TWI512240B - 三氯矽烷汽化系統 - Google Patents

三氯矽烷汽化系統 Download PDF

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Publication number
TWI512240B
TWI512240B TW100120069A TW100120069A TWI512240B TW I512240 B TWI512240 B TW I512240B TW 100120069 A TW100120069 A TW 100120069A TW 100120069 A TW100120069 A TW 100120069A TW I512240 B TWI512240 B TW I512240B
Authority
TW
Taiwan
Prior art keywords
tube
reactive components
liquid
heat exchanger
heat
Prior art date
Application number
TW100120069A
Other languages
English (en)
Chinese (zh)
Other versions
TW201217707A (en
Inventor
Abarajith Hari
Zhihui Gu
Satish Bhusarapu
Timothy Dinh Truong
Puneet Gupta
Original Assignee
Memc Electronic Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memc Electronic Materials filed Critical Memc Electronic Materials
Publication of TW201217707A publication Critical patent/TW201217707A/zh
Application granted granted Critical
Publication of TWI512240B publication Critical patent/TWI512240B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
    • F22B1/288—Instantaneous electrical steam generators built-up from heat-exchange elements arranged within a confined chamber having heat-retaining walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/04—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F1/00—Tubular elements; Assemblies of tubular elements
    • F28F1/10—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
    • F28F1/40—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only inside the tubular element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/003—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by using permeable mass, perforated or porous materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Geometry (AREA)
  • Silicon Compounds (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
TW100120069A 2010-06-08 2011-06-08 三氯矽烷汽化系統 TWI512240B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/796,360 US20110300050A1 (en) 2010-06-08 2010-06-08 Trichlorosilane Vaporization System

Publications (2)

Publication Number Publication Date
TW201217707A TW201217707A (en) 2012-05-01
TWI512240B true TWI512240B (zh) 2015-12-11

Family

ID=45064625

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100120069A TWI512240B (zh) 2010-06-08 2011-06-08 三氯矽烷汽化系統

Country Status (7)

Country Link
US (2) US20110300050A1 (cg-RX-API-DMAC7.html)
EP (1) EP2580159A4 (cg-RX-API-DMAC7.html)
JP (1) JP2013533949A (cg-RX-API-DMAC7.html)
KR (1) KR20130103672A (cg-RX-API-DMAC7.html)
CN (1) CN103025656B (cg-RX-API-DMAC7.html)
TW (1) TWI512240B (cg-RX-API-DMAC7.html)
WO (1) WO2011154879A2 (cg-RX-API-DMAC7.html)

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DE102011006116A1 (de) * 2011-03-25 2012-09-27 Evonik Degussa Gmbh Verwendung von Brennern mit Strahlrohr in Reaktoren zur Umsetzung von Chlorsilanen
US20140165928A1 (en) * 2012-12-17 2014-06-19 Conocophillips Company Heat exchange for indirect boiling
JP6114685B2 (ja) * 2013-11-27 2017-04-12 タニコー株式会社 アクアガス発生ユニット
CN109780521B (zh) * 2016-08-31 2020-05-19 青岛科技大学 一种智控干燥机管箱管径的设计方法
CN109780525B (zh) * 2016-08-31 2020-06-23 青岛科技大学 一种干燥机管束管径的控制方法
CN109780522B (zh) * 2016-08-31 2020-03-24 青岛科技大学 一种管束间距控制加热均匀性的蒸汽干燥机
CN113899237A (zh) * 2021-11-10 2022-01-07 哈尔滨工程大学 一种采用中空结构球床的强化换热管
CN113899236A (zh) * 2021-11-10 2022-01-07 哈尔滨工程大学 一种球形颗粒填充的微肋换热管

Citations (2)

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US20010047541A1 (en) * 2000-04-11 2001-12-06 Johns David Jessie Fluid heating apparatus and methods for using same
US20090202957A1 (en) * 2004-09-27 2009-08-13 Nobukazu Ikeda Gas heating method, and gas-heating piping member

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US20010047541A1 (en) * 2000-04-11 2001-12-06 Johns David Jessie Fluid heating apparatus and methods for using same
US20090202957A1 (en) * 2004-09-27 2009-08-13 Nobukazu Ikeda Gas heating method, and gas-heating piping member

Also Published As

Publication number Publication date
US20130195432A1 (en) 2013-08-01
WO2011154879A3 (en) 2012-03-15
JP2013533949A (ja) 2013-08-29
KR20130103672A (ko) 2013-09-24
EP2580159A2 (en) 2013-04-17
CN103025656A (zh) 2013-04-03
WO2011154879A2 (en) 2011-12-15
CN103025656B (zh) 2016-02-10
US20110300050A1 (en) 2011-12-08
TW201217707A (en) 2012-05-01
EP2580159A4 (en) 2015-12-02

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