TWI463254B - Black photoresist with photosensitive resin composition and color filter shading film - Google Patents
Black photoresist with photosensitive resin composition and color filter shading film Download PDFInfo
- Publication number
- TWI463254B TWI463254B TW099103346A TW99103346A TWI463254B TW I463254 B TWI463254 B TW I463254B TW 099103346 A TW099103346 A TW 099103346A TW 99103346 A TW99103346 A TW 99103346A TW I463254 B TWI463254 B TW I463254B
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- Taiwan
- Prior art keywords
- group
- resin composition
- photosensitive resin
- light
- shielding
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 44
- 229920002120 photoresistant polymer Polymers 0.000 title claims description 27
- 150000001875 compounds Chemical class 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 40
- 125000004432 carbon atom Chemical group C* 0.000 claims description 32
- -1 fluorenyl fluorene Chemical compound 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 20
- 239000011347 resin Substances 0.000 claims description 20
- 239000003999 initiator Substances 0.000 claims description 17
- 239000007787 solid Substances 0.000 claims description 14
- 125000000217 alkyl group Chemical group 0.000 claims description 13
- 238000011161 development Methods 0.000 claims description 13
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 13
- 239000000178 monomer Substances 0.000 claims description 13
- 239000003513 alkali Substances 0.000 claims description 12
- 239000012860 organic pigment Substances 0.000 claims description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 8
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 claims description 8
- 239000006185 dispersion Substances 0.000 claims description 8
- 125000003700 epoxy group Chemical group 0.000 claims description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 8
- 150000008064 anhydrides Chemical class 0.000 claims description 7
- 125000003118 aryl group Chemical group 0.000 claims description 7
- 125000005843 halogen group Chemical group 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 150000007519 polyprotic acids Polymers 0.000 claims description 7
- 239000006229 carbon black Substances 0.000 claims description 6
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 125000003342 alkenyl group Chemical group 0.000 claims description 4
- 125000003545 alkoxy group Chemical group 0.000 claims description 4
- 125000000304 alkynyl group Chemical group 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 125000005641 methacryl group Chemical group 0.000 claims description 3
- 239000007795 chemical reaction product Substances 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 claims description 2
- 150000001735 carboxylic acids Chemical class 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 20
- 239000011521 glass Substances 0.000 description 17
- 239000011248 coating agent Substances 0.000 description 16
- 238000000576 coating method Methods 0.000 description 16
- 239000011159 matrix material Substances 0.000 description 16
- 239000000203 mixture Substances 0.000 description 16
- 238000012360 testing method Methods 0.000 description 14
- 239000002253 acid Substances 0.000 description 13
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 239000000243 solution Substances 0.000 description 11
- 239000002904 solvent Substances 0.000 description 11
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 10
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 9
- 239000000049 pigment Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000004593 Epoxy Substances 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 239000004094 surface-active agent Substances 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 6
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 6
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- 229930185605 Bisphenol Natural products 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 4
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 239000007822 coupling agent Substances 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 150000003254 radicals Chemical class 0.000 description 4
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- 229960002130 benzoin Drugs 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 2
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- VNGLVZLEUDIDQH-UHFFFAOYSA-N 4-[2-(4-hydroxyphenyl)propan-2-yl]phenol;2-methyloxirane Chemical compound CC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 VNGLVZLEUDIDQH-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000004386 diacrylate group Chemical group 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 125000005395 methacrylic acid group Chemical group 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000013001 point bending Methods 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- DLDWUFCUUXXYTB-UHFFFAOYSA-N (2-oxo-1,2-diphenylethyl) 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OC(C=1C=CC=CC=1)C(=O)C1=CC=CC=C1 DLDWUFCUUXXYTB-UHFFFAOYSA-N 0.000 description 1
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 1
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 1
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- RUJPNZNXGCHGID-UHFFFAOYSA-N (Z)-beta-Terpineol Natural products CC(=C)C1CCC(C)(O)CC1 RUJPNZNXGCHGID-UHFFFAOYSA-N 0.000 description 1
- ADYKPXIKPPZOQF-UHFFFAOYSA-N 1,1'-biphenyl;hydrazine Chemical compound NN.C1=CC=CC=C1C1=CC=CC=C1 ADYKPXIKPPZOQF-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- 229940043375 1,5-pentanediol Drugs 0.000 description 1
- VNQXSTWCDUXYEZ-UHFFFAOYSA-N 1,7,7-trimethylbicyclo[2.2.1]heptane-2,3-dione Chemical compound C1CC2(C)C(=O)C(=O)C1C2(C)C VNQXSTWCDUXYEZ-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- ALVZNPYWJMLXKV-UHFFFAOYSA-N 1,9-Nonanediol Chemical compound OCCCCCCCCCO ALVZNPYWJMLXKV-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- NANSLUCRDVPGIO-UHFFFAOYSA-N 1-(4-ethenoxyphenyl)-1,2-dimethylhydrazine Chemical compound C(=C)OC1=CC=C(C=C1)N(NC)C NANSLUCRDVPGIO-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- GEUYACYJMUQXCF-UHFFFAOYSA-N 1-ethyl-2-(2-phenylethenyl)benzene Chemical compound CCC1=CC=CC=C1C=CC1=CC=CC=C1 GEUYACYJMUQXCF-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- VOBUAPTXJKMNCT-UHFFFAOYSA-N 1-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound CCCCCC(OC(=O)C=C)OC(=O)C=C VOBUAPTXJKMNCT-UHFFFAOYSA-N 0.000 description 1
- VYMSWGOFSKMMCE-UHFFFAOYSA-N 10-butyl-2-chloroacridin-9-one Chemical compound ClC1=CC=C2N(CCCC)C3=CC=CC=C3C(=O)C2=C1 VYMSWGOFSKMMCE-UHFFFAOYSA-N 0.000 description 1
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Natural products C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- WDFYPITVMAKZRL-UHFFFAOYSA-N 2,2-dimethylpropane-1,3-diol;2-methyloxirane Chemical compound CC1CO1.OCC(C)(C)CO WDFYPITVMAKZRL-UHFFFAOYSA-N 0.000 description 1
- XZNZSQWHZSUEJJ-UHFFFAOYSA-N 2,2-dimethylpropane-1,3-diol;oxirane Chemical compound C1CO1.OCC(C)(C)CO XZNZSQWHZSUEJJ-UHFFFAOYSA-N 0.000 description 1
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 1
- JJPKWNXRUDKBQT-UHFFFAOYSA-N 2,4-bis(trichloromethyl)-6-[2-(3,4,5-trimethoxyphenyl)ethenyl]-1,3,5-triazine Chemical compound COC1=C(OC)C(OC)=CC(C=CC=2N=C(N=C(N=2)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl)=C1 JJPKWNXRUDKBQT-UHFFFAOYSA-N 0.000 description 1
- BTLCARZJJIFUNV-UHFFFAOYSA-N 2,4-dichloro-9h-thioxanthene Chemical compound C1=CC=C2CC3=CC(Cl)=CC(Cl)=C3SC2=C1 BTLCARZJJIFUNV-UHFFFAOYSA-N 0.000 description 1
- MFUCEQWAFQMGOR-UHFFFAOYSA-N 2,4-diethyl-9h-thioxanthene Chemical compound C1=CC=C2CC3=CC(CC)=CC(CC)=C3SC2=C1 MFUCEQWAFQMGOR-UHFFFAOYSA-N 0.000 description 1
- WPZJSWWEEJJSIZ-UHFFFAOYSA-N 2,6-dibromo-4-[(3,5-dibromo-4-hydroxyphenyl)methyl]phenol Chemical compound C1=C(Br)C(O)=C(Br)C=C1CC1=CC(Br)=C(O)C(Br)=C1 WPZJSWWEEJJSIZ-UHFFFAOYSA-N 0.000 description 1
- AIJGGGMPUQQCAB-UHFFFAOYSA-N 2,6-dibromo-4-[9-(3,5-dibromo-4-hydroxyphenyl)-10H-anthracen-9-yl]phenol Chemical compound OC1=C(C=C(C=C1Br)C1(C2=CC=CC=C2CC=2C=CC=CC1=2)C1=CC(=C(C(=C1)Br)O)Br)Br AIJGGGMPUQQCAB-UHFFFAOYSA-N 0.000 description 1
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- KYPYTERUKNKOLP-UHFFFAOYSA-N Tetrachlorobisphenol A Chemical compound C=1C(Cl)=C(O)C(Cl)=CC=1C(C)(C)C1=CC(Cl)=C(O)C(Cl)=C1 KYPYTERUKNKOLP-UHFFFAOYSA-N 0.000 description 1
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- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- OKKRPWIIYQTPQF-UHFFFAOYSA-N Trimethylolpropane trimethacrylate Chemical compound CC(=C)C(=O)OCC(CC)(COC(=O)C(C)=C)COC(=O)C(C)=C OKKRPWIIYQTPQF-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- FHLPGTXWCFQMIU-UHFFFAOYSA-N [4-[2-(4-prop-2-enoyloxyphenyl)propan-2-yl]phenyl] prop-2-enoate Chemical compound C=1C=C(OC(=O)C=C)C=CC=1C(C)(C)C1=CC=C(OC(=O)C=C)C=C1 FHLPGTXWCFQMIU-UHFFFAOYSA-N 0.000 description 1
- STOLYTNTPGXYRW-UHFFFAOYSA-N [nitro(phenyl)methyl] 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OC([N+]([O-])=O)C1=CC=CC=C1 STOLYTNTPGXYRW-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- BTBJBAZGXNKLQC-UHFFFAOYSA-N ammonium lauryl sulfate Chemical compound [NH4+].CCCCCCCCCCCCOS([O-])(=O)=O BTBJBAZGXNKLQC-UHFFFAOYSA-N 0.000 description 1
- 229940063953 ammonium lauryl sulfate Drugs 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 1
- 125000005577 anthracene group Chemical group 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 229960003237 betaine Drugs 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- VCCBEIPGXKNHFW-UHFFFAOYSA-N biphenyl-4,4'-diol Chemical compound C1=CC(O)=CC=C1C1=CC=C(O)C=C1 VCCBEIPGXKNHFW-UHFFFAOYSA-N 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- WJLVDUQVYDVHDC-UHFFFAOYSA-N bis[4-[ethyl(methyl)amino]phenyl]methanone Chemical compound C1=CC(N(C)CC)=CC=C1C(=O)C1=CC=C(N(C)CC)C=C1 WJLVDUQVYDVHDC-UHFFFAOYSA-N 0.000 description 1
- ZFVMWEVVKGLCIJ-UHFFFAOYSA-N bisphenol AF Chemical compound C1=CC(O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(O)C=C1 ZFVMWEVVKGLCIJ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
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- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
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- 229960001701 chloroform Drugs 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
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- IFDVQVHZEKPUSC-UHFFFAOYSA-N cyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCC=CC1C(O)=O IFDVQVHZEKPUSC-UHFFFAOYSA-N 0.000 description 1
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
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- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 1
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- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- KGGOIDKBHYYNIC-UHFFFAOYSA-N ditert-butyl 4-[3,4-bis(tert-butylperoxycarbonyl)benzoyl]benzene-1,2-dicarboperoxoate Chemical compound C1=C(C(=O)OOC(C)(C)C)C(C(=O)OOC(C)(C)C)=CC=C1C(=O)C1=CC=C(C(=O)OOC(C)(C)C)C(C(=O)OOC(C)(C)C)=C1 KGGOIDKBHYYNIC-UHFFFAOYSA-N 0.000 description 1
- DDXLVDQZPFLQMZ-UHFFFAOYSA-M dodecyl(trimethyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)C DDXLVDQZPFLQMZ-UHFFFAOYSA-M 0.000 description 1
- SYELZBGXAIXKHU-UHFFFAOYSA-N dodecyldimethylamine N-oxide Chemical compound CCCCCCCCCCCC[N+](C)(C)[O-] SYELZBGXAIXKHU-UHFFFAOYSA-N 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- WHRIKZCFRVTHJH-UHFFFAOYSA-N ethylhydrazine Chemical compound CCNN WHRIKZCFRVTHJH-UHFFFAOYSA-N 0.000 description 1
- RMBPEFMHABBEKP-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2C3=C[CH]C=CC3=CC2=C1 RMBPEFMHABBEKP-UHFFFAOYSA-N 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 235000019256 formaldehyde Nutrition 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 125000003454 indenyl group Chemical group C1(C=CC2=CC=CC=C12)* 0.000 description 1
- CDOSHBSSFJOMGT-UHFFFAOYSA-N linalool Chemical compound CC(C)=CCCC(C)(O)C=C CDOSHBSSFJOMGT-UHFFFAOYSA-N 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- VTWDKFNVVLAELH-UHFFFAOYSA-N methyl-p-benzoquinone Natural products CC1=CC(=O)C=CC1=O VTWDKFNVVLAELH-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- GYVGXEWAOAAJEU-UHFFFAOYSA-N n,n,4-trimethylaniline Chemical compound CN(C)C1=CC=C(C)C=C1 GYVGXEWAOAAJEU-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- ZCNGIANFOSHGME-UHFFFAOYSA-N octa-1,2-diene Chemical compound CCCCCC=C=C ZCNGIANFOSHGME-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- UPHWVVKYDQHTCF-UHFFFAOYSA-N octadecylazanium;acetate Chemical compound CC(O)=O.CCCCCCCCCCCCCCCCCCN UPHWVVKYDQHTCF-UHFFFAOYSA-N 0.000 description 1
- GLZWNFNQMJAZGY-UHFFFAOYSA-N octaethylene glycol Chemical compound OCCOCCOCCOCCOCCOCCOCCOCCO GLZWNFNQMJAZGY-UHFFFAOYSA-N 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- HPAFOABSQZMTHE-UHFFFAOYSA-N phenyl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)C1=CC=CC=C1 HPAFOABSQZMTHE-UHFFFAOYSA-N 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- UFUASNAHBMBJIX-UHFFFAOYSA-N propan-1-one Chemical compound CC[C]=O UFUASNAHBMBJIX-UHFFFAOYSA-N 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000002311 subsequent effect Effects 0.000 description 1
- QJVXKWHHAMZTBY-GCPOEHJPSA-N syringin Chemical compound COC1=CC(\C=C\CO)=CC(OC)=C1O[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 QJVXKWHHAMZTBY-GCPOEHJPSA-N 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
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- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
本發明係有關黑色光阻用感光性樹脂組成物及彩色濾光片遮光膜,詳細為關於適用於在透明基板上形成微細遮光膜之感光性鹼水溶液顯像型的黑色光阻用感光性樹脂組成物、及使用此組成物形成的彩色濾光片遮光膜。
液晶電視、液晶監視器、彩色液晶行動電話等各種領域,使用彩色液晶面板。彩色液晶面板係將形成彩色濾光片的基板與對向基板(TFT基板)介於密封材進行貼合,在兩基板間被填充液晶的構造。其中,彩色濾光片之製造方法係使用通常在玻璃、塑膠板等透明基板的表面形成藉由抑制紅、綠、藍各色間之混色而達到提高對比之功能的黑色矩陣,接著將達到表現各種自然色之功能之紅、綠、藍的不同色相,依序以條狀或馬賽克狀等的色圖型形成的方法。
但是液晶面板之耐久性試驗(可靠性試驗)一般係進行PCT(Pressure Cooker Test),此試驗法係在溫度120℃、溼度100%、氣壓2atm的苛刻條件下,將液晶面板放置數小時,確認在液晶面板之彩色濾光片基板與TFT基板之間被封入的液晶有無漏出。如上述,黑色矩陣係存在於紅、綠、藍各色間,除了提高對比的功能外,也可作為彩色濾光片之外框遮光膜的功能,外框遮光膜之一部份係介於密封材,與對向基板貼合。黑色矩陣也同時被要求即使在如PCT之苛刻條件下,也不會與玻璃基板產生剝離之高密著強度。特別是近年為了提高液晶面板之辨識性,高遮光化之需求高。
為了實現高遮光化時,考慮增加黑色矩陣的膜厚,但是膜厚太厚時,在之後的製造步驟,形成紅、綠、藍之像素時,與黑色矩陣重疊部分之紅、綠、藍的膜厚變後,產生所謂的「角」段差。此「角」段差係液晶之配向混亂的原因,導致面板之辨識性降低,因此要求以不增加黑色矩陣之膜厚,達成高遮光化(即薄膜高遮光化)。
為了確保薄膜高遮光時,通常必須增加樹脂組成物中之黑色顏料的含量,結果參與硬化性之黏結劑樹脂或丙烯酸酯成分等之調配比例相對變小,因此塗膜不易充分硬化,塗膜與玻璃基板之密著性降低,容易產生剝離等的問題。
如上述,近年黑色矩陣與基板之密著性要求更高度者,因此比以往要求與玻璃基板之密著性較高的黑色矩陣。因此,例如專利文獻1提案藉由在遮光性樹脂組成物中添加選自胺系矽烷化合物、酮亞胺系矽烷化合物及異氰酸酯系矽烷化合物之至少1種,在PCT試驗後不會產生黑色矩陣剝離,且密著性良好的感光性樹脂組成物。但是觀看其實施例時,碳黑的濃度係相對於感光性樹脂組成物中之固形分,充其量為40質量%,而對於更高顏料濃度的密著性仍有檢討的餘地。此外,與玻璃基板之密著性以外的評價項目,例如光微影特性、保存安定性等仍不充分。而且也未記載PCT前之密著性。
[專利文獻1]特開2006-330209號公報
本發明之目的係提供一種可形成在PCT前後,與玻璃基板之密著性高,品質良好的黑色矩陣(或遮光膜)的黑色光阻用感光性樹脂組成物,且提供由該感光性樹脂組成物所形成的彩色濾光片遮光膜。
本發明人等為了解決上述以往技術的問題點而精心硏究結果發現藉由含有顏料、黏結劑樹脂及光聚合引發劑及選自由丙烯醯基及甲基丙烯醯基所成群之基合計含有2個的二官能單體,而具有高密著性及可達成薄膜高遮光化,遂完成本發明。
換言之,本發明係一種黑色光阻用感光性樹脂組成物,其特徵係含有:
(a)選自由丙烯醯基及甲基丙烯醯基所成群之任一方或兩方合計有2個的二官能單體、
(b)使具有2個以上之環氧基的化合物與(甲基)丙烯酸的反應物再與多元酸羧酸或其酸酐反應所得之含有不飽和基的樹脂、
(c)光聚合引發劑及
(d)含有選自黑色有機顏料、混色有機顏料及遮光材所成群之1種以上之遮光成分的遮光性分散液。
本發明之黑色光阻用感光性樹脂組成物滿足以下任一個以上時,可提供更佳的黑色光阻用感光性樹脂組成物。
1)前述(a)選自由丙烯醯基及甲基丙烯醯基所成群之任一方或兩方合計有2個的二官能單體係下述一般式(1)或一般式(2)表示的化合物。
(式中,R1
及R2
係表示氫原子或甲基,彼此可相同或相異,AO及BO係表示碳數2~4之彼此相異的氧伸烷基,m及n係0以上之整數,m+n=4~30的範圍)
(式中,R1
及R2
係表示氫原子或甲基,彼此可相同或相異,R3
~R10
係各自獨立表示氫原子、鹵素原子、碳數1~5的烷基、碳數1~5的烯基、碳數1~5的炔基、碳數5~9的環烷基、碳數6~10的芳基、或碳數1~5的烷氧基,X係表示-CO-、-SO2
-、-C(CF3
)2
-、-Si(CH3
)2
-、-CH2
-、-C(CH3
)2
-、-O-、9,9-芴基或單鍵,AO及BO係碳數2~4之彼此相異的氧伸烷基,m及n係0以上之整數,m+n=4~30的範圍)。
2)得到(b)成分時所用之具有2個以上之環氧基的化合物為選自下述一般式(3)及一般式(4)表示之化合物所成群之至少1種的化合物。
(但是式(3)中,R11
及R12
係氫原子、碳數1~5的烷基或鹵素原子,可彼此相同或相異,X係表示-CO-、-SO2
-、-C(CF3
)2
-、-Si(CH3
)2
-、-CH2
-、-C(CH3
)2
-、-O-、9,9-芴基或單鍵,n係0~10之整數)
(但是式(4)中,n係表示1以上5以下之整數,R13
~R16
係各自獨立表示氫原子、碳數1~5的烷基、碳數5~9的環烷基、或碳數6~10的芳基,R17
~R27
係各自獨立表示氫原子、鹵素原子、碳數1~5的烷基、碳數1~5的烯基、碳數1~5的炔基、碳數5~9的環烷基、碳數6~10的芳基、或碳數1~5的烷氧基)。
3)(d)成分中之遮光成分為碳黑。
4)(d)成分中之遮光成分的含量為相對於黑色光阻用感光性樹脂組成物中的固形分,含有40~60質量%。
5)(c)光聚合引發劑為選自醯基肟系光聚合引發劑之1種或2種以上。
本發明之黑色光阻用感光性樹脂組成物適用於形成彩色濾光片遮光膜,同時本發明之彩色濾光片遮光膜係將上述黑色光阻用感光性樹脂組成物塗佈於透明基板上,經乾燥後,必須經由(i)藉由紫外線曝光裝置之曝光、(ii)以鹼水溶液之顯像、及(iii)熱燒成之各步驟所得者。
以下詳細說明本發明之黑色光阻用感光性樹脂組成物(以下也稱為感光性樹脂組成物或組成物)。本發明之組成物係含有(a)~(d)成分作為必須成分。換言之,(a)選自由丙烯醯基及甲基丙烯醯基所成群之任一方或兩方合計有2個的二官能單體、(b)使具有2個以上之環氧基的化合物與(甲基)丙烯酸的反應物再與多元酸羧酸或其酸酐反應所得之含有不飽和基的樹脂、(c)光聚合引發劑及(d)含有選自黑色有機顏料、混色有機顏料及遮光材所成群之1種以上之遮光成分的遮光性分散液。
(a)選自由丙烯醯基及甲基丙烯醯基所成群之任一方或兩方合計有2個的二官能單體,較佳為上述一般式(1)或一般式(2)表示之化合物,其具體例有二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、九乙二醇二(甲基)丙烯酸酯、二丙二醇二(甲基)丙烯酸酯、三丙二醇二(甲基)丙烯酸酯、四丙二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,5-戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、1,9-壬二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、新戊二醇環氧乙烷加成物之二(甲基)丙烯酸酯、新戊二醇環氧丙烷加成物之二(甲基)丙烯酸酯、雙酚A環氧乙烷加成物之二(甲基)丙烯酸酯、雙酚A環氧丙烷加成物之二(甲基)丙烯酸酯、氫化雙酚A環氧乙烷加成物之二(甲基)丙烯酸酯、氫化雙酚A環氧丙烷加成物之二(甲基)丙烯酸酯等。
為了提高圖型強度、圖型表面之平滑性優異的觀點,必要時除了上述(a)成分之二官能單體外,可添加選自由丙烯醯基及甲基丙烯醯基所成群之任一方或兩方合計含有3個以上之多官能單體。例如有三羥甲基丙烷三丙烯酸酯、三羥甲基丙烷三甲基丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯、季戊四醇四丙烯酸酯、季戊四醇四甲基丙烯酸酯、二季戊四醇四丙烯酸酯、二季戊四醇四甲基丙烯酸酯、二季戊四醇六丙烯酸酯、二季戊四醇六甲基丙烯酸酯等。但是此等多官能單體之調配比例,較佳為二官能單體之20質量%以下。超過20質量%時,相較於2官能單體單獨的情形,基板密著性降低。
(b)成分之不飽和基含有樹脂係使「具有2個以上之環氧基的化合物」與「(甲基)丙烯酸」(此處係指「丙烯酸及/或甲基丙烯酸」)反應所得之「具有羥基的化合物」與「多元酸羧酸或其酸酐」反應所得的『環氧基(甲基)丙烯酸酯酸加成物』。羥基與多元酸羧酸反應生成聚酯,可為其平均聚合度為2~500程度之低分子量的樹脂。
(b)成分之「具有2個以上之環氧基的化合物」,例如有(o,m,p-)甲酚醛型環氧樹脂、酚醛型環氧樹脂、雙酚A型環氧樹脂、雙酚F型環氧樹脂、三苯酚甲烷型環氧樹脂等,詳細而言,可為下述一般式(3)或(4)表示的化合物,更詳細而言,可為下述一般式(5)表示之化合物。
(但是式(3)中,R11
及R12
係氫原子、碳數1~5的烷基或鹵素原子,可彼此相同或相異,X係表示-CO-、-SO2
-、-C(CF3
)2
-、-Si(CH3
)2
-、-CH2
-、-C(CH3
)2
-、-O-、9,9-芴基或單鍵,n係0~10之整數)
(但是式(4)中,n係表示1以上5以下之整數,R13
~R16
係各自獨立表示氫原子、碳數1~5的烷基、碳數5~9的環烷基、或碳數6~10的芳基,R17
~R27
係各自獨立表示氫原子、鹵素原子、碳數1~5的烷基、碳數1~5的烯基、碳數1~5的炔基、碳數5~9的環烷基、碳數6~10的芳基、或碳數1~5的烷氧基)。
(b)成分較佳為由上述一般式(3)或(4)表示之環氧化合物所衍生的。其中,一般式(3)之環氧化合物係由雙酚類所衍生的。因此藉由說明雙酚類,即可理解一般式(3)之環氧化合物、特別是與(甲基)丙烯酸之反應物、及(b)成分,較佳之具體例可藉由雙酚類來說明。
提供較佳之(b)成分的雙酚類例如有以下者。雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚等。此外尚有一般式(3)之X為9,9-芴基的9,9-雙(4-羥基苯基)芴、9,9-雙(4-羥基-3-甲基苯基)芴、9,9-雙(4-羥基-3-氯苯基)芴、9,9-雙(4-羥基-3-溴苯基)芴、9,9-雙(4-羥基-3-氟苯基)芴、9,9-雙(4-羥基-3-甲氧基苯基)芴、9,9-雙(4-羥基-3,5-二甲基苯基)芴、9,9-雙(4-羥基-3,5-二氯苯基)芴、9,9-雙(4-羥基-3,5-二溴苯基)芴等。此外有4,4’-雙酚、3,3’-雙酚等的化合物。
一般式(4)之環氧化合物,如上述,例如有(o,m,p-)甲酚醛型環氧樹脂、酚醛型環氧樹脂等。
得到(b)成分時使用的「多元酸羧酸或其酸酐」,例如有馬來酸、琥珀酸、衣康酸、苯二甲酸、四氫苯二甲酸、六氫苯二甲酸、甲基內亞甲四氫苯二甲酸、甲基四氫苯二甲酸、偏苯三酸、苯均四酸或其酸酐、二苯甲酮四羧酸、聯苯四羧酸、聯苯醚四羧酸等之芳香族多元羧酸或其酸二酐等。酸酐或酸二酐之使用比例,可選擇適合藉由曝光或鹼顯像操作形成微細圖型的比例。
使「具有2個以上之環氧基的化合物」與「(甲基)丙烯酸」之反應及此反應所得之「環氧基(甲基)丙烯酸酯」(具有羥基的化合物)與「多元酸羧酸或其酸酐」的反應可採用例如乙基賽路蘇(cellosolve)乙酸酯、丁基賽路蘇乙酸酯等之賽路蘇系溶劑中,加熱下反應等,特開平8-278,629號公報等所記載之公知方法,但是無特別限定。所得之(b)成分之含有不飽和基的樹脂,可僅使用1種或使用2種以上之混合物。所得之(b)成分係兼具乙烯性不飽和雙建與羧基,因此具有黏結劑的作用,此外可對黑色光阻用感光性樹脂組成物提供優異的光硬化性,且提供良顯像性及圖型化特性(鹼可溶性、鹼顯像性),提高遮光膜的物性。
上述(a)成分與(b)成分之調配比例,以重量比(a)/(b)表示,可為10/90~50/50,較佳為20/80~40/60。(a)成分之調配比例少於10/90時,光硬化後之硬化物變脆,且未曝光部,塗膜之酸值較低,因此對鹼顯像液之溶解性降低,可能產生圖型邊緣有鋸齒狀,無法形成銳利(sharp)的問題。相反的,多於50/50時,樹脂中所佔有之光反應性官能基的比例少,交聯結構之形成不足,樹脂成分中之酸值度過高,曝光部對鹼顯像液之溶解性變高,因此形成之圖型比目標之線寬更細,或容易產生圖型缺落等的問題。
(c)成分之光聚合引發劑係使用至少1種類的光聚合引發劑,只要是具有乙烯性不飽和鍵,且可使加成聚合之化合物開始聚合的化合物時,即無特別限定。例如有苯乙酮系化合物、三嗪系化合物、苯偶因系化合物、二苯甲酮系化合物、噻噸系化合物、咪唑系化合物、醯基肟系化合物等。
苯乙酮系化合物例如有二乙氧基苯乙酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、苄基二甲基縮醛、2-羥基-2-甲基-1-[4-(2-羥基乙氧基)苯基]丙烷-1-酮、1-羥基環己基苯基酮、2-甲基-2-嗎啉基-1-(4-甲基苯硫基)丙烷-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)丁烷-1-酮、2-羥基-2-甲基-1-[4-(1-甲基乙烯基)苯基)丙烷-1-酮之低聚物等。
三嗪系化合物例如有2,4,6-三(三氯甲基)-1,3,5-三嗪、2-甲基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-苯基-4、6-雙(三氯甲基)-1,3,5-三嗪、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲基硫苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(piplronyl)-4,6-雙(三氯甲基)-1,3,5-三嗪等。
苯偶因系化合物例如有苯偶因、苯偶因甲醚、苯偶因乙醚、苯偶因異丙醚、苯偶因異丁醚等。二苯甲酮系化合物例如有二苯甲酮、鄰-苯甲醯苯甲酸甲酯、4-苯基二苯甲酮、4-苯甲醯-4’-甲基二苯硫醚、3,3’,4,4’-四(第三丁基過氧羰基)二苯甲酮、2,4,6-三甲基二苯甲酮等。
噻噸系化合物例如有2-異丙基噻噸、4-異丙基噻噸、2,4-二乙基噻噸、2,4-二氯噻噸、1-氯-4-丙氧基噻噸等。此外,咪唑系化合物例如有2-(鄰-氯苯基)-4,5-苯基咪唑2聚物、2-(鄰-氯苯基)-4,5-二(間-甲氧基苯基)咪唑2聚物、2-(鄰-氟苯基)-4,5-二苯基咪唑2聚物、2-(鄰-甲氧基苯基)-4,5-二苯基咪唑2聚物、2、4,5-三芳基咪唑2聚物等。
醯基肟系化合物例如有1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-雙環庚基-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-金剛烷基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-金剛烷基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-四氫呋喃基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-四氫呋喃基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-苯硫基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-苯硫基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-嗎啉基甲烷-1-酮肟-O-苯甲酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-嗎啉基甲烷-1-酮肟-O-乙酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-雙環庚烷羧酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-三環癸烷羧酸酯、1-[9-乙基-6-(2-甲基苯甲醯)-9.H.-咔唑-3-基]-乙烷-1-酮肟-O-金剛烷羧酸酯、1,2-辛二烯,1-[4-(苯基硫代)-,2-(O-苯甲醯肟)](Ciba‧Speciality‧Chemicals公司製 商品名IRGACURE OXE01)、乙酮,1-[9-乙基-6-(2-甲基苯甲醯)-9H-咔唑-3-基]-,1-(O-乙醯肟)(Ciba‧Speciality‧Chemicals公司製 商品名IRGACURE OXE02)等。
(c)成分之光聚合引發劑也可使用活性自由基產生劑或酸產生劑。活性自由基產生劑可使用例如有2,4,6-三甲基苯甲醯二苯基膦氧化物、2,2’-雙(o-氯苯基)-4,4’,5,5’-四苯基-1,2’-聯咪唑、10-丁基-2-氯吖啶酮、2-乙基蒽醌、聯苯醯、9,10-菲醌、樟腦醌、苯基乙醛酸甲酯、二環戊二烯鈦化合物等。酸產生劑例如有4-羥基苯基二甲基鋶p-甲苯磺酸酯、4-羥基苯基二甲基鋶六氟銻酸鹽、4-乙醯氧基苯基二甲基鋶p-甲苯磺酸酯、4-乙醯氧基苯基‧甲基‧苄基鋶六氟銻酸鹽、三苯基鋶p-甲苯磺酸酯、三苯基鋶六氟銻酸鹽、二苯基碘鎓p-甲苯磺酸酯、二苯基碘鎓六氟銻酸鹽等之鎓鹽類或硝基苄基甲苯磺酸酯類、苯偶因甲苯磺酸酯類等。此外,活性自由基產生劑例如有上述化合物中,也有同時產生活性自由基與酸的化合物,例如三嗪系化合物也可作為酸產生劑使用。
(c)成分之光聚合引發劑中,特佳為使用醯基肟系光聚合引發劑。(c)成分之光聚合引發劑可單獨1種或混合2種以上使用。其本身雖不作為光聚合引發劑或增感劑使用,但是也可添加藉由與上述化合物組合使用,增加光聚合引發劑或增感劑之能力的化合物。這種化合物例如有與二苯甲酮組合使用時,具有效果的胺系化合物。其中胺系化合物例如有三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸異戊酯、苯甲酸2-二甲基胺基乙酯、4-二甲基胺基苯甲酸2-乙基己酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺基)二苯甲酮、4,4’-雙(二乙基胺基)二苯甲酮、4,4’-雙(乙基甲基胺基)二苯甲酮等。
(c)成分之光聚合引發劑的使用量係以樹脂成分之(a)及(b)之各成分合計100重量份為基準,較佳為10~50重量份。(c)成分之調配比例未達10重量份時,光聚合的速度變慢,感度降低,超過50重量份時,感度太強,圖型線寬相對於圖型光罩成為粗大的狀態,有時可能會產生相對於光罩,無法再現忠實的線寬,或圖型邊緣有鋸齒,無法成為銳利(sharp)等的問題。
(d)成分之黑色有機顏料、混色有機顏料或遮光材等之遮光成分,只要是耐熱性、耐光性及耐溶劑性優異者即可。其中黑色有機顏料例如有苝黑、喹啉黑等。混色有機顏料例如有將選自紅、藍、綠、紫、黃色、喹啉藍、孔雀綠等之至少2種以上的顏料混合,模擬黑色化者。遮光材例如有碳黑、氧化鉻、氧化鐵、鈦黑、苯胺黑、喹啉黑,可適當選擇2種以上,特別是從遮光性、表面平滑性、分散安定性、與樹脂之相溶性良好的觀點,以碳黑較佳。此等遮光成分係分散於分散媒中,得到(d)成分之遮光性分散液。分散媒例如有丙二醇單甲醚乙酸酯、3-甲氧基丁基乙酸酯等。
(d)成分之遮光性分散液中之遮光成分的調配比例係相對於本發明之組成物之全固形分,使用20~60質量%,較佳為40~60質量%的範圍。少於20質量%時,遮光性不足。超過60質量%時,本來作為黏結劑之感光性樹脂的含量減少,因此會產生影響顯像特性及膜形成能等之不理想的問題。本發明之組成物係特別是顏料濃度較高的範圍,具體而言,以感光性樹脂組成物中之全固形分量為基準,超過40重量%之量的顏料(遮光成分),此外含有45重量%以上之顏料的組成物,可發揮較高的效果。
本發明之黑色光阻用感光性樹脂組成物中除了上述(a)~(d)成分外,使用溶劑較佳。溶劑例如有甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇等之醇類、α-或β-萜品烯醇等之萜烯類、丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯烷酮等之酮類、甲苯、二甲苯、四甲苯等之芳香族烴類、賽路蘇(cellosolve)、甲基賽路蘇、乙基賽路蘇、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚等之醇醚類、乙酸乙酯、賽路蘇乙酸酯、乙基賽路蘇乙酸酯、丁基賽路蘇乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等之乙酸酯類等,藉由使用此等經溶解、混合,可形成均勻溶液狀的組成物。
另外,於本發明之黑色光阻用感光性樹脂組成物中,視其所需可含有矽烷偶合劑作為密著性改良劑。
矽烷偶合劑例如有3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基三乙氧基矽烷、3-環氧丙氧基丙基甲基二甲氧基矽烷、3-環氧丙氧基丙基甲基二乙氧基矽烷、乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷等因原料取得容易,故較佳。上述矽烷偶合劑係以少量而具有接著改良效果,因此添加量不需要多量添加,相對於組成物之全固形分,較佳為0.2~10質量%,更佳為0.5~5質量%。
為了塗佈性、著色被膜之平滑性或防止貝納胞(Benard cell),也可添加界面活性劑。界面活性劑之添加量通常為樹脂組成物之0.001~5質量%,較佳為0.01~1質量%。添加量太少時,塗佈性、著色被膜之沒有平滑性及防止貝納胞(Benard cell)的效果,太多時,相反的,有時塗膜物性不良。界面活性劑之具體例有月桂基硫酸銨、聚氧乙烯烷醚硫酸三乙醇胺等之陰離子界面活性劑、硬酯醯胺乙酸酯、月桂基三甲基銨氯化物等之陽離子界面活性劑、月桂基二甲基胺氧化物、月桂基羧基甲基羥基乙基咪唑鎓甜菜鹼(Betaine)等之兩性界面活性劑、聚氧乙烯月桂醚、聚氧乙烯硬酯醯醚、山梨糖醇酐單硬脂酸酯等之非離子界面活性劑、聚二甲基矽氧烷等為主骨架之聚矽氧系界面活性劑、氟系界面活性劑等。本發明不限於此,可使用1種或2種以上之界面活性劑。
本發明之黑色光阻用感光性樹脂組成物係含有上述(a)~(d)成分或此等與溶劑作為主成分。去除溶劑之固形分(固形分中含有硬化後成為固形分的單體)中,(a)~(d)成分合計含有80質量%,較佳為90質量%以上。溶劑的量係因目標的黏度而改變,但是感光性樹脂組成物中可含有70~90質量%的範圍。
本發明之黑色光阻用感光性樹脂組成物係優異的彩色濾光片遮光膜形成用的樹脂組成物,例如藉由以下的微影法可得到彩色濾光片遮光膜。例如首先將感光性樹脂組成物作成溶液,塗佈於透明基板上,接著使溶劑乾燥(預烘烤)後,如此所得之被膜上放置光罩,照射紫外線,使曝光部硬化,再使用鹼水溶液,進行使未曝光部溶出的顯像,形成圖型,再進行作為後乾燥之後烘烤(熱燒成)的方法。
塗佈感光性樹脂組成物溶液的透明基板,除了玻璃基板外,例如於透明薄膜(如聚碳酸酯、聚對苯二甲酸乙二酯、聚醚碸等)上被蒸鍍ITO或金等之透明電極或形成圖型者。透明基板塗佈感光性樹脂組成物溶液的方法可使用公知的溶液浸漬法、噴霧法、使用滾筒塗佈機、逆輥塗佈機(landcoater)或旋轉機的方法等任一方法。藉由此等方法塗佈成所要的厚度後,除去溶劑(預烘烤)形成被膜。預烘烤係藉由烘箱、加熱板等加熱。預烘烤之加熱溫度及加熱時間係配合使用的溶劑來適當選擇,例如以60~110℃的溫度進行1~5分鐘。
預烘烤後進行的曝光係藉由紫外線曝光裝置來進行,介於光罩曝光,使僅對應圖型之部分的光阻感光。曝光裝置及其曝光照射條件係適當選擇,使用超高壓水銀燈、高壓水銀燈、金屬鹵素燈、遠紫外線燈等光源進行曝光,使塗膜中的黑色光阻用感光性樹脂組成物進行光硬化。
曝光後的鹼顯像係為了除去未曝光部分的光阻,藉此顯像形成所要的圖型。適於此鹼顯像的顯像液,例如有鹼金屬、鹼土金屬之碳酸鹽的水溶液、鹼金屬之氫氧化物的水溶液等,特別是使用含有0.05~3質量%之碳酸鈉、碳酸鉀、碳酸鋰等碳酸鹽的弱鹼性水溶液,以23~28℃的溫度顯像即可,使用市售顯像機或超音波洗淨機等可以精密形成微細的圖像。
顯像後,較佳為以180~250℃的溫度及20~60分鐘的條件進行熱處理(後烘烤)。此後烘烤係為了提高圖型化後的遮光膜與基板的密著性。後烘烤與預烘烤同樣,藉由烘箱、加熱板等加熱。本發明之圖型化後的遮光膜係經由以上光微影法之各步驟而形成的。
本發明之感光性樹脂組成物係如上述,適合藉由曝光、鹼顯像等操作形成微細的圖型,但是藉由以往的網板印刷形成圖型,也可得到同樣的遮光性、密著性、電絕緣性、耐熱性、耐藥品性優異的遮光膜。此外,本發明之黑色光阻用感光性樹脂組成物係適合作為塗佈材使用,特別是適合作為使用於液晶顯示裝置或攝影元件之彩色濾光片用油墨,藉此所形成的遮光膜可作為彩色濾光片、液晶投影用的黑色矩陣等使用。
依據本發明時,可形成在PCT前後,與玻璃基板之密著性高、品質良好的黑色矩陣(或遮光膜)。特別是即使遮光成分含有高濃度時,也可維持高密著性,可達成所謂的薄膜高遮光化。
以下基於實施例及比較例,具體說明本發明的實施形態,但是本發明不限於此等。其中,實施例及比較例之黑色矩陣製造用的原料及簡略符號係如下述。
(a)-1:烷氧基化新戊二醇二丙烯酸酯(Sartomer Japan公司製商品名CD9043)
(a)-2:烷氧基化己二醇二丙烯酸酯(Sartomer Japan公司製商品名CD564)
(a)-3:聚乙二醇二丙烯酸酯(日油(股)公司製商品名BLEMMER ADE-600)
(a)-4:聚乙二醇二丙烯酸酯(日油(股)公司製商品名BLEMMER ADE-400)
(a)-5:乙氧基化(10)雙酚A二丙烯酸酯(Sartomer Japan公司製 商品名SR602)
(a)-6:季戊四醇四丙烯酸酯(Sartomer Japan(股)製、商品名SR295)
(a)-7:二季戊四醇六丙烯酸酯與二季戊四醇五丙烯酸酯之混合物(日本化藥(股)製、商品名DPHA)
(b)-1:具有芴骨架之環氧基丙烯酸酯之酸酐聚縮合物之丙二醇單甲醚乙酸酯溶液(樹脂固形分濃度=56.5質量%、新日鐵化學(股)製、商品名V259ME)
(b)-2:Mw(重量平均分子量)9000、酸值80之N-苯基馬來醯亞胺/丙烯酸/苯乙烯共聚合物之丙二醇單甲醚乙酸酯溶液(樹脂固形分濃度=35.5質量%)、(N-苯基馬來醯亞胺:丙烯酸:苯乙烯=19:22:59mol%)
(c)-1:乙酮,1-[9-乙基-6-(2-甲基苯甲醯)-9H-咔唑-3-基]-1-(0-乙醯基肟)、(Ciba‧Japan公司製、製品名Irgacure OXE02)
(c)-2:2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)丁酮-1(Ciba‧Japan公司製、製品名Irgacure 369)
(c)-3:2-(piplronyl)-4,6-雙(三氯甲基)-1,3,5-三嗪(日本SIBERHEGNER公司製、製品名三嗪PP)
(d):碳黑濃度25.0質量%、高分子分散劑濃度4.75質量%之丙二醇單甲醚乙酸酯分散液(固形分29.75%)
(e):3-甲基丙烯氧基丙基三甲氧基矽烷(商品名:KBM-503:信越化學(股)製)
(f)-1:丙二醇單甲醚乙酸酯
(f)-2:環己酮
(g):Megafac F475(大日本油墨化學工業(股)製)
以表1的比例調配上述調配成分,製備實施例1~6及比較例1~5的黑色光阻用感光性樹脂組成物。表1中,(b)成分之()內的數字係表示含有不飽和基之樹脂中的固形分量(g),(d)成分之()內的數字係表示遮光成分的固形分量(g)。
將表1記載之各成分的組合均勻混合所得之實施例1~6及比較例1~5的各黑色光阻用感光性樹脂組成物,使用旋轉塗佈機塗佈於125mm×125mm之玻璃基板(Corning 1737)上,使後烘烤後的膜厚成為1.0μm,以90℃烘烤1分鐘。然後,將曝光間距調整為80μm,在乾燥塗膜上覆蓋線/間距(space)=2μm/2μm、4μm/4μm、5μm/5μm、6μm/6μm、8μm/8μm、10μm/10μm、20μm/20μm之負型光罩,以I線照度30mW/cm2
之超高壓水銀燈照射100mj/cm2
之紫外線,進行感光部分的光硬化反應。其次,將此曝光後的塗板在23℃、0.05%氫氧化鉀水溶液中,使用1kgf/cm2
之噴灑顯像壓由出現圖型開始的顯像時間(間斷時間=BT)進行+10秒、+20秒之顯像後,以5kgf/cm2
壓之噴灑水洗,除去塗膜之未曝光部,在玻璃基板上形成像素後,使用熱風乾燥機以230℃、30分鐘熱後烘烤後的20μm線之光罩寬之線寬、圖型直線性及解像度。結果如表2及表3所示。評價方法如下述。
使用測長顯微鏡((股)Nikon製 商品名XD-20)測定光罩寬幅20μm的圖型線寬。
顯微鏡觀察顯像後之20μm光罩圖型,未發現對基板之剝離或圖型邊緣部分之鋸齒者評價為○,有上述情形者評價為×。
2μm、4μm、5μm、6μm、8μm、10μm、及20μm光罩圖型中,殘留於基板上之最小圖型尺寸作為解像度。解像度為2、4、5、6或8μm時,評價為○,而10μm以上時評價為×。
為了評價密著強度(密封強度),而將上述表1之各組成均勻混合所得之黑色光阻用感光性樹脂組成物使用旋轉塗佈機塗佈於125mm×125mm之玻璃基板(Corning 1737)上,使後烘烤後的膜厚成為1.0μm,以90℃烘烤1分鐘。然後不使用負型光罩,以100mJ/cm2
進行測試曝光,使用熱風乾燥機以230℃進行熱後烘烤30分鐘。
對於上述所得之後烘烤基板,藉由依據JIS K6856-1994之3點折彎密著試驗方法的評價法,如下述評價密封強度。上述後烘烤基板及未塗佈樹脂組成物之玻璃基板(Corning 1737)分別切斷成20mm×63mm之短冊狀,準備試驗片。後烘烤後的塗膜板與未塗佈樹脂組成物的玻璃基板介於一定量的密封劑予以重疊,成為寬8mm,再貼合雙方的基板(試驗片)。重疊時之密封劑的形狀為圓形或直徑約5mm。然後,將重疊的試驗片以90℃預烘烤20分鐘,接著以150℃後烘烤、2小時,製作三點折彎試驗片。製作將未塗佈樹脂組成物之20mm×63mm之玻璃片彼此與上述相同方法貼合的比較試驗用的試料。
上述所得之試驗片中,以重疊部位為中心,將塗佈板與對向基板(無塗佈基板)、或未塗佈之比較試驗用的玻璃基板以2點的支持體支撐(2點之支持體的長度為3cm)、由重疊部之正上方往正下方,使用ORIENTEC(製)商品名UCT-100以1mm/分鐘之速度加重,觀察剝離面及讀取當時的加重,除以密封劑之塗佈面積,然後每單位面積之加重作為密著強度。在121℃、100%RH、2atm、及4小時的條件下,進行PCT(壓力鍋)試驗後,進行同樣的密著強度試驗,求出PCT前後的密著強度。PCT前後之未塗佈光阻(樹脂組成物)之玻璃彼此之密著強度分別為100時之各組成的密著強度作為相對值。PCT前後,60以上評價為○,未達60者評價為×。結果如表2及表3所示。
以上結果可知,由實施例1~6之感光性樹脂組成物所得之塗膜,其線寬、圖型直線性、解像度、密封強度均良好。而由比較例1~5之感光性樹脂組成物所得之塗膜,其線寬、圖型直線性、解像度、密封強度全部項目均不佳。
使用利用上述實施例1~6之感光性樹脂組成物所得之形成黑色矩陣的彩色濾光片,製作液晶面板時,即使在嚴苛條件下,黑色矩陣幾乎無剝離,且可防止液晶外漏。此外,也不會犧牲顯像密著、圖型直線性、解像度等的顯像特性。因此,即使製作提高含有黑色顏料之塗膜中的顏料濃度,而樹脂成分相對變少的高遮光率的黑色矩陣時,玻璃基板上之塗膜的剝離變少,且可確保較高的生產性(良率)及可靠性。
Claims (5)
- 一種黑色光阻用感光性樹脂組成物,其特徵係含有:(a)下述一般式(1)或一般式(2)表示之選自由丙烯醯基及甲基丙烯醯基所成群之基的任一方或兩方合計有2個的二官能單體、(b)使下述一般式(3)表示之具有2個以上之環氧基的化合物與(甲基)丙烯酸的反應物再與多元酸羧酸或其酸酐反應所得之含有不飽和基的樹脂、(c)選自醯基肟系光聚合引發劑之1種或2種以上之光聚合引發劑及(d)含有選自由黑色有機顏料、混色有機顏料及遮光材所成群之1種以上之遮光成分的遮光性分散液,且選自由丙烯醯基及甲基丙烯醯基所成群之基的任一方或兩方合計有3個以上的多官能單體,相對於(a)成分,含有20質量%以下的量,
- 如申請專利範圍第1項之黑色光阻用感光性樹脂組成物,其中(d)成分中之遮光成分為碳黑。
- 如申請專利範圍第1項之黑色光阻用感光性樹脂組成物,其中(d)成分中之遮光成分的含量,相對於黑色光阻用感光性樹脂組成物中的固形分,為40~60質量%。
- 如申請專利範圍第1~3項中任一項之黑色光阻用感光性樹脂組成物,其係彩色濾光片遮光膜形成用。
- 一種彩色濾光片遮光膜,其特徵係將申請專利範圍第4項之黑色光阻用感光性樹脂組成物塗佈於透明基板上,經乾燥後,必須經由(i)藉由紫外線曝光裝置之曝光、(ii)以鹼水溶液之顯像、及(iii)熱燒成之各步驟所得者。
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