TWI452335B - 應用共聚焦顯微鏡結構的被測物圖像獲取方法及系統 - Google Patents

應用共聚焦顯微鏡結構的被測物圖像獲取方法及系統 Download PDF

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Publication number
TWI452335B
TWI452335B TW100111603A TW100111603A TWI452335B TW I452335 B TWI452335 B TW I452335B TW 100111603 A TW100111603 A TW 100111603A TW 100111603 A TW100111603 A TW 100111603A TW I452335 B TWI452335 B TW I452335B
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Taiwan
Prior art keywords
light
scanning
unit
image
scanning position
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TW100111603A
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English (en)
Chinese (zh)
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TW201142354A (en
Inventor
Taiwook Kim
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Snu Precision Co Ltd
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Publication of TW201142354A publication Critical patent/TW201142354A/zh
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Publication of TWI452335B publication Critical patent/TWI452335B/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
TW100111603A 2010-04-08 2011-04-01 應用共聚焦顯微鏡結構的被測物圖像獲取方法及系統 TWI452335B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100032383A KR101103323B1 (ko) 2010-04-08 2010-04-08 공초점 현미경구조를 이용한 측정대상물의 영상획득방법 및 시스템

Publications (2)

Publication Number Publication Date
TW201142354A TW201142354A (en) 2011-12-01
TWI452335B true TWI452335B (zh) 2014-09-11

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TW100111603A TWI452335B (zh) 2010-04-08 2011-04-01 應用共聚焦顯微鏡結構的被測物圖像獲取方法及系統

Country Status (3)

Country Link
KR (1) KR101103323B1 (ko)
TW (1) TWI452335B (ko)
WO (1) WO2011126219A2 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101383805B1 (ko) 2012-04-02 2014-04-10 주식회사 에스피바이오 레이저빔을 이용한 젤 이미징 장치
TWI490542B (zh) 2013-05-07 2015-07-01 Univ Nat Taiwan A scanning lens and an interference measuring device using the scanning lens
KR102209500B1 (ko) * 2016-08-02 2021-02-01 연용현 라이다 장치
GB201704771D0 (en) 2017-01-05 2017-05-10 Illumina Inc Modular optical analytic systems and methods
KR102116889B1 (ko) * 2018-10-30 2020-05-29 (주)자비스 유도 특성 개선 구조의 투과 엑스선 현미경 장치
KR102082747B1 (ko) * 2019-01-23 2020-02-28 연세대학교 산학협력단 초점거리 조절이 가능한 ｌｅｄ 어레이 기반 3차원 이미징 장치 및 방법
CN110017783B (zh) * 2019-05-20 2023-09-29 广东理工学院 板件位移在线检测装置及传送系统
CN111610197B (zh) * 2020-06-01 2023-09-12 上海御微半导体技术有限公司 一种缺陷检测装置及缺陷检测方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856457B2 (en) * 2001-03-27 2005-02-15 Prairie Technologies, Inc. Single and multi-aperture, translationally-coupled confocal microscope
CN1662811A (zh) * 2002-05-07 2005-08-31 应用材料股份有限公司 双光点相敏的检测
US20080151366A1 (en) * 2006-12-25 2008-06-26 Olympus Corporation Laser microscope and control method for the same

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Publication number Priority date Publication date Assignee Title
JPH07101529B2 (ja) * 1989-07-20 1995-11-01 三洋電機株式会社 テープレコーダのモード切替装置
ATE126903T1 (de) 1990-04-06 1995-09-15 Martin Russell Harris Konfokal-mikroskop.
CA2318573A1 (en) 1998-01-12 1999-07-15 Wallac Oy Confocal microscope with plural scanning beams
JP2000098259A (ja) * 1998-09-22 2000-04-07 Olympus Optical Co Ltd 共焦点顕微鏡用撮影装置
JP2000162506A (ja) * 1998-11-30 2000-06-16 Tokyo Seimitsu Co Ltd 共焦点顕微鏡
KR100612219B1 (ko) 2004-10-16 2006-08-14 학교법인연세대학교 음향광학편향기와 선주사 카메라를 이용한 공초점 레이저선주사 현미경

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856457B2 (en) * 2001-03-27 2005-02-15 Prairie Technologies, Inc. Single and multi-aperture, translationally-coupled confocal microscope
CN1662811A (zh) * 2002-05-07 2005-08-31 应用材料股份有限公司 双光点相敏的检测
US20080151366A1 (en) * 2006-12-25 2008-06-26 Olympus Corporation Laser microscope and control method for the same

Also Published As

Publication number Publication date
WO2011126219A3 (ko) 2012-01-05
WO2011126219A2 (ko) 2011-10-13
TW201142354A (en) 2011-12-01
KR20110113055A (ko) 2011-10-14
KR101103323B1 (ko) 2012-01-11

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