JP2011092915A - Thin film coating apparatus and double-side thin film coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an epoch-making thin film coating apparatus and a double-side thin film coating apparatus in which even when the reverse side of a coating surface cannot be supported, the thin coating film is accurately and uniformly formed, in which the double-side coating which continuously forms a thin film accurately and uniformly before drying is achieved, and which can miniaturize and mass-produce a production facility of lithium-ion battery forming materials, especially double-side coated. <P>SOLUTION: The thin film coating apparatus is so constituted that a tip discharge opening 3 of a nozzle 4 is arranged in the vicinity of conveying downstream side of a supporting roll 10 supporting a film-shaped body 5 to be coated, and that a non-contact type vibration suppression mechanism D suppressing film vibration by spraying air is installed on the conveying downstream side of the tip discharge opening 3 of the nozzle 4. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention, for example, a thin film coating configured to convey a film-like object to be coated and to form a thin film on the surface thereof with respect to a nozzle portion that discharges a coating liquid from a slit-like tip discharge hole After coating on one side of the device and the object to be coated, coat it on the opposite side before drying it, coat both sides, then dry and apply a thin film on both sides of the object to be coated The present invention relates to a double-sided thin film coating apparatus to be formed.

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-like tip discharge hole, and the film is opposed to this nozzle part while discharging the coating liquid from the tip discharge hole of this nozzle part. In the thin film coating apparatus configured to apply the coating liquid to the film-shaped coated body in a thin film shape by transporting the coated body of the film to the nozzle portion, If the surface opposite to the coated surface of the workpiece can be supported, the opposite surface can be supported with a support roll for coating, etc. Yes, but if the opposite surface cannot be supported, even if the coating surface on the upstream side of the transport is supported by a support roll, vibrations that occur on the downstream side of the transport, such as drying processes such as hot air drying and IR drying, especially hot air drying Noticeable film vibration Ri can not accurately manage the thickness can not be uniformly applied.

  In addition, after coating on one side with the first coating mechanism, before applying drying such as hot air drying or IR drying, the other side is also coated with the second coating mechanism. In the second coating mechanism for coating the opposite surface of the double-sided thin film coating apparatus that can improve the downsizing and mass productivity of the apparatus, the one surface on the side opposite to the coating surface is already the first coating mechanism Since it has been coated and has not yet dried, it cannot be supported from one side and the above-mentioned problems occur.

  On the other hand, if the tip contact part of the nozzle part is pressed and contacted with this film-like object, this film vibration is attenuated, and a thin film with a uniform thickness can be applied and formed with high precision compared to the non-contact type. Become.

  In particular, when uniformly forming a thin film of the order of 1 mm or less, when the opposite surface opposite to the coating surface cannot be supported, the nozzle portion is brought close to (without pressing contact) the coating method. A contact-type nozzle unit that is in press contact is more desirable.

  However, when the contact type nozzle part is used, film vibration can be suppressed. On the other hand, the object to be coated may be damaged by sliding contact between the object to be coated and the tip contact part of the nozzle part. If the material of the tip contact part of the nozzle part is made of resin or other low-hardness material in order to suppress damage to the workpiece, the tip contact part will be easily worn even if this damage is suppressed. There is also a possibility that the worn powder at the tip contact portion is mixed into the coating thin film.

  In particular, a metal film such as aluminum or copper is used as the object to be coated, and a positive electrode active material such as lithium cobaltate or a negative electrode active material such as graphite is mixed on this surface, and this is used as a coating liquid, and 100 μm. When producing a lithium ion battery forming material that forms and forms a thin film of the order, the coated body is likely to be damaged and may become defective. If mixed, this also becomes defective, so there is a problem that the contact type nozzle part is difficult to put into practical use.

  Therefore, when preparing such a lithium ion battery forming material, particularly a lithium ion battery forming material which is applied on both sides to reduce the size and increase the output, the opposite surface is applied before drying after coating on one side. It is difficult to realize the above-mentioned double-sided coating that improves the size and mass productivity of the equipment.

  In other words, if you try to apply double-sided coating before drying, this side cannot be supported when coating the opposite side after coating one side, and the coated side on the opposite side is the upstream side of this uncoated transport Because the film can be vibrated by a drying process such as hot-air drying on the downstream side of the conveyance, a uniform film thickness cannot be formed by a non-contact type (applying close proximity) nozzle part. .

  In addition, when the opposite surface is applied after drying once after single-sided coating as in the past, there is a risk that the film thickness may change due to the temperature change of the coated surface. In order to perform continuous coating without winding once, it is necessary to arrange a device that performs these two drying and cooling processes, which increases the size of the device and makes it mass-productive. Inferior.

  Therefore, as described above, there is a demand for a double-sided coating apparatus that can coat both sides before drying, and in particular, the lithium ion battery formation that is required to be double-sided coated for miniaturization and high output. In terms of materials, a double-sided thin film coating apparatus that can perform such double-sided coating is desired in order to reduce the size of the apparatus and increase the production speed of the lithium-ion battery forming material.

  The present invention solves such problems, and even when the opposite surface of the coated surface cannot be supported, the thin film can be coated and formed accurately and uniformly, and by using this, it can be continuously and accurately even before drying. Double-sided coating that forms a thin film can be realized, and in particular, it can be applied to both sides of a metal film as a base material of a lithium-ion battery forming material with high precision and uniformity. It is an object of the present invention to provide an innovative thin film coating apparatus and double-sided thin film coating apparatus that can be reduced in size and mass-produced.

  The gist of the present invention will be described with reference to the accompanying drawings.

  While having a nozzle part 4 for discharging the coating liquid 2 supplied from the liquid supply part 1 from the slit-like tip discharge hole 3, while discharging the coating liquid 2 from the tip discharge hole 3 of this nozzle part 4, A thin film coater configured to apply the coating liquid 2 to the coated body 5 in a thin film by transporting the coated body 5 facing the nozzle section 4 to the nozzle section 4. In the construction apparatus, the tip discharge hole 3 of the nozzle portion 4 is disposed in the vicinity of the downstream side of the conveyance of the support roll 10 that supports the film-like object 5, and the tip discharge of the nozzle portion 4 is arranged. On the downstream side of the object 5 to be conveyed with respect to the hole 3, the film-like object 5 is provided with an air ejection portion 12 for blowing air to the film-like object 5 to suppress film vibration. And a non-contact type vibration suppression mechanism D provided opposite to each other. The present invention relates to a thin film coating apparatus.

  Further, the non-contact vibration suppressing mechanism D is provided in parallel with both surfaces of the film-like object 5 so that the air ejection portions 12 are disposed close to each other, and the opposing surface of each air ejection portion 12 is provided. 2. The thin film coating apparatus according to claim 1, wherein a plurality of air ejection holes 16 for ejecting air are formed on the thin film coating apparatus.

  Further, the nozzle portion 4 is formed in an elongated shape or a tapered shape, and is arranged to be inclined or inclined toward the support roll 10, whereby the tip discharge hole 3 of the nozzle portion 4 is formed in the support roll. The thin film coating apparatus according to claim 1, wherein the thin film coating apparatus is disposed so as to face the film-like object to be coated 5 in the vicinity of 10.

  Moreover, it is a double-sided thin film coating apparatus for coating on both surfaces of the film-shaped coated body 5, and includes a first coating mechanism A for coating on one side and a second coating for further coating on the opposite surface. A construction mechanism B and a drying mechanism C that dries the film-like coated body 5 after the double-side coating are applied, and the second coating mechanism B is any one of claims 1 to 3. The present invention relates to a double-sided thin film coating apparatus using the described thin film coating apparatus.

  In addition, a metal film was used as the coated body 5, and the thin film was coated on both sides using a positive electrode active material or a negative electrode active material of a lithium ion battery as the coating liquid 2 to be coated on both surfaces. 5. The double-sided thin film coating apparatus according to claim 4, wherein the lithium-ion battery forming material is produced.

  Since the present invention is configured as described above, even when the opposite surface of the coated surface cannot be supported, a thin film can be formed with high accuracy and uniformity, and by using this, the thin film can be continuously and accurately even before drying. Double-sided coating can also be realized, and in particular, it can be applied to both sides of the metal film that is the base material of the lithium-ion battery forming material with high precision and uniformity. And a revolutionary thin film coating apparatus and a double-sided thin film coating apparatus that can be mass-produced.

  Further, in the inventions according to claims 2 and 3, the thin film coating apparatus can be realized with a simple configuration and can be easily realized with a further practicality.

  Moreover, in invention of Claim 4, the 1st coating mechanism coated on one side, the 2nd coating mechanism coated further on an opposite surface, and the to-be-coated body which finished this double-sided coating are dried. Double-sided coating can be performed continuously without the need for a second drying step and a cooling step after drying, reducing the size of the equipment and increasing the speed of double-sided coating to improve mass productivity. Coating can be realized by using the thin film coating apparatus as the second coating mechanism, and it becomes an epoch-making double-sided thin film coating apparatus that can be put to practical use.

  In particular, the invention according to claim 5 is an epoch-making double-sided thin film coating apparatus capable of realizing the production of a lithium-ion battery forming material of double-sided coating that can achieve downsizing and mass production of such an apparatus.

It is schematic structure explanatory drawing of a present Example. It is expansion explanatory drawing of the principal part of a present Example. It is the expansion explanatory view which expanded further the principal part of a present Example. It is explanatory drawing which shows the non-contact-type vibration suppression mechanism of a present Example. It is a schematic structure perspective view of the non-contact-type vibration suppression mechanism of the present embodiment.

  Embodiments of the present invention that are considered suitable (how to carry out the invention) will be briefly described with reference to the drawings, illustrating the operation of the present invention.

  While discharging the coating liquid 2 from the slit-like tip discharge hole 3 of the nozzle portion 4, the film-like coated body 5 is conveyed to the nozzle portion 4, thereby allowing the surface of the coated body 5 to be conveyed. When a thin film is coated and formed, but the surface opposite to the coated surface cannot be supported, for example, the above-described problem that a uniform thin film cannot be formed with high accuracy by film vibration by a drying mechanism C such as hot air drying occurs.

  For example, when both sides are coated before drying as described above, the first coating mechanism A that coats one side can support the opposite side, so that it is configured using a conventional thin film coating apparatus. A uniform thin film can be formed by supporting the opposite surface with the coating support roll 15 and approaching the tip discharge hole 3 of the nozzle portion 4, but after this one-side coating, the second coating is applied to the opposite surface. In the construction mechanism B, one side has been coated and has not yet been dried, so it cannot be supported. Even if the support roll 10 supports the upstream side of the transport, it is uniform due to film vibration from the downstream side of the transport The above-mentioned problem that the thin film cannot be applied to the film occurs.

  In this respect, the present invention supports the upstream side of the conveyance with the support roll 10, and the tip discharge hole 3 of the nozzle portion 4 is disposed in the vicinity of the support roll 10. A non-contact vibration suppressing mechanism D is provided in which an air jetting part 12 that blows air to the coated body 5 to suppress film vibration is provided across the film-shaped coated body 5, and is provided by a drying mechanism C or the like. Film vibration from the downstream side of conveyance is suppressed.

  That is, the film-like coated body 5 is provided so as to be sandwiched between the air ejection portions 12, and air is blown from the air ejection portion 12 to the film-shaped coated body 5. The film vibration of the coated body 5 is suppressed and attenuated while being pressed in a non-contact manner, and this film vibration is transmitted to the coated body 5 at a position facing the tip discharge hole 3 of the nozzle portion 4 on the upstream side of conveyance as much as possible. It is difficult.

  In addition, the film vibration is suppressed and attenuated in this way, and the tip discharge hole 3 of the nozzle portion 4 is disposed (disposed without being brought into close proximity or pressing contact) near the support roll 10 where the film vibration is small. By reducing the influence of film vibration, the opposite surface can not be supported, for example, as in the case of the second coating mechanism B that coats both surfaces before drying as described above. Even in the case of coating in a state where it cannot be supported, a support roll 10 is provided on the upstream side of the conveyance, and the coated body 5 is ejected from the tip discharge hole 3 at a position near the conveyance downstream side of the support roll 10 and applied. The film vibration is suppressed by suppressing the film-like coated body 5 in a non-contact manner by the non-contact vibration suppressing mechanism D provided on the downstream side of the conveyance, so that the influence of the film vibration is extremely small. Made Easy, so that a uniform thin film even in such a case can be formed with high accuracy coating.

  For example, the tip discharge hole 3 is made as close as possible to the sliding contact position between the support roll 10 and the coated body 5 by making the nozzle portion 4 narrow and taper, and tilting the nozzle section 4 toward the support roll 10. The drying mechanism C is provided with the non-contact type vibration suppressing mechanism D capable of reducing film vibration on the downstream side of conveyance from the front end discharge hole 3.

  Therefore, even when the opposite surface of the coated surface cannot be supported by this configuration, a thin film can be formed with high accuracy and uniformity, and by using this, a thin film can be formed continuously with high accuracy and uniform before drying. Double-sided coating can also be realized, and in particular, it can be applied to both sides of a metal film as a base material of a lithium ion battery forming material with high accuracy and uniformity. This is an epoch-making double-sided thin film coating apparatus capable of mass production.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, a thin film coating apparatus that is extremely useful for applying a thin film to the film-like object 5 in a state in which the opposite surface cannot be supported is used. The double-sided thin film coating apparatus is constructed using the thin film coating apparatus according to the present invention when the opposite surface is continuously coated, and in particular, the problem of film vibration can be solved and put into practical use. It is a thing.

  That is, the present embodiment is a double-sided thin film coating apparatus for coating on both sides of a film-like coated body 5, and the first coating mechanism A for coating on one side and further coating on the opposite side. A second coating mechanism B, and a drying mechanism C that dries the coated body 5 after the double-sided coating, and the following thin film coating apparatus according to the present invention is used as the second coating mechanism B. Used, as the second coating mechanism B, the support roll 10 is disposed on the downstream side of the transport of the first coating mechanism A, the non-contact vibration suppression mechanism D is disposed on the upstream side of the transport of the drying mechanism C, The nozzle portion 4 is disposed between them, and the nozzle portion 4 is further brought closer to the downstream side of the support roll 10 so that the tip discharge hole 3 is in a sliding contact position between the support roll 10 and the film-like workpiece 5. It is set as the double-sided thin film coating apparatus made the structure close | similar to.

  In addition, as described above, this example solves the problem of film vibration during double-sided coating without using the contact-type nozzle unit 4, and lithium ion of double-sided coating that has not been easily realized so far. The present invention realizes a double-sided thin film coating apparatus that can be miniaturized and can be quickly produced in the production of batteries.

  That is, a metal film such as an aluminum film or a copper film is used as the object to be coated 5, and the positive electrode active substance or graphite of a lithium ion battery such as lithium cobaltate is used as the coating liquid 2 to be coated on both surfaces. A double-sided thin film coating apparatus configured to produce a lithium ion battery forming material in which this thin film is coated on both sides using a negative electrode active material such as

  Specifically, for example, the coated body 5 is a metal film having a thickness of 10 to 20 μm and a width of 650 mm, and a binder is mixed with a positive electrode active material such as lithium cobaltate or a negative electrode active material such as graphite on both surfaces of the film. The coating solution 2 is used to uniformly form a thin film of the order of 100 μm with an error of plus or minus 2 μm. The coating solution 2 supplied from the liquid supply unit 1 through the liquid reservoir 13 is slit. A nozzle portion 4 that discharges from the front end discharge hole 3 is disposed opposite to the film-like object 5 and the nozzle portion 4 is discharged while discharging the coating liquid 2 from the front end discharge hole 3 of the nozzle portion 4. The coating liquid 2 is applied to the coating body 5 in the form of a thin film by transporting the film-shaped coating body 5 opposed to 4 to the nozzle portion 4.

  In the present embodiment, the first coating mechanism A that first coats one side of such a film-shaped coated body 5 with the coating liquid 2 is a film-shaped coated roll wound around a supply roll 14. Conventional thin film coating in which the body 5 is pulled out and the opposite surface to the coating surface is supported by a coating support roll 15 while the tip discharge hole 3 of the nozzle portion 4 is brought close to one surface and a thin film is coated on one surface. It is composed of an apparatus, and the first coating mechanism A finishes one-side coating, and has not been subjected to a drying process or a cooling process. Coating is performed by the second coating mechanism B without supporting one side, and after this double-sided coating is completed, a drying mechanism C is provided that dries with, for example, IR or hot air.

  In this embodiment, the thin film coating apparatus according to the present invention is applied to the second coating mechanism B of such a double-sided thin film coating apparatus, and as described above, the support roll 10 is attached to the first coating mechanism. A non-contact type vibration suppression mechanism D is disposed on the upstream side of the transport of the drying mechanism C, the nozzle unit 4 is disposed therebetween, and the nozzle unit 4 is further downstream of the transport of the support roll 10. Close to the side, the tip discharge hole 3 is brought close to the sliding contact position between the support roll 10 and the film-like coated body 5, and the film vibration is suppressed as much as possible by the non-contact type vibration suppressing mechanism D, and as much as possible. The structure is such that the opposite surface is applied after one side at a position near the support roll 10 where the influence of film vibration is small, so that two drying steps and cooling steps are not required, and continuous double-sided coating is possible. Preparation for production Mass production by improving the miniaturization and the manufacturing speed is so attained.

  Specifically, the tip discharge hole 3 of the nozzle portion 4 is arranged in the vicinity of the downstream side of conveyance of the support roll 10, and the object to be coated with respect to the tip discharge hole 3 of the nozzle portion 4. 5 is a non-contact type vibration in which an air blowing portion 12 that blows air onto the film-like coated body 5 to suppress film vibration is provided on the downstream side of the conveyance of the film-shaped coated body 5. Although it is set as the structure which provided the suppression mechanism D, this non-contact-type vibration suppression mechanism D is set in parallel with both surfaces of the said film-like to-be-coated body 5, and the said air ejection part 12 is adjoined, A large number of air ejection holes 16 for ejecting air are formed on the opposing surface of each air ejection section 12.

  More specifically, the non-contact vibration suppressing mechanism D is provided with a plate-like air ejection portion 12 facing the film-like object 5 so as to sandwich the film-like workpiece 5 in a non-contact state. In addition, air is ejected from a large number of air ejection holes 16 to hold the coated body 5 with air pressure, thereby suppressing and attenuating vibration of the coated body 5, particularly film vibration generated by the drying mechanism C such as hot air drying. More specifically, if the predetermined range of the film-like coated body 5, for example, the width of the coated body 5 is 650 mm, the width is slightly larger than this, for example, 800 mm. For example, the length is set to 600 mm, and at least a range that takes about 1 second for the article 5 to pass between the air ejection portions 12 is pressed with air.

  In this embodiment, a number of 0.2φ air ejection holes 16 are provided on the surface of the air ejection section 12, and the air ejection section 12 has a porous structure for rectifying and uniforming the air supplied from the air supply source. A plate 17 (baffle plate) is provided in the interior so that the air finally supplied to the inside is uniformly ejected from the air ejection holes 16 on the surface.

  A film holding effect that suppresses and attenuates the film vibration of the coated body 5 becomes better when the amount of air ejection is larger and the air ejection speed is slower.

  In the present embodiment, the thin film according to the present invention using the non-contact type nozzle unit 4 that does not press contact after suppressing the film vibration by the drying mechanism C as much as possible through the non-contact type vibration suppression mechanism D as described above. By the second coating mechanism B by the coating apparatus, even in double-side coating in which the opposite surface is coated in a state where one surface cannot be supported, a thin film can be uniformly formed with high accuracy.

  Further, in this embodiment, the nozzle portion 4 is formed in a narrow and tapered shape, and the nozzle portion 4 is inclined to the support roll 10 side, whereby the tip discharge hole 3 of the nozzle portion 4 is supported. The film-like coated body 5 in the vicinity of the roll 10 is arranged in the vicinity.

  Specifically, the nozzle portion 4 is provided with a slit forming portion 8 through a gap, and this tip portion is configured as a tip discharge hole 3. The nozzle portion 4 communicates with the tip discharge hole 3. A liquid supply part 1 for supplying the coating liquid 2 is provided, and a liquid reservoir 13 is provided in the middle of the liquid supply part 1 so that the coating can be performed uniformly, and the tip discharge hole 3 is provided via the liquid reservoir 13. The coating liquid 2 is supplied, and while having such a configuration, the strength for preventing deformation due to the hydraulic pressure is ensured. Therefore, the conventional nozzle portion 4 has a wide configuration. In this embodiment, while considering this point, the nozzle portion 4 itself is designed to be narrow and slender, and further designed to be narrow and slender. The tip part of the nozzle part 4 is also designed to be elongated and tapered so that the tip discharge hole 3 of the nozzle part 4 can be as close as possible to the sliding contact position between the support roll 10 and the film-like object 5. Further, the tapered nozzle portion 4 is inclined toward the support roll 10 side so that it can be brought closer to each other.

  For example, the nozzle portion 4 is configured in a nozzle shape such as a crow mouth, and the tip discharge hole 3 can be brought closer to the sliding contact position between the support roll 10 and the workpiece 5 by tilting the nozzle portion 4.

  Therefore, for example, the shape of the nozzle portion 4 that conventionally required a width of 100 mm to secure the strength for preventing the deformation due to the liquid pressure by securing the liquid reservoir portion 13 is further reduced to 40 mm, and this tip portion is further reduced. The tip discharge hole 3 can only be brought closer to the position about 70 mm away from the support roll 10 having a radius of 15 mm by making the width 20 degrees wider than the conventional wide angle 20 degrees and elongating like a crow mouth. However, it can be brought close to about 20 mm, and further, it can be made close to 10 mm or less by inclining the nozzle portion 4 formed like this crow mouth to the support roll 10.

  As described above, the support roll 10 and the object to be coated are determined by the shape setting of the nozzle portion 4 such as the shape (width) of the nozzle portion 4, the shape of the tip portion (tapered shape), and the shape in which the nozzle portion 4 is inclined or inclined. The tip discharge hole 3 of the nozzle part 4 can be brought close to the contact point with the nozzle 5, and the tip discharge hole 3 of the nozzle part 4 can be brought close to the coated body 5 in the vicinity of the conveyance downstream side of the support roll 10. Therefore, the film vibration from the downstream side of the conveyance by the non-contact vibration suppressing mechanism D is suppressed, and the tip discharge hole 3 is disposed in the vicinity of the support roll 10 in this way, and the nozzle portion 4 is further arranged as described above. By configuring so that the coating can be applied at a position closer to the support roll 10 by setting the shape and tilting the film, it is possible to apply at a position where the film vibration is small, that is, the influence of the film vibration is extremely small. Craft Double side coating is easily feasible to become configured as described above enables eliminating bearing on the opposite surface as.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

DESCRIPTION OF SYMBOLS 1 Liquid supply part 2 Coating liquid 3 Tip discharge hole 4 Nozzle part 5 To-be-coated body
10 Support roll
16 Air ejection hole A First coating mechanism B Second coating mechanism C Drying mechanism D Non-contact vibration suppression mechanism

Claims (5)

  It has a nozzle part that discharges the coating liquid supplied from the liquid supply part from the slit-like tip discharge hole, and discharges the coating liquid from the tip discharge hole of this nozzle part while facing this nozzle part In the thin film coating apparatus configured to apply the coating liquid to the coated body in a thin film shape by transporting the coated body to the nozzle portion, the film-shaped coated body The tip discharge hole of the nozzle part is disposed in the vicinity of the conveyance downstream side of the support roll that supports the film, and the film is disposed on the conveyance downstream side of the object to be coated with respect to the tip discharge hole of the nozzle part. A non-contact type vibration suppression mechanism is provided in which an air ejection portion that suppresses film vibration by blowing air onto a film-shaped coated body is provided across the film-shaped coated body. Thin film coating equipment.   The non-contact type vibration suppression mechanism is provided in parallel with both surfaces of the film-like object to be coated, and the air ejection portions are arranged close to each other, and a large number of air is ejected to the opposite surface of each air ejection portion. The thin film coating apparatus according to claim 1, wherein an air ejection hole is formed.   The nozzle portion is configured in an elongated shape or a tapered shape, and is configured to be inclined or inclined toward the support roll, so that the tip discharge hole of the nozzle portion is positioned near the support roll. The thin film coating apparatus according to any one of claims 1 and 2, wherein the thin film coating apparatus is disposed so as to face a coated object.   A double-sided thin film coating apparatus for coating on both sides of the film-shaped coated body, a first coating mechanism for coating on one side, and a second coating mechanism for further coating on the opposite side; A drying mechanism for drying the film-like coated body after the double-sided coating, and the thin film coating apparatus according to any one of claims 1 to 3 is used as the second coating mechanism. A double-sided thin film coating apparatus characterized by   Lithium ion battery formation in which a metal film is used as the object to be coated, and the thin film is coated on both sides using a positive electrode active material or a negative electrode active material of a lithium ion battery as the coating liquid to be applied to both surfaces. The double-sided thin film coating apparatus according to claim 4, wherein the apparatus is configured to produce a material.

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