control unit that is located at the absorbing platform The upper stencil is gradually lowered from the upstream side to the downstream side in the transport direction, and the driving of the first stencil supporting member elevating mechanism and the second stencil supporting member elevating mechanism is individually controlled by the time difference. 如申請專利範圍第2項之網板塗佈裝置,其中,上述網板升降機構包括:第1網板支撐構件,其於上述網板之搬送方向可升降地配置於上述吸附平台之上游側,且支撐上述網板;第2網板支撐構件,其於上述網板之搬送方向可升降地配置於上述吸附平台之下游側,且支撐上述網板;第1網板支撐構件升降機構,其使上述第1網板支撐構件升降;第2網板支撐構件升降機構,其使上述第2網板支撐構件升降;及網板升降控制部,其以使位於上述吸附平台之上方之上述網板自其搬送方向之上游側向下游側逐漸下降之方式,利用時間差來個別地控制上述第1網板支撐構件升降機構及上述第2網板支撐構件升降機構之驅動。 The stencil coating apparatus according to the second aspect of the invention, wherein the stencil elevating mechanism includes: a first stencil supporting member that is disposed on the upstream side of the adsorption platform in a direction in which the stencil is transported, And supporting the stencil; the second stencil supporting member is disposed on the downstream side of the adsorption platform in a conveying direction of the stencil, and supports the stencil; and the first stencil supporting member lifting mechanism The first stencil support member is lifted and lowered; the second stencil support member elevating mechanism is configured to elevate and lower the second stencil support member; and the stencil elevating control portion is configured to align the stencil located above the absorbing platform The upstream side of the conveying direction is gradually lowered toward the downstream side, and the driving of the first stencil supporting member elevating mechanism and the second stencil supporting member elevating mechanism is individually controlled by the time difference. 如申請專利範圍第3項之網板塗佈裝置,其中, 上述吸附平台具有沿上述網板之搬送方向分割成之數個吸附區域,且上述吸附力產生機構包括網板吸附控制部,該網板吸附控制部使上述數個吸附區域沿上述網板之搬送方向階段性且追加性地動作。 Such as the stencil coating device of claim 3, wherein The adsorption platform has a plurality of adsorption regions divided along the transport direction of the screen, and the adsorption force generating mechanism includes a screen adsorption control unit, and the screen adsorption control unit transports the plurality of adsorption regions along the screen. The direction moves stepwise and additionally. 如申請專利範圍第5項之網板塗佈裝置,其進一步包括沿上述網板之搬送方向使自上述網板之上方附加與上述網板之搬送方向正交之方向平行之線性壓力之構件進行掃描的機構。 The stencil coating apparatus of claim 5, further comprising: a member for linearly applying a linear pressure parallel to a direction orthogonal to a conveying direction of the stencil above the stencil in a conveying direction of the stencil Scanning mechanism. 如申請專利範圍第6項之網板塗佈裝置,其中,附加上述線性壓力之構件係為輥,該輥抵接於上述網板之上表面,且在配向於上述網板之搬送方向正交之方向之軸旋轉自如地被支撐著。 The screen coating device of claim 6, wherein the member to which the linear pressure is added is a roller, the roller abuts on an upper surface of the mesh plate, and is orthogonal to a conveying direction of the mesh plate. The axis of the direction is rotatably supported. 如申請專利範圍第6項之網板塗佈裝置,其中,附加上述線性壓力之構件係為空氣噴出噴嘴,該空氣噴出噴嘴具有與上述網板之上表面之間保持有間隙之噴出口。 The screen coating apparatus of claim 6, wherein the member to which the linear pressure is added is an air ejection nozzle having a discharge port that maintains a gap with an upper surface of the screen. 如申請專利範圍第8項之網板塗佈裝置,其進一步包括使上述空氣噴出噴嘴沿上述網板之搬送方向搖動之機構。 The screen coating apparatus of claim 8, further comprising a mechanism for oscillating the air ejection nozzle in a conveying direction of the screen. 如申請專利範圍第1至9項中任一項之網板塗佈裝置,其構成為可將構築有上述第1噴嘴水平移動機構及上述第2噴嘴水平移動機構之平台配置為與上述網板之搬送方向正交。 The screen coating apparatus according to any one of claims 1 to 9, wherein the screen is configured such that the first nozzle horizontal movement mechanism and the second nozzle horizontal movement mechanism are arranged to be the same as the screen The transport direction is orthogonal.
TW102102493A 2012-01-24 2013-01-23 Web coating device TW201402223A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012011941A JP2013150946A (en) 2012-01-24 2012-01-24 Web coating apparatus

Publications (1)

Publication Number Publication Date
TW201402223A true TW201402223A (en) 2014-01-16

Family

ID=48810857

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102102493A TW201402223A (en) 2012-01-24 2013-01-23 Web coating device

Country Status (4)

Country Link
JP (1) JP2013150946A (en)
KR (1) KR20130086325A (en)
CN (1) CN103212514A (en)
TW (1) TW201402223A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101629784B1 (en) * 2015-01-13 2016-06-13 (주)피엔티 Apparatus for releasing and winding fabricated metal foil
CN105983498A (en) * 2015-02-11 2016-10-05 江苏沥泽生化科技有限公司 Nano-silver coating device
CN106394043A (en) * 2015-07-29 2017-02-15 天津市阿波罗信息技术有限公司 Tagging method of online variable information
WO2017131014A1 (en) * 2016-01-27 2017-08-03 株式会社瑞光 Device for manufacturing particulate-containing article and method for manufacturing particulate-containing article
JP6860356B2 (en) * 2017-01-20 2021-04-14 株式会社Screenホールディングス Coating device and coating method
CN107511292B (en) * 2017-09-04 2019-05-21 浙江骏驰纸制品有限公司 A kind of paper feeding driving drum gluing mothballed plant
CN109569981B (en) * 2018-12-19 2024-05-24 珠海智新自动化科技有限公司 Selenium drum test powder adding device
CN109622297B (en) * 2019-02-22 2024-06-04 浙江启成智能科技有限公司 Oil-passing conveying line device
CN109865635B (en) * 2019-02-27 2022-09-13 东莞倍胜智能科技有限公司 Point gum machine with feed back function
CN109807010A (en) * 2019-03-07 2019-05-28 广东震仪智能装备股份有限公司 Plasma spraying compensation system and compensation method
CN111715472A (en) * 2019-03-18 2020-09-29 合肥精显电子科技有限公司 LCD adhesive deposite device
CN115385144B (en) * 2022-10-27 2022-12-20 江苏靓时新材料科技股份有限公司 Impregnated paper production and transportation system and working method

Also Published As

Publication number Publication date
CN103212514A (en) 2013-07-24
KR20130086325A (en) 2013-08-01
JP2013150946A (en) 2013-08-08

Similar Documents

Publication Publication Date Title
TW201402223A (en) Web coating device
CN108568382B (en) Droplet discharge device, droplet discharge method, program, and computer storage medium
CN1321748C (en) Substrate processing device
JP5841449B2 (en) Wiping pad, nozzle maintenance device using the pad, and coating treatment device
JP4980644B2 (en) Coating method and coating apparatus
JP5430697B2 (en) Coating method and coating apparatus
JP2011167612A (en) Slit nozzle cleaning device and coating device
JP2011092855A5 (en)
JP4516034B2 (en) Coating method, coating apparatus, and coating program
JP2012199413A (en) Apparatus and method for forming coating film
US20130025481A1 (en) Screen Printing Device with Infinite Loop Stencil
JP4644726B2 (en) Coating device
JP6617298B2 (en) Electronic component mounting equipment
CN108325788A (en) Applying device and coating method
JP7155965B2 (en) Adhesive supply device and inkjet image forming device
US9475314B2 (en) Printing device and printing method
JP5083524B2 (en) Web coating device
KR20170140567A (en) Coating apparatus
JP7197525B2 (en) NOZZLE CLEANING DEVICE, COATING DEVICE, NOZZLE CLEANING METHOD, AND SCRAPER
JP2016082087A (en) Electronic component mounting method
JP6062776B2 (en) Coating machine with backing roll
JP6322815B2 (en) Electronic component mounting equipment
JP3182815U (en) Coating nozzle cleaning device
JP2013188899A (en) Liquid injection device and medium conveyance device
JP6357650B2 (en) Electronic component mounting equipment