TWI509369B - 曝光方法、曝光設備、和製造裝置的方法 - Google Patents

曝光方法、曝光設備、和製造裝置的方法 Download PDF

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Publication number
TWI509369B
TWI509369B TW102124520A TW102124520A TWI509369B TW I509369 B TWI509369 B TW I509369B TW 102124520 A TW102124520 A TW 102124520A TW 102124520 A TW102124520 A TW 102124520A TW I509369 B TWI509369 B TW I509369B
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TW
Taiwan
Prior art keywords
substrate stage
exposure
substrate
area
shot area
Prior art date
Application number
TW102124520A
Other languages
English (en)
Chinese (zh)
Other versions
TW201405254A (zh
Inventor
Yoshihiro Omameuda
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of TW201405254A publication Critical patent/TW201405254A/zh
Application granted granted Critical
Publication of TWI509369B publication Critical patent/TWI509369B/zh

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70475—Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
TW102124520A 2012-07-31 2013-07-09 曝光方法、曝光設備、和製造裝置的方法 TWI509369B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012170371A JP6066610B2 (ja) 2012-07-31 2012-07-31 露光方法、露光装置及びデバイス製造方法

Publications (2)

Publication Number Publication Date
TW201405254A TW201405254A (zh) 2014-02-01
TWI509369B true TWI509369B (zh) 2015-11-21

Family

ID=50025184

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102124520A TWI509369B (zh) 2012-07-31 2013-07-09 曝光方法、曝光設備、和製造裝置的方法

Country Status (4)

Country Link
US (1) US9541845B2 (enExample)
JP (1) JP6066610B2 (enExample)
KR (1) KR101660090B1 (enExample)
TW (1) TWI509369B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102426485B1 (ko) 2017-09-29 2022-07-27 온투 이노베이션 아이엔씨. 리소그래피 노광 공정의 최적화를 위한 시스템 및 방법
JP7022611B2 (ja) * 2018-02-06 2022-02-18 キヤノン株式会社 露光装置の制御方法、露光装置、及び物品製造方法
US20190361103A1 (en) * 2018-05-25 2019-11-28 Pva Tepla Analytical Systems Gmbh Ultrasonic Microscope and Carrier for carrying an acoustic Pulse Transducer
KR102840275B1 (ko) 2020-02-21 2025-07-30 온투 이노베이션 아이엔씨. 리소그래피 공정에서 오버레이 오류를 보정하기 위한 시스템 및 방법
JP7778762B2 (ja) * 2023-10-24 2025-12-02 キヤノン株式会社 ステージ装置、基板処理装置、情報処理装置、情報処理方法、プログラム及び物品の製造方法

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JP2007281097A (ja) * 2006-04-04 2007-10-25 Canon Inc 露光装置及びデバイス製造方法
JP2008071839A (ja) * 2006-09-12 2008-03-27 Canon Inc 表面位置検出方法、露光装置及びデバイスの製造方法
JP2008300579A (ja) * 2007-05-30 2008-12-11 Canon Inc 露光装置及びデバイス製造方法

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JP3316833B2 (ja) * 1993-03-26 2002-08-19 株式会社ニコン 走査露光方法、面位置設定装置、走査型露光装置、及び前記方法を使用するデバイス製造方法
US6118515A (en) * 1993-12-08 2000-09-12 Nikon Corporation Scanning exposure method
JP3371406B2 (ja) * 1994-08-26 2003-01-27 株式会社ニコン 走査露光方法
JPH09306833A (ja) * 1996-03-14 1997-11-28 Nikon Corp 露光方法
US5825043A (en) * 1996-10-07 1998-10-20 Nikon Precision Inc. Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus
US6090510A (en) * 1997-03-25 2000-07-18 Nikon Corporation Method for scanning exposure
JP2000106340A (ja) * 1997-09-26 2000-04-11 Nikon Corp 露光装置及び走査露光方法、並びにステージ装置
JPH11233433A (ja) * 1998-02-17 1999-08-27 Nikon Corp 走査型露光装置及び走査露光方法並びにデバイス製造方法
JP2000100721A (ja) * 1998-07-21 2000-04-07 Nikon Corp 走査露光方法および走査型露光装置ならびにデバイスの製造方法
JP3230675B2 (ja) 1999-06-14 2001-11-19 株式会社ニコン 走査露光方法、走査型露光装置、及び前記方法を用いるデバイス製造方法
US6381004B1 (en) * 1999-09-29 2002-04-30 Nikon Corporation Exposure apparatus and device manufacturing method
JP2001168024A (ja) * 1999-09-29 2001-06-22 Nikon Corp 露光装置及びデバイス製造方法
JP3870058B2 (ja) * 2001-10-05 2007-01-17 キヤノン株式会社 スキャン露光装置及び方法並びにデバイスの製造方法
JP4840958B2 (ja) * 2003-10-21 2011-12-21 キヤノン株式会社 走査露光装置及びデバイス製造方法
JP2009295932A (ja) * 2008-06-09 2009-12-17 Canon Inc 露光装置及びデバイス製造方法
US8488109B2 (en) * 2009-08-25 2013-07-16 Nikon Corporation Exposure method, exposure apparatus, and device manufacturing method
JP5498243B2 (ja) * 2010-05-07 2014-05-21 キヤノン株式会社 露光装置、露光方法及びデバイス製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007281097A (ja) * 2006-04-04 2007-10-25 Canon Inc 露光装置及びデバイス製造方法
JP2008071839A (ja) * 2006-09-12 2008-03-27 Canon Inc 表面位置検出方法、露光装置及びデバイスの製造方法
JP2008300579A (ja) * 2007-05-30 2008-12-11 Canon Inc 露光装置及びデバイス製造方法

Also Published As

Publication number Publication date
US20140036248A1 (en) 2014-02-06
US9541845B2 (en) 2017-01-10
KR20140016821A (ko) 2014-02-10
JP6066610B2 (ja) 2017-01-25
TW201405254A (zh) 2014-02-01
JP2014029956A (ja) 2014-02-13
KR101660090B1 (ko) 2016-09-26

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