TWI513769B - 可加工之無機及有機聚合物調配物、其製造方法及用途 - Google Patents
可加工之無機及有機聚合物調配物、其製造方法及用途 Download PDFInfo
- Publication number
- TWI513769B TWI513769B TW103122550A TW103122550A TWI513769B TW I513769 B TWI513769 B TW I513769B TW 103122550 A TW103122550 A TW 103122550A TW 103122550 A TW103122550 A TW 103122550A TW I513769 B TWI513769 B TW I513769B
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- Prior art keywords
- acid
- polymer
- polymer composition
- film
- formulation
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3442—Heterocyclic compounds having nitrogen in the ring having two nitrogen atoms in the ring
- C08K5/3445—Five-membered rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/045—Polysiloxanes containing less than 25 silicon atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
- C08L61/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2361/00—Characterised by the use of condensation polymers of aldehydes or ketones; Derivatives of such polymers
- C08J2361/04—Condensation polymers of aldehydes or ketones with phenols only
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2383/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
- C08J2383/04—Polysiloxanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Materials For Photolithography (AREA)
- Formation Of Insulating Films (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3132808P | 2008-02-25 | 2008-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201506088A TW201506088A (zh) | 2015-02-16 |
| TWI513769B true TWI513769B (zh) | 2015-12-21 |
Family
ID=41016679
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103122550A TWI513769B (zh) | 2008-02-25 | 2009-02-24 | 可加工之無機及有機聚合物調配物、其製造方法及用途 |
| TW098105833A TWI454508B (zh) | 2008-02-25 | 2009-02-24 | 可加工之無機及有機聚合物調配物、其製造方法及用途 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098105833A TWI454508B (zh) | 2008-02-25 | 2009-02-24 | 可加工之無機及有機聚合物調配物、其製造方法及用途 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8859673B2 (https=) |
| EP (1) | EP2247665A2 (https=) |
| JP (2) | JP5378420B2 (https=) |
| KR (1) | KR101546222B1 (https=) |
| TW (2) | TWI513769B (https=) |
| WO (1) | WO2009108574A2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009108574A2 (en) * | 2008-02-25 | 2009-09-03 | Honeywell International Inc. | Processable inorganic and organic polymer formulations, methods of production and uses thereof |
| DE102010039298B4 (de) | 2010-08-13 | 2022-11-10 | Robert Bosch Gmbh | Verfahren zum Füllen von Hohlräumen in Wafern |
| BR112013010024A2 (pt) | 2010-10-27 | 2016-08-02 | Kraft Foods Global Brands Llc | embalagem para acomodar produto a qual pode ser fechada de forma magnética |
| US8623447B2 (en) * | 2010-12-01 | 2014-01-07 | Xerox Corporation | Method for coating dielectric composition for fabricating thin-film transistors |
| GB201105364D0 (en) | 2011-03-30 | 2011-05-11 | Cambridge Display Tech Ltd | Surface planarisation |
| KR101550092B1 (ko) * | 2012-05-21 | 2015-09-03 | (주)엘지하우시스 | 하이브리드 언더코팅층을 갖는 투명 도전성 필름 및 이의 제조방법, 이를 이용한 터치패널 |
| JP6279878B2 (ja) * | 2013-10-31 | 2018-02-14 | 東京応化工業株式会社 | 太陽電池の製造方法 |
| JP6803842B2 (ja) | 2015-04-13 | 2020-12-23 | ハネウェル・インターナショナル・インコーポレーテッドHoneywell International Inc. | オプトエレクトロニクス用途のためのポリシロキサン製剤及びコーティング |
| US10381481B1 (en) | 2018-04-27 | 2019-08-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multi-layer photoresist |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200510937A (en) * | 2003-06-03 | 2005-03-16 | Shinetsu Chemical Co | Antireflective film material, and antireflective film and pattern formation method using the same |
| JP2007137944A (ja) * | 2005-11-15 | 2007-06-07 | Fujifilm Corp | 硬化性樹脂組成物、硬化膜、反射防止フィルム、偏光板、及び表示装置 |
| WO2007146353A2 (en) * | 2006-06-14 | 2007-12-21 | E. I. Du Pont De Nemours And Company | Coated substrate having enhanced scratch and mar resistance |
Family Cites Families (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA586038A (en) | 1956-03-26 | 1959-10-27 | General Electric Company | Organopolysiloxane resins |
| US3547766A (en) | 1966-11-25 | 1970-12-15 | Du Pont | Laminated article |
| JPS5125070B2 (https=) | 1972-07-11 | 1976-07-28 | ||
| US4107133A (en) | 1974-01-14 | 1978-08-15 | Dainippon Ink & Chemicals, Inc. | Colored polyethylene molding compositions |
| GB1604414A (en) | 1977-07-27 | 1981-12-09 | Raychem Ltd | Silicone resin |
| US4302503A (en) | 1978-05-17 | 1981-11-24 | Libbey-Owens-Ford Company | Architectural spandrel |
| DE3166592D1 (en) * | 1980-07-14 | 1984-11-15 | Akzo Nv | Thermosetting coating composition containing a blocked acid catalyst |
| US4590117A (en) | 1983-03-10 | 1986-05-20 | Toray Industries, Inc. | Transparent material having antireflective coating |
| US4839427A (en) * | 1987-09-03 | 1989-06-13 | Monsanto Company | Resin systems cured with blocked acid catalysts |
| JP2603291B2 (ja) | 1988-04-19 | 1997-04-23 | 東芝シリコーン株式会社 | 第4級アンモニウム基含有シリコーン樹脂微粉末 |
| JP2517785B2 (ja) | 1990-08-02 | 1996-07-24 | 信越化学工業株式会社 | 含浸性防水剤組成物 |
| US5082758A (en) | 1990-08-31 | 1992-01-21 | Xerox Corporation | Toner and developer compositions with charge enhancing additives |
| JP2712817B2 (ja) | 1990-11-15 | 1998-02-16 | 信越化学工業株式会社 | ポリオルガノシロキサン樹脂の製造方法 |
| JPH0597478A (ja) | 1991-10-04 | 1993-04-20 | Nippon Sheet Glass Co Ltd | 撥水性ガラス物品およびその製造方法 |
| JP2704175B2 (ja) | 1992-11-25 | 1998-01-26 | 株式会社アメックス協販 | 瓦パネル |
| US5460911A (en) | 1994-03-14 | 1995-10-24 | Xerox Corporation | Electrophotographic imaging member free of reflection interference |
| EP0768352A4 (en) | 1994-06-30 | 1997-12-10 | Hitachi Chemical Co Ltd | MATERIAL FOR PRODUCING A SOLICA-COVERED INSULATING FILM, METHOD FOR PRODUCING THIS MATERIAL, SILICO INSULATING FILM, SEMICONDUCTOR COMPONENT AND METHOD FOR THE PRODUCTION THEREOF |
| US5858547A (en) | 1994-07-06 | 1999-01-12 | Alliedsignal, Inc. | Novolac polymer planarization films for microelectronic structures |
| JP3637723B2 (ja) * | 1997-03-12 | 2005-04-13 | Jsr株式会社 | ネガ型感放射線性樹脂組成物 |
| US7361444B1 (en) | 1998-02-23 | 2008-04-22 | International Business Machines Corporation | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof |
| US20010006759A1 (en) * | 1998-09-08 | 2001-07-05 | Charles R. Shipley Jr. | Radiation sensitive compositions |
| US6410209B1 (en) | 1998-09-15 | 2002-06-25 | Shipley Company, L.L.C. | Methods utilizing antireflective coating compositions with exposure under 200 nm |
| US6210856B1 (en) | 1999-01-27 | 2001-04-03 | International Business Machines Corporation | Resist composition and process of forming a patterned resist layer on a substrate |
| US6316165B1 (en) | 1999-03-08 | 2001-11-13 | Shipley Company, L.L.C. | Planarizing antireflective coating compositions |
| US6268457B1 (en) | 1999-06-10 | 2001-07-31 | Allied Signal, Inc. | Spin-on glass anti-reflective coatings for photolithography |
| US6890448B2 (en) | 1999-06-11 | 2005-05-10 | Shipley Company, L.L.C. | Antireflective hard mask compositions |
| JP4248098B2 (ja) | 1999-09-20 | 2009-04-02 | 東京応化工業株式会社 | 反射防止膜形成用組成物及びレジストパターンの形成方法 |
| JP4257480B2 (ja) * | 1999-09-29 | 2009-04-22 | 信越化学工業株式会社 | 高分子化合物、化学増幅レジスト材料及びパターン形成方法 |
| US6461717B1 (en) | 2000-04-24 | 2002-10-08 | Shipley Company, L.L.C. | Aperture fill |
| US6891237B1 (en) | 2000-06-27 | 2005-05-10 | Lucent Technologies Inc. | Organic semiconductor device having an active dielectric layer comprising silsesquioxanes |
| JP3772077B2 (ja) | 2000-09-27 | 2006-05-10 | 株式会社東芝 | パターン形成方法 |
| JP4029556B2 (ja) | 2000-11-01 | 2008-01-09 | Jsr株式会社 | 感光性絶縁樹脂組成物およびその硬化物 |
| US6602552B1 (en) | 2000-11-14 | 2003-08-05 | Basf Corporation | Low temperature cure coating composition and method therefore |
| US6573328B2 (en) | 2001-01-03 | 2003-06-03 | Loctite Corporation | Low temperature, fast curing silicone compositions |
| JP4401033B2 (ja) * | 2001-03-19 | 2010-01-20 | Azエレクトロニックマテリアルズ株式会社 | ネガ型感光性樹脂組成物及びこれを用いた表示デバイス |
| JP2003025510A (ja) | 2001-07-16 | 2003-01-29 | Shin Etsu Chem Co Ltd | 反射防止性及び耐擦傷性を有する多層積層体 |
| TW591341B (en) | 2001-09-26 | 2004-06-11 | Shipley Co Llc | Coating compositions for use with an overcoated photoresist |
| JP3918942B2 (ja) | 2001-10-10 | 2007-05-23 | 日産化学工業株式会社 | リソグラフィー用反射防止膜形成組成物 |
| DE10151264A1 (de) | 2001-10-17 | 2003-04-30 | Degussa | Aminoalkylalkoxysiloxanhaltige Gemische, deren Herstellung und deren Verwendung |
| AU2002359387A1 (en) | 2001-11-15 | 2003-06-10 | Honeywell International Inc. | Anti-reflective coatings for photolithography and methods of preparation thereof |
| KR100818678B1 (ko) | 2001-11-16 | 2008-04-01 | 허니웰 인터내셔널 인코포레이티드 | 포토리소그라피용 스핀온 유리 반사 방지 피막 |
| CN100336137C (zh) | 2002-01-28 | 2007-09-05 | 捷时雅株式会社 | 形成电介体的光敏组合物以及利用该组合物的电介体 |
| US20030214042A1 (en) | 2002-02-01 | 2003-11-20 | Seiko Epson Corporation | Circuit substrate, electro-optical device and electronic appliances |
| CN100410808C (zh) * | 2002-03-04 | 2008-08-13 | 希普雷公司 | 用于短波长成像的负性光致抗蚀剂 |
| WO2004037866A2 (en) * | 2002-10-21 | 2004-05-06 | Shipley Company L.L.C. | Photoresists containing sulfonamide component |
| KR20040044368A (ko) * | 2002-11-20 | 2004-05-28 | 쉬플리 캄파니, 엘.엘.씨. | 다층 포토레지스트 시스템 |
| EP1422565A3 (en) * | 2002-11-20 | 2005-01-05 | Shipley Company LLC | Multilayer photoresist systems |
| MXPA06001305A (es) | 2003-08-04 | 2006-05-04 | Ciba Sc Holding Ag | Proceso para la produccion de recubrimientos fuertemente adherentes. |
| US7303855B2 (en) | 2003-10-03 | 2007-12-04 | Shin-Etsu Chemical Co., Ltd. | Photoresist undercoat-forming material and patterning process |
| US7270931B2 (en) | 2003-10-06 | 2007-09-18 | International Business Machines Corporation | Silicon-containing compositions for spin-on ARC/hardmask materials |
| TWI360726B (en) | 2003-10-30 | 2012-03-21 | Nissan Chemical Ind Ltd | Sublayer coating-forming composition containing de |
| US8053159B2 (en) | 2003-11-18 | 2011-11-08 | Honeywell International Inc. | Antireflective coatings for via fill and photolithography applications and methods of preparation thereof |
| TWI367686B (en) | 2004-04-07 | 2012-07-01 | Semiconductor Energy Lab | Light emitting device, electronic device, and television device |
| CN100503756C (zh) | 2004-05-18 | 2009-06-24 | 罗姆及海斯电子材料有限公司 | 与上涂光致抗蚀剂一起使用的涂料组合物 |
| US7015061B2 (en) | 2004-08-03 | 2006-03-21 | Honeywell International Inc. | Low temperature curable materials for optical applications |
| EP1813987B1 (en) | 2004-11-01 | 2011-08-24 | Nissan Chemical Industries, Ltd. | Sulfonic-ester-containing composition for formation of antireflection film for lithography |
| KR100938065B1 (ko) | 2005-03-11 | 2010-01-21 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 포토레지스트 하층막 형성 재료 및 패턴 형성 방법 |
| US7326442B2 (en) | 2005-07-14 | 2008-02-05 | International Business Machines Corporation | Antireflective composition and process of making a lithographic structure |
| JP2007056108A (ja) * | 2005-08-23 | 2007-03-08 | Jsr Corp | 感光性絶縁樹脂組成物およびその硬化物 |
| US20070197727A1 (en) | 2006-02-16 | 2007-08-23 | Laura Ann Lewin | Multi component coating composition |
| WO2009108574A2 (en) * | 2008-02-25 | 2009-09-03 | Honeywell International Inc. | Processable inorganic and organic polymer formulations, methods of production and uses thereof |
-
2009
- 2009-02-20 WO PCT/US2009/034655 patent/WO2009108574A2/en not_active Ceased
- 2009-02-20 US US12/866,568 patent/US8859673B2/en active Active
- 2009-02-20 EP EP09715080A patent/EP2247665A2/en not_active Withdrawn
- 2009-02-20 JP JP2010547789A patent/JP5378420B2/ja active Active
- 2009-02-20 KR KR1020107021429A patent/KR101546222B1/ko active Active
- 2009-02-24 TW TW103122550A patent/TWI513769B/zh active
- 2009-02-24 TW TW098105833A patent/TWI454508B/zh active
-
2013
- 2013-07-29 JP JP2013157160A patent/JP5702837B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200510937A (en) * | 2003-06-03 | 2005-03-16 | Shinetsu Chemical Co | Antireflective film material, and antireflective film and pattern formation method using the same |
| JP2007137944A (ja) * | 2005-11-15 | 2007-06-07 | Fujifilm Corp | 硬化性樹脂組成物、硬化膜、反射防止フィルム、偏光板、及び表示装置 |
| WO2007146353A2 (en) * | 2006-06-14 | 2007-12-21 | E. I. Du Pont De Nemours And Company | Coated substrate having enhanced scratch and mar resistance |
Also Published As
| Publication number | Publication date |
|---|---|
| US8859673B2 (en) | 2014-10-14 |
| EP2247665A2 (en) | 2010-11-10 |
| TW200940610A (en) | 2009-10-01 |
| JP5378420B2 (ja) | 2013-12-25 |
| KR101546222B1 (ko) | 2015-08-20 |
| JP2011513514A (ja) | 2011-04-28 |
| KR20100126764A (ko) | 2010-12-02 |
| US20110054119A1 (en) | 2011-03-03 |
| JP2013241617A (ja) | 2013-12-05 |
| WO2009108574A3 (en) | 2009-12-10 |
| TWI454508B (zh) | 2014-10-01 |
| JP5702837B2 (ja) | 2015-04-15 |
| TW201506088A (zh) | 2015-02-16 |
| WO2009108574A2 (en) | 2009-09-03 |
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