TWI499172B - Linear motor cooling structure - Google Patents

Linear motor cooling structure Download PDF

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Publication number
TWI499172B
TWI499172B TW102108224A TW102108224A TWI499172B TW I499172 B TWI499172 B TW I499172B TW 102108224 A TW102108224 A TW 102108224A TW 102108224 A TW102108224 A TW 102108224A TW I499172 B TWI499172 B TW I499172B
Authority
TW
Taiwan
Prior art keywords
flat plate
cooling
inflow
outflow
linear motor
Prior art date
Application number
TW102108224A
Other languages
English (en)
Chinese (zh)
Other versions
TW201347368A (zh
Inventor
Daisuke Shinohira
Doutaro Usui
Takashi Ikeda
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201347368A publication Critical patent/TW201347368A/zh
Application granted granted Critical
Publication of TWI499172B publication Critical patent/TWI499172B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/10—Arrangements for cooling or ventilating by gaseous cooling medium flowing in closed circuit, a part of which is external to the machine casing
    • H02K9/12—Arrangements for cooling or ventilating by gaseous cooling medium flowing in closed circuit, a part of which is external to the machine casing wherein the cooling medium circulates freely within the casing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/32—Rotating parts of the magnetic circuit with channels or ducts for flow of cooling medium
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
    • H02K9/227—Heat sinks

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Linear Motors (AREA)
TW102108224A 2012-03-27 2013-03-08 Linear motor cooling structure TWI499172B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012071555A JP5859360B2 (ja) 2012-03-27 2012-03-27 リニアモータ冷却構造

Publications (2)

Publication Number Publication Date
TW201347368A TW201347368A (zh) 2013-11-16
TWI499172B true TWI499172B (zh) 2015-09-01

Family

ID=48095488

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102108224A TWI499172B (zh) 2012-03-27 2013-03-08 Linear motor cooling structure

Country Status (5)

Country Link
US (1) US9325223B2 (enExample)
EP (1) EP2645546A3 (enExample)
JP (1) JP5859360B2 (enExample)
KR (1) KR101535330B1 (enExample)
TW (1) TWI499172B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2808986B1 (de) * 2013-05-27 2016-03-09 Etel S. A.. Kühlkörper für einen Linearmotor
US20170373552A1 (en) * 2014-12-22 2017-12-28 Otis Elevator Company Mounting assembly for elevator linear propulsion system
EP3264575B1 (de) * 2016-06-28 2018-08-22 Etel S. A.. Kühlungseinrichtung für den primärteil eines eisenlosen linearmotors
EP3324521B1 (de) * 2016-11-16 2020-04-15 Etel S. A.. Kühlplatte für einen linearmotor
EP3422537B1 (de) * 2017-06-30 2020-05-20 Etel S.A. Spulenanordnung und gehäusemodulset für eine spulenanordnung eines elektromotors
JP7402102B2 (ja) * 2020-03-30 2023-12-20 住友重機械工業株式会社 リニアモータの冷却ユニット、リニアモータ、リニアモータの冷却ユニットの製造方法
JP7349540B1 (ja) * 2022-07-28 2023-09-22 株式会社ソディック 電機子、冷却ユニットおよびリニアモータ
KR102809449B1 (ko) * 2023-11-29 2025-05-19 하이윈 마이크로시스템 코포레이션 선형 모터의 냉각 모듈

Citations (6)

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Publication number Priority date Publication date Assignee Title
JPS4819744B1 (enExample) * 1967-02-07 1973-06-15
TWM291649U (en) * 2006-01-02 2006-06-01 Hiwin Mikrosystem Corp A thermolysis device for linear motors
TWI271019B (en) * 2003-04-07 2007-01-11 Yaskawa Electric Corp Can type linear motor armature and can type linear motor
TW200910739A (en) * 2007-06-13 2009-03-01 Yaskawa Denki Seisakusho Kk Canned linear motor armature and canned linear motor
TW200931772A (en) * 2007-09-04 2009-07-16 Canon Kk Driving apparatus, exposure apparatus, and device manufacturing method
TWI323546B (enExample) * 2005-10-18 2010-04-11 Yaskawa Denki Seisakusho Kk

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US4315300A (en) * 1979-01-29 1982-02-09 The United States Of America As Represented By The Secretary Of The Navy Cooling arrangement for plug-in module assembly
US4306616A (en) * 1980-02-04 1981-12-22 Duke Manufacturing Co. Refrigerated shelf for a food display counter
US4342878A (en) * 1980-05-09 1982-08-03 Wilson Welding Company, Inc. Water-cooled electrode holder
US4393565A (en) * 1980-05-09 1983-07-19 Wilson Welding Company, Inc. Method of making a water-cooled electrode holder
US4401870A (en) * 1981-11-10 1983-08-30 Hydro-Quebec Modular suction-gas-cooled magnetic blast circuit breaker
US4397234A (en) * 1981-12-30 1983-08-09 International Business Machines Corporation Electromagnetic print hammer coil assembly
US5723917A (en) * 1994-11-30 1998-03-03 Anorad Corporation Flat linear motor
US5864187A (en) * 1997-03-27 1999-01-26 Ford Global Technologies, Inc. Fully enclosed linear motor armature
JP3658980B2 (ja) * 1998-03-06 2005-06-15 豊田工機株式会社 電磁コイルの冷却装置及び同装置を備えたリニアモータ
JP3643273B2 (ja) * 1999-10-28 2005-04-27 株式会社ソディック リニアモータのコイル装置およびその製造方法
JP3832556B2 (ja) * 2000-02-25 2006-10-11 株式会社安川電機 キャンド・リニアモータ
JP2002010618A (ja) * 2000-06-16 2002-01-11 Canon Inc リニアモータ、及びこれを有するステージ装置、露光装置
KR100432243B1 (ko) * 2001-07-06 2004-05-22 삼익Lms주식회사 방열구조를 가진 리니어모터
JP4038652B2 (ja) * 2001-11-30 2008-01-30 株式会社安川電機 リニアモータ電機子およびリニアモータ
JP3809381B2 (ja) * 2002-01-28 2006-08-16 キヤノン株式会社 リニアモータ、ステージ装置、露光装置及びデバイス製造方法
US6806594B2 (en) * 2002-02-20 2004-10-19 Sumitomo Heavy Industries, Ltd. Coil unit for linear motor
JP2003333822A (ja) * 2002-05-13 2003-11-21 Canon Inc リニアモータ、これを有するステージ装置及び露光装置
US6956308B2 (en) * 2003-07-15 2005-10-18 Nikon Corporation Dual flow circulation system for a mover
US7235902B2 (en) * 2004-07-21 2007-06-26 Newport Corporation Cooling system for linear motors
JP2008527965A (ja) * 2005-01-18 2008-07-24 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 電気モータ用コイルアセンブリ
DE102006012736A1 (de) * 2006-03-17 2007-09-20 Siemens Ag Elektrische Maschine
US20070257563A1 (en) * 2006-05-06 2007-11-08 Lieh-Feng Huang Heat Dissipating Arrangement for a Linear Motor
JP4819744B2 (ja) 2007-05-08 2011-11-24 住友重機械工業株式会社 リニアモータ冷却構造
JP5369265B2 (ja) * 2009-01-06 2013-12-18 東芝機械株式会社 リニアモータ及びリニア移動ステージ装置
JP5598757B2 (ja) * 2010-01-26 2014-10-01 株式会社安川電機 冷媒冷却リニアモータ
JP5582415B2 (ja) * 2010-08-27 2014-09-03 株式会社安川電機 リニアモータ電機子およびそれを備えたリニアモータ
US20120062866A1 (en) * 2010-09-03 2012-03-15 Nikon Corporation Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current drag

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4819744B1 (enExample) * 1967-02-07 1973-06-15
TWI271019B (en) * 2003-04-07 2007-01-11 Yaskawa Electric Corp Can type linear motor armature and can type linear motor
TWI323546B (enExample) * 2005-10-18 2010-04-11 Yaskawa Denki Seisakusho Kk
TWM291649U (en) * 2006-01-02 2006-06-01 Hiwin Mikrosystem Corp A thermolysis device for linear motors
TW200910739A (en) * 2007-06-13 2009-03-01 Yaskawa Denki Seisakusho Kk Canned linear motor armature and canned linear motor
TW200931772A (en) * 2007-09-04 2009-07-16 Canon Kk Driving apparatus, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date
JP5859360B2 (ja) 2016-02-10
EP2645546A3 (en) 2017-05-31
US20130257182A1 (en) 2013-10-03
KR101535330B1 (ko) 2015-07-08
TW201347368A (zh) 2013-11-16
US9325223B2 (en) 2016-04-26
JP2013207835A (ja) 2013-10-07
KR20130110083A (ko) 2013-10-08
EP2645546A2 (en) 2013-10-02

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MM4A Annulment or lapse of patent due to non-payment of fees