TWI452684B - 具有背面溝槽之背面照明影像感測器 - Google Patents

具有背面溝槽之背面照明影像感測器 Download PDF

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Publication number
TWI452684B
TWI452684B TW098123129A TW98123129A TWI452684B TW I452684 B TWI452684 B TW I452684B TW 098123129 A TW098123129 A TW 098123129A TW 98123129 A TW98123129 A TW 98123129A TW I452684 B TWI452684 B TW I452684B
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TW
Taiwan
Prior art keywords
layer
sensor
trenches
image sensor
wafer
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TW098123129A
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English (en)
Chinese (zh)
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TW201010071A (en
Inventor
菲德烈克Ｔ 布萊迪
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豪威科技股份有限公司
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Publication of TW201010071A publication Critical patent/TW201010071A/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/026—Wafer-level processing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/199—Back-illuminated image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures

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  • Solid State Image Pick-Up Elements (AREA)
  • Element Separation (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
TW098123129A 2008-07-09 2009-07-08 具有背面溝槽之背面照明影像感測器 TWI452684B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/169,810 US20100006908A1 (en) 2008-07-09 2008-07-09 Backside illuminated image sensor with shallow backside trench for photodiode isolation

Publications (2)

Publication Number Publication Date
TW201010071A TW201010071A (en) 2010-03-01
TWI452684B true TWI452684B (zh) 2014-09-11

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Application Number Title Priority Date Filing Date
TW098123129A TWI452684B (zh) 2008-07-09 2009-07-08 具有背面溝槽之背面照明影像感測器

Country Status (7)

Country Link
US (2) US20100006908A1 (https=)
EP (1) EP2311091B1 (https=)
JP (1) JP5420656B2 (https=)
KR (1) KR101341048B1 (https=)
CN (1) CN102067316B (https=)
TW (1) TWI452684B (https=)
WO (1) WO2010027395A2 (https=)

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Also Published As

Publication number Publication date
JP5420656B2 (ja) 2014-02-19
WO2010027395A2 (en) 2010-03-11
KR101341048B1 (ko) 2013-12-12
JP2011527829A (ja) 2011-11-04
US20100006908A1 (en) 2010-01-14
CN102067316A (zh) 2011-05-18
TW201010071A (en) 2010-03-01
US20110059572A1 (en) 2011-03-10
US8076170B2 (en) 2011-12-13
EP2311091B1 (en) 2016-11-23
CN102067316B (zh) 2013-05-01
WO2010027395A3 (en) 2010-05-14
KR20110030670A (ko) 2011-03-23
EP2311091A2 (en) 2011-04-20

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