TWI503178B - 狹縫噴嘴、基板處理裝置及狹縫噴嘴的製造方法 - Google Patents

狹縫噴嘴、基板處理裝置及狹縫噴嘴的製造方法 Download PDF

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Publication number
TWI503178B
TWI503178B TW103107326A TW103107326A TWI503178B TW I503178 B TWI503178 B TW I503178B TW 103107326 A TW103107326 A TW 103107326A TW 103107326 A TW103107326 A TW 103107326A TW I503178 B TWI503178 B TW I503178B
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TW
Taiwan
Prior art keywords
nozzle
slit
body portion
discharge port
nozzle body
Prior art date
Application number
TW103107326A
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English (en)
Chinese (zh)
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TW201436867A (zh
Inventor
Takanori Hirai
Yoshinori Takagi
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Screen Holdings Co Ltd
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Publication of TW201436867A publication Critical patent/TW201436867A/zh
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Publication of TWI503178B publication Critical patent/TWI503178B/zh

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  • Coating Apparatus (AREA)
  • Liquid Crystal (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW103107326A 2013-03-27 2014-03-05 狹縫噴嘴、基板處理裝置及狹縫噴嘴的製造方法 TWI503178B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013065586A JP6144514B2 (ja) 2013-03-27 2013-03-27 スリットノズル、基板処理装置およびスリットノズルの製造方法

Publications (2)

Publication Number Publication Date
TW201436867A TW201436867A (zh) 2014-10-01
TWI503178B true TWI503178B (zh) 2015-10-11

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Family Applications (1)

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TW103107326A TWI503178B (zh) 2013-03-27 2014-03-05 狹縫噴嘴、基板處理裝置及狹縫噴嘴的製造方法

Country Status (4)

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JP (1) JP6144514B2 (ja)
KR (1) KR101617509B1 (ja)
CN (1) CN104069981B (ja)
TW (1) TWI503178B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6385864B2 (ja) * 2015-03-18 2018-09-05 株式会社東芝 ノズルおよび液体供給装置
CN114018201A (zh) * 2021-11-04 2022-02-08 河海大学 一种测量冲击式水轮机缺口磨损的实验装置及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008296078A (ja) * 2007-05-29 2008-12-11 Dainippon Screen Mfg Co Ltd スリットノズルおよび基板処理装置
JP2009226286A (ja) * 2008-03-21 2009-10-08 Toppan Printing Co Ltd 塗布装置
TW201238665A (en) * 2011-03-18 2012-10-01 Toray Eng Co Ltd Coating device and coating method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0538477A (ja) * 1991-08-06 1993-02-19 Konica Corp 塗布装置
JP2002361150A (ja) 2001-06-08 2002-12-17 Fuji Photo Film Co Ltd 塗布装置のスペーサ及び塗布装置並びにスペーサの製造方法
JP3965312B2 (ja) * 2002-03-20 2007-08-29 アドバンスト・カラーテック株式会社 枚葉基板の製造装置
JP4490320B2 (ja) * 2005-03-31 2010-06-23 東レエンジニアリング株式会社 塗布装置
JP4826320B2 (ja) * 2006-04-07 2011-11-30 大日本印刷株式会社 ダイヘッド
JP2007330900A (ja) * 2006-06-15 2007-12-27 Toppan Printing Co Ltd ダイヘッド
JP5007168B2 (ja) * 2007-07-10 2012-08-22 日東電工株式会社 ダイコーター調整方法及び光学フィルムの製造方法
JP2010069375A (ja) * 2008-09-17 2010-04-02 Toray Ind Inc 塗布器、塗布装置および塗布方法並びにディスプレイ用部材の製造装置および製造方法
JP5732736B2 (ja) 2009-08-20 2015-06-10 三菱マテリアル株式会社 塗布工具
CN102527578A (zh) * 2012-01-11 2012-07-04 深圳市信宇人科技有限公司 新型狭缝式喷头及其喷涂机机头

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008296078A (ja) * 2007-05-29 2008-12-11 Dainippon Screen Mfg Co Ltd スリットノズルおよび基板処理装置
JP2009226286A (ja) * 2008-03-21 2009-10-08 Toppan Printing Co Ltd 塗布装置
TW201238665A (en) * 2011-03-18 2012-10-01 Toray Eng Co Ltd Coating device and coating method

Also Published As

Publication number Publication date
KR20140118729A (ko) 2014-10-08
JP2014192289A (ja) 2014-10-06
CN104069981B (zh) 2016-06-15
JP6144514B2 (ja) 2017-06-07
CN104069981A (zh) 2014-10-01
TW201436867A (zh) 2014-10-01
KR101617509B1 (ko) 2016-05-02

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