TWI465407B - Locking mechanism, locking method of a work and cancelation method of the locking of the work - Google Patents

Description

Fixing mechanism, fixing method of workpiece and method for releasing workpiece

The present invention relates to a fixing mechanism for fixing a flat workpiece in a standing posture, a fixing method of the fixing mechanism to the workpiece, and a method for releasing the workpiece.

Heretofore, there is known a substrate breaking device which fixes a mother substrate on which a scribe line is formed in a horizontal state, and breaks the mother substrate along a scribe line by a breaking unit respectively disposed above and below the mother substrate (for example, Patent Document 1).

Advanced technical literature Patent literature

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-289625

As described above, in Patent Document 1, only the technique of fixing the flat workpiece in a horizontal state is described, and there is no description about the technique of fixing the workpiece in the standing posture. As a result, when only the fixing technique of the workpiece described in Patent Document 1 is applied, there is a problem that the workpiece in the standing posture cannot be satisfactorily fixed.

Accordingly, an object of the present invention is to provide a fixing mechanism for fixing a flat workpiece in a standing posture, a method of fixing the workpiece to the workpiece, and a method for releasing the workpiece.

In order to solve the above problems, the invention of claim 1 is a fixing mechanism characterized by fixing a flat workpiece in an upright posture, and comprising: a pressing portion that presses an outer edge portion of the workpiece; a plurality of clamping portions each sandwiching the outer edge portion of the workpiece disposed between the pressing portion; the pressing portion comprising: an annular pressing frame; and a pressing member by The pressing frame is biased to fix the outer edge portion of the workpiece between the pressing frame and each of the clamping portions; and each of the plurality of clamping portions is provided along the pressing frame.

Further, the invention of claim 2 is the fixing mechanism of the first aspect, wherein one of the plurality of clamping portions is a movable clamping portion that advances and retreats in a direction approaching or departing from the pressing frame.

Further, the invention of claim 3 is the fixing mechanism of the second aspect, wherein the remaining of the plurality of clamping portions is a fixed clamping portion fixed to the vicinity of the pressing frame.

The fixing mechanism according to any one of claims 1 to 3, wherein the workpiece comprises: an annular body having an opening formed in a center of the flat plate; and a sheet body covering the annular body The opening is mounted; and the brittle material substrate is attached to the sheet body so as to be located on the opening.

Further, the invention of claim 5 is a method for fixing a workpiece, characterized in that it is a method of fixing a flat workpiece to a fixing mechanism, and the fixing mechanism includes: a pressing portion that presses an outer edge portion of the workpiece; And a plurality of clamping portions each sandwiching the outer edge portion of the workpiece disposed between the pressing portion; the pressing portion comprising: an annular pressing frame; and a pressing member by Applying a pressure to the pressing frame to fix the outer edge portion of the workpiece between the pressing frame and each clamping portion; the plurality of clamping portions include: a movable clamping portion that is opposite to the extrusion And the fixed clamping portion is fixed to the vicinity of the pressing frame; each of the plurality of clamping portions is disposed along the pressing frame; and the fixing method of the workpiece includes The steps of: a) causing the workpiece to stand up and move to the vicinity of the fixing mechanism; b) moving each movable clamping portion in a direction away from the pressing frame; c) causing the pressing frame to be oriented Pressing member to the above extrusion The pressing direction of the frame is moved in the opposite direction; d) the outer edge portion of the workpiece is abutted against the fixed clamping portion by relatively moving the fixed clamping portion relative to the workpiece; e) After performing the above step d), moving the movable clamping portions in a direction close to the pressing frame, thereby abutting the outer edge portion of the workpiece against each movable clamping portion; and f) performing the above After the step e), the pressing frame is moved in the pressing direction, whereby the workpiece in the standing posture is fixed by the fixing mechanism.

Further, the invention of claim 6 is a method for releasing the workpiece, which is characterized in that the fixing member of the flat-shaped workpiece fixed to the fixing mechanism is released; the fixing mechanism includes: a pressing portion that presses the workpiece An outer edge portion; and a plurality of clamping portions each sandwiching the outer edge portion of the workpiece disposed between the pressing portion; the pressing portion comprising: an annular pressing frame; and pressing a member that fixes the outer edge portion of the workpiece between the pressing frame and each of the clamping portions by applying a pressing force to the pressing frame; the plurality of clamping portions include: a movable clamping portion Advancing and retreating in a direction approaching or departing from the extrusion frame; and fixing the clamping portion fixed to the vicinity of the extrusion frame; and the method for releasing the workpiece includes the following steps: a) above the workpiece When the edge portion abuts against the plurality of movable clamping portions and the fixed clamping portion, the pressing frame is moved in a direction opposite to a pressing direction in which the pressing member presses the pressing frame. And will be by the above The fixing mechanism releases the fixing of the workpiece; b) in a state where the outer edge portion of the workpiece abuts against the fixed clamping portion, after performing the step a), the movable clamping portions are pressed from the extrusion Moving in a direction in which the frame is moved; c) moving the outer edge portion of the workpiece away from the fixed clamping portion by relatively moving the fixed clamping portion relative to the workpiece; and d) causing the workpiece to be The fixing mechanism left.

According to the invention of any one of claims 1 to 4, the outer edge portion of the workpiece can be favorably sandwiched by the plurality of nip portions and the pressing portion. Therefore, the workpiece in the standing posture can be fixed well.

In particular, according to the invention of claim 2, by moving the movable nip portion close to and away from the pressing frame, it is possible to easily switch the operation of the workpiece in the standing posture to the nipable state, and to raise the movable nip portion. The workpiece held by the posture is an operation of the clamp release state.

Particularly according to the invention of claim 3, the fixed clamping portion is fixed in the vicinity of the pressing frame. Thereby, the positioning of the workpiece relative to the fixing mechanism can be easily performed with reference to the position of the fixed nip. Therefore, the fixing and releasing of the workpiece can be satisfactorily performed by using the fixed nip portion and the movable nip portion.

Particularly, according to the invention of claim 4, the brittle material substrate is attached to the sheet body. Therefore, even if the workpiece is in the standing posture, the brittle material substrate can be reliably fixed.

In particular, according to the inventions of claims 5 and 6, the operation of fixing the workpiece in the standing posture by the fixing mechanism and the operation of releasing the fixing of the workpiece fixed by the fixing mechanism can be satisfactorily performed.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<1. Overall composition>

1 and 2 are a front view and a rear view, respectively, showing an example of the configuration of the substrate cutting device 1 in the embodiment of the present invention. Fig. 3 is a front view showing an example of the configuration of the workpiece 3. The substrate cutting device 1 is a device that breaks (cuts) the brittle material substrate 7 (see FIG. 3) on which the scribe lines 8 are formed along the scribe line 8.

As shown in FIGS. 1 and 2, the substrate cutting device 1 mainly includes a change posture unit 10, a main body unit 40, a transfer unit 50, a non-contact holding unit 80, a breaking unit 85, and a control unit 90.

In addition, in each of FIG. 1 and subsequent figures, in order to clarify the direction relationship of these parts, an XYZ orthogonal coordinate system in which the Z-axis direction is the vertical direction and the XY plane is the horizontal plane is appropriately labeled as needed.

The transformation posture unit 10 converts the posture of the flat workpiece 3 between the horizontal posture and the standing posture, and delivers the workpiece 3 in the standing posture to the transport unit 50. Further, the transformation posture unit 10 is fixed with respect to the main body unit 40.

Here, as shown in FIG. 3, the workpiece 3 fixed to the transport unit 50 and subjected to the breaking process by the breaking unit 85 mainly includes the dicing ring 4, the dicing sheet 5, and the brittle material substrate 7.

The cutting ring 4 (annular body) is a flat plate formed of a metal such as stainless steel. As shown in FIGS. 1 and 2, the workpiece 3 is fixed to the fixing mechanism 60 by being sandwiched by the fixing mechanism 60 by the outer edge portion 4a of the cutting ring 4.

Further, as shown in FIG. 3, an opening 4b is formed in the vicinity of the center of the cutting ring 4. Further, a notch 4c is provided in the outer edge portion 4a of the dicing ring 4. The rotation angle of the workpiece 3 is detected by detecting the position of the notch 4c.

The dicing sheet 5 (sheet body) is mounted relative to the dicing ring 4 in such a manner as to cover the opening 4b of the dicing ring 4. Further, the brittle material substrate 7 is attached to the dicing sheet 5 so as to be positioned on the opening 4b. Therefore, even if the workpiece 3 is in the standing posture, the brittle material substrate 7 can be reliably fixed. Here, in the present embodiment, as the dicing sheet 5, for example, an adhesive sheet made of resin may be used.

The brittle material substrate 7 is a substrate made of a brittle material such as a glass substrate or a ceramic substrate. As shown in FIG. 3, a plurality of scribe lines 8 and a plurality of electronic components 9 are formed on the brittle material substrate 7.

The scribe line 8 is a cut line (longitudinal grain) formed on the surface of the brittle material substrate 7. Here, the scribe line 8 is formed by, for example, pressing a scribing wheel (not shown) made of sintered diamond on the surface of the brittle material substrate 7 and rotating it. Further, stress is applied to the brittle material substrate 7 on which the plurality of scribe lines 8 are formed, and the brittle material substrate 7 is divided along the scribe lines 8, thereby obtaining a plurality of electronic components 9 (for example, a plurality of liquid crystal display devices).

Further, in the present embodiment, the surface of the main surfaces 3a and 3b of the workpiece 3 (and the dicing ring 4, the dicing sheet 5, and the brittle material substrate 7) where the scribe line 8 is not formed is referred to as a first main surface 3a, and The surface on which the scribe line 8 is formed is referred to as a second main surface 3b.

As shown in FIGS. 1 and 2, the main body unit 40 is used as a fixed unit for changing the posture unit 10, the non-contact holding unit 80, the breaking unit 85, and the like, and a plurality of rotary actuators 41 (41a to 41c). unit.

Here, each of the rotary actuators 41 (41a to 41c) rotates a shaft (rotation shaft, not shown) in accordance with the supply state of the compressed air. Thereby, the rocker 42 (42a to 42c) attached to the shaft swings and abuts against the abutting portion 63 (see FIG. 8) of the corresponding sandwiching portion 61 (61a to 61c). In addition, the hard structure of the clamping portion 61 (61a to 61c) is explained below.

The transport unit 50 is provided to be able to travel along the pair of guides 43, 44 fixed to one of the main body units 40. The conveyance unit 50 holds the flat workpiece 3 in the standing posture, and moves the workpiece 3 with respect to the transformation posture unit 10 and the main body unit 40. Here, the holding unit 50 may transfer the workpiece by 3 than the edge portion 4 _a contact holder is realized.

In this way, the transport unit 50 not only transports the workpiece 3 (transport function), but also holds the flat workpiece 3 in a standing posture by holding and holding the outer edge portion 4a of the workpiece 3 including the brittle material substrate 7. Fixed (hold function). That is, the transport unit 50 can also be used as a "holding unit".

Further, in the present embodiment, when the workpiece 3 is transported, the transport unit 50 moves, but the change posture unit 10 and the main unit 40 are stationary. Therefore, in the present embodiment, the transformation posture unit 10 and the main body unit 40 may be collectively referred to as a "fixed side unit".

As shown in FIG. 2, the non-contact holding unit 80 is disposed opposite to the transport unit 50 located at the breaking position P20, and performs non-contact holding of the workpiece 3 which is held by the fixing mechanism 60 of the transport unit 50 and holds the outer edge portion 4a. .

In this manner, the transport unit 50 (holding unit) that performs "contact holding" on the outer edge portion 4a of the flat workpiece 3 in the standing posture and the "non-contact holding" of the first main surface 3a of the workpiece 3 are not The contact holding unit 80 constitutes a holding device.

The breaking unit 85 divides the brittle material substrate 7 of the workpiece 3 held by the conveying unit 50 along the scribe line 8. Here, the breaking unit 85 applies stress to the brittle material substrate 7, and causes the vertical crack to grow from the main surface of the brittle material substrate 7 on which the scribe line 8 is formed to the main surface on the opposite side, thereby dividing the brittle material substrate 7 Broken.

The control unit 90 controls the operations of the elements included in the transformation posture unit 10, the main body unit 40, the transport unit 50, the non-contact holding unit 80, and the disconnect unit 85, and realizes data calculation. As shown in FIGS. 1 and 2, the control unit 90 mainly includes a ROM 91, a RAM 92, and a CPU 93.

A ROM (Read Only Memory) 91 is a so-called non-volatile memory unit, and for example, a program 91a is stored. Further, as the ROM 91, a non-volatile memory which is freely readable and writable, that is, a flash memory can also be used. A RAM (Random Access Memory) 92 is a volatile memory unit, for example, stores data for calculation by the CPU 93.

The CPU (Central Processing Unit) 93 performs control in accordance with the program 91a of the ROM 91 at a specific time (for example, a plurality of rotary actuators 41 (41a to 41c) and a plurality of cylinders 37 (37a to 37d) for extrusion. ) drive control, etc.).

In addition, the detailed hardware configuration of the transformation posture unit 10, the conveyance unit 50, the non-contact holding unit 80, and the breaking unit 85 is explained below.

<2. Composition of the transformation posture unit>

4 and 5 are a side view and a plan view showing an example of the configuration of the transformation posture unit 10, respectively. Here, as described above, the transformation posture unit 10 performs an operation of changing the posture of the workpiece 3 and an operation of transferring the workpiece 3 to the transport unit 50.

As shown in FIGS. 4 and 5, the change posture unit 10 mainly includes a plurality of support portions 11 (11a to 11d), a plurality of positioning handles 13 (13a to 13d), a delivery portion 20, a swing portion 30, and a pressing portion 35.

A plurality of (four in the present embodiment) support units 11 (11a to 11d) support the transfer of the workpiece 3 to the transformation posture unit 10. As shown in FIGS. 4 and 5, each of the support portions 11 (11a to 11d) is fixed to a position at which the outer edge portion 4a of the cutting ring 4 of the workpiece 3 can be supported, and does not interfere with the lifting table 21 of the interface portion 20. position.

Further, as shown in FIGS. 4 and 5, each of the support portions 11 (11a to 11d) has balls 12 (12a to 12d) which are provided to be freely rotatable at the tip end thereof. Thereby, each of the balls 12 (12a to 12d) can support the workpiece 3 and rotate. Therefore, the position of the workpiece 3 supported by each of the support portions 11 (11a to 11d) can be easily and flexibly converted.

Here, the workpiece 3 supported by the plurality of support portions 11 (11a to 11d) may be transferred to the conversion posture unit 10 from, for example, a transport robot (not shown). Further, the worker of the substrate cutting device 1 (hereinafter simply referred to as "worker") may mount the workpiece 3 on the plurality of support portions 11.

As shown in FIGS. 4 and 5, a plurality of (four in the present embodiment) positioning handles 13 (13a to 13d) are provided adjacent to the corresponding grip claws 23 (23a to 23d). Each of the positioning handles 13 (13a to 13d) advances and retreats along the longitudinal direction of the corresponding arm 26 (26a to 26d) by a moving mechanism (not shown) provided on the base portion 20a. Thereby, each of the positioning handles 13 (13a to 13d) causes the workpiece 3 (more specifically, the cutting piece 5) so that the position of the workpiece 3 supported by each of the support portions 11 (11a to 11d) is within a desired range. The outer edge portion 4a is pressed in the direction toward the center 21a of the elevating table 21.

The workpiece confirmation sensor 15 detects whether the workpiece 3 is supported by the plurality of support portions 11. As shown in FIG. 5, the workpiece confirmation sensor 15 is fixed to a position adjacent to the support portion 11b and not interfering with the elevation table 21 of the delivery portion 20. As the workpiece confirmation sensor 15, for example, a proximity sensor that detects the presence or absence of the workpiece 3 by non-contact may be used.

The interface 20 holds the workpiece 3 in a horizontal posture and supported by a plurality of support portions 11. Further, the delivery unit 20 transfers the workpiece 3 in a standing posture by the swing portion 30 between the delivery unit 50 and the transport unit 50. As shown in FIGS. 4 and 5, the delivery unit 20 mainly includes an elevation table 21, a plurality of grip claws 23 (23a to 23d), a plurality of adsorption portions 25 (25a to 25d), and a delivery cylinder 28.

As shown in Fig. 5, the elevating table 21 has a plurality of (four in the present embodiment) arms 26 (26a to 26d) extending radially outward from the center 21a. The lifting table 21 prevents deformation of the workpiece 3 held by the grip claws 23 and the suction portion 25.

A plurality of (four in the present embodiment) gripping claws 23 (23a to 23d) (a plurality of gripping portions) are held between the horizontal posture and the standing posture to change the posture of the workpiece 3 (more specifically, the cutting ring 4) The outer edge portion 4a. As shown in FIGS. 4 and 5, each of the grip claws 23 (23a to 23d) is provided in the vicinity of the front end 27 (27a to 27d) of the corresponding arm 26 (26a to 26d).

Here, as shown in FIG. 4, the vicinity of the upper end of each of the positioning handles 13 (13a to 13d) (for convenience of illustration, only the vicinity of the upper end of the positioning handle 13b) is branched. Therefore, even if the positioning handles 13 (13a to 13d) advance and retreat for positioning the workpiece 3, the positioning handles 13 (13a to 13d) do not correspond to the corresponding gripping claws 23 (23a to 23d) and the suction portion 25 (25a). ~25d) forms interference.

Further, when each of the positioning handles 13 (13a to 13d) is positioned such that the position of the workpiece 3 is within a desired range, the workpiece 3 is surrounded by the respective grip claws 23 (23a to 23d).

A plurality of (four in the present embodiment) adsorption portions 25 (25a to 25d) are provided corresponding to the respective grip claws 23 (23a to 23d), and the outer edge of the workpiece 3 (more specifically, the cutting ring 4) is adsorbed. Part 4a.

Therefore, after the plurality of positioning handles 13 (13a to 13d) are positioned, the workpiece 3 is sucked by the plurality of adsorption portions 25 (25a to 25d), thereby transferring the workpieces 3 supported by the plurality of support portions 11 (11a to 11d). The delivery unit 20 is provided.

In this manner, each of the grip claws 23 (23a to 23d) and each of the adsorption portions 25 (25a to 25d) grip and suck the cutting ring 4. That is, the brittle material substrate 7 is not held or adsorbed by the respective grip claws 23 (23a to 23d) and the respective adsorption portions 25 (25a to 25d). Therefore, the delivery unit 20 and the swing unit 30 can perform the holding and changing posture of the workpiece 3 without affecting the scribe line 8 (see FIG. 3) formed on the brittle material substrate 7.

When the transfer cylinder 28 delivers the workpiece 3 in the standing position between the delivery unit 20 and the transport unit 50, the workpiece 3 is moved between the delivery unit 20 and the transport unit 50. As shown in FIG. 4, the delivery cylinder 28 includes a main body portion 28a and a tie rod 29.

The pull rod 29 is provided to be able to advance and retreat with respect to the main body portion 28a. As shown in FIG. 4, the front end of the tie rod 29 is fixed to the bottom surface of the lift table 21. Therefore, the workpiece 3 fixed in the upright position on the elevating table 21 moves between the delivery unit 20 and the transport unit 50 in response to the advance or retreat operation of the tie rod 29.

The swinging portion 30 swings the transfer portion 20 around the swing axis 31, thereby changing the posture of the workpiece 3 held by the delivery portion 20 between the horizontal posture and the standing posture. As shown in FIGS. 4 and 5, the swing portion 30 mainly includes a swing shaft 31, a swing frame 32, and a swing cylinder 33.

The swing shaft 31 serves as a central axis that swings the joint portion 20 with respect to the base portion 20a. As shown in Fig. 5, the swing shaft 31 is rotatably supported by the bearings 30a, 30b (shaft support). Further, the bearings 30a, 30b are respectively fixed to the corresponding brackets 30c, 30d.

The swing frame 32 is a frame formed of a plurality of (three in the present embodiment) plate bodies 32a to 32c. As shown in Fig. 5, a swing shaft 31 is fixed between the plates 32a and 32c. On the other hand, the delivery cylinder 28 of the delivery unit 20 is fixed to the plate body 32b.

The swing cylinder 33 is a drive unit that swings the delivery unit 20. As shown in FIG. 4, the swing cylinder 33 mainly includes a main body portion 33a and a tie rod 34.

The pull rod 34 is provided to be able to advance and retreat with respect to the main body portion 33a. As shown in FIGS. 4 and 5, the main body portion 33a is fixed to the base portion 20a of the delivery portion 20, and the front end 34a of the tie rod 34 is fixed to the plate body 32a of the swing frame 32.

Therefore, when the tie rod 34 advances from the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the horizontally-verted posture to the standing posture. On the other hand, when the tie rod 34 retreats to the main body portion 33a, the posture of the workpiece 3 held by the grip claws 23 and the suction portion 25 is changed from the upright position to the horizontal posture.

The pressing portion 35 adjusts the load applied to the workpiece 3 by the fixing mechanism 60 of the conveying unit 50. Thereby, the fixing mechanism 60 performs an operation of fixing the workpiece 3 that has been transferred from the delivery unit 20 to the transport unit 50, and an operation of releasing the fixed state of the workpiece 3.

As shown in FIGS. 4 and 5, the pressing portion 35 mainly includes a mounting frame 35a, a plurality of brackets 36 (36a to 36d), and a plurality of pressing cylinders 37 (37a to 37d).

The mounting frame 35a and the plurality of brackets 36 (36a to 36d) are for fixing the plurality of pressing cylinders 37 (37a to 37d) to the conversion posture unit 10. As shown in FIGS. 2 and 4, the mounting frame 35a is formed in a frame shape and fixed to the base portion 20a. Further, as shown in FIG. 2, a plurality of (four in the present embodiment) brackets 36 (36a to 36d) extend from the vertical plate of the mounting frame 35a along the transport direction of the transport unit 50 (arrow AR1 direction). The mounting plate.

The plurality of pressing cylinders 37 (37a to 37d) respectively compress the corresponding pressing members 73 (73a to 73d, see Fig. 7). As shown in FIGS. 4 and 5, each of the pressing cylinders 37 (37a to 37d) mainly includes a plurality of tie rods 38 (38a to 38d) and a plurality of rollers 39 (39a to 39d).

A plurality of (four in the present embodiment) tie rods 38 (38a to 38d) are respectively provided to be able to advance and retreat in the direction of the arrow AR2. Further, corresponding rollers 39 (39a to 39d) are attached to the front ends of the respective tie rods 38 (38a to 38d).

Therefore, when the respective tie rods 38 (38a to 38d) advance, the corresponding rollers 39 (39a to 39d) abut against the respective pressing members 73 (73a to 73d, see Fig. 7), whereby the pressing members 73 ( 73a~73d) is compressed.

On the other hand, when the respective tie rods 38 (38a to 38d) are retracted, the corresponding rollers 39 (39a to 39d) are separated from the respective pressing members 73 (73a to 73d, see Fig. 7). Thereby, the compression state of each of the pressing members 73 (73a to 73d) is released.

A plurality of (four in the present embodiment) rolls 39 (39a to 39d) are rotating bodies provided at the tips of the corresponding tie rods 38 (38a to 38d). As shown in Fig. 5, each of the rollers 39 (39a to 39d) is provided to be rotatable about a rotation axis extending in the vertical direction (a direction substantially parallel to the Z-axis and substantially perpendicular to the direction of the arrow AR1).

Therefore, when the respective rollers 39 (39a to 39d) are in contact with the corresponding pressing members 73 (73a to 73d), when the conveying unit 50 moves in the conveying direction (arrow AR1 direction), each roller 39 (39a~) 39d) Acts as follows. In other words, each of the rollers 39 rotates in the transport direction on the corresponding pressing members 73 (73a to 73d) while compressing the corresponding pressing members 73 (73a to 73d). Therefore, the transport unit 50 can maintain the compressed state of each of the rollers 39 (39a to 39d) and move in the transport direction. As a result, even when the transport unit 50 moves relative to the change posture unit 10 and the main unit 40 (fixed side unit), the workpiece 3 can be maintained in a released state.

<3. Composition of the transport unit>

6 and 7 are a front view and a rear view showing an example of the configuration of the transport unit 50. Fig. 8 is a front view showing an example of the configuration of the movable holding portions 61 (61a to 61c). Fig. 9 is a cross-sectional view showing the vicinity of the guide claw 69 (69a) as seen from the line V-V of Fig. 8. Fig. 10 is a cross-sectional view showing the vicinity of the guide claw 69 (69d) as viewed from the W-W line of Fig. 7.

Here, the transport unit 50 is in contact with the outer edge portion 4a of the holding workpiece 3, and is transported between the transfer position P10 at which the transfer of the workpiece 3 is performed and the break position P20 at which the breaking of the brittle material substrate 7 is performed by the breaking unit 85. The workpiece 3 of the posture.

Thereby, the installation area of the conveyance unit 50 including the conveyance path (that is, the size of the movement area of the conveyance unit 50) can be suppressed. Therefore, the size of the substrate breaking device 1 can be reduced.

As shown in FIGS. 6 and 7, the transport unit 50 mainly includes a fixed base 51 and a rotary table 52. Here, the transport unit 50 of the present embodiment is provided to be movable with respect to the transformation posture unit 10, the main body unit 40, the non-contact holding unit 80, and the like by, for example, a linear motor (not shown).

The turntable 52 is a disk-shaped rotating portion that rotates relative to the fixed table 51. As shown in FIGS. 6 and 7, the turntable 52 is rotatably fitted into the circular through hole 51a formed in the fixed table 51. Further, the rotary table 52 has a fixing mechanism 60 that fixes the workpiece 3. Additionally, the configuration of the securing mechanism 60 is set forth below.

The fixing table 51 serves as a mounting portion for mounting, for example, a rotating element for rotating the turntable 52 and a traveling element for moving the fixed table 51 and the turntable 52 with respect to the main unit 40. As shown in FIGS. 6 and 7, the fixed table 51 mainly includes a guide block 55, a motor 56, and a belt 57.

As shown in FIG. 6, a plurality of (six in the present embodiment) guide blocks 55 are provided on the front surface 51b of the fixed table 51. Further, a plurality of balls (not shown) are provided inside the respective guide blocks 55 so as to be rotatable. Further, when the respective guide blocks 55 are attached to the corresponding guides 43, 44, the balls (not shown) in the respective guide blocks 55 are in contact with the corresponding guides 43, 44 in a rotatable state.

Thereby, when each of the guide blocks 55 moves along the corresponding guides 43 and 44 (that is, along the transport direction (arrow AR1 direction)), the balls (not shown) in the respective guide blocks 55 are in the corresponding guides 43. , 44 on the rotation. Therefore, the fixing table 51 can smoothly travel along the guides 43, 44.

The motor 56 is a drive unit that applies a rotational force to the turntable 52. The belt 57 transmits the rotational force imparted by the motor 56 to the rotary table 52. As shown in FIG. 6, the belt 57 is wound around the turntable 52 and the motor pulley 58 attached to the front end of the rotating shaft 56a of the motor 56. Thereby, when the motor 56 rotates, the workpiece 3 fixed to the fixing mechanism 60 rotates.

The tension adjusting pulley 59 adjusts the tension applied to the belt 57. In the present embodiment, the position of the tension adjusting pulley 59 (for example, the position in the Z-axis direction) is adjusted by a positioning mechanism (not shown). Thereby, the slack of the belt 57 can be easily eliminated, and the tension of the belt 57 can be easily adjusted. Therefore, the rotation state of the rotary table 52 can be favorably maintained.

<3.1. Composition of the fixing mechanism>

The fixing mechanism 60 fixes the flat workpiece 3 in the standing posture. As shown in FIGS. 6 and 7, the fixing mechanism 60 mainly includes a plurality of clamping portions 61 (61a to 61c), 62, and a plurality of pressing portions 71.

The plurality of holding portions 61 (61a to 61c) and 62 are placed between the outer edge portions 4a of the workpiece 3 disposed between the pressing portions 71. As shown in FIG. 7, a plurality of clamping portions 61 (61a to 61c) and 62 are provided along the pressing frame 72, respectively.

In the following description, the nip portion denoted by reference numeral 61 (61a to 61c) is referred to as a "movable nip portion", and the nip portion denoted by reference numeral 62 is referred to as a "fixed nip portion".

That is, the plurality of gripping portions include a plurality of movable grip portions 61 (61a to 61c) and a fixed grip portion 62. In other words, one of the plurality of gripping portions is a plurality of movable gripping portions 61 (61a to 61c), and the remaining one of the plurality of gripping portions is the fixed gripping portion 62.

A plurality of (three in the present embodiment) movable grip portions 61 (61a to 61c) advance and retreat in a direction approaching or departing from the pressing frame 72, respectively. As shown in FIGS. 7 and 8, each of the movable holding portions 61 (61a to 61c) mainly includes an abutting portion 63, a rotating plate 64, a pressing member 66, a movable guide 67 (67a to 67c), and a guiding claw 69. (69a~69c).

Here, the movable holding portions 61a to 61c have the same hard body configuration. Therefore, only the hardware configuration of the movable grip portion 61a will be described below.

The abutting portion 63 is formed of, for example, a metal-shaped spherical body and is attached to the rotating plate 64. The rotating plate 64 is a plate body that rotates around the rotating shaft 64a. For example, the rocker 42 (42a) of the rotary actuator 41 (41a) swings (see FIGS. 1 and 2), and the rocker 42 (42a) abuts against the abutment portion 63 of the corresponding clamping portion 61 (61a). At this time, the rotating plate 64 is rotated in the direction of the arrow R1 around the rotating shaft 64a.

The link 65 is a plate body that connects the rotating plate 64 and the movable guide 67 (67a) to have a narrow width. One end of the link 65 is coupled to the rotating plate 64 by the rotating shaft 65a, and the other end of the link 65 is coupled to the movable guide 67 (67a) by the rotating shaft 65b.

The pressing member 66 is formed of an elastic member such as a spring. As shown in Fig. 8, one end 66a of the pressing member 66 is fixed to the movable side rotating plate 64, and the other end 66b of the pressing member 66 is fixed to the reinforcing side reinforcing plate 64b. Thereby, when the rotating plate 64 rotates in the direction of the arrow R1, the pressing member 66 presses the rotating plate 64 in the direction opposite to the direction of the arrow R1.

The movable guide 67 (67a) is a flat movable member. The movable guide 67 advances and retreats in a direction approaching or departing from the pressing frame 72, thereby adjusting the fixed state of the workpiece 3.

That is, when the rocker 42 (42a) is swung by the rotary actuator 41 (41a) and the rotary plate 64 is rotated in the direction of the arrow R1, the movable guide 67 (67a) moves in the direction away from the press frame 72. Thereby, the movable guide 67 (67a) is in the clamp release state.

On the other hand, when the rocker 42 (42a) is returned to the position before the swing by the rotary actuator 41 (41a), since the pressing member 64 of the pressing member 66 rotates in the direction opposite to the direction of the arrow R1, The movable guide 67 (67a) moves in a direction close to the pressing frame 72. Thereby, the movable guide 67 (67a) is in a state in which the workpiece 3 can be held between the movable frame 67 and the pressing frame 72.

In this manner, the plurality of rotary actuators 41 (41a to 41c) provided in the main body unit 40 function as a driving portion (first driving portion), and a part of the plurality of clamping portions 61 (61a to 61c) and 62 (plurality) The movable clamping portions 61a to 61c) advance and retreat in a direction approaching or departing from the pressing frame 72.

As shown in FIG. 8, the notch 60a is formed in a notch on the side of the pressing frame 72 of the movable guide 67. Here, when the workpiece 3 is transferred between the delivery unit 20 of the conversion posture unit 10 and the transport unit 50, the grip claws 23 (23a) can be disposed in a space (for example, the gap 75 (75a)) formed by the notches 60a (refer to Figure 8 and Figure 11 to Figure 13). Therefore, when the workpiece 3 is transferred, the grip claw 23 (23a) can be effectively prevented from interfering with the movable guide 67 (67a).

A plurality of (two in the present embodiment) guide claws 69 (69a) cooperate with the movable guide 67 (67a) and the pressing frame 72 to sandwich the workpiece 3. As shown in Fig. 8, the guide claw 69 (69a) is attached to the movable guide 67 (67a) in a direction away from the outline of the opposing pressing frame 72. Further, as shown in Fig. 9, the guide claw 69 (69a) is attached to the movable body so that the step surface 60b of the guide claw 69 (69a) is located below the lower end surface 60c of the movable guide 67 (67a). On the guide 67 (67a).

Therefore, as shown in FIG. 9, the lower end surface 60c of the movable guide 67 (67a), the step surface 60b of the guiding claw 69 (69a), and the opposing surface 60d of the pressing frame 72 are in contact with the workpiece 3, and The clamping of the workpiece 3 by the movable clamping portion 61 (61a) and the pressing portion 71 is achieved.

As shown in FIG. 7, the fixed clamping portion 62 is fixed near the pressing frame 72. As shown in Fig. 7, the fixed clamping portion 62 mainly includes a fixed guide 68 and a guiding claw 69 (69d).

The fixed guide 68 is a flat fixing member. That is, the fixed guide 68 is different from the movable guide 67 (67a to 67c) in that it does not advance or retreat in a direction approaching or departing from the pressing frame 72, but is fixed to the rotary table 52.

Thereby, the positioning of the workpiece 3 with respect to the fixing mechanism 60 can be easily performed with reference to the position of the fixed nip 62. Therefore, the workpiece 3 can be satisfactorily clamped and released by using the plurality of movable grip portions 61 (61a to 61c) and the fixed grip portion 62.

As shown in FIG. 7, the notch 68a is formed in a notch on the side of the pressing frame 72 of the fixed guide 68. Here, when the workpiece 3 is transferred between the delivery unit 20 of the conversion posture unit 10 and the transport unit 50, the grip claws 23 (23d) can be disposed in a space (for example, the gap 75 (75d)) formed by the notches 68a (refer to Figure 7 and Figure 11 to Figure 13). Therefore, when the workpiece 3 is delivered, the grip claws 23 (23d) can be effectively prevented from interfering with the fixed guides 68.

A plurality of (two in the present embodiment) guiding claws 69 (69d) cooperate with the fixed guide 68 and the pressing frame 72 to sandwich the workpiece 3. As shown in Fig. 7, the guide claws 69 (69d) are mounted on the fixed guide 68 in the direction of the contour of the opposing pressing frame 72. Further, as shown in Fig. 10, the guide claw 69 (69d) is mounted such that the step surface 60b of the guide claw 69 (69d) is located closer to the side of the pressing frame 72 than the side end surface 68b of the fixed guide 68. On the fixed guide 68.

Therefore, as shown in FIG. 9, the fixing clip is realized by the side end surface 68b of the fixed guide 68, the step surface 60b of the guiding claw 69 (69d), and the opposing surface 60d of the pressing frame 72 contacting the workpiece 3. The holding portion 62 and the pressing portion 71 sandwich the workpiece 3.

The pressing portion 71 presses the outer edge portion 4a of the workpiece 3 by sandwiching the workpiece 3 between the movable holding portions 61 (61a to 61c) and the fixed holding portion 62. As shown in Fig. 7, the pressing portion 71 mainly includes a pressing frame 72 and a plurality of pressing members 73 (73a to 73d).

As shown in FIGS. 6 and 7, the pressing frame 72 is formed in a ring shape (more specifically, a rectangular ring shape), and is attached to the vicinity of the center of the turntable 52. As shown in FIGS. 9 and 10, the pressing frame 72 presses the outer edge portion 4a of the workpiece 3 from the second main surface 3b side of the workpiece 3.

A plurality of (four in the present embodiment) pressing members 73 (73a to 73d) are formed of an elastic member such as a spring. As shown in FIG. 7, each of the pressing members 73 (73a to 73d) is coupled to a corresponding one of the four corners of the pressing frame 72.

Here, each of the pressing members 73 (73a to 73d) is received from the front surface of the paper surface of FIG. 7 toward the back side from the corresponding pressing cylinders 37 (37a to 37d) (see FIGS. 4 and 5) (ie, The pressing members 73 (73a to 73d) are compressed by the force in the direction in which the direction of the arrow AR2 is opposite. In other words, the pressing cylinders 37 (37a to 37d) of the pressing portion 35 serve as driving portions (second driving portions) that apply a compressive force to the corresponding pressing members 73 (73a to 73d).

On the other hand, when the tie rods 38 (38a to 38d) are retracted and the rollers 39 (39a to 39d) are separated from the corresponding pressing members 73 (73a to 73d), the pressing members 73 (73a to 73d) are pressed against each other. 72 applies pressure to the direction of the arrow AR2 (pressure direction).

Thereby, the workpiece 3 is sandwiched by the movable nip 61 (61a to 61c) and the fixed nip 62 and the pressing frame 72 by the pressing force from the pressing members 73 (73a to 73d). As a result, the workpiece 3 is fixed to the fixing mechanism 60.

As described above, the fixed state of the workpiece 3 on the fixing mechanism 60 is changed by the pressing cylinders 37 (37a to 37d) (second driving portion) of the switching posture unit 10 and the rotary actuators 41 (41a to 41c) of the main unit 40 ( The first drive unit is adjusted.

In other words, the fixing mechanism 60 of the conveying unit 50, the pressing cylinders 37 (37a to 37d) of the posture changing unit 10, and the rotary actuators 41 (41a to 41c) of the main unit 40 execute the workpiece to be transported. 3 fixed.

Therefore, in the present embodiment, the conversion posture unit 10, the main body unit 40, and the transport unit 50 are also collectively referred to as a "transport system."

<3.2. Fixing method of workpiece>

11 to 13 are views for explaining a step of fixing the workpiece 3 by the fixing mechanism 60 and a step of releasing the fixing step. Here, a description will be given of a step of fixing the workpiece 3 in the standing posture to the fixing mechanism 60.

Further, this fixing step is realized by the control unit 90 controlling the operations of the elements included in the transformation posture unit 10, the main body unit 40, and the transport unit 50.

Then, before the start of the formal fixing step, the transport unit 50 is moved to the release position P11 (see FIG. 2) of the delivery position P10, and the workpiece 3 is sucked and held by each of the adsorption units 25 (25a to 25d).

In the formal fixing step, first, the swing portion 30 is used to move (swing) the delivery portion 20. Thereby, the workpiece 3 held by the delivery unit 20 is in the standing posture, and the workpiece 3 is moved to the vicinity of the fixing mechanism 60 of the transport unit 50.

Next, a plurality of rotary actuators 41 (41a to 41c) (see FIG. 2) provided in the main unit 40 are operated, and the respective rockers 42 (42a to 42c) are swung. Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) are moved in the direction away from the pressing frame 72.

Then, the plurality of pressing cylinders 37 (37a to 37d) are operated, and the respective rods 38 (38a to 38d) are advanced from the cylinder main body. Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding roller 39 (39a to 39d), and the pressing frame 72 is pressed in the direction of pressing with each of the pressing members 73 (73a to 73d) (in the direction of the arrow AR2). Move in the opposite direction.

Then, the transport unit 50 is moved from the release position P11 of the delivery position P10 to the fixed position P12 (see FIGS. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the tips of the respective extrusion cylinders 37 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d), and the pressing members 73 (73a to 73d) rotate. Therefore, the conveying unit 50 moves in the conveying direction in a state where the pressing frame 72 has been separated from the workpiece 3. Then, in a state where the pressing frame 72 is separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b of the fixed guide 68 (Fig. 10).

Then, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the side end surface 68b (FIG. 10) of the fixed guide 68, the rotary actuator 41 (41a to 41c) is operated to correspond to the rocker 42 (42a) ~42c) Return to the position before the swing.

Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) move in the direction close to the pressing frame 72. Therefore, the outer edge portion 4a of the workpiece 3 abuts against each of the movable guides 67 (67a to 67c).

Then, in a state where the outer edge portion 4a of the workpiece 3 abuts against each of the movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, the respective pressing cylinders 37 (37a to 37d) are operated to Each of the tie rods 38 (38a to 38d) is retracted.

Thereby, the compression force applied to the corresponding pressing members 73 (73a to 73d) by the respective pressing cylinders 37 (37a to 37d) is not received, and the pressing frame 72 is moved in the pressing direction of each pressing member 73. Then, as shown in FIGS. 9 and 10, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is narrowed.

Therefore, the workpiece 3 is sandwiched between the movable holding portions 61 (61a to 61c) and the fixed holding portion 62 and the pressing portion 71, and the workpiece 3 in the standing posture is fixed by the fixing mechanism 60. That is, according to the formal fixing step, the workpiece 3 in the standing posture can be satisfactorily fixed to the fixing mechanism 60.

Then, in a state where the workpiece 3 is fixed by the fixing mechanism 60, the adsorption state of each of the adsorption sections 25 (25a to 25d) is released. Thereby, the holding state of the workpiece 3 by the delivery unit 20 is released, and the fixing step of the workpiece 3 is completed.

<3.3. Method of releasing the workpiece>

Here, a step of releasing the fixed state of the workpiece 3 by the workpiece 3 fixed by the fixing mechanism 60 in the standing posture will be described with reference to FIGS. 11 to 13 .

Further, this release step is realized by the control unit 90 controlling the operations of the elements included in the conversion posture unit 10, the main body unit 40, and the transport unit 50, similarly to the fixing step of the workpiece 3.

Then, before the official release step is started, the transport unit 50 is moved to the fixed position P12 of the delivery position P10 (see FIG. 2), and the workpiece 3 is fixed by the fixing mechanism 60.

In the main release step, first, the workpiece 3 fixed by the fixing mechanism 60 is sucked by the respective adsorption portions 25 (25a to 25d). Thereby, the workpiece 3 is held by the delivery portion 20 in a state of being fixed to the fixing mechanism 60.

Next, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, a plurality of cylinders 37 (37a to 37d) for pressing are formed. The 2 drive unit operates so that each of the pull rods 38 (38a to 38d) advances from the cylinder main body.

Thereby, each of the pressing members 73 (73a to 73d) is compressed by the corresponding roller 39 (39a to 39d), and the pressing frame 72 is directed to the pressing direction of each of the pressing members 73 (73a to 73d) (arrow AR2 direction) ) Move in the opposite direction. Further, as shown in FIGS. 9 and 10, the distance between the movable guide 67 (67a to 67c) and the step surface 60b of the fixed guide 68 and the opposing surface 60d of the pressing frame 72 is enlarged. Therefore, the fixing mechanism 60 fixes the fixing of the workpiece 3 in the standing posture, and the workpiece 3 is sucked and held by the respective adsorption portions 25 (25a to 25d) of the delivery portion 20.

In this manner, the respective pressing cylinders 37 (37a to 37d) of the pressing portion 35 compress the corresponding pressing members 73 (73a to 73d), whereby the fixed state of the workpiece 3 can be released.

Then, in a state in which the outer edge portion 4a of the workpiece 3 abuts against the plurality of movable clamping portions 61 (61a to 61c) and the fixed clamping portion 62, a plurality of rotary actuators 41 (41a to 41c) are formed. The 1 drive unit operates to swing the rockers 42 (42a to 42c). Thereby, the movable guides 67 (67a to 67c) of the movable holding portions 61 (61a to 61c) are moved in the direction away from the pressing frame 72.

Then, the transport unit 50 is moved from the fixed position P12 of the delivery position P10 to the release position P11 (see FIGS. 1 and 2). Thereby, the rollers 39 (39a to 39d) at the tips of the respective extrusion cylinders 37 (37a to 37d) compress the corresponding pressing members 73 (73a to 73d) and rotate them on the pressing members 73 (73a to 73d). . Therefore, the conveying unit 50 moves in the conveying direction in a state where the pressing frame 72 has been separated from the workpiece 3. Further, in a state where the pressing frame 72 is separated from the workpiece 3, the outer edge portion 4a of the workpiece 3 is separated from the side end surface 68b (Fig. 10) of the fixed guide 68. As described above, according to the main release step, the fixed state of the workpiece 3 fixed by the fixing mechanism 60 can be satisfactorily released.

Then, the transfer portion 20 is moved (oscillated) by the swing portion 30, whereby the workpiece 3 held by the delivery portion 20 is separated from the fixing mechanism 60 of the transfer unit 50. After the workpiece 3 is separated from the fixing mechanism 60, the plurality of pressing cylinders 37 (37a to 37d) of the pressing cylinders 37 (37a to 37d) are retracted, whereby the pressing frame 72 is moved in the pressing direction (arrow AR2 direction). The lifting step of the workpiece 3 is completed.

<4. Composition of non-contact holding unit>

Fig. 14 is a front view showing an example of the configuration of the non-contact holding unit 80. Here, the non-contact holding unit 80 assists the non-contact holding of the first main surface 3a of the workpiece 3 that is held and held by the transport unit 50 as described above. As shown in FIG. 14, the non-contact holding unit 80 mainly includes a mounting base 81, a plurality of first suction portions 83, and a plurality of second suction portions 84.

Here, in the present embodiment, the "first suction portion" of the symbol 83 and the "second suction portion 84" of the symbol 84 are collectively referred to as "suction portion". That is, the plurality of suction portions include a plurality of first suction portions 83 and a plurality of second suction portions 84.

The mounting table 81 is disposed to face the transport unit 50 that has traveled to the breaking position P20. As shown in FIG. 2, the mounting table 81 is fixed to the main body unit 40. Further, as shown in FIGS. 1 and 14, the vertical surface 81a of the mounting table 81 serves as a mounting surface on which a plurality of first suction portions 83 and a plurality of second suction portions 84 are mounted.

The insertion hole 81b is a through-hole that extends in the vertical direction (the direction parallel to the Z-axis), and is formed in the vicinity of the center of the mounting base 81. The first breaking bar 86 reaches the first main surface 3a of the workpiece 3 via the insertion hole 81b.

As shown in FIGS. 1 and 14, a plurality of suction portions (a plurality of first suction portions 83 and a plurality of second suction portions 84) are provided on the vertical surface 81a of the mounting table 81. The plurality of suction portions attract the first main surface 3a of the workpiece 3 that stands upright, thereby holding the workpiece 3 in a non-contact state. Here, in the present embodiment, a Bernoulli chuck can be used as the plurality of first suction portions 83 and the plurality of second suction portions 84.

As shown in FIG. 14, a plurality of (12 in the present embodiment) first suction portions 83 are provided on the mounting table 81 in a state along both sides in the longitudinal direction of the insertion hole 81b formed in the mounting table 81. On the vertical plane 81a. Each of the first suction portions 83 is constituted by, for example, a Bernoulli chuck. Thereby, the workpiece 3 can be held in a non-contact state by sucking the opposing workpiece 3 by each of the first suction portions 83.

As shown in FIG. 14, a plurality of (12 in the present embodiment) second suction portions 84 are provided on the vertical surface 81a of the mounting table 81 in a state in which a plurality of first suction portions 83 are sandwiched from both sides. . Similarly to the first suction unit 83, each of the second suction portions 84 is constituted by, for example, a Bernoulli chuck. As a result, each of the second suction portions 84 attracts the workpiece 3 in the same direction as the first suction portion 83, whereby the workpiece 3 can be held in a non-contact state.

Here, as shown in FIG. 14, the diameter of each of the first suction portions 83 is smaller than the diameter of each of the second suction portions 84. Further, as shown in FIG. 14, the interval D1 (first interval) between the adjacent first suction portions 83 of the plurality of first suction portions 83 is smaller than the second attraction adjacent to the plurality of second suction portions 84. The portions 84 are spaced apart from each other by D2 (second interval).

In this manner, the plurality of first suction portions 83 are arranged more densely than the plurality of second suction portions 84. Thereby, the workpiece 3 (in other words, the workpiece 3 in the vicinity of the first breaking bar 86) in the vicinity of the insertion hole 81b can be more reliably held in contact. Therefore, the breaking of the brittle material substrate 7 can be performed favorably.

<5. Composition of the breaking unit>

Fig. 15 is a plan view showing an example of the configuration of the breaking unit 85. Here, the breaking unit 85 divides the brittle material substrate 7 that is held in the holding state by the conveying unit 50 and the non-contact holding unit 80 along the scribe line 8. As shown in FIG. 15, the breaking unit 85 mainly includes a first breaking bar 86 and a plurality of second breaking bars 87.

The first breaking bar 86 advances and retreats so as to reach the side of the conveying unit 50 via the insertion hole 81b. As shown in FIG. 14 and FIG. 15, the first breaking bar 86 extends in one direction (the longitudinal direction of the insertion hole 81b, the Z-axis direction) (hereinafter simply referred to as "extension direction") along the insertion hole 81b of the mounting table 81.

A plurality of (two in the present embodiment) second breaking bars 87 sandwich the workpiece 3 held by the conveying unit 50 and are disposed on the opposite side of the first breaking bar 86. Each of the second breaking bars 87 extends in a direction (Z-axis direction) parallel to the first breaking bars 86.

Here, as shown in FIG. 15, the plurality of second breaking bars 87 in the conveying direction (the direction of the arrow AR1) are disposed only by the desired distance D3. Further, as shown in FIG. 15, the second breaking bar 87, the first breaking bar 86, and the second breaking bar 87 are sequentially oriented in the direction from the delivery position P10 toward the breaking position P20 (the negative direction of the Y axis). Configuration.

Further, the first breaking bar 86 is from the side of the first main surface 3a on the opposite side to the second main surface 3b on which the scribe line 8 is formed (in this case, the first breaking bar 86 abuts against the dicing sheet 5) The load is given along the scribe line 8.

In other words, the load is applied to the scribe line 8 from the first main surface 3a on the side opposite to the second main surface 3b on which the scribe line 8 is formed. Therefore, the breaking of the brittle material substrate 7 along the scribe line 8 can be performed satisfactorily and reliably.

The first advance/reverse drive unit 86a applies a driving force to the first breaking bar 86, and advances and retreats the first breaking bar 86 in the advancing and retracting direction (in the direction of the arrow AR6, see FIG. 15). For example, the first advance/reverse drive unit 86a moves the first breaking bar 86 in the negative X-axis direction in a state where the extending direction of the first breaking bar 86 is substantially parallel to the scribe line 8, thereby causing the first breaking bar 86. It is close to the first main surface 3a of the brittle material substrate 7.

The second advance/retract drive unit 87a applies a driving force to the plurality of second breaking bars 87, and advances and retreats the plurality of second breaking bars 87 in the advancing and retracting direction (in the direction of the arrow AR6, see FIG. 15). For example, the second advance/retract drive unit 87a moves the plurality of second breaking bars 87 in the positive X-axis direction in a state in which the extending direction of the plurality of second breaking bars 87 is substantially parallel to the scribe line 8, thereby making a plurality of The second breaking bar 87 is close to the second main surface 3b of the brittle material substrate 7.

When the first and second breaking bars 86 and 87 are advanced and retracted by the first and second advancing and retracting driving units 86a and 87a, the brittle material substrate 7 is subjected to the first and second breaking bars 86 and 87. Clamping. As a result, the brittle material substrate 7 in the standing posture is broken along the scribe line 8.

In other words, in the breaking process performed by the substrate breaking device 1, the direction of the first and second breaking bars 86, 87 close to the brittle material substrate 7 (the direction of advancement and retreat (arrow AR6 direction)) is relative to gravity. The direction (Z-axis negative direction) is approximately vertical.

Thereby, the influence of gravity on the first and second split bars 86, 87 is the same. Therefore, it is not necessary to take measures for reducing the influence of gravity for each of the first and second breaking bars 86, 87, and the brittle material substrate 7 can be well separated.

<6. Advantages of the substrate breaking device of the present embodiment>

As described above, in the substrate cutting device 1 of the present embodiment, when the brittle material substrate 7 is held by the transport unit 50 (holding unit), the first and second breaking bars 86 and 87 are placed to stand up. The two main faces 3a, 3b of the brittle material substrate 7 are held in a posture.

Here, unlike the present embodiment, the first and second breaking bars are disposed above and below the brittle material substrate, and the first and second breaking bars are respectively from the upper side and the lower side of the brittle material substrate. The side is close. In this case, the angle between the first and second breaking bars in the direction close to the brittle material substrate and the direction of gravity is about 0 (deg) and 180 (deg), respectively. That is, gravity has different effects on the first and second split bars. As a result, when the adjustment of the influence of gravity is not performed, there is a problem in that the load applied to the brittle material substrate from the first and second breaking bars is different.

Next, in the present embodiment, the first and second breaking bars 86 and 87 are brought close to each other on the two main faces 3a and 3b of the brittle material substrate 7 held in the standing posture. In this case, the angle between the first and second breaking bars 86, 87 in the direction close to the brittle material substrate 7 and the direction of gravity is about 90 (deg).

Thereby, the influence of gravity on the first and second split bars 86, 87 is the same. Therefore, it is not necessary to take measures for reducing the influence of gravity for each of the first and second breaking bars 86, 87, and the brittle material substrate 7 can be well separated.

Further, according to the substrate cutting device 1 and the fixing mechanism 60 of the present embodiment, the outer edge portion 4a of the workpiece 3 is well sandwiched by the movable clamping portion 61 (61a to 61c) and the fixed clamping portion 62 and the pressing portion 71. hold. Therefore, the workpiece 3 in the standing posture can be satisfactorily fixed.

Further, in the substrate cutting device 1 and the conversion posture unit 10 of the present embodiment, the fixing mechanism 60 of the conveying unit 50 performs the fixing of the workpiece 3 and the workpiece 3 by the load applied from the pressing portion 35 of the conversion posture unit 10. Unfixed. In other words, the transport unit 50 does not need to perform the fixation of the workpiece 3 and the release of the workpiece 3, and it is not necessary to arrange the piping and the wiring related to the element on the moving side (the transport unit 50) and the fixed side (for example, the change posture). Between unit 10, etc.). Therefore, by using the change posture unit 10, it is possible to improve the safety of the transport unit 50 during traveling and the work efficiency of the worker during maintenance.

Further, in the transport system realized by the substrate cutting device 1 of the present embodiment, a plurality of rotary actuators 41 (41a to 41c) from the main body unit 40 and the change posture unit 10 (fixed side unit) are used ( The driving force of the first driving unit and the plurality of pressing cylinders 37 (37a to 37d) (second driving unit) performs fixing of the workpiece 3 and release and fixing of the workpiece 3.

In other words, the transport unit 50 does not need to be configured to perform the fixing of the workpiece 3 and the drive unit (the first and second drive units) for releasing the workpiece 3, and it is not necessary to arrange the piping and the wiring related to the element on the moving side (transport) The unit 50) is located between the fixed side (the transformation posture unit 10 and the main body unit 40). Therefore, it is possible to improve the safety of the transport unit 50 during traveling and the work efficiency of the worker during maintenance.

Further, the substrate cutting device 1 of the present embodiment and the holding device realized by the substrate cutting device 1 are not only brought into contact with the outer edge portion 4a of the workpiece 3 by the fixing mechanism 60 of the conveying unit 50, but also by non-contact. The holding unit 80 holds the main surface of the workpiece 3 (more specifically, the first main surface 3a) in a non-contact manner. Therefore, even if it is impossible to contact and hold the outer edge portion 4a of the workpiece 3 (for example, the main faces 3a, 3b of the workpiece) due to the characteristics of the workpiece 3, the transport unit 50 (holding unit) and the non-transfer unit can be used. The holding unit 80 is contacted to hold the workpiece 3 well.

<7. Modifications>

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

(1) In the present embodiment, the movable guides 67 (67a to 67c) and the guide claws 69 (69a to 69c) are configured to be independent of each other as shown in Figs. 8 and 9, but the invention is not limited thereto. For example, the movable guide 67 (67a) and the guiding claw 69 (69a) may be formed integrally.

(2) In the present embodiment, the transport unit 50 has been described as moving with respect to the transformation posture unit 10 and the main body unit 40, but the present invention is not limited thereto. For example, the transformation posture unit 10 and the main body unit 40 may be moved with respect to the transport unit 50.

As described above, the movement mode of each of the units 10, 40, and 50 may be such that the transport unit 50 relatively moves with respect to the transformation posture unit 10 and the main body unit 40 (fixed side unit).

(3) In the present embodiment, the workpiece confirmation sensor 15 (see FIGS. 4 and 5) of the conversion posture unit 10 is provided only in the vicinity of the elevation table 21, but the number of the workpiece confirmation sensors 15 is not Limited to this. A plurality of (two or more) workpiece confirmation sensors 15 may be provided in the vicinity of the elevation table 21.

1. . . Substrate breaking device

3. . . Workpiece

3a. . . First main face

3b. . . Second main face

4. . . Cutting ring

4a. . . Outer edge

4b. . . Opening

5. . . Cutting piece

7. . . Brittle material substrate

8. . . Cross-line

9. . . Electronic parts

10. . . Transform gesture unit

11 (11a~11d). . . Support department

12 (12a~12d). . . Ball

13 (13a~13d). . . Positioning handle

15. . . Workpiece confirmation sensor

20. . . Intersection

20a. . . Base

twenty one. . . Lifts

21a. . . center

23 (23a~23d). . . Holding claw

25 (25a~25d). . . Adsorption section

26 (26a~26d). . . Arm

27 (27a~27d). . . front end

28. . . Handover cylinder

28a. . . Main body

29. . . Pull rod

30. . . Swing part

30a, 30b. . . Bearing

30c, 30d. . . bracket

31. . . Swing axis

32. . . Swing box

32a~32c. . . Plate body

33. . . Swing cylinder

33a. . . Main body

34. . . Pull rod

34a. . . front end

35. . . Extrusion

35a. . . Installation box

36 (36a~36d). . . bracket

37 (37a~37d). . . Extrusion cylinder

38 (38a~38d). . . Pull rod

39 (39a~39d). . . Roll

40. . . Main unit

41 (41a~41c). . . Rotary actuator

42 (42a~42c). . . Rocker

43, 44. . . Guide

50. . . Transport unit

51. . . Fixed table

51a. . . Through hole

51b. . . positive

52. . . Rotary table

60. . . Fixing mechanism

60a, 68a. . . gap

60b. . . Step surface

60c. . . Lower end

60d. . . Opposite face

61 (61a~61c), 62. . . Grip

63. . . Abutment

64. . . Rotating plate

65. . . link

66, 73 (73a ~ 73d). . . Pressure member

67 (67a~67c). . . Movable guide

68. . . Fixed guide

69 (69a~69d). . . Guide claw

71. . . Extrusion

72. . . Squeeze box

75 (75a~75d). . . gap

80. . . Non-contact holding unit

81. . . Mounting table

81a, 81b. . . Insertion hole

83. . . First attraction

84. . . Second attraction

85. . . Breaking unit

86. . . 1st break

86a. . . First forward and backward drive unit

87. . . 2nd break

87a. . . 2nd advance and retreat drive unit

90. . . control unit

91. . . Read only memory

91a. . . Program

92. . . Random access memory

93. . . Central processing unit

AR1, AR2, AR3. . . arrow

D1, D2. . . Interval (1st and 2nd intervals)

P10. . . Handover location

P11. . . Release position

P12. . . Fixed position

P20. . . Breaking position

1 is a front view showing an example of a configuration of a substrate cutting device in an embodiment of the present invention;

Fig. 2 is a rear elevational view showing an example of a configuration of a substrate cutting device in an embodiment of the present invention;

Figure 3 is a front view showing an example of the structure of the workpiece;

4 is a side view showing an example of a configuration of a transformation posture unit;

Fig. 5 is a plan view showing an example of a configuration of a transformation posture unit;

Fig. 6 is a front view showing an example of a configuration of a transport unit;

Fig. 7 is a rear elevational view showing an example of a configuration of a transport unit;

Figure 8 is a front elevational view showing an example of a configuration of a movable grip portion;

Figure 9 is a cross-sectional view of the vicinity of the guiding claw viewed from the line V-V of Figure 8;

Figure 10 is a cross-sectional view of the vicinity of the guiding claw viewed from the W-W line of Figure 7;

Figure 11 is a view for explaining a fixing step of the fixing mechanism to the workpiece and a step of releasing the fixing step;

Figure 12 is a view for explaining a fixing step of the fixing mechanism to the workpiece and a step of releasing the fixing step;

Figure 13 is a view for explaining a fixing step of the fixing mechanism to the workpiece and a step of releasing the fixing step;

Figure 14 is a front view showing an example of the configuration of the non-contact holding unit;

Fig. 15 is a plan view showing an example of the configuration of the breaking unit.

3. . . Workpiece

3a. . . First main face

7. . . Brittle material substrate

twenty one. . . Lifts

23 (23a~23d). . . Holding claw

28. . . Handover cylinder

60. . . Fixing mechanism

67 (67a~67c). . . Movable guide

68. . . Fixed guide

73 (73a~73b). . . Pressure member

75 (75a~75d). . . gap

AR2, AR3. . . arrow

Claims (4)

A fixing mechanism for fixing a flat workpiece in an upright posture, and comprising: (a) a pressing portion that presses an outer edge portion of the workpiece; and (b) a plurality of clamping portions Each of the outer edge portions of the workpiece disposed between the pressing portion and the pressing portion; the pressing portion includes: (a-1) an annular pressing frame; and (a-2) a pressing member The outer edge portion of the workpiece is fixed between the pressing frame and each of the clamping portions by applying a pressing force to the pressing frame; and each of the plurality of clamping portions is along the pressing frame Provided that one of the plurality of clamping portions has a movable clamping portion of the movable guiding member; the remaining portion of the plurality of clamping portions is a fixed clamping portion fixed near the pressing frame; the movable guide The member advances and retreats in a direction approaching or departing from the pressing frame, and the workpiece is held between the pressing frame and the clamping state. The fixing mechanism of claim 1, wherein the workpiece comprises: an annular body having an opening formed in a center of the flat plate; and a sheet body mounted to cover the opening of the annular body; and The brittle material substrate is attached to the sheet body so as to be located on the opening. A method for fixing a workpiece, characterized in that it fixes a flat workpiece to a fixing mechanism, the fixing mechanism comprising: a pressing portion that presses an outer edge portion of the workpiece; and a plurality of clamping portions, Each of the outer edge portions of the workpiece disposed between the pressing portion and the pressing portion; the pressing portion includes: an annular pressing frame; and a pressing member that applies pressure to the pressing frame And the outer edge portion of the workpiece is fixed between the pressing frame and each clamping portion; the plurality of clamping portions include: a movable clamping portion that advances and retreats in a direction approaching or departing from the pressing frame And a fixed clamping portion fixed in the vicinity of the pressing frame; each of the plurality of clamping portions is disposed along the pressing frame; and the fixing method of the workpiece comprises the following steps: a) causing the workpiece to be a standing posture and moving to the vicinity of the fixing mechanism; b) moving each movable clamping portion in a direction away from the pressing frame; c) causing the pressing frame to be applied to the pressing frame by the pressing member The pressure is pressed in the opposite direction Movement; D) by making the fixing nip portion with respect to the workpiece relative to Moving, the outer edge portion of the workpiece is brought into contact with the fixed clamping portion; e) after the step d) is performed, the movable clamping portions are moved in a direction close to the pressing frame, thereby The outer edge portion of the workpiece abuts against each of the movable clamping portions; and f) after the step e) is performed, the pressing frame is moved in the pressing direction, whereby the workpiece in the standing posture is fixed by the fixing The organization is fixed. A method for releasing a workpiece, which is characterized in that a fixing member of a flat-shaped workpiece fixed to a fixing mechanism is released; and the fixing mechanism includes: a pressing portion that presses an outer edge portion of the workpiece; and plural a clamping portion each sandwiching the outer edge portion of the workpiece disposed between the pressing portion; the pressing portion comprising: an annular pressing frame; and a pressing member by The pressing frame is biased to fix the outer edge portion of the workpiece between the pressing frame and each of the clamping portions; the plurality of clamping portions include: a movable clamping portion that is opposite to the pressing frame And a fixed clamping portion fixed to the vicinity of the pressing frame; and the method for releasing and fixing the workpiece includes the following steps: a) abutting the plurality of the outer edge portions of the workpiece In the state of the movable clamping portion and the fixed clamping portion, the pressing frame is oriented The pressing member moves in a direction opposite to the pressing direction of the pressing frame, and the fixing of the workpiece is released by the fixing mechanism; b) abutting the fixed edge on the outer edge portion of the workpiece In the state of the portion, after the step a) is performed, the movable clamping portions are moved in a direction away from the pressing frame; c) by moving the fixed clamping portion relative to the workpiece, The outer edge portion of the workpiece is separated from the fixed clamping portion; and d) the workpiece is separated from the fixing mechanism.