TWI519356B - Coating device and coating method - Google Patents

Description

Coating device and coating method

The present invention relates to a coating apparatus and a coating method.

In the semiconductor manufacturing apparatus, there is a step of applying a paste onto a lead frame or the like. Therefore, as a coating apparatus for coating a slurry, there has been previously applied a coating device using a pin (Patent Document 1 and Patent Document 2). Such a coating device using a transfer pin is a coating device as shown in Figs. 10 and 11 .

This coating apparatus includes an XYZ table 2 disposed on the base 1, and a transfer pin 3 attached to the XYZ table 2. The XYZ stage 2 includes a first stage 6 that reciprocates on the base 1 via the linear guide mechanism 5 in the X-axis direction, and a second stage 8 that passes through the linear guide mechanism 7 on the first stage 6 The reciprocating movement in the axial direction; and the third stage 10 reciprocate in the Z-axis direction via the linear guide mechanism 9 on the second stage 8. A transfer pin 3 is attached to the third stage 10.

In this case, the first platform 6 includes an L-shaped portion including a first portion 11a extending in the vertical direction and a second portion 11b extending in the horizontal direction from the lower end of the first portion 11a. The arm 11 is provided with a slurry disk 12 for storing the slurry on the second portion 11b of the arm 11.

Next, a method of applying a slurry onto a workpiece (coated portion) 13 using such a coating device will be described. First, a state in which the transfer pin 3 is placed on the slurry disk 12 is formed. As shown in Fig. 12, the transfer pin 3 is lowered from this state, and the slurry of the slurry disk 12 is immersed in the lower end of the transfer pin 3. After that, the transfer pin 3 is raised as indicated by the arrow A. Thereby, the slurry adheres to the transfer pin 3. In this state, the transfer pin 3 is horizontally moved in the direction of the arrow B and placed above the workpiece 13. Thereafter, the transfer pin 3 is lowered as indicated by an arrow C, and the slurry P adhering to the transfer pin 3 is transferred onto the surface of the workpiece 13 to be applied. Thereafter, after the transfer pin 3 is raised, it is moved in the horizontal direction in the opposite direction to the arrow B, and returns to the initial state. Repeat this action.

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 1-138827

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2002-198382

Thus, in the apparatus shown in Figs. 10 and 11, it is necessary to reciprocate the transfer pin 3 between the slurry disk 12 and the workpiece 13. However, since the slurry P adheres to the transfer pin 3 from the slurry disk 12 toward the workpiece 13, the slurry P may scatter from the transfer pin 3 when the transfer pin 3 is moved at a high speed. Therefore, the transfer pin 3 can be moved at a high speed, the coating operation time becomes long, and the productivity is deteriorated.

Therefore, it is proposed to reduce the working time by providing two such devices in parallel. However, if two units are provided in parallel, the overall size of the apparatus is increased, and the cost is increased.

Further, a pair of transfer pins for transferring the coating agent onto the coated portion may be provided, and the coating agent may be received by one of the transfer pins while the coating agent is applied from the other transfer pin. Transfer onto the coated portion. For example, the transfer pin may be disposed on the rotating body at a position 180 degrees apart from the rotation axis of the rotating body.

With this setting, one transfer pin is placed on the slurry disk, and the other transfer pin is placed on the coated portion. If the rotary body is lowered, one transfer can be used. The pin receives the coating agent while transferring the coating agent onto the coated portion from the other transfer pin. Further, the rotating body is rotated to form the other transfer pin corresponding to the slurry disk, and one of the transfer pins corresponds to the state of the applied portion, and if the rotating body is lowered, the other can be used. The transfer pin receives the coating agent and transfers the coating agent to the coated portion from one of the transfer pins.

Thereby, the total coating work time can be shortened. However, in such a coating operation, on the coated side, there are cases where the transfer pin is to be brought into contact with or not to be in contact with the coated portion. Further, on the side of the slurry disk, there is a case where the transfer pin is to be immersed in the slurry deeper or immersed in the slurry shallowly. However, since the amount of vertical movement of the pair of transfer pins is set to be the same, it is not possible to cope with such a demand.

Therefore, the present invention has been made in view of the above-described circumstances, and it is possible to provide a coating apparatus and a coating method which can achieve a reduction in productivity and a large size of the entire apparatus, and which can achieve a low cost. Moreover, a coating apparatus which can apply a coating agent with high precision in accordance with the coating agent used or the coating agent applied to the to-be-coated part is provided.

The first coating device of the present invention is a coating device including a pair of transfer pins for applying a slurry-form coating agent to a portion to be coated, and includes a state shifting mechanism for making a pair of rotations The printing pin is alternately displaced into a first state in which the first transfer pin corresponds to the upper side of the coating agent storage portion in which the slurry-form coating agent is stored, and a second transfer pin, and the second transfer pin The second state means that the second transfer pin corresponds to the upper portion of the coating agent storage portion that stores the slurry-form coating agent, and the first transfer pin corresponds to the state corresponding to the upper portion of the coated portion. The state above the application portion and the Z-axis direction moving mechanism move the respective transfer pins in the Z-axis direction as the vertical direction in the first state and the second state.

According to the coating apparatus of the present invention, the first state and the second state can be alternately displaced by the state displacement mechanism. Further, when the first transfer pin corresponds to the upper side of the coating agent storage portion, the second transfer pin is positioned above the coated portion, and when the second transfer pin corresponds to the upper portion of the coating agent storage portion, 1 The transfer pin is located above the coated portion. Further, in the first state or the second state, the respective transfer pins are lowered by the Z-axis direction moving mechanism, whereby the first transfer pin (or the second transfer pin) can be coated from the coating agent storage portion. The coating agent can transfer the coating agent from the second transfer pin (or the first transfer pin) to the coated portion of the workpiece. That is, the coating agent can be applied by another transfer pin while receiving the coating agent from the coating agent storage portion by one transfer pin. Therefore, it is possible to improve the workability twice as much as the previous device.

The state shifting mechanism may be provided on a stage that is an XYZ stage, and the Z-axis direction moving mechanism may be configured by a Z-axis direction moving mechanism of the stage. According to this configuration, the Z-axis direction moving mechanism of the stage can be used to move the state shifting mechanism in the vertical direction, and it is possible to stably borrow the coating agent from the coating agent storage unit by one transfer pin. The coating agent is coated by another transfer pin.

The Z-axis direction moving mechanism includes a moving mechanism that displaces each of the transfer pins independently in the Z-axis direction, and the state shifting mechanism may be a state shifting mechanism that is disposed on a stage that is an XY stage. Since each of the transfer pins can be independently displaced in the Z-axis direction, even if the height positions of the coating agent storage portion and the coated portion are different, the respective transfer pins can be moved up and down corresponding to the height positions. mobile.

Preferably, the slurry disk is placed on the above stage. When the slurry disk is placed on the stage as described above, the distance between the slurry disk and the portion to be coated can be prevented from increasing.

The state displacement mechanism may be constituted by a state displacement mechanism including: a conveyor belt member to which the pair of transfer pins are attached; a drive mechanism to move the conveyor belt member; and a control mechanism to control the drive mechanism, On the other hand, the first transfer pin and the second transfer pin are alternately displaced into the first state and the second state.

In such a state shifting mechanism, on the one hand, by the control mechanism, the conveyor belt member is moved by the drive mechanism, whereby the first transfer pin and the second transfer pin can be alternately and stably displaced. The first state and the second state are formed.

The transfer pin receives the receiving position of the slurry-form coating agent (the position of the coating agent storage portion) at a position higher than the coated portion of the transfer coating agent or lower than the coated portion. The position or the receiving position is the same height as the portion to be coated.

The belt member of the state shifting mechanism may be disposed obliquely with respect to a horizontal plane in accordance with the receiving position and the portion to be coated. Thereby, the length of the first transfer pin and the second transfer pin in the vertical direction can be set to be the same, and the stroke in the Z-axis direction can be made the same.

The movement trajectory of the pair of transfer pins moved by the state displacement mechanism is in a figure-eight shape in plan view, and the transfer pin is located close to the above in a state where the transfer pin is positioned above the coated portion. Move the end of the intersection of the trajectory. Here, the term "end point" refers to a folding point of the transfer pin (a point at which the transfer pin returns to the side of the coating agent storage portion). The end point of the intersection point close to the movement trajectory is set to a point closer to the coating agent storage portion (slurry tray) side than the intersection point and closer to the anti-coating agent storage portion side than the intersection point. The proximity means that when the transfer pin at the end point is lowered in the vertical direction, it is set so that the coating agent can be transferred onto the coated portion.

Preferably, the movement trajectory of the pair of transfer pins moved by the state displacement mechanism is a figure-eight shape in plan view, and the transfer pin is placed in a state where the transfer pin is positioned above the coated portion. At the intersection of the above moving trajectories.

However, when the conveyance belt member provided with the pair of transfer pins is used as the state displacement mechanism as described above, the position of the two transfer pins at the time of transferring the coating agent is shifted to the first state and the second state. The directions are orthogonal in the direction orthogonal to the direction. Therefore, in this case, when the transfer is performed by the first transfer pin and the transfer is performed by the second transfer pin, it is necessary to displace the transfer pin in the direction in which the offset is absorbed. On the other hand, when the pair of transfer pins are transfer pins that form a figure-eight movement trajectory in plan view, when the transfer agent transfers the coating agent to the coated portion, each turn can be made. The printing pin descends along the vertical direction (up and down direction) passing through the intersection of the moving trajectory or its vicinity. Therefore, even when the transfer is performed by the first transfer pin or when the transfer is performed by the second transfer pin, the coating agent can be transferred to the same portion or substantially the same portion without The position of the transfer pin is adjusted as described above.

The state displacement mechanism may be a state displacement mechanism including: a support arm respectively supporting the pair of transfer pins; an arm guiding mechanism for guiding movement of each support arm along the movement track; and an arm The control mechanism controls the arm guiding mechanism such that when one of the support arms moves from the coating agent storage portion side toward the coated portion side, the other support arm from the coated portion side toward the coating agent storage portion side When the one support arm moves from the coated portion side toward the coating agent storage portion side, the other support arm moves from the coating agent storage portion side toward the coated portion side.

In the case of the state shifting mechanism including the support arm, the arm guiding mechanism, and the arm control mechanism, each of the transfer pins can stably move on the octagonal movement trajectory and can be accurately located at the intersection of the movement trajectories.

The second coating device of the present invention is a coating device that includes a pair of transfer pins that are immersed in a coating agent at a lower end of a coating agent storage portion that stores a slurry-like coating agent. Receiving a coating agent in contact with the coating agent, transferring the received coating agent onto the coated portion, and receiving the coating agent by one of the transfer pins while transferring the coating agent from the other transfer pin It is printed on the coated portion, and the coating agent is transferred from the other transfer pin to the coated portion while receiving the coating agent by the other transfer pin, and the transfer pin is received and coated. In the case of the agent and the transfer of the coating agent, the second coating device includes a slurry disk constituting a coating agent storage portion that stores the coating agent, and a position adjustment mechanism that performs the slurry disk. Adjustment of the height position in the up and down direction.

According to the coating apparatus of the present invention, one of the transfer pins corresponds to the slurry disk, and the other transfer pin corresponds to the state of the coated portion, and if each of the transfer pins is lowered, The coating agent is received by one of the transfer pins, and the coating agent is transferred from the other transfer pin to the coated portion. Further, a state in which the other transfer pin is placed on the slurry disk and one of the transfer pins corresponds to the applied portion is formed, and if the transfer pin is lowered, the other transfer can be performed. The printing agent receives the coating agent, and the coating agent is transferred from the one of the transfer pins to the portion to be coated.

The height position of the slurry disk in the vertical direction can be adjusted by the position adjustment mechanism. Therefore, when the slurry tray is placed in the upper position, when the transfer pin corresponding to the slurry tray is lowered, the transfer pin can be deeply immersed in the coating agent stored in the slurry tray. If the slurry tray is placed in the lower position, when the transfer pin corresponding to the slurry tray is lowered, the transfer pin can be immersed shallowly in the coating agent stored in the slurry tray, or formed. The front end of the transfer pin is in a state of being in contact only with the upper surface of the coating agent. Further, when the transfer pin is deeply immersed in the coating agent, the immersion time can be lengthened, and when the transfer pin is immersed in the coating agent shallowly, the immersion time can be shortened. Therefore, the coating amount of the coating agent attached to the transfer pin can be adjusted. Further, on the side of the portion to be coated, the tip end of the transfer pin may be brought into contact with the portion to be coated at the most end position of the transfer pin, or the tip end of the transfer pin may not be placed at the end position of the transfer pin. The coating portion is in contact with each other to cause a predetermined minute gap between the tip end of the transfer pin and the portion to be coated.

The amount of vertical movement of the pair of transfer pins can be set to be the same, or the vertical movement of the pair of transfer pins can be synchronized.

When the amount of vertical movement of the pair of transfer pins is set to be the same, the height position of the slurry disk can be adjusted in accordance with the height position of the front end (lower end) of the transfer pin on the side of the application portion at the time of lowering. That is, the tip end of the transfer pin may be brought into contact with the portion to be coated at the most end position of the transfer pin, or the tip end of the transfer pin may not be brought into contact with the portion to be coated at the end position of the transfer pin. A predetermined minute gap is generated between the tip end of the transfer pin and the portion to be coated.

The coating method of the present invention is a coating method in which a slurry-form coating agent is applied to a portion to be coated, and includes a first step of causing a tip of the first transfer pin to be in a slurry-like coating agent. The medium is immersed or contacted to receive the coating agent, and the coating agent attached to the second transfer pin is transferred and applied to the coated portion; and the second step is to make the second transfer pin The tip end of the slurry-form coating agent is immersed or contacted to receive the coating agent, and the coating agent adhering to the first transfer pin is transferred and applied to the coated portion; The first step and the second step are alternately performed. Here, the immersion or contact state refers to a state in which the tip end of the transfer pin is immersed in the coating agent or a state in which the tip end of the transfer pin is in contact with the coating agent, and the coating agent can adhere to the transfer. The state of the tip end of the pin (the coating agent may adhere to the front end surface of the transfer pin or the coating agent may adhere to the front end portion in the vicinity of the front end surface from the front end surface).

According to the coating method of the present invention, the coating agent can be applied by another transfer pin while receiving the coating agent from the coating agent storage portion by one transfer pin. Therefore, it is possible to improve the workability twice as much as the previous device.

In this method, the movement trajectories of the respective transfer pins in the first step and the second step are alternately formed in a figure-eight shape in plan view, and the coating agent can be transferred and applied to the portion to be coated. The transfer pin is located at the end point of the intersection close to the above-described movement trajectory.

In addition, it is preferable that the movement trajectories of the respective transfer pins in the first step and the second step are alternately formed in a figure-eight shape in plan view, and the coating agent is transferred and applied to the coated portion. The printing pin is disposed at the intersection of the above-mentioned moving trajectories.

Thereby, even when the transfer is performed by the first transfer pin or when the transfer is performed by the second transfer pin, the coating agent can be transferred to the same portion or substantially the same portion.

[Effects of the Invention]

According to the first coating apparatus and the coating method of the present invention, the workability of the prior apparatus or method can be improved twice, and the productivity is excellent. Further, as a whole device, it is possible to achieve downsizing and cost reduction.

When the Z-axis direction moving mechanism is configured by the Z-axis direction moving mechanism of the stage, the first transfer pin and the second transfer pin can be moved up and down at the same time, and the working time can be further shortened. Moreover, the number of axes can be reduced, and the cost can be reduced.

When the transfer pins can be independently displaced in the Z-axis direction, the transfer pins can be moved up and down so as to correspond to the height positions of the coating agent storage portion and the coated portion. Thereby, stable extraction of the coating agent and stable coating of the coating agent can be performed.

When the slurry disk is placed on the stage, the distance between the slurry disk and the portion to be coated can be prevented from increasing, the amount of movement of the transfer pin can be reduced, and the movement time can be effectively prevented, thereby achieving production. Sexual improvement.

By providing the slurry disk on the stage, the slurry disk can be placed at a position higher than the portion to be coated of the transfer coating agent. Thereby, the slurry disk can be placed on the workpiece to be coated, and the coating agent can be stably applied to the coated portion of all the workpieces to which the coating agent should be transferred.

When the state shifting mechanism is a state shifting mechanism including a belt member, a driving mechanism, and a control mechanism, the first transfer pin and the second transfer pin can be alternately and stably displaced into the first state and the second state, and A stable coating operation can be performed with a simple configuration, and it can be configured at low cost.

When the conveyance belt member of the state displacement mechanism is disposed obliquely with respect to the horizontal plane in accordance with the receiving position and the portion to be coated, the lengths of the first transfer pin and the second transfer pin in the vertical direction can be set to be the same. In addition, the stroke in the Z-axis direction may be the same and the stroke may be small, and the Z-axis may be one axis, and the cost can be reduced. In particular, in the coating apparatus, by adding a state shifting mechanism including a belt member or the like, it is preferable to perform the fixed point movement. Therefore, positioning or the like becomes easy, and the state displacement mechanism can be configured by an inexpensive member (conveyor belt member or the like), and the cost can be reduced.

When the pair of transfer pins are transfer pins that form a figure-eight moving locus in plan view, even when the transfer is performed by the first transfer pin or by the second transfer pin, The coating agent can also be transferred to the same portion or substantially the same portion, and the transfer operation can be stabilized, and the transfer can be made highly precise. Further, even when the first state is displaced to the second state or the second state is displaced to the first state, it is not necessary to adjust the X direction or the Y direction of the transfer pin, and the controllability is excellent.

If the state shifting mechanism is provided with the support arm, the arm guiding mechanism and the arm control mechanism, each of the transfer pins can stably move on the octagonal movement trajectory and can be accurately located at the intersection of the movement trajectory, thereby enabling High precision coating operation.

According to the second coating apparatus of the present invention, the coating apparatus of the present invention can improve the workability twice as much as the previous apparatus or method, and is excellent in productivity. Further, as a whole device, it is possible to achieve downsizing and cost reduction.

The coating amount of the coating agent adhering to the transfer pin can be set to the type of the coating agent to be used, the coating amount of the coating agent applied to the coated portion, and the like on the slurry disk side. The corresponding coating amount may be adjusted on the side of the portion to be coated in accordance with the type of the coating agent to be used, the amount of the coating agent applied to the portion to be coated, and the like. The height position of the portion to be coated. Therefore, the wafer or the like can be attached to the to-be-coated portion with high precision.

In particular, when the amount of vertical movement of the pair of transfer pins is set to be the same, by adjusting the height position of the slurry disk, it is possible to stably perform "deep immersion of the transfer pin in the coating agent or to make the transfer When the printing pin is immersed in the coating agent shallowly or the tip end of the transfer pin is in contact with the upper surface of the coating agent, the coating pin can be applied to the coated portion with high precision. The coating amount of the coating agent. In addition, by synchronizing the vertical movement of the pair of transfer pins, it is possible to stably perform the reception of the coating agent by one of the transfer pins and the application of the other transfer pin, thereby achieving productivity. Improvement.

The above and other objects, features and advantages of the present invention will become more <RTIgt;

1 and 2 show a coating apparatus according to the present invention, which includes a pair of transfer pins 21 and 22 for applying a slurry-form coating agent P onto a coated portion 20 of a workpiece W. . The slurry-form coating agent P is a resin adhesive agent such as an epoxy resin or a polyimide resin, or a silver paste. The transfer pins 21 and 22 are transfer pins in which the coating agent P adheres to the front end surface thereof or the coating agent P adheres to the front end portion in the vicinity of the front end surface from the front end surface.

The transfer pins 21, 22 can be displaced by their state (position) by the state shifting mechanism 25. As shown in FIG. 4, the state shifting mechanism 25 includes: a conveyor belt member 26 to which the pair of transfer pins 21, 22 are attached; a drive mechanism 27 to move the conveyor belt member 26; and a control mechanism 28 that controls the drive mechanism 27, the first transfer pin 21 and the second transfer pin 22 are alternately displaced into the first state and the second state.

For example, as shown in FIG. 2, the drive mechanism 27 includes a conveyor drive motor M such as a servo motor and a transmission mechanism (not shown) that transmits the rotational driving force of the motor M to the conveyor belt member 26. In addition, the above movement is guided by the linear guide mechanism 30. The linear guide mechanism 30 is provided with a guide rail 31 and moving blocks 32a and 32b that move along the guide rail 31. The first transfer pin 21 is attached to one of the moving blocks 32a, and the second transfer pin 22 is attached to the other moving block 32b. The control unit 28 includes, for example, a microcomputer or the like.

The conveyor belt member 26 is an endless belt, and as shown in Figs. 3a and 3b, it is disposed in an elliptical shape, and the moving blocks 32a, 32b are attached to the inner faces of the long sides 26a, 26b, respectively. In this case, in the state shown in FIG. 3a, the first moving block 32a is located on one side of the arc side 26c, and the second moving block 32b is located on the side of the other side of the arc 26d. Further, in the state shown in Fig. 3b, the first moving block 32a is located on the other side of the arc side 26d, and the second moving block 32b is located on the side of one of the arc sides 26c.

The state shown in FIG. 3a can be referred to as a first state, and the state shown in FIG. 3b can be referred to as a second state, and alternately shifted into the first state and the second state. In other words, the displacement from the first state to the second state is from the state shown in FIG. 3a, and the conveyor belt member 26 is moved in the direction of the arrow E until it reaches the state shown in FIG. 3b, and from the second state to the first state. The displacement is from the state shown in Fig. 3b, and the conveyor belt member 26 is moved in the direction of the arrow F until it reaches the state shown in Fig. 3a.

The conveyor belt member 26 of this state shifting mechanism is attached to a stage 35 composed of an XYZ table as shown in Figs. 1 and 2 . The stage 35 includes a first stage 38 that reciprocates in the X-axis direction via the linear guide mechanism 37 on the base 36, and a second stage 40 that passes through the linear guide mechanism 39 on the first stage 38. The reciprocating movement in the axial direction; and the third stage 43 reciprocate in the Z-axis direction along the vertical wall 42 of the second stage 40 via the linear guide mechanism 41.

The linear guide mechanism 37 includes a pair of parallel guide rails 45, 45 extending in the X-axis direction, and moving bodies 46, 46 that move on the respective guide rails 45, 45. The guide rails 45 and 45 are disposed on the upper surface of the base 36, and the movable bodies 46 and 46 are coupled to the lower surface of the first stage 38. Therefore, the first stage 38 moves in the X-axis direction along with the movement of the movable bodies 46 and 46 along the guide rails 45 and 45.

The linear guide mechanism 39 includes a pair of parallel guide rails 47, 47 extending in the Y-axis direction, and moving bodies 48, 48 that move on the respective guide rails 47, 47. The guide rails 47 and 47 are disposed on the upper surface of the first stage 38, and the movable bodies 48 and 48 are coupled to the lower surface of the second stage 40. Therefore, the second stage 40 moves in the Y-axis direction accompanying the movement of the movable bodies 48, 48 along the guide rails 47, 47.

The linear guide mechanism 41 includes a pair of parallel guide rails 49, 49 extending in the Z-axis direction, and moving bodies 50, 50 that move on the respective guide rails 49, 49. The guide rails 49 and 49 are disposed on the front surface (outer surface) of the vertical wall 42 of the second stage 40, and each of the movable bodies 50 and 50 is coupled to the back surface (inner surface) of the third stage 43. Therefore, the third stage 43 moves in the Z-axis direction along with the movement of the movable bodies 50, 50 along the guide rails 49, 49. Further, on the inclined arm 51 of the third stage 43, guide rails 31 and 31 for guiding the moving blocks 32a and 32b are disposed. Therefore, as shown in FIG. 2, the conveyor belt member 26 is disposed obliquely along the inclined arm 51. With the movement of the moving blocks 32a, 32b along the guide rails 31, 31, the conveyor belt member 26 can move by the arrows E, F as shown in Figs. 3a and 3b.

However, each of the moving bodies 46, 48, 50 may be a self-moving mobile body, or may be a moving body that is moved by power supply from other power sources. When power from other power sources is provided, the platforms 38, 40, and 43 can be powered by actuators such as a cylinder mechanism even if power is directly supplied to the moving bodies 46, 48, and 50.

In this manner, the belt member 26 can be displaced in the Z-axis direction, and the Z-axis direction moving mechanism can be configured as a Z-axis direction moving mechanism of the stage 35 as the XYZ stage. In other words, when the third stage 43 is guided by the linear guide mechanism 41 to move up and down in the Z-axis direction, the transfer pins 21 and 22 attached to the belt member 26 move up and down in the axial direction.

A horizontal platform 52 is disposed on the vertical wall 42 of the second stage 40, and a slurry pan 53 storing the coating agent P is disposed on the horizontal platform 52. However, the slurry disk 53 is disposed at a position higher than the portion to be coated of the workpiece W to which the coating agent P is applied. Therefore, as described above, the conveyor belt member 26 is inclined at a predetermined angle with respect to the horizontal plane. That is, when the first state shown in FIG. 3a is formed, the first transfer pin 21 is placed on the slurry disk 53, and the second transfer pin 22 is placed on the workpiece W disposed at the application position. When the second state shown in FIG. 3b is formed, the second transfer pin 22 is placed on the slurry disk 53, and the first transfer pin 21 is placed on the workpiece W disposed at the coating position.

The horizontal stage 52 can be adjusted in the up and down direction by the position adjustment mechanism 55. The position adjustment mechanism 55 is provided with, for example, a linear guide mechanism 56. The linear guide mechanism 56 includes a guide rail 57 that extends in the vertical direction, and a moving body 58 that moves on the guide rail 57. Further, the guide rail 57 is attached to the vertical wall 42, and the movable body 58 is provided on the horizontal platform 52.

Therefore, when the moving body 58 moves up and down along the guide rail 57, the horizontal platform 52 moves up and down, and the slurry disk 53 disposed on the horizontal platform 52 moves up and down. Further, the moving body 58 may be a self-moving mobile body or a moving body that is moved by power supply from another power source. Further, it may be a moving body that supplies a pressing force to the horizontal platform 52 by an actuator such as a cylinder mechanism. The position adjustment mechanism 55 may be constituted by a cylinder mechanism, a spherical nut mechanism, a piezoelectric actuator or the like without using the linear guide mechanism as described above. Further, the motor may be configured by a motor or a cam mechanism that converts the rotational driving force of the motor into a linear motion driving force.

Next, a coating method using the coating agent P using the apparatus of Figs. 1 and 2 will be described. Further, the workpiece W is a semiconductor wafer, and a plurality of workpieces W are placed on an XY stage (not shown). Then, the conveyor belt member 26 is moved in the X-axis direction and/or the Y-axis direction via the stage 35, so that the second transfer pin 22 is placed on the workpiece W to which the coating agent P is to be applied.

That is, as the first state shown in FIG. 3a, the first transfer pin 21 is placed on the slurry disk 53, and the second transfer pin 22 is placed on the workpiece W disposed at the coating position. In this state, the belt member 26 is lowered in the Z-axis direction. By the lowering, the tip end of the first transfer pin 21 is immersed or contacted in the coating agent P of the slurry disk 53, and (if the coating agent adheres to the tip end of the second transfer pin 22) The coating agent is transferred from the second transfer pin 22 and applied to the coated portion (coating agent adhering portion) 20 of the workpiece W. Here, the immersion or contact state refers to a state in which the tip end of the transfer pin is immersed in the coating agent or a state in which the tip end of the transfer pin is in contact with the coating agent, and the coating agent can adhere to the transfer. The state of the tip end of the pin (the coating agent may adhere to the front end surface of the transfer pin or the coating agent may adhere to the front end portion in the vicinity of the front end surface from the front end surface). In addition, the height difference between the coating agent storage portion (that is, the receiving position of the slurry pan 53 and the coating agent P) and the portion to be coated 20 of the workpiece W is set to, for example, about 5 mm, in the first state. The difference between the lower end of the first transfer pin 21 and the coating agent storage portion, and the difference between the lower end of the second transfer pin 22 and the coated portion 20 of the workpiece W are set to about 5 mm.

Next, after the conveyor belt member 26 is raised in the Z-axis direction, the belt member 26 is moved from the first state shown in FIG. 3a in the direction of the arrow E, and the belt member 26 is guided in the X-axis direction via the stage 35. In the direction of the Y-axis, the first transfer pin 21 is placed on the next workpiece W to which the coating agent P is to be applied, and the second state is formed. In other words, in the second state, the second transfer pin 22 is placed on the slurry disk 53, and the first transfer pin 21 is placed on the workpiece W disposed at the application position. In the second state, the difference between the lower end of the second transfer pin 22 and the coating agent storage portion, and the difference between the lower end of the first transfer pin 21 and the coated portion 20 of the workpiece W are set to about 5 mm. .

Thereafter, the conveyor belt member 26 is lowered in the Z-axis direction. By the lowering, the tip end of the second transfer pin 22 is immersed or contacted in the coating agent P of the slurry disk 53, and the coating agent is transferred and applied from the first transfer pin 21 to the coating material. The coated portion 20 of the workpiece W is placed on it.

Next, the conveyor belt member 26 is raised in the Z-axis direction. By this rise, the second state as shown in Fig. 3b is obtained. Then, the conveyor belt member 26 is moved in the arrow F direction from the second state, and the conveyor belt member 26 is moved in the X-axis direction and/or the Y-axis direction via the stage 35, and the second transfer pin 22 is placed on the second transfer pin 22 The next workpiece W of the coating agent P should be applied to return to the first state shown in Fig. 3a. Further, the amount of movement of the belt member 26 in the direction of the arrow F is set to be the same as the amount of movement in the direction of the arrow E.

After returning to the first state in the above manner, the conveyor belt member 26 is again lowered in the Z-axis direction. By the lowering, the tip end of the first transfer pin 21 is immersed or contacted in the coating agent P of the slurry disk 53, and the coating agent is transferred and applied from the second transfer pin 22 to the coating agent. The coated portion (coating agent adhering portion) 20 of the workpiece W is placed on it.

Thereafter, the above steps are sequentially repeated, thereby completing the coating operation of the coating agent P for all the workpieces W on the XY stage. In other words, in the first step, the tip end of the first transfer pin 21 is immersed or contacted in a slurry-like coating agent to receive a coating agent, and is attached to the second transfer. The coating agent P on the pin 22 is transferred and applied to the to-be-coated portion 20; and in the second step, the tip end of the second transfer pin 22 is immersed or contacted in the slurry-form coating agent P. Receiving the coating agent P and transferring and applying the coating agent P adhering to the first transfer pin 21 to the portion to be coated 20; and the coating method alternately performs the first step and the first step 2 steps.

According to the coating apparatus of the present invention, the first state and the second state can be alternately displaced by the state displacement mechanism. Further, when the first transfer pin 21 corresponds to the coating agent storage portion (that is, the slurry disk 53 and the receiving position of the coating agent P), the second transfer pin 22 is positioned above the coated portion 20. When the second transfer pin 22 corresponds to the coating agent storage portion (that is, the slurry disk 53 and the receiving position of the coating agent P), the first transfer pin 21 is positioned above the coated portion 20. That is, the coating agent P can be applied by the other transfer pin 22 (21) while the coating agent P is received from the coating agent storage portion by one transfer pin 21 (22). Therefore, it is possible to improve the workability twice as much as the previous device, and it is excellent in productivity. Further, as a whole device, it is possible to achieve downsizing and cost reduction.

Since the Z-axis direction moving mechanism for moving the transfer pins 21 and 22 in the Z-axis direction is formed by the Z-axis direction moving mechanism of the stage 35, the first transfer pin 21 and the second transfer can be formed. The pin 22 moves up and down at the same time, and the movement time can be further shortened.

The slurry disk 53 is attached to the stage 35, specifically, to the second stage 40 attached to the stage 35. Therefore, it is possible to prevent the distance between the slurry pan 53 and the portion to be coated from becoming large, and it is possible to reduce the amount of movement of the transfer pin 21 (22) and to effectively prevent the moving time from becoming long.

Further, when the state shifting mechanism 25 is a state shifting mechanism including the belt member 26, the drive mechanism 27, and the control mechanism 28, the first transfer pin 21 and the second transfer pin 22 can be alternately and stably displaced into the first stage. The 1 state and the 2nd state are capable of performing a stable coating operation with a simple configuration, and can be configured at low cost.

Since the transfer pin 21 (22) receives the receiving position of the slurry-form coating agent P (located in the coating agent storage portion) at a position higher than the coated portion 20 to which the coating agent P is transferred, The slurry plate is placed on the workpiece to be coated, and the coating agent can be stably applied to the coated portion of all the workpieces to which the coating agent is to be transferred.

Since the conveyor belt member 26 of the state displacement mechanism 25 is disposed obliquely with respect to the horizontal plane in accordance with the receiving position and the to-be-coated portion 20, the first transfer pin 21 and the second transfer pin 22 can be moved up and down. The direction lengths are set to be the same, and the strokes in the Z-axis direction may be the same and the strokes may be small, and the Z-axis may be one axis, and the cost can be reduced. In particular, in the coating apparatus, by adding the state shifting mechanism 25 including the belt member 26 or the like, it is preferable to move the fixed point. Therefore, positioning or the like becomes easy, and the state displacement mechanism 25 can be configured by an inexpensive member (conveyor belt member or the like), and the cost can be reduced.

The position adjustment mechanism 55 can adjust the height position of the slurry disk 53 in the vertical direction. Therefore, when the slurry tray 53 is placed in the upper position, the transfer pins 21 and 22 can be deeply immersed in the slurry tray 53 when the transfer pins 21 and 22 corresponding to the slurry tray 53 are lowered. Among the stored coating agents. Further, when the slurry tray 53 is placed in the lower position, the transfer pin can be immersed shallowly in the coating agent stored in the slurry tray 53 when the transfer pin corresponding to the slurry tray is lowered. Or the state in which the front ends of the transfer pins 21, 22 are in contact with the upper surface of the coating agent P is formed. Further, when the transfer pins 21 and 22 are immersed in the coating agent P deeper, the immersion time can be made longer, and when the transfer pins 21 and 22 are immersed in the coating agent P shallowly, Make the immersion time shorter. Therefore, the coating amount of the coating agent P adhering to the transfer pins 21 and 22 can be adjusted. Further, on the side of the coated portion, the tips of the transfer pins 21, 22 can be brought into contact with the portion to be coated 20 at the most end positions of the transfer pins 21, 22, or at the extreme end positions of the transfer pins 21, 22. The tip ends of the transfer pins 21 and 22 are not brought into contact with the to-be-coated portion 20, and a predetermined minute gap is formed between the tips of the transfer pins 21 and 22 and the to-be-coated portion 20.

Thereby, the coating amount of the coating agent P adhering to the transfer pins 21 and 22 can be set to the type of the coating agent P to be applied to the coated portion on the side of the slurry disk 53. The coating amount corresponding to the coating amount of the coating agent P or the like may be on the side of the portion to be coated, and may correspond to the type of the coating agent P to be used and the coating agent P applied to the portion to be coated. The height of the transfer pins 21 and 22 with respect to the portion to be coated 20 is adjusted by the amount of application or the like, and the wafer or the like can be mounted with high precision.

In this embodiment, since the belt member 25 is displaced in the Z-axis direction, the amount of up-and-down movement of the transfer pins 21 and 22 attached to the belt member 25 is the same. When the amount of vertical movement of the pair of transfer pins 21 and 22 is the same, by adjusting the height position of the slurry disk 53, it is possible to stably perform "deep immersion of the transfer pins 21, 22 on the coating agent". In the case of P, the transfer pins 21 and 22 are immersed in the coating agent P shallowly, or the front ends of the transfer pins 21 and 22 are in contact with the upper surface of the coating agent P. The coating amount of the coating agent applied to the portion to be coated by the transfer pins 21 and 22 is adjusted.

Further, since the belt member 25 is displaced in the Z-axis direction, the vertical movement of the transfer pins 21, 22 attached to the belt member 25 is synchronized. By synchronizing the vertical movement of the pair of transfer pins 21 and 22, the reception of the coating agent P by one of the transfer pins 21 and 22 and the use of the other transfer pin 21 can be stably performed simultaneously. The coating of 22 can improve the productivity.

Next, Fig. 5 and Fig. 6 show another embodiment. In this case, the conveyor belt member 26 is disposed horizontally as shown in Fig. 6 . Therefore, the first transfer pin 21 and the second transfer pin 22 can perform independent reciprocating movement in the Z-axis direction.

The stage 35 is composed of an XY stage. In other words, in the XYZ stage shown in FIG. 1, the support substrate 60 or the like is disposed instead of the linear guide mechanism 41, the third stage 43, and the like. Further, a guide plate 63 on which the guide rails 31 and 31 are disposed is connected to the support substrate 60.

The moving blocks 32a, 32b are supported on the pin supporting blocks 61, 62, respectively, on which the transfer pins 21, 22 are respectively supported. Further, the transfer pins 21 and 22 reciprocate in the Z-axis direction via a moving mechanism including linear motors 65a and 65b such as a voice coil motor (VCM). Also. The moving mechanism is controlled by a control mechanism (not shown) including a microcomputer or the like.

Further, the pin supporting blocks 61 and 62 are attached to the belt member 26 in the same manner as the case shown in Figs. 3a and 3b. The conveyor belt member 26 at this time is disposed in the horizontal direction as shown in Fig. 6 . Further, the pin supporting block 61 is attached to the conveyor belt member 26 instead of the first moving block 32a, and the pin supporting block 62 is attached to the conveyor belt member 26 instead of the second moving block 32b. Therefore, even in this embodiment, the first transfer pin 21 and the second transfer pin 22 can be alternately displaced into the first state and the second state, which is the first transfer pin 21 corresponding to the first transfer pin 21 The second transfer pin 22 corresponds to the upper side of the applied portion 20 in the upper portion of the coating agent storage portion of the slurry-form coating agent P, and the second state refers to the second transfer pin 22 The first transfer pin 21 corresponds to the upper side of the to-be-coated portion 20 in the upper portion of the coating agent storage portion in which the slurry-form coating agent P is stored.

Next, a coating method using the coating apparatus shown in Figs. 5 and 6 will be described. In this case, the first transfer pin 21 and the second transfer pin 22 are set to the first state. That is, the first transfer pin 21 is placed on the slurry disk 53, and the second transfer pin 22 is placed on the workpiece W disposed at the application position.

In the first state, the first transfer pin 21 and the second transfer pin 22 are lowered in the Z-axis direction. At this time, the amount of drop of the first transfer pin 21 is such that the tip end of the transfer pin 21 is dipped or contacted in the coating agent P, and the amount of the coating agent P can be received. In addition, the amount of drop of the second transfer pin 22 is the amount by which the coating agent P adhering to the tip end of the transfer pin 22 can be transferred onto the to-be-coated portion 20.

Thereby, the first transfer pin 21 can receive the coating agent P from the slurry disk 53, and the second transfer pin 22 can transfer the coating agent P onto the coated portion 20 of the workpiece W. Thereafter, each of the transfer pins 21 and 22 is raised to return to the first state. In this case, it is necessary to raise the respective transfer pins 21 and 22 so as not to contact the slurry pan 53 or the like by the movement of the conveyor belt member 26. Then, the conveyor belt member 26 is moved from the first state, and the conveyor belt member 26 is moved in the X-axis direction and/or the Y-axis direction via the stage 35 to form a second state. In other words, the second transfer pin 22 is placed on the slurry disk 53, and the first transfer pin 21 is placed on the workpiece W disposed at the coating position.

In this state, the respective transfer pins 21 and 22 are lowered in the Z-axis direction. At this time, the amount of drop of the second transfer pin 22 is such that the tip end of the transfer pin 22 is dipped or contacted in the coating agent P, and the amount of the coating agent P can be received. In addition, the amount of drop of the first transfer pin 21 is the amount by which the coating agent P adhering to the tip end of the transfer pin 21 can be transferred onto the to-be-coated portion 20.

In this manner, even in the coating apparatus, the first step and the second step are performed alternately, and the first step is to cause the tip end of the first transfer pin 21 to be immersed in a slurry-like coating agent or The coating agent P is contacted to receive and apply the coating agent P adhering to the second transfer pin 22 to the coated portion 20, and the second step is to perform the second transfer. The tip end of the pin 22 is immersed or contacted in the slurry-form coating agent P to receive the coating agent P, and the coating agent P adhering to the first transfer pin 21 is transferred and applied to the coating agent P. The step on the coating section 20. Thereafter, the above steps are sequentially repeated, thereby completing the coating operation of the coating agent P for all the workpieces W on the XY stage.

Therefore, even in the coating apparatus shown in FIG. 5 and FIG. 6, it is possible to improve the workability twice as much as the previous apparatus, and it is excellent in productivity. Further, as a whole device, it is possible to achieve downsizing and cost reduction. In particular, as long as each of the transfer pins 21 and 22 can be independently displaced in the Z-axis direction, even if the height of the coating agent storage portion (slurry disk 53) and the coated portion 20 are different, it may correspond to These height positions are such that the respective transfer pins 21, 22 are moved up and down, and the height adjustment at the extreme end position of each of the transfer pins 21, 22 can be simply performed. Further, on the slurry disk 53 side, the transfer pins 21 and 22 can be immersed in the coating agent P deeper or shallower, and the transfer pins 21 and 22 can be formed on the coated portion 20 side. A slight gap is formed between the transfer pins 21 and 22 and the to-be-coated portion 20 in contact with the coated portion 20 or without contact.

When the respective transfer pins 21 and 22 are vertically moved up and down in the Z-axis direction, vertical movement in the Z-axis direction via the slurry disk 53 of the position adjusting mechanism 55 is not required. However, when the transfer pins 21 and 22 are transfer pins that move up and down independently, in order to move the transfer pins 21 and 22 up and down, as described above, it is necessary to provide a moving mechanism such as a motor, and the transfer pin 21 The 22 side is enlarged and the weight is increased. On the other hand, if the transfer pins 21 and 22 are not allowed to move up and down independently, and the slurry disk 53 is moved up and down, the transfer pins 21 and 22 can be miniaturized and achieved. Lightweight.

However, if each of the transfer pins 21 and 22 is a transfer pin that moves up and down independently in the Z-axis direction, it is not necessary to tilt the belt member 26 or the like. Therefore, as in the above-described example, the slurry can be made via the position adjustment mechanism 55. The disk 53 moves up and down in the Z-axis direction.

However, in the above embodiment, the conveyor belt member 26 is moved in the X-axis direction and/or the Y-axis direction via the stage 35, and the transfer pin 21 (22) is placed on the coating agent to be applied. On the workpiece of P, the platform on which the workpiece W is placed may be moved in the X-axis direction and/or the Y-axis direction, and the transfer pin 21 (22) may be disposed on the coating agent P to be coated. On the workpiece.

In each of the above embodiments, when the first state is changed to the second state or the second state is changed to the first state, the transfer pins 21 and 22 are viewed in plan, as shown in FIGS. 3a and 3b. The direction orthogonal to the moving direction moves in a state of being spaced apart by a predetermined interval. Therefore, when the transfer is performed by the first transfer pin 21 and the transfer by the second transfer pin 22, it is necessary to displace the transfer pins 21 and 22 in the direction in which the offset is absorbed.

Therefore, the state shifting mechanism 25 shown in FIGS. 7a to 9 causes the movement trajectories L1, L2 of the pair of transfer pins 21, 22 to have a figure-eight shape in plan view. Further, in a state where the transfer pins 21 and 22 are positioned above the coated portion 20, the transfer pins 21 and 22 are placed at the intersection O of the movement trajectories L1 and L2.

The state shifting mechanism 25 includes: support arms 71, 72 respectively supporting the pair of transfer pins 21, 22; arm guiding mechanisms 73, 74, guiding the movement of the respective support arms 71, 72 along the movement trajectories L1, L2; And the arm control mechanism 75 controls the arm guiding mechanisms 73 and 74 such that one (first) support arm 71 moves from the coating agent storage unit (slurry disk) side toward the coated portion side, and the other side When the support arm 72 of the (second) moves from the coated portion side toward the coating agent storage portion side, and one of the support arms 71 moves from the coated portion side toward the coating agent storage portion side, the other support The arm 72 moves from the side of the coating agent storage portion toward the side of the coated portion.

The arm guiding mechanisms 73, 74 include guide rails 80, 80 provided on the inclined side faces 78, 78 of the base 77, and moving blocks 81, 81 that move along the guide rails 80, 80, and are supported via the supports 82, 82. The support arms 71, 72 are fixed to the moving blocks 81, 81.

The base 77 includes a proximal end first portion 77a and a distal end side second portion 77b extending from the proximal end first portion 77a, and the side surfaces of the distal end side second portion 77b form the inclined side surfaces 78 and 78. The base 77 is inclined downward from the proximal end side toward the distal end side (see Fig. 8). Further, the inclined side faces 78 and 78 are inclined so as to gradually approach from the proximal end side toward the distal end side. Furthermore, in Fig. 8, the illustration of the support arms 71, 72 is omitted.

Therefore, the guide rails 80 and 80 provided on the inclined side surface are also arranged to gradually approach from the proximal end side toward the distal end side. Therefore, the support arms 71, 72 attached to the moving blocks 81, 81 moving along the guide rails 80, 80 are guided on the one hand by the guide rails 80, 80 to slide on the one hand. Further, transfer pins 21 and 22 are attached to the transfer pin supporting portions 83 and 83 at the distal ends of the support arms 71 and 72. Thereby, the transfer pins 21, 22 are moved along the above-described movement trajectories L1, L2 by the movement of the support arms 71, 72. Further, although the base 77 is inclined downward from the proximal end side toward the distal end side, the support arms 71 and 72 extend in the horizontal direction as shown in FIG.

The arm control mechanism 75 includes a drive motor (not shown), and is disposed on the back side of the base end first portion 77a of the base 77. The swing lever 85 is disposed on the base end first portion 77a of the base 77. The connecting body 86a connects one end of the swing lever 85 to the support 82 of one of the support arms 71, and the connecting body 86b connects the other end of the swing lever 85 to the other side. The support body 82 of the support arm 72 is coupled.

Further, the drive shaft of the drive motor is coupled to the center portion 87 of the swing lever 85. Further, as shown by a broken line, a portion between the center portion 87 of the raking rod 85 and one end portion is coupled to one of the support members 82 by a spring 88a, and the spring 88b is used as indicated by a broken line. A portion between the center portion 87 of the raking rod 85 and the other end portion is coupled to the other support body 82. Further, the spring 88a is disposed above the coupling body 86a, and the spring 88b is disposed above the coupling body 86b.

Further, as shown in FIG. 7c, a slurry disk 53 is disposed below the front end side of the front end second portion 77b of the susceptor 77. The slurry pan 53 may be attached to the vertical wall 42 (see FIG. 1 and the like) of the second stage 40 as in the above embodiment.

When the driving motor 85 is driven by the driving motor, the raking lever 85 is brought from the neutral state shown in Fig. 7b (the state in which the raking lever 85 is disposed in the direction orthogonal to the longitudinal direction of the susceptor 77), as shown in Fig. 7a. When the rotation is in the direction of the arrow H1, the support body 82 of the other support arm 72 is pulled toward the proximal end side by the connecting body 86b, and the support body 82 of one of the support arms 71 is directed toward the distal end side by the connecting body 86a. extrusion. Thereby, the transfer pin 21 attached to the support arm 71 moves from the coating agent storage portion side (slurry disk side) toward the to-be-coated portion side along the movement locus L1. At this time, the transfer pin 21 is stopped at a position corresponding to the intersection O of the movement locus L1 and the movement locus L2. Further, the transfer pin 22 attached to the support arm 72 moves from the coated portion side toward the coating agent storage portion side (slurry disk side) along the movement locus L2. At this time, the transfer pin 22 is stopped at a position corresponding to the slurry pan 53.

When the swaying lever 85 is rotated in the direction of the arrow H2 as shown in FIG. 7c from the state shown in FIG. 7b, the support body 82 of one of the support arms 71 is pulled toward the proximal end side by the connecting body 86a, and The support body 82 of the other support arm 72 is pressed toward the distal end side by the connecting body 86b. Thereby, the transfer pin 22 attached to the support arm 72 moves from the coating agent storage portion side (slurry disk side) toward the to-be-coated portion side along the movement locus L2. At this time, the transfer pin 22 is stopped at a position corresponding to the intersection O of the movement locus L2 and the movement locus L2. Further, the transfer pin 21 attached to the support arm 71 moves from the coated portion side toward the coating agent storage portion side (slurry disk side) along the movement locus L1. At this time, the transfer pin 21 is stopped at a position corresponding to the slurry pan 53. Further, as shown in FIG. 1 and the like, the susceptor 77 can be moved up and down in the Z-axis direction via the linear guide mechanism 41.

Furthermore, when the support arms 71, 72 move along the movement trajectories L1, L2, the support arms 71, 72 are not necessarily moved over the movement trajectories L1, L2 as long as at least the front end of the transfer pin support portion 83 is on the movement locus L1. Move on L2.

Even in the apparatus including the state shifting mechanism 25 shown in FIGS. 7a to 9, the same transfer operation as that of the apparatus including the state shifting mechanism 25 shown in FIG. 1 described above can be performed. In other words, when the state shown in FIG. 7c is formed, the first transfer pin 21 corresponds to the upper side of the coating agent storage portion (slurry disk 53), and the second transfer pin 22 corresponds to the upper portion of the coated portion. In the first state, when the state shown in FIG. 7a is formed, the second transfer pin 22 corresponds to the upper side of the coating agent storage portion (slurry disk 53), and the first transfer pin 21 corresponds to the coated The second state above the part.

When the susceptor 77 is lowered in the first state, the tip end of the first transfer pin 21 is contacted or immersed in the slurry (coating agent P) of the slurry disk 53, and the slurry can be received. (Coating agent) P, and the slurry (coating agent) P can be transferred onto the to-be-coated part 20 by the 2nd transfer pin 22. In addition, when the second transfer pin 22 is in the second state, the tip end of the second transfer pin 22 is contacted or immersed in the slurry (coating agent P) of the slurry disk 53, and the slurry (coating agent) P can be received. The slurry (coating agent) P can be transferred onto the to-be-coated portion 20 by the first transfer pin 21. Further, the position of the second transfer pin 22 in the first state and the position of the first transfer pin 21 in the second state are the same at the intersection O of the movement trajectories L1, L2.

Therefore, when the pair of transfer pins 21 and 22 are transfer pins that form a figure-eight movement trajectory in plan view, even when the transfer is performed by the first transfer pin 21 or by the second transfer When the pin 22 is transferred, the slurry (coating agent) P can be transferred to the same portion, and the transfer operation can be stabilized, and the transfer can be made highly accurate. Further, even when the first state is displaced to the second state or the second state is displaced to the first state, the adjustment of the X or Y direction of the transfer pins 21 and 22 is unnecessary, and the controllability is excellent.

Even in this case, the slurry pan 53 moves up and down in the Z-axis direction, and may correspond to the coating agent P used or coated in the same manner as the coating device shown in FIG. 1 described above. The coating agent P is applied with high precision in the amount of the coating agent P of the cloth portion 20.

Here, in the apparatus shown in FIGS. 7a to 9, as shown in FIG. 8, the flat member 90 which planarizes the upper surface of the coating agent P of the slurry disk 53 is planar. The slurry disk 53 includes a bottom wall 53a, a peripheral wall 53b disposed along the outer circumference of the bottom wall 53a, and a shaft portion 53c at the center of the bottom wall 53a. Further, the slurry disk 53 is rotated around the shaft portion 53c via a drive mechanism (not shown). The flat member 90 is formed of a flat plate body, and is disposed corresponding to the annular slurry storage portion between the peripheral wall 53b and the shaft portion 53c, and is rotated by the slurry disk 53 around the shaft portion 53c thereof, and the flat member 90 is rotated. The lower end edge 90a is in contact with the upper surface of the coating agent of the annular slurry storage portion, and the depression of the upper surface of the coating agent P formed by the immersion of the transfer pins 21, 22 or the like is flattened. The upper surface becomes flat.

In this case, the slurry pan 53 may be fixed in reverse, and the flat member 90 may be rotated. Further, in any case, it is necessary to arrange the flat member 90 in such a manner that when the coating agent P is received from the slurry disk 53 by the transfer pins 21, 22, the flat member 90 does not become an obstacle. Therefore, the flat member 90 can also be a movable member that can move. Further, since the amount of the coating agent P in the annular slurry storage portion fluctuates, it is preferably a flat member that can move up and down.

In the case of the apparatus including the flattening member 90, the upper surface of the coating agent P is flattened, and the transfer agent 21 and 22 are used to stabilize the coating agent P from the slurry disk 53, thereby achieving high precision. Coating operation.

The apparatus shown in FIGS. 7a to 9 is a device in which the transfer pin 21 (22) is positioned at the intersection O of the movement trajectories L1, L2 in a state where the transfer pin 21 (22) is positioned above the to-be-coated portion 20. . However, the transfer pin 21 (22) may not be placed at the intersection point O so as to be located at the end point near the intersection point O. Here, the term "end point" refers to a folding point of the transfer pin 21 (22) (a point at which the transfer pin returns to the coating agent storage portion side). The end point of the intersection O close to the movement trajectories L1, L2 is set to a point closer to the coating agent storage portion (slurry disk) side than the intersection point O and closer to the reverse coating agent storage portion side than the intersection point. In addition, the proximity means that when the transfer pin 21 (22) at the end point is lowered in the vertical direction, it is set so that the coating agent can be transferred onto the to-be-coated portion 20. Therefore, as the approach range, various changes can be made in accordance with the area of the portion to be coated 20 .

Therefore, even when the transfer is performed by the first transfer pin or by the second transfer pin, the coating agent can be transferred to substantially the same portion, and the transfer operation can be stabilized. It can achieve high precision of transfer.

Although the embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment, and various modifications can be made. For example, as the state shifting mechanism 25, a link mechanism or the like can be used without using the conveyor belt member 26. . In the embodiment, the movement of the belt member 26 is reciprocating, but it may be a rotational movement in one direction. Further, as the drive mechanism 27 of the conveyor belt member 26, a motor is used in the above embodiment, but various known mechanisms (actuators) such as a solenoid mechanism and a cylinder mechanism may be used.

As shown in FIG. 1 and the like, when the entire belt member 26 is moved up and down in the Z-axis direction, the respective transfer pins 21 and 22 do not need to move up and down, but the error of the transfer pins 21 and 22 may be set. The transfer pins 21 and 22 can be slightly avoided in the Z-axis direction.

In addition, as shown in FIG. 5 and the like, a moving mechanism that moves the transfer pins 21 and 22 independently in the Z-axis direction may be a moving mechanism using a cylinder mechanism or a ball screw mechanism.

When the transfer pin 21 (22) is made to correspond to the coated portion of the workpiece W, the movement of the belt member 26 in the X-axis direction and/or the Y-axis direction and the arrow E of the belt member 26 can be simultaneously performed. The movement in the direction may be performed in the direction of the arrow E (F) of the conveyor belt 26 after the movement of the conveyor belt 26 in the X-axis direction and/or the Y-axis direction, or may be performed on the arrow E of the conveyor belt 26 ( F) The movement of the conveyor belt 26 in the X-axis direction and/or the Y-axis direction is performed.

The height difference between the coating agent storage portion and the coated portion 20 of the workpiece W can be variously set within a range in which the horizontal stage 52 supporting the slurry tray 53 can pass over the stage on which the workpiece W is placed. Furthermore, there is no such difference in height. Further, as shown in FIG. 1 and the like, when the transfer pin 21 (22) is lowered by the lowering of the belt member 26, as the amount of the drop, the coating agent can be stored at the lower end of the transfer pin 21 (22). The portion is immersed or contacted, or the transfer pin 21 (22) can be variously modified within the range in which the coating portion P of the workpiece W is transferred.

The diameter, material, and the like of the transfer pin 21 (22) may be dipped or contacted with respect to the coating agent storage portion at the lower end of the transfer pin 21 (22), and may receive the coating agent P, and may be The coating agent P to which the coating agent P is attached is transferred to the surface to be coated 20 to be variously modified. Further, the shape of the distal end surface of the transfer pin 21 (22) may be a flat surface or a shape having a concavo-convex portion. The displacement speed from the first state to the second state and the displacement speed from the second state to the first state may be within a range in which the coating agent P adhering to the transfer pin 21 (22) does not scatter, depending on the coating. The material of the agent P, the amount of the coating agent P adhered, and the material, shape, size, and the like of the transfer pin 21 (22) are variously changed.

The apparatus shown in Fig. 7a to Fig. 9 is a device that displaces the support arms 71 and 72 by using a link mechanism (a link mechanism including a swing lever 85 and the joint bodies 86a and 86b), and a drive motor. The support arms 71 and 72 may be displaced without using such a link mechanism or the like. That is, it is also possible to move the support arms 71, 72 in the opposite manner to the movement trajectories L1, L2 by using the cylinder mechanism or the ball screw mechanism, in the opposite manner.

Even in the apparatus shown in Figs. 7a to 9, as shown in Figs. 5 and 6, the transfer pins 21 and 22 can be independently moved up and down. By setting in this way, the transfer operation of the coating agent P from the slurry disk and the application operation of the coating agent applied to the coated portion 20 can be stably performed without the base 77 being opposed to the horizontal surface. Slanted. Further, even in the apparatus shown in Fig. 1 or Fig. 5, the flat member 90 may be disposed.

In the apparatus shown in FIGS. 7a to 9, when the transfer pin 21 (22) is lowered in the vertical direction, the "end point" near the intersection point O is set so that the coating agent can be transferred to the coated portion. 20 on the range. However, the transfer pin 21 (22) can be moved toward the center line side passing through the intersection point O and the transfer pin 21 (22) can be lowered. Therefore, the "proximity" is not limited to the range in which the coating agent can be transferred onto the coated portion 20 when the transfer pin 21 (22) at the end point is lowered in the vertical direction.

As the state shifting mechanism 25, a transfer pin may be disposed on the rotating body at a position spaced apart from the rotation axis of the rotating body by 180 degrees.

[Industrial availability]

In the semiconductor manufacturing, a step of applying a slurry-form coating agent onto a lead frame or the like as a portion to be coated. The coating agent is a resin adhesive such as an epoxy resin or a polyimide resin, or a silver paste. Use a transfer pin. The lower end of the transfer pin is immersed in a coating agent stored in the slurry pan to receive the coating agent. The received coating agent is transferred onto the coated portion.

While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.

1, 36. . . Abutment

2. . . XYZ station

3, 21, 22. . . Transfer pin

5, 7, 9, 30, 37, 39, 41, 56. . . Linear guiding mechanism

6, 38. . . First platform

8, 40. . . Second platform

10,43. . . Third platform

11. . . arm

11a. . . Part 1

11b. . . Part 2

12, 53. . . Slurry tray

13, W. . . Workpiece

20. . . Coated part

25. . . State shifting mechanism

26. . . Conveyor belt member

26a, 26b. . . The long side

26c, 26d. . . Arc edge

27. . . Drive mechanism

28. . . Control mechanism

31, 45, 47, 49, 57, 80. . . guide

32a, 32b, 81. . . Moving block

35. . . Stage

42. . . Vertical wall

46, 48, 50, 58. . . Moving body

51. . . Tilt arm

52. . . Horizontal platform

53a. . . Bottom wall

53b. . . Zhou wall

53c. . . Shaft

55. . . Position adjustment mechanism

60. . . Support substrate

61, 62. . . Pin support block

63. . . Guide plate

65a, 65b. . . Linear motor

71, 72. . . Support arm

73, 74. . . Arm guiding mechanism

75. . . Arm control mechanism

77. . . Pedestal

77a. . . Base part 1

77b. . . Front end side 2

78. . . Inclined side

82. . . Support

83. . . Transfer pin support

85. . . Swing rod

86a, 86b. . . Link

88a, 88b. . . spring

90. . . Leveling member

90a. . . Lower edge

A, B, C, E, F, H2. . . arrow

L1, L2. . . Moving track

M. . . Conveyor belt drive motor

O. . . Intersection

P. . . Coating agent (slurry)

Fig. 1 is a schematic side view showing a coating apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic front view of the coating apparatus of Fig. 1 described above.

Fig. 3a is a schematic view showing a first state of the coating device of Fig. 1;

Fig. 3b is a schematic view showing a second state of the coating apparatus of Fig. 1;

4 is a schematic block diagram of a state shifting mechanism.

Fig. 5 is a schematic side view showing a coating apparatus according to another embodiment of the present invention.

Fig. 6 is a schematic front view of the coating device of Fig. 5 described above.

Fig. 7a is a schematic plan view of a main part of a state in which a second transfer pin corresponds to an upper portion of a coating agent storage portion, in a coating device according to another embodiment of the present invention.

Fig. 7b is a schematic plan view showing a main part of a neutral state in a coating apparatus according to another embodiment of the present invention.

Fig. 7c is a schematic plan view of a main part of a state in which a first transfer pin corresponds to an upper portion of a coating agent storage portion, in a coating device according to another embodiment of the present invention.

Fig. 8 is a schematic perspective view of a main part of the coating apparatus shown in Figs. 7a to 7c.

Fig. 9 is a side elevational view showing the main part of the coating apparatus shown in Figs. 7a to 7c.

Figure 10 is a schematic side view of a prior coating device.

Fig. 11 is a schematic front view of the coating device of Fig. 10 described above.

Fig. 12 is a schematic view showing a coating step.

20. . . Coated part

21, 22. . . Transfer pin

30. . . Linear guiding mechanism

31. . . guide

32a, 32b. . . Moving block

35. . . Stage

36. . . Abutment

37, 39, 41, 56. . . Linear guiding mechanism

38. . . First platform

40. . . Second platform

42. . . Vertical wall

43. . . Third platform

45, 47, 49, 57. . . guide

46, 48. . . Moving body

50, 58. . . Moving body

51. . . Tilt arm

52. . . Horizontal platform

53. . . Slurry tray

55. . . Position adjustment mechanism

P. . . Coating agent (slurry)

W. . . Workpiece

Claims (5)

A coating device comprising a pair of transfer pins for applying a slurry-form coating agent onto a coated portion, comprising: a state displacement mechanism for alternately displacing a pair of transfer pins The first state and the second state are those in which the first transfer pin corresponds to the upper portion of the coating agent storage portion in which the slurry-form coating agent is stored, and the second transfer pin corresponds to the coated portion. In the upper state of the portion, the second transfer pin corresponds to the upper portion of the coating agent storage portion that stores the slurry-form coating agent, and the first transfer pin corresponds to the upper portion of the coated portion. And a Z-axis direction moving mechanism that moves the respective transfer pins in the Z-axis direction as the vertical direction in the first state and the second state, wherein the pair of transfers moved by the state displacement mechanism The movement trajectory of the pin has a figure-eight shape in plan view, and the transfer pin is positioned at an end point close to the intersection of the movement trajectory in a state where the transfer pin is positioned above the coated portion. A coating device comprising a pair of transfer pins for applying a slurry-form coating agent onto a coated portion, comprising: a state displacement mechanism for alternately displacing a pair of transfer pins The first state and the second state are those in which the first transfer pin corresponds to the upper portion of the coating agent storage portion in which the slurry-form coating agent is stored, and the second transfer pin corresponds to the coated portion. In the upper state of the portion, the second transfer pin corresponds to the upper portion of the coating agent storage portion that stores the slurry-form coating agent, and the first transfer pin corresponds to the upper portion of the coated portion. And the Z-axis direction moving mechanism, in which the transfer pins are in the up and down direction in the first state and the second state Moving in the Z-axis direction, wherein the movement trajectory of the pair of transfer pins moved by the state displacement mechanism is in a figure-eight shape in plan view, and the transfer pin is positioned above the coated portion The transfer pin is placed at the intersection of the above-mentioned movement trajectories. The coating device of claim 2, wherein the state displacement mechanism comprises: a support arm respectively supporting the pair of transfer pins; and an arm guiding mechanism for guiding movement of each support arm along the movement track And an arm control mechanism that controls the arm guiding mechanism such that one of the support arms moves from the coating agent storage portion side toward the coated portion side, and the other support arm faces the coated portion from the side When the coating agent storage portion side moves and one of the support arms moves from the coated portion side toward the coating agent storage portion side, the other support arm is coated from the coating agent storage portion side toward the coating side. The side moves. A coating method for applying a slurry-form coating agent to a portion to be coated, comprising: a first step of changing a tip end of the first transfer pin into a slurry-form coating agent Receiving the coating agent in a dip or contact shape, transferring and applying the coating agent adhering to the second transfer pin to the portion to be coated; and performing the second step of the second transfer pin The coating agent is immersed or contacted in a slurry-like coating agent to receive the coating agent, and the coating agent adhered to the first transfer pin is transferred and applied to the coated portion; and alternately Performing the first step and the second step, wherein the respective transfer pins in the first step and the second step are alternately performed The movement locus is in a figure-eight shape in plan view, and the transfer pin when the coating agent is transferred and applied onto the coated portion is located at the end point of the intersection close to the above-described movement locus. A coating method for applying a slurry-form coating agent to a portion to be coated, comprising: a first step of changing a tip end of the first transfer pin into a slurry-form coating agent Receiving the coating agent in a dip or contact shape, transferring and applying the coating agent adhering to the second transfer pin to the portion to be coated; and performing the second step of the second transfer pin The coating agent is immersed or contacted in a slurry-like coating agent to receive the coating agent, and the coating agent adhered to the first transfer pin is transferred and applied to the coated portion; and alternately The first step and the second step are performed, wherein the movement trajectories of the respective transfer pins when the first step and the second step are alternately performed are eight-shaped in plan view, and the coating agent is transferred and applied to the coating. The transfer pin at the time of the cloth portion is disposed at the intersection of the above-described movement trajectories.