KR101088830B1 - Dotting head and dotting device for a die bonder, and die bonder having the dotting device - Google Patents
Dotting head and dotting device for a die bonder, and die bonder having the dotting device Download PDFInfo
- Publication number
- KR101088830B1 KR101088830B1 KR1020100101542A KR20100101542A KR101088830B1 KR 101088830 B1 KR101088830 B1 KR 101088830B1 KR 1020100101542 A KR1020100101542 A KR 1020100101542A KR 20100101542 A KR20100101542 A KR 20100101542A KR 101088830 B1 KR101088830 B1 KR 101088830B1
- Authority
- KR
- South Korea
- Prior art keywords
- dotting
- arm
- driven
- doting
- guide block
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
Abstract
The present invention relates to a die bonder's dotting head and dotting apparatus, and a die bonder having the same, which can simplify the configuration and improve the dotting speed.
The present invention, the operation lever is driven to rotate left and right by a horizontal drive motor; First and second link members connected to both ends of the operation lever; A first dotting arm connected to the first link member and having a first dotting needle mounted at an end thereof; And a second dosing arm connected to the second link member and having a second dosing needle mounted at an end thereof, wherein the first dosing arm and the second dosing arm are moved forward or backward by left and right rotation of the operating lever. Characterized by the die-bonder's dotting head.
Description
The present invention relates to a dotting head and dotting apparatus of a die bonder, and a die bonder having the same. More particularly, the present invention relates to a dotting head and dotting apparatus of a die bonder, and a die bonder having the same, which simplifies the configuration and improves the dotting speed.
The die bonding process in the manufacture of semiconductor chips is a die pad that divides individual chips (or dies) that are divided from wafers through a dicing (also called sawing) process. pad) or a process of bonding to a lead frame (hereinafter, referred to as a “lead frame”) of a semiconductor package. The die bonder is the equipment that performs this die bonding process.
The die bonding method is classified into an adhesive die bonding method and an eutectic die attach method according to a material used. Among them, the adhesive die bonding method bonds the die to a lead frame using an adhesive material such as epoxy or polyimide. On the other hand, in the configuration in which an adhesive material such as epoxy is applied to the lead frame, a certain amount of the adhesive material is applied to the upper part of the lead frame using a dispenser, or the adhesive material is doped to the upper part of the lead frame using a dotting unit. .
When the adhesive material is doped into the lead frame using the dotting unit, the adhesive material stored in the adhesive material stage is doped into the lead frame using the dotting needle. The semiconductor chip (or die) is attached to the lead frame to which the adhesive material is doped by the dotting unit by the chip bonding unit.
In general, the dotting unit is provided with driving means for driving X, Y and Z axes, and includes a vision system having a lead frame camera for recognizing the lead frame and controlling the dotting position. In a conventional die bonder, there may be only one such dotting unit, but there are examples in which a plurality of dotting units having the same structure are employed to reduce the dotting time. By the way, in the conventional die bonder, each of the plurality of dotting units includes an X-axis, a Y-axis, a Z-axis driving means and a lead frame camera separately. That is, the conventional die bonder employs only a plurality of dotting units having the same structure, and the structure for mounting the plurality of dotting units is complicated, the equipment size is increased, and the manufacturing cost of the die bonder increases. It was.
Meanwhile, in the conventional dotting unit, the dotting needle for dotting is driven linearly with respect to each of the X and Y axes, and then linearly driven in the Z-axis direction. Therefore, the work distance is increased by increasing the distance for doting. There was a problem.
SUMMARY OF THE INVENTION In order to solve the problems as described above, an object of the present invention is to provide a die bonder's dotting head and dotting apparatus, and a die bonder including the same, which simplifies the structure, reduces the number of driving motors for driving, and reduces the size. do.
In addition, an object of the present invention is to provide a die bonder's dotting head and dotting apparatus, and a die bonder including the same, which shortens the moving distance and reduces working time.
In order to achieve the above object, the present invention, the operating lever is driven to rotate left and right by a horizontal drive motor; First and second link members connected to both ends of the operation lever; A first dotting arm connected to the first link member and having a first dotting needle mounted at an end thereof; And a second dosing arm connected to the second link member and having a second dosing needle mounted at an end thereof, wherein the first dosing arm and the second dosing arm are moved forward or backward by left and right rotation of the operating lever. Characterized by the die-bonder's dotting head.
Preferably, the first dotting arm and the second doting arm are guided by the first dotting arm guide block and the second dotting arm guide block, respectively, when moving forward or backward. Meanwhile, the first dotting arm guide of the first dotting arm guide block and the second dotting arm guide of the second dotting arm guide block respectively guide the first dotting arm and the second dotting arm, The putting arm guide and the second dotting arm guide may be configured to be inclined downward forward.
Preferably, the first dotting arm and the second doting arm are driven up and down separately from forward or backward by the actuation lever. In order to vertically drive the first and second dotting arms, each of the first dotting arm guide block and the second dotting arm guide block is vertically driven by a cam follower connected to a vertical drive cam driven by a vertical drive motor. Can be configured.
In addition, the present invention includes a base fixing block fixed to the die bonder body, a support frame coupled to be driven in at least one direction to the base fixing block, a horizontal drive motor coupled to one end of the support frame; An operation lever driven to rotate left and right by the horizontal drive motor; First and second link members connected to both ends of the operation lever; A first dotting arm connected to the first link member and having a first dotting needle mounted at an end thereof; And a second dosing arm connected to the second link member and having a second dosing needle mounted at an end thereof, wherein the first dosing arm and the second dosing arm are moved forward or backward by the operation lever. It provides a dotting apparatus of a die bonder.
In addition, the present invention, the loading unit for supplying the lead frame, the lead frame transfer unit for transferring the lead frame supplied from the loading unit, the above-described dotting apparatus, the chip supply unit for supplying the semiconductor chip, the semiconductor supplied from the chip supply unit And a chip mounting part for seating a chip on the lead frame doped with the adhesive material, and an unloading part for discharging the lead frame to which the semiconductor chip is bonded.
According to still another aspect of the present invention, there is provided an apparatus comprising: a dotting arm driven straight and equipped with a dotting needle at an end thereof; A dotting arm guide block for guiding a straight drive of the dotting arm; And it provides a dotting head of the die bonder including a vertical drive means for driving the dotting arm guide block up and down.
Preferably, a straight drive motor is connected to the dotting arm for driving the dotting arm straight. The dotting arm guide block may be vertically driven by a cam follower connected to a vertical driving cam driven by a vertical driving motor.
According to the present invention, there is provided a dotting head and dotting apparatus of a die bonder with a reduced number of parts and a die bonder including the same.
The dotting head of the die bonder according to the present invention shortens the moving distance of the dotting needle for the adhesive material dotting, thereby improving working time.
In addition, according to the present invention a plurality of dotting arms can share the drive means to reduce the number of parts. In addition, according to the present invention, there is an effect that the movement in the X-axis, Y-axis and Z-axis direction at the same time when driving the dotting arm.
In addition, according to the present invention, a plurality of dotting needles have the effect of sharing a vision system, including a camera, without having to provide a camera for image acquisition for each individual dotting apparatus.
1 is a perspective view of a dotting apparatus of a die bonder according to a preferred embodiment of the present invention;
2 is a perspective view centering on a mounting block and a dotting head in a die bonding apparatus according to a preferred embodiment of the present invention;
Figure 3 is a perspective view of the dotting head in the die bonder dotting apparatus according to an embodiment of the present invention,
4 is a plan view of the dotting head in the die bonding apparatus of the die bonder according to the preferred embodiment of the present invention;
5 is a plan view of the actuation lever in the die bonder dotting apparatus according to the preferred embodiment of the present invention;
6 is a side view of the link member in the die bonder dotting apparatus according to the preferred embodiment of the present invention;
7 is a plan view of the dotting arm in the die bonder dotting apparatus according to the preferred embodiment of the present invention;
8A to 8C are views for explaining the operation of the dotting head in the die bonding apparatus of the die bonder according to the preferred embodiment of the present invention;
9A and 9B illustrate the operation of the dotting head of a die bonder according to a preferred embodiment of the present invention;
10 illustrates a dotting apparatus of a die bonder according to another exemplary embodiment of the present invention;
FIG. 11 illustrates a dotting apparatus of a die bonder according to still another preferred embodiment of the present invention. FIG.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. In addition, the following will describe a preferred embodiment of the present invention, but the technical idea of the present invention is not limited thereto and may be variously modified and modified by those skilled in the art.
In general, a die bonder includes a loading unit for supplying a lead frame, a lead frame transfer unit for transferring a lead frame supplied from the loading unit, a dotting apparatus for doping an adhesive material to the lead frame, a chip supply unit for supplying a semiconductor chip, and the chip supply unit And a chip mounting portion for seating the semiconductor chip supplied from the lead frame onto which the adhesive material is doped, and an unloading portion for discharging the lead frame to which the semiconductor chip is bonded. An example of such a die bonder is disclosed in Korean Patent Laid-Open Publication No. 2003-0030587 and Korean Patent Registration No. 969533.
The present invention has a main feature of the dotting apparatus employed in the die bonder, the following describes the dotting apparatus of the die bonder according to a preferred embodiment of the present invention.
1 is a perspective view of a dotting apparatus of a die bonder according to a preferred embodiment of the present invention.
The
In front of the
In the preferred embodiment of the present invention shown in Figure 1, the
Referring to FIG. 1, the rear surface of the mounting
2 is a perspective view centering on a mounting block and a dotting head in a die bonder dotting apparatus according to a preferred embodiment of the present invention, and FIG. 3 is a dotting head in a dotting apparatus of a die bonder according to a preferred embodiment of the present invention. 4 is a plan view of a dotting head in a die bonder dotting apparatus according to a preferred embodiment of the present invention. On the other hand, Figure 5 is a plan view of the operating lever in the die bonder dotting device according to a preferred embodiment of the present invention, Figure 6 is a side view of the link member in the die bonder dotting device according to a preferred embodiment of the present invention, 7 is a plan view of a dotting arm in a die bonder dotting apparatus according to a preferred embodiment of the present invention.
2 to 7, the detailed configuration of the dotting apparatus according to the present invention will be described.
The dotting
The front end of the
Referring to FIG. 5, a driving
2 and 3, the length of the dotting
The
As an embodiment for vertically driving the dotting
The operation of the
8A to 8C are diagrams illustrating the operation of the dotting head in the die bonding apparatus of the die bonder according to the preferred embodiment of the present invention.
8A shows the Z axis position of the dotting
In the state where the adhesive material is buried in the dotting
That is, the present invention can perform the forward and the lowering of the
9A and 9B illustrate the operation of the dotting head of a die bonder according to a preferred embodiment of the present invention.
The
The dotting head of the die bonder according to the above embodiment has the advantage of simultaneously driving two dotting
Also, in the present invention, preferably, the position where the
In addition, according to the present invention, as the
On the other hand, in the embodiment described above, the cam in contact with the
As another embodiment, in some cases, when only a single dotting arm is used without employing a pair of dotting
11 is a diagram illustrating a dotting apparatus of a die bonder according to another embodiment of the present invention.
Referring to FIG. 11, a
The above description is merely illustrative of the technical idea of the present invention, and various modifications, changes, and substitutions may be made by those skilled in the art without departing from the essential characteristics of the present invention. will be.
10: dotting apparatus 12: base fixing block
14: movable block 16: support frame
18: first drive motor 20: second drive motor
22: lead frame camera 24: mounting block
26: horizontal drive motor 28: vertical drive motor
30: fixed end 32: stage mounting portion
34: adhesive material stage 36: adhesive material receiving portion
38: stage driving unit 40: dotting head
42a, 42b: dotting
46a: link member 48: operating lever
50a: Dotting Arm Guide Block
Claims (19)
First and second link members connected to both ends of the operation lever;
A first dotting arm connected to the first link member and having a first dotting needle mounted at an end thereof; And
A second dosing arm connected to the second link member and having a second dosing needle mounted at an end thereof;
The dotting head of the die bonder, characterized in that the first dotting arm and the second doting arm is moved forward or backward by the left and right rotation of the operating lever.
And the first dotting arm and the second doting arm are guided by the first dotting arm guide block and the second dotting arm guide block, respectively, when moving forward or backward.
The first dotting arm guide of the first dotting arm guide block and the second dotting arm guide of the second dotting arm guide block respectively guide the first dotting arm and the second doting arm, but the first dotting arm guide And the second doting arm guide is inclined downward toward the front of the die bonder.
The dotting head of the die bonder, wherein the first dotting arm and the second doting arm are driven up and down separately from the forward or backward by the operation lever.
And the first dotting arm guide block and the second dotting arm guide block are driven up and down by a cam follower connected to a vertical drive cam driven by a vertical drive motor.
The dotting head of the die bonder, characterized in that the first dotting arm and the second doting arm is driven up and down simultaneously with the forward or backward.
A horizontal drive motor coupled to one end of the support frame;
An operation lever driven to rotate left and right by the horizontal drive motor;
First and second link members connected to both ends of the operation lever;
A first dotting arm connected to the first link member and having a first dotting needle mounted at an end thereof; And
A second dosing arm connected to the second link member and having a second dosing needle mounted at an end thereof;
And wherein the first and second doting arms are advanced or reversed by the actuating lever.
And the first dotting arm and the second doting arm are guided by the first dotting arm guide block and the second dotting arm guide block, respectively, when moving forward or backward.
The first dotting arm guide of the first dotting arm guide block and the second dotting arm guide of the second dotting arm guide block respectively guide the first dotting arm and the second doting arm, but the first dotting arm guide And the second dotting arm guide is inclined downward in the forward direction.
And a lead frame camera for acquiring an image of a lead frame located at a dotting position of the first and second dotting arms.
And the first dotting arm and the second doting arm are driven up and down separately from forward or backward by the operation lever.
And the first dotting arm guide block and the second dotting arm guide block are driven up and down by a cam follower connected to a vertical drive cam driven by a vertical drive motor.
12. The die bonder according to any one of claims 8 to 11, wherein the dotting apparatus is used.
And the first dotting arm and the second doting arm are driven up and down separately from forward or backward by the operation lever.
And each of the first dotting arm guide block and the second dotting arm guide block is driven up and down by a cam follower connected to a vertical drive cam driven by a vertical drive motor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020100101542A KR101088830B1 (en) | 2010-10-18 | 2010-10-18 | Dotting head and dotting device for a die bonder, and die bonder having the dotting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020100101542A KR101088830B1 (en) | 2010-10-18 | 2010-10-18 | Dotting head and dotting device for a die bonder, and die bonder having the dotting device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR101088830B1 true KR101088830B1 (en) | 2011-12-06 |
Family
ID=45505475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020100101542A KR101088830B1 (en) | 2010-10-18 | 2010-10-18 | Dotting head and dotting device for a die bonder, and die bonder having the dotting device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR101088830B1 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002110709A (en) * | 2000-09-27 | 2002-04-12 | Nec Machinery Corp | Die bonder |
KR100543108B1 (en) | 1997-09-05 | 2006-08-30 | 언액시스 인터내셔널 트레이딩 엘티디 | Semi-conductor mounting apparatus for applying adhesive to a substrate |
-
2010
- 2010-10-18 KR KR1020100101542A patent/KR101088830B1/en active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100543108B1 (en) | 1997-09-05 | 2006-08-30 | 언액시스 인터내셔널 트레이딩 엘티디 | Semi-conductor mounting apparatus for applying adhesive to a substrate |
JP2002110709A (en) * | 2000-09-27 | 2002-04-12 | Nec Machinery Corp | Die bonder |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20060060631A1 (en) | Motion control device for wire bonder bondhead | |
KR102059421B1 (en) | Electronic component mounting unit | |
KR100878540B1 (en) | Electronic component placement machine and electronic component placement method | |
KR101886923B1 (en) | Die bonder and manufacturing method of semiconductor device | |
JP4834106B2 (en) | Method and automatic mounting machine for mounting electrical components on a substrate | |
KR100288572B1 (en) | Laser Marking Device and Control Method | |
JP2004363607A (en) | Semiconductor apparatus having multiple delivery devices for components | |
CN102820239A (en) | Detection method for predetermined lines of division | |
WO2008066335A1 (en) | Apparatus of transferring semiconductor package | |
JP5009354B2 (en) | Coating device | |
US11410870B2 (en) | Die attach systems, and methods of attaching a die to a substrate | |
KR101088830B1 (en) | Dotting head and dotting device for a die bonder, and die bonder having the dotting device | |
US7320423B2 (en) | High speed linear and rotary split-axis wire bonder | |
JPS63299828A (en) | Press robot | |
JP4234300B2 (en) | Chip transfer device | |
JP5009353B2 (en) | Coating apparatus and coating method | |
KR100854438B1 (en) | Flux dotting device of ball mounting system for manufacturing semiconductor packages | |
JP2008183695A (en) | Parts assembling device | |
KR20110047152A (en) | Coating device and coating method | |
US20070022801A1 (en) | Work transfer device in multi-process press machine | |
KR20210111001A (en) | Bonding apparatus | |
JPH0635470Y2 (en) | Wire bonding equipment | |
KR100960598B1 (en) | Apparatus for supplying wefer in bonding machine | |
JPH10223703A (en) | Bonding apparatus | |
KR920008839B1 (en) | Bonding equipment of chip |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
A302 | Request for accelerated examination | ||
N231 | Notification of change of applicant | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20150828 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20160922 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20170921 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20180918 Year of fee payment: 8 |