JP5009354B2 - Coating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating apparatus capable of attaining enhancement of productivity and performing coating of a coating agent at high accuracy according to a used coating agent and the amount of the coating agent to a part to be applied. <P>SOLUTION: The coating apparatus includes a pair of transfer pins for receiving the coating agent P by making lower ends of the pins in the dipping-state or contact-state with the coating agent in a coating agent storage part in which the paste-like coating agent P is stored, and transferring the received coating agent P onto the part 20 to be applied. The coating agent P is received by one transfer pin 21 and the coating agent P is simultaneously transferred onto the part 20 to be applied from the other transfer pin 22, and the transfer pins 21, 22 are descended along a vertical direction when it receives the coating agent P and it transfers the coating agent P. The coating apparatus includes a paste dish 53 constituting the coating agent storage part in which the coating agent P is stored, and a position adjustment mechanism 55 for performing adjustment of the vertical height position of the paste dish 53. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a coating apparatus.

  In a semiconductor manufacturing apparatus, there is a step of applying a paste to a lead frame or the like. Some of these coating apparatuses use transfer pins (Patent Document 1 and Patent Document 2). A device using such a transfer pin is a coating apparatus as shown in FIGS.

  The coating apparatus includes an XYZ stage 2 disposed on a base 1 and a transfer pin 3 attached to the XYZ stage 2. The XYZ stage 2 reciprocates in the Y-axis direction on the first table 6 via the linear guide mechanism 5 and the first table 6 that reciprocates on the base 1 in the X-axis direction via the linear guide mechanism 7. A second table 8 and a third table 10 that reciprocates in the Z-axis direction on the second table 8 via a linear guide mechanism 9 are provided. A transfer pin 3 is attached to the third table 10.

  In this case, an L-shaped arm 11 composed of a first part 11a extending in the vertical direction and a second part 11b extending in the horizontal direction from the lower end of the first part 11a is connected to the first table 6. A paste pan 12 in which paste is stored is provided in the second portion 11 b of the arm 11.

  Next, a method for applying a paste to the workpiece (application portion) 13 using such an application apparatus will be described. First, the transfer pin 3 is placed on the paste dish 12, and the transfer pin 3 is lowered from this state and the lower end of the transfer pin 3 is immersed in the paste on the paste dish 12 as shown in FIG. Then, the transfer pin 3 is raised as shown by an arrow A. As a result, the paste adheres to the transfer pin 3. In this state, the transfer pin 3 is moved horizontally in the direction of arrow B and is positioned above the work 13. Thereafter, the transfer pin 3 is lowered as shown by an arrow C, and the paste P adhered to the transfer pin 3 is applied to the surface of the work 13 by transfer. Thereafter, the transfer pin 3 is raised and then moved in the horizontal direction in the direction opposite to the arrow B to return to the initial state. This operation is repeated.

Japanese Patent Laid-Open No. 1-183827 JP 2002-198382 A

  Thus, in the apparatus shown in FIGS. 10 and 11, it is necessary to reciprocate the transfer pin 3 between the paste dish 12 and the work 13. However, since the paste P adheres to the transfer pin 3 when moving from the paste pan 12 to the workpiece 13, the paste P may be scattered from the transfer pin 3 when moved at high speed. Therefore, it cannot be moved at a very high speed, the application work time becomes long, and the productivity is inferior.

  Therefore, a pair of transfer pins for transferring the coating agent to the coated portion can be provided, and the coating agent can be set to be transferred from the other transfer pin to the coated portion at the same time as the coating agent is received by one of the transfer pins. For example, the transfer pin may be disposed on the rotating body at a position 180 degrees opposite to the rotation axis of the rotating body.

  With this setting, one transfer pin is made to correspond to the paste pan, and the other transfer pin is made to correspond to the coated part. Simultaneously with receiving the coating agent, the coating agent can be transferred from the other transfer pin to the coated portion. Further, if the rotating body is rotated so that the other transfer pin is made to correspond to the paste dish and one transfer pin is made to correspond to the coated portion, the other transfer pin is moved downward. The coating agent can be transferred from one transfer pin to the coated portion simultaneously with receiving the coating agent.

  As a result, the overall application work time can be shortened. By the way, in such a coating operation, there are cases where it is desired to bring the transfer pin into contact with the portion to be coated on the coating side or not to contact the portion to be coated. Further, on the paste dish side, there are cases where it is desired to immerse the transfer pin deeply in the paste, or cases where it is desired to immerse the transfer pin shallowly in the paste. However, since the vertical movement amount of the pair of transfer pins is set to be the same, such a need cannot be met.

  Therefore, in view of such circumstances, the present invention can improve productivity, and can apply the coating agent with high accuracy according to the amount of the coating agent to be used and the amount of the coating agent to be applied. It is an object of the present invention to provide a coating apparatus that can be used.

  The coating apparatus according to the present invention receives a coating agent with the lower end immersed or contacted with the coating agent in the coating agent reservoir where the paste-like coating agent is stored, and transfers the received coating agent to the coated part. A transfer pin is received from one transfer pin at the same time as the transfer agent is transferred from the other transfer pin to the application portion, and the transfer agent is received from the other transfer pin and simultaneously from the transfer pin. A coating device for transferring a coating agent to the coating unit, receiving the coating agent, and transferring the coating agent, wherein the transfer pin descends along the vertical direction, and is a paste constituting the coating agent reservoir in which the coating agent is stored A plate and a position adjusting mechanism for adjusting the vertical position of the paste plate are provided.

The coating apparatus according to the present invention receives a coating agent with the lower end immersed or contacted with the coating agent in the coating agent reservoir where the paste-like coating agent is stored, and transfers the received coating agent to the coated part. A transfer pin is received from one transfer pin at the same time as the transfer agent is transferred from the other transfer pin to the application portion, and the transfer agent is received from the other transfer pin and simultaneously from the transfer pin. A coating device in which a transfer pin moves down in the vertical direction when transferring a coating agent to the coating unit, receiving the coating agent, and transferring the coating agent, and a moving mechanism for moving one transfer pin, and the other It provided the other moving mechanism for moving the transfer pin, with one of the transfer pin and the other transfer pin moves up and down independently, a paste dish constituting the coating material reservoir portion the coating agent is accumulated, this It is obtained by a position adjusting mechanism for adjusting the vertical height of the paste dish.

  With the position adjustment mechanism, the vertical position of the paste dish can be adjusted. For this reason, if the paste dish is positioned at the upper position, when the transfer pin corresponding to the paste dish is lowered, the paste dish can be deeply immersed in the coating agent accumulated in the paste dish. If the paste plate is positioned at the lower position, when the transfer pin corresponding to the paste plate is lowered, the transfer pin is shallowly immersed in the coating material accumulated in the paste plate, or the tip of the transfer pin contacts the top surface of the coating material. Or just to do it. Moreover, when it is made to immerse deeply in a coating agent, immersion time can be lengthened, and when immersed in a coating agent shallowly, immersion time can be made small. For this reason, the coating amount of the coating agent adhered to the transfer pin can be adjusted. On the coated part side, the tip of the transfer pin does not contact the coated part at the lowest position of the tip of the transfer pin even if it contacts the coated part at the lowest position of the transfer pin. In addition, a predetermined minute gap may be formed between the portion to be coated.

  The amount of vertical movement of the pair of transfer pins can be the same, or the vertical movement of the pair of transfer pins can be synchronized. Moreover, the thing provided with the leveling member which levels the upper surface of the coating agent of a paste dish in planar shape may be sufficient.

  When the amount of vertical movement of the pair of transfer pins is the same, the height position of the paste pan can be adjusted based on the height position of the tip (lower end) of the transfer pin on the coated portion side when lowered. That is, the tip of the transfer pin is in contact with the application portion at the lowest position of the transfer pin, or the tip of the transfer pin is not in contact with the application portion at the lowest position of the transfer pin. A predetermined minute gap may be generated between them.

  The coating apparatus of the present invention can improve workability twice as much as conventional apparatuses and methods, and is excellent in productivity. In addition, the overall apparatus can be made compact and the cost can be reduced.

  On the paste pan side, the coating amount of the coating agent to be attached to the transfer pin can be set according to the type of coating agent to be used, the coating amount of the coating agent to the coated portion, etc. In addition, the height position of the transfer pin with respect to the application portion can be adjusted in accordance with the type of the application agent to be used, the application amount of the application agent to the application portion, and the like. For this reason, a chip | tip etc. can be mounted in this to-be-coated part with high precision.

  In particular, when the amount of vertical movement of the pair of transfer pins is the same, by adjusting the height position of the paste pan, `` deeply immersed in the coating agent, immersed in the coating agent, or applied to the tip of the transfer pin. It is possible to stabilize the state of being in contact with the upper surface of the agent, and to adjust the application amount of the application agent to the application portion by the transfer pin with high accuracy. In addition, by synchronizing the vertical movement of the pair of transfer pins, the receiving of the coating agent by one transfer pin and the application by the other transfer pin can be performed stably and simultaneously, thereby improving the productivity. Can do.

  If the leveling member is provided, the upper surface of the coating agent is leveled, whereby the receiving of the coating agent from the paste dish is stabilized by the transfer pin, and high-precision coating work is possible.

It is a simplified side view of the coating device of the embodiment of the present invention. FIG. 2 is a simplified front view of the coating apparatus of FIG. 1. The operation of the coating apparatus of FIG. 1 is shown, (a) is a simplified diagram showing a first state, and (b) is a simplified diagram showing a second state. It is a simplified block diagram of a state displacement means. It is a simplified side view of the coating device of other embodiments of the present invention. FIG. 6 is a simplified front view of the coating apparatus of FIG. 5. It is a principal part simplification figure of the coating device of another embodiment of this invention. It is a principal part simplified perspective view of the coating device shown in the said FIG. It is a principal part side view of the coating device shown in the said FIG. It is a simplified side view of the conventional coating device. It is a simplified front view of the coating device of the said FIG. It is a simplified diagram showing an application process.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  1 and 2 show a coating apparatus according to the present invention, and this coating apparatus includes a pair of transfer pins 21 and 22 for applying a paste-like coating agent P to a portion to be coated 20 of a workpiece W. Is. Examples of the paste-like coating agent P include resin adhesives such as epoxy resins and polyimide resins, and silver paste. The transfer pins 21 and 22 are ones on which the coating agent P adheres to the tip surface thereof or the tip portion near the tip surface from the tip surface.

  The transfer pins 21 and 22 can be displaced in the state (position) by the state displacement means 25. As shown in FIG. 4, the state displacing means 25 controls the belt member 26 to which the pair of transfer pins 21 and 22 are attached, a drive mechanism 27 for running the belt member 26, and the drive mechanism 27. And a control means 28 for displacing the first transfer pin 21 and the second transfer pin 22 alternately between a first state and a second state.

  For example, as shown in FIG. 2, the drive mechanism 27 includes a belt drive motor M such as a servo motor, and a transmission mechanism (not shown) that transmits the rotational drive force of the motor M to the belt member 26. Further, this traveling is guided by the linear guide mechanism 30. The linear guide mechanism 30 includes a guide rail 31 and travel blocks 32 a and 32 b that travel along the guide rail 31. The first transfer pin 21 is attached to one traveling block 32a, and the second transfer pin 22 is attached to the other traveling block 32b. The control means 28 consists of a microcomputer etc., for example.

  The belt member 26 is an endless belt, and is arranged in an oval shape as shown in FIGS. 3A and 3B, and traveling blocks 32a and 32b are attached to the inner surfaces of the long sides 26a and 26b, respectively. Has been. In this case, in the state shown in FIG. 3A, the first traveling block 32a is positioned on the one arc side 26c side, and the second traveling block 32b is positioned on the other arc side 26d side. In the state shown in FIG. 3B, the first traveling block 32a is positioned on the other arc side 26d side, and the second traveling block 32b is positioned on the one arc side 26c side.

  The state illustrated in FIG. 3A can be referred to as a first state, and the state illustrated in FIG. 3B can be referred to as a second state. The first state and the second state are alternately displaced. That is, the displacement from the first state to the second state is performed from the state shown in FIG. 3A until the belt member 26 travels in the direction of arrow E to the state shown in FIG. The displacement to the first state travels from the state shown in FIG. 3B until the belt member 26 reaches the state shown in FIG.

  The belt member 26 of this state displacing means is attached to a displacement stage 35 composed of an XYZ stage as shown in FIGS. The displacement stage 35 reciprocates in the X axis direction on the base 36 via the linear guide mechanism 37 and reciprocates in the Y axis direction on the first table 38 via the linear guide mechanism 39. A second table 40 and a third table 43 that reciprocates in the Z-axis direction along the vertical wall 42 of the second table 40 via the linear guide mechanism 41 are provided.

  The linear guide mechanism 37 includes a pair of parallel guide rails 45, 45 extending along the X-axis direction, and traveling bodies 46, 46 that travel on the guide rails 45, 45. Guide rails 45, 45 are disposed on the upper surface of the base 36, and the traveling bodies 46, 46 are connected to the lower surface of the first table 38. Therefore, the first table 38 travels in the X-axis direction as the travel bodies 46 travel along the guide rails 45, 45.

  The linear guide mechanism 39 includes a pair of parallel guide rails 47 and 47 extending along the Y-axis direction, and traveling bodies 48 and 48 that travel on the guide rails 47 and 47. Guide rails 47 and 47 are disposed on the upper surface of the first table 38, and the traveling bodies 48 and 48 are coupled to the lower surface of the second table 40. For this reason, the second table 40 travels in the Y-axis direction as the travel bodies 48 travel along the guide rails 47.

  The linear guide mechanism 41 includes a pair of parallel guide rails 49, 49 extending along the Z-axis direction, and traveling bodies 50, 50 that travel on the guide rails 49, 49. Guide rails 49, 49 are disposed on the surface (outer surface) of the second table 40 on the vertical wall 42, and the traveling bodies 50, 50 are connected to the back surface (inner surface) of the third table 43. For this reason, the third table 43 travels in the Z-axis direction as the travel bodies 50 travel along the guide rails 49. And the guide rails 31 and 31 which guide the travel blocks 32a and 32b are arrange | positioned at the inclination arm 51 of this 3rd table 43. As shown in FIG. For this reason, as shown in FIG. 2, the belt member 26 is disposed to be inclined along the inclined arm 51. As the travel blocks 32a and 32b travel along the guide rails 31 and 31, the belt member 26 can travel along arrows E and F as shown in FIGS.

  By the way, each traveling body 46, 48, 50 may be a self-propelled type or may travel by applying power from another power source. When power from another power source is applied, the power may be applied directly to the traveling bodies 46, 48, 50 or may be applied to the tables 38, 40, 43 by an actuator such as a cylinder mechanism. .

  Thus, the belt member 26 can be displaced in the Z-axis direction, and this Z-axis direction moving means can be constituted by a Z-axis direction moving mechanism of the displacement stage 35 which is an XYZ stage. That is, if the third table 43 moves up and down along the Z-axis direction while being guided by the linear guide mechanism 41, the transfer guides 21 and 22 attached to the belt member 26 move up and down along the axial direction.

  A horizontal table 52 is provided on the vertical wall 42 of the second table 40, and a paste dish 53 on which the coating agent P is stored is disposed on the horizontal table 52. By the way, this paste pan 53 is arranged at a higher position than the application site of the workpiece W to which the coating agent P is to be applied. For this reason, as described above, the belt member 26 is inclined at a predetermined angle with respect to the horizontal plane. That is, in the case of the first state shown in FIG. 3A, the work W in which the first transfer pin 21 is disposed on the paste pan 53 and the second transfer pin 22 is disposed at the application position. Placed on top. In the second state shown in FIG. 3B, the second transfer pin 22 is arranged on the paste pan 53 and the first transfer pin 21 is placed on the workpiece W arranged at the application position. Be placed.

  The horizontal table 52 can be adjusted in the vertical direction by the position adjustment mechanism 55. The position adjustment mechanism 55 includes a linear guide mechanism 56, for example. The linear guide mechanism includes a guide rail 57 extending in the vertical direction and a traveling body 58 that travels on the guide rail 57. A guide rail 57 is attached to the vertical wall 42, and a traveling body 58 is provided on the horizontal table 52.

  For this reason, when the traveling body 58 moves up and down along the guide rail 57, the horizontal table 52 moves up and down, and the paste dish 53 arranged on the horizontal table 52 moves up and down. In addition, as the traveling body 58, even if it is a self-propelled type, it may drive | work by the motive power provision from another power source. Further, a pressing force may be applied to the horizontal table 52 by an actuator such as a cylinder mechanism. The position adjusting mechanism 55 may be configured by a cylinder mechanism, a ball nut mechanism, a piezoelectric actuator, or the like without using the linear guide mechanism as described above. Furthermore, you may comprise with a motor and the cam mechanism etc. which convert the rotational driving force of this motor into a linear motion.

  Next, the coating method of the coating agent P using the apparatus in FIGS. 1 and 2 will be described. The workpiece W is a semiconductor chip, and a plurality of workpieces W are placed on an XY table (not shown). Then, the belt member 26 is moved in the X-axis direction and / or the Y-axis direction via the displacement stage 35, and the second transfer pin 22 is positioned on the workpiece W to which the coating agent P is to be applied.

That is, as the first state shown in FIG. 3A, the first transfer pin 21 is disposed on the paste pan 53 and the second transfer pin 22 is disposed on the workpiece W disposed at the application position. . In this state, the belt member 26 is lowered along the Z-axis direction. This lowering causes the tip of the first transfer pin 21 to be immersed or contacted with the coating agent P of the paste pan 53, and at the same time (if it is attached to the tip of the second transfer pin 22). The transfer pin 22 is transferred and applied to the coated portion (coating agent adhering portion) 20 of the workpiece W. Here, the immersion or contact state means a state where the tip of the transfer pin is immersed in the coating agent or a state where the tip of the transfer pin is in contact with the coating agent, and the coating agent adheres to the tip of the transfer pin. (A state in which the coating agent can adhere to the tip surface of the transfer pin or the tip portion near the tip surface from the tip surface).
The height difference between the coating agent reservoir (the paste dish 53 and the receiving position of the coating agent P) and the portion to be coated 20 of the workpiece W is, for example, about 5 mm. The difference between the lower end of the transfer pin 21 and the coating agent reservoir, and the difference between the lower end of the second transfer pin 22 and the coated portion 20 of the workpiece W are about 5 mm.

  Next, after raising the belt member 26 along the Z-axis direction, the belt member 26 travels in the direction of arrow E from the first state shown in FIG. Is moved in the X-axis direction and / or the Y-axis direction, and the first transfer pin 21 is placed on the next workpiece W to which the coating agent P is to be applied to be in the second state. In other words, in the second state, the second transfer pin 22 is disposed on the paste pan 53 and the first transfer pin 21 is disposed on the workpiece W disposed at the application position. In the second state, the difference between the lower end of the second transfer pin 22 and the coating agent reservoir, and the difference between the lower end of the first transfer pin 21 and the portion to be coated 20 of the workpiece W are each about 5 mm.

  Thereafter, the belt member 26 is lowered along the Z-axis direction. By this descending, the tip of the second transfer pin 22 is immersed or contacted with the coating agent P of the paste pan 53, and at the same time, transferred from the first transfer pin 21 to the coated portion 20 of the workpiece W and coated. Is done.

  Next, the belt member 26 is raised along the Z-axis direction. By this rise, the second state as shown in FIG. Then, from this second state, the belt member 26 is caused to travel in the direction of arrow F, and the belt member 26 is moved in the X-axis direction and / or the Y-axis direction via the displacement stage 35, whereby the second transfer pin 22 is moved. Is placed on the next workpiece W to which the coating agent P is to be applied, and the first state shown in FIG. The amount of movement of the belt member 26 in the direction of arrow F is the same as the amount of movement in the direction of arrow E.

  Thus, after returning to a 1st state, it is made to descend | fall along a Z-axis direction again. By this descending, the tip of the first transfer pin 21 is immersed or contacted with the coating agent P of the paste pan 53, and at the same time, the portion to be coated of the workpiece W (coating agent adhering portion) from the second transfer pin 22. 20 is applied after being transferred.

  Thereafter, the above steps are sequentially repeated, and the coating operation of the coating agent P on all the workpieces W on the XY table is completed. That is, in this coating method, the tip of the first transfer pin 21 is immersed or contacted with a paste-like coating agent, and at the same time, the coating agent P attached to the second transfer pin 22 is applied. The first step of transferring and applying to the part 20 and the tip of the second transfer pin 22 are immersed in or contacted with the paste-like coating agent P, and at the same time the coating agent P is received on the first transfer pin 21 The second step of transferring and applying the adhered coating agent P to the application portion 20 is applied, and the first step and the second step are alternately performed.

  According to the coating apparatus of the present invention, the first state and the second state can be alternately displaced by the state displacement means. In addition, when the first transfer pin 21 corresponds to above the coating agent reservoir (the paste dish 53 and the receiving position of the coating agent P), the second transfer pin 22 is positioned above the coated portion 20. When the second transfer pin 22 corresponds to above the coating agent reservoir (the paste dish 53 and the receiving position of the coating agent P), the first transfer pin 21 is positioned above the coated portion 20. To do. That is, while the coating agent P is received from the coating agent reservoir by one transfer pin 21 (22), the coating agent P can be applied by another transfer pin 22 (21). For this reason, the workability can be improved twice that of the conventional apparatus, and the productivity is excellent. In addition, the overall apparatus can be made compact and the cost can be reduced.

  Since the Z-axis direction moving means for moving the transfer pins 21 and 22 in the Z-axis direction is constituted by the Z-axis direction moving mechanism of the displacement stage 35, the first transfer pin 21 and the second transfer pin 22 can be moved up and down simultaneously, and the movement time can be further shortened.

  A paste tray 53 is attached to the displacement stage 35, specifically to the second table 40 of the displacement stage 35. For this reason, it is possible to prevent the distance between the paste pan 53 and the portion to be coated from becoming large, and it is possible to effectively prevent the movement amount of the transfer pin 21 (22) from being reduced and the movement time from becoming long.

  If the state displacing means 25 includes the belt member 26, the drive mechanism 27, and the control means 28, the first transfer pin 21 and the second transfer pin 22 are alternately set in the first state and the first state. It can be stably displaced in two states, can be stably applied with a simple configuration, and can be configured at low cost.

  Since the receiving position (position in the coating agent reservoir) where the transfer pin 21 (22) receives the paste-like coating agent P is higher than the coating portion 20 to which the coating agent P is transferred, It is possible to position the paste pan on the surface, and the coating agent can be stably applied to the coated portions of all workpieces to which the coating agent is to be transferred.

  Since the belt member 26 of the state displacing means 25 is disposed so as to be inclined with respect to the horizontal plane corresponding to the receiving position and the portion to be coated 20, the first transfer pin 21 and the second transfer pin The length in the vertical direction can be set to be the same as that in the Z-axis, and the stroke in the Z-axis direction can be made the same and small, so that only one Z-axis is required and the cost can be reduced. In particular, in this coating apparatus, the fixed point movement can be achieved by adding the state displacement means 25 including the belt member 26 and the like. For this reason, positioning etc. become easy, the said state displacement means 25 can be comprised with an inexpensive member (belt member etc.), and cost reduction can be achieved.

  The position adjustment mechanism 55 can adjust the vertical position of the paste dish 53. For this reason, if the paste pan 53 is positioned higher, when the transfer pins 21 and 22 corresponding to the paste pan 53 are lowered, the paste pan 53 can be deeply immersed in the coating agent accumulated in the paste pan 53. Further, if the paste plate 53 is positioned at a lower position, when the transfer pin corresponding to the paste plate is lowered, the paste plate 53 is shallowly immersed in the coating agent accumulated in the paste plate 53, or the tips of the transfer pins 21 and 22 are placed. It is possible to make a state in which the upper surface of the coating agent P is only contacted. Moreover, when immersed in the coating agent P deeply, immersion time can be lengthened, and when immersed in the coating agent P shallowly, immersion time can be shortened. For this reason, the application amount of the coating agent P to be attached to the transfer pins 21 and 22 can be adjusted. Further, on the application portion side, the tip of the transfer pins 21 and 22 is in contact with the application portion 20 at the lowest position of the transfer pins 21 and 22, or the transfer pin at the lowest position of the transfer pins 21 and 22. For example, a predetermined minute gap may be formed between the tip of 21 and 22 and the portion to be coated 20 without contacting the portion to be coated 20.

  Thereby, on the paste pan 53 side, the coating amount of the coating agent P to be attached to the transfer pins 21 and 22 depends on the type of the coating agent P to be used, the coating amount of the coating agent P on the portion to be coated, and the like. The height position of the transfer pins 21 and 22 with respect to the coated portion 20 can also be determined on the coated portion side according to the type of coating agent P to be used, the amount of coating agent P applied to the coated portion, and the like. The chip can be mounted with high accuracy.

  In this embodiment, since the belt member 25 is displaced along the Z-axis direction, the vertical movement amounts of the transfer pins 21 and 22 attached to the belt member 25 are the same. In this way, when the vertical movement amount of the pair of transfer pins 21 and 22 is the same, by adjusting the height position of the paste pan 53, “deeply immersed in the coating agent P or shallowly immersed in the coating agent P”. The transfer pins 21 and 22 can be stably in contact with the top surface of the coating agent P, and the transfer pins 21 and 22 can be used to adjust the amount of the coating agent applied to the application portion. Can be performed with high accuracy.

  Further, since the belt member 25 is displaced along the Z-axis direction, the vertical movements of the transfer pins 21 and 22 attached to the belt member 25 are synchronized. In this way, by synchronizing the vertical movement of the pair of transfer pins 21 and 22, the reception of the coating agent P by one transfer pin 21 and 22 and the application by the other transfer pin 21 and 22 are stably and simultaneously performed. It is possible to improve productivity.

  5 and 6 show another embodiment. In this case, the belt member 26 is horizontally arranged as shown in FIG. For this reason, the first transfer pin 21 and the second transfer pin 22 can reciprocate independently in the Z-axis direction.

  The displacement stage 35 is composed of an XY stage. That is, in the XYZ stage shown in FIG. 1, instead of the linear guide mechanism 41, the third table 43, and the like, the support substrate 60 and the like are arranged. A guide plate 63 on which the guide rails 31 and 31 are arranged is connected to the support substrate 60.

  The travel blocks 32a and 32b are supported by pin support blocks 61 and 62, respectively, and the transfer pins 21 and 22 are supported by the pin support blocks 61 and 62, respectively. The transfer pins 21 and 22 reciprocate along the Z-axis direction via a moving mechanism including linear motors 65a and 65b such as VCM, for example. Also. The moving mechanism is controlled by control means (not shown) composed of a microcomputer or the like.

  Further, the pin support blocks 61 and 62 are attached to the belt member 26 as in the case shown in FIG. The belt member 26 in this case is disposed along the horizontal direction as shown in FIG. A pin support block 61 is attached to the belt member 26 instead of the first travel block 32a, and a pin support block 62 is attached to the belt member 26 instead of the second travel block 32b. For this reason, even in this embodiment, the first transfer pin 21 corresponds to above the coating agent reservoir where the paste-like coating agent P is stored, and the second transfer pin 22 is above the coated portion 20. And the second transfer pin 22 corresponds to the upper part of the coating agent reservoir where the paste-like coating agent P is stored, and the first transfer pin 21 corresponds to the upper part of the coated part 20. It can be displaced alternately to the second state.

  Next, a coating method using the coating apparatus shown in FIGS. 5 and 6 will be described. Also in this case, the first transfer pin 21 and the second transfer pin 22 are set to the first state. That is, the first transfer pin 21 is arranged on the paste pan 53 and the second transfer pin 22 is arranged on the workpiece W arranged at the application position.

  In this first state, the first transfer pin 21 and the second transfer pin 22 are lowered along the Z-axis direction, respectively. At this time, the lowering amount of the first transfer pin 21 is an amount by which the tip of the transfer pin 21 is immersed or in contact with the coating agent P and the coating agent P can be received. The lowering amount of the second transfer pin 22 is an amount by which the coating agent P adhering to the tip of the transfer pin 22 can transfer the coating agent P to the coated portion 20.

  As a result, the first transfer pin 21 receives the coating agent P from the paste pan 53, and the second transfer pin 22 can transfer the coating agent P to the coated portion 20 of the workpiece W. Thereafter, the transfer pins 21 and 22 are raised to return to the first state. In this case, it is necessary to raise the transfer pins 21 and 22 so that they do not come into contact with the paste pan 53 or the like as the belt member 26 travels. Next, the belt member 26 is caused to travel from the first state, and the belt member 26 is moved in the X axis direction and / or the Y axis direction via the displacement stage 35 to be in the second state. That is, the second transfer pin 22 is disposed on the paste dish 53, and the first transfer pin 21 is disposed on the workpiece W disposed at the application position.

  In this state, the transfer pins 21 and 22 are lowered along the Z-axis direction. At this time, the lowering amount of the second transfer pin 22 is an amount by which the tip of the transfer pin 22 is immersed or in contact with the coating agent P and the coating agent P can be received. The lowering amount of the first transfer pin 21 is an amount by which the coating agent P adhering to the tip of the transfer pin 21 can transfer the coating agent P to the coated portion 20.

  As described above, even in this coating apparatus, the tip of the first transfer pin 21 is immersed in or contacted with the paste-like coating agent, and at the same time, the coating agent P is attached to the second transfer pin 22. At the same time as receiving the coating agent P by transferring the coating agent P to the coated portion 20 and applying the coating agent P with the tip of the second transfer pin 22 immersed or contacted with the paste-like coating agent P, This second step of transferring and applying the coating agent P adhering to one transfer pin 21 to the portion to be coated 20 is performed alternately. Thereafter, the above steps are sequentially repeated, and the coating operation of the coating agent P on all the workpieces W on the XY table is completed.

  For this reason, even with the coating apparatus shown in FIGS. 5 and 6, the workability can be improved twice that of the conventional apparatus, and the productivity is excellent. In addition, the overall apparatus can be made compact and the cost can be reduced. In particular, if the transfer pins 21 and 22 can be displaced independently in the Z-axis direction, the height positions of the coating agent reservoir (paste dish 53) and the coated portion 20 are different. Even so, the transfer pins 21 and 22 can be moved up and down so as to correspond to these height positions, and height adjustment at the lowest point for each transfer pin 21 and 22 can be easily performed. it can. Furthermore, the transfer pins 21 and 22 can be immersed deeply or shallowly in the coating agent P on the base plate 53 side, and the transfer pins 21 and 22 can be applied to the application part 20 on the application part 20 side. For example, a minute gap may be formed between the portions to be coated 20 without contact.

  For this reason, if each transfer pin 21 and 22 is moved up and down independently along the Z-axis direction, the vertical movement along the Z-axis direction of the paste plate 53 via the position adjusting mechanism 55 is not required. . However, in the case where the transfer pins 21 and 22 move up and down independently, in order to move the transfer pins 21 and 22 up and down, as described above, a moving mechanism equipped with a motor or the like is required, respectively. The 21 and 22 sides are enlarged and the weight is increased. On the other hand, if the paste pan 53 is moved up and down without the transfer pins 21 and 22 being able to move up and down independently, the transfer pins 21 and 22 can be made compact and lightweight. Can be achieved.

  However, if each of the transfer pins 21 and 22 independently moves up and down along the Z-axis direction, the belt member 26 and the like need not be inclined. The paste pan 53 may be moved up and down along the Z-axis direction.

  By the way, in the said embodiment, the belt member 26 is moved to the X-axis direction and / or Y-axis direction via the displacement stage 35, and the transfer pin 21 (22) is arrange | positioned on the workpiece | work with which the coating agent P is apply | coated. The table on which the workpiece W is placed is moved in the X-axis direction and / or the Y-axis direction, and the transfer pin 21 (22) is placed on the workpiece to which the coating agent P is applied. It may be.

  In each of the above-described embodiments, when changing from the first state to the second state, or when changing from the second state to the first state, the transfer pins 21 and 22 are as shown in FIG. The movement is performed in a state that is separated by a predetermined interval in a direction orthogonal to the moving direction. Therefore, when transferring with the first transfer pin 21 and when transferring with the second transfer pin 22, it is necessary to displace the transfer pins 21 and 22 in a direction to absorb this deviation.

  Accordingly, the state displacing means 25 shown in FIGS. 7 to 9 is configured so that the movement trajectories L1 and L2 of the pair of transfer pins 21 and 22 have a square shape in plan view. In the state where the transfer pins 21 and 22 are located above the application portion 20, the transfer pins 21 and 22 are positioned on the intersection O of the movement loci L1 and L2.

  The state displacing means 25 includes support arms 71 and 72 that support the pair of transfer pins 21 and 22, respectively, and arm guide mechanisms 73 and 74 that guide the movement of the support arms 71 and 72 along the movement trajectories L1 and L2. When the one (first) support arm 71 moves from the coating agent reservoir (paste dish) side to the application part side, the other (second) support arm 72 moves from the application part side to the application agent reservoir part. The arm guide is moved so that when one support arm 71 moves from the coated part side to the coating agent reservoir part side, the other supporting arm 72 moves from the coating agent reservoir part side to the coated part side. And an arm control mechanism 75 for controlling the mechanisms 73 and 74.

  The arm guide mechanisms 73, 74 include guide rails 80, 80 provided on the inclined side surfaces 78, 78 of the base 77 and travel blocks 81, 81 that travel along the guide rails 80, 80. Support arms 71 and 72 are fixed to 81 via support bodies 82 and 82.

  The base 77 includes a base end first portion 77a and a tip side second portion 77a extending from the base end first portion 77a. The side surfaces of the tip side second portion 77a form the inclined side surfaces 78 and 78. The base 77 is inclined downward from the proximal end side toward the distal end side (see FIG. 8). Further, the inclined side surfaces 78, 78 are inclined so as to approach sequentially from the proximal end side toward the distal end side. In addition, illustration of the support arms 71 and 72 is abbreviate | omitted in FIG.

  For this reason, the guide rails 80, 80 provided on the inclined side surfaces are also arranged so as to approach sequentially from the proximal end side toward the distal end side. Therefore, the support arms 71 and 72 attached to the travel blocks 81 and 81 that travel along the guide rails 80 and 80 slide while being guided by the guide rails 80 and 80. Transfer pins 21 and 22 are attached to transfer pin support portions 83 and 83 at the tips of the support arms 71 and 72, respectively. As a result, the transfer pins 21 and 22 move along the movement loci L1 and L2 as the support arms 71 and 72 travel. The base 77 is inclined downward from the proximal end side toward the distal end side, but the support arms 71 and 72 extend in the horizontal direction as shown in FIG.

  The arm control mechanism 75 includes a drive motor (not shown) disposed on the back surface side of the base first portion 77a of the base 77 and a swing disposed on the surface side of the base first portion 77a of the base 77. A support body 86a for connecting the bar 85, one end of the swing bar 85 and the support 82 of the one support arm 71, and a support body of the other end of the swing bar 85 and the other support arm 72. And a connecting body 86b for connecting the terminal 82 to the terminal 82.

  The drive shaft of the drive motor is connected to the central portion 87 of the swing bar 85. Further, a portion between the center portion 87 and one end portion of the swing bar 85 and one support body 82 are connected by a spring 88a as indicated by a virtual line, and the center portion 87 of the swing bar 85 is connected. And the other support 82 are connected by a spring 88b as indicated by phantom lines. The spring 88a is disposed higher than the coupling body 86a, and the spring 88b is disposed higher than the coupling body 86b.

  Further, as shown in FIG. 7C, a paste dish 53 is disposed below the tip side of the tip second portion 77 b of the base 77. The paste dish 53 may be attached to the vertical wall 42 (see FIG. 1 and the like) of the second table 40 as in the above embodiment.

  As shown in FIG. 7A from the neutral state shown in FIG. 7B (the state in which the swing bar 85 is arranged along the direction orthogonal to the longitudinal direction of the base 77) by the drive motor. When the swing bar 85 is rotated in the direction of the arrow H1, the support body 82 of the other support arm 72 is pulled toward the base end side by the connecting body 86b, and the support body 71 supports the one support arm 71 by the connecting body 86a. The body 82 is pressed toward the tip side. As a result, the transfer pin 21 attached to the support arm 71 moves from the coating agent reservoir side (paste dish side) to the coated portion side along the movement locus L1. At this time, the transfer pin 21 stops at a position corresponding to the intersection O between the movement locus L1 and the movement locus L2. Further, the transfer pin 22 attached to the support arm 72 moves from the coated portion side to the coating agent reservoir portion side (paste dish side) along the movement locus L2. At this time, the transfer pin 22 stops at a position corresponding to the paste pan 53.

  When rotating from the state shown in FIG. 7B in the direction of the arrow H2 as shown in FIG. 7C, the support body 82 of one support arm 71 is pulled to the proximal end side by the connecting body 86a, and The support body 82 of the other support arm 72 is pressed toward the distal end side by the connecting body 86b. As a result, the transfer pin 22 attached to the support arm 72 moves from the coating agent reservoir side (paste dish side) to the coated portion side along the movement locus L2. At this time, the transfer pin 22 stops at a position corresponding to the intersection O between the movement locus L2 and the movement locus L2. Further, the transfer pin 21 attached to the support arm 71 moves along the movement locus L1 from the coated portion side to the coating agent reservoir portion side (paste dish side). At this time, the transfer pin 21 stops at a position corresponding to the paste pan 53. The base 77 can be moved up and down in the Z-axis direction via a linear guide mechanism 41 as shown in FIG.

  Note that the movement of the support arms 71 and 72 along the movement loci L1 and L2 does not require that the entire support arms 71 and 72 move on the movement loci L1 and L2, and at least the transfer pin support portion at the tip end. It is only necessary that 83 moves on the movement trajectories L1 and L2.

  Even the apparatus provided with the state displacement means 25 shown in FIGS. 7 to 9 can perform the same transfer operation as the apparatus provided with the state displacement means 25 shown in FIG. That is, in the state shown in FIG. 7C, the first transfer pin 21 corresponds to the upper part of the coating agent reservoir (paste dish 53) and the second transfer pin 22 corresponds to the upper part of the application part. 7A, the second transfer pin 22 corresponds to the upper part of the coating agent reservoir (paste dish 53) and the first transfer pin 21 is the portion to be coated. It will be in the 2nd state corresponding to above.

  When the base 77 is lowered in the first state, the tip of the first transfer pin 21 becomes contact or dipped in the paste (coating agent P) of the paste pan 53, and the paste (coating agent) P The paste (coating agent) P can be transferred to the coated portion 20 by the second transfer pin 22. In the second state, the tip of the second transfer pin 22 is contacted or immersed in the paste (coating agent P) of the paste pan 53, and can receive the paste (coating agent P). The first transfer pin 21 can transfer the paste (coating agent P) to the coated portion 20. The position of the second transfer pin 22 in the first state and the position of the first transfer pin 21 in the second state are both on the intersection point O of the movement loci L1 and L2, and are the same.

  Therefore, when the pair of transfer pins 21 and 22 each have a C-shaped movement trajectory in plan view, even if the transfer is performed by the first transfer pin 21, the transfer is performed by the second transfer pin 22. Even in this case, the transfer can be performed to the same part, the transfer operation can be stabilized, and high transfer accuracy can be achieved. In addition, it is not necessary to adjust the transfer pins 21 and 22 in the X direction and the Y direction even when the first pin is displaced from the first state to the second state. Excellent.

  Also in this case, the paste pan 53 moves up and down along the Z-axis direction, and the amount of the coating agent P to be used and the amount of the coating agent P to the portion to be coated 20 is the same as the coating device shown in FIG. The coating agent P can be applied with high accuracy according to the above.

  By the way, in what is shown in FIGS. 7-9, as shown in FIG. 8, the leveling member 90 which equalizes the upper surface of the coating agent P of the paste dish 53 to planar shape is provided. The paste dish 53 includes a bottom wall 53a, a peripheral wall 53b disposed along the outer periphery of the bottom wall 53a, and a shaft portion 53c at the center of the bottom wall 53a. Then, the base plate 53 rotates around the shaft portion 53c via a driving unit (not shown). The leveling member 90 is made of a flat plate, and is disposed corresponding to the ring-shaped paste reservoir between the peripheral wall 53b and the shaft portion 53c, and the paste tray 53 rotates around the shaft portion 53c. The lower end edge 90a of the leveling member 90 comes into contact with the upper surface of the coating agent in the ring-shaped paste reservoir, and the upper surface of the coating agent P formed by dipping the transfer pins 21 and 22 is leveled. The top surface of the lever can be flat.

  In this case, conversely, the paste plate 53 may be fixed and the leveling member 90 may be rotated. In any case, when the coating agent P is received from the paste dish 53 by the transfer pins 21 and 22, it is necessary to arrange the leveling member 90 so as not to become an obstacle. For this reason, the leveling member 90 may be movable. In addition, since the amount of the coating agent P in the ring-shaped paste reservoir varies, it is preferable to move up and down.

  As described above, if the leveling member 90 is provided, the upper surface of the coating agent P is leveled, so that the transfer pin 21 and 22 can stably receive the coating agent P from the paste dish 53, and the Accurate application work is possible.

  As described above, the embodiment of the present invention has been described. However, the present invention is not limited to the above-described embodiment, and various modifications are possible. For example, the state displacement means 25 can be linked without using the belt member 26. A mechanism or the like may be used. In the embodiment, the traveling of the belt member 26 is a reciprocating traveling, but may be a rotational traveling in one direction. In the above embodiment, the motor is used as the driving mechanism 27 for the belt member 26. However, various existing mechanisms (actuators) such as a solenoid mechanism and a cylinder mechanism can be used.

  As shown in FIG. 1 and the like, when the belt member 26 as a whole moves up and down in the Z-axis direction, the transfer pins 21 and 22 themselves do not need to move up and down. The transfer pins 21 and 22 may be set so that they can slightly escape in the Z-axis direction.

  Further, as shown in FIG. 5 or the like, a cylinder mechanism, a ball screw mechanism, or the like may be used as a moving mechanism that moves the transfer pins 21 and 22 up and down independently in the Z-axis direction.

  When the transfer pin 21 (22) is made to correspond to the coated portion of the workpiece W, the belt member 26 is moved in the X-axis direction and / or Y-axis direction and the belt member 26 is moved in the direction of arrow E (F) at the same time. However, the belt 26 may travel in the direction of arrow E (F) after moving in the X-axis direction and / or the Y-axis direction, or the belt 26 may travel in the direction of arrow E (F). The movement in the direction and / or the Y-axis direction may be performed.

  The height difference between the coating agent reservoir and the coated portion 20 of the workpiece W can be variously set within a range in which the horizontal table 52 supporting the paste dish 53 can pass over the table on which the workpiece W is placed. In addition, you may not have such a height difference. In addition, as shown in FIG. 1 and the like, when the belt pin 26 is lowered and the transfer pin 21 (22) is lowered, the lower end of the transfer pin 21 (22) is stored as a coating agent reservoir. Various changes can be made within a range in which the coating agent P can be transferred to the coated portion 20 of the workpiece W by being immersed or contacted with the portion.

  The transfer pin 21 (22) has a diameter, material, and the like that are immersed in or in contact with the coating agent reservoir, and can receive the coating agent P and adhere to the coated portion 20. Various changes can be made as long as the coating agent P can be transferred. Further, the shape of the tip surface of the transfer pin 21 (22) may be a flat surface or an uneven portion. The displacement speed from the first state to the second state, the displacement speed from the second state to the first state, etc. are within the range where the coating agent P adhering to the transfer pin 21 (22) is not scattered. Various changes can be made based on the material, the amount of coating P applied, the material, shape, size, etc. of the transfer pin 21 (22).

  In the apparatus shown in FIGS. 7 to 9, the support arms 71 and 72 are displaced by using a link mechanism (link mechanism including a swing bar 85 and coupling bodies 86a and 86b), a driving motor, and the like. However, the support arms 71 and 72 may be displaced without using such a link mechanism or the like. That is, the support arms 71 and 72 may be moved along the movement trajectories L1 and L2 using a cylinder mechanism or a ball screw mechanism.

  Also in the apparatus shown in FIGS. 7 to 9, as shown in FIGS. 5 and 6, the transfer pins 21 and 22 may be moved up and down independently. If set in this way, the transfer operation of the coating agent P from the paste dish and the coating operation of the coating agent to the portion to be coated 20 can be stably performed, and the base 77 needs to be inclined with respect to the horizontal plane. Absent. Further, even in the apparatus shown in FIGS. 1 and 5, the leveling member 90 may be disposed.

  As the state displacing means 25, a transfer pin may be arranged on the rotating body at a position 180 degrees opposite to the rotation axis of the rotating body.

21, 22 Transfer pin 53 Paste plate 55 Position adjustment mechanism P Coating agent

Claims (5)

A pair of transfer pins that receive the coating agent with the lower end immersed in or contacted with the coating agent in the coating agent reservoir where the paste-like coating agent is stored, and transfer the received coating agent to the coated portion, one transfer At the same time that the coating agent is received by the pin, the coating agent is transferred from the other transfer pin to the coated portion, and at the same time the coating agent is received by the other transfer pin, the coating agent is transferred from the one transfer pin to the coated portion. And a transfer device in which the transfer pin descends in the vertical direction when receiving the coating agent and transferring the coating agent,
Provided with a moving mechanism that moves one transfer pin and another moving mechanism that moves the other transfer pin, one transfer pin and the other transfer pin move up and down independently,
An applicator comprising: a paste pan that constitutes a coating agent reservoir in which the coating agent is stored; and a position adjusting mechanism that adjusts a vertical position of the paste pan. The coating apparatus according to claim 1, wherein the amount of vertical movement of the pair of transfer pins is the same. The coating apparatus according to claim 1, wherein the vertical movement of the pair of transfer pins is synchronized. The coating apparatus according to any one of claims 1 to 3, further comprising a leveling member for leveling an upper surface of the coating agent of the paste dish in a flat shape. A state displacing unit that enables displacement of the position of the pair of transfer pins is provided. The state displacing unit includes a belt member to which the pair of transfer pins are attached, a drive mechanism that causes the belt member to travel, and the drive mechanism. The coating apparatus according to claim 1, further comprising a control unit that controls

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