TWI452021B - Substrate breaking apparatus - Google Patents

Description

Substrate breaking device

The present invention relates to a substrate breaking device for dividing a substrate of a brittle material having a scribe line along a scribe line.

In the prior art, a substrate breaking device is known in which a mother substrate on which a scribe line is formed is fixed in a horizontal state, and the mother substrate is separated along a scribe line by a breaking unit respectively disposed above and below the mother substrate ( For example, Patent Document 1).

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2006-289625

In the case where the substrate of the brittle material is separated by the substrate breaking device of Patent Document 1, the upper breaking unit is moved in the same direction as the gravity to apply a load to the upper surface side of the mother substrate, and by The lower breaking unit moves in a direction opposite to the gravity to give a load to the lower surface side of the mother substrate.

Thus, gravity has different effects on the upper and lower breaking units. As a result, when the influence of gravity is not adjusted, there arises a problem that the load applied to the brittle material substrate from the upper breaking unit and the lower breaking unit is different.

Accordingly, an object of the present invention is to provide a substrate breaking device capable of separating a brittle material substrate well.

In order to solve the above problems, the invention described in claim 1 is characterized in that it is a substrate breaking device in which a slab-shaped brittle material substrate is formed along the scribe line, and includes a holding unit that rises Maintaining the brittle material substrate; and a breaking unit that divides the brittle material substrate held by the holding unit along the scribe line; and the breaking unit includes: a first breaking rod, Provided in a direction opposite to the holding unit and extending in one direction; and a second breaking lever that holds the brittle material substrate held by the holding unit and is disposed on the first breaking rod a side of the opposite side extending in a direction parallel to the first breaking bar; wherein the first breaking bar and the second breaking bar extend in a direction substantially parallel to the scribe line, the first The breaking rod and the second breaking rod are respectively close to the first main surface and the second main surface of the brittle material substrate, and the brittle material substrate is sandwiched by the first breaking rod and the second breaking rod Thereby, the brittle material substrate set to the standing posture is separated along the scribe line.

According to a second aspect of the invention, in the substrate breaking device of the first aspect, the first breaking bar and the second breaking bar are substantially perpendicular to a direction of gravity in a direction close to the brittle material substrate. .

The invention according to claim 1 or 2, wherein the first breaking bar is opposite to a side opposite to the second main surface on which the scribe line is formed. The first main surface side is given a load along the scribe line.

The substrate breaking device according to any one of claims 1 to 3, wherein the holding unit performs a transfer position of the brittle material substrate and a transfer position The breaking unit performs the brittle material substrate in the standing posture between the breaking positions of the breaking of the brittle material substrate.

According to the invention of the first to third aspects, when the brittle material substrate is held by the holding unit, the first breaking lever and the second breaking lever are disposed on both sides of the brittle material substrate held in the standing posture.

Here, when the first breaking bar and the second breaking bar are respectively close to each other on both sides of the brittle material substrate held in the standing posture (for example, the front side and the back side of the brittle material substrate), the first breaking bar and The angle between the direction in which the second breaking bar is close to the substrate of the brittle material and the direction of gravity is about 90° (deg).

On the other hand, the first breaking bar and the second breaking bar are disposed above and below the brittle material substrate, and when the first breaking bar and the second breaking bar are respectively close to the upper side and the lower side of the brittle material substrate. The angle between the direction in which the first breaking bar and the second breaking bar are close to the brittle material substrate and the direction of gravity is about 0° (deg) and 180° (deg), respectively. That is, the influence of gravity on the first break bar and the second break bar is different. As a result, when there is no adjustment to the influence of gravity, there arises a problem that the load applied to the brittle material substrate from the first breaking bar and the second breaking bar is different.

As described above, according to the invention of any one of claims 1 to 3, the influence of gravity on the first break lever and the second break lever is the same. Therefore, it is not necessary to take measures for reducing the influence of gravity for each of the first breaking bar and the second breaking bar, and the brittle material substrate can be well separated.

In particular, according to the invention of the third aspect, the first breaking lever can apply a load to the first main surface side (the side opposite to the second main surface on which the scribe line is formed) along the scribe line. Therefore, the breaking of the brittle material substrate along the scribe line can be performed well and surely.

In particular, according to the invention of claim 4, the holding unit transports the brittle material substrate in the standing posture. Thereby, the installation area of the holding unit including the inside of the conveyance path can be suppressed. Therefore, the size of the substrate breaking device can be reduced.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<1. Overall composition>

1 and 2 are a front view and a rear view, respectively, showing an example of the configuration of the substrate cutting device 1 according to the embodiment of the present invention. Fig. 3 is a front elevational view showing an example of the configuration of the workpiece 3. The substrate cutting device 1 is a device that breaks (cuts) the brittle material substrate 7 (see FIG. 3) on which the scribe lines 8 are formed along the scribe line 8.

As shown in FIGS. 1 and 2, the substrate cutting device 1 mainly includes a posture changing unit 10, a main body unit 40, a conveying unit 50, a non-contact holding unit 80, a breaking unit 85, and a control unit 90.

In addition, in each of the drawings of FIG. 1 and the following, in order to clarify the directional relationship of these portions, an XYZ orthogonal coordinate system in which the Z-axis direction is the vertical direction and the XY plane is the horizontal plane may be appropriately attached as needed.

The posture changing unit 10 changes the posture of the flat workpiece 3 between the horizontal posture and the standing posture, and delivers the workpiece 3 set to the standing posture to the transport unit 50. Further, the posture changing unit 10 is fixed to the main body unit 40.

Here, the workpiece 3 fixed to the transport unit 50 and subjected to the breaking process by the breaking unit 85 mainly includes the slicing ring 4, the slicing plate 5, and the brittle material substrate 7 as shown in FIG.

The slice ring 4 (annular body) is a flat plate formed of a metal such as stainless steel. As shown in FIGS. 1 and 2, the workpiece 3 is fixed to the fixing mechanism 60 by being sandwiched by the fixing mechanism 60 by the outer edge portion 4a of the slicing ring 4.

Further, as shown in FIG. 3, an opening 4b is formed in the vicinity of the center of the slicing ring 4. Further, a notch 4c is provided in the outer edge portion 4a of the slicing ring 4. The rotation angle of the workpiece 3 is detected by detecting the position of the notch 4c.

The slicing plate 5 (sheet-like body) is attached to the slicing ring 4 so as to cover the opening 4b of the slicing ring 4. Further, the brittle material substrate 7 is attached to the slicing plate 5 so as to be positioned on the opening 4b. Therefore, even if the workpiece 3 is in the standing posture, the brittle material substrate 7 can be surely fixed. Here, in the present embodiment, as the chipboard 5, for example, an adhesive sheet made of resin may be used.

The brittle material substrate 7 is a substrate made of a brittle material such as a glass substrate or a ceramic substrate. As shown in FIG. 3, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed on the brittle material substrate 7.

The scribe line 8 is a cut line (longitudinal crack) formed on the surface of the brittle material substrate 7. Here, the scribe line 8 is formed by, for example, pressing a scribing wheel (not shown) made of sintered diamond onto the surface of the brittle material substrate 7 and rotating it. Further, by applying stress to the brittle material substrate 7 on which the plurality of scribe lines 8 are formed, and breaking the brittle material substrate 7 along the scribe lines 8, a plurality of electronic components 9 (for example, a plurality of liquid crystal display devices) are obtained.

In the present embodiment, the surface of the main surfaces 3a and 3b of the workpiece 3 (and the slicing ring 4, the slicing plate 5, and the brittle material substrate 7) in which the scribe lines 8 are not formed is referred to as a first main surface 3a, and The surface on which the scribe line 8 is formed is referred to as a second main surface 3b.

As shown in FIGS. 1 and 2, the main unit 40 serves as a fixed posture changing unit 10, a non-contact holding unit 80, a breaking unit 85, and the like, and a fixing portion of a plurality of rotary actuators 41 (41a to 41c).

Here, each of the rotary actuators 41 (41a to 41c) rotates the shaft (rotation shaft: not shown) in accordance with the supply state of the compressed air. Thereby, the rods 42 (42a to 42c) attached to the shaft are swung and abut against the abutting portions 63 (see FIG. 8) of the corresponding sandwiching portions 61 (61a to 61c). Further, the hardware configuration of the sandwiching portions 61 (61a to 61c) will be described below.

The transport unit 50 is movably disposed along one of the pair of guide rails 43, 44 fixed to the main body unit 40. The transport unit 50 holds the flat workpiece 3 in an upright posture, and moves the workpiece 3 relative to the posture changing unit 10 and the main unit 40. Here, the holding of the transport unit 50 can be achieved by contacting and holding the outer edge portion 4a of the workpiece 3.

In this way, the transport unit 50 not only transports the workpiece 3 (transport function), but also fixes the flat workpiece 3 (holding function) in a standing posture by contacting and holding the outer edge portion 4a of the workpiece 3 including the brittle material substrate 7. That is, the transport unit 50 is also used as a "holding unit".

Further, in the present embodiment, when the workpiece 3 is transported, the transport unit 50 moves, but the posture changing unit 10 and the main unit 40 are stationary. Therefore, in the present embodiment, the posture changing unit 10 and the main unit 40 are also collectively referred to as "fixed side units".

As shown in FIG. 2, the non-contact holding unit 80 is disposed opposite to the transport unit 50 located at the breaking position P20, and performs non-contact holding of the workpiece 3 that is held by the fixing mechanism 60 of the transport unit 50 and holds the outer edge portion 4a. .

In this manner, the "contact holding" is a non-contact holding of the conveying unit 50 (holding unit) of the outer edge portion 4a of the flat workpiece 3 in the standing posture and the first main surface 3a of the "non-contact holding" workpiece 3. Unit 80 constitutes a holding device.

The breaking unit 85 divides the brittle material substrate 7 of the workpiece 3 held by the conveying unit 50 along the scribe line 8. Here, the breaking unit 85 applies the stress to the brittle material substrate 7, and causes the vertical crack to grow from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side thereof. Break.

The control unit 90 controls the operations of the respective elements included in the posture changing unit 10, the main unit 40, the transport unit 50, the non-contact holding unit 80, and the breaking unit 85, and realizes data calculation. As shown in FIG. 1 and FIG. 2, the control unit 90 mainly includes a ROM (Read Only Memory) 91, a RAM (Random Access Memory) 92, and a CPU (Central Processing Unit). ) 93.

The ROM 91 is a so-called non-volatile memory unit and stores, for example, a program 91a. Further, as the ROM 91, a flash memory which is a non-volatile memory which is freely readable and writable can be used. The RAM 92 is a volatile memory unit that stores, for example, data used in the calculation of the CPU 93.

The CPU 93 executes control in accordance with the program 91a of the ROM 91 at a specific timing (for example, driving control of a plurality of rotary actuators 41 (41a to 41c) and a plurality of cylinders 37 (37a to 37d) for pressing).

In addition, the detailed hardware configuration of the posture changing unit 10, the conveying unit 50, the non-contact holding unit 80, and the breaking unit 85 will be described below.

<2. Configuration of posture changing unit>

4 and 5 are a side view and a plan view showing an example of the configuration of the posture changing unit 10, respectively. Here, the posture changing unit 10 performs an operation of changing the posture of the workpiece 3 and an operation of transferring the workpiece 3 to the transport unit 50 as described above.

As shown in FIGS. 4 and 5, the posture changing unit 10 mainly includes a plurality of support portions 11 (11a to 11d), a plurality of positioning handles 13 (13a to 13d), a delivery portion 20, a swing portion 30, and a pressing portion 35.

A plurality of (four in the present embodiment) support portions 11 (11a to 11d) support the workpiece 3 that is transferred to the posture changing unit 10. As shown in FIGS. 4 and 5, each of the support portions 11 (11a to 11d) is fixed to a position at which the outer edge portion 4a of the slice ring 4 of the workpiece 3 can be supported and does not interfere with the lift table 21 of the interface portion 20. .

Further, as shown in FIGS. 4 and 5, each of the support portions 11 (11a to 11d) has balls 12 (12a to 12d) that are rotatably provided at the tip end thereof. Thereby, each of the balls 12 (12a to 12d) can support the workpiece 3 and rotate. Therefore, the position of the workpiece 3 supported by each of the support portions 11 (11a to 11d) can be easily and smoothly changed.

Here, the workpiece 3 supported by the plurality of support portions 11 (11a to 11d) may be transferred to the posture changing unit 10, for example, from a transport robot (not shown). Further, the operator of the substrate cutting device 1 (hereinafter simply referred to as "operator") may mount the workpiece 3 on the plurality of support portions 11.

A plurality of (four in the present embodiment) positioning handles 13 (13a to 13d) are provided adjacent to the corresponding grip claws 23 (23a to 23d) as shown in Figs. 4 and 5 . Each of the positioning handles 13 (13a to 13d) advances and retreats along the longitudinal direction of the corresponding arm 26 (26a to 26d) by a moving mechanism (not shown) provided on the base portion 20a. Thereby, each of the positioning handles 13 (13a to 13d) presses the workpiece toward the center 21a of the elevating table 21 so that the position of the workpiece 3 supported by the respective supporting portions 11 (11a to 11d) becomes a desired range. 3 (more specifically, the slicing plate 5) outer edge portion 4a.

The workpiece confirmation sensor 15 detects whether the workpiece 3 is supported by the plurality of support portions 11. As shown in FIG. 5, the workpiece confirmation sensor 15 is adjacent to the support portion 11b and is fixed at a position where it does not interfere with the elevation table 21 of the delivery portion 20. As the workpiece confirmation sensor 15, for example, a proximity sensor that detects the presence or absence of the workpiece 3 in a non-contact manner can be used.

The delivery unit 20 holds the workpiece 3 that is placed in a horizontal posture and supported by a plurality of support portions 11. Further, the delivery unit 20 transfers the workpiece 3 in the standing posture between the transfer unit 50 and the transfer unit 50. As shown in FIGS. 4 and 5, the delivery unit 20 mainly includes a lifting platform 21, a plurality of gripping claws 23 (23a to 23d), a plurality of adsorption portions 25 (25a to 25d), and a delivery cylinder 28.

As shown in FIG. 5, the elevating table 21 includes a plurality of (four in the present embodiment) arms 26 (26a to 26d) extending radially outward from the center 21a. The lifting table 21 prevents deformation of the workpiece 3 held by the grip claws 23 and the suction portion 25.

A plurality of (four in the present embodiment) gripping claws 23 (23a to 23d) (a plurality of gripping portions), and holding the workpiece 3 in a posture between the horizontal posture and the standing posture (more specifically, the slicing ring 4) The outer edge portion 4a. As shown in FIGS. 4 and 5, each of the grip claws 23 (23a to 23d) is provided in the vicinity of the front end 27 (27a to 27d) of the corresponding arm 26 (26a to 26d).

Here, as shown in FIG. 4, in the vicinity of the upper end of each of the positioning handles 13 (13a to 13d) (for convenience of illustration, only the vicinity of the upper end of the positioning handle 13b) is formed. Therefore, even if the positioning handles 13 (13a to 13d) are advanced and retracted to position the workpiece 3, the positioning handles 13 (13a to 13d) and the corresponding gripping claws 23 (23a to 23d) and the suction portion 25 (25a to 25d) are provided. There will be no interference.

Further, when the positioning of the workpiece 3 is performed by the positioning handles 13 (13a to 13d) so that the position of the workpiece 3 is set to a desired range, the workpiece 3 is surrounded by the respective grip claws 23 (23a to 23d).

A plurality of (four in the present embodiment) adsorption portions 25 (25a to 25d) are provided corresponding to the respective grip claws 23 (23a to 23d), and the outer edge of the workpiece 3 (more specifically, the slice ring 4) is adsorbed. Part 4a.

Therefore, after positioning by the plurality of positioning handles 13 (13a to 13d), the workpiece 3 is sucked by the plurality of adsorption portions 25 (25a to 25d), thereby being supported by the plurality of support portions 11 (11a to 11d). The workpiece 3 is handed over to the interface 20.

In this manner, each of the grip claws 23 (23a to 23d) and each of the adsorption portions 25 (25a to 25d) grip and adsorb the slicing ring 4. That is, the brittle material substrate 7 is not held and adsorbed by the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to 25d). Therefore, the delivery unit 20 and the swinging unit 30 can perform the holding and posture change of the workpiece 3 without affecting the scribe line 8 (see FIG. 3) formed on the brittle material substrate 7.

When the transfer cylinder 28 transfers the workpiece 3 in the standing posture between the delivery unit 20 and the transport unit 50, the workpiece 3 is moved between the delivery unit 20 and the transport unit 50. As shown in FIG. 4, the transfer cylinder 28 includes a body portion 28a and a link 29.

The link 29 is movable forward and backward with respect to the body portion 28a. As shown in FIG. 5, the front end of the link 29 is fixed to the bottom surface of the lifting platform 21. Therefore, the workpiece 3 fixed in the upright position on the elevating table 21 moves between the delivery unit 20 and the transport unit 50 in response to the forward or backward movement of the link 29.

The swinging portion 30 swings the transfer portion 20 around the swing shaft 31, and changes the posture of the workpiece 3 held by the delivery portion 20 between the horizontal posture and the standing posture. As shown in FIGS. 4 and 5, the swing portion 30 mainly includes a swing shaft 31, a swing frame 32, and a swing cylinder 33.

The swing shaft 31 serves as a central axis that swings the joint portion 20 with respect to the base portion 20a. As shown in Fig. 4, the swing shaft 31 is rotatably supported by the bearings 30a, 30b (shaft support). Further, the bearings 30a and 30b are respectively fixed to the corresponding brackets 30c and 30d.

The swing frame 32 is a frame formed of a plurality of (three in the present embodiment) plate bodies 32a to 32c. As shown in Fig. 5, the swing shaft 31 is fixed between the plate bodies 32a, 32c. On the other hand, the delivery cylinder 28 of the delivery unit 20 is fixed to the plate body 32b.

The swing cylinder 33 is a drive unit that swings the delivery unit 20. As shown in FIG. 4, the swing cylinder 33 mainly includes a body portion 33a and a link 34.

The link 34 is movable forward and backward with respect to the body portion 33a. As shown in FIGS. 4 and 5, the main body portion 33a is fixed to the base portion 20a of the delivery portion 20, and the front end 34a of the link 34 is fixed to the plate body 32a of the swing frame 32.

Therefore, when the link 34 advances from the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the horizontal posture to the standing posture. On the other hand, when the link 34 retreats to the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the standing posture to the horizontal posture.

The pressing portion 35 adjusts the load applied to the workpiece 3 by the fixing mechanism 60 of the conveying unit 50. Thereby, the fixing mechanism 60 performs an operation of fixing the workpiece 3 delivered to the transport unit 50 by the transfer unit 20 and an operation of releasing the fixed state of the workpiece 3.

As shown in FIGS. 4 and 5, the pressing portion 35 mainly includes a mounting frame 35a, a plurality of brackets 36 (36a to 36d), and a plurality of pressing cylinders 37 (37a to 37d).

The mounting frame 35a and the plurality of brackets 36 (36a to 36d) are for fixing the plurality of pressing cylinders 37 (37a to 37d) to the posture changing unit 10. As shown in FIGS. 2 and 4, the mounting frame 35a is formed in a frame shape and fixed to the base portion 20a. Further, a plurality of (four in the present embodiment) brackets 36 (36a to 36d) are mounted in the transport direction (arrow AR1 direction) of the transport unit 50 from the vertical plate of the mounting frame 35a as shown in Fig. 2 . board.

The plurality of pressing cylinders 37 (37a to 37d) respectively compress the corresponding pressing members 73 (73a to 73d: see Fig. 7). As shown in FIGS. 4 and 5, each of the pressing cylinders 37 (37a to 37d) mainly includes a plurality of links 38 (38a to 38d) and a plurality of rollers 39 (39a to 39d).

A plurality of (four in the present embodiment) links 38 (38a to 38d) are respectively movable forward and backward in the direction of the arrow AR2. Further, corresponding rollers 39 (39a to 39d) are attached to the front ends of the respective links 38 (38a to 38d).

Therefore, when each of the links 38 (38a to 38d) advances, the corresponding rollers 39 (39a to 39d) abut against the respective pressing members 73 (73a to 73d: see Fig. 7), thereby compressing the respective pressures. The member 73 (73a to 73d).

On the other hand, when each of the links 38 (38a to 38d) retreats, the corresponding rollers 39 (39a to 39d) are separated from the respective pressing members 73 (73a to 73d: see Fig. 7). Thereby, the compressed state of each of the pressing members 73 (73a to 73d) is released.

A plurality of (four in the present embodiment) rolls 39 (39a to 39d) are rotating bodies provided at the tips of the corresponding links 38 (38a to 38d), respectively. As shown in FIG. 5, each of the rollers 39 (39a to 39d) is rotatable about a rotation axis extending in the vertical direction (a direction substantially parallel to the Z axis: a direction substantially perpendicular to the direction of the arrow AR1).

Therefore, when the respective rollers 39 (39a to 39d) are in contact with the corresponding pressing members 73 (73a to 73d), when the conveying unit 50 moves in the conveying direction (arrow AR1 direction), each roller 39 (39a~) 39d) Act as follows. That is, each of the rollers 39 compresses the corresponding pressing members 73 (73a to 73d) while rotating on the corresponding pressing members 73 (73a to 73d) along the conveying direction. Therefore, the conveyance unit 50 can move in the conveyance direction while maintaining the compressed state of each of the rollers 39 (39a to 39d). As a result, even when the transport unit 50 moves with respect to the posture changing unit 10 and the main unit 40 (fixed side unit), the fixed release state of the workpiece 3 can be maintained.

<3. Composition of transport unit>

6 and 7 are a front view and a rear view showing an example of the configuration of the transport unit 50. Fig. 8 is a front elevational view showing an example of the configuration of the movable holding portions 61 (61a to 61c). Fig. 9 is a cross-sectional view showing the vicinity of the guide claw 69 (69a) as seen from the line V-V of Fig. 8. Fig. 10 is a cross-sectional view showing the vicinity of the guide claw 69 (69d) as seen from the W-W line of Fig. 7.

Here, the transport unit 50 is in contact with the outer edge portion 4a of the workpiece 3, and between the transfer position P10 at which the transfer of the workpiece 3 is performed and the break position P20 at which the breaking of the brittle material substrate 7 is performed by the breaking unit 85. Transfer the workpiece 3 in the upright position.

Thereby, the installation area of the conveyance unit 50 including the conveyance path (that is, the size of the movement area of the conveyance unit 50) can be suppressed. Therefore, the size of the substrate breaking device 1 can be reduced.

As shown in FIGS. 6 and 7, the transport unit 50 mainly includes a fixed base 51 and a rotary table 52. Here, the transport unit 50 of the present embodiment is movably provided to the posture changing unit 10, the main unit 40, the non-contact holding unit 80, and the like by, for example, a linear motor (not shown).

The turntable 52 is a disk-shaped rotating portion that rotates with respect to the fixed table 51. As shown in FIGS. 6 and 7, the turntable 52 is rotatably fitted into the circular through hole 51a formed in the fixing table 51. Further, the rotary table 52 includes a fixing mechanism 60 that fixes the workpiece 3. Furthermore, the configuration of the fixing mechanism 60 will be described below.

The fixing table 51 serves as a mounting portion for mounting, for example, a rotating element for rotating the turntable 52 and a traveling element for moving the fixed table 51 and the turntable 52 with respect to the main unit 40. As shown in FIGS. 6 and 7, the fixing table 51 mainly includes a guide block 55, a motor 56, and a belt 57.

A plurality of (six in the present embodiment) guide blocks 55 are provided on the front surface 51b of the fixed table 51 as shown in Fig. 6 . Further, a plurality of balls (not shown) are rotatably provided inside each of the guide blocks 55. Further, when each of the guide blocks 55 is attached to the corresponding guide rails 43, 44, the balls (not shown) in the respective guide blocks 55 are in contact with the corresponding guide rails 43, 44 in a rotatable state.

Thus, when each of the guide blocks 55 moves along the corresponding guide rails 43 and 44 (that is, in the transport direction (arrow AR1 direction)), the balls (not shown) in the respective guide blocks 55 are on the corresponding guide rails 43 and 44. Rotate up. Therefore, the fixing table 51 can smoothly travel along the guide rails 43, 44.

The motor 56 is a drive unit that imparts a rotational force to the turntable 52. The belt 57 transmits the rotational force imparted by the motor 56 to the rotary table 52. As shown in FIG. 6, the belt 57 is wound around the turntable 52 and the motor pulley 58 attached to the front end of the rotating shaft 56a of the motor 56. Thereby, when the motor 56 rotates, the workpiece 3 fixed to the fixing mechanism 60 rotates.

The tension adjusting pulley 59 adjusts the tension applied to the belt 57. In the present embodiment, the position of the tension adjusting pulley 59 (for example, the position in the Z-axis direction) is adjusted by a positioning mechanism (not shown). Thereby, the slack of the belt 57 can be easily removed, and the tension of the belt 57 can be easily adjusted. Therefore, the rotation state of the rotary table 52 can be favorably maintained.

<3.1. Composition of the fixing mechanism>

The fixing mechanism 60 fixes the flat workpiece 3 in an upright posture. As shown in FIGS. 6 and 7, the fixing mechanism 60 mainly includes a plurality of clamping portions 61 (61a to 61c), 62, and a plurality of pressing portions 71.

The plurality of holding portions 61 (61a to 61c) and 62 sandwich the outer edge portion 4a of the workpiece 3 disposed between the pressing portion 71 and the pressing portion 71. As shown in FIG. 7, a plurality of holding portions 61 (61a to 61c) and 62 are provided along the pressing frame 72, respectively.

In the following description, the nip portion with the reference numeral 61 (61a to 61c) is referred to as a "movable nip portion", and the nip portion with the reference numeral 62 is referred to as a "fixed nip portion".

That is, the plurality of clamping portions include a plurality of movable clamping portions 61 (61a to 61c) and a fixed clamping portion 62. Further, in other words, one of the plurality of gripping portions is a plurality of movable grip portions 61 (61a to 61c), and the remaining portion of the plurality of grip portions is the fixed grip portion 62.

A plurality of (three in the present embodiment) movable grip portions 61 (61a to 61c) advance and retreat in a direction approaching or departing from the pressing frame 72. As shown in FIGS. 7 and 8, each of the movable holding portions 61 (61a to 61c) mainly includes an abutting portion 63, a rotating plate 64, a pressing member 66, a movable guide 67 (67a to 67c), and a guiding claw. 69 (69a~69c).

Here, the movable holding portions 61a to 61c have the same hard body configuration. Therefore, only the hardware configuration of the movable grip portion 61a will be described below.

The abutting portion 63 is a spherical body formed of, for example, metal, and is attached to the rotating plate 64. The rotary plate 64 is a plate body that is rotated about the rotation shaft 64a. For example, when the lever 42 (42a) of the rotary actuator 41 (41a) (see FIGS. 1 and 2) is swung, the lever 42 (42a) abuts against the abutment portion 63 of the corresponding clamping portion 61 (61a). The rotary plate 64 is rotated in the direction of the arrow R1 around the rotation shaft 64a.

The link 65 is a narrow-width plate body that connects the rotary plate 64 and the movable guide 67 (67a). One end of the link 65 is coupled to the rotary plate 64 by a rotary shaft 65a, and the other end of the link 65 is coupled to the movable guide 67 (67a) by a rotary shaft 65b.

The pressing member 66 is formed of an elastic member such as a spring. As shown in Fig. 8, one end 66a of the pressing member 66 is fixed to the movable side rotating plate 64, and the other end 66b of the pressing member 66 is fixed to the fixed side reinforcing plate 64b. Thus, when the rotary plate 64 is rotated in the direction of the arrow R1, the pressing member 66 is pressed against the rotary plate 64 in the opposite direction to the direction of the arrow R1.

The movable guide 67 (67a) is a flat movable member. The movable guide 67 adjusts the fixed state of the workpiece 3 by advancing and retreating in a direction approaching or departing from the pressing frame 72.

That is, when the lever 42 (42a) is swung by the rotary actuator 41 (41a) to rotate the rotary plate 64 in the direction of the arrow R1, the movable guide 67 (67a) can be directed away from the pressing frame 72. mobile. Thereby, the movable guide 67 (67a) is in the clamp release state.

On the other hand, the lever 42 (42a) is returned to the position before the swing by the rotary actuator 41 (41a), and the rotation plate 64 is pressed in the opposite direction of the arrow R1 by the pressing force of the pressing member 66. When rotated, the movable guide 67 (67a) moves in a direction close to the pressing frame 72. Thereby, the movable guide 67 (67a) is in a state in which the workpiece 3 can be held between the pressing frame 72.

In this manner, the plurality of rotary actuators 41 (41a to 41c) provided on the main unit 40 are used as a part of the plurality of clamping portions 61 (61a to 61c) and 62 (a plurality of movable clamping portions 61a~) 61c) A drive unit (first drive unit) that advances and retreats in a direction approaching or departing from the press frame 72.

The notch 60a is a notch formed on the side of the pressing frame 72 of the movable guide 67 as shown in FIG. Here, when the workpiece 3 is transferred between the delivery unit 20 of the posture changing unit 10 and the transport unit 50, the grip claws 23 (23a) can be disposed in a space (for example, the gap 75 (75a)) formed by the notches 60a (for example, the gap 75 (75a)) Refer to Figure 8 and Figure 11 to Figure 13). Therefore, when the workpiece 3 is transferred, the grip claws 23 (23a) and the movable guides 67 (67a) can be effectively prevented from interfering.

A plurality of (two in the present embodiment) guide claws 69 (69a) cooperate with the movable guide 67 (67a) and the pressing frame 72 to sandwich the workpiece 3. As shown in Fig. 8, the guide claws 69 (69a) are spaced apart from the movable guide 67 (67a) and are oriented in the direction of the contour of the opposite pressing frame 72. Further, as shown in Fig. 9, the guide claw 69 (69a) is attached to the movable guide such that the step surface 60b of the guide claw 69 (69a) is positioned below the lower end surface 60c of the movable guide 67 (67a). 67 (67a).

Therefore, as shown in FIG. 9, the movable holding portion 61 (61a) and the pressing portion 71 are held by the workpiece 3 by the lower end surface 60c of the movable guide 67 (67a) and the guide claw 69 (69a). The step surface 60b and the opposing surface 60d of the pressing frame 72 are brought into contact with the workpiece 3.

The fixed clamping portion 62 is fixed to the vicinity of the pressing frame 72 as shown in FIG. As shown in Fig. 7, the fixed clamping portion 62 mainly includes a fixed guide 68 and a guiding claw 69 (69d).

The fixed guide 68 is a flat fixing member. That is, the fixed guide 68 is different from the movable guide 67 (67a to 67c), and is fixed to the turntable 52 without advancing and retreating in a direction approaching or departing from the pressing frame 72.

Thereby, the positioning of the workpiece 3 with respect to the fixing mechanism 60 can be easily performed with reference to the position of the fixed grip portion 62 as a reference. Therefore, the clamping and releasing of the workpiece 3 can be satisfactorily performed by using the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62.

The notch 68a is a notch formed on the side of the pressing frame 72 of the fixed guide 68 as shown in FIG. Here, when the workpiece 3 is transferred between the delivery unit 20 of the posture changing unit 10 and the transport unit 50, the grip claws 23 (23d) can be disposed in a space (for example, the gap 75 (75d)) formed by the notches 68a (for example, the gap 75 (75d)) Refer to Figure 7 and Figure 11 to Figure 13). Therefore, when the workpiece 3 is transferred, the grip claws 23 (23d) can be effectively prevented from interfering with the fixed guides 68.

A plurality of (two in the present embodiment) guide claws 69 (69d) cooperate with the fixed guide 68 and the pressing frame 72 to sandwich the workpiece 3. As shown in Fig. 7, the guide claws 69 (69d) are spaced apart from each other on the fixed guide 68 and in the direction of the contour of the opposite pressing frame 72. Further, as shown in FIG. 10, the guide claw 69 (69d) is attached so that the step surface 60b of the guide claw 69 (69d) is located closer to the side of the pressing frame 72 than the side end surface 68b of the fixed guide 68. The guide member 68 is fixed.

Therefore, as shown in FIG. 9, the holding portion 62 and the pressing portion 71 are clamped to the workpiece 3 by the side end surface 68b of the fixing guide 68, the step surface 60b of the guiding claw 69 (69d), and the squeezing. The opposing face 60d of the press frame 72 is brought into contact with the workpiece 3.

The pressing portion 71 presses the outer edge portion 4a of the workpiece 3 by sandwiching the workpiece 3 between the movable holding portions 61 (61a to 61c) and the fixed holding portion 62. As shown in Fig. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of pressing members 73 (73a to 73d).

The pressing frame 72 is formed in a ring shape (more specifically, a rectangular ring shape) as shown in FIGS. 6 and 7 and is attached to the vicinity of the center of the rotary table 52. As shown in FIGS. 9 and 10, the pressing frame 72 presses the outer edge portion 4a of the workpiece 3 from the second main surface 3b side of the workpiece 3.

A plurality of (four in the present embodiment) pressing members 73 (73a to 73d) are formed of an elastic member such as a spring. As shown in FIG. 7, each of the pressing members 73 (73a to 73d) is coupled to a corresponding one of the four corners of the pressing frame 72.

Here, each of the pressing members 73 (73a to 73d) receives the direction from the front side of the sheet of FIG. 7 toward the back side from the corresponding pressing cylinders 37 (37a to 37d) (see FIGS. 4 and 5) (ie, the arrow) When the force in the opposite direction of the AR2 direction is applied, the pressing members 73 (73a to 73d) compress. In other words, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 serve as driving portions (second driving portions) that apply a compressive force to the corresponding pressing members 73 (73a to 73d).

On the other hand, when the links 38 (38a to 38d) are retracted and the rollers 39 (39a to 39d) are separated from the corresponding pressing members 73 (73a to 73d), the pressing members 73 (73a to 73d) are pressed against each other. The pressing frame 72 is pressed against the pressing force in the direction of the arrow AR2 (pressing direction).

Thereby, the workpiece 3 is sandwiched by the movable holding portions 61 (61a to 61c), the fixed holding portion 62, and the pressing frame 72 by the pressing force from the pressing members 73 (73a to 73d). As a result, the workpiece 3 is fixed to the fixing mechanism 60.

In this manner, the fixed state of the workpiece 3 on the fixing mechanism 60 is controlled by the pressing cylinders 37 (37a to 37d) (second driving portion) of the posture changing unit 10 and the rotary actuators 41 (41a to 41c) of the main unit 40. (First drive unit) and adjusted.

In other words, the fixing of the workpiece 3 to be conveyed is performed by the fixing mechanism 60 of the conveying unit 50, the pressing cylinders 37 (37a to 37a) of the posture changing unit 10, and the rotary actuator 41 of the main unit 40 (41a~). 41c) and executed.

Therefore, in the present embodiment, the posture changing unit 10, the main unit 40, and the transport unit 50 are also collectively referred to as a "transport system."

<3.2. Fixing method of workpiece>

11 to 13 are views for explaining a fixing step and a fixing releasing step of the fixing mechanism 60 to the workpiece 3. Here, the procedure of fixing the workpiece 3 set to the standing posture to the fixing mechanism 60 will be described.

Further, the fixing step is realized by the control unit 90 controlling the operations of the respective elements included in the posture changing unit 10, the main unit 40, and the transport unit 50.

Further, before the start of the fixing step, the transport unit 50 is moved to the release position P11 of the delivery position P10 (see FIG. 2), and the workpiece 3 is sucked and held by the respective adsorption portions 25 (25a to 25d).

In the present fixing step, the delivery portion 20 is first moved (oscillated) by the swing portion 30. Thereby, the workpiece 3 held by the delivery unit 20 moves in the standing posture toward the vicinity of the fixing mechanism 60 of the transport unit 50.

Next, a plurality of rotary actuators 41 (41a to 41c) (see FIG. 2) provided on the main unit 40 are operated to swing the respective rods 42 (42a to 42c). Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) move in the direction away from the pressing frame 72.

Then, a plurality of pressing cylinders 37 (37a to 37d) are operated to advance the respective links 38 (38a to 38d) from the cylinder body. Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (39a to 39d), and the pressing frame 72 is pressed against the pressing members 73 (73a to 73d) (arrow AR2) Move in the opposite direction of direction).

Then, the transport unit 50 moves from the release position P11 of the delivery position P10 to the fixed position P12 (see FIGS. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the tips of the respective extrusion cylinders 37 (37a to 37d) are compressed on the pressing members 73 (73a to 73d) while compressing the corresponding pressing members 73 (73a to 73d). . Therefore, the transport unit 50 moves in the transport direction in a state where the press frame 72 is separated from the workpiece 3. Further, in a state where the pressing frame 72 is separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b of the fixed guide 68 (Fig. 10).

Then, the rotary actuators 41 (41a to 41c) are operated in a state where the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b (Fig. 10) of the fixed guide 68, so that the corresponding rod 42 (42a to 42c) is actuated. ) Return to the position before the swing.

Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) move in the direction close to the pressing frame 72. Therefore, the outer edge portion 4a of the workpiece 3 abuts against each of the movable guides 67 (67a to 67c).

Then, in the state where the outer edge portion 4a of the workpiece 3 abuts against each of the movable holding portions 61 (61a to 61c) and the fixed nip portion 62, the respective pressing cylinders 37 (37a to 37d) operate to cause the respective connecting rods. 38 (38a~38d) retreats.

Thereby, the compressive force applied to the corresponding pressing members 73 (73a to 73d) by the respective pressing cylinders 37 (37a to 37d) is not provided, and the pressing frame 72 is moved in the pressing direction of the pressing members 73. Further, as shown in FIGS. 9 and 10, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is narrowed.

Therefore, the workpiece 3 is sandwiched between the movable holding portions 61 (61a to 61c) and the fixed holding portion 62 and the pressing portion 71, and the workpiece 3 in the standing posture is fixed by the fixing mechanism 60. That is, according to this fixing step, the workpiece 3 in the standing posture can be satisfactorily fixed to the fixing mechanism 60.

Then, in a state where the workpiece 3 is fixed by the fixing mechanism 60, the adsorption state of each of the adsorption sections 25 (25a to 25d) is released. Thereby, the holding state of the workpiece 3 by the delivery portion 20 is released, and the fixing step of the workpiece 3 is completed.

<3.3. Fixing method for workpieces>

Here, the step of releasing the fixed state of the workpiece 3 by the workpiece 3 fixed by the fixing mechanism 60 in the standing posture will be described with reference to FIGS. 11 to 13 .

Further, the releasing step is realized in the same manner as the fixing step of the workpiece 3, and the control unit 90 controls the operations of the respective elements included in the posture changing unit 10, the main unit 40, and the conveying unit 50.

Further, before the start of the release step, the transport unit 50 is moved to the fixed position P12 (see FIG. 2) of the delivery position P10, and the workpiece 3 is fixed by the fixing mechanism 60.

In the releasing step, first, the workpiece 3 fixed by the fixing mechanism 60 is sucked by each of the adsorption portions 25 (25a to 25d). Thereby, the workpiece 3 is held by the delivery portion 20 in a state of being fixed to the fixing mechanism 60.

Next, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, a plurality of cylinders 37 (37a to 37d) for pressing are formed. The 2 drive unit operates to advance each of the links 38 (38a to 38d) from the cylinder body.

Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding rollers 39 (39a to 39d), and the pressing frame 72 is pressed toward the pressing members 73 (73a to 73d) (arrow AR2 direction) Move in the opposite direction. Further, as shown in FIGS. 9 and 10, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is enlarged. Therefore, the fixing of the workpiece 3 in the standing posture by the fixing mechanism 60 is released, and the workpiece 3 is sucked and held by the respective adsorption portions 25 (25a to 25d) of the delivery portion 20.

In this manner, the respective pressing cylinders 37 (37a to 37d) of the pressing portion 35 compress the corresponding pressing members 73 (73a to 73d), whereby the fixed state of the workpiece 3 can be released.

Then, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, a plurality of rotary actuators 41 (41a to 41c) are formed. The 1 drive unit operates to swing the respective levers 42 (42a to 42c). Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) move in the direction away from the pressing frame 72.

Then, the transport unit 50 is moved from the fixed position P12 of the delivery position P10 to the release position P11 (see FIGS. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the tips of the respective extrusion cylinders 37 (37a to 37d) are compressed on the pressing members 73 (73a to 73d) while compressing the corresponding pressing members 73 (73a to 73d). . Therefore, the transport unit 50 moves in the transport direction in a state where the press frame 72 is separated from the workpiece 3. Further, in a state where the pressing frame 72 is separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 is separated from the side end surface 68b (Fig. 10) of the fixed guide 68. As described above, according to this release step, the fixed state of the workpiece 3 fixed by the fixing mechanism 60 can be satisfactorily released.

Then, the transfer portion 20 is moved (oscillated) by the swing portion 30, whereby the workpiece 3 held by the delivery portion 20 is separated from the fixing mechanism 60 of the transfer unit 50. Further, after the workpiece 3 is separated from the fixing mechanism 60, the links 38 (38a to 38d) of the plurality of pressing cylinders 37 (37a to 37d) are retracted, whereby the pressing frame 72 is pressed in the direction (arrow AR2). Move to complete the fixing release step of the workpiece 3.

<4. Composition of non-contact holding unit>

Fig. 14 is a front elevational view showing an example of the configuration of the non-contact holding unit 80. Here, the non-contact holding unit 80 assistably non-contacts the first main surface 3a of the workpiece 3 that is held and held by the transport unit 50 as described above. As shown in FIG. 14, the non-contact holding unit 80 mainly includes a mounting base 81, a plurality of first suction portions 83, and a plurality of second suction portions 84.

Here, in the present embodiment, the "first attraction portion" of the symbol 83 and the "second attraction portion 84" of the symbol 84 are also collectively referred to as "suction portion". That is, the plurality of suction portions include a plurality of first suction portions 83 and a plurality of second suction portions 84.

The mounting table 81 is disposed to face the transport unit 50 that has traveled to the breaking position P20. As shown in FIG. 2, the mounting table 81 is fixed to the body unit 40. Further, as shown in FIGS. 1 and 14, the vertical surface 81a of the mounting table 81 serves as a mounting surface on which a plurality of first suction portions 83 and a plurality of second suction portions 84 are mounted.

The insertion hole 81b is a through hole extending in the vertical direction (the direction parallel to the Z axis), and is formed in the vicinity of the center of the mounting table 81. The first breaking lever 86 reaches the first main surface 3a of the workpiece 3 via the insertion hole 81b.

A plurality of suction portions (a plurality of first suction portions 83 and a plurality of second suction portions 84) are provided on the vertical surface 81a of the mounting table 81 as shown in Figs. 1 and 14 . The workpiece 3 is held in a non-contact state by sucking the first main surface 3a of the workpiece 3 in a standing posture by a plurality of suction portions. Here, in the present embodiment, a Bernoulli chuck can be used as the plurality of first suction portions 83 and the plurality of second suction portions 84.

In the plural (12 in the present embodiment), the first suction portion 83 is provided on the vertical surface of the mounting table 81 along the both sides in the longitudinal direction of the insertion hole 81b formed in the mounting table 81, as shown in Fig. 14 . On 81a. Each of the first suction portions 83 is constituted by, for example, a Bernoulli chuck. Thereby, the workpiece 3 can be held in a non-contact state by sucking the opposing workpiece 3 by each of the first suction portions 83.

As shown in FIG. 14, the plurality of (12 in the present embodiment) second suction portions 84 are provided on the vertical surface 81a of the mounting table 81 in a state in which a plurality of first suction portions 83 are sandwiched from both sides. Each of the second suction portions 84 is constituted by, for example, a Bernoulli suction cup, similarly to the first suction portion 83. Thereby, each of the second suction portions 84 can hold the workpiece 3 in a non-contact state by sucking the opposing workpiece 3 in the same manner as the first suction portion 83.

Here, as shown in FIG. 14, the diameter of each of the first suction portions 83 is smaller than the diameter of each of the second suction portions 84. Further, as shown in FIG. 14, the interval D1 (first interval) between the adjacent suction portions of the plurality of first suction portions 83 is smaller than the interval between the adjacent suction portions of the plurality of second suction portions 84. D2 (2nd interval).

In this manner, the plurality of first attracting portions 83 are arranged more densely than the plurality of second attracting portions 84. Thereby, the workpiece 3 in the vicinity of the insertion hole 81b can be more reliably non-contacted (in other words, the workpiece 3 in the vicinity of the first breaking lever 86). Therefore, the breaking of the brittle material substrate 7 can be performed satisfactorily.

<5. Composition of the breaking unit>

Fig. 15 is a plan view showing an example of the configuration of the breaking unit 85. Here, the breaking unit 85 divides the brittle material substrate 7 in a holding state by the conveying unit 50 and the non-contact holding unit 80 along the scribe line 8. As shown in FIG. 15, the breaking unit 85 mainly includes a first breaking lever 86 and a plurality of second breaking levers 87.

The first breaking lever 86 advances and retracts so as to reach the side of the conveying unit 50 via the insertion hole 81b. As shown in FIG. 14 and FIG. 15, the first breaking lever 86 is along the insertion hole 81b of the mounting base 81 in one direction (the longitudinal direction of the insertion hole 81b: the Z-axis direction) (hereinafter, simply referred to as "the extending direction". ")extend.

The plurality of (two in the present embodiment) second branching bars 87 sandwich the workpiece 3 held by the transport unit 50 and are disposed on the opposite side of the first breaking lever 86. Each of the second breaking bars 87 extends in a direction (Z-axis direction) parallel to the first breaking bars 86.

Here, as shown in FIG. 15, the plurality of second breaking bars 87 in the conveying direction (the direction of the arrow AR1) are disposed only by the desired distance D3. Further, as shown in Fig. 15, the second breaking lever 87, the first breaking lever 86, and the second breaking lever 87 are sequentially oriented in the direction from the delivery position P10 toward the breaking position P20 (Y-axis negative direction). Configuration.

Further, the first breaking lever 86 is on the side of the first main surface 3a opposite to the second main surface 3b on which the scribe line 8 is formed (in this case, the first breaking lever 86 abuts against the slicing plate 5). The underline 8 gives the load.

That is, the load is applied to the scribe line 8 from the first main surface 3a on the opposite side to the second main surface 3b on which the scribe line 8 is formed. Therefore, the breaking of the brittle material substrate 7 along the scribe line 8 can be performed well and surely.

The first advance/retract drive unit 86a applies a driving force to the first breaking lever 86 to advance and retract the first breaking lever 86 in the advancing and retracting direction (arrow AR6 direction: see FIG. 15). For example, the first advance/reverse drive unit 86a moves the first breaking lever 86 in the negative X direction while the extending direction of the first breaking lever 86 is substantially parallel to the scribe line 8, thereby causing the first breaking lever 86. It is close to the first main surface 3a of the brittle material substrate 7.

The second advance/retract drive unit 87a applies a driving force to the plurality of second breaking levers 87 to advance and retract the plurality of second breaking levers 87 in the advancing and retracting direction (arrow AR6 direction: see FIG. 15). For example, the second advance/retract drive unit 87a moves the plurality of second breaking levers 87 in the positive X-axis direction in a state in which the extending direction of the plurality of second breaking levers 87 is substantially parallel to the scribe line 8, thereby making a plurality of the plurality of second breaking levers 87 The second breaking bar 87 is close to the second main surface 3b of the brittle material substrate 7.

When the first breaking lever 86 and the second breaking lever 87 are advanced and retracted by the first and second advancing and retracting driving units 86a and 87a, the brittle material substrate 7 is made up of the first breaking levers 86 and the second points. The broken rod 87 is clamped. As a result, the brittle material substrate 7 in the standing posture is divided along the scribe line 8.

In other words, in the breaking process performed by the substrate breaking device 1, the first breaking bar 86 and the second breaking bar 87 are close to the direction of the brittle material substrate 7 (the advancing and retracting direction (arrow AR6 direction)) and gravity. The direction (Z-axis negative direction) is approximately vertical.

Thus, the influence of gravity on the first breaking lever 86 and the second breaking lever 87 is the same. Therefore, the brittle material substrate 7 can be well separated without taking measures for reducing the influence of gravity for each of the first breaking lever 86 and the second breaking lever 87.

<6. Advantages of the substrate breaking device of the present embodiment>

As described above, in the substrate cutting device 1 of the present embodiment, when the brittle material substrate 7 is held by the transport unit 50 (holding unit), the first breaking lever 86 and the second breaking lever 87 are disposed. The two main faces 3a and 3b of the brittle material substrate 7 are held in a standing posture.

Here, unlike the present embodiment, the first breaking bar and the second breaking bar are disposed above and below the brittle material substrate, and the first breaking bar and the second breaking bar are respectively from the upper side and the lower side of the brittle material substrate. The situation of the side approach is discussed. In this case, the angle between the direction in which the first breaking bar and the second breaking bar are close to the brittle material substrate and the direction of gravity is about 0 (deg) and 180 (deg), respectively. That is, the influence of gravity on the first break lever and the second break lever is different. As a result, when there is no adjustment to the influence of gravity, there arises a problem that the load applied to the brittle material substrate from the first breaking bar and the second breaking bar is different.

Next, in the present embodiment, the first breaking lever 86 and the second breaking lever 87 are approached from the side of the two main faces 3a and 3b of the brittle material substrate 7 held in the standing posture. In this case, the angle between the direction in which the first breaking bar 86 and the second breaking bar 87 are close to the brittle material substrate 7 and the direction of gravity is about 90° (deg).

Thus, the influence of gravity on the first breaking lever 86 and the second breaking lever 87 is the same. Therefore, the brittle material substrate 7 can be well separated without taking measures for reducing the influence of gravity for each of the first breaking lever 86 and the second breaking lever 87.

Further, according to the substrate cutting device 1 and the fixing mechanism 60 of the present embodiment, the outer edge portion 4a of the workpiece 3 is well sandwiched by the movable holding portions 61 (61a to 61c), the fixed holding portion 62, and the pressing portion 71. hold. Therefore, the workpiece 3 in the standing posture can be well fixed.

Further, in the substrate cutting device 1 and the posture changing unit 10 of the present embodiment, the fixing mechanism 60 of the conveying unit 50 performs the fixing of the workpiece 3 and the workpiece 3 by the load given from the pressing portion 35 of the posture changing unit 10. Unfixed. In other words, the transport unit 50 does not need to perform the fixation of the workpiece 3 and the release of the workpiece 3, and it is not necessary to provide a relationship between the moving side (the transport unit 50) and the fixed side (for example, the posture changing unit 10). Piping and wiring. Therefore, by using the posture changing unit 10, it is possible to improve the safety of the transport unit 50 during traveling and the work efficiency of the operator during maintenance.

Further, in the transport system realized by the substrate cutting device 1 of the present embodiment, a plurality of rotary actuators 41 (41a to 41c) are provided from the main body unit 40 and the posture changing unit 10 (fixed side unit) ( The fixing of the workpiece 3 and the fixing of the workpiece 3 are performed by the driving force of the first driving unit and the plurality of pressing cylinders 37 (37a to 37d) (second driving unit).

In other words, the transport unit 50 does not need to drive the drive unit (the first and second drive units) for fixing the workpiece 3 and the fixing of the workpiece 3, and does not need to be on the moving side (transport unit 50) and the fixed side (posture changing unit 10). Piping and wiring related to the element are provided between the main unit 40). Therefore, it is possible to improve the safety of the transport unit 50 during traveling and the work efficiency of the operator during maintenance.

Further, the substrate cutting device 1 of the present embodiment and the holding device realized by the substrate cutting device 1 are not only brought into contact with the outer edge portion 4a of the workpiece 3 by the fixing mechanism 60 of the conveying unit 50, but also by non-contact. The holding unit 80 non-contacts and holds the main surface of the workpiece 3 (more specifically, the first main surface 3a). Therefore, even if the portion of the outer edge portion 4a of the workpiece 3 (for example, the main faces 3a, 3b of the workpiece) cannot be contacted due to the characteristics of the workpiece 3, the conveying unit 50 (holding unit) and the non-transfer unit can be used. The contact holding unit 80 holds the workpiece 3 well.

<7. Modifications>

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

(1) In the present embodiment, the movable guides 67 (67a to 67c) and the guide claws 69 (69a to 69c) are configured independently of each other as shown in Figs. 8 and 9, but the invention is not limited thereto. For example, the movable guide 67 (67a) and the guide claw 69 (69a) may be integrally formed.

(2) Further, in the present embodiment, the transport unit 50 has been described as moving with respect to the posture changing unit 10 and the main unit 40, but the present invention is not limited thereto. For example, the posture changing unit 10 and the main unit 40 may be moved with respect to the transport unit 50.

As described above, the movement mode of each of the units 10, 40, and 50 is such that the transport unit 50 relatively moves with respect to the posture changing unit 10 and the main unit 40 (fixed side unit).

(3) In the present embodiment, the workpiece confirmation sensor 15 (see FIGS. 4 and 5) of the posture changing unit 10 is provided only in the vicinity of the elevation table 21, but the number of the workpiece confirmation sensors 15 is provided. It is not limited to this. A plurality of (two or more) workpiece confirmation sensors 15 may be provided in the vicinity of the elevation table 21.

1. . . Substrate breaking device

3. . . Workpiece

3a. . . First main face

3b. . . Second main face

4. . . Slice ring

4a. . . Outer edge

4b. . . Opening

4c, 60a, 68a. . . gap

5. . . Slice board

7. . . Brittle material substrate

8. . . Cross-line

9. . . Electronic parts

10. . . Posture change unit

11 (11a~11d). . . Support

12 (12a~12d). . . Ball

13 (13a~13d). . . Positioning handle

15. . . Workpiece confirmation sensor

20. . . Intersection

20a. . . Base

twenty one. . . Lifts

21a. . . center

23 (23a~23d). . . Holding claw

25 (25a~25d). . . Adsorption section

26 (26a~26d). . . Arm

27 (27a~27d), 34a. . . front end

28. . . Handover cylinder

28a, 33a. . . Body part

29, 34, 38 (38a ~ 38d), 64. . . link

30. . . Swing part

30a, 30b. . . Bearing

30c, 30d, 36 (36a~36c). . . bracket

31. . . Swing axis

32. . . Swing box

32a~32c. . . Plate body

33. . . Swing cylinder

35. . . Extrusion

35a. . . Installation box

37 (37a~37d). . . Extrusion cylinder

39 (39a~39d). . . Roll

40. . . Body unit

41 (41a~41c). . . Rotary actuator

42 (42a~42c). . . Rod

43, 44. . . guide

50. . . Transport unit

51. . . Fixed table

51a. . . Through hole

51b. . . positive

52. . . Rotary table

55. . . Guide block

56. . . motor

56a. . . Rotary axis

57. . . Belt

58. . . Motor pulley

59. . . Tension adjustment pulley

60. . . Fixing mechanism

60b. . . Step surface

60d. . . Opposite face

61, 62. . . Grip

61a~61c. . . Movable clamping

63. . . Abutment

64. . . Rotary plate

64a, 65a, 65b. . . Rotary axis

64b. . . Fixed side reinforcement

66, 73 (73a ~ 73d). . . Pressing member

66a. . . Pressing one end of the member

66b. . . Pressing the other end of the member

67 (67a~67c). . . Movable guide

68. . . Fixed guide

68b. . . Side end of fixed guide

69 (69a~69d). . . Guide claw

71. . . Extrusion

72. . . Squeeze box

75 (75a~75d). . . gap

80. . . Non-contact holding unit

81. . . Mounting table

81a. . . Insertion hole

81b. . . Insertion hole

83. . . First attraction

84. . . Second attraction

85. . . Breaking unit

86. . . 1st break

86a. . . First forward and backward drive unit

87. . . 2nd break

87a. . . 2nd advance and retreat drive unit

90. . . control unit

91. . . ROM

91a. . . Program

92. . . RAM

93. . . CPU

D1, D2. . . Interval (1st and 2nd intervals)

P10. . . Handover location

P11. . . Release position

P12. . . Fixed position

P20. . . Breaking position

AR1, AR2, AR3, AR4, AR5, AR6, R1. . . arrow

D3. . . Expected distance

Fig. 1 is a front elevational view showing an example of a configuration of a substrate cutting device according to an embodiment of the present invention.

Fig. 2 is a rear elevational view showing an example of a configuration of a substrate cutting device according to an embodiment of the present invention.

Fig. 3 is a front elevational view showing an example of the configuration of a workpiece.

Fig. 4 is a side view showing an example of the configuration of the posture changing unit.

Fig. 5 is a plan view showing an example of a configuration of a posture changing unit.

Fig. 6 is a front elevational view showing an example of a configuration of a transport unit.

Fig. 7 is a rear view showing an example of a configuration of a transport unit.

Fig. 8 is a front elevational view showing an example of a configuration of a movable grip portion.

Fig. 9 is a cross-sectional view showing the vicinity of the guide claw viewed from the line V-V of Fig. 8.

Fig. 10 is a cross-sectional view showing the vicinity of the guide claws as seen from the W-W line of Fig. 7.

Fig. 11 is a view for explaining a fixing step of the fixing mechanism to the workpiece and a rear view of the fixing releasing step.

Figure 12 is a rear view showing the fixing step and the fixing releasing step of the fixing mechanism to the workpiece.

Fig. 13 is a view for explaining a fixing step of the fixing mechanism to the workpiece and a rear view of the fixing releasing step.

Fig. 14 is a front elevational view showing an example of the configuration of the non-contact holding unit.

Fig. 15 is a plan view showing an example of the configuration of the breaking unit.

5. . . Slice board

7. . . Brittle material substrate

8. . . Cross-line

81. . . Mounting table

81a. . . Insertion hole

81b. . . Insertion hole

83. . . First attraction

85. . . Breaking unit

86. . . 1st break

86a. . . First forward and backward drive unit

87. . . 2nd break

87a. . . 2nd advance and retreat drive unit

AR1, AR6. . . arrow

D3. . . Expected distance

Claims (4)

A substrate breaking device characterized in that a substrate for forming a slashed brittle material is formed along the scribe line, and comprises: (a) a holding unit that holds the brittle material in an upright posture a substrate; and (b) a breaking unit that divides the brittle material substrate held by the holding unit along the scribe line; and the holding unit has a rotating table that holds the brittle material by contact The brittle material substrate is rotatably held in the vertical plane in the standing posture at the outer edge portion of the substrate, and the holding unit is configured to freely transport the brittle material substrate in the standing posture in the horizontal direction. The breaking unit includes: (b-1) a first breaking bar disposed opposite to the holding unit and extending in a vertical direction; and (b-2) a second breaking bar, Provided on the opposite side of the first breaking rod via the brittle material substrate held by the holding unit, and extending in a direction parallel to the first breaking rod; a state in which the extending direction of the broken rod and the second breaking rod is substantially parallel to the scribing line The first breaking bar and the second breaking bar are respectively close to the first main surface and the second main surface of the brittle material substrate, and the brittle material substrate is the first breaking bar and the first breaking bar The brittle material substrate is placed along the scribe line in the standing position. The substrate breaking device of claim 1, wherein the first breaking bar and the second The direction in which the breaking rod is close to the substrate of the brittle material is substantially perpendicular to the direction of gravity. The substrate breaking device according to claim 1 or 2, wherein the first breaking bar is along the first main surface side opposite to the second main surface on which the scribe line is formed along the row The line gives the load. The substrate breaking device of claim 1 or 2, wherein the holding unit performs a transfer position of the brittle material substrate and a breaking position of the breaking of the brittle material substrate by the breaking unit The brittle material substrate in the standing posture is transferred.