TWI486982B - Laminated metal parts manufacturing apparatus and laminated type electronic parts manufacturing method - Google Patents

Laminated metal parts manufacturing apparatus and laminated type electronic parts manufacturing method Download PDF

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TWI486982B
TWI486982B TW100116215A TW100116215A TWI486982B TW I486982 B TWI486982 B TW I486982B TW 100116215 A TW100116215 A TW 100116215A TW 100116215 A TW100116215 A TW 100116215A TW I486982 B TWI486982 B TW I486982B
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ceramic sheet
film
laminated
ceramic
support
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TW201232578A (en
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Yoshihiro Shiroeda
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Murata Manufacturing Co
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積層型電子零件製造裝置及積層型電子零件之製造方法Multilayer electronic component manufacturing apparatus and manufacturing method of laminated electronic component

本發明係關於用於製造積層陶瓷電容器等積層型電子零件之積層型電子零件製造裝置及積層型電子零件之製造方法。The present invention relates to a laminated electronic component manufacturing apparatus and a method of manufacturing a laminated electronic component for manufacturing a laminated electronic component such as a laminated ceramic capacitor.

一般之積層陶瓷電容器之製造方法,係於長條膜上將陶瓷膜進行塗佈成形,於其上印刷形成內部電極,將其切割為期望之尺寸,自膜剝離並堆疊,重複這一過程以形成積層體塊,將其以零件單位進行切割。In general, a method for manufacturing a multilayer ceramic capacitor is to form a ceramic film on a long film, to form an internal electrode thereon, to cut it into a desired size, to peel off and stack from the film, and to repeat the process. A layered body block is formed and cut in units of parts.

相對於此,於下述專利文獻1中揭示有一種積層陶瓷電子零件之製造方法,其係藉由將基材上形成而得到之複數個陶瓷生片進行積層來形成積層體塊,藉由以零件單位將形成之上述積層體塊進行切斷來製造積層陶瓷電子零件,於該方法中,將構成同一上述積層體塊之複數個上述陶瓷生片中之至少2片於同一上述基材上之特定區域形成,且使各陶瓷生片之面內方向之朝向及各陶瓷生片之位置實際上一致來進行積層。On the other hand, Patent Document 1 discloses a method of manufacturing a laminated ceramic electronic component in which a plurality of ceramic green sheets obtained by forming a substrate are laminated to form a laminated body block. The component unit is formed by cutting the laminated body block to form a laminated ceramic electronic component. In the method, at least two of the plurality of ceramic green sheets constituting the laminated body block are formed on the same substrate. A specific region is formed, and the orientation of the in-plane direction of each ceramic green sheet and the position of each ceramic green sheet are substantially identical to each other.

下述專利文獻2揭示有一種技術,其係使第一可撓性支持體連續移動,於第二可撓性支持體之一面上塗佈陶瓷塗料,將得到之未乾燥之陶瓷塗料層轉印至第一可撓性支持體,轉印後將第二可撓性支持體自陶瓷塗料層剝離,並且於轉印至第一可撓性支持體上之陶瓷塗料層之表面印刷電極,使電極乾燥,於第一可撓性支持體上重複該步驟。Patent Document 2 listed below discloses a technique of continuously moving a first flexible support, coating a ceramic coating on one side of a second flexible support, and transferring the obtained undried ceramic coating layer. To the first flexible support, after the transfer, the second flexible support is peeled off from the ceramic coating layer, and the electrode is printed on the surface of the ceramic coating layer transferred onto the first flexible support to make the electrode Dry and repeat this step on the first flexible support.

下述專利文獻3揭示有一種技術,其係積層型電子零件用之積層體製造裝置,該積層型電子零件由含有陶瓷及有機結合材料成分、且具有用於於其上形成內部電極層之特定圖案之獨立性生片所構成,該技術將預先形成特定圖案之獨立性生片捲繞於柱狀輥上來進行製造。Patent Document 3 listed below discloses a technique for manufacturing a laminated body for a laminated electronic component comprising a ceramic and an organic bonding material component and having a specific electrode layer formed thereon. The pattern consists of an independent green sheet which is produced by winding a separate green sheet in which a specific pattern is formed in advance on a columnar roll.

下述專利文獻4揭示有一種技術,其藉由包括:供給生片之捲出供給部;將生片捲繞於外周面來形成積層體之積層鼓;檢測積層鼓之旋轉角之旋轉角度檢測裝置;基於旋轉角度檢測裝置之資訊、一面捲繞生片一面於捲繞於積層鼓之生片上形成內部電極之內部電極印刷部,可以高速製造積層體。Patent Document 4 listed below discloses a technique comprising: winding a supply portion for supplying a green sheet; winding a green sheet on an outer peripheral surface to form a laminated drum of the laminated body; and detecting a rotation angle of the rotation angle of the laminated drum According to the information of the rotation angle detecting device, the internal electrode printing portion that forms the internal electrode on the green sheet wound around the laminated drum while winding the green sheet can produce the laminated body at a high speed.

此處,作為積層陶瓷電容器之製造過程中之積層體形成方法,一般而言採用以下方法:於長條膜上將陶瓷塗膜進行塗佈成形,於其上印刷形成內部電極,將其切割,自膜剝離並堆疊。為了使積層電容器小型化及大容量化,可知需要將陶瓷介質層形成得更薄,增加積層片數,但由此,以膜上之突起物為起因之缺陷部之影響所導致之短路等品質不良之產生比例會增加。因此,正在努力使膜更為平滑,但這會帶來可操作性惡化及膜成本上升之問題,難以取得進展。Here, as a method of forming a layered body in the manufacturing process of a laminated ceramic capacitor, generally, a method is employed in which a ceramic coating film is applied onto a long film, and an internal electrode is printed thereon to be cut. Stripped from the film and stacked. In order to reduce the size and capacity of the multilayer capacitor, it is necessary to form the ceramic dielectric layer to be thinner and to increase the number of laminated layers. However, the quality of the short circuit caused by the influence of the defects on the film is caused. The proportion of bad causes will increase. Therefore, efforts are being made to make the film smoother, but this causes a problem of deterioration in operability and an increase in film cost, and it is difficult to make progress.

作為解決上述問題之方法,考慮採用重複使用平板型之同一基材、形成陶瓷生片之方法(參照專利文獻1)。由於藉由使用同一基材,而缺陷部集中於積層塊之1個部分,因此即使於基材上有突起物,亦可將由於其影響產生之不良晶片抑制於最小限。As a method for solving the above problems, a method of forming a ceramic green sheet by repeating the same substrate of a flat type is considered (refer to Patent Document 1). Since the defective portion is concentrated on one portion of the laminated block by using the same substrate, even if there is a projection on the substrate, the defective wafer due to the influence can be suppressed to a minimum.

[先前技術文獻][Previous Technical Literature] [專利文獻][Patent Literature]

[專利文獻1]日本專利特開2004-296641號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-296641

[專利文獻2]日本專利特開2002-141245號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2002-141245

[專利文獻3]日本專利特開2000-306766號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2000-306766

[專利文獻4]日本專利特開2003-217992號公報[Patent Document 4] Japanese Patent Laid-Open Publication No. 2003-217992

然而,於上述專利文獻1之技術中,由於需要於平板或者圓筒狀基材將生片進行間歇成膜,因此於成膜開始部及結束部會產生膜厚不均勻之區域,即使形成積層體塊,但得到期望之品質之區域亦較窄,良率上之問題較大。另外,於平板上積層陶瓷片材之步驟中,每一層亦都需要間歇動作,會有生產速度無法提高這樣之缺點。However, in the technique of Patent Document 1, since it is necessary to form a green sheet intermittently on a flat plate or a cylindrical substrate, a film thickness unevenness occurs in the film forming start portion and the end portion, even if a laminate is formed. Body mass, but the area where the desired quality is obtained is also narrow, and the problem of yield is large. In addition, in the step of laminating the ceramic sheets on the flat plate, each layer also requires intermittent operation, which may have the disadvantage that the production speed cannot be increased.

另外,作為高效進行陶瓷片材之積層之方法,考慮上述專利文獻2之技術。於長條膜上塗佈陶瓷,將其轉印至連續帶上,得到積層結構體。於該操作方法中,藉由不進行間歇動作而可高速化,但由於使用長條基材,因此無法得到抑制基材突起物所導致之陶瓷層之缺陷部之品質不良之效果。Further, as a method of efficiently laminating a ceramic sheet, the technique of Patent Document 2 described above is considered. The ceramic was coated on the long film and transferred to a continuous belt to obtain a laminated structure. In this method of operation, the speed can be increased without performing the intermittent operation. However, since the long substrate is used, the effect of suppressing the quality defect of the defective portion of the ceramic layer due to the substrate protrusion cannot be obtained.

另外,上述專利文獻3揭示有相同種類之發明。其係於圓筒鼓上形成積層結構體,藉由連續動作可進行高速積層,但陶瓷片材限於沒有膜等支持體之高強度之獨立性生片。雖然該獨立性生片內在之缺陷部之頻度未知,但含有高聚合度之樹脂而增加有強度之該片材,由於燒成步驟之脫脂較難,成為阻礙燒成後之陶瓷之緻密性之原因,因此實用性較低,難以用於批量生產。Further, the above Patent Document 3 discloses the same kind of invention. This is a laminated structure formed on a cylindrical drum, and high-speed lamination can be performed by continuous operation, but the ceramic sheet is limited to a high-strength independent green sheet having no support such as a film. Although the frequency of the defective portion inherent in the independent green sheet is unknown, the sheet containing a high degree of polymerization and increasing the strength of the sheet is difficult to degrease in the firing step, thereby hindering the compactness of the ceramic after firing. The reason is therefore less practical and difficult to use in mass production.

上述專利文獻4之發明係於圓筒或者多角柱上進行連續積層,藉由噴墨來形成電極電路,但於該情形時生片需要可獨立運送那樣之高強度,作為形成成為問題之較薄之陶瓷層之積層結構體之方法,難以實際應用。The invention of the above-mentioned Patent Document 4 is a continuous lamination on a cylinder or a polygonal column, and an electrode circuit is formed by inkjet. However, in this case, the green sheet needs to be capable of being independently transported with high strength, and is formed as a thinner problem. The method of laminating a structure of a ceramic layer is difficult to practically apply.

因此,鑒於上述問題,本發明之目的在於提供一種積層型電子零件製造裝置及積層型電子零件之製造方法,其可抑制電子零件產生之品質不良,以低成本、且可藉由連續運轉來提高積層型電子零件之製造效率(生產速度)。Therefore, in view of the above problems, an object of the present invention is to provide a laminated electronic component manufacturing apparatus and a method of manufacturing a laminated electronic component, which can suppress quality defects caused by electronic components, and can be improved at low cost and by continuous operation. Manufacturing efficiency (production speed) of laminated electronic parts.

本發明係一種積層型電子零件製造裝置,其特徵在於,包括:環形連續狀之成膜基材,其於外周實施有脫模處理;成膜形成部,其對於上述成膜基材塗佈陶瓷漿料,使其乾燥來連續形成陶瓷片材;以及積層支持體,其介隔上述陶瓷片材與上述成膜基材接觸,使上述陶瓷片材自上述成膜基材剝離,將剝離之上述陶瓷片材捲繞於外周,藉此形成上述陶瓷片材之積層結構體。The present invention relates to a laminated electronic component manufacturing apparatus comprising: a continuous annular film-forming substrate having a mold release treatment on an outer circumference; and a film formation portion for coating a ceramic film on the film formation substrate a slurry which is dried to continuously form a ceramic sheet; and a build-up support which is in contact with the film formation substrate via the ceramic sheet, and the ceramic sheet is peeled off from the film formation substrate The ceramic sheet is wound around the outer circumference, thereby forming a laminated structure of the above ceramic sheet.

根據本發明,即使於成膜基材上有突起物等缺陷因子,但由於由此產生之陶瓷片材之缺陷部集中於積層結構體之有限之範圍內,因此可將其切斷分割所得到之電子零件產生之品質不良抑制得較低。According to the present invention, even if a defect factor such as a protrusion is formed on the film-forming substrate, since the defect portion of the ceramic sheet thus produced is concentrated in a limited range of the laminated structure, it can be cut and divided. The quality of the electronic parts produced is less suppressed.

另外,由於陶瓷片材於成膜基材上連續形成,因此與間歇塗佈相比,膜厚之穩定區域較寬,可增加自得到之積層結構體可分割作為電子零件之個數。Further, since the ceramic sheet is continuously formed on the film-forming substrate, the stable region of the film thickness is wider than that of the batch coating, and the number of the electronic component that can be divided from the obtained laminated structure can be increased.

由於藉由連續運轉來執行於成膜基材上形成陶瓷片材之製程、及於積層支持體上形成陶瓷片材之積層結構體之製程,因此可於更短時間內以高生產性形成陶瓷片材之積層結構體。Since the process of forming a ceramic sheet on a film-forming substrate and the process of forming a laminated body of a ceramic sheet on a build-up support by continuous operation, ceramics can be formed with high productivity in a shorter time. A laminated structure of sheets.

另外,不必使用如先前般之長條之膜基材,可抑制中間材料成本。In addition, it is not necessary to use a film substrate as in the past, and the intermediate material cost can be suppressed.

如上所述,可抑制電子零件產生之品質不良,以低成本、且可藉由不是間歇運轉而是連續運轉來提高積層型電子零件之製造效率(生產速度)。As described above, it is possible to suppress the quality defect of the electronic component, and it is possible to improve the manufacturing efficiency (production speed) of the laminated electronic component at a low cost and without continuous operation.

本發明係一種積層型電子零件製造裝置,其特徵在於包括:環形連續狀之成膜基材,其於外周實施有脫模處理;成膜形成部,其對於上述成膜基材塗佈陶瓷漿料,使其乾燥而連續形成陶瓷片材;積層支持體,其藉由將上述陶瓷片材捲繞於外周,而形成上述陶瓷片材之積層結構體;以及中間剝離部,其以介隔上述陶瓷片材與上述成膜基材及上述積層支持體接觸之方式而設置,使形成於上述成膜基材之上述陶瓷片材自上述成膜基材剝離,將該剝離之上述陶瓷片材運送至上述積層支持體。The present invention relates to a device for manufacturing a laminated electronic component, comprising: a continuous film-forming substrate having a continuous shape, wherein a release process is performed on the outer periphery; and a film formation portion for applying a ceramic slurry to the film formation substrate And drying, continuously forming a ceramic sheet; a build-up support, wherein the ceramic sheet is wound around the outer circumference to form a laminated structure of the ceramic sheet; and an intermediate peeling portion for interposing the above The ceramic sheet is provided in contact with the film formation substrate and the buildup support, and the ceramic sheet formed on the film formation substrate is peeled off from the film formation substrate, and the peeled ceramic sheet is conveyed. To the above laminated support.

根據本發明,陶瓷片材自成膜基材之剝離不會影響積層支持體側之狀態,可進行穩定之處理。具體而言,若於積層支持體形成陶瓷片材之積層結構體,則積層支持體之大小會增大,另外於形成電極電路之情形時,會產生該部位有凹凸等外形上之狀態變化,但藉由於成膜基材與積層支持體之間存在中間剝離部,可根據積層支持體之狀態變化,適當調整積層支持體與中間剝離部之位置關係或壓力等。由此,可防止由於積層支持體之狀態變化、而導致形成於積層支持體之陶瓷片材之積層結構體之品質劣化。另外,由於設計為積層支持體與成膜基材不直接接觸,可降低成膜基材之輥之接觸壓力,因此可抑制成膜基材產生受損。According to the present invention, the peeling of the ceramic sheet from the film-forming substrate does not affect the state of the build-up support side, and stable treatment can be performed. Specifically, when the laminated support is formed into a laminated structure of a ceramic sheet, the size of the build-up support increases, and when the electrode circuit is formed, a state change in the shape such as unevenness occurs in the portion. However, since the intermediate peeling portion exists between the film-forming substrate and the build-up support, the positional relationship, pressure, and the like of the build-up support and the intermediate peeling portion can be appropriately adjusted according to the state change of the build-up support. Thereby, it is possible to prevent deterioration of the quality of the laminated structure of the ceramic sheet formed on the build-up support due to a change in the state of the build-up support. Further, since the laminated support is designed not to be in direct contact with the film-forming substrate, the contact pressure of the roll of the film-forming substrate can be reduced, so that damage of the film-forming substrate can be suppressed.

本發明之特徵在於,上述成膜基材之外周長與上述積層支持體之外周長係相同長度,或者上述成膜基材之外周長或上述積層支持體之外周長之一者相對於另一者係整數倍。The present invention is characterized in that the outer circumference of the film formation substrate is the same length as the outer circumference of the laminate support, or the outer circumference of the film formation substrate or one of the outer circumferences of the laminate support is opposite to the other The number is an integer multiple.

於本發明中,可使由於於成膜基材上有突起物等缺陷因子而產生之陶瓷片材之缺陷部集中於積層結構體之特定之區域。具體而言,可使積層結構體上之陶瓷片材之積層結構體所產生之缺陷部集中於積層結構體之同一周軌道上(自傳送方向觀察陶瓷片材時之積層結構體之相同行)。進而,於積層支持體之外周長相對於成膜基材之外周長僅長整數倍之情形時,可使積層結構體上之陶瓷片材之積層結構體所產生之缺陷部集中於積層結構體之同一座標上(自傳送方向觀察陶瓷片材時之積層結構體之相同列及行)。In the present invention, the defective portion of the ceramic sheet due to the defect factor such as protrusions on the film-forming substrate can be concentrated in a specific region of the laminated structure. Specifically, the defective portion generated by the laminated structure of the ceramic sheet on the laminated structure can be concentrated on the same circumferential track of the laminated structure (the same row of the laminated structure when the ceramic sheet is observed from the conveying direction) . Further, when the outer circumference of the laminated support is only an integral multiple of the outer circumference of the film formation substrate, the defective portion generated by the laminated structure of the ceramic sheet on the laminated structure can be concentrated on the laminated structure. On the same coordinate (the same column and row of the laminated structure when the ceramic sheet is observed from the conveying direction).

本發明之特徵在於,於上述陶瓷片材捲繞於上述積層支持體之外周並形成上述陶瓷片材之積層結構體時,於上述成膜基材上持續形成有新的上述陶瓷片材。According to the present invention, when the ceramic sheet is wound around the outer periphery of the buildup support and the laminated structure of the ceramic sheet is formed, a new ceramic sheet is continuously formed on the film formation substrate.

根據本發明,由於可不是間歇運轉、而是藉由連續運轉來形成陶瓷片材之積層結構體,因此可於極短時間形成陶瓷片材之積層結構體。其結果,可提高陶瓷片材之積層結構體之製造效率。According to the present invention, since the laminated structure of the ceramic sheet can be formed by continuous operation instead of intermittent operation, the laminated structure of the ceramic sheet can be formed in a very short time. As a result, the manufacturing efficiency of the laminated structure of the ceramic sheet can be improved.

本發明之特徵在於,具有於捲繞於上述積層支持體之外周之上述陶瓷片材形成電極電路之電極電路形成部。The present invention is characterized in that the ceramic sheet is wound around the outer periphery of the buildup support to form an electrode circuit forming portion of the electrode circuit.

根據本發明,藉由於積層支持體之外周捲繞陶瓷片材、積層後由電極電路形成部於陶瓷片材形成電極電路,可不在意積層時之變形,提高電極電路之層間位置精度。反之,若於將陶瓷片材積層於積層支持體之前形成電極電路,則由於陶瓷片材於捲繞時之伸縮或者積層支持體之大小之變化等,各層間之電極電路之形成位置有偏離之虞。其結果,可省略設備之積層定位所涉及之機構,將設備價格抑制得較低,且可使設備小型化,將設置面積設定得較小。According to the present invention, since the ceramic sheet is wound around the laminated support, and the electrode circuit is formed on the ceramic sheet by the electrode circuit forming portion, the deformation can be prevented, and the interlayer positional accuracy of the electrode circuit can be improved. On the other hand, if the electrode circuit is formed before the ceramic sheet is laminated on the build-up support, the position of the electrode circuit between the layers is deviated due to the expansion or contraction of the ceramic sheet during winding or the change in the size of the build-up support. Hey. As a result, the mechanism involved in the lamination of the device can be omitted, the device price can be kept low, and the device can be miniaturized, and the installation area can be set small.

本發明之特徵在於,上述電極電路形成部係對捲繞於上述積層支持體之外周之上述陶瓷片材進行電極印刷之無版印刷裝置。According to the invention, the electrode circuit forming portion is a plateless printing device that performs electrode printing on the ceramic sheet wound around the outer periphery of the buildup support.

根據本發明,可形成於陶瓷片材之各層都不同之圖案之電極電路。另外,即使隨著於積層支持體上進行陶瓷片材之積層,使陶瓷片材之伸縮或者積層支持體之大小產生變化,亦可調整電極電路間之間距,形成無位置偏離之電極電路。According to the present invention, an electrode circuit which can be formed in a pattern in which each layer of the ceramic sheet is different can be formed. Further, even if the ceramic sheet is laminated on the build-up support, the expansion or contraction of the ceramic sheet or the size of the build-up support is changed, and the distance between the electrode circuits can be adjusted to form an electrode circuit having no positional deviation.

本發明係一種積層型電子零件之製造方法,其特徵在於包括:成膜形成步驟,其對於於外周實施有脫模處理之環形連續狀之成膜基材,藉由成膜形成部塗佈陶瓷漿料,使其乾燥而連續形成陶瓷片材;以及積層結構體形成步驟,其藉由介隔上述陶瓷片材使積層支持體對上述成膜基材接觸,使上述陶瓷片材自上述成膜基材剝離,藉由將該剝離之上述陶瓷片材捲繞於上述積層支持體之外周,形成上述陶瓷片材之積層結構體。The present invention relates to a method for producing a laminated electronic component, comprising: a film forming step of applying a film to a film forming substrate having a film-forming forming portion in a ring-shaped continuous film-forming substrate having a mold release treatment on the outer periphery; a slurry which is dried to continuously form a ceramic sheet; and a laminated structure forming step of bringing the build-up support into contact with the film-forming substrate by interposing the ceramic sheet, so that the ceramic sheet is formed from the film-forming substrate The material is peeled off, and the peeled ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet.

本發明係一種積層型電子零件之製造方法,其特徵在於包括:成膜形成步驟,其對於於外周實施有脫模處理之環形連續狀之成膜基材,藉由成膜形成部塗佈陶瓷漿料,使其乾燥而連續形成陶瓷片材;積層結構體形成步驟,其藉由將上述陶瓷片材捲繞於積層支持體之外周,形成上述陶瓷片材之積層結構體;以及運送步驟,其於上述成膜形成步驟之後且上述積層結構體形成步驟之前執行,中間剝離部使形成於上述成膜基材之上述陶瓷片材自上述成膜基材剝離,將該剝離之上述陶瓷片材藉由上述中間剝離部運送至上述積層支持體。The present invention relates to a method for producing a laminated electronic component, comprising: a film forming step of applying a film to a film forming substrate having a film-forming forming portion in a ring-shaped continuous film-forming substrate having a mold release treatment on the outer periphery; a slurry, which is continuously dried to form a ceramic sheet; a laminated structure forming step of forming the laminated structure of the ceramic sheet by winding the ceramic sheet around the outer periphery of the buildup support; and a transporting step This is performed after the film formation step and before the laminated structure forming step, and the intermediate peeling portion peels the ceramic sheet formed on the film formation substrate from the film formation substrate, and the peeled ceramic sheet is peeled off. The intermediate support portion is transported to the buildup support.

尤佳為,於上述積層結構體形成步驟中,於上述陶瓷片材捲繞於上述積層支持體之外周而形成上述陶瓷片材之積層結構體時,於上述成膜形成步驟中,於上述成膜基材持續形成新的上述陶瓷片材。In the above-mentioned laminated structure forming step, in the case where the ceramic sheet is wound around the outer periphery of the buildup support to form the laminated body of the ceramic sheet, in the film formation step, the above-described formation The film substrate continues to form a new ceramic sheet as described above.

根據本發明,由於可不是間歇運轉、而是藉由連續運轉來形成陶瓷片材之積層結構體,因此可於極短時間形成陶瓷片材之積層結構體。其結果,可提高陶瓷片材之積層結構體之製造效率。According to the present invention, since the laminated structure of the ceramic sheet can be formed by continuous operation instead of intermittent operation, the laminated structure of the ceramic sheet can be formed in a very short time. As a result, the manufacturing efficiency of the laminated structure of the ceramic sheet can be improved.

尤佳為,具有一面於上述積層支持體捲繞上述陶瓷片材、一面藉由電極電路形成部對上述積層支持體上之上述陶瓷片材形成電極電路之電極電路形成步驟。In particular, an electrode circuit forming step of forming an electrode circuit on the ceramic sheet on the build-up support by the electrode circuit forming portion while winding the ceramic sheet on the build-up support is provided.

根據本發明,於電極電路形成步驟中,藉由於積層支持體捲繞陶瓷片材,積層後,藉由電極電路形成部於陶瓷片材形成電極電路,可不在意積層時之變形,提高電極電路之層間位置精度。反之,若於將陶瓷片材積層於積層支持體之前形成電極電路,則由於陶瓷片材於捲繞時之伸縮或者積層支持體之大小之變化,各層間之電極電路之形成位置有可能偏離。其結果,可省略設備之積層定位所涉及之機構,將設備價格抑制得較低,且可使設備小型化,將設置面積設定得較小。According to the present invention, in the electrode circuit forming step, since the ceramic sheet is wound by the build-up support, after the layer is formed, the electrode circuit is formed on the ceramic sheet by the electrode circuit forming portion, so that the deformation of the layer can be prevented, and the electrode circuit can be improved. Inter-layer positional accuracy. On the other hand, if the electrode circuit is formed before the ceramic sheet is laminated on the build-up support, the position of the electrode circuit between the layers may be deviated due to the expansion or contraction of the ceramic sheet at the time of winding or the change in the size of the build-up support. As a result, the mechanism involved in the lamination of the device can be omitted, the device price can be kept low, and the device can be miniaturized, and the installation area can be set small.

進而,較佳為,作為上述電極電路形成部,使用對捲繞於上述積層支持體之外周之上述陶瓷片材進行電極印刷之無版印刷裝置。Furthermore, it is preferable to use a plateless printing apparatus that performs electrode printing on the ceramic sheet wound around the outer periphery of the buildup support as the electrode circuit forming portion.

根據本發明,可抑制電子零件產生之品質不良,以低成本、且可藉由不是間歇運轉而是連續運轉來提高積層型電子零件之製造效率(生產速度)。According to the present invention, it is possible to suppress the quality defect of the electronic component, and it is possible to improve the manufacturing efficiency (production speed) of the laminated electronic component by low-cost operation without continuous operation.

參照附圖,說明本發明之第一實施形態所涉及之積層型電子零件製造裝置及積層型電子零件之製造方法。此外,作為本發明之製造對象之「積層型電子零件」中,包含積層陶瓷電容器、積層陶瓷電感等積層型電子零件。下面,作為積層型電子零件,舉出積層陶瓷電容器為一個例子來進行說明。A laminated electronic component manufacturing apparatus and a method of manufacturing a laminated electronic component according to a first embodiment of the present invention will be described with reference to the drawings. In addition, the "layered electronic component" which is a target of the present invention includes a laminated electronic component such as a laminated ceramic capacitor or a laminated ceramic inductor. Hereinafter, a laminated ceramic capacitor will be described as an example of a laminated electronic component.

首先,說明積層型電子零件製造裝置。First, a laminated electronic component manufacturing apparatus will be described.

如圖1所示,積層型電子零件製造裝置10主要具有:於表面(外周面)實施有脫模處理並形成陶瓷片材S之塗佈輥12(成膜基材);以及將自塗佈輥12剝離之陶瓷片材S進行捲繞、形成陶瓷片材S之積層結構體S'之堆疊輥14(積層支持體)。As shown in Fig. 1, the laminated electronic component manufacturing apparatus 10 mainly includes a coating roll 12 (film forming substrate) on which a mold release treatment is performed on a surface (outer peripheral surface) to form a ceramic sheet S; and self-coating The ceramic sheet S from which the roll 12 is peeled off is wound to form a stacking roll 14 (layered support) of the laminated structure S' of the ceramic sheet S.

於塗佈輥12之附近配置有:用於向塗佈輥12之表面塗佈成為陶瓷片材S之材料之陶瓷漿料之成膜機構16(成膜形成部);用於向成膜機構16供給陶瓷漿料之給液機構18;以及用於使塗佈輥12之表面上之陶瓷漿料乾燥固化之乾燥硬化裝置20。該等構成部件之功能係用於於塗佈輥12之表面形成陶瓷片材S。A film forming mechanism 16 (film forming portion) for applying a ceramic slurry which is a material of the ceramic sheet S to the surface of the coating roller 12 is disposed in the vicinity of the coating roller 12; 16 a liquid supply mechanism 18 for supplying a ceramic slurry; and a drying and hardening device 20 for drying and solidifying the ceramic slurry on the surface of the coating roller 12. The functions of the constituent members are for forming a ceramic sheet S on the surface of the coating roller 12.

於堆疊輥14之附近配置有:用於於捲繞於堆疊輥14之表面之陶瓷片材S上形成電極電路24之電極電路形成機構22(電極電路形成部);以及用於使電極電路24乾燥之乾燥硬化裝置26。該等構成部件之功能係用於於捲繞於堆疊輥14之陶瓷片材S上形成電極電路24。In the vicinity of the stacking roller 14, an electrode circuit forming mechanism 22 (electrode circuit forming portion) for forming the electrode circuit 24 on the ceramic sheet S wound on the surface of the stacking roller 14 is disposed; and for making the electrode circuit 24 Dry drying and hardening device 26. The functions of the constituent members are for forming the electrode circuit 24 on the ceramic sheet S wound around the stacking roller 14.

具體而言,塗佈輥12係於表面實施有脫模處理之金屬等剛體輥(圓柱狀或者圓筒狀),由環形連續狀之基材構成。塗佈輥12構成為藉由未圖示之驅動源進行旋轉驅動。再者,所謂脫模處理,例如與鍍氟類處理等相對應。Specifically, the application roller 12 is a rigid body roller (cylindrical or cylindrical) made of a metal having a release treatment on the surface thereof, and is composed of a substrate having a continuous annular shape. The coating roller 12 is configured to be rotationally driven by a driving source (not shown). In addition, the mold release treatment corresponds to, for example, a fluorine plating treatment.

堆疊輥14係於可裝拆之金屬製之圓筒夾具之外周面黏貼彈性體(例如彈性膜、橡膠、黏性片材等)而構成。將該圓筒夾具安裝於轉軸,使其與塗佈輥12同步旋轉。再者,堆疊輥14可構成為藉由未圖示之驅動源進行旋轉驅動,亦可構成為受到塗佈輥12之旋轉力而連帶旋轉。堆疊輥14藉由未圖示之壓力賦予機構,對於塗佈輥12以特定之壓力(按壓力)按壓。彈性體之表面藉由黏著、靜電吸附等方法保持陶瓷片材S。另外,堆疊輥14捲繞之陶瓷片材S之互相重疊之片材層彼此之間被壓接,互相彼此保持。由於該等保持之力設定得大於塗佈輥12保持陶瓷片材S之力,因此陶瓷片材S自塗佈輥12剝離,轉印至堆疊輥14。The stacking roller 14 is formed by adhering an elastic body (for example, an elastic film, a rubber, a viscous sheet, or the like) to a peripheral surface of a detachable metal cylindrical jig. The cylinder jig is attached to the rotating shaft to rotate in synchronization with the coating roller 12. Further, the stacking roller 14 may be configured to be rotationally driven by a driving source (not shown), or may be configured to be rotated by the rotational force of the coating roller 12. The stacking roller 14 is pressed against the coating roller 12 by a specific pressure (pressing force) by a pressure applying mechanism (not shown). The surface of the elastomer holds the ceramic sheet S by adhesion, electrostatic adsorption or the like. Further, the mutually overlapping sheet layers of the ceramic sheets S wound by the stacking rolls 14 are crimped to each other and held to each other. Since the force of the holding is set larger than the force by which the coating roller 12 holds the ceramic sheet S, the ceramic sheet S is peeled off from the coating roller 12 and transferred to the stacking roller 14.

為了將陶瓷片材S自塗佈輥12向堆疊輥14可靠地轉印,較佳為一面將堆疊輥14適當向塗佈輥12按壓,一面進行轉印。假設,若於塗佈輥12與堆疊輥14之間有空間,則會形成運送中之陶瓷片材S不由其他部件支持之區間,於該區間有可能引起片材破裂。因此,將堆疊輥14適當向塗佈輥12按壓,以使得不形成不支持陶瓷片材S之區間。堆疊輥14之表面具有彈性,以使得按壓時不產生機械性扭曲。In order to reliably transfer the ceramic sheet S from the coating roller 12 to the stacking roller 14, it is preferable to transfer the stacking roller 14 while appropriately pressing the stacking roller 14 to the coating roller 12. It is assumed that if there is a space between the coating roller 12 and the stacking roller 14, a section in which the ceramic sheet S being conveyed is not supported by other members is formed, and the sheet may be broken in this section. Therefore, the stacking roller 14 is appropriately pressed toward the coating roller 12 so that a section in which the ceramic sheet S is not supported is not formed. The surface of the stacking roller 14 is elastic so that mechanical distortion is not generated when pressed.

此處,較佳為,塗佈輥12之外周長與堆疊輥14之外周長為相同長度,或者塗佈輥12之外周長或堆疊輥14之外周長之一者相對於另一者為整數倍。Here, it is preferable that the outer circumference of the coating roller 12 is the same length as the outer circumference of the stacking roller 14, or the outer circumference of the coating roller 12 or one of the outer circumferences of the stacking roller 14 is an integer relative to the other one. Times.

作為成膜機構16,例如可適當採用模具塗佈機、刮刀、輥塗機、噴墨型塗佈機等。再者,為了使形成於塗佈輥12之外周面之陶瓷片材S之膜厚更薄,較佳為對模具塗佈機設置上游減壓機構。自成膜機構16向塗佈輥12連續(非間歇)地塗佈陶瓷漿料,形成陶瓷片材S。如此,對於同一塗佈輥12,連續地供給陶瓷漿料。As the film forming mechanism 16, for example, a die coater, a doctor blade, a roll coater, an inkjet type coater or the like can be suitably used. Further, in order to make the thickness of the ceramic sheet S formed on the outer peripheral surface of the coating roll 12 thinner, it is preferable to provide an upstream pressure reducing mechanism to the die coater. The ceramic slurry is applied to the coating roller 12 continuously (non-intermittently) from the film forming mechanism 16 to form a ceramic sheet S. In this manner, the ceramic slurry is continuously supplied to the same coating roll 12.

作為給液機構18,例如採用缸型分配器。再者,給液機構18不限於缸型分配器,亦可適當採用齒輪泵、膜片泵等。As the liquid supply mechanism 18, for example, a cylinder type dispenser is employed. Further, the liquid supply mechanism 18 is not limited to the cylinder type distributor, and a gear pump, a diaphragm pump, or the like may be suitably used.

作為電極電路形成機構22,例如採用噴墨印刷裝置。電極電路形成機構22較佳為無版印刷機構,但將乾燥後之電極電路24轉印、或凹版印刷、凹版膠板印刷等機構皆可。電極電路形成機構22所使用之電極材料油墨,例如可使用於有機溶劑中溶解分散有Ni粉末(鎳粉末)及樹脂之材料。亦可係於UV硬化性之樹脂中分散有Ni粉末之材料。尤其,較佳為使用對於陶瓷塗膜之膨脹潤濕性較低之溶劑。再者,溶劑亦可係水類。As the electrode circuit forming mechanism 22, for example, an inkjet printing device is employed. The electrode circuit forming mechanism 22 is preferably a plateless printing mechanism, but may be a transfer of the dried electrode circuit 24, or a gravure printing or a gravure offset printing. The electrode material ink used in the electrode circuit forming mechanism 22 can be, for example, a material for dissolving and dispersing Ni powder (nickel powder) and a resin in an organic solvent. It is also possible to use a material in which a Ni powder is dispersed in a UV curable resin. In particular, it is preferred to use a solvent having a low swelling wettability with respect to the ceramic coating film. Further, the solvent may be water.

作為乾燥硬化裝置20、26,例如可採用藉由熱風進行乾燥之方法、對塗佈輥12或者堆疊輥14之外周面進行加熱之方法、或真空乾燥等。於使用UV硬化性之樹脂之情形時,亦可照射UV來使其硬化。乾燥硬化裝置20、26係用於將塗佈之陶瓷漿料或電極材料油墨乾燥或者硬化。As the drying and hardening devices 20 and 26, for example, a method of drying by hot air, a method of heating the outer circumferential surface of the coating roll 12 or the stacking roll 14, or vacuum drying may be employed. In the case of using a UV curable resin, it may be irradiated with UV to harden it. The drying and hardening devices 20, 26 are used to dry or harden the coated ceramic paste or electrode material ink.

作為陶瓷漿料,例如可採用於有機溶劑中溶解分散有陶瓷粉末及樹脂之材料。亦可使用於UV硬化樹脂中分散有陶瓷粉末之材料。再者,溶劑亦可係水類。As the ceramic slurry, for example, a material in which a ceramic powder and a resin are dissolved and dissolved in an organic solvent can be used. It is also possible to use a material in which a ceramic powder is dispersed in a UV hardening resin. Further, the solvent may be water.

其次,說明使用積層型電子零件製造裝置10之陶瓷片材S之積層結構體S'之製造方法。Next, a method of manufacturing the laminated structure S' of the ceramic sheet S using the laminated electronic component manufacturing apparatus 10 will be described.

以特定之速度使實施有脫模處理之塗佈輥12旋轉,藉由成膜機構16於其外周面塗佈陶瓷漿料。再者,使用給液機構18進行陶瓷漿料之供給。然後,使用乾燥硬化裝置20,使塗佈輥12上之陶瓷漿料乾燥並硬化。此處,為了藉由乾燥硬化裝置20乾燥陶瓷漿料,而使用特定溫度之熱風進行溫度調整,以使塗佈輥12之外周面成為適當溫度。再者,該等溫度可根據陶瓷片材S之材料來適當調整。The coating roll 12 subjected to the release treatment is rotated at a specific speed, and the ceramic slurry is applied to the outer peripheral surface thereof by the film forming mechanism 16. Further, the supply of the ceramic slurry is performed using the liquid supply mechanism 18. Then, the ceramic slurry on the coating roll 12 is dried and hardened using the drying and hardening device 20. Here, in order to dry the ceramic slurry by the drying and hardening device 20, the temperature is adjusted using hot air of a specific temperature so that the outer peripheral surface of the coating roller 12 becomes an appropriate temperature. Further, the temperatures can be appropriately adjusted according to the material of the ceramic sheet S.

其次,使堆疊輥14以特定之加壓力介隔陶瓷片材S與塗佈輥12加壓接觸。再者,上述加壓力需要根據陶瓷片材S之材料來適當調整。然後,使形成於塗佈輥12之外周面之乾燥後之陶瓷片材S自塗佈輥12之外周面剝離,使其轉印並捲繞至堆疊輥14之外周面上。此處,由於於塗佈輥12之外周面實施有脫模處理,且堆疊輥14相對於塗佈輥12以特定之加壓力介隔陶瓷片材S接觸,因此形成於塗佈輥12之外周面之乾燥後之陶瓷片材S容易自塗佈輥12之外周面剝離,轉印至堆疊輥14之外周面。堆疊輥14於金屬製之圓筒型夾具之外周面捲繞有彈性樹脂膜,其外周面之溫度藉由加熱冷卻機構進行溫度調整,以成為特定之溫度。再者,外周面之溫度需要根據陶瓷片材S之材料來適當調整。Next, the stacking roller 14 is brought into pressure contact with the coating roller 12 via the ceramic sheet S with a specific applied pressure. Further, the above-described pressing force needs to be appropriately adjusted in accordance with the material of the ceramic sheet S. Then, the dried ceramic sheet S formed on the outer peripheral surface of the coating roll 12 is peeled off from the outer peripheral surface of the coating roll 12, transferred, and wound onto the outer peripheral surface of the stacking roll 14. Here, since the release treatment is performed on the outer peripheral surface of the coating roller 12, and the stacking roller 14 is in contact with the coating roller 12 with a specific pressing force to block the ceramic sheet S, it is formed on the outer circumference of the coating roller 12. The dried ceramic sheet S is easily peeled off from the outer peripheral surface of the coating roll 12 and transferred to the outer peripheral surface of the stacking roll 14. The stacking roller 14 is wound with an elastic resin film on the outer peripheral surface of the cylindrical jig made of metal, and the temperature of the outer peripheral surface thereof is temperature-adjusted by a heating and cooling mechanism to have a specific temperature. Further, the temperature of the outer peripheral surface needs to be appropriately adjusted in accordance with the material of the ceramic sheet S.

於用堆疊輥14捲繞特定層之陶瓷片材S後,自電極電路形成機構22對陶瓷片材S塗佈電極材料油墨,印刷特定之圖形圖案之電極電路(內部電極電路)24。於印刷電極電路24後,自乾燥硬化裝置26吹出暖風,使電極電路24乾燥。藉此,於捲繞於堆疊輥14之陶瓷片材S之複數層(沿著徑向重疊之複數層)形成有電極電路24。此時,於積層電容器之製造中,改變圖形圖案來進行電極印刷,使得各層(各周)之電極電路24為對置電極。如此,形成特定層之電極電路層,之後,停止藉由電極電路形成機構22而進行之電極印刷,接著,將特定層之陶瓷片材S捲繞於堆疊輥14。之後,停止用堆疊輥14捲繞陶瓷片材S,形成陶瓷片材S之積層結構體S'。After the ceramic sheet S of the specific layer is wound by the stacking roller 14, the electrode material forming means 22 applies the electrode material ink to the ceramic sheet S, and the electrode circuit (internal electrode circuit) 24 of the specific pattern is printed. After the electrode circuit 24 is printed, warm air is blown from the drying and hardening device 26, and the electrode circuit 24 is dried. Thereby, the electrode circuit 24 is formed in a plurality of layers (a plurality of layers overlapping in the radial direction) of the ceramic sheet S wound around the stacking roller 14. At this time, in the manufacture of the multilayer capacitor, the pattern pattern is changed to perform electrode printing, so that the electrode circuits 24 of the respective layers (each circumference) are opposed electrodes. In this manner, the electrode circuit layer of the specific layer is formed, and then the electrode printing by the electrode circuit forming mechanism 22 is stopped, and then the ceramic sheet S of the specific layer is wound around the stacking roller 14. Thereafter, the ceramic sheet S is wound around the stacking roller 14 to form a laminated structure S' of the ceramic sheet S.

進而,將形成於堆疊輥14之陶瓷片材S之積層結構體S'與圓筒型夾具一起拆下,保持圓筒形狀來進行加壓衝壓,藉由切割機切斷為晶片狀。之後,經過燒成、形成電極電路(外部電極電路)等通常之製造製程,製造積層陶瓷電容器。Further, the laminated structure S' of the ceramic sheet S formed on the stacking roll 14 is removed together with the cylindrical jig, held in a cylindrical shape, pressed and pressed, and cut into a wafer shape by a cutter. Thereafter, a multilayer ceramic capacitor is produced by a usual manufacturing process such as firing and forming an electrode circuit (external electrode circuit).

根據第一實施形態之積層型電子零件製造裝置及積層型電子零件之製造方法,於塗佈輥12之外周面有微小之劃痕或突起物之情形時,塗佈之陶瓷片材S會產生重複之缺陷部28,但藉由重複使用同一塗佈輥12,於堆疊輥14上捲繞為圓筒狀之積層結構體S'中,可使缺陷部28集中於限定之區域。於將如此得到之陶瓷片材S之積層結構體S'切斷分割而得到之電子零件中,可抑制產生品質不良。According to the laminated electronic component manufacturing apparatus and the method of manufacturing a laminated electronic component according to the first embodiment, when the outer surface of the coating roller 12 has minute scratches or protrusions, the applied ceramic sheet S is produced. The defective portion 28 is repeated, but by repeatedly using the same coating roller 12, the laminated structure S' wound in the cylindrical shape on the stacking roller 14 allows the defective portion 28 to be concentrated in a limited region. In the electronic component obtained by cutting and dividing the laminated structure S' of the ceramic sheet S thus obtained, quality defects can be suppressed.

另外,於陶瓷片材S自塗佈輥12剝離、捲繞於堆疊輥14並形成陶瓷片材S之積層結構體S'時,由於於塗佈輥12持續形成有新的陶瓷片材S,因此於塗佈輥12形成陶瓷片材S、及於堆疊輥14形成陶瓷片材S之積層結構體S'係同時進行的。藉此,可不暫時停止塗佈輥12之旋轉驅動而連續地形成陶瓷片材S,另外,可不暫時停止堆疊輥14之旋轉驅動而連續地製造陶瓷片材S之積層結構體S'。如此,可不是間歇運轉、而是藉由連續運轉來形成陶瓷片材S之積層結構體S'。其結果,可於極短時間內形成陶瓷片材S之積層結構體S',可提高陶瓷片材S之積層結構體S'之製造效率。In addition, when the ceramic sheet S is peeled off from the coating roll 12 and wound around the stacking roll 14 to form the laminated structure S' of the ceramic sheet S, since the coating roll 12 is continuously formed with the new ceramic sheet S, Therefore, the ceramic sheet S is formed on the coating roller 12, and the laminated structure S' in which the ceramic sheet S is formed in the stacking roller 14 is simultaneously performed. By this, the ceramic sheet S can be continuously formed without temporarily stopping the rotational driving of the coating roller 12, and the laminated structure S' of the ceramic sheet S can be continuously produced without temporarily stopping the rotational driving of the stacking roller 14. In this manner, the laminated structure S' of the ceramic sheet S can be formed by continuous operation instead of intermittent operation. As a result, the laminated structure S' of the ceramic sheet S can be formed in a very short time, and the manufacturing efficiency of the laminated structure S' of the ceramic sheet S can be improved.

另外,由於陶瓷片材S形成於作為剛體之塗佈輥12上,被保持至積層部,因此即使使用較薄、低強度之陶瓷片材S,亦可抑制陶瓷片材S產生破裂或受損。其結果,可提高較薄、低強度之陶瓷片材S之可操作性。Further, since the ceramic sheet S is formed on the coating roll 12 as a rigid body and held to the laminated portion, even if a thin, low-strength ceramic sheet S is used, cracking or damage of the ceramic sheet S can be suppressed. . As a result, the operability of the thin, low-strength ceramic sheet S can be improved.

另外,如圖1所示,藉由使塗佈輥12與堆疊輥14之外周長相同或者一者為另一者之整數比,如圖2所示,可進一步使缺陷部28集中於特定部位。於外周長不成為整數比之情形時,堆疊輥14上之陶瓷片材S之積層結構體S'產生之缺陷部28集中於堆疊輥14之同一周軌道上(自傳送方向觀察陶瓷片材S時之積層結構體之相同行)。進而,於堆疊輥14之外周長相對於塗佈輥12之外周長要長整數倍之情形時,可使堆疊輥14上之陶瓷片材S之積層結構體S'產生之缺陷部28集中於堆疊輥14之同一座標上(自傳送方向觀察陶瓷片材S時之積層結構體之相同列及行)。Further, as shown in FIG. 1, by making the circumference of the coating roller 12 and the stacking roller 14 the same or one of the other, as shown in FIG. 2, the defect portion 28 can be further concentrated on a specific portion. . When the outer circumference does not become an integer ratio, the defective portion 28 generated by the laminated structure S' of the ceramic sheet S on the stacking roller 14 is concentrated on the same circumferential track of the stacking roller 14 (the ceramic sheet S is observed from the conveying direction) The same row of the layered structure at the time). Further, when the outer circumference of the stacking roller 14 is an integral multiple of the outer circumference of the coating roller 12, the defective portion 28 generated by the laminated structure S' of the ceramic sheet S on the stacking roller 14 can be concentrated on the stack. The same column of the roller 14 (the same column and row of the laminated structure when the ceramic sheet S is observed from the conveying direction).

另外,與已知之使用陶瓷漿料之間歇塗佈之方法相比,陶瓷片材S之膜厚可得到均勻性,可得到較高之生產率。即,由於陶瓷片材S之積層結構體S'連續形成為圓筒狀,因此與間歇塗佈相比,膜厚之穩定區域變寬。其結果,可自陶瓷片材S之積層結構體S'獲取穩定之品質之電子零件。陶瓷片材S之積層結構體之每單位體積可獲取之電子零件之個數變多。Further, the film thickness of the ceramic sheet S can be made uniform as compared with the known method of intermittent coating using a ceramic slurry, and a high productivity can be obtained. In other words, since the laminated structure S' of the ceramic sheet S is continuously formed into a cylindrical shape, the stable region of the film thickness is wider than that of the intermittent coating. As a result, stable electronic parts can be obtained from the laminated structure S' of the ceramic sheet S. The number of electronic parts that can be obtained per unit volume of the laminated structure of the ceramic sheet S is increased.

另外,於本實施形態中,不必使用用完就丟掉之基材(PET(polyethylene terephthalate,聚對苯二甲酸乙二醇酯)膜等)之中間消耗材料,可大幅降低陶瓷片材S之積層結構體S'、進而電子零件之製造成本。Further, in the present embodiment, it is not necessary to use an intermediate consumable material of a base material (PET (polyethylene terephthalate) film or the like) which is discarded after use, and the lamination of the ceramic sheet S can be greatly reduced. The manufacturing cost of the structure S' and further electronic parts.

另外,於本實施形態中,由於不使用膜對陶瓷片材S進行成形,藉此不需要先前技術所需要之對膜進行之操作,並且於陶瓷片材S積層於堆疊輥14後形成電極電路24,因此不必積層定位,可使積層型電子零件製造裝置10之設備緊湊(省略定位機構),可大幅削減設備價格。Further, in the present embodiment, since the ceramic sheet S is formed without using a film, the operation of the film required by the prior art is not required, and the electrode sheet is formed after the ceramic sheet S is laminated on the stacking roller 14. Therefore, it is not necessary to laminate the positioning, and the equipment of the laminated electronic component manufacturing apparatus 10 can be made compact (the positioning mechanism is omitted), and the price of the equipment can be drastically reduced.

另外,電極電路24之形成係使用噴墨等無版印刷操作方法,藉此可形成於陶瓷片材S之各層包括不同之電極圖案之電極電路24。尤其,由於於陶瓷片材S積層於堆疊輥14後形成電極電路24,因此即使隨著進行陶瓷片材S之積層,使得陶瓷片材S產生變形或堆疊輥S之外徑增加等而周長增加,但對此亦可適當調整電極電路24間之間距(間隔),形成無位置偏離之電極電路24。Further, the formation of the electrode circuit 24 is performed by a plateless printing operation method such as inkjet, whereby the electrode circuit 24 including the different electrode patterns in each layer of the ceramic sheet S can be formed. In particular, since the electrode sheet 24 is formed after the ceramic sheet S is laminated on the stacking roller 14, even if the lamination of the ceramic sheet S is performed, the ceramic sheet S is deformed or the outer diameter of the stacking roller S is increased, and the circumference is increased. Increasing, but the distance (interval) between the electrode circuits 24 can be appropriately adjusted to form the electrode circuit 24 without positional deviation.

其次,參照附圖,說明本發明之第二實施形態所涉及之積層型電子零件製造裝置及積層型電子零件之製造方法。再者,對與第一實施形態之結構重複之結構標註同一標記,並且省略重複之結構及作用效果之說明。Next, a laminated electronic component manufacturing apparatus and a method of manufacturing a laminated electronic component according to a second embodiment of the present invention will be described with reference to the drawings. The same components as those in the first embodiment are denoted by the same reference numerals, and the description of the overlapping structures and the effects will be omitted.

如圖3所示,第二實施形態之構成為,塗佈輥12與堆疊輥14介隔中間剝離輥30(中間剝離部)間接地連接。即,塗佈輥12與中間剝離輥30接觸,中間剝離輥30與堆疊輥14接觸。As shown in Fig. 3, in the second embodiment, the application roller 12 and the stacking roller 14 are indirectly connected via the intermediate peeling roller 30 (intermediate peeling portion). That is, the application roller 12 is in contact with the intermediate peeling roller 30, and the intermediate peeling roller 30 is in contact with the stacking roller 14.

中間剝離輥30具有藉由黏著等方法將陶瓷片材S自塗佈輥12剝離並轉印至堆疊輥14之功能。中間剝離輥30之材質可係樹脂或者金屬等,無特別限制。由於中間剝離輥30保持陶瓷片材S之力設定為大於塗佈輥12保持陶瓷片材S之力,並且小於堆疊輥14保持陶瓷片材S之力,因此陶瓷片材S自塗佈輥12剝離並被中間剝離輥30保持,之後轉印至堆疊輥14。另外,中間剝離輥30亦可係將陶瓷片材S自塗佈輥12吸附(吸引或者靜電吸附)並剝離保持之剝離保持輥。此時,較佳為中間剝離輥30構成為控制吸附之圓弧部位與不吸附之圓弧部位。於自塗佈輥12剝離陶瓷片材S時,使得與陶瓷片材S接觸之中間剝離輥30之特定部位具有吸附功能,於將剝離之陶瓷片材S轉印至堆疊輥14時,使得與陶瓷片材S接觸之中間剝離輥30之特定部位具有不吸附之區域,藉此可順利進行陶瓷片材S之剝離及轉印。The intermediate peeling roller 30 has a function of peeling the ceramic sheet S from the coating roller 12 by a method such as adhesion and transferring it to the stacking roller 14. The material of the intermediate peeling roller 30 may be resin or metal, and is not particularly limited. Since the force of the intermediate peeling roller 30 to hold the ceramic sheet S is set larger than the force of the coating roller 12 to hold the ceramic sheet S, and is smaller than the force by which the stacking roller 14 holds the ceramic sheet S, the ceramic sheet S is self-coated roller 12 It is peeled off and held by the intermediate peeling roller 30, and then transferred to the stacking roller 14. Further, the intermediate peeling roller 30 may be a peeling holding roller that adsorbs (sucks or electrostatically adsorbs) the ceramic sheet S from the coating roller 12 and peels and holds it. At this time, it is preferable that the intermediate peeling roller 30 is configured to control the arc portion to be adsorbed and the arc portion not to be adsorbed. When the ceramic sheet S is peeled off from the coating roller 12, a specific portion of the intermediate peeling roller 30 that is in contact with the ceramic sheet S has an adsorption function, and when the peeled ceramic sheet S is transferred to the stacking roller 14, The specific portion of the intermediate peeling roller 30 that is in contact with the ceramic sheet S has a region that is not adsorbed, whereby the peeling and transfer of the ceramic sheet S can be smoothly performed.

根據第二實施形態,陶瓷片材S自塗佈輥12剝離不會影響堆疊輥14一側之狀態,可進行穩定之操作。具體而言,若於堆疊輥14形成陶瓷片材S之積層結構體S',則堆疊輥14之包含陶瓷片材之大小(外徑)會增大,另外,於形成電極電路24之情形時,會產生該部位有凹凸等外形上之狀態變化。但是,藉由於塗佈輥12與堆疊輥14之間插入中間剝離輥30,可根據上述之堆疊輥14之狀態變化,適當調整堆疊輥14與中間剝離輥30之位置關係或壓力等。藉此,可防止由於堆疊輥14之狀態變化而導致形成於堆疊輥14上之陶瓷片材S之積層結構體S'之品質劣化。另外,藉由設計使得堆疊輥14與塗佈輥12不直接接觸,可防止堆疊輥14之加壓使塗佈輥12受損,可防止陶瓷片材S、進而電子零件之品質劣化。According to the second embodiment, the peeling of the ceramic sheet S from the coating roller 12 does not affect the state of the stacking roller 14 side, and stable operation can be performed. Specifically, when the laminated structure S' of the ceramic sheet S is formed in the stacking roller 14, the size (outer diameter) of the ceramic sheet including the stacking roller 14 is increased, and in the case of forming the electrode circuit 24, There will be a state change in the shape of the portion such as unevenness. However, by inserting the intermediate peeling roller 30 between the coating roller 12 and the stacking roller 14, the positional relationship, pressure, and the like of the stacking roller 14 and the intermediate peeling roller 30 can be appropriately adjusted according to the state change of the stacking roller 14 described above. Thereby, deterioration of the quality of the laminated structure S' of the ceramic sheet S formed on the stacking roller 14 due to the state change of the stacking roller 14 can be prevented. Further, by designing the stacking roller 14 and the coating roller 12 not to be in direct contact with each other, it is possible to prevent the coating roller 12 from being damaged by the pressurization of the stacking roller 14, and it is possible to prevent deterioration of the quality of the ceramic sheet S and further the electronic component.

其次,參照附圖,說明本發明之第三實施形態所涉及之積層型電子零件製造裝置及積層型電子零件之製造方法。此外,對與第一實施形態及第二實施形態之結構重複之結構標註同一標記,並且省略重複之結構及作用效果之說明。Next, a laminated electronic component manufacturing apparatus and a method of manufacturing a laminated electronic component according to a third embodiment of the present invention will be described with reference to the drawings. The same components as those in the first embodiment and the second embodiment are denoted by the same reference numerals, and the description of the overlapping structure and operation will be omitted.

如圖4所示,第三實施形態使用金屬製之長條帶32,代替第二實施形態之堆疊輥14之圓筒型夾具。長條帶32之外周長比塗佈輥12之外周長要長。於該長條帶32上積層有陶瓷片材S之積層結構體S'。再者,中間剝離輥30適當根據需要設置即可,亦可使用金屬製之長條帶32,代替不採用中間剝離輥30之第一實施形態之堆疊輥14之圓筒型夾具。As shown in Fig. 4, in the third embodiment, a metal strip 32 is used instead of the cylindrical jig of the stacking roller 14 of the second embodiment. The outer circumference of the long strip 32 is longer than the outer circumference of the coating roll 12. A laminated structure S' of the ceramic sheet S is laminated on the long strip 32. Further, the intermediate peeling roller 30 may be provided as needed, and a metal long strip 32 may be used instead of the cylindrical jig of the stacking roller 14 of the first embodiment which does not employ the intermediate peeling roller 30.

根據第三實施形態,由於長條帶32之外周長比塗佈輥12之外周長要長,因此可增設電極電路形成機構22,另外,可擴展藉由乾燥硬化裝置26於長條帶32上之乾燥區域。藉此,積層於長條帶32上之陶瓷片材S之電極電路24之形成速度(亦包含乾燥速度)變快,進而可提高電子零件之製造速度。According to the third embodiment, since the outer circumference of the long strip 32 is longer than the outer circumference of the application roller 12, the electrode circuit forming mechanism 22 can be additionally provided, and the drying hardening device 26 can be extended on the long strip 32. Dry area. Thereby, the forming speed (including the drying speed) of the electrode circuit 24 of the ceramic sheet S laminated on the long strip 32 is increased, and the manufacturing speed of the electronic component can be improved.

10...積層型電子零件製造裝置10. . . Laminated electronic component manufacturing device

12...塗佈輥(成膜基材)12. . . Coating roll (film forming substrate)

14...堆疊輥(積層支持體)14. . . Stacking roll (layered support)

16...成膜機構(成膜形成部)16. . . Film forming mechanism (film forming portion)

18...給液機構18. . . Liquid supply mechanism

20...乾燥硬化裝置20. . . Drying and hardening device

22...電極電路形成機構(電極電路形成部)twenty two. . . Electrode circuit forming mechanism (electrode circuit forming portion)

24...電極電路twenty four. . . Electrode circuit

26...乾燥硬化裝置26. . . Drying and hardening device

30...中間剝離輥(中間剝離部)30. . . Intermediate peeling roller (intermediate peeling part)

S...陶瓷片材S. . . Ceramic sheet

S'...陶瓷片材之積層結構體S'. . . Laminated structure of ceramic sheet

圖1係本發明之第一實施形態所涉及之積層型電子零件製造裝置之說明圖。1 is an explanatory view of a laminated electronic component manufacturing apparatus according to a first embodiment of the present invention.

圖2係表示陶瓷片材上之缺陷部之位置之說明圖。Fig. 2 is an explanatory view showing the position of a defective portion on a ceramic sheet.

圖3係本發明之第二實施形態所涉及之積層型電子零件製造裝置之說明圖。FIG. 3 is an explanatory view of a laminated electronic component manufacturing apparatus according to a second embodiment of the present invention.

圖4係本發明之第三實施形態所涉及之積層型電子零件製造裝置之說明圖。FIG. 4 is an explanatory view of a laminated electronic component manufacturing apparatus according to a third embodiment of the present invention.

10...積層型電子零件製造裝置10. . . Laminated electronic component manufacturing device

12...塗佈輥(成膜基材)12. . . Coating roll (film forming substrate)

14...堆疊輥(積層支持體)14. . . Stacking roll (layered support)

16...成膜機構(成膜形成部)16. . . Film forming mechanism (film forming portion)

18...給液機構18. . . Liquid supply mechanism

20...乾燥硬化裝置20. . . Drying and hardening device

22...電極電路形成機構(電極電路形成部)twenty two. . . Electrode circuit forming mechanism (electrode circuit forming portion)

24...電極電路twenty four. . . Electrode circuit

26...乾燥硬化裝置26. . . Drying and hardening device

S...陶瓷片材S. . . Ceramic sheet

S'...陶瓷片材之積層結構體S'. . . Laminated structure of ceramic sheet

Claims (13)

一種積層型電子零件製造裝置,其特徵在於包括:環形連續狀之成膜基材,其係於外周表面實施有脫模處理;成膜形成部,其係對於上述成膜基材之表面塗佈陶瓷漿料,使其乾燥而連續形成陶瓷片材;以及積層支持體,其係介隔上述陶瓷片材與上述成膜基材接觸,使乾燥後之上述陶瓷片材自上述成膜基材連續剝離,藉由將自上述成膜形成部連續之上述陶瓷片材捲繞於外周來形成上述陶瓷片材之積層結構體,其中於已剝離上述陶瓷片材之上述成膜基材之表面反覆形成陶瓷片材。 A laminated electronic component manufacturing apparatus comprising: a continuous annular film-forming substrate which is subjected to a mold release treatment on an outer peripheral surface; and a film formation portion which coats a surface of the film formation substrate a ceramic slurry which is dried to continuously form a ceramic sheet; and a build-up support which is in contact with the film-forming substrate via the ceramic sheet, so that the dried ceramic sheet is continuous from the film-forming substrate The peeling is performed by winding the ceramic sheet continuous from the film forming portion on the outer circumference to form a laminated structure of the ceramic sheet, wherein the surface of the film forming substrate from which the ceramic sheet has been peeled off is formed over the surface. Ceramic sheet. 一種積層型電子零件製造裝置,其特徵在於包括:環形連續狀之成膜基材,其係於外周表面實施有脫模處理;成膜形成部,其係對於上述成膜基材之表面塗佈陶瓷漿料,使其乾燥而連續形成陶瓷片材;積層支持體,其係藉由將自上述成膜形成部連續之上述陶瓷片材捲繞於外周,而形成上述陶瓷片材之積層結構體;以及中間剝離部,其係介隔上述陶瓷片材與上述成膜基材及上述積層支持體接觸而設置,使形成於上述成膜基材之上述陶瓷片材自上述成膜基材連續剝離並保持之,將該剝離並保持之上述陶瓷片材運送至上述積層支持體, 其中於已剝離上述陶瓷片材之上述成膜基材之表面反覆形成陶瓷片材。 A laminated electronic component manufacturing apparatus comprising: a continuous annular film-forming substrate which is subjected to a mold release treatment on an outer peripheral surface; and a film formation portion which coats a surface of the film formation substrate The ceramic slurry is dried to continuously form a ceramic sheet; and the build-up support is formed by winding the ceramic sheet continuous from the film formation portion on the outer circumference to form a laminated structure of the ceramic sheet. And an intermediate peeling portion which is provided in contact with the film formation substrate and the buildup support body, and the ceramic sheet formed on the film formation substrate is continuously peeled off from the film formation substrate And maintaining, transporting the peeled and held ceramic sheet to the laminated support, The ceramic sheet is repeatedly formed on the surface of the film-forming substrate from which the ceramic sheet has been peeled off. 如請求項1之積層型電子零件製造裝置,其中上述成膜基材之外周長與上述積層支持體之外周長係相同長度,或者上述成膜基材之外周長或上述積層支持體之外周長之一者相對於另一者係整數倍。 The apparatus for manufacturing a laminated electronic component according to claim 1, wherein the outer circumference of the film formation substrate is the same length as the outer circumference of the buildup support, or the outer circumference of the film formation substrate or the outer circumference of the laminate support One is an integer multiple of the other. 如請求項2之積層型電子零件製造裝置,其中上述成膜基材之外周長與上述積層支持體之外周長係相同長度,或者上述成膜基材之外周長或上述積層支持體之外周長之一者相對於另一者係整數倍。 The apparatus for manufacturing a laminated electronic component according to claim 2, wherein the outer circumference of the film formation substrate is the same length as the outer circumference of the laminate support, or the outer circumference of the film formation substrate or the outer circumference of the laminate support One is an integer multiple of the other. 如請求項1至4中任一項之積層型電子零件製造裝置,其中於上述陶瓷片材捲繞於上述積層支持體之外周而形成上述陶瓷片材之積層結構體時,於上述成膜基材持續形成有新的上述陶瓷片材。 The laminated electronic component manufacturing apparatus according to any one of claims 1 to 4, wherein, when the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet, the film forming substrate is formed. A new ceramic sheet as described above is continuously formed. 如請求項1至4中任一項之積層型電子零件製造裝置,其包括於捲繞於上述積層支持體之外周之上述陶瓷片材形成電極電路之電極電路形成部。 The laminated electronic component manufacturing apparatus according to any one of claims 1 to 4, comprising an electrode circuit forming portion of the ceramic sheet forming electrode circuit wound around the outer periphery of the buildup support. 如請求項6之積層型電子零件製造裝置,其中上述電極電路形成部係對捲繞於上述積層支持體之外周之上述陶瓷片材進行電極印刷之無版印刷裝置。 The apparatus for manufacturing a laminated electronic component according to claim 6, wherein the electrode circuit forming portion is a plateless printing device that performs electrode printing on the ceramic sheet wound around the outer periphery of the buildup support. 一種積層型電子零件之製造方法,其特徵在於包括:成膜形成步驟,其對於於外周表面實施有脫模處理之環形連續狀之成膜基材之表面,藉由成膜形成部塗佈陶瓷漿料,使其乾燥而連續形成陶瓷片材;以及 積層結構體形成步驟,其藉由介隔上述陶瓷片材使積層支持體對於上述成膜基材接觸,而使乾燥後之上述陶瓷片材自上述成膜基材連續剝離,藉由將自上述成膜形成部連續之上述陶瓷片材捲繞於上述積層支持體之外周,而形成上述陶瓷片材之積層結構體,其中於已剝離上述陶瓷片材之上述成膜基材之表面反覆形成陶瓷片材。 A method for producing a laminated electronic component, comprising: a film forming step of applying a ceramic to a surface of a film-forming substrate having a ring-shaped continuous shape having a release treatment on an outer peripheral surface; Slurry, drying it to continuously form a ceramic sheet; a laminated structure forming step of continuously contacting the dried ceramic sheet from the film forming substrate by contacting the laminated support with the ceramic substrate to form the laminated support from the film forming substrate The ceramic sheet continuous in the film forming portion is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet, wherein the ceramic sheet is repeatedly formed on the surface of the film-forming substrate from which the ceramic sheet has been peeled off. material. 一種積層型電子零件之製造方法,其特徵在於包括:成膜形成步驟,其對於於外周表面實施有脫模處理之環形連續狀之成膜基材之表面,藉由成膜形成部塗佈陶瓷漿料,使其乾燥而連續形成陶瓷片材;積層結構體形成步驟,其藉由將自上述成膜形成部連續之上述陶瓷片材捲繞於積層支持體之外周,而形成上述陶瓷片材之積層結構體;以及運送步驟,其於上述成膜形成步驟之後且上述積層結構體形成步驟之前執行,中間剝離部使形成於上述成膜基材之上述陶瓷片材自上述成膜基材連續剝離並保持之,將該剝離並保持之上述陶瓷片材藉由上述中間剝離部運送至上述積層支持體。 A method for producing a laminated electronic component, comprising: a film forming step of applying a ceramic to a surface of a film-forming substrate having a ring-shaped continuous shape having a release treatment on an outer peripheral surface; The slurry is dried to continuously form a ceramic sheet; and the laminated structure is formed by winding the ceramic sheet continuous from the film forming portion around the outer periphery of the buildup support to form the ceramic sheet a laminated structure; and a transporting step performed after the film forming step and before the laminated structure forming step, wherein the intermediate peeling portion continuously forms the ceramic sheet formed on the film forming substrate from the film forming substrate After peeling and holding, the ceramic sheet which is peeled off and held is transported to the buildup support by the intermediate peeling portion. 如請求項8之積層型電子零件之製造方法,其中於上述積層結構體形成步驟中,於上述陶瓷片材捲繞於上述積層支持體之外周而形成上述陶瓷片材之積層結構體時,於上述成膜形成步驟中,於上述成膜基材持續形成新的上述陶瓷片材。 The method of manufacturing a laminated electronic component according to claim 8, wherein in the step of forming the laminated structure, when the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet, In the film formation step described above, a new ceramic sheet is continuously formed on the film formation substrate. 如請求項9之積層型電子零件之製造方法,其中於上述積層結構體形成步驟中,於上述陶瓷片材捲繞於上述積層支持體之外周而形成上述陶瓷片材之積層結構體時,於上述成膜形成步驟中,於上述成膜基材持續形成新的上述陶瓷片材。 The method of manufacturing a laminated electronic component according to claim 9, wherein in the step of forming the laminated structure, when the ceramic sheet is wound around the outer periphery of the buildup support to form a laminated structure of the ceramic sheet, In the film formation step described above, a new ceramic sheet is continuously formed on the film formation substrate. 如請求項8至11中任一項之積層型電子零件之製造方法,其包括一面於上述積層支持體捲繞上述陶瓷片材、一面藉由電極電路形成部對上述積層支持體上之上述陶瓷片材形成電極電路之電極電路形成步驟。 The method for producing a laminated electronic component according to any one of claims 8 to 11, comprising: winding the ceramic sheet on the build-up support, and the ceramic on the build-up support by an electrode circuit forming portion; The sheet forms an electrode circuit forming step of the electrode circuit. 如請求項12之積層型電子零件之製造方法,其中作為上述電極電路形成部,使用對捲繞於上述積層支持體之外周之上述陶瓷片材進行電極印刷之無版印刷裝置。 The method of manufacturing a laminated electronic component according to claim 12, wherein the electrode circuit forming portion is a plateless printing device that performs electrode printing on the ceramic sheet wound around the outer periphery of the buildup support.
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